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USD815385S1 - Wafer support ring - Google Patents

Wafer support ring Download PDF

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Publication number
USD815385S1
USD815385S1 US29/580,872 US201629580872F USD815385S US D815385 S1 USD815385 S1 US D815385S1 US 201629580872 F US201629580872 F US 201629580872F US D815385 S USD815385 S US D815385S
Authority
US
United States
Prior art keywords
support ring
wafer support
view
wafer
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/580,872
Inventor
Eric Kirkland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Priority to US29/580,872 priority Critical patent/USD815385S1/en
Priority to TW106301900F priority patent/TWD189096S/en
Priority to JPD2017-7945F priority patent/JP1590044S/ja
Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIRKLAND, ERIC
Application granted granted Critical
Publication of USD815385S1 publication Critical patent/USD815385S1/en
Assigned to GOLDMAN SACHS BANK USA reassignment GOLDMAN SACHS BANK USA SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ENTEGRIS, INC., SAES PURE GAS, INC.
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Assignors: GOLDMAN SACHS BANK USA
Assigned to TRUIST BANK, AS NOTES COLLATERAL AGENT reassignment TRUIST BANK, AS NOTES COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CMC MATERIALS, INC., ENTEGRIS GP, INC., ENTEGRIS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, POCO GRAPHITE, INC., QED TECHNOLOGIES INTERNATIONAL, INC.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a top plan view of a wafer support ring according of to an embodiment of the invention.
FIG. 2 is a top perspective view of the wafer support ring depicted in FIG. 1.
FIG. 3 is a cross-sectional view of the wafer support ring taken at line 3-3 of FIG. 1.
FIG. 4 is a cross-sectional view of the wafer support ring taken at line 4-4 of FIG. 1.
FIG. 5 is a cross-sectional view of the wafer support ring taken at line 5-5 of FIG. 1
FIG. 6 is a left elevational view of the wafer support ring.
FIG. 7 is a front plan view of the wafer support ring.
FIG. 8 is a bottom perspective view of the wafer support ring; and,
FIG. 9 is a bottom plan view of the wafer support ring.

Claims (1)

    CLAIM
  1. I claim the ornamental design for a wafer support ring, as shown and described.
US29/580,872 2016-10-13 2016-10-13 Wafer support ring Active USD815385S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/580,872 USD815385S1 (en) 2016-10-13 2016-10-13 Wafer support ring
TW106301900F TWD189096S (en) 2016-10-13 2017-04-13 Wafer support ring
JPD2017-7945F JP1590044S (en) 2016-10-13 2017-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/580,872 USD815385S1 (en) 2016-10-13 2016-10-13 Wafer support ring

Publications (1)

Publication Number Publication Date
USD815385S1 true USD815385S1 (en) 2018-04-10

Family

ID=60191666

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/580,872 Active USD815385S1 (en) 2016-10-13 2016-10-13 Wafer support ring

Country Status (3)

Country Link
US (1) USD815385S1 (en)
JP (1) JP1590044S (en)
TW (1) TWD189096S (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD835760S1 (en) * 2015-11-27 2018-12-11 Ebara Corporation Sealing ring
USD873981S1 (en) * 2017-06-27 2020-01-28 Nok Corporation Seal ring
USD875900S1 (en) * 2016-10-21 2020-02-18 Nok Corporation Seal
USD875899S1 (en) * 2016-10-21 2020-02-18 Nok Corporation Seal
USD912784S1 (en) * 2018-02-08 2021-03-09 Nok Corporation Seal
USD917825S1 (en) * 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
USD940670S1 (en) * 2019-09-26 2022-01-11 Willbe S&T Co., Ltd. Retainer ring for chemical mechanical polishing device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1643123S (en) 2018-07-25 2019-10-07
JP1642983S (en) 2018-07-25 2019-10-07
JP1643124S (en) 2018-07-25 2019-10-07
JP1642984S (en) 2018-07-25 2019-10-07
JP1643125S (en) 2018-07-25 2019-10-07

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893649A (en) * 1971-08-09 1975-07-08 Dynamic Form Systems Inc Bag holder
US4867401A (en) * 1988-08-04 1989-09-19 Graff Frederick E Bag holder
US4899967A (en) * 1989-01-17 1990-02-13 Johnson Austin E Portable flexible bag holder
USD457283S1 (en) * 1995-04-05 2002-05-14 Jay L. Wayt Refuse bag retainer ring
US8016542B2 (en) * 2007-05-31 2011-09-13 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
USD646764S1 (en) * 2010-11-04 2011-10-11 Faster S.P.A. Sealing gasket
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
USD667601S1 (en) * 2011-06-21 2012-09-18 Garbo Grabber, LLC Trash collecting device
TWD149672S (en) 2010-08-16 2012-10-11 荏原製作所股份有限公司 Sealing ring
TWD160525S (en) 2012-08-30 2014-05-11 安堤格里斯公司 Wafer carrier ring
USD743513S1 (en) * 2014-06-13 2015-11-17 Asm Ip Holding B.V. Seal ring
USD754308S1 (en) * 2012-08-07 2016-04-19 Nippon Valqua Industries, Ltd. Composite sealing material

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3893649A (en) * 1971-08-09 1975-07-08 Dynamic Form Systems Inc Bag holder
US4867401A (en) * 1988-08-04 1989-09-19 Graff Frederick E Bag holder
US4899967A (en) * 1989-01-17 1990-02-13 Johnson Austin E Portable flexible bag holder
USD457283S1 (en) * 1995-04-05 2002-05-14 Jay L. Wayt Refuse bag retainer ring
US8016542B2 (en) * 2007-05-31 2011-09-13 Applied Materials, Inc. Methods and apparatus for extending the reach of a dual scara robot linkage
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
TWD149672S (en) 2010-08-16 2012-10-11 荏原製作所股份有限公司 Sealing ring
USD646764S1 (en) * 2010-11-04 2011-10-11 Faster S.P.A. Sealing gasket
USD667601S1 (en) * 2011-06-21 2012-09-18 Garbo Grabber, LLC Trash collecting device
USD754308S1 (en) * 2012-08-07 2016-04-19 Nippon Valqua Industries, Ltd. Composite sealing material
TWD160525S (en) 2012-08-30 2014-05-11 安堤格里斯公司 Wafer carrier ring
USD723239S1 (en) * 2012-08-30 2015-02-24 Entegris, Inc. Wafer carrier ring
USD743513S1 (en) * 2014-06-13 2015-11-17 Asm Ip Holding B.V. Seal ring

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD835760S1 (en) * 2015-11-27 2018-12-11 Ebara Corporation Sealing ring
USD875900S1 (en) * 2016-10-21 2020-02-18 Nok Corporation Seal
USD875899S1 (en) * 2016-10-21 2020-02-18 Nok Corporation Seal
USD873981S1 (en) * 2017-06-27 2020-01-28 Nok Corporation Seal ring
USD912784S1 (en) * 2018-02-08 2021-03-09 Nok Corporation Seal
USD917825S1 (en) * 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
USD940670S1 (en) * 2019-09-26 2022-01-11 Willbe S&T Co., Ltd. Retainer ring for chemical mechanical polishing device

Also Published As

Publication number Publication date
JP1590044S (en) 2017-11-06
TWD189096S (en) 2018-03-11

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