US6535658B1 - Hydrogen sensor apparatus and method of fabrication - Google Patents
Hydrogen sensor apparatus and method of fabrication Download PDFInfo
- Publication number
- US6535658B1 US6535658B1 US09/639,007 US63900700A US6535658B1 US 6535658 B1 US6535658 B1 US 6535658B1 US 63900700 A US63900700 A US 63900700A US 6535658 B1 US6535658 B1 US 6535658B1
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- United States
- Prior art keywords
- hydrogen
- sensing elements
- communication bus
- palladium
- fiber optic
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- Expired - Fee Related, expires
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 67
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 67
- 238000004519 manufacturing process Methods 0.000 title description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 79
- 239000000835 fiber Substances 0.000 claims abstract description 47
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 35
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 30
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910001930 tungsten oxide Inorganic materials 0.000 claims abstract description 27
- 239000011521 glass Substances 0.000 claims abstract description 20
- 239000005373 porous glass Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 5
- 150000002431 hydrogen Chemical class 0.000 claims description 37
- 230000005693 optoelectronics Effects 0.000 claims description 13
- 239000007789 gas Substances 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000013307 optical fiber Substances 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000011148 porous material Substances 0.000 claims description 5
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims description 4
- KPZGRMZPZLOPBS-UHFFFAOYSA-N 1,3-dichloro-2,2-bis(chloromethyl)propane Chemical compound ClCC(CCl)(CCl)CCl KPZGRMZPZLOPBS-UHFFFAOYSA-N 0.000 claims description 3
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 claims description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910003445 palladium oxide Inorganic materials 0.000 claims description 2
- 238000006552 photochemical reaction Methods 0.000 claims description 2
- 238000006479 redox reaction Methods 0.000 claims description 2
- 238000003980 solgel method Methods 0.000 claims description 2
- 230000001131 transforming effect Effects 0.000 claims description 2
- -1 tungsten hexacarbonyl compound Chemical class 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 150000002941 palladium compounds Chemical class 0.000 abstract 1
- 150000003658 tungsten compounds Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 19
- 238000001514 detection method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- FQNHWXHRAUXLFU-UHFFFAOYSA-N carbon monoxide;tungsten Chemical group [W].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] FQNHWXHRAUXLFU-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910008940 W(CO)6 Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002828 fuel tank Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000005295 porous vycor glass Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N2021/7706—Reagent provision
- G01N2021/7726—Porous glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02052—Optical fibres with cladding with or without a coating comprising optical elements other than gratings, e.g. filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
Definitions
- This invention relates to hydrogen sensors and more particularly to such sensors that produce a color change in the presence of hydrogen.
- Fiber optic hydrogen sensors are available commercially. Such apparatus employ an optical fiber with a thin palladium or platinum film at the tip of the fiber. The thickness of the film changes in the presence of hydrogen. A light source directs light down the length of the fiber and a detector senses an interference pattern representative of the distance between the fiber tip and the surface of the film (i.e. the film thickness); a function of the presence of hydrogen. This type of apparatus is sensitive to the presence of from zero to one percent of hydrogen.
- an optical fiber in another type of commercially available fiber optic hydrogen sensor, includes a Bragg grating with a palladium film deposited over the grating.
- the fiber is stretched and in the presence of hydrogen, the palladium film affects the characteristics of the fiber to alter the wavelength of light reflected by the grating.
- a light source launching light down the fiber, produces a reflected wave at a wavelength representative of the presence of hydrogen.
- This apparatus is sensitive to the presence of hydrogen from zero to ten percent concentration.
- a film of palladium is formed at the end of a fiber with a tungsten oxide coating formed over the palladium.
- the palladium film places a charge on the tungsten oxide that changes its color.
- Each of these commercially available apparatus is typically fabricated with an external thin metal film at the termination of the fiber that is susceptible to contamination, scratching, and other environmental factors.
- the sensors are limited in sensitivity, relatively expensive to manufacture, have a limited lifetime, and can produce unreliable results.
- one embodiment of the sensor comprises a hydrogen sensing element of porous silica glass, having a matrix of tungsten oxide and palladium in energy coupled proximity, fabricated in the form of a tiny rod, typically of cylindrical geometry, with a diameter of three millimeters and a length of five millimeters.
- the sensor can also be fabricated in other forms including, but not limited to, rectangular, square, and disk formats.
- the porous glass rod is doped with a solution of a photosensitive tungsten hexacarbonyl (W(CO) 6 ) compound in an alcohol solvent to entrap the compound in the glass.
- the rod is next exposed to ultraviolet light, to induce a photochemical reaction transforming the tungsten hexacarbonyl compound into tungsten oxide (WO 3 ) and permanently binding the tungsten oxide to oxygen atoms in the silica glass.
- a heating process drives off the solvent and removes the photoproduced CO gas, leaving tungsten oxide permanently bound to the silica matrix of the porous glass.
- the rod is then doped with a palladium tetrachloride (PdCl 4 ) solution, and heated to break the PdCl 4 molecules into palladium metal and chlorine gas and to evaporate the chlorine gas from the porous glass matrix, leaving palladium metal deposited on the glass surface.
- PdCl 4 palladium tetrachloride
- the Pd/WO 3 complex When hydrogen is present, the Pd/WO 3 complex causes a partial redox reaction of the tungsten oxide and palladium metal to produce a color change in the glass rod representative of the hydrogen concentration.
- the rod may further include a coating to reduce the sensor's sensitivity to moisture and other environmental contaminants.
- the unique chemochromatic process of the invention binds tungsten oxide and palladium into the porous glass volume of the sensing element, thereby eliminating the need for external surface films.
- the sensing chemistry is embedded in a relatively large, three-dimensional, pore volume, compared to that of a two-dimensional surface film, providing improved sensor sensitivity and increased immunity to contaminants that may be present on the surface of the sensing tip.
- the use of a wet chemistry process instead of a thin film fabrication process, reduces manufacturing costs and produces a more rugged and reliable sensor structure.
- the sensing rod prepared as above, is attached to the tip of a double fiber arrangement whereby light launched into one fiber is passed through the sensing rod, reflected from the back surface of the rod and launched into the second fiber where it is brought to an optoelectronic detection and signal processing unit.
- the spectrum of transmitted light shifts, producing a color (wavelength) change that is transformed into an intensity change by the optoelectronic detection units.
- the invention is sensitive to hydrogen concentrations in the range of zero to one hundred percent with maximum sensitivity in the zero to five percent range and with a resolution of 0.1% hydrogen.
- a multi-point fiber optic sensor system is constructed using multiple sensing elements distributed along a communication bus.
- An optoelectronic readout system connected to the bus is adapted to display the concentration profiles of individual sensor readouts.
- the system can be used, for example, to monitor gas leaks in launch vehicle fuel tanks and can be distributed along automobile fuel cells.
- a sensor package is constructed with a hydrogen sensitive element and a temperature sensitive element in close proximity so that the signal returned from the hydrogen element can be compensated for temperature fluctuations.
- the sensing element can be in the form of a porous glass film or layer treated as the herein described matrix of tungsten oxide and palladium in energy coupled proximity for hydrogen sensing and which can be applied to a supporting substrate.
- FIGS. 1 , 2 , and 3 are schematic representations of prior art hydrogen sensor apparatus
- FIG. 4 is a schematic representation of a hydrogen sensor apparatus in accordance with the principles of this invention.
- FIG. 5 is a schematic representation of a porous glass rod sensor for use in the apparatus of FIG. 4;
- FIG. 6 is a flow diagram of the process for fabricating the sensor of FIG. 5;
- FIG. 7 is a plot of the transmission spectrum versus hydrogen concentration for the sensor of FIG. 5 in the apparatus of FIG. 4;
- FIG. 8 is a schematic representation of a multi-point fiber optic sensor system
- FIG. 9 is a schematic representation of an optoelectronic readout module using an intensity based ratiometric system.
- one type of commercial hydrogen sensor apparatus 10 comprises a blue light source 13 , an optical fiber 11 having a thin film palladium or platinum tip 12 , and a detector 15 .
- the source 13 directs light down the fiber 11 to the tip 12 causing a reflected light interference pattern that is measured by the detector 15 .
- the fringe pattern in the interference signal gives a direct indication of the thickness of the palladium film.
- the thickness of the tip 12 changes producing an interference pattern 14 in the detector 15 , representative of the presence of hydrogen.
- another type of commercial hydrogen sensor 16 detects the presence of hydrogen by using a palladium film 17 deposited over a Bragg grating 19 in an optical fiber 18 .
- the fiber 18 is stretched and the deposited film 17 covers the grating 19 .
- light launched down the fiber 18 is reflected by the Bragg grating 19 at a specific wavelength, determined by the grating geometry.
- the film 17 alters the grating characteristics to produce reflected light at a wavelength representative of the hydrogen concentration.
- another type of commercial hydrogen sensor 20 comprises an optical fiber 21 coated with a tungsten oxide film 23 and a palladium film 22 on top.
- the palladium tip 22 places a charge on the tungsten oxide 23 when hydrogen is present, causing the tip to change color.
- a hydrogen sensor apparatus 24 of the invention comprises a transmitting fiber 25 and a reflecting fiber 26 in a dual optical fiber arrangement forming a common tip 27 .
- the tip 27 is fitted with a palladium/tungsten oxide sensor rod 28 fabricated in accordance with the principles of the invention.
- the rod 28 may include a mirrored surface 35 .
- a light source 29 within the range of 400 to 700 nanometers is coupled to the transmitting fiber 25 and an optoelectronic detection unit 30 is coupled to the reflecting fiber 26 .
- light from the source 29 is launched down the transmitting fiber 25 to the sensor rod 28 where it is reflected by mirrored surface 35 and transmitted through the reflecting fiber 26 to the detection unit 30 .
- the sensor rod 28 causes a shift in the wavelength and color of light measured by the detection unit 30 as a function of the hydrogen concentration.
- the detection unit 30 transforms the wavelength shift to an intensity change representation of the hydrogen concentration.
- the hydrogen sensor 31 of the invention comprises a transparent cylindrically shaped silica glass rod 32 having dimensions of three millimeters in diameter and five millimeters in length.
- the pores of the glass are in the range of thirty to seventy angstroms.
- the glass matrix of the sensor rod contains equal concentrations of tungsten oxide 34 , bound to oxygen atoms of the glass, and palladium on the surface 33 . In use, the palladium causes the tungsten oxide to change color in the presence of hydrogen.
- the process for fabricating the hydrogen sensor comprises the steps of selecting a cylindrical porous glass rod as shown in block 40 by forming a porous silica glass rod using a sol-gel process as illustrated in block 41 or alternatively selecting a commercially available porous Vycor glass rod (PVG) as shown in block 42 .
- the rod is preferably cylindrical in shape and is cut and polished to dimensions of 3 mm in diameter and 5 mm in length, as shown in block 43 .
- the glass is then doped, using a solution process, with photosensitive tungsten hexacarbonyl W(CO 6 ) as illustrated in block 44 .
- the W(CO 6 ) compound, entrapped in the porous matrix of the glass, is next exposed to ultraviolet (UV) light, as indicated in block 45 , to transform the W(CO 6 ) compound to tungsten oxide (WO 3 ) and permanently bind it to the oxygen atoms of the glass.
- UV ultraviolet
- the glass is then heated to 300° C. to remove the photo-produced CO gas, as shown in block 46 .
- Palladium is then introduced by doping the glass rod with palladium tetrachloride PdCl 4 , in solution, as shown in block 47 and heating the rod to 500° C., as shown in block 48 , to break the chlorine bonds, leaving palladium on the surfaces of the glass pores.
- This process results in the porous glass having a matrix of tungsten oxide and palladium in energy-coupled proximity that will produce a spectral color change in the presence of hydrogen.
- FIG. 7 shows a plot 50 of the response of the sensor rod of the invention to hydrogen concentrations in the range of 0% to 100%. As indicated, the sensor exhibits maximum sensitivity in the 0% to 5% range.
- the sensing element can be in the form of a porous glass film or layer treated as the herein described matrix of tungsten oxide and palladium in energy coupled proximity for hydrogen sensing and which can be applied to a supporting substrate.
- FIG. 8 A multi-point fiber optic sensor system 51 using multiple sensors of the invention is shown in FIG. 8 .
- Each sensor 52 containing a hydrogen sensitive element 53 and a temperature sensitive element 54 , is connected to a fiber optic communication bus 55 .
- information disseminated along the bus is received by an optoelectronic readout system 56 capable of displaying the hydrogen concentration and temperature profiles of each element.
- FIG. 9 shows an optoelectronic readout module 57 using an intensity based ratiometric system designed to receive inputs from three sensors.
- the module circuitry includes a built-in microprocessor 58 to compensate for fluctuations in temperature and light intensity signals.
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Abstract
Description
Claims (24)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US09/639,007 US6535658B1 (en) | 2000-08-15 | 2000-08-15 | Hydrogen sensor apparatus and method of fabrication |
Applications Claiming Priority (1)
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US09/639,007 US6535658B1 (en) | 2000-08-15 | 2000-08-15 | Hydrogen sensor apparatus and method of fabrication |
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US6535658B1 true US6535658B1 (en) | 2003-03-18 |
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Cited By (48)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020171839A1 (en) * | 1999-11-18 | 2002-11-21 | Dimeo Frank | Optical hydrogen detector |
US20040017571A1 (en) * | 2002-03-15 | 2004-01-29 | Garcia Jose Agustin | Device and method for differential sensing of hydrogen gas using thermoabsorptance or thermoreflectance |
US20040037745A1 (en) * | 2000-05-05 | 2004-02-26 | Se-Hee Lee | Pd/ni-wo3 anodic double layer gasochromic device |
US20040070006A1 (en) * | 2002-08-30 | 2004-04-15 | Nano-Proprietary, Inc. | Formation of metal nanowires for use as variable-range hydrogen sensors |
US20040173004A1 (en) * | 2003-03-05 | 2004-09-09 | Eblen John P. | Robust palladium based hydrogen sensor |
US20040261500A1 (en) * | 2003-06-03 | 2004-12-30 | Nano-Proprietary, Inc. | Method and apparatus for sensing hydrogen gas |
ES2228270A1 (en) * | 2003-09-18 | 2005-04-01 | INSTITUTO NACIONAL DE TECNICA AEROESPACIAL "ESTEBAN TERRADAS" | Hydrogen gas detector, has palladium thread provided in coil, Bragg sensor whose volute surface is fixed with palladium thread, and optical fiber provided with Bragg sensor |
US20050142410A1 (en) * | 2003-12-29 | 2005-06-30 | Higashi Robert E. | Micro fuel cell |
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