US20060249701A1 - Methods and apparatus for sealing an opening of a processing chamber - Google Patents
Methods and apparatus for sealing an opening of a processing chamber Download PDFInfo
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- US20060249701A1 US20060249701A1 US11/480,615 US48061506A US2006249701A1 US 20060249701 A1 US20060249701 A1 US 20060249701A1 US 48061506 A US48061506 A US 48061506A US 2006249701 A1 US2006249701 A1 US 2006249701A1
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- sealing portion
- wall
- slit valve
- closure member
- bracing
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- 238000007789 sealing Methods 0.000 title claims abstract description 123
- 238000000034 method Methods 0.000 title description 43
- 238000012545 processing Methods 0.000 title description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 38
- 230000008602 contraction Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 description 52
- 230000008569 process Effects 0.000 description 30
- 239000004020 conductor Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000012546 transfer Methods 0.000 description 5
- 239000004696 Poly ether ether ketone Substances 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 229920002530 polyetherether ketone Polymers 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003466 anti-cipated effect Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000010261 cell growth Effects 0.000 description 1
- LEYJJTBJCFGAQN-UHFFFAOYSA-N chembl1985378 Chemical compound OC1=CC=C2C=CC=CC2=C1N=NC(C=C1)=CC=C1N=NC1=CC=C(S(O)(=O)=O)C=C1 LEYJJTBJCFGAQN-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000009699 differential effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013641 positive control Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Definitions
- the present invention relates generally to semiconductor device manufacturing and more particularly to methods and apparatus for sealing an opening of a processing chamber.
- a substrate processing chamber typically communicates with a substrate transfer chamber through a sealable opening that is both wide and relatively short to accommodate insertion and removal of horizontally-oriented substrates. It is known to use a slit valve to seal such an opening. For example, a sealing plate of the slit valve may be extended to seal the opening, and retracted to permit passage of substrates through the opening. Slit valve designs that avoid the problems of (1) particle generation through rubbing friction, and (2) uneven compression of resilient sealing elements, are preferred.
- a pressure differential may exist between the processing chamber and the transfer chamber such that high pressure within the processing chamber pushes outward against the sealing plate of the slit valve.
- the slit valve thereby is subjected to stresses and fatigue, the amounts of which increase with the pressure differential.
- Pressure differential effects are exacerbated when large substrates, such as those employed for flat panel displays, are involved (e.g., as a larger substrate requires a larger opening between the processing chamber and transfer chamber and a larger sealing plate to seal such an opening).
- Conventional slit valves typically are not designed to accommodate large pressure differentials. Accordingly, a need exists for improved methods and apparatus for sealing an opening of a processing chamber, particularly when large pressure differentials are being employed.
- a slit valve is provided that is adapted to seal an opening.
- the slit valve includes a valve housing having (1) a first wall; (2) a first opening formed in the first wall; (3) a second wall; and (4) a second opening formed in the second wall.
- the slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall.
- the slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall.
- a method of sealing an opening includes providing a valve housing having (1) a first wall; (2) a first opening formed in the first wall; (3) a second wall; and (4) a second opening formed in the second wall.
- the method further includes providing a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall.
- the method also includes (1) moving the sealing portion toward the second wall and into contact with the second wall; and (2) moving the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall.
- FIGS. 1A-1C illustrate an embodiment of an apparatus in accordance with the present invention comprising a chamber isolation valve.
- FIG. 2 is a perspective exploded assembly view of an inventive chamber isolation valve representing an exemplary embodiment of the chamber isolation valve of FIGS. 1A-1C .
- FIGS. 3A-3F are sectional assembly side views of the chamber isolation valve of FIG. 2 taken at various locations along a length of the chamber isolation valve.
- FIG. 4 is a flowchart that illustrates an exemplary process for sealing the first opening of the chamber isolation valve of FIG. 2 .
- FIG. 5 is a flowchart that illustrates an exemplary process for placing the closure member of the chamber isolation valve of FIG. 2 in the longitudinally retracted position of the closure member shown in FIG. 3F .
- FIG. 6 is a schematic representation of a slit valve system including the chamber isolation valve of FIG. 2 and a slit valve control module adapted to operate and/or coordinate functions of the chamber isolation valve.
- FIG. 7 is a schematic representation of a particular embodiment of the slit valve system of FIG. 6 .
- FIGS. 1A-1C illustrate an embodiment of an apparatus in accordance with the present invention comprising a chamber isolation valve 101 . Also, when considered in light of the discussion below, FIGS. 1A-1C illustrate an embodiment of an inventive method for using the chamber isolation valve 101 to seal an opening 102 (shown in phantom in FIG. 1A ) to an adjacent processing chamber P (shown in phantom in FIG. 1A ) so as to permit pressurization of the processing chamber P for processing of a substrate contained therein.
- the chamber isolation valve 101 may include a closure member 103 for sealing the processing chamber opening 102 .
- the chamber isolation valve 101 may comprise a valve housing 105 within which at least a portion of the closure member 103 may be movably disposed.
- the valve housing 105 of the chamber isolation valve 101 may be placed against the processing chamber, e.g. such that a seal (not shown) is formed between the valve housing 105 and the processing chamber around the processing chamber opening to be sealed.
- the closure member 103 may include a sealing portion 107 for sealing the processing chamber opening 102 .
- the sealing portion 107 may be utilized so as to seal the processing chamber opening 102 indirectly, e.g., by sealing an opening to the valve housing 105 that is aligned with the processing chamber opening 102 .
- the sealing portion 107 may be placed in direct contact (not shown) with the processing chamber P such that the sealing portion 107 seals around the processing chamber opening 102 .
- the closure member 103 may further include a bracing member 109 that is movable relative to the sealing portion 107 .
- the bracing member 109 may be adapted to extend away from and retract toward the sealing portion 107 .
- the bracing member 109 may be adapted to brace or buttress the sealing portion 107 , for example, when the sealing portion 107 is in position to seal the processing chamber opening 102 as described above.
- Such an arrangement is inherently efficient in that it may decrease and/or minimize the amount of force needed to counter a positive pressure within the processing chamber P, especially as compared to commonly-utilized cantilevered arrangements (not shown).
- the closure member 103 may also comprise an extended portion 111 extending from the sealing portion 107 .
- an end of the extended portion 111 that is spaced away from the sealing portion 107 may be adapted to be grasped and/or manipulated, e.g. by an actuator (see FIG. 2 ) disposed inside or outside the valve housing 105 , so as to enable the closure member 103 to be moved as a unit (e.g. by moving both the sealing portion 107 and the bracing member 109 together via the extended portion 111 ).
- the closure member 103 may be moved via the extended portion 111 toward and/or away from the processing chamber opening 102 (transversely between the respective configurations of the chamber isolation valve 101 shown in FIGS. 1B and 1C or longitudinally between the respective configurations of the chamber isolation valve 101 shown in FIGS. 1A and 1B ).
- the extended portion 111 of the closure member 103 is fixed in relation to the sealing portion 107 of the closure member 103 .
- the sealing portion 107 and the extended portion 111 may be of unitary construction as shown in FIG. 1A .
- the extended portion 111 may be fixedly coupled to the sealing portion 107 .
- the valve housing 105 may define an enclosure 113 , a first opening 115 to the enclosure 113 , and a second opening 117 to the enclosure 113 .
- the first opening 115 and the enclosure 113 are aligned along a common axis with the processing chamber opening 102 and are sized so as to permit passage of substrates through the valve housing 105 and into and out of the processing chamber P.
- the first opening 115 may be spaced apart from the processing chamber opening 102 and the second opening 117 may be disposed on the other side of the enclosure 113 , adjacent the processing chamber opening 102 and on the common axis.
- the second opening 117 may be placed in pneumatic communication with the processing chamber opening 102 such that the second opening 117 essentially comprises an extension of the processing chamber opening 102 .
- the valve housing 105 may further comprise a rear plate 119 within which the first opening 115 is formed.
- the rear plate 119 may be adapted, and appropriately located, so as to permit the bracing member 109 to contact the rear plate 119 and push against the rear plate 119 for bracing the sealing portion 107 of the closure member 103 during sealing (as described further below).
- the valve housing 105 may further comprise a front plate 121 within which the second opening 117 is formed.
- the front plate 121 may be adapted, and appropriately located, so as to permit the sealing portion 107 of the closure member 103 to contact the front plate 121 and seal around the second opening 117 .
- the sealing portion 107 may directly contact the processing chamber P to seal the opening 102 .
- the closure member 103 of the chamber isolation valve 101 is adapted to assume a retracted position relative to the first and second openings 115 , 117 wherein the closure member 103 is spaced away from (e.g., below) the first and second openings 115 , 117 .
- Such a configuration permits substrates to be passed through the valve housing 105 and into and out of the processing chamber P.
- the enclosure 113 of the valve housing 105 may enclose the sealing portion 107 of the closure member 103 while still permitting passage of substrates through the valve housing 105 . Also as shown in FIG. 1A , the enclosure 113 of the valve housing 105 may enclose the sealing portion 107 and the bracing member 109 with space to spare, e.g. so as to provide a first gap 123 between the bracing member 109 and the rear plate 119 , and a second gap 125 between the sealing portion 107 and the front plate 121 .
- the closure member 103 may be moved relative to the valve housing 105 so as to assume a deployed position relative to the first and second openings 115 , 117 as shown in FIG. 1B wherein the sealing portion 107 is disposed between the first and second openings 115 , 117 .
- the first and second gaps 123 , 125 are maintained so as to reduce and/or eliminate particle-generating friction and/or rubbing that might otherwise arise between the closure member 103 and the valve housing 105 . It will now be apparent that substrates (not shown) may no longer be passed through the valve housing 105 , since the closure member 103 blocks the path therethrough.
- the closure member 103 which in FIG. 1B is shown in a retracted position relative to the second opening 117 of the valve housing 105 , may be moved into a deployed position relative to the second opening 117 as shown in FIG. 1C .
- the sealing portion 107 of the closure member 103 is in contact with the front plate 121 , and may be caused to seal the second opening 117 of the valve housing 105 .
- the chamber isolation valve 101 may be adapted to generate a separation force that moves the bracing member 109 relative to the sealing portion 107 so as to cause the bracing member 109 to move away from the processing chamber opening 102 ( FIG. 1 ) and into contact with the rear plate 119 of the valve housing 105 .
- the bracing member 109 may be caused to contact a portion of the transfer chamber (not shown), or another structural member.
- the chamber isolation valve 101 may then generate a bracing force, also tending to urge the bracing member 109 away from the sealing portion 107 , so as to brace or buttress the sealing portion 107 of the closure member 103 against the front plate 121 of the valve housing 105 , or against the processing chamber P ( FIG. 1 ), as the case may be.
- a bracing force may be generated in any number of ways and at any number of locations relative to the closure member 103 .
- the bracing force may be both generated and applied directly between the bracing member 109 and the sealing portion 107 , e.g. by a pneumatic actuator (see FIG. 2 ) disposed or formed therebetween.
- the bracing member 109 does not seal the first opening 115 .
- FIG. 2 is a perspective exploded assembly view of an inventive chamber isolation valve 101 a representing an exemplary embodiment of the chamber isolation valve 101 of FIGS. 1A-1C .
- FIGS. 3A-3F are sectional assembly side views of the chamber isolation valve 101 a taken at various locations along a length of the chamber isolation valve 101 a and which describe structural and operational aspects of the chamber isolation valve 101 a . Structural and functional descriptions appearing above with reference to the chamber isolation valve 101 therefore also apply to the chamber isolation valve 101 a , with similar reference numerals being used to indicate corresponding aspects (e.g., of structure) in the figures.
- the valve housing 105 may comprise an upper portion 127 and a lower portion 129 that is coupled to the upper portion 127 .
- the upper portion 127 may include a resilient element 130 ( FIG. 3A ) so as to permit the rear plate 119 of the valve housing 105 to be sealed against an external corresponding structure, such as a valve interface portion of a transfer chamber (not shown).
- the lower portion 129 may include resilient element 131 ( FIG. 3A ) for sealing the lower portion 129 of the valve housing 105 against the upper portion 127 of the valve housing 105 .
- the lower portion 129 may further include a first and a second port 133 ( FIGS.
- the closure member 103 includes two extended portions 111 , each extended portion 111 being coupled to the sealing portion 107 , and the chamber isolation valve 101 a being configured such that each extended portion 111 extends through a port 133 . More or fewer extended portions 111 may be specified as necessary or as desired.
- the chamber isolation valve 101 a may comprise a deployment mechanism 134 for moving the closure member 103 , e.g. relative to the valve housing 105 and/or the processing chamber opening 102 ( FIG. 1A ).
- the deployment mechanism 134 may include one or more first actuators 135 ( FIGS. 2 and 3 A) for moving the closure member 103 between longitudinally retracted and longitudinally deployed positions of the closure member 103 , shown respectively in FIGS. 3F and 3D .
- the first actuator 135 may be one of many different types of suitable devices.
- a pneumatically-driven linear actuator such as is embodied by the first actuator 135 of FIGS. 2 and 3 A would be suitable, as would be a belt- or screw-driven actuator.
- the deployment mechanism 134 may further comprise one or more external bellows 137 ( FIG. 2 ) for protecting the enclosure 113 ( FIG. 3D ) of the valve housing 105 against intrusion of contaminants through the ports 133 .
- Each external bellows 137 corresponds to and is adapted to surround a separate extended portion 111 of the closure member 103 . Where more or fewer extended portions 111 exist, the number of external bellows 137 may increase or decrease accordingly.
- Each external bellows 137 may include a first mounting flange 139 mounted to the valve housing 105 around the port 133 through which the corresponding extended portion 111 extends.
- the deployment mechanism 134 may further include one or more second actuators 141 ( FIGS. 2 and 3 C) for moving the closure member 103 between transversely retracted and transversely deployed positions of the closure member 103 , shown respectively in FIGS. 3D and 3E .
- Each second actuator 141 may be mounted to a first support plate 143 which may in turn be movably mounted to the valve housing 105 via the first actuator 135 .
- Each second actuator 141 may be one of many different suitable devices.
- a pneumatically-driven linear actuator such as is embodied by the second actuator 141 of FIGS. 2 and 3 C, would be suitable, as would be a belt- or screw-driven actuator.
- the deployment mechanism 134 may be adapted to guide the first support plate 143 as the first actuator 135 moves the first support plate 143 longitudinally relative to the valve housing 105 .
- a first and a second support 149 may be affixed to and extend from the valve housing 105 , and the first support plate 143 may be slidably coupled to each support 149 , e.g., via a rail 151 preferably fixedly coupled to each support 149 , and a first and second pair of trucks 153 .
- Each pair of trucks 153 may be fixedly coupled to the first support plate 143 and movably coupled to a rail 151 so as to permit longitudinal movement of the first support plate 143 .
- the deployment mechanism 134 may further include one or more brackets 145 , each bracket 145 being secured to an end of a extended portion 111 that is spaced apart from the sealing portion 107 of the closure member 103 .
- the deployment mechanism 134 may also include a second support plate 147 , the second support plate 147 being movably mounted to the first support plate 143 (and/or to the valve housing 105 ) via the second actuator 141 .
- Each bracket 145 may be coupled to the second support plate 147 to provide a means by which the deployment mechanism 134 may manipulate and/or move the closure member 103 (e.g. longitudinally, or transversely, or a combination thereof).
- the deployment mechanism 134 may be adapted both to guide the second support plate 147 as the second actuator 141 moves the second support plate 147 transversely relative to the first support plate 143 and the valve housing 105 , and to isolate the transversely-operating second actuator 141 from the vertical force represented by the combined weight of the closure member 103 , the second support plate 147 and the brackets 145 (e.g. so as to facilitate smooth transverse translation of the closure member 103 relative to the valve housing 105 ). For example, as shown in FIGS.
- the deployment mechanism 134 may further comprise bearings 155 extending from sides of the first support plate 143 , and each bracket 145 may comprise a guide slot 157 adapted to accommodate a roller portion 159 of one of the bearings 155 .
- the bearings 155 and the first support plate 143 may be caused to bear substantially all of the weight of the closure member 103 , the brackets 145 and the second support plate 147 while still allowing that subassembly to smoothly translate via overturning (rolling) communication between the bearing roller portions 159 and-the bracket guide slots 157 .
- bracing member 109 may include a brace plate 161 that is similarly elongated.
- the brace plate 161 may comprise a first side 163 ( FIG. 3C ) that faces toward the sealing portion 107 , on which a plurality of mounting bosses 165 ( FIG. 3B ) may be provided.
- Each of the plurality of mounting bosses 165 may be adapted to extend into a respective one of a plurality of pockets 167 ( FIG. 2 , see also FIG. 3B ) formed within a non-sealing side 169 ( FIG. 2 ) of the sealing portion 107 .
- a respective one of an equivalent plurality of drive plates 171 may be disposed within each pocket 167 (see FIG. 3D ) and coupled, preferably fixedly, to the mounting boss 165 of the brace plate 161 extending therein.
- a subassembly may thereby be formed comprising the brace plate 161 as well as each drive plate 171 coupled to the brace plate 161 via the mounting bosses 165 .
- the closure member 103 may be adapted to move the bracing member 109 back and forth between the (transversely) retracted position shown in FIG. 3D and the deployed or extended position shown in FIG. 3E .
- an actuating device may be employed within the bracing member 109 and/or the sealing portion 107 of the closure member 103 (e.g., so as to only minimally enlarge the overall size of the closure member 103 ).
- the closure member 103 may comprise at least one bracing actuator 173 ( FIGS. 2 and 3 E) as described below with reference to FIGS. 2 and 3 B- 3 F.
- the closure member 103 may include a plurality of bracing actuators 173 (e.g., depending on the magnitude of bracing force that is required to be applied to the sealing portion 107 via the bracing member 109 and/or the room available on the non-sealing side 169 of the sealing portion 107 to form pockets 167 ).
- Each bracing actuator 173 may be built into, and/or integrated within the closure member 103 so as to be comprised of portions of some of the components of the closure member 103 already described above (e.g., a pocket 167 of the sealing portion 107 , and a drive plate 171 of the bracing member 109 ).
- each bracing actuator 173 may comprise a drive plate bellows 175 ( FIG. 3D ) that includes a mounting flange 177 coupled to the non-sealing side 169 of the sealing portion 107 (e.g., around a pocket 167 of the sealing portion 107 ), and an extensible wall portion 179 attached to the mounting flange 177 and extending into the pocket 167 , within which the extensible wall portion 179 is attached to a drive plate 171 .
- each bracing actuator 173 may comprise a pressure cell 181 comprising a pocket 167 of the sealing portion 107 (see also FIG. 3B ), a drive plate 171 of the bracing member 109 , the extensible wall portion 179 of the drive plate bellows 175 , and the mounting flange 177 ( FIG. 3D ) of the drive plate bellows 175 .
- the pressure cell 181 may be expanded via an external source of pressurized gas (not shown) to force the bracing member 109 against the rear plate 119 .
- FIG. 3E each bracing actuator 173 may comprise a pressure cell 181 comprising a pocket 167 of the sealing portion 107 (see also FIG. 3B ), a drive plate 171 of the bracing member 109 , the extensible wall portion 179 of the drive plate bellows 175 , and the mounting flange 177 ( FIG. 3D ) of the drive plate bellows 175 .
- the pressure cell 181 may be expanded via an external source
- 3E illustrates a configuration of the chamber isolation valve 101 a in which the sealing portion 107 of the closure member 103 is deployed against the front plate 121 of the valve housing 105 , the bracing member 109 of the closure member 103 is deployed against the rear plate 119 of the valve housing 105 , the extensible wall portion 179 of each drive plate bellows 175 is relatively compressed, and the volume of the pressure cell 181 is relatively large.
- FIG. 3D illustrates a configuration of the chamber isolation valve 101 a in which the bracing member 109 is retracted within a pocket 167 ( FIG. 3B ) of the sealing portion 107 , the extensible wall portion 179 of the drive plate bellows 175 is relatively extended, and the volume of the pressure cell 181 ( FIG. 3E ) is relatively small.
- each bracing actuator 173 may comprise one such pressure cell 181 and may actuate (e.g., move/position/urge the bracing member 109 ) via changes in the volume of the pressure cell 181 and/or in the pressure (e.g., air pressure or fluid pressure) within the pressure cell 181 .
- Each bracing actuator 173 may be energized pneumatically.
- each pocket 167 may be pneumatically coupled via a conduit 183 ( FIG. 3B ) that penetrates the walls of each of the pockets 167 .
- the pressure cell 181 of one bracing actuator 173 of the closure member 103 is subjected to increased air or fluid pressure for expansion, or to vacuum pressure for contraction as the case may be, the pressure cell 181 of each bracing actuator 173 will tend to be similarly energized.
- the collective force exerted by the bracing actuators 173 may move the bracing member 109 relative to (e.g., toward or away from) the sealing portion 107 , according to the pressure existing in the conduit 183 .
- the closure member 103 may be adapted to expose the conduit 183 to a source of vacuum pressure (not shown) for retracting the bracing member 109 within the sealing portion 107 , e.g., so as to prevent contact between the bracing member 109 and the valve housing 105 when the closure member 103 is in the longitudinally retracted position of FIG. 3F , or is being moved into or out of same.
- the sealing portion 107 of the closure member 103 may be similarly retracted from the front plate 121 ).
- the closure member 103 may also be adapted to expose the conduit 183 to a source of pressurized gas (not shown) for extending the bracing member 109 away from the sealing portion 107 and/or to cause the bracing member 109 , when fully extended, to push against the rear plate 119 of the valve housing 105 so as to brace the sealing portion 107 against the front plate 121 of the valve housing 105 as shown in FIG. 3E .
- a source of pressurized gas not shown
- brackets 145 can include a socket 185 ( FIG. 2 ) adapted to receive a pressure fitting (not shown), e.g., an end fitting of a pressure hose.
- the pressure fitting (not shown) may be adapted to mate with a pressure port 187 ( FIG. 3E ) formed within the extended portion 111 of the closure member 103 that is in communication with an extended conduit 189 ( FIG. 3C ) also formed within the extended portion 111 and leading to a sealing portion interface 191 ( FIG. 3C ) of the extended portion 111 .
- the sealing portion interface 191 may be made to seal against an extended portion interface 193 of the sealing portion 107 .
- a resilient element 195 may provide for a seal between the two interfaces.
- a feeder conduit 197 within the sealing portion 107 may lead from the extended portion interface 193 to the conduit 183 of the sealing portion 107 .
- Such an arrangement provides a convenient means for pneumatically actuating the bracing actuators 173 of the closure member 103 and for exercising positive control (e.g., applying either vacuum or pressurized gas as necessary) over the position of the bracing member 109 relative to the sealing portion 107 (e.g., at all times).
- Other configurations for applying vacuum or pressurized gas to the bracing actuators 173 also may be employed.
- each of the drive plate bellows 175 are compressed during expansion of the pressure cells 181 .
- Such an arrangement may subject the extensible wall portions 179 to less stress and fatigue than would be the case if the extensible wall portions 179 were expanded during pressure cell expansion, thus increasing the useful life of the drive plate bellows 175 .
- the opposite arrangement may be employed.
- each of the extended portions 111 of the closure member 103 may contact (see FIG. 3E ) an inner surface 154 ( FIG. 3D ) of the first mounting flange 139 of an external bellows 137 as the sealing portion 107 of the closure member 103 contacts the front plate 121 of the valve housing 105 .
- Such an arrangement may assist in providing a positive, self-aligning limit to the extent to which the closure member 103 moves toward the front plate 121 of the valve housing 105 (as described below).
- the position of the closure member 103 within the valve housing 105 when contact is established between the extended portion 111 and the first mounting flanges 139 may correspond to a desired initial degree of compression of a resilient sealing element (not shown) between the sealing portion 107 of the closure member 103 and the front plate 121 , such that any further compression that may be required may be provided by the bracing member 109 bracing the sealing portion 107 against the front plate 121 .
- the extended portions 111 may remain out of contact with the inner surface 154 of the bellows 137 when the sealing portion 107 of the closure member 103 contacts the front plate 121 .
- FIG. 4 is a flowchart that illustrates an exemplary process 400 for sealing the first opening 115 of the chamber isolation valve 101 a .
- the process 400 may begin at a step 401 .
- the process 400 either proceeds to a step 403 or a step 404 depending on the longitudinal position of the closure member 103 ( FIG. 2 ). If the closure member 103 is in the longitudinally retracted position illustrated in FIG. 3F , the process 400 proceeds to step 403 .
- the closure member 103 is moved from the longitudinally retracted position of FIG. 3F to the longitudinally deployed position of the closure member 103 illustrated by FIG. 3D .
- the first actuator 135 of the deployment mechanism 134 may be caused to elevate the closure member 103 from the longitudinally retracted position of FIG. 3F to the longitudinally deployed position of FIG. 3D .
- the deployment mechanism 134 maintains the second gap 125 ( FIG. 1A ) and one or more of the bracing actuators 173 maintains the first gap 123 ( FIG.
- the second actuators 141 of the deployment mechanism 134 are actuated to retain the closure member 103 in a transversely retracted position away from the front plate 121 of the valve housing 105 .
- the closure member 103 will be in the vertically deployed position of FIG. 3D . As such, the process 400 proceeds to a step 404 .
- the closure member 103 is transversely deployed, e.g., is moved from the transversely retracted position of the closure member 103 of FIG. 3D to the transversely deployed position of the closure member 103 illustrated in FIG. 3E .
- the second actuators 141 of the deployment mechanism 134 and/or one or more of the bracing actuators 173 ) may be caused to move the closure member 103 from the transversely retracted position of the closure member 103 of FIG. 3D to the transversely deployed position of FIG. 3E .
- the extended portions 111 may be transversely movable, and expansion of one or more of the bracing actuators 173 , spring biasing of the extended portions 111 or the closure member 103 or the like may move the sealing portion 107 toward the front plate 121 .
- the above transverse deployment of the closure member 103 results in the sealing portion 107 of the closure member 103 being moved into contact with the front plate 121 of the valve housing 105 .
- the above-described transverse deployment of the closure member 103 results in the extended portions 111 of the closure member 103 contacting corresponding inner surfaces 154 of the first mounting flanges 139 of the external bellows 137 .
- the bracing member 109 of the closure member 103 is transversely deployed, e.g., is moved to a transversely deployed position of the bracing member 109 illustrated in FIG. 3E .
- the bracing actuators 173 ( FIG. 2 ) of the closure member 103 may be caused to move the bracing member 109 away from a transversely retracted position of the bracing member 109 against and/or within the sealing portion 107 (e.g., as illustrated in FIG. 3D ), to the transversely deployed position of FIG. 3E .
- the step 405 begins only after the step 404 is complete. In other embodiments, the step 405 and the step 404 are performed simultaneously and/or both steps are begun before either is complete. In still further embodiments, the step 404 begins only after the step 405 has begun. Additionally, in one or more embodiments of the inventive method, before, during, and/or after the above-described transverse deployments of the closure member 103 and the bracing member 109 of the closure member 103 , the deployment mechanism 134 is employed to maintain the closure member 103 in the longitudinally deployed position of the closure member 103 ( FIG. 3E ). For example, the first actuator 135 may remain activated after elevating the closure member 103 (see step 402 ).
- the sealing portion 107 is braced against the front plate 121 to seal the first opening 115 formed therein.
- the pressure in the pressure cells 181 of each bracing actuator 173 may be increased from what may have been a relatively low pressure sufficient to move the bracing member 109 into place against the rear plate 119 (see the step 405 ) to a relatively high pressure commensurate with the anticipated magnitude of pressure forces to be exerted by the pressurized chamber P.
- a pressure used to expand the pressure cells 181 in the step 405 is high enough to resist the anticipated pressure forces, or if the pressure was increased gradually or step-wise during the step 405 to an adequately high pressure, that same pressure may be maintained for as long as bracing force is required.
- the process 400 ends at a step 407 .
- the process 400 may alternatively begin with one or more steps to ensure that the first and second gaps 123 , 125 between the closure member 103 and the valve housing 105 exist prior to the closure member 103 being longitudinally deployed (e.g., elevated) by the first actuator 135 of the deployment mechanism 134 .
- the bracing actuators 173 may be employed in a direction opposite the bracing direction, e.g., via the application of vacuum pressure, to ensure the bracing member 109 remains retracted against and/or within the sealing portion 107 (and away from the rear plate 119 of the valve housing 105 ) during longitudinal deployment of the closure member 103 .
- one or more of the second actuators 141 may be employed in a direction opposite the sealing direction, e.g., via the application of positive pressure (with movement in the sealing direction occurring, e.g., by the force of a biasing element, such as a coil spring (not shown) or by expansion of the pressure cells 181 ), to ensure the sealing portion 107 of the closure member 103 remains retracted away from the front plate 121 of the valve housing 105 during longitudinal deployment of the closure member 103 .
- a biasing element such as a coil spring (not shown) or by expansion of the pressure cells 181
- FIG. 5 is a flowchart that illustrates an exemplary process 500 for placing the closure member 103 of the chamber isolation valve 101 a in the longitudinally retracted position of the closure member 103 shown in FIG. 3F .
- the process 500 may begin at a step 501 .
- the process 500 either proceeds to a step 503 or a step 504 depending on the transverse position of the bracing member 109 ( FIG. 2 ). If the bracing member 109 is not in a transversely retracted position, the process 500 proceeds to the step 503 .
- the bracing member 109 is transversely retracted, e.g., moved to a transversely retracted position such as is shown in FIG. 3D .
- the bracing actuators 173 may be caused to move the bracing member 109 from a transversely deployed position of the bracing member 109 , such as is shown in FIG. 3E , to the transversely retracted position as shown in FIG. 3D .
- the process 500 either proceeds to the step 505 or a step 506 depending on the transverse position of the closure member 103 ( FIG. 2 ). If the closure member 103 is not in a transversely retracted position, the process 500 proceeds to step 505 .
- the closure member 103 is transversely retracted, e.g., moved to a transversely retracted position such as is shown in FIG. 3D .
- the second actuators 141 may be caused to move the closure member 103 from a transversely deployed position of the closure member 103 , such as is shown in FIG. 3E , to the transversely retracted position as shown in FIG. 3D .
- two or more of the steps 502 , 503 , 504 and 505 may occur simultaneously or in a different order. Additionally, the step 505 need not begin only after the step 503 is complete. Also, in one or more embodiments of the process 500 , before, during and after the retraction of either or both the bracing member 109 and the closure member 103 , the deployment mechanism 134 may be employed to actively retain the closure member 103 in the vertically deployed position of the closure member 103 ( FIG. 3E ). For example, the first actuator 135 of the deployment mechanism 134 may be continuously activated for this purpose.
- the closure member 103 is moved to the longitudinally retracted position of the closure member 103 as shown in FIG. 3F .
- the first actuator 135 of the deployment mechanism 134 may be caused to move the closure member 103 from the longitudinally deployed position as shown in FIG. 3D to the longitudinally retracted position shown in FIG. 3F .
- the deployment mechanism 134 and one or more of the bracing actuators 173 may maintain the first and second gaps 123 , 125 ( FIG.
- the second actuators 141 may be prevented from moving the closure member 103 transversely toward the front plate 121 of the valve housing 105 .
- the bracing actuators 173 may be prevented from moving the bracing member 109 transversely toward the rear plate 119 of the valve housing 105 .
- one or more of the bracing actuators 173 may be activated, e.g., via application of vacuum pressure, to maintain a retracted position of the bracing member 109 against/within the sealing portion 107 during longitudinal retraction of the closure member 103 .
- the chamber isolation valve 101 a is now configured to permit passage of substrates back and forth through the valve housing 105 of the chamber isolation valve 101 a , and the process 500 ends at a step 507 .
- additional steps may be taken to ensure the closure member 103 remains spaced apart from the valve housing 105 , even when retracted and not moving.
- one or more of the bracing actuators 173 and/or one or more of the second actuators 141 may be continuously activated to maintain the first and/or second gaps 123 , 125 ( FIG. 1A ).
- the first actuator 135 is adapted to actuate via the application of positive pressure during both longitudinal deployment and longitudinal retraction of the closure member 103 .
- the first actuator 135 may be adapted to actuate via positive pressure during longitudinal deployment with gravity being employed for vertical retraction.
- each bracing actuator 173 may be adapted to actuate via a spring default during transverse deployment of the closure member 103
- each second actuator 141 may be adapted to actuate via positive pressure during transverse retraction of the closure member 103 (e.g., for assurance of maintaining a transverse retraction of the closure member 103 during longitudinal movement of the closure member 103 ).
- each bracing actuator 173 may be adapted to actuate via positive pressure during transverse deployment of the bracing member 109 and via vacuum pressure (e.g., no spring default) during transverse retraction of the bracing member 109 (e.g., to avoid having to overcome the force of a spring default when deploying the bracing member 109 ).
- vacuum pressure e.g., no spring default
- Other configurations may be employed.
- FIG. 6 is a schematic representation of a slit valve system 600 including the chamber isolation valve 101 a of FIG. 2 and a slit valve control module 601 adapted to operate and/or coordinate functions of the chamber isolation valve 101 a .
- the slit valve control module 601 may be adapted to interact with the chamber isolation valve 101 a so as to perform the process 400 illustrated by the flow chart of FIG. 4 and/or the process 500 illustrated by the flow chart of FIG. 5 .
- the slit valve control module 601 may comprise an input/output module 603 adapted to generate and/or receive signals.
- the input/output module 603 may be adapted to:
- an indicator light e.g., a green L.E.D.
- an indicator light e.g., a red L.E.D.
- (10) receive an electrical signal along a fourth signal conductor 611 , e.g., so as to cause and/or permit the slit valve control module 601 to operate the chamber isolation valve 101 a so as to perform the process 400 described above with reference to FIG. 4 (e.g., seal the first opening 115 of the chamber isolation valve 101 a as illustrated in FIG. 3E );
- (11) receive an electrical signal along a fifth signal conductor 613 , e.g., so as to cause and/or permit the slit valve control module 601 to operate the chamber isolation valve 101 a so as to perform the process 500 described above with reference to FIG. 5 (e.g., place the closure member 103 in the longitudinally retracted position of the closure member 103 as illustrated in FIG. 3F );
- (14) perform the function of (7) above at least in part via the function of (13) above; and/or (15) detect the presence of depressed pressure (e.g., vacuum) in the brace actuation conduit 621 .
- depressed pressure e.g., vacuum
- the slit valve control module 601 may also be adapted to perform the following functions:
- FIG. 7 is a schematic representation of a particular embodiment 600 a of the slit valve system 600 of FIG. 6 comprising the chamber isolation valve 101 a of FIG. 2 and a particular embodiment 601 a of the slit valve control module 601 , wherein the slit valve control module 601 a is shown in more detail.
- the slit valve control module 601 a is adapted to perform the functions 1-41 as described above.
- the aspects/structure of the slit valve control module 601 a adapted to perform those functions will be introduced and explained in the general order of the functions.
- Functions 1-3 may be encompassed in a first position switch 629 , a first indicator light 631 , and the first signal conductor 605 .
- the first position switch 629 may be configured so as to be normally open, and may be installed within or adjacent the chamber isolation valve 101 a such that it is actuated or closed when the closure member 103 reaches the FIG. 3F longitudinally retracted position.
- the first indicator light 631 can be a signal to a human operator.
- the first signal conductor 605 can carry a signal to a remote controller (not shown). Other uses for the first indicator light 631 and/or the first signal conductor 605 are possible.
- Functions 4-6 may by similarly encompassed in a second position switch 635 , a second indicator light 637 , and the second signal conductor 607 .
- the second position switch 635 may be configured so as to be normally open, and may be installed within or adjacent the chamber isolation valve 101 a such that it is actuated or closed when the closure member 103 reaches the FIG. 3D longitudinally deployed position.
- the second indicator light 637 and the second signal conductor 607 may function similarly to the first indicator light 631 and the first signal conductor 605 .
- Function 7 may be encompassed in pressure switch 641 .
- the pressure switch 641 may be configured so as to be normally open, and may be pneumatically coupled to the brace actuation conduit 621 (e.g., via an orifice 643 adapted to slowly equalize pressure on either side of the orifice 643 ) so as to be actuated or closed when the brace actuation conduit 621 is at positive pressure compared to ambient pressure. Since positive pressure in the brace actuation conduit 621 leads to transverse deployment of the bracing member 109 via actuation of each bracing actuator 173 , and the orifice 643 may be actuated so as to equalize pressure only after the bracing member 109 has deployed, the pressure switch 641 may perform function 7.
- Functions 8 and 9 may be encompassed by the third signal conductor 609 and the fact that the pressure switch 641 must be closed for the second indicator light 637 to light up or for the third signal conductor 609 to receive power.
- Functions 10 and 11 may be encompassed by the fourth signal conductor 611 and the fifth signal conductor 613 respectively.
- Function 12 may be encompassed by the fourth signal conductor 611 and the fifth signal conductor 613 , which may be adapted to receive a signal (e.g., in the form of +24V or another power level signal), as described below.
- a signal e.g., in the form of +24V or another power level signal
- Function 13 may be encompassed in the pressure switch 641 , and function 14 is self-explanatory.
- the vacuum switch 651 may be configured so as to be normally open, and may be pneumatically coupled to the brace actuation conduit 621 (e.g., via the orifice 643 ) so as to be actuated or closed when the brace actuation conduit 621 is at vacuum pressure compared to the ambient.
- the Function 16 may be encompassed in a master pressure source valve 653 .
- the master pressure source valve 653 may be configured so as to be normally closed, and may connect the brace actuation conduit 621 with the pressurized gas source conduit 617 .
- the master pressure source valve 653 may be further configured so as to be actuated or opened when exposed at an actuation port to positive pressure via a pneumatic conduit 655 .
- the pneumatic conduit 655 may be selectively connected either to the pressurized gas source conduit 617 or the ambient exhaust conduit 619 via a first flow regulator 657 (as well as through a pair of pneumatic switching connectors as will be explained below).
- the master vacuum source valve 659 may be configured so as to be normally closed, and may connect the brace actuation conduit 621 with the vacuum source conduit 615 .
- the master vacuum source valve 659 may be further configured so as to be actuated or opened when exposed at an actuation port to positive pressure via a pneumatic conduit 661 .
- the pneumatic conduit 661 may be selectively connected either to the pressurized gas source conduit 617 or the ambient exhaust conduit 619 via a second flow regulator 663 (as well as through a pneumatic switching connector as will be explained below).
- the slit valve control module 601 a may comprise a first pneumatic switching connector 665 , a second pneumatic switching connector 667 , and a third pneumatic switching connector 669 , all adapted to participate in the interface described in the above described function 12.
- the first pneumatic switching connector 665 and the second pneumatic switching connector 667 are adapted to establish and selectively vary the pneumatic connection configuration between and/or among five separate pneumatic conduits (two of which are always common with the ambient exhaust conduit 619 , and one of which is always common with the pressurized gas source conduit 617 ), and the second pneumatic switching connector 667 is adapted to establish and selectively vary the pneumatic connection configuration between three separate pneumatic conduits (one of which is always common with the ambient exhaust conduit 619 ).
- the second pneumatic switching connector 667 is adapted to assume pneumatic configuration A by default, wherein the default mechanism may be, e.g., a spring, and is adapted to selectively assume pneumatic configuration B, e.g., via high-side voltage being applied to an actuation coil adapted to shift pneumatic configuration B into the position occupied by configuration A as shown in FIG. 7 .
- the third pneumatic switching connector 669 is adapted to assume pneumatic configuration C by default, wherein the default mechanism may be, e.g., a spring, and is adapted to selectively assume pneumatic configuration D as shown in FIG.
- the first pneumatic switching connector 665 is adapted to selectively assume either pneumatic configuration E, as shown in FIG. 7 , or pneumatic configuration F, e.g., via two different high-side conductors (e.g., of +24V) being applied to respective actuation coils that are adapted to move the first pneumatic switching connector 665 from configuration E to configuration F, or from configuration F to configuration E, as the case may be.
- pneumatic configuration E as shown in FIG. 7
- pneumatic configuration F e.g., via two different high-side conductors (e.g., of +24V) being applied to respective actuation coils that are adapted to move the first pneumatic switching connector 665 from configuration E to configuration F, or from configuration F to configuration E, as the case may be.
- the slit valve control module 601 a may further include additional high-side voltage conductors 673 , 675 and 677 , return or ground conductors 679 , 681 , 683 and 685 , and a third position switch 687 .
- the third position switch 687 may be configured so as to be normally closed, and may be installed within or adjacent the chamber isolation valve 101 a such that it is actuated or opened when the closure member 103 reaches the FIG. 3D longitudinally deployed position.
- the slit valve control module 601 a is adapted to perform the above-described functions 16-41 via selectively receiving a high-side voltage signal along the fourth signal conductor 611 or the fifth signal conductor 613 , and permitting the remaining elements of the slit valve control module 601 a to function as described above according to the schematic of FIG. 7 .
- the master vacuum source valve 659 and the master pressure source valve 653 are adapted to open in a mutually exclusive manner, preventing the simultaneous application of vacuum pressure and positive pressure to the brace actuation conduit 621 and each bracing actuator 173 .
- the circuits between the fourth signal conductor 611 and the return or ground conductor 683 , and between the fifth signal conductor 613 and the return or ground conductor 683 are incapable of being closed unless and until the brace actuation conduit 621 is being exposed to vacuum pressure via the master vacuum source valve 659 , and the vacuum switch 651 is thereby closed (this permits switching from configuration E to configuration F, or vice versa, in the first pneumatic switching connector 665 ).
- the third pneumatic switching connector 669 may not assume configuration D unless positive pressure is received at the pneumatic actuation mechanism 671 , and the latter is not possible unless the first pneumatic switching connector 665 is in configuration E as shown. Still further, the third position switch 687 , shown open in FIG.
- pressure forces within the processing chamber P tending to push the sealing portion 107 away from the processing chamber P may be opposed solely by bracing force generated by the bracing actuators 173 .
- the magnitude of the bracing force may be less than that required to oppose the pressure forces within the processing chamber P, and additional forces from other sources may be added thereto to maintain a seal against the processing chamber opening 102 .
- the main body of the sealing portion 107 may be formed from a metal, such as aluminum or the like.
- the sealing portion 107 may include a resilient member 198 ( FIG. 3E ) that contacts the front plate 121 and prevents metal portions of the sealing portion 107 from contacting the front wall 121 (e.g., so as to prevent particle generation from metal-to-metal contact).
- the resilient member 198 may include, for example, polyetheretherketone (PEEK) or another suitable material (e.g., in the form of an o-ring or similar sealing member).
- the main body of the bracing member 109 may be formed from a metal, such as aluminum or another suitable metal, and include a resilient member 199 ( FIG. 3E ) that contacts the back plate 119 (to prevent particle generation from metal-to-metal contact).
- the resilient member 199 may include, for example, polyetheretherketone (PEEK) or another suitable material (e.g., in the form of an o-ring or similar sealing member).
- PEEK polyetheretherketone
- the sealing portion 107 may be said to contact the front plate 121 if its resilient member 198 or any other portion of the sealing portion 107 contacts the front plate 121 .
- the bracing member 109 may be said to contact the rear plate 119 if its resilient member 199 or any other portion of the bracing member 109 contacts the rear plate 119 .
- the bellows 137 and/or the extensible wall portion 179 may be formed of stainless steel. Any other similar material may be employed.
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Abstract
In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a second opening formed in the second wall. The slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.
Description
- This application is a continuation of and claims priority from U.S. patent application Ser. No. 10/844,974 filed May 12, 2004 which claims priority from U.S. Provisional Patent Application Ser. No. 60/470,140, filed May 13, 2003, each of which is hereby incorporated by reference herein in its entirety.
- The present invention relates generally to semiconductor device manufacturing and more particularly to methods and apparatus for sealing an opening of a processing chamber.
- A substrate processing chamber typically communicates with a substrate transfer chamber through a sealable opening that is both wide and relatively short to accommodate insertion and removal of horizontally-oriented substrates. It is known to use a slit valve to seal such an opening. For example, a sealing plate of the slit valve may be extended to seal the opening, and retracted to permit passage of substrates through the opening. Slit valve designs that avoid the problems of (1) particle generation through rubbing friction, and (2) uneven compression of resilient sealing elements, are preferred.
- During certain types of substrate processing steps, a pressure differential may exist between the processing chamber and the transfer chamber such that high pressure within the processing chamber pushes outward against the sealing plate of the slit valve. The slit valve thereby is subjected to stresses and fatigue, the amounts of which increase with the pressure differential. Pressure differential effects are exacerbated when large substrates, such as those employed for flat panel displays, are involved (e.g., as a larger substrate requires a larger opening between the processing chamber and transfer chamber and a larger sealing plate to seal such an opening). Conventional slit valves typically are not designed to accommodate large pressure differentials. Accordingly, a need exists for improved methods and apparatus for sealing an opening of a processing chamber, particularly when large pressure differentials are being employed.
- In a first embodiment of the invention, a slit valve is provided that is adapted to seal an opening. The slit valve includes a valve housing having (1) a first wall; (2) a first opening formed in the first wall; (3) a second wall; and (4) a second opening formed in the second wall. The slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall.
- In a second embodiment of the invention, a method of sealing an opening is provided. The method includes providing a valve housing having (1) a first wall; (2) a first opening formed in the first wall; (3) a second wall; and (4) a second opening formed in the second wall. The method further includes providing a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The method also includes (1) moving the sealing portion toward the second wall and into contact with the second wall; and (2) moving the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.
- Other features and aspects of the present invention will become more fully apparent from the following detailed description, the appended claims and the accompanying drawings.
-
FIGS. 1A-1C illustrate an embodiment of an apparatus in accordance with the present invention comprising a chamber isolation valve. -
FIG. 2 is a perspective exploded assembly view of an inventive chamber isolation valve representing an exemplary embodiment of the chamber isolation valve ofFIGS. 1A-1C . -
FIGS. 3A-3F are sectional assembly side views of the chamber isolation valve ofFIG. 2 taken at various locations along a length of the chamber isolation valve. -
FIG. 4 is a flowchart that illustrates an exemplary process for sealing the first opening of the chamber isolation valve ofFIG. 2 . -
FIG. 5 is a flowchart that illustrates an exemplary process for placing the closure member of the chamber isolation valve ofFIG. 2 in the longitudinally retracted position of the closure member shown inFIG. 3F . -
FIG. 6 is a schematic representation of a slit valve system including the chamber isolation valve ofFIG. 2 and a slit valve control module adapted to operate and/or coordinate functions of the chamber isolation valve. -
FIG. 7 is a schematic representation of a particular embodiment of the slit valve system ofFIG. 6 . -
FIGS. 1A-1C illustrate an embodiment of an apparatus in accordance with the present invention comprising achamber isolation valve 101. Also, when considered in light of the discussion below,FIGS. 1A-1C illustrate an embodiment of an inventive method for using thechamber isolation valve 101 to seal an opening 102 (shown in phantom inFIG. 1A ) to an adjacent processing chamber P (shown in phantom inFIG. 1A ) so as to permit pressurization of the processing chamber P for processing of a substrate contained therein. - The
chamber isolation valve 101 may include aclosure member 103 for sealing the processing chamber opening 102. In addition, thechamber isolation valve 101 may comprise avalve housing 105 within which at least a portion of theclosure member 103 may be movably disposed. To permit thechamber isolation valve 101 to be used in conjunction with an opening of a processing chamber, thevalve housing 105 of thechamber isolation valve 101 may be placed against the processing chamber, e.g. such that a seal (not shown) is formed between thevalve housing 105 and the processing chamber around the processing chamber opening to be sealed. - The
closure member 103 may include a sealingportion 107 for sealing the processing chamber opening 102. For example, the sealingportion 107 may be utilized so as to seal the processing chamber opening 102 indirectly, e.g., by sealing an opening to thevalve housing 105 that is aligned with the processing chamber opening 102. Alternatively, thesealing portion 107 may be placed in direct contact (not shown) with the processing chamber P such that thesealing portion 107 seals around the processing chamber opening 102. - The
closure member 103 may further include abracing member 109 that is movable relative to the sealingportion 107. For example, thebracing member 109 may be adapted to extend away from and retract toward the sealingportion 107. Further, thebracing member 109 may be adapted to brace or buttress thesealing portion 107, for example, when the sealingportion 107 is in position to seal the processing chamber opening 102 as described above. Such an arrangement is inherently efficient in that it may decrease and/or minimize the amount of force needed to counter a positive pressure within the processing chamber P, especially as compared to commonly-utilized cantilevered arrangements (not shown). - To provide for convenient movement of the
closure member 103 relative to the processing chamber opening 102, theclosure member 103 may also comprise an extendedportion 111 extending from thesealing portion 107. In such an embodiment, an end of the extendedportion 111 that is spaced away from thesealing portion 107 may be adapted to be grasped and/or manipulated, e.g. by an actuator (seeFIG. 2 ) disposed inside or outside thevalve housing 105, so as to enable theclosure member 103 to be moved as a unit (e.g. by moving both the sealingportion 107 and thebracing member 109 together via the extended portion 111). For example, theclosure member 103 may be moved via theextended portion 111 toward and/or away from the processing chamber opening 102 (transversely between the respective configurations of thechamber isolation valve 101 shown inFIGS. 1B and 1C or longitudinally between the respective configurations of thechamber isolation valve 101 shown inFIGS. 1A and 1B ). - Preferably, the extended
portion 111 of theclosure member 103 is fixed in relation to the sealingportion 107 of theclosure member 103. For example, thesealing portion 107 and the extendedportion 111 may be of unitary construction as shown inFIG. 1A . Alternatively the extendedportion 111 may be fixedly coupled to thesealing portion 107. - The
valve housing 105 may define anenclosure 113, afirst opening 115 to theenclosure 113, and asecond opening 117 to theenclosure 113. Preferably, thefirst opening 115 and theenclosure 113 are aligned along a common axis with theprocessing chamber opening 102 and are sized so as to permit passage of substrates through thevalve housing 105 and into and out of the processing chamber P. For example, thefirst opening 115 may be spaced apart from theprocessing chamber opening 102 and thesecond opening 117 may be disposed on the other side of theenclosure 113, adjacent theprocessing chamber opening 102 and on the common axis. In one or more embodiments, thesecond opening 117 may be placed in pneumatic communication with theprocessing chamber opening 102 such that thesecond opening 117 essentially comprises an extension of theprocessing chamber opening 102. - The
valve housing 105 may further comprise arear plate 119 within which thefirst opening 115 is formed. Therear plate 119 may be adapted, and appropriately located, so as to permit the bracingmember 109 to contact therear plate 119 and push against therear plate 119 for bracing the sealingportion 107 of theclosure member 103 during sealing (as described further below). - The
valve housing 105 may further comprise afront plate 121 within which thesecond opening 117 is formed. Thefront plate 121 may be adapted, and appropriately located, so as to permit the sealingportion 107 of theclosure member 103 to contact thefront plate 121 and seal around thesecond opening 117. Alternatively, as discussed above, the sealingportion 107 may directly contact the processing chamber P to seal theopening 102. - In operation, as shown in
FIG. 1A , theclosure member 103 of thechamber isolation valve 101 is adapted to assume a retracted position relative to the first andsecond openings closure member 103 is spaced away from (e.g., below) the first andsecond openings valve housing 105 and into and out of the processing chamber P. - As shown in
FIG. 1A , in at least one embodiment, theenclosure 113 of thevalve housing 105 may enclose the sealingportion 107 of theclosure member 103 while still permitting passage of substrates through thevalve housing 105. Also as shown inFIG. 1A , theenclosure 113 of thevalve housing 105 may enclose the sealingportion 107 and the bracingmember 109 with space to spare, e.g. so as to provide afirst gap 123 between the bracingmember 109 and therear plate 119, and asecond gap 125 between the sealingportion 107 and thefront plate 121. - The
closure member 103 may be moved relative to thevalve housing 105 so as to assume a deployed position relative to the first andsecond openings FIG. 1B wherein the sealingportion 107 is disposed between the first andsecond openings second gaps closure member 103 and thevalve housing 105. It will now be apparent that substrates (not shown) may no longer be passed through thevalve housing 105, since theclosure member 103 blocks the path therethrough. - The
closure member 103, which inFIG. 1B is shown in a retracted position relative to thesecond opening 117 of thevalve housing 105, may be moved into a deployed position relative to thesecond opening 117 as shown inFIG. 1C . As shown inFIG. 1C , the sealingportion 107 of theclosure member 103 is in contact with thefront plate 121, and may be caused to seal thesecond opening 117 of thevalve housing 105. Preferably, and as demonstrated by thechamber isolation valve 101 shown inFIGS. 1B and 1C , relative motion between the sealingportion 107 of theclosure member 103 and thefront plate 121 of thevalve housing 105 leading to sealing of thesecond opening 117 is restricted to a direction that is normal tofront plate 121, so as to reduce and/or eliminate the potential for particle generation via friction. - As may also be seen by comparing
FIG. 1C toFIG. 1B , thechamber isolation valve 101 may be adapted to generate a separation force that moves the bracingmember 109 relative to the sealingportion 107 so as to cause the bracingmember 109 to move away from the processing chamber opening 102 (FIG. 1 ) and into contact with therear plate 119 of thevalve housing 105. Alternatively, the bracingmember 109 may be caused to contact a portion of the transfer chamber (not shown), or another structural member. Thechamber isolation valve 101 may then generate a bracing force, also tending to urge the bracingmember 109 away from the sealingportion 107, so as to brace or buttress the sealingportion 107 of theclosure member 103 against thefront plate 121 of thevalve housing 105, or against the processing chamber P (FIG. 1 ), as the case may be. Such a bracing force may be generated in any number of ways and at any number of locations relative to theclosure member 103. For example, the bracing force may be both generated and applied directly between the bracingmember 109 and the sealingportion 107, e.g. by a pneumatic actuator (seeFIG. 2 ) disposed or formed therebetween. Note that in at least one embodiment of the invention, the bracingmember 109 does not seal thefirst opening 115. -
FIG. 2 is a perspective exploded assembly view of an inventivechamber isolation valve 101 a representing an exemplary embodiment of thechamber isolation valve 101 ofFIGS. 1A-1C .FIGS. 3A-3F are sectional assembly side views of thechamber isolation valve 101 a taken at various locations along a length of thechamber isolation valve 101 a and which describe structural and operational aspects of thechamber isolation valve 101 a. Structural and functional descriptions appearing above with reference to thechamber isolation valve 101 therefore also apply to thechamber isolation valve 101 a, with similar reference numerals being used to indicate corresponding aspects (e.g., of structure) in the figures. - Referring to
FIGS. 2 and 3 A, thevalve housing 105 may comprise anupper portion 127 and alower portion 129 that is coupled to theupper portion 127. Theupper portion 127 may include a resilient element 130 (FIG. 3A ) so as to permit therear plate 119 of thevalve housing 105 to be sealed against an external corresponding structure, such as a valve interface portion of a transfer chamber (not shown). Thelower portion 129 may include resilient element 131 (FIG. 3A ) for sealing thelower portion 129 of thevalve housing 105 against theupper portion 127 of thevalve housing 105. Thelower portion 129 may further include a first and a second port 133 (FIGS. 2 and 3 D) adapted to permit anextended portion 111 of theclosure member 103 to extend outward of thevalve housing 105 and to permit both longitudinal (e.g. vertical) and transverse (e.g. horizontal) movement of theclosure member 103 relative to thevalve housing 105. More orfewer ports 133 may be specified as necessary or as desired. - Referring to
FIG. 2 , theclosure member 103 includes twoextended portions 111, eachextended portion 111 being coupled to the sealingportion 107, and thechamber isolation valve 101 a being configured such that eachextended portion 111 extends through aport 133. More or fewerextended portions 111 may be specified as necessary or as desired. - Referring to
FIGS. 2 and 3 A-3F, thechamber isolation valve 101 a may comprise adeployment mechanism 134 for moving theclosure member 103, e.g. relative to thevalve housing 105 and/or the processing chamber opening 102 (FIG. 1A ). For example, thedeployment mechanism 134 may include one or more first actuators 135 (FIGS. 2 and 3 A) for moving theclosure member 103 between longitudinally retracted and longitudinally deployed positions of theclosure member 103, shown respectively inFIGS. 3F and 3D . Thefirst actuator 135 may be one of many different types of suitable devices. For example, a pneumatically-driven linear actuator such as is embodied by thefirst actuator 135 ofFIGS. 2 and 3 A would be suitable, as would be a belt- or screw-driven actuator. - The
deployment mechanism 134 may further comprise one or more external bellows 137 (FIG. 2 ) for protecting the enclosure 113 (FIG. 3D ) of thevalve housing 105 against intrusion of contaminants through theports 133. Eachexternal bellows 137 corresponds to and is adapted to surround a separateextended portion 111 of theclosure member 103. Where more or fewerextended portions 111 exist, the number ofexternal bellows 137 may increase or decrease accordingly. Eachexternal bellows 137 may include a first mountingflange 139 mounted to thevalve housing 105 around theport 133 through which the correspondingextended portion 111 extends. - The
deployment mechanism 134 may further include one or more second actuators 141 (FIGS. 2 and 3 C) for moving theclosure member 103 between transversely retracted and transversely deployed positions of theclosure member 103, shown respectively inFIGS. 3D and 3E . Eachsecond actuator 141 may be mounted to afirst support plate 143 which may in turn be movably mounted to thevalve housing 105 via thefirst actuator 135. Eachsecond actuator 141 may be one of many different suitable devices. For example, a pneumatically-driven linear actuator, such as is embodied by thesecond actuator 141 ofFIGS. 2 and 3 C, would be suitable, as would be a belt- or screw-driven actuator. - The
deployment mechanism 134 may be adapted to guide thefirst support plate 143 as thefirst actuator 135 moves thefirst support plate 143 longitudinally relative to thevalve housing 105. For example, a first and asecond support 149 may be affixed to and extend from thevalve housing 105, and thefirst support plate 143 may be slidably coupled to eachsupport 149, e.g., via arail 151 preferably fixedly coupled to eachsupport 149, and a first and second pair oftrucks 153. Each pair oftrucks 153 may be fixedly coupled to thefirst support plate 143 and movably coupled to arail 151 so as to permit longitudinal movement of thefirst support plate 143. - Referring to
FIGS. 2, 3C and 3D, thedeployment mechanism 134 may further include one ormore brackets 145, eachbracket 145 being secured to an end of aextended portion 111 that is spaced apart from the sealingportion 107 of theclosure member 103. Thedeployment mechanism 134 may also include asecond support plate 147, thesecond support plate 147 being movably mounted to the first support plate 143 (and/or to the valve housing 105) via thesecond actuator 141. Eachbracket 145 may be coupled to thesecond support plate 147 to provide a means by which thedeployment mechanism 134 may manipulate and/or move the closure member 103 (e.g. longitudinally, or transversely, or a combination thereof). - The
deployment mechanism 134 may be adapted both to guide thesecond support plate 147 as thesecond actuator 141 moves thesecond support plate 147 transversely relative to thefirst support plate 143 and thevalve housing 105, and to isolate the transversely-operatingsecond actuator 141 from the vertical force represented by the combined weight of theclosure member 103, thesecond support plate 147 and the brackets 145 (e.g. so as to facilitate smooth transverse translation of theclosure member 103 relative to the valve housing 105). For example, as shown inFIGS. 2 and 3 B, thedeployment mechanism 134 may further comprisebearings 155 extending from sides of thefirst support plate 143, and eachbracket 145 may comprise aguide slot 157 adapted to accommodate aroller portion 159 of one of thebearings 155. As such, while thesecond support plate 147 is moving transversely relative to thefirst support plate 143, thebearings 155 and thefirst support plate 143 may be caused to bear substantially all of the weight of theclosure member 103, thebrackets 145 and thesecond support plate 147 while still allowing that subassembly to smoothly translate via overturning (rolling) communication between the bearingroller portions 159 and-thebracket guide slots 157. - For instances in which the
first opening 115 of thevalve housing 105 is relatively long, as with thechamber isolation valve 101 a ofFIG. 2 , bracingmember 109 may include abrace plate 161 that is similarly elongated. Thebrace plate 161 may comprise a first side 163 (FIG. 3C ) that faces toward the sealingportion 107, on which a plurality of mounting bosses 165 (FIG. 3B ) may be provided. Each of the plurality of mountingbosses 165 may be adapted to extend into a respective one of a plurality of pockets 167 (FIG. 2 , see alsoFIG. 3B ) formed within a non-sealing side 169 (FIG. 2 ) of the sealingportion 107. A respective one of an equivalent plurality of drive plates 171 (FIG. 2 ) may be disposed within each pocket 167 (seeFIG. 3D ) and coupled, preferably fixedly, to the mountingboss 165 of thebrace plate 161 extending therein. A subassembly may thereby be formed comprising thebrace plate 161 as well as eachdrive plate 171 coupled to thebrace plate 161 via the mountingbosses 165. - The
closure member 103 may be adapted to move the bracingmember 109 back and forth between the (transversely) retracted position shown inFIG. 3D and the deployed or extended position shown inFIG. 3E . For example, an actuating device may be employed within the bracingmember 109 and/or the sealingportion 107 of the closure member 103 (e.g., so as to only minimally enlarge the overall size of the closure member 103). For instance, theclosure member 103 may comprise at least one bracing actuator 173 (FIGS. 2 and 3 E) as described below with reference toFIGS. 2 and 3 B-3F. - When the
first opening 115 is relatively long, as with thechamber isolation valve 101 a ofFIG. 2 , theclosure member 103 may include a plurality of bracing actuators 173 (e.g., depending on the magnitude of bracing force that is required to be applied to the sealingportion 107 via the bracingmember 109 and/or the room available on thenon-sealing side 169 of the sealingportion 107 to form pockets 167). Each bracingactuator 173 may be built into, and/or integrated within theclosure member 103 so as to be comprised of portions of some of the components of theclosure member 103 already described above (e.g., apocket 167 of the sealingportion 107, and adrive plate 171 of the bracing member 109). In addition, each bracingactuator 173 may comprise a drive plate bellows 175 (FIG. 3D ) that includes a mountingflange 177 coupled to thenon-sealing side 169 of the sealing portion 107 (e.g., around apocket 167 of the sealing portion 107), and anextensible wall portion 179 attached to the mountingflange 177 and extending into thepocket 167, within which theextensible wall portion 179 is attached to adrive plate 171. - With reference to
FIG. 3E , each bracingactuator 173 may comprise apressure cell 181 comprising apocket 167 of the sealing portion 107 (see alsoFIG. 3B ), adrive plate 171 of the bracingmember 109, theextensible wall portion 179 of the drive plate bellows 175, and the mounting flange 177 (FIG. 3D ) of the drive plate bellows 175. Thepressure cell 181 may be expanded via an external source of pressurized gas (not shown) to force the bracingmember 109 against therear plate 119. For example,FIG. 3E illustrates a configuration of thechamber isolation valve 101 a in which the sealingportion 107 of theclosure member 103 is deployed against thefront plate 121 of thevalve housing 105, the bracingmember 109 of theclosure member 103 is deployed against therear plate 119 of thevalve housing 105, theextensible wall portion 179 of each drive plate bellows 175 is relatively compressed, and the volume of thepressure cell 181 is relatively large. - Alternatively, the
pressure cell 181 may be contracted via an external source of vacuum pressure. For example,FIG. 3D illustrates a configuration of thechamber isolation valve 101 a in which the bracingmember 109 is retracted within a pocket 167 (FIG. 3B ) of the sealingportion 107, theextensible wall portion 179 of the drive plate bellows 175 is relatively extended, and the volume of the pressure cell 181 (FIG. 3E ) is relatively small. As will be explained further below, each bracingactuator 173 may comprise onesuch pressure cell 181 and may actuate (e.g., move/position/urge the bracing member 109) via changes in the volume of thepressure cell 181 and/or in the pressure (e.g., air pressure or fluid pressure) within thepressure cell 181. - Each bracing
actuator 173 may be energized pneumatically. For example, eachpocket 167 may be pneumatically coupled via a conduit 183 (FIG. 3B ) that penetrates the walls of each of thepockets 167. Thus when thepressure cell 181 of one bracingactuator 173 of theclosure member 103 is subjected to increased air or fluid pressure for expansion, or to vacuum pressure for contraction as the case may be, thepressure cell 181 of each bracingactuator 173 will tend to be similarly energized. As such the collective force exerted by the bracingactuators 173 may move the bracingmember 109 relative to (e.g., toward or away from) the sealingportion 107, according to the pressure existing in theconduit 183. - The
closure member 103 may be adapted to expose theconduit 183 to a source of vacuum pressure (not shown) for retracting the bracingmember 109 within the sealingportion 107, e.g., so as to prevent contact between the bracingmember 109 and thevalve housing 105 when theclosure member 103 is in the longitudinally retracted position ofFIG. 3F , or is being moved into or out of same. (The sealingportion 107 of theclosure member 103 may be similarly retracted from the front plate 121). Theclosure member 103 may also be adapted to expose theconduit 183 to a source of pressurized gas (not shown) for extending the bracingmember 109 away from the sealingportion 107 and/or to cause the bracingmember 109, when fully extended, to push against therear plate 119 of thevalve housing 105 so as to brace the sealingportion 107 against thefront plate 121 of thevalve housing 105 as shown inFIG. 3E . - Exposure of the
conduit 183 to a source of vacuum pressure or of pressurized gas can be accomplished in any of a number of ways. For example, one or bothbrackets 145 can include a socket 185 (FIG. 2 ) adapted to receive a pressure fitting (not shown), e.g., an end fitting of a pressure hose. The pressure fitting (not shown) may be adapted to mate with a pressure port 187 (FIG. 3E ) formed within theextended portion 111 of theclosure member 103 that is in communication with an extended conduit 189 (FIG. 3C ) also formed within theextended portion 111 and leading to a sealing portion interface 191 (FIG. 3C ) of theextended portion 111. The sealingportion interface 191 may be made to seal against anextended portion interface 193 of the sealingportion 107. Aresilient element 195 may provide for a seal between the two interfaces. Afeeder conduit 197 within the sealingportion 107 may lead from the extendedportion interface 193 to theconduit 183 of the sealingportion 107. Such an arrangement provides a convenient means for pneumatically actuating the bracingactuators 173 of theclosure member 103 and for exercising positive control (e.g., applying either vacuum or pressurized gas as necessary) over the position of the bracingmember 109 relative to the sealing portion 107 (e.g., at all times). Other configurations for applying vacuum or pressurized gas to the bracingactuators 173 also may be employed. - It should also be noted that the
extensible wall portions 179 of each of the drive plate bellows 175 are compressed during expansion of thepressure cells 181. Such an arrangement may subject theextensible wall portions 179 to less stress and fatigue than would be the case if theextensible wall portions 179 were expanded during pressure cell expansion, thus increasing the useful life of the drive plate bellows 175. The opposite arrangement may be employed. - It is further noted that in one embodiment each of the
extended portions 111 of theclosure member 103 may contact (seeFIG. 3E ) an inner surface 154 (FIG. 3D ) of the first mountingflange 139 of anexternal bellows 137 as the sealingportion 107 of theclosure member 103 contacts thefront plate 121 of thevalve housing 105. Such an arrangement may assist in providing a positive, self-aligning limit to the extent to which theclosure member 103 moves toward thefront plate 121 of the valve housing 105 (as described below). For instance, the position of theclosure member 103 within thevalve housing 105 when contact is established between theextended portion 111 and the first mountingflanges 139 may correspond to a desired initial degree of compression of a resilient sealing element (not shown) between the sealingportion 107 of theclosure member 103 and thefront plate 121, such that any further compression that may be required may be provided by the bracingmember 109 bracing the sealingportion 107 against thefront plate 121. In other embodiments, theextended portions 111 may remain out of contact with theinner surface 154 of thebellows 137 when the sealingportion 107 of theclosure member 103 contacts thefront plate 121. -
FIG. 4 is a flowchart that illustrates anexemplary process 400 for sealing thefirst opening 115 of thechamber isolation valve 101 a. Referring toFIG. 4 , theprocess 400 may begin at astep 401. At astep 402, theprocess 400 either proceeds to astep 403 or astep 404 depending on the longitudinal position of the closure member 103 (FIG. 2 ). If theclosure member 103 is in the longitudinally retracted position illustrated inFIG. 3F , theprocess 400 proceeds to step 403. - At the
step 403, theclosure member 103 is moved from the longitudinally retracted position ofFIG. 3F to the longitudinally deployed position of theclosure member 103 illustrated byFIG. 3D . For example, thefirst actuator 135 of thedeployment mechanism 134 may be caused to elevate theclosure member 103 from the longitudinally retracted position ofFIG. 3F to the longitudinally deployed position ofFIG. 3D . In one or more embodiments of the inventive method, before, during and/or after the above-described elevation of theclosure member 103, thedeployment mechanism 134 maintains the second gap 125 (FIG. 1A ) and one or more of the bracingactuators 173 maintains the first gap 123 (FIG. 1A ) between theclosure member 103 and thevalve housing 105 to protect against rubbing and/or particle generation during movement of theclosure member 103. Accordingly, in some such embodiments, thesecond actuators 141 of thedeployment mechanism 134 are actuated to retain theclosure member 103 in a transversely retracted position away from thefront plate 121 of thevalve housing 105. - At the conclusion of the
step 403, theclosure member 103 will be in the vertically deployed position ofFIG. 3D . As such, theprocess 400 proceeds to astep 404. - At the
step 404, theclosure member 103 is transversely deployed, e.g., is moved from the transversely retracted position of theclosure member 103 ofFIG. 3D to the transversely deployed position of theclosure member 103 illustrated inFIG. 3E . For example, one or more of thesecond actuators 141 of the deployment mechanism 134 (and/or one or more of the bracing actuators 173) may be caused to move theclosure member 103 from the transversely retracted position of theclosure member 103 ofFIG. 3D to the transversely deployed position ofFIG. 3E . By deactivating (e.g., depressurizing) thesecond actuators 141, theextended portions 111 may be transversely movable, and expansion of one or more of the bracingactuators 173, spring biasing of theextended portions 111 or theclosure member 103 or the like may move the sealingportion 107 toward thefront plate 121. In one or more embodiments of the inventive method, the above transverse deployment of theclosure member 103 results in the sealingportion 107 of theclosure member 103 being moved into contact with thefront plate 121 of thevalve housing 105. In some such embodiments and/or in other embodiments, the above-described transverse deployment of theclosure member 103 results in theextended portions 111 of theclosure member 103 contacting correspondinginner surfaces 154 of the first mountingflanges 139 of the external bellows 137. - Proceeding to a
step 405 of theprocess 400, the bracingmember 109 of theclosure member 103 is transversely deployed, e.g., is moved to a transversely deployed position of the bracingmember 109 illustrated inFIG. 3E . For example, one or more of the bracing actuators 173 (FIG. 2 ) of theclosure member 103 may be caused to move the bracingmember 109 away from a transversely retracted position of the bracingmember 109 against and/or within the sealing portion 107 (e.g., as illustrated inFIG. 3D ), to the transversely deployed position ofFIG. 3E . - In one or more embodiments of the inventive method, the
step 405 begins only after thestep 404 is complete. In other embodiments, thestep 405 and thestep 404 are performed simultaneously and/or both steps are begun before either is complete. In still further embodiments, thestep 404 begins only after thestep 405 has begun. Additionally, in one or more embodiments of the inventive method, before, during, and/or after the above-described transverse deployments of theclosure member 103 and the bracingmember 109 of theclosure member 103, thedeployment mechanism 134 is employed to maintain theclosure member 103 in the longitudinally deployed position of the closure member 103 (FIG. 3E ). For example, thefirst actuator 135 may remain activated after elevating the closure member 103 (see step 402). - Proceeding to a
step 406 of theprocess 400, the sealingportion 107 is braced against thefront plate 121 to seal thefirst opening 115 formed therein. For example, the pressure in thepressure cells 181 of each bracingactuator 173 may be increased from what may have been a relatively low pressure sufficient to move the bracingmember 109 into place against the rear plate 119 (see the step 405) to a relatively high pressure commensurate with the anticipated magnitude of pressure forces to be exerted by the pressurized chamber P. Alternatively, if a pressure used to expand thepressure cells 181 in thestep 405 is high enough to resist the anticipated pressure forces, or if the pressure was increased gradually or step-wise during thestep 405 to an adequately high pressure, that same pressure may be maintained for as long as bracing force is required. - With the
closure member 103 being both longitudinally and transversely deployed, the bracingmember 109 being transversely deployed and the sealingportion 107 being braced against thefront plate 121 so as to seal thefirst opening 115, theprocess 400 ends at astep 407. - The
process 400 may alternatively begin with one or more steps to ensure that the first andsecond gaps closure member 103 and thevalve housing 105 exist prior to theclosure member 103 being longitudinally deployed (e.g., elevated) by thefirst actuator 135 of thedeployment mechanism 134. For example, one or more of the bracingactuators 173 may be employed in a direction opposite the bracing direction, e.g., via the application of vacuum pressure, to ensure the bracingmember 109 remains retracted against and/or within the sealing portion 107 (and away from therear plate 119 of the valve housing 105) during longitudinal deployment of theclosure member 103. Further, one or more of thesecond actuators 141 may be employed in a direction opposite the sealing direction, e.g., via the application of positive pressure (with movement in the sealing direction occurring, e.g., by the force of a biasing element, such as a coil spring (not shown) or by expansion of the pressure cells 181), to ensure the sealingportion 107 of theclosure member 103 remains retracted away from thefront plate 121 of thevalve housing 105 during longitudinal deployment of theclosure member 103. -
FIG. 5 is a flowchart that illustrates anexemplary process 500 for placing theclosure member 103 of thechamber isolation valve 101 a in the longitudinally retracted position of theclosure member 103 shown inFIG. 3F . Referring to FIG. 5, theprocess 500 may begin at astep 501. At astep 502, theprocess 500 either proceeds to astep 503 or astep 504 depending on the transverse position of the bracing member 109 (FIG. 2 ). If the bracingmember 109 is not in a transversely retracted position, theprocess 500 proceeds to thestep 503. - At the
step 503, the bracingmember 109 is transversely retracted, e.g., moved to a transversely retracted position such as is shown inFIG. 3D . For example, one or more of the bracingactuators 173 may be caused to move the bracingmember 109 from a transversely deployed position of the bracingmember 109, such as is shown inFIG. 3E , to the transversely retracted position as shown inFIG. 3D . - Proceeding to the
step 504, theprocess 500 either proceeds to thestep 505 or astep 506 depending on the transverse position of the closure member 103 (FIG. 2 ). If theclosure member 103 is not in a transversely retracted position, theprocess 500 proceeds to step 505. - At the
step 505, theclosure member 103 is transversely retracted, e.g., moved to a transversely retracted position such as is shown inFIG. 3D . For example, one or more of thesecond actuators 141 may be caused to move theclosure member 103 from a transversely deployed position of theclosure member 103, such as is shown inFIG. 3E , to the transversely retracted position as shown inFIG. 3D . - In one or more embodiments of the
process 500, two or more of thesteps step 505 need not begin only after thestep 503 is complete. Also, in one or more embodiments of theprocess 500, before, during and after the retraction of either or both the bracingmember 109 and theclosure member 103, thedeployment mechanism 134 may be employed to actively retain theclosure member 103 in the vertically deployed position of the closure member 103 (FIG. 3E ). For example, thefirst actuator 135 of thedeployment mechanism 134 may be continuously activated for this purpose. - Proceeding to the
step 506, theclosure member 103 is moved to the longitudinally retracted position of theclosure member 103 as shown inFIG. 3F . For example, thefirst actuator 135 of thedeployment mechanism 134 may be caused to move theclosure member 103 from the longitudinally deployed position as shown inFIG. 3D to the longitudinally retracted position shown inFIG. 3F . In one or more embodiments of theprocess 500, before, during, and/or after the above-described retraction of theclosure member 103, thedeployment mechanism 134 and one or more of the bracingactuators 173 may maintain the first andsecond gaps 123, 125 (FIG. 1A ) between theclosure member 103 and thevalve housing 105 to protect against rubbing and/or particle generation during longitudinal movement of theclosure member 103. For example, in some such embodiments, thesecond actuators 141 may be prevented from moving theclosure member 103 transversely toward thefront plate 121 of thevalve housing 105. Additionally, in one or more embodiments the bracingactuators 173 may be prevented from moving the bracingmember 109 transversely toward therear plate 119 of thevalve housing 105. As well, in one or more embodiments, one or more of the bracingactuators 173 may be activated, e.g., via application of vacuum pressure, to maintain a retracted position of the bracingmember 109 against/within the sealingportion 107 during longitudinal retraction of theclosure member 103. - The
closure member 103 being both longitudinally and transversely retracted, thechamber isolation valve 101 a is now configured to permit passage of substrates back and forth through thevalve housing 105 of thechamber isolation valve 101 a, and theprocess 500 ends at astep 507. Where it is advantageous or desirable, additional steps may be taken to ensure theclosure member 103 remains spaced apart from thevalve housing 105, even when retracted and not moving. For example, one or more of the bracingactuators 173 and/or one or more of thesecond actuators 141 may be continuously activated to maintain the first and/orsecond gaps 123, 125 (FIG. 1A ). - As relates to the
processes FIGS. 4 and 5 , in some embodiments of thechamber isolation valve 101 a, thefirst actuator 135 is adapted to actuate via the application of positive pressure during both longitudinal deployment and longitudinal retraction of theclosure member 103. In some other embodiments of thechamber isolation valve 101 a, thefirst actuator 135 may be adapted to actuate via positive pressure during longitudinal deployment with gravity being employed for vertical retraction. In further embodiments of thechamber isolation valve 101 a, each bracingactuator 173 may be adapted to actuate via a spring default during transverse deployment of theclosure member 103, and in some such embodiments eachsecond actuator 141 may be adapted to actuate via positive pressure during transverse retraction of the closure member 103 (e.g., for assurance of maintaining a transverse retraction of theclosure member 103 during longitudinal movement of the closure member 103). In still further embodiments of thechamber isolation valve 101 a, each bracingactuator 173 may be adapted to actuate via positive pressure during transverse deployment of the bracingmember 109 and via vacuum pressure (e.g., no spring default) during transverse retraction of the bracing member 109 (e.g., to avoid having to overcome the force of a spring default when deploying the bracing member 109). Other configurations may be employed. -
FIG. 6 is a schematic representation of aslit valve system 600 including thechamber isolation valve 101 a ofFIG. 2 and a slitvalve control module 601 adapted to operate and/or coordinate functions of thechamber isolation valve 101 a. For example, the slitvalve control module 601 may be adapted to interact with thechamber isolation valve 101 a so as to perform theprocess 400 illustrated by the flow chart ofFIG. 4 and/or theprocess 500 illustrated by the flow chart ofFIG. 5 . - The slit
valve control module 601 may comprise an input/output module 603 adapted to generate and/or receive signals. For example, the input/output module 603 may be adapted to: - (1) determine whether the
closure member 103 is in a longitudinally retracted position as illustrated inFIG. 3F ; - (2) generate and transmit an electrical signal along a
first signal conductor 605 corresponding to theclosure member 103 being in the longitudinally retracted position ofFIG. 3F ; - (3) illuminate an indicator light (e.g., a green L.E.D.) corresponding to the
closure member 103 being in the longitudinally retracted position ofFIG. 3F ; - (4) determine whether the
closure member 103 is in a longitudinally deployed position as illustrated inFIG. 3D ; - (5) generate and transmit an electrical signal along a
second signal conductor 607 corresponding to theclosure member 103 being in the longitudinally deployed position ofFIG. 3D ; - (6) illuminate an indicator light (e.g., a red L.E.D.) corresponding to the
closure member 103 being in the longitudinally deployed position ofFIG. 3D ; - (7) determine whether the bracing
member 109 is in a transversely deployed position as illustrated onFIG. 3E ; - (8) generate and transmit an electrical signal along a
third signal conductor 609 corresponding to the bracingmember 109 being in the transversely deployed position ofFIG. 3E ; - (9) prevent the signal (5) above from being generated and transmitted, and the indicator light of (6) above from being illuminated, until the bracing
member 109 has been determined to be in a transversely deployed position as in (7) above; - (10) receive an electrical signal along a
fourth signal conductor 611, e.g., so as to cause and/or permit the slitvalve control module 601 to operate thechamber isolation valve 101 a so as to perform theprocess 400 described above with reference toFIG. 4 (e.g., seal thefirst opening 115 of thechamber isolation valve 101 a as illustrated inFIG. 3E ); - (11) receive an electrical signal along a
fifth signal conductor 613, e.g., so as to cause and/or permit the slitvalve control module 601 to operate thechamber isolation valve 101 a so as to perform theprocess 500 described above with reference toFIG. 5 (e.g., place theclosure member 103 in the longitudinally retracted position of theclosure member 103 as illustrated inFIG. 3F ); - (12) control and direct power to one or more pneumatic switches of the slit valve control module 601 (not shown) adapted to selectively reconfigure connections between and/or among a plurality of pneumatic conduits having a connection to the slit
valve control module 601, such as: -
- (a) a
vacuum source conduit 615; - (b) a pressurized
gas source conduit 617; - (c) an ambient (atmospheric)
exhaust conduit 619; - (d) a
brace actuation conduit 621; - (e) a
clamp actuation conduit 623; - (f) a closure
member lowering conduit 625; - (g) a closure
member elevating conduit 627;
- (a) a
- (13) detect the presence of elevated pressure (e.g., pressurization) in the
brace actuation conduit 621; - (14) perform the function of (7) above at least in part via the function of (13) above; and/or (15) detect the presence of depressed pressure (e.g., vacuum) in the
brace actuation conduit 621. - The slit
valve control module 601 may also be adapted to perform the following functions: - (16) selectively connecting the pressurized
gas source conduit 617 to thebrace actuation conduit 621, e.g., so as to actuate each bracingactuator 173 and thereby move the bracingmember 109 into the transversely deployed position illustrated inFIG. 3E ; - (17) selectively connecting the
vacuum source conduit 615 to thebrace actuation conduit 621, e.g., so as to actuate each bracingactuator 173 and thereby move the bracingmember 109 into the transversely retracted position illustrated inFIG. 3D ; - (18) positively preventing the function of (17) above from occurring while the pneumatic connection of (16) above exists;
- (19) positively preventing the function of (16) above from occurring while the pneumatic connection of (17) above exists;
- (20) selectively connecting the pressurized
gas source conduit 617 to theclamp actuation conduit 623, e.g., so as to actuate eachsecond actuator 141 of thedeployment mechanism 134 and thereby move theclosure member 103 into the transversely retracted position illustrated inFIG. 3D (e.g., by defeating a spring default tending to deploy the closure member 103); - (21) selectively connecting the
ambient exhaust conduit 619 to theclamp actuation conduit 623, e.g., so as to cease actuating eachsecond actuator 141 of thedeployment mechanism 134 and to allow a spring default (e.g., built into each deployment mechanism 134) or action of the bracingactuators 173 to dominate, thereby moving theclosure member 103 into the transversely deployed position illustrated inFIG. 3E ; - (22) selectively connecting the pressurized
gas source conduit 617 to the closuremember lowering conduit 625, e.g., so as to actuate the first actuator 135 (FIG. 3A ) and thereby move theclosure member 103 into the longitudinally retracted position illustrated inFIG. 3F ; - (23) selectively connecting the
ambient exhaust conduit 619 to the closuremember elevating conduit 627, e.g., so as to facilitate the function of (22) above; - (24) selectively connecting the pressurized
gas source conduit 617 to the closuremember elevating conduit 627, e.g., so as to actuate the first actuator 135 (FIG. 3A ) and thereby move theclosure member 103 into the longitudinally deployed position illustrated inFIG. 3D ; - (25) selectively connecting the
ambient exhaust conduit 619 to the closuremember lowering conduit 625, e.g., so as to facilitate the function of (24) above; - (26) simultaneously performing (22) and (23) above;
- (27) simultaneously performing (24) and (25) above;
- (28) selectively switching from (26) above to (27) above;
- (29) selectively switching from (27) above to (26) above;
- (30) simultaneously performing (17) and (20) above;
- (31) simultaneously performing (16) and (21) above;
- (32) selectively switching from (30) above to (31) above;
- (33) selectively switching from (31) above to (30) above;
- (34) positively preventing (16) and (21) from occurring while the pneumatic connection of (22) exists;
- (35) positively preventing (16) and (21) from occurring unless the
closure member 103 is in the vertically deployed position illustrated inFIG. 3D ; - (36) positively preventing (28) and (29) above from occurring unless the pneumatic connection of (17) above exists;
- (37) defaulting to (31) upon loss of power to the slit
valve control module 601; - (38) performing the
process 400 ofFIG. 4 by performing (28), (27), (35), (16), (21) and (36) above; - (39) performing the
process 400 ofFIG. 4 by performing (28), (27), (35), (16), (21), (36), (32) and (31) above; - (40) performing the
process 500 ofFIG. 5 by performing (36), (20), (17), (29), (22), (23), (26), and (34) above; and/or - (41) performing the
process 500 ofFIG. 5 by performing (36), (33), (20), (17), (29), (23), (26), (34), and (30) above. - Numerous other functions also or alternatively may be performed.
-
FIG. 7 is a schematic representation of aparticular embodiment 600 a of theslit valve system 600 ofFIG. 6 comprising thechamber isolation valve 101 a ofFIG. 2 and aparticular embodiment 601 a of the slitvalve control module 601, wherein the slitvalve control module 601 a is shown in more detail. Referring toFIG. 7 , the slitvalve control module 601 a is adapted to perform the functions 1-41 as described above. The aspects/structure of the slitvalve control module 601 a adapted to perform those functions will be introduced and explained in the general order of the functions. - Functions 1-3 may be encompassed in a
first position switch 629, afirst indicator light 631, and thefirst signal conductor 605. Thefirst position switch 629 may be configured so as to be normally open, and may be installed within or adjacent thechamber isolation valve 101 a such that it is actuated or closed when theclosure member 103 reaches theFIG. 3F longitudinally retracted position. Thefirst indicator light 631 can be a signal to a human operator. Thefirst signal conductor 605 can carry a signal to a remote controller (not shown). Other uses for thefirst indicator light 631 and/or thefirst signal conductor 605 are possible. - Functions 4-6 may by similarly encompassed in a
second position switch 635, asecond indicator light 637, and thesecond signal conductor 607. Thesecond position switch 635 may be configured so as to be normally open, and may be installed within or adjacent thechamber isolation valve 101 a such that it is actuated or closed when theclosure member 103 reaches theFIG. 3D longitudinally deployed position. Thesecond indicator light 637 and thesecond signal conductor 607 may function similarly to thefirst indicator light 631 and thefirst signal conductor 605. -
Function 7 may be encompassed inpressure switch 641. Thepressure switch 641 may be configured so as to be normally open, and may be pneumatically coupled to the brace actuation conduit 621 (e.g., via anorifice 643 adapted to slowly equalize pressure on either side of the orifice 643) so as to be actuated or closed when thebrace actuation conduit 621 is at positive pressure compared to ambient pressure. Since positive pressure in thebrace actuation conduit 621 leads to transverse deployment of the bracingmember 109 via actuation of each bracingactuator 173, and theorifice 643 may be actuated so as to equalize pressure only after the bracingmember 109 has deployed, thepressure switch 641 may performfunction 7. -
Functions 8 and 9 may be encompassed by thethird signal conductor 609 and the fact that thepressure switch 641 must be closed for thesecond indicator light 637 to light up or for thethird signal conductor 609 to receive power. - Functions 10 and 11 may be encompassed by the
fourth signal conductor 611 and thefifth signal conductor 613 respectively. - Function 12 may be encompassed by the
fourth signal conductor 611 and thefifth signal conductor 613, which may be adapted to receive a signal (e.g., in the form of +24V or another power level signal), as described below. - Function 13 may be encompassed in the
pressure switch 641, and function 14 is self-explanatory. - Function 15 may be encompassed in a
vacuum switch 651. Thevacuum switch 651 may be configured so as to be normally open, and may be pneumatically coupled to the brace actuation conduit 621 (e.g., via the orifice 643) so as to be actuated or closed when thebrace actuation conduit 621 is at vacuum pressure compared to the ambient. - Function 16 may be encompassed in a master
pressure source valve 653. The masterpressure source valve 653 may be configured so as to be normally closed, and may connect thebrace actuation conduit 621 with the pressurizedgas source conduit 617. The masterpressure source valve 653 may be further configured so as to be actuated or opened when exposed at an actuation port to positive pressure via apneumatic conduit 655. Thepneumatic conduit 655 may be selectively connected either to the pressurizedgas source conduit 617 or theambient exhaust conduit 619 via a first flow regulator 657 (as well as through a pair of pneumatic switching connectors as will be explained below). - Function 17 may be encompassed in a master
vacuum source valve 659. The mastervacuum source valve 659 may be configured so as to be normally closed, and may connect thebrace actuation conduit 621 with thevacuum source conduit 615. The mastervacuum source valve 659 may be further configured so as to be actuated or opened when exposed at an actuation port to positive pressure via apneumatic conduit 661. Thepneumatic conduit 661 may be selectively connected either to the pressurizedgas source conduit 617 or theambient exhaust conduit 619 via a second flow regulator 663 (as well as through a pneumatic switching connector as will be explained below). - The slit
valve control module 601 a may comprise a firstpneumatic switching connector 665, a secondpneumatic switching connector 667, and a thirdpneumatic switching connector 669, all adapted to participate in the interface described in the above described function 12. The firstpneumatic switching connector 665 and the secondpneumatic switching connector 667 are adapted to establish and selectively vary the pneumatic connection configuration between and/or among five separate pneumatic conduits (two of which are always common with theambient exhaust conduit 619, and one of which is always common with the pressurized gas source conduit 617), and the secondpneumatic switching connector 667 is adapted to establish and selectively vary the pneumatic connection configuration between three separate pneumatic conduits (one of which is always common with the ambient exhaust conduit 619). - The second
pneumatic switching connector 667 is adapted to assume pneumatic configuration A by default, wherein the default mechanism may be, e.g., a spring, and is adapted to selectively assume pneumatic configuration B, e.g., via high-side voltage being applied to an actuation coil adapted to shift pneumatic configuration B into the position occupied by configuration A as shown inFIG. 7 . The thirdpneumatic switching connector 669 is adapted to assume pneumatic configuration C by default, wherein the default mechanism may be, e.g., a spring, and is adapted to selectively assume pneumatic configuration D as shown inFIG. 7 , e.g., via positive pressure being applied to apneumatic actuation mechanism 671 and thepneumatic actuation mechanism 671 thereby actuating so as to shift pneumatic configuration D into the position shown (e.g., moving configuration C out and moving configuration D in). The firstpneumatic switching connector 665 is adapted to selectively assume either pneumatic configuration E, as shown inFIG. 7 , or pneumatic configuration F, e.g., via two different high-side conductors (e.g., of +24V) being applied to respective actuation coils that are adapted to move the firstpneumatic switching connector 665 from configuration E to configuration F, or from configuration F to configuration E, as the case may be. - The slit
valve control module 601 a may further include additional high-side voltage conductors ground conductors third position switch 687. Thethird position switch 687 may be configured so as to be normally closed, and may be installed within or adjacent thechamber isolation valve 101 a such that it is actuated or opened when theclosure member 103 reaches theFIG. 3D longitudinally deployed position. - It will be apparent to those skilled in the art upon reading the present application and reviewing the figures of the present application, especially
FIG. 7 , that the slitvalve control module 601 a is adapted to perform the above-described functions 16-41 via selectively receiving a high-side voltage signal along thefourth signal conductor 611 or thefifth signal conductor 613, and permitting the remaining elements of the slitvalve control module 601 a to function as described above according to the schematic ofFIG. 7 . For example, the mastervacuum source valve 659 and the masterpressure source valve 653 are adapted to open in a mutually exclusive manner, preventing the simultaneous application of vacuum pressure and positive pressure to thebrace actuation conduit 621 and each bracingactuator 173. As well, the circuits between thefourth signal conductor 611 and the return orground conductor 683, and between thefifth signal conductor 613 and the return orground conductor 683, are incapable of being closed unless and until thebrace actuation conduit 621 is being exposed to vacuum pressure via the mastervacuum source valve 659, and thevacuum switch 651 is thereby closed (this permits switching from configuration E to configuration F, or vice versa, in the first pneumatic switching connector 665). Additionally, the thirdpneumatic switching connector 669 may not assume configuration D unless positive pressure is received at thepneumatic actuation mechanism 671, and the latter is not possible unless the firstpneumatic switching connector 665 is in configuration E as shown. Still further, thethird position switch 687, shown open inFIG. 7 , is normally closed, causing the secondpneumatic switching connector 667 to remain in configuration B (resulting in vacuum pressure being applied to thebrace actuation conduit 621 and the bracingmember 109 to remain in the transversely retracted position ofFIG. 3F ) until theclosure member 103 reaches the longitudinally deployed position ofFIG. 3D , at which time thethird position switch 687 opens, triggering the spring default of the secondpneumatic switching connector 667, and causing the secondpneumatic switching connector 667 to switch to configuration A. Other configurations/systems for controlling theinventive valve - The foregoing description discloses only exemplary embodiments of the invention. Modifications of the above disclosed apparatus and methods which fall within the scope of the invention will be readily apparent to those of ordinary skill in the art. For instance, according to one or more embodiments, pressure forces within the processing chamber P tending to push the sealing
portion 107 away from the processing chamber P may be opposed solely by bracing force generated by the bracingactuators 173. In other embodiments, the magnitude of the bracing force may be less than that required to oppose the pressure forces within the processing chamber P, and additional forces from other sources may be added thereto to maintain a seal against theprocessing chamber opening 102. - In at least one embodiment of the invention, the main body of the sealing
portion 107 may be formed from a metal, such as aluminum or the like. In such embodiments, the sealingportion 107 may include a resilient member 198 (FIG. 3E ) that contacts thefront plate 121 and prevents metal portions of the sealingportion 107 from contacting the front wall 121 (e.g., so as to prevent particle generation from metal-to-metal contact). Theresilient member 198 may include, for example, polyetheretherketone (PEEK) or another suitable material (e.g., in the form of an o-ring or similar sealing member). Likewise, in at least one embodiment, the main body of the bracingmember 109 may be formed from a metal, such as aluminum or another suitable metal, and include a resilient member 199 (FIG. 3E ) that contacts the back plate 119 (to prevent particle generation from metal-to-metal contact). Theresilient member 199 may include, for example, polyetheretherketone (PEEK) or another suitable material (e.g., in the form of an o-ring or similar sealing member). It will be understood that as used herein, the sealingportion 107 may be said to contact thefront plate 121 if itsresilient member 198 or any other portion of the sealingportion 107 contacts thefront plate 121. Likewise, the bracingmember 109 may be said to contact therear plate 119 if itsresilient member 199 or any other portion of the bracingmember 109 contacts therear plate 119. - In at least one embodiment of the invention, the
bellows 137 and/or theextensible wall portion 179 may be formed of stainless steel. Any other similar material may be employed. - Accordingly, while the present invention has been disclosed in connection with exemplary embodiments thereof, it should be understood that other embodiments may fall within the spirit and scope of the invention, as defined by the following claims.
Claims (20)
1. A slit valve adapted to seal an opening comprising:
a valve housing having:
a first wall;
a first opening formed in the first wall;
a second wall; and
a second opening formed in the second wall;
a closure member having:
a sealing portion adapted to contact the second wall and seal the second opening; and
a bracing member moveable relative to the sealing portion and adapted to contact the first wall; and
at least one actuating mechanism adapted to:
move the sealing portion toward the second wall and into contact with the second wall; and
move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall.
2. The slit valve of claim 1 , wherein the at least one actuating mechanism includes an actuator that comprises a portion of the closure member and is disposed between the bracing member and the sealing portion.
3. The slit valve of claim 1 , wherein the sealing portion includes a resilient element adapted to contact and seal against the second wall.
4. The slit valve of claim 1 , wherein the bracing member includes a resilient element adapted to contact the first wall.
5. The slit valve of claim 1 , wherein the bracing member is adapted to assume a retracted transverse position within the sealing portion.
6. The slit valve of claim 1 , wherein the at least one actuating mechanism comprises a pneumatic actuator adapted to be selectably activated via positive pressure and vacuum pressure.
7. The slit valve of claim 6 , wherein the pneumatic actuator is adapted to employ positive pressure to move the bracing member from a retracted transverse position against the sealing portion to a deployed transverse position against the first wall.
8. The slit valve of claim 6 , wherein the pneumatic actuator is adapted to employ vacuum pressure to move the bracing member from a deployed transverse position against the first wall to a retracted transverse position against the sealing member.
9. The slit valve of claim 1 , wherein the at least one actuating mechanism includes a pneumatic actuator comprising a pressure cell.
10. The slit valve of claim 9 , wherein a portion of the bracing member defines a boundary of the pressure cell.
11. The slit valve of claim 9 , wherein a portion of the sealing portion defines a boundary of the pressure cell.
12. The slit valve of claim 10 , wherein the at least one actuating mechanism further comprises a bellows, and wherein the bellows also defines a boundary of the pressure cell.
13. The slit valve of claim 12 , wherein the bracing member is coupled to the sealing portion via the bellows.
14. The slit valve of claim 13 , wherein no coupling between the bracing member and the sealing portion exists except via the bellows.
15. The slit valve of claim 12 , wherein the bellows is oriented such that an expansion of the pressure cell produces contraction of the bellows.
16. The slit valve of claim 12 , wherein the bracing member comprises a plate, and wherein the plate also defines a boundary of the pressure cell.
17. The slit valve of claim 16 , wherein the bracing member is adapted to assume a retracted transverse position away from the first wall such that the plate of the bracing member is within the sealing portion.
18. The slit valve of claim 16 , wherein the bracing member is adapted to assume a deployed transverse position against the first wall such that the plate of the bracing member remains within the sealing portion.
19. The slit valve of claim 1 , wherein the at least one actuating mechanism includes a first actuating mechanism that is external to the slit valve housing.
20. The slit valve of claim 19 , wherein the first actuating mechanism comprises a pneumatic actuator adapted to be activated via positive pressure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/480,615 US20060249701A1 (en) | 2003-05-13 | 2006-07-03 | Methods and apparatus for sealing an opening of a processing chamber |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47014003P | 2003-05-13 | 2003-05-13 | |
US10/844,974 US7086638B2 (en) | 2003-05-13 | 2004-05-12 | Methods and apparatus for sealing an opening of a processing chamber |
US11/480,615 US20060249701A1 (en) | 2003-05-13 | 2006-07-03 | Methods and apparatus for sealing an opening of a processing chamber |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/844,974 Continuation US7086638B2 (en) | 2003-05-13 | 2004-05-12 | Methods and apparatus for sealing an opening of a processing chamber |
Publications (1)
Publication Number | Publication Date |
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US20060249701A1 true US20060249701A1 (en) | 2006-11-09 |
Family
ID=33452371
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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US10/844,974 Expired - Lifetime US7086638B2 (en) | 2003-05-13 | 2004-05-12 | Methods and apparatus for sealing an opening of a processing chamber |
US11/480,615 Abandoned US20060249701A1 (en) | 2003-05-13 | 2006-07-03 | Methods and apparatus for sealing an opening of a processing chamber |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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US10/844,974 Expired - Lifetime US7086638B2 (en) | 2003-05-13 | 2004-05-12 | Methods and apparatus for sealing an opening of a processing chamber |
Country Status (6)
Country | Link |
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US (2) | US7086638B2 (en) |
JP (2) | JP2006526125A (en) |
KR (1) | KR100914087B1 (en) |
CN (1) | CN100408902C (en) |
TW (1) | TWI283428B (en) |
WO (1) | WO2004102055A1 (en) |
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US11231114B2 (en) * | 2020-06-11 | 2022-01-25 | King Lai Hygienic Materials Co., Ltd | Valve member driving device capable of bidirectional movement |
Also Published As
Publication number | Publication date |
---|---|
KR20050121750A (en) | 2005-12-27 |
JP2006526125A (en) | 2006-11-16 |
JP2010281446A (en) | 2010-12-16 |
JP5592166B2 (en) | 2014-09-17 |
KR100914087B1 (en) | 2009-08-27 |
TWI283428B (en) | 2007-07-01 |
US20040245489A1 (en) | 2004-12-09 |
CN1788175A (en) | 2006-06-14 |
TW200507021A (en) | 2005-02-16 |
CN100408902C (en) | 2008-08-06 |
US7086638B2 (en) | 2006-08-08 |
WO2004102055A1 (en) | 2004-11-25 |
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