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USD834686S1 - Shower plate - Google Patents

Shower plate Download PDF

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Publication number
USD834686S1
USD834686S1 US29/587,855 US201629587855F USD834686S US D834686 S1 USD834686 S1 US D834686S1 US 201629587855 F US201629587855 F US 201629587855F US D834686 S USD834686 S US D834686S
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United States
Prior art keywords
shower plate
view
shower
plate
sectional
Prior art date
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US29/587,855
Inventor
Ryoko Yamada
Jun Kawahara
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM IP Holding BV
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ASM IP Holding BV
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Publication date
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Priority to US29/587,855 priority Critical patent/USD834686S1/en
Assigned to ASM IP HOLDINGS B.V. reassignment ASM IP HOLDINGS B.V. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YAMADA, RYOKO, KAWAHARA, JUN, SATO, KAZUO
Priority to JPD2017-11900F priority patent/JP1590060S/ja
Priority to TW106303189F priority patent/TWD190398S/en
Assigned to ASM IP HOLDING B.V. reassignment ASM IP HOLDING B.V. CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME PREVIOUSLY RECORDED AT REEL: 040673 FRAME: 0719. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Assignors: YAMADA, RYOKO, KAWAHARA, JUN, SATO, KAZUO
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FIG. 1 is a front perspective view of a shower plate in accordance with the design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a cross-sectional view thereof, taken along line 6-6 of FIG. 2;
FIG. 7 is a cross-sectional view thereof, taken along line 7-7 of FIG. 2;
FIG. 8 is a cross-sectional view thereof, taken along line 8-8 of FIG. 2; and,
FIG. 9 is a cross-sectional view thereof, taken along line 9-9 of FIG. 2.

Claims (1)

    CLAIM
  1. The ornamental design for a shower plate, as shown and described.
US29/587,855 2016-12-15 2016-12-15 Shower plate Active USD834686S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/587,855 USD834686S1 (en) 2016-12-15 2016-12-15 Shower plate
JPD2017-11900F JP1590060S (en) 2016-12-15 2017-06-01
TW106303189F TWD190398S (en) 2016-12-15 2017-06-12 Shower plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/587,855 USD834686S1 (en) 2016-12-15 2016-12-15 Shower plate

Publications (1)

Publication Number Publication Date
USD834686S1 true USD834686S1 (en) 2018-11-27

Family

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US29/587,855 Active USD834686S1 (en) 2016-12-15 2016-12-15 Shower plate

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US (1) USD834686S1 (en)
JP (1) JP1590060S (en)
TW (1) TWD190398S (en)

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USD935271S1 (en) * 2018-05-01 2021-11-09 Nuwave, Llc Lid for a beverage cartridge
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD935572S1 (en) 2019-05-24 2021-11-09 Asm Ip Holding B.V. Gas channel plate
USD930782S1 (en) 2019-08-22 2021-09-14 Asm Ip Holding B.V. Gas distributor

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100003829A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped monolithic showerhead electrode
US20110297759A1 (en) * 2009-02-24 2011-12-08 Nikles Tec Italia S.R.L. Device for Dispensing an Aerated Jet of Water
US8083853B2 (en) 2004-05-12 2011-12-27 Applied Materials, Inc. Plasma uniformity control by gas diffuser hole design
USD665055S1 (en) * 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
US8402918B2 (en) * 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
US20140273528A1 (en) 2013-03-14 2014-09-18 Asm Ip Holding B.V. Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD733257S1 (en) * 2014-02-14 2015-06-30 Hansgrohe Se Overhead shower
US20160040410A1 (en) * 2014-08-07 2016-02-11 Brasscraft Manufacturing Company Elastic Membrane Strainer for a Drain
USD751176S1 (en) * 2014-08-07 2016-03-08 Hansgrohe Se Overhead shower
USD785766S1 (en) * 2016-06-15 2017-05-02 Asm Ip Holding B.V. Shower plate
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD793526S1 (en) * 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD794753S1 (en) * 2016-04-08 2017-08-15 Applied Materials, Inc. Showerhead for a semiconductor processing chamber

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD612454S1 (en) 2009-06-15 2010-03-23 James Wu Shower head

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8083853B2 (en) 2004-05-12 2011-12-27 Applied Materials, Inc. Plasma uniformity control by gas diffuser hole design
US20100003829A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped monolithic showerhead electrode
US20110297759A1 (en) * 2009-02-24 2011-12-08 Nikles Tec Italia S.R.L. Device for Dispensing an Aerated Jet of Water
US8402918B2 (en) * 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
USD665055S1 (en) * 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
US20140273528A1 (en) 2013-03-14 2014-09-18 Asm Ip Holding B.V. Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
USD733261S1 (en) * 2014-02-04 2015-06-30 Asm Ip Holding B.V. Top plate
USD735836S1 (en) * 2014-02-04 2015-08-04 Asm Ip Holding B.V. Shower plate
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD733843S1 (en) * 2014-02-04 2015-07-07 ASM IP Holding, B.V. Shower plate
USD733257S1 (en) * 2014-02-14 2015-06-30 Hansgrohe Se Overhead shower
US20160040410A1 (en) * 2014-08-07 2016-02-11 Brasscraft Manufacturing Company Elastic Membrane Strainer for a Drain
USD751176S1 (en) * 2014-08-07 2016-03-08 Hansgrohe Se Overhead shower
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD793526S1 (en) * 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD794753S1 (en) * 2016-04-08 2017-08-15 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD785766S1 (en) * 2016-06-15 2017-05-02 Asm Ip Holding B.V. Shower plate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Korean Office Action dated Jan. 12, 2018 in corresponding Korean Patent Application No. 30-2017-0023146.

Cited By (230)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11725277B2 (en) 2011-07-20 2023-08-15 Asm Ip Holding B.V. Pressure transmitter for a semiconductor processing environment
US11967488B2 (en) 2013-02-01 2024-04-23 Asm Ip Holding B.V. Method for treatment of deposition reactor
US11795545B2 (en) 2014-10-07 2023-10-24 Asm Ip Holding B.V. Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
US11742189B2 (en) 2015-03-12 2023-08-29 Asm Ip Holding B.V. Multi-zone reactor, system including the reactor, and method of using the same
US11956977B2 (en) 2015-12-29 2024-04-09 Asm Ip Holding B.V. Atomic layer deposition of III-V compounds to form V-NAND devices
US11676812B2 (en) 2016-02-19 2023-06-13 Asm Ip Holding B.V. Method for forming silicon nitride film selectively on top/bottom portions
US11453943B2 (en) 2016-05-25 2022-09-27 Asm Ip Holding B.V. Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
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US11610775B2 (en) 2016-07-28 2023-03-21 Asm Ip Holding B.V. Method and apparatus for filling a gap
US11694892B2 (en) 2016-07-28 2023-07-04 Asm Ip Holding B.V. Method and apparatus for filling a gap
US11532757B2 (en) 2016-10-27 2022-12-20 Asm Ip Holding B.V. Deposition of charge trapping layers
US11810788B2 (en) 2016-11-01 2023-11-07 Asm Ip Holding B.V. Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US11396702B2 (en) 2016-11-15 2022-07-26 Asm Ip Holding B.V. Gas supply unit and substrate processing apparatus including the gas supply unit
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US11390950B2 (en) 2017-01-10 2022-07-19 Asm Ip Holding B.V. Reactor system and method to reduce residue buildup during a film deposition process
US12106965B2 (en) 2017-02-15 2024-10-01 Asm Ip Holding B.V. Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
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USD990534S1 (en) 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
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US12009224B2 (en) 2020-09-29 2024-06-11 Asm Ip Holding B.V. Apparatus and method for etching metal nitrides
US12107005B2 (en) 2020-10-06 2024-10-01 Asm Ip Holding B.V. Deposition method and an apparatus for depositing a silicon-containing material
US12051567B2 (en) 2020-10-07 2024-07-30 Asm Ip Holding B.V. Gas supply unit and substrate processing apparatus including gas supply unit
US11827981B2 (en) 2020-10-14 2023-11-28 Asm Ip Holding B.V. Method of depositing material on stepped structure
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US11901179B2 (en) 2020-10-28 2024-02-13 Asm Ip Holding B.V. Method and device for depositing silicon onto substrates
US12027365B2 (en) 2020-11-24 2024-07-02 Asm Ip Holding B.V. Methods for filling a gap and related systems and devices
US11891696B2 (en) 2020-11-30 2024-02-06 Asm Ip Holding B.V. Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
US11946137B2 (en) 2020-12-16 2024-04-02 Asm Ip Holding B.V. Runout and wobble measurement fixtures
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US11885020B2 (en) 2020-12-22 2024-01-30 Asm Ip Holding B.V. Transition metal deposition method
USD980814S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
USD981973S1 (en) * 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus
USD1023959S1 (en) 2021-05-11 2024-04-23 Asm Ip Holding B.V. Electrode for substrate processing apparatus
USD980813S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD990441S1 (en) 2021-09-07 2023-06-27 Asm Ip Holding B.V. Gas flow control plate
US12148609B2 (en) 2021-09-13 2024-11-19 Asm Ip Holding B.V. Silicon oxide deposition method
USD1038900S1 (en) * 2021-09-30 2024-08-13 Lam Research Corporation Showerhead for semiconductor processing

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