TWI730366B - Multi-spectrum electromagnetic wave detection device - Google Patents

Abstract

A multi-spectrum electromagnetic wave detection device is suitable for detecting several channels of light to be measured with different frequency spectra from an object to be measured, and includes a light receiving unit and several photodiode array detection units. The light receiving unit includes a plurality of light guide plates respectively used for transmitting the light to be measured, and each light guide plate includes a light emitting surface on the side. The photodiode array detection units are respectively located on the light-emitting surfaces of the light guide plates and are used to detect light signals coming through the light-emitting surfaces. Each photodiode array detection unit includes a copper indium selenium ( CIS) is an optical diode. With the CIS-based photodiode, the electromagnetic wave detection device's spectral response to near-infrared light is improved. The light guide function of the light guide plates of the light receiving unit can distinguish and collect multi-spectrum light signals to realize multi-spectrum light wave detection.

Description

Multi-spectrum electromagnetic wave detection device

The present invention relates to an electromagnetic wave detection device, in particular to a flat-plate type multi-spectrum electromagnetic wave detection device.

Sensing in the near-infrared light band can be applied to technologies such as organic molecular detection and biomedical detection. In the application of organic molecular detection, it is possible to detect the ingredients and content in the diet through the detection of near-infrared light band; in the biomedical detection, it is used in the detection of blood oxygen and the positioning of fluorescent cursor targets.

In the application of biomedical testing, the panel-type electromagnetic wave detection device is helpful for the full-view image reconstruction of an object under test. Take 4 patents of Taiwan Patent Certificate No. I415283, I496277, I500926, and I570425 as examples. These patents record X-ray flat panel detectors, which are based on thin film transistors (TFT) driving and scanning amorphous silicon PIN photodiode arrays. Realize planar X-ray sensing. Since the spectral response of amorphous silicon is only in the visible light band, a wavelength conversion film (such as cesium iodide film) must be placed on the light-receiving surface of the PIN photodiode array, which can convert the X-rays that have passed through the object to the visible light band. Therefore, it is realized that the X-ray image is incident on the PIN photodiode array with visible light signals, and driven and scanned by the TFT, combined with an external digital image processing circuit, to reconstruct a two-dimensional overall view of the X-ray image of the object under test. In the past ten years, this type of X-ray flat panel detection device quickly replaced the conventional X-ray film shooting, and then became a popular medical detection equipment.

However, compared to the crystalline silicon PN photodiode structure, the built-in electric field of the amorphous silicon PIN photodiode is very weak, and the amorphous silicon film contains too many dangling bonds, which makes non-crystalline silicon The photoelectric conversion efficiency of the crystalline silicon PIN photodiode is difficult to exceed 8%, and the efficiency degradation will occur after multiple exposures to stabilize (Staebler-Wronski Effect); also because of the low of the amorphous silicon PIN photodiode Photoelectric conversion efficiency. On the light-receiving surface of this type of flat electromagnetic wave detection device, it is not suitable to configure filters or wavelength conversion films that affect the amount of light transmission. Therefore, the application range of amorphous silicon PIN photodiodes is limited.

Among the application fields of biomedical testing, the advancement of carbon nanomaterials and quantum dots has given the opportunity to choose a variety of fluorescent reagents for the target detection of cancer cells. Due to the molecular composition of water and blood in the human body, it strongly absorbs visible light. Therefore, the luminescence band of the fluorescent reagent must be selected in the near-infrared light band to avoid the occurrence of tumor positioning when using fluorescent cursor targets. Misdiagnosis of misjudgment because the fluorescent signal is completely absorbed. In addition, doubts about whether carbon nanomaterials and quantum dots are toxic to humans have also hindered the development of fluorescent reagents in human tumor detection. Therefore, it is a very important issue to develop an electromagnetic wave detection device that can detect near-infrared light bands without exciting fluorescent reagents in vivo, so as to accurately reconstruct the full picture and three-dimensional information of near-infrared light images.

On the other hand, Hyperspectral image sensing technology has been widely used in aerial remote sensing of ground materials, such as identifying the composition of soil, vegetation, air pollution, and rivers. Recently, it has also been widely used in the maturity and maturity of crops or fruits and vegetables. Judgment of corruption and so on. The principle of hyperspectral sensing is mainly to illuminate the object under test with a multi-band and nearly continuous spectrum light source with extremely narrow wavelength intervals, and to record the object under test with a two-dimensional dot-matrix light detection device and an optical lens The two-dimensional spatial image signal. Since among the target objects to be measured, different constituent materials will have different optical responses to the continuous light sources with different operating wavelengths, such as reflection, absorption, scattering, refraction, etc., so they correspond to the space of different operating wavelengths. The image has spectral image signals with different light intensities. Proper algorithm is performed on the spatial spectra obtained from different operating wavelengths, and the target object to be measured can be identified and analyzed.

Recent short-range applications derived from hyperspectral technology, such as the judgment of the maturity of vegetables and fruits, and the recognition of the blood flow on the surface of human skin, have also been classified as applications for multi-spectral sensing, which do not require the number of bands such as Hyperspectral telemetry requires tens to hundreds of channels, and the imaging distance is less than one meter. How to use a relatively small optical system to achieve a relatively high two-dimensional spatial resolution, so that the multi-spectrum technology can be popularized in the wide application of short-range or hand-held sensing as described, has become a major technical improvement issue.

Therefore, for the multi-spectrum electromagnetic wave detection device with a wavelength range of less than 2.5 μm (including the near-infrared light band), at least the following points must be improved or worthy of study: (1) Improve the near-infrared light spectral response of the photodiode array; (2) How to improve the device structure to distinguish and collect multi-spectral signals, in order to achieve large-area multi-spectrum electromagnetic wave detection; (3) Improve the photoelectric conversion efficiency of the photodiode array, so that even if additional components such as wave The long modulation unit or the phase modulation unit can still maintain the high sensitivity required by the detection function, thereby achieving three-dimensional information or high-resolution image reconstruction; (4) In applications such as biomedical testing, it is exempted Use of fluorescent agent.

Therefore, the purpose of the present invention is to provide a multi-spectrum electromagnetic wave detection device that can overcome at least one of the disadvantages of the prior art.

Therefore, the multi-spectrum electromagnetic wave detection device of the present invention is suitable for detecting light to be measured with different frequency spectra from an object to be measured, and includes a light receiving unit and a plurality of photodiode array detection units.

The light receiving unit includes a plurality of light guide plates stacked one above the other. Each light guide plate includes an upward light receiving surface, a downward facing back surface, and a light emitting surface connected between the light receiving surface and the back surface. The light guide plates The light to be measured is respectively used to transmit the light to be measured from the object to be measured, and the light to be measured enters the light guide plates from the light-receiving surfaces of the light guide plates, and then the light exits from the light guide plates. Face shot.

The light-diode array detection units are located on the light-emitting surfaces of the light guide plates, and are respectively arranged up and down corresponding to the light-guiding plates, and the light-diode array detection units are used for detecting light-emitting surfaces through the light-emitting surfaces. Each photodiode array detection unit includes a substrate, and at least one sensing pixel formed on the substrate, and the at least one sensing pixel includes a photodiode for detecting the optical signal, The photodiode is a copper-indium-selenium-based photodiode, and includes a positive electrode, an absorption layer made of p-type semiconductor, a buffer layer made of n-type semiconductor, and a Negative electrode, the material of the absorption layer is CuIn _x Ga _(1-x) Se _y S _(1-y) , where x is any real number from 0 to 1, and y is any real number from 0 to 1.

The effect of the present invention is that the CIS-based optical diode is used to improve the spectral response of the electromagnetic wave detection device to near-infrared light. The light guide function of the light guide plates of the light receiving unit can distinguish and collect multi-spectrum light signals to realize multi-spectrum light wave detection. It is also precisely because the present invention is a multi-spectrum light wave detection, so it is applied to biomedical detection, which can avoid the use of fluorescent agents. Also because the photodiode array detection unit has good photoelectric conversion efficiency, even if additional wavelength modulation units and phase modulation units are arranged on the light receiving unit, the high sensitivity required by the detection function can still be maintained, thereby achieving Three-dimensional information or high-resolution image reconstruction.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

Referring to Figures 1 to 4, a first embodiment of the multi-spectrum electromagnetic wave detection device of the present invention is suitable for detecting several channels of light to be measured with different spectrums from an object 9 to be measured (that is, light to be measured with several different channels) (The light to be measured is indicated by arrow A in the figure), and includes a light receiving unit 1, a plurality of photodiode array detection units 2, and a plurality of light source units 3.

The light receiving unit 1 includes a plurality of light guide plates 11 stacked one above the other. Each light guide plate 11 includes a light receiving surface 111 facing upwards, a back surface 112 facing downwards, and a light guide plate 11 connected between the light receiving surface 111 and the back surface 112. A light-emitting surface 113 surrounded on all sides. The light guide plates 11 have a light guide function, and are respectively used to guide the light to be measured with different frequency spectra reflected from the object 9 to be measured, and the light to be measured is respectively provided by the light-receiving surfaces 111 of the light guide plates 11 It enters into the light guide plates 11, and then emits from the light exit surfaces 113.

The light receiving unit 1 can be divided into a light receiving part 12 in the horizontal direction, and a light guiding part 13 connected around the light receiving part 12 and located between the light receiving part 12 and the photodiode array detection units 2 . The light receiving portion 12 and the light guiding portion 13 are formed by the light guiding plates 11 together. After the waiting light metering enters the light guide plate 11 from the light receiving surfaces 111 corresponding to the light receiving portion 12 area, and enters the light guide 13 from the light receiving portion 12, the light guide 13 After multiple reflections between the light-receiving surface 111 and the light-emitting surfaces 113, the light-emitting surfaces 113 are then directed toward the light-diode array detection units 2 through the light-emitting surfaces 113.

For example, in the first embodiment, there are M channels of light to be measured, M≧2 and M is an integer. The light to be measured is incident on the light receiving unit 1 at different time points, and the number of light guide plates 11 corresponds to the light to be measured. The number is also M, and the m-th light guide plate 11 is used to guide the light to be measured in the m-th channel, and the m is a positive integer from 1 to M. In the first embodiment, taking M=3 as an example, the light guide plates 11 are the first, second, and third light guide plates 11 from top to bottom, and are used to conduct the first and third light guide plates 11 respectively. The light to be measured in the two and the third channels allows the light to be measured in the m-th channel to be emitted to the corresponding photodiode array detection unit 2 through the light-emitting surface 113 of the m-th light guide plate 11. Wherein, the light to be measured in the first channel passes through the light receiving surface 111 of the first light guide plate 11, and then propagates in the first light guide plate 11, and the light to be measured in the second channel passes through the light receiving surface 111 of the first light guide plate 11 After passing through the light receiving surface 111 of the second light guide plate 11, the light to be measured in the third channel passes through the light receiving surface 111 of the three light guide plate 11, and then passes through the light receiving surface 111 of the third light guide plate 11. The light guide plate 11 propagates. If the number of light to be measured and the number of light guide plates 11 is more, the same goes for.

Each light guide plate 11 of the light receiving unit 1 can be made of polyethylene terephthalate (PET), polystyrene (PS), polycarbonate (PC), or polyethylene terephthalate. Poly(methyl methacrylate) (PMMA) and other resins or plastic materials.

，在此條件下，只要是入射角大於臨界角

的待測光訊號，將在各層導光板11對應於該受光部12的區域內部以全反射方式傳輸抵達該導光部13，並經由該等出光面113進入該等光二極體陣列偵測單元2，而且如前述，第m個導光板11用於傳導第m個頻道的待測光。其中，對於最上方的該第一個導光板11而言，其所對應之n_a (λ_m )為該受光面111上方之介質折射率，例如：本發明裝置所在的空氣折射率。Furthermore, an adhesive layer (not shown) is provided between any two adjacent light guide plates 11, and the light guide plates 11 are adhered and fixed through the adhesive layer. Each adhesive layer is, for example, optically clear adhesion (OCA). The refractive index of the adhesive layer is smaller than the refractive index of the light guide plate 11, the refractive index of the adhesive layer is represented by n _a ( λ _m ), and the refractive index of the light guide plate 11 is represented by n _g ( λ _m ), where λ _m is the mth The wavelength of the light to be measured for each channel. When the condition of n _a ( λ _m )> n _g ( λ _m ) is satisfied, and the thickness t _{m of} each layer of light guide plate 11 meets the diameter condition similar to that of a single-mode fiber:

, Under this condition, as long as the incident angle is greater than the critical angle

The light signal to be measured will be transmitted to the light guide portion 13 in the manner of total reflection inside the area of each layer of the light guide plate 11 corresponding to the light receiving portion 12, and enter the light diode array detection unit 2 through the light exit surfaces 113 , And as mentioned above, the m-th light guide plate 11 is used to guide the light to be measured in the m-th channel. Wherein, for the first guide plate 11 in terms of the top, it corresponds to the n _a (λ _m) above the index of refraction for the medium receiving surface 111, for example: refractive index of air present invention device is located.

The photodiode array detection units 2 are located on the light-emitting surfaces 113 of the light guide plates 11, and are respectively arranged up and down corresponding to the light guide plates 11. The light-diode array detection units 2 are used for detecting light signals coming through the light-emitting surfaces 113. Each photodiode array detection unit 2 includes a substrate 21 and a plurality of sensing pixels 22 formed on the substrate 21 and arranged in an array. Each sensing pixel 22 includes a thin film transistor 4 (TFT) for scanning drive and data transmission, a photodiode 5 connected to the thin film transistor 4 and used for detecting optical signals, and a photodiode 5 with the photodiode 5 Parallel storage capacitor 6.

Wherein, the thin film transistor 4 can be a field effect transistor (FET), for example, a top-gate coplanar TFT structure, and includes a gate metal electrode 41 and a gate metal electrode 41 on the substrate 21 The first insulating layer 42 above and extending below the storage capacitor 6, an essential semiconductor channel layer 43 on the first insulating layer 42, a drain metal electrode 44 and a drain metal electrode 44 on both sides of the essential semiconductor channel layer 43 A source metal electrode 45, a drain contact interface 46 between the drain metal electrode 44 and the essential semiconductor channel layer 43 and heavily doped to form an ohmic contact, and a drain contact interface 46 between the source metal electrode 45 and the essential semiconductor channel The source contact interface 47 between the layers 43 and heavily doped to form an ohmic contact, and a second insulating layer 48 located above the drain metal electrode 44 and the source metal electrode 45. The TFT structure of the first embodiment is only an example, because there are other types of TFTs that can also be applied, so the scope of implementation of the present invention cannot be limited by this.

It should be noted that, in order to drive and scan the photodiode 5, the TFT can also be a poly-silicon thin film transistor (poly-silicon TFT), an amorphous silicon thin film transistor (a-Si TFT), or a metal oxide. Thin film transistors. In addition, a complementary metal oxide semiconductor (CMOS) can also be used as the driving circuit element, instead of using TFT as a limitation.

In order to improve the sensitivity of the multi-spectrum electromagnetic wave detection device of the present invention and improve the signal-to-noise ratio (SNR) of the device, the photodiode 5 is a copper indium selenide (CIS) photodiode 5 , And adjacent to and away from the substrate 21, including a positive electrode 51, an absorber layer 52 made of p-type semiconductor, a buffer layer 53 made of n-type semiconductor, and a connecting electrode 50 through the upper and The source metal electrode 45 is connected to the negative electrode 54 in series, and an incident window layer 55.

The positive electrode 51 of the photodiode 5 may be metallic molybdenum (Mo), or a single-layer or multi-layer structure mainly composed of molybdenum alloy. The photodiode 5 is a copper indium selenium (CIS) photodiode 5. The copper indium selenium (CIS) system mainly refers to the material of the absorption layer 52, which can be formed of copper, indium, gallium, selenium, and sulfur The ternary, quaternary, or five-member compound film, for example, the absorption layer 52 may include copper indium selenium, or copper indium gallium selenium sulfur, or copper indium gallium selenium, or copper gallium selenium, etc., and the thickness of the film is about 1.5 μm To 2μm. The material of the absorption layer 52 is represented by a chemical formula: CuIn _x Ga _(1-x) Se _y S _(1-y) , where x is any real number from 0 to 1, and y is any real number from 0 to 1. The buffer layer 53 is a cadmium sulfide (CdS) or zinc sulfide (ZnS) film, with a thickness of about 0.05 μm. The negative electrode 54 is made of a transparent conductive material, such as indium tin oxide (ITO), or aluminum-doped zinc oxide (ZnO:Al), and an undoped zinc oxide (i-ZnO) layer is laminated thereon. The incident window layer 55 is a transparent insulating layer, and its material can be silicon _{oxide (SiO x} ) or silicon nitride (SiN _x ).

The storage capacitor 6 is located between the substrate 21 and the photodiode 5, and has a first electrode 61 and a second electrode 62 spaced up and down, and a space between the first electrode 61 and the second electrode 62 The third insulating layer 63. The first electrode 61 is the positive electrode 51 of the photodiode 5, that is, the first electrode 61 of the storage capacitor 6 and the positive electrode 51 of the photodiode 5 are shared and externally connected with an operating bias. The second electrode 62, the source metal electrode 45, and the negative electrode 54 are connected together by the connecting electrode 50, and serve as a charge input terminal and a storage terminal of the photocurrent excited by the light signal.

The light source units 3 are respectively located around the light receiving unit 1, and each light source unit 3 is a multi-spectrum light source for emitting detection light of several different spectra (arrow B in Fig. 3) to illuminate the object to be tested 9. After receiving the detection light, the object to be measured 9 forms the light to be measured with a different frequency spectrum, and the light to be measured is then directed toward the light receiving unit 1. Each light source unit 3 emits the detection light of a different frequency spectrum at different time points, which will be described in detail below. The light source units 3 may be built-in in the present invention or may be externally connected, so the present invention is not necessarily limited to the light source units 3. In addition, only one light source unit 3 may be provided.

When the present invention is used, the light guide plates 11 follow the direction from top to bottom, and the spectrum of the light to be measured transmitted from low to high. The light source unit 3 can emit multiple detection lights in a sequence from low frequency to high frequency, and the angle of the detection light directed to the object 9 is not parallel to the normal angle of the light receiving surface 111 of the light receiving unit 1. The detailed description is as follows. First, the light source unit 3 emits a first detection light (for example, red light) toward the test object 9, and the test object 9 reflects, absorbs, scatters, and refracts the first detection light. After the response, the light to be measured in the first channel is reflected and directed to the uppermost light guide plate 11. After being transmitted through the light guide plate 11, the light signal to be measured enters the corresponding photodiode array detection unit 2. Then, the light source unit 3 emits a second detection light (for example, orange light) and a third detection light (for example, yellow light) in sequence, and then forms the second channel in sequence after the optical response of the test object 9 The light to be measured in the third channel and the light to be measured in the third channel are transmitted by the corresponding light guide plate 11 and absorbed and analyzed by the corresponding photodiode array detection unit 2, and then the object to be measured 9 can be reconstructed according to the light signal analysis The two-dimensional picture. It is added that before detection, the impulse response of the entire detection device under individual illumination of each sensing pixel 22 needs to be measured in advance, and then when the optical signal of the object under test 9 is actually measured, appropriate According to the impulse response, the algorithm used to perform deconvolution (deconvolution) can demodulate the optical signal to be measured.

In fact, the light source unit 3 emits detection lights of different frequency spectrums at a very fast switching speed, so the present invention can complete detection and analysis in a short time. The present invention is a multi-spectrum electromagnetic wave detection device that can detect visible light and near-infrared light bands. The sensing in the near-infrared light band can be applied to organic molecular detection and biomedical detection technologies.

To sum up, the present invention adopts the CIS-based photodiode 5, which has a better quantum efficiency in the near-infrared light band due to its high conversion efficiency, thereby improving the spectral response of the electromagnetic wave detection device to near-infrared light. Utilizing the light guiding function of the light guide plates 11 of the light receiving unit 1, it is possible to distinguish and collect multi-spectrum light signals to realize multi-spectrum light wave detection. It is also precisely because the present invention is a multi-spectrum light wave detection, so it can be used in biomedical detection, can avoid the use of fluorescent agent, and indeed achieve the purpose of the present invention.

Referring to FIG. 5, a second embodiment of the multi-spectrum electromagnetic wave detection device of the present invention has substantially the same structure as the first embodiment, except that the second embodiment further includes a light receiving unit 1 disposed on the light receiving unit 1. On the part 12, the wavelength modulation unit 7 is used to convert the wavelength of the incident light. The wavelength modulation unit 7 is used to convert the incident light wavelength to be measured, so that the converted wavelength becomes the detectable wavelength range of the photodiode array detection unit 2.

Because the present invention uses the CIS photodiode array detection unit 2 with high photoelectric conversion efficiency, the wavelength modulation unit 7 can be configured under the premise of achieving the signal-to-noise ratio (SNR) required by the application of the present invention. The wavelength modulation unit 7 can be a wavelength conversion film or a filter. The function of the wavelength modulation unit 7 can be an up-conversion, which means that a light wave with a lower frequency is converted into an optical signal with a higher frequency. On the other hand, the function of the wavelength modulation unit 7 can also be down-conversion, which means that a light wave with a higher frequency is converted into an optical signal with a lower frequency. The λ _m of the optical signal after wavelength conversion must be between 350 nm and 1300 nm to meet the spectral response range of the CIS-based optical diode. A preferred embodiment is that the wavelength modulation unit 7 is a cesium iodide (CsI) film. When the incident electromagnetic wave is X-rays, the cesium iodide (CsI) film can convert the X-rays to the visible light band. Due to the high photoelectric conversion efficiency of the CIS-based photodiode, the device of the present invention can realize a flat panel low X-ray irradiance detection device and can maintain a high sensitivity of the flat panel detection device.

Referring to FIG. 6, a third embodiment of a multi-spectrum electromagnetic wave detection device of the present invention has roughly the same structure as the first embodiment. The difference is that the material of each light guide plate 11 of the third embodiment includes a material that can convert incident light. The wavelength conversion material 71 for the wavelength of the light coming, that is, in the third embodiment, the wavelength conversion material 71 is incorporated into each light guide plate 11, so that each light guide plate 11 itself has a wavelength conversion function. The wavelength conversion material 71 of this embodiment is a photoluminescent material, and the photoluminescent material can be excited by incident light to generate light with a wavelength different from the incident light, so as to achieve the effect of changing the wavelength of the light.

Referring to FIG. 7, a fourth embodiment of a multi-spectrum electromagnetic wave detection device of the present invention has substantially the same structure as the first embodiment, except that the fourth embodiment also includes a light receiving unit 1 provided in the light receiving unit 1. Section 12 on the phase modulation unit 8. The phase modulation unit 8 refers to the use of light-transmissive or semi-transmissive diaphragm materials to make spatially variable microstructures to modulate the spatial optical path difference after electromagnetic waves are incident on each light diode 5 (Figure 4) , To achieve the function of phase modulation.

Because the present invention uses the CIS-based photodiode array detection unit 2 with high photoelectric conversion efficiency, the phase modulation unit 8 can be configured under the premise of achieving the signal-to-noise ratio (SNR) required by the application of the present invention. The first type of the phase modulation unit 8 may be periodic or non-periodic apertures with simple apertures and shading. The periodic apertures are exponentially the same as the apertures of the apertures, and the apertures are periodic (equal distance) Arrangement; non-periodic pore diameter means that the pore diameters of the exponential openings are the same, but the openings are arranged non-periodically. Periodic apertures are preferably such as collimator film or privacy film. Both collimator film and privacy film are a kind of privacy film, but the collimator film is usually thicker and consists of a bundle of fiber bundles ( The fiber bundle is formed by chipping; the non-periodic aperture is preferably, for example, a coded aperture. In addition, the second type of phase modulation unit 8 is preferably an optical film formed by a diffraction grating, a microlens array, or a combination of a diffraction grating and a microlens array. The above-mentioned phase modulation unit 8 with different structure is only an embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention.

The purpose of configuring the phase modulation unit 8 is that the light receiving unit 1 for receiving the light to be measured in the present invention is the light receiving unit 1 for receiving two-dimensional light signals, and the photodiode array detection unit 2 is a one-dimensional scanning light diode The volume array, by using the phase modulation unit 8 with an appropriate algorithm, can realize the reconstruction of two-dimensional or even three-dimensional optical signals from the one-dimensional received signal, thereby realizing three-dimensional information or high-resolution image reconstruction. Among them, a preferred algorithm is, for example, a compressed coded aperture (compressive coded aperture) algorithm.

Referring to FIG. 8, a fifth embodiment of a multi-spectrum electromagnetic wave detection device of the present invention has substantially the same structure as the fourth embodiment, except that the phase modulation unit 8 of the fifth embodiment is disposed in the light receiving unit 1 on the light guide portion 13. The phase modulation unit 8 is an annular diaphragm and includes a plurality of light-transmitting regions 81 and a plurality of light-shielding regions 82 interspersed with the light-transmitting regions 81. Each light-transmitting area 81 located between the light-shielding areas 82 can be an opening penetrating the upper and lower surfaces of the diaphragm, and the periodic aperture as described in the fourth embodiment can be used, or it can be aperiodic. Aperture. Figure 8 takes the periodic aperture as an example. The fifth embodiment is the same as the fourth embodiment, and can also realize three-dimensional information or high-resolution image reconstruction.

In summary, the present invention has the following advantages: (1) The CIS-based photodiode 5 is used to improve the spectral response and photoelectric conversion efficiency of the photodiode array detection unit 2. The CIS-based photodiode 5 has a particularly good absorption and conversion effect for the near-infrared light waveband. (2) The light guide plates 11 are used to distinguish and collect multi-spectral signals, and the photodiode array detection unit 2 is used to realize large-area multi-spectrum electromagnetic wave detection. (3) Since the photodiode array detection unit 2 has good photoelectric conversion efficiency, even if the light receiving unit 1 is equipped with additional wavelength modulation unit 7 (Figure 5), phase modulation unit 8 (Figures 7, 8) , Or adding a wavelength conversion material 71 to the light guide plate 11 (FIG. 6), the high sensitivity required by the detection function can still be maintained. In combination with the optical signal received by the photodiode array detection unit 2, an appropriate algorithm is applied to realize three-dimensional information or high-resolution image reconstruction. (4) Because the light-receiving unit 1 of the present invention can collect and analyze the m-channel light signal to be measured from the object to be measured, the present invention has the detection function of multi-spectrum electromagnetic waves, which can be used in biomedical testing. Fluorescent agent.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made in accordance with the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

:臨界角1: Light receiving unit 11: Light guide plate 111: Light receiving surface 112: Back 113: Light emitting surface 12: Light receiving part 13: Light guide part 2: Photodiode array detection unit 21: Substrate 22: Sensing pixel 3: Light source unit 4: thin film transistor 41: gate metal electrode 42: first insulating layer 43: intrinsic semiconductor channel layer 44: drain metal electrode 45: source metal electrode 46: drain contact interface 47: source contact interface 48: first Two insulating layer 5: photodiode 50: connecting electrode 51: positive electrode 52: absorbing layer 53: buffer layer 54: negative electrode 55: incident window layer 6: storage capacitor 61: first electrode 62: second electrode 63: first Three insulating layers 7: wavelength modulation unit 71: wavelength conversion material 8: phase modulation unit 81: light-transmitting area 82: light-shielding area 9: object to be measured A: arrow B: arrow

: Critical angle

Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: 1 is a schematic top view of a first embodiment of the multi-spectrum electromagnetic wave detection device of the present invention. In the figure, an imaginary line is used to indicate the range of a light-receiving part of a light-receiving unit; Figure 2 is a schematic front view of the first embodiment; Fig. 3 is a schematic diagram similar to Fig. 2 illustrating that one of the several light source units of the first embodiment emits initial light (arrow B) toward an object under test, and the object under test reflects detection light (arrow A) Directed toward the light receiving unit; 4 is a schematic cross-sectional view illustrating the stacked structure of a photodiode array detection unit of the first embodiment; 5 is a schematic diagram of a second embodiment of the multi-spectrum electromagnetic wave detection device of the present invention; 6 is a schematic diagram of a third embodiment of the multi-spectrum electromagnetic wave detection device of the present invention; FIG. 7 is a schematic diagram of a fourth embodiment of the multi-spectrum electromagnetic wave detection device of the present invention; and FIG. 8 is a schematic top view of a fifth embodiment of the multi-spectrum electromagnetic wave detection device of the present invention.

1: Light receiving unit

11: Light guide plate

111: light-receiving surface

112: Back

113: Glossy Surface

12: Light receiving part

13: Light guide

2: Photodiode array detection unit

3: Light source unit

9: Object to be tested

A: Arrow

B: Arrow

θ _C : critical angle

Claims (10)

A multi-spectrum electromagnetic wave detection device is suitable for detecting several channels of light to be measured with different frequency spectra from an object to be measured, and includes: a light receiving unit including a plurality of light guide plates stacked one above the other, each light guide plate includes a light guide plate An upward light-receiving surface, a downward-facing back surface, and a light-emitting surface connected between the light-receiving surface and the back surface, the light guide plates are respectively used to transmit the light to be measured from the object to be measured, and The light to be measured enters the light guide plates from the light-receiving surfaces of the light guide plates, and then is respectively emitted from the light-emitting surfaces of the light guide plates; and a plurality of photodiode array detection units are located on the light guide plates The light-emitting surfaces are respectively arranged up and down corresponding to the light guide plates. The photodiode array detection units are used to detect the light signals coming through the light-emitting surfaces. Each photodiode array detection unit Comprising a substrate, and at least one sensing pixel formed on the substrate, the at least one sensing pixel includes a photodiode for detecting light signals, and the photodiode is a copper indium selenide photodiode, And it includes a positive electrode, an absorber layer made of p-type semiconductor, a buffer layer made of n-type semiconductor, and a negative electrode, which are adjacent to and far away from the substrate. The absorber layer is made of CuIn _x Ga _{( 1-x)} Se _y S _(1-y) , where x is any real number from 0 to 1, and y is any real number from 0 to 1. The multi-spectrum electromagnetic wave detection device according to claim 1, wherein the light receiving unit is divided in the horizontal direction to include a light receiving part, and a light receiving part connected around the light receiving part and located between the light receiving part and the light diode arrays The light guide part between the detection units, the light receiving part and the light guide part are formed by the light guide plates together, and the waiting light metering enters from the light receiving surfaces corresponding to the light receiving part area After entering the light guide plates, and the waiting light metering enters the light guide part from the light receiving part, after multiple reflections between the light receiving surfaces and the light emitting surfaces corresponding to the light guide part area, it passes through the The light-emitting surface is directed toward the light-diode array detection units. The multi-spectrum electromagnetic wave detection device according to claim 2, further comprising a wavelength modulation unit provided on the light receiving part of the light receiving unit and used for converting the wavelength of incident light. The multi-spectrum electromagnetic wave detection device according to claim 3, wherein the wavelength modulation unit is a wavelength conversion film or a filter. The multi-spectrum electromagnetic wave detection device according to claim 1, wherein each of the light guide plates includes a wavelength conversion material capable of converting the wavelength of incident light. The multi-spectrum electromagnetic wave detection device according to claim 2, further comprising a phase modulation unit arranged on the light receiving part or the light guiding part of the light receiving unit, and the phase modulation unit is used to modulate the incident light Light phase. The multi-spectrum electromagnetic wave detection device according to claim 6, wherein the phase modulation unit includes a plurality of light-transmitting regions, and a plurality of light-shielding regions located between the light-transmitting regions. The multi-spectrum electromagnetic wave detection device according to claim 6, wherein the phase modulation unit is a collimator film, a privacy film, a coded aperture, a microlens array, and a diffraction grating , Or the combination of micro lens array and diffraction grating. The multi-spectrum electromagnetic wave detection device according to claim 1, wherein the light guide plates transmit the spectrum of the light to be measured from low to high according to the direction from top to bottom. The multi-spectrum electromagnetic wave detection device according to claim 1, further comprising a light source unit, the light source unit is used to emit detection lights of different spectrums to irradiate the object under test, and the object under test forms different detection lights after receiving the detection light. The light to be measured of the spectrum.

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