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WO2000007735A3 - Micromachined acoustic ejectors and applications - Google Patents

Micromachined acoustic ejectors and applications Download PDF

Info

Publication number
WO2000007735A3
WO2000007735A3 PCT/US1999/017652 US9917652W WO0007735A3 WO 2000007735 A3 WO2000007735 A3 WO 2000007735A3 US 9917652 W US9917652 W US 9917652W WO 0007735 A3 WO0007735 A3 WO 0007735A3
Authority
WO
WIPO (PCT)
Prior art keywords
resonator
cavity
applications
ejector
resonance
Prior art date
Application number
PCT/US1999/017652
Other languages
French (fr)
Other versions
WO2000007735A2 (en
Inventor
Khalil Najafi
Luis P Bernal
Babak Amirparviz
Original Assignee
Univ Michigan
Khalil Najafi
Luis P Bernal
Babak Amirparviz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Michigan, Khalil Najafi, Luis P Bernal, Babak Amirparviz filed Critical Univ Michigan
Priority to AU54648/99A priority Critical patent/AU5464899A/en
Publication of WO2000007735A2 publication Critical patent/WO2000007735A2/en
Publication of WO2000007735A3 publication Critical patent/WO2000007735A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

Disclosed are micromachined acoustic ejector (12) for generating a jet stream (24) using a Helmholtz resonator (14), applications for the ejector (12) in microflight, active heat sinking and fluid pumping, and methods of manufacturing the resonator (14) and ejector device (12). The resonator (14) comprises a resonant diaphragm (26) and a drive electrode (28) to operate on a volume inside a cavity (30) of the resonator (14). The resonance frequency of the resonator (14) is correlated or matched to the resonance of the cavity (30). The volume is forced out of the resonator (14) through a throat (40), with the throat (40) being variable through the use of another diaphragm (48). A shroud (16) and a cover (18) can direct flow to the resonator (14). An array (102) of the ejectors (12) can be fabricated. A heater (44) can vary the resonance inside the cavity (30), and another diaphragm (46) can vary the geometry of the cavity (30).
PCT/US1999/017652 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications WO2000007735A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU54648/99A AU5464899A (en) 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications to micro thrusters, active heatsinks and fluid pumps

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9539398P 1998-08-05 1998-08-05
US60/095,393 1998-08-05

Publications (2)

Publication Number Publication Date
WO2000007735A2 WO2000007735A2 (en) 2000-02-17
WO2000007735A3 true WO2000007735A3 (en) 2000-06-02

Family

ID=22251777

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/017652 WO2000007735A2 (en) 1998-08-05 1999-08-04 Micromachined acoustic ejectors and applications

Country Status (2)

Country Link
AU (1) AU5464899A (en)
WO (1) WO2000007735A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6942750B2 (en) * 2001-06-08 2005-09-13 The Regents Of The University Of Michigan Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication
ITTO20020859A1 (en) 2002-10-04 2004-04-05 Varian Spa VIBRATING PUMPING STAGE FOR VACUUM PUMPS AND VIBRATING PUMP VACUUM PUMPS.

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474251A (en) * 1980-12-12 1984-10-02 Hydronautics, Incorporated Enhancing liquid jet erosion
US4492338A (en) * 1981-02-26 1985-01-08 Ottorino Sparano Ultrasonic apparatus, particularly for liquid processing
US4753579A (en) * 1986-01-22 1988-06-28 Piezo Electric Products, Inc. Ultrasonic resonant device
US4858717A (en) * 1988-03-23 1989-08-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Acoustic convective system
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
US5710395A (en) * 1995-03-28 1998-01-20 Wilke; Paul Helmholtz resonator loudspeaker
US5758823A (en) * 1995-06-12 1998-06-02 Georgia Tech Research Corporation Synthetic jet actuator and applications thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474251A (en) * 1980-12-12 1984-10-02 Hydronautics, Incorporated Enhancing liquid jet erosion
US4492338A (en) * 1981-02-26 1985-01-08 Ottorino Sparano Ultrasonic apparatus, particularly for liquid processing
US4753579A (en) * 1986-01-22 1988-06-28 Piezo Electric Products, Inc. Ultrasonic resonant device
US4858717A (en) * 1988-03-23 1989-08-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Acoustic convective system
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
US5710395A (en) * 1995-03-28 1998-01-20 Wilke; Paul Helmholtz resonator loudspeaker
US5758823A (en) * 1995-06-12 1998-06-02 Georgia Tech Research Corporation Synthetic jet actuator and applications thereof

Also Published As

Publication number Publication date
WO2000007735A2 (en) 2000-02-17
AU5464899A (en) 2000-02-28

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