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TWI685043B - Chip pressing device - Google Patents

Chip pressing device Download PDF

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Publication number
TWI685043B
TWI685043B TW108111255A TW108111255A TWI685043B TW I685043 B TWI685043 B TW I685043B TW 108111255 A TW108111255 A TW 108111255A TW 108111255 A TW108111255 A TW 108111255A TW I685043 B TWI685043 B TW I685043B
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Taiwan
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wafer
pressing
component
chip
pressing device
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TW108111255A
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Chinese (zh)
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TW202036742A (en
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林彥維
陳威助
蔡伯晨
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中國探針股份有限公司
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Priority to TW108111255A priority Critical patent/TWI685043B/en
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Publication of TW202036742A publication Critical patent/TW202036742A/en

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A chip pressing device can be fixedly disposed on a chip carrier to press against a chip disposed on the chip carrier. The chip pressing device includes: a body, a pressing unit and an engaging assembly. The pressing unit is detachably disposed on the body. The engaging assembly is disposed on the body, and the body is fixedly disposed on the chip carrier via the engaging assembly. The pressing unit has a contact structure. When the chip pressing device is fixedly disposed on the chip carrier, the contact structure presses the chip. Since the pressing unit is detachably disposed on the body, a user can replace the pressing unit having the corresponding contact structure depending on the type of the chip.

Description

晶片抵壓裝置及晶片抵壓裝置套件Wafer pressing device and chip pressing device kit

本發明涉及一種晶片抵壓裝置及晶片抵壓裝置套件,特別是一種手動式的晶片抵壓裝置及晶片抵壓裝置套件。The invention relates to a wafer pressing device and a wafer pressing device kit, in particular to a manual type wafer pressing device and a wafer pressing device kit.

一般來說,晶片的研發人員,在開發晶片的過程中,必需時常對晶片進行上機測試,以驗證其開發結果。上機測試的方式,大致為:研發人員先將晶片設置於一電連接座(socket)上,而後研發人員會利用相對應的抵壓組件,抵壓在晶片上,據以確保晶片在檢測過程中,能夠穩固地與晶片承載裝置連接。Generally speaking, in the process of developing a wafer, the R&D personnel of the wafer must always carry out on-board testing of the wafer to verify the development result. The method of on-board testing is roughly as follows: the R&D personnel first set the chip on an electrical socket (socket), and then the R&D personnel will use the corresponding pressure component to press against the chip to ensure that the chip is in the inspection process It can be firmly connected to the wafer carrier.

對晶片的研發人員而言,在開發不同尺寸的晶片時,必需購買相對應尺寸的電連接座及相對應的抵壓組件,而不同尺寸的晶片並無法共用相同的電連接座或是抵壓組件,為此提升了研發成本。對於電連接座及抵壓組件的生產廠商而言,因應不同尺寸晶片的測試需求,生產廠商必需重新設計相對應的電連接座及抵壓組件,為此提升了生產成本。For the R&D personnel of the chip, when developing chips of different sizes, it is necessary to purchase the corresponding size of the electrical connection seat and the corresponding pressure component, and the chips of different sizes cannot share the same electrical connection seat or the pressure Components, which increases R&D costs. For manufacturers of electrical connection bases and pressure-resistant components, in response to the testing needs of wafers of different sizes, manufacturers must redesign the corresponding electrical connection bases and voltage-resistant components, thereby increasing production costs.

本發明的晶片抵壓裝置及晶片抵壓裝置套件,用以改善現有生產廠商必需依據不同客戶的需求,客製不同的電連接座及抵壓組件(俗稱手測蓋組件),從而導致生產成本提升的問題;本發明的晶片抵壓裝置及晶片抵壓裝置套件也可以改善研發人員在測試不同尺寸的晶片時,必需購買不同的電連接座及其抵壓組件,從而導致研發成本提升的問題。The chip pressing device and the chip pressing device kit of the present invention are used to improve the existing manufacturers must customize different electrical connection seats and pressing components (commonly known as hand measuring cover components) according to the needs of different customers, resulting in production costs The problem of lifting; the chip pressing device and the chip pressing device kit of the present invention can also improve R&D personnel must purchase different electrical connection seats and their pressing components when testing chips of different sizes, which leads to the problem of increased research and development costs .

本發明實施例公開一種晶片抵壓裝置,其用以固定設置於一晶片承載裝置上,以抵壓設置於晶片承載裝置上的一晶片,晶片抵壓裝置包含:一本體、一抵壓單元及一卡合組件。本體的一側設置有至少一第一連接組件。抵壓單元抵壓單元可拆卸地設置於本體,且抵壓單元設置有一第二連接組件,第二連接組件可拆卸地與第一連接組件相連接,抵壓單元還具有一接觸結構;其中,當第二連接組件與第一連接組件相互連接時,抵壓單元則固定設置於本體。卡合組件設置於本體,卡合組件能被操作而與晶片承載裝置相互卡合。其中,當卡合組件與晶片承載裝置相互卡合,而晶片抵壓裝置固定設置於晶片承載裝置設置有晶片的位置上方時,接觸結構能對應抵壓晶片相反於晶片承載裝置的一側。An embodiment of the present invention discloses a chip pressing device, which is used to be fixedly arranged on a chip carrying device to press a chip arranged on the chip carrying device. The chip pressing device comprises: a body, a pressing unit and One snap assembly. At least one first connection component is provided on one side of the body. The pressing unit is detachably disposed on the body, and the pressing unit is provided with a second connection component, the second connection component is detachably connected to the first connection component, and the pressing unit also has a contact structure; wherein, When the second connection component and the first connection component are connected to each other, the pressing unit is fixedly disposed on the body. The engaging component is disposed on the body, and the engaging component can be operated to engage with the wafer carrying device. Wherein, when the clamping component and the wafer carrying device are engaged with each other, and the wafer pressing device is fixedly disposed above the position where the wafer is provided with the wafer, the contact structure can correspond to the side of the pressing wafer opposite to the wafer carrying device.

本發明實施例也公開一種晶片抵壓裝置套件,其包含:一晶片抵壓裝置及多個抵壓單元。晶片抵壓裝置用以固定設置於一晶片承載裝置上,以抵壓設置於晶片承載裝置上的一晶片,晶片抵壓裝置包含:一本體及一卡合組件。本體的一側設置有至少一第一連接組件。卡合組件設置於本體,卡合組件能被操作而與晶片承載裝置相互卡合,各個抵壓單元可拆卸地設置於本體,且各個抵壓單元設置有一第二連接組件,各個第二連接組件可拆卸地與第一連接組件相連接;各個抵壓單元還具有一接觸結構,且多個抵壓單元分別具有不同外型的接觸結構;其中,當各個抵壓單元的第二連接組件與第一連接組件相互連接時,各個抵壓單元則固定設置於本體。其中,任一抵壓單元的卡合組件與晶片承載裝置相互卡合,而晶片抵壓裝置固定設置於晶片承載裝置設置有晶片的位置上方時,抵壓單元的接觸結構能對應抵壓晶片相反於晶片承載裝置的一側。The embodiment of the invention also discloses a chip pressing device kit, which comprises: a chip pressing device and a plurality of pressing units. The chip pressing device is used for fixing on a chip carrying device to press a chip arranged on the chip carrying device. The chip pressing device comprises: a body and a clamping component. At least one first connection component is provided on one side of the body. The engaging component is disposed on the body, and the engaging component can be operated to be engaged with the wafer carrying device. Each pressing unit is detachably disposed on the body, and each pressing unit is provided with a second connecting component, and each second connecting component Detachably connected with the first connection component; each pressing unit also has a contact structure, and the plurality of pressing units have different appearance contact structures; wherein, when the second connection component of each pressing unit is connected to the first When a connecting component is connected to each other, each pressing unit is fixedly disposed on the body. Wherein, the clamping component of any pressing unit and the wafer carrier are engaged with each other, and when the wafer pressing device is fixedly disposed above the position where the wafer is mounted on the wafer carrier, the contact structure of the pressing unit can correspond to the opposite of pressing the wafer On one side of the wafer carrier.

綜上所述,本發明的晶片抵壓裝置及晶片抵壓裝置套件由於抵壓單元可以依據需求更換,因此,可以降低電連接座生產廠商的生產成本,且亦可降低晶片研發人員的研發成本。In summary, the chip pressing device and the chip pressing device kit of the present invention can be replaced according to demand, so the production cost of the electrical connector manufacturer can be reduced, and the research and development cost of the chip R&D personnel can also be reduced .

為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。In order to understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, not to make any protection to the scope of the present invention. limit.

於以下說明中,如有記載請參閱特定圖式或是如特定圖式所示,其僅是用以強調於後續說明中,所述及的相關內容大部份出現於該特定圖式中,但不限制該後續說明中僅可參考所述特定圖式。In the following description, if there is a record, please refer to the specific drawing or as shown in the specific drawing, which is only used to emphasize in the subsequent description, most of the related content mentioned in the specific drawing, However, it does not limit that only specific patterns can be referred to in the subsequent description.

請一併參閱圖1至圖6,圖1及圖2顯示為本發明的晶片抵壓裝置的組裝示意圖;圖3顯示為本發明的晶片抵壓裝置的抵壓單元與本體相互分離的示意圖;圖4顯示為本發明的晶片抵壓裝置固定設置於晶片承載裝置上的示意圖;圖5及圖6為本發明的晶片抵壓裝置的分解示意圖。如圖所示,晶片抵壓裝置1包含一本體10、一抵壓單元20及一卡合組件30。Please refer to FIGS. 1 to 6 together. FIGS. 1 and 2 show schematic assembly diagrams of the wafer pressing device of the present invention; FIG. 3 shows a schematic diagram of the separation of the pressing unit and the body of the wafer pressing device of the present invention; 4 is a schematic view of the wafer pressing device of the present invention fixedly mounted on the wafer carrier; FIGS. 5 and 6 are exploded schematic views of the wafer pressing device of the present invention. As shown in the figure, the wafer pressing device 1 includes a body 10, a pressing unit 20 and an engaging component 30.

如圖1至圖3所示,本體10的一側設置有至少一第一連接組件11。抵壓單元20設置有一第二連接組件21,且抵壓單元20可拆卸地設置於本體10設置有第一連接組件11的一側。第二連接組件21能與第一連接組件11相連接,而抵壓單元20能透過第二連接組件21與第一連接組件11相連接,據以固定於本體10的一側。抵壓單元20具有一接觸結構201,用以抵壓設置於晶片承載裝置A上的晶片B。卡合組件30設置於本體10。卡合組件30能被操作,而使晶片抵壓裝置1與晶片承載裝置A相互卡合或相互分離,亦即本體10可以是透過卡合組件30,以固定設置於晶片承載裝置A設置有晶片B的位置的上方。As shown in FIGS. 1 to 3, at least one first connecting component 11 is provided on one side of the body 10. The pressing unit 20 is provided with a second connecting component 21, and the pressing unit 20 is detachably disposed on the side of the body 10 where the first connecting component 11 is provided. The second connection component 21 can be connected to the first connection component 11, and the pressing unit 20 can be connected to the first connection component 11 through the second connection component 21, thereby being fixed to one side of the body 10. The pressing unit 20 has a contact structure 201 for pressing the wafer B disposed on the wafer carrier A. The engaging component 30 is disposed on the body 10. The clamping assembly 30 can be operated, so that the wafer pressing device 1 and the wafer carrier A are engaged or separated from each other, that is, the body 10 can be fixedly disposed on the wafer carrier A through the clamping assembly 30 Above the position of B.

如圖4所示,當抵壓單元20固定設置於本體10的一側,且本體10透過卡合組件30固定於晶片承載裝置A的上方時,抵壓單元20的接觸結構201將對應抵壓晶片B相反於晶片承載裝置A的一側;此時,相關人員即可通過晶片承載裝置A對晶片B進行相關檢測作業。在實際應用中,晶片承載裝置A可以是各式用來與晶片B連接的電連接座(socket),而晶片B的形式亦可依據需求變化。As shown in FIG. 4, when the pressing unit 20 is fixedly disposed on one side of the body 10 and the body 10 is fixed above the wafer carrier A through the engaging assembly 30, the contact structure 201 of the pressing unit 20 will correspondingly press The wafer B is opposite to the side of the wafer carrier A; at this time, relevant personnel can perform relevant inspection operations on the wafer B through the wafer carrier A. In practical applications, the wafer carrier A may be various electrical sockets for connecting to the wafer B, and the form of the wafer B may also vary according to requirements.

依上所述,以下將舉出一個實際例子,以詳細說明上述本體10、第一連接組件11、抵壓單元20、第二連接組件21及卡合組件30可能的具體實施方式。如圖6所示,本體10的一側可以是內凹形成有一卡合槽12。上述第一連接組件11可以是包含有四個第一磁吸構件111,而多個第一磁吸構件111設置於本體10,且多個第一磁吸構件111對應位於卡合槽12中。Based on the above, a practical example will be given below to explain in detail the possible specific implementations of the body 10, the first connecting component 11, the pressing unit 20, the second connecting component 21, and the engaging component 30. As shown in FIG. 6, one side of the body 10 may be concavely formed with an engaging groove 12. The first connection assembly 11 may include four first magnetic attraction members 111, and the plurality of first magnetic attraction members 111 are disposed on the body 10, and the plurality of first magnetic attraction members 111 are correspondingly located in the engaging groove 12.

如圖2至圖6所示,抵壓單元20可以是具有一卡合結構202,卡合結構202的一側向外凸出形成有接觸結構201。卡合結構202的外型對應於卡合槽12的外型,而卡合結構202能對應卡合設置於卡合槽12中;當卡合結構202固定設置於卡合槽12中時,接觸結構201將對應露出於本體10的一側。As shown in FIGS. 2 to 6, the pressing unit 20 may have an engaging structure 202, and one side of the engaging structure 202 protrudes outward to form a contact structure 201. The appearance of the engaging structure 202 corresponds to the appearance of the engaging groove 12, and the engaging structure 202 can be correspondingly arranged in the engaging groove 12; when the engaging structure 202 is fixedly arranged in the engaging groove 12, contact The structure 201 will be exposed on one side of the body 10.

第二連接組件21可以是包含有四個第二磁吸構件211,各個第二磁吸構件211能與各個第一磁吸構件111相互吸引,舉例來說,各個第一磁吸構件111及各個第二磁吸構件211可以為相異極性的磁鐵,或者,第一磁吸構件111及第二磁吸構件211的其中一者為磁鐵,另一者則為可被磁鐵吸附的構件。當卡合結構202卡合固定設置於卡合槽12中時,各個第一磁吸構件111將與各個第二磁吸構件211相互吸引,而抵壓單元20將對應固定設置於本體10的一側。The second connection component 21 may include four second magnetic attraction members 211, each second magnetic attraction member 211 can attract each first magnetic attraction member 111, for example, each first magnetic attraction member 111 and each The second magnetic attraction member 211 may be magnets of different polarities, or one of the first magnetic attraction member 111 and the second magnetic attraction member 211 is a magnet, and the other is a member that can be attracted by the magnet. When the engaging structure 202 is engaged and fixedly arranged in the engaging groove 12, each first magnetic attraction member 111 and each second magnetic attraction member 211 will attract each other, and the pressing unit 20 will be correspondingly fixedly arranged on the body 10. side.

關於第一磁吸構件111及第二磁吸構件211的外型、尺寸、數量等可依據需求變化,不以圖中所示為限。關於第一連接組件11及第二連接組件21相互連接的方式,不以上述磁吸的方式為限,只要第一連接組件11及第二連接組件21能相互連接而相互固定,且第一連接組件11及第二連接組件21能被人工手動的方式直接分離,皆屬於本實施例所涵蓋的範圍。舉例來說,第一連接組件11可以是不具有上述第一磁吸構件111,第二連接組件21可以是不具有上述第二磁吸構件211,而第一連接組件11及第二連接組件21即分別為卡合槽12與卡合結構202,亦即,第一連接組件11及第二連接組件21也可以是直接透過相互卡合的方式來連接。The shape, size, number, etc. of the first magnetic attraction member 111 and the second magnetic attraction member 211 can be changed according to requirements, and are not limited to those shown in the figure. The manner in which the first connection component 11 and the second connection component 21 are connected to each other is not limited to the above-mentioned magnetic attraction method, as long as the first connection component 11 and the second connection component 21 can be connected to each other and fixed to each other, and the first connection The component 11 and the second connecting component 21 can be directly separated by manual means, and all belong to the scope covered by this embodiment. For example, the first connection assembly 11 may not have the first magnetic attraction member 111, the second connection assembly 21 may not have the second magnetic attraction member 211, and the first connection assembly 11 and the second connection assembly 21 That is, the engaging groove 12 and the engaging structure 202 respectively, that is, the first connecting component 11 and the second connecting component 21 may also be directly connected by engaging with each other.

依上所述,由於抵壓單元20可以被輕易地從本體10上拆卸下來,因此,使用者可以是依據其所欲抵壓的晶片B外型、尺寸的不同,而更換具有相對應外型、尺寸的接觸結構201的抵壓單元20。具體來說,在兩個尺寸不同個晶片B分別設置於兩個尺寸相同的晶片承載裝置A上的情況,使用者可以是簡單地透過更換不同的抵壓單元20,即可使本體10透過卡合組件30先後與相同尺寸的晶片承載裝置A相互卡合,而可先後利用不同的抵壓單元20抵壓不同尺寸的晶片B。As mentioned above, since the pressing unit 20 can be easily detached from the body 10, the user can replace the corresponding shape according to the appearance and size of the chip B to be pressed , The contact unit 201 of the size contact structure 201. Specifically, in the case where two wafers B of different sizes are respectively disposed on two wafer carriers A of the same size, the user can simply replace the different pressing units 20 to allow the body 10 to pass through the card The engaging assembly 30 successively engages with the wafer carrier A of the same size, and can use different pressing units 20 to press the wafers B of different sizes successively.

如圖3、圖5及圖6所示,值得一提的是,在實際應用中,本體10還可以是具有一第一防呆結構13,抵壓單元20還具有一第二防呆結構22。當第一連接組件11與第二連接組件21相互連接,而抵壓單元20固定於本體10時,第一防呆結構13將與第二防呆結構22相互固定。具體來說,本體10鄰近於卡合槽12的位置可以是內凹形成有一凹槽,凹槽與卡合槽12相連通,而凹槽即可作為第一防呆結構13。第二防呆結構22則可以是由卡合結構202相外延伸形成的凸出結構。如此,使用者在將卡合結構202固定於卡合槽12時,使用者必需使第二防呆結構22與第一防呆結構13相對應,才可使卡合結構202順利地卡合設置於卡合槽12中,從而可避免發生使用者不正確地安裝抵壓單元20,而導致接觸結構201不正確地抵壓晶片B的問題。當然,第一防呆結構13及第二防呆結構22的外型及其設置位置可以是依據需求變化,圖中所示僅為其中一示範態樣。As shown in FIGS. 3, 5 and 6, it is worth mentioning that, in practical applications, the body 10 may also have a first foolproof structure 13, and the pressing unit 20 also has a second foolproof structure 22 . When the first connection component 11 and the second connection component 21 are connected to each other, and the pressing unit 20 is fixed to the body 10, the first foolproof structure 13 and the second foolproof structure 22 are fixed to each other. Specifically, a position of the body 10 adjacent to the engaging groove 12 may be a concave formed with a groove, the groove communicates with the engaging groove 12, and the groove may serve as the first foolproof structure 13. The second foolproof structure 22 may be a protruding structure formed by the engaging structure 202 extending outward. In this way, when the user fixes the engaging structure 202 to the engaging groove 12, the user must make the second foolproof structure 22 correspond to the first foolproof structure 13, so that the engaging structure 202 can be smoothly engaged and installed In the engaging groove 12, the problem that the user incorrectly installs the pressing unit 20 and causes the contact structure 201 to incorrectly press the wafer B can be avoided. Of course, the shapes and installation positions of the first foolproof structure 13 and the second foolproof structure 22 may be changed according to requirements, and the figures shown are only one of the exemplary aspects.

如圖4至圖6所示,本體10彼此相反的兩側壁可以是分別內凹形成有一操作槽14。卡合組件30可以是包含兩個卡扣件31及兩個彈性件32。各個卡扣件31可以是設置有一樞接軸33而樞接於本體10的樞接孔15。兩個卡扣件31可以是對應位於兩個操作槽14中。各個卡扣件31的一端及晶片承載裝置A可以是分別具有能彼此相互卡合的一扣合結構311、A1。兩個彈性件32對應設置於兩個卡扣件31與本體10之間。各個彈性件32的一端固定於本體10,彈性件32的另一端則是固定於卡扣件31。關於各個彈性件32的兩端分別與卡扣件31及本體10相固定的方式,例如可以是圖中所示於卡扣件31及本體10分別形成有相對應嵌槽,而彈性件32的各端是對應卡合設置於嵌槽中,但不以此為限。As shown in FIGS. 4 to 6, two opposite side walls of the body 10 may be concavely formed with an operation groove 14. The engaging component 30 may include two fasteners 31 and two elastic members 32. Each buckle 31 may be provided with a pivot shaft 33 pivotally connected to the pivot hole 15 of the body 10. The two fasteners 31 may be correspondingly located in the two operating slots 14. One end of each fastener 31 and the wafer carrier A may have a fastening structure 311 and A1 that can be engaged with each other. The two elastic members 32 are correspondingly disposed between the two fasteners 31 and the body 10. One end of each elastic member 32 is fixed to the body 10, and the other end of the elastic member 32 is fixed to the buckling member 31. With regard to the manner in which both ends of each elastic member 32 are fixed to the buckle 31 and the body 10, for example, the buckle 31 and the body 10 shown in the figure are respectively formed with corresponding insertion grooves, and the elastic member 32 Each end is correspondingly set in the embedded groove, but not limited to this.

如圖7所示,各個卡扣件31被操作而相對於本體10旋轉時,位於各個卡扣件31及本體10之間的各個彈性件32將被擠壓而對應產生彈性回復力,使用者在圖7的狀態,將可使兩個卡扣件31夾持於晶片承載裝置A。如圖4所示,當卡扣件31的扣合結構311對應與晶片承載裝置A的扣合結構A1相互卡合時,各個彈性件32所產生的彈性回復力可以是使各卡扣件31的扣合結構311,更穩固地夾持晶片承載裝置A的扣合結構A1。As shown in FIG. 7, when each buckle 31 is operated and rotated relative to the body 10, each elastic member 32 between each buckle 31 and the body 10 will be squeezed to generate an elastic restoring force correspondingly, the user In the state of FIG. 7, the two fasteners 31 can be clamped to the wafer carrier A. As shown in FIG. 4, when the engaging structure 311 of the engaging member 31 correspondingly engages with the engaging structure A1 of the wafer carrier A, the elastic restoring force generated by each elastic member 32 may be such that each engaging member 31 The buckling structure 311 is used to hold the buckling structure A1 of the wafer carrier A more firmly.

於本實施例中是以卡合組件30具有兩個卡扣件31,而本體10透過兩個卡扣件31以夾持晶片承載裝置A,據以固定設置於晶片承載裝置A的上方為例,但卡合組件30所包含的構件不以此為限。卡合組件30只要可以使本體10可拆卸地固定於晶片承載裝置A,卡合組件30可以是任何結構或是可以是包含有任何構件。In this embodiment, the clamping assembly 30 has two fasteners 31, and the body 10 clamps the wafer carrier A through the two fasteners 31, and is accordingly fixed above the wafer carrier A as an example However, the components included in the snap assembly 30 are not limited thereto. As long as the engaging assembly 30 can detachably fix the body 10 to the wafer carrier A, the engaging assembly 30 can be of any structure or can include any member.

值得一提的是,在不同的應用中,晶片抵壓裝置1還可以是包含有一樞接組件(圖未示),樞接組件固定設置於本體10,而晶片抵壓裝置1的樞接組件能與晶片承載裝置A上相對應的樞接組件(圖未示)相互樞接,藉此,晶片抵壓裝置1能被操作而相對於晶片承載裝置A旋轉。當使用者操作晶片抵壓裝置1,而使晶片抵壓裝置1向晶片承載裝置A旋轉,並據以使晶片抵壓裝置1位於晶片承載裝置A的正上方時,使用者可以再利用卡合組件30,而使晶片抵壓裝置1與晶片承載裝置A相互卡合,據以使晶片抵壓裝置1固定設置於晶片承載裝置A的正上方。It is worth mentioning that in different applications, the chip pressing device 1 may also include a pivoting component (not shown), the pivoting component is fixedly disposed on the body 10, and the pivoting component of the chip pressing device 1 The pivoting components (not shown) corresponding to the wafer carrier A can be pivotally connected to each other, whereby the wafer pressing device 1 can be operated to rotate relative to the wafer carrier A. When the user operates the wafer pressing device 1 to rotate the wafer pressing device 1 toward the wafer carrier A, and accordingly the wafer pressing device 1 is located directly above the wafer carrier A, the user can reuse the engagement In the assembly 30, the wafer pressing device 1 and the wafer carrier A are engaged with each other, so that the wafer pressing device 1 is fixedly arranged directly above the wafer carrier A.

請參閱圖8,其顯示為本發明的晶片抵壓裝置套件2的分解示意圖。如圖所示,晶片抵壓裝置套件2包含有一晶片抵壓裝置1及多個抵壓單元20A、20B。晶片抵壓裝置1包含有一本體10及一卡合組件30。本體10設置有一第一連接組件11。各個抵壓單元20A(20B)具有一卡合結構202、一接觸結構201及一第二連接組件21。關於本體10、卡合組件30、各個抵壓單元20的第一連接組件11、卡合結構202、接觸結構201及第二連接組件21的詳細說明,請參閱前述說明,於此不再贅述。Please refer to FIG. 8, which is an exploded view of the chip pressing device kit 2 of the present invention. As shown in the figure, the wafer pressing device kit 2 includes a wafer pressing device 1 and a plurality of pressing units 20A, 20B. The chip pressing device 1 includes a body 10 and an engaging component 30. The body 10 is provided with a first connecting component 11. Each pressing unit 20A (20B) has an engaging structure 202, a contact structure 201 and a second connection component 21. For detailed descriptions of the body 10, the engaging component 30, the first connecting component 11, the engaging structure 202, the contact structure 201, and the second connecting component 21 of each pressing unit 20, please refer to the foregoing description, and no further description is provided here.

綜上所述,本發明的晶片抵壓裝置1及晶片抵壓裝置套件2,可以讓使用者依據不同的晶片B的尺寸,而對應更換具有不同接觸結構201的抵壓單元20,藉此,使用者可以利用相同的本體10及不同的抵壓單元20,來抵壓設置於相同尺寸的晶片承載裝置上但具有不同尺寸的晶片B,而使用者不需要購買兩組晶片抵壓裝置1,進而可降低相關研發人員的研發成本。相對地,對於晶片抵壓裝置1的生產廠商而言,針對同一尺寸的晶片承載裝置A,生產廠商可以是僅開發生產不同的抵壓單元20,無需重新設計整個晶片抵壓裝置1,從而可降低其生產成本及研發費用。In summary, the wafer pressing device 1 and the wafer pressing device set 2 of the present invention can allow the user to replace the pressing unit 20 with different contact structures 201 according to different sizes of the wafer B, thereby, The user can use the same body 10 and different pressing units 20 to press the wafer B provided on the wafer carrier of the same size but with different sizes, and the user does not need to purchase two sets of wafer pressing devices 1. In turn, the R&D costs of relevant R&D personnel can be reduced. In contrast, for the manufacturer of the wafer pressing device 1, for the wafer carrier A of the same size, the manufacturer may only develop and produce different pressing units 20 without redesigning the entire wafer pressing device 1, so that Reduce its production costs and research and development expenses.

以上所述僅為本發明的較佳可行實施例,非因此侷限本發明的專利範圍,故舉凡運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的保護範圍內。The above are only the preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, equivalent technical changes made by using the description and drawings of the present invention are included in the protection scope of the present invention. .

1‧‧‧晶片抵壓裝置 2‧‧‧晶片抵壓裝置套件 10‧‧‧本體 11‧‧‧第一連接組件 111‧‧‧第一磁吸構件 12‧‧‧卡合槽 13‧‧‧第一防呆結構 14‧‧‧操作槽 15‧‧‧樞接孔 20、20A、20B‧‧‧抵壓單元 201‧‧‧接觸結構 202‧‧‧卡合結構 21‧‧‧第二連接組件 211‧‧‧第二磁吸構件 22‧‧‧第二防呆結構 30‧‧‧卡合組件 31‧‧‧卡扣件 311‧‧‧扣合結構 32‧‧‧彈性件 33‧‧‧樞接軸 A‧‧‧晶片承載裝置 A1‧‧‧扣合結構 B‧‧‧晶片1‧‧‧chip pressure device 2‧‧‧chip pressure device kit 10‧‧‧Body 11‧‧‧The first connection assembly 111‧‧‧The first magnetic member 12‧‧‧Snap slot 13‧‧‧The first foolproof structure 14‧‧‧Operation slot 15‧‧‧Pivot hole 20, 20A, 20B ‧‧‧ pressure unit 201‧‧‧Contact structure 202‧‧‧Snap-in structure 21‧‧‧Second connection assembly 211‧‧‧Second magnetic member 22‧‧‧The second foolproof structure 30‧‧‧Snap-in components 31‧‧‧Snap fastener 311‧‧‧buckle structure 32‧‧‧Elastic parts 33‧‧‧ pivot shaft A‧‧‧chip carrier A1‧‧‧buckle structure B‧‧‧chip

圖1為本發明的晶片抵壓裝置的組裝示意圖。FIG. 1 is an assembly diagram of a wafer pressing device of the present invention.

圖2為本發明的晶片抵壓裝置的另一視角的組裝示意圖。2 is an assembly diagram of the wafer pressing device of the present invention from another perspective.

圖3為本發明的晶片抵壓裝置的抵壓單元與本體的分解示意圖。3 is an exploded schematic view of the pressing unit and the body of the wafer pressing device of the present invention.

圖4為本發明的晶片抵壓裝置固定設置於晶片承載裝置的上的側視示意圖。4 is a schematic side view of the wafer pressing device of the present invention fixedly disposed on the wafer carrier.

圖5為本發明的晶片抵壓裝置的分解示意圖。FIG. 5 is an exploded schematic view of the wafer pressing device of the present invention.

圖6為本發明的晶片抵壓裝置的另一視角的分解示意圖。6 is an exploded schematic view of the wafer pressing device of the present invention from another perspective.

圖7為本發明的晶片抵壓裝置的作動側視示意圖。7 is a schematic side view of the operation of the wafer pressing device of the present invention.

圖8為本發明的晶片抵壓裝置套件的分解示意圖。FIG. 8 is an exploded schematic view of the wafer pressing device kit of the present invention.

1‧‧‧晶片抵壓裝置 1‧‧‧chip pressure device

10‧‧‧本體 10‧‧‧Body

11‧‧‧第一連接組件 11‧‧‧The first connection assembly

111‧‧‧第一磁吸構件 111‧‧‧The first magnetic member

12‧‧‧卡合槽 12‧‧‧Snap slot

13‧‧‧第一防呆結構 13‧‧‧The first foolproof structure

20‧‧‧抵壓單元 20‧‧‧Pressure unit

201‧‧‧接觸結構 201‧‧‧Contact structure

202‧‧‧卡合結構 202‧‧‧Snap-in structure

21‧‧‧第二連接組件 21‧‧‧Second connection assembly

211‧‧‧第二磁吸構件 211‧‧‧Second magnetic member

22‧‧‧第二防呆結構 22‧‧‧The second foolproof structure

30‧‧‧卡合組件 30‧‧‧Snap-in components

31‧‧‧卡扣件 31‧‧‧Snap fastener

311‧‧‧扣合結構 311‧‧‧buckle structure

Claims (10)

一種晶片抵壓裝置,其用以固定設置於一晶片承載裝置上,以抵壓設置於所述晶片承載裝置上的一晶片,所述晶片抵壓裝置包含: 一本體,其一側設置有至少一第一連接組件; 一抵壓單元,其所述抵壓單元可拆卸地設置於所述本體,且所述抵壓單元設置有一第二連接組件,所述第二連接組件可拆卸地與所述第一連接組件相連接,所述抵壓單元還具有一接觸結構;其中,當所述第二連接組件與所述第一連接組件相互連接時,所述抵壓單元則固定設置於所述本體; 一卡合組件,其設置於所述本體,所述卡合組件能被操作而與所述晶片承載裝置相互卡合; 其中,當所述卡合組件與所述晶片承載裝置相互卡合,而所述晶片抵壓裝置固定設置於所述晶片承載裝置設置有所述晶片的位置上方時,所述接觸結構能對應抵壓所述晶片相反於所述晶片承載裝置的一側。A wafer pressing device is used for fixing on a wafer carrying device to press a chip arranged on the wafer carrying device. The wafer pressing device includes: a body, at least one side of which is provided A first connection component; a pressure unit, the pressure unit is detachably disposed on the body, and the pressure unit is provided with a second connection component, the second connection component is detachably connected with the The first connecting component is connected, and the pressing unit further has a contact structure; wherein, when the second connecting component and the first connecting component are connected to each other, the pressing unit is fixedly disposed on the A body; an engaging component, which is disposed on the body, and the engaging component can be operated to be engaged with the wafer carrier device; wherein, when the engaging component and the wafer carrier device are engaged with each other When the wafer pressing device is fixed above the position where the wafer is mounted on the wafer carrier, the contact structure can correspondingly press the side of the wafer opposite to the wafer carrier. 如請求項1所述的晶片抵壓裝置,其中,所述本體彼此相反的兩側分別內凹形成有一操作槽,所述卡合組件包含兩個卡扣件及兩個彈性件,各個所述卡扣件樞接於所述本體,且兩個所述卡扣件對應位於兩個所述操作槽中;各個所述卡扣件的一端及所述晶片承載裝置分別具有能彼此相互卡合的一扣合結構;兩個所述彈性件對應設置於兩個所述卡扣件與所述本體之間;各個所述彈性件的一端固定於所述本體,另一端則固定於所述卡扣件;各個所述卡扣件被操作而相對於所述本體旋轉時,位於各個所述卡扣件及所述本體之間的各個所述彈性件被擠壓而對應產生彈性回復力。The wafer pressing device according to claim 1, wherein two opposite sides of the body are respectively concavely formed with an operation groove, and the engaging component includes two snap parts and two elastic parts, each of which The buckle is pivotally connected to the body, and the two buckles are correspondingly located in the two operation slots; one end of each buckle and the wafer carrying device respectively have mutually capable of being engaged with each other A snap-fit structure; the two elastic members are correspondingly disposed between the two snap members and the body; one end of each elastic member is fixed to the body, and the other end is fixed to the snap When each of the fasteners is operated and rotated relative to the body, each of the elastic members between each of the fasteners and the body is squeezed to generate an elastic restoring force. 如請求項1所述的晶片抵壓裝置,其中,所述本體具有一卡合槽,所述第一連接組件包含有至少一第一磁吸構件,所述第一磁吸構件位於所述卡合槽中;所述第二連接組件包含至少一第二磁吸構件;所述抵壓單元相反於具有所述接觸結構的一側設置有所述第二磁吸構件;當所述抵壓單元相反於具有所述接觸結構的一側卡合設置於所述卡合槽中時,所述第二磁吸構件能對應與所述第一磁吸構件相互吸引,而所述第二連接組件則能固定設置於所述本體。The wafer pressing device according to claim 1, wherein the body has an engaging groove, the first connection assembly includes at least a first magnetic attraction member, and the first magnetic attraction member is located on the card In the groove; the second connection assembly includes at least one second magnetic member; the pressing unit is opposite to the side having the contact structure is provided with the second magnetic member; when the pressing unit On the contrary, when the side with the contact structure is engaged in the engaging groove, the second magnetic attraction member can correspondingly attract each other to the first magnetic attraction member, and the second connection assembly It can be fixed on the body. 如請求項1所述的晶片抵壓裝置,其中,所述本體還具有一第一防呆結構,所述抵壓單元還具有一第二防呆結構;當所述第一連接組件與所述第二連接組件相互連接,而所述抵壓單元固定於所述本體時,所述第一防呆結構與所述第二防呆結構相互固定。The wafer pressing device according to claim 1, wherein the body further has a first foolproof structure, and the pressing unit further has a second foolproof structure; when the first connecting component is connected to the The second connection components are connected to each other, and when the pressing unit is fixed to the body, the first foolproof structure and the second foolproof structure are fixed to each other. 如請求項3所述的晶片抵壓裝置,其中,所述本體鄰近於所述卡合槽的位置內凹形成有一凹槽,所述凹槽與所述卡合槽相連通,而所述凹槽為所述第一防呆結構;所述抵壓單元的一側向外凸出形成有所述第二防呆結構。The wafer pressing device according to claim 3, wherein a recess is formed in the body at a position adjacent to the engaging groove, and the groove communicates with the engaging groove, and the concave The groove is the first foolproof structure; one side of the pressing unit protrudes outward to form the second foolproof structure. 一種晶片抵壓裝置套件,其包含: 一晶片抵壓裝置,其用以固定設置於一晶片承載裝置上,以抵壓設置於所述晶片承載裝置上的一晶片,所述晶片抵壓裝置包含: 一本體,其一側設置有至少一第一連接組件; 一卡合組件,其設置於所述本體,所述卡合組件能被操作而與所述晶片承載裝置相互卡合; 多個抵壓單元,各個所述抵壓單元可拆卸地設置於所述本體,且各個所述抵壓單元設置有一第二連接組件,各個所述第二連接組件可拆卸地與所述第一連接組件相連接;各個所述抵壓單元還具有一接觸結構,且多個所述抵壓單元分別具有不同外型的所述接觸結構;其中,當各個所述抵壓單元的所述第二連接組件與所述第一連接組件相互連接時,各個所述抵壓單元則固定設置於所述本體; 其中,任一所述抵壓單元的所述卡合組件與所述晶片承載裝置相互卡合,而所述晶片抵壓裝置固定設置於所述晶片承載裝置設置有所述晶片的位置上方時,所述抵壓單元的所述接觸結構能對應抵壓所述晶片相反於所述晶片承載裝置的一側。A chip pressing device kit includes: a chip pressing device, which is fixedly arranged on a chip carrying device to press a chip arranged on the chip carrying device, the chip pressing device comprises : A body with at least one first connection component on one side; an engagement component on the body, the engagement component being operable to engage with the wafer carrier; multiple contacts A pressing unit, each of the pressing units is detachably disposed on the body, and each of the pressing units is provided with a second connecting component, and each of the second connecting components is detachably connected to the first connecting component Connection; each of the pressing units further has a contact structure, and a plurality of the pressing units have different contact structures of different shapes; wherein, when the second connecting component of each pressing unit is connected to When the first connecting components are connected to each other, each of the pressing units is fixedly disposed on the body; wherein, the engaging component of any of the pressing units and the wafer carrying device are engaged with each other, and When the wafer pressing device is fixedly disposed above the position where the wafer is mounted on the wafer carrying device, the contact structure of the pressing unit can correspondingly press the wafer against the one opposite to the wafer carrying device side. 如請求項6所述的晶片抵壓裝置套件,其中,所述本體彼此相反的兩側分別內凹形成有一操作槽,所述卡合組件包含兩個卡扣件及兩個彈性件,各個所述卡扣件樞接於所述本體,且兩個所述卡扣件對應位於兩個所述操作槽中;各個所述卡扣件的一端及所述晶片承載裝置分別具有能彼此相互卡合的一扣合結構;兩個所述彈性件對應設置於兩個所述卡扣件與所述本體之間;各個所述彈性件的一端固定於所述本體,另一端則固定於所述卡扣件;各個所述卡扣件被操作而相對於所述本體旋轉時,位於各個所述卡扣件及所述本體之間的各個所述彈性件被擠壓而對應產生彈性回復力。The chip pressing device kit according to claim 6, wherein the opposite sides of the body are respectively concavely formed with an operation groove, and the engaging component includes two fasteners and two elastic members, each The buckle is pivotally connected to the body, and the two buckles are correspondingly located in the two operating slots; one end of each buckle and the wafer carrying device are respectively capable of being engaged with each other A snap-fit structure; two elastic members are correspondingly disposed between the two snap members and the body; one end of each elastic member is fixed to the body, and the other end is fixed to the card Fastener; when each of the fasteners is operated and rotated relative to the body, each of the elastic members between each of the fasteners and the body is squeezed to correspondingly generate an elastic restoring force. 如請求項6所述的晶片抵壓裝置套件,其中,所述本體具有一卡合槽,所述第一連接組件包含有至少一第一磁吸構件,所述第一磁吸構件位於所述卡合槽中;所述第二連接組件包含至少一第二磁吸構件;各個所述抵壓單元相反於具有所述接觸結構的一側設置有所述第二磁吸構件;當各個所述抵壓單元相反於具有所述接觸結構的一側卡合設置於所述卡合槽中時,所述第二磁吸構件能對應與所述第一磁吸構件相互吸引,而所述第二連接組件則能固定設置於所述本體。The wafer pressing device kit according to claim 6, wherein the body has an engaging groove, and the first connection assembly includes at least a first magnetic attraction member, the first magnetic attraction member is located at the In the engaging groove; the second connection assembly includes at least one second magnetic attraction member; each of the pressing units is provided with the second magnetic attraction member on the side opposite to the contact structure; when each of the When the pressing unit is opposite to the side with the contact structure, the second magnetic attraction member can be attracted to the first magnetic attraction member correspondingly, and the second The connecting component can be fixedly arranged on the body. 如請求項6所述的晶片抵壓裝置套件,其中,所述本體還具有一第一防呆結構,各個所述抵壓單元還具有一第二防呆結構;當所述第一連接組件與所述第二連接組件相互連接,而各個所述抵壓單元固定於所述本體時,所述第一防呆結構與所述第二防呆結構相互固定。The chip pressing device kit according to claim 6, wherein the body further has a first foolproof structure, and each of the pressing units further has a second foolproof structure; when the first connecting component is The second connection components are connected to each other, and when each of the pressing units is fixed to the body, the first foolproof structure and the second foolproof structure are fixed to each other. 如請求項9所述的晶片抵壓裝置套件,其中,所述本體鄰近於所述卡合槽的位置內凹形成有一凹槽,所述凹槽與所述卡合槽相連通,而所述凹槽為所述第一防呆結構;各個所述抵壓單元的一側向外凸出形成有所述第二防呆結構。The wafer pressing device kit according to claim 9, wherein a recess is formed in the body adjacent to the engaging groove, and the groove communicates with the engaging groove, and the The groove is the first foolproof structure; one side of each of the pressing units protrudes outward to form the second foolproof structure.
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Publication number Priority date Publication date Assignee Title
TWI809938B (en) * 2022-06-17 2023-07-21 吳俊杰 Chip pressing device

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US20050245119A1 (en) * 2004-04-30 2005-11-03 Tsai Chou H Chip connector that can be in sliding contact with a chip
TWM423838U (en) * 2011-11-08 2012-03-01 Chip Guard Co Ltd Inspection apparatus for integrated circuit chip
EP3101400A1 (en) * 2014-01-30 2016-12-07 Hitachi Automotive Systems, Ltd. Mechanical quantity measuring device and sensor unit
TWM549875U (en) * 2017-05-26 2017-10-01 Kita Sensor Tech Co Ltd Sensor and sensing device comprising the same

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Publication number Priority date Publication date Assignee Title
US20050245119A1 (en) * 2004-04-30 2005-11-03 Tsai Chou H Chip connector that can be in sliding contact with a chip
TWM423838U (en) * 2011-11-08 2012-03-01 Chip Guard Co Ltd Inspection apparatus for integrated circuit chip
EP3101400A1 (en) * 2014-01-30 2016-12-07 Hitachi Automotive Systems, Ltd. Mechanical quantity measuring device and sensor unit
TWM549875U (en) * 2017-05-26 2017-10-01 Kita Sensor Tech Co Ltd Sensor and sensing device comprising the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI809938B (en) * 2022-06-17 2023-07-21 吳俊杰 Chip pressing device

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