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USD803283S1 - Wafer handling assembly - Google Patents

Wafer handling assembly Download PDF

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Publication number
USD803283S1
USD803283S1 US29/564,740 US201629564740F USD803283S US D803283 S1 USD803283 S1 US D803283S1 US 201629564740 F US201629564740 F US 201629564740F US D803283 S USD803283 S US D803283S
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US
United States
Prior art keywords
wafer handling
handling assembly
view
assembly
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/564,740
Inventor
Yuliy Rashkovsky
Brett Stuart Snowden
Miguel Angel Saldana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Priority to US29/564,740 priority Critical patent/USD803283S1/en
Assigned to VEECO INSTRUMENTS INC. reassignment VEECO INSTRUMENTS INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SALDANA, MIGUEL ANGEL, RASHKOVSKY, YULIY, SNOWDEN, Brett Stuart
Application granted granted Critical
Publication of USD803283S1 publication Critical patent/USD803283S1/en
Assigned to HSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENT reassignment HSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENT PATENT SECURITY AGREEMENT Assignors: VEECO INSTRUMENTS INC.
Active legal-status Critical Current
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Description

FIG. 1 is a top perspective view of a first embodiment of a wafer handling assembly.
FIG. 2 is a top view of the wafer handling assembly of FIG. 1.
FIG. 3 is a side view of the wafer handling assembly of FIG. 1.
FIG. 4 is another side view of the wafer handling assembly of FIG. 1.
FIG. 5 is a bottom perspective view of the wafer handling assembly of FIG. 1.
FIG. 6 is a top perspective view of a second embodiment of a wafer handling assembly.
FIG. 7 is a top view of the wafer handling assembly of FIG. 6.
FIG. 8 is a side view of the wafer handling assembly of FIG. 6.
FIG. 9 is another side view of the wafer handling assembly of FIG. 6.
FIG. 10 is a bottom perspective view of the wafer handling assembly of FIG. 6.
FIG. 11 is a top perspective view of a third embodiment of a wafer handling assembly.
FIG. 12 is a top view of the wafer handling assembly of FIG. 11.
FIG. 13 is a side view of the wafer handling assembly of FIG. 11.
FIG. 14 is another side view of the wafer handling assembly of FIG. 11.
FIG. 15 is a bottom perspective view of the wafer handling assembly of FIG. 11.
FIG. 16 is a top perspective view of a fourth embodiment of a wafer handling assembly.
FIG. 17 is a top view of the wafer handling assembly of FIG. 16.
FIG. 18 is a side view of the wafer handling assembly of FIG. 16.
FIG. 19 is another side view of the wafer handling assembly of FIG. 16.
FIG. 20 is a bottom perspective view of the wafer handling assembly of FIG. 16.
FIG. 21 is a top perspective view of a fifth embodiment of a wafer handling assembly.
FIG. 22 is a top view of the wafer handling assembly of FIG. 21.
FIG. 23 is a side view of the wafer handling assembly of FIG. 21.
FIG. 24 is another side view of the wafer handling assembly of FIG. 21.
FIG. 25 is a bottom perspective view of the wafer handling assembly of FIG. 21.
FIG. 26 is a top perspective view of a sixth embodiment of a wafer handling assembly.
FIG. 27 is a top view of the wafer handling assembly of FIG. 26.
FIG. 28 is a side view of the wafer handling assembly of FIG. 26.
FIG. 29 is another side view of the wafer handling assembly of FIG. 26; and,
FIG. 30 is a bottom perspective view of the wafer handling assembly of FIG. 26.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer handling assembly, as shown and described.
US29/564,740 2016-05-16 2016-05-16 Wafer handling assembly Active USD803283S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/564,740 USD803283S1 (en) 2016-05-16 2016-05-16 Wafer handling assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/564,740 USD803283S1 (en) 2016-05-16 2016-05-16 Wafer handling assembly

Publications (1)

Publication Number Publication Date
USD803283S1 true USD803283S1 (en) 2017-11-21

Family

ID=60312803

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/564,740 Active USD803283S1 (en) 2016-05-16 2016-05-16 Wafer handling assembly

Country Status (1)

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US (1) USD803283S1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD849072S1 (en) * 2017-04-05 2019-05-21 Sundyne, Llc Bearing box frame
USD875795S1 (en) * 2016-06-29 2020-02-18 Superior Industries, Inc. Vertical shaft impact crusher rotor
USD930720S1 (en) * 2019-10-02 2021-09-14 James Stong Clamp device for a press

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4029351A (en) 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US5643366A (en) 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5791895A (en) * 1994-02-17 1998-08-11 Novellus Systems, Inc. Apparatus for thermal treatment of thin film wafer
US6249342B1 (en) * 1999-07-06 2001-06-19 David Cheng Method and apparatus for handling and testing wafers
US6276892B1 (en) * 1998-03-31 2001-08-21 Matsushita Electric Industrial Co., Ltd. Wafer handling apparatus
US6357996B2 (en) 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6514033B2 (en) 1999-03-18 2003-02-04 Applied Materials, Inc. Mechanical gripper for wafer handling robots
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US6692219B2 (en) 2000-11-29 2004-02-17 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
US20050111944A1 (en) * 2003-11-25 2005-05-26 Marc Aho Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
US6935466B2 (en) * 2001-03-01 2005-08-30 Applied Materials, Inc. Lift pin alignment and operation methods and apparatus
US20080107508A1 (en) * 2006-11-02 2008-05-08 Chartered Semiconductor Manufacturing Ltd. Wafer handling system for a loadlock
US8008884B2 (en) * 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
JP2012099755A (en) 2010-11-05 2012-05-24 Disco Abrasive Syst Ltd Transporting device
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US20150075431A1 (en) 2012-05-18 2015-03-19 Veeco Instruments Inc. Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
WO2016001863A1 (en) 2014-07-03 2016-01-07 Lpe S.P.A. Tool for manipulating substrates, manipulation method and epitaxial reactor
US20170256436A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly
US20170256434A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4029351A (en) 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US5643366A (en) 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5791895A (en) * 1994-02-17 1998-08-11 Novellus Systems, Inc. Apparatus for thermal treatment of thin film wafer
US6276892B1 (en) * 1998-03-31 2001-08-21 Matsushita Electric Industrial Co., Ltd. Wafer handling apparatus
US6514033B2 (en) 1999-03-18 2003-02-04 Applied Materials, Inc. Mechanical gripper for wafer handling robots
US6357996B2 (en) 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6249342B1 (en) * 1999-07-06 2001-06-19 David Cheng Method and apparatus for handling and testing wafers
US6537011B1 (en) * 2000-03-10 2003-03-25 Applied Materials, Inc. Method and apparatus for transferring and supporting a substrate
US6692219B2 (en) 2000-11-29 2004-02-17 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
US6935466B2 (en) * 2001-03-01 2005-08-30 Applied Materials, Inc. Lift pin alignment and operation methods and apparatus
US20050111944A1 (en) * 2003-11-25 2005-05-26 Marc Aho Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
US20080107508A1 (en) * 2006-11-02 2008-05-08 Chartered Semiconductor Manufacturing Ltd. Wafer handling system for a loadlock
US8920097B2 (en) * 2006-11-02 2014-12-30 Globalfoundries Singapore Pte. Ltd. Wafer handling system for a loadlock
US8008884B2 (en) * 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
JP2012099755A (en) 2010-11-05 2012-05-24 Disco Abrasive Syst Ltd Transporting device
USD674366S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Wafer holding member
USD674761S1 (en) * 2011-10-20 2013-01-22 Tokyo Electron Limited Wafer holding member
US20150075431A1 (en) 2012-05-18 2015-03-19 Veeco Instruments Inc. Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
WO2016001863A1 (en) 2014-07-03 2016-01-07 Lpe S.P.A. Tool for manipulating substrates, manipulation method and epitaxial reactor
US20170256436A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly
US20170256434A1 (en) * 2016-03-01 2017-09-07 Veeco Instruments, Inc. Wafer handling assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD875795S1 (en) * 2016-06-29 2020-02-18 Superior Industries, Inc. Vertical shaft impact crusher rotor
USD849072S1 (en) * 2017-04-05 2019-05-21 Sundyne, Llc Bearing box frame
USD930720S1 (en) * 2019-10-02 2021-09-14 James Stong Clamp device for a press

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