WO2001073374A1

WO2001073374A1 - Measuring microscope

Info

Publication number: WO2001073374A1
Application number: PCT/CH2001/000165
Authority: WO
Inventors: Roman BÜCHLER
Original assignee: Buechler Roman
Priority date: 2000-03-27
Filing date: 2001-03-16
Publication date: 2001-10-04
Also published as: AU4039701A

Abstract

The invention relates to a measuring microscope comprising an electronic camera (5) which can be positioned in a direction X, Y and Z in relation to an object (3), using drives (9, 10, 15). Said microscope comprises a screen (21), on which the image from the camera (5) can be displayed and a personal computer (20) that can be operated using a keyboard (22) and a manipulator (23). According to the invention, the drives (9, 10) are simple, motor-driven linear guide systems, in which a carriage can be displaced in relation to a base using belts. An optical sensor, which is displaced with the travel of the carriage along a glass scale that is fixed to the base and provided with graduations, is connected to each inventive carriage. A sensor located in the carriage generates an exact position signal (xX; xY), by scanning the graduations. A high degree of measuring precision is achieved despite a less accurate positioning. Measuring microscopes of this type are used to great advantage in various sections of production and control departments.

Description

measuring microscope

The invention relates to a measuring microscope of the type mentioned in the preamble of claim 1

Such measuring microscopes are used when it is important to measure dimensions of small objects. This can involve distances or distances, for example layer thicknesses or diameters of objects, but also area contents, angles and the like

Such measuring microscopes are advantageously used in various areas of manufacturing and control departments. In particular, if such measuring microscopes have to be used for a long period without interruption, the construction of the measuring microscope plays a major role, because it determines the body posture and the risk of fatigue very significant

Simple measuring microscopes have an optical system consisting of an objective and an eyepiece. In most cases, the objective and the eyepiece are interchangeable. In the beam path, for example in an eyepiece, a glass plate with a structure such as a scale, crosshairs and the like is arranged, which is used to measure objects attached to a movable slide Most of the time, the slide can be moved in the X and Y directions, while the shift in the Z direction is achieved in that the optical system can be moved in the Z direction relative to the slide by adjusting the corresponding X, Y - And sterndrives, which are operated manually with simple measuring microscopes, can be achieved that the desired object is sharply imaged in the field of view of the measuring microscope. Dimensions of smaller objects are measured using a scale shown in the eyepiece, dimensions of larger objects using a crosshair and by moving n of the object in the X or Y direction, whereby the distance traveled is read for manual drives on the X or Y drive. To increase the resolution, the drive drum often has a vernier. It is also possible to measure dimensions in the Z direction , The shallow depth of field can be exploited by optical devices. As an alternative to λ ^' measurement using a vernier, the Known prior art shifts also recorded with the help of glass scales and evaluation units. The X, Y and Z drives must be largely free of play in order to achieve high measuring accuracy. Accordingly, the designs of such drives are very complex and therefore expensive. A device for adjusting the play is in DE-Al-35 31 833

A measuring microscope of the type mentioned in the preamble of claim 1 is known from DE-Al-37 41 735. Here, the movement in the X and Y directions is effected by threaded spindles driven by stepper motors, through which nuts are moved, with which the table is then moved The positioning accuracy depends on the size of a step of the stepper motor. In the Y direction, there is a ball length guide.The microscope is operated via a computer and a control lever, focus and zoom switch, the image generated by a television camera being displayed on a color television screen is displayed while further information is shown on a text display

From EP-A2-0 908 751 an optical device is known which can be used as a telescope or microscope. Here, the object is detected by means of CCD photodiode arrays, the signals of which are forwarded to an image memory via analog-digital converters and stored there For example, an image is displayed on a liquid crystal display

WO-A2-99 / 21042 shows a highly precise microscope system that enables automatic image analysis with the aid of an integrated computer system, in particular for microbiological examinations. The object is viewed using a conventional eyepiece system, but there is also a screen on which the objects can be viewed This microscope system also finds a D3M-compatible personal computer on which the Microsoft Windows operating system is installed

In the subject of WO-Al-90/1 1486, in addition to the optical system with an eyepiece, there is also an electronic camera which produces an image which can be displayed on a video monitor. A computer of the type of a conventional personal computer is also present, on which there is also a mouse is connected in one synthetically generated image, a point is displayed which changes its position analogous to the movements of the mouse. The synthetic image and the object image are processed in a mixing device, so that the object image with the superimposed point can be seen on the screen with the help of the other system components With the help of this device, a line connecting the two points can be displayed after measuring two points. This simplifies the work and increases the quality of the measurements

The invention has for its object to provide a particularly inexpensive, yet accurate measurements measuring microscope, can be worked on for a long time without tiring and with the help of recurring measurement tasks can be solved time-saving and very precise

The stated object is achieved according to the invention by the features of claim 1. Advantageous further developments result from the dependent claims

The accuracy of measuring microscopes is determined according to the known state of the art, if a crosshair is arranged in the optical beam path, very much determined by the positioning device for the measuring table. In particular, a very high backlash must be ensured. According to the invention, simple, inexpensive drives can now be provided To use generation of the relative movement of the object to the camera in the plane parallel to the camera plane. Even if this does not result in a particularly precise positioning of the object relative to the camera or the camera relative to the object, high accuracy of measurements on the object can be achieved according to the invention in that Position detection units that work very precisely for the two possible movement axes are provided and that the inaccurate positioning is compensated for by moving a crosshair or another measuring mark on a screen to approach the measuring point

An exemplary embodiment of the invention is explained in more detail below with reference to the drawing

1 shows a diagram of the measuring microscope with all essential elements,

2 is a view of the microscope part with its drives and guides, 3 shows a spindle drive including position detection unit,

Fig. 4 is a diagram of a screen display and

5 and 6 schemes of advantageous exemplary embodiments for measurements in the Z direction

1, reference number 1 denotes a measuring table, which advantageously has a transparent plate 2 on which an object 3 to be measured is placed, which can be fastened on the measuring table 1 in a suitable manner. A camera module 4 is located on the object 3 directed, which in addition to an electronic camera 5 also includes a reflected light unit 6, which is shown only schematically in FIG. 1. The reflected light unit 6 generates coaxial and lateral reflected light, which is indicated in FIG. 1 by arrows below the camera module 4. In order to transparent objects To be able to view and measure through holes with transmitted light, the measuring microscope is also equipped with a transmitted light unit 7

Advantageously, the incident light unit 6 and the transmitted light unit 7 contain light-emitting diodes as light sources.These can advantageously be diodes whose light is practically monochromatic.Therefore, high demands are not placed on the optics.When using inexpensive, non-color-corrected lens systems, there are no color errors, so that a high display quality is given For many applications, however, white light is desired, so that light-emitting diodes are then advantageously used which generate UV rays and contain a layer which converts these UV rays into white light

A USB camera, such as is offered inexpensively under the name webcam, is advantageously used as the camera 5. A series product is also suitable as a lens, for example a telecentric lens from Leica , so that such an eyepiece is omitted. This also eliminates the stressful sitting position of the user when viewing the object through such an objective A cross table 8 is arranged behind the measuring table 1 so that the travel plane is offset to the rear relative to the measuring table plane and is parallel to it

Transmitted light unit 7 is fastened to the cross table 8, even if this cannot be seen from FIG. 1, so that its light axis always coincides with the optical axis of the camera module 4

A fluorescent film which is glued to a support can advantageously be used as the transmitted light unit 7. Such fluorescent films produce visible light by applying an electrical voltage. The film can be large enough to cover the entire range of movement in the X and Y directions such a film does not have a light axis, it does not matter if it coincides with the optical axis of the camera module 4. There is therefore great freedom in the placement of the transmitted light unit 7

The cross table 8 can be displaced horizontally in the X and Y directions, the movement in the X direction being carried out by means of an X drive 9 and that in the Y direction being carried out by means of a Y drive 10. According to the invention, a position detection unit is assigned to each of the axes , namely the X axis an X position detection unit 11 and the Y axis a Y position detection unit 12

The camera module 4 is fastened to an arm 13, which can be displaced in the Z direction along a support column 14. The camera 5 can thus be displaced vertically relative to the object 3, which on the one hand enables the focus and on the other hand the measurement of Z components on the object 3 serves The displacement takes place with the help of a Z-drive 15 and can be detected by means of a Z-position detection unit 16. The support column 14 in turn is fixedly mounted on the cross table 8

The Z position detection unit 16 can advantageously also be a system in which the distance in the Z direction is measured by means of a laser beam, which will be shown later

The drives for the three axes, that is the X drive 9, the Y drive 10 and the Z drive 15, are connected to an axis controller 17 via electrical lines, as are the position detection units 11, 12 and 16 from the axis controller 17 the corresponding lines the motors of the drives 9, 10 and 15 directly Controlled The position detection units 11, 12 and 16 are monitored by the axis controller 17. The axis controller 17, on the other hand, is connected to a bus 18 to which a light controller 19 and a personal computer 20 are also connected. From the light controller 19, electrical lines lead to the lighting devices, namely to the incident light unit 6 and the transmitted light unit 7

It should be mentioned here that in the exemplary embodiment shown, the camera 5 can be displaced horizontally by means of the X drive 9 and the Y drive 10 and vertically by means of the Z drive 15 relative to the measuring table 1. Within the scope of the invention, only the relative movement is important in the plane parallel to the image plane, so that other configurations are also possible according to the invention. For example, the measuring table 1 can be moved relative to the camera 5 by means of the X drive 9 and the Y drive 10, and the camera 5 can be moved using the Z drive 15 be movable relative to the measuring table 1

Commercial personal computers 20 have several interfaces to which peripheral devices can be connected A screen 21 is connected to one of these usual interfaces, a keyboard 22 is connected to another interface. A manipulator 23 is connected to another interface, with which the personal computer 20 is used in addition to the keyboard 22 can be operated A manipulator 23 can be a mouse or a trackball, for example.

The bus 18, which is used for the command and / or data exchange between the personal computer 20 and the axis controller 17 on the one hand and the light controller 19 on the other hand, is advantageously designed as a field bus, for example as a CAN bus. Control signals Sx, S ^ and Sz for the drives 9, 10 and 15 run on the one hand via this bus 18 and on the other hand position signals

xy and x _z , which come from the position detection units 11, 12 and 16, because commercially available personal computers 20 do not have an interface for such a fieldbus, there is a converter 24 at one of the usual interfaces of the personal computer 20, for example at a parallel interface converts the signals in both directions. The control signals Sx, S ^, and Sz from the personal computer 20 for the drives 9, 10 and 15 are converted from the parallel data format into the bus format and those coming from the position detection units 1 1, 12 and 16

Position signals \\, xγ and x /, are converted from the bus format into a parallel data format converted The axis controller 17 generates the bus format from the position signals x, x _γ and x _z and converts control signals Sx, S _γ and S _z arriving in the bus format into control commands for the drives 9, 10 and 15. The data are also transmitted on the bus 18. which the light controller 19 needs in order to control the incident light unit 6 and the transmitted light unit 7. The converter 24 can be designed as a so-called dongle, but alternatively also as an interface card that is built into the personal computer 20

The camera 5 is connected to the personal computer 20 via an image line 25, which is advantageously designed as a USB bus. This enables the image of the object 3 generated by the camera 5 to be displayed on the screen 21 of the

Personal computer 20 is shown This image is advantageously displayed on the screen 21 within an object window 25, the size of which can be changed so that it can be adapted to the respective measurement task. Additional windows are arranged on the screen 21, which can be positioned by the user and in their Large changes are possible. They can partially overlap and can be brought to the foreground in a known manner by clicking with an operating button of the manipulator 23. In addition to the object window 25, a work window, an action window, a key data window and a symbol window can be arranged on the screen 21, plus one Menu bar and any other windows This ensures that the operator always has all information, namely the image of object 3 and all data created by measurement, in view at the same time. This contributes significantly to fatigue-free work

The function of the measuring microscope is described below. After the object 3 is positioned on the measuring table 1, the image of the object 3 supplied by the camera 5 is visible in the object window 25 on the screen 21. If the manipulator 23, which is, for example, a mouse, is moved, a pointer, which is usually referred to as a cursor, moves in the object window 25. According to the invention, the pointer can have different shapes. The pointer can consist of a vertical and a horizontal line, from the top to the bottom or from the left to the right edge of the object window 25 This shape of the pointer is called a large crosshair. Another shape of the pointer is similar, but it is a short line that also forms a crosshair. This shape is called a small crosshair and Y coordinates determine If the pointer is brought to a specific pixel of the object 3, its X, Y and Z coordinates can be determined by the position of the pointer and the position of the arm 13 by operating a button on the manipulator 23, commonly referred to as clicking the coordinate values are stored in the personal computer 20. The point stored in this way can be identified in the object window by means of a mark, for example a small crosshair. If the manipulator 23 is subsequently moved to another image point of the object 3 and clicked there again, the X, Y, and the Z coordinates are stored again. The program running on the personal computer 20 is now able to use the X and Y coordinates of the two pixels to determine their relative relationship in the form of X distance, Y distance and / or direct

Determine distance This data can also be saved. In this way, features of the object 3 can be avoided

In a further operating mode of the measuring microscope, the object 3 can be shifted relative to the camera 5 in the X, Y and Z directions with the aid of the manipulator 23. The user selects this operating mode, for example using the keyboard 22 or by operating a menu using the Manipulator 23, the pointer automatically taking the form of an arrow when the pointer comes into the area of the menu, the pointer changes its shape again and now has, for example, the shape of a flat hand. If the operator leads the pointer to an arbitrary pixel and presses now a control button of the manipulator 23, the pointer changes its shape again and now takes the form of a holding hand. If the manipulator 23 is now moved, its movements in the X and Y directions become control signals Sx and Sy for the X drive 9 and the Y drive 10 implemented. Thus, the camera 5 is moved relative to the object 3 in the X and Y directions, so that the camera 5 a different part of the Provides object 3 to object window 25 During the movement of manipulator 23, camera 5 thus moves relative to object 3 itself and also its image in object window 25

While this movement is taking place, this movement is detected by the position detection units 11 and 12 and their position signals x and xy are transmitted to the personal computer 20 via the axis controller 17 and the bus 18. The individual pixels within the object window 23 are now assigned other coordinates According to the invention, the measurement accuracy is determined by the accuracy of the position detection of the position of the object relative to the position of the camera and the smallest possible displacement movement of the crosshair. It is therefore not important that the object can be positioned very precisely as long as its position is exactly known and to measuring point on the screen can be approached with the crosshair. Instead of a crosshair, another form of a measuring mark can be used, for example a circle whose size can be changed

2 shows a view of the microscope part with its drives and linear guides. The measuring table 1 is firmly anchored on a base plate 30. A microscope column 31 is displaceable relative to the base plate 30. For this purpose, guide rails 32 are fixedly mounted on the base plate 30, on which the microscope column 31 carrying X-slide 33 is horizontally displaceable in the X-direction. The drive of the X-slide 33 is served by a threaded spindle 34 which is mounted in a fixed bearing 35 on the one hand and a floating bearing 36 on the other hand. A nut (not shown) is contained in the X-slide 33, which is in engagement with the threaded spindle 34 ^* If the threaded spindle 34 rotates, this engagement causes the slide 33 to move along the guide rails 32, the direction of movement being determined by the direction of rotation of the threaded spindle 34. The rotation of the threaded spindle 34 takes place with the aid of a first motor 37, the pinion 38 of which the movement ng is transmitted to the threaded spindle 34 by means of a belt 39, a pinion also being present on the threaded spindle 34. The pinion 38 and the belt 39 are examples of particularly simple transmission elements in the transmission of the rotary movement from the motor 37 to the threaded spindle 34 So indirectly driven by the motor 37 Instead of the pinion 38 and belt 39, other simple transmission elements can also be used

According to the general idea of the invention, a direct and thus backlash-free transmission of the rotary movement is not necessary, because the accuracy of the measurement is not impaired even when using very simple transmission elements that are not backlash-free. Thus, the manufacturing costs for such a measuring microscope can be kept very low without negatively changing the accuracy of measurements The displaceability in the Y direction is achieved analogously. Thus, on the slide 33 there are again guide rails 32, of which only one is visible in FIG. 2. An associated further threaded spindle is not visible. This is also mounted in a fixed bearing 35 and a floating bearing 36 The drive for the Y direction also corresponds to that for the X direction with regard to the other parts such as the nut, motor, pinion and belt

The drives for the X and Y directions therefore do not consist of expensive ball screws with corresponding ball nuts and bearings. In the sense of the invention, inexpensive, more frictional screw drives are used in which the rotation of the motor 37 from its pinion 38 by means of the belt 39 is transferred to the threaded spindle 34 With such drives, no positioning tasks can be solved with an accuracy of about 1 μm.The limits are approximately at positioning accuracies of 5 μm. According to the invention, despite this inaccurate positioning, measurements can be made precisely because the crosshairs in the corresponding plane are sufficient strong enlargement can be positioned more precisely The prerequisite for this is an accurate position detection system, as it is present according to the invention

The structure for the drive in the Z direction is basically the same. Rails 32 are arranged on the microscope column 31, on which a housing 51 containing the camera 5 (FIG. 1) and the illumination device can be displaced vertically. Here too, the displaceability is achieved by rotating a threaded spindle 34 achieved Since the measuring accuracy of the Z coordinate is directly dependent on the positioning accuracy of the Z axis, conventional drive solutions are used for high requirements.For example, rolled ball screws with rejected balls and a corresponding nut are used. The fixed bearing 35 and the floating bearing 36 are selected accordingly high positioning accuracy in the Z direction is necessary, but the type previously described for the X and Y axes can also be used. The movement in the Z direction can also be determined using a glass scale 40 and sensor 42, but alternatively also using the \ or mentioned system with one laser beam A measurement of Z-dimension components is not required for measurement and control work in certain areas of application of measuring microscopes. A motor drive in the Z direction can then be omitted and replaced by a manually operated height adjustment. It is advantageous if a motor drive for the Z Direction and an associated position detection system can be retrofitted. Because the axis controller 17 is designed for three axes, this is easily possible. According to the invention, at least two of the three axes are equipped with the drives described

FIG. 3 shows a basic illustration of the drive as it is used in the measuring microscope according to the invention for movements in the X and Y directions. The slide 33 consists of a slide plate 55 and two guide carriages 56. Each of the guide carriages 56 can advantageously consist of two identical guide carriages 56 exist, which are arranged one behind the other. The carriage 33 moves along the rails 32, which are fastened on a base 60. The guide carriage 56 and the guide rails 32 together form a linear guide. This linear guide is largely free of play and has a high degree of parallel running. The base 60 is in the linear guide system for the X direction identical to the base plate 30 (FIG. 2), in the linear guide systems for the Y and Z directions with plates attached to the respective slide 33. The movement is achieved by rotating the in the fixed bearing 35 and in the floating bearing 36 threaded spindle 34 mounted over the belt 39 is driven by the motor 37 The rotation of the threaded spindle 34 is converted into a linear movement of the slide 33 by a nut 61 arranged in the slide 33. As already mentioned, the nut 61 is not a recirculating ball type. Such drives are inexpensive to manufacture are not particularly accurate A high accuracy of the position detection is achieved in that a glass scale 40 is arranged parallel to the rails 32, which has a precise graduation 41. This graduation 41 is scanned by means of an optical sensor 42 arranged in the carriage 33 constructed and inexpensive to produce drive through the combination of the drive with a linear parallel with regard to running parallelism, a highly precise system for position detection and a movable crosshair achieves a high accuracy of the measurement In the example set out above, spindle drives were used. In the context of the invention, however, it is only important that the measuring table 1 does not have to be exactly positionable relative to the camera 5, because the relative position of the measuring table 1 relative to the camera 5 can be determined exactly and the inaccurate positioning of the measuring table 1 is compensated by moving a crosshair.Thus, other transmission elements, such as a belt, pneumatic or hydraulic drive, could also be used.It would also be conceivable that inaccurate types are used instead of the exact linear guides and the inaccuracies of the parallelism of the run through corresponding position detection system can be compensated

In the sense of an example, FIG. 4 shows a diagram of a screen display that has already been mentioned in connection with FIG. 1. The object window 25 is shown on the screen 21, in which an object 70 detected by the camera 5 (FIG. 1) is visible A crosshair 71 which can be moved by means of the manipulator 23 (FIG. 1) is visible in the object window 25. The reference number 71 ^' denotes a position in which the crosshair 71 lies on a prominent point of the object 70. The coordinates associated with this point are, for example, by printing a Key on manipulator 23 can be stored. Reference number 71 ^" denotes a further position in which crosshair 71 lies on a second prominent point on object 70. The coordinates associated with this point can also be stored by pressing a key on manipulator 23. The shifting of the crosshair from Point 71 ^' to point 71 "is carried out by moving the manipulator 23

The coordinates of each measuring point on the object 70 determined in this way are displayed, for example, in a working window 80. These coordinates can then be manipulated in any manner. Results of such manipulations of data can, for example, be displayed in a key data window 81. Measuring program sequences can be displayed in an action window 82 determine how data is treated in series measurements on different objects 70

At the top of the screen there is an area 83, which is arranged in the known manner as menus and symbols for controlling the program and the measuring sequence. The usual scroll bars 84 1 and 84 2 are shown using the example of the object window 25 Noteworthy is an additional scroll bar 84 3 on the right edge of the object window 25. This serves, for example, to control the sterndrive 15 (FIG. 1). In addition to the usual keys, the manipulator 23 has an additional control element such as a scroll wheel with which the Z - Drive 15 can be operated, the actuation of this additional control element leads to a corresponding change in the representation of the scroll bar 84 3

It is essential that both the object 70 and all the data obtained from the measurement of the object 70 and, in addition, all manipulations of such data, are clearly displayed on the screen 21. In this way, it is concentrated and at the same time fatigue-free Work possible

The precise measurement of objects 3 in the Z direction, i.e. high positions on objects 3, reaches its limits if the magnification scale when viewing object 3 is relatively small.These limits are determined by the fact that the depth of field is a function of the magnification scale The depth of field is relatively large, which leads to inaccurate measurements in the Z direction

5 shows an advantageous embodiment that solves this problem. The object 3 arranged on the measuring table 1 has a high structure. With the help of the electronic camera 5, its image is recorded. The optical axis of the object and camera 5 is shown in the beam path a first reflection element 90 is arranged, which is, for example, a semitransparent mirror or a corresponding prism. The light originating from the incident light unit 6, the optical axis of which is denoted by A ^' , can be reflected into the axis A. The optical axis is advantageously in the beam path A ^' a second mirror element 91 is arranged, which is also semi-transparent. This means that a laser beam originating from a laser distance meter 92 with an optical axis A ^{"can be} reflected. The laser beam coming from the laser distance meter 92 is faded into the beam path of the axis A ^' on the mirror element 91 and on the mirror element 90 in the beam path d he axis A, so that it strikes the object 3. From there the laser beam is reflected, deflected at the mirror elements 90 and 91 and reaches the laser distance meter 92 again. In this way, the position of a certain point on the object 3 is Position can be determined The laser distance meter 92 thus delivers a position signal _z. The laser distance meter 92 thus acts as a Z position detection unit 16

Laser distance meters 92 may have a restricted working area. Therefore, it may be advantageous to provide the laser distance meter 92 in addition to the Z position detection unit 16. The actual height information for the

The Z coordinate is then composed of the values of the Z position detection unit 16 and the laser distance meter 92

In this way, distances in the Z direction can also be measured precisely without the camera module 4 and the laser distance meter 92 being able to be positioned exactly. This results in the advantage that an expensive ball screw is not required for the Z axis and is very simple Transmission elements can be used as previously described for the X and Y axes

A further advantageous embodiment is shown in FIG. 6. A laser distance meter 92 for determining Z positions is also present. However, its laser beam is not reflected in the beam path A. The laser distance meter 92 is arranged next to the camera module 4, which consists of an electronic camera 5 and incident light unit 6 (FIG. 1), the optical axis A of the camera module 4 being a distance D is parallel to the optical axis A ^"of the laser distance meter 92. In order to measure an object 3 precisely with regard to Z coordinate points on a small magnification scale, the object 3 is displaced relative to the laser distance meter 92 by the distance D below the laser distance meter 92 and determines the Z dimension It is only a question of the relative movement, so that the camera module 5 and the laser distance meter 92 can also be displaceable in relation to the fixed object 3. The relative displacement of the object 3 from one position to the other can take place done programmatically

The measuring microscope according to the invention in its various advantageous configurations can be produced inexpensively without the accuracy of object measurements being adversely affected

Claims

Patent claims

1 measuring microscope with an electronic camera (5) which can be positioned by means of drives (9, 10, 15) relative to an object (3) in the X, Y and Z directions, the drives (9, 10) for the X and Y directions are linear guide systems driven by a motor (37), one in a floating bearing (36) and one

Fixed spindle (35) holding threaded spindle (34) can be rotated by the motor (37), whereby a slide (33) can be moved by the motor (37) relative to a base (60, 30) along guide rails (32), with a screen ( 21), on which the image of the camera (5) can be displayed, with a personal computer (20), which can be operated by means of a keyboard (22) and a manipulator (23), and with a lighting device (6, 7), characterized .

that transmission members (38, 39) are provided, via which the threaded spindle (34) and thus the slide (33) can be driven indirectly by the motor (37),

- That with the carriage (33) an optical sensor (42) is connected, which are attached when moving the carriage (33) along one on the base (60, 30)

Glass scale (40) with a division (41) moves, and

that the sensor (42) generates a position signal (x _x ; x _γ ) by scanning the division (41)

2 measuring microscope according to claim 1, characterized in that the transmission members (38, 39) consist of a belt (39) and a pinion (38), the belt on the one hand on the pinion (38) of the motor (37) and on the other hand on a pinion the threaded spindle (34) engages

3 measuring microscope according to one of claims 1 or 2, characterized in that control commands for the motors (37) of the drives (9, 10, 15) and position signals (x,

, x _z ) can be transmitted via a bus (18), the bus being connected on the one hand to the personal computer (20) via a converter (24) and on the other hand to parts (17, 19) of the measuring microscope

4 measuring microscope according to claim 3, characterized in that a light controller (19) is connected to the bus (18) through which an incident light source (6) and / or a transmitted light source (7) can be controlled or are

5 measuring microscope according to claim 3, characterized in that an axis controller (17) is connected to the bus (18), through which on the one hand the drives (9, 10, 15) can be controlled, and on the other hand with the relative position of the object (3rd ) to the camera (5) correlated position signals x, xy and x _z from position detection units 1 1, 12 and 16

6 measuring microscope according to claim 3, characterized in that the camera (5) is connected to an interface of the personal computer (20) and the image of the object (3) generated by it in an object window (25) on the screen (21) of the personal computer (20) can be represented

7 measuring microscope according to claim 3, characterized in that the drives (9, 10, 15) are movable by operating the manipulator (23), the operations on the screen (21) of the personal computer (20) can be represented.

8 measuring microscope according to one of claims 3 to 7, characterized in that the operations of the personal computer (20) can be logged and stored.

9. Measuring microscope according to claim 4, characterized in that the incident light source (6) and / or the transmitted light source (7) contains a UV light-generating light-emitting diode, the UV light of which is converted through a layer into white light g oe ^

10 measuring microscope according to claim 4, characterized in that the transmitted light source (7) is visible by applying an electrical voltage light erzeu ^• * σgende film

1 1 measuring microscope according to claim 5, characterized in that the Z position detection unit (16) is a laser distance meter (92)

12 measuring microscope according to claim 11, characterized in that the laser beam emanating from the laser distance meter (92) can be mirrored into the optical axis (A) of the camera (5) by means of mirror elements (90, 91)