USH2087H1 - Pickling of refractory metals - Google Patents
Pickling of refractory metals Download PDFInfo
- Publication number
- USH2087H1 USH2087H1 US09/081,321 US8132198A USH2087H US H2087 H1 USH2087 H1 US H2087H1 US 8132198 A US8132198 A US 8132198A US H2087 H USH2087 H US H2087H
- Authority
- US
- United States
- Prior art keywords
- pickling
- solution
- tantalum
- bath
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005554 pickling Methods 0.000 title claims abstract description 41
- 239000003870 refractory metal Substances 0.000 title claims abstract description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 12
- 150000003839 salts Chemical class 0.000 claims abstract description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 20
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 14
- 239000011698 potassium fluoride Substances 0.000 claims description 11
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 8
- 238000004090 dissolution Methods 0.000 claims description 6
- 239000010955 niobium Substances 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- -1 alkali metal tantalum fluoride Chemical class 0.000 claims description 4
- 238000002425 crystallisation Methods 0.000 claims description 4
- 230000008025 crystallization Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000001272 nitrous oxide Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000356 contaminant Substances 0.000 claims description 3
- 239000000314 lubricant Substances 0.000 claims description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 3
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical group [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 claims description 3
- 239000002243 precursor Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 238000000354 decomposition reaction Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910001515 alkali metal fluoride Inorganic materials 0.000 claims 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims 1
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 230000000994 depressogenic effect Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 229910021645 metal ion Inorganic materials 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 235000003270 potassium fluoride Nutrition 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 239000000243 solution Substances 0.000 abstract description 14
- 238000011084 recovery Methods 0.000 abstract description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 4
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 4
- 239000012535 impurity Substances 0.000 abstract description 3
- 239000007864 aqueous solution Substances 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract 1
- 230000008929 regeneration Effects 0.000 description 8
- 238000011069 regeneration method Methods 0.000 description 8
- 239000003381 stabilizer Substances 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 230000004580 weight loss Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009533 lab test Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- 229920002449 FKM Polymers 0.000 description 1
- 229920006370 Kynar Polymers 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 235000021110 pickles Nutrition 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 150000003481 tantalum Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/36—Regeneration of waste pickling liquors
Definitions
- the present invention relates to process enhancements in pickling of refractory metals (Ta, Nb, Ti, Mo, W, V, Cr, Zr, Hf and alloys and mixtures), and more particularly Ta and Nb, incident to cleaning mill products and/or fabricated parts at the conclusion of mill processing or end product fabrication and at the end of intermediate steps, e.g. pickling drawn Ta wire or strip after each drawing or rolling pass, or each series of passes in a larger sequence, to remove lubricant and surface contaminants prior to an intermediate anneal.
- pickling is used herein in a broadest sense of cleaning the surface of a metal by a strong etching solution. Small, but valuable, portions of the metal are necessarily removed from the surface of the metal product and have to be recovered.
- a pickling bath comprising an aqueous solution of HF/H 2 O 2 with the HF and H2O 2 in a weight ratio (gpl/gpl) of from 4:1 to 15:1, while limiting the absolute amounts of HF to under 800 gpl, preferably under 400 gpl and more preferably about 10-200 gpl H 2 O 2 and to under 200 gpl and more preferably about 20-50 in relation to reasonably sized batches of tantalum (and correspondingly reduced as to other more etchable metals) to avoid excessive metal removal.
- the conditions are adjusted to achieve the effective surface etching of metal in 5-20 minutes. Temperature of the bath should be maintained between 20 and 40° C. for a median bath composition of 200 gpl HF and 10-50 gpl H 2 O 2 .
- H 2 O 2 solutions include stabilizers that may be provided in amounts of about 50-100% of peroxide amounts.
- Build up of Ta in solution to upper limits must be resolved by a bath regeneration step that includes Ta recovery.
- Addition of potassium fluoride (KF) provides a means of such regeneration/recovery as is indicated in the Apr. 23, 1982 Russian Inventor's Certificate of Balyasov et al. entitled “A Solution for the Chemical Pickling of Niobium and Its Alloys”.
- KF is added initially in small amounts to precipitate K 2 TaF 7 crystals and limit heat due to exothermic reaction, then in larger amounts and with cooling to accelerate crystallization, the KF amounts being about 1.0 to 1.5 times stoichiometric in relation to estimated Ta content in solution to limit excessive KF residuals in the bath after regeneration.
- the bath composition can accept a loading of etched metal up to and in some cases exceeding 300 gpl than allowing long usage before metal disposal and regeneration.
- Dissolved tantalum can be processed to a salt form (K 2 TaF 7 )reusable as a tantalum source by reduction in a manner well known in the art.
- FIG. 1 A A flowsheet of a projected plant layout for applying the invention is shown in FIG. 1 A and the operative equations for dissolution reactions therein are shown in FIG. 1B;
- FIGS. 2-9 are traces of tantalum weight loss (as a percentage) vs. variations of each of certain parameters of the pickling process as determined in laboratory tests described below.
- the second regeneration had 50 gpl Ta before and 7 gpl Ta, 5 gpl K afterward.
- the progress of the solution was studied to avoid an Fe concentration (from the hangers) level as high as 2 gpl which might cause H 2 O 2 decomposition. In fact the Fe maximum was seen to be less than 0.4 gpl.
- the etched wire and strip surfaces were studied and found to be just as well pickled as with conventional HF/HNO 3 baths.
- FIG. 1A shows a contemplated production scale pickling facility with continuous tantalum removal for handling these materials in a pickling bath 10 .
- Bath temperature is controlled via heat exchanger HE 1 pump (P 1 ).
- the KF is added on a batch or continuous basis to a crystallizer tank 12 and then to a settler tank 14 . Fines of etched away tantalum (in the form of tantalum salt) are captured at a filter 16 using an ethanol wash solution.
- An example of sizes of the liquid tanks are
- the bath 10 would typically be charged with 150 g/l HF, 10-20 gpl H 2 O 2 , and 10 gpl of a common H 2 O 2 stabilizer such as G. W. Richards Co. Broxide-C.
- the stabilizers comprise antioxidants in propylene glycol solution.
- the equipment should be prepared from materials compatible with HF and H 2 O 2 , e.g. PVC, polypropylene, Viton, Kynar, Teflon and in regions not directly exposed to HF or H 2 O 2 solution, stainless steel.
- the tanks could be stainless steel lined with PVC or polypropylene.
- FIGS. 2, 3 , 4 , 5 , 6 , 7 , 8 , 9 show, respectively, effects—as determined in laboratory tests—on tantalum weight loss of temperature (2), agitation (3), HF concentration (4), H 2 O 2 concentration, KF concentration (6), Ni+Cr concentration (7), H 2 O 2 stabilizer concentration (8) and Fe concentration (9).
- the pilot plant testing shows a modification of such relationships in the course of processing in much larger volumes of the pilot plant compared to the laboratory tests.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
TABLE 1 |
Comparison of Tantalum Product Thickness Change, Weight |
Loss, and Pickling | ||
Reduction in | Rate Corresponding | |
Thickness | Weight Loss, % | Equivalent Pickling |
or Diameter | 0.103- | 0.0284- | Rate, mg/(cm2-min, at |
0.44 | inch | inch | Indicated Pickling | |
Inch | diam. | diam. | Time, min. |
Mil | Micron | Square | wire | wire | 5 | 10 | 20 |
0.2 | 5.1 | 0.091 | 0.39 | 1.4 | 0.84 | 0.42 | 0.21 |
0.3 | 7.6 | 0.136 | 0.58 | 2.1 | 1.26 | 0.63 | 0.32 |
0.4 | 10.2 | 0.182 | 0.78 | 2.8 | 1.68 | 0.84 | 0.42 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/081,321 USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/081,321 USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Publications (1)
Publication Number | Publication Date |
---|---|
USH2087H1 true USH2087H1 (en) | 2003-11-04 |
Family
ID=29268620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/081,321 Abandoned USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Country Status (1)
Country | Link |
---|---|
US (1) | USH2087H1 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050089699A1 (en) * | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
WO2005068681A2 (en) * | 2003-12-19 | 2005-07-28 | Applied Materials, Inc. | Cleaning tantalum-containing deposits from process chamber components |
US20060105182A1 (en) * | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5164016A (en) * | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
US5215624A (en) * | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
US5338367A (en) * | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
US5354383A (en) * | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
US5690748A (en) * | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
US5843240A (en) * | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
US5908511A (en) * | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
-
1998
- 1998-05-19 US US09/081,321 patent/USH2087H1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5338367A (en) * | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
US5164016A (en) * | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
US5215624A (en) * | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
US5690748A (en) * | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
US5354383A (en) * | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
US5908511A (en) * | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
US5843240A (en) * | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
US9068273B2 (en) | 2002-11-25 | 2015-06-30 | Quantum Global Technologies LLC | Electrochemical removal of tantalum-containing materials |
US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
US7910218B2 (en) | 2003-10-22 | 2011-03-22 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
US20050089699A1 (en) * | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
WO2005068681A2 (en) * | 2003-12-19 | 2005-07-28 | Applied Materials, Inc. | Cleaning tantalum-containing deposits from process chamber components |
WO2005068681A3 (en) * | 2003-12-19 | 2005-09-15 | Applied Materials Inc | Cleaning tantalum-containing deposits from process chamber components |
US20060105182A1 (en) * | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
US20100086805A1 (en) * | 2004-11-24 | 2010-04-08 | Applied Materials, Inc. | Process chamber component with layered coating and method |
US8021743B2 (en) | 2004-11-24 | 2011-09-20 | Applied Materials, Inc. | Process chamber component with layered coating and method |
US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
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