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USD783351S1 - Gas nozzle substrate processing apparatus - Google Patents

Gas nozzle substrate processing apparatus Download PDF

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Publication number
USD783351S1
USD783351S1 US29/544,977 US201529544977F USD783351S US D783351 S1 USD783351 S1 US D783351S1 US 201529544977 F US201529544977 F US 201529544977F US D783351 S USD783351 S US D783351S
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United States
Prior art keywords
processing apparatus
substrate processing
gas nozzle
nozzle substrate
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/544,977
Inventor
Toshiki Fujino
Kosuke Takagi
Ryota Sasajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
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Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FUJINO, TOSHIKI, SASAJIMA, RYOTA, TAKAGI, KOSUKE
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Publication of USD783351S1 publication Critical patent/USD783351S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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FIG. 1 is a perspective view of a gas nozzle substrate processing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a right side elevational view thereof;
FIG. 8 is an enlarged right side elevational view thereof; and
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2;
FIG. 10 is a cross sectional view take along line 10-10 in FIG. 9; and,
FIG. 11 is a cross sectional view take along line 11-11 in FIG. 9.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a gas nozzle substrate processing apparatus, as shown and described.
US29/544,977 2015-05-28 2015-11-09 Gas nozzle substrate processing apparatus Active USD783351S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-011864 2015-05-28
JPD2015-11864F JP1547057S (en) 2015-05-28 2015-05-28

Publications (1)

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USD783351S1 true USD783351S1 (en) 2017-04-11

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US29/544,977 Active USD783351S1 (en) 2015-05-28 2015-11-09 Gas nozzle substrate processing apparatus

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JP (1) JP1547057S (en)
TW (1) TWD176076S (en)

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