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WO1992015813A1 - Process for manufacturing the internal parts of a vacuum valve having a valve disc and pleated bellows, and internal valve parts manufactured by this process - Google Patents

Process for manufacturing the internal parts of a vacuum valve having a valve disc and pleated bellows, and internal valve parts manufactured by this process Download PDF

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Publication number
WO1992015813A1
WO1992015813A1 PCT/EP1992/000054 EP9200054W WO9215813A1 WO 1992015813 A1 WO1992015813 A1 WO 1992015813A1 EP 9200054 W EP9200054 W EP 9200054W WO 9215813 A1 WO9215813 A1 WO 9215813A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
bellows
vacuum
soldering
solder
Prior art date
Application number
PCT/EP1992/000054
Other languages
German (de)
French (fr)
Inventor
Franz-Peter Contzen
Reinhard Fritsch
Heinz-Hermann Kersken
Hans Kirchner
Original Assignee
Leybold Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Aktiengesellschaft filed Critical Leybold Aktiengesellschaft
Publication of WO1992015813A1 publication Critical patent/WO1992015813A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/38—Selection of media, e.g. special atmospheres for surrounding the working area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

  • the invention relates to a method for producing an inner valve part for a vacuum valve with a valve disk and bellows, and an inner part produced by this method.
  • Vacuum valves of the type concerned here are available on the market with a wide variety of nominal sizes and with several actuators. Such valves are therefore manufactured - as far as possible - according to the modular principle.
  • Known valves essentially consist of three subassemblies, namely a valve housing with a valve seat, a valve drive and a valve inner part with one
  • Valve plate a bellows and a sealing collar.
  • the valve drives can be actuated mechanically. The use of knobs is common. Depending on whether the opening and closing movement should be carried out quickly or slowly, these mechanical drives are designed differently. Pneumatically, electro-pneumatically and electro-magnetically actuable valves are also known. Vacuum valves of here affected type are disclosed for example in the brochure "valves", which is part of the catalog HV 200, part 6, edition 08/86 of the applicant.
  • the bellows located in vacuum valves has the task of separating the interior of the valve housing, which is in contact with media, from the atmosphere.
  • the bellows therefore extends from the valve plate to a sealing collar, which is mounted in a vacuum-tight manner between the actuator and the valve housing.
  • Stainless steel has proven to be a suitable material for the bellows, the valve plate and the flange.
  • a stainless steel bellows must be very thin (0.1 mm) so that it does not obstruct rapid movements of the valve plate too much.
  • Thin-walled stainless steel also meets the requirements for high-vacuum-tight separation without deformation. After all, stainless steel is relatively corrosion-resistant.
  • Critical areas of the known vacuum valve inner parts are the connections of the two end faces of the bellows with the valve disk and the sealing collar. These connections must be highly vacuum-tight and should have a long service life.
  • the bellows is connected to the valve plate and the sealing collar by welding.
  • the technical effort for this joint connection is very high, since this work can only be carried out by highly qualified welders.
  • a special welding machine must be used.
  • the requirements for the accuracy of the parts to be joined are very high.
  • the material stresses known in welding processes due to the local heating occur in the weld seam and in the transition zone. Not all of the joint connections produced in this way therefore meet the high requirements for high vacuum tightness.
  • the service life of the weld seams is limited.
  • the object of the present invention is to simplify the technical outlay associated with the production of the connections between the bellows and the valve plate and the sealing collar while at the same time reducing the rejects and increasing the service life.
  • connection between the bellows and the valve plate is made by soldering in a vacuum.
  • connection between the bellows and its sealing collar is also simultaneously made in this way.
  • the application of this invention has the advantage that the required technical effort and thus the manufacturing costs are significantly lower compared to the prior art. Highly qualified employees are no longer required to establish the connection between the bellows and its adjacent components. The requirements for the accuracy of the components to be connected to each other are significantly lower. It is also advantageous that the valve inner part is heated by soldering in a vacuum oven after the connections have been made and is thus immediately available for further processing or assembly. A cleaning process, as is necessary after welding processes because of the tarnishing colors and the greases present, is omitted. The direct contact surfaces between the bellows and its adjacent components are much larger after the soldering process according to the invention than with the welding process according to the prior art. The tightness of the connections is thus guaranteed. Committees for leaky connections no longer occur.
  • valve interior parts produced by the process according to the invention have a service life which is considerably longer than the prior art - by more than a factor of 4. Obviously, this advantage is based on the fact that the soldering process gives the material a uniform structure, in particular in the soldering zone, without the temperature zones behind the seam that occur during welding. Breaks in resonance or fatigue occur much less frequently.
  • FIG. 1 is a partial section through an inventive valve
  • FIG. 2 shows a valve inner part according to the invention
  • the valve 1 shown in FIG. 1 comprises the partially illustrated electromagnetic drive 2, of which essentially only the armature 3 is visible.
  • the valve housing 5 is fastened to a flange-like edge 4 of the drive 2.
  • the sealing ring 6 is embedded in the end face of the valve housing 5 facing the edge 4, so that the connection to the process space is vacuum-tight.
  • the valve housing 5 has two connecting pieces 7 and 8, which can be connected to one another via the opening 9.
  • the upper edge of the opening 9 forms a valve seat 11.
  • the valve seat 12 and thus the opening 9 is associated with the valve plate 12 with the sealing ring 13.
  • the valve disk 12 is held at the lower end of the valve plunger 14.
  • the upper end of the valve plunger 14 is screwed into the armature 3 of the valve drive 2 via a threaded connector 15.
  • a bellows 16 is provided which extends between the valve plate 12 and an annular disk 17. Both the valve plate 12 and the washer 17 have recesses 18 and 19, respectively, into which the bellows 16 is soldered and is therefore connected to these components in a vacuum-tight manner.
  • the outer edge of the annular disc 17 is located between the flange 4 of the drive 2 and the end face of the valve housing 5 and extends into the area of the sealing ring 6, so that tightness is ensured in this area as well. 21 also designates a hose section which abuts the bellows 16 from the inside and dampens bellows vibrations.
  • Figure 2 shows an enlarged valve inner part, consisting of plate 12, bellows 16 and flange or washer 17.
  • the plate 12 is equipped with a recess 18 with an outer edge, which the lower, extending perpendicular to the bellows axis portion of the bellows section or is present.
  • the sealing collar 17 has an inner recess 19 with an outer edge, into which the upper part of the bellows, which extends perpendicularly to the bellows axis, extends.
  • the components 12, 16, 17 are connected to one another by soldering in a vacuum.
  • the solder is e.g. when assembling the parts in the soldering position shown. in the form of thin washers or as a solder paste between the areas to be connected.
  • the parts - preferably a plurality of inner parts to be soldered - are then inserted into a vacuum oven. The soldering process takes place in the oven under vacuum and at elevated temperature.
  • the furnace temperature is between 600 ° C and 1130 ° C.
  • a temperature between 600 ° C and 1000 ° C is sufficient.
  • the use of nickel-based solder and a furnace temperature of about 1050 ° C in an oven during soldering is a vacuum with a value between 10 and _a received 10- * mbar aufrecht ⁇ ; it is preferably less than 10- 3 mbar.
  • the duration of the soldering process is approximately 2 to 3 hours.
  • the soldered parts must be cooled as quickly as possible to avoid material structure changes, ie within a few minutes.
  • the cooling is carried out in a protective gas atmosphere in the furnace.
  • the furnace is first flooded with inert gas, for example nitrogen or argon.
  • inert gas for example nitrogen or argon.
  • cool inert gas is constantly introduced into the furnace, for example in a circuit, and the heated inert gas is removed.
  • the interior parts with a purity that meets the high requirements of high vacuum technology are immediately available for further assembly.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Diaphragms And Bellows (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

The invention concerns a process for the manufacture of the internal parts of a vacuum valve with a valve disc (12), pleated bellows (16) and a sealing collar (17). In order to reduce the relatively high technical complexity involved in joining the bellows to the neighbouring components, the invention proposes that the joints made by the two ends of the bellows (16) with the valve disc (12) and the sealing collar (17), respectively, be produced by soldering in a vacuum.

Description

Verf hren zur Herstellung von Ventilinnenteilen für Vakuumventile mit Ventilteller und Faltenbalg sowie nach diesem Verfahren hergestellte InnenteileProcess for the production of valve inner parts for vacuum valves with valve disc and bellows as well as inner parts produced according to this process
Die Erfindung bezieht sich auf ein Verfahren zur Herstellung eines Ventilinnenteiles für ein Vakuumventil mit Ventilteller und Faltenbalg sowie ein nach diesem Verfahren hergestelltes Innen¬ teil.The invention relates to a method for producing an inner valve part for a vacuum valve with a valve disk and bellows, and an inner part produced by this method.
Vakuumventile der hier betroffenen Art werden mit den verschie¬ densten Nennweiten und mit mehreren Antrieben auf dem Markt angeboten. Die Herstellung derartiger Ventile erfolgt deshalb - soweit möglich - nach dem Baukastenprinzip.Vacuum valves of the type concerned here are available on the market with a wide variety of nominal sizes and with several actuators. Such valves are therefore manufactured - as far as possible - according to the modular principle.
Bekannte Ventile bestehen im wesentlichen aus drei Baugruppen, nämlich aus einem Ventilgehäuse mit Ventilsitz, einem Ventilan¬ trieb sowie einem Ventil-Innenteil mit einemKnown valves essentially consist of three subassemblies, namely a valve housing with a valve seat, a valve drive and a valve inner part with one
Ventilteller, einem Faltenbalg und einem Dichtkragen. Die Ven¬ tilantriebe können mechanisch betätigbar sein. Üblich ist dabei die Verwendung von Drehknöpfen. Je nach dem, ob die öffnungs- und Schließbewegung schnell oder langsam durchgeführt werden soll, sind diese mechanischen Antriebe unterschiedlich gestaltet. Außerdem sind pneumatisch, elektro-pneumatisch und elektro-ma- gnetisch betätigbare Ventile bekannt. Vakuumventile der hier betroffenen Art sind beispielsweise in der Broschüre "Ventile" offenbart, welche Bestandteil des Katalogs HV 200, Teil 6, Auflage 08/86 der Anmelderin ist.Valve plate, a bellows and a sealing collar. The valve drives can be actuated mechanically. The use of knobs is common. Depending on whether the opening and closing movement should be carried out quickly or slowly, these mechanical drives are designed differently. Pneumatically, electro-pneumatically and electro-magnetically actuable valves are also known. Vacuum valves of here affected type are disclosed for example in the brochure "valves", which is part of the catalog HV 200, part 6, edition 08/86 of the applicant.
Der in Vakuumventilen befindliche Faltenbalg hat die Aufgabe, den von Medien berührten Innenraum des Ventilgehäuses von der Atmo¬ sphäre zu trennen. Der Faltenbalg erstreckt sich deshalb vom Ventilteller bis zu einem Dichtkragen, der vakuumdicht zwischen dem Antrieb und dem Ventilgehäuse montiert ist. Als geeigneter Werkstoff für den Faltenbalg, den Ventilteller und den Flansch hat sich Edelstahl erwiesen. Ein Edelstahlfaltenbalg muß sehr dünn (0,1 mm) ausgebildet sein, so daß er schnelle Bewegungen des Ventiltellers nicht allzu stark behindert. Dünnwandiger Edelstahl erfüllt außerdem die Anforderungen an eine hochvakuumdichte Trennung, ohne daß Verformungen auftreten. Schließlich ist Edelstahl relativ korrosionsfest.The bellows located in vacuum valves has the task of separating the interior of the valve housing, which is in contact with media, from the atmosphere. The bellows therefore extends from the valve plate to a sealing collar, which is mounted in a vacuum-tight manner between the actuator and the valve housing. Stainless steel has proven to be a suitable material for the bellows, the valve plate and the flange. A stainless steel bellows must be very thin (0.1 mm) so that it does not obstruct rapid movements of the valve plate too much. Thin-walled stainless steel also meets the requirements for high-vacuum-tight separation without deformation. After all, stainless steel is relatively corrosion-resistant.
Kritische Bereiche der vorbekannten Vakuumventil-Innenteile sind die Verbindungen der beiden Stirnseiten des Faltenbalges mit dem Ventilteller und dem Dichtkragen. Diese Verbindungen müssen hochvakuumdicht sein und sollen möglichst lange Standzeiten haben. Bei den bekannten Vakuumventilen erfolgt die Verbindung des Faltenbalges mit dem Ventilteller und dem Dichtkragen durch Schweißen. Der technische Aufwand für diese Fügeverbindung ist sehr hoch, da diese Arbeit nur von hochqualifizierten Schweißern ausgeführt werden kann. Dabei muß eine spezielle Schweißmaschine eingesetzt werden. Die Anforderungen an die Genauigkeit der Fügeteile sind sehr hoch. Weiterhin treten die bei Schweißvor¬ gängen infolge der lokalen Erhitzungen bekannten Materialspan¬ nungen in der Schweißnaht sowie in der Übergangszone auf. Nicht alle der in dieser Weise hergestellten Fügeverbindungen erfüllen deshalb die hohen Anforderungen an die Hochvakuumdichtheit. Schließlich sind die Standzeiten der Schweißnähte begrenzt. Immer wieder treten bereits nach relativ kurzen Betriebszeiten Reso¬ nanz- oder Ermüdungsbrüche auf und machen das Ventil unbrauchbar. Dieses gilt insbesondere für schnellschließende Ventile mit elektrisch betätigbaren Antrieben, bei denen die Faltenbälge besonders hoch belastet werden. Der vorliegenden Erfindung liegt die Aufgabe zugrunde, den mit der Herstellung der Verbindungen zwischen Faltenbalg und Ventil¬ teller sowie Dichtkragen verbundenen technischen Aufwand bei gleichzeitiger Reduzierung des Ausschusses und Erhöhung der Standzeiten zu vereinfachen.Critical areas of the known vacuum valve inner parts are the connections of the two end faces of the bellows with the valve disk and the sealing collar. These connections must be highly vacuum-tight and should have a long service life. In the known vacuum valves, the bellows is connected to the valve plate and the sealing collar by welding. The technical effort for this joint connection is very high, since this work can only be carried out by highly qualified welders. A special welding machine must be used. The requirements for the accuracy of the parts to be joined are very high. Furthermore, the material stresses known in welding processes due to the local heating occur in the weld seam and in the transition zone. Not all of the joint connections produced in this way therefore meet the high requirements for high vacuum tightness. Finally, the service life of the weld seams is limited. Again and again, resonance or fatigue breaks occur after relatively short operating times and make the valve unusable. This applies in particular to quick-closing valves with electrically actuated drives in which the bellows are subjected to particularly high loads. The object of the present invention is to simplify the technical outlay associated with the production of the connections between the bellows and the valve plate and the sealing collar while at the same time reducing the rejects and increasing the service life.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß die Verbindung zwischen dem Faltenbalg und dem Ventilteller durch Löten im Vakuum hergestellt wird. Vorzugsweise wird gleichzeitig die Verbindung zwischen dem Faltenbalg und seinem Dichtkragen ebenfalls in dieser Weise hergestellt.According to the invention this object is achieved in that the connection between the bellows and the valve plate is made by soldering in a vacuum. Preferably, the connection between the bellows and its sealing collar is also simultaneously made in this way.
Die Anwendung dieser Erfindung hat zunächst den Vorteil, daß der erforderliche technische Aufwand und damit die Herstellkosten im Vergleich zum Stand der Technik wesentlich geringer sind. Hoch¬ qualifizierte Mitarbeiter sind zur Herstellung der Verbindung zwischen dem Faltenbalg und seinen angrenzenden Bauteilen nicht mehr erforderlich. Die Anforderungen an die Genauigkeit der miteinander zu verbindenden Bauteile sind wesentlich geringer. Weiterhin ist vorteilhaft, daß das Ventilinnenteil nach der Herstellung der Verbindungen durch Löten im Vakuumofen ausgeheizt ist und damit unmittelbar der Weiterverarbeitung bzw. Montage zur Verfügung steht. Ein Reinigungsvorgang, wie er nach Schweißvor¬ gängen wegen der Anlauffarben und der vorhandenen Fette nötig ist, entfällt. Die unmittelbaren Kontaktflächen zwischen dem Faltenbalg und seinen angrenzenden Bauteilen sind nach dem erfindungsgemäßen Lötvorgang wesentlich größer als beim Schwei߬ vorgang nach dem Stand der Technik. Die Dichtheit der Verbin¬ dungen ist damit gewährleistet. Ausschüsse wegen undichter Verbindungen treten nicht mehr auf. Vorteilhaft ist weiterhin, daß der mit dem Faltenbalg zu verbindende Dichtkragen keinen sich in axialer Richtung erstreckenden Anschweißkragen mehr benötigt. Der Dichtkragen kann als einfache Ringscheibe gestaltet sein, so daß sich durch die Anwendung der Erfindung die Möglichkeit ergibt, Ventilinnenteile mit geringeren Bauhöhen als beim Stand der Technik herzustellen. Kleinere Ventilinnenteile sind viel¬ seitiger einsetzbar und erhöhen damit die Flexibilität der Fertigung nach dem Baukastenprinzip. Ein wesentlicher und überraschender Vorteil besteht noch darin, daß nach dem erfindungsgemäßen Verfahren hergestellte Ventilin¬ nenteile eine gegenüber dem Stand der Technik wesentlich höhere - um mehr als den Faktor 4 - Standzeit haben. Offensichtlich beruht dieser Vorteil darauf, daß das Material durch den Lötvorgang insbesondere in der Lötzone eine gleichmäßige Struktur ohne die beim Schweißen auftretenden Temperaturzonen hinter der Naht erhält. Resonanz - oder Ermüdungsbrüche treten wesentlich sel¬ tener auf.The application of this invention has the advantage that the required technical effort and thus the manufacturing costs are significantly lower compared to the prior art. Highly qualified employees are no longer required to establish the connection between the bellows and its adjacent components. The requirements for the accuracy of the components to be connected to each other are significantly lower. It is also advantageous that the valve inner part is heated by soldering in a vacuum oven after the connections have been made and is thus immediately available for further processing or assembly. A cleaning process, as is necessary after welding processes because of the tarnishing colors and the greases present, is omitted. The direct contact surfaces between the bellows and its adjacent components are much larger after the soldering process according to the invention than with the welding process according to the prior art. The tightness of the connections is thus guaranteed. Committees for leaky connections no longer occur. It is also advantageous that the sealing collar to be connected to the bellows no longer requires a welding collar extending in the axial direction. The sealing collar can be designed as a simple washer, so that the application of the invention provides the possibility of producing valve interior parts with lower overall heights than in the prior art. Smaller valve inner parts can be used in a variety of ways and thus increase the flexibility of production on a modular basis. An essential and surprising advantage is that valve interior parts produced by the process according to the invention have a service life which is considerably longer than the prior art - by more than a factor of 4. Obviously, this advantage is based on the fact that the soldering process gives the material a uniform structure, in particular in the soldering zone, without the temperature zones behind the seam that occur during welding. Breaks in resonance or fatigue occur much less frequently.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 und 2 dargestellten Ausführungsbeispielen erläutert werden. Es zeigenFurther advantages and details of the invention will be explained on the basis of the exemplary embodiments shown in FIGS. 1 and 2. Show it
- Figur 1 einen Teilschnitt durch ein erfindungsgemäß ausgebildetes Ventil und- Figure 1 is a partial section through an inventive valve and
- Figur 2 ein Ventilinnenteil nach der Erfindung- Figure 2 shows a valve inner part according to the invention
Das in Figur 1 dargestellte Ventil 1 umfaßt den teilweise darge¬ stellten elektromagnetischen Antrieb 2, von dem im wesentlichen nur der Anker 3 sichtbar ist. An einem flanschartigen Rand 4 des Antriebs 2 ist das Ventilgehäuse 5 befestigt. In die dem Rand 4 zugewandte Stirnseite des Ventilgehäuses 5 ist der Dichtring 6 eingelassen, so daß die Verbindung zum Prozeßraum vakuumdicht ist. Das Ventilgehäuse 5 weist zwei Anschlußstutzen 7 und 8 auf, die über die Öffnung 9 miteinander verbindbar sind. Der obere Rand der Öffnung 9 bildet einen Ventilsitz 11. Dem Ventilsitz 11 und damit der Öffnung 9 ist der Ventilteller 12 mit dem Dichtring 13 zugeordnet. Der Ventilteller 12 ist am unteren Ende des Ventilstempels 14 gehaltert. Das obere Ende des Ventilstempels 14 ist über einen Gewindestutzen 15 in den Anker 3 des Ventilan¬ triebs 2 eingeschraubt.The valve 1 shown in FIG. 1 comprises the partially illustrated electromagnetic drive 2, of which essentially only the armature 3 is visible. The valve housing 5 is fastened to a flange-like edge 4 of the drive 2. The sealing ring 6 is embedded in the end face of the valve housing 5 facing the edge 4, so that the connection to the process space is vacuum-tight. The valve housing 5 has two connecting pieces 7 and 8, which can be connected to one another via the opening 9. The upper edge of the opening 9 forms a valve seat 11. The valve seat 12 and thus the opening 9 is associated with the valve plate 12 with the sealing ring 13. The valve disk 12 is held at the lower end of the valve plunger 14. The upper end of the valve plunger 14 is screwed into the armature 3 of the valve drive 2 via a threaded connector 15.
Um den Innenraum des Antriebs 2 vakuumdicht vom Innenraum des Ventilgehäuses 5 zu trennen, ist ein Faltenbalg 16 vorgesehen, der sich zwischen dem Ventilteller 12 und einer Ringscheibe 17 erstreckt. Sowohl der Ventilteller 12 als auch die Ringscheibe 17 weisen Eindrehungen 18 bzw. 19 auf, in die der Balg 16 eingelötet und damit vakuumdicht mit diesen Bauteilen verbunden ist. Der Außenrand der Ringscheibe 17 befindet sich zwischen dem Flansch 4 des Antriebs 2 und der Stirnseite des Ventilgehäuses 5 und erstreckt sich bis in den Bereich des Dichtringes 6, so daß auch in diesem Bereich die Dichtheit gewährleistet ist. Mit 21 ist noch ein Schlauchabschnitt bezeichnet, der dem Faltenbalg 16 von innen anliegt und eine Dämpfung von Balgschwingungen bewirkt.In order to separate the interior of the drive 2 in a vacuum-tight manner from the interior of the valve housing 5, a bellows 16 is provided which extends between the valve plate 12 and an annular disk 17. Both the valve plate 12 and the washer 17 have recesses 18 and 19, respectively, into which the bellows 16 is soldered and is therefore connected to these components in a vacuum-tight manner. The outer edge of the annular disc 17 is located between the flange 4 of the drive 2 and the end face of the valve housing 5 and extends into the area of the sealing ring 6, so that tightness is ensured in this area as well. 21 also designates a hose section which abuts the bellows 16 from the inside and dampens bellows vibrations.
Figur 2 zeigt vergrößert ein Ventilinnenteil, bestehend aus Teller 12, Balg 16 und Flansch bzw. Ringscheibe 17. Der Teller 12 ist mit einer Eindrehung 18 mit äußerem Rand ausgerüstet, welcher der untere, sich senkrecht zur Balgachse nach außen erstreckende Balgteilabschnitt auf- bzw. anliegt. Dementsprechend weist der Dichtkragen 17 eine innere Eindrehung 19 mit äußerem Rand auf, in welche sich der obere, sich senkrecht zu Balgachse nach außen erstreckende Balgteilabschnitt erstreckt.Figure 2 shows an enlarged valve inner part, consisting of plate 12, bellows 16 and flange or washer 17. The plate 12 is equipped with a recess 18 with an outer edge, which the lower, extending perpendicular to the bellows axis portion of the bellows section or is present. Correspondingly, the sealing collar 17 has an inner recess 19 with an outer edge, into which the upper part of the bellows, which extends perpendicularly to the bellows axis, extends.
In der dargestellten oder in der auf den Kopf gestellten Position werden die Bauteile 12, 16, 17 miteinander durch Löten im Vakuum verbunden. Dazu wird beim Aufbau der Teile in die dargestellte Lötposition das Lot z.B. in Form von dünnen Ringscheiben oder als Lötpaste zwischen die miteinander zu verbindenden Bereiche eingebracht. Danach werden die Teile - vorzugsweise eine Mehrzahl von zu verlötenden Innenteilen - in einen Vakuumofen eingesetzt. Im Ofen erfolgt der Lötvorgang unter Vakuum und bei erhöhter Temperatur.In the position shown or in the position turned upside down, the components 12, 16, 17 are connected to one another by soldering in a vacuum. For this purpose, the solder is e.g. when assembling the parts in the soldering position shown. in the form of thin washers or as a solder paste between the areas to be connected. The parts - preferably a plurality of inner parts to be soldered - are then inserted into a vacuum oven. The soldering process takes place in the oven under vacuum and at elevated temperature.
Je nach Lot liegt die Ofentemperatur zwischen 600° C und 1130° C. Bei der Verwendung von Silber-Kupfer-Basislot reicht eine zwi¬ schen 600° C und 1000° C liegende Temperatur aus. Besonders zweckmäßig sind jedoch die Verwendung von Nickelbasislot und eine Ofentemperatur von etwa 1050° C Während des Lötens wird im Ofen ein Vakuum mit einem Wert zwischen 10_a und 10—* mbar aufrecht¬ erhalten; vorzugsweise ist er kleiner als 10-3 mbar. Die Dauer des Lötvorganges beträgt etwa 2 bis 3 Stunden.Depending on the solder, the furnace temperature is between 600 ° C and 1130 ° C. When using silver-copper base solder, a temperature between 600 ° C and 1000 ° C is sufficient. However, are particularly useful, the use of nickel-based solder and a furnace temperature of about 1050 ° C in an oven during soldering is a vacuum with a value between 10 and _a received 10- * mbar aufrecht¬; it is preferably less than 10- 3 mbar. The duration of the soldering process is approximately 2 to 3 hours.
Die Abkühlung der gelöteten Teile muß zur Vermeidung von Materi¬ al-Strukturveränderungen möglichst schnell erfolgen, d.h., innerhalb weniger Minuten. Dazu hat es sich als vorteilhaft erwiesen, wenn die Abkühlung unter einer Schutzgasatmosphäre im Ofen durchgeführt wird. Dazu wird der Ofen zunächst mit Inertgas, beispielsweise Stickstoff oder Argon, geflutet. Zur Beschleuni¬ gung der Abkühlung wird kühles Inertgas ständig - z.B. im Kreis¬ lauf - in den Ofen eingelassen und das aufgewärmte Inertgas abgeführt. Nach wenigen Minuten stehen die Innenteile mit einer den hohen Anforderungen in der Hochvakuumtechnik genügenden Reinheit unmittelbar zur weiteren Montage zur Verfügung.The soldered parts must be cooled as quickly as possible to avoid material structure changes, ie within a few minutes. For this purpose, it has proven to be advantageous if the cooling is carried out in a protective gas atmosphere in the furnace. To do this, the furnace is first flooded with inert gas, for example nitrogen or argon. In order to accelerate the cooling, cool inert gas is constantly introduced into the furnace, for example in a circuit, and the heated inert gas is removed. After a few minutes, the interior parts with a purity that meets the high requirements of high vacuum technology are immediately available for further assembly.
Es hat sich gezeigt, daß ein Federbalg durch das mit dem Löten verbundene zeitweise Aufheizen weicher wird. Dieses ist für den Einsatz in schnellschaltenden Ventilen zunächst günstig. Die Gefahr von unerwünschten Deformationen kann mit Hilfe des in Figur 1 dargestellten Dämpfungsgliedes 21 vermieden werden, welches dann gleichzeitig eine Stützfunktion hat. Nach einer längeren Bewegung des Faltenbalges während des Normalbetriebes tritt jedoch wieder die ursprüngliche Federsteifigkeit ein. It has been shown that a bellows becomes softer due to the temporary heating associated with soldering. This is initially cheap for use in fast-switching valves. The risk of undesired deformations can be avoided with the aid of the damping element 21 shown in FIG. 1, which then also has a supporting function. After a longer movement of the bellows during normal operation, however, the original spring stiffness returns.

Claims

Verfahren zur Herstellung von Ventilinnenteilen für Vakuumventile mit Ventilteller und Faltenbalg sowie nach diesem Verfahren hergestellte InnenteilePATENTANSPRÜCHE Process for the production of valve inner parts for vacuum valves with valve disc and bellows as well as inner parts produced according to this process
1. Verfahren zur Herstellung eines Ventilinnenteiles für ein Vakuumventil mit Ventilteller (12), Faltenbalg (16) und Dichtkragen (17), dadurch gekennzeichnet, daß die Verbin¬ dungen der Stirnseiten des Faltenbalges (16) mit dem Ven¬ tilteller (12) bzw. mit dem Dichtkragen (17) durch Löten im Vakuum hergestellt werden.1. A method for producing a valve inner part for a vacuum valve with valve plate (12), bellows (16) and sealing collar (17), characterized in that the connections of the end faces of the bellows (16) with the Ven¬ tilt plate (12) or can be produced with the sealing collar (17) by soldering in a vacuum.
2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die durch Löten miteinander zu verbindenden Bauteile (12, 16 bzw. 12, 16, 17) in ihrer Lötposition aufgebaut werden, nachdem Lot in Form von dünnen Ringscheiben oder als Löt¬ paste zwischen die miteinander zu verbindenden Bereiche eingebracht wurde, und daß die miteinander zu verbindenden Teile in dieser Position in einen Vakuumofen eingesetzt werden, in dem der Lötvorgang unter Vakuum und bei erhöhter Temperatur durchgeführt wird.2. The method according to claim 1, characterized in that the components to be connected by soldering (12, 16 or 12, 16, 17) are assembled in their soldering position after solder in the form of thin washers or as a solder paste between the areas to be connected to one another has been introduced, and that the parts to be connected to one another are inserted in this position in a vacuum oven in which the soldering process is carried out under vacuum and at elevated temperature.
3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, daß die Abkühlung der durch Löten miteinander verbundenen Bauteile (12, 16 bzw. 12, 16, 17) im Vakuumofen unter einer Inertgas- atmosphäre durchgeführt wird. 3. The method according to claim 2, characterized in that the cooling of the components connected by soldering (12, 16 or 12, 16, 17) is carried out in a vacuum oven under an inert gas atmosphere.
4. Verfahren nach Anspruch 3, dadurch gekennzeichne , daß der Vakuumofen nach dem Lötprozeß mit Inertgas geflutet wird und daß danach ständig kühles Intergas zugeführt und das aufge¬ wärmte Inertgas abgeführt wird.4. The method according to claim 3, characterized in that the vacuum furnace is flooded with inert gas after the soldering process and that thereafter cool intergas is continuously supplied and the heated inert gas is removed.
5. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Druck im Vakuumofen während des Lötprozesses 10-a bis 10-"* mbar, vorzugsweise kleiner als 10-3 mbar, beträgt.5. The method according to any one of the preceding claims, characterized in that the pressure in the vacuum furnace during the soldering process 10 -a to 10 - "* mbar, preferably less than 10- 3 mbar.
6. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichne , daß die Temperatur im Vakuumofen während des Lötprozesses zwischen 600° C und 1000° C liegt und daß als Lot Silber-Kupfer-Basislot verwendet wird.6. The method according to any one of the preceding claims, characterized in that the temperature in the vacuum furnace during the soldering process is between 600 ° C and 1000 ° C and that silver-copper base solder is used as solder.
7. Verfahren nach einem der Ansprüche 1 bis 5, dadurch gekenn¬ zeichnet , daß die Temperatur im Vakuumofen während des Lötprozesses höher als 1000° C, vorzugsweise 1050° C, ist und daß als Lot Nickelbasislot verwendet wird.7. The method according to any one of claims 1 to 5, characterized gekenn¬ characterized in that the temperature in the vacuum furnace during the soldering process is higher than 1000 ° C, preferably 1050 ° C, and that nickel-based solder is used as solder.
8. Ventil mit einem aus Ventilteller (12), Faltenbalg (16) und Dichtkragen (17) bestehenden Ventilinnenteil, dadurch gekennzeichnet , daß die Verbindungen zwischen dem Falten¬ balg (16) und dem Ventilteller (12) sowie zwischen dem Faltenbalg (16) und dem Dichtkragen (17) im Vakuum bei erhöhter Temperatur hergestellte Lötverbindungen sind und daß der Dichtkragen (17) im wesentlichen die Form einer flachen Ringscheibe hat.8. Valve with a valve plate (12), bellows (16) and sealing collar (17) existing valve inner part, characterized in that the connections between the bellows (16) and the valve plate (12) and between the bellows (16) and the sealing collar (17) are made in vacuum at elevated temperature and that the sealing collar (17) is substantially in the form of a flat washer.
9. Ventil nach Anspruch 8, dadurch gekennzeichnet, daß der Ventilteller (12) und der Innenrand der Ringscheibe (17) jeweils mit einer Eindrehung (18, 19) ausgerüstet sind, in die sich die jeweils mit diesen Bauteilen zu verbindenden Stirnseiten des Faltenbalgs (16) zentrierend erstreckt. 9. Valve according to claim 8, characterized in that the valve plate (12) and the inner edge of the annular disc (17) are each equipped with a recess (18, 19) into which the respective end faces of the bellows to be connected to these components ( 16) extends centering.
PCT/EP1992/000054 1991-03-04 1992-01-14 Process for manufacturing the internal parts of a vacuum valve having a valve disc and pleated bellows, and internal valve parts manufactured by this process WO1992015813A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4106761.4 1991-03-04
DE19914106761 DE4106761A1 (en) 1991-03-04 1991-03-04 METHOD FOR THE PRODUCTION OF VALVE INTERNAL PARTS FOR VACUUM VALVES WITH VALVE PAD AND BELLOWS, AND INTERNAL PARTS MANUFACTURED BY THIS METHOD

Publications (1)

Publication Number Publication Date
WO1992015813A1 true WO1992015813A1 (en) 1992-09-17

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EP0750148A1 (en) * 1995-05-10 1996-12-27 Fujikin Incorporated Pressure controlling valve

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WO2001033126A1 (en) * 1999-11-03 2001-05-10 Tuchenhagen Gmbh Device for the torque-free operation of a closing member for a lift valve
DE10104998A1 (en) 2001-02-03 2002-08-22 Hydac Electronic Gmbh switching device

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US2800711A (en) * 1954-08-18 1957-07-30 Wall Colmonoy Corp Brazing method
GB845239A (en) * 1957-11-27 1960-08-17 Midland Ind Computing Improvements in valves for controlling the flow of fluids
US3080648A (en) * 1959-11-16 1963-03-12 Young Spring & Wire Corp Silver soldering apparatus and method
US3030983A (en) * 1961-03-16 1962-04-24 Mechtronics Corp Bellows
GB1135916A (en) * 1966-03-25 1968-12-11 Leybold Holding Ag An adjustable needle valve for vacuum installations
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750148A1 (en) * 1995-05-10 1996-12-27 Fujikin Incorporated Pressure controlling valve
US5634627A (en) * 1995-05-10 1997-06-03 Fujikin Incorporated Controller

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EP0574407A1 (en) 1993-12-22
DE4106761A1 (en) 1992-09-10

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