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WO2000057233A3 - Cantilevered microstructure methods and apparatus - Google Patents

Cantilevered microstructure methods and apparatus Download PDF

Info

Publication number
WO2000057233A3
WO2000057233A3 PCT/US2000/005744 US0005744W WO0057233A3 WO 2000057233 A3 WO2000057233 A3 WO 2000057233A3 US 0005744 W US0005744 W US 0005744W WO 0057233 A3 WO0057233 A3 WO 0057233A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
stop
contact
planar surface
angular orientation
Prior art date
Application number
PCT/US2000/005744
Other languages
French (fr)
Other versions
WO2000057233A2 (en
Inventor
Behrang Behin
Kam Y Lau
Richard S Muller
Original Assignee
Univ California
Behrang Behin
Kam Y Lau
Richard S Muller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California, Behrang Behin, Kam Y Lau, Richard S Muller filed Critical Univ California
Priority to EP00946745A priority Critical patent/EP1166163A2/en
Priority to KR1020017011389A priority patent/KR20010102533A/en
Priority to CA002365986A priority patent/CA2365986A1/en
Priority to AU60455/00A priority patent/AU6045500A/en
Priority to JP2000607047A priority patent/JP2003526116A/en
Publication of WO2000057233A2 publication Critical patent/WO2000057233A2/en
Publication of WO2000057233A3 publication Critical patent/WO2000057233A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

Cnantilevered microstructure apparatus and methods are described. An exemplary cantilevered microstructure apparatus includes a base, a cantilever, and a stop. The cantilever may be coupled to the base through a flexure, so that the cantilever is movable between a first angular orientation and a second angular orientation. The stop may be configured to contact the bottom portion of the cantilever in a contact area when the cantilever is in the second angular orientation. Alternatively, the stop may be configured to contact the cantilever in a contact area sized so that, upon application of an electrostatic bias between the cantilever and the stop, a sufficient force holds the cantilever against the stop. Alternatively, the stop may have a substantially planar surface configured to contact the cantilever in a contact area sized so that, upon application of a force to the cantilever substantially normal to the substantially planar surface of the stop, a sufficient force holds the cantilever against the stop such that the cantilever lies in a plane substantially parallel to the substantially planar surface of the stop.
PCT/US2000/005744 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus WO2000057233A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP00946745A EP1166163A2 (en) 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus
KR1020017011389A KR20010102533A (en) 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus
CA002365986A CA2365986A1 (en) 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus
AU60455/00A AU6045500A (en) 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus
JP2000607047A JP2003526116A (en) 1999-03-09 2000-03-02 Method and apparatus for cantilevered microstructure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12349699P 1999-03-09 1999-03-09
US60/123,496 1999-03-09

Publications (2)

Publication Number Publication Date
WO2000057233A2 WO2000057233A2 (en) 2000-09-28
WO2000057233A3 true WO2000057233A3 (en) 2001-05-31

Family

ID=22409006

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/005744 WO2000057233A2 (en) 1999-03-09 2000-03-02 Cantilevered microstructure methods and apparatus

Country Status (8)

Country Link
US (3) US6962830B1 (en)
EP (1) EP1166163A2 (en)
JP (1) JP2003526116A (en)
KR (1) KR20010102533A (en)
CN (1) CN1343318A (en)
AU (1) AU6045500A (en)
CA (1) CA2365986A1 (en)
WO (1) WO2000057233A2 (en)

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US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US6962830B1 (en) * 1999-03-09 2005-11-08 The Regents Of The University Of California Global mechanical stop
US6788520B1 (en) 2000-04-10 2004-09-07 Behrang Behin Capacitive sensing scheme for digital control state detection in optical switches
US6888979B2 (en) 2000-11-29 2005-05-03 Analog Devices, Inc. MEMS mirrors with precision clamping mechanism
JP4512262B2 (en) * 2000-12-19 2010-07-28 オリンパス株式会社 Optical element driving device
US7136588B1 (en) * 2000-12-22 2006-11-14 Cheetah Omni, Llc Apparatus and method for optical add/drop multiplexing
US6873756B2 (en) 2001-09-07 2005-03-29 Analog Devices, Inc. Tiling of optical MEMS devices
US7183633B2 (en) * 2001-03-01 2007-02-27 Analog Devices Inc. Optical cross-connect system
WO2002086602A1 (en) 2001-04-17 2002-10-31 M2N, Inc. Micro-actuator and micro-device using the same
US6583031B2 (en) 2001-07-25 2003-06-24 Onix Microsystems, Inc. Method of making a MEMS element having perpendicular portion formed from substrate
WO2003028059A1 (en) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
KR100417405B1 (en) * 2001-10-30 2004-02-05 엘지전자 주식회사 Piezoelectrically actuated optical switch
JP2004085886A (en) * 2002-08-27 2004-03-18 Fuji Photo Film Co Ltd Magazine for rolled image recording material
US20040091202A1 (en) * 2002-10-24 2004-05-13 Lg Electronics Inc. Optical switch
JP2010172190A (en) * 2002-12-27 2010-08-05 Nippon Signal Co Ltd:The Planar electromagnetic actuator
CN102289067B (en) 2010-06-18 2013-02-13 江苏丽恒电子有限公司 Optical path change-over switch and optical router
CN102540454B (en) * 2010-12-27 2013-08-14 上海丽恒光微电子科技有限公司 Optical switch and MEMS (micro-electromechanical system) display
ES2402632B1 (en) 2011-02-08 2014-05-14 Tyco Electronics Raychem Bvba RELEASE TONGUE FOR AN ELECTRICAL CONNECTOR AND ELECTRICAL CONNECTOR THAT INCLUDES SUCH RELEASE TONGUE
ES2395358B1 (en) 2011-02-08 2014-04-25 Tyco Electronics Corporation SINGLE ACTION CONNECTOR
CN104040393B (en) 2011-05-04 2017-12-08 西蒙公司 The joints of optical fibre with reversing
CN103257407B (en) 2012-02-20 2015-11-25 泰科电子(上海)有限公司 Connector and connector assembly
US9995377B2 (en) * 2012-04-12 2018-06-12 Herman David Palmieri Device for converting a rotating motion into a reciprocating motion and an electric mascara applicator assembly having such a device
GB201216529D0 (en) * 2012-09-17 2012-10-31 Univ St Andrews Torsional stiffness measurement
CN103048784B (en) * 2012-12-21 2015-05-20 无锡微奥科技有限公司 Passively-driven MEMS (Micro Electro Mechanical Systems) optical switch and machining process
US10067301B2 (en) 2014-01-13 2018-09-04 Commscope Connectivity Uk Limited Fiber optic connector
US10623112B2 (en) * 2015-08-24 2020-04-14 The Regents Of The University Of California Low power magnetic field body area network
WO2018226959A1 (en) 2017-06-07 2018-12-13 Commscope Technologies Llc Fiber optic adapter and cassette
US10825628B2 (en) * 2017-07-17 2020-11-03 Analog Devices Global Unlimited Company Electromagnetically actuated microelectromechanical switch
EP3682277A4 (en) 2017-09-15 2021-06-02 Commscope Technologies LLC Fiber optic connector with boot-integrated release and related assemblies
CN110658584B (en) * 2019-10-08 2020-08-14 浙江大学 Ultra-large bandwidth silicon-based waveguide MEMS optical switch

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Also Published As

Publication number Publication date
US20020163053A1 (en) 2002-11-07
AU6045500A (en) 2000-10-09
KR20010102533A (en) 2001-11-15
US6962830B1 (en) 2005-11-08
US20040211655A1 (en) 2004-10-28
US6897539B2 (en) 2005-05-24
WO2000057233A2 (en) 2000-09-28
JP2003526116A (en) 2003-09-02
CN1343318A (en) 2002-04-03
US7301177B2 (en) 2007-11-27
CA2365986A1 (en) 2000-09-28
EP1166163A2 (en) 2002-01-02

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