US3702412A - Apparatus for and method of producing an energetic electron curtain - Google Patents
Apparatus for and method of producing an energetic electron curtain Download PDFInfo
- Publication number
- US3702412A US3702412A US153769A US3702412DA US3702412A US 3702412 A US3702412 A US 3702412A US 153769 A US153769 A US 153769A US 3702412D A US3702412D A US 3702412DA US 3702412 A US3702412 A US 3702412A
- Authority
- US
- United States
- Prior art keywords
- electron
- curtain
- density
- cathode
- grid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 11
- 238000007493 shaping process Methods 0.000 claims abstract description 9
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 4
- 230000000875 corresponding effect Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 101100264195 Caenorhabditis elegans app-1 gene Proteins 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 150000003657 tungsten Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
Definitions
- ABSTRACT This disclosure deals with the shaping of a longitudinal space-charge-limited line of electrons into a substantially uniform electron density curtain, accelerating the same along field lines that expand the curtain, and
- the present invention relates to apparatus for and methods of producing an energetic electron curtain, being more particularly, though not exclusively, directed to the electron irradiating of relatively long articles.
- a further object of the invention is to provide a novel apparatus for and method of producing energetic electrons of more general utility, as well.
- the invention contemplates, in one of its broad aspects, the shaping of a longitudinal space-charge-limited line of electrons into a substantially uniform electron density curtain, accelerating the same along field lines that expand the curtain, and then passing the expanded curtain through a longitudinal window for irradiation purposes and the like.
- FIGURE is an isometric view of a preferred apparatus operating in accordance with the method of the invention, with regions partly broken away to illustrate details of construction.
- a longitudinal cathode is shown at 1 in the form of a tungsten or other electronemitting line filament or indirectly heated strip or the the like, suspended from a gun structure or channel 3 provided with heat shielding walls 5, as of, for example, multifoil thermal barrier as made by Therrnoelectron Corporation, Waltham, Massachusetts, and described in their 1970 catalogue, Multi-Foil Thermal Insulation.”
- the channel 3 is provided at the bottom with a control grid 7 extending longitudinally parallel to and coextensively with the cathode l and transversely thereof to the walls of the channel structure 3.
- the electrons leaving the different-temperature portions of the cathode 1 become space-charge limited such that a substantially longitudinally uniform charge-density beam is emitted through the grid 7, but usually with a non-uniform transverse charge density of greater density centrally under the cathode 1 than transversely at the sides thereof near the walls 5 of the channel structure 3.
- This beam is shaped by a preferably coaxially surrounding cylindrical electrostatic shield or Faraday cage structure 11 substantially axially containing the cathode 1 and having a further longitudinal grid structure l3 aligned with the cathode 1 and control grid 7.
- This cage structure 11 is supported by a dielectric structure such as the vacuum feed through bushing. With an appropriate positive potential applied at 11 with respect to the control grid 7, the non-uniform transverse charge density become converted into a substantially uniform electron curtain.
- An anode-cylinder l5 coaxially surrounds the cage 11, with the whole system vacuum-sealed at 2, and the anode cylinder contains a longitudinal electron-pervious window 17, as of aluminum, aligned with the control and further grid structures 7 and 13.
- the anode structure 1517 is maintained at an accelerating potential above the cage 1 1, though grounded to avoid shock hazard.
- the radial lines of the voltage gradient or field thus set up between the cylinders 11 and 15 (or other geometrical configurations, if used) will cause the electron curtain at the further grid 13 to expand in the gap or space between 11 and 15 along the radial lines of force, broadening the electron curtain so as uniformly and simultaneously to irradiate, through the window 17, all parts of cor responding longitudinal or long-dimension objects-tobe-treated (not shown), carried transversely past the window 17 by a conveyor or other mechanism 19, in the direction of the arrow.
- the uniform current density of the expanded energetic electron curtain at the window 17 will be determined substantially by the electron distribution at the beam-shaping grid 13, and substantially independent of the accelerating potential, the large field of which only serves to expand and accelerate the electron curtain.
- .amperes/cm. may be obtained with a control grid-to-cathode potential of about -20 volts, a beam-shaping grid potential of from about +800 to 1,000 volts, and an accelerating potential between the grounded anode and window structure 15-17 (about 8 inches in diameter) of about kilovolts.
- a 6-inch long tungsten filament cathode 1 very long compared to the approximately 0.010 inch width thereof, a 6-inch long control grid 7 about onefourth inch wide, a 6-inch long beam-forming grid 13 about one-half inch wide, a 6-inch long wider window 17 (about l-inch in width) for receiving the expanded curtain, current density uniformity of i percent and better has been obtained over about a 6-inch beam width.
- Apparatus for producing a curtain of energetic electrons having, in combination, a longitudinally extending electron-emitting cathode, a control grid structure positioned on one side of the cathode and extending longitudinally therealong and transversely thereacross, means for applying a space-charge limiting potential between the cathode and control grid to generate at the egress of the control grid a longitudinally extending electron beam substantially uniform in density longitudinally but non-uniform transversely with substantially greater density centrally than transversely to the sides, a Faraday cage structure surrounding the cathode and control grid and provided with a further grid substantially aligned with the cathode and control grid for shaping the non-uniform transverse electron beam density into a substantially uniform density curtain, an anode structure surrounding the Faraday cage structure and having an electron-pervious window substantially aligned with the control and further grids, and means for establishing an accelerating-voltage gradient field between the further grid and the window such that the substantially uniform density electron curtain may expand along
- a method of energetic electron beam irradiation that comprises, simultaneously emitting electrons along space-charge limiting the emitted electrons to produce a longitudinally extending electron beam substantially uniform in density longitudinally, but non-uniform transversely, shaping the longitudinal electron beam to convert the non-uniform transverse beam density thereof into a substantially uniform density electron curtain, directing said curtain into an accelerating electric field to expand the electron curtain along the lines of said field, and ejecting t e x ded electron cu ain w'th a current densit d istrib n determined su stantially by the electro distribution just prior to expansion.
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Particle Accelerators (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15376971A | 1971-06-16 | 1971-06-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3702412A true US3702412A (en) | 1972-11-07 |
Family
ID=22548668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US153769A Expired - Lifetime US3702412A (en) | 1971-06-16 | 1971-06-16 | Apparatus for and method of producing an energetic electron curtain |
Country Status (5)
Country | Link |
---|---|
US (1) | US3702412A (en) |
JP (1) | JPS5710542B1 (en) |
CA (1) | CA963182A (en) |
DE (1) | DE2229825C3 (en) |
GB (1) | GB1356861A (en) |
Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4048534A (en) * | 1976-03-25 | 1977-09-13 | Hughes Aircraft Company | Radial flow electron gun |
DE2823205A1 (en) * | 1978-05-25 | 1979-11-29 | Energy Sciences Inc | Appts. generating longitudinal strips of energetic electron beams - has slotted conductive cylinders concentrically mounted around cathode for electrostatic shielding and aperture lens focusing |
FR2428913A1 (en) * | 1978-06-15 | 1980-01-11 | Energy Sciences Inc | Appts. generating longitudinal strips of energetic electron beams - has slotted conductive cylinders concentrically mounted around cathode for electrostatic shielding and aperture lens focusing |
EP0011414A1 (en) * | 1978-11-03 | 1980-05-28 | Tetra Laval Holdings & Finance SA | Process and apparatus for electron beam irradiation of surfaces |
US4246297A (en) * | 1978-09-06 | 1981-01-20 | Energy Sciences Inc. | Process and apparatus for the curing of coatings on sensitive substrates by electron irradiation |
FR2471043A1 (en) * | 1979-11-28 | 1981-06-12 | Inst Elektrofizicheskoi Appa | Electron irradiation device for webs - protected by curved housing covering drum opposite electron beam window |
US4273831A (en) * | 1978-09-01 | 1981-06-16 | Kemtec, Inc. | Powdered polymer compositions produced by electron beam polymerization of polymerizable compositions |
EP0056179A1 (en) * | 1981-01-12 | 1982-07-21 | Sony Corporation | Process and apparatus for converged fine line electron beam treatment of objects |
US4367412A (en) * | 1978-11-03 | 1983-01-04 | Tetra Pak Developpement Sa | Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications |
US4410263A (en) * | 1982-03-01 | 1983-10-18 | Eastman Kodak Company | Sheet handling device for image transfer in an electrographic copier |
US4439686A (en) * | 1980-09-16 | 1984-03-27 | Tetra Pak Developpement Ltd. | Electron beam-irradiating apparatus with conical bushing seal-support |
US4490409A (en) * | 1982-09-07 | 1984-12-25 | Energy Sciences, Inc. | Process and apparatus for decorating the surfaces of electron irradiation cured coatings on radiation-sensitive substrates |
US4559102A (en) * | 1983-05-09 | 1985-12-17 | Sony Corporation | Method for recrystallizing a polycrystalline, amorphous or small grain material |
US4591756A (en) * | 1985-02-25 | 1986-05-27 | Energy Sciences, Inc. | High power window and support structure for electron beam processors |
US4592799A (en) * | 1983-05-09 | 1986-06-03 | Sony Corporation | Method of recrystallizing a polycrystalline, amorphous or small grain material |
US4642244A (en) * | 1986-03-03 | 1987-02-10 | Energy Sciences Inc. | Method of and apparatus for electron beam curing coated, porous and other web structures |
US4652763A (en) * | 1985-03-29 | 1987-03-24 | Energy Sciences, Inc. | Electron-beam irradiation sterilization process |
US4703256A (en) * | 1983-05-09 | 1987-10-27 | Sony Corporation | Faraday cups |
WO1990009030A1 (en) * | 1989-02-02 | 1990-08-09 | Oy Tampella Ab | A method of producing high-energy electtron curtains with high performance |
US4983849A (en) * | 1989-06-05 | 1991-01-08 | Radiation Dynamics, Inc. | Apparatus and method for promoting uniform dosage of ionizing radiation in targets |
US5120972A (en) * | 1990-12-11 | 1992-06-09 | Energy Sciences, Inc. | Method of and apparatus for improved nitrogen inerting of surfaces to be electron beam irradiated |
US5126633A (en) * | 1991-07-29 | 1992-06-30 | Energy Sciences Inc. | Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments |
US5194742A (en) * | 1992-01-21 | 1993-03-16 | Energy Sciences Inc. | Method of and apparatus for shielding electron and other particle beam accelerators |
EP0549113A1 (en) * | 1991-11-22 | 1993-06-30 | Energy Sciences Inc. | Parallel filament electron gun |
US5236159A (en) * | 1991-12-30 | 1993-08-17 | Energy Sciences Inc. | Filament clip support |
EP0584443A1 (en) * | 1992-08-22 | 1994-03-02 | Leybold Aktiengesellschaft | Process and apparatus for continuous vacuum coating of non-conductive sheets |
US6210516B1 (en) | 1994-02-18 | 2001-04-03 | Ronald Sinclair Nohr | Process of enhanced chemical bonding by electron seam radiation |
US20030161969A1 (en) * | 2002-02-26 | 2003-08-28 | Hilliard Donald Bennett | Electron-assisted deposition process and apparatus |
US20090156079A1 (en) * | 2007-12-14 | 2009-06-18 | Kimberly-Clark Worldwide, Inc. | Antistatic breathable nonwoven laminate having improved barrier properties |
US20100159195A1 (en) * | 2008-12-24 | 2010-06-24 | Quincy Iii Roger B | High repellency materials via nanotopography and post treatment |
CN102196655A (en) * | 2010-03-11 | 2011-09-21 | 嘉兴兆泓科技有限公司 | Multi-filament wide-beam electronic curtain |
EP0950256B2 (en) † | 1997-01-02 | 2014-07-23 | Hitachi Zosen Corporation | Electron beam accelerator |
US9076633B2 (en) | 2011-07-04 | 2015-07-07 | Tetra Laval Holdings & Finance S.A. | Electron-beam device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI70346C (en) * | 1983-05-03 | 1986-09-15 | Enso Gutzeit Oy | ANORDNING FOER AOSTADKOMMANDE AV EN ELEKTRONRIDAO |
GB2251631B (en) * | 1990-12-19 | 1994-10-12 | Mitsubishi Electric Corp | Thin-film forming apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2887599A (en) * | 1957-06-17 | 1959-05-19 | High Voltage Engineering Corp | Electron acceleration tube |
US3099762A (en) * | 1962-01-15 | 1963-07-30 | Hertz Michael | Cathode ray tube using replaceable cathode |
-
1971
- 1971-06-16 US US153769A patent/US3702412A/en not_active Expired - Lifetime
-
1972
- 1972-02-25 GB GB888172A patent/GB1356861A/en not_active Expired
- 1972-03-02 CA CA136,074A patent/CA963182A/en not_active Expired
- 1972-05-18 JP JP4949472A patent/JPS5710542B1/ja active Pending
- 1972-06-15 DE DE2229825A patent/DE2229825C3/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2887599A (en) * | 1957-06-17 | 1959-05-19 | High Voltage Engineering Corp | Electron acceleration tube |
US3099762A (en) * | 1962-01-15 | 1963-07-30 | Hertz Michael | Cathode ray tube using replaceable cathode |
Cited By (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4048534A (en) * | 1976-03-25 | 1977-09-13 | Hughes Aircraft Company | Radial flow electron gun |
DE2823205A1 (en) * | 1978-05-25 | 1979-11-29 | Energy Sciences Inc | Appts. generating longitudinal strips of energetic electron beams - has slotted conductive cylinders concentrically mounted around cathode for electrostatic shielding and aperture lens focusing |
FR2428913A1 (en) * | 1978-06-15 | 1980-01-11 | Energy Sciences Inc | Appts. generating longitudinal strips of energetic electron beams - has slotted conductive cylinders concentrically mounted around cathode for electrostatic shielding and aperture lens focusing |
US4273831A (en) * | 1978-09-01 | 1981-06-16 | Kemtec, Inc. | Powdered polymer compositions produced by electron beam polymerization of polymerizable compositions |
US4246297A (en) * | 1978-09-06 | 1981-01-20 | Energy Sciences Inc. | Process and apparatus for the curing of coatings on sensitive substrates by electron irradiation |
EP0011414A1 (en) * | 1978-11-03 | 1980-05-28 | Tetra Laval Holdings & Finance SA | Process and apparatus for electron beam irradiation of surfaces |
EP0054016A2 (en) | 1978-11-03 | 1982-06-16 | Tetra Laval Holdings & Finance SA | Apparatus for electron-beam irradiation of surfaces |
US4367412A (en) * | 1978-11-03 | 1983-01-04 | Tetra Pak Developpement Sa | Process of and apparatus for cold-cathode electron-beam generation for sterilization of surfaces and similar applications |
FR2471043A1 (en) * | 1979-11-28 | 1981-06-12 | Inst Elektrofizicheskoi Appa | Electron irradiation device for webs - protected by curved housing covering drum opposite electron beam window |
US4439686A (en) * | 1980-09-16 | 1984-03-27 | Tetra Pak Developpement Ltd. | Electron beam-irradiating apparatus with conical bushing seal-support |
EP0056179A1 (en) * | 1981-01-12 | 1982-07-21 | Sony Corporation | Process and apparatus for converged fine line electron beam treatment of objects |
US4410263A (en) * | 1982-03-01 | 1983-10-18 | Eastman Kodak Company | Sheet handling device for image transfer in an electrographic copier |
US4490409A (en) * | 1982-09-07 | 1984-12-25 | Energy Sciences, Inc. | Process and apparatus for decorating the surfaces of electron irradiation cured coatings on radiation-sensitive substrates |
US4844764A (en) * | 1982-09-07 | 1989-07-04 | Energy Sciences Inc. | Process of in-line coating and decorative-layer lamination with panel board material employing electron beam irradiation |
US4559102A (en) * | 1983-05-09 | 1985-12-17 | Sony Corporation | Method for recrystallizing a polycrystalline, amorphous or small grain material |
US4592799A (en) * | 1983-05-09 | 1986-06-03 | Sony Corporation | Method of recrystallizing a polycrystalline, amorphous or small grain material |
US4703256A (en) * | 1983-05-09 | 1987-10-27 | Sony Corporation | Faraday cups |
US4591756A (en) * | 1985-02-25 | 1986-05-27 | Energy Sciences, Inc. | High power window and support structure for electron beam processors |
US4652763A (en) * | 1985-03-29 | 1987-03-24 | Energy Sciences, Inc. | Electron-beam irradiation sterilization process |
US4642244A (en) * | 1986-03-03 | 1987-02-10 | Energy Sciences Inc. | Method of and apparatus for electron beam curing coated, porous and other web structures |
WO1990009030A1 (en) * | 1989-02-02 | 1990-08-09 | Oy Tampella Ab | A method of producing high-energy electtron curtains with high performance |
US5175436A (en) * | 1989-02-02 | 1992-12-29 | Oy Tampella Ab | Method of producing high-energy electron curtains with high performance |
US4983849A (en) * | 1989-06-05 | 1991-01-08 | Radiation Dynamics, Inc. | Apparatus and method for promoting uniform dosage of ionizing radiation in targets |
US5120972A (en) * | 1990-12-11 | 1992-06-09 | Energy Sciences, Inc. | Method of and apparatus for improved nitrogen inerting of surfaces to be electron beam irradiated |
US5126633A (en) * | 1991-07-29 | 1992-06-30 | Energy Sciences Inc. | Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments |
EP0549113A1 (en) * | 1991-11-22 | 1993-06-30 | Energy Sciences Inc. | Parallel filament electron gun |
US5254911A (en) * | 1991-11-22 | 1993-10-19 | Energy Sciences Inc. | Parallel filament electron gun |
US5236159A (en) * | 1991-12-30 | 1993-08-17 | Energy Sciences Inc. | Filament clip support |
US5194742A (en) * | 1992-01-21 | 1993-03-16 | Energy Sciences Inc. | Method of and apparatus for shielding electron and other particle beam accelerators |
EP0584443A1 (en) * | 1992-08-22 | 1994-03-02 | Leybold Aktiengesellschaft | Process and apparatus for continuous vacuum coating of non-conductive sheets |
US6210516B1 (en) | 1994-02-18 | 2001-04-03 | Ronald Sinclair Nohr | Process of enhanced chemical bonding by electron seam radiation |
EP0950256B2 (en) † | 1997-01-02 | 2014-07-23 | Hitachi Zosen Corporation | Electron beam accelerator |
US20030161969A1 (en) * | 2002-02-26 | 2003-08-28 | Hilliard Donald Bennett | Electron-assisted deposition process and apparatus |
US7931787B2 (en) | 2002-02-26 | 2011-04-26 | Donald Bennett Hilliard | Electron-assisted deposition process and apparatus |
US20090156079A1 (en) * | 2007-12-14 | 2009-06-18 | Kimberly-Clark Worldwide, Inc. | Antistatic breathable nonwoven laminate having improved barrier properties |
WO2009077889A1 (en) | 2007-12-14 | 2009-06-25 | Kimberly-Clark Worldwide, Inc. | Antistatic breathable nonwoven laminate having improved barrier properties |
US20100159195A1 (en) * | 2008-12-24 | 2010-06-24 | Quincy Iii Roger B | High repellency materials via nanotopography and post treatment |
CN102196655A (en) * | 2010-03-11 | 2011-09-21 | 嘉兴兆泓科技有限公司 | Multi-filament wide-beam electronic curtain |
CN102196655B (en) * | 2010-03-11 | 2013-05-01 | 嘉兴兆泓科技有限公司 | Multi-filament wide-beam electronic curtain |
US9076633B2 (en) | 2011-07-04 | 2015-07-07 | Tetra Laval Holdings & Finance S.A. | Electron-beam device |
Also Published As
Publication number | Publication date |
---|---|
DE2229825B2 (en) | 1975-12-04 |
JPS5710542B1 (en) | 1982-02-26 |
CA963182A (en) | 1975-02-18 |
DE2229825A1 (en) | 1972-12-21 |
GB1356861A (en) | 1974-06-19 |
DE2229825C3 (en) | 1980-11-06 |
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Legal Events
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---|---|---|---|
AS | Assignment |
Owner name: FLEET NATIONAL BANK,RHODE ISLAND Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ENERGY SCIENCES INC., A CORP. OF NY;REEL/FRAME:004760/0330 Effective date: 19870423 Owner name: FLEET NATIONAL BANK, 111 WESTMINSTER ST., PROVIDEN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:ENERGY SCIENCES INC., A CORP. OF NY;REEL/FRAME:004760/0330 Effective date: 19870423 |
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Free format text: PATENTED FILE - (OLD CASE ADDED FOR FILE TRACKING PURPOSES) |