US20210141210A9 - Image pickup module, fabrication method for image pickup module, and endoscope - Google Patents
Image pickup module, fabrication method for image pickup module, and endoscope Download PDFInfo
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- US20210141210A9 US20210141210A9 US16/656,788 US201916656788A US2021141210A9 US 20210141210 A9 US20210141210 A9 US 20210141210A9 US 201916656788 A US201916656788 A US 201916656788A US 2021141210 A9 US2021141210 A9 US 2021141210A9
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- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 65
- 239000004065 semiconductor Substances 0.000 claims description 29
- 238000005452 bending Methods 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 description 22
- 238000005476 soldering Methods 0.000 description 12
- 238000003780 insertion Methods 0.000 description 9
- 230000037431 insertion Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 238000002604 ultrasonography Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 5
- 230000035515 penetration Effects 0.000 description 5
- 239000006059 cover glass Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00002—Operational features of endoscopes
- A61B1/00004—Operational features of endoscopes characterised by electronic signal processing
- A61B1/00006—Operational features of endoscopes characterised by electronic signal processing of control signals
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00002—Operational features of endoscopes
- A61B1/00004—Operational features of endoscopes characterised by electronic signal processing
- A61B1/00009—Operational features of endoscopes characterised by electronic signal processing of image signals during a use of endoscope
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00002—Operational features of endoscopes
- A61B1/00011—Operational features of endoscopes characterised by signal transmission
- A61B1/00018—Operational features of endoscopes characterised by signal transmission using electrical cables
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00064—Constructional details of the endoscope body
- A61B1/00071—Insertion part of the endoscope body
- A61B1/0008—Insertion part of the endoscope body characterised by distal tip features
- A61B1/00096—Optical elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00064—Constructional details of the endoscope body
- A61B1/0011—Manufacturing of endoscope parts
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
- A61B1/05—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by the image sensor, e.g. camera, being in the distal end portion
- A61B1/051—Details of CCD assembly
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
- G02B23/2423—Optical details of the distal end
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2476—Non-optical details, e.g. housings, mountings, supports
- G02B23/2484—Arrangements in relation to a camera or imaging device
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0012—Biomedical image inspection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/555—Constructional details for picking-up images in sites, inaccessible due to their dimensions or hazardous conditions, e.g. endoscopes or borescopes
-
- H04N5/2253—
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/06—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor with illuminating arrangements
- A61B1/0661—Endoscope light sources
- A61B1/0684—Endoscope light sources using light emitting diodes [LED]
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
Definitions
- An image pickup signal outputted by an image pickup device disposed at a distal end portion of an endoscope is subjected to primary processing by an electronic part mounted to a wiring board adjacent to the image pickup device.
- Japanese Patent Application Laid-Open Publication No. 2013-30593 discloses a stacked element in which the plurality of semiconductor elements are stacked on one another, and penetration wirings of adjacent and facing semiconductor elements are bonded to one another.
- the stacked element is used, downsizing and advanced functions of an image pickup module can be realized as compared with an imaging module in which an electronic part is mounted to a wiring board.
- FIG. 1 is an exploded view of an image pickup module according to a first embodiment
- the external electrode 20 P is electrically connected to a front electrode 31 of the first wiring board 30 by an interconnecting bonding section B 3 .
- An alignment mark for alignment with the first wiring board 30 may be formed on the rear surface 10 SB of the stacked element 10 .
- the plurality of element bonding sections B 1 are disposed in columns only in a bottom side of the semiconductor elements 11 and 21 to 24
- the plurality of external electrodes 20 P are disposed in columns only in a top side opposite to the disposal locations of the element bonding sections B 1 across the parting line L 10 .
- the element bonding sections B 1 and the external electrodes 20 P are disposed in separate locations.
- the first signal cable 40 is not directly bonded to the stacked element 10 .
- the first signal cable 40 is bonded to the first wiring board 30
- the first wiring board 30 is bonded to the stacked element 10 .
- the first wiring board 30 is a relay board.
- the external electrode 20 P of the interconnecting bonding section B 3 is disposed in a location away from the element bonding section B 1 . For this reason, load, vibration, and heat applied when ultrasound bonding of the front electrode 31 to the external electrode 20 P is performed are not directly transmitted to the element bonding section B 1 . For this reason, the image pickup module 1 has high reliability since there is no danger of damaging the stacked element 10 when the ultrasound bonding is performed.
- the stacked wafer is cut to establish a state in which four side of the substantially rectangular light receiving unit 11 A of the image pickup device 11 are respectively in parallel with four sides of a rectangular cross section orthogonal to the optical axis O of the stacked element into the rectangular solid stacked element 10 in pieces.
- the four side surfaces 10 SS of the stacked element 10 fabricated by cutting the stacked wafer are cut surfaces.
- the first bonding step for bonding the plurality of element chips to one another may be performed to fabricate the stacked element 10 .
- the cable bonding section B 2 does not interfere with (is not in contact with) the rear surface 10 SB of the stacked element 10 , the first electrode 32 of the first wiring board 30 and the external electrode 20 P of the stacked element 10 can be kept horizontal, and a connection defect of the interconnecting bonding section B 3 can be prevented.
- a processing temperature in the bonding processing to be performed afterward is set to be a lower temperature than a processing temperature in the previously performed bonding processing.
- the third temperature T3 in the third bonding step is lower than the second temperature T2 in the second bonding step, and furthermore, the second temperature T2 is lower than the first temperature T1 in the first bonding step.
- the image pickup module 1 in which the bent section 30 V is located inside the first space S 11 is short and small, and reliability of the interconnecting bonding section B 3 is high.
- the fabrication method for the image pickup module according to the present embodiment it is possible to obtain the small-sized, particularly, short and small image pickup module including the stacked element 10 and the first wiring board 30 and also having high performance and high reliability.
- a first wiring board 30 A of the image pickup module 1 A according to the present modification is bent such that the bent section 30 V has a shape having an angle at over 90 degrees.
- An external diameter of the second signal cable 41 is larger than the external diameter of the first signal cable 40 .
- the second signal cable 41 is bonded to the second main surface 30 SB on an optical axis side with respect to the first main surface 30 SA to which the first signal cable 40 is bonded. For this reason, the external dimensions of the image pickup module 1 B in the direction orthogonal to the optical axis are not increased by the thick second signal cable 41 .
- the image pickup optical unit is preferably fabricated by cutting a stacked optical wafer in which a plurality of optical wafers respectively including a plurality of optical members are stacked on one another as in the stacked element.
- a side surface of the image pickup optical unit fabricated by the cutting of the stacked optical wafer is a cut surface.
- the light source device 81 includes a white LED, for example. Illumination light outputted by the light source device 81 is guided to the distal end portion 90 A via a light guide (not illustrated) inserted through the universal code 92 and the insertion section 90 to illuminate the object.
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Abstract
Description
- This application is a continuation application of PCT/JP2018/015774 filed on Apr. 16, 2018 and claims benefit of PCT/JP2017/015662 filed in Japan on Apr. 19, 2017, the entire contents of which are incorporated herein by this reference.
- The present invention relates to an image pickup module including a stacked element, a wiring board, and a signal cable, a fabrication method for the image pickup module including the stacked element, the wiring board, and the signal cable, and an endoscope including the image pickup module that includes the stacked element, the wiring board, and the signal cable.
- An image pickup signal outputted by an image pickup device disposed at a distal end portion of an endoscope is subjected to primary processing by an electronic part mounted to a wiring board adjacent to the image pickup device.
- Japanese Patent Application Laid-Open Publication No. 2005-334509 discloses an endoscope configured to transmit an image pickup signal on which primary processing is performed by an electronic part mounted to a wiring board to which a lead of an image pickup device is bonded by soldering via a signal cable bonded to the wiring board.
- To accommodate a plurality of semiconductor elements in a small space and also to reduce a parasitic capacitance caused by wiring, Japanese Patent Application Laid-Open Publication No. 2013-30593 discloses a stacked element in which the plurality of semiconductor elements are stacked on one another, and penetration wirings of adjacent and facing semiconductor elements are bonded to one another. When the stacked element is used, downsizing and advanced functions of an image pickup module can be realized as compared with an imaging module in which an electronic part is mounted to a wiring board.
- It is not easy to bond the signal cable to an external electrode of the stacked element. For this reason, the signal cable is connected to the external electrode of the stacked element via the wiring board.
- An image pickup module according to an embodiment includes a stacked element including a light receiving surface, a rear surface on a reverse side of the light receiving surface, a plurality of semiconductor elements including an image pickup device which are stacked and bonded to one another by a plurality of element bonding sections, and an external electrode disposed on the rear surface, a first wiring board including a first main surface, a second main surface on a reverse side of the first main surface, a front electrode that is connected to the external electrode of the stacked element by an interconnecting bonding section and disposed on the first main surface, and a first electrode that is electrically connected to the front electrode and disposed on the first main surface or the second main surface, and a first signal cable connected to the first electrode of the first wiring board by a cable bonding section, in which the external electrode of the stacked element is disposed only in a second region out of a first region and the second region which are obtained by dividing the rear surface into two regions, the first wiring board is flexible and includes a bent section in a space defined by extending the first region in an optical axis direction, and a length of the first wiring board from the interconnecting bonding section on the first main surface to the cable bonding section is longer than a length of the stacked element from the interconnecting bonding section on the rear surface to an end side in the first region.
- A fabrication method for an image pickup module according to an embodiment includes fabricating a stacked element including a light receiving surface, a rear surface on a reverse side of the light receiving surface, a plurality of semiconductor elements including an image pickup device which are stacked and bonded to one another by a plurality of element bonding sections, and an external electrode disposed only in a second region out of a first region and the second region which are obtained by dividing the rear surface into two regions, connecting a first signal cable to a first electrode of a first wiring board having flexibility by a cable bonding section, the first wiring board including a first main surface, a second main surface on a reverse side of the first main surface, a front electrode disposed on the first main surface, and the first electrode that is electrically connected to the front electrode and disposed on the first main surface or the second main surface, connecting the external electrode of the stacked element and the front electrode of the first wiring board to each other by an interconnecting bonding section, and bending the first wiring board to establish a state in which the first wiring board is accommodated in a space defined by extending the first region in an optical axis direction, in which a length of the first wiring board from the interconnecting bonding section on the first main surface to the cable bonding section is longer than a length of the stacked element from the interconnecting bonding section on the rear surface to an end side in the first region.
- An endoscope according to an embodiment includes an image pickup module, the image pickup module including a stacked element including a light receiving surface, a rear surface on a reverse side of the light receiving surface, a plurality of semiconductor elements including an image pickup device which are stacked and bonded to one another by a plurality of element bonding sections, and an external electrode disposed on the rear surface, a first wiring board including a first main surface, a second main surface on a reverse side of the first main surface, a front electrode that is connected to the external electrode of the stacked element by an interconnecting bonding section and disposed on the first main surface, and a first electrode that is electrically connected to the front electrode and disposed on the first main surface or the second main surface, and a first signal cable connected to the first electrode of the first wiring board by a cable bonding section, in which the external electrode of the stacked element is disposed only in a second region out of a first region and the second region which are obtained by dividing the rear surface into two regions, the first wiring board is flexible and includes a bent section in a space defined by extending the first region in an optical axis direction, and a length of the first wiring board from the interconnecting bonding section on the first main surface to the cable bonding section is longer than a length of the stacked element from the interconnecting bonding section on the rear surface to an end side in the first region.
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FIG. 1 is an exploded view of an image pickup module according to a first embodiment; -
FIG. 2 is a cross sectional view of the image pickup module according to the first embodiment; -
FIG. 3 is a rear view of a stacked element of the image pickup module according to the first embodiment; -
FIG. 4 is a flowchart of a fabrication method for the image pickup module according to the first embodiment; -
FIG. 5 is a cross sectional view for describing the fabrication method for the image pickup module according to the first embodiment; -
FIG. 6 is a cross sectional view for describing the fabrication method for the image pickup module according to the first embodiment; -
FIG. 7 is a cross sectional view of the image pickup module according to a first modification of the first embodiment; -
FIG. 8 is a cross sectional view of the image pickup module according to a second modification of the first embodiment; and -
FIG. 9 is a perspective view of an endoscope system including an endoscope according to a second embodiment. - An
image pickup module 1 according to an embodiment is disposed at adistal end portion 90A of an endoscope 9 (seeFIG. 9 ). - As illustrated in
FIG. 1 andFIG. 2 , theimage pickup module 1 includes a semiconductor stacked element (hereinafter, referred to as a “stacked element”) 10, afirst wiring board 30, and afirst signal cable 40. - Note that in the following descriptions, drawings based on respective embodiments are schematic drawings and a relationship between a thickness and a width of each of sections, a thickness ratio, a relative angle, and the like of each of the sections are different from actual configurations, and a part where a mutual dimensional relationship or ratio is different between mutual drawings may be included in some cases. Illustration of part of components and assignment of reference signs may be omitted in some cases. An object direction is referred to as a forward direction.
- The stacked
element 10 includes a light receiving surface 10SA, a rear surface 10SB on a reverse side of the light receiving surface 10SA, and four side surfaces 10SS. - A
cover glass 12 is joined by anadhesive layer 13 to a furthest forward surface of the stackedelement 10 in which animage pickup device 11 and a plurality ofsemiconductor elements 21 to 24 are stacked on one another. Note that theimage pickup device 11 is also a semiconductor element. In other words, thestacked element 10 is a stacked body of a plurality ofsemiconductor elements image pickup device 11. Thecover glass 12 is not an essential component of theimage pickup module 1. On the contrary, as will be described below, an image pickup optical unit 50 (seeFIG. 8 ) constituted by a plurality of optical elements may be disposed in front of the stackedelement 10. - The
image pickup device 11 includeslight receiving units 11A constituted by CCD or CMOS image pickup units, and thelight receiving units 11A are connected topenetration wirings 11H. Theimage pickup device 11 may be one of a front-side illumination type image sensor and a back-side illumination type image sensor. - The
image pickup device 11 and the plurality ofsemiconductor elements 21 to 24 constitute thestacked element 10 when adjacent semiconductor elements are stacked on one another in a state in which sealingresin 25 is sandwiched between the adjacent semiconductor elements. - The
semiconductor elements 21 to 24 perform primary processing on an image pickup signal outputted by theimage pickup device 11 and perform processing a control signal for controlling theimage pickup device 11. For example, thesemiconductor elements 21 to 24 include an analog-to-digital conversion circuit, a memory, a transmission output circuit, a filter circuit, a thin film capacitor, a thin film resistance, and a thin film inductor. The number of elements included in the stackedelement 10 is, for example, 3 or higher and 10 or lower inclusive of theimage pickup device 11. - The
image pickup device 11 and the plurality ofsemiconductor elements 21 to 24 respectively includepenetration wirings 11H and 21H to 24H and are electrically connected to one another by a plurality of element bonding sections B1. - The element bonding section B1 is, for example, a soldering bonding section composed of first soldering a fusing point of which is MP1. The first soldering is a soldering bump based on an electro-plating method or a soldering paste film based on printing or the like.
- A plurality of
external electrodes 20P are disposed on the rear surface 10SB (rear surface of thesemiconductor element 24 stacked in a furthest rearward section) of the stackedelement 10. As illustrated inFIG. 3 , theexternal electrode 20P and thepenetration wiring 24H (element bonding section B1) of thesemiconductor element 24 are connected to each other via anelement wiring pattern 21L disposed on the rear surface 10SB. Theexternal electrode 20P is a convex electrode constituted by a barrier Ni layer and an Au layer disposed on theelement wiring pattern 21L made of Cu. - An insulating
layer 29 functioning as a cover layer is disposed on the rear surface 10SB. Theelement wiring pattern 21L exposed from a bottom surface of an opening of theinsulating layer 29 may be theexternal electrode 20P. - The
external electrode 20P is electrically connected to afront electrode 31 of thefirst wiring board 30 by an interconnecting bonding section B3. An alignment mark for alignment with thefirst wiring board 30 may be formed on the rear surface 10SB of the stackedelement 10. - The interconnecting bonding section B3 is, for example, an ultrasound bonding section. In other words, the interconnecting bonding section B3 is an interface between the
external electrode 20P and thefront electrode 31. The interconnecting bonding section B3 may also be a thermal ultrasound bonding section where heat is applied together with ultrasound application. - As illustrated in
FIG. 3 , with regard to theimage pickup module 1, all of the plurality of element bonding sections B1 are disposed only inside a first space S11 defined by extending a first region 10SB1 in an optical axis direction out of the first region 10SB1 and a second region 10SB2 which are obtained by dividing the rear surface 10SB into two regions by a parting line L10, and all of the plurality ofexternal electrodes 20P are disposed only in the second region 10SB2. - In other words, in
FIG. 3 , the plurality of element bonding sections B1 are disposed in columns only in a bottom side of thesemiconductor elements external electrodes 20P are disposed in columns only in a top side opposite to the disposal locations of the element bonding sections B1 across the parting line L10. The element bonding sections B1 and theexternal electrodes 20P are disposed in separate locations. - The
first wiring board 30 includes a first main surface 30SA and a second main surface 30SB on a reverse side of the first main surface 30SA. On the first main surface 30SA of thefirst wiring board 30, thefront electrode 31 is disposed in a front section, and afirst electrode 32 connected to thefront electrode 31 via an interconnecting wiring pattern (not illustrated) is disposed in a rear section. Note that thefirst electrode 32 may be disposed on the second main surface 30SB. In other words, it is sufficient that thefirst electrode 32 is disposed on the first main surface 30SA or the second main surface 30SB. An electronic part such as a chip capacitor may be mounted to thefirst wiring board 30. Thefirst wiring board 30 is an inexpensive one-sided wiring board, but a double-sided wiring board or a multilayer wiring board may also be used. - The
first wiring board 30 is a flexible wiring board where polyimide or the like is used as a base substance, in which the front section where thefront electrode 31 is disposed is arranged in parallel with the rear surface 10SB of the stackedelement 10, but the rear section where thefirst electrode 32 is disposed is arranged substantially in parallel with the optical axis O by abent section 30V that is bent in a state of being spaced apart with respect to an optical axis O. In other words, a flexion angle of thebent section 30V is approximately 90 degrees. - The
first electrode 32 of thefirst wiring board 30 is electrically connected to thefirst signal cable 40 by a cable bonding section B2. The cable bonding section B2 is a soldering bonding section composed of second soldering. - The
first signal cable 40 is a shielding cable includingcore wires 41 and shieldingwires 42. The plurality ofcore wires 41 are respectively bonded to thefirst electrodes 32, and the plurality of shieldingwires 42 are bonded to athird electrode 33 functioning as a single common grounding potential electrode, for example. - In the
image pickup module 1, thefirst signal cable 40 is not directly bonded to the stackedelement 10. In other words, thefirst signal cable 40 is bonded to thefirst wiring board 30, and thefirst wiring board 30 is bonded to the stackedelement 10. In other words, thefirst wiring board 30 is a relay board. In theimage pickup module 1, even when the stackedelement 10 having a small area of the rear surface 10SB is used, restrictions based on a number and an external diameter of thefirst signal cables 40 and connection difficulty are alleviated. - In the
stacked element 10, theexternal electrode 20P of the interconnecting bonding section B3 is disposed in a location away from the element bonding section B1. For this reason, load, vibration, and heat applied when ultrasound bonding of thefront electrode 31 to theexternal electrode 20P is performed are not directly transmitted to the element bonding section B1. For this reason, theimage pickup module 1 has high reliability since there is no danger of damaging thestacked element 10 when the ultrasound bonding is performed. - Note that even when the element bonding section B1 is, for example, a hybrid bonding section in which an insulating film and a conductive film formed on a same surface are mutually directly bonded to each other, which is not a soldering bonding section, since load and vibration applied when ultrasound bonding of the interconnecting bonding section B3 is performed are not directly transmitted to the element bonding section B1, there is no danger of damaging the
stacked element 10. - The
bent section 30V of thefirst wiring board 30 exists inside the first space S11 in a space S10 defined by extending the light receiving surface 10SA (rear surface 10SB) in the optical axis direction. In other words, thebent section 30V exists in a location away from the optical axis O. - When the stacked element and the signal cable are connected to each other while the wiring board is sandwiched, a length of the image pickup module in the optical axis direction is lengthened. In the endoscope including the image pickup module at the rigid distal end portion, a length of the distal end portion is lengthened.
- In contrast, the length of the
image pickup module 1 in the optical axis direction is short. In the endoscope including theimage pickup module 1 at the rigid distal end portion, the length of the distal end portion is short. - As illustrated in
FIG. 2 andFIG. 3 , a length d1 of thefirst wiring board 30 from the interconnecting bonding section B3 to the cable bonding section B2 is longer than a length d2 of the stackedelement 10 from the interconnecting bonding section B3 on the rear surface 10SB to an end side (outer side) 24SS in the first region 10SB1. In other words, a length d11 of thefirst wiring board 30 from the optical axis O on the first main surface 30SA to thefirst electrode 32 is longer than a length d12 of the stackedelement 10 from the optical axis O on the rear surface 10SB to the end side 24SS in the first region 10SB1. - As will be described below, in the
image pickup module 1, when thefront electrode 31 of thefirst wiring board 30 to which thefirst signal cable 40 is bonded is bonded to theexternal electrode 20P of the stackedelement 10, thefirst wiring board 30 does not need to be bent. For this reason, it is easy to certainly bond thefront electrode 31 and theexternal electrode 20P to each other in theimage pickup module 1. - In the
image pickup module 1, dimensions (external size) of theimage pickup device 11 orthogonal to the optical axis O are 1 mm square or smaller, for example, 600 μm×600 μm. External sizes of thefirst wiring board 30 and the stackedelement 10 are designed to be smaller than or equal to the external size of theimage pickup device 11. In other words, thefirst wiring board 30 is accommodated inside the space S10 defined by extending the light receiving surface 10SA in the optical axis direction. Theimage pickup module 1 is an ultra-compact image pickup module specialized for an endoscope having a small diameter. - A fabrication method for the image pickup module will be simply described along a flowchart of
FIG. 4 . - The stacked
element 10 is fabricated by a so-called wafer level method. In other words, first, an image pickup device wafer including theimage pickup device 11 and a plurality of semiconductor wafers (not illustrated) respectively including thesemiconductor elements 21 to 24 are fabricated. - For example, in the image pickup device wafer, the plurality of
light receiving units 11A are disposed on a silicon wafer and the like by using a related-art semiconductor fabrication technology. A peripheral circuit configured to perform primary processing on output signals of thelight receiving units 11A or perform processing on drive control signals may be formed on the image pickup device wafer. A cover glass wafer that protects thelight receiving units 11A is preferably joined to the image pickup device wafer from the rear surface before thepenetration wirings 11H are formed. - The image pickup device wafer in which the cover glass wafer is joined by the
adhesive layer 13 and the plurality of semiconductor wafers respectively including thesemiconductor elements 21 to 24 are stacked on one another, and thermal processing is performed at a first temperature T1 higher than or equal to the fusing point MP1 of the first soldering in the element bonding section B1 to fabricate a stacked wafer in which thesemiconductor elements 21 to 24 are electrically connected to one another. The first temperature T1 in the first bonding step is, for example, from above 200° C. to below 250° C. which is below an allowable temperature limit of thesemiconductor elements 21 to 24. - The sealing
resin 25 may be injected from a side surface of the stacked wafer after the bonding or may be disposed at the time of the stacking. - The stacked wafer is cut to establish a state in which four side of the substantially rectangular
light receiving unit 11A of theimage pickup device 11 are respectively in parallel with four sides of a rectangular cross section orthogonal to the optical axis O of the stacked element into the rectangular solidstacked element 10 in pieces. The four side surfaces 10SS of the stackedelement 10 fabricated by cutting the stacked wafer are cut surfaces. - Note that after the cutting into the stacked
element 10 is performed, corner sections in parallel with the optical axis O may be chamfered to make cross sections in a direction orthogonal to the optical axis hexagonal, or the corner sections may be curved. - In other words, the stacked
element 10 fabricated by the wafer level method is a rectangular solid but may be a substantially rectangular solid in which the corner sections are chamfered or curved. - Note that after a plurality of element wafers are cut into element chips, the first bonding step for bonding the plurality of element chips to one another may be performed to fabricate the stacked
element 10. - The
first wiring board 30 where thefront electrode 31 and thefirst electrode 32 connected to thefront electrode 31 are disposed on the first main surface 30SA is fabricated. - The
first signal cable 40 is electrically connected to thefirst electrode 32 of thefirst wiring board 30 by the cable bonding section B2 composed of the second soldering. A second temperature T2 in the second bonding step is a higher temperature than a fusing point MP2 of the second soldering. For example, in a case where the fusing point MP2 is from not less than 140° C. to not more than 190° C., the second temperature T2 is from above 150° C. to below 200° C. - As illustrated in
FIG. 5 , thefront electrode 31 of thefirst wiring board 30 is electrically connected to theexternal electrode 20P of the stackedelement 10 by the interconnecting bonding section B3. The interconnecting bonding section B3 is a bonding section to which a third temperature T3 is applied, for example, an ultrasound bonding section or a thermal ultrasound bonding section. - In the
image pickup module 1, the length d1 of thefirst wiring board 30 from the interconnecting bonding section B3 to the cable bonding section B2 is longer than the length d2 of the stackedelement 10 from the interconnecting bonding section B3 on the rear surface 10SB to the end side 24SS in the first region 10SB1. - For this reason, it is possible to easily perform alignment and bonding of the
first wiring board 30 to which thefirst signal cable 40 is bonded while thefirst wiring board 30 is held in a flat state without being bent. In other words, since the cable bonding section B2 does not interfere with (is not in contact with) the rear surface 10SB of the stackedelement 10, thefirst electrode 32 of thefirst wiring board 30 and theexternal electrode 20P of the stackedelement 10 can be kept horizontal, and a connection defect of the interconnecting bonding section B3 can be prevented. - In the
image pickup module 1 including the plurality of bonding sections, a processing temperature in the bonding processing to be performed afterward is set to be a lower temperature than a processing temperature in the previously performed bonding processing. In other words, the third temperature T3 in the third bonding step is lower than the second temperature T2 in the second bonding step, and furthermore, the second temperature T2 is lower than the first temperature T1 in the first bonding step. - As illustrated in
FIG. 6 , thefirst wiring board 30 is bent in thebent section 30V between thefront electrode 31 and thefirst electrode 32. An angle θ of thebent section 30V is approximately 90 degrees, and a rear section where thefirst electrode 32 is arranged is arranged substantially in parallel with the optical axis O. - For this reason, the
first signal cable 40 can be arranged in parallel with respect to the optical axis O without bending. Since there is no danger of application of stress caused by bending work of thefirst signal cable 40, the cable bonding section B2 has high reliability. - The
first wiring board 30 is bent to establish a state in which thebent section 30V is located inside the first space S11 defined by extending the first region 10SB1 in the direction of the optical axis O. - In contrast, in a case where the
bent section 30V is located in a second space S12 defined by extending the second region 10SB2 in the direction of the optical axis O, the length in the optical axis direction is lengthened, and also when thefirst wiring board 30 is bent, there is a danger of applying large stress to the interconnecting bonding section B3. - The
image pickup module 1 in which thebent section 30V is located inside the first space S11 is short and small, and reliability of the interconnecting bonding section B3 is high. - As described above, in accordance with the fabrication method for the image pickup module according to the present embodiment, it is possible to obtain the small-sized, particularly, short and small image pickup module including the stacked
element 10 and thefirst wiring board 30 and also having high performance and high reliability. - Since
image pickup modules image pickup module 1 and have same advantages, components having same functions are assigned with same reference signs, and descriptions of the above-mentioned components are omitted. - As illustrated in
FIG. 7 , afirst wiring board 30A of theimage pickup module 1A according to the present modification is bent such that thebent section 30V has a shape having an angle at over 90 degrees. - Since the
first signal cable 40 is bent, and a rear section of thefirst signal cable 40 extends in the direction parallel with the optical axis O, a distal end portion of thefirst signal cable 40 is accommodated inside the space S10 defined by extending the stacked element 10 (light receiving surface 10SA) in the optical axis direction. - In other words, in a case where the
first signal cable 40 is easily bent, a bending angle of thebent section 30V is not limited to approximately 90 degrees. However, when stress application to the cable bonding section B2 is taken into account, the bending angle is preferably approximately 90 degrees like theimage pickup module 1. - As illustrated in
FIG. 8 , afirst wiring board 30B of theimage pickup module 1B according to the present modification is a double-sided wiring board including asecond electrode 34 connected to thefront electrode 31 at a rear portion of the second main surface 30SB. Theimage pickup module 1B further includes asecond signal cable 41 bonded to thesecond electrode 34. - An external diameter of the
second signal cable 41 is larger than the external diameter of thefirst signal cable 40. Thesecond signal cable 41 is bonded to the second main surface 30SB on an optical axis side with respect to the first main surface 30SA to which thefirst signal cable 40 is bonded. For this reason, the external dimensions of theimage pickup module 1B in the direction orthogonal to the optical axis are not increased by the thicksecond signal cable 41. - The
image pickup module 1B further includes the image pickupoptical unit 50 configured to focus light incident from an incidence surface 50SA. The image pickupoptical unit 50 including a plurality ofoptical members 51 to 55 is disposed in front of the stackedelement 10. Theoptical members optical member 52 is a filter, theoptical member 53 is an optical aperture, and theoptical member 55 is a spacer. A number, an arrangement, and the like of the optical members are set in accordance with a specification of the image pickup optical unit. - However, to efficiently fabricate the ultra-compact image pickup module, the image pickup optical unit is preferably fabricated by cutting a stacked optical wafer in which a plurality of optical wafers respectively including a plurality of optical members are stacked on one another as in the stacked element. A side surface of the image pickup optical unit fabricated by the cutting of the stacked optical wafer is a cut surface.
- An external size (external diameter) of the image pickup
optical unit 50 in the direction orthogonal to the optical axis is larger than an external size (external diameter) of the stackedelement 10 in the direction orthogonal to the optical axis. In theimage pickup module 1B, distal end portions of thefirst signal cable 40 and thesecond signal cable 41 are arranged in a space S50 defined by extending the incidence surface 50SA in the optical axis direction. - In other words, when the thick
second signal cable 41 is bonded to thefirst electrode 32 on the first main surface 30SA on an outer side, even in a case where the distal end portion of thesecond signal cable 41 is not accommodated in the space S50, and the external size of the image pickup module is increased, it is possible to prevent increase in the external size of the image pickup module when thesecond signal cable 41 is bonded to thesecond electrode 34 on the second main surface 30SB on an inner side. - As illustrated in
FIG. 9 , anendoscope system 8 including theendoscope 9 according to the present embodiment includes theendoscope 9, aprocessor 80, alight source device 81, and amonitor 82. Theendoscope 9 includes aninsertion section 90, anoperation section 91, and auniversal code 92. Theendoscope 9 outputs an image signal when theinsertion section 90 is inserted into a body cavity of a subject and shoots an image of an inside of the subject. - The
insertion section 90 is constituted by thedistal end portion 90A where theimage pickup module image pickup module 1 or the like) is disposed, a freelybendable bending portion 90B communicatively disposed on a proximal end side of thedistal end portion 90A, and aflexible portion 90C communicatively disposed on a proximal end side of the bendingportion 90B. The bendingportion 90B bends by an operation of theoperation section 91. Note that theendoscope 9 may be a rigid endoscope, and use of theendoscope 9 may be medical use or industrial use. - The
operation section 91 where various types of buttons for operating theendoscope 9 are provided is disposed on a proximal end side of theinsertion section 90 of theendoscope 9. - The
light source device 81 includes a white LED, for example. Illumination light outputted by thelight source device 81 is guided to thedistal end portion 90A via a light guide (not illustrated) inserted through theuniversal code 92 and theinsertion section 90 to illuminate the object. - The
endoscope 9 includes theinsertion section 90, theoperation section 91, and theuniversal code 92, an image pickup signal outputted by theimage pickup module 1 or the like disposed at thedistal end portion 90A of theinsertion section 90 is transmitted by thefirst signal cable 40 inserted through theinsertion section 90. - Since the external size of the
image pickup module 1 in the direction orthogonal to the optical axis is small, thedistal end portion 90A of theinsertion section 90 has a narrow diameter in theendoscope 9. Since the length of theimage pickup module 1 in the optical axis direction is short, thedistal end portion 90A is short and small in theendoscope 9. For this reason, theendoscope 9 is less invasive. Since theimage pickup module 1 performs the primary processing on the image pickup signal outputted by the image pickup device by the stackedelement 10 arranged immediately proximal to the image pickup device, theendoscope 9 displays a high quality image. Since reliability of theimage pickup module 1 is high, reliability of theendoscope 9 is high. - The present invention is not limited to the above-mentioned embodiments and the like, and various modifications, alterations, and the like can be made in a range without changing the gist of the present invention.
Claims (13)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/015662 WO2018193531A1 (en) | 2017-04-19 | 2017-04-19 | Endoscope, imaging module, and imaging module production method |
WOPCT/JP2017/015662 | 2017-04-19 | ||
JPPCT/JP2017/015662 | 2017-04-19 | ||
PCT/JP2018/015774 WO2018194039A1 (en) | 2017-04-19 | 2018-04-16 | Imaging module, method for producing imaging module, and endoscope |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2018/015774 Continuation WO2018194039A1 (en) | 2017-04-19 | 2018-04-16 | Imaging module, method for producing imaging module, and endoscope |
Publications (3)
Publication Number | Publication Date |
---|---|
US20200049972A1 US20200049972A1 (en) | 2020-02-13 |
US11000184B2 US11000184B2 (en) | 2021-05-11 |
US20210141210A9 true US20210141210A9 (en) | 2021-05-13 |
Family
ID=63855781
Family Applications (2)
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US16/656,648 Abandoned US20200046210A1 (en) | 2017-04-19 | 2019-10-18 | Endoscope, image pickup module and manufacturing method for image pickup module |
US16/656,788 Active 2038-07-16 US11000184B2 (en) | 2017-04-19 | 2019-10-18 | Image pickup module, fabrication method for image pickup module, and endoscope |
Family Applications Before (1)
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US16/656,648 Abandoned US20200046210A1 (en) | 2017-04-19 | 2019-10-18 | Endoscope, image pickup module and manufacturing method for image pickup module |
Country Status (2)
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US (2) | US20200046210A1 (en) |
WO (2) | WO2018193531A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2019138442A1 (en) | 2018-01-09 | 2019-07-18 | オリンパス株式会社 | Imaging device, endoscope, and method for manufacturing imaging device |
WO2019193911A1 (en) * | 2018-04-03 | 2019-10-10 | オリンパス株式会社 | Imaging unit and endoscope |
CN110164896B (en) * | 2019-06-05 | 2021-06-25 | 芯盟科技有限公司 | Endoscope probe and manufacturing method |
WO2021152658A1 (en) * | 2020-01-27 | 2021-08-05 | オリンパス株式会社 | Imaging device and endoscope |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5030360B2 (en) * | 2002-12-25 | 2012-09-19 | オリンパス株式会社 | Method for manufacturing solid-state imaging device |
US7828736B2 (en) * | 2004-01-27 | 2010-11-09 | Fujinon Corporation | Electronic scan type ultrasound diagnostic instrument |
JP4589659B2 (en) | 2004-05-31 | 2010-12-01 | Hoya株式会社 | Method for assembling the tip of the electronic endoscope |
JP2009082503A (en) | 2007-09-28 | 2009-04-23 | Fujifilm Corp | Imaging device and endoscope equipped with the same |
JP5701550B2 (en) * | 2010-09-17 | 2015-04-15 | オリンパス株式会社 | Imaging apparatus and manufacturing method of imaging apparatus |
US8698887B2 (en) | 2010-04-07 | 2014-04-15 | Olympus Corporation | Image pickup apparatus, endoscope and manufacturing method for image pickup apparatus |
US10426320B2 (en) * | 2010-04-28 | 2019-10-01 | Xiaolong OuYang | Single use medical devices |
US9649014B2 (en) * | 2010-04-28 | 2017-05-16 | Xiaolong OuYang | Single use medical devices |
JP5500007B2 (en) * | 2010-09-03 | 2014-05-21 | ソニー株式会社 | Solid-state imaging device and camera system |
JP2013030593A (en) | 2011-07-28 | 2013-02-07 | J Devices:Kk | Semiconductor devices, semiconductor module structure formed by vertically laminated semiconductor devices, and manufacturing method of semiconductor module structure |
CH705951B1 (en) | 2011-12-23 | 2017-12-15 | Awaiba Consultadoria Desenvolvimento E Comércio De Componentes Microelectrónicos Unipessoal Lda | Optical sensor assembly and method of making and using same. |
CN104105440B (en) * | 2012-10-12 | 2016-06-22 | 奥林巴斯株式会社 | Endoscope |
JP6021618B2 (en) * | 2012-12-05 | 2016-11-09 | オリンパス株式会社 | Imaging apparatus, endoscope, and manufacturing method of imaging apparatus |
JP6000859B2 (en) * | 2013-01-11 | 2016-10-05 | オリンパス株式会社 | Semiconductor device manufacturing method, semiconductor device, and endoscope |
JP6071613B2 (en) * | 2013-02-14 | 2017-02-01 | オリンパス株式会社 | Semiconductor substrate, semiconductor device, imaging device, and imaging device |
JP6351228B2 (en) | 2013-09-30 | 2018-07-04 | オリンパス株式会社 | Imaging module and endoscope apparatus |
JP6348759B2 (en) * | 2014-04-16 | 2018-06-27 | オリンパス株式会社 | Semiconductor module, joining jig, and manufacturing method of semiconductor module |
JP5871217B2 (en) * | 2014-06-11 | 2016-03-01 | パナソニックIpマネジメント株式会社 | Endoscope |
JP6295983B2 (en) * | 2015-03-05 | 2018-03-20 | ソニー株式会社 | SEMICONDUCTOR DEVICE, ITS MANUFACTURING METHOD, AND ELECTRONIC DEVICE |
WO2016166890A1 (en) * | 2015-04-17 | 2016-10-20 | オリンパス株式会社 | Imaging device |
JP2017023234A (en) * | 2015-07-17 | 2017-02-02 | オリンパス株式会社 | Imaging unit and endoscope |
JPWO2017077620A1 (en) * | 2015-11-05 | 2018-09-20 | オリンパス株式会社 | Solid-state imaging device |
-
2017
- 2017-04-19 WO PCT/JP2017/015662 patent/WO2018193531A1/en active Application Filing
-
2018
- 2018-04-16 WO PCT/JP2018/015774 patent/WO2018194039A1/en active Application Filing
-
2019
- 2019-10-18 US US16/656,648 patent/US20200046210A1/en not_active Abandoned
- 2019-10-18 US US16/656,788 patent/US11000184B2/en active Active
Also Published As
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US11000184B2 (en) | 2021-05-11 |
WO2018193531A1 (en) | 2018-10-25 |
WO2018194039A1 (en) | 2018-10-25 |
US20200046210A1 (en) | 2020-02-13 |
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