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TWI829777B - Structure, solid imaging element and image display device - Google Patents

Structure, solid imaging element and image display device Download PDF

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TWI829777B
TWI829777B TW108136260A TW108136260A TWI829777B TW I829777 B TWI829777 B TW I829777B TW 108136260 A TW108136260 A TW 108136260A TW 108136260 A TW108136260 A TW 108136260A TW I829777 B TWI829777 B TW I829777B
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pixels
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TW202024246A (en
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尾田和也
澤村泰弘
森全弘
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日商富士軟片股份有限公司
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    • G02OPTICS
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    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • GPHYSICS
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    • G02B5/00Optical elements other than lenses
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    • C08K5/16Nitrogen-containing compounds
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    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • HELECTRICITY
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    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
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    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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Abstract

在具有以彼此接觸之狀態二維配置之2個像素之結構體中,上述2個 像素各自含有顏料、400~700nm的波長區域中的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下之顏料衍生物及樹脂。又,本發明關於一種具有上述結構體之固體攝像元件及圖像顯示裝置。 In a structure having two pixels two-dimensionally arranged in contact with each other, each of the two pixels contains a pigment, and the maximum value of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm is 3000L‧mol -1 ‧cm -Pigment derivatives and resins below 1 . Furthermore, the present invention relates to a solid-state imaging device and an image display device having the above-mentioned structure.

Description

結構體、固體攝像元件及圖像顯示裝置 Structure, solid imaging element and image display device

本發明關於一種具有複數個像素之結構體、固體攝像元件及圖像顯示裝置。 The present invention relates to a structure having a plurality of pixels, a solid-state imaging element, and an image display device.

以往,在電荷耦合元件(CCD)圖像感測器等固體攝像元件和液晶顯示裝置等圖像顯示裝置中,對圖像著色時使用濾色器。 Conventionally, color filters have been used to color images in solid-state imaging devices such as charge-coupled device (CCD) image sensors and image display devices such as liquid crystal display devices.

通常,濾色器藉由如下方式而形成:針對與各種顏色對應之每個像素,形成由含有顏料或染料之感光性組成物構成之膜,並進行曝光、顯影及加熱等,使該膜硬化成圖案狀。例如,專利文獻1中記載有使用將特定的三

Figure 108136260-A0305-02-0002-135
化合物和顏料分散於有機溶劑中而成之各種顏色的著色感光性組成物形成濾色器的技術。 Generally, color filters are formed by forming a film of a photosensitive composition containing a pigment or dye for each pixel corresponding to each color, and then hardening the film by exposing, developing, heating, etc. Patterned. For example, Patent Document 1 describes the use of three specific
Figure 108136260-A0305-02-0002-135
A technology that forms color filters using colored photosensitive compositions of various colors in which compounds and pigments are dispersed in organic solvents.

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Document]

[專利文獻1]日本特開2003-081972號公報 [Patent Document 1] Japanese Patent Application Publication No. 2003-081972

近年來,研究了如下內容:使用近紅外線透過濾波器或近紅外線截止濾波器等紅外線濾波器(IR濾波器)及除了上述濾色器以外還使用IR濾波器。例如,近紅外線透過濾波器用於進行紅外線感測或生成紅外線圖像,近紅外線截止濾波器用於切割熱射線。 In recent years, studies have been conducted on the use of infrared filters (IR filters) such as near-infrared ray transmission filters and near-infrared ray cutoff filters, and the use of IR filters in addition to the above-mentioned color filters. For example, near-infrared pass filters are used for infrared sensing or generating infrared images, and near-infrared cutoff filters are used for cutting heat rays.

此番,發現了如下問題:在包含如上所述之濾色器和IR濾波器(以下,將該等總稱為“濾光器”。)之結構體中,在像素的深層部且2個像 素彼此接觸之部分有可能隨時間而形成空隙。若存在該種空隙,則濾光器的光學特性可能會劣化。因此,期望將像素深層部的穩定性提高至不會隨時間形成空隙的程度。 This time, the following problem was discovered: In a structure including a color filter and an IR filter as described above (hereinafter, these are collectively referred to as "filters"), in the deep part of the pixel and the two images Gaps may form over time where the elements are in contact with each other. If such a gap exists, the optical characteristics of the filter may be deteriorated. Therefore, it is desired to improve the stability of the deep portion of the pixel to an extent that voids are not formed over time.

本發明係鑑於上述課題而完成者,其目的在於提供一種像素深層部的穩定性優異之結構體。 The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a structure having excellent stability in deep portions of pixels.

又,本發明的目的在於提供一種具有上述結構體之固體攝像元件及圖像顯示裝置。 Furthermore, an object of the present invention is to provide a solid-state imaging device and an image display device having the above-mentioned structure.

上述課題能夠藉由使用透明的顏料衍生物來解決。具體而言,藉由以下方法<1>、較佳為<2>~<11>來解決上述課題。 The above problems can be solved by using transparent pigment derivatives. Specifically, the above problems are solved by the following methods <1>, preferably <2>~<11>.

<1> <1>

一種結構體,其具有以彼此接觸之狀態二維配置之2個像素,2個像素各自含有顏料、400~700nm的波長區域中的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下之顏料衍生物及樹脂。 A structure having two pixels two-dimensionally arranged in contact with each other. Each of the two pixels contains a pigment and the maximum value of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm is 3000L‧mol -1 ‧cm - Pigment derivatives and resins below 1 .

<2> <2>

如<1>所述之結構體,其中上述2個像素中的至少一個像素的寬度為0.3~5.0μm。 The structure as described in <1>, wherein the width of at least one of the above two pixels is 0.3~5.0 μm.

<3> <3>

如<1>或<2>所述之結構體,其中上述2個像素中的至少一個像素的厚度為0.1~2.0μm。 The structure as described in <1> or <2>, wherein the thickness of at least one of the two pixels is 0.1~2.0 μm.

<4> <4>

如<1>至<3>中任一項所述之結構體,其中 上述2個像素中的至少一個像素中所含有之顏料和顏料衍生物的合計含量為25~65質量%。 A structure as described in any one of <1> to <3>, where The total content of pigments and pigment derivatives contained in at least one of the two pixels is 25 to 65 mass %.

<5> <5>

如<1>至<4>中任一項所述之結構體,其中上述2個像素中的至少一個像素中所含有之顏料衍生物的含量與相同像素中所含有之顏料的含量的質量比率為3:97~20:80。 The structure as described in any one of <1> to <4>, wherein the mass ratio of the content of the pigment derivative contained in at least one of the two pixels to the content of the pigment contained in the same pixel It is 3:97~20:80.

<6> <6>

如<1>至<5>中任一項所述之結構體,其中顏料衍生物中的至少一種包含芳香族環。 The structure according to any one of <1> to <5>, wherein at least one of the pigment derivatives contains an aromatic ring.

<7> <7>

如<6>所述之結構體,其中顏料衍生物中的至少一種包含由下述式(A1)表示之基團,

Figure 108136260-A0305-02-0004-160
The structure according to <6>, wherein at least one of the pigment derivatives contains a group represented by the following formula (A1),
Figure 108136260-A0305-02-0004-160

式中,*表示鍵結鍵,Ya1及Ya2分別獨立地表示-N(Ra1)-或-O-,Ra1表示氫原子、烷基、烯基、炔基或芳基,B1及B2分別獨立地表示氫原子或取代基。 In the formula, * represents a bond, Ya 1 and Ya 2 independently represent -N(Ra 1 )- or -O-, Ra 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and B 1 and B 2 each independently represent a hydrogen atom or a substituent.

<8> <8>

如<1>至<7>中任一項所述之結構體,其中 上述2個像素為包含彼此不同之顏料之像素,上述2個像素各自為選自紅色像素、綠色像素、藍色像素、黃色像素、青色像素、品紅色像素、黑色像素、白色像素、近紅外線截止濾波器用像素及近紅外線透過濾波器用像素中的1個像素。 A structure as described in any one of <1> to <7>, wherein The above two pixels are pixels containing different pigments. The above two pixels are each selected from the group consisting of red pixels, green pixels, blue pixels, yellow pixels, cyan pixels, magenta pixels, black pixels, white pixels, and near-infrared cutoff. One pixel among the filter pixels and the near-infrared ray transmitting filter pixel.

<9> <9>

如<1>至<8>中任一項所述之結構體,其在上述2個像素之間還具有比2個像素的厚度更低的間隔壁。 The structure according to any one of <1> to <8>, further having a partition wall between the two pixels that is lower than the thickness of the two pixels.

<10> <10>

一種固體攝像元件,其在半導體基板上具有<1>至<9>中任一項所述之結構體。 A solid-state imaging element having the structure according to any one of <1> to <9> on a semiconductor substrate.

<11> <11>

一種圖像顯示裝置,其在玻璃基板上具有<1>至<9>中任一項所述之結構體。 An image display device having the structure according to any one of <1> to <9> on a glass substrate.

依本發明,可獲得像素深層部的穩定性優異之結構體。而且,依本發明的結構體,能夠提供一種本發明的固體攝像元件及圖像顯示裝置。 According to the present invention, a structure excellent in stability in the deep portion of the pixel can be obtained. Furthermore, according to the structure of the present invention, it is possible to provide the solid-state imaging device and the image display device of the present invention.

1:支撐體 1:Support

2:間隔壁 2: partition wall

P1~P4:像素 P1~P4: pixels

R:容易產生空隙之區域 R: Areas prone to voids

S1~S3:結構體 S1~S3: structure

SIR:近紅外線截止濾波器 SIR: Near infrared cut filter

圖1的a)~c)係表示包括2色型濾色器之結構體之概要圖。 a) to c) in Figure 1 are schematic diagrams showing a structure including a two-color color filter.

圖2的a)~c)係表示包括3色型濾色器之結構體之概要圖。 Figure 2 a) to c) are schematic diagrams showing a structure including a three-color color filter.

圖3的a)~e)係表示包括3色型濾色器及IR濾波器之結構體之概要圖。 a) to e) in Figure 3 are schematic diagrams showing a structure including a three-color color filter and an IR filter.

以下,對本發明的主要實施形態進行說明。然而,本發明並不限於已闡明之實施形態。 Hereinafter, main embodiments of the present invention will be described. However, the present invention is not limited to the illustrated embodiments.

本說明書中,使用“~”符號表示之數值範圍係指包含記載於“~”的前後之數值而分別作為下限值及上限值之範圍。 In this specification, the numerical range represented by the "~" symbol refers to the range including the numerical values before and after the "~" as the lower limit and the upper limit respectively.

在本說明書中,“製程”這一詞不僅包括獨立的製程,只要能夠實現該製程的預期作用,則亦包括無法與其他製程明確區別之製程。 In this specification, the term "process" not only includes independent processes, but also includes processes that cannot be clearly distinguished from other processes as long as the expected effects of the process can be achieved.

對於本說明書中之基團(原子團)的標記,未記載有經取代及未經取代之標記係指包含不具有取代基之基團,並且還包含具有取代基之基團。例如,在僅記載為“烷基”之情況下,這意味著包含不具有取代基之烷基(未經取代之烷基)及具有取代基之烷基(經取代之烷基)這兩者。 Regarding the labels for groups (atomic groups) in this specification, labels that do not describe substituted or unsubstituted means that they include groups that do not have a substituent and also include groups that have a substituent. For example, when only "alkyl" is described, this means that both an alkyl group having no substituent (unsubstituted alkyl group) and an alkyl group having a substituent (substituted alkyl group) are included. .

關於本說明書中的“曝光”,除非另有指明,則係指不僅包含使用光之描繪,亦包含使用電子束、離子束等粒子束之描繪。又,作為用於曝光之能量射線,通常可列舉水銀燈的明線光譜、準分子雷射為代表之遠紫外線、極紫外線(EUV光)及X射線等光化射線、以及電子束及離子射線等粒子束。 "Exposure" in this specification includes not only drawing using light but also drawing using particle beams such as electron beams and ion beams, unless otherwise specified. In addition, energy rays used for exposure generally include the bright line spectrum of a mercury lamp, actinic rays such as far ultraviolet rays, extreme ultraviolet rays (EUV light), and X-rays represented by excimer lasers, as well as electron beams and ion rays. particle beam.

在本說明書中,“(甲基)丙烯酸酯”係指“丙烯酸酯”及“甲基丙烯酸酯”這兩者或任一者,“(甲基)丙烯酸”係指“丙烯酸”及“甲基丙烯酸”這兩者或任一者,“(甲基)丙烯醯基”係指“丙烯醯基”及“甲基丙烯醯基”這兩者或任一者。 In this specification, "(meth)acrylate" means both or either "acrylate" and "methacrylate", and "(meth)acrylic acid" means "acrylic acid" and "methacrylate". "Acrylic acid" means both or any one of them, and "(meth)acrylyl group" means both or any one of "acrylyl group" and "methacrylyl group".

在本說明書中,組成物中的固體成分的濃度由除溶劑以外的其他成分相對於該組成物的總質量的質量百分率表示。 In this specification, the concentration of the solid component in the composition is expressed by the mass percentage of other components except the solvent relative to the total mass of the composition.

在本說明書中,除非另有說明,否則測量沸點時的氣壓設為101325Pa(1氣壓)。又,除非另有說明,否則溫度設為23℃。 In this specification, unless otherwise stated, the air pressure when measuring the boiling point is set to 101325 Pa (1 atmosphere). In addition, unless otherwise stated, the temperature is set to 23°C.

在本說明書中,除非另有說明,否則重量平均分子量(Mw)及數量平均分子量(Mn)表示為依據凝膠滲透層析法(GPC測量)之聚苯乙烯換算值。該重量平均分子量(Mw)及數量平均分子量(Mn)例如能夠使用HLC-8220(TOSOH Corporation製),並且作為管柱使用保護管柱HZ-L、TSKgel Super HZM-M、TSKgel Super HZ4000、TSKgel Super HZ3000及TSKgel Super HZ2000(TOSOH Corporation製)來求出。又,除非另有說明,否則作為洗提液使用THF(四氫呋喃)進行測量。又,除非另有說明,否則對GPC測量中的檢測使用UV射線(紫外線)的波長254nm檢測器。 In this specification, unless otherwise stated, the weight average molecular weight (Mw) and the number average molecular weight (Mn) are expressed as polystyrene conversion values based on gel permeation chromatography (GPC measurement). For example, HLC-8220 (manufactured by TOSOH Corporation) can be used as the weight average molecular weight (Mw) and number average molecular weight (Mn), and as the column, guard column HZ-L, TSKgel Super HZM-M, TSKgel Super HZ4000, and TSKgel Super can be used. HZ3000 and TSKgel Super HZ2000 (manufactured by TOSOH Corporation). In addition, unless otherwise stated, THF (tetrahydrofuran) was used as an eluent for measurement. In addition, unless otherwise stated, a detector with a wavelength of 254 nm of UV rays (ultraviolet) is used for detection in GPC measurement.

在本說明書中,關於構成積層體之各層的位置關係,當記載為“上”或“下”時,只要在所關注之複數個層中成為基準之層的上側或下側具有其他層即可。亦即,可以在成為基準之層與上述其他層之間進一步介入有第3層或要素,並且成為基準之層與上述其他層無需接觸。又,除非另有說明,否則將層堆疊於基材之方向稱為“上”,或者當存在感光層時,將從基材朝向感光層之方向稱為“上”,將與其相反的方向稱為“下”。另外,該種上下方向的設定在本說明書中係為了方便起見,在實際的態樣中,本說明書中的“上”方向亦能夠與垂直向上方向不同。 In this specification, when the positional relationship between the layers constituting the laminated body is described as "upper" or "lower", it suffices that there is another layer above or below the reference layer among the plurality of layers in question. . That is, a third layer or element may be further interposed between the base layer and the above-mentioned other layers, and the base layer does not need to be in contact with the above-mentioned other layers. In addition, unless otherwise stated, the direction in which the layers are stacked on the substrate is referred to as "up", or when there is a photosensitive layer, the direction from the substrate toward the photosensitive layer is referred to as "up", and the opposite direction is referred to as "up". for "down". In addition, the setting of the up-down direction in this specification is for convenience. In actual aspects, the "up" direction in this specification can also be different from the vertical upward direction.

在本說明書中,“近紅外線”係指屬於700~2500nm的波長範圍附近之光(電磁波)。 In this specification, "near infrared" refers to light (electromagnetic waves) near the wavelength range of 700 to 2500 nm.

<結構體> <structure>

本發明的結構體具有以彼此接觸之狀態二維配置之2個像素,2個像素各自含有顏料、400~700nm的波長區域中的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下之顏料衍生物及樹脂。 The structure of the present invention has two pixels two-dimensionally arranged in contact with each other. Each of the two pixels contains a pigment, and the maximum value of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm is 3000L‧mol -1 ‧cm - Pigment derivatives and resins below 1 .

依本發明,在包含以彼此接觸之狀態二維配置之2個像素之結構體中,像素深層部的穩定性得到提高。如下認為。 According to the present invention, in a structure including two pixels two-dimensionally arranged in contact with each other, the stability of the deep portion of the pixel is improved. Think as follows.

通常,為了提高感光性組成物中的顏料的分散性,與顏料一同添加具有向顏料賦予極性基之結構之顏料衍生物。 Generally, in order to improve the dispersibility of the pigment in the photosensitive composition, a pigment derivative having a structure that provides a polar group to the pigment is added together with the pigment.

然而,可知由於習知的顏料衍生物為有色化合物,並且該種顏料衍生物吸收曝光時的光,因此會阻礙比距像素表面在深度方向上1/2的位置更深的部分、尤其,比距像素表面在深度方向上2/3的位置更深的部分(以下,將該等統稱為“像素深層部”。)的硬化。認為在像素之間的深層部產生之空隙在該種硬化不充分的部分中會受到在兩個像素收縮之方向上隨時間而變質之影響。 However, it is found that since conventional pigment derivatives are colored compounds and absorb light during exposure, they block portions deeper than 1/2 of the pixel surface in the depth direction, in particular, deeper than 1/2 of the distance from the pixel surface. Hardening of the 2/3 deeper portion of the pixel surface in the depth direction (hereinafter, these are collectively referred to as "pixel deep portions"). It is considered that the gap generated in the deep part between the pixels is affected by deterioration over time in the direction in which the two pixels shrink in the insufficiently hardened portion.

因此,在本發明中,藉由以400~700nm的波長區域中的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下之程度使用透明的顏料衍生物,在曝光時抑制由顏料衍生物帶來的光的消耗,並且能夠比以往更促進像素深層部的硬化。認為藉由如此促進在深層部的硬化,像素的膜質成為緻密的狀態或提高像素對支撐體的密接性,從而提高像素的穩定性。又,認為顏料衍生物變成透明,亦即,不易受到曝光時的照射光(紫外線等)的影響,從而認為抑制顏料衍生物的變質和破壞,並提高顏料衍生物本身的曝光時的穩定性亦有助於深層部中的有效的硬化。 Therefore, in the present invention, by using a transparent pigment derivative such that the maximum value of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm is 3000L‧mol -1 ‧cm -1 or less, it is possible to suppress Pigment derivatives cause light consumption and can promote the hardening of deep pixels more than ever before. It is considered that by promoting hardening in the deep layer in this way, the film quality of the pixel becomes dense or the adhesion of the pixel to the support is improved, thereby improving the stability of the pixel. Furthermore, it is considered that the pigment derivative becomes transparent, that is, is less susceptible to the influence of irradiation light (ultraviolet, etc.) during exposure, thereby suppressing the deterioration and destruction of the pigment derivative and improving the stability of the pigment derivative itself during exposure. Contributes to effective hardening of deep layers.

以下,詳細說明本發明的結構體的各構成。 Hereinafter, each structure of the structure of the present invention will be described in detail.

<<像素的構成>> <<Composition of pixels>>

本發明的結構體例如作為濾色器、近紅外線截止濾波器或近紅外線透過濾波器而發揮功能,或者作為該等組合的濾光器而發揮功能。該種結構體能夠組裝到固體攝像元件等各種光感測器、圖像顯示裝置(例如,液晶顯示裝置或有機電致發光(有機EL)顯示裝置等)中而使用。例如,組裝有本發明的結構體之光感測器能夠較佳地用於監視用途、安全用途、移動用途、汽車用途、農業用途、醫療用途、距離測量用途、手勢識別用途、生命識別用途等用途。 The structure of the present invention functions as a color filter, a near-infrared cut filter, a near-infrared transmitting filter, or a combination of these filters. This type of structure can be incorporated into various photo sensors such as solid-state imaging elements, and image display devices (for example, liquid crystal display devices or organic electroluminescence (organic EL) display devices, etc.) for use. For example, a light sensor incorporating the structure of the present invention can be preferably used for surveillance, security, mobility, automotive, agricultural, medical, distance measurement, gesture recognition, life recognition, etc. use.

作為濾色器,可列舉具有透射特定波長的光之著色像素之濾波器,具有選自紅色像素、藍色像素、綠色像素、黃色像素、藍色像素及品紅色像素中之至少1種著色像素之濾波器為較佳。濾色器能夠使用包含彩色顏料之感光性組成物來形成。 Examples of the color filter include a filter having colored pixels that transmit light of a specific wavelength, and having at least one colored pixel selected from the group consisting of red pixels, blue pixels, green pixels, yellow pixels, blue pixels, and magenta pixels. The filter is better. The color filter can be formed using a photosensitive composition containing a color pigment.

作為近紅外線截止濾波器,可列舉在波長700~1800nm的範圍具有極大吸收波長之濾波器。近紅外線截止濾波器係在波長700~1300nm的範圍具有極大吸收波長之濾波器為較佳,在波長700~1000nm的範圍具有極大吸收波長之濾波器為更佳。又,近紅外線截止濾波器在波長400~650nm的所有範圍的透射率係70%以上為較佳,80%以上為更佳,90%以上為進一步較佳。又,波長700~1800nm的範圍的至少1點的透射率係20%以下為較佳。又,近紅外線截止濾波器的極大吸收波長下的吸光度Amax與波長550nm下的吸光度A550之比亦即吸光度Amax/吸光度A550係20~500為較佳,50~500為更佳,70~450為進一步較佳,100~400為特佳。 近紅外線截止濾波器能夠使用包含近紅外線吸收顏料之感光性組成物來形成。 Examples of near-infrared cutoff filters include filters with maximum absorption wavelength in the wavelength range of 700 to 1800 nm. The near-infrared cutoff filter is preferably a filter with a maximum absorption wavelength in the wavelength range of 700~1300nm, and a filter with a maximum absorption wavelength in the wavelength range of 700~1000nm is even better. In addition, the transmittance of the near-infrared cut filter in the entire wavelength range of 400 to 650 nm is preferably 70% or more, more preferably 80% or more, and further preferably 90% or more. In addition, the transmittance at at least one point in the wavelength range of 700 to 1800 nm is preferably 20% or less. In addition, the ratio of the absorbance Amax at the maximum absorption wavelength of the near-infrared cut filter and the absorbance A550 at the wavelength of 550 nm, that is, absorbance Amax/absorbance A550, is preferably 20 to 500, more preferably 50 to 500, and 70 to 450. Even better, 100~400 is particularly good. The near-infrared cut filter can be formed using a photosensitive composition containing a near-infrared absorbing pigment.

近紅外線透射濾波器為透射至少一部分近紅外線之濾波器。近紅外線透射濾波器可以為透射可見光和近紅外線兩者之濾波器(透明膜),亦可以為屏蔽至少一部分可見光,並透射至少一部分近紅外線之濾波器。作為近紅外線透射濾波器,可較佳地列舉滿足波長400~640nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1100~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之分光特性之濾波器等。近紅外線透射濾波器係滿足以下的(1)~(4)中的任一者的分光特性之濾波器為較佳。 The near-infrared transmission filter is a filter that transmits at least part of the near-infrared rays. The near-infrared transmission filter may be a filter (transparent film) that transmits both visible light and near-infrared rays, or it may be a filter that blocks at least part of the visible light and transmits at least part of the near-infrared rays. Preferable examples of the near-infrared transmission filter include those whose maximum value of transmittance is 20% or less (preferably 15% or less, more preferably 10% or less) in the wavelength range of 400 to 640 nm and the wavelength is 1100 to 1300 nm. Filters with spectral characteristics whose minimum transmittance is 70% or more (preferably 75% or more, more preferably 80% or more). The near-infrared transmission filter is preferably a filter that satisfies any one of the following spectral characteristics (1) to (4).

(1):波長400~640nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長800~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。 (1): The maximum value of the transmittance in the wavelength range of 400 to 640 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum value of the transmittance in the wavelength range of 800 to 1300 nm is 70 % or above (preferably above 75%, more preferably above 80%).

(2):波長400~750nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長900~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。 (2): The maximum value of the transmittance in the wavelength range of 400 to 750 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum value of the transmittance in the wavelength range of 900 to 1300 nm is 70 % or above (preferably above 75%, more preferably above 80%).

(3):波長400~830nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1000~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。 (3): The maximum value of the transmittance in the wavelength range of 400 to 830 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum value of the transmittance in the wavelength range of 1000 to 1300 nm is 70 % or above (preferably above 75%, more preferably above 80%).

(4):波長400~950nm的範圍的透過率的最大值為20%以下(較佳為15%以下,更佳為10%以下)且波長1100~1300nm的範圍的透過率的最小值為70%以上(較佳為75%以上,更佳為80%以上)之濾波器。 (4): The maximum value of the transmittance in the wavelength range of 400 to 950 nm is 20% or less (preferably 15% or less, more preferably 10% or less) and the minimum value of the transmittance in the wavelength range of 1100 to 1300 nm is 70 % or above (preferably above 75%, more preferably above 80%).

在本發明的結構體中,上述2個像素以彼此接觸之狀態二維配置。“以彼此接觸之狀態”係指二維配置之既定的2個像素在相對之側面的至少一部分接觸。若既定的2個像素在一部分接觸,則在2個像素之間可以存在比該2個像素的厚度低的間隔壁。該低間隔壁的高度例如能夠設為像素的厚度的10~90%,亦能夠設為30~70%。又,當2個像素在像素之間的一部分位置接觸時,在像素之間的其他位置可以存在比像素的厚度高的間隔壁。又,間隔壁由折射率比近紅外線透過濾波器用像素的折射率低的材料構成為較佳。依該態樣,能夠藉由進一步提高近紅外線的聚光性來進一步提高近紅外線的感度。 In the structure of the present invention, the two pixels are two-dimensionally arranged in contact with each other. “In a state of being in contact with each other” means that two predetermined pixels in a two-dimensional arrangement are in contact with at least part of the opposite sides. If two predetermined pixels are partially in contact with each other, a partition wall smaller than the thickness of the two pixels may be present between the two pixels. The height of the low partition wall can be, for example, 10 to 90% of the thickness of the pixel, or 30 to 70%. Furthermore, when two pixels are in contact with each other at a portion between the pixels, a partition wall thicker than the thickness of the pixels may exist at other locations between the pixels. In addition, the partition wall is preferably made of a material with a lower refractive index than the refractive index of the near-infrared ray transmitting filter pixel. According to this aspect, the sensitivity of near-infrared rays can be further improved by further improving the light-condensing property of near-infrared rays.

在本發明的結構體中,上述2個像素為包含彼此不同的顏料之像素,並且上述2個像素能夠設為各自選自紅色像素、綠色像素、藍色像素、黃色像素、青色像素、品紅色像素、黑色像素、白色像素、近紅外線截止濾波器用像素及近紅外線透過濾波器用像素中的1個像素。依據其結構體的所期望的功能來設計本發明的結構體包含哪個像素。例如,本發明的結構體能夠作為包含2色像素(例如,紅色像素及綠色像素)之2色型濾色器、作為包含紅色像素、綠色像素及藍色像素之RGB型濾色器、或者作為包含青色像素、品紅色像素及黃色像素之CMY型濾色器發揮功能。又,例如,本發明的結構體能夠作為對RGB型濾色器追加近紅外線截止濾波器(黑色像素)之濾光器、作為對RGB型濾色器追加近紅外線透過濾波器之濾光器、或者作為對RGB型濾色器追加白色像素之濾光器發揮功能。具體而言,如下所述。 In the structure of the present invention, the two pixels are pixels containing different pigments, and the two pixels can be each selected from a red pixel, a green pixel, a blue pixel, a yellow pixel, a cyan pixel, and a magenta pixel. One pixel among a pixel, a black pixel, a white pixel, a pixel for a near-infrared cut filter, and a pixel for a near-infrared transmission filter. Which pixel the structure of the present invention contains is designed according to the desired function of the structure. For example, the structure of the present invention can be used as a two-color color filter including two-color pixels (for example, red pixels and green pixels), as an RGB-type color filter including red pixels, green pixels, and blue pixels, or as a A CMY-type color filter containing cyan, magenta, and yellow pixels functions. Furthermore, for example, the structure of the present invention can be used as an optical filter in which a near-infrared ray cutoff filter (black pixel) is added to an RGB-type color filter, or as an optical filter in which a near-infrared ray-transmitting filter is added to an RGB-type color filter. Or it can function as a filter that adds white pixels to an RGB type color filter. Specifically, it is as follows.

本發明的結構體例如能夠設為包含2色型濾色器之結構體。圖1的a)~c)係表示包含2色型濾色器之結構體S1之概要圖,圖1的a)為結構體S1的頂視圖,圖1的b)及圖1的c)係包含像素P1及像素P2之平面中的結構體S1的剖面圖。在此,例如,像素P1為綠色像素,像素P2為紅色像素。在圖1的a)~c)的結構體中,在支撐體1上,像素P1和像素P2交替配置而形成,像素P1及像素P2在俯視觀察時為在所有邊上彼此接觸之狀態。另一方面,圖1的b)係在像素P1‧P2之間沒有間隔壁之情況下的剖面圖,圖1的c)係在像素P1‧P2之間有間隔壁2之情況下的剖面圖。在圖1的b)中,由於像素之間沒有間隔壁,因此可以說相鄰之2個像素P1‧P2係在相對之整個側面接觸之狀態,在圖1的c)中,由於在像素之間有間隔壁2,因此可以說相鄰之2個像素P1‧P2係在相對之側面的一部分接觸之狀態。 The structure of the present invention can be a structure including a two-color color filter, for example. Figure 1 a) to c) are schematic diagrams showing the structure S1 including a two-color color filter. Figure 1 a) is a top view of the structure S1. Figure 1 b) and Figure 1 c) are A cross-sectional view of the structure S1 in a plane including the pixel P1 and the pixel P2. Here, for example, the pixel P1 is a green pixel, and the pixel P2 is a red pixel. In the structure of a) to c) in FIG. 1 , pixels P1 and pixels P2 are alternately arranged on the support 1 . The pixels P1 and pixels P2 are in contact with each other on all sides when viewed from above. On the other hand, b) in Figure 1 is a cross-sectional view when there is no partition wall between pixels P1 and P2, and c) in Figure 1 is a cross-sectional view when there is a partition wall 2 between pixels P1 and P2. . In b) of Figure 1, since there is no partition wall between the pixels, it can be said that the two adjacent pixels P1‧P2 are in contact with each other on the entire opposite side. In c) of Figure 1, since there is no partition between the pixels, There is a partition wall 2 between them, so it can be said that the two adjacent pixels P1 and P2 are in contact with each other at part of the opposite side surfaces.

在該種濾光器中,如上所述,在像素的深層部且2個像素彼此接觸之部分的附近區域R容易產生空隙。具體而言,例如在圖1的b)的情況下,該區域R係2個像素P1‧P2的接觸面與支撐體1的表面相交之區域的附近,在圖1的c)的情況下,該區域R係2個像素P1‧P2的接觸面與間隔壁2的頂上面相交之區域的附近。在本發明中,如上所述,能夠藉由相較於以往進一步提高包括該區域R之像素深層部的硬化來提高穩定性。 In this type of optical filter, as described above, gaps are likely to occur in the deep portion of the pixel and in the vicinity R of the portion where two pixels are in contact with each other. Specifically, for example, in the case of b) of FIG. 1 , the region R is near the area where the contact surface of the two pixels P1 and P2 intersects with the surface of the support 1 . In the case of c) of FIG. 1 , This region R is in the vicinity of the region where the contact surface of the two pixels P1 and P2 intersects the top surface of the partition wall 2 . In the present invention, as described above, the stability can be improved by further improving the hardening of the deep portion of the pixel including the region R compared to the conventional art.

又,本發明的結構體例如能夠設為包括3色型濾色器之結構體。圖2的a)~c)係表示包括3色型濾色器之結構體S2之概要圖,圖2的a)係結構體S2的頂視圖,圖2的b)係包括像素P1及像素P2之平面中的結構體S2的剖面圖,圖2的c)係包括像素P1及像素P3之平面中的結構體S2的 剖面圖。在此,例如,像素P1為綠色像素,像素P2為紅色像素,像素P3為藍色像素。在圖2的a)~c)的結構體S2中,在支撐體1上,像素P1、像素P2及像素P3以數量比2:1:1的比例交替配置而形成,像素P1、像素P2及像素P3各自以俯視觀察時為在所有邊上與相鄰之像素接觸之狀態。另一方面,如圖2的b)及圖2的c)所示,在結構體S2中,由於在像素之間有間隔壁2,因此可以說相鄰之2個像素係在相對之側面的一部分接觸之狀態。在結構體S2中,亦與圖1的b)的結構體S1同樣地可以沒有間隔壁。關於容易產生空隙之區域,亦與結構體S1相同。 Furthermore, the structure of the present invention can be a structure including a three-color color filter, for example. a) to c) in Figure 2 are schematic diagrams showing the structure S2 including a three-color color filter, a) in Figure 2 is a top view of the structure S2, and b) in Figure 2 includes a pixel P1 and a pixel P2 The cross-sectional view of the structure S2 in the plane, c) in Figure 2 is the structure S2 in the plane including the pixel P1 and the pixel P3 Sectional view. Here, for example, the pixel P1 is a green pixel, the pixel P2 is a red pixel, and the pixel P3 is a blue pixel. In the structure S2 of a) to c) in Figure 2, pixels P1, pixels P2 and pixels P3 are alternately arranged on the support 1 in a ratio of 2:1:1. The pixels P1, pixels P2 and Each of the pixels P3 is in contact with adjacent pixels on all sides when viewed from above. On the other hand, as shown in FIG. 2 b) and FIG. 2 c), in structure S2, since there is a partition wall 2 between pixels, it can be said that two adjacent pixels are on opposite sides. The state of partial contact. In the structure S2, similarly to the structure S1 in b) of Fig. 1 , there may be no partition wall. The area where voids are likely to occur is also the same as that of structure S1.

此外,本發明的結構體例如能夠設為包括3色型濾色器及IR過濾器之結構體。圖3的a)~e)係表示包括3色型濾色器和IR過濾器之結構體S3之概要圖,圖3的a)係結構體S3的頂視圖,圖3的b)係包括像素P1及像素P2之平面中的結構體S3的剖面圖,圖3的c)係包括像素P1及像素P3之平面中的結構體S3的剖面圖,圖3的d)係包括像素P4及像素P2之平面中的結構體S3的剖面圖。在此,例如,像素P1為綠色像素,像素P2為紅色像素,像素P3為藍色像素,像素P4為近紅外線透過濾波器用像素。在圖3的a)~e)的結構體S3中,在支撐體1上,像素P1~P4以數量比1:1:1:1的比例交替配置而形成,像素P1~P4各自以俯視觀察時為在所有邊上與相鄰之像素接觸之狀態。另一方面,如圖3的b)~d)所示,在結構體S3中,由於在像素之間有間隔壁2,因此可以說相鄰之2個像素係在相對之側面的一部分接觸之狀態。在結構體S3中,亦與圖1的b)的結構體S1同樣地可以沒有間隔壁。關於容易產生空隙之區域,亦與結構體S1相同。此外,如圖3的e)所示,結構體S3例如亦能夠在濾色器用像素P1~P3之 下設置近紅外線截止濾波器SIR。另外,近紅外線截止濾波器SIR亦能夠在圖1的a)~c)及圖2的a)~c)所示之各結構體中同樣地設置。 In addition, the structure of the present invention can be a structure including a three-color color filter and an IR filter, for example. a) to e) in Figure 3 are schematic diagrams showing the structure S3 including a three-color color filter and an IR filter, a) in Figure 3 is a top view of the structure S3, and b) in Figure 3 includes pixels A cross-sectional view of the structure S3 in the plane of P1 and pixel P2. c) in Figure 3 is a cross-sectional view of the structure S3 in the plane including pixel P1 and pixel P3. d) in Figure 3 is a cross-sectional view of the structure S3 in the plane including pixel P4 and pixel P2. Cross-sectional view of structure S3 in the plane. Here, for example, the pixel P1 is a green pixel, the pixel P2 is a red pixel, the pixel P3 is a blue pixel, and the pixel P4 is a near-infrared ray transmitting filter pixel. In structure S3 of a) to e) in Figure 3 , pixels P1 to P4 are alternately arranged on the support 1 in a ratio of 1:1:1:1, and each of the pixels P1 to P4 is viewed from above. When it is in contact with adjacent pixels on all sides. On the other hand, as shown in b) to d) of Figure 3, in structure S3, since there is a partition wall 2 between pixels, it can be said that two adjacent pixels are in contact with each other at part of the opposite side surface. condition. In the structure S3, similarly to the structure S1 in b) of Fig. 1 , there may be no partition wall. The area where voids are likely to occur is also the same as that of structure S1. In addition, as shown in e) of FIG. 3 , the structure S3 may also be provided between the color filter pixels P1 to P3, for example. Set the near infrared cut filter SIR below. In addition, the near-infrared cutoff filter SIR can also be similarly provided in each structure shown in a) to c) of FIG. 1 and a) to c) of FIG. 2 .

另外,本發明的結構體例如能夠設為包括3色型濾色器和白色像素之結構體、或在上述之結構體中,採用CMY型濾色器作為3色型濾色器之結構體。又,本發明的結構體可以在濾光器上設置抗反射膜、平坦化膜、透鏡等。可以向用於形成透鏡之透鏡材料添加吸收紅外光之色材。透鏡材料相對於波長550nm的光的折射率為1.5~1.8為較佳。該數值範圍的上限為1.75以下為更佳,1.70以下為進一步較佳。又,該數值範圍的下限為1.55以上為更佳,1.58以上為進一步較佳。當形成膜厚0.35μm的透鏡材料的膜時,透鏡材料相對於波長400~700nm的光的最小透過率為90%以上為較佳,95%以上為更佳。該透過率的上限值為100%為較佳,實際為98%左右。又,當形成膜厚0.35μm的透鏡材料的膜時,透鏡材料相對於波長820nm的光的透過率為70%以下為較佳,60%以下為更佳,50%以下為進一步較佳。該透過率的下限值為0%為較佳,實際為50%左右。 In addition, the structure of the present invention can be, for example, a structure including a three-color color filter and a white pixel, or a structure in which a CMY-type color filter is used as the three-color color filter in the above-mentioned structure. In addition, in the structure of the present invention, an antireflection film, a planarizing film, a lens, etc. can be provided on the optical filter. Infrared light-absorbing color materials may be added to the lens material used to form the lens. The lens material preferably has a refractive index of 1.5 to 1.8 with respect to light with a wavelength of 550 nm. The upper limit of this numerical range is more preferably 1.75 or less, and still more preferably 1.70 or less. Moreover, it is more preferable that the lower limit of this numerical range is 1.55 or more, and it is further more preferable that it is 1.58 or more. When forming a lens material film with a film thickness of 0.35 μm, the minimum transmittance of the lens material with respect to light with a wavelength of 400 to 700 nm is preferably 90% or more, and more preferably 95% or more. The upper limit of the transmittance is preferably 100%, but is actually about 98%. Moreover, when forming a lens material film with a film thickness of 0.35 μm, the transmittance of the lens material with respect to light with a wavelength of 820 nm is preferably 70% or less, more preferably 60% or less, and further preferably 50% or less. The lower limit of the transmittance is preferably 0%, but is actually about 50%.

在本發明的結構體中,2個像素中的至少一個像素的寬度為0.3~5.0μm為較佳。尤其,在單鏡頭反射式相機等使用較大尺寸的像素之用途中,各像素的寬度的上限獨立地為4.0μm以下為更佳,3.5μm以下為進一步較佳,3.0μm以下為特佳。又,該用途中的各像素的寬度的下限獨立地為1.7μm以上為更佳,2.0μm以上為進一步較佳,2.5μm以上為特佳。另一方面,在移動設備等使用較小尺寸的像素之用途中,各像素的寬度的上限獨立地為1.7μm以下為更佳,1.5μm以下為進一步較佳,1.2μm以下為特佳。又,該用途中的各像素的寬度的下限獨立地為0.5μm以上為更佳,0.6μm以上為 進一步較佳,0.7μm以上為特佳。2個像素中的至少一個像素的厚度為0.1~2.0μm為較佳。尤其,在如上所述的大尺寸用途中,各像素的厚度的上限獨立地為1.8μm以下為更佳,1.6μm以下為進一步較佳,1.4μm以下為特佳。又,該用途中的各像素的厚度的下限獨立地為0.8μm以上為更佳,0.9μm以上為進一步較佳,1.0μm以上為特佳。另一方面,在如上所述的小尺寸用途中,各像素的厚度的上限獨立地為0.8μm以下為更佳,0.7μm以下為進一步較佳,0.6μm以下為特佳。又,該用途中的各像素的寬度的下限獨立地為0.2μm以上為更佳,0.3μm以上為進一步較佳,0.4μm以上為特佳。如上所述,各像素的寬度及厚度越小,則像素深層部中產生之空隙的影響越大,且本發明的有用性越大。 In the structure of the present invention, it is preferable that the width of at least one of the two pixels is 0.3 to 5.0 μm. In particular, for applications such as single-lens reflex cameras that use large-sized pixels, the upper limit of the width of each pixel is more preferably 4.0 μm or less, more preferably 3.5 μm or less, and particularly preferably 3.0 μm or less. In addition, the lower limit of the width of each pixel in this application is more preferably 1.7 μm or more, more preferably 2.0 μm or more, and particularly preferably 2.5 μm or more. On the other hand, in applications such as mobile devices that use smaller-sized pixels, the upper limit of the width of each pixel is more preferably 1.7 μm or less, more preferably 1.5 μm or less, and particularly preferably 1.2 μm or less. In addition, the lower limit of the width of each pixel in this application is more preferably 0.5 μm or more, and 0.6 μm or more is preferably More preferably, 0.7 μm or more is particularly preferred. The thickness of at least one of the two pixels is preferably 0.1 to 2.0 μm. In particular, for large-size applications as described above, the upper limit of the thickness of each pixel is more preferably 1.8 μm or less, further preferably 1.6 μm or less, and particularly preferably 1.4 μm or less. In addition, the lower limit of the thickness of each pixel in this application is more preferably 0.8 μm or more, more preferably 0.9 μm or more, and particularly preferably 1.0 μm or more. On the other hand, in the small-size application as described above, the upper limit of the thickness of each pixel is more preferably 0.8 μm or less, further preferably 0.7 μm or less, and particularly preferably 0.6 μm or less. In addition, the lower limit of the width of each pixel in this application is more preferably 0.2 μm or more, more preferably 0.3 μm or more, and particularly preferably 0.4 μm or more. As described above, the smaller the width and thickness of each pixel, the greater the influence of the voids generated in the deep portion of the pixel, and the greater the usefulness of the present invention.

<<用於形成像素之組成物>> <<Composition used to form pixels>>

在本發明的結構體中,各像素按照所期望的功能包含顏料、顏料衍生物及樹脂。如將在後面詳細描述,該種像素例如藉由形成含有顏料、顏料衍生物及樹脂之感光性組成物(以下,亦簡稱為“組成物”。)的膜,並對該膜實施曝光、顯影等處理來形成。而且,藉由重複該種像素的形成製程直至形成所有必需的像素為止來獲得本發明的結構體。以下,對在本發明中用於形成像素之組成物的內容進行說明。 In the structure of the present invention, each pixel contains a pigment, a pigment derivative, and a resin according to the desired function. As will be described in detail later, such a pixel is formed by forming a film of a photosensitive composition (hereinafter, also simply referred to as "composition") containing a pigment, a pigment derivative, and a resin, and subjecting the film to exposure and development. Wait for processing to form. Furthermore, the structure of the present invention is obtained by repeating the pixel formation process until all necessary pixels are formed. Hereinafter, the contents of the composition used to form the pixels in the present invention will be described.

<<<顏料>>> <<<Pigment>>>

在本發明中,感光性組成物含有顏料。作為顏料,可列舉白色顏料、黑色顏料、彩色顏料、近紅外線吸收顏料等。本發明中,白色顏料不僅包含純白色,還包含接近白色的亮灰色(例如灰白色、淺灰色等)的顏料等。又,顏料可以為無機顏料、有機顏料中的任一種,從更容易提高分散穩定性之原 因考慮,有機顏料為較佳。又,顏料係在波長400~2000nm的範圍具有極大吸收波長者為較佳,在波長400~700nm的範圍具有極大吸收波長者為更佳。又,顏料可以僅使用顏料,亦可以與染料併用。又,顏料中亦能夠使用由有機發色團取代無機顏料或有機-無機顏料的一部分而獲得之材料。藉由由有機發色團取代無機顏料或有機-無機顏料而能夠容易設計色相。 In the present invention, the photosensitive composition contains a pigment. Examples of pigments include white pigments, black pigments, color pigments, near-infrared absorbing pigments, and the like. In the present invention, white pigments include not only pure white, but also bright gray (for example, off-white, light gray, etc.) pigments close to white, and the like. In addition, the pigment may be either an inorganic pigment or an organic pigment, since it is easier to improve the dispersion stability. For this reason, organic pigments are preferred. In addition, the pigment has a maximum absorption wavelength in the wavelength range of 400 to 2000 nm, and a pigment having a maximum absorption wavelength in the wavelength range of 400 to 700 nm is more preferable. Furthermore, the pigment may be used alone or in combination with a dye. Moreover, as a pigment, the thing obtained by replacing a part of an inorganic pigment or an organic-inorganic pigment with an organic chromophore can also be used. Hue can be easily designed by replacing inorganic pigments or organic-inorganic pigments with organic chromophores.

當形成濾色器用像素時,作為顏料,例如使用適當地選自彩色顏料中之既定的顏料。又,當形成近紅外線截止濾波器用像素時,作為顏料使用近紅外線吸收顏料。而且,當形成近紅外線透過濾波器用像素時,使用藉由2種以上的彩色顏料的組合而呈黑色之顏料或黑色顏料。 When forming pixels for a color filter, for example, a predetermined pigment appropriately selected from color pigments is used as the pigment. In addition, when forming a pixel for a near-infrared cut filter, a near-infrared-absorbing pigment is used as the pigment. Furthermore, when forming a pixel for a near-infrared ray transmitting filter, a pigment that is black by a combination of two or more color pigments or a black pigment is used.

顏料的平均一次粒徑係1~200nm為較佳。下限為5nm以上為更佳,10nm以上為進一步較佳。上限為180nm以下為更佳,150nm以下為進一步較佳,100nm以下為特佳。若顏料的平均一次粒徑為上述範圍,則感光性組成物中的顏料的分散穩定性良好。另外,在本發明中,顏料的一次粒徑能夠藉由使用透射性電子顯微鏡觀察顏料的一次粒子並從所獲得之照片求出。具體而言,求出顏料的一次粒子的投影面積,並計算與其對應之等效圓直徑作為顏料的一次粒徑。又,本發明中的平均一次粒徑設為對於400個顏料的一次粒子的一次粒徑的算術平均值。又,顏料的一次粒子係指未凝聚之獨立之粒子。 The average primary particle size of the pigment is preferably 1 to 200 nm. It is more preferable that the lower limit is 5 nm or more, and it is further more preferable that it is 10 nm or more. The upper limit is more preferably 180 nm or less, further preferably 150 nm or less, and particularly preferably 100 nm or less. If the average primary particle size of the pigment is in the above range, the dispersion stability of the pigment in the photosensitive composition will be good. In addition, in the present invention, the primary particle size of the pigment can be determined from the photograph obtained by observing the primary particles of the pigment using a transmission electron microscope. Specifically, the projected area of the primary particles of the pigment is determined, and the corresponding equivalent circle diameter is calculated as the primary particle diameter of the pigment. In addition, the average primary particle diameter in the present invention is the arithmetic mean value of the primary particle diameters of 400 primary particles of the pigment. In addition, the primary particles of the pigment refer to independent particles that are not agglomerated.

1個像素中的顏料的含量為25~65質量%為較佳。上限為60質量%以下為更佳,55質量%以下為進一步較佳。下限為25質量%以上為更佳,30質量%以上為進一步較佳,35質量%以上為特佳。作為顏料可列舉以下所示者。 The pigment content in one pixel is preferably 25 to 65% by mass. It is more preferable that the upper limit is 60 mass % or less, and it is further more preferable that it is 55 mass % or less. It is more preferable that the lower limit is 25 mass % or more, further preferably 30 mass % or more, and particularly preferably 35 mass % or more. Examples of pigments include those shown below.

(彩色顏料) (color pigment)

作為彩色顏料並無特別限定,能夠使用公知的彩色顏料。作為彩色顏料,可列舉在波長400~700nm的範圍具有極大吸收波長之顏料。例如,可列舉黃色顏料、橙色顏料、紅色顏料、綠色顏料、紫色顏料、藍色顏料等。作為該等具體例,例如可列舉以下。 The color pigment is not particularly limited, and known color pigments can be used. Examples of color pigments include pigments that have a maximum absorption wavelength in the wavelength range of 400 to 700 nm. For example, a yellow pigment, an orange pigment, a red pigment, a green pigment, a purple pigment, a blue pigment, etc. are mentioned. Specific examples include the following.

比色指數(C.I.)顏料黃1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214,215,228,231,232(次甲基系),233(喹啉系),234(胺基酮系),235(胺基酮系),236(胺基酮系)等(以上為黃色顏料。以下,亦簡稱為“PY1”等。)。 Colorimetric Index (C.I.) Pigment Yellow 1, 2, 3, 4, 5, 6, 10, 11, 12, 13, 14, 15, 16, 17, 18, 20, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1, 37, 37: 1, 40, 42, 43, 53, 55, 60, 61, 62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118, 119, 120, 123, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 161, 162, 164, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 179, 180, 181, 182, 185, 187, 188, 193, 194, 199, 213, 214, 215, 228, 231, 232 (methine series), 233 (quinoline series), 234 (amino ketone series), 235 (amino ketone series), 236 (amino ketone series), etc. (the above are yellow pigments. Hereinafter, they are also referred to as "PY1", etc.).

C.I.顏料橙2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等(以上為橙色顏料。以下,亦簡稱為“PO2”等。)。 C.I. Pigment Orange 2, 5, 13, 16, 17: 1, 31, 34, 36, 38, 43, 46, 48, 49, 51, 52, 55, 59, 60, 61, 62, 64, 71, 73 etc. (The above is orange pigment. Hereinafter, it is also referred to as "PO2", etc.).

C.I.顏料紅1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176, 177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,269,270,272,279,291,294(

Figure 108136260-A0305-02-0018-137
系、Organo Ultramarine、Bluish Red),295(單偶氮系),296(重氮系),297(胺基酮系)等(以上為紅色顏料。以下,亦簡稱為“PR1”等。)。 CI Pigment Red 1, 2, 3, 4, 5, 6, 7, 9, 10, 14, 17, 22, 23, 31, 38, 41, 48:1, 48:2, 48:3, 48:4 , 49, 49:1, 49:2, 52:1, 52:2, 53:1, 57:1, 60:1, 63:1, 66, 67, 81:1, 81:2, 81:3 , 83, 88, 90, 105, 112, 119, 122, 123, 144, 146, 149, 150, 155, 166, 168, 169, 170, 171, 172, 175, 176, 177, 178, 179, 184 ,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,269,270,272,279,291 ,294(
Figure 108136260-A0305-02-0018-137
series, Organo Ultramarine, Bluish Red), 295 (monoazo series), 296 (diazo series), 297 (aminoketone series), etc. (the above are red pigments. Hereinafter, also referred to as "PR1", etc.).

C.I.顏料綠7,10,36,37,58,59,62,63,64(酞菁系),65(酞菁系),66(酞菁系)等(以上為綠色顏料。以下,亦簡稱為“PG7”等。)。 C.I. Pigment Green 7, 10, 36, 37, 58, 59, 62, 63, 64 (phthalocyanine series), 65 (phthalocyanine series), 66 (phthalocyanine series), etc. (the above are green pigments. Hereinafter, they are also referred to as for "PG7" etc.).

C.I.顏料紫1,19,23,27,32,37,42,60(三芳基甲烷系),61(

Figure 108136260-A0305-02-0018-139
Figure 108136260-A0305-02-0018-141
系)等(以上為紫色顏料。以下,亦簡稱為“PV1”等。)。 CI Pigment Violet 1, 19, 23, 27, 32, 37, 42, 60 (triarylmethane series), 61 (
Figure 108136260-A0305-02-0018-139
Figure 108136260-A0305-02-0018-141
system), etc. (The above are purple pigments. Hereinafter, they are also referred to as "PV1", etc.).

C.I.顏料藍1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,29,60,64,66,79,80,87(單偶氮系),88(次甲基系)等(以上為藍色顏料。以下,亦簡稱為“PB1”等。)。 C.I. Pigment Blue 1, 2, 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 22, 29, 60, 64, 66, 79, 80, 87 (monoazo series), 88 (methine series), etc. (the above are blue pigments. Hereinafter, they are also referred to as "PB1", etc.).

又,作為綠色顏料,能夠使用1分子中之鹵素原子數為平均10~14個,溴原子數為平均8~12個,氯原子數為平均2~5個之鹵化鋅酞青素顏料。作為具體例可列舉國際公開第2015/118720號中所記載之化合物。又,作為綠色顏料,亦能夠使用中國專利申請公開第106909027號說明書中所記載之化合物、具有國際公開第2012/102395號中所記載之磷酸酯作為配位體之酞菁化合物、日本特開2019-008014號公報中所記載之酞菁化合物、日本特開2018-180023號公報中所記載之酞菁化合物、日本特開2019-038958號公報中所記載之化合物等。 Furthermore, as the green pigment, a halide zinc phthalocyanine pigment having an average number of 10 to 14 halogen atoms, an average of 8 to 12 bromine atoms, and an average of 2 to 5 chlorine atoms in one molecule can be used. Specific examples include compounds described in International Publication No. 2015/118720. In addition, as the green pigment, the compound described in Chinese Patent Application Publication No. 106909027, the phthalocyanine compound having the phosphate ester as a ligand described in International Publication No. 2012/102395, and Japanese Patent Application Laid-Open No. 2019 can also be used. -Phthalocyanine compounds described in Japanese Patent Application Publication No. 008014, phthalocyanine compounds described in Japanese Patent Application Publication No. 2018-180023, compounds described in Japanese Patent Application Publication No. 2019-038958, etc.

又,作為藍色顏料,還能夠使用具有磷原子之鋁酞青化合物。作為具體例,可列舉日本特開2012-247591號公報的0022~0030段、日本特開2011-157478號公報的0047段中所記載之化合物。 Furthermore, as the blue pigment, an aluminum phthalocyanine compound having a phosphorus atom can also be used. Specific examples include compounds described in paragraphs 0022 to 0030 of Japanese Patent Application Laid-Open No. 2012-247591 and paragraph 0047 of Japanese Patent Application Laid-Open No. 2011-157478.

又,作為黃色顏料,亦能夠使用日本特開2017-201003號公報中所記載之化合物、日本特開2017-197719號公報中所記載之化合物、日本特開2017-171912號公報的0011~0062段、0137~0276中所記載的化合物、日本特開2017-171913號公報的0010~0062段、0138~0295中所記載之化合物、日本特開2017-171914號公報的0011~0062段、0139~0190段中所記載之化合物、日本特開2017-171915號公報的0010~0065段、0142~0222段中所記載之化合物、日本特開2013-054339號公報的0011~0034段中所記載之喹啉黃化合物、日本特開2014-026228號公報的0013~0058段中所記載之喹啉黃化合物、日本特開2018-062644號公報中所記載之異吲哚啉化合物、日本特開2018-203798號公報中所記載之喹啉黃化合物、日本特開2018-062578號公報中所記載之喹啉黃化合物、日本專利第6432076號公報中所記載之喹啉黃化合物、日本特開2018-155881號公報中所記載之喹啉黃化合物、日本特開2018-111757號公報中所記載之喹啉黃化合物、日本特開2018-040835號公報中所記載之喹啉黃化合物、日本特開2017-197640號公報中所記載之喹啉黃化合物、日本特開2016-145282號公報中所記載之喹啉黃化合物、日本特開2014-085565號公報中所記載之喹啉黃化合物、日本特開2014-021139號公報中所記載之喹啉黃化合物、日本特開2013-209614號公報中所記載之喹啉黃化合物、日本特開2013-209435號公報中所記載之喹啉黃化合物、日本特開2013-181015號公報中所記載之喹啉黃化合物、日本特 開2013-061622號公報中所記載之喹啉黃化合物、日本特開2013-032486號公報中所記載之喹啉黃化合物、日本特開2012-226110號公報中所記載之喹啉黃化合物、日本特開2008-074987號公報中所記載之喹啉黃化合物、日本特開2008-081565號公報中所記載之喹啉黃化合物、日本特開2008-074986號公報中所記載之喹啉黃化合物、日本特開2008-074985號公報中所記載之喹啉黃化合物、日本特開2008-050420號公報中所記載之喹啉黃化合物、日本特開2008-031281號公報中所記載之喹啉黃化合物、日本特公昭48-032765號公報中所記載之喹啉黃化合物、日本特開2019-008014號公報中所記載之喹啉黃化合物、由下述式(QP1)表示之化合物、由下述式(QP2)表示之化合物。 In addition, as the yellow pigment, the compounds described in Japanese Patent Application Laid-Open No. 2017-201003, the compounds described in Japanese Patent Application Laid-Open No. 2017-197719, and paragraphs 0011 to 0062 of Japanese Patent Application Laid-Open No. 2017-171912 can also be used. , compounds described in 0137 to 0276, compounds described in paragraphs 0010 to 0062 and 0138 to 0295 of Japanese Patent Application Laid-Open No. 2017-171913, paragraphs 0011 to 0062 and 0139 to 0190 of Japanese Patent Application Laid-Open No. 2017-171914. Compounds described in paragraphs, compounds described in paragraphs 0010 to 0065 and 0142 to 0222 of Japanese Patent Application Laid-Open No. 2017-171915, quinolines described in paragraphs 0011 to 0034 of Japanese Patent Application Laid-Open No. 2013-054339 Yellow compounds, quinoline yellow compounds described in paragraphs 0013 to 0058 of Japanese Patent Application Laid-Open No. 2014-026228, isoindoline compounds described in Japanese Patent Application Laid-Open No. 2018-062644, Japanese Patent Application Laid-Open No. 2018-203798 Quinophthalone compounds described in the publication, quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2018-062578, quinophthaline compounds described in Japanese Patent Publication No. 6432076, Japanese Patent Application Laid-Open No. 2018-155881 Quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2018-111757, Quinophthalene compounds described in Japanese Patent Application Laid-Open No. 2018-040835, Japanese Patent Application Laid-Open No. 2017-197640 Quinophthalone compounds described in the publication, quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2016-145282, quinophthaline compounds described in Japanese Patent Application Laid-Open No. 2014-085565, Japanese Patent Application Laid-Open No. 2014-021139 Quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2013-209614, quinophthaline compounds described in Japanese Patent Application Laid-Open No. 2013-209435, Japanese Patent Application Laid-Open No. 2013- Quinoline yellow compounds described in the Gazette No. 181015, Japanese Patent Quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2013-061622, quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2013-032486, quinophthaline compounds described in Japanese Patent Application Laid-Open No. 2012-226110, Japan The quinophthalone compound described in Japanese Patent Application Laid-Open No. 2008-074987, the quinophthalone compound described in Japanese Patent Application Laid-Open No. 2008-081565, the quinophthaline compound described in Japanese Patent Application Laid-Open No. 2008-074986, Quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2008-074985, quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2008-050420, quinophthalone compounds described in Japanese Patent Application Laid-Open No. 2008-031281 , the quinophthalone compound described in Japanese Patent Publication No. 48-032765, the quinophthalone compound described in Japanese Patent Application Publication No. 2019-008014, the compound represented by the following formula (QP1), the compound represented by the following formula The compound represented by (QP2).

Figure 108136260-A0305-02-0020-2
Figure 108136260-A0305-02-0020-2

式(QP1)中,X1~X16分別獨立地表示氫原子或鹵素原子,Z1表示碳數1~3的伸烷基。作為由式(QP1)表示之化合物的具體例,可列舉日本專利第6443711號公報的0016段中所記載之化合物。 In the formula (QP1), X 1 to X 16 each independently represent a hydrogen atom or a halogen atom, and Z 1 represents an alkylene group having 1 to 3 carbon atoms. Specific examples of the compound represented by formula (QP1) include the compounds described in paragraph 0016 of Japanese Patent No. 6443711.

Figure 108136260-A0305-02-0021-3
Figure 108136260-A0305-02-0021-3

式(QP2)中,Y1~Y3分別獨立地表示鹵素原子。n、m表示0~6的整數,p表示0~5的整數。(n+m)為1以上。作為由式(QP2)表示之化合物的具體例,可列舉日本專利6432077號公報的0047~0048段中所記載之化合物。 In formula (QP2), Y 1 to Y 3 each independently represent a halogen atom. n and m represent integers from 0 to 6, and p represents integers from 0 to 5. (n+m) is 1 or more. Specific examples of the compound represented by formula (QP2) include compounds described in paragraphs 0047 to 0048 of Japanese Patent No. 6432077.

作為紅色顏料,亦能夠使用日本特開2017-201384號公報中所記載之結構中至少一個溴原子被取代之二酮吡咯并吡咯化合物、日本專利第6248838號的0016~0022段中所記載之二酮吡咯并吡咯化合物、國際公開第2012/102399號中所記載之二酮吡咯并吡咯化合物、國際公開第2012/117965號中所記載之二酮吡咯并吡咯化合物、日本特開2012-229344號公報中所記載之萘酚偶氮化合物、日本專利第6516119號公報中所記載之紅色色材、日本專利第6525101號公報中所記載之紅色色材等。又,還能 夠使用具有芳香環基與二氧代吡咯并吡咯骨架鍵結而成之結構之化合物,該芳香環基中導入有相對於芳香環鍵結有氧原子、硫原子或氮原子之基團。 As the red pigment, diketopyrrolopyrrole compounds in which at least one bromine atom is substituted in the structure described in Japanese Patent Application Laid-Open No. 2017-201384 and two described in paragraphs 0016 to 0022 of Japanese Patent No. 6248838 can also be used. Ketopyrrolopyrrole compound, diketopyrrolopyrrole compound described in International Publication No. 2012/102399, diketopyrrolopyrrole compound described in International Publication No. 2012/117965, Japanese Patent Application Laid-Open No. 2012-229344 The naphthol azo compound described in, the red color material described in Japanese Patent No. 6516119, the red color material described in Japanese Patent No. 6525101, etc. Also, it can A compound having a structure in which an aromatic ring group is bonded to a dioxopyrrolopyrrole skeleton, and a group having an oxygen atom, a sulfur atom or a nitrogen atom bonded to the aromatic ring is introduced into the aromatic ring group can be used.

在本發明中,彩色顏料可組合2種以上來使用。又,彩色顏料組合2種以上來使用時,可以由2種以上的彩色顏料的組合形成黑色。作為該種組合,例如可列舉以下(1)~(7)的態樣。組成物中包含2種以上的彩色顏料,並且由2種以上的彩色顏料的組合呈現黑色時,組成物能夠較佳地用作近紅外線透射濾波器。 In the present invention, two or more kinds of color pigments can be used in combination. Moreover, when two or more kinds of color pigments are used in combination, black can be formed by the combination of two or more kinds of color pigments. Examples of such combinations include the following aspects (1) to (7). When the composition contains two or more kinds of color pigments and the combination of the two or more kinds of color pigments renders black, the composition can be preferably used as a near-infrared transmission filter.

(1)含有紅色顏料及藍色顏料之態樣。 (1)Contains red pigment and blue pigment.

(2)含有紅色顏料、藍色顏料及黃色顏料之態樣。 (2)Contains red pigment, blue pigment and yellow pigment.

(3)含有紅色顏料、藍色顏料、黃色顏料及紫色顏料之態樣。 (3) Contains red pigment, blue pigment, yellow pigment and purple pigment.

(4)含有紅色顏料、藍色顏料、黃色顏料、紫色顏料及綠色顏料之態樣。 (4) Containing red pigment, blue pigment, yellow pigment, purple pigment and green pigment.

(5)含有紅色顏料、藍色顏料、黃色顏料及綠色顏料之態樣。 (5) Containing red pigment, blue pigment, yellow pigment and green pigment.

(6)含有紅色顏料、藍色顏料及綠色顏料之態樣。 (6) Containing red pigment, blue pigment and green pigment.

(7)含有黃色顏料及紫色顏料之態樣。 (7) Contains yellow pigment and purple pigment.

(白色顏料) (white pigment)

作為白色顏料,可列舉氧化鈦、鈦酸鍶、鈦酸鋇、氧化鋅、氧化鎂、氧化鋯、氧化鋁、硫酸鋇、二氧化矽、滑石、雲母、氫氧化鋁、矽酸鈣、矽酸鋁、中空樹脂粒子、硫化鋅等。白色顏料係具有鈦原子之粒子為較佳,氧化鈦為更佳。又,白色顏料係相對於波長589nm的光之折射率為2.10以上的粒子為較佳。前述折射率係2.10~3.00為更佳,2.50~2.75為進一步較佳。 Examples of the white pigment include titanium oxide, strontium titanate, barium titanate, zinc oxide, magnesium oxide, zirconium oxide, aluminum oxide, barium sulfate, silicon dioxide, talc, mica, aluminum hydroxide, calcium silicate, and silicic acid. Aluminum, hollow resin particles, zinc sulfide, etc. White pigments are preferably particles containing titanium atoms, and titanium oxide is even more preferred. Moreover, it is preferable that the white pigment is a particle having a refractive index of 2.10 or more with respect to light with a wavelength of 589 nm. The aforementioned refractive index is more preferably 2.10 to 3.00, and further preferably 2.50 to 2.75.

又,白色顏料亦能夠使用“氧化鈦 物性與應用技術 清野學著 13~45頁 1991年6月25日發行 技報堂出版發行”中所記載之氧化鈦。 In addition, titanium oxide described in "Titanium Oxide: Physical Properties and Application Technology, Kiyono Gakusho, pp. 13~45, issued on June 25, 1991, Gihodo Publishing" can also be used as the white pigment.

白色顏料不僅可以使用包括單一無機物者,亦可以使用與其他材料複合而得之粒子。例如,使用在內部具有空孔或其他材料之粒子、在芯粒子上附著有大量無機粒子之粒子、由包括聚合物粒子之芯粒子和包括無機奈米微粒之殼層構成之芯殼複合粒子為較佳。作為上述由包括聚合物粒子之芯粒子和包括無機奈米微粒之殼層構成之芯殼複合粒子,例如能夠參閱日本特開2015-047520號公報的0012~0042段的記載,該內容被併入本說明書中。 The white pigment can be used not only as a single inorganic substance but also as particles compounded with other materials. For example, particles with pores or other materials inside, particles with a large number of inorganic particles attached to the core particles, and core-shell composite particles composed of core particles including polymer particles and shell layers including inorganic nanoparticles are used. Better. As the above-mentioned core-shell composite particles composed of core particles including polymer particles and shell layers including inorganic nanoparticles, for example, the description in paragraphs 0012 to 0042 of Japanese Patent Application Laid-Open No. 2015-047520 can be referred to, and this content is incorporated. in this manual.

白色顏料亦能夠使用中空無機粒子。中空無機粒子係在內部具有空洞之結構的無機粒子,係指具有被外殼包圍之空洞之無機粒子。作為中空無機粒子,能夠列舉日本特開2011-075786號公報、國際公開第2013/061621號、日本特開2015-164881號公報等中所記載之中空無機粒子,該等內容被併入本說明書中。 White pigments can also use hollow inorganic particles. Hollow inorganic particles are inorganic particles with a hollow structure inside. They refer to inorganic particles with a hollow structure surrounded by an outer shell. Examples of the hollow inorganic particles include those described in Japanese Patent Application Laid-Open No. 2011-075786, International Publication No. 2013/061621, Japanese Patent Application Publication No. 2015-164881, etc., the contents of which are incorporated into this specification. .

(黑色顏料) (black pigment)

作為黑色顏料並無特別限定,能夠使用公知者。例如,可列舉碳黑、鈦黑、石墨等,碳黑、鈦黑為較佳,鈦黑為更佳。鈦黑係含有鈦原子之黑色粒子,低次氧化鈦或氧氮化鈦為較佳。鈦黑能夠以提高分散性、抑制凝聚性等目的並根據需要來修飾表面。例如,能夠利用氧化矽、氧化鈦、氧化鍺、氧化鋁、氧化鎂或氧化鋯包覆鈦黑的表面。又,還能夠進行如日本特開2007-302836號公報中所示之利用拒水性物質的處理。作為黑色顏料,可列舉比色指數(C.I.)顏料黑1,7等。鈦黑的每個粒子的一次粒徑及平均一次粒徑 中的任一者均較小為較佳。具體而言,平均一次粒徑為10~45nm為較佳。鈦黑還能夠用作分散物。例如可列舉包含鈦黑粒子及二氧化矽粒子,並且分散物中的Si原子與Ti原子的含有比調整在0.20~0.50的範圍之分散物等。關於上述分散物,能夠參閱日本特開2012-169556號公報的0020~0105段的記載,該內容被編入本說明書中。作為鈦黑的市售品的例子,可列舉鈦黑10S、12S、13R、13M、13M-C、13R-N、13M-T(商品名:Mitsubishi Materials Corporation製)、Tilack D(商品名:Ako Kasei Co.,Ltd.製)等。又,可以使用日本特開2017-226821號公報的0016~0020段中所記載之苝黑(perylene black)(Lumogen Black FK4280等)。 The black pigment is not particularly limited, and known ones can be used. Examples include carbon black, titanium black, graphite, etc. Carbon black and titanium black are preferred, and titanium black is more preferred. Titanium black is black particles containing titanium atoms, preferably low-order titanium oxide or titanium oxynitride. Titanium black can modify the surface as needed for the purpose of improving dispersion and inhibiting aggregation. For example, the surface of titanium black can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide or zirconium oxide. In addition, treatment using a water-repellent substance as shown in Japanese Patent Application Laid-Open No. 2007-302836 can also be performed. Examples of the black pigment include colorimetric index (C.I.) pigment black 1, 7, and the like. The primary particle size and average primary particle size of each particle of titanium black Whichever one is smaller is better. Specifically, the average primary particle size is preferably 10 to 45 nm. Titanium black can also be used as a dispersion. For example, a dispersion containing titanium black particles and silicon dioxide particles and in which the content ratio of Si atoms to Ti atoms in the dispersion is adjusted to a range of 0.20 to 0.50. Regarding the above-mentioned dispersion, please refer to the description in paragraphs 0020 to 0105 of Japanese Patent Application Laid-Open No. 2012-169556, and this content is incorporated into this specification. Examples of commercially available titanium black include titanium black 10S, 12S, 13R, 13M, 13M-C, 13R-N, 13M-T (trade name: Mitsubishi Materials Corporation), Tilack D (trade name: Ako Kasei Co., Ltd.) etc. In addition, perylene black (Lumogen Black FK4280, etc.) described in paragraphs 0016 to 0020 of Japanese Patent Application Publication No. 2017-226821 can be used.

又,在本發明中,亦能夠使用有機系黑色著色劑。有機系黑色著色劑可以為顏料或染料,顏料為較佳。作為有機系黑色著色劑,例如可列舉雙苯并呋喃酮化合物、甲亞胺化合物、苝化合物、偶氮系化合物等,雙苯并呋喃酮化合物、苝化合物為較佳。作為雙苯并呋喃酮化合物,可列舉日本特表2010-534726號公報、特表2012-515233號公報、日本特表2012-515234號公報等中所記載之化合物,例如,能夠作為BASF公司製的“Irgaphor Black”而獲得。作為苝化合物,可列舉C.I.顏料黑31、32等。作為甲亞胺化合物,可列舉日本特開平01-170601號公報、日本特開平02-034664號公報等中所記載者,例如,能夠作為Dainichiseika Color & Chemicals Mfg.Co.,Ltd.製的“CHROMO FINE BLACK A1103”而獲得。 Furthermore, in the present invention, an organic black colorant can also be used. The organic black colorant can be a pigment or a dye, with pigments being preferred. Examples of the organic black colorant include dibenzofuranone compounds, methimine compounds, perylene compounds, azo compounds, and the like, with dibenzofuranone compounds and perylene compounds being preferred. Examples of the dibenzofuranone compound include compounds described in Japanese Patent Application Publication No. 2010-534726, Japanese Patent Application Publication No. 2012-515233, Japanese Patent Application Publication No. 2012-515234, etc., for example, it can be used as a compound manufactured by BASF Corporation "Irgaphor Black". Examples of the perylene compound include C.I. Pigment Black 31, 32, and the like. Examples of the methimine compound include those described in Japanese Patent Application Laid-Open No. 01-170601, Japanese Patent Application Laid-Open No. 02-034664, etc., for example, "CHROMO" manufactured by Dainichiseika Color & Chemicals Mfg. Co., Ltd. FINE BLACK A1103".

(近紅外線吸收顏料) (Near infrared absorbing pigment)

近紅外線吸收顏料係有機顏料為較佳。又,近紅外線吸收顏料在波長超過700nm且為1400nm以下的範圍具有極大吸收波長為較佳。又,近紅外 線吸收顏料的極大吸收波長係1200nm以下為更佳,1000nm以下為進一步較佳,950nm以下為特佳。又,近紅外線吸收顏料中,波長550nm處的吸光度A550與極大吸收波長處的吸光度Amax之比亦即A550/Amax為0.1以下為較佳,0.05以下為更佳,0.03以下為進一步較佳,0.02以下為特佳。下限並無特別限定,例如,能夠設為0.0001以上,亦能夠設為0.0005以上。若上述的吸光度之比為上述範圍,則能夠設為可見光透明性及近紅外線屏蔽性優異之近紅外線吸收顏料。另外,在本發明中,近紅外線吸收顏料的極大吸收波長及各波長處的吸光度的值係從使用包含近紅外線吸收顏料之感光性組成物而形成之膜的吸收光譜求出之值。 Near-infrared absorbing pigments are preferably organic pigments. In addition, it is preferable that the near-infrared absorbing pigment has a maximum absorption wavelength in a range between a wavelength exceeding 700 nm and a wavelength of 1400 nm or less. In addition, the maximum absorption wavelength of the near-infrared absorbing pigment is more preferably 1,200 nm or less, further preferably 1,000 nm or less, and particularly preferably 950 nm or less. In the near-infrared absorbing pigment, the ratio of the absorbance A 550 at a wavelength of 550 nm to the absorbance A max at the maximum absorption wavelength, that is, A 550 /A max , is preferably 0.1 or less, more preferably 0.05 or less, and furthermore 0.03 or less. Better, and below 0.02 is particularly good. The lower limit is not particularly limited, and may be, for example, 0.0001 or more, or 0.0005 or more. If the above-mentioned absorbance ratio is within the above range, the near-infrared absorbing pigment can be excellent in visible light transparency and near-infrared shielding properties. In the present invention, the maximum absorption wavelength of the near-infrared absorbing pigment and the absorbance value at each wavelength are values determined from the absorption spectrum of a film formed using a photosensitive composition containing a near-infrared absorbing pigment.

作為近紅外線吸收顏料並無特別限定,可列舉吡咯并吡咯化合物、芮化合物、氧雜菁化合物、方酸菁化合物、花青化合物、克酮鎓化合物、酞青化合物、萘酞青化合物、吡喃鎓化合物、薁鎓化合物、靛藍化合物及吡咯甲川化合物,選自吡咯并吡咯化合物、方酸菁化合物、花青化合物、酞青化合物及萘酞青化合物中之至少一種為較佳,吡咯并吡咯化合物或方酸菁化合物為進一步較佳,吡咯并吡咯化合物為特佳。 The near-infrared absorbing pigment is not particularly limited, and examples thereof include pyrrolopyrrole compounds, fluorine compounds, oxocyanine compounds, squaraine compounds, cyanine compounds, ketonium compounds, phthalocyanine compounds, naphthalocyanine compounds, and pyrans The onium compound, the azulenium compound, the indigo compound and the pyrrolemethane compound are preferably at least one selected from the group consisting of pyrrolopyrrole compounds, squaryl cyanine compounds, cyanine compounds, phthalocyanine compounds and naphthalocyanine compounds, and the pyrrolopyrrole compound A squaraine compound is further preferred, and a pyrrolopyrrole compound is particularly preferred.

在本發明中,感光性組成物能夠含有染料。作為染料並無特別限定,能夠使用公知的染料。染料可以為彩色染料,亦可以為近紅外線吸收染料。作為彩色染料,可列舉吡唑偶氮化合物、苯胺基偶氮化合物、三芳基甲烷化合物、蒽醌化合物、蒽吡啶酮化合物、苯亞甲基化合物、氧雜菁化合物、吡唑并三唑偶氮化合物、吡啶酮偶氮化合物、花青化合物、啡噻

Figure 108136260-A0305-02-0025-142
化合物、吡咯并吡唑次甲基偶氮化合物、
Figure 108136260-A0305-02-0025-143
化合物、酞青化合物、苯并哌喃化合物、靛藍化合物、吡咯甲川化合物。又,亦能夠使用日本特開2012-158649號公 報中所記載之噻唑化合物、日本特開2011-184493號公報中所記載之偶氮化合物、日本特開2011-145540號公報中所記載之偶氮化合物。又,作為黃色染料,亦能夠使用日本特開2013-054339號公報的0011~0034段中所記載之喹啉黃(quinophthalone)化合物、日本特開2014-026228號公報的0013~0058段中所記載之喹啉黃化合物等。又,從提高耐熱性的觀點考慮,作為黃色染料,亦能夠較佳地使用日本特開2019-073695號公報、日本特開2019-073696號公報、日本特開2019-073697號公報、日本特開2019-073698號公報中所記載之次甲基化合物。作為近紅外線吸收染料,可列舉吡咯并吡咯化合物、芮化合物、氧雜菁化合物、方酸菁化合物、花青化合物、克酮鎓化合物、酞青化合物、萘酞青化合物、吡喃鎓化合物、薁鎓化合物、靛藍化合物及吡咯甲川化合物。又,亦能夠使用日本特開2017-197437號公報中所記載之方酸菁化合物、國際公開第2017/213047號的0090~0107段中所記載之方酸菁化合物、日本特開2018-054760號公報的0019~0075段中所記載之含有吡咯環之化合物、日本特開2018-040955號公報的0078~0082段中所記載之含有吡咯環之化合物、日本特開2018-002773號公報的0043~0069段中所記載之含有吡咯環之化合物、日本特開2018-041047號公報的0024~0086段中所記載之在醯胺基α位具有芳香環之方酸菁化合物、日本特開2017-179131號公報中所記載之醯胺基連結型方酸菁化合物、日本特開2017-141215號公報中所記載之具有吡咯雙型方酸菁骨架或克酮鎓骨架之化合物、日本特開2017-082029號公報中所記載之二氫咔唑雙型的方酸菁化合物、日本特開2017-068120號公報的0027~0114段中所記載之非對稱型 的化合物、日本特開2017-067963號公報中所記載之含有吡咯環之化合物(咔唑型)、日本專利第6251530號公報中所記載之酞青化合物等。 In the present invention, the photosensitive composition can contain a dye. The dye is not particularly limited, and known dyes can be used. The dye may be a colored dye or a near-infrared absorbing dye. Examples of the color dye include pyrazole azo compounds, anilinoazo compounds, triarylmethane compounds, anthraquinone compounds, anthrapyridone compounds, benzylidene compounds, oxocyanine compounds, and pyrazotriazole azo compounds. Compounds, pyridone azo compounds, cyanine compounds, thiophene
Figure 108136260-A0305-02-0025-142
Compounds, pyrrolopyrazole methine azo compounds,
Figure 108136260-A0305-02-0025-143
Compounds, phthalocyanine compounds, benzopyran compounds, indigo compounds, pyrromethene compounds. Furthermore, the thiazole compound described in Japanese Patent Application Laid-Open No. 2012-158649, the azo compound described in Japanese Patent Application Laid-Open No. 2011-184493, and the azo compound described in Japanese Patent Application Laid-Open No. 2011-145540 can also be used. compound. In addition, as the yellow dye, the quinophthalone compound described in paragraphs 0011 to 0034 of Japanese Patent Application Laid-Open No. 2013-054339, and the quinophthalone compound described in paragraphs 0013 to 0058 of Japanese Patent Application Laid-Open No. 2014-026228 can also be used. Quinoline yellow compounds, etc. In addition, from the viewpoint of improving heat resistance, as the yellow dye, Japanese Patent Application Laid-Open Nos. 2019-073695, Japanese Patent Application Laid-Open Nos. 2019-073696, Japanese Patent Application Laid-Open Nos. 2019-073697, and Japanese Patent Application Laid-Open Nos. The methine compound described in Publication No. 2019-073698. Examples of near-infrared absorbing dyes include pyrrolopyrrole compounds, fluorine compounds, oxocyanine compounds, squaraine compounds, cyanine compounds, ketonium compounds, phthalocyanine compounds, naphthalocyanine compounds, pyranium compounds, and azulene compounds Onium compounds, indigo compounds and pyrromethene compounds. In addition, the squarylium compounds described in Japanese Patent Application Laid-Open No. 2017-197437, the squarylium compounds described in paragraphs 0090 to 0107 of International Publication No. 2017/213047, and Japanese Patent Application Laid-Open No. 2018-054760 can also be used. Compounds containing a pyrrole ring described in paragraphs 0019 to 0075 of the publication, compounds containing a pyrrole ring described in paragraphs 0078 to 0082 of Japanese Patent Application Laid-Open No. 2018-040955, compounds 0043 to 0043 of Japanese Patent Application Laid-Open No. 2018-002773 Compounds containing a pyrrole ring described in paragraph 0069, squarylium compounds having an aromatic ring at the α position of the amide group described in paragraphs 0024 to 0086 of Japanese Patent Application Laid-Open No. 2018-041047, Japanese Patent Application Laid-Open No. 2017-179131 The amide group-linked squarylium compound described in Japanese Patent Application Publication No. 2017-141215, the compound having a pyrrole bisquarylium skeleton or a squarium skeleton described in Japanese Patent Application Publication No. 2017-141215, Japanese Patent Application Publication No. 2017-082029 The dihydrocarbazole double-type squarylyanine compound described in Japanese Patent Application Publication No. 2017-068120, the asymmetric type compound described in paragraphs 0027 to 0114 of Japanese Patent Application Publication No. 2017-067963 Compounds containing a pyrrole ring (carbazole type) described, phthalocyanine compounds described in Japanese Patent No. 6251530, etc.

感光性組成物的總固體成分中的染料的含量係1質量%以上為較佳,5質量%以上為更佳,10質量%以上為特佳。作為上限並沒有特別限制,係70質量%以下為較佳,65質量%以下為更佳,60質量%以下為進一步較佳。 The content of the dye in the total solid content of the photosensitive composition is preferably 1% by mass or more, more preferably 5% by mass or more, and particularly preferably 10% by mass or more. The upper limit is not particularly limited, but it is preferably 70 mass% or less, more preferably 65 mass% or less, and still more preferably 60 mass% or less.

又,染料的含量相對於顏料的100質量份係5~50質量份為較佳。上限為45質量份以下為更佳,40質量份以下為進一步較佳。下限為10質量份以上為更佳,15質量份以上為進一步較佳。 In addition, the content of the dye is preferably 5 to 50 parts by mass based on 100 parts by mass of the pigment. The upper limit is more preferably 45 parts by mass or less, and still more preferably 40 parts by mass or less. It is more preferable that the lower limit is 10 parts by mass or more, and it is further more preferable that it is 15 parts by mass or more.

又,在本發明中,感光性組成物亦能夠實際上不含有染料。在本發明中感光性組成物實質上不包含染料時,在本發明中感光性組成物的總固體成分中的染料的含量係0.1質量%以下為較佳,0.05質量%以下為更佳,不含有為特佳。 Furthermore, in the present invention, the photosensitive composition may not actually contain a dye. In the present invention, when the photosensitive composition does not substantially contain a dye, in the present invention, the content of the dye in the total solid content of the photosensitive composition is preferably 0.1% by mass or less, more preferably 0.05% by mass or less, and not more. It is especially good if it contains.

<<<顏料衍生物>>> <<<Pigment Derivatives>>>

在本發明中,感光性組成物含有400~700nm的波長區域中的莫耳吸光係數的最大值(εmax)為3000L‧mol-1‧cm-1以下之顏料衍生物。組成物含有顏料衍生物,從而顏料在組成物中的分散性得到提高。又,顏料衍生物具有滿足上述要件之吸光特性,從而如上所述,與以往相比更促進像素深層部中的組成物的硬化。 In the present invention, the photosensitive composition contains a pigment derivative whose maximum molar absorption coefficient (εmax) in the wavelength range of 400 to 700 nm is 3000 L‧mol -1 ‧cm -1 or less. The composition contains a pigment derivative, so that the dispersibility of the pigment in the composition is improved. In addition, the pigment derivative has light-absorbing properties that satisfy the above requirements, thereby promoting the hardening of the composition in the deep portion of the pixel more than conventionally.

在本發明中,顏料衍生物的εmax為1000L‧mol-1‧cm-1以下為更佳,100L‧mol-1‧cm-1以下為進一步較佳。藉由該態樣,容易進一步提高與所獲得之膜的支撐體的密接性。εmax的下限例如為1L‧mol-1‧cm-1以上, 可以為10L‧mol-1‧cm-1以上。當顏料衍生物成為2種以上時,其至少一種εmax為1000L‧mol-1‧cm-1以下為較佳,所有種類的εmax為1000L‧mol-1‧cm-1以下為較佳。在本發明中,顏料衍生物的莫耳吸光係數的值係藉由後述之實施例中所記載之方法測量而得之值。 In the present invention, the εmax of the pigment derivative is more preferably 1000 L·mol -1 ·cm -1 or less, and further preferably 100 L·mol -1 ·cm -1 or less. This aspect makes it easy to further improve the adhesiveness with the support of the obtained film. The lower limit of εmax is, for example, 1L·mol -1 ·cm -1 or more, and may be 10L·mol -1 ·cm -1 or more. When there are two or more types of pigment derivatives, it is preferable that the εmax of at least one of them is 1000L‧mol -1 ‧cm -1 or less, and the εmax of all types is preferably 1000L‧mol -1 ‧cm -1 or less. In the present invention, the value of the molar absorption coefficient of the pigment derivative is a value measured by the method described in the Examples described below.

在本發明中,顏料衍生物滿足以下(a)~(d)中的任一分光特性亦為較佳。 In the present invention, it is also preferred that the pigment derivative satisfies any of the following spectral characteristics (a) to (d).

(a)波長超過700nm且為750nm以下的範圍的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下為較佳,1000L‧mol-1‧cm-1以下為更佳,100L‧mol-1‧cm-1以下為進一步較佳。 (a) The maximum value of the molar absorption coefficient in the range of wavelengths exceeding 700nm to 750nm or less is preferably 3000L‧mol -1 ‧cm -1 or less, more preferably 1000L‧mol -1 ‧cm -1 or less, and 100L ‧mol -1 ‧cm -1 or less is more preferred.

(b)波長超過750nm且為800nm以下的範圍的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下為較佳,1000L‧mol-1‧cm-1以下為更佳,100L‧mol-1‧cm-1以下為進一步較佳。 (b) The maximum value of the molar absorption coefficient in the range of wavelengths exceeding 750nm to 800nm or less is preferably 3000L‧mol -1 ‧cm -1 or less, more preferably 1000L‧mol -1 ‧cm -1 or less, and 100L ‧mol -1 ‧cm -1 or less is more preferred.

(c)波長超過800nm且為850nm以下的範圍的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下為較佳,1000L‧mol-1‧cm-1以下為更佳,100L‧mol-1‧cm-1以下為進一步較佳。 (c) The maximum value of the molar absorption coefficient in the range of wavelengths exceeding 800nm to 850nm or less is preferably 3000L‧mol -1 ‧cm -1 or less, more preferably 1000L‧mol -1 ‧cm -1 or less, and 100L ‧mol -1 ‧cm -1 or less is more preferred.

(d)波長超過850nm且為900nm以下的範圍的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下為較佳,1000L‧mol-1‧cm-1以下為更佳,100L‧mol-1‧cm-1以下為進一步較佳。 (d) The maximum value of the molar absorption coefficient in the range of wavelengths exceeding 850nm to 900nm or less is preferably 3000L‧mol -1 ‧cm -1 or less, more preferably 1000L‧mol -1 ‧cm -1 or less, and 100L ‧mol -1 ‧cm -1 or less is more preferred.

在本發明中,顏料衍生物包含芳香族環為較佳。作為芳香族環,可以為芳香族烴環,亦可以為芳香族雜環。又,芳香族環可以為單環,亦可以為稠環。具體而言,芳香族環為選自苯環、萘環、茀環、苝環、咪唑環、吡唑環、噁唑環、噻唑環、咪唑啉環、吡啶環、三唑環、咪唑啉環、哌

Figure 108136260-A0305-02-0028-144
環、 嘧啶環、噠
Figure 108136260-A0305-02-0029-145
環、喹啉環、異喹啉環、喹噁啉環、喹唑啉環、苯并咪唑環、苯并吡唑環、苯并噁唑環、苯并噻唑環、苯并三唑環、吲哚環、異吲哚環、三
Figure 108136260-A0305-02-0029-146
環、吡咯環、咔唑環、苯并咪唑啉酮環、鄰苯二甲醯亞胺環、酞青環、蒽醌環、二氧代吡咯并吡咯環、異吲哚啉酮環、異吲哚啉環及喹吖酮環中之芳香族環或包含該等芳香族環之稠環等為較佳。上述稠環整體可以為芳香族環,亦可以為非芳香族環,芳香族環為較佳。 In the present invention, it is preferred that the pigment derivative contains an aromatic ring. The aromatic ring may be an aromatic hydrocarbon ring or an aromatic heterocyclic ring. In addition, the aromatic ring may be a single ring or a condensed ring. Specifically, the aromatic ring is selected from the group consisting of benzene ring, naphthalene ring, fluorine ring, perylene ring, imidazole ring, pyrazole ring, oxazole ring, thiazole ring, imidazoline ring, pyridine ring, triazole ring, and imidazoline ring , pipe
Figure 108136260-A0305-02-0028-144
ring, pyrimidine ring, da
Figure 108136260-A0305-02-0029-145
Ring, quinoline ring, isoquinoline ring, quinoxaline ring, quinazoline ring, benzimidazole ring, benzopyrazole ring, benzoxazole ring, benzothiazole ring, benzotriazole ring, indole Indole ring, isoindole ring, three
Figure 108136260-A0305-02-0029-146
Ring, pyrrole ring, carbazole ring, benzimidazolinone ring, phthaloimine ring, phthalocyanine ring, anthraquinone ring, dioxopyrrolopyrrole ring, isoindolinone ring, isoindoline Aromatic rings in the indoline ring and quinacridone ring or fused rings containing these aromatic rings are preferred. The entire fused ring may be an aromatic ring or a non-aromatic ring, with an aromatic ring being preferred.

又,顏料衍生物可以僅具有1個上述芳香族環或稠環,但從芳香族環多的一方藉由ππ相互作用,顏料吸附性得到提高從而容易提高組成物的保存穩定性之原因考慮,具有2個以上的該等環為較佳。 In addition, the pigment derivative may have only one aromatic ring or condensed ring as described above, but the reason why the pigment adsorption property is improved through ππ interaction due to the more aromatic rings, thereby making it easier to improve the storage stability of the composition, Having 2 or more of these rings is preferred.

上述芳香族環或稠環可以還具有取代基。作為取代基,可列舉後述之取代基T。 The aromatic ring or condensed ring may further have a substituent. Examples of the substituent include the substituent T described below.

上述顏料衍生物具有容易與感光性組成物所含有之顏料相互作用之結構或類似於顏料之結構為較佳。藉由該態樣,能夠提高感光性組成物中的顏料的分散性,並能夠進一步提高感光性組成物的保存穩定性。又,從容易更顯著地獲得本發明的效果之原因考慮,顏料衍生物具有芳香族雜環為較佳,包含含氮芳香族雜環為更佳,包含三

Figure 108136260-A0305-02-0029-147
環為進一步較佳。 The pigment derivative preferably has a structure that easily interacts with the pigment contained in the photosensitive composition or a structure similar to the pigment. With this aspect, the dispersibility of the pigment in the photosensitive composition can be improved, and the storage stability of the photosensitive composition can be further improved. In addition, since the effect of the present invention can be more easily obtained, the pigment derivative preferably has an aromatic heterocyclic ring, more preferably contains a nitrogen-containing aromatic heterocyclic ring, and more preferably contains a tricyclic aromatic heterocyclic ring.
Figure 108136260-A0305-02-0029-147
Ring is further preferred.

而且,在本發明中,顏料衍生物具有包含三

Figure 108136260-A0305-02-0029-149
環作為芳香族環之由下述式(A1)表示之基團為特佳。 Furthermore, in the present invention, the pigment derivative has three
Figure 108136260-A0305-02-0029-149
The aromatic ring is particularly preferably a group represented by the following formula (A1).

Figure 108136260-A0305-02-0029-4
Figure 108136260-A0305-02-0029-4

式中,*表示鍵結鍵,Ya1及Ya2分別獨立地表示-N(Ra1)-或-O-,Ra1表示氫原子、烷基、烯基、炔基或芳基,B1及B2分別獨立地表示氫原子或取代基。 In the formula, * represents a bond, Ya 1 and Ya 2 independently represent -N(Ra 1 )- or -O-, Ra 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and B 1 and B 2 each independently represent a hydrogen atom or a substituent.

式(A1)中,Ya1及Ya2分別獨立地表示-N(Ra1)-或-O-,從容易更顯著地獲得本發明的效果之原因考慮,-N(Ra1)-為較佳。 In the formula (A1), Ya 1 and Ya 2 each independently represent -N(Ra 1 )- or -O-. Since the effect of the present invention can be more easily obtained, -N(Ra 1 )- is relatively good.

Ra1表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。 Ra 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom.

Ra1所表示之烷基的碳數係1~20為較佳,1~15為更佳,1~8為進一步較佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。Ra1所表示之烷基可進一步具有取代基。作為取代基,可列舉後述之取代基T。 The carbon number of the alkyl group represented by Ra 1 is preferably 1 to 20, more preferably 1 to 15, and further preferably 1 to 8. The alkyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The alkyl group represented by Ra 1 may further have a substituent. Examples of the substituent include the substituent T described below.

Ra1所表示之烯基的碳數係2~20為較佳,2~12為更佳,2~8為特佳。烯基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。Ra1所表示之烯基可以進一步具有取代基。作為取代基,可列舉後述之取代基T。 The carbon number of the alkenyl group represented by Ra 1 is preferably 2 to 20, more preferably 2 to 12, and particularly preferably 2 to 8. The alkenyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The alkenyl group represented by Ra 1 may further have a substituent. Examples of the substituent include the substituent T described below.

Ra1所表示之炔基的碳數係2~40為較佳,2~30為更佳,2~25為特佳。炔基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。Ra1所表示之炔基可以進一步具有取代基。作為取代基,可列舉後述之取代基T。 The carbon number of the alkynyl group represented by Ra 1 is preferably 2 to 40, more preferably 2 to 30, and particularly preferably 2 to 25. The alkynyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The alkynyl group represented by Ra 1 may further have a substituent. Examples of the substituent include the substituent T described below.

Ra1所表示之芳基的碳數係6~30為較佳,6~20為更佳,6~12為進一步較佳。Ra1所表示之芳基可以進一步具有取代基。作為取代基,可列舉後述之取代基T。 The carbon number of the aryl group represented by Ra 1 is preferably 6 to 30, more preferably 6 to 20, and further preferably 6 to 12. The aryl group represented by Ra 1 may further have a substituent. Examples of the substituent include the substituent T described below.

式(A1)中,B1及B2分別獨立地表示氫原子或取代基。作為取代基可列舉後述之取代基T,烷基、芳基及雜環基為較佳,芳基及雜環基為更佳,從提高顏料吸附性而容易提高組成物的保存穩定性之原因考慮,芳基為進一步較佳。又,從更容易抑制顏色不均勻之原因考慮,B1及B2中的至少一方係雜環基亦為較佳。作為雜環基,含氮雜環基為較佳,苯并咪唑酮基為更佳。 In formula (A1), B 1 and B 2 each independently represent a hydrogen atom or a substituent. Examples of the substituent include the substituent T described below. An alkyl group, an aryl group, and a heterocyclic group are preferred, and an aryl group and a heterocyclic group are more preferred. This is because the storage stability of the composition can be easily improved by improving pigment adsorption. It is considered that an aryl group is further preferred. In addition, it is also preferred that at least one of B 1 and B 2 be a heterocyclic group since color unevenness can be more easily suppressed. As the heterocyclic group, a nitrogen-containing heterocyclic group is preferred, and a benzimidazolone group is more preferred.

B1及B2所表示之烷基、芳基及雜環基可以進一步具有取代基。作為進一步的取代基,可列舉烷基(較佳為碳數1~30的烷基)、氟烷基(較佳為碳數1~30的氟烷基)、烯基(較佳為碳數2~30的烯基)、炔基(較佳為碳數2~30的炔基)、芳基(較佳為碳數6~30的芳基)、胺基(較佳為碳數0~30的胺基)、烷氧基(較佳為碳數1~30的烷氧基)、芳氧基(較佳為碳數6~30的芳氧基)、雜芳氧基、醯基(較佳為碳數1~30的醯基)、烷氧羰基(較佳為碳數2~30的烷氧羰基)、芳基氧羰基(較佳為碳數7~30的芳基氧羰基)、醯氧基(較佳為碳數2~30的醯氧基)、醯胺基(較佳為碳數2~30的醯胺基)、烷氧基羰基胺基(較佳為碳數2~30的烷氧基羰基胺基)、芳氧基羰基胺基(較佳為碳數7~30的芳氧基羰基胺基)、胺磺醯基(較佳為碳數0~30的胺磺醯基)、胺甲醯基(較佳為碳數1~30的胺甲醯基)、烷硫基(較佳為碳數1~30的烷硫基)、芳硫基(較佳為碳數6~30的芳硫基)、雜芳硫基(較佳為碳數1~30的雜芳硫基)、烷基磺 醯基(較佳為碳數1~30的烷基磺醯基)、芳基磺醯基(較佳為碳數6~30的芳基磺醯基)、雜芳基磺醯基(較佳為碳數1~30的雜芳基磺醯基)、烷基亞磺醯基(較佳為碳數1~30的烷基亞磺醯基)、芳基亞磺醯基(較佳為碳數6~30的芳基亞磺醯基)、雜芳基亞磺醯基(較佳為碳數1~30的雜芳基亞磺醯基)、脲基(較佳為碳數1~30的脲基)、磷酸醯胺基(較佳為碳數1~30的磷酸醯胺基)、羥基、羧基、磺酸基、磷酸基、巰基、鹵素原子、氰基、烷基亞磺基、芳基亞磺基、肼基、亞胺基等,烷基、氟烷基、烷氧基、胺基、鹵素原子、烯基、羥基、烷氧基羰基、醯氧基、醯胺基、硝基為較佳。 The alkyl group, aryl group and heterocyclic group represented by B 1 and B 2 may further have a substituent. Further substituents include an alkyl group (preferably an alkyl group having 1 to 30 carbon atoms), a fluoroalkyl group (preferably a fluoroalkyl group having 1 to 30 carbon atoms), and an alkenyl group (preferably an alkyl group having 1 to 30 carbon atoms). Alkenyl group with 2 to 30 carbon atoms), alkynyl group (preferably an alkynyl group with 2 to 30 carbon atoms), aryl group (preferably an aryl group with 6 to 30 carbon atoms), amine group (preferably an alkynyl group with 0 to 30 carbon atoms) 30 amino group), alkoxy group (preferably an alkoxy group with 1 to 30 carbon atoms), aryloxy group (preferably an aryloxy group with 6 to 30 carbon atoms), heteroaryloxy group, acyl group ( Preferably it is a acyl group having 1 to 30 carbon atoms), an alkoxycarbonyl group (preferably it is an alkoxycarbonyl group having 2 to 30 carbon atoms), an aryloxycarbonyl group (preferably it is an aryloxycarbonyl group having 7 to 30 carbon atoms) , acyloxy group (preferably a acyloxy group with 2 to 30 carbon atoms), amide group (preferably a amide group with 2 to 30 carbon atoms), alkoxycarbonylamino group (preferably a amide group with 2 carbon atoms) ~30 alkoxycarbonylamino group), aryloxycarbonylamino group (preferably an aryloxycarbonylamino group with 7~30 carbon atoms), amine sulfonyl group (preferably an amine with 0~30 carbon atoms) sulfonyl group), aminoformyl group (preferably an aminoformyl group having 1 to 30 carbon atoms), alkylthio group (preferably an alkylthio group having 1 to 30 carbon atoms), arylthio group (preferably an alkylthio group having 1 to 30 carbon atoms) Arylthio group with 6 to 30 carbon atoms), heteroarylthio group (preferably heteroarylthio group with 1 to 30 carbon atoms), alkylsulfonyl group (preferably alkylsulfonyl group with 1 to 30 carbon atoms) group), arylsulfonyl group (preferably an arylsulfonyl group with 6 to 30 carbon atoms), heteroarylsulfonyl group (preferably a heteroarylsulfonyl group with 1 to 30 carbon atoms), alkyl Alkyl sulfinyl group (preferably alkyl sulfinyl group having 1 to 30 carbon atoms), aryl sulfinyl group (preferably aryl sulfinyl group having 6 to 30 carbon atoms), heteroaryl group Sulfinyl group (preferably heteroarylsulfenyl group having 1 to 30 carbon atoms), ureido group (preferably ureido group having 1 to 30 carbon atoms), phosphate amide group (preferably having 1 carbon number) ~30 phosphate amide group), hydroxyl group, carboxyl group, sulfonic acid group, phosphate group, mercapto group, halogen atom, cyano group, alkyl sulfinyl group, aryl sulfinyl group, hydrazine group, imine group, etc., alkyl group , fluoroalkyl group, alkoxy group, amine group, halogen atom, alkenyl group, hydroxyl group, alkoxycarbonyl group, acyloxy group, amide group and nitro group are preferred.

B1及B2所表示之烷基、芳基及雜環基不具有上述之進一步的取代基亦為較佳。 It is also preferred that the alkyl group, aryl group and heterocyclic group represented by B 1 and B 2 do not have the above-mentioned further substituents.

(取代基T) (Substituent T)

作為取代基T,可列舉鹵素原子、氰基、硝基、烷基、烯基、炔基、芳基、雜環基、-ORt1、-CORt1、-COORt1、-OCORt1、-NRt1Rt2、-NHCORt1、-CONRt1Rt2、-NHCONRt1Rt2、-NHCOORt1、-SRt1、-SO2Rt1、-SO2ORt1、-NHSO2Rt1或-SO2NRt1Rt2。Rt1及Rt2分別獨立地表示氫原子、烷基、烯基、炔基、芳基或雜芳基。Rt1與Rt2可以鍵結而形成環。 Examples of the substituent T include a halogen atom, a cyano group, a nitro group, an alkyl group, an alkenyl group, an alkynyl group, an aryl group, a heterocyclic group, -ORt 1 , -CORt 1 , -COORt 1 , -OCORt 1 , -NRt 1 Rt 2 , -NHCORt 1 , -CONRt 1 Rt 2 , -NHCONRt 1 Rt 2 , -NHCOORt 1 , -SRt 1 , -SO 2 Rt 1 , -SO 2 ORt 1 , -NHSO 2 Rt 1 or -SO 2 NRt 1Rt2 . Rt 1 and Rt 2 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group or a heteroaryl group. Rt 1 and Rt 2 may bond to form a ring.

作為鹵素原子,可列舉氟原子、氯原子、溴原子、碘原子。 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

烷基的碳數係1~30為較佳,1~15為更佳,1~8為進一步較佳。烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。 The carbon number of the alkyl group is preferably 1 to 30, more preferably 1 to 15, and still more preferably 1 to 8. The alkyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred.

烯基的碳數係2~30為較佳,2~12為更佳,2~8為特佳。烯基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。 The carbon number of the alkenyl group is preferably 2 to 30, more preferably 2 to 12, and particularly preferably 2 to 8. The alkenyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred.

炔基的碳數係2~30為較佳,2~25為更佳。炔基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。 The carbon number of the alkynyl group is preferably 2 to 30, and more preferably 2 to 25. The alkynyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred.

芳基的碳數為6~30為較佳,6~20為更佳,6~12為進一步較佳。 The number of carbon atoms in the aryl group is preferably 6 to 30, more preferably 6 to 20, and further preferably 6 to 12.

雜環基可以為單環,亦可以為稠環。雜環基係單環或稠合數為2~4的稠環為較佳。構成雜環基的環之雜原子的數係1~3為較佳。構成雜環基的環之雜原子係氮原子、氧原子或硫原子為較佳。構成雜環基的環之碳原子的數係3~30為較佳,3~18為更佳,3~12為更佳。 The heterocyclyl group may be a single ring or a condensed ring. The heterocyclyl group is preferably a single ring or a fused ring with a fusion number of 2 to 4. The number of heteroatoms in the ring constituting the heterocyclyl group is preferably 1 to 3. The heteroatoms constituting the ring of the heterocyclyl group are preferably nitrogen atoms, oxygen atoms or sulfur atoms. The number of carbon atoms in the ring constituting the heterocyclyl group is preferably 3 to 30, more preferably 3 to 18, and even more preferably 3 to 12.

烷基、烯基、炔基、芳基及雜環基可具有取代基,亦可以為未經取代。作為取代基,可列舉上述取代基T中說明之取代基。 The alkyl group, alkenyl group, alkynyl group, aryl group and heterocyclic group may have a substituent or may be unsubstituted. Examples of the substituent include the substituents described for the substituent T mentioned above.

關於本發明的顏料衍生物,可列舉芳香族環,進而作為由上述式(A1)表示之基團的具體例可列舉下述結構的基團。以下的結構式中,Me表示甲基。 Examples of the pigment derivative of the present invention include aromatic rings, and specific examples of the group represented by the above formula (A1) include groups with the following structures. In the following structural formula, Me represents a methyl group.

[化學式5]

Figure 108136260-A0305-02-0034-5
[Chemical formula 5]
Figure 108136260-A0305-02-0034-5

[化學式6]

Figure 108136260-A0305-02-0035-6
[Chemical formula 6]
Figure 108136260-A0305-02-0035-6

[化學式7]

Figure 108136260-A0305-02-0036-7
[Chemical Formula 7]
Figure 108136260-A0305-02-0036-7

[化學式8]

Figure 108136260-A0305-02-0037-8
[Chemical formula 8]
Figure 108136260-A0305-02-0037-8

在本發明中,顏料衍生物包含選自酸基及鹼性基中之至少一種基團為較佳。 In the present invention, the pigment derivative preferably contains at least one group selected from acidic groups and basic groups.

酸基為選自羧基、磺基、磷酸基及其鹽中之至少一種為較佳,選自羧基、磺基及其鹽中之至少一種為更佳。作為構成鹽之原子或原子團,可列舉鹼金屬離子(Li+、Na+、K+等)、鹼土類金屬離子(Ca2+、Mg2+等)、銨離子、咪唑鎓離子、吡啶鎓離子、鏻離子等。 It is preferable that the acid group is at least one selected from the group consisting of carboxyl group, sulfo group, phosphoric acid group and their salts, and more preferably at least one selected from the group consisting of carboxyl group, sulfo group and their salts. Examples of atoms or atomic groups constituting the salt include alkali metal ions (Li + , Na + , K + , etc.), alkaline earth metal ions (Ca 2+ , Mg 2+ , etc.), ammonium ions, imidazolium ions, and pyridinium ions. , phosphonium ions, etc.

鹼性基為選自胺基、吡啶基及其鹽、銨基的鹽、以及酞醯亞胺甲基中之至少一種為較佳,選自胺基、胺基的鹽及銨基的鹽中之至少一種為更佳,胺基或胺基的鹽為更佳。作為胺基,可列舉-NH2、二烷基胺基、烷基芳基胺基、二芳基胺基、環狀胺基等。二烷基胺基、烷基芳基胺基、二芳基胺基、環狀胺基可以還具有取代基。作為取代基,可列舉後述之取代基T。作為構成鹽之原子或原子團,可列舉氫氧化物離子、鹵素離子、羧酸離子、磺酸離子、苯氧離子等。 The basic group is preferably at least one selected from the group consisting of an amine group, a pyridyl group and its salts, an ammonium group salt, and a phthaloimide methyl group, and is preferably selected from the group consisting of an amine group, a salt of an amine group, and a salt of an ammonium group. At least one of them is more preferred, and an amine group or a salt of an amine group is more preferred. Examples of the amino group include -NH 2 , dialkylamino group, alkylarylamine group, diarylamine group, cyclic amino group, and the like. The dialkylamino group, alkylarylamine group, diarylamine group, and cyclic amino group may further have a substituent. Examples of the substituent include the substituent T described below. Examples of atoms or atomic groups constituting the salt include hydroxide ions, halogen ions, carboxylate ions, sulfonate ions, phenoxide ions, and the like.

在本發明中,具有芳香族環之顏料衍生物為由下述式(1)表示之化合物(以下,亦稱為化合物(1)。)為較佳。 In the present invention, the pigment derivative having an aromatic ring is preferably a compound represented by the following formula (1) (hereinafter, also referred to as compound (1)).

A1-L1-Z1......(1) A 1 -L 1 -Z 1 ......(1)

式(1)中,A1表示包含芳香族環之基團,L1表示單鍵或2價的連結基,Z1表示酸基或鹼性基。 In formula (1), A 1 represents a group containing an aromatic ring, L 1 represents a single bond or a divalent connecting group, and Z 1 represents an acidic group or a basic group.

此外,從易於進一步抑制顏色不均之原因考慮,Z1為鹼性基為較佳,由下述式(Z1)表示之基團為更佳。 In addition, since it is easier to further suppress color unevenness, Z 1 is preferably a basic group, and more preferably a group represented by the following formula (Z1).

Figure 108136260-A0305-02-0038-9
Figure 108136260-A0305-02-0038-9

式中,*表示鍵結鍵,Yz1表示-N(Ry1)-或-O-,Ry1表示氫原子、烷基、烯基、炔基或芳基,Lz1表示2價的連結基,Rz1及Rz2分別獨立地表示氫原子、烷基、烯基、炔基或芳基,Rz1與Rz2可經由2價的基團鍵結而形成環,m表示1~5的整數。 In the formula, * represents a bond, Yz 1 represents -N(Ry 1 )- or -O-, Ry 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and Lz 1 represents a divalent linking group. , Rz 1 and Rz 2 independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, Rz 1 and Rz 2 can be bonded through a divalent group to form a ring, m represents an integer from 1 to 5 .

在式(1)中,由A1所包含之芳香族環與若由顏料衍生物包含則較佳之前述芳香族環相同。A1為由上述式(A1)表示之基團為較佳。作為A1的具體例,係如由上述式(A1)表示之基團的具體例。 In the formula (1), the aromatic ring included in A 1 is preferably the same as the aromatic ring mentioned above if it is included in the pigment derivative. A 1 is preferably a group represented by the above formula (A1). Specific examples of A 1 include specific examples of the group represented by the above formula (A1).

式(1)中,L1表示單鍵或2價的連結基,2價的連結基為較佳。作為L1所表示之2價的連結基,可列舉伸烷基、伸芳基、雜環基、-O-、-N(RL1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合。伸烷基的碳數係1~30為較佳,1~15為更佳,1~8為進一步較佳,1~5為特佳。伸烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為特佳。伸芳基的碳數為6~30為較佳,6~15為更佳。伸芳基係伸苯基為較佳。RL1表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。針對RL1所表示之烷基、烯基、炔基及芳基的較佳範圍,與作為Ra1的烷基、烯基、炔基及芳基的較佳範圍進行說明之範圍相同。 In formula (1), L 1 represents a single bond or a divalent linking group, and a divalent linking group is preferred. Examples of the divalent linking group represented by L 1 include an alkylene group, an aryl group, a heterocyclic group, -O-, -N(R L1 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and combinations thereof. The carbon number of the alkylene group is preferably 1 to 30, more preferably 1 to 15, further preferably 1 to 8, and particularly preferably 1 to 5. The alkylene group may be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is particularly preferred. The carbon number of the aryl group is preferably 6 to 30, and more preferably 6 to 15. An aryl group is preferably a phenylene group. R L1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom. The preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group represented by R L1 are the same as those described as the preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group of Ra 1 .

作為L1所表示之2價的連結基,係由下述式(L1)表示之基團為較佳。 As the divalent linking group represented by L 1 , a group represented by the following formula (L1) is preferred.

-L1A-L1B-L1C-......(L1) -L 1A -L 1B -L 1C -......(L1)

式中,L1A及L1C分別獨立地表示-O-、-N(RL1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-或-SO2-,L1B表示單鍵或2價的連結基。 In the formula, L 1A and L 1C independently represent -O-, -N(R L1 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH- or -SO 2 -, L 1B represents a single bond or a divalent linking group.

作為由L1B表示之2價的連結基,可列舉伸烷基、伸芳基、將伸烷基與伸芳基經由單鍵或由-O-、-N(RL1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合組成之基團鍵結而成之基團、將伸烷基彼此或伸芳基彼此經由由-O-、-N(RL1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合組成之基團鍵結而成之基團等。 Examples of the divalent connecting group represented by L 1B include an alkylene group and an aryl group. The alkylene group and the aryl group are connected via a single bond or -O-, -N(R L1 )-, -NHCO- , -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and groups composed of these combinations are bonded together, and alkylene groups are bonded to each other or The aryl groups are connected to each other via -O-, -N(R L1 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and this Groups composed of groups bonded together, etc.

作為L1的具體例可列舉下述結構的基團。 Specific examples of L 1 include groups having the following structures.

Figure 108136260-A0305-02-0040-10
Figure 108136260-A0305-02-0040-10

在式(1)中的Z1為酸基之情況下,酸基為選自羧基、磺基、磷酸基及其鹽中之至少一種為較佳,選自羧基、磺基及其鹽中之至少一種為更佳。作為構成鹽之原子或原子團,可列舉鹼金屬離子(Li+、Na+、K+等)、鹼土類金屬離子(Ca2+、Mg2+等)、銨離子、咪唑鎓離子、吡啶鎓離子、鏻離子等。 In the case where Z 1 in formula (1) is an acid group, the acid group is preferably at least one selected from the group consisting of carboxyl group, sulfo group, phosphate group and their salts, and is preferably selected from the group consisting of carboxyl group, sulfo group and their salts. At least one is better. Examples of atoms or atomic groups constituting the salt include alkali metal ions (Li + , Na + , K + , etc.), alkaline earth metal ions (Ca 2+ , Mg 2+ , etc.), ammonium ions, imidazolium ions, and pyridinium ions. , phosphonium ions, etc.

在式(1)中的Z1為鹼性基之情況下,如上所述,Z1為由下述式(Z1)表示之基團為較佳。 When Z 1 in formula (1) is a basic group, as described above, Z 1 is preferably a group represented by the following formula (Z1).

[化學式11]

Figure 108136260-A0305-02-0041-11
[Chemical formula 11]
Figure 108136260-A0305-02-0041-11

式中,*表示鍵結鍵,Yz1表示-N(Ry1)-或-O-,Ry1表示氫原子、烷基、烯基、炔基或芳基,Lz1表示2價的連結基,Rz1及Rz2分別獨立地表示氫原子、烷基、烯基、炔基或芳基,Rz1與Rz2可經由2價的基團鍵結而形成環,m表示1~5的整數。 In the formula, * represents a bond, Yz 1 represents -N(Ry 1 )- or -O-, Ry 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and Lz 1 represents a divalent linking group. , Rz 1 and Rz 2 independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, Rz 1 and Rz 2 can be bonded through a divalent group to form a ring, m represents an integer from 1 to 5 .

式(Z1)中,Yz1表示-N(Ry1)-或-O-,從容易提高耐久性之原因考慮,係-N(Ry1)-為較佳。 In the formula (Z1), Yz 1 represents -N(Ry 1 )- or -O-, and since durability is easily improved, -N(Ry 1 )- is preferred.

Ry1表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。針對Ry1所表示之烷基、烯基、炔基及芳基的較佳範圍,與作為Ra1的烷基、烯基、炔基及芳基的較佳範圍進行說明之範圍相同。 Ry 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom. The preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group represented by Ry 1 are the same as those described as the preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group of Ra 1 .

式(Z1)中,作為Lz1所表示之2價的連結基,可列舉伸烷基、伸芳基、雜環基、-O-、-N(RL1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合,伸烷基為較佳。伸烷基的碳數係1~30為較佳,1~15為更佳,1~8為進一步較佳,1~5為特佳。伸烷基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為特佳。 In the formula (Z1), examples of the divalent linking group represented by Lz 1 include an alkylene group, an aryl group, a heterocyclic group, -O-, -N(R L1 )-, -NHCO-, and -CONH. -, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and combinations thereof, with alkylene groups being preferred. The carbon number of the alkylene group is preferably 1 to 30, more preferably 1 to 15, further preferably 1 to 8, and particularly preferably 1 to 5. The alkylene group may be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is particularly preferred.

式(Z1)中,Rz1及Rz2分別獨立地表示氫原子、烷基、烯基、炔基或芳基,烷基或芳基為較佳,烷基為更佳。烷基的碳數係1~10為較佳,1~5為更佳,1~3為進一步較佳,1或2為特佳。烷基可以為直鏈、支鏈、 環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。烯基的碳數係2~10為較佳,2~8為更佳,2~5為特佳。烯基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。炔基的碳數係2~10為較佳,2~8為更佳,2~5為特佳。炔基可以為直鏈、支鏈、環狀中的任一種,直鏈或支鏈為較佳,直鏈為更佳。芳基的碳數為6~30為較佳,6~20為更佳,6~12為進一步較佳。 In the formula (Z1), Rz 1 and Rz 2 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group. An alkyl group or an aryl group is preferred, and an alkyl group is more preferred. The carbon number of the alkyl group is preferably 1 to 10, more preferably 1 to 5, further preferably 1 to 3, and 1 or 2 is particularly preferred. The alkyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The carbon number of the alkenyl group is preferably 2 to 10, more preferably 2 to 8, and particularly preferably 2 to 5. The alkenyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The carbon number of the alkynyl group is preferably 2 to 10, more preferably 2 to 8, and particularly preferably 2 to 5. The alkynyl group can be any one of straight chain, branched chain, and cyclic. Straight chain or branched chain is preferred, and straight chain is more preferred. The number of carbon atoms in the aryl group is preferably 6 to 30, more preferably 6 to 20, and further preferably 6 to 12.

式(Z1)中,Rz1與Rz2可以經由2價的基團鍵結而形成環。作為2價的基團,可列舉-CH2-、-O-、-SO2-。作為Rz1與Rz2經由2價的基團而形成之環的具體例可列舉以下。 In formula (Z1), Rz 1 and Rz 2 may be bonded via a divalent group to form a ring. Examples of the divalent group include -CH 2 -, -O-, and -SO 2 -. Specific examples of the ring formed by Rz 1 and Rz 2 via a divalent group include the following.

Figure 108136260-A0305-02-0042-12
Figure 108136260-A0305-02-0042-12

式(Z1)中,m表示1~5的整數,1~4為較佳,1~3為更佳,2~3為進一步較佳,2為特佳。 In formula (Z1), m represents an integer of 1 to 5, 1 to 4 is preferred, 1 to 3 is more preferred, 2 to 3 is further preferred, and 2 is particularly preferred.

式(1)中,Z1係由下述式(Z2)表示之基團為較佳。 In formula (1), Z 1 is preferably a group represented by the following formula (Z2).

Figure 108136260-A0305-02-0042-13
Figure 108136260-A0305-02-0042-13

式中,*表示鍵結鍵,Yz2及Yz3分別獨立地表示-N(Ry2)-或-O-, Ry2表示氫原子、烷基、烯基、炔基或芳基,Lz2及Lz3分別獨立地表示2價的連結基,Rz3~Rz6分別獨立地表示氫原子、烷基、烯基、炔基或芳基,Rz3與Rz4及Rz5與Rz6分別可經由2價的基團鍵結而形成環。 In the formula, * represents a bond, Yz 2 and Yz 3 independently represent -N(Ry 2 )- or -O-, Ry 2 represents a hydrogen atom, alkyl group, alkenyl group, alkynyl group or aryl group, Lz 2 and Lz 3 each independently represent a divalent linking group, Rz 3 ~ Rz 6 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, Rz 3 and Rz 4 and Rz 5 and Rz 6 can respectively They are bonded via a divalent group to form a ring.

式(Z2)的Yz2及Yz3的含義與式(Z1)的Yz1的含義相同,較佳的範圍亦相同。Ry2表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。針對Ry2所表示之烷基、烯基、炔基及芳基的較佳範圍,與作為Ra1的烷基、烯基、炔基及芳基的較佳範圍進行說明之範圍相同。 The meanings of Yz 2 and Yz 3 in the formula (Z2) are the same as the meaning of Yz 1 in the formula (Z1), and the preferred ranges are also the same. Ry 2 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom. The preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group represented by Ry 2 are the same as those explained as the preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group of Ra1.

式(Z2)的Lz2及Lz3的含義與式(Z1)的Lz1的含義相同,較佳的範圍亦相同。式(Z2)的Rz3~Rz6的含義與式(Z1)的Rz1及Rz2的含義相同,較佳的範圍亦相同。 The meanings of Lz 2 and Lz 3 in the formula (Z2) are the same as the meaning of Lz 1 in the formula (Z1), and the preferred ranges are also the same. The meanings of Rz 3 to Rz 6 in the formula (Z2) are the same as those of Rz 1 and Rz 2 in the formula (Z1), and the preferred ranges are also the same.

作為Z1的具體例可列舉下述結構的基團。以下結構式中,Ph表示苯基。 Specific examples of Z 1 include groups having the following structures. In the following structural formula, Ph represents a phenyl group.

[化學式14]

Figure 108136260-A0305-02-0044-14
[Chemical formula 14]
Figure 108136260-A0305-02-0044-14

在本發明中,用於感光性組成物之化合物(1)係由下述式(2)表示之化合物為較佳。藉由使用該種化合物,可進一步顯著地獲得本發明的效果。 In the present invention, the compound (1) used in the photosensitive composition is preferably a compound represented by the following formula (2). By using such a compound, the effects of the present invention can be further significantly obtained.

A1-X1-L2-X2-Z1......(2) A 1 -X 1 -L 2 -X 2 -Z 1 ......(2)

式(2)中,A1表示包含芳香族環之基團, X1及X2分別獨立地表示單鍵-O-、-N(R1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-或-SO2-,R1表示氫原子、烷基、烯基、炔基或芳基,L2表示單鍵或2價的連結基,Z1表示由上述之式(Z1)表示之基團。 In formula (2), A 1 represents a group containing an aromatic ring, and X 1 and X 2 each independently represent a single bond -O-, -N(R 1 )-, -NHCO-, -CONH-, -OCO. -, -COO-, -CO-, -SO 2 NH- or -SO 2 -, R 1 represents a hydrogen atom, alkyl group, alkenyl group, alkynyl group or aryl group, L 2 represents a single bond or a divalent connecting group , Z 1 represents a group represented by the above formula (Z1).

式(2)的A1及Z1的含義與式(1)的A1及Z1的含義相同,較佳的範圍亦相同。 A 1 and Z 1 in formula (2) have the same meaning as A 1 and Z 1 in formula (1), and the preferred ranges are also the same.

式(2)的X1及X2分別獨立地表示單鍵、-O-、-N(R1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-或-SO2-,-O-、-N(R1)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-或-SO2-為較佳。R1表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。針對R1所表示之烷基、烯基、炔基及芳基的較佳範圍,與作為Ra1的烷基、烯基、炔基及芳基的較佳範圍進行說明之範圍相同。 X 1 and X 2 in the formula (2) independently represent a single bond, -O-, -N(R 1 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, - SO 2 NH- or -SO 2 -, -O-, -N(R 1 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH- or -SO 2 - is better. R 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom. The preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group represented by R 1 are the same as those described as the preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group of Ra 1 .

式(2)的L2表示單鍵或2價的連結基。作為L2所表示之2價的連結基,可列舉伸烷基、伸芳基、將伸烷基與伸芳基經由單鍵或由-O-、-N(R2)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合組成之基團鍵結而成之基團、將伸烷基彼此或伸芳基彼此經由由-O-、-N(R2)-、-NHCO-、-CONH-、-OCO-、-COO-、-CO-、-SO2NH-、-SO2-及此等的組合組成之基團鍵結而成之基團等。R2表示氫原子、烷基、烯基、炔基或芳基,氫原子或烷基為較佳,氫原子為更佳。針對R2所表示之烷基、烯基、炔基及芳基的較佳範圍,與作為Ra1的烷基、烯基、炔基及芳基的較佳範圍進行說明之範圍相同。 L 2 in the formula (2) represents a single bond or a divalent linking group. Examples of the divalent connecting group represented by L 2 include an alkylene group and an aryl group. The alkylene group and the aryl group are connected via a single bond or -O-, -N(R 2 )-, -NHCO- , -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and groups composed of these combinations are bonded together, and alkylene groups are bonded to each other or The aryl groups are connected to each other via -O-, -N(R 2 )-, -NHCO-, -CONH-, -OCO-, -COO-, -CO-, -SO 2 NH-, -SO 2 - and this Groups composed of groups bonded together, etc. R 2 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom. The preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group represented by R 2 are the same as those explained as the preferable ranges of the alkyl group, alkenyl group, alkynyl group and aryl group of Ra 1 .

作為化合物(1)的具體例列舉以下。以下表中,A1的結構、L1的結構、Z1的結構一欄中所記載之符號分別為由A1的具體例(亦即,由上述式(A1)表示之基團的具體例)、L1的具體例、Z1的具體例列舉之結構。 Specific examples of compound (1) are listed below. In the following table, the symbols described in the columns of the structure of A 1 , the structure of L 1 , and the structure of Z 1 respectively represent specific examples of A 1 (that is, specific examples of the group represented by the above formula (A1)). ), specific examples of L 1 , and specific examples of Z 1 .

Figure 108136260-A0305-02-0047-15
Figure 108136260-A0305-02-0047-15

感光性組成物的總固體成分中的顏料衍生物的含量係0.3~20質量%為較佳。下限為0.6質量以上為更佳,0.9質量以上為進一步較佳。上限為15質量%以下為更佳,12.5質量%以下為進一步較佳,10質量%以下為特佳。 The content of the pigment derivative in the total solid content of the photosensitive composition is preferably 0.3 to 20% by mass. A lower limit of 0.6 mass or more is more preferable, and a lower limit of 0.9 mass or more is still more preferable. It is more preferable that the upper limit is 15 mass % or less, further preferably 12.5 mass % or less, and particularly preferably 10 mass % or less.

又,組成物的總固體成分中的顏料衍生物的含量與同組成物的總固體成分中的顏料的含量的質量比率為3:97~20:80為較佳。該質量比率的上限為15:85以下為更佳,13:87以下為進一步較佳。該質量比率的下限為5:95以上為更佳,8:92以上為更佳。換言之,顏料衍生物的含量相對於顏料100質量份係3~25質量份為較佳。上限為17.6質量份以下為更佳,14.9質量%以下為進一步較佳。下限為5.3質量以上為更佳,8.7質量以上為進一步較佳。 In addition, the mass ratio of the content of the pigment derivative in the total solid content of the composition to the content of the pigment in the total solid content of the same composition is preferably 3:97 to 20:80. The upper limit of the mass ratio is more preferably 15:85 or less, and still more preferably 13:87 or less. The lower limit of the mass ratio is more preferably 5:95 or more, and more preferably 8:92 or more. In other words, the content of the pigment derivative is preferably 3 to 25 parts by mass relative to 100 parts by mass of the pigment. The upper limit is more preferably 17.6 parts by mass or less, and still more preferably 14.9 mass % or less. The lower limit is 5.3 quality or more, which is better, and 8.7 quality or more, which is still more preferable.

又,組成物的總固體成分中的顏料與顏料衍生物的合計含量(顏料類濃度)為25~65質量%為較佳。下限為30質量%以上為更佳,35質量%以上為進一步較佳,40質量%以上為特佳。上限為63質量%以下為更佳,60質量%以下為進一步較佳。 In addition, the total content of the pigment and the pigment derivative (pigment concentration) in the total solid content of the composition is preferably 25 to 65% by mass. It is more preferable that the lower limit is 30 mass % or more, further preferably 35 mass % or more, and particularly preferably 40 mass % or more. It is more preferable that the upper limit is 63 mass % or less, and it is further more preferable that it is 60 mass % or less.

另外,組成物的總固體成分中的某種固形成分的含量與使該組成物硬化而形成之像素中的其固形成分的含量大致相等。 In addition, the content of a certain solid component in the total solid content of the composition is substantially equal to the content of the solid component in the pixel formed by hardening the composition.

顏料衍生物可以僅使用1種,亦可以使用2種以上。當併用2種以上時,該等的合計量係上述範圍為較佳。 Only one type of pigment derivative may be used, or two or more types may be used. When two or more types are used in combination, the total amount is preferably within the above range.

在本發明中,感光性組成物可以併用400~700nm的波長區域中的莫耳吸光係數的最大值(εmax)為3000L‧mol-1‧cm-1以下之顏料衍生物和εmax超過3000L‧mol-1‧cm-1之顏料衍生物來使用。當併用該等時,εmax 為3000L‧mol-1‧cm-1以下之顏料衍生物的含量相對於所有顏料衍生物為40質量%以上為較佳,60質量%以上為更佳,80質量%以上為進一步較佳。 In the present invention, the photosensitive composition may use together a pigment derivative with a maximum molar absorption coefficient (εmax) of 3000 L‧mol -1 ‧cm -1 or less in the wavelength range of 400 to 700 nm and an εmax of more than 3000L‧mol. -1 ‧cm -1 pigment derivatives are used. When these are used together, the content of the pigment derivative with εmax of 3000L‧mol -1 ‧cm -1 or less relative to all pigment derivatives is preferably 40 mass% or more, more preferably 60 mass% or more, and 80 mass% The above is further preferred.

<<聚合性化合物>> <<Polymerizable compound>>

本發明的結構體中的像素含有聚合性化合物為較佳。作為聚合性化合物,能夠使用能夠藉由自由基、酸或熱交聯之公知的化合物。在本發明中,聚合性化合物例如係具有乙烯性不飽和鍵基之化合物為較佳。作為乙烯性不飽和鍵基,可列舉乙烯基、(甲基)烯丙基、(甲基)丙烯醯基等。本發明中所使用之聚合性化合物係自由基聚合性化合物為較佳。 The pixels in the structure of the present invention preferably contain a polymerizable compound. As the polymerizable compound, a known compound capable of crosslinking by radicals, acid, or heat can be used. In the present invention, the polymerizable compound is preferably a compound having an ethylenically unsaturated bond group, for example. Examples of the ethylenically unsaturated bond group include a vinyl group, a (meth)allyl group, a (meth)acrylyl group, and the like. The polymerizable compound used in the present invention is preferably a radical polymerizable compound.

作為聚合性化合物,可以是單體、預聚物、低聚物等化學形態的任一種,但單體為較佳。聚合性化合物的分子量為100~3000為較佳。上限為2000以下為更佳,1500以下為進一步較佳。下限為150以上為更佳,250以上為進一步較佳。 The polymerizable compound may be in any chemical form such as a monomer, a prepolymer, or an oligomer, but a monomer is preferred. The molecular weight of the polymerizable compound is preferably 100 to 3,000. It is more preferable that the upper limit is 2,000 or less, and it is still more preferable that it is 1,500 or less. It is more preferable that the lower limit is 150 or more, and it is further more preferable that it is 250 or more.

聚合性化合物係包含3個以上的乙烯性不飽和鍵基之化合物為較佳,包含3~15個乙烯性不飽和鍵基之化合物為更佳,包含3~6個乙烯性不飽和鍵基之化合物為進一步較佳。又,聚合性化合物為3~15官能的(甲基)丙烯酸酯化合物為較佳,3~6官能的(甲基)丙烯酸酯化合物為更佳。作為聚合性化合物的具體例,可列舉日本特開2009-288705號公報的0095~0108段、日本特開2013-029760號公報的0227段、日本特開2008-292970號公報的0254~0257段、日本特開2013-253224號公報的0034~0038段、日本特開2012-208494號公報的0477段、日本特開2017-048367號公報、日本專利第6057891號公報、日本專利第6031807號公報中所記載之化合物,該等內容被編入本說明書中。 The polymerizable compound is preferably a compound containing 3 or more ethylenically unsaturated bond groups, more preferably a compound containing 3 to 15 ethylenically unsaturated bond groups, and a compound containing 3 to 6 ethylenically unsaturated bond groups. compounds are further preferred. Furthermore, the polymerizable compound is preferably a 3- to 15-functional (meth)acrylate compound, and more preferably a 3- to 6-functional (meth)acrylate compound. Specific examples of the polymerizable compound include paragraphs 0095 to 0108 of Japanese Patent Application Laid-Open No. 2009-288705, paragraph 0227 of Japanese Patent Application Laid-Open No. 2013-029760, paragraphs 0254 to 0257 of Japanese Patent Application Laid-Open No. 2008-292970, and Paragraphs 0034 to 0038 of Japanese Patent Publication No. 2013-253224, Paragraph 0477 of Japanese Patent Publication No. 2012-208494, Japanese Patent Publication No. 2017-048367, Japanese Patent Publication No. 6057891, and Japanese Patent No. 6031807 The compounds described are incorporated into this specification.

聚合性化合物為二新戊四醇三丙烯酸酯(作為市售品為KAYARAD D-330;Nippon Kayaku Co.,Ltd.製)、二新戊四醇四丙烯酸酯(作為市售品為KAYARAD D-320;Nippon Kayaku Co.,Ltd.製)、二新戊四醇五(甲基)丙烯酸酯(作為市售品為KAYARAD D-310;Nippon Kayaku Co.,Ltd.製)、二新戊四醇六(甲基)丙烯酸酯(作為市售品為KAYARAD DPHA;Nippon Kayaku Co.,Ltd.製、NK ESTER A-DPH-12E;Shin Nakamura Chemical Co.,Ltd.製)、及該等之(甲基)丙烯醯基經由乙二醇及/或丙二醇殘基鍵結之結構的化合物(例如由SARTOMER Company,Inc.市售之SR454、SR499)為較佳。又,作為聚合性化合物,亦能夠使用雙甘油EO(環氧乙烷)改性(甲基)丙烯酸酯(作為市售品的M-460;Toagosei Co.,Ltd.製)、季戊四醇四丙烯酸酯(Shin Nakamura Chemical Co.,Ltd.製、NK ESTER A-TMMT)、1,6-己二醇二丙烯酸酯(Nippon Kayaku Co.,Ltd.製、KAYARAD HDDA)、RP-1040(Nippon Kayaku Co.,Ltd.製)、ARONIX TO-2349(Toagosei Co.,Ltd.製)、NK OLIGO UA-7200(Shin Nakamura Chemical Co.,Ltd.製)、8UH-1006、8UH-1012(Taisei Fine Chemical Co.,Ltd.製)、LIGHT ACRYLATE POB-A0(KYOEISHA CHEMICAL Co.,Ltd.製)等。 The polymerizable compound is dipenterythritol triacrylate (commercially available as KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipenterythritol tetraacrylate (commercially available as KAYARAD D- 320; manufactured by Nippon Kayaku Co., Ltd.), dipenterythritol penta(meth)acrylate (commercially available as KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipenterythritol Hexa(meth)acrylate (commercially available products are KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd., NK ESTER A-DPH-12E; manufactured by Shin Nakamura Chemical Co., Ltd.), and these (A Compounds having a structure in which the acrylyl group is bonded via ethylene glycol and/or propylene glycol residues (for example, SR454 and SR499 commercially available from SARTOMER Company, Inc.) are preferred. In addition, as the polymerizable compound, diglycerol EO (ethylene oxide) modified (meth)acrylate (commercially available product M-460; manufactured by Toagosei Co., Ltd.) and pentaerythritol tetraacrylate can also be used. (manufactured by Shin Nakamura Chemical Co., Ltd., NK ESTER A-TMMT), 1,6-hexanediol diacrylate (manufactured by Nippon Kayaku Co., Ltd., KAYARAD HDDA), RP-1040 (Nippon Kayaku Co. , Ltd.), ARONIX TO-2349 (Toagosei Co., Ltd.), NK OLIGO UA-7200 (Shin Nakamura Chemical Co., Ltd.), 8UH-1006, 8UH-1012 (Taisei Fine Chemical Co. , Ltd.), LIGHT ACRYLATE POB-A0 (KYOEISHA CHEMICAL Co., Ltd.), etc.

又,作為聚合性化合物,使用三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基丙烷環氧丙烷改質三(甲基)丙烯酸酯、三羥甲基丙烷環氧乙烷改質三(甲基)丙烯酸酯、异氰脲酸環氧乙烷改質三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯等3官能的(甲基)丙烯酸酯化合物亦為較佳。作為3官能的(甲基)丙烯酸酯化合物的市售品,可列舉ARONIX M-309、M-310、M-321、M-350、M-360、M-313、M-315、M-306、M-305、M-303、 M-452、M-450(TOAGOSEI CO.,LTD.製)、NK酯A9300、A-GLY-9E、A-GLY-20E、A-TMM-3、A-TMM-3L、A-TMM-3LM-N、A-TMPT、TMPT(Shin-Nakamura Chemical Co.,Ltd.製)、KAYARAD GPO-303、TMPTA、THE-330、TPA-330、PET-30(Nippon Kayaku Co.,Ltd.製)等。 Furthermore, as the polymerizable compound, trimethylolpropane tri(meth)acrylate, trimethylolpropane ethylene oxide-modified tri(meth)acrylate, and trimethylolpropane ethylene oxide-modified were used. Trifunctional (meth)acrylate compounds such as tri(meth)acrylate, ethylene oxide isocyanurate modified tri(meth)acrylate, and pentaerythritol tri(meth)acrylate are also preferred. Commercially available products of trifunctional (meth)acrylate compounds include ARONIX M-309, M-310, M-321, M-350, M-360, M-313, M-315, and M-306. ,M-305,M-303, M-452, M-450 (manufactured by TOAGOSEI CO., LTD.), NK ester A9300, A-GLY-9E, A-GLY-20E, A-TMM-3, A-TMM-3L, A-TMM-3LM -N, A-TMPT, TMPT (manufactured by Shin-Nakamura Chemical Co., Ltd.), KAYARAD GPO-303, TMPTA, THE-330, TPA-330, PET-30 (manufactured by Nippon Kayaku Co., Ltd.), etc. .

例如,在本發明中,作為聚合性化合物能夠使用具有下述結構之化合物。 For example, in the present invention, a compound having the following structure can be used as the polymerizable compound.

Figure 108136260-A0305-02-0051-16
Figure 108136260-A0305-02-0051-16

Figure 108136260-A0305-02-0051-17
Figure 108136260-A0305-02-0051-17

又,在本發明中,作為聚合性化合物,亦能夠使用分別具有下述結構之2種化合物的混合物(左側與右側的莫耳比為7:3)。 Moreover, in the present invention, as the polymerizable compound, a mixture of two compounds each having the following structure (the molar ratio of the left side and the right side is 7:3) can also be used.

Figure 108136260-A0305-02-0051-18
Figure 108136260-A0305-02-0051-18

聚合性化合物亦能夠使用具有酸基之化合物。藉由使用具有酸基之聚合性化合物,在顯影時容易去除未曝光部的聚合性化合物,並能夠抑制 顯影殘渣的產生。作為酸基,可列舉羧基、磺酸基、磷酸基等,羧基為較佳。作為具有酸基之聚合性化合物的市售品可列舉ARONIX M-510、M-520、ARONIX TO-2349(TOAGOSEI CO.,LTD.製)等。作為具有酸基之聚合性化合物的較佳之酸值為0.1~40mgKOH/g,5~30mgKOH/g為更佳。若聚合性化合物的酸值為0.1mgKOH/g以上,則對顯影液之溶解性良好,若為40mgKOH/g以下,則在製造或處理上有利。 As the polymerizable compound, a compound having an acid group can also be used. By using a polymerizable compound having an acid group, the polymerizable compound in the unexposed portion can be easily removed during development and can suppress Generation of development residue. Examples of the acidic group include a carboxyl group, a sulfonic acid group, a phosphate group, and the like, with a carboxyl group being preferred. Commercially available products of the polymerizable compound having an acid group include ARONIX M-510, M-520, ARONIX TO-2349 (manufactured by TOAGOSEI CO., LTD.), and the like. The preferred acid value of the polymerizable compound having an acid group is 0.1 to 40 mgKOH/g, and more preferably 5 to 30 mgKOH/g. If the acid value of the polymerizable compound is 0.1 mgKOH/g or more, the solubility in the developer is good, and if it is 40 mgKOH/g or less, it is advantageous in terms of production or handling.

聚合性化合物係具有己內酯結構之化合物亦為較佳的態樣。具有己內酯結構之聚合性化合物例如由NIPPON KAYAKU CO.,Ltd.作為KAYARAD DPCA系列而在市場上出售,可列舉DPCA-20、DPCA-30、DPCA-60、DPCA-120等。 It is also preferred that the polymerizable compound is a compound having a caprolactone structure. Polymerizable compounds having a caprolactone structure are marketed as the KAYARAD DPCA series by NIPPON KAYAKU CO., Ltd., for example, and include DPCA-20, DPCA-30, DPCA-60, DPCA-120, and the like.

聚合性化合物亦能夠使用具有伸烷氧基之聚合性化合物。具有伸烷氧基之聚合性化合物係具有伸乙基氧基及/或伸丙基氧基之聚合性化合物為較佳,具有伸乙基氧基之聚合性化合物為更佳,具有4~20個伸乙基氧基之3~6官能(甲基)丙烯酸酯化合物為進一步較佳。作為具有伸烷氧基之聚合性化合物的市售品,例如可列舉Sartomer Company,Inc製的作為具有4個伸乙氧基之4官能(甲基)丙烯酸酯之SR-494、作為具有3個異伸丁氧基之3官能(甲基)丙烯酸酯之KAYARAD TPA-330等。 As the polymerizable compound, a polymerizable compound having an alkyloxy group can also be used. The polymerizable compound having an alkyloxy group is preferably a polymerizable compound having an ethyloxy group and/or a propyleneoxy group, and a polymerizable compound having an ethyloxy group is more preferred, and has 4 to 20 A 3- to 6-functional (meth)acrylate compound having an ethyloxy group is further preferred. Examples of commercially available polymerizable compounds having an alkyleneoxy group include SR-494, a tetrafunctional (meth)acrylate having four ethyleneoxy groups, manufactured by Sartomer Company, Inc. KAYARAD TPA-330, isobutoxy trifunctional (meth)acrylate, etc.

聚合性化合物亦能夠使用具有茀骨架之聚合性化合物。作為具有茀骨架之聚合性化合物的市售品,可列舉OGSOL EA-0200、EA-0300(Osaka Gas Chemicals Co.,Ltd.製,具有茀骨架之(甲基)丙烯酸酯單體)等。 As the polymerizable compound, a polymerizable compound having a fluorine skeleton can also be used. Examples of commercially available polymerizable compounds having a fluorine skeleton include OGSOL EA-0200 and EA-0300 (manufactured by Osaka Gas Chemicals Co., Ltd., (meth)acrylate monomer having a fluorine skeleton).

作為聚合性化合物,使用實質上不包含甲苯等環境法規物質之化合物亦為較佳。作為該種化合物的市售品,可列舉KAYARAD DPHA LT、KAYARAD DPEA-12LT(Nippon Kayaku Co.,Ltd.製)等。 As the polymerizable compound, it is also preferred to use a compound that does not substantially contain environmental regulations substances such as toluene. Commercially available products of this type of compound include KAYARAD DPHA LT, KAYARAD DPEA-12LT (manufactured by Nippon Kayaku Co., Ltd.), and the like.

作為聚合性化合物,如日本特公昭48-041708號公報、日本特開昭51-037193號公報、日本特公平02-032293號公報、日本特公平02-016765號公報中所記載之胺基甲酸酯丙烯酸酯類或日本特公昭58-049860號公報、日本特公昭56-017654號公報、日本特公昭62-039417號公報、日本特公昭62-039418號公報中所記載之具有環氧乙烷系骨架之胺基甲酸酯化合物亦較佳。又,使用日本特開昭63-277653號公報、日本特開昭63-260909號公報、日本特開平01-105238號公報中所記載之在分子內具有胺基結構或硫醚結構之聚合性化合物亦較佳。又,作為聚合性化合物,亦能夠使用UA-7200(Shin Nakamura Chemical Co.,Ltd.製)、DPHA-40H(Nippon Kayaku Co.,Ltd.製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600、LINC-202UA(KYOEISHA CHEMICAL Co.,Ltd.)製等市售品。 Examples of polymerizable compounds include urethane acids described in Japanese Patent Publication No. 48-041708, Japanese Patent Publication No. 51-037193, Japanese Patent Publication No. 02-032293, and Japanese Patent Publication No. 02-016765. Ester acrylates or ethylene oxide-based compounds described in Japanese Patent Publication No. 58-049860, Japanese Patent Publication No. 56-017654, Japanese Patent Publication No. 62-039417, and Japanese Patent Publication No. 62-039418 Backbone urethane compounds are also preferred. In addition, polymerizable compounds having an amino group structure or a thioether structure in the molecule described in Japanese Patent Application Laid-Open Nos. 63-277653, 63-260909, and 01-105238 are used. Also better. In addition, as the polymerizable compound, UA-7200 (manufactured by Shin Nakamura Chemical Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, and UA-306I can also be used. , AH-600, T-600, AI-600, LINC-202UA (KYOEISHA CHEMICAL Co., Ltd.) and other commercially available products.

感光性組成物的總固體成分中的聚合性化合物的含量係0.1~50質量%為較佳。下限為0.5質量%以上為更佳,1質量%以上為進一步較佳。上限為45質量%以下為更佳,40質量%以下為進一步較佳。聚合性化合物可以為單獨一種,亦可以併用兩種以上。在併用兩種以上之情況下,該等的合計在上述範圍為較佳。 The content of the polymerizable compound in the total solid content of the photosensitive composition is preferably 0.1 to 50% by mass. It is more preferable that the lower limit is 0.5 mass % or more, and it is further more preferable that it is 1 mass % or more. It is more preferable that the upper limit is 45 mass % or less, and it is further more preferable that it is 40 mass % or less. The polymerizable compound may be used alone or in combination of two or more types. When two or more types are used in combination, it is preferable that the total of them is within the above range.

<<肟系光聚合起始劑>> <<Oxime photopolymerization initiator>>

在本發明中,感光性組成物能夠包含肟系光聚合起始劑作為光聚合起始劑。作為肟系光聚合起始劑,可列舉在分子內具有肟部位之化合物(肟化合物)。 In the present invention, the photosensitive composition can contain an oxime-based photopolymerization initiator as a photopolymerization initiator. Examples of the oxime-based photopolymerization initiator include compounds having an oxime moiety in the molecule (oxime compound).

本發明中所使用之肟系光聚合起始劑係光自由基聚合起始劑為較佳。又,肟系光聚合起始劑係相對於從紫外區域至可見區域的光線具有感光性之化合物為較佳。肟系光聚合起始劑係在波長350~500nm的範圍具有極大吸收波長之化合物為較佳,在波長360~480nm的範圍具有極大吸收波長之化合物為更佳。又,從靈敏度的觀點考慮,肟化合物的波長365nm或波長405nm處的莫耳吸光係數高為較佳,1000~300000為更佳,2000~300000為進一步較佳,5000~200000為特佳。能夠使用公知的方法來測量肟化合物的莫耳吸光係數。例如,藉由分光光度計(Varian公司製造之Cary-5分光光度計(spectrophotometer)),使用乙酸乙酯溶劑以0.01g/L的濃度測量為較佳。 The oxime-based photopolymerization initiator used in the present invention is preferably a photoradical polymerization initiator. In addition, the oxime-based photopolymerization initiator is preferably a compound that is photosensitive to light from the ultraviolet region to the visible region. The oxime-based photopolymerization initiator is preferably a compound with a maximum absorption wavelength in the wavelength range of 350 to 500 nm, and a compound with a maximum absorption wavelength in the wavelength range of 360 to 480 nm is more preferred. In addition, from the viewpoint of sensitivity, it is preferable that the Mohr absorption coefficient of the oxime compound at a wavelength of 365 nm or 405 nm is high, 1,000 to 300,000 is more preferable, 2,000 to 300,000 is further preferable, and 5,000 to 200,000 is particularly preferable. The molar absorption coefficient of an oxime compound can be measured using a known method. For example, it is preferable to measure with a spectrophotometer (Cary-5 spectrophotometer manufactured by Varian) using an ethyl acetate solvent at a concentration of 0.01 g/L.

作為肟系光聚合起始劑,可列舉日本特開2001-233842號公報中所記載之化合物、日本特開2000-080068號公報中所記載之化合物、日本特開2006-342166號公報中所記載之化合物、J.C.S.Perkin II(1979年,pp.1653-1660)中所記載之化合物、J.C.S.Perkin II(1979年,pp.156-162)中所記載之化合物、Journal of Photopolymer Science and Technology(1995年,pp.202-232)中所記載之化合物、日本特開2000-066385號公報中所記載之化合物、日本特開2000-080068號公報中所記載之化合物、日本特表2004-534797號公報中所記載之化合物、日本特開2006-342166號公報中所記載之化合物、日本特開2017-019766號公報中所記載之化合物、日本專利第6065596號 公報中所記載之化合物、國際公開第2015/152153號中所記載之化合物、國際公開第2017/051680號中所記載之化合物、日本特開2017-198865號公報中所記載之化合物、國際公開第2017/164127號的0025~0038段中所記載之化合物等。作為肟系光聚合起始劑的具體例,可列舉3-苯甲醯氧基亞胺基丁烷-2-酮、3-乙醯氧基亞胺基丁烷-2-酮、3-丙醯氧基亞胺基丁烷-2-酮、2-乙醯氧基亞胺基戊烷-3-酮、2-乙醯氧基亞胺基-1-苯基丙烷-1-酮、2-苯甲醯氧基亞胺基-1-苯基丙烷-1-酮、3-(4-甲苯磺醯氧基)亞胺基丁烷-2-酮、以及2-乙氧基羰氧基亞胺基-1-苯基丙烷-1-酮等。作為市售品,可列舉IRGACURE-OXE01、IRGACURE-OXE02、IRGACURE-OXE03、IRGACURE-OXE04(以上,BASF公司製)、TR-PBG-304(Changzhou Tronly New Electronic Materials CO.,LTD.製)、Adeka Optomer N-1919(ADEKA Corporation製、日本特開2012-014052號公報中所記載之光聚合起始劑2)。 Examples of the oxime-based photopolymerization initiator include compounds described in Japanese Patent Application Laid-Open No. 2001-233842, compounds described in Japanese Patent Application Laid-Open No. 2000-080068, and compounds described in Japanese Patent Application Laid-Open No. 2006-342166. Compounds described in J.C.S. Perkin II (1979, pp. 1653-1660), Compounds described in J.C.S. Perkin II (1979, pp. 156-162), Journal of Photopolymer Science and Technology (1995) , pp. 202-232), compounds described in Japanese Patent Application Publication No. 2000-066385, compounds described in Japanese Patent Application Publication No. 2000-080068, Japanese Patent Application Publication No. 2004-534797 Compounds described, compounds described in Japanese Patent Application Laid-Open No. 2006-342166, compounds described in Japanese Patent Application Publication No. 2017-019766, Japanese Patent No. 6065596 Compounds described in the publication, compounds described in International Publication No. 2015/152153, compounds described in International Publication No. 2017/051680, compounds described in Japanese Patent Application Publication No. 2017-198865, International Publication No. The compounds described in paragraphs 0025~0038 of No. 2017/164127, etc. Specific examples of the oxime-based photopolymerization initiator include 3-benzyloxyiminobutan-2-one, 3-acetyloxyiminobutan-2-one, and 3-propanol. Acetyloxyiminobutan-2-one, 2-acetyloxyiminopentan-3-one, 2-acetyloxyiminobutan-1-one, 2 -Benzoyloxyimino-1-phenylpropan-1-one, 3-(4-toluenesulfonyloxy)iminobutan-2-one, and 2-ethoxycarbonyloxy Imino-1-phenylpropan-1-one, etc. Examples of commercially available products include IRGACURE-OXE01, IRGACURE-OXE02, IRGACURE-OXE03, IRGACURE-OXE04 (the above, manufactured by BASF), TR-PBG-304 (manufactured by Changzhou Tronly New Electronic Materials CO., LTD.), and Adeka Optomer N-1919 (photopolymerization initiator 2, manufactured by ADEKA Corporation and described in Japanese Patent Application Publication No. 2012-014052).

又,作為肟系光聚合起始劑,使用無著色性之肟化合物、透明性高且不易變色之肟化合物亦為較佳。作為市售品,可列舉ADEKAARKLS NCI-730、NCI-831、NCI-930(以上、ADEKA Corporation製)等。 In addition, as the oxime-based photopolymerization initiator, it is also preferable to use an oxime compound that has no coloring properties or an oxime compound that is highly transparent and difficult to change color. Examples of commercially available products include ADEKAARKLS NCI-730, NCI-831, NCI-930 (above, manufactured by ADEKA Corporation), and the like.

本發明中,作為肟系光聚合起始劑,亦能夠使用具有茀環之肟化合物。作為具有茀環之肟化合物的具體例,可列舉日本特開2014-137466號公報中所記載的化合物。將該內容編入本說明書中。 In the present invention, as the oxime-based photopolymerization initiator, an oxime compound having a fluorine ring can also be used. Specific examples of the oxime compound having a fluorine ring include compounds described in Japanese Patent Application Laid-Open No. 2014-137466. Incorporate this information into this manual.

本發明中,作為肟系光聚合起始劑,亦能夠使用具有氟原子之肟化合物。作為具有氟原子之肟化合物的具體例,可列舉日本特開2010-262028號公報中所記載的化合物、日本特表2014-500852號公報中所記載 的化合物24、36~40、日本特開2013-164471號公報中所記載的化合物(C-3)等。將該內容編入本說明書中。 In the present invention, as the oxime-based photopolymerization initiator, an oxime compound having a fluorine atom can also be used. Specific examples of the oxime compound having a fluorine atom include compounds described in Japanese Patent Application Publication No. 2010-262028 and Japanese Patent Application Publication No. 2014-500852. Compounds 24, 36 to 40, compound (C-3) described in Japanese Patent Application Laid-Open No. 2013-164471, etc. Incorporate this information into this manual.

本發明中,作為肟系光聚合起始劑,能夠使用具有硝基之肟化合物。具有硝基之肟化合物為二聚體亦為較佳。作為具有硝基之肟化合物的具體例,可列舉日本特開2013-114249號公報的0031~0047段、日本特開2014-137466號公報的0008~0012段、0070~0079段中所記載之化合物、日本專利4223071號公報的0007~0025段中所記載之化合物、ADEKA ARKLS NCI-831(ADEKA Corporation製)。 In the present invention, as the oxime-based photopolymerization initiator, an oxime compound having a nitro group can be used. It is also preferred that the oxime compound having a nitro group is a dimer. Specific examples of the oxime compound having a nitro group include compounds described in paragraphs 0031 to 0047 of Japanese Patent Application Laid-Open No. 2013-114249 and paragraphs 0008 to 0012 and 0070 to 0079 of Japanese Patent Application Laid-Open No. 2014-137466. , the compound described in paragraphs 0007 to 0025 of Japanese Patent No. 4223071, ADEKA ARKLS NCI-831 (manufactured by ADEKA Corporation).

本發明中,作為肟系光聚合起始劑,亦能夠使用具有苯并呋喃骨架之肟化合物。作為具體例,可列舉國際公開第2015/036910號中所記載之OE-01~OE-75。 In the present invention, as the oxime-based photopolymerization initiator, an oxime compound having a benzofuran skeleton can also be used. Specific examples include OE-01 to OE-75 described in International Publication No. 2015/036910.

本發明中,作為肟系光聚合起始劑,還可以使用2官能或3官能以上的肟系光聚合起始劑。藉由使用該種肟系光聚合起始劑,從肟系光聚合起始劑的1分子產生2個以上的自由基,因此可獲得良好的靈敏度。又,當使用非對稱結構的化合物作為肟系光聚合起始劑時,結晶性降低,溶劑等中的溶解性提高,隨時間的推移難以析出,能夠提高感光性組成物的經時穩定性。作為2官能或3官能以上的肟系光聚合起始劑的具體例,可列舉日本特表2010-527339號公報、日本特表2011-524436號公報、國際公開第2015/004565號、日本特表2016-532675號公報的0407~0412段、國際公開第2017/033680號的0039~0055段中所記載之肟化合物的二聚體、日本特表2013-522445號公報中所記載之化合物(E)及化合物(G)、國際公開第2016/034963號中所記載之Cmpd1~7、日本特表2017-523465號公報的 0007段中所記載之肟系光聚合起始劑、日本特開2017-167399號公報的0020~0033段中所記載之肟系光聚合起始劑、日本特開2017-151342號公報的0017~0026段中所記載之光聚合起始劑(A)等。 In the present invention, as the oxime-based photopolymerization initiator, a bifunctional or trifunctional or higher-functional oxime-based photopolymerization initiator can also be used. By using this oxime-based photopolymerization initiator, two or more radicals are generated from one molecule of the oxime-based photopolymerization initiator, so good sensitivity can be obtained. In addition, when a compound with an asymmetric structure is used as an oxime-based photopolymerization initiator, the crystallinity is reduced and the solubility in solvents and the like is improved, making it difficult to precipitate over time, thereby improving the stability of the photosensitive composition over time. Specific examples of the bifunctional or trifunctional or higher oxime-based photopolymerization initiator include Japanese Patent Publication No. 2010-527339, Japanese Patent Publication No. 2011-524436, International Publication No. 2015/004565, and Japanese Patent Publication No. The dimer of the oxime compound described in paragraphs 0407 to 0412 of Publication No. 2016-532675, the dimer of the oxime compound described in paragraphs 0039 to 0055 of International Publication No. 2017/033680, and the compound (E) described in Japanese Patent Publication No. 2013-522445 and compound (G), Cmpd1~7 described in International Publication No. 2016/034963, Japanese Patent Publication No. 2017-523465 The oxime-based photopolymerization initiator described in paragraph 0007, the oxime-based photopolymerization initiator described in paragraphs 0020 to 0033 of Japanese Patent Application Laid-Open No. 2017-167399, and the 0017 to Japanese Patent Application Laid-Open No. 2017-151342 The photopolymerization initiator (A) described in paragraph 0026, etc.

以下示出在本發明中較佳地使用之肟系光聚合起始劑的具體例,但本發明不限定於該等。 Specific examples of oxime-based photopolymerization initiators preferably used in the present invention are shown below, but the present invention is not limited to these.

Figure 108136260-A0305-02-0057-19
Figure 108136260-A0305-02-0057-19

[化學式19]

Figure 108136260-A0305-02-0058-20
[Chemical formula 19]
Figure 108136260-A0305-02-0058-20

感光性組成物的總固體成分中的肟系光聚合起始劑的含量為0.1~30質量%為較佳。下限為0.5質量%以上為更佳,1質量%以上為進一步較佳。上限為20質量%以下為更佳,15質量%以下為進一步較佳。在本發明中,肟系光聚合起始劑可以僅使用1種,亦可以使用2種以上。當使用2種以上時,此等的合計量在上述範圍為較佳。 The content of the oxime-based photopolymerization initiator in the total solid content of the photosensitive composition is preferably 0.1 to 30% by mass. It is more preferable that the lower limit is 0.5 mass % or more, and it is further more preferable that it is 1 mass % or more. It is more preferable that the upper limit is 20 mass % or less, and it is further more preferable that it is 15 mass % or less. In the present invention, only one type of oxime-based photopolymerization initiator may be used, or two or more types may be used. When two or more types are used, the total amount is preferably within the above range.

<<其他光聚合起始劑>> <<Other photopolymerization initiators>>

在本發明中,感光性組成物能夠含有除了肟系光聚合起始劑以外的光聚合起始劑(其他光聚合起始劑)作為光聚合起始劑。作為其他光聚合起始劑,可列舉鹵化烴衍生物(例如,具有三

Figure 108136260-A0305-02-0058-150
骨架之化合物、具有噁二唑骨架 之化合物等)、醯基膦化合物、六芳基聯咪唑、有機過氧化物、硫代化合物、酮化合物、芳香族鎓鹽、α-羥基酮化合物、α-胺基酮化合物等。從曝光靈敏度的觀點而言,其他光自由基聚合起始劑係三鹵甲基三
Figure 108136260-A0305-02-0059-151
(trihalo methyl triazine)化合物、苄基二甲基縮酮化合物、α-羥基酮化合物、α-胺基酮化合物、醯基膦化合物、氧化膦化合物、茂金屬化合物、三芳基咪唑二聚物、鎓化合物、苯并噻唑化合物、二苯甲酮化合物、苯乙酮化合物、環戊二烯-苯-鐵錯合物、鹵甲基
Figure 108136260-A0305-02-0059-152
二唑化合物及3-芳基取代香豆素化合物為較佳,選自α-羥基酮化合物、α-胺基酮化合物及醯基膦化合物中之化合物為更佳。 In the present invention, the photosensitive composition can contain a photopolymerization initiator (other photopolymerization initiator) other than an oxime-based photopolymerization initiator as a photopolymerization initiator. As other photopolymerization initiators, halogenated hydrocarbon derivatives (for example, having three
Figure 108136260-A0305-02-0058-150
skeleton compounds, compounds with oxadiazole skeleton, etc.), acylphosphine compounds, hexaarylbiimidazole, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, α-hydroxyketone compounds, α- Amino ketone compounds, etc. From the perspective of exposure sensitivity, other photoradical polymerization initiators are trihalomethyl tri
Figure 108136260-A0305-02-0059-151
(trihalo methyl triazine) compound, benzyldimethyl ketal compound, α-hydroxyketone compound, α-aminoketone compound, acylphosphine compound, phosphine oxide compound, metallocene compound, triarylimidazole dimer, onium Compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds, cyclopentadiene-benzene-iron complex, halomethyl
Figure 108136260-A0305-02-0059-152
Oxidazole compounds and 3-aryl-substituted coumarin compounds are preferred, and compounds selected from α-hydroxyketone compounds, α-aminoketone compounds and acylphosphine compounds are more preferred.

作為α-羥基酮化合物的市售品,能夠列舉IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959、IRGACURE-127(以上為BASF公司製)。作為α-胺基酮化合物的市售品,可列舉IRGACURE-907、IRGACURE-369、IRGACURE-379及IRGACURE-379EG(以上為BASF公知製)等。作為醯基膦化合物的市售品,可列舉IRGACURE-819、DAROCUR-TPO(以上為BASF公知製)等。 Examples of commercially available α-hydroxyketone compounds include IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, and IRGACURE-127 (the above are manufactured by BASF Corporation). Examples of commercially available α-aminoketone compounds include IRGACURE-907, IRGACURE-369, IRGACURE-379, and IRGACURE-379EG (the above are publicly known products made by BASF). Examples of commercially available acylphosphine compounds include IRGACURE-819, DAROCUR-TPO (the above are publicly available products from BASF), and the like.

在本發明中,感光性組成物含有其他光聚合起始劑時,組成物的總固體成分中的其他光聚合起始劑的含量係0.1~30質量%為較佳。下限為0.5質量%以上為更佳,1質量%以上為進一步較佳。上限為20質量%以下為更佳,15質量%以下為進一步較佳。 In the present invention, when the photosensitive composition contains other photopolymerization initiators, the content of the other photopolymerization initiators in the total solid content of the composition is preferably 0.1 to 30% by mass. It is more preferable that the lower limit is 0.5 mass % or more, and it is further more preferable that it is 1 mass % or more. It is more preferable that the upper limit is 20 mass % or less, and it is further more preferable that it is 15 mass % or less.

又,其他光聚合起始劑的含量相對於肟系光聚合起始劑的100質量份係1~100質量份為較佳。上限為90質量份以下為更佳,80質量份以下為進一步較佳。下限為5質量份以上為更佳,10質量份以上為進一步較佳。 In addition, the content of other photopolymerization initiators is preferably 1 to 100 parts by mass relative to 100 parts by mass of the oxime-based photopolymerization initiator. The upper limit is more preferably 90 parts by mass or less, and still more preferably 80 parts by mass or less. It is more preferable that the lower limit is 5 parts by mass or more, and it is further more preferable that it is 10 parts by mass or more.

又,在本發明中,感光性組成物的總固體成分中的肟系起始劑與其他光聚合起始劑的合計的含量係0.1~30質量%為較佳。下限為0.5質量%以上為更佳,1質量%以上為進一步較佳。上限為20質量%以下為更佳,15質量%以下為進一步較佳。 Furthermore, in the present invention, the total content of the oxime-based initiator and other photopolymerization initiators in the total solid content of the photosensitive composition is preferably 0.1 to 30% by mass. It is more preferable that the lower limit is 0.5 mass % or more, and it is further more preferable that it is 1 mass % or more. It is more preferable that the upper limit is 20 mass % or less, and it is further more preferable that it is 15 mass % or less.

在本發明中,感光性組成物實質上不含有其他光聚合起始劑亦為較佳。藉由該態樣,容易形成密接性更優異之膜。在本發明中,感光性組成物實質上不包含其他光聚合起始劑時,組成物的總固體成分中的其他光聚合起始劑的含量係0.05質量%以下為較佳,0.01質量%以下為更佳,不含有為特佳。 In the present invention, it is also preferred that the photosensitive composition contains substantially no other photopolymerization initiator. This aspect makes it easier to form a film with better adhesion. In the present invention, when the photosensitive composition does not substantially contain other photopolymerization initiators, the content of other photopolymerization initiators in the total solid content of the composition is preferably 0.05 mass % or less, and 0.01 mass % or less. It is better, and it is especially better if it does not contain.

<<樹脂>> <<Resin>>

在本發明中,感光性組成物含有樹脂。樹脂例如以將顏料等粒子分散於感光性組成物中之用途或黏合劑的用途來進行摻和。另外,亦將主要用於使顏料等粒子分散之樹脂稱為分散劑。但是,樹脂的該等用途為一例,亦能夠以除了該等用途以外的目的使用。 In the present invention, the photosensitive composition contains resin. The resin is blended, for example, for the purpose of dispersing particles such as pigments in a photosensitive composition or as a binder. In addition, resins mainly used to disperse particles such as pigments are also called dispersants. However, these uses of the resin are examples, and the resin can be used for purposes other than these uses.

樹脂的重量平均分子量(Mw)係3000~2000000為較佳。上限為1000000以下為更佳,500000以下為進一步較佳。下限為4000以上為更佳,5000以上為進一步較佳。 The weight average molecular weight (Mw) of the resin is preferably 3,000 to 2,000,000. It is more preferable that the upper limit is 1,000,000 or less, and it is further more preferable that it is 500,000 or less. It is more preferable that the lower limit is 4,000 or more, and it is further more preferable that it is 5,000 or more.

作為樹脂,可列舉(甲基)丙烯酸樹脂、烯-硫醇樹脂、聚碳酸酯樹脂、聚醚樹脂、聚芳酯樹脂、聚碸樹脂、聚醚碸樹脂、聚苯樹脂、聚伸芳基醚氧化膦樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚烯烴樹脂、環狀烯烴樹脂、聚酯樹脂、苯乙烯樹脂等。從該等樹脂可以單獨使用1種,亦可混合2種以上使用。又,亦能夠使用日本特開2017-206689號公報的0041~ 0060段中所記載之樹脂、日本特開2018-010856號公報的0022~0071段中所記載之樹脂。 Examples of the resin include (meth)acrylic resin, ene-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polystyrene resin, polyetherstyrene resin, polyphenylene resin, and polyarylene ether. Phosphine oxide resin, polyimide resin, polyamide imide resin, polyolefin resin, cyclic olefin resin, polyester resin, styrene resin, etc. One type of these resins may be used alone, or two or more types may be mixed and used. In addition, 0041~ of Japanese Patent Application Laid-Open No. 2017-206689 can also be used. The resin described in paragraph 0060, and the resin described in paragraphs 0022 to 0071 of Japanese Patent Application Laid-Open No. 2018-010856.

本發明中,作為樹脂使用具有酸基之樹脂為較佳。藉由該態樣,能夠提高感光性組成物的顯影性,並且容易形成矩形性優異的像素。作為酸基,可列舉羧基、磷酸基、磺基、酚性羥基等,羧基為較佳。具有酸基之樹脂例如能夠用作鹼可溶性樹脂。 In the present invention, it is preferable to use a resin having an acid group as the resin. With this aspect, the developability of the photosensitive composition can be improved, and pixels excellent in rectangularity can be easily formed. Examples of the acidic group include a carboxyl group, a phosphate group, a sulfo group, a phenolic hydroxyl group, and the like, with a carboxyl group being preferred. A resin having an acid group can be used as an alkali-soluble resin, for example.

具有酸基之樹脂包含側鏈上具有酸基之重複單元為較佳,在樹脂的所有重複單元中包含5~70莫耳%的側鏈上具有酸基之重複單元為更佳。側鏈上具有酸基之重複單元的含量的上限係50莫耳%以下為進一步較佳,30莫耳%以下為特佳。側鏈上具有酸基之重複單元的含量的下限係10莫耳%以上為進一步較佳,20莫耳%以上為特佳。 It is preferred that the resin having an acidic group contains repeating units having an acidic group on the side chain, and it is more preferred that the resin contains 5 to 70 mol% of repeating units having an acidic group on the side chain among all the repeating units of the resin. The upper limit of the content of the repeating unit having an acid group on the side chain is more preferably 50 mol% or less, and particularly preferably 30 mol% or less. The lower limit of the content of the repeating unit having an acid group in the side chain is more preferably 10 mol% or more, and particularly preferably 20 mol% or more.

具有酸基之樹脂例如亦能夠使用日本特開2013-029760號公報等中所記載之醚二聚體。將該內容編入本說明書中。 As the resin having an acid group, for example, the ether dimer described in Japanese Patent Application Laid-Open No. 2013-029760 and the like can also be used. Incorporate this information into this manual.

本發明中所使用之樹脂包含來自於由下述式(X)表示之化合物之重複單元亦為較佳。 The resin used in the present invention preferably contains a repeating unit derived from a compound represented by the following formula (X).

Figure 108136260-A0305-02-0061-21
Figure 108136260-A0305-02-0061-21

式(X)中,R1表示氫原子或甲基,R2表示碳數2~10的伸烷基,R3表示氫原子或可以包含苯環之碳數1~20的烷基。n表示1~15的整數。 In the formula (X), R 1 represents a hydrogen atom or a methyl group, R 2 represents an alkylene group having 2 to 10 carbon atoms, and R 3 represents a hydrogen atom or an alkyl group having 1 to 20 carbon atoms that may contain a benzene ring. n represents an integer from 1 to 15.

關於具有酸基之樹脂,能夠參閱日本特開2012-208494號公報的0558~0571段(對應之美國專利申請公開第2012/0235099號說明書的0685 ~0700段)的記載、日本特開2012-198408號公報的0076~0099段的記載,該等內容被併入本說明書中。又,具有酸基之樹脂亦能夠使用市售品。 Regarding the resin having an acid group, please refer to paragraphs 0558 to 0571 of Japanese Patent Application Publication No. 2012-208494 (corresponding to paragraph 0685 of US Patent Application Publication No. 2012/0235099). to paragraphs 0700) and paragraphs 0076 to 0099 of Japanese Patent Application Laid-Open No. 2012-198408, these contents are incorporated into this specification. In addition, commercially available resins having acidic groups can also be used.

具有酸基之樹脂的酸值係30~500mgKOH/g為較佳。下限為50mgKOH/g以上為更佳,70mgKOH/g以上為進一步較佳。上限為400mgKOH/g以下為更佳,300mgKOH/g以下為進一步較佳,200mgKOH/g以下為特佳。具有酸基之樹脂的重量平均分子量(Mw)係5000~100000為較佳。又,具有酸基之樹脂的數平均分子量(Mn)係1000~20000為較佳。 The acid value of the resin with acid groups is preferably 30~500mgKOH/g. It is more preferable that the lower limit is 50 mgKOH/g or more, and it is further more preferable that it is 70 mgKOH/g or more. The upper limit is more preferably 400 mgKOH/g or less, further preferably 300 mgKOH/g or less, and particularly preferably 200 mgKOH/g or less. The weight average molecular weight (Mw) of the resin having acidic groups is preferably 5,000 to 100,000. In addition, the number average molecular weight (Mn) of the resin having an acidic group is preferably 1,000 to 20,000.

作為具有酸基之樹脂,例如可列舉下述結構的樹脂等。 Examples of the resin having an acid group include resins having the following structures.

Figure 108136260-A0305-02-0062-22
Figure 108136260-A0305-02-0062-22

[化學式22]

Figure 108136260-A0305-02-0063-23
[Chemical formula 22]
Figure 108136260-A0305-02-0063-23

在本發明中,感光性組成物還能夠包含作為分散劑之樹脂。作為分散劑,可列舉酸性分散劑(酸性樹脂)、鹼性分散劑(鹼性樹脂)。在此,酸性分散劑(酸性樹脂)表示酸基的量多於鹼性基的量之樹脂。酸性分散劑(酸性樹脂),將酸基的量與鹼性基的量的總計量設為100莫耳%時,酸基的量佔70莫耳%以上之樹脂為較佳,實質上僅包含酸基之樹脂為更佳。酸性分散劑(酸性樹脂)所具有之酸基為羧基為較佳。酸性分散劑(酸性樹脂)的酸值係40~105mgKOH/g為較佳,50~105mgKOH/g為更佳,60~105mgKOH/g為進一步較佳。又,鹼性分散劑(鹼性樹脂)表示鹼性基的量多於酸基的量之樹脂。鹼性分散劑(鹼性樹脂),將酸基的量與鹼性基的量的總計量設為100莫耳%時,鹼性基的量大於50莫耳%之樹脂為較佳。鹼性分散劑所具有之鹼性基為胺基為較佳。 In the present invention, the photosensitive composition can further contain a resin as a dispersant. Examples of the dispersant include acidic dispersants (acidic resins) and alkaline dispersants (basic resins). Here, the acidic dispersant (acidic resin) means a resin in which the amount of acidic groups is greater than the amount of basic groups. Acidic dispersants (acidic resins), when the total amount of acidic groups and alkaline groups is 100 mol%, a resin containing 70 mol% or more of acidic groups is preferred, and it essentially contains only Acid-based resins are better. It is preferable that the acidic group of the acidic dispersant (acidic resin) is a carboxyl group. The acid value of the acidic dispersant (acidic resin) is preferably 40 to 105 mgKOH/g, more preferably 50 to 105 mgKOH/g, and further preferably 60 to 105 mgKOH/g. In addition, the basic dispersant (basic resin) means a resin in which the amount of basic groups is greater than the amount of acid groups. For an alkaline dispersant (alkaline resin), when the total amount of acidic groups and basic groups is 100 mol%, a resin containing more than 50 mol% of basic groups is preferred. The basic group of the alkaline dispersant is preferably an amine group.

用作分散劑之樹脂包含具有酸基之重複單元為較佳。用作分散劑之樹脂包含具有酸基之重複單元,藉此在藉由光刻法形成圖案時,能夠進一步抑制顯影殘渣的產生。 The resin used as a dispersant preferably contains repeating units having acid groups. The resin used as a dispersant contains a repeating unit having an acid group, thereby further suppressing the generation of development residue when forming patterns by photolithography.

用作分散劑之樹脂為接枝樹脂亦為較佳。接枝樹脂的詳細內容能夠參閱日本特開2012-255128號公報的0025~0094段的記載,該內容被併 入本說明書中。又,用作分散劑之樹脂為包含受阻胺4級鹽之樹脂亦為較佳。該種樹脂的詳細內容例如能夠參閱日本特開2019-095548號公報的記載,該內容被併入本說明書中。 It is also preferred that the resin used as the dispersant is a graft resin. For details on the graft resin, please refer to paragraphs 0025 to 0094 of Japanese Patent Application Laid-Open No. 2012-255128, which is incorporated by reference. into this manual. Moreover, it is also preferable that the resin used as a dispersing agent contains a hindered amine quaternary salt. For details of this type of resin, refer to the description of Japanese Patent Application Laid-Open No. 2019-095548, for example, and this content is incorporated into this specification.

用作分散劑之樹脂係在主鏈及側鏈中的至少一處包含氮原子之聚亞胺系分散劑亦為較佳。作為聚亞胺系分散劑,係具有主鏈及側鏈,且在主鏈及側鏈的至少一處具有鹼性氮原子之樹脂為較佳,該主鏈包含具有pKa14以下的官能基之部分結構,該側鏈的原子數為40~10000。鹼性氮原子只要係呈鹼性之氮原子,則並沒有特別限制。關於聚亞胺系分散劑,能夠參閱日本特開2012-255128號公報的0102~0166段的記載,該內容被併入本說明書中。 It is also preferable that the resin used as the dispersant is a polyimine-based dispersant containing a nitrogen atom in at least one of its main chain and side chain. The polyimine-based dispersant is preferably a resin having a main chain and a side chain, and a basic nitrogen atom in at least one of the main chain and side chain. The main chain includes a portion with a functional group of pKa14 or less. Structure, the number of atoms in the side chain is 40~10000. The basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom. Regarding the polyimine-based dispersant, please refer to the descriptions in paragraphs 0102 to 0166 of Japanese Patent Application Laid-Open No. 2012-255128, and this content is incorporated into this specification.

用作分散劑之樹脂係在芯部鍵結有複數個聚合物鏈之結構的樹脂亦為較佳。作為該種樹脂,例如可列舉樹枝狀聚合物(包含星型聚合物)。又,作為樹枝狀聚合物的具體例,可列舉日本特開2013-043962號公報的0196~0209段中所記載之高分子化合物C-1~C-31等。 It is also preferred that the resin used as the dispersant has a structure in which a plurality of polymer chains are bonded to the core. Examples of such resins include dendritic polymers (including star polymers). Specific examples of dendrimers include polymer compounds C-1 to C-31 described in paragraphs 0196 to 0209 of Japanese Patent Application Laid-Open No. 2013-043962.

又,亦能夠將上述具有酸基之樹脂(鹼可溶性樹脂)用作分散劑。 Moreover, the above-mentioned resin having an acid group (alkali-soluble resin) can also be used as a dispersant.

又,用作分散劑之樹脂係包含側鏈上具有乙烯性不飽和鍵基之重複單元之樹脂亦為較佳。側鏈上具有乙烯性不飽和鍵基之重複單元的含量係樹脂的所有重複單元中10莫耳%以上為較佳,10~80莫耳%為更佳,20~70莫耳%為進一步較佳。 In addition, the resin used as the dispersant is preferably a resin containing a repeating unit having an ethylenically unsaturated bond group in the side chain. The content of repeating units with ethylenically unsaturated bond groups on the side chains is preferably 10 mol% or more of all repeating units of the resin, more preferably 10 to 80 mol%, and further preferably 20 to 70 mol%. good.

分散劑亦能夠作為市售品獲得,作為該種具體例,可列舉BYKChemieGmbH製的DISPERBYK系列(例如,DISPERBYK-111、161等)、Lubrizol Japan Limited.製的SOLSPERSE系列(例如、SOLSPERSE76500 等)等。又,亦能夠使用日本特開2014-130338號公報的0041~0130段中所記載之顏料分散劑,該內容被併入本說明書中。另外,作為上述分散劑而說明之樹脂還能夠以除了分散劑以外的用途而使用。例如,還能夠作為黏合劑而使用。 Dispersants are also available as commercial products, and specific examples thereof include the DISPERBYK series (for example, DISPERBYK-111, 161, etc.) manufactured by BYK Chemie GmbH, and the SOLSPERSE series (for example, SOLSPERSE 76500) manufactured by Lubrizol Japan Limited. etc. In addition, the pigment dispersant described in paragraphs 0041 to 0130 of Japanese Patent Application Laid-Open No. 2014-130338 can also be used, and this content is incorporated into this specification. In addition, the resin described as the said dispersing agent can also be used for purposes other than a dispersing agent. For example, it can also be used as an adhesive.

在本發明中,感光性組成物包含樹脂時,感光性組成物的總固體成分中的樹脂的含量係5~50質量%為較佳。下限為10質量%以上為更佳,15質量%以上為進一步較佳。上限為40質量%以下為更佳,35質量%以下為進一步較佳,30質量%以下為特佳。又,感光性組成物的總固體成分中的具有酸基之樹脂的含量係5~50質量%為較佳。下限為10質量%以上為更佳,15質量%以上為進一步較佳。上限為40質量%以下為更佳,35質量%以下為進一步較佳,30質量%以下為特佳。又,從容易獲得優異的顯影性的原因考慮,樹脂總量中的具有酸基之樹脂的含量係30質量%以上為較佳,50質量%以上為更佳,70質量%以上為進一步較佳,80質量%以上為特佳。上限能夠設為100質量%,亦能夠設為95質量%,亦能夠設為90質量%以下。 In the present invention, when the photosensitive composition contains a resin, the content of the resin in the total solid content of the photosensitive composition is preferably 5 to 50% by mass. It is more preferable that the lower limit is 10 mass % or more, and it is further more preferable that it is 15 mass % or more. It is more preferable that the upper limit is 40 mass % or less, further preferably 35 mass % or less, and particularly preferably 30 mass % or less. In addition, the content of the resin having an acid group in the total solid content of the photosensitive composition is preferably 5 to 50% by mass. It is more preferable that the lower limit is 10 mass % or more, and it is further more preferable that it is 15 mass % or more. It is more preferable that the upper limit is 40 mass % or less, further preferably 35 mass % or less, and particularly preferably 30 mass % or less. In addition, in order to easily obtain excellent developability, the content of the resin having an acid group in the total resin is preferably 30 mass% or more, more preferably 50 mass% or more, and further preferably 70 mass% or more. , more than 80% by mass is particularly good. The upper limit can be set to 100 mass%, 95 mass%, or 90 mass% or less.

又,從硬化性、顯影性及覆膜形成性的觀點考慮,感光性組成物的總固體成分中的聚合性化合物與樹脂的合計的含量係10~65質量%為較佳。下限係15質量%以上為更佳,20質量%以上為進一步較佳,30質量%以上為特佳。上限為60質量%以下為更佳,50質量%以下為進一步較佳,40質量%以下為特佳。又,相對於聚合性化合物的100質量份,含有30~300質量份的樹脂為較佳。下限為50質量份以上為更佳,80質量份以上為 進一步較佳。上限為250質量份以下為更佳,200質量份以下為進一步較佳。 In addition, from the viewpoint of curability, developability, and film formation, the total content of the polymerizable compound and resin in the total solid content of the photosensitive composition is preferably 10 to 65 mass %. The lower limit is more preferably 15% by mass or more, more preferably 20% by mass or more, and particularly preferably 30% by mass or more. It is more preferable that the upper limit is 60 mass % or less, further preferably 50 mass % or less, and particularly preferably 40 mass % or less. Moreover, it is preferable to contain 30-300 mass parts of resin with respect to 100 mass parts of polymerizable compounds. The lower limit is preferably 50 parts by mass or more, and 80 parts by mass or more is the lower limit. Better still. The upper limit is more preferably 250 parts by mass or less, and still more preferably 200 parts by mass or less.

<<具有環狀醚基之化合物>> <<Compounds with cyclic ether groups>>

在本發明中,感光性組成物能夠含有具有環狀醚基之化合物。作為環狀醚基,可列舉環氧基、氧雜環丁基等。具有環狀醚基之化合物係具有環氧基之化合物為較佳。作為具有環氧基之化合物,可列舉1分子內具有一個以上的環氧基之化合物,具有2個以上的環氧基之化合物為較佳。在1分子內具有1~100個環氧基為較佳。環氧基的上限例如能夠設為10個以下,亦能夠設為5個以下。環氧基的下限為2個以上為更佳。作為具有環氧基之化合物,亦能夠使用日本特開2013-011869號公報的0034~0036段、日本特開2014-043556號公報的0147~0156段、日本特開2014-089408號公報的0085~0092段中所記載之化合物、日本特開2017-179172號公報中所記載之化合物。將該等內容編入本說明書中。 In the present invention, the photosensitive composition can contain a compound having a cyclic ether group. Examples of the cyclic ether group include an epoxy group, an oxetanyl group, and the like. The compound having a cyclic ether group is preferably a compound having an epoxy group. Examples of the compound having an epoxy group include compounds having one or more epoxy groups per molecule, and compounds having two or more epoxy groups are preferred. It is preferable to have 1 to 100 epoxy groups in one molecule. The upper limit of the epoxy group can be, for example, 10 or less, or 5 or less. The lower limit of epoxy groups is more preferably 2 or more. As the compound having an epoxy group, paragraphs 0034 to 0036 of Japanese Patent Application Laid-Open No. 2013-011869, paragraphs 0147 to 0156 of Japanese Patent Application Laid-Open No. 2014-043556, and paragraphs 0085 to Japanese Patent Application Laid-Open No. 2014-089408 can also be used. The compound described in paragraph 0092 and the compound described in Japanese Patent Application Laid-Open No. 2017-179172. Incorporate these contents into this manual.

具有環氧基之化合物可以為低分子化合物(例如,分子量小於2000,進而分子量小於1000),亦可以為高分子化合物(macromolecule)(例如,分子量1000以上的聚合物的情況下,重量平均分子量為1000以上)中的任一個。具有環氧基之化合物的重量平均分子量係200~100000為較佳,500~50000為更佳。重量平均分子量的上限係10000以下為進一步較佳,5000以下為特佳,3000以下為更加較佳。 The compound having an epoxy group may be a low molecular compound (for example, a molecular weight of less than 2000, and further a molecular weight of less than 1000), or a macromolecule compound (for example, in the case of a polymer with a molecular weight of 1000 or more, the weight average molecular weight is 1000 and above) any one. The weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, and more preferably 500 to 50,000. The upper limit of the weight average molecular weight is more preferably 10,000 or less, particularly preferably 5,000 or less, and still more preferably 3,000 or less.

作為具有環氧基之化合物,能夠較佳地使用環氧樹脂。作為環氧樹脂,例如可列舉作為酚化合物的縮水甘油醚化物之環氧樹脂、作為各種酚醛清漆樹脂的縮水甘油醚化物之環氧樹脂、脂環式環氧樹脂、脂肪族系環氧 樹脂、雜環式環氧樹脂、縮水甘油酯系環氧樹脂、縮水甘油胺系環氧樹脂、將鹵代酚類縮水甘油基化而得之環氧樹脂、具有環氧基之矽化合物與其以外的矽化合物的稠合物、具有環氧基之聚合性不飽和化合物與其以外的其他聚合性不飽和化合物的共聚物等。環氧樹脂的環氧當量係310~3300g/eq為較佳,310~1700g/eq為更佳,310~1000g/eq為進一步較佳。 As the compound having an epoxy group, an epoxy resin can be preferably used. Examples of the epoxy resin include epoxy resins that are glycidyl etherates of phenol compounds, epoxy resins that are glycidyl etherates of various novolak resins, alicyclic epoxy resins, and aliphatic epoxy resins. Resins, heterocyclic epoxy resins, glycidyl ester epoxy resins, glycidyl amine epoxy resins, epoxy resins obtained by glycidylizing halogenated phenols, silicon compounds having epoxy groups, and others Condensates of silicon compounds, copolymers of polymerizable unsaturated compounds with epoxy groups and other polymerizable unsaturated compounds, etc. The epoxy equivalent weight of the epoxy resin is preferably 310~3300g/eq, more preferably 310~1700g/eq, and further preferably 310~1000g/eq.

作為具有環狀醚基之化合物的市售品,例如可列舉EHPE3150(Daicel Corporation製)、EPICLON N-695(DIC Corporation製)、Marproof G-0150M、G-0105SA、G-0130SP、G-0250SP、G-1005S、G-1005SA、G-1010S、G-2050M、G-01100、G-01758(以上,NOF Corporation製,含有環氧基之聚合物)等。 Examples of commercially available compounds having a cyclic ether group include EHPE3150 (manufactured by Daicel Corporation), EPICLON N-695 (manufactured by DIC Corporation), Marproof G-0150M, G-0105SA, G-0130SP, G-0250SP, G-1005S, G-1005SA, G-1010S, G-2050M, G-01100, G-01758 (the above, manufactured by NOF Corporation, epoxy group-containing polymer), etc.

在本發明中,感光性組成物含有具有環狀醚基之化合物時,感光性組成物的總固體成分中的具有環狀醚基之化合物的含量係0.1~20質量%為較佳。下限為例如0.5質量%以上為更佳,1質量%以上為進一步較佳。上限為例如15質量%以下為更佳,10質量%以下為進一步較佳。具有環狀醚基之化合物可以僅為1種,亦可以為2種以上。為2種以上時,該等合計量在上述範圍為較佳。 In the present invention, when the photosensitive composition contains a compound having a cyclic ether group, the content of the compound having a cyclic ether group in the total solid content of the photosensitive composition is preferably 0.1 to 20% by mass. The lower limit is, for example, more preferably 0.5% by mass or more, and still more preferably 1% by mass or more. The upper limit is, for example, more preferably 15% by mass or less, and still more preferably 10% by mass or less. The number of compounds having a cyclic ether group may be only one type, or two or more types. When there are two or more types, the total amount is preferably within the above range.

<<矽烷偶合劑>> <<Silane coupling agent>>

在本發明中,感光性組成物能夠含有矽烷偶合劑。藉由該態樣,能夠進一步提高與所獲得之膜的支撐體的密接性。本發明中,矽烷偶合劑係指具有水解性基和其以外的官能基之矽烷化合物。又,水解性基係指直接鍵結於矽原子並且可藉由水解反應及稠合反應中的任一者產生矽氧烷鍵之取代基。作為水解性基,例如可列舉鹵素原子、烷氧基、醯氧基等,烷氧基為較佳。 亦即,矽烷耦合劑係具有烷氧基甲矽烷基之化合物為較佳。又,作為除水解性基以外的官能基,例如可列舉乙烯基、(甲基)烯丙基、(甲基)丙烯醯基、巰基、環氧基、氧雜環丁基、胺基、脲基、硫醚基、異氰酸酯基、苯基等,胺基、(甲基)丙烯醯基及環氧基為較佳。作為矽烷耦合劑的具體例,可列舉日本特開2009-288703號公報的0018~0036段中所記載之化合物、日本特開2009-242604號公報的0056~0066段中所記載之化合物,該等內容被併入本說明書中。 In the present invention, the photosensitive composition can contain a silane coupling agent. With this aspect, the adhesiveness with the support of the obtained film can be further improved. In the present invention, the silane coupling agent refers to a silane compound having a hydrolyzable group and functional groups other than the hydrolyzable group. In addition, the hydrolyzable group refers to a substituent that is directly bonded to a silicon atom and can generate a siloxane bond by any one of a hydrolysis reaction and a fusion reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, a hydroxyl group, and the like, with an alkoxy group being preferred. That is, the silane coupling agent is preferably a compound having an alkoxysilyl group. Examples of functional groups other than the hydrolyzable group include vinyl, (meth)allyl, (meth)acrylyl, mercapto, epoxy, oxetanyl, amino, and urea. group, thioether group, isocyanate group, phenyl group, etc., and amino group, (meth)acrylyl group and epoxy group are preferred. Specific examples of the silane coupling agent include compounds described in paragraphs 0018 to 0036 of Japanese Patent Application Laid-Open No. 2009-288703, and compounds described in paragraphs 0056 to 0066 of Japanese Patent Application Laid-Open No. 2009-242604. The contents are incorporated into this manual.

作為矽烷偶合劑,例如可列舉具有下述結構之化合物。 Examples of the silane coupling agent include compounds having the following structures.

Figure 108136260-A0305-02-0068-24
Figure 108136260-A0305-02-0068-24

感光性組成物的總固體成分中的矽烷耦合劑的含量係0.1~5質量%為較佳。上限為3質量%以下為更佳,2質量%以下為進一步較佳。下限為0.5質量%以上為更佳,1質量%以上為進一步較佳。矽烷耦合劑可以僅為1種,亦可以為2種以上。為2種以上時,該等合計量在上述範圍為較佳。 The content of the silane coupling agent in the total solid content of the photosensitive composition is preferably 0.1 to 5% by mass. The upper limit is more preferably 3% by mass or less, and still more preferably 2% by mass or less. It is more preferable that the lower limit is 0.5 mass % or more, and it is further more preferable that it is 1 mass % or more. There may be only one type of silane coupling agent, or two or more types of silane coupling agents. When there are two or more types, the total amount is preferably within the above range.

<<界面活性劑>> <<Surfactant>>

在本發明中,感光性組成物能夠含有界面活性劑。作為界面活性劑,能夠使用氟系界面活性劑、非離子系界面活性劑、陽離子系界面活性劑、陰離子系界面活性劑、矽酮系界面活性劑等各種界面活性劑。關於界面活性劑, 能夠參閱國際公開第2015/166779號的0238~0245段,該內容被併入本說明書中。 In the present invention, the photosensitive composition can contain a surfactant. As the surfactant, various surfactants such as fluorine-based surfactants, nonionic surfactants, cationic surfactants, anionic surfactants, and silicone-based surfactants can be used. Regarding surfactants, You can refer to paragraphs 0238~0245 of International Publication No. 2015/166779, which content is incorporated into this specification.

本發明中,界面活性劑係氟系界面活性劑為較佳。感光性組成物中含有氟系界面活性劑,藉此能夠進一步提高液體特性(尤其,流動性),並且能夠進一步改善省液性。又,還能夠形成厚度不均勻少之膜。 In the present invention, the surfactant is preferably a fluorine-based surfactant. By containing a fluorine-based surfactant in the photosensitive composition, liquid characteristics (especially fluidity) can be further improved, and liquid-saving properties can be further improved. In addition, a film with less uneven thickness can be formed.

氟系界面活性劑中之氟含有率為3~40質量%為較佳,5~30質量%為更佳,7~25質量%為特佳。氟含有率為該範圍內之氟系界面活性劑,從塗佈膜的厚度的均勻性和省液性的方面而言為有效,感光性組成物中之溶解性亦良好。 The fluorine content in the fluorine-based surfactant is preferably 3 to 40 mass%, more preferably 5 to 30 mass%, and particularly preferably 7 to 25 mass%. A fluorine-based surfactant with a fluorine content within this range is effective in terms of uniformity of thickness of the coating film and liquid saving, and also has good solubility in the photosensitive composition.

作為氟系界面活性劑,可列舉日本特開2014-041318號公報的0060~0064段(相對應之國際公開第2014/017669號的0060~0064段)等中所記載之界面活性劑、日本特開2011-132503號公報的0117~0132段中所記載之界面活性劑,該等內容被併入本說明書中。作為氟系界面活性劑的市售品,例如可列舉MAGAFACE F171、F172、F173、F176、F177、F141、F142、F143、F144、R30、F437、F475、F479、F482、F554、F780、EXP、MFS-330(以上,DIC Corporation製)、Fluorad FC430、FC431、FC171(以上,Sumitomo 3M Limited製)、Surflon S-382、SC-101、SC-103、SC-104、SC-105、SC-1068、SC-381、SC-383、S-393、KH-40(以上,AGC SEIMI CHEMICAL CO.,LTD.製)、PolyFox PF636、PF656、PF6320、PF6520、PF7002(以上,OMNOVA Solutions Inc.製)等。 Examples of the fluorine-based surfactant include surfactants described in paragraphs 0060 to 0064 of Japanese Patent Application Laid-Open No. 2014-041318 (corresponding to paragraphs 0060 to 0064 of International Publication No. 2014/017669), Japanese Patent Application Publication No. 2014/017669, etc. The surfactants described in paragraphs 0117 to 0132 of the publication No. 2011-132503 are incorporated into this specification. Examples of commercially available fluorine-based surfactants include MAGAFACE F171, F172, F173, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, EXP, and MFS. -330 (above, manufactured by DIC Corporation), Fluorad FC430, FC431, FC171 (above, manufactured by Sumitomo 3M Limited), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC-1068, SC-381, SC-383, S-393, KH-40 (above, manufactured by AGC SEIMI CHEMICAL CO., LTD.), PolyFox PF636, PF656, PF6320, PF6520, PF7002 (above, manufactured by OMNOVA Solutions Inc.), etc.

又,氟系界面活性劑亦能夠較佳地使用包含具有含有氟原子之官能基之分子結構,且在加熱時含有氟原子之官能基的一部分被斷裂而氟原 子揮發之丙烯酸系化合物。作為該等氟系界面活性劑,可列舉DIC Corporation製的MAGAFACE DS系列(化學工業日報,2016年2月22日)(日經產業新聞,2016年2月23日)、例如MAGAFACE DS-21。 In addition, it is also preferable to use a fluorine-based surfactant having a molecular structure having a functional group containing a fluorine atom, and a part of the functional group containing a fluorine atom is cleaved during heating and the fluorine is lost. Acrylic compounds that evaporate. Examples of such fluorine-based surfactants include MAGAFACE DS series manufactured by DIC Corporation (Chemical Industry Daily, February 22, 2016) (Nikkei Sangyo Shimbun, February 23, 2016), such as MAGAFACE DS-21.

又,氟系界面活性劑使用具有氟化烷基或氟化伸烷基醚基之含氟原子乙烯醚化合物與親水性乙烯醚化合物的聚合物亦為較佳。該種氟系界面活性劑能夠參閱日本特開2016-216602號公報的記載,並該內容被併入本說明書中。 Furthermore, it is also preferable to use a polymer of a fluorine atom-containing vinyl ether compound having a fluorinated alkyl group or a fluorinated alkylene ether group and a hydrophilic vinyl ether compound as the fluorine-based surfactant. This kind of fluorine-based surfactant can be found in Japanese Patent Application Laid-Open No. 2016-216602, and the content is incorporated into this specification.

氟系界面活性劑還可以使用嵌段聚合物。例如可列舉日本特開2011-089090號公報中所記載之化合物。氟系界面活性劑還能夠較佳地使用含氟高分子化合物,該含氟高分子化合物含有:源自具有氟原子之(甲基)丙烯酸酯化合物之重複單元;及源自具有2個以上(較佳為5個以上)伸烷氧基(較佳為伸乙氧基、伸丙氧基)之(甲基)丙烯酸酯化合物之重複單元。作為本發明中所使用之氟系界面活性劑,還例示出下述化合物。 As the fluorine-based surfactant, a block polymer can also be used. Examples thereof include compounds described in Japanese Patent Application Laid-Open No. 2011-089090. The fluorine-based surfactant can also preferably use a fluorine-containing polymer compound that contains: a repeating unit derived from a (meth)acrylate compound having a fluorine atom; and a fluorine-containing polymer compound derived from a (meth)acrylate compound having 2 or more ( The repeating unit of a (meth)acrylate compound is preferably an alkyleneoxy group (preferably 5 or more) (preferably an ethyleneoxy group or a propyleneoxy group). Examples of the fluorine-based surfactant used in the present invention include the following compounds.

Figure 108136260-A0305-02-0070-25
Figure 108136260-A0305-02-0070-25

上述的化合物的重量平均分子量較佳為3000~50000,例如為14000。上述化合物中,表示重複單元的比例之%為莫耳%。 The weight average molecular weight of the above-mentioned compound is preferably 3,000 to 50,000, for example, 14,000. In the above compounds, the percentage expressed as the proportion of repeating units is molar %.

又,氟系界面活性劑亦能夠使用側鏈上具有乙烯性不飽和鍵基之含氟聚合物。作為具體例,可列舉日本特開2010-164965號公報的0050~ 0090段及0289~0295段中所記載之化合物,例如DIC Corporation製的MEGAFACE RS-101、RS-102、RS-718K、RS-72-K等。氟系界面活性劑亦能夠使用日本特開2015-117327號公報的0015~0158段中所記載之化合物。 In addition, a fluorine-containing polymer having an ethylenically unsaturated bond group in the side chain can also be used as the fluorine-based surfactant. As a specific example, Japanese Patent Application Laid-Open No. 2010-164965 No. 0050~ The compounds described in paragraphs 0090 and 0289 to 0295 include, for example, MEGAFACE RS-101, RS-102, RS-718K, RS-72-K manufactured by DIC Corporation, and the like. As the fluorine-based surfactant, compounds described in paragraphs 0015 to 0158 of Japanese Patent Application Laid-Open No. 2015-117327 can also be used.

感光性組成物的總固體成分中的界面活性劑的含量係0.001質量%~5.0質量%為較佳,0.005~3.0質量%為更佳。界面活性劑可以僅為1種,亦可以為2種以上。為2種以上時,該等合計量在上述範圍為較佳。 The surfactant content in the total solid content of the photosensitive composition is preferably 0.001 mass% to 5.0 mass%, and more preferably 0.005 to 3.0 mass%. The number of surfactants may be only one type or two or more types. When there are two or more types, the total amount is preferably within the above range.

<<紫外線吸收劑>> <<UV absorber>>

在本發明中,感光性組成物能夠含有紫外線吸收劑。紫外線吸收劑能夠使用共軛二烯化合物、胺基二烯化合物、水楊酸酯化合物、二苯甲酮化合物、苯并三唑化合物、丙烯腈化合物、羥基苯基三

Figure 108136260-A0305-02-0071-153
化合物、吲哚化合物、三
Figure 108136260-A0305-02-0071-154
化合物等。關於該等的詳細內容,能夠參閱日本特開2012-208374號公報的0052~0072段、日本特開2013-068814號公報的0317~0334段、日本特開2016-162946號公報的0061~0080段中的記載,該等內容被併入本說明書中。作為紫外線吸收劑的具體例子,可列舉下述結構的化合物等。作為紫外線吸收劑的市售品,例如可列舉UV-503(DAITO CHEMICAL CO.,LTD.製)等。又,作為苯并三唑化合物,可列舉MIYOSHI OIL & FAT CO.,LTD.製的MYUA系列(化學工業日報、2016年2月1日)。 In the present invention, the photosensitive composition can contain an ultraviolet absorber. As the ultraviolet absorber, conjugated diene compounds, aminodiene compounds, salicylate compounds, benzophenone compounds, benzotriazole compounds, acrylonitrile compounds, and hydroxyphenyl triazole compounds can be used.
Figure 108136260-A0305-02-0071-153
Compounds, Indole Compounds, Three
Figure 108136260-A0305-02-0071-154
Compounds etc. For details, please refer to paragraphs 0052 to 0072 of Japanese Patent Application Publication No. 2012-208374, paragraphs 0317 to 0334 of Japanese Patent Application Publication No. 2013-068814, and paragraphs 0061 to 0080 of Japanese Patent Application Publication No. 2016-162946. are incorporated into this manual. Specific examples of ultraviolet absorbers include compounds having the following structures. Examples of commercially available ultraviolet absorbers include UV-503 (manufactured by DAITO CHEMICAL CO., LTD.). Examples of the benzotriazole compound include the MYUA series manufactured by MIYOSHI OIL & FAT CO., LTD. (Chemical Industry Daily, February 1, 2016).

Figure 108136260-A0305-02-0071-26
Figure 108136260-A0305-02-0071-26

感光性組成物的總固體成分中的紫外線吸收劑的含量係0.01~10質量%為較佳,0.01~5質量%為更佳。本發明中,紫外線吸收劑可以僅使用1種,亦可以使用2種以上。當使用2種以上時,此等的合計量在上述範圍為較佳。 The content of the ultraviolet absorber in the total solid content of the photosensitive composition is preferably 0.01 to 10 mass %, and more preferably 0.01 to 5 mass %. In the present invention, only one type of ultraviolet absorber may be used, or two or more types may be used. When two or more types are used, the total amount is preferably within the above range.

<<溶劑>> <<Solvent>>

在本發明中,感光性組成物能夠含有溶劑。作為能夠使用之溶劑可列舉有機溶劑。溶劑只要滿足各成分的溶解性和感光性組成物的塗佈性,則基本上並無特別限制。作為有機溶劑,可列舉酯系溶劑、酮系溶劑、醇系溶劑、醯胺系溶劑、醚系溶劑、烴系溶劑等。關於該等的詳細內容,能夠參閱國際公開第2015/166779號的0223段,該內容被併入本說明書中。又,亦能夠較佳地使用環狀烷基所取代之酯系溶劑、環狀烷基所取代之酮系溶劑。作為有機溶劑的具體例,可列舉聚乙二醇單甲基醚、二氯甲烷、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙基、乙基溶纖劑乙酸酯、乳酸乙基、二乙二醇二甲醚、乙酸丁基、3-甲氧基丙酸甲酯、2-庚酮、環己酮、乙酸環己基、環戊酮、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚(PGME)、丙二醇單甲醚乙酸酯(PGMEA)、3-甲氧基-N,N-二甲基丙醯胺、3-丁氧基-N,N-二甲基丙醯胺等。但是作為溶劑的芳香族烴類(苯、甲苯、二甲苯、乙苯等),有時因環境方面等的理由降低為宜(例如,相對於有機溶劑總量,能夠設為50質量ppm(百方分率,parts per million)以下,亦能夠設為10質量ppm以下、亦能夠設為1質量ppm以下)。 In the present invention, the photosensitive composition can contain a solvent. Examples of solvents that can be used include organic solvents. The solvent is basically not particularly limited as long as it satisfies the solubility of each component and the coating properties of the photosensitive composition. Examples of the organic solvent include ester solvents, ketone solvents, alcohol solvents, amide solvents, ether solvents, hydrocarbon solvents, and the like. For details, please refer to paragraph 0223 of International Publication No. 2015/166779, which content is incorporated into this specification. Furthermore, ester-based solvents substituted with cyclic alkyl groups and ketone-based solvents substituted with cyclic alkyl groups can also be suitably used. Specific examples of the organic solvent include polyethylene glycol monomethyl ether, methylene chloride, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, and ethyl cellosolve acetate. , Ethyl lactate, diglyme, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, cyclohexyl acetate, cyclopentanone, ethyl carbitol ethyl Acid ester, butyl carbitol acetate, propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), 3-methoxy-N,N-dimethylpropylamide, 3- Butoxy-N,N-dimethylpropylamine, etc. However, aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) used as solvents may sometimes be reduced due to environmental reasons (for example, they can be set to 50 ppm by mass relative to the total amount of organic solvents). The square fraction (parts per million) or less can also be set to 10 mass ppm or less, or can be set to 1 mass ppm or less).

感光性組成物中的溶劑的含量係10~95質量%為較佳,20~90質量%為更佳,30~90質量%為進一步較佳。 The content of the solvent in the photosensitive composition is preferably 10 to 95% by mass, more preferably 20 to 90% by mass, and further preferably 30 to 90% by mass.

<<其他成分>> <<Other ingredients>>

在本發明中,感光性組成物視需要亦可含有聚合抑制劑、敏化劑、硬化促進劑、填料、熱硬化促進劑、塑化劑及其他助劑類(例如,導電性粒子、填充劑、消泡劑、阻燃劑、調平劑、剝離促進劑、香料、表面張力調整劑、鏈轉移劑等)。藉由適宜含有該等成分,而能夠調整膜物性等性質。該等成分例如能夠參閱日本特開2012-003225號公報的0183段以後(相對應之美國專利申請公開第2013/0034812號說明書的0237段)的記載、日本特開2008-250074號公報的0101~0104段、0107~0109段等的記載,該等內容被併入本說明書中。又,在本發明中,感光性組成物根據需要還可以含有潛伏的抗氧化劑。作為潛伏的抗氧化劑,可列舉作為抗氧化劑發揮功能之部位被保護基保護之化合物,且保護基藉由在100~250℃下進行加熱或在酸/鹼觸媒存在下在80~200℃下進行加熱而脫離並作為抗氧化劑發揮功能之化合物。作為潛伏的抗氧化劑,可列舉國際公開第2014/021023號、國際公開第2017/030005號、日本特開2017-008219號公報中所記載之化合物。作為市售品,可列舉ADEKAARKLS GPA-5001(ADEKA Corporation製)等。 In the present invention, the photosensitive composition may also contain polymerization inhibitors, sensitizers, hardening accelerators, fillers, thermal hardening accelerators, plasticizers and other auxiliaries (for example, conductive particles, fillers , defoaming agents, flame retardants, leveling agents, peeling accelerators, spices, surface tension adjusters, chain transfer agents, etc.). By appropriately containing these components, film physical properties and other properties can be adjusted. For example, these ingredients can be found in paragraphs 0183 and later of Japanese Patent Application Laid-Open No. 2012-003225 (corresponding to paragraph 0237 of US Patent Application Publication No. 2013/0034812), and paragraphs 0101 to 2008 of Japanese Patent Application Publication No. 2008-250074. The records in paragraphs 0104, 0107~0109, etc. are incorporated into this manual. Furthermore, in the present invention, the photosensitive composition may contain a latent antioxidant as necessary. Examples of latent antioxidants include compounds in which the site functioning as an antioxidant is protected by a protecting group, and the protecting group is heated at 100 to 250°C or heated at 80 to 200°C in the presence of an acid/alkali catalyst. A compound that is released by heating and functions as an antioxidant. Examples of latent antioxidants include compounds described in International Publication No. 2014/021023, International Publication No. 2017/030005, and Japanese Patent Application Publication No. 2017-008219. Examples of commercially available products include ADEKAARKLS GPA-5001 (manufactured by ADEKA Corporation) and the like.

又,在本發明中,感光性組成物為了調整所獲得之膜的折射率可以含有金屬氧化物。作為金屬氧化物,可列舉TiO2、ZrO2、Al2O3、SiO2等。金屬氧化物的一次粒徑係1~100nm為較佳,3~70nm為更佳,5~50nm為最佳。金屬氧化物可具有核-殼結構,此時,核部可以為中空狀。 In the present invention, the photosensitive composition may contain a metal oxide in order to adjust the refractive index of the film obtained. Examples of metal oxides include TiO 2 , ZrO 2 , Al 2 O 3 , SiO 2 and the like. The primary particle size of the metal oxide is preferably 1 to 100 nm, more preferably 3 to 70 nm, and most preferably 5 to 50 nm. The metal oxide may have a core-shell structure, and in this case, the core may be hollow.

在本發明中,關於感光性組成物,未與顏料等鍵結或配位之游離的金屬的含量係100ppm以下為較佳,50ppm以下為更佳,10ppm以下為進一步較佳,實質上不含有為特佳。藉由該態樣,能夠進行顏料分散性的穩定 化(抑制凝聚)、伴隨分散性的改善引起之分光特性的提高、硬化性成分的穩定化、伴隨金屬原子‧金屬離子的溶出引起之導電性變動的抑制、顯示特性的提高等。又,亦可獲得日本特開2012-153796號公報、日本特開2000-345085號公報、日本特開2005-200560號公報、日本特開平08-043620號公報、日本特開2004-145078號公報、日本特開2014-119487號公報、日本特開2010-083997號公報、日本特開2017-090930號公報、日本特開2018-025612號公報、日本特開2018-025797號公報、日本特開2017-155228號公報、日本特開2018-036521號公報等中所記載之效果。作為上述游離的金屬的種類,可列舉Na、K、Ca、Sc、Ti、Mn、Cu、Zn、Fe、Cr、Co、Mg、Al、Sn、Zr、Ga、Ge、Ag、Au、Pt、Cs、Ni、Cd、Pb、Bi等。又,組成物中,未與顏料等鍵結或配位之游離的鹵素的含量係100ppm以下為較佳,50ppm以下為更佳,10ppm以下為進一步較佳,實質上不含有為特佳。作為組成物中的游離的金屬或鹵素的減少方法,可列舉基於離子交換水之清洗、過濾、超濾、基於離子交換樹脂之純化等方法。 In the present invention, in the photosensitive composition, the content of free metals that are not bonded or coordinated with pigments or the like is preferably 100 ppm or less, more preferably 50 ppm or less, further preferably 10 ppm or less, and it is substantially free of metal. Very good. This aspect enables stabilization of pigment dispersion. (suppression of aggregation), improvement of spectral characteristics due to improvement in dispersibility, stabilization of curable components, suppression of conductivity changes due to elution of metal atoms and metal ions, improvement of display characteristics, etc. In addition, Japanese Patent Application Publication No. 2012-153796, Japanese Patent Application Publication No. 2000-345085, Japanese Patent Application Publication No. 2005-200560, Japanese Patent Application Publication No. 08-043620, Japanese Patent Application Publication No. 2004-145078, Japanese Patent Application Publication No. 2014-119487, Japanese Patent Application Publication No. 2010-083997, Japanese Patent Application Publication No. 2017-090930, Japanese Patent Application Publication No. 2018-025612, Japanese Patent Application Publication No. 2018-025797, Japanese Patent Application Publication No. 2017- Effects described in Publication No. 155228, Japanese Patent Application Laid-Open No. 2018-036521, etc. Examples of the free metal types include Na, K, Ca, Sc, Ti, Mn, Cu, Zn, Fe, Cr, Co, Mg, Al, Sn, Zr, Ga, Ge, Ag, Au, Pt, Cs, Ni, Cd, Pb, Bi, etc. In addition, the content of free halogens that are not bonded or coordinated with pigments or the like in the composition is preferably 100 ppm or less, more preferably 50 ppm or less, further preferably 10 ppm or less, and it is particularly preferred that it contains substantially no halogen. Examples of methods for reducing free metals or halogens in the composition include cleaning with ion-exchange water, filtration, ultrafiltration, and purification with ion-exchange resin.

又,感光性組成物實質上不包含對苯二甲酸酯為較佳。 Moreover, it is preferable that the photosensitive composition does not contain terephthalate ester substantially.

<<收容容器>> <<Containment Container>>

作為感光性組成物的收容容器並無特別限定,能夠使用公知的收容容器。又,作為收容容器,以抑制雜質混入原材料或感光性組成物中為目的,使用由6種6層的樹脂構成容器內壁之多層瓶或將6種樹脂設為7層結構之瓶亦較佳。作為該種容器,例如可列舉日本特開2015-123351號公報中記載之容器。又,以防止金屬從容器內壁溶出、提高組成物的保存穩定性、抑制成分變質之目的,將收容容器的內壁設為玻璃製或不銹鋼製等為較佳。 The container for storing the photosensitive composition is not particularly limited, and a known container can be used. In addition, as a storage container, in order to prevent impurities from being mixed into raw materials or photosensitive compositions, it is also preferable to use a multi-layer bottle with an inner wall composed of 6 types of 6-layer resins or a bottle with a 7-layer structure using 6 types of resins. . Examples of this type of container include the container described in Japanese Patent Application Laid-Open No. 2015-123351. In addition, for the purpose of preventing metal from eluting from the inner wall of the container, improving the storage stability of the composition, and suppressing deterioration of components, it is preferable that the inner wall of the storage container be made of glass, stainless steel, or the like.

<像素的形成方法> <How to form pixels>

本發明的結構體中的像素能夠使用含有上述之像素成分之感光性組成物,並藉由光微影法來形成。基於光微影法之圖案形成包括利用感光性組成物在支撐體上形成感光性組成物層之製程、將感光性組成物層曝光成圖案狀之製程及對感光性組成物層的未曝光部進行顯影去除來形成圖案(像素)之製程為較佳。可依據需要,設置對感光性組成物層進行烘烤之製程(前烘烤製程)及對所顯影之圖案進行烘烤之製程(後烘烤製程)。 The pixels in the structure of the present invention can be formed by photolithography using a photosensitive composition containing the above-mentioned pixel components. Pattern formation based on photolithography includes the process of forming a photosensitive composition layer on a support using a photosensitive composition, the process of exposing the photosensitive composition layer into a pattern, and the process of exposing the unexposed portions of the photosensitive composition layer. A process of developing and removing to form patterns (pixels) is preferred. According to needs, a process for baking the photosensitive composition layer (pre-baking process) and a process for baking the developed pattern (post-baking process) can be set.

又,從感光性組成物層的基底的平坦性等的觀點考慮,在形成感光性組成物層之前,在支撐體上形成底塗層亦為較佳。底塗層的詳細內容記載於國際公開第2018/062130號中,該內容被併入本說明書中。 Furthermore, from the viewpoint of flatness of the base of the photosensitive composition layer, etc., it is also preferable to form a primer layer on the support before forming the photosensitive composition layer. Details of the undercoat layer are described in International Publication No. 2018/062130, and this content is incorporated into this specification.

<<組成物的製備方法>> <<Preparation method of composition>>

本發明的結構體中的用於形成像素之感光性組成物能夠混合前述成分而製備。在製備感光性組成物時,可以將所有成分同時溶解和/或分散於溶劑中來製備感光性組成物,亦可以根據需要先將各成分適當得作為2種以上的溶液或分散液,並在使用時(塗佈時)將該等混合而製備感光性組成物。 The photosensitive composition for forming pixels in the structure of the present invention can be prepared by mixing the aforementioned components. When preparing a photosensitive composition, all the components can be dissolved and/or dispersed in a solvent at the same time to prepare the photosensitive composition. Alternatively, each component can be appropriately prepared as two or more solutions or dispersions as needed, and then These are mixed at the time of use (coating) to prepare a photosensitive composition.

又,當製備感光性組成物時,包含使顏料分散之製程為較佳。在使顏料分散之步驟中,作為用於顏料的分散中之機械力,可列舉壓縮、壓榨、衝擊、剪斷、氣蝕等。作為該等步驟的具體例,可列舉珠磨機、混砂機(sand mill)、輥磨機、球磨機、塗料攪拌器(pain shaker)、微射流機(microfluidizer)、高速葉輪、砂磨機、噴流混合器(flowjet mixer)、高壓濕式微粒化、超聲波分散等。又,在混砂機(珠磨機)中之顏料的粉碎中,在藉由使用直徑小的珠子、加大珠子的填充率等來提高了粉碎效率之條件下進行處理為較佳。 又,粉碎處理後,藉由過濾、離心分離等去除粗粒子為較佳。又,使顏料分散之步驟及分散機能夠較佳地使用《分散技術大全,JOHOKIKO CO.,LTD.發行,2005年7月15日》或《以懸浮液(固/液分散體系)為中心之分散技術與工業應用的實際 綜合資料集、經營開發中心出版部發行,1978年10月10日》、日本特開2015-157893號公報的0022段中所記載之步驟及分散機。又,在使顏料分散之步驟中,可以藉由鹽磨(salt milling)步驟進行粒子的微細化處理。鹽磨步驟中所使用之材料、機器、處理條件等例如能夠參閱日本特開2015-194521號公報、日本特開2012-046629號公報的記載。 Moreover, when preparing a photosensitive composition, it is preferable to include the process of dispersing a pigment. In the step of dispersing the pigment, examples of the mechanical force used to disperse the pigment include compression, squeezing, impact, shearing, cavitation, and the like. Specific examples of these steps include bead mills, sand mills, roller mills, ball mills, paint shakers, microfluidizers, high-speed impellers, and sand mills. Flowjet mixer, high-pressure wet micronization, ultrasonic dispersion, etc. In addition, in the grinding of pigments in a sand mixer (bead mill), it is preferable to perform the process under conditions that improve the grinding efficiency by using beads with small diameters, increasing the filling rate of beads, etc. In addition, after the grinding process, it is preferable to remove coarse particles by filtration, centrifugation, etc. In addition, the process of dispersing pigments and the dispersing machine can preferably use "Encyclopedia of Dispersion Technology, published by JOHOKIKO CO., LTD., July 15, 2005" or "Centering on Suspension (Solid/Liquid Dispersion System)" The procedures and dispersing machines described in Paragraph 0022 of Japanese Patent Application Laid-Open No. 2015-157893, "Practical Comprehensive Data Collection of Dispersion Technology and Industrial Applications, published by the Publishing Department of the Business Development Center, October 10, 1978". In addition, in the step of dispersing the pigment, the particles may be refined by a salt milling step. For materials, machines, processing conditions, etc. used in the salt grinding step, please refer to the descriptions of Japanese Patent Application Laid-Open No. 2015-194521 and Japanese Patent Application Laid-Open No. 2012-046629, for example.

製備感光性組成物時,以去除異物和減少缺陷等為目的,利用過濾器過濾感光性組成物為較佳。作為過濾器,只要為一直用於過濾用途等之過濾器,則能夠無特別限定而使用。例如可列舉使用了聚四氟乙烯(PTFE)等氟樹脂、尼龍(例如尼龍-6、尼龍-6,6)等聚醯胺系樹脂、聚乙烯、聚丙烯(PP)等聚烯樹脂(包含高密度、超高分子量的聚烯樹脂)等的原材料之過濾器。該等原材料中聚丙烯(包含高密度聚丙烯)及尼龍為較佳。 When preparing a photosensitive composition, it is preferable to use a filter to filter the photosensitive composition for the purpose of removing foreign matter and reducing defects. The filter can be used without particular limitation as long as it is used for filtration purposes. Examples include those using fluororesins such as polytetrafluoroethylene (PTFE), polyamide-based resins such as nylon (such as nylon-6, nylon-6,6), and polyolefin resins such as polyethylene and polypropylene (PP). Filters made from raw materials such as high-density, ultra-high molecular weight polyolefin resin). Among these raw materials, polypropylene (including high-density polypropylene) and nylon are preferred.

過濾器的孔徑係0.01~7.0μm為較佳,0.01~3.0μm為更佳,0.05~0.5μm為進一步較佳。只要過濾器的孔徑在上述範圍,則能夠可靠地去除微細的異物。針對過濾器的孔徑值,能夠參閱過濾器廠商的標稱值。過濾器能夠使用NIHON PALL LTD.(DFA4201NIEY等)、Advantec Toyo Kaisha,Ltd.、Nihon Entegris K.K.(formerly Nippon Mykrolis Corporation)及KITZ MICROFILTER Corporation等所提供之各種過濾器。 The pore size of the filter is preferably 0.01 to 7.0 μm, more preferably 0.01 to 3.0 μm, and further preferably 0.05 to 0.5 μm. As long as the pore size of the filter is within the above range, fine foreign matter can be reliably removed. For the pore size of the filter, refer to the filter manufacturer's nominal value. Various filters provided by NIHON PALL LTD. (DFA4201NIEY, etc.), Advantec Toyo Kaisha, Ltd., Nihon Entegris K.K. (formerly Nippon Mykrolis Corporation), KITZ MICROFILTER Corporation, etc. can be used.

又,使用纖維狀過濾材料作為過濾器亦為較佳。作為纖維狀過濾材料,例如可列舉聚丙烯纖維、尼龍纖維、玻璃纖維等。作為市售品,可列 舉ROKI GROUP CO.,Ltd.製的SBP類型系列(SBP008等)、TPR類型系列(TPR002、TPR005等)、SHPX類型系列(SHPX003等)。 In addition, it is also preferable to use a fibrous filter material as the filter. Examples of fibrous filter materials include polypropylene fibers, nylon fibers, glass fibers, and the like. As a commercial product, it can be listed as Examples include SBP type series (SBP008, etc.), TPR type series (TPR002, TPR005, etc.), and SHPX type series (SHPX003, etc.) manufactured by ROKI GROUP CO., Ltd.

使用過濾器時,亦可以組合不同之過濾器(例如,第1過濾器和第2過濾器等)。此時,各過濾器中的過濾可以僅為一次,亦可以進行兩次以上。又,可以在上述範圍內組合不同之孔徑的過濾器。又,第1過濾器中的過濾僅對分散液進行,混合其他成分之後亦可以由第2過濾器進行過濾。 When using filters, you can also combine different filters (for example, the first filter and the second filter, etc.). At this time, filtration in each filter may be performed only once, or may be performed two or more times. Furthermore, filters with different pore sizes can be combined within the above range. In addition, the filtration by the first filter is performed only on the dispersion liquid, and the filtration by the second filter may be performed after mixing other components.

<<形成感光性組成物層之製程>> <<Process for forming photosensitive composition layer>>

在形成感光性組成物層之製程中,使用感光性組成物在支撐體上形成感光性組成物層。作為支撐體,無特別限定,能夠依用途適當選擇。例如可列舉玻璃基板、矽基板等,矽基板為較佳。又,矽基板上可形成電荷耦合元件(CCD)、互補金屬氧化膜半導體(CMOS)、透明導電膜等。又,有時亦會在矽基板上形成隔離各像素之黑色矩陣。又,在矽基板上為了改良與上部層的密接、防止物質的擴散或者基板表面的平坦化而設置有底塗層。 In the process of forming the photosensitive composition layer, the photosensitive composition is used to form the photosensitive composition layer on the support. The support is not particularly limited and can be appropriately selected depending on the use. Examples include glass substrates, silicon substrates, etc., and silicon substrates are preferred. In addition, charge coupled devices (CCD), complementary metal oxide film semiconductors (CMOS), transparent conductive films, etc. can be formed on the silicon substrate. In addition, sometimes a black matrix is formed on the silicon substrate to isolate each pixel. In addition, a primer layer is provided on the silicon substrate in order to improve adhesion with the upper layer, prevent diffusion of substances, and flatten the surface of the substrate.

作為感光性組成物的塗佈方法能夠使用公知的方法。例如可列舉滴加法(滴鑄);狹縫塗佈法;噴霧法;輥塗法;旋轉塗佈法(旋塗);流延塗佈法;狹縫及旋塗法;預濕法(例如,日本特開2009-145395號公報中所記載之方法);噴墨法(例如按需噴塗方式、壓電方式、熱方式)、噴嘴噴塗等吐出系印刷、柔性版印刷、網板印刷、凹版印刷、反轉膠版印刷、金屬遮罩印刷法等各種印刷法;使用模具等之轉印法;奈米壓印法等。作為基於噴墨之應用方法並無特別限定,例如可列舉“擴散、可使用之噴墨-在專利中看到的無限可能性-、2005年2月發行、S.B.Techno-Research Co.,Ltd.”中所示出之方法(尤其,115頁~133頁)或日本特開2003-262716號公報、 日本特開2003-185831號公報、日本特開2003-261827號公報、日本特開2012-126830號公報、日本特開2006-169325號公報等中所記載之方法。又,關於感光性組成物的塗佈方法,能夠參閱國際公開第2017/030174號、國際公開第2017/018419號的記載,該等內容被編入到本說明書中。 As a coating method of the photosensitive composition, a known method can be used. Examples include dropping method (drop casting); slit coating method; spray method; roller coating method; spin coating method (spin coating); cast coating method; slit and spin coating method; prewet method (such as , the method described in Japanese Patent Application Publication No. 2009-145395); inkjet method (such as drop-on-demand spraying method, piezoelectric method, thermal method), nozzle spraying and other discharge system printing, flexographic printing, screen printing, gravure Printing, reverse offset printing, metal mask printing and other printing methods; transfer printing method using molds, etc.; nanoimprinting method, etc. The application method based on inkjet is not particularly limited, but examples include “Diffusion, Usable Inkjet - Infinite Possibilities Seen in the Patent, February 2005, S.B. Techno-Research Co., Ltd. "The method shown in (especially, pages 115 to 133) or Japanese Patent Application Laid-Open No. 2003-262716, Methods described in Japanese Patent Application Publication No. 2003-185831, Japanese Patent Application Publication No. 2003-261827, Japanese Patent Application Publication No. 2012-126830, Japanese Patent Application Publication No. 2006-169325, etc. In addition, regarding the coating method of the photosensitive composition, you can refer to the descriptions of International Publication No. 2017/030174 and International Publication No. 2017/018419, and these contents are incorporated into this specification.

形成於支撐體上之感光性組成物層可以進行乾燥(預烘烤)。藉由低溫製程製造膜之情況下,亦可以不進行預烘烤。進行前烘烤時,前烘烤溫度為150℃以下為較佳,120℃以下為更佳,110℃以下為進一步較佳。下限例如能夠設為50℃以上,亦能夠設為80℃以上。預烘烤時間係10~300秒為較佳,40~250秒為更佳,80~220秒為進一步較佳。預烘烤能夠由加熱板、烘箱等進行。 The photosensitive composition layer formed on the support may be dried (prebaked). When the film is manufactured by a low-temperature process, prebaking does not need to be performed. When performing pre-baking, the pre-baking temperature is preferably 150°C or lower, more preferably 120°C or lower, and further preferably 110°C or lower. The lower limit can be, for example, 50°C or higher, or 80°C or higher. The pre-baking time is preferably 10 to 300 seconds, more preferably 40 to 250 seconds, and further preferably 80 to 220 seconds. Prebaking can be performed by a heating plate, oven, etc.

<<曝光製程>> <<Exposure Process>>

接著,將感光性組成物層曝光成圖案狀(曝光製程)。例如,使用步進曝光機或掃描儀曝光機等隔著具有規定的遮罩圖案之遮罩,對感光性組成物層進行曝光,藉此能夠以圖案狀進行曝光。藉此,能夠使曝光部分硬化。 Next, the photosensitive composition layer is exposed into a pattern (exposure process). For example, the photosensitive composition layer can be exposed in a pattern by using a stepper exposure machine, a scanner exposure machine, or the like through a mask having a predetermined mask pattern. Thereby, the exposed part can be hardened.

作為能夠在曝光時使用之放射線(光),可列舉g射線、i射線等。又,亦能夠使用波長300nm以下的光(較佳為波長180~300nm的光)。作為波長300nm以下的光,可列舉KrF射線(波長248nm)、ArF射線(波長193nm)等,KrF射線(波長248nm)為較佳。又,亦能夠利用300nm以上的長波的光源。 Examples of radiation (light) that can be used during exposure include g-rays, i-rays, and the like. In addition, light with a wavelength of 300 nm or less (preferably light with a wavelength of 180 to 300 nm) can also be used. Examples of light having a wavelength of 300 nm or less include KrF rays (wavelength: 248 nm), ArF rays (wavelength: 193 nm), and KrF rays (wavelength: 248 nm) are preferred. In addition, a long-wavelength light source of 300 nm or more can also be used.

又,在曝光時,可以連續照射光而進行曝光,亦可以脈衝照射而進行曝光(脈衝曝光)。另外,脈衝曝光係指在短時間(例如,毫秒級以下)的循環中反覆進行光的照射和暫停而進行曝光之方式的曝光方法。脈衝曝 光時,脈衝寬度係100奈秒(ns)以下為較佳,50奈秒以下為更佳,30奈秒以下為進一步較佳。脈衝寬度的下限並無特別限定,能夠設為1飛秒(fs)以上,亦能夠設為10飛秒以上。頻率係1kHz以上為較佳,2kHz以上為更佳,4kHz以上為進一步較佳。頻率的上限為50kHz以下為較佳,20kHz以下為更佳,10kHz以下為進一步較佳。最大瞬間照度係50000000W/m2以上為較佳,100000000W/m2以上為更佳,200000000W/m2以上為進一步較佳。又,最大瞬間照度的上限係1000000000W/m2以下為較佳,800000000W/m2以下為更佳,500000000W/m2以下為進一步較佳。另外,脈衝寬度係指在脈衝週期中照射光之時間。又,頻率係指每一秒的脈衝週期的次數。又,最大瞬間照度係指在脈衝週期中照射光之時間內的平均照度。又,脈衝週期係指將脈衝曝光中的光的照射和暫停作為一個循環之週期。 Moreover, during exposure, light may be continuously irradiated and exposed, or light may be irradiated and exposed (pulse exposure). In addition, pulse exposure refers to an exposure method in which light irradiation and pause are repeatedly performed in a short-time (for example, millisecond or less) cycle to perform exposure. During pulse exposure, the pulse width is preferably 100 nanoseconds (ns) or less, more preferably 50 nanoseconds or less, and further preferably 30 nanoseconds or less. The lower limit of the pulse width is not particularly limited, and may be set to 1 femtosecond (fs) or more, or may be set to 10 femtoseconds or more. The frequency is preferably 1 kHz or more, more preferably 2 kHz or more, and still more preferably 4 kHz or more. The upper limit of the frequency is preferably 50 kHz or less, more preferably 20 kHz or less, and further preferably 10 kHz or less. The maximum instantaneous illumination is preferably 50000000W/m 2 or more, more preferably 100000000W/m 2 or more, and further preferably 200000000W/m 2 or more. In addition, the upper limit of the maximum instantaneous illuminance is preferably 1000000000W/m 2 or less, more preferably 800000000W/m 2 or less, and still more preferably 500000000W/m 2 or less. In addition, the pulse width refers to the time during which light is irradiated in the pulse cycle. In addition, frequency refers to the number of pulse cycles per second. In addition, the maximum instantaneous illuminance refers to the average illuminance during the time when light is irradiated in the pulse cycle. In addition, the pulse period refers to a period in which the irradiation and pause of light in pulse exposure constitute one cycle.

照射量(曝光量)例如係0.03~2.5J/cm2為較佳,0.05~1.0J/cm2為更佳。關於曝光時之氧濃度,能夠進行適當選擇,除了在大氣下進行以外,亦可以例如在氧濃度為19體積%以下的低氧環境下(例如15體積%、5體積%、或者實質上無氧)進行曝光,亦可以在氧濃度大於21體積%之高氧環境下(例如22體積%、30體積%、或者50體積%)進行曝光。又,能夠適當設定曝光照度,通常能夠從1000W/m2~100000W/m2(例如,5000W/m2、15000W/m2或者35000W/m2)的範圍選擇。氧濃度與曝光照度亦可以組合適當條件,例如能夠在氧濃度10體積%下設為照度10000W/m2,在氧濃度35體積%下設為照度20000W/m2等。 For example, the irradiation amount (exposure amount) is preferably 0.03~2.5J/ cm2 , and more preferably 0.05~1.0J/ cm2 . The oxygen concentration during exposure can be appropriately selected. In addition to performing it in the atmosphere, it can also be performed in a low-oxygen environment with an oxygen concentration of 19 volume % or less (for example, 15 volume %, 5 volume %, or substantially no oxygen). ) or in a high-oxygen environment with an oxygen concentration greater than 21 volume % (such as 22 volume %, 30 volume %, or 50 volume %). In addition, the exposure illuminance can be appropriately set, and can usually be selected from the range of 1000W/m 2 to 100000W/m 2 (for example, 5000W/m 2 , 15000W/m 2 or 35000W/m 2 ). The oxygen concentration and exposure illuminance can also be combined with appropriate conditions. For example, the illuminance can be set to 10000W/m 2 at an oxygen concentration of 10 volume %, and the illuminance can be set to 20000 W/m 2 at an oxygen concentration of 35 volume %.

<<顯影製程>> <<Development process>>

接著,將感光性組成物層的未曝光部顯影去除而形成圖案(像素)。感光性組成物層的未曝光部的顯影去除能夠使用顯影液來進行。藉此,曝光步驟中之未曝光部的感光性組成物層溶出於顯影液,僅殘留光硬化之部分。作為顯影液,不會對基底的元件或電路等帶來損傷之有機鹼性顯影液為較佳。顯影液的溫度例如為20~30℃為較佳。顯影時間為20~180秒為較佳。又,為了提高殘渣去除性,可反覆進行數次如下步驟:每隔60秒甩去顯影液,進一步重新供給顯影液。 Next, the unexposed portion of the photosensitive composition layer is developed and removed to form a pattern (pixel). The unexposed portion of the photosensitive composition layer can be removed by development using a developer. Thereby, the photosensitive composition layer in the unexposed portion in the exposure step is dissolved in the developer, and only the photohardened portion remains. As a developer, an organic alkaline developer that does not cause damage to the components or circuits of the substrate is preferred. The temperature of the developer is preferably 20 to 30°C, for example. The optimal development time is 20 to 180 seconds. In addition, in order to improve the residue removability, the following steps can be repeated several times: shaking off the developer every 60 seconds and further supplying the developer again.

顯影液係用純水稀釋鹼劑而得之鹼性水溶液(鹼性顯影液)為較佳。作為鹼劑,例如可列舉胺、乙胺、二乙胺、二甲基乙醇胺、二甘醇胺、二乙醇胺、羥基胺、乙二胺、四甲基氫氧化銨、四乙基氫氧化銨、四丙基氫氧化銨、四丁基氫氧化銨、乙基三甲基氫氧化銨、苄基三甲基氫氧化銨、二甲基雙(2-羥基乙基)氫氧化銨、膽鹼、吡咯、哌啶、1,8-二氮雜雙環[5.4.0]-7-十一碳烯等有機鹼性化合物或氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸氫鈉、矽酸鈉、偏矽酸鈉等無機鹼性化合物。關於鹼劑,分子量大的化合物在環境方面及安全方面而言為較佳。鹼性水溶液的鹼劑的濃度為0.001~10質量%為較佳,0.01~1質量%為更佳。又,顯影液可進一步包含界面活性劑。作為界面活性劑,可列舉上述界面活性劑,非離子系界面活性劑為較佳。從運輸和保管方便等觀點考慮,顯影液暫且製成為濃縮液,亦可稀釋成使用時所需的濃度。對於稀釋倍率並無特別限定,但例如能夠設定在1.5~100倍的範圍。又,顯影後利用純水進行清洗(沖洗)亦為較佳。又,沖洗藉由使形成有顯影後的感光性組成物層之支撐體旋轉的同時向顯影後的感光性組成物層供給沖洗液來進行為較佳。又,藉由使吐出沖洗液之噴嘴從支撐體的中 心部向支撐體的周緣部移動來進行亦為較佳。此時,在從噴嘴的支撐體中心部向周緣部移動時,可以在逐漸降低噴嘴的移動速度的同時使其移動。藉由以該種方式進行沖洗,能夠抑制沖洗的面內偏差。又,藉由使噴嘴從支撐體中心部向周緣部移動的同時逐漸降低支撐體的轉速亦可獲得相同的效果。 The developer is preferably an alkaline aqueous solution (alkaline developer) obtained by diluting an alkali agent with pure water. Examples of the alkaline agent include amine, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxylamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, Tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, ethyltrimethylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis(2-hydroxyethyl)ammonium hydroxide, choline, Pyrrole, piperidine, 1,8-diazabicyclo[5.4.0]-7-undecene and other organic basic compounds or sodium hydroxide, potassium hydroxide, sodium carbonate, sodium bicarbonate, sodium silicate, Inorganic alkaline compounds such as sodium metasilicate. Regarding alkaline agents, compounds with large molecular weights are preferable in terms of environment and safety. The concentration of the alkali agent in the alkaline aqueous solution is preferably 0.001 to 10% by mass, and more preferably 0.01 to 1% by mass. Moreover, the developer may further contain a surfactant. Examples of the surfactant include the above-mentioned surfactants, and nonionic surfactants are preferred. From the viewpoint of transportation and storage convenience, the developer is temporarily made into a concentrated solution, which can also be diluted to the concentration required for use. The dilution ratio is not particularly limited, but can be set in the range of 1.5 to 100 times, for example. In addition, it is also preferable to use pure water for cleaning (rinsing) after development. Furthermore, rinsing is preferably performed by supplying a rinsing liquid to the developed photosensitive composition layer while rotating the support on which the developed photosensitive composition layer is formed. Also, by causing the nozzle that spits out the flushing liquid from the center of the support body, It is also preferable to move the core part toward the peripheral edge part of the support body. At this time, when moving from the center part of the support body of the nozzle to the peripheral edge part, the moving speed of the nozzle may be gradually reduced while moving it. By performing flushing in this manner, in-plane deviation of flushing can be suppressed. In addition, the same effect can be obtained by gradually reducing the rotation speed of the support body while moving the nozzle from the center part of the support body to the peripheral part.

顯影後,在實施乾燥之後進行追加曝光處理或加熱處理(後烘烤)為較佳。追加曝光處理或後烘烤為用於使硬化完全之顯影後的加熱處理,加熱溫度例如100~240℃為較佳,200~240℃為更佳。關於後烘烤,對顯影後的膜,能夠以成為上述條件之方式,利用加熱板或對流式烘箱(熱風循環式乾燥機)、高頻加熱器等加熱機構,以連續式或者間斷式進行。 After development, it is preferable to perform additional exposure processing or heat processing (post-baking) after drying. The additional exposure treatment or post-baking is a heat treatment after development for complete hardening. The heating temperature is preferably 100 to 240°C, and more preferably 200 to 240°C. Post-baking can be performed continuously or intermittently on the developed film using a heating mechanism such as a heating plate, a convection oven (hot air circulation dryer), or a high-frequency heater so that the conditions described above are met.

當進行追加曝光處理時,用於曝光之光係波長400nm以下的光為較佳。又,追加曝光處理可以藉由韓國公開專利第1020170122130號公報中所記載之方法來進行。 When additional exposure processing is performed, the light used for exposure is preferably light with a wavelength of 400 nm or less. In addition, the additional exposure process can be performed by the method described in Korean Patent Publication No. 1020170122130.

經以上製程而形成1個像素。當形成下一個像素時,重複進行上述塗佈、曝光及顯影。 One pixel is formed through the above process. When forming the next pixel, the above-mentioned coating, exposure and development are repeated.

[實施例] [Example]

以下舉出實施例,對本發明進行更具體說明。示於以下的實施例之材料、使用量、比例、處理內容、處理順序等只要不脫離本發明的宗旨就能夠適當地進行變更。從而,本發明的範圍不限定於以下所示之具體例。除非另有說明,否則“份”、“%”為質量基準。重量平均分子量及數量平均分子量如上所述為藉由GPC法測量而得之聚乙烯換算值。 The present invention will be described in more detail below with reference to examples. Materials, usage amounts, proportions, processing contents, processing procedures, etc. shown in the following examples can be appropriately changed without departing from the gist of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below. Unless otherwise stated, "parts" and "%" are based on mass. The weight average molecular weight and the number average molecular weight are polyethylene conversion values measured by the GPC method as described above.

<底塗層用組成物的製作> <Preparation of composition for base coat>

混合下述原料而製作了底塗層形成用組成物。 The following raw materials were mixed to prepare a composition for forming an undercoat layer.

Figure 108136260-A0305-02-0082-161
Figure 108136260-A0305-02-0082-161

原料的詳細內容為如下所述。 Details of the raw materials are as follows.

‧PGMEA 98.5質量份 ‧PGMEA 98.5 parts by mass

‧樹脂A:CYCLOMER P(ACA)230AA(Daicel Corporation製、酸值=30mgKOH/g、Mw=15000) ‧Resin A: CYCLOMER P(ACA)230AA (manufactured by Daicel Corporation, acid value=30mgKOH/g, Mw=15000)

‧界面活性劑A:下述混合物(Mw=14000,表示重複單元的比例之%為質量%。) ‧Surface active agent A: the following mixture (Mw=14000, indicating the proportion of repeating units as mass %.)

Figure 108136260-A0305-02-0082-27
Figure 108136260-A0305-02-0082-27

<感光性組成物的製作> <Preparation of photosensitive composition>

使用下述原料,藉由後述之步驟及配合製作了表2~10所示之各種組成物。 Using the following raw materials, various compositions shown in Tables 2 to 10 were produced through the steps and combinations described below.

<<原料>> <<Raw materials>>

<<<色材:顏料、染料>>> <<<Color materials: pigments, dyes>>>

‧PR122:C.I.顏料紅122 ‧PR122: C.I. Pigment Red 122

‧PR177:C.I.顏料紅177 ‧PR177: C.I. Pigment Red 177

‧PR254:C.I.顏料紅254 ‧PR254: C.I. Pigment Red 254

‧PR272:C.I.顏料紅272 ‧PR272: C.I. Pigment Red 272

‧PG7:C.I.顏料綠7 ‧PG7: C.I. Pigment Green 7

‧PG36:C.I.顏料綠36 ‧PG36: C.I. Pigment Green 36

‧PG58:C.I.顏料綠58 ‧PG58: C.I. Pigment Green 58

‧PB15:6:C.I.顏料藍15:6 ‧PB15:6: C.I. Pigment Blue 15:6

‧PO71:C.I.顏料橙71 ‧PO71: C.I. Pigment Orange 71

‧PV23:C.I.顏料紫23 ‧PV23: C.I. Pigment Violet 23

‧PY139:C.I.顏料黃139 ‧PY139: C.I. Pigment Yellow 139

‧PY150:C.I.顏料黃150 ‧PY150: C.I. Pigment Yellow 150

‧PY185:C.I.顏料黃185 ‧PY185: C.I. Pigment Yellow 185

‧TiO2:TTO-51(C)(Ishihara Sangyo Kaisha,Ltd.製) ‧TiO 2 : TTO-51(C) (manufactured by Ishihara Sangyo Kaisha, Ltd.)

‧Al酞青:具有下述結構之化合物 ‧Al phthalocyanine: a compound with the following structure

Figure 108136260-A0305-02-0083-28
Figure 108136260-A0305-02-0083-28

Figure 108136260-A0305-02-0083-155
:具有下述結構之化合物 ‧
Figure 108136260-A0305-02-0083-155
: Compounds with the following structure

[化學式28]

Figure 108136260-A0305-02-0084-29
[Chemical formula 28]
Figure 108136260-A0305-02-0084-29

‧IR色素1:具有下述結構之化化合物 ‧IR Pigment 1: chemical compound with the following structure

Figure 108136260-A0305-02-0084-30
Figure 108136260-A0305-02-0084-30

‧IR色素2:具有下述結構之化合物 ‧IR Pigment 2: Compound with the following structure

Figure 108136260-A0305-02-0084-31
Figure 108136260-A0305-02-0084-31

‧IR色素3:具有下述結構之化合物 ‧IR Pigment 3: Compound with the following structure

[化學式31]

Figure 108136260-A0305-02-0085-32
[Chemical formula 31]
Figure 108136260-A0305-02-0085-32

‧苝黑(perylene black):具有下述結構之化合物 ‧Perylene black: a compound with the following structure

Figure 108136260-A0305-02-0085-33
Figure 108136260-A0305-02-0085-33

‧雙苯并呋喃:具有下述結構之化合物 ‧Dibenzofuran: a compound with the following structure

Figure 108136260-A0305-02-0085-34
Figure 108136260-A0305-02-0085-34

<<<實施例的顏料衍生物>>> <<<Pigment Derivatives of Examples>>>

對於下述各顏料衍生物,如下測量了400~700nm的波長區域中的莫耳吸光係數的最大值(εmax)。使各化合物20mg溶解於甲醇200mL中,並向該溶液2mL添加甲醇而使其成為50mL。針對該溶液的吸光度,使用Cary5000 UV-Vis-NIR分光光度計(Agilent Technologies,Inc.製)在波長200~800nm的範圍測量吸光度,並將該測量值的最大值以莫耳濃度規格化而計算出εmax。 For each of the following pigment derivatives, the maximum value (εmax) of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm was measured as follows. 20 mg of each compound was dissolved in 200 mL of methanol, and methanol was added to 2 mL of this solution to make it 50 mL. The absorbance of this solution was measured using a Cary5000 UV-Vis-NIR spectrophotometer (manufactured by Agilent Technologies, Inc.) in the wavelength range of 200 to 800 nm, and the maximum value of the measured value was normalized to the molar concentration and calculated. Out εmax.

‧顏料衍生物1:上述表1中的化合物C-1(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment derivative 1: Compound C-1 in the above Table 1 (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物2:上述表1中的化合物C-20(εmax:大於1000L‧mol-1‧cm-1且為3000L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 2: Compound C-20 in the above Table 1 (εmax: greater than 1000L‧mol -1 ‧cm -1 and less than 3000L‧mol -1 ‧cm -1 , basic)

‧顏料衍生物3:上述表1中的化合物C-36(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 3: Compound C-36 in Table 1 above (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物4:上述表1中的化合物C-51(εmax:大於100L‧mol-1‧cm-1且為1000L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 4: Compound C-51 in Table 1 above (εmax: greater than 100L‧mol -1 ‧cm -1 and less than 1000L‧mol -1 ‧cm -1 , basic)

‧顏料衍生物5:上述表1中的化合物C-87(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 5: Compound C-87 in Table 1 above (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物6:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,酸性) ‧Pigment Derivative 6: Compounds with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, acidic)

‧顏料衍生物7:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,酸性) ‧Pigment Derivative 7: Compounds with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, acidic)

‧顏料衍生物8:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,酸性) ‧Pigment Derivative 8: Compounds with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, acidic)

‧顏料衍生物9:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,酸性) ‧Pigment Derivative 9: Compounds with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, acidic)

‧顏料衍生物10:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,酸性) ‧Pigment Derivative 10: Compounds with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, acidic)

‧顏料衍生物A:具有下述結構之化合物(黃色、鹼性) ‧Pigment Derivative A: Compound with the following structure (yellow, basic)

[化學式34]

Figure 108136260-A0305-02-0087-35
[Chemical formula 34]
Figure 108136260-A0305-02-0087-35

<<<比較例的顏料衍生物>>> <<<Pigment derivatives of comparative examples>>>

對於下述各顏料衍生物,以與上述實施例的顏料衍生物同樣的方式測量了εmax。任何顏料衍生物均被著色,εmax大於3000L‧mol-1‧cm-1For each of the pigment derivatives described below, εmax was measured in the same manner as the pigment derivatives of the above examples. Any pigment derivative is colored with εmax greater than 3000L‧mol -1 ‧cm -1 .

‧比較衍生物1:具有下述結構之化合物(黃色,鹼性) ‧Comparative derivative 1: compound with the following structure (yellow, basic)

‧比較衍生物2:具有下述結構之化合物(紅色,鹼性) ‧Comparative derivative 2: compound with the following structure (red, basic)

‧比較衍生物3:具有下述結構之化合物(黃色,鹼性) ‧Comparative derivative 3: compound with the following structure (yellow, basic)

‧比較衍生物4:具有下述結構之化合物(藍色,鹼性) ‧Comparative derivative 4: compound with the following structure (blue, basic)

‧比較衍生物5:具有下述結構之化合物(紫色,鹼性) ‧Comparative derivative 5: compound with the following structure (purple, basic)

[化學式35]

Figure 108136260-A0305-02-0088-36
[Chemical formula 35]
Figure 108136260-A0305-02-0088-36

<<<分散劑>>> <<<Dispersant>>>

‧分散劑1:具有下述結構之化合物(酸性)。主鏈中所附記之數值為重複單元的莫耳比,側鏈中所附記之數值為重複單元的數量。 ‧Dispersant 1: Compound with the following structure (acidic). The numerical value attached to the main chain is the molar ratio of the repeating unit, and the numerical value attached to the side chain is the number of repeating units.

[化學式36]

Figure 108136260-A0305-02-0089-37
[Chemical formula 36]
Figure 108136260-A0305-02-0089-37

‧分散劑2:具有下述結構之化合物(主鏈中所附記之數值為重複單元的莫耳比,側鏈中所附記之數值為重複單元的數量。Mw:20000、C=C值:0.4mmol/g、酸值:70mgKOH/g) ‧Dispersant 2: A compound with the following structure (the value in the main chain is the molar ratio of the repeating unit, and the value in the side chain is the number of repeating units. Mw: 20000, C=C value: 0.4 mmol/g, acid value: 70mgKOH/g)

Figure 108136260-A0305-02-0089-38
Figure 108136260-A0305-02-0089-38

‧分散劑3:具有下述結構之化合物(k:l:m:n=25:40:5:30(重合莫耳比),p=60,q=60,重量平均分子量10,000,鹼性) ‧Dispersant 3: a compound with the following structure (k: l: m: n = 25: 40: 5: 30 (overlapping molar ratio), p = 60, q = 60, weight average molecular weight 10,000, basic)

Figure 108136260-A0305-02-0089-39
Figure 108136260-A0305-02-0089-39

<<<樹脂>>> <<<Resin>>>

‧樹脂1:具有下述結構之化合物。主鏈中所附記之數值表示重複單元的莫耳比。 ‧Resin 1: A compound with the following structure. The numerical value appended to the main chain represents the molar ratio of the repeating units.

[化學式39]

Figure 108136260-A0305-02-0090-40
[Chemical formula 39]
Figure 108136260-A0305-02-0090-40

‧樹脂2:具有下述結構之化合物。主鏈中所附記之數值表示重複單元的莫耳比。 ‧Resin 2: A compound with the following structure. The numerical value appended to the main chain represents the molar ratio of the repeating units.

Figure 108136260-A0305-02-0090-41
Figure 108136260-A0305-02-0090-41

<<<聚合性單體>>> <<<Polymerizable monomer>>>

‧聚合性單體1:具有下述結構之化合物 ‧Polymerizable monomer 1: Compounds with the following structure

Figure 108136260-A0305-02-0090-42
Figure 108136260-A0305-02-0090-42

‧聚合性單體2:具有下述結構之化合物 ‧Polymerizable monomer 2: compound with the following structure

Figure 108136260-A0305-02-0090-43
Figure 108136260-A0305-02-0090-43

‧聚合性單體3:分別具有下述結構之2種化合物的混合物(左側與右側的莫耳比為7:3) ‧Polymerizable monomer 3: a mixture of two compounds each having the following structure (the molar ratio between the left and right sides is 7:3)

Figure 108136260-A0305-02-0091-44
Figure 108136260-A0305-02-0091-44

<<<光聚合起始劑>>> <<<Photopolymerization initiator>>>

‧光聚合起始劑1:具有下述結構之化合物 ‧Photopolymerization initiator 1: compound with the following structure

Figure 108136260-A0305-02-0091-45
Figure 108136260-A0305-02-0091-45

‧光聚合起始劑2:具有下述結構之化合物 ‧Photopolymerization initiator 2: a compound with the following structure

Figure 108136260-A0305-02-0091-46
Figure 108136260-A0305-02-0091-46

‧光聚合起始劑3:具有下述結構之化合物 ‧Photopolymerization initiator 3: a compound with the following structure

Figure 108136260-A0305-02-0091-47
Figure 108136260-A0305-02-0091-47

<<<界面活性劑>>> <<<Surface active agent>>>

‧界面活性劑1:分別具有下述結構之2種化合物的混合物(Mw=14000,以質量%記載) ‧Surface active agent 1: a mixture of two compounds each having the following structure (Mw=14000, recorded in mass %)

Figure 108136260-A0305-02-0092-49
Figure 108136260-A0305-02-0092-49

<<<紫外線吸收劑>>> <<<UV absorber>>>

‧紫外線吸收劑1:具有下述結構之化合物 ‧UV absorber 1: compound with the following structure

Figure 108136260-A0305-02-0092-50
Figure 108136260-A0305-02-0092-50

<<<環氧樹脂>>> <<<Epoxy resin>>>

‧環氧樹脂1:EHPE3150(Daicel Corporation製,2,2’-雙(羥甲基)-1-丁醇的1,2-環氧-4-(2-環氧乙烷基)環己烷加成物) ‧Epoxy resin 1: EHPE3150 (manufactured by Daicel Corporation, 1,2-epoxy-4-(2-oxiranyl)cyclohexane of 2,2'-bis(hydroxymethyl)-1-butanol adduct)

<<<矽烷偶合劑>>> <<<Silane coupling agent>>>

‧矽烷偶合劑1:具有下述結構之化合物(Mw=14000,以質量%記載) ‧Silane coupling agent 1: a compound with the following structure (Mw=14000, recorded in mass %)

Figure 108136260-A0305-02-0092-51
Figure 108136260-A0305-02-0092-51

<<<溶劑>>> <<<Solvent>>>

‧PGMEA:丙二醇單甲醚乙酸酯 ‧PGMEA: Propylene glycol monomethyl ether acetate

‧EEP:3-乙氧基丙酸乙酯 ‧EEP: Ethyl 3-ethoxypropionate

<<綠色組成物G1>> <<Green composition G1>>

(顏料分散液G1的製作) (Preparation of Pigment Dispersion G1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液G1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion G1.

分散液的原料:

Figure 108136260-A0305-02-0093-57
Raw materials for dispersion:
Figure 108136260-A0305-02-0093-57

(綠色組成物G1的製作) (Preparation of green composition G1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G1。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining green composition G1.

組成物的原料:

Figure 108136260-A0305-02-0093-52
Figure 108136260-A0305-02-0094-53
Raw materials of the composition:
Figure 108136260-A0305-02-0093-52
Figure 108136260-A0305-02-0094-53

<<綠色組成物G4>> <<Green composition G4>>

(顏料分散液G4的製作) (Preparation of Pigment Dispersion G4)

除了將綠色顏料的種類變更為PG36以外,使用了與顏料分散液G1的原料相同的成分及配合的原料。而且,藉由與顏料分散液G1的製作方法相同的步驟獲得了顏料分散液G4。 Except that the type of green pigment was changed to PG36, the same components and blended raw materials as those of the pigment dispersion G1 were used. Furthermore, the pigment dispersion liquid G4 was obtained by the same procedure as the preparation method of the pigment dispersion liquid G1.

(綠色組成物G4的製作) (Preparation of green composition G4)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G4。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining green composition G4.

組成物的原料:

Figure 108136260-A0305-02-0094-56
‧PGMEA 37.7質量份 Raw materials of the composition:
Figure 108136260-A0305-02-0094-56
‧PGMEA 37.7 parts by mass

<<綠色組成物G5>> <<Green composition G5>>

(顏料分散液G5的製作) (Preparation of Pigment Dispersion G5)

使用與顏料分散液G4的原料相同的原料,並藉由與顏料分散液G4的製作方法相同的步驟獲得了顏料分散液G5。 The same raw material as that of the pigment dispersion G4 was used, and the pigment dispersion G5 was obtained by the same procedure as the preparation method of the pigment dispersion G4.

(綠色組成物G5的製作) (Preparation of green composition G5)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G5。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain green composition G5.

組成物的原料:

Figure 108136260-A0305-02-0095-58
Raw materials of the composition:
Figure 108136260-A0305-02-0095-58

<<綠色組成物G20>> <<Green composition G20>>

(顏料分散液G20的製作) (Preparation of Pigment Dispersion G20)

除了將分散液的原料變更為下述原料以外,藉由與顏料分散液G1的製作方法相同的步驟獲得了顏料分散液G20。 The pigment dispersion liquid G20 was obtained by the same procedure as the preparation method of the pigment dispersion liquid G1, except that the raw material of the dispersion liquid was changed to the following raw materials.

分散液的原料:

Figure 108136260-A0305-02-0096-59
Raw materials for dispersion:
Figure 108136260-A0305-02-0096-59

(綠色組成物G20的製作) (Preparation of green composition G20)

除了將顏料分散液G1變更為顏料分散液G20以外,藉由與綠色組成物G1的製作方法相同的步驟獲得了綠色組成物G20。 The green composition G20 was obtained by the same procedure as the preparation method of the green composition G1, except that the pigment dispersion liquid G1 was changed into the pigment dispersion liquid G20.

<<綠色組成物G21>> <<Green composition G21>>

(顏料分散液G21的製作) (Preparation of Pigment Dispersion G21)

除了將分散液的原料變更為下述原料以外,藉由與顏料分散液G1的製作方法相同的步驟獲得了顏料分散液G21。 The pigment dispersion liquid G21 was obtained by the same procedure as the preparation method of the pigment dispersion liquid G1, except that the raw material of the dispersion liquid was changed to the following raw materials.

分散液的原料:

Figure 108136260-A0305-02-0096-60
Raw materials for dispersion:
Figure 108136260-A0305-02-0096-60

(綠色組成物G21的製作) (Preparation of green composition G21)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G21。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining green composition G21.

組成物的原料:

Figure 108136260-A0305-02-0097-61
Raw materials of the composition:
Figure 108136260-A0305-02-0097-61

<<綠色組成物G22>> <<Green composition G22>>

(顏料分散液G22的製作) (Preparation of Pigment Dispersion G22)

除了將分散液的原料變更為下述原料以外,藉由與顏料分散液G21的製作方法相同的步驟獲得了顏料分散液G22。 The pigment dispersion liquid G22 was obtained by the same procedure as the preparation method of the pigment dispersion liquid G21, except that the raw material of the dispersion liquid was changed to the following raw materials.

分散液的原料:

Figure 108136260-A0305-02-0097-62
Raw materials for dispersion:
Figure 108136260-A0305-02-0097-62

(綠色組成物G22的製作) (Preparation of green composition G22)

除了將顏料分散液G21變更為顏料分散液G22以外,藉由與綠色組成物G21的製作方法相同的步驟獲得了綠色組成物G22。 Green composition G22 was obtained by the same procedure as the production method of green composition G21, except that the pigment dispersion liquid G21 was changed into the pigment dispersion liquid G22.

<<綠色組成物G23>> <<Green composition G23>>

(顏料分散液G23的製作) (Preparation of Pigment Dispersion G23)

除了如下變更佔顏料分散液的1.6質量份之顏料衍生物的配合以外,藉由與顏料分散液G22的製作方法相同的步驟獲得了顏料分散液G23。 Pigment dispersion G23 was obtained by the same procedure as the preparation method of pigment dispersion G22, except that the blending of the pigment derivative accounting for 1.6 parts by mass of the pigment dispersion was changed as follows.

Figure 108136260-A0305-02-0098-63
Figure 108136260-A0305-02-0098-63

(綠色組成物G23的製作) (Preparation of green composition G23)

除了將顏料分散液G21變更為顏料分散液G23以外,藉由與綠色組成物G21的製作方法相同的步驟獲得了綠色組成物G23。 The green composition G23 was obtained by the same procedure as the preparation method of the green composition G21, except that the pigment dispersion liquid G21 was changed into the pigment dispersion liquid G23.

<<綠色組成物G24>> <<Green composition G24>>

(顏料分散液G24的製作) (Preparation of Pigment Dispersion G24)

除了將分散液的原料變更為下述原料以外,藉由與顏料分散液G21的製作方法相同的步驟獲得了顏料分散液G24。 The pigment dispersion liquid G24 was obtained by the same procedure as the preparation method of the pigment dispersion liquid G21, except that the raw material of the dispersion liquid was changed to the following raw materials.

分散液的原料:

Figure 108136260-A0305-02-0098-64
Figure 108136260-A0305-02-0099-65
Raw materials for dispersion:
Figure 108136260-A0305-02-0098-64
Figure 108136260-A0305-02-0099-65

(綠色組成物G24的製作) (Preparation of green composition G24)

除了將顏料分散液G21變更為顏料分散液G24以外,藉由與綠色組成物G21的製作方法相同的步驟獲得了綠色組成物G24。 Green composition G24 was obtained by the same procedure as the production method of green composition G21, except that the pigment dispersion liquid G21 was changed into the pigment dispersion liquid G24.

<<綠色組成物G2~G3、G6~G19及比較例的組成物>> <<Compositions of green compositions G2~G3, G6~G19 and comparative examples>>

如表2所示,除了分別變更分散液及組成物的成分的種類以外,藉由與綠色組成物G1的情況相同的成分、配合及步驟,獲得了綠色組成物G2~G3、G6~G19及比較例的綠色組成物(比較組成物G1~G3、G6~G14)。 另外,關於色材,按照表中的“色材1”、“色材2”及“色材3”的每一欄變更了相對應之成分彼此。針對其他組成物亦相同。 As shown in Table 2, except for changing the types of components of the dispersion liquid and the composition, green compositions G2 to G3, G6 to G19 and Green compositions of comparative examples (comparative compositions G1 to G3, G6 to G14). In addition, regarding the color material, the corresponding components have been changed for each column of "Color Material 1", "Color Material 2" and "Color Material 3" in the table. The same applies to other components.

又,如表2所示,除了變更顏料衍生物的種類以外,藉由與綠色組成物G4的情況相同的成分、配合及步驟獲得了比較組成物G4。又,如表2所示,除了變更顏料衍生物的種類以外,藉由與綠色組成物G5的情況相同的成分、配合及步驟獲得了比較組成物G5。 Furthermore, as shown in Table 2, comparative composition G4 was obtained by using the same components, mixtures, and steps as in the case of green composition G4, except for changing the type of the pigment derivative. Furthermore, as shown in Table 2, comparative composition G5 was obtained by using the same components, blending, and steps as in the case of green composition G5, except for changing the type of the pigment derivative.

表2中示出上述綠色組成物各自的特徵成分。另外,在表2中,界面活性劑、紫外線吸收劑、環氧樹脂及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,針對各組成物亦示出相對於總固體成分的顏料及顏料衍生物的合計含量(顏料類濃度)。顏料衍生物的項目中的括號內的各數值表示顏料衍生物1或顏料衍生物A的分散液中的比例(質量份)。 Table 2 shows the characteristic components of each of the above-mentioned green compositions. In addition, in Table 2, descriptions of surfactant, ultraviolet absorber, epoxy resin, and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the total content of pigments and pigment derivatives (pigment concentration) relative to the total solid content for each composition. Each numerical value in parentheses in the item of the pigment derivative represents the ratio (parts by mass) of the pigment derivative 1 or the pigment derivative A in the dispersion liquid.

Figure 108136260-A0305-02-0100-66
Figure 108136260-A0305-02-0100-66

<<紅色組成物R1>> <<Red composition R1>>

(顏料分散液R1的製作) (Preparation of Pigment Dispersion R1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液R1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid R1.

分散液的原料:

Figure 108136260-A0305-02-0101-95
Raw materials for dispersion:
Figure 108136260-A0305-02-0101-95

(紅色組成物R1的製作) (Preparation of red composition R1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了紅色組成物R1。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining a red composition R1.

組成物的原料:

Figure 108136260-A0305-02-0101-96
Figure 108136260-A0305-02-0102-97
Raw materials of the composition:
Figure 108136260-A0305-02-0101-96
Figure 108136260-A0305-02-0102-97

<<紅色組成物R2>> <<Red composition R2>>

(顏料分散液R2的製作) (Preparation of Pigment Dispersion R2)

針對顏料將PR254的一半變更為PO71,除此以外,使用了與顏料分散液R1的原料相同的成分及配合的原料。而且,藉由與顏料分散液R1的製作方法相同的步驟獲得了顏料分散液R2。 For the pigment, half of PR254 was changed to PO71, but the same ingredients and blended raw materials as those of the pigment dispersion R1 were used. Moreover, the pigment dispersion liquid R2 was obtained by the same procedure as the preparation method of the pigment dispersion liquid R1.

(紅色組成物R2的製作) (Preparation of red composition R2)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了紅色組成物R2。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining a red composition R2.

組成物的原料:

Figure 108136260-A0305-02-0102-98
Raw materials of the composition:
Figure 108136260-A0305-02-0102-98

<<紅色組成物R4>> <<Red composition R4>>

(顏料分散液R4的製作) (Preparation of Pigment Dispersion R4)

使用與顏料分散液R1的原料相同的原料,並藉由與顏料分散液R1的製作方法相同的步驟獲得了顏料分散液R4。 The same raw material as the raw material of the pigment dispersion R1 was used, and the pigment dispersion R4 was obtained by the same procedure as the manufacturing method of the pigment dispersion R1.

(紅色組成物R4的製作) (Preparation of red composition R4)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了紅色組成物R4。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain red composition R4.

組成物的原料:

Figure 108136260-A0305-02-0103-99
Raw materials of the composition:
Figure 108136260-A0305-02-0103-99

<<紅色組成物R5>> <<Red composition R5>>

(顏料分散液R5的製作) (Preparation of Pigment Dispersion R5)

使用與顏料分散液R1的原料相同的原料,並藉由與顏料分散液R1的製作方法相同的步驟獲得了顏料分散液R5。 The same raw material as the raw material of the pigment dispersion R1 was used, and the pigment dispersion R5 was obtained by the same procedure as the preparation method of the pigment dispersion R1.

(紅色組成物R5的製作) (Preparation of red composition R5)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了紅色組成物R5。 Next, a mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain a red composition R5.

組成物的原料:

Figure 108136260-A0305-02-0104-100
Raw materials of the composition:
Figure 108136260-A0305-02-0104-100

<<紅色組成物R3、R6~R19及比較例的組成物>> <<Compositions of red compositions R3, R6~R19 and comparative examples>>

如表3所示,除了分別變更分散液及組成物的成分的種類以外,藉由與紅色組成物R1的情況相同的成分、配合及步驟,獲得了紅色組成物R3、R6~R19及比較例的紅色組成物(比較組成物R1~R3、R6~R14)。 As shown in Table 3, red compositions R3, R6 to R19 and comparative examples were obtained using the same components, mixtures and steps as in the case of red composition R1, except for changing the types of components of the dispersion and composition respectively. The red composition (compare compositions R1~R3, R6~R14).

又,如表3所示,除了變更顏料衍生物的種類以外,藉由與紅色組成物R4的情況相同的成分、配合及步驟獲得了比較組成物R4。又,如表3所示,除了變更顏料衍生物的種類以外,藉由與紅色組成物R5的情況相同的成分、配合及步驟獲得了比較組成物R5。 In addition, as shown in Table 3, comparative composition R4 was obtained by using the same components, blending, and steps as in the case of red composition R4, except for changing the type of the pigment derivative. Furthermore, as shown in Table 3, comparative composition R5 was obtained by using the same components, blending, and steps as in the case of red composition R5, except for changing the type of the pigment derivative.

表3中示出上述紅色組成物各自的特徵成分。另外,在表3中,界面活性劑、紫外線吸收劑、環氧樹脂及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 3 shows the characteristic components of each of the above red compositions. In addition, in Table 3, descriptions of surfactant, ultraviolet absorber, epoxy resin, and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0105-67
Figure 108136260-A0305-02-0105-67

<<藍色組成物B1>> <<Blue composition B1>>

(顏料分散液B1的製作) (Preparation of Pigment Dispersion B1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3 及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液B1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion B1.

分散液的原料:

Figure 108136260-A0305-02-0106-101
Raw materials for dispersion:
Figure 108136260-A0305-02-0106-101

(藍色組成物B1的製作) (Preparation of blue composition B1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了藍色組成物B1。 Next, a mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining blue composition B1.

組成物的原料:

Figure 108136260-A0305-02-0106-102
Raw materials of the composition:
Figure 108136260-A0305-02-0106-102

<<藍色組成物B3>> <<Blue composition B3>>

(顏料分散液B3的製作) (Preparation of Pigment Dispersion B3)

使用與顏料分散液B1的原料相同的原料,並藉由與顏料分散液B1的製作方法相同的步驟獲得了顏料分散液B3。 The same raw material as that of the pigment dispersion B1 was used, and the pigment dispersion B3 was obtained by the same procedure as the preparation method of the pigment dispersion B1.

(藍色組成物B3的製作) (Preparation of blue composition B3)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了藍色組成物B3。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining blue composition B3.

組成物的原料:

Figure 108136260-A0305-02-0107-103
Raw materials of the composition:
Figure 108136260-A0305-02-0107-103

<<藍色組成物B4>> <<Blue composition B4>>

(顏料分散液B4的製作) (Preparation of Pigment Dispersion B4)

使用與顏料分散液B1的原料相同的原料,並藉由與顏料分散液B1的製作方法相同的步驟獲得了顏料分散液B4。 The same raw material as that of the pigment dispersion B1 was used, and the pigment dispersion B4 was obtained by the same procedure as the preparation method of the pigment dispersion B1.

(藍色組成物B4的製作) (Preparation of blue composition B4)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了藍色組成物B4。 Next, a mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining blue composition B4.

組成物的原料:

Figure 108136260-A0305-02-0108-104
Raw materials of the composition:
Figure 108136260-A0305-02-0108-104

<<藍色組成物B2、B5~B18及比較例的組成物>> <<Compositions of blue compositions B2, B5~B18 and comparative examples>>

如表4所示,除了分別變更分散液及組成物的成分的種類以外,藉由與藍色組成物B1的情況相同的成分、配合及步驟,獲得了藍色組成物B2、B5~B18及比較例的藍色組成物(比較組成物B1~B2、B5~B13)。 As shown in Table 4, except for changing the types of components of the dispersion liquid and the composition, blue compositions B2, B5 to B18 and Blue compositions of comparative examples (comparative compositions B1 to B2, B5 to B13).

又,如表4所示,除了變更顏料衍生物的種類以外,藉由與藍色組成物B3的情況相同的成分、配合及步驟獲得了比較組成物B3。又,如表4所示,除了變更顏料衍生物的種類以外,藉由與藍色組成物B4的情況相同的成分、配合及步驟獲得了比較組成物B4。 Furthermore, as shown in Table 4, comparative composition B3 was obtained by using the same components, mixtures, and steps as in the case of blue composition B3, except for changing the type of the pigment derivative. Furthermore, as shown in Table 4, comparative composition B4 was obtained by using the same components, mixtures, and steps as in the case of blue composition B4, except for changing the type of the pigment derivative.

表4中示出上述藍色組成物各自的特徵成分。另外,在表4中,界面活性劑、紫外線吸收劑、環氧樹脂及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 4 shows the characteristic components of each of the above-mentioned blue compositions. In addition, in Table 4, descriptions of the surfactant, ultraviolet absorber, epoxy resin, and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0109-68
Figure 108136260-A0305-02-0109-68

<<黃色組成物Y1>> <<Yellow composition Y1>>

(顏料分散液Y1的製作) (Preparation of Pigment Dispersion Y1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至 10次,從而獲得了顏料分散液Y1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid Y1.

分散液的原料:

Figure 108136260-A0305-02-0110-105
Raw materials for dispersion:
Figure 108136260-A0305-02-0110-105

(黃色組成物Y1的製作) (Preparation of yellow composition Y1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了黃色組成物Y1。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining a yellow composition Y1.

組成物的原料:

Figure 108136260-A0305-02-0110-106
Raw materials of the composition:
Figure 108136260-A0305-02-0110-106

<<黃色組成物Y2及比較例的組成物>> <<Yellow composition Y2 and compositions of comparative examples>>

如表5所示,除了分別變更分散液及組成物的成分的種類以外,藉由與黃色組成物Y1的情況相同的成分、配合及步驟,獲得了黃色組成物Y2及比較例的黃色組成物(比較組成物Y1~Y2)。 As shown in Table 5, yellow composition Y2 and the yellow composition of the comparative example were obtained by using the same ingredients, mixing, and steps as in the case of yellow composition Y1, except for changing the types of components of the dispersion liquid and the composition respectively. (Compare compositions Y1~Y2).

表5中示出上述黃色組成物各自的特徵成分。另外,在表5中, 界面活性劑、紫外線吸收劑及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 5 shows the characteristic components of each of the above yellow compositions. Additionally, in Table 5, Descriptions of the surfactant, ultraviolet absorber, and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0111-69
Figure 108136260-A0305-02-0111-69

<<品紅色組成物M1>> <<Magenta composition M1>>

(顏料分散液M1的製作) (Preparation of Pigment Dispersion M1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液M1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid M1.

分散液的原料:

Figure 108136260-A0305-02-0111-107
Raw materials for dispersion:
Figure 108136260-A0305-02-0111-107

(品紅色組成物M1的製作) (Preparation of magenta composition M1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了品紅色組成物M1。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain a magenta composition M1.

組成物的原料:

Figure 108136260-A0305-02-0112-108
Raw materials of the composition:
Figure 108136260-A0305-02-0112-108

<<品紅色組成物M2及比較例的組成物>> <<Magenta composition M2 and compositions of comparative examples>>

如表6所示,除了分別變更分散液及組成物的成分的種類以外,藉由與品紅色組成物M1的情況相同的成分、配合及步驟,獲得了品紅色組成物M2及比較例的品紅色組成物(比較組成物M1~M2)。 As shown in Table 6, except for changing the types of components of the dispersion liquid and the composition, the magenta composition M2 and the comparative example were obtained by using the same components, mixing and steps as in the case of the magenta composition M1. Red composition (compare compositions M1~M2).

表6中示出上述品紅色組成物各自的特徵成分。另外,在表6中,界面活性劑、紫外線吸收劑、矽烷偶合劑及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 6 shows the characteristic components of each of the above-mentioned magenta compositions. In addition, in Table 6, descriptions of the surfactant, ultraviolet absorber, silane coupling agent, and PGMEA are common components in all compositions and are therefore omitted. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0112-70
Figure 108136260-A0305-02-0112-70

<<青色組成物C1>> <<Cyan composition C1>>

(顏料分散液C1的製作) (Preparation of Pigment Dispersion C1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液C1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid C1.

分散液的原料:

Figure 108136260-A0305-02-0113-109
Raw materials for dispersion:
Figure 108136260-A0305-02-0113-109

(青色組成物C1的製作) (Preparation of cyan composition C1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了青色組成物C1。 Next, a mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain cyan composition C1.

組成物的原料:

Figure 108136260-A0305-02-0113-110
Raw materials of the composition:
Figure 108136260-A0305-02-0113-110

<<青色組成物C2~C3及比較例的組成物>> <<Cyan compositions C2~C3 and compositions of comparative examples>>

如表7所示,除了分別變更分散液及組成物的成分的種類以外,藉由與青色組成物C1的情況相同的成分、配合及步驟,獲得了青色組成物C2~C3及比較例的青色組成物(比較組成物C1~C3)。組成物C2及比較組成物C2的色材為從組成物C1的色材含量將PG7的1/3變更為PG36而得之混合顏料。 As shown in Table 7, except for changing the types of components of the dispersion liquid and the composition, the cyan compositions C2 to C3 and the cyan color of the comparative example were obtained by using the same components, mixing and steps as in the case of the cyan composition C1. Composition (compare compositions C1~C3). The color material of composition C2 and comparative composition C2 is a mixed pigment obtained by changing 1/3 of the color material content of composition C1 from PG7 to PG36.

<<青色組成物C4>> <<Cyan composition C4>>

(顏料分散液C4的製作) (Preparation of Pigment Dispersion C4)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液C4。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid C4.

分散液的原料:

Figure 108136260-A0305-02-0114-111
Raw materials for dispersion:
Figure 108136260-A0305-02-0114-111

(青色組成物C4的製作) (Preparation of cyan composition C4)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了青色組成物C4。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain cyan composition C4.

組成物的原料:

Figure 108136260-A0305-02-0115-112
Raw materials of the composition:
Figure 108136260-A0305-02-0115-112

<<青色組成物C5及比較例的組成物>> <<Cyan composition C5 and compositions of comparative examples>>

如表7所示,除了分別變更分散液及組成物的成分的種類以外,藉由與青色組成物C4的情況相同的成分、配合及步驟,獲得了青色組成物C5及比較例的青色組成物(比較組成物C4~C5)。 As shown in Table 7, cyan composition C5 and the cyan composition of the comparative example were obtained by using the same components, blending, and steps as in the case of cyan composition C4, except that the types of components of the dispersion liquid and the composition were changed respectively. (Compare compositions C4~C5).

表7中示出上述青色組成物各自的特徵成分。另外,在表7中,界面活性劑、紫外線吸收劑、PGMEA及EEP的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 7 shows the characteristic components of each of the cyan compositions. In addition, in Table 7, descriptions of surfactant, ultraviolet absorber, PGMEA, and EEP are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0116-71
Figure 108136260-A0305-02-0116-71

<<近紅外線截止濾波器用組成物SIR1>> <<Composition for near infrared cut filter SIR1>>

(顏料分散液SIR1的製作) (Preparation of Pigment Dispersion SIR1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液SIR1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid SIR1.

分散液的原料:

Figure 108136260-A0305-02-0116-113
Raw materials for dispersion:
Figure 108136260-A0305-02-0116-113

(近紅外線截止濾波器用組成物SIR1的製作) (Production of near-infrared cut filter composition SIR1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm 的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了近紅外線截止濾波器用組成物SIR1。 Next, after stirring the mixture obtained by mixing the following raw materials, use a pore diameter of 0.45 μm. It was filtered with a nylon filter (manufactured by Nihon Pall Ltd.) to obtain a near-infrared cut filter composition SIR1.

組成物的原料:

Figure 108136260-A0305-02-0117-114
Raw materials of the composition:
Figure 108136260-A0305-02-0117-114

<<近紅外線截止濾波器用組成物SIR2~SIR3及比較例的組成物>> <<Compositions SIR2~SIR3 for near-infrared cut filters and compositions of comparative examples>>

如表8所示,除了分別變更分散液及組成物的成分的種類以外,藉由與近紅外線截止濾波器用組成物SIR1的情況相同的成分、配合及步驟,獲得了近紅外線截止濾波器用組成物SIR2~SIR3及比較例的近紅外線截止濾波器用組成物(比較組成物SIR1~SIR3)。 As shown in Table 8, except for changing the types of components of the dispersion liquid and the composition, a composition for a near-infrared cutoff filter was obtained using the same components, blending, and steps as in the case of the composition for a near-infrared cutoff filter SIR1. Compositions for near-infrared cut filters of SIR2 to SIR3 and comparative examples (comparative compositions SIR1 to SIR3).

表8中示出上述近紅外線截止濾波器用組成物各自的特徵成分。另外,在表8中,界面活性劑、紫外線吸收劑及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 8 shows the characteristic components of each of the above-mentioned near-infrared cut filter compositions. In addition, in Table 8, descriptions of surfactant, ultraviolet absorber and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0118-72
Figure 108136260-A0305-02-0118-72

<<近紅外線透過濾波器用組成物IRP1>> <<Composition for near-infrared transmission filter IRP1>>

(顏料分散液IRP1的製作) (Preparation of pigment dispersion IRP1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液IRP1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid IRP1.

分散液的原料:

Figure 108136260-A0305-02-0118-115
Raw materials for dispersion:
Figure 108136260-A0305-02-0118-115

(近紅外線透過濾波器用組成物IRP1的製作) (Preparation of composition IRP1 for near-infrared transmission filter)

對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍 製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了近紅外線透過濾波器用組成物IRP1。 After stirring the mixture obtained by mixing the following raw materials, use nylon with a pore diameter of 0.45 μm. Filtered with a manufactured filter (manufactured by Nihon Pall Ltd.), a composition IRP1 for a near-infrared ray transmitting filter was obtained.

組成物的原料:

Figure 108136260-A0305-02-0119-116
Raw materials of the composition:
Figure 108136260-A0305-02-0119-116

<<近紅外線透過濾波器用組成物IRP2>> <<Composition for near infrared transmission filter IRP2>>

(顏料分散液IRP2的製作) (Preparation of pigment dispersion IRP2)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液IRP2。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid IRP2.

分散液的原料:

Figure 108136260-A0305-02-0119-117
Figure 108136260-A0305-02-0120-118
Raw materials for dispersion:
Figure 108136260-A0305-02-0119-117
Figure 108136260-A0305-02-0120-118

(近紅外線透過濾波器用組成物IRP2的製作) (Preparation of composition IRP2 for near-infrared transmission filter)

對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了近紅外線透過濾波器用組成物IRP2。 The mixture obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain a near-infrared ray transmitting filter composition IRP2.

組成物的原料:

Figure 108136260-A0305-02-0120-119
Raw materials of the composition:
Figure 108136260-A0305-02-0120-119

<<近紅外線透過濾波器用組成物IRP3>> <<Composition IRP3 for near infrared transmission filter>>

(顏料分散液IRP3的製作) (Preparation of pigment dispersion IRP3)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液IRP3。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid IRP3.

分散液的原料:

Figure 108136260-A0305-02-0121-120
Raw materials for dispersion:
Figure 108136260-A0305-02-0121-120

(近紅外線透過濾波器用組成物IRP3的製作) (Preparation of composition IRP3 for near-infrared transmission filter)

對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了近紅外線透過濾波器用組成物IRP3。 The mixture obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain a composition IRP3 for a near-infrared transmission filter.

組成物的原料:

Figure 108136260-A0305-02-0121-121
Raw materials of the composition:
Figure 108136260-A0305-02-0121-121

<<比較例的近紅外線透過濾波器用組成物>> <<Composition for near-infrared transmission filter of comparative example>>

如表9所示,除了分別變更分散液及組成物的成分的種類以外,藉由 與近紅外線透過濾波器用組成物IRP1的情況相同的成分、配合及手順,獲得了比較例的近紅外線透過濾波器用組成物(比較組成物IRP1~IRP3)。 As shown in Table 9, in addition to changing the types of components of the dispersion liquid and the composition, by Compositions for near-infrared rays transmitting filters (comparative compositions IRP1 to IRP3) of comparative examples were obtained using the same ingredients, ingredients, and procedures as in the case of the composition for near-infrared rays transmitting filters IRP1.

表9中示出上述近紅外線透過濾波器用組成物各自的特徵成分。另外,在表9中,界面活性劑、矽烷偶合劑及PGMEA的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 9 shows the characteristic components of each of the above-mentioned near-infrared ray transmitting filter compositions. In addition, in Table 9, descriptions of surfactant, silane coupling agent and PGMEA are omitted because they are common components in all compositions. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0123-74
Figure 108136260-A0305-02-0123-74

<<白色組成物W>> <<White composition W>>

(顏料分散液W的製作) (Preparation of Pigment Dispersion W)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液W。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid W.

分散液的原料:

Figure 108136260-A0305-02-0124-122
Raw materials for dispersion:
Figure 108136260-A0305-02-0124-122

(白色組成物W的製作) (Preparation of white composition W)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了白色組成物W。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining a white composition W.

組成物的原料:

Figure 108136260-A0305-02-0124-123
Figure 108136260-A0305-02-0125-124
Raw materials of the composition:
Figure 108136260-A0305-02-0124-123
Figure 108136260-A0305-02-0125-124

<<比較例的白色組成物>> <<White composition of comparative example>>

如表10所示,除了分別變更分散液及組成物的成分的種類以外,藉由與白色組成物W的情況相同的成分、配合及步驟,獲得了比較例的白色組成物(比較組成物W)。 As shown in Table 10, except for changing the types of components of the dispersion liquid and the composition, the white composition of the comparative example (Comparative Composition W) was obtained using the same components, blending, and steps as in the case of the white composition W. ).

表10中示出上述白色組成物各自的特徵成分。另外,在表10中,界面活性劑、紫外線吸收劑、PGMEA及環己酮的記載在所有組成物中為共同的成分,因此省略。又,在該表中,亦示出針對各組成物的顏料類濃度。 Table 10 shows the characteristic components of each of the above-mentioned white compositions. In addition, in Table 10, descriptions of the surfactant, ultraviolet absorber, PGMEA, and cyclohexanone are common components in all the compositions, and therefore are omitted. In addition, this table also shows the pigment concentration for each composition.

Figure 108136260-A0305-02-0125-75
Figure 108136260-A0305-02-0125-75

<結構體的製作> <Creation of structure>

<<實施例1>> <<Example 1>>

首先,準備了8吋(1吋=約25.4mm)的矽晶圓。然後,藉由旋塗法將底塗層用組成物塗佈於該矽晶圓上,並使用加熱板在100℃下加熱2分鐘,進而在230℃下加熱2分鐘,從而在晶圓上形成了膜厚10nm的底塗層。接著,藉由旋塗法將上述綠色組成物G1塗佈於底塗層上,並使用加熱板在100℃下加熱2分鐘,從而在底塗層上形成了膜厚0.5μm的綠色組成物層。接著,使用i射線步進式曝光裝置FPA-3000i5+(Canon Inc.製),隔著具有1.0μm見方的拜耳圖案之遮罩以150mJ/cm2的曝光量對上述綠色組成物進行了曝光。接著,使用氫氧化四甲銨(TMAH)0.3質量%水溶液,在23℃ 下對綠色組成物層進行了60秒的旋覆浸沒顯影。然後,藉由旋轉噴淋進行沖洗,並使用純水實施水洗,進而使用加熱板將晶圓在220℃下加熱5分鐘,從而形成了厚度0.5μm及1.0μm見方的綠色像素。 First, an 8-inch (1 inch = approximately 25.4mm) silicon wafer was prepared. Then, the composition for the undercoat layer is coated on the silicon wafer by spin coating, and heated at 100°C for 2 minutes using a hot plate, and then heated at 230°C for 2 minutes to form a layer on the wafer. A base coating with a film thickness of 10nm is applied. Next, the above-mentioned green composition G1 was applied on the undercoat layer by spin coating, and heated at 100° C. for 2 minutes using a hot plate, thereby forming a green composition layer with a film thickness of 0.5 μm on the undercoat layer. . Next, using an i-ray stepper exposure device FPA-3000i5+ (manufactured by Canon Inc.), the green composition was exposed at an exposure dose of 150 mJ/cm 2 through a mask having a 1.0 μm square Bayer pattern. Next, spin immersion development was performed on the green composition layer at 23° C. for 60 seconds using a 0.3 mass% aqueous solution of tetramethylammonium hydroxide (TMAH). Then, the wafer was rinsed by rotating spray and washed with pure water, and then the wafer was heated at 220°C for 5 minutes using a hot plate to form green pixels with a thickness of 0.5 μm and a square shape of 1.0 μm.

而且,使用上述紅色組成物R1在形成有綠色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及1.0μm見方的紅色像素。藉此,形成綠色像素與紅色像素在彼此相對之一邊相鄰之結構體、具體而言,形成具有如圖1的a)~c)所示之像素配置之結構體(結構類型I)。在此,例如,綠色像素為第1像素P1,紅色像素為第2像素P2。 Furthermore, the above red composition R1 was used to perform the same process on the silicon wafer on which the green pixels were formed, and red pixels with a thickness of 0.5 μm and a square shape of 1.0 μm were formed adjacent to the green pixels on the silicon wafer. . Thereby, a structure is formed in which green pixels and red pixels are adjacent to each other on opposite sides. Specifically, a structure having a pixel arrangement as shown in a) to c) of Figure 1 is formed (structure type I). Here, for example, the green pixel is the first pixel P1 and the red pixel is the second pixel P2.

<<實施例2~9、20~25及比較例1~9、20~27、29~30>> <<Examples 2~9, 20~25 and Comparative Examples 1~9, 20~27, 29~30>>

作為用於形成結構類型I的結構體之組成物的組合,分別採用表11及表12所示之組合,並實施與實施例1相同的處理而依序形成第1像素及第2像素,藉此分別製作了結構類型I的結構體。 As the combination of components used to form the structure of structure type I, the combinations shown in Table 11 and Table 12 are respectively used, and the same processing as in Embodiment 1 is performed to sequentially form the first pixel and the second pixel. This creates a structure of structure type I respectively.

<<實施例10>> <<Example 10>>

首先,使用上述綠色組成物G1藉由與實施例1相同的方法,在矽晶圓上形成了厚度0.5μm及1.0μm見方的綠色像素。接著,使用上述紅色組成物R1,在形成有綠色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及1.0μm見方的紅色像素。最後,使用上述藍色組成物B1在形成有綠色像素及紅色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及10μm見方的藍色像素。另外,在形成紅色像素和藍色像素時,在曝光時使用具有1.0μm見方的島形圖案之遮罩。 First, green pixels with a thickness of 0.5 μm and a square shape of 1.0 μm were formed on a silicon wafer using the above-mentioned green composition G1 by the same method as Example 1. Next, the above-mentioned red composition R1 was used to perform the same process on the silicon wafer on which the green pixels were formed, and a red layer with a thickness of 0.5 μm and a square shape of 1.0 μm was formed on the silicon wafer adjacent to the green pixel. pixels. Finally, the above-mentioned blue composition B1 is used to perform the same process on the silicon wafer with green pixels and red pixels formed, and a thickness of 0.5 μm and a square shape of 10 μm is formed on the silicon wafer adjacent to the green pixel. blue pixels. In addition, when forming red pixels and blue pixels, a mask having an island pattern of 1.0 μm square was used during exposure.

藉此,形成了綠色像素和紅色像素在彼此相對之一邊相鄰且綠色像素和藍色像素在彼此相對之一邊相鄰之結構體,具體而言,形成了具有如圖2的a)所示之像素配置之結構體(結構類型IIa)。在此,例如,綠色像素為第1像素P1,紅色像素為第2像素P2,藍色像素為第3像素P3。 Thereby, a structure is formed in which the green pixel and the red pixel are adjacent to each other on one side and the green pixel and the blue pixel are adjacent to each other on the opposite side. Specifically, a structure is formed as shown in a) of Figure 2 The pixel configuration structure (structure type IIa). Here, for example, the green pixel is the first pixel P1, the red pixel is the second pixel P2, and the blue pixel is the third pixel P3.

<<實施例11~13及比較例10~13,28>> <<Examples 11~13 and Comparative Examples 10~13, 28>>

作為用於形成結構類型IIa的結構體之組成物的組合,分別採用表11及表12所示之組合,並實施與實施例10相同的處理而依序形成第1像素、第2像素及第3像素,藉此分別製作了結構類型IIa的結構體。 As a combination of compositions for forming a structure type IIa, the combinations shown in Table 11 and Table 12 are respectively used, and the same processing as in Embodiment 10 is performed to sequentially form the first pixel, the second pixel and the second pixel. 3 pixels, thereby creating structures of type IIa respectively.

<<實施例14>> <<Example 14>>

藉由旋塗法將底塗層用組成物塗佈於與實施例1相同的矽晶圓上,並使用加熱板在100℃下加熱2分,進而在230℃下加熱2分鐘,從而在晶圓上形成了膜厚10nm的底塗層。接著,藉由旋塗法將上述綠色組成物G1塗佈於底塗層上,並使用加熱板在100℃下加熱2分鐘,從而在底塗層上形成了膜厚0.5μm的綠色組成物層。接著,使用i射線步進式曝光裝置FPA-3000i5+(Canon Inc.製),隔著具有1.0μm見方的島形圖案之遮罩以150mJ/cm2的曝光量對上述綠色組成物進行了曝光。接著,使用氫氧化四甲銨(TMAH)0.3質量%水溶液,在23℃下對綠色組成物層進行了60秒的旋覆浸沒顯影。然後,藉由旋轉噴淋進行沖洗,並使用純水實施水洗,進而使用加熱板將晶圓在220℃下加熱5分鐘,從而形成了厚度0.5μm及1.0μm見方的綠色像素。 The composition for the undercoat layer was coated on the same silicon wafer as in Example 1 by spin coating, and heated at 100°C for 2 minutes using a hot plate, and then heated at 230°C for 2 minutes, thereby forming a wafer on the wafer. An undercoat layer with a film thickness of 10 nm was formed on the circle. Next, the above-mentioned green composition G1 was applied on the undercoat layer by spin coating, and heated at 100° C. for 2 minutes using a hot plate, thereby forming a green composition layer with a film thickness of 0.5 μm on the undercoat layer. . Next, using an i-ray stepper exposure device FPA-3000i5+ (manufactured by Canon Inc.), the green composition was exposed at an exposure dose of 150 mJ/cm 2 through a mask having an island pattern of 1.0 μm square. Next, spin immersion development was performed on the green composition layer at 23° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). Then, the wafer was rinsed by rotating spray and washed with pure water, and then the wafer was heated at 220°C for 5 minutes using a hot plate to form green pixels with a thickness of 0.5 μm and a square shape of 1.0 μm.

接著,使用上述紅色組成物R1在形成有綠色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm 及1.0μm見方的紅色像素。接著,使用上述藍色組成物B1,在形成有綠色像素及紅色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及1.0μm見方的藍色像素。最後,使用上述近紅外線透過濾波器用組成物IRP1,在形成有綠色像素、紅色像素及藍色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的綠色像素與頂點彼此相互對置之位置形成了厚度0.5μm及1.0μm見方的近紅外線透過用像素。 Next, the above-mentioned red composition R1 was used to perform the same process on the silicon wafer on which the green pixels were formed, and a 0.5 μm-thick layer was formed on the silicon wafer adjacent to the green pixels. and 1.0μm square red pixels. Next, using the above-mentioned blue composition B1, the same process is performed on the silicon wafer on which the green pixel and the red pixel are formed, and 0.5 μm and 1.0 μm thick pixels are formed on the silicon wafer adjacent to the green pixel. μm square blue pixels. Finally, using the above-mentioned near-infrared transmission filter composition IRP1, the same process is performed on the silicon wafer on which green pixels, red pixels, and blue pixels are formed, and the green pixels and vertices on the silicon wafer are opposite to each other. Near-infrared ray transmitting pixels with a thickness of 0.5 μm and a square shape of 1.0 μm were formed in these positions.

藉此,形成了綠色像素和紅色像素在彼此相對之一邊相鄰,綠色像素和藍色像素在彼此相對之一邊相鄰,並且近紅外線透過用像素與紅色像素及藍色像素這兩者相鄰之結構體,具體而言,形成了具有如圖3的a)所示之像素配置之結構體(結構類型III)。在此,例如,綠色像素為第1像素P1,紅色像素為第2像素P2,藍色像素為第3像素P3,近紅外線透過用像素為第4像素P4。 Thereby, the green pixel and the red pixel are adjacent to each other on the opposite side, the green pixel and the blue pixel are adjacent to each other on the opposite side, and the near-infrared ray transmitting pixel is adjacent to both the red pixel and the blue pixel. Specifically, a structure having a pixel configuration as shown in a) of FIG. 3 is formed (structure type III). Here, for example, the green pixel is the first pixel P1, the red pixel is the second pixel P2, the blue pixel is the third pixel P3, and the near-infrared ray transmitting pixel is the fourth pixel P4.

<<實施例15~19及比較例14~19>> <<Examples 15~19 and Comparative Examples 14~19>>

作為用於形成結構類型III的結構體之組成物的組合,分別採用表11及表12所示之組合,並實施與實施例14相同的處理而依序形成第1像素、第2像素、第3像素及第4像素,藉此分別製作了結構類型III的結構體。 As a combination of compositions for forming the structure of structure type III, the combinations shown in Table 11 and Table 12 are respectively used, and the same process as in Example 14 is performed to form the first pixel, the second pixel, and the second pixel in order. The 3rd pixel and the 4th pixel were used to create structures of structure type III respectively.

<<實施例26>> <<Example 26>>

在8吋的矽晶圓上藉由電漿CVD法形成了矽氧化物層。接著,在日本特開2016-014856號公報的0128~0133段中所記載之條件下,藉由乾式蝕刻法將將該矽氧化物層進行圖案化,並以1.0μm間隔以格子狀形成了由矽氧化物構成之間隔壁(寬度0.1μm、厚度0.25μm)。關於矽晶圓上的間隔壁的開口尺寸(被矽晶圓上的間隔壁劃分之區域),長為1.0μm,寬為1.0μm。 A silicon oxide layer was formed on an 8-inch silicon wafer by plasma CVD. Next, the silicon oxide layer was patterned by dry etching under the conditions described in paragraphs 0128 to 0133 of Japanese Patent Application Laid-Open No. 2016-014856, and formed into a grid pattern at intervals of 1.0 μm. Silicon oxide forms a partition wall (width 0.1 μm, thickness 0.25 μm). Regarding the opening size of the partition wall on the silicon wafer (the area divided by the partition wall on the silicon wafer), the length is 1.0 μm and the width is 1.0 μm.

接著,使用上述綠色組成物G1並藉由與實施例1相同的方法,在形成有間隔壁之該矽晶圓上形成了厚度0.5μm及1.0μm見方的綠色像素。此時,以1個像素與被間隔壁分開之1個區域對應之方式調整了曝光時的遮罩位置。接著,使用上述紅色組成物R1在形成有綠色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及1.0μm見方的紅色像素。最後,使用上述藍色組成物B1在形成有綠色像素及紅色像素之該矽晶圓上實施相同的處理,並在矽晶圓上的與綠色像素相鄰之位置形成了厚度0.5μm及1.0μm見方的藍色像素。另外,在形成紅色像素和藍色像素時,在曝光時使用了具有1.0μm見方的島形圖案之遮罩。 Next, using the above-mentioned green composition G1 and using the same method as Example 1, green pixels with a thickness of 0.5 μm and a square shape of 1.0 μm were formed on the silicon wafer with partition walls. At this time, the mask position during exposure is adjusted so that one pixel corresponds to one area separated by the partition wall. Next, the above-mentioned red composition R1 was used to perform the same process on the silicon wafer on which the green pixels were formed, and red pixels with a thickness of 0.5 μm and a square shape of 1.0 μm were formed on the silicon wafer adjacent to the green pixels. . Finally, the above-mentioned blue composition B1 was used to perform the same process on the silicon wafer on which the green pixel and the red pixel were formed, and 0.5 μm and 1.0 μm thickness were formed on the silicon wafer adjacent to the green pixel. Square blue pixels. In addition, when forming red pixels and blue pixels, a mask having an island pattern of 1.0 μm square was used during exposure.

藉此,形成了綠色像素和紅色像素在彼此相對之一邊相鄰且綠色像素和藍色像素在彼此相對之一邊相鄰之結構體,具體而言,形成了具有如圖2的a)所示之像素配置且如圖2的b)及圖2的c)所示那樣在各像素之間的邊界部分具有間隔壁之結構體(結構類型IIb)。在此,例如,綠色像素為第1像素P1,紅色像素為第2像素P2,藍色像素為第3像素P3。 Thereby, a structure is formed in which the green pixel and the red pixel are adjacent to each other on one side and the green pixel and the blue pixel are adjacent to each other on the opposite side. Specifically, a structure is formed as shown in a) of Figure 2 A structure in which pixels are arranged and have partition walls at the boundaries between pixels as shown in FIGS. 2 b) and 2 c) (structural type IIb). Here, for example, the green pixel is the first pixel P1, the red pixel is the second pixel P2, and the blue pixel is the third pixel P3.

<<實施例27-32>> <<Example 27-32>>

作為用於形成結構類型IIb的結構體之組成物的組合,分別採用表11所示之組合,並實施與實施例26相同的處理而依序形成第1像素、第2像素及第3像素,藉此分別製作了結構類型IIb的結構體。 As a combination of the components used to form the structure of structure type IIb, the combinations shown in Table 11 are respectively used, and the same processing as in Embodiment 26 is performed to form the first pixel, the second pixel and the third pixel in sequence. In this way, structures of structural type IIb were produced respectively.

Figure 108136260-A0305-02-0130-76
Figure 108136260-A0305-02-0130-76

Figure 108136260-A0305-02-0131-77
Figure 108136260-A0305-02-0131-77

<感光性組成物的製作> <Preparation of photosensitive composition>

此外,除了上述感光性組成物以外,使用上述原料及下述新的原料並藉由後述之步驟及配合而製作了表13~23所示之各種組成物。 In addition, in addition to the above-mentioned photosensitive composition, various compositions shown in Tables 13 to 23 were produced by using the above-mentioned raw materials and the following new raw materials through the steps and blending described below.

<<原料>> <<Raw materials>>

<<<色材:顏料、染料>>> <<<Color materials: pigments, dyes>>>

‧PR202:C.I.顏料紅202 ‧PR202: C.I. Pigment Red 202

‧PR264:C.I.顏料紅264 ‧PR264: C.I. Pigment Red 264

‧PR269:C.I.顏料紅269 ‧PR269: C.I. Pigment Red 269

‧PR291:C.I.顏料紅291 ‧PR291: C.I. Pigment Red 291

‧PR296:C.I.顏料紅296 ‧PR296: C.I. Pigment Red 296

‧PR297:C.I.顏料紅297 ‧PR297: C.I. Pigment Red 297

‧PG59:C.I.顏料綠59 ‧PG59: C.I. Pigment Green 59

‧PG63:C.I.顏料綠63 ‧PG63: C.I. Pigment Green 63

‧PB15:3:C.I.顏料藍15:3 ‧PB15:3: C.I. Pigment Blue 15:3

‧PB15:4:C.I.顏料藍15:4 ‧PB15:4: C.I. Pigment Blue 15:4

‧PB16:C.I.顏料藍16 ‧PB16: C.I. Pigment Blue 16

‧PY215:C.I.顏料黃215 ‧PY215: C.I. Pigment Yellow 215

‧PY228:C.I.顏料黃228 ‧PY228: C.I. Pigment Yellow 228

‧PY231:C.I.顏料黃231 ‧PY231: C.I. Pigment Yellow 231

‧PY233:C.I.顏料黃233 ‧PY233: C.I. Pigment Yellow 233

‧PV2:C.I.顏料紫2 ‧PV2: C.I. Pigment Violet 2

‧PV19:C.I.顏料紫19 ‧PV19: C.I. Pigment Violet 19

‧PV37:C.I.顏料紫37 ‧PV37: C.I. Pigment Violet 37

<<<實施例的顏料衍生物>>> <<<Pigment Derivatives of Examples>>>

‧顏料衍生物101:上述表1中的化合物C-60(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 101: Compound C-60 in Table 1 above (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物102:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 102: Compound with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物103:具有下述結構之化合物(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 103: Compound with the following structure (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物104:上述表1中的化合物C-93(εmax:100L‧mol-1‧ cm-1以下,鹼性) ‧Pigment Derivative 104: Compound C-93 in Table 1 above (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

‧顏料衍生物105:上述表1中的化合物C-95(εmax:100L‧mol-1‧cm-1以下,鹼性) ‧Pigment Derivative 105: Compound C-95 in Table 1 above (εmax: 100L‧mol -1 ‧cm -1 or less, basic)

Figure 108136260-A0305-02-0133-126
Figure 108136260-A0305-02-0133-126

<<<分散劑>>> <<<Dispersant>>>

‧分散劑4:下述結構的化合物(Mw:30000)。主鏈中所附記之數值表示重複單元的莫耳比。 ‧Dispersant 4: compound with the following structure (Mw: 30000). The numerical value appended to the main chain represents the molar ratio of the repeating units.

Figure 108136260-A0305-02-0133-125
Figure 108136260-A0305-02-0133-125

‧分散劑5:Solsperse 20000(The Lubrizol Corporation製)。 ‧Dispersant 5: Solsperse 20000 (manufactured by The Lubrizol Corporation).

<<<樹脂>>> <<<Resin>>>

‧樹脂3:CYCLOMER P(ACA)230AA(Mw:14000,DAICEL-ALLNEX LTD.製)。 ‧Resin 3: CYCLOMER P(ACA)230AA (Mw: 14000, manufactured by DAICEL-ALLNEX LTD.).

‧樹脂4:下述結構的化合物(Mw:14000)。主鏈中所附記之數值表示重複單元的莫耳比。 ‧Resin 4: compound with the following structure (Mw: 14000). The numerical value appended to the main chain represents the molar ratio of the repeating units.

Figure 108136260-A0305-02-0134-127
Figure 108136260-A0305-02-0134-127

<<<光聚合起始劑>>> <<<Photopolymerization initiator>>>

‧光聚合起始劑4:具有下述結構之化合物。 ‧Photopolymerization initiator 4: a compound with the following structure.

Figure 108136260-A0305-02-0134-128
Figure 108136260-A0305-02-0134-128

‧光聚合起始劑5:具有下述結構之化合物。 ‧Photopolymerization initiator 5: a compound with the following structure.

Figure 108136260-A0305-02-0134-129
Figure 108136260-A0305-02-0134-129

<<<界面活性劑>>> <<<Surface active agent>>>

‧界面活性劑2:非離子系界面活性劑(Pionin D 6112W、TAKEMOTO OIL & FAT CO.,LTD製)。 ‧Surfactant 2: Nonionic surfactant (Pionin D 6112W, manufactured by TAKEMOTO OIL & FAT CO., LTD).

<<<環氧樹脂>>> <<<Epoxy resin>>>

‧環氧樹脂2:Epicron N-695(DIC Corporation製)。 ‧Epoxy resin 2: Epicron N-695 (manufactured by DIC Corporation).

<<聚合抑制劑>> <<Polymerization inhibitor>>

‧重合禁止劑1:下述結構的化合物。 ‧Superposition inhibitor 1: A compound with the following structure.

Figure 108136260-A0305-02-0135-130
Figure 108136260-A0305-02-0135-130

<<<溶劑>>> <<<Solvent>>>

‧PGME:丙二醇單甲醚 ‧PGME: propylene glycol monomethyl ether

<<綠色組成物G101~G135>> <<Green composition G101~G135>>

如表13所示,除了分別變更分散液及組成物的成分的種類以外,藉由與綠色組成物G1的情況相同的成分、配合及步驟,獲得了綠色組成物G101~G112、G115~G123、G128~G135。又,如表13所示,除了分別變更分散液的成分的種類以外,藉由與綠色組成物G20的情況相同的成分、配合及步驟獲得了綠色組成物G113、G124、G126。又,如表13所示,除了分別變更分散液的成分的種類以外,藉由與綠色組成物G21的情況相同的成分、配合及步驟獲得了綠色組成物G114、G125、G127。 As shown in Table 13, except for changing the types of components of the dispersion liquid and the composition, green compositions G101 to G112, G115 to G123, and G128~G135. Furthermore, as shown in Table 13, except for changing the types of components of the dispersion liquid, green compositions G113, G124, and G126 were obtained using the same components, mixtures, and steps as in the case of green composition G20. Moreover, as shown in Table 13, except for changing the types of components of the dispersion liquid, green compositions G114, G125, and G127 were obtained by using the same components, blending, and steps as in the case of green composition G21.

Figure 108136260-A0305-02-0136-78
Figure 108136260-A0305-02-0136-78

<<紅色組成物R101、R103~R118>> <<Red composition R101, R103~R118>>

如表14所示,除了分別變更分散液及組成物的成分的種類以外,藉由與紅色組成物R1的情況相同的成分、配合及步驟,獲得了紅色組成物R101、R103~R118。 As shown in Table 14, red compositions R101, R103 to R118 were obtained using the same components, blending, and steps as in the case of red composition R1, except that the types of components of the dispersion liquid and the composition were changed respectively.

<<紅色組成物R102>> <<Red composition R102>>

(顏料分散液R102的製作) (Preparation of Pigment Dispersion R102)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構 之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液R1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid R1.

分散液的原料:

Figure 108136260-A0305-02-0137-133
Raw materials for dispersion:
Figure 108136260-A0305-02-0137-133

(紅色組成物R102的製作) (Preparation of red composition R102)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了紅色組成物R102。 Next, the mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining red composition R102.

組成物的原料:

Figure 108136260-A0305-02-0137-134
Raw materials of the composition:
Figure 108136260-A0305-02-0137-134

<<紅色組成物R119~R126>> <<Red composition R119~R126>>

如表14所示,除了變更分散液及組成物的成分的種類以外,藉由與紅色組成物R102的情況相同的成分、配合及步驟,獲得了紅色組成物R119~R126。 As shown in Table 14, red compositions R119 to R126 were obtained using the same components, blending, and steps as in the case of red composition R102, except for changing the types of components of the dispersion liquid and composition.

Figure 108136260-A0305-02-0138-79
Figure 108136260-A0305-02-0138-79

<<藍色組成物B101~B114>> <<Blue composition B101~B114>>

如表15所示,除了分別變更分散液及組成物的成分的種類以外,藉由與藍色組成物B1的情況相同的成分、配合及步驟,獲得了藍色組成物B101~B114。 As shown in Table 15, blue compositions B101 to B114 were obtained using the same components, blending, and steps as in the case of blue composition B1, except that the types of components of the dispersion liquid and the composition were changed respectively.

Figure 108136260-A0305-02-0139-80
Figure 108136260-A0305-02-0139-80

<<黃色組成物Y101~Y112>> <<Yellow composition Y101~Y112>>

如表16所示,除了分別變更分散液及組成物的成分的種類以外,藉由與黃色組成物Y1的情況相同的成分、配合及步驟,獲得了黃色組成物Y101~Y112。 As shown in Table 16, yellow compositions Y101 to Y112 were obtained using the same components, blending, and steps as in the case of yellow composition Y1, except that the types of components of the dispersion liquid and composition were changed respectively.

Figure 108136260-A0305-02-0139-81
Figure 108136260-A0305-02-0139-81

<<品紅色組成物M101~M110>> <<Magenta composition M101~M110>>

如表17所示,除了分別變更分散液及組成物的成分的種類以外,藉由與品紅色組成物M1的情況相同的成分、配合及步驟,獲得了品紅色組成物M101~M110。 As shown in Table 17, magenta compositions M101 to M110 were obtained using the same components, mixtures, and steps as in the case of magenta composition M1, except that the types of components of the dispersion liquid and composition were changed respectively.

Figure 108136260-A0305-02-0140-82
Figure 108136260-A0305-02-0140-82

<<藍色組成物C101~C116>> <<Blue composition C101~C116>>

如表18所示,除了分別變更分散液及組成物的成分的種類以外,藉由與青色組成物C1的情況相同的成分、配合及步驟,獲得了青色組成物C101~C104、C109~C112。另外,組成物C102、C103、C110、C111中的色材為從青色組成物C1的色材含量將PG7的1/3變更為表中的色材2而得之混合顏料。又,如表18所示,除了分別變更分散液及組成物的成分的種類以外,藉由與青色組成物C4的情況相同的成分、配合及步驟,獲得了青色組成物C105~C108、C103~C116。 As shown in Table 18, cyan compositions C101 to C104 and C109 to C112 were obtained using the same components, mixtures, and steps as in the case of cyan composition C1, except that the types of components of the dispersion liquid and composition were changed respectively. In addition, the color materials in compositions C102, C103, C110, and C111 are mixed pigments obtained by changing 1/3 of the color material content of PG7 in the cyan composition C1 to color material 2 in the table. Furthermore, as shown in Table 18, cyan compositions C105 to C108 and C103 were obtained using the same components, blends and steps as in the case of cyan composition C4, except that the types of components of the dispersion liquid and composition were changed respectively. C116.

Figure 108136260-A0305-02-0140-83
Figure 108136260-A0305-02-0140-83

<<近紅外線截止濾波器用組成物SIR101~SIR106>> <<Compositions for near infrared cut filters SIR101~SIR106>>

如表19所示,除了分別變更分散液及組成物的成分的種類以外,藉由與近紅外線截止濾波器用組成物SIR1的情況相同的成分、配合及手順,獲得了紅外線截止濾波器用組成物SIR101~SIR106。 As shown in Table 19, in addition to changing the types of components of the dispersion liquid and the composition, the composition SIR101 for an infrared cut filter was obtained using the same ingredients, mixing and procedures as those of the composition SIR1 for a near infrared cut filter. ~SIR106.

Figure 108136260-A0305-02-0141-84
Figure 108136260-A0305-02-0141-84

<<近紅外線透過濾波器用組成物IRP101~IRP118>> <<Compositions for near infrared transmission filters IRP101~IRP118>>

如表20所示,除了分別變更分散液及組成物的成分的種類以外,藉由與近紅外線透過濾波器用組成物IRP1的情況相同的成分、配合及手順,獲得了近紅外線透過濾波器用組成物IRP101、IRP104、IRP107、IRP110、IRP113、IRP116。又,如表20所示,除了分別變更分散液及組成物的成分的種類以外,藉由與近紅外線透過濾波器用組成物IRP2的情況相同的成分、配合及手順,獲得了近紅外線透過濾波器用組成物IRP102、IRP105、IRP108、IRP111、IRP114、IRP117。又,如表20所示,除了分別變更分散液及組成物的成分的種類以外,藉由與近紅外線透過濾波器用組成物IRP3的情況相同的成分、配合及手順,獲得了近紅外線透過濾波器用組成物IRP103、IRP106、IRP109、IRP112、IRP115、IRP118。 As shown in Table 20, except for changing the types of components of the dispersion liquid and the composition, a composition for a near-infrared ray transmission filter was obtained using the same components, blending, and procedures as in the case of the composition for a near-infrared ray transmission filter IRP1. IRP101, IRP104, IRP107, IRP110, IRP113, IRP116. Furthermore, as shown in Table 20, in addition to changing the types of components of the dispersion liquid and the composition, a composition for a near-infrared ray transmission filter was obtained using the same components, blending, and procedures as in the case of the composition IRP2 for a near-infrared ray transmission filter. Compositions IRP102, IRP105, IRP108, IRP111, IRP114, IRP117. Furthermore, as shown in Table 20, in addition to changing the types of the components of the dispersion liquid and the composition, a composition for a near-infrared ray transmission filter was obtained using the same components, blending, and procedures as in the case of the composition IRP3 for a near-infrared ray transmission filter. Compositions IRP103, IRP106, IRP109, IRP112, IRP115, IRP118.

Figure 108136260-A0305-02-0142-85
Figure 108136260-A0305-02-0142-85

<<白色組成物W101、102>> <<White composition W101, 102>>

如表21所示,除了分別變更分散液及組成物的成分的種類以外,藉由與白色組成物W1的情況相同的成分、配合及步驟,獲得了白色組成物W101、W102。 As shown in Table 21, white compositions W101 and W102 were obtained by using the same components, blending, and steps as in the case of white composition W1, except that the types of components of the dispersion liquid and the composition were changed respectively.

Figure 108136260-A0305-02-0143-86
Figure 108136260-A0305-02-0143-86

<<綠色組成物G201>> <<Green composition G201>>

(顏料分散液G201的製作) (Preparation of Pigment Dispersion G201)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述表22(a)所示之原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液G201。 A mixture of the raw materials shown in Table 22(a) below was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid G201.

(綠色組成物G201的製作) (Preparation of green composition G201)

接著,對混合下述表22(b)所示之原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G201。 Next, the mixed solution obtained by mixing the raw materials shown in Table 22(b) below was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain green composition G201.

Figure 108136260-A0305-02-0144-87
Figure 108136260-A0305-02-0144-87

<<綠色組成物G202>> <<Green composition G202>>

(顏料分散液G202的製作) (Preparation of Pigment Dispersion G202)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述表23(a)所示之原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液G202。 A mixture of the raw materials shown in Table 23(a) below was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid G202.

(綠色組成物G202的製作) (Preparation of green composition G202)

接著,對混合下述表23(b)所示之原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了綠色組成物G202。 Next, the mixed solution obtained by mixing the raw materials shown in Table 23(b) below was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm to obtain green composition G202.

Figure 108136260-A0305-02-0145-88
Figure 108136260-A0305-02-0145-88

<結構體的製作> <Creation of structure>

<<實施例101~109>> <<Examples 101~109>>

作為用於形成結構類型I的結構體之組成物的組合,對於每個實施例採用表24所示之組合,並實施與實施例1相同的處理而依序形成了第1像素及第2像素。 As a combination of components for forming the structure of structure type I, the combination shown in Table 24 was used for each embodiment, and the same process as in Example 1 was performed to form the first pixel and the second pixel in order. .

<<實施例110~113>> <<Examples 110~113>>

作為用於形成結構類型IIa的結構體之組成物的組合,對於每個實施例採用表24所示之組合,並實施與實施例10相同的處理而依序形成了第1像素、第2像素及第3像素。 As a combination of components for forming the structure type IIa, the combinations shown in Table 24 were used for each embodiment, and the same process as in Example 10 was performed to form the first pixel and the second pixel in order. and the 3rd pixel.

<<實施例114~121>> <<Examples 114~121>>

作為用於形成結構類型III結構體之組成物的組合,對於每個實施例採用表24所示之組合,並實施與實施例14相同的處理而依序形成了第1像素、第2像素、第3像素及第4像素。 As a combination of components for forming the structure type III structure, the combination shown in Table 24 was used for each embodiment, and the same process as in Example 14 was performed to form the first pixel, the second pixel, and the second pixel in order. The 3rd pixel and the 4th pixel.

<<實施例122~125>> <<Examples 122~125>>

作為用於形成結構類型IIb的結構體之組成物的組合,對於每個實施例 採用表24所示之組合,並實施與實施例26相同的處理而依序形成了第1像素、第2像素及第3像素。 As a combination of compositions for forming a structure of type IIb, for each embodiment The combinations shown in Table 24 were used, and the same processing as in Embodiment 26 was performed to form the first pixel, the second pixel, and the third pixel in order.

<<實施例201、202>> <<Examples 201, 202>>

作為用於形成結構類型I的結構體之組成物的組合,對於每個實施例採用表25所示之組合,並實施與實施例1相同的處理而依序形成了第1像素及第2像素。 As the combination of components used to form the structure of structure type I, the combination shown in Table 25 was used for each embodiment, and the same process as in Example 1 was performed to form the first pixel and the second pixel in order. .

<<實施例203、204>> <<Examples 203, 204>>

作為用於形成結構類型IIa的結構體之組成物的組合,對於每個實施例採用表25所示之組合,並實施與實施例10相同的處理而依序形成了第1像素、第2像素及第3像素。 As a combination of components for forming the structure type IIa, the combinations shown in Table 25 were used for each embodiment, and the same process as in Example 10 was performed to form the first pixel and the second pixel in order. and the 3rd pixel.

<<實施例205、206>> <<Examples 205, 206>>

作為用於形成結構類型III結構體之組成物的組合,對於每個實施例採用表25所示之組合,並實施與實施例14相同的處理而依序形成了第1像素、第2像素、第3像素及第4像素。 As a combination of components for forming the structure type III structure, the combination shown in Table 25 was used for each embodiment, and the same process as in Example 14 was performed to sequentially form the first pixel, the second pixel, The 3rd pixel and the 4th pixel.

<<實施例207、208>> <<Examples 207, 208>>

作為用於形成結構類型IIb的結構體之組成物的組合,對於每個實施例採用表25所示之組合,並實施與實施例26相同的處理而依序形成了第1像素、第2像素及第3像素。 As a combination of components for forming the structure type IIb, the combination shown in Table 25 was used for each embodiment, and the same process as in Example 26 was performed to form the first pixel and the second pixel in order. and the 3rd pixel.

Figure 108136260-A0305-02-0147-89
Figure 108136260-A0305-02-0147-89

Figure 108136260-A0305-02-0147-90
Figure 108136260-A0305-02-0147-90

<穩定性的評價> <Evaluation of stability>

針對實施例及比較例的各結構體,在溫度50℃、濕度85%的恆溫恆濕槽中,進行了2000小時的恆溫恆濕試驗。恆溫恆濕試驗後,使用透射性電子顯微鏡以4方倍的倍率觀察上述結構體的剖面,並檢查了像素之間的空隙(void)的產生率。而且,以其空隙的產生率為指標評價了穩定性。評價等級3以上則係可以稱為像素深層部的穩定性優異之等級。 For each structure of the Example and Comparative Example, a constant temperature and humidity test was performed for 2000 hours in a constant temperature and humidity chamber with a temperature of 50°C and a humidity of 85%. After the constant temperature and humidity test, a transmission electron microscope was used to observe the cross-section of the above-mentioned structure at a 4x magnification, and the occurrence rate of voids between pixels was examined. Furthermore, the stability was evaluated based on the void generation rate as an index. An evaluation level of 3 or higher is a level that can be said to have excellent stability in the deep part of the pixel.

評價等級和其內容: Rating rating and its content:

5:空隙的產生率=0 5: The generation rate of voids=0

4:0<空隙的產生率

Figure 108136260-A0305-02-0148-156
0.1 4:0< void generation rate
Figure 108136260-A0305-02-0148-156
0.1

3:0.1<空隙的產生率

Figure 108136260-A0305-02-0148-157
0.2 3: 0.1< void generation rate
Figure 108136260-A0305-02-0148-157
0.2

2:0.2<空隙的產生率

Figure 108136260-A0305-02-0148-158
0.5 2: 0.2< void generation rate
Figure 108136260-A0305-02-0148-158
0.5

1:0.5<空隙的產生率

Figure 108136260-A0305-02-0148-159
1.0 1:0.5< void generation rate
Figure 108136260-A0305-02-0148-159
1.0

針對彼此接觸之像素的組合,藉由以下式算出了空隙的產生率。 For the combination of pixels in contact with each other, the void generation rate was calculated by the following equation.

空隙的產生率=〔觀察之邊界中產生空隙之邊界的數量〕/〔觀察之邊界的數量〕 The generation rate of gaps = [the number of gaps among the observed boundaries]/[the number of observed boundaries]

又,在本實施例中,從結構體中隨機選擇20處的剖面,藉由觀察在每一個剖面上連續排列之10個邊界群中有無空隙來觀察了共計200處的邊界。 Furthermore, in this example, 20 cross-sections were randomly selected from the structure, and a total of 200 boundaries were observed by observing the presence or absence of gaps in 10 consecutively arranged boundary groups on each cross-section.

將結果示於表11、表12、表24及表25。表中,在“穩定性”的項目中,“a”表示第1像素和第2像素的剖面中的評價結果,“b”表示第1像素和第3像素的剖面中的評價結果,“c”表示第2像素和第4像素的剖面中的評價結果,“d”表示第3像素和第4像素的剖面中的評價結果。 The results are shown in Table 11, Table 12, Table 24 and Table 25. In the table, in the item "stability", "a" represents the evaluation result in the cross section of the first pixel and the second pixel, "b" represents the evaluation result in the cross section of the first pixel and the third pixel, and "c" "" represents the evaluation result in the cross section of the second pixel and the fourth pixel, and "d" represents the evaluation result in the cross section of the third pixel and the fourth pixel.

如各表所示,可知,藉由對彼此相鄰之像素使用透明顏料衍生物,可獲得像素深層部的穩定性優異之結構體。尤其,藉由實施例2與比較例23的比較、實施例6與比較例24的比較及實施例12與比較例25的比較,即使僅在相鄰之像素中的一者使用透明顏料衍生物,透明顏料衍生物對穩定性的提高亦沒有太大的幫助。 As shown in each table, it can be seen that by using a transparent pigment derivative for adjacent pixels, a structure excellent in stability in the deep portion of the pixel can be obtained. In particular, through the comparison between Example 2 and Comparative Example 23, the comparison between Example 6 and Comparative Example 24, and the comparison between Example 12 and Comparative Example 25, even if only one of the adjacent pixels uses a transparent pigment derivative , transparent pigment derivatives are not very helpful in improving stability.

又,當顏料類濃度為25質量%時,藉由使用透明顏料衍生物,穩 定性的判定值從2改善至5(實施例23~25與比較例23~25的比較)。另一方面,當顏料類濃度為60質量%時以及顏料類濃度為40質量%時,藉由使用透明顏料衍生物,穩定性的判定值從1改善至5(分別為實施例1~3與比較例1~3的比較及實施例20~22與比較例20~22的比較)。亦即,像素中的顏料類濃度高達約40質量%以上時,有像素深層部不易硬化且經時穩定性容易降低之傾向,因此可以說在該種情況下本發明的有用性大。 Furthermore, when the pigment concentration is 25% by mass, the transparent pigment derivative is used to stabilize the The qualitative judgment value improved from 2 to 5 (Comparison of Examples 23 to 25 and Comparative Examples 23 to 25). On the other hand, when the pigment concentration is 60 mass% and the pigment concentration is 40 mass%, by using the transparent pigment derivative, the stability judgment value is improved from 1 to 5 (Examples 1 to 3 and 5, respectively). Comparison of Comparative Examples 1 to 3 and Comparison of Examples 20 to 22 and Comparative Examples 20 to 22). That is, when the pigment concentration in the pixel is as high as about 40% by mass or more, the deep portion of the pixel tends to be difficult to harden and the stability over time tends to decrease. Therefore, it can be said that the usefulness of the present invention is great in this case.

又,在上述實施例及比較例中,即使代替綠色組成物G1使用綠色組成物G2~G3、G6~G24而形成綠色像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替紅色組成物R1使用紅色組成物R2~R3、R6~R19而形成紅色像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替藍色組成物B1使用藍色組成物B2、B5~B18而形成藍色像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替黃色組成物Y1使用黃色組成物Y2而形成黃色像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替品紅色組成物M1使用品紅色組成物M2而形成品紅色像素,亦可獲得相同的結果。在上述實施例中,即使代替青色組成物C1使用青色組成物C2~C5而形成青色像素,亦可獲得相同的結果。在上述比較例中,即使代替青色組成物C1使用青色組成物C2~C5而形成青色像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替近紅外線截止濾波器用組成物SIR1使用近紅外線截止濾波器用組成物SIR2~SIR3而形成近紅外線截止濾波器用像素,亦可獲得相同的結果。在上述實施例及比較例中,即使代替近紅外線透過濾波器用組成物IRP1使用近紅外線透過濾波器用組成物IRP2~IRP3而形成近紅外線透過濾波器用像素,亦可獲得 相同的結果。即使使用其他比較例的組成物而形成像素,亦可獲得相同的結界。 Moreover, in the above-mentioned Examples and Comparative Examples, even if the green compositions G2 to G3 and G6 to G24 are used instead of the green composition G1 to form green pixels, the same results can be obtained. In the above embodiments and comparative examples, the same results can be obtained even if the red compositions R2 to R3 and R6 to R19 are used instead of the red composition R1 to form red pixels. In the above Examples and Comparative Examples, even if blue compositions B2, B5 to B18 are used instead of blue composition B1 to form blue pixels, the same results can be obtained. In the above-described embodiments and comparative examples, the same results can be obtained even if the yellow composition Y2 is used instead of the yellow composition Y1 to form yellow pixels. In the above embodiments and comparative examples, even if the magenta composition M2 is used instead of the magenta composition M1 to form a magenta pixel, the same result can be obtained. In the above embodiment, even if cyan compositions C2 to C5 are used instead of cyan composition C1 to form cyan pixels, the same result can be obtained. In the above comparative example, the same result can be obtained even if the cyan compositions C2 to C5 are used instead of the cyan composition C1 to form cyan pixels. In the above Examples and Comparative Examples, the same results can be obtained even if the near infrared cut filter compositions SIR2 to SIR3 are used instead of the near infrared cut filter composition SIR1 to form near infrared cut filter pixels. In the above-mentioned Examples and Comparative Examples, even if the near-infrared ray-transmitting filter compositions IRP2 to IRP3 are used instead of the near-infrared ray-transmitting filter composition IRP1 to form pixels for a near-infrared ray-transmitting filter, it is possible to obtain Same result. Even if pixels are formed using the compositions of other comparative examples, the same boundary can be obtained.

此外,即使在使用除實施例中使用之肟化合物以外的肟化合物作為組成物中的起始劑之情況、併用2種肟化合物之情況、使用肟化合物及除肟化合物以外的起始劑之情況及併用2種除肟化合物以外的起始劑之情況下,亦與本發明的實施例同樣地獲得了穩定性優異的結構體。又,即使分別併用2種樹脂、聚合性單體及溶劑等組成物中的固體成分,亦與本發明的實施例同樣地獲得穩定性優異的結構體。 In addition, even when an oxime compound other than the oxime compound used in the examples is used as a initiator in the composition, when two kinds of oxime compounds are used in combination, and when an oxime compound and a initiator other than the oxime compound are used. Even when two kinds of initiators other than the oxime compound were used in combination, a structure excellent in stability was obtained as in the Examples of the present invention. In addition, even if solid components in the composition such as two types of resins, polymerizable monomers, and solvents are used together, a structure excellent in stability is obtained as in the Examples of the present invention.

按照公知的方法將實施例的各結構體組裝於固體攝像元件並評價了畫質之結果可獲得良好的性能。 Each structure of the Example was assembled on a solid-state imaging device according to a known method and the image quality was evaluated. As a result, good performance was obtained.

<結構體的應用> <Application of structure>

此外,製作3個與上述實施例1的結構體相同的結構體,在各結構體中的由所有像素構成之濾光器上使用IR透鏡用下述透鏡材料組成物L1~L3,藉由下述方法分別形成微透鏡,藉此製作了附透鏡之結構體。而且,進行了與上述相同的穩定性評價之結果,各結構體與實施例1同樣穩定。針對上述實施例10的結構體,亦藉由相同的步驟製作3個附透鏡之結構體,並進行了相同的穩定性評價。該附透鏡之結構體與實施例10同樣穩定。針對上述實施例18的結構體,亦藉由相同的步驟製作3個附透鏡之結構體,並進行了相同的穩定性評價。該附透鏡之結構體與實施例18同樣穩定。針對上述實施例26的結構體,亦藉由相同的步驟製作3個附透鏡之結構體,並進行了相同的穩定性評價。該附透鏡之結構體與實施例26同樣穩定。 In addition, three structures similar to those of the above-described Example 1 were produced, and the following lens material compositions L1 to L3 for IR lenses were used on the optical filter composed of all pixels in each structure, as follows: The microlenses are respectively formed by the above method, thereby producing a structure with lenses. Furthermore, the same stability evaluation as above was performed. As a result, each structure was stable as in Example 1. Regarding the structure of the above-mentioned Example 10, three structures with lenses were also produced through the same steps, and the same stability evaluation was performed. This lens-attached structure is as stable as Example 10. Regarding the structure of the above-mentioned Example 18, three structures with lenses were also produced through the same steps, and the same stability evaluation was performed. This lens-attached structure is as stable as Example 18. Regarding the structure of the above Example 26, three structures with lenses were also produced through the same steps, and the same stability evaluation was performed. This lens-attached structure is as stable as Example 26.

<<透鏡材料組成物L1>> <<Lens material composition L1>>

(顏料分散液L1的製作) (Preparation of Pigment Dispersion L1)

使用珠磨機(直徑0.1mm的二氧化鋯珠)對混合下述原料而成之混合液進行3小時混合及分散,從而製備了顏料分散液。然後,使用附減壓機構之高壓分散機NANO-3000-10(Nippon BEE Co.,Ltd.製),在壓力2000kg/cm3及流量500g/min的條件下進行了分散處理。將該分散處理全部重複進行至10次,從而獲得了顏料分散液L1。 A mixture of the following raw materials was mixed and dispersed using a bead mill (zirconia beads with a diameter of 0.1 mm) for 3 hours to prepare a pigment dispersion. Then, a high-pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion processing under the conditions of a pressure of 2000 kg/cm 3 and a flow rate of 500 g/min. This dispersion treatment was repeated 10 times to obtain a pigment dispersion liquid L1.

分散液的原料:

Figure 108136260-A0305-02-0151-131
Raw materials for dispersion:
Figure 108136260-A0305-02-0151-131

(透鏡材料組成物L1的製作) (Preparation of lens material composition L1)

接著,對混合下述原料而成之混合液進行攪拌之後,使用孔徑0.45μm的尼龍製過濾器(Nihon Pall Ltd.製)進行過濾,獲得了透鏡材料組成物L1。 Next, a mixed solution obtained by mixing the following raw materials was stirred and then filtered using a nylon filter (manufactured by Nihon Pall Ltd.) with a pore size of 0.45 μm, thereby obtaining a lens material composition L1.

組成物的原料:

Figure 108136260-A0305-02-0151-132
Raw materials of the composition:
Figure 108136260-A0305-02-0151-132

<<透鏡材料組成物L2、L3>> <<Lens material composition L2, L3>>

如表26所示,除了分別變更分散液及組成物的成分的種類以外,藉由與透鏡材料組成物L1的情況相同的成分、配合及步驟,獲得了透鏡材料組成物L2、L3。 As shown in Table 26, except for changing the types of components of the dispersion liquid and the composition, lens material compositions L2 and L3 were obtained using the same components, mixtures, and steps as in the case of lens material composition L1.

在該表中,由於在所有組成物中為共同的成分,因此省略作為添加劑的Adeka Stab AO-80及界面活性劑以及作為溶劑之PGMEA的記載。關於成分,按照表中的“成分1”、“成分2”及“成分3”的每一欄變更了相對應之成分彼此。又,Ogsol PG-100及Ogsol CG-500(Osaka Gas Chemicals Co.,Ltd.製)為具有茀骨架之環氧樹脂,CR-1030(Osaka Gas Chemicals Co.,Ltd.製)為酸改質茀型聚酯樹脂。 In this table, since they are common components in all compositions, descriptions of Adeka Stab AO-80 and surfactant as additives and PGMEA as solvent are omitted. Regarding the ingredients, the corresponding ingredients were changed for each column of "ingredient 1", "ingredient 2" and "ingredient 3" in the table. In addition, Ogsol PG-100 and Ogsol CG-500 (manufactured by Osaka Gas Chemicals Co., Ltd.) are epoxy resins having a fluorine skeleton, and CR-1030 (manufactured by Osaka Gas Chemicals Co., Ltd.) is an acid-modified fluorine. type polyester resin.

Figure 108136260-A0305-02-0152-91
Figure 108136260-A0305-02-0152-91

透鏡材料組成物L1~L3每一個相對於波長550nm的光的折射率、相對於波長400~700nm的光的最小透過率(膜厚0.35μm)及相對於波長820nm的光的透過率(膜厚0.35μm)為如表27所示。用於測量折射率之膜(膜厚0.35μm)藉由如下方法來製作:藉由旋塗法將各透鏡材料組成物塗佈於矽晶圓上,使用加熱板在100℃下將晶圓加熱2分鐘,進而使用加熱板在220℃下將晶圓加熱5分鐘。另一方面,用於分光測量的膜(膜厚0.35μm)藉由如下方法來製作:藉由旋塗法將各透鏡材料組成物塗佈於玻璃晶圓上,使用加熱板在100℃下將晶圓加熱2分鐘,進而使用加熱板在220℃下將晶圓加熱5分鐘。 The refractive index of each of the lens material components L1 to L3 with respect to light with a wavelength of 550 nm, the minimum transmittance with respect to light with a wavelength of 400 to 700 nm (film thickness 0.35 μm), and the transmittance with respect to light with a wavelength of 820 nm (film thickness 0.35μm) as shown in Table 27. The film (film thickness 0.35 μm) used to measure the refractive index was produced by applying each lens material composition on a silicon wafer by spin coating, and heating the wafer at 100°C using a heating plate. 2 minutes, and then use a heating plate to heat the wafer at 220°C for 5 minutes. On the other hand, the film (film thickness 0.35 μm) used for spectroscopic measurement was produced by applying each lens material composition on a glass wafer by spin coating, and using a hot plate at 100° C. The wafer was heated for 2 minutes, and then the wafer was heated at 220° C. for 5 minutes using a heating plate.

Figure 108136260-A0305-02-0153-92
Figure 108136260-A0305-02-0153-92

<<微透鏡的形成方法>> <<Formation method of microlens>>

在矽晶圓上製作濾光器之後,利用旋塗法塗佈各透鏡材料組成物,並使用加熱板在100℃下將此加熱2分鐘,進而使用加熱板在220℃下加熱5分鐘,從而形成了膜厚1.2μm的透鏡材料組成物層。然後,使用基於作為公知技術之回蝕之轉印方法,並藉由對透鏡材料組成物層進行加工以使從透鏡頂部到透鏡底部的高度成為400nm來形成了微透鏡。 After fabricating the optical filter on the silicon wafer, each lens material composition is coated by spin coating, and heated at 100°C for 2 minutes using a hot plate, and then heated at 220°C for 5 minutes using a hot plate. A lens material composition layer with a film thickness of 1.2 μm was formed. Then, a microlens was formed by processing the lens material composition layer so that the height from the top of the lens to the bottom of the lens became 400 nm using a transfer method based on an etchback which is a known technology.

1:支撐體 1:Support

2:間隔壁 2: partition wall

P1~P4:像素 P1~P4: pixels

S3:結構體 S3: Structure

SIR:近紅外線截止濾波器 SIR: Near infrared cut filter

Claims (11)

一種結構體,其具有以彼此接觸之狀態二維配置之2個像素,該2個像素各自含有顏料、400~700nm的波長區域中的莫耳吸光係數的最大值為3000L‧mol-1‧cm-1以下之顏料衍生物及樹脂,該顏料衍生物中的至少一種為由下述式(1)表示之化合物,A1-L1-Z1......(1)式(1)中,A1表示包含芳香族環之基團,L1表示單鍵或2價的連結基,Z1表示由式(Z1)表示之基團,
Figure 108136260-A0305-02-0154-93
式(Z1)中,*表示鍵結鍵,Yz1表示-N(Ry1)-或-O-,Ry1表示氫原子、烷基、烯基、炔基或芳基,Lz1表示2價的連結基,Rz1及Rz2分別獨立地表示氫原子、烷基、烯基、炔基或芳基,Rz1與Rz2可經由2價的基團鍵結而形成環,m表示1~5的整數。
A structure having two pixels two-dimensionally arranged in contact with each other. Each of the two pixels contains a pigment and the maximum value of the Mohr absorption coefficient in the wavelength range of 400 to 700 nm is 3000L‧mol -1 ‧cm -1 or less pigment derivatives and resins, at least one of the pigment derivatives is a compound represented by the following formula (1), A 1 -L 1 -Z 1 ...(1) Formula (1) ), A 1 represents a group containing an aromatic ring, L 1 represents a single bond or a divalent linking group, and Z 1 represents a group represented by formula (Z1),
Figure 108136260-A0305-02-0154-93
In the formula (Z1), * represents a bond, Yz 1 represents -N(Ry 1 )- or -O-, Ry 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and Lz 1 represents a divalent group. The connecting group, Rz 1 and Rz 2 independently represent a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, Rz 1 and Rz 2 can be bonded through a divalent group to form a ring, m represents 1~ an integer of 5.
如請求項1所述之結構體,其中該2個像素中的至少一個像素的寬度為0.3~5.0μm。 The structure as described in claim 1, wherein the width of at least one of the two pixels is 0.3~5.0 μm. 如請求項1或2所述之結構體,其中該2個像素中的至少一個像素的厚度為0.1~2.0μm。 The structure as described in claim 1 or 2, wherein the thickness of at least one of the two pixels is 0.1~2.0 μm. 如請求項1或2所述之結構體,其中該2個像素中的至少一個像素中所含有之該顏料和該顏料衍生物的合計含量為25~65質量%。 The structure according to claim 1 or 2, wherein the total content of the pigment and the pigment derivative contained in at least one of the two pixels is 25 to 65 mass%. 如請求項1或2所述之結構體,其中 該2個像素中的至少一個像素中所含有之該顏料衍生物的含量與相同像素中所含有之該顏料的含量的質量比率為3:97~20:80。 The structure as described in request item 1 or 2, where The mass ratio of the content of the pigment derivative contained in at least one of the two pixels to the content of the pigment contained in the same pixel is 3:97~20:80. 如請求項1或2所述之結構體,其中該式(1)的A1為由下述式(A1)表示之基團,
Figure 108136260-A0305-02-0155-94
式中,*表示鍵結鍵,Ya1及Ya2分別獨立地表示-N(Ra1)-或-O-,Ra1表示氫原子、烷基、烯基、炔基或芳基,B1及B2分別獨立地表示氫原子或取代基。
The structure as claimed in claim 1 or 2, wherein A 1 of the formula (1) is a group represented by the following formula (A1),
Figure 108136260-A0305-02-0155-94
In the formula, * represents a bond, Ya 1 and Ya 2 independently represent -N(Ra 1 )- or -O-, Ra 1 represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group or an aryl group, and B 1 and B 2 each independently represent a hydrogen atom or a substituent.
如請求項1或2所述之結構體,其中該2個像素為包含彼此不同之顏料之像素,該2個像素各自為選自紅色像素、綠色像素、藍色像素、黃色像素、青色像素、品紅色像素、黑色像素、白色像素、近紅外線截止濾波器用像素及近紅外線透過濾波器用像素中的1個像素。 The structure of claim 1 or 2, wherein the two pixels are pixels containing different pigments, and the two pixels are each selected from the group consisting of red pixels, green pixels, blue pixels, yellow pixels, cyan pixels, One pixel among a magenta pixel, a black pixel, a white pixel, a pixel for a near-infrared cut filter, and a pixel for a near-infrared transmission filter. 如請求項1或2所述之結構體,其中在該2個像素之間還具有比該2個像素的厚度更低的間隔壁。 The structure according to claim 1 or 2, wherein there is a partition wall between the two pixels that is lower than the thickness of the two pixels. 如請求項1或2所述之結構體,其中該2個像素的各自的寬度為0.5μm以上且1.7μm以下,厚度為0.2μm以上且0.8μm以下, 該2個像素中的至少一個像素中所含有之該顏料與該顏料衍生物的合計含量為40~65質量%,且該顏料衍生物的含量與相同像素中所含有之該顏料的含量的質量比率為3:97~20:80。 The structure according to claim 1 or 2, wherein the width of each of the two pixels is 0.5 μm or more and 1.7 μm or less, and the thickness is 0.2 μm or more and 0.8 μm or less, The total content of the pigment and the pigment derivative contained in at least one of the two pixels is 40 to 65% by mass, and the content of the pigment derivative is equal to the mass of the pigment contained in the same pixel. The ratio is 3:97~20:80. 一種固體攝像元件,其在半導體基板上具有請求項1至9中任一項所述之結構體。 A solid-state imaging element having the structure according to any one of claims 1 to 9 on a semiconductor substrate. 一種圖像顯示裝置,其在玻璃基板上具有請求項1至9中任一項所述之結構體。 An image display device having the structure described in any one of claims 1 to 9 on a glass substrate.
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