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US4185814A - Pick up and placement head for green sheet and spacer - Google Patents

Pick up and placement head for green sheet and spacer Download PDF

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Publication number
US4185814A
US4185814A US05/859,778 US85977877A US4185814A US 4185814 A US4185814 A US 4185814A US 85977877 A US85977877 A US 85977877A US 4185814 A US4185814 A US 4185814A
Authority
US
United States
Prior art keywords
sheet
head
vacuum
transfer head
flimsy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US05/859,778
Inventor
Albert H. Buchmann
Thomas J. Cochran
Walter W. Ficker
Alfred A. Stricker
Walter von Kaenel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to US05/859,778 priority Critical patent/US4185814A/en
Priority to JP14056078A priority patent/JPS5483273A/en
Priority to EP78101642A priority patent/EP0002516B1/en
Priority to DE7878101642T priority patent/DE2862037D1/en
Application granted granted Critical
Publication of US4185814A publication Critical patent/US4185814A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0076—Gripping heads and other end effectors with means, e.g. Pelletier elements, for freezing a fluid interface between the gripping head and an object to be gripped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B25J15/0246—Gripping heads and other end effectors servo-actuated actuated by an electromagnet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/0808—Suction grippers
    • B65H3/0883—Construction of suction grippers or their holding devices

Definitions

  • the present invention relates to a vacuum pick up and transfer head for handling flimsy sheets. More particularly, the invention concerns an improved vacuum pick up and transfer head adapted for handling of thin flexible materials such as uncured ceramic green sheet. Such sheets require adequate support at a variety of locations during various stages of process manufacturing, without contact with contaminating objects such as human hands, etc.
  • green sheet uncured ceramic sheet material
  • Such green sheet is thin, flimsy material which is easily subject to stretching and other deformation, as well as tearing and degradation by contact with human hands, particularly if finger prints are left within a region to be imprinted with conductive material.
  • a vacuum pressure operated pick up and transfer head which generally comprises a rectangular block having a sheet contacting surface or lip with vacuum slots formed along the periphery thereof to retain flimsy sheets when the surfaces are brought in contact therewith.
  • the center section of the sheet contacting surface is recessed whereby an inner vacuum chamber is formed when the sheet contacting surface is brought into contact with a flimsy sheet so that the sheet acts as a diaphragm.
  • a vacuum control and manifold system is provided, including a plurality of check valves, which enable the application of vacuum and/or positive pressure to selectively pick up and discharge flimsy sheets from the face of the transfer head.
  • a plurality of probes are provided in the head, which are selectively extended through the sheet contacting surface to detect whether green sheet or spacer sheet has been picked up by the head.
  • the probes can also be utilized as positive stripping members during discharge of green sheet or spacer sheet into a tray.
  • FIG. 1 is a diagrammatic view of a vacuum head designed in accordance with the invention with parts broken away;
  • FIG. 2 is a sectional view of the vacuum head illustrated in FIG. 1;
  • FIG. 3 is a partial isometric view with parts broken away of a portion of the vacuum head illustrated in FIG. 1;
  • FIGS. 5A and 5B are schematic representations of the check valves illustrated in FIG. 2 under different pressure conditions.
  • the head includes sides 11 and a back member 12 of generally rectangular configuration having a support cross member 14 formed internally thereof to define a vacuum chamber comprising four regions 16-19 interconnected by slots 20A-D formed through cross member 14.
  • the vacuum chamber is bounded on the sheet or front side by a layer 22 of suitable material which is slightly recessed with respect to a sheet contacting lip 24 defined about the periphery of sides 11.
  • a plurality of slots 25 are formed through lip 24 extending into the vacuum chambers whereby vacuum or air pressure can be applied to the edges of a rectangular sheet brought into contact with the periphery of the transfer head. With such a sheet in place the sheet acts as a diaphragm so that a region 26 defined between layer 22 and the sheet becomes a vacuum chamber which exerts force upon the center of the sheet and retains it in a supportive condition when the head is moved.
  • vacuum air fittings such as 30A are provided, each extending through back member 12 into a corresponding vacuum chamber.
  • the fittings communicate with a controlled source of air pressure of conventional design, not illustrated.
  • check valves 32A-D are also provided, each one defining an air channel between the main vacuum chamber and chamber 26.
  • FIG. 5A The position of the ball in the check valve, with positive pressure on is illustrated in FIG. 5A where it is apparent that positive air pressure is permitted to flow from the main chamber into chamber 26.
  • FIG. 5B The positon of the ball with vacuum pressure applied to the main chamber is illustrated in FIG. 5B where it is apparent that the vacuum pressure and spring washer cause the ball to be lifted against fitting 38. This forms a seal which, in turn, creates a vacuum pressure level of predetermined magnitude in chamber 26 as a result of the green sheet acting as a diaphragm utilizing its own weight.
  • FIG. 3 illustrates a green sheet sensor pin 50 and a spacer sheet sensor pin 52 which are typical of a plurality of such sensors reciprocally located in suitable openings extending through the periphery of sheet contacting lip 24.
  • each of the sensors includes a bullet-nosed member 56 adapted to extend below the surface of lip 24 into contact with a sheet engaged by that surface.
  • green sheet and spacer sheet can be identified with one sensor each; however, in the preferred embodiment a plurality of spacer sheet sensor pins are provided located at least in the four corners of the head, and a plurality of green sheet sensors are provided located between the corners.
  • FIG. 4 illustrates a typical detail of the slots oriented around the periphery of the head.
  • each slot is an elongate relatively narrow recess formed within surface 24 having a tiny hole 27 communicating between the center of the slot and the vacuum chamber.
  • the hole size and slot lip are selected to provide a predetermined amount of lifting force to the flimsy sheets, depending upon the size of sheet which are to be handled and depending upon the vacuum air pressure levels which are available.
  • these slots are in the order of three hundredths of an inch wide and 10-20 times that in length.
  • the transfer head In operation the transfer head is placed over a tray containing green sheet or spacer sheet and lowered into contact with the uppermost sheet in the tray. Vacuum pressure is then switched on whereby the outer surface of the rectangular green sheet is adhered to surface 24 and the interior region of the green sheet is suspended and supported by vacuum pressure exerted by chamber 26. The head is then elevated so that the green sheet can be transferred to another location for deposit.
  • the sensor pins detect whether a green sheet or a spacer sheet has been picked up and verify the orientation of the sheet with respect to the head.
  • the head design described Upon deposition of the sheet the head design described permits use of positive pressure to deposit the sheet via positive force into a tray, if desired.
  • the stripping function can be facilitated by providing means for lowering the sensor pins, if desired.
  • the head described can be utilized in handling the green sheet in the manner described in the aforementioned related application, wherein a balanced pressure zone is created between a transfer head and an alignment head whereby the green sheet is suspended until alignment pins can be inserted through the alignment holes in the corner thereof.
  • the arrangement of check valves and pressure relief valve facilitate the switching from positive pressure to vacuum pressure and vice versa.
  • the head design utilizing what is in effect a recessed center section, wherein the green sheet acts as a diaphragm, to provide self supporting force to the center of the green sheet without damage or distortion to this region of the sheet is a significant improvement in handling procedure.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

A vacuum pick up and transfer head adapted for handling flimsy sheets of material such as spacer sheet and uncured ceramic sheet commonly referred to as green sheet. The vacuum transfer head is of generally rectangular configuration having a sheet contacting lip having vacuum slots formed through the periphery thereof to hold the sheets in place by vacuum pressure. The center of the sheet contacting face is recessed whereby, with a sheet in place and acting as a diaphragm, a central vacuum chamber is also defined. A series of check valves are provided to control application of vacuum and positive pressure to the green sheet for picking the sheet up, retaining it and stripping it. A plurality of probes are provided in the handling head, adapted to selectively project through the sheet contacting surface for detecting green sheet and/or spacer sheet utilized inbetween layers of green sheet. These probes also can act as positive strippers when the head enters a green sheet spacer tray in the process of removing a sheet of spacer or green sheet.

Description

BACKGROUND OF THE INVENTION
1. Related Applications
U.S. Patent Application Ser. No. 740,707 filed Nov. 11, 1976, now U.S. Pat. No. 4,068,994, entitled "Apparatus for the Printing of Ceramic Green Sheets" by R. H. Cadwallader, Y. Darves-Boronoz, A. S. Gasparri and F. Racine and assigned to International Business Machines Corporation.
U.S. Patent Application Ser. No. 859,777 filed concurrently with the present application entitled "Method and Apparatus for Locating and Aligning Flimsy Sheets" by D. E. Lonser, W. G. Rance, A. A. Stricker and W. VonKaenel and assigned to the International Business Machines Corporation.
2. Field of the Invention
The present invention relates to a vacuum pick up and transfer head for handling flimsy sheets. More particularly, the invention concerns an improved vacuum pick up and transfer head adapted for handling of thin flexible materials such as uncured ceramic green sheet. Such sheets require adequate support at a variety of locations during various stages of process manufacturing, without contact with contaminating objects such as human hands, etc.
In the manufacture of semiconductor devices, multilayer ceramic modules are becoming more widely used. Such modules are comprised of multiple layers of ceramic materials stacked in a particular orientation, with each sheet or layer of ceramic having imprinted thereon a particular conductive pattern. With the entire stack of uncured ceramics in place the stack is pressed and cured to form an integral ceramic package having a large plurality of electrically connected conductive paths arranged therein.
Heretofore, in the manufacture of such multi-layer ceramic packages it has been the practice to handle and stack by hand sheets of uncured ceramic sheet material known as green sheet. Such green sheet is thin, flimsy material which is easily subject to stretching and other deformation, as well as tearing and degradation by contact with human hands, particularly if finger prints are left within a region to be imprinted with conductive material.
Other problems are encountered in obtaining satisfactory alignment of such green sheet and the spacer sheets which are commonly utilized in stacking the sheets within trays to prevent adhesion of sheets to each other. These problems are discussed in more detail in the aforementioned related application by D. E. Lonser et al., describing a Method and Apparatus for Locating and Aligning Flimsy Sheets. However, it should be apparent that a need exists in the art for an effective pick up transfer head for picking up flimsy sheets and transporting them between various process steps without damaging the green sheet. Moreover, a need exists for a pick up and transfer head which is capable of supporting the green sheet both on the periphery and in the center during such handling to prevent stretching and tearing of the green sheet prior to imprinting and/or placement in a final stack. It is also desirable to provide a pick up and transfer head which has a capability of detecting whether a green sheet or a spacer sheet has been picked up, and which includes means capable of positively stripping green sheets and spacer sheets from the head at a predetermined time.
SUMMARY OF THE INVENTION
Accordingly, it is an object of the invention to provide an improved pick up and transfer head for handling ceramic green sheet material and/or other flimsy sheets which will provide adequate support to the sheets during handling, without degradation or damage.
It is another object of the invention to provide, in such a pick up and transfer head, a capability for differentiating when at least two different types of flimsy sheet materials have been picked up, and to include means for selectively stripping flimsy sheets from the head.
These objects and other features of the invention are attained in a vacuum pressure operated pick up and transfer head which generally comprises a rectangular block having a sheet contacting surface or lip with vacuum slots formed along the periphery thereof to retain flimsy sheets when the surfaces are brought in contact therewith. The center section of the sheet contacting surface is recessed whereby an inner vacuum chamber is formed when the sheet contacting surface is brought into contact with a flimsy sheet so that the sheet acts as a diaphragm. A vacuum control and manifold system is provided, including a plurality of check valves, which enable the application of vacuum and/or positive pressure to selectively pick up and discharge flimsy sheets from the face of the transfer head. A plurality of probes are provided in the head, which are selectively extended through the sheet contacting surface to detect whether green sheet or spacer sheet has been picked up by the head. The probes can also be utilized as positive stripping members during discharge of green sheet or spacer sheet into a tray.
Other features and advantages of the invention are described in the following detailed description taken in conjunction with the accompanying drawings wherein:
FIG. 1 is a diagrammatic view of a vacuum head designed in accordance with the invention with parts broken away;
FIG. 2 is a sectional view of the vacuum head illustrated in FIG. 1;
FIG. 3 is a partial isometric view with parts broken away of a portion of the vacuum head illustrated in FIG. 1;
FIG. 4 is a diagrammatic view illustrating details of the vacuum slots provided in the head illustrated in FIG. 1; and
FIGS. 5A and 5B are schematic representations of the check valves illustrated in FIG. 2 under different pressure conditions.
DETAILED DESCRIPTION OF THE INVENTION
Referring now to the drawings and particularly to FIGS. 1-3, a vacuum pick up and transfer head 10 is illustrated. The head includes sides 11 and a back member 12 of generally rectangular configuration having a support cross member 14 formed internally thereof to define a vacuum chamber comprising four regions 16-19 interconnected by slots 20A-D formed through cross member 14. The vacuum chamber is bounded on the sheet or front side by a layer 22 of suitable material which is slightly recessed with respect to a sheet contacting lip 24 defined about the periphery of sides 11.
A plurality of slots 25 are formed through lip 24 extending into the vacuum chambers whereby vacuum or air pressure can be applied to the edges of a rectangular sheet brought into contact with the periphery of the transfer head. With such a sheet in place the sheet acts as a diaphragm so that a region 26 defined between layer 22 and the sheet becomes a vacuum chamber which exerts force upon the center of the sheet and retains it in a supportive condition when the head is moved.
To properly distribute vacuum or air pressure to achieve this result, vacuum air fittings such as 30A are provided, each extending through back member 12 into a corresponding vacuum chamber. The fittings communicate with a controlled source of air pressure of conventional design, not illustrated. In corresponding fashion check valves 32A-D are also provided, each one defining an air channel between the main vacuum chamber and chamber 26.
Each check valve includes a ball 36 retained between a housing 37 having an air passageway formed therein, and a removable fitting 38, also having an air passageway formed therethrough. A spring washer 47 is used to close off the air passageway in all conditions except when the main chamber is pressurized.
The position of the ball in the check valve, with positive pressure on is illustrated in FIG. 5A where it is apparent that positive air pressure is permitted to flow from the main chamber into chamber 26. The positon of the ball with vacuum pressure applied to the main chamber is illustrated in FIG. 5B where it is apparent that the vacuum pressure and spring washer cause the ball to be lifted against fitting 38. This forms a seal which, in turn, creates a vacuum pressure level of predetermined magnitude in chamber 26 as a result of the green sheet acting as a diaphragm utilizing its own weight.
A venting channel 40 is provided between the back of member 12 and chamber 26 through the center of cross member 14, as illustrated. A pressure relief ball 42 is secured in an annular recess at the upper end of channel 40 and retained there by a plate 44 having venting holes 46 formed therein. With check valves 32A-D in a closed position thereby creating slight vacuum pressure in chamber 26, pressure relief ball 42 is retained against the mouth of channel 40 thereby closing the venting channel. With positive pressure applied in chamber 26 the pressure relief ball is moved away from the mouth of channel 40 whereby positive pressure is vented through holes 46.
FIG. 3 illustrates a green sheet sensor pin 50 and a spacer sheet sensor pin 52 which are typical of a plurality of such sensors reciprocally located in suitable openings extending through the periphery of sheet contacting lip 24. As shown, each of the sensors includes a bullet-nosed member 56 adapted to extend below the surface of lip 24 into contact with a sheet engaged by that surface.
With member 56 in an upper position, caused by contact with a sheet, an upper portion 58 of the probe acts in conjunction with a magnetic yoke 60 to form an electromagnetic circuit sensed by appropriate sensing means connected with conductors 62. Accordingly, the sensor provides an electrical indication of the presence of a sheet by the pin position in either an extended or a withdrawn position.
In order to differentiate between green sheet or spacer sheet it is only necessary to provide green sheets with holes located in predetermined positions and spacer sheets with holes in other predetermined positions which correspond to the positions of the various sensor pins. It has been found that green sheet and spacer sheet can be identified with one sensor each; however, in the preferred embodiment a plurality of spacer sheet sensor pins are provided located at least in the four corners of the head, and a plurality of green sheet sensors are provided located between the corners.
FIG. 4 illustrates a typical detail of the slots oriented around the periphery of the head. As shown, each slot is an elongate relatively narrow recess formed within surface 24 having a tiny hole 27 communicating between the center of the slot and the vacuum chamber. The hole size and slot lip are selected to provide a predetermined amount of lifting force to the flimsy sheets, depending upon the size of sheet which are to be handled and depending upon the vacuum air pressure levels which are available. However, in the preferred embodiment these slots are in the order of three hundredths of an inch wide and 10-20 times that in length.
In operation the transfer head is placed over a tray containing green sheet or spacer sheet and lowered into contact with the uppermost sheet in the tray. Vacuum pressure is then switched on whereby the outer surface of the rectangular green sheet is adhered to surface 24 and the interior region of the green sheet is suspended and supported by vacuum pressure exerted by chamber 26. The head is then elevated so that the green sheet can be transferred to another location for deposit. The sensor pins detect whether a green sheet or a spacer sheet has been picked up and verify the orientation of the sheet with respect to the head.
Upon deposition of the sheet the head design described permits use of positive pressure to deposit the sheet via positive force into a tray, if desired. The stripping function can be facilitated by providing means for lowering the sensor pins, if desired. In addition, the head described can be utilized in handling the green sheet in the manner described in the aforementioned related application, wherein a balanced pressure zone is created between a transfer head and an alignment head whereby the green sheet is suspended until alignment pins can be inserted through the alignment holes in the corner thereof. The arrangement of check valves and pressure relief valve facilitate the switching from positive pressure to vacuum pressure and vice versa. Moreover, the head design utilizing what is in effect a recessed center section, wherein the green sheet acts as a diaphragm, to provide self supporting force to the center of the green sheet without damage or distortion to this region of the sheet is a significant improvement in handling procedure.

Claims (7)

We claim:
1. A transfer head for pick up and placement of flimsy sheets of flexible material including
a back member having a vacuum chamber formed therein, a sheet contacting lip, adapted to communicate with the vacuum chamber, to contact and retain the outer periphery of a flimsy sheet by vacuum pressure, and a non sheet contacting inner region defined within said sheet contacting lip which cooperates with the sheet when the latter is in contact with said lip to produce a vacuum pressure region that serves to support the flimsy center portion of the sheet without contact by said transfer head, and
sensing means associated with said head for detecting which of at least two types of flimsy sheets has been picked up by said transfer head.
2. The transfer head of claim 1 wherein the sensing means include a plurality of locator pins reciprocally mounted through the sheet contacting lip, adapted to fit through corresponding locator openings formed within certain types of sheets and to contact the edges of other types of sheets.
3. The transfer head of claim 2 wherein said locator pins include a magnetic yoke adapted to produce electrical signals indicating the state of the pin in an extended or a withdrawn position with respect to said lip.
4. A transfer head for pick up and placement of flimsy sheets of flexible material including a rectangular shaped back member having sides extending from the periphery thereof adapted to form a central vacuum chamber therein, a sheet contacting lip secured to the sides having slots therein adapted to communicate with the vacuum chamber whereby the lip is capable of retaining the outer periphery of a flimsy sheet by vacuum pressure when brought into contact therewith,
a layer of material extending across the face of said head counter sunk with respect to the sheet contacting lip so as to define a non sheet contacting inner region on the face of the transfer head which cooperates with a sheet when the latter is in contact with said lip to produce a vacuum pressure region that acts to support the flimsy center portion of a sheet without contact by said transfer head, and
sensing means associated with the head for detecting which of at least two types of flimsy sheets has been picked up by said transfer head.
5. The transfer head of claim 4 wherein valve means are provided to regulate flow of vacuum and positive pressure between the vacuum chamber in said head and the vacuum region established between said face layer and said sheet.
6. The transfer head of claim 5 wherein a vent is provided through said head between the vacuum pressure region adjacent the flimsy sheet and the open atmosphere behind the head.
7. The transfer head of claim 6 wherein said vent is selectively closed by a floating ball valve.
US05/859,778 1977-12-12 1977-12-12 Pick up and placement head for green sheet and spacer Expired - Lifetime US4185814A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US05/859,778 US4185814A (en) 1977-12-12 1977-12-12 Pick up and placement head for green sheet and spacer
JP14056078A JPS5483273A (en) 1977-12-12 1978-11-16 Vacuummtype pickup and transfer head
EP78101642A EP0002516B1 (en) 1977-12-12 1978-12-12 Vacuum pick-up head for smooth, flimsy workpieces
DE7878101642T DE2862037D1 (en) 1977-12-12 1978-12-12 Vacuum pick-up head for smooth, flimsy workpieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/859,778 US4185814A (en) 1977-12-12 1977-12-12 Pick up and placement head for green sheet and spacer

Publications (1)

Publication Number Publication Date
US4185814A true US4185814A (en) 1980-01-29

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US05/859,778 Expired - Lifetime US4185814A (en) 1977-12-12 1977-12-12 Pick up and placement head for green sheet and spacer

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US (1) US4185814A (en)
EP (1) EP0002516B1 (en)
JP (1) JPS5483273A (en)
DE (1) DE2862037D1 (en)

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0049349A1 (en) * 1980-10-07 1982-04-14 International Business Machines Corporation Mask cleaning apparatus and automatic multilayer ceramic screening machine incorporating same
US4368908A (en) * 1980-12-08 1983-01-18 Burroughs Corporation Vacuum handling fixture
EP0109080A1 (en) * 1982-11-16 1984-05-23 International Business Machines Corporation Pick-up head for moving a sheet of material
US4566726A (en) * 1984-06-13 1986-01-28 At&T Technologies, Inc. Method and apparatus for handling semiconductor wafers
US4875279A (en) * 1987-08-21 1989-10-24 E. I. Du Pont De Nemours And Company Die attach pickup tools
US4883300A (en) * 1988-10-13 1989-11-28 Intelmatec Corporation End effector for IC chip handling
US5048811A (en) * 1989-07-31 1991-09-17 Aluminum Company Of America Single head device for removing alternate articles from a stack of the articles
US5058878A (en) * 1989-12-14 1991-10-22 Aluminum Company Of America Cassette structure
US5207413A (en) * 1992-02-19 1993-05-04 Stanislav Maron Vacuum sheet film transport and method
US5297830A (en) * 1993-04-05 1994-03-29 Hoke Thomas A Automatic load sensing vacuum valve
US5382404A (en) * 1989-05-04 1995-01-17 Murata Manufacturing Co., Ltd. Method of cutting out a portion of a weak sheet
US5449409A (en) * 1991-09-30 1995-09-12 Baccini; Gisulfo Device to process green-tape type circuits
US5707537A (en) * 1995-01-23 1998-01-13 International Business Machines Corporation Bulk removal, transport and storage fixture for small batch-fabricated devices
US5971454A (en) * 1998-01-09 1999-10-26 International Business Machines Corporation Article handler
US6318778B1 (en) * 1999-05-07 2001-11-20 Michel Joulin Suction pick-up head
US6321971B1 (en) * 1997-10-22 2001-11-27 Samsung Electronics Co., Ltd. Die collet for a semiconductor chip and apparatus for bonding semiconductor chip to a lead frame
US6341808B1 (en) * 2000-06-29 2002-01-29 International Business Machines Corporation Flexible sheet handling apparatus
EP1279469A1 (en) * 2001-07-19 2003-01-29 TAPEMATIC S.p.A. Vacuum gripper to be used for the manufacture of multi-layered printed circuits
US6513802B2 (en) * 2001-03-07 2003-02-04 Tooling Technology Llc Quick change tooling system for a vacuum holding fixture for a thermoformed part
AT411197B (en) * 2001-02-16 2003-10-27 Datacon Semiconductor Equip METHOD FOR MOUNTING, HOLDING OR REMOVING A WAFER AND DEVICE FOR CARRYING OUT THE METHOD
US6663740B2 (en) * 2001-05-07 2003-12-16 New Create Corporation Manufacturing method and manufacturing apparatus of thin-film laminate
EP1429373A2 (en) * 2002-12-09 2004-06-16 Shinko Electric Industries Co., Ltd. Conveyor system
US6802688B1 (en) * 1999-04-27 2004-10-12 Univeyor A/S Apparatus for handling layers of palletized goods
US20050095106A1 (en) * 2003-05-16 2005-05-05 Pearce William L. Carton handling method & apparatus
US20070228751A1 (en) * 2006-03-30 2007-10-04 Viavattine Joseph J Apparatus and method for positioning current collectors in an electrochemical cell
WO2007128398A1 (en) * 2006-05-03 2007-11-15 Tecnos S.P.A. Method and apparatus for pneumatically gripping porous sheet material.
WO2009078797A1 (en) * 2007-12-19 2009-06-25 Autolabel Ab A device for a tool and the proceeding for manufacture the same
US20090324377A1 (en) * 2006-08-18 2009-12-31 Torben Christensen Apparatus for handling layers of palletised goods
US20130004286A1 (en) * 2011-06-30 2013-01-03 J. L. Souser & Associates, Inc. Tool and process for handling pliant comestibles
US20130020755A1 (en) * 2011-07-22 2013-01-24 Fuji Xerox Co., Ltd. Medium feeding device and image forming apparatus
CN103072822A (en) * 2012-09-05 2013-05-01 王伟光 Multi-adaptive sponge sucker system and method for adsorbing workpieces through same
US20130106126A1 (en) * 2011-11-02 2013-05-02 AMF Automation Technologies, LLC, d/b/a AMF Baker Systems End Effector with Internal Valve
CN104973447A (en) * 2014-04-10 2015-10-14 北京华夏视科图像技术有限公司 Induced air flattening device and printing product detecting apparatus provided with same
US9403280B2 (en) * 2011-11-18 2016-08-02 Nike, Inc. Manufacturing vacuum tool
WO2017069682A1 (en) * 2015-10-21 2017-04-27 Rollquett Patent Ab Label picking arrangement and method for picking labels
US9937585B2 (en) 2011-11-18 2018-04-10 Nike, Inc. Multi-functional manufacturing tool
CN108045943A (en) * 2017-11-20 2018-05-18 佛山市高明区生产力促进中心 A kind of suction device of the mosaic sheet with collision prevention function
CN108443538A (en) * 2018-06-13 2018-08-24 深圳市鼎达信装备有限公司 Vacuum absorption device and its suction control valve
CN111532822A (en) * 2020-04-10 2020-08-14 苏州杰锐思智能科技股份有限公司 Vacuum adsorption device compatible with multi-size metal foils
US11235939B2 (en) 2017-08-10 2022-02-01 Kongsberg Precision Cutting Systems Belgium Bv Vacuum lifter
US11420830B2 (en) * 2017-08-10 2022-08-23 Kongsberg Precision Cutting Systems Belgium Bv Vacuum lifter
US20230140740A1 (en) * 2020-04-07 2023-05-04 Fanuc Corporation Hand system and hand

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920035A1 (en) * 1988-07-04 1990-01-11 Kuttler Hans Juergen Apparatus for the isolation and transportation of workpieces
US9342998B2 (en) 2010-11-16 2016-05-17 Microsoft Technology Licensing, Llc Techniques to annotate street view images with contextual information
DE102015213818A1 (en) * 2015-07-22 2017-01-26 Asys Automatisierungssysteme Gmbh Device for handling flat substrates
CN106057719B (en) * 2016-06-29 2019-05-14 中国振华集团永光电子有限公司（国营第八七三厂） A kind of clamp for machining and its processing method for realizing the bonding of ceramic paster packaging aluminium nickel
CN110745542B (en) * 2019-09-29 2021-07-27 格林美（武汉）城市矿产循环产业园开发有限公司 Battery stripping and feeding equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US715905A (en) * 1902-02-21 1902-12-16 Abbot Augustus Low Paper-lifting mechanism.
US2776163A (en) * 1951-04-24 1957-01-01 Cremer Gottfried Suction-head for use with a vacuum conveyor plant
US3180608A (en) * 1963-11-05 1965-04-27 Colgate Palmolive Co Vacuum holding of thin pliable material
US3523707A (en) * 1968-03-18 1970-08-11 Alvey Inc Suction head for article handling apparatus
US3694894A (en) * 1970-01-14 1972-10-03 Parker Hannifin Corp Method of inserting a seal in a face-cut groove
DE2440691A1 (en) * 1974-08-24 1976-03-04 Peters Ag Claudius Filled sack vacuum lifting head - has two or more suction chambers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1205908B (en) * 1963-01-09 1965-11-25 Albert Fezer Method and device for lifting porous panels from a stack by means of suction and for separating the top panel by means of compressed air

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US715905A (en) * 1902-02-21 1902-12-16 Abbot Augustus Low Paper-lifting mechanism.
US2776163A (en) * 1951-04-24 1957-01-01 Cremer Gottfried Suction-head for use with a vacuum conveyor plant
US3180608A (en) * 1963-11-05 1965-04-27 Colgate Palmolive Co Vacuum holding of thin pliable material
US3523707A (en) * 1968-03-18 1970-08-11 Alvey Inc Suction head for article handling apparatus
US3694894A (en) * 1970-01-14 1972-10-03 Parker Hannifin Corp Method of inserting a seal in a face-cut groove
DE2440691A1 (en) * 1974-08-24 1976-03-04 Peters Ag Claudius Filled sack vacuum lifting head - has two or more suction chambers

Cited By (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0049349A1 (en) * 1980-10-07 1982-04-14 International Business Machines Corporation Mask cleaning apparatus and automatic multilayer ceramic screening machine incorporating same
US4362486A (en) * 1980-10-07 1982-12-07 International Business Machines Corporation Automatic multilayer ceramic (MLC) screening machine
US4368908A (en) * 1980-12-08 1983-01-18 Burroughs Corporation Vacuum handling fixture
EP0109080A1 (en) * 1982-11-16 1984-05-23 International Business Machines Corporation Pick-up head for moving a sheet of material
US4566726A (en) * 1984-06-13 1986-01-28 At&T Technologies, Inc. Method and apparatus for handling semiconductor wafers
US4875279A (en) * 1987-08-21 1989-10-24 E. I. Du Pont De Nemours And Company Die attach pickup tools
US4883300A (en) * 1988-10-13 1989-11-28 Intelmatec Corporation End effector for IC chip handling
US5382404A (en) * 1989-05-04 1995-01-17 Murata Manufacturing Co., Ltd. Method of cutting out a portion of a weak sheet
US5582086A (en) * 1989-05-04 1996-12-10 Murata Manufacturing Co., Ltd. Pickup apparatus for picking up a cut sheet from a weak sheet such as a ceramic green sheet
US5048811A (en) * 1989-07-31 1991-09-17 Aluminum Company Of America Single head device for removing alternate articles from a stack of the articles
US5058878A (en) * 1989-12-14 1991-10-22 Aluminum Company Of America Cassette structure
US5449409A (en) * 1991-09-30 1995-09-12 Baccini; Gisulfo Device to process green-tape type circuits
US5207413A (en) * 1992-02-19 1993-05-04 Stanislav Maron Vacuum sheet film transport and method
US5297830A (en) * 1993-04-05 1994-03-29 Hoke Thomas A Automatic load sensing vacuum valve
US5707537A (en) * 1995-01-23 1998-01-13 International Business Machines Corporation Bulk removal, transport and storage fixture for small batch-fabricated devices
US6321971B1 (en) * 1997-10-22 2001-11-27 Samsung Electronics Co., Ltd. Die collet for a semiconductor chip and apparatus for bonding semiconductor chip to a lead frame
US6386432B1 (en) 1997-10-22 2002-05-14 Samsung Electronics Co., Ltd. Semiconductor die pickup method that prevents electrostatic discharge
US5971454A (en) * 1998-01-09 1999-10-26 International Business Machines Corporation Article handler
US6802688B1 (en) * 1999-04-27 2004-10-12 Univeyor A/S Apparatus for handling layers of palletized goods
US6318778B1 (en) * 1999-05-07 2001-11-20 Michel Joulin Suction pick-up head
US6341808B1 (en) * 2000-06-29 2002-01-29 International Business Machines Corporation Flexible sheet handling apparatus
AT411197B (en) * 2001-02-16 2003-10-27 Datacon Semiconductor Equip METHOD FOR MOUNTING, HOLDING OR REMOVING A WAFER AND DEVICE FOR CARRYING OUT THE METHOD
US6513802B2 (en) * 2001-03-07 2003-02-04 Tooling Technology Llc Quick change tooling system for a vacuum holding fixture for a thermoformed part
US6663740B2 (en) * 2001-05-07 2003-12-16 New Create Corporation Manufacturing method and manufacturing apparatus of thin-film laminate
EP1279469A1 (en) * 2001-07-19 2003-01-29 TAPEMATIC S.p.A. Vacuum gripper to be used for the manufacture of multi-layered printed circuits
EP1429373A2 (en) * 2002-12-09 2004-06-16 Shinko Electric Industries Co., Ltd. Conveyor system
US20040112715A1 (en) * 2002-12-09 2004-06-17 Shinko Electric Industries Co., Ltd Conveyor system
EP1429373A3 (en) * 2002-12-09 2005-02-16 Shinko Electric Industries Co., Ltd. Conveyor system
US7063499B2 (en) * 2002-12-09 2006-06-20 Shinko Electric Industries Co., Ltd. Conveyor system
US20050095106A1 (en) * 2003-05-16 2005-05-05 Pearce William L. Carton handling method & apparatus
US7665949B2 (en) * 2003-05-16 2010-02-23 Layertech Holdings Pty Ltd Carton handling method and apparatus
US20070228751A1 (en) * 2006-03-30 2007-10-04 Viavattine Joseph J Apparatus and method for positioning current collectors in an electrochemical cell
US7556298B2 (en) * 2006-03-30 2009-07-07 Medtronic, Inc. Apparatus and method for positioning current collectors in an electrochemical cell
WO2007128398A1 (en) * 2006-05-03 2007-11-15 Tecnos S.P.A. Method and apparatus for pneumatically gripping porous sheet material.
US20090324377A1 (en) * 2006-08-18 2009-12-31 Torben Christensen Apparatus for handling layers of palletised goods
US8020908B2 (en) * 2006-08-18 2011-09-20 Univeyor A/S Apparatus for handling layers of palletised goods
WO2009078797A1 (en) * 2007-12-19 2009-06-25 Autolabel Ab A device for a tool and the proceeding for manufacture the same
US20130004286A1 (en) * 2011-06-30 2013-01-03 J. L. Souser & Associates, Inc. Tool and process for handling pliant comestibles
US8550525B2 (en) * 2011-06-30 2013-10-08 J.L. Souser & Associates, Inc. Tool and process for handling pliant comestibles
US20130020755A1 (en) * 2011-07-22 2013-01-24 Fuji Xerox Co., Ltd. Medium feeding device and image forming apparatus
US8662495B2 (en) * 2011-07-22 2014-03-04 Fuji Xerox Co., Ltd. Medium feeding device and image forming apparatus
US8684434B2 (en) * 2011-11-02 2014-04-01 AMF automation Technologies, LLC End effector with internal valve
US20130106126A1 (en) * 2011-11-02 2013-05-02 AMF Automation Technologies, LLC, d/b/a AMF Baker Systems End Effector with Internal Valve
US10532468B2 (en) 2011-11-18 2020-01-14 Nike, Inc. Manufacturing vacuum tool with selective activation of pickup zones
US10272518B2 (en) 2011-11-18 2019-04-30 Nike, Inc. Multi-functional manufacturing tool
US11911893B2 (en) 2011-11-18 2024-02-27 Nike, Inc. Manufacturing tool
US9403280B2 (en) * 2011-11-18 2016-08-02 Nike, Inc. Manufacturing vacuum tool
US11389972B2 (en) 2011-11-18 2022-07-19 Nike, Inc. Manufacturing tool with selective activation of pickup zones
US9937627B2 (en) 2011-11-18 2018-04-10 Nike, Inc. Manufacturing vacuum tool with selective activation of pickup zones
US9937585B2 (en) 2011-11-18 2018-04-10 Nike, Inc. Multi-functional manufacturing tool
US11273514B2 (en) 2011-11-18 2022-03-15 Nike, Inc. Multi-functional manufacturing tool
US10610958B2 (en) 2011-11-18 2020-04-07 Nike, Inc. Multi-functional manufacturing tool
CN103072822B (en) * 2012-09-05 2015-06-03 王伟光 Multi-adaptive sponge sucker system and method for adsorbing workpieces through same
CN103072822A (en) * 2012-09-05 2013-05-01 王伟光 Multi-adaptive sponge sucker system and method for adsorbing workpieces through same
CN104973447A (en) * 2014-04-10 2015-10-14 北京华夏视科图像技术有限公司 Induced air flattening device and printing product detecting apparatus provided with same
US10865007B2 (en) 2015-10-21 2020-12-15 Rollquett Patent Ab Label picking arrangement and method for picking labels
WO2017069682A1 (en) * 2015-10-21 2017-04-27 Rollquett Patent Ab Label picking arrangement and method for picking labels
US11235939B2 (en) 2017-08-10 2022-02-01 Kongsberg Precision Cutting Systems Belgium Bv Vacuum lifter
US11420830B2 (en) * 2017-08-10 2022-08-23 Kongsberg Precision Cutting Systems Belgium Bv Vacuum lifter
CN108045943A (en) * 2017-11-20 2018-05-18 佛山市高明区生产力促进中心 A kind of suction device of the mosaic sheet with collision prevention function
CN108443538A (en) * 2018-06-13 2018-08-24 深圳市鼎达信装备有限公司 Vacuum absorption device and its suction control valve
US20230140740A1 (en) * 2020-04-07 2023-05-04 Fanuc Corporation Hand system and hand
CN111532822A (en) * 2020-04-10 2020-08-14 苏州杰锐思智能科技股份有限公司 Vacuum adsorption device compatible with multi-size metal foils

Also Published As

Publication number Publication date
JPS5483273A (en) 1979-07-03
EP0002516B1 (en) 1982-09-15
DE2862037D1 (en) 1982-11-04
EP0002516A1 (en) 1979-06-27
JPS5545456B2 (en) 1980-11-18

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