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US4578256A - Process for removal of poisonous gases - Google Patents

Process for removal of poisonous gases Download PDF

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Publication number
US4578256A
US4578256A US06/653,093 US65309384A US4578256A US 4578256 A US4578256 A US 4578256A US 65309384 A US65309384 A US 65309384A US 4578256 A US4578256 A US 4578256A
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sub
present
activated carbon
iodine
adsorbent
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US06/653,093
Inventor
Hiroshi Nishino
Toshio Aibe
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Takeda Pharmaceutical Co Ltd
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Takeda Chemical Industries Ltd
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Assigned to TAKEDA CHEMICAL INDUSTRIES, LTD. reassignment TAKEDA CHEMICAL INDUSTRIES, LTD. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: NISHINO, HIROSHI, AIBE, TOSHIO
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography

Definitions

  • This invention relates to a process of treating poisonous gases containing hydrides of B, P, As, Sb and Se.
  • Hydrides such as B 2 H 6 , PH 3 , AsH 3 , SbH 3 and H 2 Se, are utilized in large quantities for raw material gases for production of semiconductors, fumigation gases, etc., but even in trace amounts, are extremely poisonous to the human body. Therefore, the development of a method capable of efficiently removing these hydrides in gas is strongly demanded.
  • the present inventors in view of these circumstances, conducted intensive investigation, and as a result, found that by using activated carbon with iodine, iodine compounds and sulfates and nitrates of NH 4 , Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn, supported thereon hydrides of B, P, As, Sb and Se in gases can be removed highly efficiently, which has culminated in the present invention.
  • a process of removing one or more kinds of hydrides of As, B, P, Sb or Se from a gas containing one or more kinds of hydrides of As, B, P, Sb or Se which comprises contacting said gas with an adsorbent comprising activated carbon having (1) iodine and/or one or more kinds of iodine compounds (hereinafter referred to in some instances as "First Component") and/or (2) one or more kinds of sulfates and nitrates of NH 4 , Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn (hereinafter referred to in some instances as "Second Component") supported thereon.
  • an adsorbent comprising activated carbon having (1) iodine and/or one or more kinds of iodine compounds (hereinafter referred to in some instances as "First Component”) and/or (2) one or more kinds of sulfates and nitrate
  • the activated carbon which is useful in the present invention may be any type of activated carbon produced by the known processes from coal, coke, wood charcoal, coconut shells, resins, etc., while its specific surface area is preferably within the range from 200 to 2000 m 2 /g. With reference to its shape and form, use is suitably made for example of spherical- and cylindrical-formed, crushed, powdered and fibrous-formed activated carbon according to the type of gas treatment methods.
  • the First Component useful in the present invention include iodides, such as LiI, NaI, KI, RbI, CsI, BeI 2 , MgI 2 , CaI 2 , SrI 2 , BaI 2 , NH 4 I and HI, iodic acid and its salts, such as HIO 3 , NH 4 IO 3 , NaIO 3 and KIO 3 , periodic acid and its salts, such as HIO 4 , NH 4 IO 4 , NaIO 4 and KIO 4 , and iodine oxides, such as I 2 O 5 and IO 2 .
  • iodides such as LiI, NaI, KI, RbI, CsI, BeI 2 , MgI 2 , CaI 2 , SrI 2 , BaI 2 , NH 4 I and HI
  • iodic acid and its salts such as HIO 3 , NH 4 IO 3 , NaIO 3 and KIO 3
  • Second Component which is utilizable, include (NH 4 ) 2 SO 4 , Ag 2 SO 4 , Al 2 (SO 4 ) 3 , Ti 2 (SO 4 ) 3 , VOSO 4 , Cr 2 (SO 4 ) 3 , MnSO 4 , FeSO 4 , Fe 2 (SO 4 ) 3 , CoSO 4 , NiSO 4 , CuSO 4 , ZnSO 4 , CdSO 4 , PbSO 4 , SnSO 4 , NH 4 NO 3 , AgNO 3 , Al(NO 3 ) 3 , Cr(NO 3 ) 3 , Mn(NO 3 ) 2 , Fe(NO 3 ) 2 , Fe(NO 3 ) 3 , Co(NO 3 ) 2 , Ni(NO 3 ) 2 , Cu(NO 3 ) 2 , Zn(NO 3 ) 2 , Cd(NO 3 ) 2 , Pb(NO 3 ) 2 , etc.
  • the adsorbent used in the present invention which comprises activated carbon having each of the components being supported thereon, can be produced by impregnating or spraying activated carbon with a solution or suspension of the individual components in water (inclusive of aqueous acid or alkali solutions) or various solvents (e.g., alcohols, such as methanol and ethanol, ketones, such as acetone and methyl ethyl ketone, etc.), and if necessary, by drying the impregnated or sprayed activated carbon at a temperature of not higher than about 130° C. or calcining at a temperature of not lower than 130° C.
  • water inclusive of aqueous acid or alkali solutions
  • various solvents e.g., alcohols, such as methanol and ethanol, ketones, such as acetone and methyl ethyl ketone, etc.
  • the components may be supported simultaneously or may be supported individually, whereby they may be supported in arbitrary order.
  • the supported amounts of each of the First and Second Components in activated carbon are 1 mg to 500 mg per g of activated carbon (0.5 mg to 250 mg for silver sulfate and silver nitrate), preferably 5 to 400 mg (1 to 150 mg for silver sulfate and silver nitrate).
  • the present invention is usually carried out by contacting a gas containing hydrides of B, P, As, Sb and Se with the adsorbent in the presence of oxygen.
  • the contact temperature is not higher than 150° C., preferably -10° to 120° C., more preferably 0° to 100° C., and the contact pressure is not more than 10 atm., preferably 0.01 to 5 atm., with the contact time being 1/20 to 100 seconds as converted at 25° C. and 1 atm., preferably 1/10 to 50 seconds.
  • oxygen is not contained in the gas to be treated, it is preferable to add oxygen to the gas.
  • the amount of oxygen contained in the gas is usually not less than one mol per mol of hydrides of B, P, As, Sb and Se, preferably not less than 2 mol.
  • the contacting of the adsorbent with a gas containing hydrides of B, P, As, Sb and Se can be conducted for example by use of fixed bed, moving bed and fluidized bed.
  • Activated carbon A 0 of 16 to 24 mesh having a BET specific surface area of 1,150 m 2 /g was sprayed uniformly with aqueous solutions or suspensions of the required amounts of iodine, iodine compounds and/or sulfates and nitrates of NH 4 , Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn, and then dried at 110° C.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Catalysts (AREA)

Abstract

Hydrides of As, B, P, Sb or Se in a gas can easily be removed from the gas by contacting the gas with an adsorbent comprising activated carbon having (1) iodine and/or one or more kinds of iodine compounds and/or (2) one or more kinds of sulfates and nitrates of NH4, Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn supported thereon.

Description

This invention relates to a process of treating poisonous gases containing hydrides of B, P, As, Sb and Se.
Hydrides, such as B2 H6, PH3, AsH3, SbH3 and H2 Se, are utilized in large quantities for raw material gases for production of semiconductors, fumigation gases, etc., but even in trace amounts, are extremely poisonous to the human body. Therefore, the development of a method capable of efficiently removing these hydrides in gas is strongly demanded.
As a method of removing hydrides of B, P, As, Sb and Se, there have been proposed, for example, a procedure of washing with chemical solutions such as oxidizing solutions, or an adsorption process with use of adsorbents composed mainly of ferric chloride. However, these methods show inferior removal effect and pose problems.
The present inventors, in view of these circumstances, conducted intensive investigation, and as a result, found that by using activated carbon with iodine, iodine compounds and sulfates and nitrates of NH4, Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn, supported thereon hydrides of B, P, As, Sb and Se in gases can be removed highly efficiently, which has culminated in the present invention.
Thus, the present invention is concerned with:
A process of removing one or more kinds of hydrides of As, B, P, Sb or Se from a gas containing one or more kinds of hydrides of As, B, P, Sb or Se, which comprises contacting said gas with an adsorbent comprising activated carbon having (1) iodine and/or one or more kinds of iodine compounds (hereinafter referred to in some instances as "First Component") and/or (2) one or more kinds of sulfates and nitrates of NH4, Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn (hereinafter referred to in some instances as "Second Component") supported thereon.
The activated carbon which is useful in the present invention may be any type of activated carbon produced by the known processes from coal, coke, wood charcoal, coconut shells, resins, etc., while its specific surface area is preferably within the range from 200 to 2000 m2 /g. With reference to its shape and form, use is suitably made for example of spherical- and cylindrical-formed, crushed, powdered and fibrous-formed activated carbon according to the type of gas treatment methods.
Specific examples of the First Component useful in the present invention, include iodides, such as LiI, NaI, KI, RbI, CsI, BeI2, MgI2, CaI2, SrI2, BaI2, NH4 I and HI, iodic acid and its salts, such as HIO3, NH4 IO3, NaIO3 and KIO3, periodic acid and its salts, such as HIO4, NH4 IO4, NaIO4 and KIO4, and iodine oxides, such as I2 O5 and IO2.
Specific examples of the Second Component, which is utilizable, include (NH4)2 SO4, Ag2 SO4, Al2 (SO4)3, Ti2 (SO4)3, VOSO4, Cr2 (SO4)3, MnSO4, FeSO4, Fe2 (SO4)3, CoSO4, NiSO4, CuSO4, ZnSO4, CdSO4, PbSO4, SnSO4, NH4 NO3, AgNO3, Al(NO3)3, Cr(NO3)3, Mn(NO3)2, Fe(NO3)2, Fe(NO3)3, Co(NO3)2, Ni(NO3)2, Cu(NO3)2, Zn(NO3)2, Cd(NO3)2, Pb(NO3)2, etc.
The adsorbent used in the present invention, which comprises activated carbon having each of the components being supported thereon, can be produced by impregnating or spraying activated carbon with a solution or suspension of the individual components in water (inclusive of aqueous acid or alkali solutions) or various solvents (e.g., alcohols, such as methanol and ethanol, ketones, such as acetone and methyl ethyl ketone, etc.), and if necessary, by drying the impregnated or sprayed activated carbon at a temperature of not higher than about 130° C. or calcining at a temperature of not lower than 130° C.
In cases in which not less than two components are deposited on activated carbon, the components may be supported simultaneously or may be supported individually, whereby they may be supported in arbitrary order.
The supported amounts of each of the First and Second Components in activated carbon are 1 mg to 500 mg per g of activated carbon (0.5 mg to 250 mg for silver sulfate and silver nitrate), preferably 5 to 400 mg (1 to 150 mg for silver sulfate and silver nitrate).
The present invention is usually carried out by contacting a gas containing hydrides of B, P, As, Sb and Se with the adsorbent in the presence of oxygen.
The contact temperature is not higher than 150° C., preferably -10° to 120° C., more preferably 0° to 100° C., and the contact pressure is not more than 10 atm., preferably 0.01 to 5 atm., with the contact time being 1/20 to 100 seconds as converted at 25° C. and 1 atm., preferably 1/10 to 50 seconds.
If oxygen is not contained in the gas to be treated, it is preferable to add oxygen to the gas. The amount of oxygen contained in the gas is usually not less than one mol per mol of hydrides of B, P, As, Sb and Se, preferably not less than 2 mol.
The contacting of the adsorbent with a gas containing hydrides of B, P, As, Sb and Se can be conducted for example by use of fixed bed, moving bed and fluidized bed.
The examples are described below to illustrate the present invention more specifically.
EXAMPLE 1
Activated carbon A0 of 16 to 24 mesh having a BET specific surface area of 1,150 m2 /g was sprayed uniformly with aqueous solutions or suspensions of the required amounts of iodine, iodine compounds and/or sulfates and nitrates of NH4, Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn, and then dried at 110° C.
15 ml each of the various adsorbents thus obtained were packed into columns of 1.6 cm in diameter made of glass, respectively, and the atmospheric air (with relative humidity of 60%) of 30° C. containing 15 ppm of AsH3 and 15 ppm of PH3 was passed through the respective columns at a linear flow rate of 40 m/sec to conduct the individual adsorption break-through tests for AsH3 or PH3, whereby the removal ratios for AsH3 or PH3 at each of the determined times were measured. The results are as shown in Table 1.
                                  TABLE 1                                 
__________________________________________________________________________
         The first                                                        
                 The second                                               
                         Percent removal of AsH.sub.3                     
                                       Percent removal of PH.sub.3        
         component and                                                    
                 component and                                            
                         at the elapsed time                              
                                       at the elapsed time shown          
Adsorbent                                                                 
         its amount                                                       
                 its amount                                               
                         shown below (%)                                  
                                       below (%)                          
No.      (mg/g)  (mg/g)  5 hrs.                                           
                             10 hrs.                                      
                                  30 hrs.                                 
                                       5 hrs.                             
                                            10 hrs.                       
                                                 30 hrs.                  
__________________________________________________________________________
A.sub.0 (Control)                                                         
         0       0       35  5    0    4    0    0                        
A.sub.1 (The present                                                      
         LiI-50  0       100 85   68   93   61   40                       
invention)                                                                
A.sub.2 (The present                                                      
         NaI-50  0       100 88   70   91   65   47                       
invention)                                                                
A.sub.3 (The present                                                      
         KI-50   0       100 100  100  100  100  100                      
invention)                                                                
A.sub.4 (The present                                                      
         MgI.sub.2 -50                                                    
                 0       100 80   64   98   61   35                       
invention)                                                                
A.sub.5 (The present                                                      
         BaI.sub.2 -50                                                    
                 0       100 85   73   90   65   41                       
invention)                                                                
A.sub.6 (The present                                                      
         NH.sub.4 I-50                                                    
                 0       100 100  96   95   90   80                       
invention)                                                                
A.sub.7 (The present                                                      
         NaIO.sub.3 -50                                                   
                 0       100 100  100  100  85   64                       
invention)                                                                
A.sub.8  (The present                                                     
         KIO.sub.3 -50                                                    
                 0       100 100  100  100  100  100                      
invention)                                                                
A.sub.9 (The present                                                      
         I.sub.2 -50                                                      
                 0       100 100  100  100  100  100                      
invention)                                                                
A.sub.10 (The present                                                     
         I.sub.2 O.sub.5 -50                                              
                 0       100 100  100  100  100  100                      
invention)                                                                
A.sub.11 (The present                                                     
         HIO.sub.3 -50                                                    
                 0       100 100  100  100  100  98                       
invention)                                                                
A.sub.12 (The present                                                     
         KI-5    0       90  85   61   88   71   50                       
invention)                                                                
A.sub.13 (The present                                                     
         KI-25   0       100 100  100  100  100  90                       
invention)                                                                
A.sub.14 (The present                                                     
         KI-400  0       100 100  100  100  100  100                      
invention)                                                                
B.sub.1 (The present                                                      
         0       (NH.sub.4).sub.2 SO.sub.4 -50                            
                         96  93   84   90   85   60                       
invention)                                                                
B.sub.2 (The present                                                      
         0       AgNO.sub.3 -5                                            
                         100 98   90   98   85   53                       
invention)                                                                
B.sub.3 (The present                                                      
         0       Al(NO.sub.3).sub.3 -50                                   
                         85  60   30   82   60   48                       
invention)                                                                
B.sub.4 (The present                                                      
         0       Ti.sub.2 (SO.sub.4).sub.3 -50                            
                         81  48   23   80   55   31                       
invention)                                                                
B.sub.5 (The present                                                      
         0       VOSO.sub.4 -50                                           
                         98  83   53   87   65   43                       
invention)                                                                
B.sub.6 (The present                                                      
         0       Cr(NO.sub.3).sub.3 -50                                   
                         88  65   43   75   50   32                       
invention)                                                                
B.sub.7 (The present                                                      
         0       MnSO.sub.4 -50                                           
                         98  85   61   83   45   21                       
invention)                                                                
B.sub.8 (The present                                                      
         0       FeSO.sub.4 -50                                           
                         100 100  95   92   80   65                       
invention)                                                                
B.sub.9 (The present                                                      
         0       Fe(NO.sub.3).sub.3 -50                                   
                         100 100  91   100  90   75                       
invention)                                                                
B.sub.10 (The present                                                     
         0       CoSO.sub.4 -50                                           
                         98  85   73   85   72   60                       
invention)                                                                
B.sub.11 (The present                                                     
         0       Ni(NO.sub.3).sub.2 -50                                   
                         95  60   35   83   65   53                       
invention)                                                                
B.sub.12 (The present                                                     
         0       CuSO.sub.4 -50                                           
                         100 98   71   93   82   61                       
invention)                                                                
B.sub.13 (The present                                                     
         0       Zn(NO.sub.3).sub.2 -50                                   
                         95  80   63   83   60   46                       
invention)                                                                
B.sub.14 (The present                                                     
         0       CdSO.sub.4 -50                                           
                         97  78   68   80   64   41                       
invention)                                                                
B.sub.15 (The present                                                     
         0       Pb(NO.sub.3).sub.2 -50                                   
                         98  83   60   93   72   51                       
invention)                                                                
B.sub.16 (The present                                                     
         0       SnSO.sub.4 -50                                           
                         100 95   70   95   68   43                       
invention)                                                                
B.sub.17 (The present                                                     
         0       Fe.sub.2 (SO.sub.4).sub.3 -50                            
                         100 95   90   100  75   47                       
invention)                                                                
__________________________________________________________________________
         The first                                                        
                 The second                                               
                         Percent removal of AsH.sub.3                     
                                       Percent removal of PH.sub.3        
         component and                                                    
                 component and                                            
                         at the elapsed time shown                        
                                       at the elapsed time shown          
Adsorbent                                                                 
         its amount                                                       
                 its amount                                               
                         below (%)     below (%)                          
No.      (mg/g)  (mg/g)  50 hrs.                                          
                             100 hrs.                                     
                                  200 hrs.                                
                                       50 hrs.                            
                                            100 hrs.                      
                                                 200 hrs                  
__________________________________________________________________________
C.sub.1 (The present                                                      
         NaI-50  AgNO.sub.3 -50                                           
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.2 (The present                                                      
         KI-50   Ti.sub.2 (SO.sub.4).sub.3 -50                            
                         100 100  85   100  98   79                       
invention)                                                                
C.sub.3 (The present                                                      
         MgI-50  Cr(NO.sub.3).sub.3 -50                                   
                         100 98   90   100  83   70                       
invention)                                                                
C.sub.4 (The present                                                      
         I.sub.2 O.sub.5 -50                                              
                 Co(NO.sub.3).sub.2 -50                                   
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.5 (The present                                                      
         NH.sub.4 I-50                                                    
                 SnSO.sub.4 -50                                           
                         100 100  85   100  100  81                       
invention)                                                                
C.sub.6 (The present                                                      
         KI-50   Ag.sub.2 SO.sub.4 -5                                     
                         100 100  88   100  100  100                      
invention)                                                                
C.sub.7 (The present                                                      
         KI-50   VOSO.sub.4 -50                                           
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.8 (The present                                                      
         KI-50   Cr.sub.2 (SO.sub.4).sub.3 -50                            
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.9 (The present                                                      
         KI-50   Mn(NO.sub.3).sub.2 -50                                   
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.10 (The present                                                     
         KI-50   Fe(NO.sub.3).sub.2 -50                                   
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.11 (The present                                                     
         KI-50   Co(NO.sub.3).sub.2 -50                                   
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.12 (The present                                                     
         KI-50   Cu(NO.sub.3).sub.2 -50                                   
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.13 (The present                                                     
         KI-50   ZnSO.sub.4 -50                                           
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.14 (The present                                                     
         NH.sub.4 I-50                                                    
                 FeSO.sub.4 -50                                           
                         100 100  100  100  100  100                      
invention)                                                                
C.sub.15 (The present                                                     
         BaI-50  FeSO.sub.4 -50                                           
                         100 100  80   100  100  89                       
invention)                                                                
C.sub.16 (The present                                                     
         I.sub.2 -5                                                       
                 FeSO.sub.4 -10                                           
                         100 100  100  100  100  100                      
invention)                                                                
         KI-10                                                            
C.sub.17 (The present                                                     
         I.sub.2 -5                                                       
                 FeSO.sub.4 -10                                           
                         100 100  100  100  100  100                      
invention)                                                                
         NH.sub.4 I-10                                                    
D.sub.1 (The present                                                      
         KI-5    FeSO.sub.4 -50                                           
                         100 98   65   100  88   60                       
invention)                                                                
D.sub.2 (The present                                                      
         KI-10   FeSO.sub.4 -50                                           
                         100 100  79   100  100  81                       
invention)                                                                
D.sub.3 (The present                                                      
         KI-50   FeSO.sub.4 -50                                           
                         100 100  100  100  100  100                      
invention)                                                                
D.sub.4 (The present                                                      
         KI-50   FeSO.sub.4 -5                                            
                         100 100  83   100  100  84                       
invention)                                                                
D.sub.5 (The present                                                      
         KI-50   FeSO.sub.4 -10                                           
                         100 100  100  100  100  100                      
invention)                                                                
D.sub.6 (The present                                                      
         KI-5    FeSO.sub.4 -5                                            
                         100 85   77   100  78   61                       
invention)                                                                
D.sub.7 (The present                                                      
         KI-5    Fe.sub.2 (SO.sub.4).sub.3 -50                            
                         100 93   81   100  96   86                       
invention)                                                                
D.sub.8 (The present                                                      
         KI-10   Fe.sub.2 (SO.sub.4).sub.3 -50                            
                         100 100  93   100  100  85                       
invention)                                                                
D.sub.9 (The present                                                      
         KI-50   Fe.sub.2 (SO.sub.4).sub.3 -5                             
                         100 100  95   100  100  83                       
invention)                                                                
D.sub.10 (The present                                                     
         KI-50   Fe.sub.2 (SO.sub.4).sub.3 -10                            
                         100 100  98   100  100  100                      
invention)                                                                
D.sub.11 (The present                                                     
         KI-5    Fe.sub.2 (SO.sub.4).sub.3 -5                             
                         100 93   75   100  90   71                       
invention)                                                                
D.sub.12 (The present                                                     
         KI-5    Fe.sub.2 (SO.sub.4).sub.3 -50                            
                         100 90   68   100  79   57                       
invention)                                                                
D.sub.13 (The present                                                     
         KI-5    FeSO.sub.4 -250                                          
                         100 95   73   100  88   70                       
invention)                                                                
D.sub.14 (The present                                                     
         KI-250  FeSO.sub.4 -5                                            
                         100 100  100  100  100  100                      
invention)                                                                
__________________________________________________________________________
EXAMPLE 2
Packed into columns of 1.6 cm in diameter made of glass were 20 ml each of A0, A3, A6, A10, A11, B2, B7, B8, B11, C1, C7, C12, C14, C17, D3, D8 and D13 set forth in the above Table 1, and the atmospheric air (with relative humidity of 60%) of 30° C. containing 10 ppm of B2 H6, 10 ppm of H2 Se or 10 ppm of SbH3 was passed through the respective columns at a linear flow rate of 30 cm/sec to conduct the individual break-through adsorption tests for B2 H6, H2 Se or SbH3, whereby the lengths of time until B2 H6, H2 Se or SbH3 leaked out of the respective columns, (i.e., the lengths of time required until the respective removal ratios reached 95 %) were determined. The results are shown in Table 2.
                                  TABLE 2                                 
__________________________________________________________________________
         The length of time for which                                     
                       The length of time for which                       
                                     The length of time for which         
         the removal percentages                                          
                       the removal percentages                            
                                     the removal percentages              
Adsorbent                                                                 
         for B.sub.2 H.sub.6 reached 95%                                  
                       for H.sub.2 Se reached 95%                         
                                     for SbH.sub.3 reached                
__________________________________________________________________________
                                     95%                                  
A.sub.0 (Control)                                                         
         1/6           1/4           1/3                                  
A.sub.3 (The present                                                      
         63            41            55                                   
invention)                                                                
A.sub.6 (The present                                                      
         43            40            48                                   
invention)                                                                
A.sub.10 (The present                                                     
         75            78            80                                   
invention)                                                                
A.sub.11 (The present                                                     
         30            28            30                                   
invention)                                                                
B.sub.2 (The present                                                      
         19            30            45                                   
invention)                                                                
B.sub.7 (The present                                                      
         25            19            24                                   
invention)                                                                
B.sub.8 (The present                                                      
         21            20            20                                   
invention)                                                                
B.sub.11 (The present                                                     
         28            32            19                                   
invention)                                                                
C.sub.1 (The present                                                      
         153           198           185                                  
invention)                                                                
C.sub.7 (The present                                                      
         258           250           233                                  
invention)                                                                
C.sub.12 (The present                                                     
         218           200           223                                  
invention)                                                                
C.sub.14 (The present                                                     
         300           310           305                                  
invention)                                                                
C.sub.17 (The present                                                     
         313           300           320                                  
invention)                                                                
D.sub.3 (The present                                                      
         355           368           390                                  
invention)                                                                
D.sub.8 (The present                                                      
         370           373           398                                  
invention)                                                                
D.sub.13 (The present                                                     
         195           210           195                                  
invention)                                                                
__________________________________________________________________________

Claims (6)

What is claimed is:
1. A process of removing one or more hydrides selected from the group consisting of hydrides of As, B, P, Sb and Se from a gas containing oxygen and one or more of said hydrides, which comprises contacting said gas with an adsorbent comprising activated carbon having (1) iodine and/or one or more iodine compounds and/or (2) one or more members selected from the group consisting of sulfates and nitrates of NH4, Ag, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb and Sn supported thereon.
2. A process as claimed in claim 1, wherein the adsorbent is one comprising activated carbon having (1) 1 to 500 mg of iodine and/or one or more iodine compounds and/or (2) 1 to 500 mg of one or more members selected from the group consisting of sulfates and nitrates of NH4, Al, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Cd, Pb, and Sn supported thereon, per g of activated carbon.
3. A process as claimed in claim 1, wherein the adsorbent is one comprising activated carbon having (1) 1 to 500 mg of iodine and/or one or more iodine compounds and/or (2) 0.5 to 250 mg of one or more members selected from the group consisting of sulfate and nitrate of Ag supported thereon, per g of activated carbon.
4. A process as claimed in claim 1, wherein the adsorbent is one comprising activated carbon having iodine and potassium iodide supported thereon.
5. A process as claimed in claim 1, wherein the adsorbent is one comprising activated carbon having potassium iodide and ferrous sulfate supported thereon.
6. A process as claimed in claim 1, wherein the gas is contacted with the activated carbon at a temperature of not higher than 150° C.
US06/653,093 1983-09-27 1984-09-21 Process for removal of poisonous gases Expired - Lifetime US4578256A (en)

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JP58179870A JPS6071040A (en) 1983-09-27 1983-09-27 Noxious gas adsorbent
JP58-179870 1983-09-27

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