TWI692137B - An in-line type manufacturing system for organic light emitting device, manufacturing method, organic layer device and donor substrate - Google Patents

Abstract

The continuous manufacturing system of the organic light emitting element of the present invention adopts the Joule heating method and uses two donor substrates to vapor-deposit an organic film on the element substrate. The continuous manufacturing system of the organic light-emitting element may include a vapor deposition device, the first donor substrate coated with an organic film or the element substrate is put into the vapor deposition device and is opposed to the second donor substrate on which the conductive film is formed, and vaporized The plating apparatus applies an electric field to the conductive film of the first donor substrate coated with organic film to generate Joule heat, thereby vapor-depositing the organic film coated on the first donor substrate to the second donor substrate The conductive film of the second donor substrate with an organic film applies an electric field to generate Joule heat, thereby vapor-depositing the organic film deposited on the second donor substrate to the element substrate. By the Joule heating method, the organic film is formed on the element substrate using the first and second donor substrates, and by repeating the above-described processing, the loss of organic substances can be reduced, and the process time can be shortened.

Description

Continuous manufacturing system, continuous manufacturing method, organic film device, donor substrate group Field of invention

The present invention relates to a continuous manufacturing system, a continuous manufacturing method, an organic film device, and a donor substrate group of an organic light-emitting element, and more specifically, to a vapor deposition step using two donor substrates and an organic film on an element substrate Organic film coating to ensure the uniformity of the vapor-deposited organic film, reduce the loss of organic matter, and reduce the process time (TACT time) to improve the productivity of continuous production systems of organic light-emitting devices, continuous production methods, organic Membrane device and donor substrate group.

Background of the invention

In the flat panel display device, the response speed of the organic electroluminescence display device is less than 1 ms, has a high response speed, low power consumption, and because of autonomous light emission, there is no viewing angle problem, so it is an excellent dynamic image display medium regardless of the device size. In addition, it can be produced at a low temperature, and based on the existing semiconductor process technology, the manufacturing process is simple, so it is a new A new generation of flat panel display devices has attracted much attention. In addition, since the organic film used in the organic electroluminescence display device emits light autonomously, it can be used in an OLED lighting device when a multilayer organic film is vapor-deposited on the entire surface and an electric field is applied to the upper and lower ends. Unlike existing LED lighting which is a point light source, OLED lighting is a surface light source, so it has received great attention as a new generation of lighting.

According to the materials and processes used in the formation of organic thin films in the manufacturing process of such organic electroluminescent display devices and OLED lighting, it can be roughly divided into a polymer element using a wet process and a low molecular element using an evaporation process. For example, in the method of forming a polymer or low-molecular light-emitting layer, when the inkjet printing method is used, the material of the organic layer other than the light-emitting layer is limited, and there is a need to form a structure for inkjet printing on the substrate trouble. In addition, when a light-emitting layer is formed through an evaporation process, an additional metal mask is used, and as the flat panel display device becomes larger, the metal mask also needs to be enlarged. In this case, as the metal mask becomes larger, The sagging phenomenon occurs, so it is difficult to manufacture large components.

On the other hand, a technique of forming an organic light-emitting layer using Joule heating has been disclosed. This technique first forms an organic light-emitting layer on the donor substrate, then the donor substrate and the element are substantially opposed, and then the donor substrate is heated by Joule heating, thereby vapor-depositing the organic light-emitting layer formed on the donor substrate Onto the component substrate.

However, the technique of forming an organic light-emitting layer by Joule heating requires an unnecessary process such as inversion of the donor substrate or the element substrate, thereby increasing the process time (TACT time).

Prior art literature Patent Literature

(Patent Document 1) Korean Authorized Patent Gazette No. 10-1405502 (Announcement Date June 27, 2014)

(Patent Document 2) Korean Authorized Patent Gazette No. 10-1169002 (Announcement Date July 26, 2012)

(Patent Document 3) Korean Authorized Patent Gazette No. 10-1169001 (Publication Date July 26, 2012)

(Patent Document 4) Korean Published Patent Gazette No. 10-2012-0129507 (Publication Date November 28, 2012)

Summary of the invention

An object of the present invention is to provide a continuous manufacturing system, a continuous manufacturing method, an organic film device, and a donor substrate group for an organic light-emitting element using two donor substrates to vapor-deposit an organic film onto an element substrate, thereby processing the Joule heating method Organic film evaporation process.

Another object of the present invention is to provide a continuous manufacturing system, a continuous manufacturing method, an organic film device, and a donor substrate group of organic light-emitting elements, thereby ensuring the uniformity of the vapor-deposited organic film and reducing the loss of organic matter .

Still another object of the present invention is to provide a continuous manufacturing system, a continuous manufacturing method, an organic film device, and a donor substrate group for an organic light-emitting element, thereby reducing process time.

In order to solve the above technical problem, the continuous manufacturing system of the organic light emitting element according to the present invention may include: a first coating device for coating the first organic substance on the donor substrate for the first organic substance; and a second coating device for For coating the second organic substance on the donor substrate for the second organic substance; and a vapor deposition device, which is connected to the first coating device and the second coating device, and applies the first organic substance to be transported An electric field is applied to the bulk substrate to vapor-deposit the first organic substance onto the element substrate, and then an electric field is applied to the donor substrate for the second organic substance to vapor-deposit the second organic substance onto the element substrate.

In addition, according to the present invention, the donor substrate for the first organic substance may include: a first donor substrate provided in the first coating device, and the first organic substance is coated on the solution after primary solution coating A first donor substrate; a second donor substrate, provided in the evaporation device, when an electric field is applied to the first donor substrate, a primary solution is applied on the first donor substrate The first organic substance is secondarily vapor-deposited on the second donor substrate.

Furthermore, according to the present invention, it may further include an nth coating device (n is a positive integer) for coating the nth organic substance on the nth organic substance donor substrate, and the vapor deposition device may be combined with the nth coating device Connected, an electric field is applied to the donor substrate for the n-th organic substance to be transported to vapor-deposit the element substrate transferred to the n-th position, and further includes an element substrate transfer device that can transfer the element substrate transfer device The element substrate is transferred from the nth position to the n+1th position.

In addition, according to the present invention, the n may be any integer from 1 to 4, The first coating device includes a HIL coating chamber for spraying HIL organics, the second coating device includes an HTL coating chamber for spraying HTL organics, and the third coating device includes EML for spraying An EML coating chamber for organic matter, the fourth coating device includes an ETL coating chamber for spraying ETL organic matter.

In addition, according to the present invention, the n may be any integer from 1 to 5, and the fifth coating device includes an EIL coating chamber for spraying EIL organic matter.

In addition, according to the present invention, in the EML coating chamber, EML organic matter is applied to the first donor substrate for EML organic matter, and the vapor deposition apparatus is used for the first EML organic matter transported by the donor substrate conveying device. An electric field is applied to the donor substrate to vapor-deposit the EML organic substance onto the second donor substrate for EML organic substance, and an electric field is applied to the second donor substrate for EML organic substance to vaporize the EML organic substance to the On the element substrate.

Furthermore, according to the present invention, the first donor substrate for EML organic matter may be provided in the EML coating chamber in an upward direction, and horizontally conveyed by the donor substrate conveying device, and the first The second donor substrate can be set at a first height in a downward manner, and can be lowered to a second height by a driving section, so as to be able to be horizontally transported to the first donor substrate for EML organic matter in the vapor deposition apparatus At a first interval, the element substrate may be disposed below the second donor substrate for EML organics in an upward manner.

In addition, according to the present invention, the first donor substrate for EML organic matter may include an unpatterned quadrilateral thin film layer on which the pattern is not formed on the electrothermal layer, and the second donor substrate for EML organic matter may include the electrothermal layer on shape A patterned quadrilateral thin film layer is formed on the patterned or electrothermal layer with a patterned partition layer.

Furthermore, according to the present invention, the first coating device may coat the first organic substance with the first donor substrate on the first organic substance, and the vapor deposition device may apply the first organic substance transported by the donor substrate transfer device Applying an electric field with the first donor substrate, thereby vapor-depositing the first organic substance onto the second donor substrate for the first organic substance, and applying an electric field to the second donor substrate for the first organic substance, thereby applying the The first organic substance is evaporated onto the element substrate.

In addition, according to the present invention, the vapor deposition apparatus may include: a vapor deposition chamber capable of forming a vacuum environment therein; and a first power supply device provided on one side of the vapor deposition chamber and capable of applying the first donor An electric field is applied to the substrate; a second power supply device is provided on the other side of the evaporation chamber and can apply an electric field to the second donor substrate.

In addition, according to the present invention, the vapor deposition chamber may be a connected rectangular chamber with an inlet port formed at the front end and an outlet port formed at the rear end, extending along the longitudinal direction so that one side is respectively separated from the first coating The coating device is connected to the second coating device, and a partition or a door panel with a communication port is provided inside.

In addition, according to the present invention, the first coating device may include: a first lateral coating chamber, which is provided in the first width direction based on the length direction of the vapor deposition device; the second lateral coating The coating chamber is provided in the second width direction based on the longitudinal direction of the vapor deposition device.

In addition, the continuous manufacturing system of the organic light emitting element according to the present invention may further include: a loading device for loading the element substrate Loaded to the first position of the vapor deposition device; an unloading device for unloading the element substrate from the vapor deposition device; and a control section capable of loading the first coating device and the second coating device , The vapor deposition device, the loading device, and the unloading device apply control signals.

In addition, the continuous manufacturing system of the organic light-emitting element according to the present invention may further include: a first electrode forming device provided between the loading device and the vapor deposition device, for forming a first element on the element substrate One electrode layer.

In addition, the continuous manufacturing system of the organic light emitting element according to the present invention may further include: a second electrode forming device provided between the vapor deposition device and the unloading device, for forming a first electrode on the element substrate Two electrode layer.

In addition, the continuous manufacturing system of the organic light emitting element according to the present invention may further include: an encapsulation device provided between the second electrode forming device and the unloading device, for performing an operation on the element substrate Package.

In addition, according to the present invention, the first coating device may include: a first coating chamber; a spray device provided in the first coating chamber for spraying the first organic substance donor substrate The first organic substance; a curing device for curing the first organic substance coated on the donor substrate for the first organic substance by a baking sheet or a light irradiation device; and a donor substrate conveying device for The donor substrate for the first organic substance is transferred to the vapor deposition apparatus.

In addition, according to the present invention, the first coating chamber may be sprayed Afterwards, it can form a load lock chamber and spray chamber in a vacuum environment.

In addition, according to the present invention, the spray device may be a vacuum spray device capable of spraying the first organic substance in a vacuum environment.

Furthermore, according to the present invention, a load lock chamber may be provided between the vapor deposition device and the first coating device, or between the loading device and the vapor deposition device.

In addition, according to the present invention, the load lock chamber may be a vertical load type load lock chamber, which can load a plurality of the element substrates on the tray in a vertical direction.

Furthermore, according to the present invention, an alignment device may be provided on any one or more of the first coating device and the vapor deposition device for aligning the first donor substrate or the The element substrate is described.

Furthermore, according to the present invention, the alignment device may include a multi-axis alignment device capable of multi-axis alignment.

On the other hand, the continuous manufacturing system of the organic light-emitting element of the present invention for solving the above technical problems may include: a first coating device for coating the first organic substance on the first organic substance with the first donor substrate; A second coating device for coating the second organic material on the second organic material with the first donor substrate; a vapor deposition device, which is connected to the first coating device and the second coating device, can The first organic substance transported by the bulk substrate transfer device applies an electric field to the first donor substrate to vapor-deposit the first organic substance onto the second donor substrate for the first organic substance, and then can pass the donor substrate transfer device The transferred second organic substance is applied with the first donor substrate Applying an electric field to vapor-deposit the second organic substance onto the second donor substrate for the second organic substance; a loading device for loading the element substrate to the first position of the vapor deposition device; an element substrate conveying device provided In the vapor deposition apparatus, the element substrate can be transported from the first position to the second position; an unloading device for unloading the element substrate from the vapor deposition apparatus; and the control section can The first coating device, the second coating device, the vapor deposition device, the loading device, the component substrate transfer device, and the unloading device apply control signals, and the vapor deposition device An organic substance applies an electric field to the second donor substrate, thereby vapor-depositing the first organic substance onto the element substrate at the first position, and applies an electric field to the second organic substance second donor substrate, thereby applying The second organic substance is vapor-deposited onto the first organic substance of the element substrate at the second position.

On the other hand, the continuous manufacturing system of the organic light-emitting element of the present invention for solving the above technical problems may include: a first coating device for coating the first organic substance on the first organic substance with the first donor substrate; A second coating device for coating the second organic material on the second organic material with the first donor substrate; a vapor deposition device, which is connected to the first coating device and the second coating device, can The first organic substance transported by the bulk substrate transfer device applies an electric field to the first donor substrate to vapor-deposit the first organic substance onto the second donor substrate for the first organic substance, and then can pass the donor substrate transfer device The transferred second organic substance is applied to the first donor substrate by applying an electric field to vapor-deposit the second organic substance onto the second donor substrate for the second organic substance; an element substrate transfer device is provided in the vapor deposition device , The element substrate can be transported from the first position to the second position; and the control unit can provide the first coating device, the second coating device, the vapor deposition device, and the element substrate The transfer device applies a control signal, and the vapor deposition device applies an electric field to the second donor substrate for the first organic substance, thereby vapor-depositing the first organic substance onto the element substrate at the first position, and An electric field is applied to the second donor substrate for the second organic substance, thereby vapor-depositing the second organic substance onto the first organic substance of the element substrate at the second position.

On the other hand, the continuous manufacturing system of the organic light-emitting element of the present invention for solving the above technical problems may include: a first coating device for coating the first organic substance on the donor substrate for the first organic substance; and the second coating A coating device for coating the second organic substance on the donor substrate for the second organic substance; a vapor deposition device, which is connected to the first coating device and the second coating device, and can use a donor substrate transport device The Joule heat of the transport substrate of the first organic substance transported to deposit the first organic substance on the element substrate, and then the Joule of the donor substrate of the second organic substance transported by the transport device of the donor substrate can be used Heat to vapor-deposit the second organic substance onto the element substrate; a loading device for loading the element substrate to the first position of the vapor deposition device; a component substrate conveying device provided in the vapor deposition device , The element substrate can be transported from the first position to the second position; an unloading device is used to unload the element substrate from the vapor deposition device; and the control unit can The second coating device, the vapor deposition device, the loading device, the component substrate transfer device, and the unloading device apply control signals.

On the other hand, the continuous manufacturing system of the organic light-emitting element of the present invention for solving the above technical problem may include: a coating chamber where the first organic substance donor substrate is coated with the first organic substance and the second organic substance is applied with The body substrate is coated with a second organic substance; a vapor deposition device, which is connected to the coating chamber, applies an electric field to the donor substrate for the first organic substance, thereby vapor-depositing the first organic substance onto the element substrate, and The second organic substance donor substrate applies an electric field to vapor-deposit the second organic substance onto the element substrate; a loading device is used to load the element substrate into the vapor deposition device; an unloading device is used In order to unload the element substrate from the vapor deposition device; and the control unit, a control signal can be applied to the coating chamber, the vapor deposition device, the loading device, and the unloading device.

On the other hand, the continuous manufacturing system of the organic light-emitting element of the present invention for solving the above-mentioned technical problems may include: a first coating device that mixes a first liquid formed by mixing a volatile medium and a first organic substance, It is applied to the first donor substrate for the first organic substance in a planar shape and volatilizes the volatile medium; the second coating device mixes the second liquid substance formed by mixing the mixed volatile medium and the second organic substance Applied to the first donor substrate for the second organic substance in a planar shape, and volatilizing the volatile medium; an evaporation device connected to the first coating device and the second coating device, It is possible to apply an electric field to the first donor substrate for the first organic substance transported by the donor substrate transfer device, thereby vapor-depositing the first organic substance onto the second donor substrate for the first organic substance in a planar manner, and then An electric field is applied to the first donor substrate for the second organic substance transported by the donor substrate transport device, thereby vapor-depositing the second organic substance in a planar manner to the second A second donor substrate for organic materials; the vapor deposition device applies an electric field to the second donor substrate for the first organic material, thereby vapor-depositing the first organic material onto the element substrate, and The organic substance is applied to the second donor substrate by applying an electric field, thereby vapor-depositing the second organic substance onto the first organic substance of the element substrate.

On the other hand, the on-line manufacturing method of the organic light emitting element of the present invention for solving the above technical problems may include the following steps: a preparation step including: a first coating step, a first donor substrate for the first organic substance Coating the first organic substance; second coating step, coating the second organic substance with the first donor substrate on the second organic substance; preparing step for the first organic substance with the second donor substrate, and the first coating device and the second coating The coating device is connected, and an electric field is applied to the first organic substrate for the first organic substance conveyed by the donor substrate conveying device, thereby vapor-depositing the first organic substance onto the second donor substrate for the first organic substance; and In the second donor substrate preparation step for two organic substances, an electric field is applied to the first donor substrate for the second organic substance transported by the donor substrate transfer device to vapor-deposit the second organic substance to the second for the second organic substance On the donor substrate; the loading step loads the element substrate to the first position of the vapor deposition apparatus; the first organic substance vapor deposition step applies an electric field to the first organic substance with a second donor substrate, thereby applying the first An organic substance is vapor-deposited on the element substrate at the first position; an element substrate conveying step, the element substrate is transferred from the first position to a second position; a second organic substance evaporation step, the The second organic substance applies an electric field with a second donor substrate, thereby vapor-depositing the second organic substance onto the first organic substance of the element substrate at the second position; and unloading Step: Unload the element substrate from the vapor deposition device.

On the other hand, the organic film device of the present invention for solving the above technical problem can be manufactured by the continuous manufacturing method of the organic light emitting element.

On the other hand, the donor substrate group for manufacturing an organic light-emitting element of the present invention for solving the above technical problem may include: a first donor substrate having: a first base layer; and a first electrothermal layer formed on the first On the base layer, the first organic substance is coated on the first electrothermal layer through a solution coating; and a first conductive layer is formed on the first base layer and is electrically connected to the first electrothermal layer, In order to apply an electric field to the first electrothermal layer; and a second donor substrate having: a second base layer; a second electrothermal layer formed on the second base layer, corresponding to the first electrothermal layer, when When an electric field is applied to the first donor substrate, the first organic substance coated with the primary solution on the first donor substrate can be secondarily evaporated onto the second electrothermal layer; and the second conductivity Layer is electrically connected to the second electrothermal layer to apply an electric field to the second electrothermal layer.

As described above, the continuous manufacturing system, continuous manufacturing method, organic film device, and donor substrate group of the organic light-emitting element of the present invention use two donor substrates and the element substrate to process the organic film vapor deposition step, thereby ensuring the vaporization The uniformity of the plated organic film and prevents the loss of organic matter.

In addition, the continuous manufacturing system, continuous manufacturing method, organic film device, and donor substrate group of the organic light-emitting element of the present invention use two donor substrates and the element substrate to process the organic film vapor deposition process, which is advantageous for the production of large-scale elements , And can shorten the process time.

In addition, the continuous manufacturing system, continuous manufacturing method, organic film device, and donor substrate group of the organic light-emitting element of the present invention form an organic film on the donor substrate by a wet process, so that the loss of organic matter can be reduced.

In addition, the continuous manufacturing system, continuous manufacturing method, organic film device, and donor substrate group of the organic light-emitting element of the present invention constitute the coating chamber, the load interlocking chamber, and the vapor deposition chamber in a continuous form, so it is easy to implement equipment, The manufacturing cost can be saved, and the process time can be shortened.

1‧‧‧Organic film

1-1‧‧‧First Organic

1-2‧‧‧second organic matter

1-3‧‧‧The third organic matter

1-4‧‧‧The fourth organic matter

1-5‧‧‧ fifth organic

100‧‧‧Continuous manufacturing system for organic light-emitting elements

102‧‧‧Control Department

110‧‧‧Coating device

110-1‧‧‧First coating device

110-1a‧‧‧First side coating room

110-1b‧‧‧Second side coating room

110-2‧‧‧Second coating device

110-3‧‧‧The third coating device

110-4‧‧‧Fourth coating device

110-5‧‧‧Fifth coating device

112‧‧‧coating room

114‧‧‧ door

116‧‧‧Workbench

117‧‧‧ donor substrate transfer device

118‧‧‧Sprinkler

118a‧‧‧Sprinkler

119‧‧‧curing device

120‧‧‧Organic supply device

130‧‧‧Loading interlocking room

131‧‧‧Drive Department

132‧‧‧The first door

134‧‧‧Second Gate

150‧‧‧Evaporation equipment

152‧‧‧Evaporation room

154‧‧‧Station

156‧‧‧Fixed Department

158‧‧‧Drive Department

160‧‧‧Power supply device

160-1‧‧‧First power supply device

160-2‧‧‧Second power supply device

162‧‧‧ door

164‧‧‧Side support

166‧‧‧Lower support

168‧‧‧Central support

170‧‧‧Conveying device

180‧‧‧ donor substrate transfer device

191‧‧‧ First electrode forming device

192‧‧‧Second electrode forming device

193‧‧‧Packaging device

200‧‧‧First donor substrate

201‧‧‧The first base layer

202‧‧‧ First conductive layer

203‧‧‧The first electric heating layer

210‧‧‧Second donor substrate

211‧‧‧Second base layer

212‧‧‧Second conductive layer

213‧‧‧The second electric heating layer

220‧‧‧Component substrate

400‧‧‧Continuous manufacturing system

1000‧‧‧Organic membrane device

d‧‧‧Distance, first interval

A‧‧‧Actuator

AL‧‧‧Alignment device

C‧‧‧Packaging materials

DS1‧‧‧ Donor substrate for the first organic substance

DS1‧‧‧ donor substrate for the second organic substance

EIL‧‧‧EIL organic matter

EML‧‧‧EML organic matter

ETL‧‧‧ETL organic matter

G‧‧‧door panel

H1‧‧‧ First height

H2‧‧‧second height

HIL‧‧‧HIL organic matter

HTL‧‧‧HTL Organic

LD‧‧‧Loading device

P‧‧‧ plate

P1‧‧‧First electrode layer

P2‧‧‧Second electrode layer

S300-380, S400-450‧‧‧ steps

UD‧‧‧Uninstalling device

1 is a block diagram showing a schematic configuration of a continuous manufacturing system for an organic light-emitting element using Joule heating according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the structure of the coating device shown in FIG. 1.

3 is a cross-sectional view showing the structure of the vapor deposition apparatus shown in FIG. 1.

4 is a cross-sectional view showing a structure in which the fixing portion is lowered and the first donor substrate and the second donor substrate are arranged at a fixed distance in the vapor deposition apparatus shown in FIG. 3.

FIG. 5 is a cross-sectional view showing a structure in which the element substrate in the vapor deposition apparatus shown in FIG. 3 is dropped into a vapor deposition chamber by a transfer device and is arranged at a certain distance from the second donor substrate.

6 is a cross-sectional view showing a structure in which a side support portion is provided on a side surface of a vapor deposition chamber in the vapor deposition apparatus shown in FIG. 3 according to another embodiment.

7 is a cross-sectional view showing a structure in which the vapor deposition apparatus shown in FIG. 3 includes a supporting portion and a central supporting portion provided on a fixed table according to still another embodiment.

FIG. 8a is a diagram showing a central support portion in the vapor deposition apparatus shown in FIG. 7. Top view of an embodiment.

FIG. 8b is a plan view showing another embodiment of the central support portion in the vapor deposition apparatus shown in FIG. 7.

9 is a sequence diagram showing a continuous manufacturing method of an organic light-emitting element according to an embodiment of the present invention.

10 is a plan layout diagram showing a schematic configuration of a continuous manufacturing system for an organic light-emitting element using Joule heating according to another embodiment of the present invention.

11 is a cross-sectional view showing the structure of the coating device shown in FIG. 10.

12 is a cross-sectional view showing the structure of the vapor deposition device shown in FIG. 10.

13 is a cross-sectional view showing a structure in which the second donor substrate and the first donor substrate are arranged at a certain distance and vapor deposition is performed once the fixing portion is lowered in the vapor deposition apparatus shown in FIG. 12.

14 is a cross-sectional view showing a structure in which an element substrate in the vapor deposition device shown in FIG. 13 is put into a vapor deposition chamber by a transfer device.

15 is a cross-sectional view showing a structure in which the second donor substrate is lowered and arranged at a certain distance from the element substrate to perform secondary vapor deposition in the vapor deposition apparatus shown in FIG. 14.

16 is an enlarged cross-sectional view showing an example of the first donor substrate in the vapor deposition apparatus shown in FIG. 12.

17 is an enlarged cross-sectional view showing an example of a second donor substrate in the vapor deposition apparatus shown in FIG. 14.

18 is a plan configuration showing a schematic structure of a continuous manufacturing system for an organic light-emitting element using Joule heating according to still another embodiment of the present invention Figure.

19 is a cross-sectional view showing another example of the load lock chamber of FIG. 12.

FIG. 20 is a cross-sectional view showing another example of the vapor deposition apparatus of FIG. 12.

21 is a cross-sectional view showing an organic light-emitting element manufactured by a continuous manufacturing method of an organic light-emitting element according to an embodiment of the present invention.

22 is a sequence diagram showing a continuous manufacturing method of an organic light-emitting element according to another embodiment of the present invention.

detailed description

The embodiments of the present invention may be modified into various forms, and it should not be construed that the scope of the present invention is defined by the embodiments described below. The purpose of this embodiment is to provide a person of ordinary skill in the art with a more complete description of the present invention. Therefore, the shapes and the like of the constituent elements are exaggerated in the drawings to emphasize clearer explanations.

Hereinafter, referring to FIGS. 1 to 9, an embodiment of the present invention will be described in detail.

1 is a block diagram showing a schematic structure of a continuous manufacturing system for an organic light-emitting element using Joule heating according to the present invention, FIG. 2 is a cross-sectional view showing the structure of a coating device shown in FIG. 1, and FIG. 3 is 1 is a cross-sectional view showing the structure of the vapor deposition apparatus shown in FIG. 1, and FIG. 4 is a diagram showing that the fixing portion of the vapor deposition apparatus shown in FIG. 3 is lowered so that the first donor substrate and the second donor substrate are arranged as A cross-sectional view of the structure at a certain distance. FIG. 5 is a diagram showing that the element substrate in the vapor deposition apparatus shown in FIG. 3 is lowered after being thrown into the vapor deposition chamber by the conveying device and arranged to be separated from the second donor substrate by a certain distance. A cross-sectional view of the structure, FIG. 6 is a vapor deposition in the vapor deposition device shown in FIG. 3 according to another embodiment 7 is a cross-sectional view showing the structure in which the vapor deposition apparatus shown in FIG. 3 is provided with a support portion provided on a fixed table and a central support portion according to yet another embodiment. 8a is a plan view showing an embodiment of the central support portion in the vapor deposition apparatus shown in FIG. 7, and FIG. 8b is another example showing the central support portion in the vapor deposition apparatus shown in FIG. 7. Top view.

Referring to FIG. 1, when manufacturing a large-scale organic light emitting display device (Organic Light Emitting Device: OLED) and an OLED lighting substrate in a continuous manufacturing system 100 of an organic light emitting element of the present invention, in order to ensure the uniformity of an organic film and reduce the loss of organic matter And shorten the process time, for example, to process the Joule heating type organic film evaporation process, which uses the first and second donor substrates of glass, ceramics or plastic materials to deposit organic films on the element substrate.

To this end, the continuous manufacturing system 100 of the organic light-emitting element of the present invention includes: a coating device 110 for coating an organic film on the first donor substrate 200; and a load-lock chamber 130 for coating organic materials The first donor substrate 200 is put into the vapor deposition apparatus 150 or discharged from the vapor deposition apparatus 150; the vapor deposition apparatus 150 is used for applying the Joule heating method through the second donor substrate 210 , The organic film coated on the first donor substrate 200 is evaporated onto the element substrate 220; and the control unit 102 is used to control the processing of the operations related to the continuous manufacturing system 100 of the organic light emitting element.

For example, the control unit 102 is composed of a notebook computer, a personal computer, a touch panel, a programmable logic controller (PLC), etc., which controls the coating device 110. Load interlocking chamber 130 and vapor deposition device 150 to handle the relevant actions of the continuous manufacturing system 100 for organic light emitting elements. The content of this control unit 102 will be described in detail in FIG. 9.

In addition, in the continuous manufacturing system 100 of the organic light emitting element of the present invention, a conveying device (not shown) is provided between the coating device 110, the load lock chamber 130, and the vapor deposition device 150 for conveying the first The donor substrate 200 and the second donor substrate 210. The conveying device may include a conveyor belt, a conveying robot, and the like.

In addition, the continuous manufacturing system 100 of the organic light-emitting element may also be provided with a wet or dry cleaning device (not shown) for removing the first donor substrate on which the organic film evaporation has been completed on the element substrate 220 Organic matter remaining on 200; a drying device (not shown) for drying the cleaned first donor substrate 200.

Among them, the conductive films are formed on the first and second donor substrates, so that Joule heat can be generated in the subsequent vapor deposition process. For example, the conductive film is formed of metal or metal alloy, and its shape is the same as the shape of the organic film pattern deposited on the element substrate. This conductive film is used to apply an electric field to the electrode to generate Joule heat, and evaporate the organic film by the generated Joule heat, thereby vapor-depositing the organic film onto the second donor substrate or the element substrate.

Referring specifically to FIG. 2, for example, in order to be able to reduce process time and process cost, the coating device 110 coats an organic film by using a wet process such as a shower head, a rotating nozzle, or the like. The coating device 110 of this embodiment includes a coating chamber 112, a table 116, at least one spray head 118, and an organic substance supply device 120.

The coating chamber 112 forms an internal space within which The first donor substrate 200 is coated with an organic film. One side of the coating chamber 112 is provided with an openable door 114, and the other side is provided with a first door 132 opened and closed between the load lock chambers 130. Through the door 114, the first donor substrate 200 is put into the coating chamber 112. A stage 116 on which the first donor substrate 200 is placed is arranged in the lower part of the coating chamber 112, and a shower head 118 is arranged in the upper part. In order to coat the organic film on the first donor substrate 200, the coating chamber 112 is sealed by the door 114 and the first door 132 of the load lock chamber 130, and a nitrogen atmosphere is formed inside.

The table 116 is used to place the first donor substrate 200 thrown into the coating chamber 112. For example, the table 116 is composed of a vacuum chuck, an electrostatic chuck, or a granite flat plate, etc., to mount and fix the large first donor substrate 200.

The spray head 118 is formed as a spray type, and sprays organic substances in order to apply organic substances to the surface of the first donor substrate 200 placed on the table 116 inside the coating chamber 112. According to the size of the first donor substrate 200, at least one shower head 118 is provided on the upper portion of the first donor substrate 200.

In addition, the organic substance supply device 120 supplies the organic substance to the head 118. In addition, the coating device 110 may be provided with a recovery device (not shown) for recovering the organic substances remaining after the first donor substrate 200 is coated with the organic film to the organic substance supply device 120. For the convenience of description, a spraying device using a spray head has been described. However, it may be a coating device based on a known wet process such as spin coating.

After applying the first donor substrate 200 into the coating chamber 112 and placing it on the table 116, this coating device 110 supplies organic matter from the organic matter supply device 120 to the shower head 118, and sprays the organic matter from the shower head 118 to the first A donor substrate 200. The ejected organic matter is deposited on the first donor substrate 200 To coat the organic film. At this time, the thickness of the organic film coated on the first donor substrate 200 only needs to be sufficient to cover the conductive film formed on the first donor substrate 200. This is because, in the vapor deposition apparatus 150 in the subsequent process, by controlling the conditions of the electric field applied to the electrodes of the first donor substrate 200, the organic vapor deposited on the element substrate (220 in FIG. 4) can be The thickness of the film is adjusted. The first donor substrate 200 coated with the organic film in this way is transferred into the load lock chamber 130 by the transfer device.

As shown in FIG. 3, the loading interlocking chamber 130 includes: a first door 132 provided on one side for receiving the first donor substrate 200 from the coating device 110; and a second door 134 provided on the other side for The first donor substrate 200 is put into the vapor deposition apparatus 150 or discharged from the vapor deposition apparatus 150. Thus, the load lock chamber 130 puts the first donor substrate 200 coated with an organic film into the vapor deposition apparatus 150 or discharges the first donor substrate 200 that vapor-deposits organic substances onto the second donor substrate 210 .

3 to 5, the vapor deposition apparatus 150 uses the first and second donor substrates to vapor-deposit an organic film on the element substrate. The vapor deposition apparatus 150 of this embodiment includes a vapor deposition chamber 152, a fixed table 154, a fixed portion 156, a driving portion 158, and a power supply device 160.

The vapor deposition chamber 152 forms an internal space in which the organic film is vapor-deposited from the first donor substrate 200 thrown into the load interlock chamber 130 onto the second donor substrate 210 using Joule heating. In the Joule heating method, the organic film is vapor-deposited from the second donor substrate 210 onto the element substrate 220. A second door 134 of the load lock chamber 130 is provided on one side of the vapor deposition chamber 152 for loading and discharging the first donor substrate 200, and a door 162 is provided on the other side for loading And the element substrate 220 is discharged.

In addition, the lower part is provided with a fixing table 154 for fixing the second donor substrate 210 so that the second donor substrate 210 is fixed and placed on the fixing table 154.

On the other hand, when the first donor substrate 200 is put in, the second door 134 and the door 162 of the interlocking chamber 130 are loaded to form the internal space of the vapor deposition chamber 152 into a vacuum atmosphere. In the vapor deposition chamber 152, the second donor substrate 210 is fixed and placed on the lower fixing table 154, and the upper fixed portion 156 to which the first donor substrate 200 is fixed is raised and lowered so that the first donor substrate 200 and the second donor substrate are arranged so as to be separated by a certain minimum distance d. The vapor deposition chamber 152 is sealed by the second door 134 and the door 162.

The fixing table 154 is provided at the lower part of the vapor deposition chamber 152 for placing and fixing the second donor substrate 210. At this time, the second donor substrate 210 serves as a medium for vapor-depositing the organic film coated on the first donor substrate 200 onto the element substrate 220 when performing the organic film deposition step using Joule heating according to the present invention Function.

The fixing portion 156 is provided at the upper part of the vapor deposition chamber 152, and has a shape in which a part of the lower end is bent so as to fix the first donor substrate 200 thrown in from the load interlocking chamber 130, and to drive the organic film vapor deposition process, by driving The portion 158 is raised and lowered to maintain a minimum distance between the first donor substrate 200 and the second donor substrate 210.

At this time, the fixing portion 156 is not limited to the shape in which a part of the lower end is bent to carry the first donor substrate 200 as described above, as long as the first donor substrate 200 can be fixed and lifted, it is not limited to a specific shape ,and also A chuck such as an electrostatic chuck may be used to fix the first donor substrate 200 from above.

When the process of vapor-depositing the organic film from the first donor substrate 200 onto the second donor substrate 210 is completed, the first donor substrate 200 rises, and then is discharged from the vapor deposition chamber 152 through the second door 134 and passes through the first A door 132 is thrown into the coating device 112 again.

After the first donor substrate 200 is discharged from the vapor deposition chamber 152, the element substrate 220 passes through the conveying device 170, is thrown into the vapor deposition chamber 152 from the door 162 of the vapor deposition chamber 152, and then is lowered by the conveying device 170, so that The organic film-coated second donor substrate 210 is kept at a minimum distance d. As the transport device 170, a conventional transport device such as a robot arm can be used.

At this time, in order to accurately maintain the minimum distance d between the second donor substrate 210 and the element substrate 220, as shown in FIG. 6, a side support portion 164 may be provided on the side of the vapor deposition chamber 152.

In addition, the large-area element substrate 220 may sag at the center of the substrate. Therefore, as shown in FIG. 7, a lower portion of the vapor deposition chamber 152 fixed to the upper side of the side surface of the lower table 154 and a terminal The lower support portion 166 of which a part is bent. At this time, more than one central support portion 168 may be provided on the upper portion of the fixed table 154. As shown in FIGS. 8a and 8b, the central support portion 168 is provided outside the area where the second donor substrate 210 is located, and may be configured as a protruding portion having a continuous shape, or may be provided in a plurality of spaced apart from each other in the form of tweezers .

The driving unit 158 is coupled to the upper part of the vapor deposition chamber 152 and moves the fixing unit 156 to which the first donor substrate is fixed and the transport device 170 for transporting the element substrate 220 up and down under the control of the control unit 102.

In addition, the power supply device 160 supplies power to apply an electric field to the electrodes of the first donor substrate 200 or the second donor substrate 210. For this, the power supply device 160 contacts the conductive films formed on the first donor substrate 200 and the second donor substrate 210 to apply an electric field. At this time, the electric field application conditions can be determined according to various factors such as the resistance, length, thickness, and the like of the conductive film. The current applied in this embodiment may be direct current or alternating current, the applied electric field may be about 1 kW/cm ² to 1000 kW/cm ² , and the time for applying the electric field once may be within about 1/1000000 to 100 seconds.

As shown in FIG. 3, this vapor deposition apparatus 150 first puts the first donor substrate 200 coated with the organic film from the load interlock chamber 130 into the vapor deposition chamber 152, and then sets the first donor substrate 200 It is fixed on the fixing part 156. The vapor deposition apparatus 150 lowers the first donor substrate 200 fixed on the fixing portion 156 through the driving portion 158 to approach or move away from the second donor substrate 210 on the fixing table 154 by a certain distance, and then the power supply device 160 The first donor substrate 200 supplies power, thereby applying an electric field to the first donor substrate 200. As a result, the organic film coated on the first donor substrate 200 is subjected to Joule heating, so that the organic film is vapor-deposited on the second donor substrate 210. That is, when an electric field is applied to the first donor substrate 200, Joule heat is generated on the conductive film formed on the first donor substrate 200, and the generated Joule heat is transferred to the organic film formed on the first donor substrate 200 The organic film formed on the portion where the conductive film is present is evaporated and transferred to the second donor substrate 210 by the transferred Joule heat, thereby vapor-depositing the organic film on the second donor substrate 210.

In addition, after vapor-depositing the organic film on the second donor substrate 210, the vapor deposition device 150 raises the fixing portion 156 by the driving portion 158 so that the second donor substrate The plate 210 is separated from the first donor substrate 200, and then the first donor substrate 200 is discharged to the load interlock chamber 130.

After this process is completed, as shown in the vapor deposition apparatus 150 shown in FIG. 5, the conveying apparatus 170 puts the element substrate 220 into the vapor deposition chamber 152 through the door 162, and then the element substrate 220 is lowered to maintain a certain distance from the second donor substrate 210 .

In addition, the vapor deposition device 150 is powered by the power supply device 160 to the second donor substrate 210 to apply an electric field to the second donor substrate 210, thereby transferring the organic film deposited on the second donor substrate 210 to the element On the substrate 220, an organic film is vapor-deposited on the element substrate 220. Similarly, when an electric field is applied to the second donor substrate 210, Joule heat is generated on the conductive film formed on the second donor substrate 210, and the generated Joule heat is transferred to the organic layer formed on the second donor substrate 210. Film, thereby evaporating the organic film formed on the portion of the second donor substrate 210 where the conductive film exists, so that the organic film is vapor-deposited on the element substrate 220, thereby completing the organic film evaporation of one element substrate 220 by Joule heating Plating process.

Next, the vapor deposition apparatus 150 raises the element substrate 220 with the organic film deposited thereon by the transfer device 170, and then discharges it from the vapor deposition chamber 152, and puts it into another first donor substrate 200 through the load lock chamber 130, thereby repeating Process the above-mentioned organic film vapor deposition step. In addition, the first donor substrate 200 discharged from the vapor deposition device 150 after completing the organic film vapor deposition step is cleaned and dried by the cleaning device and the drying device.

The structure described in this embodiment is that, in the vapor deposition apparatus 150, the first donor substrate 200 or the element substrate 220 is fixed by the fixing portion 156 in the upper part of the vapor deposition chamber 152 or the transfer device 170, and the second donor Substrate 210 is disposed on the fixing table 155, however, as long as the first donor substrate 200 or the element substrate 220 is opposed to the second donor substrate 210, it can be modified and deformed into various forms.

In addition, in this embodiment, the first donor substrate 200 or the element substrate 220 is driven to move up and down to approach the second donor substrate, however, as another example, the second donor substrate 210 is moved to be able to approach the first donor substrate The bulk substrate 200 or the element substrate 220 is also obvious.

As described above, the continuous manufacturing system 100 of the organic light emitting element of the present invention uses the first donor substrate 200 and the second donor substrate 210 to deposit an organic film onto the element substrate 220 by the Joule heating method, and repeatedly By performing such treatment, the loss of organic matter can be reduced, and the process time can be shortened.

Next, FIG. 9 is a flowchart showing an organic film vapor deposition sequence of a continuous manufacturing system for organic light-emitting elements using Joule heating according to the present invention. This procedure is an organic film vapor deposition step by Joule heating that is processed by the continuous manufacturing system 100 of organic light-emitting elements, and is processed by the control unit 102 of the continuous manufacturing system 100 of organic light-emitting elements.

Referring to FIG. 9, in the continuous manufacturing system 100 of an organic light emitting element of the present invention, first in step S300, a coating device 110 coats an organic film on a first donor substrate 200 on which a conductive film is formed. In this embodiment, the organic material is supplied to the first donor substrate 200 through the shower head 118 to coat the organic film. The first donor substrate 200 coated with the organic film is transferred into the load lock chamber 130 by the transfer device.

In step S310, the organic film-coated first The donor substrate 200 is put into the vapor deposition apparatus 150. The thrown-in first donor substrate 200 is fixed and arranged on the fixing portion 156 so as to face the second donor substrate 210 placed on the fixing table 154. Then, the driving portion 158 moves the fixing portion 156 in the direction of the fixing table 154 so that the first donor substrate 200 approaches the second donor substrate 210.

In step S320, the power supply device 160 supplies power to the first donor substrate 200, thereby applying an electric field to the conductive film of the first donor substrate 200. In step S330, the organic film coated on the first donor substrate 200 to which the electric field is applied is transferred onto the second donor substrate 210, thereby vapor-depositing the organic film. In step S340, after the organic film is vapor-deposited on the second donor substrate 210, the first donor substrate is transferred to the load lock chamber and discharged.

In step S350, the transport device 170 is used to put the element substrate 220 into the vapor deposition device 150. At this time, the input element substrate 220 is fixed and arranged so as to face the second donor substrate 210 mounted on the fixing table 154. Then, the driving unit 158 is controlled to move the conveyance device 170 in the direction of the fixed table 154, so that the element substrate 220 approaches the second donor substrate 210.

In step S360, the power supply device 160 supplies power to the second donor substrate 210 to apply an electric field to the conductive film of the second donor substrate 210. In step S370, the organic film vapor-deposited on the second donor substrate 210 to which the electric field is applied is transferred onto the element substrate 220, thereby vapor-depositing the organic film. Next, in step S380, the element substrate 220 having the organic film deposited thereon is discharged from the vapor deposition device 150.

In addition, another first donor substrate 200 is introduced into the load lock chamber 130 to repeat the above-described organic film vapor deposition step S300-S380.

10 is a plan configuration diagram showing a schematic structure of a continuous manufacturing system for an organic light-emitting element using Joule heating according to another embodiment of the present invention, and FIG. 11 is a structure showing a coating device shown in FIG. 10 12 is a cross-sectional view showing the structure of the vapor deposition apparatus shown in FIG. 10, and FIG. 13 is a view showing that the fixing portion of the vapor deposition apparatus shown in FIG. 12 is lowered to make the second donor substrate and the first The donor substrate is arranged at a certain distance and is subjected to vapor deposition in a cross-sectional view. FIG. 14 is a cross-sectional view showing the structure in which the element substrate in the vapor deposition device shown in FIG. 13 is thrown into the vapor deposition chamber by the transfer device. 15 is a cross-sectional view showing a structure in which the second donor substrate is lowered and arranged at a certain distance from the element substrate to perform secondary vapor deposition in the vapor deposition apparatus shown in FIG. 14.

The embodiments of the present invention will be described in detail below with reference to FIGS. 10 to 15.

Referring to FIG. 10, the continuous manufacturing system 400 of the organic light emitting element of the present invention may include a coating device 110 and an evaporation device 150, the coating device 110 includes a first coating device 110-1 and a second coating device 110 -2, the third coating device 110-3, the fourth coating device 110-4, and the fifth coating device 110-5.

For example, the first coating device 110-1 is a device for coating the first organic substance 1-1 on the donor substrate DS1 for the first organic substance, and the second coating device 110-2 is applied for the second organic substance An apparatus for coating the second organic substance 1-2 on the bulk substrate DS1, the third coating apparatus 110-3 is an apparatus for coating the third organic substance 1-3 on the donor substrate DS1 for the third organic substance, and the fourth coating The coating device 110-4 is a device for coating the fourth organic substance 1-4 on the fourth organic substance donor substrate DS1, and the fifth coating device 110-5 is a fifth organic substance donor substrate DS1 is a device for coating the fifth organic matter 1-5.

In addition, for example, the first coating device 110-1 may include: a first lateral coating chamber 110-1a, which is disposed in the first width direction based on the length direction of the vapor deposition device 150; And the second lateral coating chamber 110-1b, which is provided in the second width direction based on the longitudinal direction of the vapor deposition device 150 as a reference.

Thus, according to the relatively long time required for coating in the coating device 110 and the relatively short time required for vapor deposition in the vapor deposition device 150, the coated donor substrate is received from two directions, This can improve productivity and shorten the process time (TACT time).

In addition, for example, the continuous manufacturing system 400 of the organic light emitting element of the present invention may further include: a loading device LD for loading the element substrate 220 to the first position of the vapor deposition device; and an unloading device UD for The element substrate 220 is unloaded from the vapor deposition device; and the control unit 102 can be applied to a total of ten of the coating device 110, the vapor deposition device 150, the loading device LD, and the unloading device UD control signal.

However, this kind of coating device 110 is not limited to five kinds of coating devices in total ten, and may also include n kinds of coating devices, that is, those for coating the nth organic substance on the nth organic substance donor substrate The nth coating device (n is a positive integer).

11 is a cross-sectional view showing the structure of the coating device shown in FIG. 10, and FIG. 12 is a cross-sectional view showing the structure of the vapor deposition device shown in FIG.

As shown in FIG. 12, the vapor deposition apparatus 150 may be connected to the n-th coating apparatus, and apply an electric field to the n-th organic substance donor substrate, so that The element substrate 220 transferred to the nth position is vapor-deposited. The continuous manufacturing system 400 of the organic light emitting element of the present invention may further include an element substrate transfer device 170 for transferring the element substrate 220 from the nth position N+1 position.

To give a more specific example, the n may include any one or more of 1 to 5, the first coating device 110-1 may include a HIL coating chamber for spraying HIL organic matter (HIL), and the second The coating apparatus 110-2 may include an HTL coating chamber for spraying HTL organic matter (HTL), and the third coating apparatus 110-3 may include an EML coating chamber for spraying EML organic matter (EML), the The fourth coating device 110-4 may include an ETL coating chamber for spraying ETL organic matter (ETL), and the fifth coating device 110-5 may include an EIL coating chamber for spraying EIL organic matter (EIL). Wherein, the HIL organic substance (HIL), the HTL organic substance (HTL), the EML organic substance (EML), the ETL organic substance (ETL) and the EIL organic substance (EIL) are organic substances constituting an organic light-emitting element, and may With any one or more of these combinations, each technical idea is well known, and therefore detailed description is omitted.

21 is a cross-sectional view showing an organic light-emitting element manufactured by a continuous continuous manufacturing system of an organic light-emitting element according to an embodiment of the present invention.

Therefore, as shown in FIG. 21, the organic film device 1000 manufactured by the continuous manufacturing system 500 of an organic light-emitting element according to an embodiment of the present invention can start from the bottom according to the HIL organic substance (HIL) and the HTL organic substance ( HTL), the EML organic matter (EML), the ETL organic matter (ETL) And the sequential deposition of the EIL organic matter (EIL), whereby an organic light-emitting effect can be performed.

In addition, for example, only the EML organic substance (EML) uses two donor substrates, and the remaining organic substances can be vapor-deposited using one donor substrate, in this case, in the EML coating chamber, in the EML The first donor substrate 200 for organic matter is coated with EML organic matter (EML), and the vapor deposition apparatus 150 can apply an electric field to the first donor substrate 200 for EML organic matter conveyed by the donor substrate conveying device 180, thereby applying The EML organic substance (EML) is vapor-deposited onto the second donor substrate 210 for EML organic substance, and an electric field is applied to the second donor substrate 210 for EML organic substance, thereby vapor-depositing the EML organic substance (EML) to the On the element substrate 220.

FIG. 13 is a cross-sectional view showing a structure in which the second donor substrate and the first donor substrate are arranged at a certain distance and the first vapor deposition is performed by lowering the fixing portion in the vapor deposition apparatus shown in FIG. 12. 14 is a cross-sectional view showing a structure in which the element substrate is introduced into the vapor deposition chamber by the transfer device in the vapor deposition device shown in FIG. 13. 15 is a cross-sectional view showing a structure in which the second donor substrate is lowered to be arranged at a certain distance from the element substrate and subjected to the second vapor deposition in the vapor deposition apparatus shown in FIG. 14.

As shown in FIGS. 11 to 15, the first donor substrate 200 for EML organic matter may be provided in the EML coating chamber in an upward direction, and can be horizontally transported by the donor substrate transport device 180. The second donor substrate 210 for EML organic matter may be disposed on the first height H1 in a downward manner, and can be lowered to the second height H2 by the driving portion 158 so as to be able to interact with water The EML organic matter transported horizontally into the vapor deposition apparatus 150 is separated by a first interval d by the first donor substrate 200, and the element substrate 220 may be provided in the second application for the EML organic matter in an upward manner Below the body substrate 210.

16 is an enlarged cross-sectional view showing an example of the first donor substrate in the vapor deposition apparatus shown in FIG. 12. 17 is an enlarged cross-sectional view showing an example of a second donor substrate in the vapor deposition apparatus shown in FIG. 14.

Wherein, as shown in FIG. 16, the first donor substrate 200 for EML organic matter may include an unpatterned quadrilateral thin film layer on which the pattern is not formed on the electric heating layer 203, and as shown in the enlarged portion of FIG. 17, the The second donor substrate 210 for the EML organic substance may include a patterned quadrilateral thin film layer in which a pattern is formed on the electrothermal layer 203 or a partition layer W with a pattern is formed on the electrothermal layer 203.

In addition, all organic substances can be vapor-deposited using two donor substrates, for example, the first donor substrate DS1 for organic substances can include: a first donor substrate 200, which is provided in the first coating device 110 In -1, the first organic substance 1-1 is coated on the first donor substrate 200 through one-time solution coating; the second donor substrate 210 is provided in the vapor deposition apparatus 150 when When an electric field is applied to the first donor substrate 200, the first organic substance 1-1 coated with the primary solution on the first donor substrate 200 is secondarily evaporated onto the second donor substrate 210.

Therefore, as shown in FIGS. 11 to 15, the first coating device 110-1 can apply the first liquid formed by mixing the volatile medium and the first organic matter 1-1 in a planar shape to the first liquid On the first donor substrate 200 for organic matter, the vapor deposition device 150 can By applying an electric field to the first donor substrate 200 for the first organic substance, the first organic substance 1-1 can be vapor-deposited onto the second donor substrate 210 for the first organic substance, and the second The donor substrate 210 applies an electric field, so that the first organic substance 1-1 can be vapor-deposited onto the element substrate 220.

In addition, the second coating device 110-2 may apply the first liquid body formed by mixing the volatile medium and the second organic matter 1-2 to the first donor substrate 200 for the second organic matter in a planar shape As described above, the vapor deposition device 150 can apply an electric field to the first donor substrate 200 for the second organic substance transferred by the donor substrate transfer device 180, so that the second organic substance 1-2 can be vapor-deposited to the second The second donor substrate 210 for organic matter is applied with an electric field to the second donor substrate 210 for second organic matter, so that the second organic matter 1-2 can be vapor-deposited onto the first organic matter of the element substrate 220 1-1.

In addition, in the continuous manufacturing system 400 of the organic light emitting element of the present invention, the first donor substrate 200 and the second donor are provided between the coating device 110, the load lock chamber 130, and the vapor deposition device 150. A conveying device (not shown) of the substrate 210. As the conveying device, a conveying device using a roller, a conveyor belt, a conveying chain, a conveying line, or the like, a conveying arm, a conveying robot, or the like can be used.

Referring specifically to FIG. 11, in order to reduce process time and process cost, for example, the coating device 110 includes: a spray device having at least one spray head 118 a and an organic matter supply device 120; a coating chamber 112; a curing device 119; and a donor substrate载装置117。 Transport device 117.

For example, the first coating device 110-1 may include: a first coating chamber 112; and a spray device 118a provided in the first coating chamber 112 for Spraying the first organic substance 1-1 on the first organic substance donor substrate DS1; a curing device 119, which is coated on the first organic substance donor substrate DS1 through a baking sheet or a light irradiation device The first organic substance 1-1 is cured; and a donor substrate conveying device 180 is used to convey the first organic substance donor substrate DS1 to the vapor deposition device 150.

Wherein, the first coating chamber 112 may be a load-lock chamber and a spray chamber capable of forming a vacuum environment after spraying.

In addition, the spray device 118a may be a vacuum spray device capable of spraying the first organic substance 1-1 in a vacuum environment.

The donor substrate transfer device 117 may be provided with a retractable multi-stage transfer arm. However, it is not necessarily limited to this, and a conveying device using a roller, a conveyor belt, a conveying chain, a conveying line, etc., a conveying arm, a conveying robot, or the like may be used.

The coating chamber 112 forms an internal space for coating the organic film 1 on the first donor substrate 200 thrown inside. One side of the coating chamber 112 is provided with an openable door 114, and the other side is provided with a first door 132 opened and closed between the load lock chambers 130. Through the door 114, the first donor substrate 200 is put into the coating chamber 112. The lower portion of the coating chamber 112 is provided with a donor substrate transfer device 117 on which the first donor substrate 200 is placed, and the upper portion is provided with a shower head 118 a that can be moved back and forth by a forward and backward drive device. In order to coat the organic film 1 on the first donor substrate 200, the coating chamber 112 is sealed by the door 114 and the first door 132 of the load lock chamber 130, and a nitrogen atmosphere is formed inside.

The donor substrate transfer device 117 may be provided with a mounting table for placing the first donor substrate 200 put into the coating chamber 112. For example, this placement platform It is composed of a vacuum chuck, an electrostatic chuck, a granite flat plate, or the like, so as to mount and fix the large first donor substrate 200.

The shower head 118a is formed as a spray type, and in order to coat the organic film 1 on the surface of the first donor substrate 200 placed on the table in the coating chamber 112, organic substances are sprayed. In addition to the spray nozzle, the nozzle 118a may also be an inkjet nozzle.

In addition, the organic substance supply device 120 supplies the organic substance to the head 118a. In addition, the coating device 110 may be provided with a recovery device (not shown) for recovering the organic substances remaining after the first donor substrate 200 is coated with the organic film to the organic substance supply device 120. For the convenience of description, a spraying device using a spray head has been described. However, it may be a coating device based on a known wet process such as spin coating.

In addition, the curing device 119 is used to volatilize the volatile medium from the mixture of the mixed organic substance and the volatile medium, thereby curing the organic film 1 on the first donor substrate 200, and a baking plate or a light irradiation device may be used.

After applying the first donor substrate 200 to the coating chamber 112, the coating device 110 supplies organic matter to the shower head 118 a from the organic material supply device 120, and ejects organic matter from the shower head 118 a to the first donor substrate 200. The ejected organic substance is deposited on the first donor substrate 200, thereby coating the organic film 1. Next, the first donor substrate 200 coated with the organic film 1 passes through the donor substrate transfer device 117, passes through the load lock chamber 130 capable of achieving a vacuum environment, and is then transferred to the vapor deposition device 150.

12 to 15, the vapor deposition apparatus 150 uses the first donor substrate 200 and the second donor substrate 210 to vapor-deposit the organic film 1 on the element substrate 220. True The vapor deposition apparatus 150 in the embodiment includes a vapor deposition chamber 152, a fixed table 154, a fixed portion 156, a driving portion 158, a first power supply device 160-1, and a second power supply device 160-2.

The first power supply device 160-1 is a device provided on one side of the evaporation chamber 152 and capable of applying an electric field to the first donor substrate 200, and the second power supply device 160-2 is provided A device capable of applying an electric field to the second donor substrate 210 on the other side of the vapor deposition chamber 152.

The first power supply device 160-1 and the second power supply device 160-2 may be combined into one power supply device.

As shown in FIG. 12, the vapor deposition chamber 152 forms an internal space in which the organic film 1 is vapor-deposited from the first donor substrate 200 into the second interlock chamber 130 to the second by Joule heating. On the donor substrate 210, and using the Joule heating method, the organic film 1 is vapor-deposited from the second donor substrate 210 onto the element substrate 220. As shown in FIG. 10, the vapor deposition chamber 152 may be a continuous rectangular chamber, which A loading port is formed at the front end, and a discharge port is formed at the rear end, extending in the longitudinal direction so that one side is connected to the plurality of coating devices 110 respectively, and a partition or door panel G having a communication port is provided inside.

A second door 134 of the loading interlock chamber 130 for loading and discharging the first donor substrate 200 is disposed on one side of the vapor deposition chamber 152, and a loading port for loading the component substrate 220 and a discharging component are provided on the other side The discharge port of the substrate 220.

In addition, the upper portion is provided with a fixing portion 156 for fixing the second donor substrate 210 so as to fix the first donor substrate 200 and place it on the ram L.

On the other hand, after loading the first donor substrate 200, the interlocking chamber is loaded The second door 134 and the door 162 of 130 form the internal space of the vapor deposition chamber 152 into a vacuum environment. As shown in FIG. 13, in the vapor deposition chamber 152, the first donor substrate 200 is electrically connected to the power supply device 160, and at the upper portion, the fixing portion 156 to which the second donor substrate 210 is fixed is raised and lowered so that the first The second donor substrate 210 and the first donor substrate 200 are separated by a minimum prescribed distance d, so that at the lower portion, the first donor substrate 200 is placed on the ejector L and the disk P that can be raised and lowered by the actuating mechanism A Electrical connection. The vapor deposition chamber 152 is sealed by the second door 134 and the door 162.

The first donor substrate 200 is placed and fixed on the ejector pin L located at the lower part of the vapor deposition chamber 152. At this time, the second donor substrate 210 performs the role of vapor-depositing the organic film 1 coated on the first donor substrate 200 onto the element substrate 220 when performing the organic film deposition step using Joule heating according to the present invention The function of the medium.

The fixing portion 156 is provided in the upper part of the vapor deposition chamber 152 and is used to fix the second donor substrate 210, and is detachably assembled with the second donor substrate 210 by bolts or screws, etc., so that the second donor substrate 210 The body substrate 210 can be electrically connected to the power supply device 160 via the disk P.

In addition, in order to handle the organic film vapor deposition step, the fixing portion 156 is raised and lowered by the driving portion 158 so as to maintain a minimum certain distance between the first donor substrate 200 and the second donor substrate 210.

At this time, the fixing portion 156 may use a chuck such as an electrostatic chuck, a vacuum chuck, or a magnet to fix the second donor substrate 210 from above.

Next, as shown in FIG. 13, after the step of vapor-depositing the organic film from the first donor substrate 200 onto the second donor substrate 210 is completed, the first donor substrate 200 It is discharged from the vapor deposition chamber 152 through the second door 134, and is put into the coating device 112 again through the first door 132.

Next, as shown in FIG. 14, after the first donor substrate 200 is discharged from the vapor deposition chamber 152, the element substrate 220 can be introduced into the vapor deposition chamber 152 from the gate 162 of the vapor deposition chamber 152 through the element substrate conveying device 170.

Here, regarding the component substrate conveying device 170, a conveying device using a roller is shown in FIG. 14, however, it is not necessarily limited to this, and various conveying devices using a roller, a conveyor belt, a conveyor chain or a conveyor line, etc., can be used. Transport arm, transport robot, etc. At the same time, the device substrate transport device 170 may also include a transfer vehicle or a tray that houses the component substrate 220.

Next, as shown in FIG. 15, the element substrate 220 and the second donor substrate 210 on which the organic film 1 is vapor-deposited are kept at a certain minimum distance d. At this time, the driving unit 158 is coupled to the upper part of the vapor deposition chamber 152, and the fixing unit 156 to which the second donor substrate 210 is fixed is moved up and down under the control of the control unit 102.

Next, the power supply device 160 supplies power to the second donor substrate 210 to apply an electric field to the second donor substrate 210, thereby transferring the organic film deposited on the second donor substrate 210 to the element substrate 220. Thus, an organic film is evaporated on the element substrate 220.

The structure described in this embodiment is that, in the vapor deposition apparatus 150, the first donor substrate 200 or the element substrate 220 is arranged in the lower part of the vapor deposition chamber 152, and the second donor substrate 210 is arranged in the upper part. The first donor substrate 200 or the element substrate 220 and the second donor substrate 210 are opposed to each other, and can be modified and deformed into various forms.

In addition, in this embodiment, the second donor substrate 210 is driven up and down Moving to approach the first donor substrate 200 or the element substrate 220, however, as another example, it is also obvious to move the first donor substrate 200 or the element substrate 220 to make it accessible.

As described above, the continuous manufacturing systems 100 and 300 of the organic light-emitting element of the present invention use the first donor substrate 200 and the second donor substrate 210 to deposit the organic film onto the element substrate 220 by the Joule heating method. In addition, such processing is repeated to reduce the loss of organic matter and shorten the process time.

16 is an enlarged cross-sectional view showing an example of the first donor substrate in the vapor deposition apparatus shown in FIG. 12.

As shown in FIG. 16, the above first donor substrate 200 for vapor-depositing the organic film 1 may be formed with: a first base layer 201; and a first electrothermal layer 203 formed on the first base layer 201, The first organic substance 1-1 is applied onto the first electrothermal layer 203 through a solution coating; and a first conductive layer 202 is formed on the first base layer 201 and is in contact with the first electrothermal layer 203 It is electrically connected to apply an electric field to the first electrothermal layer 203.

For example, the first conductive layer 202 and the first electrothermal layer 203 are both a type of conductive film. The first conductive layer 202 may contain copper, aluminum, platinum, gold, etc., which have excellent conductivity, so as to uniformly disperse and transfer the current To the role of the first electric heating layer 203 or the role of the terminal.

In addition, for example, the first electrothermal layer 203 may contain nickel, chromium, carbon, quartz, and other components having excellent electrothermal properties, thereby playing a role of receiving current from the first conductive layer 202 and converting it into resistance heat energy.

Thereby, the first electric heating layer 203 can be instantly heated by Joule heat, thereby The coated organic film 1 is vapor-deposited onto the second donor substrate 210 in a planar shape.

17 is an enlarged cross-sectional view showing an example of a second donor substrate in the vapor deposition apparatus shown in FIG. 14.

As shown in FIG. 17, the above second donor substrate 210 for vapor-depositing the organic film 1 may be formed with: a second base layer 211; and a second electrothermal layer 213 formed on the second base layer 211, Corresponding to the first electrothermal layer 203, when an electric field is applied to the first donor substrate 200, the first organic substance 1-1 coated on the first donor substrate 200 with a primary solution is separated by two Sub-evaporation onto the second electric heating layer 213; and a second conductive layer 212, electrically connected to the second electric heating layer 213, so as to apply an electric field to the second electric heating layer 213.

For example, the second conductive layer 212 and the second electrothermal layer 213 are both a type of conductive film. The second conductive layer 212 may contain copper, aluminum, platinum, gold, etc., which have excellent conductivity, so that the current is uniformly dispersed and transmitted To the role of the second electrothermal layer 213 or the role of the terminal.

In addition, for example, the second electrothermal layer 213 may contain nickel, chromium, carbon, quartz, and other components having excellent electrothermal properties, thereby playing a role of receiving current from the second conductive layer 212 and converting it into resistance heat energy.

Therefore, the second electrothermal layer 213 can be instantaneously heated by Joule heat, whereby the organic film 1 once vapor-deposited can be secondarily vapor-deposited on the element substrate 220 in a planar shape.

18 is a plan layout diagram showing a schematic configuration of a continuous manufacturing system for an organic light-emitting element using Joule heating according to still another embodiment of the present invention.

As shown in FIG. 18, another embodiment of the present invention The continuous manufacturing system 500 for a hot organic light emitting element may further include: a first electrode forming device 191 disposed between the loading device LD and the vapor deposition device 150 for forming a first element on the element substrate 220 An electrode layer P1; a second electrode forming device 192, disposed between the vapor deposition device 150 and the unloading device UD, for forming the second electrode layer P2 on the element substrate 220; and encapsulation The device 193 is provided between the second electrode forming device 192 and the unloading device UD, and is used to encapsulate the element substrate 220 with the encapsulating material C.

On the other hand, although not shown, if necessary, a reversing device capable of reversing the element substrate 220 or the donor substrates 200 and 210 may be provided between the devices.

Therefore, as shown in FIG. 21, on the element substrate 220 of the organic film device 1000 manufactured by the continuous manufacturing system 500 or method of the organic light emitting element according to an embodiment of the present invention, the first electrode Layer P1, the HIL organic substance (HIL), the HTL organic substance (HTL), the EML organic substance (EML), the ETL organic substance (ETL), the EIL organic substance (EIL), the second electrode layer P2 Are deposited in order and can be manufactured to be encapsulated by the encapsulating material C so as to protect it from external moisture or foreign matter, thereby performing an organic light-emitting effect.

Various organic films such as various organic films, organic light-emitting elements, and organic light-emitting panels manufactured by the continuous manufacturing system 500 or method of organic light-emitting elements according to an embodiment of the present invention are suitable for the organic film device 1000 described above.

19 is a cross-sectional view showing another example of the load lock chamber of FIG. 12.

For example, a load lock chamber 130 may be provided between the vapor deposition device 150 and the first coating device 110-1, or between the loading device LD and the vapor deposition device 150.

As such a load interlocking chamber 130, a very diverse type of load interlocking chamber may be used. To give a specific example, as shown in FIG. 19, the load interlocking chamber 130 may be a vertical load type load interlocking chamber, which can A plurality of the element substrates 220 are loaded on the tray T that can be raised and lowered by the driving unit 131 in the vertical direction. Therefore, such a load lock chamber 130 can be used to sequentially form a vacuum environment, productivity can be improved, and process time can be shortened.

FIG. 20 is a cross-sectional view showing another example of the vapor deposition apparatus of FIG. 12.

As shown in FIG. 20, any one or more of the first coating device 110-1 and the vapor deposition device 150 may be provided with an alignment device AL for aligning the first The donor substrate 200 or the element substrate 220.

For example, as such an alignment device, various types of alignment devices such as various alignment bars, alignment tables, alignment protrusions, alignment grooves, or multi-axis alignment devices capable of multi-axis alignment can be used.

22 is a sequence diagram showing a continuous manufacturing method of an organic light-emitting element according to another embodiment of the present invention.

As shown in FIGS. 10 to 22, the continuous manufacturing method of an organic light-emitting element according to another embodiment of the present invention may include the following steps: a preparation step S400, which includes: a first coating step S401, in the first Organic substance is coated with the first organic substance 1-1 with the first donor substrate 200; the second coating step S402, the second organic substance 1-2 is coated on the second organic substance with the first donor substrate 200; the first organic substance second donor substrate preparation step S403, the first coating device 110-1 and the second The coating device 110-2 is connected, and an electric field is applied to the first donor substrate 200 for the first organic substance transported by the donor substrate transfer device 180, thereby vapor-depositing the first organic substance 1-1 to the first organic substance On the second donor substrate 210; and a second donor substrate preparation step S404 for the second organic substance, an electric field is applied to the first donor substrate 200 for the second organic substance transported by the donor substrate transfer device 180, thereby applying The second organic substance 1-2 is vapor-deposited onto the second donor substrate 210 for the second organic substance; loading step S410, the element substrate 220 is loaded to the first position of the vapor deposition device 150; the first organic substance vapor deposition step S420 , Applying an electric field to the second donor substrate 210 for the first organic substance, to vapor-deposit the first organic substance 1-1 onto the element substrate 220 at the first position; the element substrate transport step S430, The element substrate 220 is transferred from the first position to the second position; a second organic material vapor deposition step S440, an electric field is applied to the second organic material second donor substrate 210 to vaporize the second organic material Plating onto the first organic substance 1-1 of the element substrate 220 at the second position; and an unloading step S450, unloading the element substrate 220 from the vapor deposition device 150.

The present invention is not limited to the above-described continuous manufacturing system and continuous manufacturing method of the organic light-emitting element, but may include the organic light-emitting element 1000 manufactured thereby and the first donor substrate 200 and the second donor substrate including the above 210 donor substrate set.

As described above, the organic light-emitting element using Joule heating according to the present invention The structure and function of the continuous manufacturing system have been described and illustrated in detail. However, this is only an example, and various changes and modifications can be made without departing from the technical idea of the present invention.

130‧‧‧Loading interlocking room

132‧‧‧The first door

134‧‧‧Second Gate

150‧‧‧Evaporation equipment

152‧‧‧Evaporation room

154‧‧‧Station

156‧‧‧Fixed Department

158‧‧‧Drive Department

160‧‧‧Power supply device

162‧‧‧ door

200‧‧‧First donor substrate

210‧‧‧Second donor substrate

Claims (29)

A continuous manufacturing system for organic light-emitting elements, characterized by comprising: a first coating device for coating a first organic substance on a donor substrate for a first organic substance; a second coating device for a second organic substance Coating a second organic substance with a donor substrate; and an evaporation device connected to the first coating device and the second coating device to apply an electric field to the donor substrate for the first organic substance to be transported, Thereby, the first organic substance is vapor-deposited on the element substrate, and then an electric field is applied to the second organic substance donor substrate, thereby vapor-depositing the second organic substance on the element substrate, the first organic substance is used The donor substrate includes: a first donor substrate on which the first organic substance is applied by solution coating; and a second donor substrate when an electric field is applied to the first donor substrate , The first organic substance coated on the first donor substrate is vapor-deposited on the second donor substrate, and the vapor deposition device applies the first organic substance coated with the first organic substance The conductive film of the bulk substrate is applied with an electric field to generate Joule heat, thereby vapor-depositing the first organic substance coated on the first donor substrate onto the second donor substrate, and then vapor-depositing the The conductive film of the second donor substrate of the first organic substance applies an electric field to generate Joule heat, thereby The first organic substance vapor-deposited on the second donor substrate is vapor-deposited onto the element substrate. The continuous manufacturing system for an organic light-emitting element according to claim 1, further comprising an nth coating device for coating the nth organic substance on the nth organic substance donor substrate, wherein n is a positive integer greater than 2 , The vapor deposition device is connected to the n-th coating device, and an electric field is applied to the donor substrate for the n-th organic substance to be transferred, thereby vapor-depositing the element substrate transferred to the n-th position, The vapor deposition apparatus further includes an element substrate transfer device that transfers the element substrate from the nth position to the n+1th position. The continuous manufacturing system for an organic light-emitting element according to claim 2, wherein the n is 3 or 4, and the first coating device includes a hole injection layer coating chamber for spraying a hole injection layer organic substance , The second coating device includes a hole transport layer coating chamber for spraying a hole transport layer organic substance, the third coating device includes a light emitting layer coating chamber for spraying a light emitting layer organic substance, the first The four coating device includes an electron transport layer coating chamber for spraying the electron transport layer organic matter. The continuous manufacturing system of the organic light emitting element according to claim 3, wherein A fifth coating device is further included. The fifth coating device includes an electron injection layer coating chamber for spraying the organic substance of the electron injection layer. The continuous manufacturing system for an organic light-emitting element according to claim 4, wherein in the light-emitting layer coating chamber, the light-emitting layer organic substance is coated on the first donor substrate for the light-emitting layer organic substance, and the vapor deposition The device applies an electric field to the first donor substrate for the light-emitting layer organic material transported by the donor substrate transport device, thereby vapor-depositing the light-emitting layer organic material onto the second donor substrate for the light-emitting layer organic material, and emits light to the The layered organic substance is applied with an electric field by the second donor substrate, thereby vapor-depositing the light-emitting layer organic substance onto the element substrate. The continuous manufacturing system of an organic light-emitting element according to claim 5, wherein the light-emitting layer organic substance is provided in the light-emitting layer coating chamber with the first donor substrate facing upward, and is applied by the The body substrate conveying device performs horizontal conveyance, and the light-emitting layer organic substance is provided on the first height with the second donor substrate facing downward, and can be lowered to the second height by the driving section so as to be horizontally conveyed to the steam In the plating apparatus, the organic substance of the light-emitting layer is separated by a first gap from the first donor substrate, and the element substrate is provided below the second donor substrate of the organic substance of the light-emitting layer in an upward direction. The continuous manufacturing system of the organic light emitting element according to claim 5, which In the light emitting layer, the first donor substrate for the organic material includes an unpatterned quadrilateral thin film layer with no pattern formed on the electrothermal layer, and the light emitting layer organic donor for the organic material includes a pattern or electrothermal layer formed on the electrothermal layer A pattern-type quadrilateral thin film layer with a patterned partition wall layer formed thereon. The continuous manufacturing system for an organic light-emitting element according to claim 1, wherein the first coating device coats the first organic substance with the first donor substrate on the first organic substance, and the vapor deposition device passes the donor The first organic substance transported by the substrate conveying device is applied with an electric field to deposit the first organic substance on the second donor substrate for the first organic substance, and then the second organic substance is applied to the second donor substrate for the first organic substance. The donor substrate applies an electric field to vapor-deposit the first organic substance onto the element substrate. The continuous manufacturing system of an organic light-emitting element according to claim 8, wherein the vapor deposition device includes: a vapor deposition chamber in which a vacuum environment can be formed; and a first power supply device provided in the vapor deposition chamber On one side, an electric field is applied to the first donor substrate; a second power supply device, which is provided on the other side of the evaporation chamber, applies an electric field to the second donor substrate. The continuous manufacturing system of the organic light emitting element according to claim 9, which In the above, the vapor deposition chamber is a connected rectangular chamber with an inlet port formed at the front end and an outlet port formed at the rear end, extending along the length direction, so that one side is respectively connected to the first coating device and the The second coating device is connected, and a partition or door panel with a communication port is provided inside. The continuous manufacturing system for an organic light-emitting element according to claim 1, wherein the first coating device includes: a first lateral coating chamber, which is provided on the basis of the longitudinal direction of the vapor deposition device In the first width direction; in the second lateral coating chamber, which is set in the second width direction based on the longitudinal direction of the vapor deposition device. The continuous manufacturing system of an organic light-emitting element according to claim 1, further comprising: a loading device for loading the element substrate to the first position of the vapor deposition device; an unloading device for The vapor deposition device unloads the element substrate; and the control unit applies a control signal to the first coating device, the second coating device, the vapor deposition device, the loading device, and the unloading device. The continuous manufacturing system of an organic light-emitting element according to claim 12, further comprising: a first electrode forming device provided on the loading device and the steam Between the plating devices for forming the first electrode layer on the element substrate. The continuous manufacturing system for an organic light-emitting element according to claim 12, further comprising: a second electrode forming device provided between the vapor deposition device and the unloading device, for the element substrate The second electrode layer is formed. The continuous manufacturing system for an organic light-emitting element according to claim 14, further comprising: a packaging device provided between the second electrode forming device and the unloading device, for packaging the element substrate . The continuous manufacturing system of an organic light-emitting element according to claim 1, wherein the first coating device includes: a first coating chamber; a spray device provided in the first coating chamber for Spraying the first organic substance on the donor substrate for the first organic substance; a curing device that cures the first organic substance coated on the donor substrate for the first organic substance through a baking sheet or a light irradiation device; And a donor substrate transfer device for transferring the first organic substance donor substrate to the vapor deposition device. The continuous manufacturing system of an organic light emitting element according to claim 16, wherein the first coating chamber is a load lock chamber and a spray chamber capable of forming a vacuum environment after spraying. The continuous manufacturing system of an organic light-emitting element according to claim 16, wherein the spray device is a vacuum spray device capable of spraying the first organic substance in a vacuum environment. The continuous manufacturing system of an organic light-emitting element according to claim 12, wherein between the vapor deposition device and the first coating device, or between the loading device and the vapor deposition device Load the interlocking room. The continuous manufacturing system of an organic light-emitting element according to claim 19, wherein the load lock chamber is a vertical load type load lock chamber, which can load a plurality of the element substrates on a tray in a vertical direction . The continuous manufacturing system for an organic light-emitting element according to claim 1, wherein an alignment device is provided on any one or more of the first coating device and the vapor deposition device for aligning the The donor substrate for the first organic substance or the element substrate. The continuous manufacturing system of an organic light-emitting element according to claim 21, wherein the alignment device includes a multi-axis alignment device capable of multi-axis alignment. A continuous manufacturing system for organic light-emitting elements, characterized by comprising: a first coating device for a first donor substrate for a first organic substance Coating the first organic substance; the second coating device for coating the second organic substance on the second organic substance with the first donor substrate; the vapor deposition device, which is combined with the first coating device and the second coating The apparatus is connected, and an electric field is applied to the first organic substrate for the first organic material transported by the donor substrate transport device, thereby vapor-depositing the first organic material on the second organic substrate for the first organic material, and then passing The second organic substance transported by the donor substrate transfer device applies an electric field to the first donor substrate, thereby vapor-depositing the second organic substance onto the second donor substrate for the second organic substance; the loading device is used to transfer the element substrate Loaded to the first position of the vapor deposition device; a component substrate conveying device, provided in the vapor deposition device, to transport the component substrate from the first position to a second location; The vapor deposition device unloads the component substrate; and the control unit sends the first coating device, the second coating device, the vapor deposition device, the loading device, the component substrate transport device, and the The unloading device applies a control signal, and in the vapor deposition device, the second donor substrate for the first organic substance functions to vaporize the first organic substance coated on the first donor substrate for the first organic substance The medium function plated on the element substrate to apply an electric field to the second donor substrate for the first organic substance to vapor-deposit the first organic substance to the element substrate at the first position In the above, the second donor substrate for the second organic substance serves to vapor-deposit the second organic substance coated on the first donor substrate for the second organic substance onto the first organic substance of the element substrate To provide an electric field to the second donor substrate for the second organic substance to vapor-deposit the second organic substance onto the first organic substance of the element substrate at the second position. A continuous manufacturing system for organic light-emitting elements, characterized in that it includes: a first coating device for coating a first organic substance on a first organic substrate with a first donor substrate; a second coating device for a first organic substance The second organic substance is coated with the second organic substance by the first donor substrate; an evaporation device connected to the first coating device and the second coating device is provided for the first substrate transported by the donor substrate transport device An electric field is applied to the first donor substrate for organic substances to vapor-deposit the first organic substance onto the second donor substrate for first organic substances, and then the first organic substance is transferred to the second organic substance transported by the donor substrate transfer device. An electric field is applied to the bulk substrate to vapor-deposit the second organic substance onto the second donor substrate for the second organic substance; an element substrate conveying device is provided in the vapor deposition device to convey the element substrate from the first position To a second position; and a control unit to apply a control signal to the first coating device, the second coating device, the vapor deposition device, and the element substrate transport device, In the vapor deposition apparatus, the second donor substrate for the first organic substance functions to vapor-deposit the first organic substance coated on the first donor substrate for the first organic substance onto the element substrate Medium function, so that an electric field is applied to the second donor substrate for the first organic substance to vapor-deposit the first organic substance on the element substrate at the first position, and the second organic substance The second donor substrate functions as a mediator for vapor-depositing the second organic substance coated on the first organic substance donor substrate for the second organic substance onto the first organic substance of the element substrate. The second organic substrate applies an electric field with the second donor substrate to vapor-deposit the second organic substance onto the first organic substance of the element substrate at the second position. A continuous manufacturing system for organic light-emitting elements, characterized by comprising: a first coating device for coating a first organic substance on a donor substrate for a first organic substance; a second coating device for a second organic substance Coating a second organic substance with a donor substrate; a vapor deposition device connected to the first coating device and the second coating device, using the donor for the first organic substance transported by the donor substrate transport device The Joule heat of the substrate vaporizes the first organic substance onto the element substrate, and then uses the Joule heat of the donor substrate for the second organic substance transferred by the donor substrate transfer device to vaporize the second organic substance to The component substrate; a loading device for loading the component substrate to the vapor deposition device A first position; a component substrate conveying device, which is provided in the vapor deposition device, and conveys the component substrate from the first position to a second position; an unloading device for unloading the component from the vapor deposition device A substrate; and a control unit that applies a control signal to the first coating device, the second coating device, the vapor deposition device, the loading device, the component substrate transport device, and the unloading device, The donor substrate for the first organic substance includes: a first donor substrate, the first organic substance is coated on the first donor substrate through solution coating; and a second donor substrate, when the first When an electric field is applied to the bulk substrate, the first organic substance coated on the first donor substrate is vapor-deposited onto the second donor substrate. The conductive film of the first donor substrate applies an electric field to generate Joule heat, thereby vapor-depositing the first organic substance coated on the first donor substrate onto the second donor substrate, and then The conductive film of the second donor substrate on which the first organic substance is vapor-deposited applies an electric field to generate Joule heat, thereby vapor-depositing the first organic substance deposited on the second donor substrate to the Component substrate. A continuous manufacturing system for organic light-emitting elements, characterized by comprising: a coating chamber for coating a first organic substance on a donor substrate with a donor substrate And apply the second organic substance to the donor substrate for the second organic substance; a vapor deposition device, which is connected to the coating chamber, applies an electric field to the donor substrate for the first organic substance, thereby applying the first organic substance Evaporation onto the element substrate, and applying an electric field to the donor substrate for the second organic substance, thereby vapor-depositing the second organic substance onto the element substrate; a loading device for loading the element substrate onto the substrate The vapor deposition device; an unloading device for unloading the element substrate from the vapor deposition device; and a control unit for controlling the coating chamber, the vapor deposition device, the loading device, and the unloading device Signal, the donor substrate for the first organic substance includes: a first donor substrate, the first organic substance is coated on the first donor substrate through solution coating; a second donor substrate, when the When an electric field is applied to the first donor substrate, the first organic substance coated on the first donor substrate is vapor-deposited on the second donor substrate. A conductive film of an organic substance on the first donor substrate applies an electric field to generate Joule heat, thereby vapor-depositing the first organic substance coated on the first donor substrate onto the second donor substrate Then, an electric field is applied to the conductive film of the second donor substrate on which the first organic substance is deposited to generate Joule heat, thereby vapor-depositing the first organic substance deposited on the second donor substrate To the element substrate. A continuous manufacturing system for organic light-emitting elements, characterized in that it includes: a first coating device for coating a first liquid substance formed by mixing a volatile medium and a first organic substance on the first organic substance in a planar form The first donor substrate and volatilize the volatile medium; the second coating device applies the second liquid body formed by mixing the volatile medium and the second organic substance to the second organic substance in a planar shape On the first donor substrate, and volatilize the volatile medium; a vapor deposition device, which is connected to the first coating device and the second coating device, An electric field is applied to the first donor substrate for the first organic substance, and the first organic substance is vapor-deposited on the second donor substrate for the first organic substance in a planar shape, and then the second substrate transported by the donor substrate transport device Applying an electric field to the organic substrate for the first donor, the second organic substance is vapor-deposited on the second donor substrate for the second organic substance in a planar shape; in the vapor deposition apparatus, the first organic substance is used for the second The donor substrate serves as a mediator function of vapor-depositing the first organic substance coated on the first donor substrate for the first organic substance onto the element substrate, thereby applying the second donor for the first organic substance An electric field is applied to the substrate to vapor-deposit the first organic substance onto the element substrate, and the second donor substrate for the second organic substance functions as the first substance to be coated on the first donor substrate for the second organic substance. The medium function of two organic substances being vapor-deposited on the first organic substance of the element substrate, thereby applying an electric field to the second donor substrate for the second organic substance to vapor-deposit the second organic substance to the On the first organic substance of the element substrate. A continuous manufacturing method of an organic light-emitting element, comprising the following steps: a preparation step, the preparation step including: a first coating step, coating the first organic substance on the first organic substance with the first donor substrate; second In the coating step, the second organic substance is coated on the second organic substance with the first donor substrate; the first organic substance is prepared on the second donor substrate, and the vapor deposition device is connected to the first coating device and the second coating device. The first organic substrate transported by the donor substrate transport device applies an electric field to the first donor substrate, thereby vapor-depositing the first organic substance onto the second donor substrate for the first organic substance; and the second organic substance for the second In the donor substrate preparation step, an electric field is applied to the first donor substrate for the second organic material transported by the donor substrate transport device, thereby vapor-depositing the second organic material onto the second donor substrate for the second organic material; The loading step loads the element substrate to the first position of the vapor deposition device; the first organic substance vapor deposition step applies an electric field to the first organic substance with a second donor substrate to vapor deposit the first organic substance to On the element substrate at the first position; the element substrate transfer step, the element substrate is transferred from the first position to the second position; the second organic substance vapor deposition step, the second organic substance is used Applying an electric field to the second donor substrate to vapor-deposit the second organic substance onto the first organic substance of the element substrate at the second position; and In the unloading step, the element substrate is unloaded from the evaporation device. A donor substrate group for manufacturing an organic light-emitting element, comprising: a first donor substrate having: a first base layer; a first electrothermal layer formed on the first base layer, the first organic substance passes once Solution coating is applied on the first electrothermal layer; and a first conductive layer is formed on the first base layer and is electrically connected to the first electrothermal layer to apply to the first electrothermal layer An electric field; and a second donor substrate, having: a second base layer; a second electrothermal layer formed on the second base layer, corresponding to the first electrothermal layer, when applied to the first donor substrate During the electric field, the first organic substance coated on the first donor substrate with the primary solution is secondarily evaporated onto the second electrothermal layer; and the second conductive layer is electrically connected to the second electrothermal layer. Connected to apply an electric field to the second electrothermal layer, and the second donor substrate functions as a medium for vapor-depositing the first organic substance coated on the first donor substrate onto the element substrate A function of applying an electric field to the first electrothermal layer of the first donor substrate coated with the first organic substance to generate Joule heat, so that the coating on the first donor substrate The first organic substance is evaporated onto the second donor substrate, and then an electric field is applied to the second electric heating layer of the second donor substrate on which the first organic substance is deposited to generate Joule heat, thereby vaporizing The first organic substance plated on the second donor substrate is vapor-deposited onto the element substrate.

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