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TWI615644B - High power fiber cladding energy remover - Google Patents

High power fiber cladding energy remover Download PDF

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Publication number
TWI615644B
TWI615644B TW105140467A TW105140467A TWI615644B TW I615644 B TWI615644 B TW I615644B TW 105140467 A TW105140467 A TW 105140467A TW 105140467 A TW105140467 A TW 105140467A TW I615644 B TWI615644 B TW I615644B
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grating structure
high power
power fiber
fiber cladding
refractive index
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TW105140467A
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TW201821839A (en
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林建宏
戴伯澤
閻偉中
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國家中山科學研究院
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Description

高功率光纖包覆層能量去除器 High power fiber cladding energy remover

本發明係關於一種用於消除多餘光能量之裝置,特別是關於一種利用繞射效應消除多餘光能量之裝置。 This invention relates to a device for eliminating unwanted light energy, and more particularly to a device for eliminating unwanted light energy using a diffraction effect.

光纖是一種以全反射原理的傳輸工具,其生產原料主要是矽,因地表蘊藏量大,所以光纖的價格便宜,已廣泛運用在現今社會通訊傳輸等應用裡,也大幅使用在醫學和娛樂的領域。 Optical fiber is a transmission tool based on the principle of total reflection. Its raw material is mainly enamel. Because of its large surface reserves, the price of optical fiber is cheap. It has been widely used in applications such as today's social communication transmission, and is also widely used in medicine and entertainment. field.

高功率光纖雷射是一種體積小的雷射系統,具有方便攜帶及易於架設的功效,同時其具有高電光轉換效率,光束品質佳,及易散熱等優點,已大幅應用在切割、焊接、打孔、表面處理等應用面,是近十年來成長最快的雷射產品,但高功率光纖雷射,在雷射源輸出端(輸出準直器)前常存有殘餘、多餘的泵浦源能量,如果殘餘的泵浦源能量沒有去除,會直接影響到所輸出雷射源的光束品質,其光束品質會變差,和過多的熱負載會造成輸出準直器的損毀,更甚者,殘餘的雷射光經由輸出準直器所產生的反射,回饋至雷射系統,會造成整體系統的損壞。 High-power fiber laser is a small-volume laser system with convenient carrying and easy erection. It has high electro-optical conversion efficiency, good beam quality, and easy heat dissipation. It has been widely used in cutting, welding and hitting. Applications such as holes and surface treatments are the fastest growing laser products in the past decade, but high-power fiber lasers often have residual, redundant pump sources before the laser source output (output collimator). Energy, if the residual pump source energy is not removed, it will directly affect the beam quality of the output laser source, its beam quality will be worse, and excessive heat load will cause damage to the output collimator, and more, Residual laser light is reflected back to the laser system via the reflections produced by the output collimator, causing damage to the overall system.

上述問題習知的解決方法包含有高折射率膠方 法:一般被動式雙包覆層光纖結構是由纖芯(fiber core),以及內、外包覆層(inner and outer cladding)所組成,高折射率膠方法是在被動式雙包覆層光纖結構中的內包覆層表面,塗上高分子膠狀材質,其折射率等於或是大於內包覆層材料的折射率,此方法的工作原理,主要是將在包覆層內的殘餘泵浦光,經由光學折射效應、散射效應,將殘餘泵浦光導出內包覆層,藉由膠狀材質吸收和散熱封裝機構設計,將光轉變為熱,最後藉由風冷或水冷散熱方式,將熱帶走,達成殘餘包覆層能量去除的目的;但此方法所導出的殘餘散射光,會造成高分子膠狀材質溫度上升,一般的高分子膠狀材質所能承受溫度在90-100度,溫度大於150度時,高分子膠狀材質就會燒燬,所以此方法所能處理殘餘泵浦光能量約為100W,此方法不適用於多千瓦級光纖雷射系統。 A solution to the above problems involves a high refractive index glue Method: Generally, the passive double-clad fiber structure is composed of a fiber core, and an inner and outer cladding. The high refractive index glue method is in a passive double-clad fiber structure. The surface of the inner cladding layer is coated with a polymer gel material having a refractive index equal to or greater than the refractive index of the inner cladding material. The working principle of the method is mainly to regenerate the pump light in the cladding layer. Through the optical refraction effect and the scattering effect, the residual pump light is led out to the inner cladding layer, and the light is converted into heat by the gel material absorption and heat dissipation packaging mechanism design, and finally the air is cooled by air cooling or water cooling. Walking, to achieve the purpose of energy removal of the residual coating; however, the residual scattered light derived by this method will cause the temperature of the polymer gel-like material to rise, and the general polymer gel-like material can withstand the temperature at 90-100 degrees, the temperature When it is more than 150 degrees, the polymer gel material will burn out, so this method can handle the residual pump light energy of about 100W. This method is not suitable for multi-kilowatt fiber laser systems.

因此目前業界極需發展出一種高功率光纖包覆層能量去除器,具有良好散熱效率的散熱機構來提供高功率雷射消除輸出準直器前殘餘、多餘的泵浦源能量,如此一來,方能同時兼具雷射光品質與效率,避免殘餘的雷射光經由輸出準直器所產生的反射,回造成整體系統的損壞。 Therefore, there is a great need in the industry to develop a high-power fiber-clad energy remover, a heat-dissipating mechanism with good heat dissipation efficiency to provide a high-power laser to eliminate residual residual pump source energy before the output collimator, thus, At the same time, it can combine the quality and efficiency of laser light to avoid the reflection of residual laser light through the output collimator, which will cause damage to the overall system.

鑒於上述習知技術之缺點,本發明之主要目的在於提供一種高功率光纖包覆層能量去除器,整合一核心單元、一包覆層、一光柵結構及一外套等,以有效控制光能量 並避免殘餘的雷射光經由輸出準直器所產生的反射,以獲得高品質的雷射光束。 In view of the above disadvantages of the prior art, the main object of the present invention is to provide a high power fiber cladding energy remover, integrating a core unit, a cladding layer, a grating structure and a jacket to effectively control light energy. It also avoids the reflection of residual laser light via the output collimator to obtain a high quality laser beam.

為了達到上述目的,根據本發明所提出之一方案,提供一種高功率光纖包覆層能量去除器,包括:一核心單元,其為一光傳導材料;一包覆層,設置於該核心單元外部,該包覆層之折射率小於該核心單元之折射率;一光柵結構,設置於該包覆層外部,用以產生繞射現象;一外套,包覆著該核心單元、該包覆層、該光柵結構,其用以提供保護功能。 In order to achieve the above object, according to one aspect of the present invention, a high power fiber cladding energy remover is provided, comprising: a core unit which is a light conducting material; and a cladding layer disposed outside the core unit The refractive index of the cladding layer is smaller than the refractive index of the core unit; a grating structure is disposed outside the cladding layer for generating a diffraction phenomenon; a jacket covering the core unit, the cladding layer, The grating structure is used to provide a protection function.

上述中光柵結構可以利用光罩微影方法、雙光束干涉技術、雷射直寫技術等方法其中一種方式製備而成,製備出的光柵結構可以是一具非週期性排列的光柵結構、或是一個具週期性排列的光柵結構,也可以是一具有逐漸改變其排列週期的週期排列漸變式光柵結構;上述光柵結構具有下列特性:光柵結構的占空比之範圍可以設計為5%-95%(占空比:光柵柱體寬度/光柵間隔),光柵結構高度範圍可以是0.5μm-200μm,而光柵結構折射率範可以為1.3-1.7,其中,該週期性光柵結構、該漸變式光柵結構的週期範圍可以是0.5μm-3μm。 The grating structure may be prepared by one of a method such as a reticle lithography method, a two-beam interference technique, and a laser direct writing technique, and the grating structure may be a non-periodically arranged grating structure, or A periodically arranged grating structure may also be a periodically arranged tapered grating structure having a periodic change of its arrangement period; the grating structure has the following characteristics: the duty ratio of the grating structure can be designed to be 5%-95%. (duty ratio: grating cylinder width / grating spacing), the grating structure height may range from 0.5 μm to 200 μm, and the grating structure refractive index may range from 1.3 to 1.7, wherein the periodic grating structure, the tapered grating structure The period of the cycle may be from 0.5 μm to 3 μm.

本發明高功率光纖包覆層能量去除器可應用於一般光纖結構,或是漸變式光纖結構,其核心單元可以由高折射率玻璃所構成,而其包覆層可以由折射率低於該核心單元折射率之材料所構成。 The high power fiber cladding energy remover of the invention can be applied to a general fiber structure or a graded fiber structure, and the core unit can be composed of high refractive index glass, and the cladding layer can be made of a refractive index lower than the core. The material of the refractive index of the unit is composed of.

以上之概述與接下來的詳細說明及附圖,皆是為了能進一步說明本創作達到預定目的所採取的方式、手段及功效。而有關本創作的其他目的及優點,將在後續的說明及圖式中加以闡述。 The above summary and the following detailed description and drawings are intended to further illustrate the manner, means and effects of the present invention in achieving its intended purpose. Other purposes and advantages of this creation will be explained in the following description and drawings.

110‧‧‧核心單元 110‧‧‧ core unit

120‧‧‧包覆層 120‧‧‧Cladding

130‧‧‧光柵結構 130‧‧‧Grating structure

140‧‧‧外套 140‧‧‧ coat

150‧‧‧多餘的泵浦源能量 150‧‧‧Excess pump source energy

160‧‧‧繞射光 160‧‧‧Diffractive light

第一圖係為本發明一種高功率光纖包覆層能量去除器之示意圖;第二圖係為本發明一種高功率光纖包覆層能量去除器之週期性光柵結構繞射效率對週期性光柵結構折射率作圖;第三圖係為本發明一種高功率漸變式光纖包覆層能量去除器之繞射效率示意圖。 The first figure is a schematic diagram of a high power fiber cladding energy remover according to the present invention; the second figure is a periodic grating structure diffraction efficiency versus periodic grating structure of a high power fiber cladding energy remover of the present invention. The refractive index is plotted; the third figure is a schematic diagram of the diffraction efficiency of a high power gradual fiber cladding energy remover of the present invention.

以下係藉由特定的具體實例說明本創作之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本創作之優點及功效。 The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily understand the advantages and effects of the present invention from the disclosure of the present disclosure.

本發明藉由光柵之繞射現象,設計出一種光纖內包覆層表面之光柵結構,可較習知技術進一步處理殘餘泵浦光能量,本發明設計出之架構,係將光柵結構設置於光纖內包覆層表面,藉由週期性或是非週期性光柵結構之繞射原理,將殘餘的泵浦源能量導出包覆層,所導出的泵浦源能量注入至散熱機構中,進而達到去除殘餘的包覆層泵浦源能量 的目的,此外,藉由光柵結構控光柵之制繞射效率,以漸變式的方法,將殘餘的泵浦光能量有效地與均勻地分散,使分散之能量控制在微奈米光柵結構材料所能承受的功率以下,可以解決高折射率膠方法技術所面臨的材料耐受功率問題。 The invention designs a grating structure on the surface of the cladding layer of the optical fiber by the diffraction phenomenon of the grating, and can further process the residual pump light energy according to the prior art. The architecture of the invention is designed to set the grating structure on the optical fiber. The surface of the inner cladding layer is used to extract the residual pump source energy into the cladding layer by the diffraction principle of the periodic or non-periodic grating structure, and the pump source energy is injected into the heat dissipation mechanism to remove the residual Cladding pump source energy In addition, by the grating structure controlling the grating diffraction efficiency, the residual pump light energy is effectively and uniformly dispersed in a gradual manner, so that the dispersed energy is controlled in the micro-nano grating structure material. Below the sustainable power, the material withstand power problem faced by the high refractive index method can be solved.

請參閱第一圖,為本發明一種高功率光纖包覆層能量去除器之示意圖。如圖所示,本發明所提供一種高功率光纖包覆層能量去除器,包括:一核心單元110,其為一光傳導材料,材料係由高折射率玻璃所構成;一包覆層120,設置於該核心單元外部,該包覆層之折射率小於該核心單元之折射率;一光柵結構130,設置於該包覆層外部,用以產生繞射現象;一外套140,包覆著該核心單元、該包覆層、該光柵結構,其用以提供保護功能。泵浦源能量進入光纖時,多餘的泵浦源能量150於包覆層傳遞,當泵浦源能量入射至光柵結構,因繞射現象形成繞射光160將多餘的泵浦源能量導出,達到去除殘餘的包覆層泵浦源能量的目的。 Please refer to the first figure, which is a schematic diagram of a high power fiber cladding energy remover of the present invention. As shown in the figure, the present invention provides a high power fiber cladding energy remover comprising: a core unit 110 which is a light conducting material, the material is composed of high refractive index glass; a cladding layer 120, An outer surface of the core unit, the refractive index of the cladding layer is smaller than the refractive index of the core unit; a grating structure 130 disposed outside the cladding layer for generating a diffraction phenomenon; a jacket 140 covering the The core unit, the cladding layer, and the grating structure are used to provide a protection function. When the pump source energy enters the fiber, the excess pump source energy 150 is transmitted in the cladding layer. When the pump source energy is incident on the grating structure, the diffracted light 160 is formed by the diffraction phenomenon, and the excess pump source energy is derived to be removed. The residual cladding pumps the source energy for the purpose.

實施例 Example

請參閱第二圖,為本發明一種高功率光纖包覆層能量去除器之週期性光柵結構繞射效率示意圖。如圖所示,本實施例在光纖內包覆層表面上設置週期性光柵結構130(grating),其光纖纖芯(核心單元110)、包覆層120(cladding)和外套140的直徑分別為20μm、400μm和550μm,折射率分別為1.447、1.446和1.371,數值孔徑分別為0.06和0.46,本實施例所設計的 光柵結構130(grating)參數如下:週期為1.1μm、占空比(duty cycle)為50%、結構深度為13μm及週期性光柵結構130折射率範圍為1.3-1.6,可以發現當週期性光柵結構130折射率大於外套140折射率時,即有繞射效率產生,折射率在1.54時,有最大的繞射效率產生,約為68.5%。 Please refer to the second figure, which is a schematic diagram of the diffraction efficiency of the periodic grating structure of the high power fiber cladding energy remover of the present invention. As shown in the figure, in this embodiment, a periodic grating structure 130 is disposed on the surface of the inner cladding of the optical fiber, and the diameters of the optical fiber core (core unit 110), the cladding layer 120, and the outer sleeve 140 are respectively 20μm, 400μm and 550μm, refractive index of 1.447, 1.446 and 1.371, respectively, numerical apertures of 0.06 and 0.46, respectively, designed in this embodiment The grating structure 130 (grating) parameters are as follows: a period of 1.1 μm, a duty cycle of 50%, a structure depth of 13 μm, and a periodic grating structure 130 refractive index range of 1.3-1.6, which can be found when a periodic grating structure When the refractive index of 130 is larger than the refractive index of the outer casing 140, diffraction efficiency is generated, and when the refractive index is 1.54, the maximum diffraction efficiency is generated, which is about 68.5%.

請參閱第三圖,為本發明一種高功率漸變式光纖包覆層能量去除器之繞射效率示意圖。如圖所示,本實施例藉由漸變的週期性光柵結構折射率來製備出一種高功率漸變式光纖包覆層能量去除器,本實施例藉由漸變的週期性光柵結構折射率,將高功率漸變式光纖包覆層能量去除器由低繞射效率至高繞射效率串連而成,共分成四段,每一段為2公分長度,第一段至第四段折射率分別為1.37、1.40、1.43和1.53,所計算得到的繞射效率,分別為18.5%、27.0%、39.7%、和58.8%,以400W的包覆層能量來計算,每一段可以去除的功率分別為74.0(W)、88.0(W)、94.4(W)、和84.4(W),總去除功率高達340.8(W),所剩餘的功率為59.2(W),經過一般的輸出準直器即可去除,或者可搭配高折率膠包覆層去除元件來去除,因此本實施例可以均勻地將每一段去除功率控制在100(W)以內,達到平均分散去除功率的目的。 Please refer to the third figure, which is a schematic diagram of the diffraction efficiency of a high power gradual fiber cladding energy remover according to the present invention. As shown in the figure, in this embodiment, a high-power gradual fiber cladding energy remover is prepared by grading the refractive index of the periodic grating structure. In this embodiment, the refractive index of the periodic grating structure is high. The power graded fiber cladding energy remover is formed by connecting a low diffraction efficiency to a high diffraction efficiency, and is divided into four segments, each segment having a length of 2 cm, and the refractive indices of the first segment to the fourth segment are 1.37 and 1.40, respectively. , 1.43 and 1.53, the calculated diffraction efficiencies are 18.5%, 27.0%, 39.7%, and 58.8%, respectively, calculated from the cladding energy of 400W, and the power that can be removed in each segment is 74.0(W). 8,8.0 (W), 94.4 (W), and 84.4 (W), the total removal power is up to 340.8 (W), the remaining power is 59.2 (W), can be removed by a general output collimator, or can be matched The high-break rate adhesive coating removes the components for removal. Therefore, in this embodiment, the power of each segment can be uniformly controlled within 100 (W) to achieve the purpose of average dispersion and removal of power.

本發明可使用光罩微影方法、雙光束干涉技術、或者是雷射直寫技術等,在光纖內包覆層表面製作出週期性與非週期性光柵結構來產出繞射效應,導出多餘的光能量, 而在繞射效率控制上,則利用曝光時間大小等製程參數,來控制週期性光柵結構的折射率,另可藉由控制不同微奈米結構參數來控制週期性光柵結構的折射率,例如:週期、結構深度、占空比、混合式週期結構等方式,或是也可藉由微奈米光柵結構的材料選擇來控制週期性光柵結構的折射率,例如耐受功率和熔點較高的負光阻材料(SU8負光阻),其耐受功率密度和溫度分別為每公分約為80(W)和150度,或者以光纖載氫方式手段在光纖上製作出微奈米光柵結構。 The invention can use the reticle lithography method, the double beam interference technique, or the laser direct writing technology to prepare a periodic and non-periodic grating structure on the surface of the cladding layer of the optical fiber to generate a diffraction effect, and derive a redundant Light energy, In the diffraction efficiency control, the process parameters such as the exposure time are used to control the refractive index of the periodic grating structure, and the refractive index of the periodic grating structure can be controlled by controlling different micro-nano structure parameters, for example: Cycle, structure depth, duty cycle, mixed periodic structure, etc., or the material selection of the micro-nano grating structure can also be used to control the refractive index of the periodic grating structure, such as negative withstand power and high melting point The photoresist material (SU8 negative photoresist) has a withstand power density and temperature of about 80 (W) and 150 degrees per centimeter, respectively, or a micronano grating structure is fabricated on the optical fiber by means of a fiber-supported hydrogen.

上述之實施例僅為例示性說明本創作之特點及功效,非用以限制本創作之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背創作之精神及範疇下,對上述實施例進行修飾與變化。因此,本創作之權利保護範圍,應如 後述之申請專利範圍所列。 The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of this creation should be as The scope of the patent application described later is listed.

110‧‧‧核心單元 110‧‧‧ core unit

120‧‧‧包覆層 120‧‧‧Cladding

130‧‧‧光柵結構 130‧‧‧Grating structure

140‧‧‧外套 140‧‧‧ coat

150‧‧‧多餘的泵浦源能量 150‧‧‧Excess pump source energy

160‧‧‧繞射光 160‧‧‧Diffractive light

Claims (9)

一種高功率光纖包覆層能量去除器,包括:一核心單元,其為一光傳導材料;一包覆層,設置於該核心單元外部,該包覆層之折射率小於該核心單元之折射率;一光柵結構,設置於該包覆層外部,用以產生繞射現象;一外套,包覆著該核心單元、該包覆層、該光柵結構,其用以提供保護功能。 A high power fiber cladding energy remover comprises: a core unit which is a light conducting material; a cladding layer disposed outside the core unit, the cladding layer having a refractive index smaller than a refractive index of the core unit a grating structure disposed outside the cladding layer for generating a diffraction phenomenon; a jacket covering the core unit, the cladding layer, and the grating structure for providing a protection function. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構係利用光罩微影方法、雙光束干涉技術、雷射直寫技術其中一種方式製備而成。 The high power fiber cladding energy remover according to claim 1, wherein the grating structure is prepared by one of a reticle lithography method, a two-beam interference technique, and a laser direct writing technique. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構係為一非週期性排列的光柵結構。 The high power fiber cladding energy remover of claim 1, wherein the grating structure is a non-periodically arranged grating structure. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構係為一具週期性排列的光柵結構或是一週期排列漸變式光柵結構。 The high power fiber cladding energy remover of claim 1, wherein the grating structure is a periodically arranged grating structure or a periodic array of tapered grating structures. 如申請專利範圍第4項所述之高功率光纖包覆層能量去除器,其中,該週期性光柵結構、該漸變式光柵結構的週期範圍係為0.5μm-3μm。 The high power fiber cladding energy remover of claim 4, wherein the periodic grating structure and the graded grating structure have a period ranging from 0.5 μm to 3 μm. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構之占空比範圍係為5%-95%。 The high power fiber cladding energy remover of claim 1, wherein the grating structure has a duty cycle ranging from 5% to 95%. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構高度範圍係為0.5μm-200μm。 The high power fiber cladding energy remover of claim 1, wherein the grating structure has a height ranging from 0.5 μm to 200 μm. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該光柵結構折射率範圍係為1.3-1.7。 The high power fiber cladding energy remover of claim 1, wherein the grating structure has a refractive index ranging from 1.3 to 1.7. 如申請專利範圍第1項所述之高功率光纖包覆層能量去除器,其中,該核心單元係由高折射率玻璃所構成。 The high power fiber cladding energy remover of claim 1, wherein the core unit is composed of high refractive index glass.
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TWI682205B (en) * 2018-10-18 2020-01-11 搏盟科技股份有限公司 Cladding optical stripper

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TW476420U (en) * 2000-03-14 2002-02-11 Lon A Wang Wavelength-tunable and decay-tunable sawtooth type long period fiber grating structure
WO2002078142A1 (en) * 2001-03-22 2002-10-03 Infinite Photonics, Inc. Laser diode with output fiber feedback
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI682205B (en) * 2018-10-18 2020-01-11 搏盟科技股份有限公司 Cladding optical stripper

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