WO1998041366A1

WO1998041366A1 - Conveyor robot

Info

Publication number: WO1998041366A1
Application number: PCT/JP1998/000898
Authority: WO
Inventors: Hisashi Asada
Original assignee: Komatsu Ltd.
Priority date: 1997-03-18
Filing date: 1998-03-04
Publication date: 1998-09-24
Also published as: KR19980080413A; JPH10249757A; TW376356B

Abstract

A driving motor to rotate a whole conveyor robot is reduced in size. The conveyor robot consists of first and second parallel link mechanisms (22a, 22b, 23a, 23b) in which driver side links (31a, 31b, 36a, 36b) and driven side links (32a, 32b, 37a, 37b) are configured in parallel and has at least one pair of robot link mechanisms (B1, B2) provided with transfer pedestals (24a, 24b) on the tip side short links of the second parallel link mechanism, wherein the driven side links (32a, 32b) of the first parallel link mechanisms (22a, 22b) of each robot link mechanism are connected to a rotating arm (30) fixed at one end to a driving shaft (25a) ; the driving side links (31a, 31b) of each first parallel link mechanism are fixed to driving shafts (25a, 25b); these driving shafts are arranged coaxially; and driving motors (29a, 29b, 29c) are respectively connected to these driving shafts.

Description

Description Transport robot Technical field

The present invention relates to a liquid crystal panel, a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, and the like, in which a plurality of stations are provided around a single transfer facility. The process chambers that serve as the components are arranged, and the thin plate-like workpieces such as liquid crystal panels and wafers that are processed by each process chamber are transferred to the transfer chambers. After passing through the transfer function, the transfer robot provided in this transfer function can be used to transfer one process baccarat to another process robot. The present invention relates to a transport robot in a multi-chamber type manufacturing apparatus which is adapted to be transported to a process chamber. Background art

The multi-chamber type manufacturing equipment is as shown in Fig. 1 and multiple process channels are placed around the transfer channel 1. A work transfer station that transfers the work to the external process stations 2a, 2b, 2c, 2d, and 2e. And the transfer facility 3 is provided. The inside of the transfer facility 1 is always kept in a vacuum state by a vacuum device, and this transfer facility 1 is provided. Rotatable within one, force, tsuno, n A transport robot that allows the robot to move in and out in the radial direction is arranged. Then, on the peripheral wall of the transfer function 1 and at each process chamber station 2a, 2b, 2c, 2d, 2 The partition wall 5 facing the e and the park delivery station 3 is the entrance to and exit from each process station. Gate 6 is provided. The gate 6 is opened and closed by an open / close door (not shown) provided inside the transfer function 2 in opposition to each of the gates 6. The eel is gone.

As a conventional transport σ-bot used in this kind of semiconductor or other manufacturing apparatus, there is a transport port bot A of the same-direction operation type (Japanese Patent Laid-Open No. 4-304). No. 47) is known, and the conventional technology is as shown in FIG.

A turntable 12 that is rotated by a first drive motor 11 via a gear mechanism 10 is provided as a support for the handling section. The turntable 12 is provided with a pair of robot link mechanisms A 1 and A 2 arranged side by side. Each of the robot link mechanisms AA 2 is the same mechanism, and a pair of the first parallel link mechanism 13 and the second parallel link mechanism are paired. A mechanism 14 is connected, and transport tables 15 and 15 for holding a work are provided at the distal end side. With both robot link mechanisms A 1 and A 2, each carrier 15,

There is a difference in the height position of 15.

The first parallel link mechanism 13 includes a pair of long links 1. 3 a, 13 b are rotatably supported by the turntable 12, and one of the respective links 13 a of each of the robot link mechanisms A l, A 2 is rotating. The drive shafts 16a and 16b serving as the center are connected to second and third drive motors 17a and 17b mounted below the turntable 12, respectively. . A pair of links 14 a, 14 b of a second parallel link mechanism 14 is connected to the ends of the links 13 a, 13 b, respectively, so as to rotate independently. Each carrier 15, 15 is rotatably connected to the tip of this pair of links 14 a, 14 b.

The connecting points between the links 13a, 13b of the bi-parallel link mechanisms 13 and 14, and the links 14a, 14b have the same number of teeth, respectively. The gears 18a and 18b are mounted together with the S-force. Then, one gear 18a is fixed to one link 13a of the first parallel link mechanism 13 and the other gear 18b is fixed to the second parallel link. One link of the mechanism 14 is fixed to the link 14a connected to the other link 13b of the first parallel link mechanism 13 . The links 14a and 14b of the second parallel link mechanism 14 are extended before the gears 18a and 18b, and are extended by the short link 19. Revolving connected to self

The transport robot A configured as described above is connected to each of the robot link mechanisms Al and A2 by the second and third drive motors 17a and 17b. By rotating the drive shafts 16a and 16b, the respective first parallel link mechanisms 13 13 is rotated. Then, by the rotation of the first parallel link mechanisms 13, 13, the second parallel link mechanisms 14, 14 are respectively formed by the combination of the gears 18 a, 18 b. 14 rotates by the same rotation angle in the direction opposite to the rotation direction of each of the first parallel link mechanisms 13 and 13. As a result, the two-sided bot link mechanisms A 1 and A 2 bend each other outward, and the carriages 15 and 15 are connected to the short sections of the parallel link mechanism. Translates linearly in the direction along. Further, by driving the first drive motor 11, the turntable 12 is rotated, and the entire transfer robot A is rotated.

In the prior art, each pair of robot link mechanisms Al and A2 is provided with a second and third drive motor 1 respectively.

7a and 17b, and the entire rotation of the transfer robot A is driven by the first drive motor 11; The capacity of the drive motors 17a and 17b of each of the robot links A 1 and A

The first drive motor 11 is relatively small enough to drive the second drive motor 2, but the second and third drive motors 17 a, 17 a b and the rotary robot 12, etc., so that the entire transfer robot A had to be driven to rotate, so it was compared with the second and third drive motors 17 a and 17 b above. To increase the capacity.

Therefore, in the three motors, two types of drive motors, a first drive motor 11 and second and third drive motors 17a and 17b, must be used. Together with One of the two drive motors is more expensive than each of the other two drive motors, resulting in a problem that the overall cost is high. Was.

Further, according to the prior art, the second and third drive motors 17a and 17b rotate together with the turntable 12 with respect to a frame (not shown) with respect to a frame (not shown). Therefore, a cable such as a power cable or a signal cable connected to the second and third drive motors 17a and 17b from the frame side, If it is twisted with the above rotation, the transport robot cannot be rotated indefinitely. In order to solve this problem, the above L 2 • The third drive motors 17a and 17b are connected by a brush connection mechanism in the middle of the cable connected to them. part of this brush connection mechanism electrically connected to by cormorants in the Oh Ru force ^s that the ash through, both when the configuration of this is Ru complex Oh, you also have a problem there Ru to life basis There is a defect.

In view of the above, the present invention has been made in consideration of the above. Therefore, a drive motor for rotating the entire transfer port robot is small, for example, a pair of robot rings. The size of the drive motor for driving the link mechanism for driving the link mechanism can be the same as that of the drive mechanism, and the cost of the three drive motors can be reduced by using a common drive motor. The purpose is to provide an o-hot for transportation. Disclosure of invention In order to achieve the above object, a transfer port bot according to the present invention comprises a first and a second parallel link in which a drive side link and a driven side link are configured in parallel. Each of the robot links has at least two sets of robot link mechanisms, each of which has a carrier at the distal end of the second parallel link mechanism. The driven side link of each first parallel link mechanism of the mechanism is connected to a rotating arm having one end fixed to the drive shaft, and the drive of each first parallel link mechanism is also performed. The side link is fixed to the drive shaft, and the respective drive shafts for the arm rotation and the drive side link of each first parallel link mechanism are coaxially arranged. Drive motors are connected to each of them.

In this configuration, with the drive shaft connected to the rotating arm stopped, the first parallel link mechanism of each of the robot link mechanisms is stopped. By rotating each drive shaft to which the drive side link is fixed by the drive motor connected to each, each robot link mechanism is individually Each of the second parallel link mechanisms reciprocates in a straight line, and a thin plate-like work is performed by the two reciprocating units. From the power of the process to the process channo << it goes in and out of each other.

In addition, each drive shaft fixed to the drive side link of the first parallel link mechanism of each robot link mechanism, and a rotating arm connected to each driven side link. By rotating the drive shaft of the arm in the same direction and at the same rotational speed, each robot link mechanism is integrally and coaxially rotated. Therefore, when the transport port bots composed of the robot link mechanisms are rotated as a whole, each drive motor that operates each robot link mechanism and the rotation motor The drive motor that drives the transfer arm cooperates with the drive motor, and the drive motor that rotates the rotary arm to rotate the entire transport robot. The size of the robot can be reduced compared to the case where the entire transport robot is rotated by a single drive motor.For example, this can be used for each robot link mechanism. The drive motors for operating the motor can be made the same, so that the drive motors can be used in common, and it is possible to reduce the size and cost of the equipment. it can . A plurality of rotating arms fixed to the drive shaft are provided integrally, and each rotating arm is provided with a driven arm of each first parallel link mechanism of each robot link mechanism. In this configuration, the drive side link of each first parallel link mechanism is fixed to a drive shaft that is coaxial with the drive shaft of the rotating arm. According to this configuration, the plurality of robot link mechanisms can be operated in mutually different angular directions along the direction of each rotating arm.

Further, in the transfer robot according to the present invention, in the transfer robot, a plurality of rotating arms each having one end fixed to a drive shaft are coaxially connected. Then, each rotating arm is connected to the driven side link of each first parallel link mechanism of each robot link mechanism, and each first parallel link mechanism is connected. The drive side link is fixed to the drive shaft that is coaxial with the drive shaft of each rotating arm. According to this configuration, a plurality of robot link mechanisms can be individually rotated. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a manufacturing apparatus for a manhole chamber type.

Fig. 2 is a perspective view showing the transfer function. Fig. 3 is a perspective view showing a conventional transport robot. Fig. 4. Fig. 4 is a plan view schematically showing a first embodiment of the present invention.

Fig. 5 is a cross-sectional view showing a rotation drive unit according to the present invention.

Fig. 6 is a cross-sectional view showing a main part of the robot link mechanism according to the present invention.

FIG. 7 is a cross-sectional view showing another example of the rotation drive unit according to the present invention.

Fig. 8 is a structural explanatory view showing another example of a connecting portion between parallel links of a robot link mechanism.

FIG. 9 is a cross-sectional view taken along line IX-K of FIG.

FIG. 10 is a sectional view taken along the line X—X in FIG.

Fig. 11 is a plan view schematically showing a second embodiment of the present invention.

Figure 12 schematically shows a third embodiment of the present invention. It is a top view.

Fig. 13 is a plan view schematically showing a fourth embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of the present invention will be described with reference to FIG. 4 and the following figures. FIG. 4 shows a transport robot according to a first embodiment of the present invention. The transfer robot B is constituted by a pair of robot link mechanisms Bl and B2. Each of the mouth bot link mechanisms B 1 and B 2 is a pair of first and second parallel link mechanisms 22 a, 23 a and 22 b , 23b are connected to each other, and a carriage 24, 24a, 24b holding a work is provided at the end of the second parallel link mechanism 23a. 23b. Power S is provided. The height difference between the carriages 24a and 24b is different between the two-bottom botlink mechanisms Bl and B2. At the center of the operation of both mouth bot link mechanisms B 1 and B 2, the first and second

• The third drive shaft 25a, 25b, 25c Force S is arranged concentrically. Then, as shown in FIG. 5, the second and third drive shafts 25b, 25c are in the air, and the first drive shaft 25a is connected to the second drive shaft 2a. 5b is rotatably fitted via a bearing 26a and a magnetic fluid seal 27a.The second drive shaft 25b is a bearing within the third drive shaft 25c. Fits into rotation via 26b and magnetic fluid seal 27b Are combined. The third drive shaft 25 c is rotatably fitted and supported on the transfer function 28 side via a bearing 26 c and a magnetic fluid seal 27 c. . Each of the drive shafts 24a, 24b, and 25c has a first, second, and third drive. Motors 29a, 29b, and 29c force; It is connected to.

The first drive shaft 25a has a first parallel link mechanism of each of the first and second robot link mechanisms B1 and B2.

One end of a rotating arm 30 having a length corresponding to a short section of 22 a and 22 b is fixed to one end. One end of the drive side link 31 a of the first parallel link mechanism 22 a of the first robot link mechanism B 1 is fixed to the second drive shaft 25 b. It has been done. One end of the drive link 31b of the first parallel link mechanism 22b of the second robot link mechanism B2 is fixed to the third drive shaft 25c. It has been.

Also, at the leading end of the rotation arm 30, the first parallel link mechanisms 22 a and 22 b of the two-way bot link mechanisms B 1 and B 2 are attached. Each driven link 3 2 a, 3

One end of 2b is connected to the rotation itself.

The first parallel link mechanism 22 of each robot link mechanism Bl, B2 The respective link 31a, 3 of the 2a, 22b

2 a, 3 1 b, 3 2 b Tip force S Short bar link 3 3 a,

It is connected to 33 b via shafts 3 4 and 3 5, and is connected to the rotation itself. Each of the spindles 34 and 35 has its own robot. The second parallel link mechanism 23 of the link mechanisms B l and B 2 23 a,

2 3 b Drive side and driven side links 36 a, 37 a,

36 b and 37 b are respectively connected to the rotation itself.

Gears 38 and 39, which have the same number of teeth and are engaged with each other, are respectively supported on the two support shafts 34 and 35 by their own rotation. One of the gears 38 is a first gear. And the other gear 39 is fixed to the drive-side link 31a, 31b of the parallel link mechanism 22a, 22b, and the other gear 39 is connected to the second parallel link mechanism 23a. , 23b are fixed to the drive side links 36a, 36b.

In the above configuration, when the second drive motor 29 b is driven to rotate and the second drive shaft 25 b is rotated, the first parallel connection mechanism B 1 of the first mouth bot link mechanism B 1 is rotated. The drive side link 3 la of the link mechanism 22 a is rotated. At this time, one of the gears 38 rotates integrally with the drive side link 31a in the rotational direction of the link 31a, and the other gear 38 engages with the other. The gear 39 rotates in the opposite direction by the same rotation angle c. Accordingly, the drive side link 36 a of the second parallel link mechanism 23 a fixed to the other gear 39. Rotates, the second parallel link mechanism 23a rotates in the same direction in conjunction with the rotation of the first parallel link mechanism 22a, and the second parallel link mechanism 2a rotates. The transfer table 24a connected to the tip of 3a is translated along the direction of the rotation arm 30, which is a short section of the first parallel link mechanism 22a. Then, the work W placed on the carriages 24a and 24b is thereby removed. A transfer is performed from the transfer facility to the process chamber or the reverse operation is performed.

Similarly, by driving the third drive motor 29c and rotating the third drive shaft 25c, the second robot link mechanism B2 is driven by the second drive link mechanism B2. 1) Robot link mechanism

The operation is performed in the same manner as in B1, and the second transfer table 24b is translated in the direction of the rotation arm 30. The carriages 24 of each of the robot link mechanisms Bl, B2

The stroke of 4b is sufficient to move the work into and out of each adjacent process channel from the inside of the transfer facility 28. This is just a stroke.

Next, the first drive motor 29a is driven to rotate the first drive shaft 25a, so that the rotation arm 30 rotates and is conveyed. B whole is rotated. At this time, since the two-port bot link mechanisms Bl and B2 need to maintain a relative attitude with respect to the rotating arm 30, the second and third botlink mechanisms are required. The drive motors 29b, 29c are also driven at the same time to drive the second and third drive shafts 25b, 25c in the same direction as the first drive shaft 25a over the same rotation angle. And rotate it.

Therefore, the first, second, and third drive motors 29a, 29b, and 29c cooperate with each other during the rotation of the transfer robot B as a whole. The first drive motor 29a does not require an extra large motor, and each robot ring It may be the same as or smaller than the second and third drive motors 29b, 29c for driving the locking mechanisms Bl, B2.

As shown in FIG. 6, the two-bottom botlink mechanisms B 1, B 2 are vertically displaced relative to each other, as shown in FIG. 6, and each robot link mechanism Bl. , B 2 carrier 2 4 a, 2

4b can reciprocate without interfering with each other.

In this type of transfer robot B, since the inside of the transfer facility 28 is maintained at a low pressure (vacuum), this transfer robot is not used. It is necessary to airtightly shut off the drive motor chamber 40 which houses the drive motors 28 and the drive motors 29a, 29b, 29c. Therefore, in the above embodiment, the magnetic fluid seals 27a, 27b, 27c are interposed in the bearings of the drive shafts 25a, 25b, 25c. In order to maintain the airtightness of both spaces, an airtight partition is provided between the drive motor chamber 40 and the transfer facility 28, and each drive member is connected. The partition may be separated and connected to a MacNet coupling ₍ FIG. 7 shows another embodiment, and each drive shaft is connected to each other.

The distal ends of 25a, 25b, and 25c are disc-shaped bosses 41a, 41b, and 41c, respectively, having the same diameter. In addition, ring-shaped bosses 42a, 42b, and 42c force S are independently formed on the outside facing the disk-shaped bosses 41a, 41b, and 41c, respectively. Transformation function in rotation 2 8 Side, the rotation arm 30 is provided on the first ring-shaped boss 42a, and the first robotic arm is provided on the second ring-shaped boss 42b. Link mechanism B 1 The drive side link 31 a of the first parallel link mechanism 22 a is connected to the third robot boss 42 c by the second robot link mechanism. The drive side link 31b of the first parallel link mechanism 22b of B2 is fixedly attached. The pair of disk-shaped bosses and the link-shaped bosses are separated by partition walls 43 and connected to the magnetic couplings 44 a, 44 b, and 44 c, respectively. Magnetically coupled. The partition wall 43 has a structure in which the drive motor chamber 40 side is air-tightly shut off from the drive motor chamber 40 side, whereby the drive motor chamber 40 is closed. The transfer function is shut off in an airtight manner.

Further, in the above embodiment, an example is described in which the toothed wheels 38, 39 are used for connecting the first and second parallel link mechanisms of the robot link mechanisms B1, B2 to each other. The indicated force S, as shown in FIGS. 8 to 10, can be obtained by replacing the two velvets 45a, 45b with the above-mentioned gears 38, 39, as shown in FIGS. No.

Referring to FIG. 10 and FIG. 10, one robot link mechanism B1 will be described. The first pulley 46 is fixed to the driving link 31a of the first parallel link mechanism 22a, and the driving pulley 46 of the second parallel link mechanism 23a is fixed. The second pulley 47 is fixedly attached to the link 36a, and the two pulleys 46, 47 are connected to the second pulley 47, as shown in FIGS. 9 and 10. Belts 45a and 45b of the book are hooked and their ends are fixed to the pulleys 46 and 47, respectively. With this configuration, the same operations as those of the gears 38 and 39 are performed. The number of Naoko belts is only one if it is wound around a figure eight.

FIG. 11 shows the second embodiment of the present invention, and only the points different from the first embodiment will be described. Two rotating arms 30 a and 30 b are fixed to the first drive shaft 25 a with a predetermined angle Θ. The first parallel link mechanism 22 of the pair of robot link mechanisms Bl and Β2 and the driven link 32 2a and 3 of the second parallel link mechanism 22b 2 b is connected to each of the rotating arms 30 a and 30 b.

According to this configuration, the pair of robot link mechanisms B 1 and B 2 operate by rotating the second and third drive shafts 25 b and 25 c, respectively. Then, each of the transfer tables 24a and 24b moves in the direction of the above-mentioned rotating arms 30a and 30b, that is, in the direction in which the angle is shifted by 0. It is reciprocated. By rotating the drive shafts 25a, 25b, 25c integrally in the same direction, the two-sided bot link mechanisms Bl, B2 are integrated. And rotate in the same direction.

FIG. 12 shows a third embodiment of the present invention, and only the points different from the above-described first embodiment will be described. The first drive shaft 25a has three rotating arms 30a, 30b, 30c are radially fixed at equal angles, and the first and second arms 30a, 30b, 30c correspond to the respective rotating arms 30a, 30b, 30c. Second and third robot link mechanisms Bl,

B 2 and B 3 are used. The mutual rotation angles of the three unusual rotation programs 30a and 30b30c are not limited to equiangular angles, but have angles that are mutually relative. _C and each of the robot link mechanisms Bl, B2, B3

1 parallel link mechanism 22 2 a, 22 b, 22 c driven link 32 a, 32 b, 32 c is used for each of these rotating arms 30 a, 30 b , 30 c. Four drive shafts are provided coaxially in this embodiment. The first drive shaft 25a is provided with the above-mentioned rotation arms 30a, 30b, 30c, and the second drive shaft 25b is provided with the first robot link. Mechanism B 1 parallel link mechanism 2 2 a drive side link 31 a force S, third drive shaft 25 c parallel second robot link mechanism B 2 parallel link Of the first parallel link mechanism 22c of the third robot link mechanism B3 to the drive side link 31b of the link mechanism 22b and the fourth drive shaft 25d. The drive side links 31c are fixed to each other.

In this mechanism, each robot link mechanism B 1, B 2

, B 3 each of the first parallel link mechanisms 22 a, 22 b, 2

The 2c drive side links 31a, 31b, 31c rotate the second, third and fourth drive shafts 25b, 25c, 25d individually. As a result, each robot link mechanism B 1 B 2 and B 3 are the respective carriers 24 a, 24 b and 2

4c force S is reciprocated along the direction of each rotating arm 30a, 30b, 30c. By rotating each drive shaft 25a, 25b, 25c, 25d in the same direction, each robot link mechanism B1, B2, B3 is rotated. -Rotated into a body shape. ..

FIG. 13 shows a fourth embodiment of the present invention, and only the points different from the above-mentioned first embodiment will be described. In this embodiment, four drive shafts are provided concentrically as in the third embodiment. The first drive arm 25a is provided with a first rotation arm 30a, and the second drive shaft 25b is provided with a second rotation arm 30b. Each is fixed separately. The drive link 31a of the first parallel link mechanism 22a of the first robot link mechanism B1 is provided on the third drive shaft 25c. The fourth drive shaft 25 d is provided with the second robot link mechanism B 2

The drive side link 3 1b of the parallel link mechanism 2 2b of 1 is fixedly attached.

On the other hand, the first rotating arm 30a is connected to the driven side link 32a of the first parallel link mechanism 22a of the first robot link mechanism B1. In addition, a driven link 32b of the first parallel link mechanism 22b of the second robot link mechanism B2 is connected to the second rotating arm 30b. Each is connected to the rotation itself. In this configuration, by rotating the third and fourth drive shafts 25c and 25d individually, the first and second robot link mechanisms Bl, B 2 are operated individually, and the respective carriages 24a, 24b are respectively rotated arms.

It is reciprocated in the direction along 30a and 30b. Also, by rotating the first drive shaft 25a and the third drive shaft 25c in the same direction, one of the robot link mechanisms B1 is driven by the first drive shaft 25a. · The third drive shafts 25a and 25c are rotated by the cooperation of two drive motors that drive the respective drive shafts.

Also, by rotating the second and fourth drive shafts 25b, 25d in the same direction, the second robot link mechanism B2 is driven by the second robot link mechanism B2. · The third drive shafts 25b and 25d are rotated by the cooperation of two drive motors that drive the respective drive shafts.

'' Each of the drawings for explaining the second to fourth embodiments schematically shows the configuration of each, and the first and second parallel links of each robot link mechanism are illustrated. The gear mechanism or the belt mechanism that connects the gear mechanism is not shown. Further, in each of the first to fourth embodiments, each robot link mechanism is provided.

The directions of the carriages 24a, 24b and 24c in B1, B2 and B3 are not particularly determined, but are determined according to the purpose of use.

Claims

The scope of the claims

1. It is composed of two first and second parallel link mechanisms in which the drive side link and the driven side link are configured in parallel, and the short side at the tip side of the second parallel link mechanism. It has at least two sets of robot link mechanisms, each of which has a carriage at the joint link, and is driven by each first parallel link mechanism of each mouth bot link mechanism. The side link is connected to a rotating arm having one end fixed to the drive shaft, and the drive side link of each first parallel link mechanism is fixed to the drive shaft. The drive shafts for the rotation of the motor and the drive side link of each first parallel link mechanism are coaxially arranged, and a drive motor is connected to each of these drive shafts. A transport robot characterized by the following.

2. In the transfer robot according to claim 1, a plurality of rotation arms each having one end fixed to the drive shaft are provided integrally, and each rotation arm is provided with each robot arm. The driven side link of each first parallel link mechanism of the link mechanism is connected, and the drive side link of each first parallel link mechanism is coaxial with the drive shaft of the rotating arm. A transfer robot characterized in that it is fixed to a shaped drive shaft.

3. In the transfer robot according to claim 1, a plurality of rotation arms each having one end fixed to the drive shaft are provided so that each drive shaft is coaxial, and each rotation arm is provided. Connected to the driven side link of each first parallel link mechanism of each port bot link mechanism, and the drive side link of each first parallel link mechanism for each rotation. Drive shaft coaxial with arm drive shaft

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03 Dd 99 £ / 86 OAV