TWM538094U - Miniature fluid control device - Google Patents

Description

Microfluidic control device

This case relates to a microfluidic control device, especially a miniature ultra-thin and silent microfluidic control device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power, such as sphygmomanometers, or portable, wearable instruments or equipment, are usually equipped with conventional motors and pneumatic valves. Achieve the purpose of its fluid transport. However, limited by the volume limitations of conventional motors and fluid valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and fluid valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

As shown in Fig. 6, it is a schematic sectional enlarged structure of a conventional microfluidic control device. The microfluidic control device 1' has a gas collecting plate 11', a piezoelectric actuator 12', a rubber layer 13' and a base 14', which are sequentially stacked and assembled. The base 14' includes an air inlet plate 141. 'and a resonant plate 142', the air inlet plate 141' has an air inlet hole 143' corresponding to a bus bar hole 144' to form a bustling chamber 145', and the resonant plate 142' has A hollow bore 146' is provided corresponding to the confluence chamber 145'. The piezoelectric actuator 12' is composed of a suspension plate 121' and a frame 122', at least one bracket 123' and a piezoelectric ceramic plate 124' are assembled together, and a gap h0' is formed between the resonator piece 142' and the outer frame 122' of the piezoelectric actuator 12'. And the gap layer 13' is filled in the gap ho' to form a compression chamber 10' between the resonator piece 142' and the piezoelectric actuator 12'. The gas collecting plate 11' has a first through hole 111' and covers the piezoelectric actuator 12'. The conventional microfluidic control device 1' is bent and deformed by the vertical reciprocating vibration of the suspension plate 121' of the piezoelectric actuator 12' to control the flow of fluid from the intake hole 143' into the busbar hole 144. ', and directing the confluence to the confluence chamber 145', and then transferring it to the compression chamber 10', through the compression compression of the compression chamber 10', so that the fluid from the first through hole 111 of the gas collection plate 11' 'Exhaust to achieve a certain pressure on the output. Moreover, in the conventional microfluidic control device 1' structure, the suspension plate 121', the outer frame 122' and the bracket 123' are integrally formed of a metal plate, and the depth h' required for the compression chamber 10' is obtained. The piezoelectric actuator 12' is subjected to a plurality of etching processes to form a height of the outer frame 122', so that a concave stepped space is formed between the outer frame 122' and the suspension plate 121', and then disposed on the outer frame 122 through the foregoing. The glue layer 13' between the 'and the resonator piece 142' coats the gap h0' between the outer frame 122' and the resonance piece 142, and further maintains the depth h' required by the compression chamber 10' to allow the suspension plate 121 'Keep the proper distance from the resonator 142' and reduce the contact interference with each other.

However, a recessed step space is formed between the outer frame 122' and the suspension plate 121', and the glue layer 13' is formed to fill the gap h0' disposed between the outer frame 122' and the resonance piece 142'. In order to maintain the required depth h' of the compression chamber 10', the suspension plate 121' can be kept at an appropriate distance from the resonance plate 142' and the contact interference is reduced, but the outer frame 122' is a metal material. , having a certain rigidity, the conventional method is to maintain the height of the frame 122' outside the height of the stepped step and combine with the glue layer 13' between the resonator pieces 142', but for this part, it is 2/3 high. The metal frame 122' is matched with a 1/3-high glue layer 13' to achieve the depth h' required for the compression chamber 10'. The configuration is not only rigid, but the suspension plate 121' is in the vertical direction. When vibrating, it is unable to effectively absorb other interference vibrations generated during vibration, which causes energy loss, and there is also a problem of increased noise, which is one of the causes of product defects.

Therefore, how to develop a microfluidic control device that can improve the above-mentioned conventional technology and make the instrument or device using the conventional fluid control device small, miniaturized and muted, thereby achieving a portable and portable purpose, is There is an urgent need to solve the problem.

The main purpose of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device. The suspension plate, the outer frame and the bracket of the piezoelectric actuator are integrally formed into a metal plate structure, and the same through the same Deeply etching the convex portion of the suspension plate and the required shape of the bracket, so that the second surface of the outer frame, the second surface of the bracket and the second surface of the suspension plate are all coplanar structures, which can simplify the need for the outer frame in the past. Multiple etching processes are performed at different depths, and at the same time, through the adhesive layer disposed between the outer frame and the resonant plate, the rough surface generated by the outer frame after etching is applied, so that the bonding strength between the adhesive layer and the outer frame can be increased. Moreover, since the thickness of the outer frame is lower than that of the prior art, the thickness of the adhesive layer applied to the gap is increased, and the thickness of the adhesive layer is increased, thereby improving the unevenness of the coating of the adhesive layer and reducing the unevenness. The assembly error in the horizontal direction when the suspension plate is assembled, and the kinetic energy utilization efficiency of the vertical direction of the suspension plate is improved, and the vibration energy is also absorbed, and the noise is reduced to achieve the effect of mute, and the micro-effect The piezoelectric actuator of the micro fluid allows more control of the entire apparatus is reduced volume and thickness, to achieve a lightweight portable object Comfort.

Another object of the present invention is to provide a design of a suspension plate square type of a piezoelectric actuator and a more convex portion of the suspension plate, so that the fluid can flow from the air inlet hole of the air inlet plate of the base and be connected along the phase. The bus bar hole and the confluence chamber flow, and pass through the hollow hole of the resonance piece to cause a pressure gradient in the compression chamber formed between the resonance piece and the piezoelectric actuator, thereby causing the fluid to flow at a high speed, and the flow rate of the fluid is not Will reduce, there will be no pressure loss, and can continue to pass to achieve higher discharge pressure.

To achieve the above object, a broader aspect of the present invention provides a microfluidic control device comprising: a piezoelectric actuator having a suspension plate, an outer frame, at least one bracket, and a piezoelectric a ceramic plate, the suspension plate is of a square shape, and has a first surface and a corresponding second surface, and the second surface has a convex portion, the outer frame is disposed around the outer side of the suspension plate, and The first surface and the corresponding second surface are also disposed, and the second surface of the outer frame and the outer surface of the second surface of the suspension plate are coplanar, the at least one bracket Connected between the suspension plate and the outer frame, the piezoelectric ceramic plate has a side length not greater than a side length of the suspension plate, attached to the first surface of the suspension plate; and a casing including an episode a gas plate and a base, the gas collecting plate has a side wall at the periphery to form a frame structure of the accommodating space, the piezoelectric actuator is disposed in the accommodating space, and the pedestal is provided by an air absorbing plate And a resonant piece joined to the accommodating space of the gas collecting plate to close the piezoelectric actuator, the air inlet plate having at least one air inlet hole and at least one communicating therewith Bus holes are arranged to form a bustling chamber, and the resonator piece is fixedly fixed to the air inlet plate. Having a hollow hole opposite to the confluence chamber of the air inlet plate and corresponding to the protrusion of the suspension plate; wherein the second surface of the piezoelectric actuator outer frame and the base are resonant A glue layer is disposed between the sheets to maintain a depth of the compression chamber between the piezoelectric actuator and the resonant plate of the base.

1', 1‧‧‧ microfluidic control device

1a‧‧‧shell

14', 10‧‧‧ base

141', 11‧‧‧ air intake panels

11a‧‧‧ second surface of the air inlet plate

11b‧‧‧ first surface of the air inlet plate

143', 110‧‧‧ intake holes

145', 111‧‧ ‧ confluence chamber

144', 112‧‧ ‧ bus bar holes

142', 12‧‧‧ Resonant

12a‧‧‧movable department

12b‧‧‧Fixed Department

146', 120‧‧‧ hollow holes

10', 121‧‧‧ compression chamber

12', 13‧‧ Piezoelectric actuators

121’, 130‧‧‧suspension plate

130a‧‧‧Second surface of the suspension plate

130b‧‧‧The first surface of the suspension plate

130c‧‧‧ convex

130d‧‧‧ Central Department

130e‧‧‧The outer part

122’, 131‧‧‧ frame

131a‧‧‧ second surface of the outer frame

131b‧‧‧ first surface of the outer frame

123’, 132‧‧‧ bracket

132a‧‧‧Second surface of the stent

132b‧‧‧ first surface of the bracket

124', 133‧‧‧ Piezoelectric ceramic plates

134, 151‧‧‧ conductive pins

135‧‧‧ gap

13’, 136‧‧ ‧ layers

141, 142‧‧‧ insulating sheet

15‧‧‧Conductor

11', 16‧‧ ‧ gas collecting plate

16a‧‧‧ accommodating space

160‧‧‧ surface

161‧‧‧ reference surface

162‧‧‧Gas chamber

111', 163‧‧‧ first through hole

164‧‧‧Second through hole

165‧‧‧First pressure relief chamber

166‧‧‧First out of the chamber

167‧‧‧ convex structure

168‧‧‧ side wall

H0’, h‧‧‧ gap

H’‧‧·depth of the compression chamber

Fig. 1A is a front exploded view showing the microfluidic control device of the preferred embodiment of the present invention.

Fig. 1B is a schematic view showing the front combined structure of the microfluidic control device shown in Fig. 1A.

Fig. 2A is a schematic exploded view showing the back side of the microfluidic control device shown in Fig. 1A.

Fig. 2B is a schematic view showing the structure of the back side of the microfluidic control device shown in Fig. 2A.

Fig. 3A is a front view showing the structure of a piezoelectric actuator of the microfluidic control device shown in Fig. 1A.

Fig. 3B is a schematic view showing the structure of the back surface of the piezoelectric actuator of the microfluidic control device shown in Fig. 1A.

Fig. 3C is a schematic cross-sectional view showing the piezoelectric actuator of the microfluidic control device shown in Fig. 1A.

4A to 4E are schematic views showing a partial operation of the microfluidic control device shown in Fig. 1A.

Fig. 5 is a schematic enlarged cross-sectional view showing the microfluidic control device shown in Fig. 1B.

Figure 6 is a schematic enlarged cross-sectional view of a conventional microfluidic control device.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The microfluidic control device 1 of the present invention can be applied to industries such as medical technology, energy, computer technology or printing, and is used for conveying fluids, but not limited thereto. Please refer to FIG. 1A, FIG. 1B, FIG. 2A and FIG. 2B. FIG. 1A is a front exploded view of the microfluidic control device of the preferred embodiment of the present invention, and FIG. 1B is a microfluid shown in FIG. 1A. FIG. 2A is a schematic view showing the back side exploded structure of the microfluidic control device shown in FIG. 1A, and FIG. 2B is a schematic view showing the back combined structure of the microfluidic control device shown in FIG. 2A, FIG. The figure shows an enlarged cross-sectional structural view of the microfluidic control device shown in Fig. 1B. As shown in FIG. 1A and FIGS. 2A and 5, the microfluidic control device 1 of the present invention has a housing 1a, a piezoelectric actuator 13, insulating sheets 141, 142, and a conductive sheet 15, and the like. 1a includes a gas collecting plate 16 and a base 10, and the base 10 includes an air inlet plate 11 and a resonance piece 12, but is not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance piece 12, and the air intake plate 11, the resonance piece 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are provided. 16 and the like are sequentially stacked, and the piezoelectric actuator 13 is assembled from a suspension plate 130 and a piezoelectric ceramic plate 133. In the present embodiment, as shown in FIGS. 1A and 5, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 at the periphery, and the side wall 168 formed by the periphery. An accommodating space 16a is defined in the bottom plate for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. As also mentioned above, the gas collecting plate 16 of the present embodiment has a surface 160 which is recessed to form a gas collecting chamber 162 which is controlled by a microfluidic device. The first transfer hole 163 and the second through hole 164 are respectively disposed in the gas collection plate 16 and are disposed in the gas collection chamber 162. One end is in communication with the plenum chamber 162, and the other end is in communication with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16, respectively. And a protrusion structure 167 is further added to the first outlet chamber 166, for example, but not limited to a cylindrical structure.

As shown in FIG. 2A, the piezoelectric actuator 13 includes a piezoelectric ceramic plate 133, a suspension plate 130, an outer frame 131, and at least one bracket 132, wherein the piezoelectric ceramic plate 133 has a square plate-like structure and has sides thereof. The length is not greater than the side length of the suspension plate 130 and may be attached to the suspension plate 130. In the present embodiment, the suspension plate 130 is a flexible square plate-like structure; the outer frame 131 is disposed around the outer side of the suspension plate 130, and the shape of the outer frame 131 also substantially corresponds to the shape of the suspension plate 130. In the present embodiment, the outer frame 131 is also a square hollow frame structure; and the suspension plate 130 and the outer frame 131 are connected by a bracket 132 and provide elastic support. As shown in FIG. 1A and FIG. 2A, the microfluidic control device 1 of the present invention may further include an insulating sheet 14 and a conductive sheet 15 and the like. The insulating sheet 14 may be two insulating sheets 141 and 142, and the two insulating layers. The sheets 141 and 142 are provided with the conductive sheets 15 interposed therebetween. When the microfluidic control device 1 of the present invention is assembled, as shown in FIG. 1A, FIG. 1B, FIG. 2A and FIG. 2B, the insulating sheet 142, the conductive sheet 15, the insulating sheet 141, and the piezoelectric actuator are sequentially actuated. The structure of the device 13 and the base 10 is assembled and accommodated in the accommodating space 16a in the gas collecting plate 16, and the combination is as shown in FIG. 1B and FIG. 2B, and can form a miniature and miniaturized shape. Fluid control device 1.

Referring to FIGS. 1A and 2A, the air intake plate 11 of the microfluidic control device 1 has a first surface 11b, a second surface 11a, and at least one air inlet 110. In this embodiment, the air intake The number of the holes 110 is four, but not limited thereto, which is through the first surface 11b and the second surface 11a of the air inlet plate 11, and is mainly used for the gas to comply with the atmospheric pressure from the outside of the device. At least one intake port 110 flows into the microfluidic control device 1. And as shown in FIG. 2A, the first surface 11b of the air inlet plate 11 is visible, and has at least one bus bar hole 112 for the at least one air inlet hole 110 of the second surface 11a of the air inlet plate 11. Corresponding settings. At the center of the bus bar 112, there is a confluence The chamber 111 and the confluence chamber 111 are in communication with the bus bar hole 112, whereby the gas entering the bus bar hole 112 from the at least one air inlet hole 110 can be guided and concentrated to be transferred to the confluence chamber 111. In this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112, and a confluence chamber 111. When the air inlet plate 11 is assembled with the resonance plate 12, the confluence chamber is assembled. The 111 system can correspond to a chamber that constitutes a temporary storage of fluid. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and the thickness thereof is between 0.4 mm and 0.6 mm, and the preferred value is 0.5 mm. Not limited to this. In other embodiments, the depth of the confluence chamber formed by the confluence chamber 111 is the same as, but not limited to, the depth of the bus bar holes 112.

In this embodiment, the resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12 corresponding to the first surface 11b of the air inlet plate 11. The confluence chamber 111 is provided to allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but not limited thereto, and the thickness thereof is between 0.03 mm and 0.08 mm, and the preferred value is 0.05 mm. Not limited to this.

Further, as shown in FIGS. 4A and 5, the resonator piece 12 and the piezoelectric actuator 13 have a gap h, which is outside the resonator piece 12 and the piezoelectric actuator 13 in this embodiment. A gap 136 is filled in the gap h between the frames 131, for example, a conductive paste, but not limited thereto, so that the gap h can be maintained between the resonator piece 12 and the suspension plate 130 of the piezoelectric actuator 13. The depth, in turn, can direct the airflow to flow more rapidly; and, in response to the depth of the gap h, the compression chamber 121 can be formed between the resonator piece 12 and the piezoelectric actuator 13, and the hollow of the resonator plate 12 can be transmitted. The holes 120 direct the fluid to flow more rapidly between the chambers, and because the suspension plates 130 are kept at an appropriate distance from the resonator plates 12, the mutual contact interference is reduced, and the noise generation can be reduced.

In addition, referring to FIG. 1A and FIG. 2A, the microfluidic control device 1 further includes an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142, which are sequentially sandwiched between the piezoelectric actuators. 13 is interposed between the gas collecting plate 16 and its shape substantially corresponds to the shape of the outer frame 131 of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic. Glue, but not limited to, for insulation; in other embodiments, the conductive sheet 15 is made of an electrically conductive material, such as metal, but not limited thereto, for electrical conduction. use. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, which are schematic diagrams of the front structure, the back structure and the cross-sectional structure of the piezoelectric actuator of the microfluidic control device shown in FIG. 1A, respectively. As shown, the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133. In this embodiment, the suspension plate 130 and the outer frame are assembled. The 131 and the bracket 132 are integrally formed, and may be formed by a metal plate, for example, may be made of stainless steel, but not limited thereto, so that the piezoelectric actuator 13 of the microfluidic control device 1 of the present invention is That is, the piezoelectric ceramic plate 133 is bonded to the metal plate, but not limited thereto. As shown, the suspension plate 130 has a first surface 130b and a corresponding second surface 130a, wherein the piezoelectric ceramic plate 133 is attached to the first surface 130b of the suspension plate 130 for applying a voltage to drive the The suspension plate 130 is bent and vibrated. As shown in FIG. 3A, the suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 131 is driven by a voltage, the suspension plate 130 can be flexed and vibrated from the central portion 130d to the outer peripheral portion 130e: the outer frame 131 The outer periphery of the suspension plate 130 is disposed on the outer side of the suspension plate 130, and has an outwardly protruding conductive pin 134 for power connection, but not limited thereto; and the at least one bracket 132 is connected to the suspension plate 130 and the outer portion. Between the frames 131 to provide elastic support. In this embodiment, one end of the bracket 132 is connected to the outer frame 131, and the other end is connected to the suspension plate 130, and further has at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131. The fluid is circulated, and the type and number of the suspension plate 130, the outer frame 131, and the bracket 132 have various changes.

As shown in FIG. 3A and FIG. 3C, the second surface 130a of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 132a of the bracket 132 are flat and planar, and the embodiment is taken as an example. The suspension plate 130 is a square structure, and each side of the suspension plate 130 is between 7.5 mm and 12 mm long, and preferably has a thickness of 7.5 mm to 8.5 mm, and a thickness of 0.1 mm to Between 0.4 mm, and its preferred value is 0.27 mm, but not limited thereto. The thickness of the outer frame is also between 0.1 mm and 0.4 mm, and the preferred value is 0.27 mm, but not limited thereto. And, the side length of the piezoelectric ceramic plate 131 is not larger than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, and the thickness of the piezoelectric ceramic plate 131 is 0.05 mm to Between 0.3mm, and its preferred value is 0.10mm, the design of the square suspension plate 130 used in the present case is due to the piezoelectric suspension of the conventional piezoelectric actuator. The square suspension plate 130 of the actuator 13 obviously has the advantage of power saving, and the comparison of the power consumption is as shown in Table 1 below:

Therefore, it is known from the above table that the square suspension plate length dimension (8mm to 10mm) of the piezoelectric actuator is smaller than the circular suspension plate diameter of the piezoelectric actuator (8mm to 10mm). More power-saving, the reason for its power saving can be presumed as: due to the capacitive load operating at the resonant frequency, its power consumption will increase with the increase of frequency, and the resonant frequency of the square suspension plate 130 designed by the side length is significantly higher. The same diameter circular suspension plate is low, so its relative power consumption is also significantly lower, that is, the square design of the suspension plate 130 used in this case is more economical than the previous circular suspension plate design. The microfluidic control device 1 adopts the ultra-thin and quiet design trend, and can achieve the effect of low power consumption design, especially for wearing devices, and saving power is a very important design focus.

As described above, in the present embodiment, the suspension plate 130, the outer frame 131, and the bracket 132 may be integrally formed, but not limited thereto, and the manufacturing method may be conventional processing, or yellow. Photolithography, laser processing, electroforming, or electrical discharge machining are not limited to this. In this embodiment, the suspension plate 130, the outer frame 131, and the bracket 132 of the piezoelectric actuator 13 of the present invention are integrally formed, that is, a metal plate, and the outer frame 131 and the bracket 132 are The suspension plate 130 is etched at the same depth, so that the second surface 131a of the outer frame 131, the second surface 132a of the bracket 132, and the second surface 130a of the suspension plate 130 are all coplanar; through the same depth of etching The process can simplify the etching process in the past according to the different depths of the outer frame 131, and at the same time, through the rubber layer 136 disposed between the outer frame 131 and the resonant plate 12, the outer frame 131 is applied after etching. The rough surface is such that the bonding strength between the adhesive layer and the outer frame can be increased, and since the thickness of the outer frame 131 is lower than that of the prior art, the thickness of the adhesive layer 136 coated with the gap h is increased. The thickness of the adhesive layer 136 is increased, which can effectively improve the unevenness of the coating of the adhesive layer 136, reduce the assembly error in the horizontal direction when the suspension plate 130 is assembled, and improve the kinetic energy utilization efficiency of the suspension plate 130 in the vertical direction, and at the same time, can assist absorption. vibration Volume, and reduce noise.

As shown in FIG. 3B, in the embodiment, the suspension plate 130 has a square shape and has a stepped surface structure, that is, a convex portion 130c is further disposed on the second surface 130a of the suspension plate 130. It is disposed on the central portion 130d of the second surface 130a, and may be, but is not limited to, a circular convex structure. In some embodiments, the height of the protrusion 130c is between 0.02 mm and 0.08 mm, preferably 0.03 mm, and the diameter is 4.4 mm, but not limited thereto.

Therefore, referring to FIG. 1A, FIG. 4A to FIG. 4E and FIG. 5, the base 10, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are shown. After being stacked and assembled in sequence, as shown in FIGS. 4A and 5, it can be seen that the microfluidic control device 1 can form a chamber for confluent gas together with the upper air inlet plate 11 at the hollow hole 120 of the resonant plate 12. That is, a chamber at the confluence chamber 111 of the first surface 11b of the air inlet plate 11, and a compression chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 for temporarily storing gas, and The compression chamber 121 communicates with the chamber at the confluence chamber 111 of the first surface 11b of the air inlet plate 11 through the hollow hole 120 of the resonator piece 12, and the piezoelectric actuator 13 is controlled to be driven by the microfluidic control device 1 hereinafter. The suspension plate 130 performs vertical reciprocation A partial schematic diagram of the state of operation of the vibration is illustrated.

As shown in FIG. 4B, when the suspension plate 130 that controls the driving of the piezoelectric actuator 13 performs vertical reciprocating vibration and the bending deformation is downwardly displaced, gas is generated from at least one air inlet hole on the air intake plate 11. The 110 enters and is collected by the at least one bus bar hole 112 of the first surface 11b to the central confluence chamber 111. At this time, the resonator piece 12 is a light and thin sheet-like structure due to the introduction of the fluid and The pressing and the vertical reciprocating vibration with the resonance of the suspension plate 130, that is, the movable portion 12a of the resonance piece 12 corresponding to the confluence chamber 111 is also bent and vibrated, as shown in FIG. 4C. The vertical reciprocating vibration of the suspension plate 130 is displaced to a position, so that the movable portion 12a of the resonant plate 12 can be very close to the convex portion 130c of the suspension plate 130, thereby allowing fluid to enter the passage of the compression chamber 121, in the suspension plate 130. When the distance between the region other than the convex portion 130c and the compression chamber 121 between the fixed portions 12b on both sides of the resonator piece 12 does not become small, the flow rate of the fluid flowing between them does not decrease or Produce pressure loss, so compress this more effectively The volume of the chamber 121 is as shown in FIG. 4D. When the piezoelectric actuator 13 continues to perform vertical reciprocating vibration and the bending deformation is upwardly displaced, the fluid in the compression chamber 121 can be pushed to the two. The side flows and flows downward through the gap 136 between the brackets 132 of the piezoelectric actuator 13 to obtain a higher discharge pressure, as shown in Fig. 4E, along with the piezoelectric actuator The convex portion 130c of the suspension plate 130 of 13 moves upward, and the movable portion 12a of the resonance piece 12 is also bent and vibrated upward, so that the volume at the confluence chamber 111 is compressed, and is in the bus bar hole 112. The fluid flows to the confluence chamber 111 to become small. Finally, when the suspension plate 130 of the piezoelectric actuator 13 continues to perform the vertical reciprocating vibration, the embodiment shown in Figs. 4B to 4E can be repeated. In this embodiment, it can be seen that the design of the suspension plate 130 of the piezoelectric actuator 13 having the convex portion 130c is applied to the microfluidic control device 1 of the present invention to achieve better fluid transmission efficiency, but the design of the convex portion 130c is The state, quantity and position may be changed according to the actual application situation, and are not limited thereto.

It can be seen from the above description that the microfluidic control device 1 of the present invention has a gap h between the resonator piece 12 and the outer frame 131 of the piezoelectric actuator 13, and a gap 136 can be disposed in the gap h, for example, conductive Glue, but not limited thereto, so that the resonance piece 12 and the convex portion of the suspension plate 130 of the piezoelectric actuator 13 A depth can be maintained between 130c, and since the second surface 131a of the outer frame 131 is coplanar with the second surface 130a of the suspension plate 130, the thickness of the gap can be filled by the gap h, in some embodiments. The thickness of the adhesive layer 136 is between 50 μm and 60 μm, and preferably 55 μm, but not limited thereto. Through the arrangement of the thickened adhesive layer 136, not only the depth of the gap h can be maintained, but also the airflow can be guided to flow more quickly in the compression chamber 121, and at the same time, the buffering action of the adhesive layer 136 can be used to assist absorption and slowdown. The vibration generated by the piezoelectric actuator 13 during operation reduces the noise, and at the same time, the depth of the gap h increases, and the convex portion 130c of the suspension plate 130 can be kept at an appropriate distance from the resonant plate 12 and the mutual contact interference can be reduced. It can reduce the noise.

In the microfluidic control device 1 of the present invention, the different thicknesses of the adhesive layer 136 will result in differences in the performance and defect rate of the microfluidic control device, and the data of each performance and defect rate are as shown in Table 2 below:

As is apparent from the data in Table 2, the thickness of the glue layer 136 can significantly affect the performance of the microfluidic control device 1. If the thickness of the glue layer 136 is too thick, although the gap h can maintain a relatively thick depth, it is due to the compression chamber 121. The depth becomes deeper and the volume becomes larger, and the performance of the compression operation will be deteriorated, so that the performance thereof will be degraded; however, if the thickness of the adhesive layer 136 is too thin, the depth of the gap h which can be provided is insufficient. However, the convex portion 130c of the suspension plate 130 and the resonance piece 12 are liable to contact each other, thereby deteriorating performance and generating noise, and the noise problem is also one of the causes of product defects. Therefore, in the embodiment of the present invention, the sampling of 25 microfluidic control devices 1 is performed, and the thickness of the adhesive layer 136 is between 50 μm and 60 μm. In this numerical interval, not only the performance is significantly improved, but also The defect rate is relatively low, and the preferred value is 55μm, the performance of the performance is better, and the defect rate is the most Low, but not limited to this.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be simultaneously upward or downward, which can be implemented according to actual conditions. Any change is not limited to the mode of operation shown in this embodiment.

In summary, the piezoelectric actuator provided in the present application is applied to a microfluidic control device, which comprises a housing and a piezoelectric actuator disposed in the housing, and the housing is collected by gas. The combination of the plate and the base is made by using the design of the suspension plate square shape of the piezoelectric actuator of the present invention and the action of the convex portion on the suspension plate, so that the fluid can flow from the air inlet hole of the air inlet plate of the base, and is connected along the connection. The flow through the bus bar and the confluence chamber flows through the hollow hole of the resonator to cause a pressure gradient in the compression chamber formed between the resonator and the piezoelectric actuator, thereby causing the fluid to flow at a high speed, and the flow of the fluid Will not reduce, no pressure loss, and can continue to transfer to achieve higher discharge pressure; and through the piezoelectric actuator suspension plate, frame, bracket as a one-piece metal plate structure, and through the same depth The convex portion of the suspension plate and the support type of the stent are etched, so that the second surface of the outer frame, the second surface of the bracket and the second surface of the suspension plate are all coplanar structures, which can simplify the past needs Multiple etching processes are performed at different depths of the frame, and at the same time, the adhesive layer disposed between the outer frame and the resonant plate is applied to the rough surface generated by the outer frame after etching, thereby increasing the gap between the adhesive layer and the outer frame. The bonding strength is reduced, and since the thickness of the outer frame is lower than that of the prior art, the thickness of the adhesive layer coating the gap is increased, and the thickness of the adhesive layer is increased, thereby improving the unevenness of the coating of the adhesive layer. The assembly error in the horizontal direction of the suspension plate assembly is reduced, and the kinetic energy utilization efficiency of the suspension plate in the vertical direction is improved, and the vibration energy is absorbed, and the noise is reduced to achieve the effect of mute, and the miniaturized piezoelectric actuator is further The overall volume of the microfluidic control device can be reduced and thinned to achieve the portable and portable purpose; therefore, the microfluidic control device of the present invention has great industrial utilization value and is applied according to law.

Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and it is intended to be protected as intended by the appended claims.

1‧‧‧Microfluidic control device

11‧‧‧Air intake plate

110‧‧‧Air intake

111‧‧‧Confluence chamber

112‧‧‧ Bus Bars

12‧‧‧Resonance film

12a‧‧‧movable department

12b‧‧‧Fixed Department

120‧‧‧ hollow holes

13‧‧‧ Piezoelectric Actuator

130‧‧‧suspension board

130a‧‧‧Second surface of the suspension plate

130b‧‧‧The first surface of the suspension plate

130c‧‧‧ convex

131‧‧‧Front frame

131a‧‧‧ second surface of the outer frame

133‧‧‧ Piezoelectric ceramic plate

132‧‧‧ bracket

135‧‧‧ gap

136‧‧‧ glue layer

16‧‧‧ gas collecting plate

160‧‧‧ surface

161‧‧‧ reference surface

162‧‧‧Gas chamber

163‧‧‧First through hole

164‧‧‧Second through hole

165‧‧‧First pressure relief chamber

166‧‧‧First out of the chamber

H‧‧‧ gap

Claims (13)

A microfluidic control device comprising: a piezoelectric actuator having a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate, the suspension plate being of a square shape and having a first surface and a phase Corresponding to one of the second surfaces, and the second surface has a convex portion, the outer frame is disposed on the outer side of the suspension plate, and has a first surface and a corresponding second surface, and the outer frame The second surface is coplanar with a region other than the convex portion of the second surface of the suspension plate, and the at least one bracket is connected between the suspension plate and the outer frame, and the piezoelectric ceramic plate has no a side of the suspension plate having a side length attached to the first surface of the suspension plate; and a casing comprising a gas collecting plate and a base, the gas collecting plate having a side wall at the periphery to form a cavity One of the frame structures is disposed such that the piezoelectric actuator is disposed in the accommodating space, and the base is formed by joining an air inlet plate and a resonance plate, and is coupled to the sump a space for closing the piezoelectric actuator, the air intake plate having at least one a vent hole and at least one bus bar hole communicating therewith to form a bus flow chamber, the resonator piece being fixedly fixed to the air absorbing plate and having a hollow hole opposite to the confluence chamber of the air inlet plate And corresponding to the convex portion of the suspension plate; wherein a second layer of the piezoelectric actuator outer frame and the resonant plate of the base are disposed with a glue layer to enable the piezoelectric actuator The resonance between the resonator plates of the base maintains a depth of one of the compression chambers. The microfluidic control device of claim 1, wherein the adhesive layer has a thickness of between 50 and 60 μm. The microfluidic control device of claim 2, wherein the adhesive layer has a thickness of 55 μm. The microfluidic control device of claim 1, wherein the suspension plate has a thickness of between 0.1 mm and 0.4 mm. The microfluidic control device of claim 1, wherein the outer frame has a thickness of between 0.1 mm and 0.4 mm. The microfluidic control device of claim 1, wherein the convex portion of the suspension plate The height is between 0.02 mm and 0.08 mm. The microfluidic control device according to claim 1, wherein the convex portion of the suspension plate has a circular convex structure and has a diameter of 4.4 mm. The microfluidic control device of claim 1, wherein the piezoelectric ceramic plate has a thickness of between 0.05 mm and 0.3 mm. The microfluidic control device of claim 8, wherein the piezoelectric ceramic plate has a thickness of 0.10 mm. The microfluidic control device of claim 1, wherein the suspension plate has a length between 7.5 mm and 12 mm and a thickness between 0.1 mm and 0.4 mm. The microfluidic control device of claim 10, wherein the suspension plate has a length of between 7.5 mm and 8.5 mm on each side and a thickness of 0.27 mm. The microfluidic control device of claim 1, wherein the suspension plate, the outer frame and the at least one bracket are integrally formed. The microfluidic control device of claim 12, wherein the suspension plate, the outer frame and the bracket are formed by etching at the same depth, so that the second surface of the outer frame and the suspension are The regions outside the convex portion of the second surface of the plate are coplanar.