TWI629250B - Tool holder and tool holder unit - Google Patents

Abstract

This makes it possible to easily fix diamond tools of different thicknesses to the tool holder.

The tool holder 10 includes a tool holder body 21 and a holder pressing member 30, and the tool holder body 21 has a rectangular parallelepiped holder holder 22 a and a tool holder 22 b. The tool holding portion 22b has a tool holding groove 28 corresponding to the shape of the screw groove 27 and the diamond tool. The diamond tool 10 is held by the tool holding groove 28 of the tool holding portion 22b, and the holder pressing member 30 is fixed to the tool holder body with the screw 34, so that the tool can be fixed at the front end.

Description

Tool holder and tool holder unit

The present invention relates to a tool holder and a tool holder unit for holding a diamond tool for engraving a brittle material substrate such as a glass substrate or a silicon wafer with a diamond sharp corner.

In the past, a tool was used for scoring a glass substrate or a silicon wafer, and the tool used a diamond horn consisting of a scoring wheel or a single crystal diamond. For glass substrates, although the scoring wheel that rotates the substrate is mainly used, due to the advantages of the strength of the substrate after the scoring, the use of diamond sharp corners in the form of fixed blades has also begun to be reviewed. In Patent Documents 1 and 2, proposals have been made for sharp-edged corner cutters for sapphire wafers or alumina wafers with high hardness. In these patent documents, a tool for setting a cutting corner on a ridgeline of a pyramid, or a tool whose tip is a rounded vertebra is used. In addition, Patent Document 3 proposes a scoring device using a glass scriber having a cone-shaped front end for cutting a glass plate.

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2003-183040

[Patent Document 2] Japanese Patent Laid-Open No. 2005-079529

[Patent Document 3] Japanese Patent Laid-Open No. 2013-043787

If a conventional tool with a fixed blade is used for scoring, the sharp corners will be worn, so it is necessary to change the sharp corners. In a pyramid tool, the vertices that become sharp corners that can be used are two or up to four. Therefore, after all the sharp corners at two or four places are used, it is necessary to exchange tools, and there is a problem that the exchange frequency becomes high.

In addition, when a plurality of sharp corners are formed around a diamond flat plate to constitute a diamond tool, it is necessary to hold the diamond tool on the tool holder. In materials such as diamonds, which are hard and difficult to process, in order to adjust the thickness of the flat plate, grinding with a grindstone is usually performed. However, it takes time and is not easy to complete the operation with high accuracy. However, in the case where a diamond tool is inserted and fixed in a groove provided in a tool holder, in order to use various diamond tools having different thicknesses, it is necessary to prepare a plurality of types of tools with different intervals between grooves for each thickness in advance. The problem.

The present invention has been made in view of the problems as described above, and provides a tool for using a flat plate. In the case of the holder, the purpose is to hold the tool holder and the tool holder unit of the diamond tool regardless of the thickness of the diamond tool.

In order to solve the above-mentioned problems, the tool holder of the present invention is a flat diamond tool that is held around a plurality of sharp corners, and is characterized by including a tool holder body, a holder holding portion, and a holder formed on the holder. A tool holding portion at the front end; a holder pressing member fixed to the tool holding portion of the tool holder; the tool holding portion having a screw groove provided at the front end of the notch portion and used to hold the holder pressing member It is fixed to the aforementioned tool holding portion; the tool holding groove is provided at the front end and holds the diamond tool.

Here, the holder holding portion of the tool holder main body has a thickness adjusting groove, and is provided at a position symmetrical to the tool holding groove provided at the front end, and the thickness adjusting member may be inserted.

Here, the thickness adjustment member may be a thickness adjustment pin.

In order to solve the above problems, a tool holder unit of the present invention includes a tool holder; a flat diamond tool is held at the front end of the tool holder and has a plurality of sharp corners around the tool holder; the tool holder includes a tool holder body Having a rectangular parallelepiped holder holding portion and a tool holding portion formed at the front end of the holder holding portion; a holder pressing member fixed to the tool holding portion of the tool holding portion; the tool holding portion having a screw groove A groove is provided at the front end of the notch portion and is used to fix the holder pressing member to the tool holding portion; a tool holding groove is provided at the front end to hold the diamond tool.

Here, the aforementioned diamond tool has a base, which is an angular column having a predetermined thickness, has two bottom surfaces and a plurality of outer peripheral surfaces; a ridge line is an intersection line of the aforementioned outer peripheral surfaces; an inclined surface is inclined from the bottom surface of at least one side toward the ridge line; At least the outer peripheral surface of the base is made of diamond, and the intersection of the inclined surface and the ridgeline is used as a sharp angle.

Here, the diamond tool is provided with a base, which is an angular columnar shape having a predetermined thickness, has two bottom surfaces and a plurality of outer peripheral surfaces; and corresponding to at least one corner of the base, includes: first and second inclined surfaces, from the base The two bottom surfaces are inclined toward two adjacent outer peripheral surfaces; the ridge line is the intersection of the first and second inclined surfaces; and at least the part including the ridge line is formed with diamonds, and the two ends of the ridge line are sharp corners.

According to the present invention having the characteristics as described above, a plurality of sharp-pointed diamond tools can be provided around the diamond tool, regardless of the thickness, and are supported at the front end of the holder. In addition, sharp corners can be formed while being held while being held at the front end of the holder, or can be scribed by pressing the sharp corners against the substrate and moving, so that the sharp corners can be accurately positioned relative to the tool body.

10, 50‧‧‧ multi-pointed diamond tools

11, 51‧‧‧ base

12, 52‧‧‧through holes

13a ~ 13d‧‧‧Edge

14a ~ 14d, 53a ~ 53d‧‧‧First inclined surface

15a ~ 15d, 54a ~ 54d‧‧‧ second inclined surface

20‧‧‧Tool holder

21‧‧‧tool holder

22a‧‧‧Retainer Holder

22b‧‧‧Tool holding department

23a, 23b, 24a, 24b ‧‧‧ through holes

25‧‧‧Thickness adjustment groove

26a, 26b, 26c, 31a, 31b, 31c

27‧‧‧Screw groove

28‧‧‧Tool holding groove

30‧‧‧ Holder Press

33‧‧‧Thickness adjusting pin

34‧‧‧Screw

40‧‧‧Scribing head unit

41‧‧‧head base

42‧‧‧Pneumatic cylinder

43‧‧‧Guiding mechanism

44‧‧‧ sliding section

45‧‧‧ plate

P1 ~ P8‧‧‧ sharp angle

FIG. 1 is a plan view and a side view of a diamond tool for a tool holder according to an embodiment of the present invention.

Fig. 2 is a front view and a side view of a main body of a tool holder according to this embodiment.

FIG. 3 is a front view and a side view of a holder pressing member according to this embodiment.

FIG. 4 is a perspective view showing the assembly of the tool holder according to this embodiment.

FIG. 5 is a front view and a side view showing a tool holder unit of a tool holder for holding a diamond tool according to the present embodiment.

FIG. 6 is a front view and a side view showing a state where a tool holder for holding a diamond tool according to this embodiment is mounted on a scoring head unit.

FIG. 7 is a front view and a side view of a modified example of a diamond tool for a tool holder according to an embodiment of the present invention.

8 is a front view and a side view showing a state in which a tool holder of a diamond tool holding a modified example of the diamond tool of the present invention is mounted on the scoring head unit.

Next, an embodiment of the present invention will be described. First, FIG. 1 is a plan view and a side view showing an example of a multi-pointed diamond tool (hereinafter, simply referred to as a diamond tool) 10 held in the tool holder of the present embodiment. The diamond tool 10 has a polygonal corner post made of any number of sides and having a certain thickness and rotational symmetry as a base. In this embodiment, the base 11 of a quadrangular pillar of a certain thickness is made of a single crystal diamond, and has a through hole 12 in the center thereof. On the base 11, edge lines 13 a to 13 d are formed uniformly on the outer peripheral surface of the quadrangle in parallel to the axis passing through the through hole 12 (the axis perpendicular to the paper surface with respect to FIG. 1 (a)).

In this embodiment, as shown in FIG. 1, the ridge line intersecting the base 11 from the two bottom surfaces of the four-cornered pillars of the four-cornered corner portions to the outer peripheral surface is polished by chamfering. That is, as shown in FIG. 1 (b), The four corners of the bottom surface on the right side of the base 11 are ground toward the ridgeline of the base 11 to form first inclined surfaces 14a-14d. At this time, the edges of the bottom surface of the base 11 sandwiching the ridgeline are equal to the angle formed by the inclined surface, that is, the isosceles triangle with the inclined surface taking one end of the ridgeline as the vertex is polished. The inclined surface as described above can be easily formed by laser processing or machining. In addition, mechanical polishing may be performed after laser processing to make a more precise polished surface. In this way, taking the intersection of each ridgeline 13a ~ 13d and the first inclined surface 14a ~ 14d as the apex, as shown in Fig. 1 (b), in the side view of the base 11, four sharp corners P1 ~ can be formed on the right side. P4. At this time, the first inclined surfaces 14a to 14d of the base 11 become top surfaces. Here, the top surface refers to a surface that is connected to two outer peripheral surfaces forming a ridgeline and shares one end of the ridgeline.

Next, from the other bottom surface of the base 11, the second inclined surfaces 15a to 15d are similarly formed toward the outer periphery of the base 11. At this time, in a manner that ridgelines remain between the first inclined surfaces 14 a to 14 d and the second inclined surfaces 15 a to 15 d, the grinding is performed so that the grinding range does not exceed the thickness of the base 11. In this way, the intersections of the ridgelines 13a-13d and the second inclined surfaces 15a-15d are used as sharp corners, as shown in FIG. 1 (b). In the side view of the base 11, four sharp corners P5 can be formed on the left side. ~ P8. By using the two ends of the ridge lines 13a to 13d as the sharp angles P1 to P8 as described above, it is possible to form sharp angles of eight positions on the outer periphery of the quadrangular diamond tool 10.

The tool holder is described next. Fig. 2 is a front view and a side view of a main body of a tool holder according to this embodiment. FIG. 3 is a front view and a side view of a holder pressing member according to this embodiment. FIG. 4 is a perspective view showing the assembly of the tool holder according to this embodiment. As shown in the above figures, the tool holder body 21 constituting the main part of the tool holder 20 is formed by a long The rectangular parallelepiped holder holding portion 22a and the tool holding portion 22b having a shape in which the upper half of the rectangular parallelepiped is notched at the front end are formed. As shown in FIGS. 2 and 4, the holder holding portion 22 a is provided with through holes 23 a and 23 b and through holes 24 a and 24 b for fixing the tool holder 20 to a scoring device or a processing device. In addition, the tool holding portion 22b has a thickness adjustment groove 25 that is notched at a position close to the holder holding portion 22a and is perpendicular to the longitudinal direction. The front end portion has inclined surfaces 26a, 26b cut away from the left and right as shown in FIG. 2 (a), and an inclined surface 26c notched from below as shown in FIG. 2 (b). A screw groove 27 is provided in a substantially central portion of the tool holding portion 22b perpendicular to the central axis. On the surface of the tool holding portion 22b, a tool holding groove 28 having a certain depth along the central axis of the length direction of the tool holder body 21 is formed by a screw groove 27. At the front end portion, the tool holding groove 28 is directed outward. Open at an angle of about 90 degrees. In other words, the width of the tool holding groove 28 becomes larger as it moves toward the front end, and the angle at which the extension lines of the inner wall of the groove cross is set to 90 degrees. The thickness adjustment groove 25 and the tool holding groove 28 are set to have the same depth. Here, the area where the tool holding groove 28 is opened at 90 degrees is a holding area for holding the aforementioned quadrangular diamond tool 10 so that the front end portion thereof protrudes outward.

Above the tool holding portion 22b, as shown in FIG. 3, a holder pressing member 30 is attached. The holder pressing member 30 has a substantially rectangular parallelepiped shape, and is attached to a recessed portion of the tool holding portion 22 b to constitute a rectangular parallelepiped tool holder 20. At the left and right ends of the holder pressing member 30, inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool holding portion 22b are provided, and inclined surfaces 31c corresponding to the inclined surface 26c are provided on the upper surface. In addition, a through hole 32 is provided in the central portion. The through-hole 32 is for fixing the holder pressing member 30 to the tool holding portion 22 b by a screw. When fixing, as shown in the figure, a thickness adjusting pin 33 is inserted into the thickness adjusting groove 25.

Next, the assembly of the tool holder will be described with reference to FIGS. 4 and 5. As shown in FIG. 4, when holding the diamond tool 10, first, as a thickness adjusting member, a thickness adjusting pin 33 having the same diameter as that of the diamond tool 10 is inserted into the thickness adjusting groove 25, and then, the tool holding groove is held. The groove 28 is fitted into the diamond tool 10, and the holder pressing member 30 is covered with a part of the groove 28 protruding, and the screw 34 is fastened and fixed. FIG. 5 (b) shows a tool holder unit that holds the diamond tool 10 in the tool holder 20 according to this embodiment. In this way, since the lower surface of the holder pressing member 30 is always in contact with the surface of the tool holding portion 22b in parallel, the diamond tool 10 can be reliably fixed at the front end.

In addition, when the diamond tool 10 is exchanged for another diamond tool, even if the thickness is different from the original, the diamond tool of any thickness can be fixed by using a thickness adjustment pin 33 having a diameter equal to the thickness of the new diamond tool. . As described above, the first inclined surface 14a to 14d and the second inclined surface 15a to 15d may be formed by grinding the front end with the diamond tool fixed at the front end, or using a tool holder unit holding the diamond tool that has been polished. Installed on the scoring device.

FIG. 6 is a front view and a side view showing a state where the tool holder unit having a diamond tool at the front end is mounted on the scoring head unit. As shown in these figures, the scoring head unit 40 is configured such that the plate-shaped head base 41 itself is vertically moved by a sliding mechanism (not shown). A pneumatic cylinder 42 for scoring a load is fixed to the head base 41. The lower end of the pneumatic cylinder 42 is as shown in FIG. 6, and the lever 42 a protrudes telescopically. As shown in FIG. 6 (b), a guide mechanism 43 and a sliding portion 44 are provided below the rod 42a of the head base 41, and the sliding portion 44 is pressed downward with a predetermined load. guide The mechanism 43 holds the slide portion 44 so as to be movable up and down. An L-shaped plate 45 is provided on the sliding portion 44. The plate body 45 moves up and down together with the sliding portion 44 as shown in FIG. 6 (a), but the lower limit is restricted by the stopper portion 46. In this plate body 45, as shown in FIG. 6 (a), the tool holder 20 allows the screws 47a and 47b to pass through the through holes 23b and 24b and is fixed in an oblique direction. Further, the scoring can be performed by moving the scoring head unit 40 in the direction of the arrow A.

Next, the case where the scribe is performed using the diamond tool 10 of this embodiment is demonstrated. When scoring the substrate, one of the sharp corners P1 of the tool holder is lowered together with the scoring head unit 40 to contact the substrate, and then the scoring head unit 40 is moved in the direction of the arrow A shown in the figure to perform scoring. At this time, since the diamond tool 10 does not rotate, the scribe can be performed at the same sharp angle. When the sharp angle P1 of the contact substrate is deteriorated due to abrasion, first remove the diamond tool 10 from the tool holder 20, rotate it 90 degrees, and then fix it to the tool holder 20 to make other sharp angles such as sharp angle P2 contact The substrate was similarly scribed.

In addition, after all the sharp corners of the sharp corners P1 to P4 are worn out, the diamond tool 10 is turned over and fixed to the tool holder 20, and the sharp corners P5 to P8 of the other side are sequentially contacted and scored. In this way, the position of the sharp corner can be changed and the line can be drawn four times, and the sharp corner can be exchanged for a total of eight times to be drawn.

Next, a modification of the diamond tool will be described. FIG. 7 is a side view and a front view showing an example of a diamond tool 50 according to a modified example of the present embodiment. The diamond tool 50 is a square plate-shaped base 51 composed of a single crystal diamond with a certain thickness, and has a through hole 52 in the center. Correct As shown in FIG. 7, the base 51 is ground into a V shape from both sides of a corner portion of a square in a front view. That is, the first inclined surface 53a is formed by cutting from one bottom surface 51a to the outer peripheral surface of the base to a thickness of 1/2 or more of the thickness of the base 51. At this time, it is desirable that the angles formed by the first inclined surface 53a and the two adjacent outer peripheral surfaces 56, 59 of the base 51 be equal to each other. Similarly, first inclined surfaces 53b to 53d are formed from the same bottom surface 51a for other corners. Next, the bottom surface 51b of the other side of the base 51 is similarly cut off to two adjacent outer peripheral surfaces 56, 59 of the base 51 to the extent of 1/2 of the thickness of the base 51 to form a second inclined surface 54a which is a trapezoid. 54d. The inclined surface as described above can be easily formed by laser processing or machining. In addition, after laser processing, mechanical polishing may be further performed, and a portion forming the ridge line may be made into a more precise polishing surface.

In this way, the first inclined surface 53a and the first inclined surface 54a of a pair of the same angle intersect and are in the middle of the thickness direction of the base 51. It is ideally shown in FIG. 5 (b) at the center position The ridge lines 55b, 55c, and 55d that are parallel to the bottom surfaces 51a and 51b of the base are in a state where four ridge lines perpendicular to the diagonal of the base are formed at the corner of the base 51. Here, the four outer peripheral surfaces of the base 51 become the top surfaces 56, 57, 58, 59. Here, the top surface refers to a surface connected to the first and second inclined surfaces forming a ridgeline and sharing one end of the ridgeline. The two ends of a ridgeline where a ridgeline 55a is in contact with the top surfaces 56, 59, that is, the intersections of the first inclined surface 53a, the second inclined surface 54a, and the top surfaces 56, 59 are taken as the sharp angles P1, P2. The angle α formed between the top surface of the sharp angles P1 and P2 and the ridgeline becomes approximately 135 degrees. The same is true for the other three inclined surfaces. The points where the two ends of the ridge lines 55b to 55d contact the top surface, that is, the first inclined surface 53b to 53d, the second inclined surface 54b to 54d, and the top surface 56 to 59. The intersection point is regarded as the sharp angle P3 ~ P8. By using the two ends of the ridge lines 55a to 55d as the sharp angles P1 to P8 as described above, as shown in FIG. 7 (a), when viewed from the side, The octagonal diamond tool 50 forms sharp corners in eight places.

When the diamond tool 50 is used for scoring, the diamond tool 50 is attached to the tool holder 20 in the same manner as in the present embodiment. Next, the tool holder is attached to the scoring head unit 40. At this time, the screws 47a and 47b are fixed through the through holes 23a and 24a of the tool holder 20 in an oblique direction. As described above, as shown in FIG. 8, as shown by the direction of the arrow A, the scoring head unit 40 is moved in the direction of the arrow A so that one sharp angle P1 contacts the substrate to perform scoring. After that, when the sharp corners are worn, the other sharp corners of the diamond tool 50 are brought into contact with each other to perform scoring.

In addition, in the aforementioned embodiment, although the diamond tool 10 and the diamond tool 50 are attached to the tool holder 20, the base 11 and the base 51 may be polished to form the first holder. 1. The second inclined surface forms a diamond tool 10 and a diamond tool 50. Thereby, it is possible to reduce the positional errors with respect to the sharp corners of the tool holder 20, and it is possible to improve the accuracy when the sharp corners are exchanged. In addition, since the processing of the through holes 12 and 52 is unnecessary, the processing time can be further shortened.

In addition, in the foregoing embodiment, although the entire flat plate is composed of single crystal diamond, since only a diamond layer is required on the surface portion contacting the brittle material substrate, it can also be used on a base made of cemented carbide or sintered diamond. A polycrystalline diamond layer is formed on the surface of the leading edge portion of the edge, and the polycrystalline diamond layer forms an inclined surface. In addition, a single crystal or a polycrystalline diamond having conductivity by doping impurities such as boron may be used. By using a diamond having conductivity, an inclined surface can be easily formed by electric discharge machining.

In this embodiment, since a square diamond tool is mounted on the tool holder, as shown in FIG. 2, a tool holding groove 28 opened at an angle of 90 degrees is provided at the front end. In the case of a hexagonal or octagonal flat plate, a tool holder having a groove corresponding to the shape is formed.

In addition, in this embodiment, although a thickness adjusting pin is used as a thickness adjusting member for adjusting the thickness of the diamond tool, it is not limited to the pin, and a flat plate having a thickness equivalent to the thickness of the diamond tool may be used. In addition, the depth of the thickness adjustment groove 25 and the tool holding groove 28, the diameter of the thickness adjustment member, that is, the thickness adjustment pin 33, and the thickness of the diamond tool 10 may be different from each other. In this case, the depth of the thickness adjustment groove 25 and the diameter of the thickness adjustment pin 33 are adjusted so that the lower surface of the holder pressing member 30 is always in parallel with the surface of the tool holding portion 22b. In addition, in the case where the diamond tool is always used with the same thickness, as long as the tool holding groove 28 is lightened by an amount equivalent to the thickness of the diamond tool, there is no need to provide a thickness adjustment pin or the like.

[Industrial availability]

The tool holder of the present invention can hold a diamond tool with a plurality of sharp corners regardless of its thickness, and can be effectively used for the sharp corner formation of a diamond tool or the scribe of a completed diamond tool.

Claims (6)

A tool holder for holding a flat diamond tool having a plurality of sharp corners around it, comprising a tool holder body, a holder holder, and a tool holder formed at an end of the holder before the holder. A holder pressing member fixed to the tool holding portion of the tool holder; the tool holding portion having a screw groove provided at the front end of the notch portion and used to fix the holder pressing member to the tool holding portion; The tool holding groove is set at the front end and holds the diamond tool. For example, the tool holder of the first patent application range, wherein the holder holding part of the aforementioned tool holder body has a thickness adjusting groove, which is provided at a position symmetrical to the tool holding groove provided at the front end for inserting thickness adjustment member. For example, the tool holder of claim 2 in which the aforementioned thickness adjustment member is a thickness adjustment pin. A tool holder unit having a tool holder; a flat diamond tool held at the front end of the tool holder and having a plurality of sharp corners around the tool holder; the tool holder having a tool holder body and a rectangular parallelepiped holder A holding part and a tool holding part formed at the front end of the holder holding part; a holder pressing member fixed to the tool holding part of the tool holder; the tool holding part having a screw groove provided in the notch part The front end is used to fix the holder pressing member to the tool holding portion; the tool holding groove is provided at the front end to hold the diamond tool. For example, the tool holder unit of the fourth scope of the patent application, wherein the diamond tool has a base, is an angular column with a predetermined thickness, has two bottom surfaces and a plurality of outer peripheral surfaces; a ridge line is an intersection of the aforementioned outer peripheral surface; and an inclination The surface is inclined toward the ridgeline from the bottom surface of at least one side; at least the outer peripheral surface of the base is formed with diamonds, and the intersection of the inclined surface and the ridgeline is used as a sharp angle. For example, the tool holder unit of item 4 of the patent application scope, wherein the diamond tool is provided with a base, is an angular column with a predetermined thickness, has two bottom surfaces and a plurality of outer peripheral surfaces, and is provided corresponding to at least one corner of the base. : The first and second inclined surfaces are inclined from the two bottom surfaces of the base to the adjacent two outer peripheral surfaces; the ridge line is the intersection of the first and second inclined surfaces; and at least the part including the ridge line is diamond It is formed with both ends of the ridgeline as sharp corners.