TWI656356B - Method for adjusting lenses of a lens set and a lens device - Google Patents

Abstract

The invention discloses a lens assembly and an adjustment method thereof, which are suitable for a large-diameter lens of a vertical structure (diameter The 100mm) lens assembly compensates for aberrations in the optical system due to the deformation of the lens's own weight and the holding device's clamping stress.

Description

Method for adjusting lens of mirror group and mirror assembly

The present invention relates to a mirror assembly and an adjustment method thereof, and more particularly to a mirror assembly for compensating for aberrations of an optical system and an adjustment method thereof.

In applications such as ultra-high-precision optical lenses such as lithographic projection lenses, high lens quality requirements, low tolerance, and the large number of lenses, the aberrations caused by the accumulation of multiple lens distortions will lead to optical quality. deterioration. On the other hand, the optical quality of a large-diameter lens is degraded by the mirror distortion caused by the self-weight of the lens and the holding stress of the holding device. Therefore, the lens holding device needs to be specially designed to maintain the optical quality.

The exposure lens of the semiconductor industry converts the pattern of the reticle onto the wafer by magnification conversion, and its resolution is at least micron grade or finer nanometer grade. Because of the high precision of the system, it has approached the diffraction limit. The optical quality is evaluated by the wavefront error. From the wavefront point of view, the mirror deformation will change the phase of the light wave, causing the wavefront to be distorted, and the wavefront distortion of the light passing through each mirror surface will be superimposed on the final image. And the final wavefront error is formed. Therefore, even if the lens is perfect and in the correct position, large diameter lenses (such as diameter The assembly of 100 mm) still faces the aforementioned problems of mirror deformation and stress caused by the self-weight of the lens and the holding of the holding device, so that the optical quality is degraded and good image quality cannot be guaranteed.

The projection lens of the exposure machine is mostly an upright structure. The conventional technology uses a three-point support and retention technology and an elastic support structure to hold the lens on the lens barrel and the lens holder to reduce the clamping stress and the lens deformation. However, even with a specially designed holding device, the mirror remains deformed. In the structure where the projection lens of the exposure machine is more than ten pieces, the wavefront distortion caused by the residual deformation of the plurality of lenses is reduced by the cumulative wavefront error to reduce the final optical quality.

In order to overcome the above-described specular deformation, the prior art rotates the lens to compensate for aberrations or compensates for aberrations by applying an additional polarizing element. This is commonly seen in the production of exposure machine projection lenses, such as the exposure lens supplier Carl Zeiss SMT and the exposure machine equipment supplier ASML, have disclosed methods to solve the aforementioned problems.

US Patent No. 6,697,199 B2, "Objective with lenses made of a crystalline material" and "US 7,239,447 B2, "Objective with crystal lenses", as disclosed by Carl Zeiss SMT, disclose the compensation of body-centered cubic optics by rotating the lens around the axis. The phase retardation produced by the material's autobiographical birefringence reduces the effect of the wavefront error on the optical quality.

ASML, US Patent Publication No. 6,970,232 B2 "Structures and methods for reducing aberration in integrated circuit fabrication systems" and US 7,738,172 B2 "Structures and methods for reducing aberration in optical systems" are disclosed using a built-in axis rotation The polarization optics of the projection lens of the exposure machine compensates for the phase delay caused by the self-birefringence of the complex body-centered cubic optical material lens. In addition, the compensation can be achieved by configuring a body-centered cubic optical material lens that rotates the different lattice axes of the shaft.

James P. McGuire discloses a method for compensating optical system aberrations in "Methods for reducing aberration in optical systems" in US Patent Publication No. US 2003/0086171 A1, which is directed to aberrations caused by polarized, cubic optical materials on optical lenses. A solution is proposed to compensate for aberrations by modulating the polarization between the first group, the second group, and the polarization modulation elements in the middle of the two groups.

Conventional techniques are mostly used to expose the aberration compensation method of a high numerical aperture exposure projector lens containing a body-centered cubic optical material such as calcium fluoride (CaF ₂ ). The aberration or wavefront error is derived from body-centered cubic optics. The birefringence of the material due to its self-body structure. The methods disclosed in the prior art generally have the disadvantage that the materials are not easy to manufacture, costly or unfavorable.

For the sake of the job, the present invention is directed to the lack of the prior art, and after careful experimentation and research, and a perseverance spirit, the present case is conceived to overcome the above disadvantages. The following is a brief description of the case.

In order to solve the defects generated in the prior art, the present invention proposes a mirror device, a lens assembly device and an adjustment method thereof which are different from the prior art, and the holding device is systematically arranged at an appropriate position of each lens, and can be comprehensively compensated. The distortion of the lenses caused by the holding of the holding device reduces the final residual wavefront error of the optical system.

The invention rotates the holding device of each lens relative to the adjacent lens to comprehensively compensate the aberration caused by the deformation of each lens, reduces the residual residual aberration of the optical system, and reduces the influence of the mirror deformation on the imaging quality of the system. This method has a compensating effect on the deformation of the mirror surface with rotational symmetry, and is easy to practice, which is advantageous for manufacturing, assembly and production.

The invention discloses a method for configuring a holding device of a lens group, which is particularly suitable for The large-diameter lens group of the vertical structure can compensate for the deformation and aberration caused by the self-weight of the lens in addition to the deformation and aberration caused by the clamping stress of the holding device.

According to a first aspect of the present invention, a method for adjusting a lens of a lens group is provided, wherein the lens group includes a plurality of lenses having a number of at least three, the adjusting method comprising: arranging the plurality of lenses on an optical axis, and the optical edge a first direction of the optical axis advancing, and a direction opposite to the first direction is a second direction; distinguishing at least a portion of the plurality of lenses into 2n groups, n being a positive integer, wherein the 2n The group is divided into a first group to a 2n group, each of the odd group and the even group includes m lenses, and m is a positive integer of at least 2, the first group The lenses of the group 2n-1 group are sequentially the first ₍₁₎ lens, the i-1th ₍₁₎ lens, the i ₍₁₎ lens, ... to the first direction in the first direction. m ₍₁₎ lens to 1st _(2n-1) lens, ... i-1 _(2n-1) lens, i _(2n-1) lens, ... to m _(2n-1) lens The lenses of the second group to the second n group are sequentially the first ₍₂₎ lens, the ... i-1 ₍₂₎ lens, the i ₍₂₎ lens, ... To the mth ₍₂₎ lens to the 1st _(2n) lens, ... the i-1 _(2n) lens, the i _(2n) lens, ... to the m _(2n) a lens, i is a positive integer less than or equal to m, and the lenses of the first group to the second n-1 group sequentially correspond to the lenses of the second group to the second n group, and the first group The lens of the group 2n-1 is opposite to the corresponding lens of the second group to the second group; a plurality of holding devices are disposed on the plurality of lenses, and each of the holding devices transmits k Supporting elements holding each of the lenses, k being a positive integer greater than or equal to 2, the k support elements being located on average at the edge of each lens, and the k on the i-th _(2n-1) lens of the odd-numbered group Supporting elements having the same holding position as the corresponding k supporting elements on the i-th _(2n) lens of the even-numbered group; based on the k supporting elements on the i-th _(2n-1) lens Holding the position and deflecting the holding position of the k supporting elements on the i-th _(2n-1) lens at a deflection angle α: Wherein h is an integer from 1 to k; and deflecting the k support elements on the i-th _(2n) lens at the deflection angle α based on the holding position of the k support elements on the i-1 _(2n) lens retaining position to enabling when viewed from the direction of the optical axis, the first _{i-1 (2n-1)} of the k th position of the holding support to the different elements of the i _(2n-1) of the k th lens on the lens holding position of the support member, and the first i-1 _(2n) of the position of the lens holding member supporting the k dissimilar to that of i _(2n) of the k th position of holding the support element on the lens.

According to a second aspect of the present invention, there is provided a lens assembly comprising: a plurality of lenses having a number of at least three, wherein: the plurality of lenses are arranged on an optical axis, and the light advances along a first direction of the optical axis And the direction opposite to the first direction is a second direction, and at least a portion of the plurality of lenses is divided into a 2n group including an odd group and an even group, n being a positive integer The odd group is configured on the optical axis by a virtual interface symmetrically to the even group, the odd group including a first group to a second n-1 group, and the even group includes a second group Group to a 2n group, each of the odd group and the even group includes m lenses of at least 2, and the lens groups of the first group to the 2n-1 group The first direction is sequentially the first ₍₁₎ lens, ... the i-1 ₍₁₎ lens, the i ₍₁₎ lens, ... to the m ₍₁₎ lens to the first _{(2n-1) )} lens, a first ... _{i-1 (2n-1)} of the lens, the i _(2n-1) lenses, ... through m _(2n-1) lenses, the second group to the first group of 2n lens in the second direction to a first sequence ₍₂₎ lenses, ... i-1 ₍₂₎ of the lens, the i ₍₂₎ lenses, ... through m ₍₂₎ to the first lens 1 _(2n) lens, a first ... i-1 _(2n) lens, the i _(2n) Lens, ... to m _(2n) lens, i is a positive integer less than or equal to m, and the lenses of the first group to the 2n-1 group sequentially correspond to the second group to the first 2n group of lenses; a plurality of holding devices, each of the holding devices holding the odd group and the edge of the even group of lenses through a plurality of supporting members, and the i-th _(2n-1) lens has k supporting members a plurality of support members on the i-th _(2n-1) lens having the same holding position as the plurality of support members on the corresponding i-th _(2n) lens; and a deflection unit coupled to the plurality of holdings a device configured to position a holding position of the k support members on the i-th _(1n-1) lens, wherein the hth support member of the k support members deflects at a deflection angle α(h) The holding position of the hth support member on the i _(2n-1) lens: Where h is an integer from 1 to k, and the h on the i-th _(2n) lens is deflected by the deflection angle α(h) based on the holding position of the h support elements on the i-th _(2n-1) lens a holding position of the supporting member, wherein the holding position of the h-th supporting member on the i-th _(2n-1) lens is the same as that on the i-th _(2n) lens when viewed from the direction of the optical axis retaining position h-th support member, and the first i-1 _(2n) on the lens holding position of the h a support element dissimilar to the first i _(2n) of the first h on the lens and the first h-1 a supporting element The holding position.

According to a third aspect of the present invention, a lens assembly apparatus includes: a plurality of lenses sequentially arranged along an optical axis; and a plurality of holding devices for respectively holding the plurality of lenses, wherein: each The holding device includes a plurality of supporting members for holding an edge of each of the lenses in a minimum stress manner; the plurality of supporting members on the first lens of the plurality of lenses have a first holding position combination; The plurality of support members on the second lens of the plurality of lenses have a second holding position combination; and the first holding position combination and the second holding position combination have a deflection angle α.

According to a fourth aspect of the present invention, a lens assembly apparatus includes: a plurality of lenses arranged in sequence along an optical axis, and including an incident end lens, at least one intermediate lens, and an exit end lens, wherein the incident end lens And a plurality of holding devices for holding the plurality of lenses respectively, wherein: each of the holding devices comprises a plurality of supporting members for holding the lenses in a minimum stress manner An edge of the plurality of support members of the incident end lens having a first holding position combination; the plurality of support members of the exit end lens having a second holding position combination; and the first holding position combination and the There is no deflection angle between the second holding position combinations to eliminate the aberration caused by the plurality of supporting members of the incident end lens and the exit end lens due to gravity.

According to a fifth aspect of the present invention, a lens assembly apparatus includes: a plurality of lens combinations sequentially arranged along an optical axis, and including an incident end lens assembly, at least one intermediate lens, and an exit lens combination, wherein The combination of the incident end lens assembly and the exit end lens combination is a symmetrical or symmetrical lens; and a plurality of holding devices for holding the plurality of lens assemblies and the intermediate lens respectively, wherein: each of the holding devices comprises a plurality of supporting elements, An edge for holding each of the associated lenses in a minimum stress manner; the plurality of support members of the incident end lens combination have a first plurality of combinations of holding positions; the plurality of supporting members of the exit lens combination a second plurality of sets of holding position combinations; and the first plurality of holding position combination sets and the second plurality of holding position combination sets are mirror images.

100, 600, 700, a00, g00‧‧‧ optical axis

10‧‧‧ sleeve

20‧‧‧ deflection unit

21‧‧‧Lock ring

22‧‧‧ Holding device

23‧‧‧Auxiliary holding device

231, 232, 233, i1, i2, i3, ih, ik‧‧‧ support components

11 ₍₁₎ , 1m ₍₁₎ , 11 _(n) , 1p _(n) , 11 ₍₁₎ , 1i ₍₁₎ , 1m ₍₁₎ , 11 _(2n-1) , 1i _(2n-1) , 1m _(2n-1) , 11 ₍₂₎ , 1i ₍₂₎ , 1m ₍₂₎ , 11 _(2n) , 1i-1 _(2n) , 1i _(2n) , 1m _(2n) , 221, 71, 81, 91 , 71', 81', 91'‧‧‧ first support element

222, 72, 82, 92, 72', 82', 92'‧‧‧ second support element

223, 73, 83, 93, 73', 83', 93' ‧ ‧ third support element

30, 410, 420, 430, 440, 450, 460, 510, 520, 530, 540, 5411, 5412, 5421, 5422, 550, 560, 601, 60S, 602 _{, 1 (1)} , i ₍₁₎ , m ₍₁₎ , 1 _(2n-1) , i-1 _(2n-1) , i _(2n-1) , m _(2n-1) , 1 ₍₂₎ , i-1 ₍₂₎ , i _{(2 )} , m ₍₂₎ , 1 _(2n) , i-1 _(2n) , i _(2n) , m _(2n) ‧‧‧ lenses

40, 50, 60, g0‧‧ ‧ lens group

40S, 52, 50S, a0S, b0S, S‧‧ symmetry plane

500‧‧‧Upright Exposure Headset

501‧‧‧ protruding deformation area

502‧‧‧ concave deformation zone

51‧‧‧Photomask

53‧‧‧ wafer

541‧‧‧ odd lens group

542‧‧‧even lens group

54111, 54112, 54121, 54122, 54211, 54212, 54221, 54222‧‧ ‧ mirror

61‧‧‧An angle of the distance between adjacent support elements of the lens

62‧‧‧An angle of the distance between non-adjacent support elements of the lens

63‧‧‧Displacement angle of adjacent lens support elements

64‧‧‧ Non-adjacent lens support element misalignment angle

65‧‧‧Support element total misalignment angle

70, 70’‧‧‧ first lens

80, 80’‧‧‧second lens

90, 90'‧‧‧ third lens

74, 75, 76, 84, 85, 86, 94, 95, 96, 74', 75', 76', 84', 85', 86', 94', 95', 96' ‧ ‧ angle

D1‧‧‧ first direction

D2‧‧‧ second direction

A1, a2, b1, b2‧‧‧symmetric lens group

A11, a12, a21, a22, b11, b12, b13, b21, b22, b23‧‧ symmetrical lenses

c, d‧‧‧ asymmetric lens group

C1, c2, d1‧‧‧ asymmetric lenses

G1‧‧‧first lens group

G2‧‧‧second lens group

g(n)‧‧‧nth lens group

g(2j-1)‧‧‧2j-1 lens group

g(2j)‧‧‧2j lens group

g(2n-1)‧‧‧2n-1 lens group

g(2n)‧‧‧2n lens group

L1‧‧‧1st lens

Li‧‧‧i i lens

p _(n) ‧‧‧n lens group p-lens

Figure 1 is a diagram showing a general lens group including a symmetrical and an asymmetrical configuration.

Figure 2 is a schematic view of the application of a general lens sleeve.

Figure 3 is a schematic diagram of the application of a conventional lens group without the application of the holding device of the present invention.

Figure 4 is a schematic view of a holding device for a symmetrical lens configuration of the present invention.

Figure 5A is a schematic view of a symmetrical lens structure.

Figure 5B is a schematic diagram of a symmetric lens structure.

Figure 6 is a view of a holding device for a similar type of lens configuration according to a preferred embodiment of the present invention.

Figure 7 is a schematic view of the arrangement of the support members at the lens according to a preferred embodiment of the present invention.

Figure 8 is a perspective view of a support member in an asymmetric lens group configuration according to a preferred embodiment of the present invention. schematic diagram.

Figure 9 is a schematic view showing the arrangement of the support members in a symmetrical lens group according to a preferred embodiment of the present invention.

FIG. 10 is a schematic diagram of a set of symmetric lens groups according to a preferred embodiment of the present invention.

Figure 11A is a mirror aberration diagram.

Figure 11B is a diagram showing the aberration distribution of another mirror.

Figure 12A is a conventional symmetric lens group aberration distribution map.

FIG. 12B is a diagram showing aberration distribution of a symmetrical lens group according to a preferred embodiment of the present invention.

The present invention will be fully understood from the following description of the embodiments, so that those of ordinary skill in the art to which the invention pertains can be accomplished, and the implementation of the present invention is not limited by the following embodiments. Where the same reference numerals always represent the same components.

The general lens group includes a symmetrical and an asymmetrical configuration. The example shown in Fig. 1 is a lens group disposed in a sleeve (not shown). The lens group includes symmetric lens groups a1, a2 and symmetry. The lens groups b1, b2 and the asymmetric lens groups c, d, the lenses a11 and a12 in the symmetrical lens group a1 are symmetric with respect to the symmetry plane a0S and the lenses a21 and a22 in the symmetrical lens group a2, and are symmetric The lenses b11, b12 and b13 in the lens group b1 are symmetrical with respect to the planes b0S and the lenses b21, b22 and b23 in the symmetrical lens group b2, and the center of curvature of each mirror surface is an optical axis a00, each The lenses are disposed in respective sleeves or secondary barrels (not shown) and are held by the retaining means of the support structure within the sleeve or secondary barrel to hold the individual lenses. The light enters the lens group from above, and the light passes through the lens of each lens group and is projected onto the mesh under the lens group. Mark (not shown). It should be noted that in order to achieve the effects of deformation and aberration caused by the clamping stress of the holding device, each symmetric lens group and each asymmetric lens group should include at least two lenses. Therefore, in the first figure, the lenses c1 and c2 in the asymmetric lens group c and the lens d1 in the asymmetric lens group d can be grouped into a group to apply the configuration method of the holding device of the present invention. In an asymmetric configuration.

Figure 2 illustrates an application schematic of a general lens sleeve. In the present example, the lens 30 is disposed in the sleeve 10, and has a hollow annular holding device 22 in the sleeve 10. The holding device 22 is provided with three first support members 221, second support members 222 and The support members of the three support members 223 are evenly distributed on the ring of the holding device 22 in an arc of 120° from each other to support the lower edge of the lens 30 upward. The holding device 22 forms a specific holding position combination or deflection unit 20 with the first support member 221, the second support member 222 and the third support member 223. The holding device in practical use can have more than three supporting elements. Below the holding device 22 is a hollow annular locking ring 21, the locking ring 21 is fixedly locked on the inner edge wall of the sleeve 10 to support the holding device 22 and the lens 30, and the upper edge of the lens 30 can also be arranged in a hollow ring shape. The auxiliary holding device 23 is for reinforcing the fixed lens 30, and the auxiliary holding device 23 is provided with three supporting members 231, 232 and 233. The lens 30 illustrated in Fig. 2 is placed horizontally, but the holding device of the present invention is not limited to a device in which the lens is placed horizontally.

Figure 3 is a schematic view showing the application of the conventional lens group without the holding device of the present invention. In this example, lens group g0 includes n lens groups, each lens group including a plurality of lenses in a plurality of sleeves (not shown), and a plurality of sleeves (not shown) are disposed from top to bottom in a mirror In the cartridge (not shown), each lens has a plurality of support members as shown in Fig. 2. In the case where the holding device of the present invention is not applied, the combination of the holding positions of the respective lenses is completely the same, that is, the supporting members are completely identical to each other at the supporting positions of the respective lenses. Specifically, the first lens 1 _{(1) of the} first lens group g1, the mth lens 1 _(m) continues until the first lens 1 _{(n) of} the nth lens group g _(n) , p All of the first support members 11 ₍₁₎ , 1m ₍₁₎ , 11 _(n) , 1p _(n) (black ₎ of the lens p _(n) are identical in position of the respective lenses, and the second and third of each lens The support elements are pushed in the same position on each lens.

Therefore, in the direction of the optical axis g00 formed along the center of curvature of the lens surface of the lens group, from the first lens 1 _{(1) of the} first lens group g1 to the p- _th lens p _(n ) of the n-th lens group g _(n ) It is observed that the positions of the supporting members of all the lenses overlap each other, and thus the deformation aberrations caused by the light rays of the respective lenses at the respective supporting member positions are superimposed on each other to cause deterioration of the final image quality.

In order to solve the influence of the deformation of each lens mirror due to the clamping of the holding device on the imaging quality of the system, the present invention compensates for the aforementioned deformation with a special holding device for the application of the symmetric lens configuration. As shown in FIG. 4, at least a part of the plurality of lenses in the optical lens is first divided into 2n lens groups, n is a positive integer, and 2n lens groups are further divided into odd lens groups (the odd number is represented as 2n) -1, n=1, 2, 3..., j...) and even lens groups (the even numbers are expressed as 2n, n-1, 2, 3..., j...), in the odd lens group A lens group g (2j-1) and a corresponding even lens group g (2j) are referred to as corresponding lens groups.

The odd lens group is sequentially arranged in the first direction D1 by the first lens group g1, the (2j-1) lens group g(2j-1), and the 2n-1 lens group g(2n-1). In the lens barrel (not shown), the even lens groups are sequentially arranged by the second lens group, the 2j lens group g(2j) to the 2n lens group in the second direction D2 opposite to the first direction D1. In the same lens barrel, the lenses in the odd lens group and the even lens group are each symmetrical with respect to the symmetry plane S. Each lens group includes two or more m lenses, and the lenses of the first lens group g1 to the second n-1 lens group g (2n-1) are sequentially the first ₍₁₎ in the first direction D1 _. Lens, ..., i ₍₁₎ lens, ... to m ₍₁₎ lens to 1 _(2n-1) lens, ..., i _(2n-1) lens, ... to m _(2n-1) lens Disposed in the lens barrel, the lenses of the second lens group g2 to the second n lens group g (2n) are sequentially in the second direction D2 as the first ₍₂₎ lens, ..., the i ₍₂₎ lens, ... From the m ₍₂₎ lens to the 1st _(2n) lens, ..., the i _(2n) lens, ... to the m _(2n) lens, arranged in the same lens barrel, (m = 1, 2, 3... , i...), i is a positive integer less than or equal to m. Lens i _(2j-1) of the (2j-1) lens group g(2j-1) in the odd lens group and lens i _(2j) of the 2j lens group g(2j) in the even lens group One-to-one correspondence is called a corresponding lens. In the present example, the light from the first lens group g1 of the first lens 1 ₍₁₎ is incident, and the second lens group g2 from the first lens 1 ₍₂₎ emitted.

The holding device of each lens configuration has three support elements, and the holding device in practical use can have more than three support elements. The first support element of each lens is indicated in this example, such as 11 ₍₁₎ , 1i ₍₁₎ , 1m ₍₁₎ to 11 _(2n-1) , 1i _(2n-1) , 1m of the odd lens group _(2n-1) , 11 ₍₂₎ , 1i ₍₂₎ , 1m ₍₂₎ to 11 _(2n) , 1i _(2n) , 1m _(2n) of the even lens group, support elements in each lens group Both of its adjacent lenses are deflected by a specific angle. The deflections of the corresponding support elements of the corresponding lenses in each corresponding lens group are the same specific angle. As can be seen from Fig. 4 of the present example, the present invention is directed to a configuration of a symmetrical lens assembly, a mirror assembly or an optical lens such that the first support members 11 ₍₁₎ , 1i ₍₁₎ , 1 m of each odd lens group _{( 1)} , 11 _(2n-1) , 1i _(2n-1) , 1m _(2n-1) deflection angles with the first support elements 11 ₍₂₎ , 1i ₍₂₎ , 1m _{(2 )} of the even lens group ₎ , 11 _(2n) , 1i _(2n) , and 1m _{(2n) have} the same deflection angle. That is, the present invention is directed to the configuration of the symmetrical lens assembly device, the mirror assembly device or the optical lens, such that the combination of the holding positions of the odd lens groups is the same as the combination of the holding positions of the corresponding even lens groups, so that the odd lens group is assembled. The set of holding position combinations is also the same as the set of holding position combinations of the corresponding even lens group sets.

In one case, each lens of the even lens group has the same or similar structural features as the corresponding lenses in the odd lens group, including the concave lens, the convex lens, the lens curvature, and the lens thickness. In the case where the structural features of the respective lenses in the odd lens group and their corresponding even lens groups are identical, the lens configuration of the odd lens group and the even group is referred to as a symmetric lens structure. Mirror as shown in Figure 5A The wafer set 40 has lenses 410, 430 and 450 and a symmetrical lens structure with respect to the symmetry plane 40S of the lenses 420, 440 and 460, respectively.

In another case, the lens structural features of each lens in the odd lens group are not exactly the same as the corresponding lenses in the corresponding even lens group, but the difference is limited to a specific range, such odd lens group and even lens The lens structure configured by the group is called a symmetric lens structure. The relevant parameters determining the symmetry-like lens include the material properties of the corresponding lens (ie, the young's modulus/density), the corresponding lens diameter, the thickness ratio of the thickness (Part scale), the lens diameter of the corresponding lens, and the thickness ratio. And the curvature of the corresponding lens (Radius), when the relevant parameters of the two corresponding lenses meet one of the following conditions, the two corresponding lenses are called symmetric lenses: (1) corresponding to the material properties of the lens, in which the material properties can be The ratio of Young's coefficient to specific gravity is defined as within ±20%; (2) the ratio of the Young's coefficient to the specific gravity of the lens is within ±20%, but when the two corresponding lenses are lenticular lenses, The ratio of the Young's coefficient to the specific gravity is within ±10%; (3) the diameter and thickness ratio of the corresponding lens are within ±20%, but when the two corresponding lenses are lenticular lenses, the diameter and thickness ratio are The difference is within ±10%; (4) the curvature of the corresponding lens (Radius) is within ±30%, but when the two lenticular lenses are, the curvature (Radius) is within ±10%. As shown in FIG. 5B, the lens groups 510, 530, and 550 and the lenses 520, 540, and 560 are symmetrical lens structures with respect to the symmetry plane 50S, respectively. The invention can achieve the effect of compensating for the aberration of the deformation of each lens due to the clamping of the holding device for the two symmetric lens structures and the symmetric lens structure.

The embodiment of the present invention, such as the symmetric lens group 60 shown in FIG. 6, can be regarded as an application derived from FIG. 4, and the lens requires only at least 3 pieces, but the number of supporting elements of the lens and each lens implemented in the present case is not This is a limitation of this embodiment. The symmetry lens group 60 shown in Fig. 6 includes lenses 601, 60S and 602, wherein the symmetry plane of the lenses 601 and 602 is the center plane of the lens 60S, so the lenses 601 and 602 are vertically symmetrical with each other with the center plane of the lens 60S. . in In this embodiment, each of the lenses 601, 60S and 602 is provided with three supporting elements. In order to compensate for the aberration of the lens caused by the clamping of the supporting elements, the three supporting elements on the symmetric lenses 601 and 602 are the same. The individual holding devices on the same lens are 360/3 (= 120°) apart from each other, while the three supporting elements of lenses 601 and 602 are deflected by 120/2 (= 60°) with respect to the corresponding three supporting elements on 60S.

In order to prevent aberrations caused by deformation of the respective lenses due to the support elements, the present invention appropriately configures the position of each lens of each odd lens group and its corresponding even lens group at each lens position to avoid individual lens groups. The inner lens has the same position as the corresponding support element of its adjacent lens. For the sake of explanation, each odd lens group and even lens group is set to include m lenses (m=1, 2, 3..., i...), and each lens is configured with k(k=1, 2, ..h ..) a support element to hold each lens. As shown in Fig. 7, the upper part shows the first lens L1 of a particular odd or even lens group, its k support elements (11, 12, 13, 1h to 1k) and the supporting elements thereof. Deflection angle, shown below is the ith lens Li of the same particular odd or even lens group and its k support elements (i1, i2, i3, ih to ik) and the deflection angle of the support element shown.

As shown in the specific embodiment of the present invention shown in FIG. 7, the 360° full-angle average of a certain lens in a certain lens group is first divided into k equal parts, and the same degree is 360°/k. The lens adjacent support element spacing angle 61, the respective support elements of the same lens in the same lens group are arranged at the edge of the respective lens at an interval angle 61 of the adjacent support elements of the lens, so that a certain lens in a certain lens group The hth support element is spaced apart from the first support element of the same lens by a non-adjacent support element spacing angle 62 of (h-1) x 360[deg.]/k. Then, the distance between the adjacent supporting elements 61 of the lens is equally divided into m equal parts, and the adjacent lens supporting elements of the degree of 360°/(k×m) are obtained by the misalignment angle 63, so that adjacent lenses in the same lens group are Each support element is connected to the center of each lens as the optical axis 600, and is biased in the clockwise direction or the counterclockwise direction. Turning the angle of the non-adjacent support element spacing angle 62 of the lens, so that the hth support element ih of the i-th lens Li in a certain lens group is relative to the first lens L1 of the same lens group The h support members 1h are at a distance of 64 from the non-adjacent lens support member of (i-1) x 360°/(k×m). Therefore, the hth supporting element ih of the i-th lens Li in each lens group is the optical axis 600 with respect to the h-th supporting element 1h of the first lens L1 of the lens group with a line passing through the center of curvature of each lens. , in the clockwise direction or the counterclockwise direction, the total misalignment angle 65 of the supporting element of the degree (i-1)×360°/(k×m)+(h-1)×360°/k is deflected, which is equivalent to ( I-1) Multiply the sum of the adjacent lens misalignment angles 63 and (h-1) by the angle 62 of the non-adjacent support element spacing of the lens. When applied to the structure of the corresponding lens group, the h-th support element ih of the corresponding lens of the i-th lens Li in the lens group (such as lens group g(2j-1)), that is, its corresponding lens group ( The hth support element ih of the i-th lens Li in the lens group g(2j) is relative to the first support element 1h of the first lens L1 in the same lens group (lens group g(2j)), Also, the angle of the total misalignment angle 65 of the same support member is deflected in the same clock direction, so that the combination of the holding positions of the respective lens groups and their corresponding lens groups is the same, and the combination of the lens groups and their corresponding lens groups is formed. The same set is the same.

The support elements of each lens in each lens group are deflected by the aforementioned systematic angle such that the positions of the individual lenses in each lens group and its corresponding lens group are correspondingly supported by all other lenses in the same group The position of the elements is different, as viewed from the central axis of the lens group, it is known that the positions of the corresponding supporting elements of all the lenses in the same group do not overlap. Therefore, the light rays passing through the respective lenses are not superimposed on the final image due to the deformation aberration caused at the positions of the respective supporting members, resulting in deterioration of the aberration.

The advantage of the configuration of the symmetrical lens group is that since the curvatures of the lenses of the respective lens groups and the corresponding lenses in the corresponding lens group are symmetrical with each other, the aberration caused by the weight of each lens and its corresponding lens group Image of the corresponding lens in its own weight The difference is offset by each other.

For the application of the asymmetric lens configuration, such as the lens groups c and d shown in Fig. 1, the lens group includes more than one lens group, and each lens group contains two or more m pieces (m= 1, 2, 3.. i..) Lenses, each of which is configured with k (k = 1, 2, .. h..) support members to hold the respective lenses. Since the asymmetrically arranged lens group does not have a lens group symmetrical thereto, it is only necessary to perform the angle deflection method of each of the lens supporting elements in the odd-numbered lens group according to the symmetric configuration described above. The lens has the effect of aberrations caused by the deformation of the supporting member.

Due to the aforementioned systematic angular deflection, the position of the supporting elements of each lens in each group is different from the position of the corresponding supporting elements of all other lenses in the same group, and the lens group is observed along the lens axis direction of the lens group. The position of all of the lens support members in the group indicates that the corresponding support members of all lenses in the same group are not repeated at the same position. Therefore, the deformation aberrations caused by the respective lenses at the positions of the respective supporting members are not superimposed on each other in the final imaging, resulting in deterioration of aberrations.

The number of lenses included in each lens group and the number of support elements per lens in the embodiments of the present invention may be increased according to the application requirements of the lens group system, and is not limited to the embodiment of the present invention. The number of lens groups, the number of lenses, and the number of support elements.

In a specific embodiment of the present invention for an asymmetric lens configuration, please refer to the lens group diagram of Figure 8, wherein the lens group includes three lenses. Each of the three lenses in the lens group is provided with three supporting elements, and each supporting element on different lenses in the lens group is connected to the optical axis 700 through the line connecting the curvature centers of the lenses, respectively. Its relative deflection angle rotates in a clockwise or counterclockwise direction. In the deflection angle ((i-1) × 360° / (k × m) + (h-1) × 360 / k °) in the present embodiment, k is the total support member of each lens The number 3, m is the total number of lenses of the lens group 3, i is the respective lens numbers 1, 2 and 3, h is the respective lens supporting element group numbers 1, 2 and 3, so the deflection angle of this embodiment is (i-1) ) × 40 ° + (h - 1) × 120 °.

According to the aforementioned deflection angle equation, it can be seen that the second support element and the third support element of each lens are also at an angle of 120° at the same lens pitch angle of 120° from the first support element and the second support element of each lens. The second support member 72 of the first lens 70 is at an angle 75 of 120 degrees from the first support member 71 of the first lens 70, and the first support member 73 of the first lens 70 and the first support of the first lens 70 Element 71 is at an angle 76 of 120° x 2 = 240°.

In the same manner as described above, the first support member 81 of the second lens 80 is at an angle 84 of 40 degrees from the first support member 71 of the first lens 70, due to the first support member and the second support of each lens. The elements are at an angle of 120°, so that the second support element 82 of the second lens 80 is at an angle 85 of 160° (= 120° + 40°) from the first support element 71 of the first lens 70, and second The third support member 83 of the lens 80 is at an angle 280 of 280[deg.] (= 120[deg.] x 2 + 40[deg.]) from the first support member 71 of the first lens 70.

In the same manner as described above, the first support member 91 of the third lens 90 is at an angle 94 of 80° from the first support member 71 of the first lens 70, and the second support member 92 of the third lens 90 is first. The first support member 71 of the lens 70 is at an angle 95 of 200° (= 120° + 80°), and the third support member 93 of the third lens 90 is spaced from the first support member 71 of the first lens 70 by 320. Angle 96 of ° (= 120 ° × 2 + 80 °). On the other hand, in FIG. 8, it is shown that all the supporting members of the first lens 70, the second lens 80 and the third lens 90 in the lens group in this embodiment are observed from the direction of the central optical axis 700 of the lens group. The locations are not overlapping each other. Therefore, the light rays passing through the respective lenses are not superimposed on the final image due to the deformation aberration caused at the positions of the respective supporting members, resulting in deterioration of the aberration.

Referring to FIG. 9, in another embodiment of the present invention, an asymmetric lens group is generalized to a structure of a symmetric lens group. This embodiment shows two mutually symmetrical lens groups, each lens group comprising three lenses. Symmetric lens groups can be divided into odd (2j-1) lens groups and odd (2j-1) lens groups g (2j-1) and their corresponding even (2j) lens groups g (2j), The embodiment is only for two symmetric lens groups g(2j-1) and g(2j) in the lens group and a simplified description thereof, where j=1. The odd (2j-1) lens group includes a first lens, a second lens, and a third lens arranged in a first direction (top to bottom in this embodiment), the even (2j) lens group including The first lens, the second lens, and the third lens are arranged in a second direction opposite to the first direction (in this embodiment, from bottom to top). The first lens, the second lens and the third lens of the odd (2j-1) lens group respectively correspond to the first lens, the second lens and the third lens of the even (2n) lens group by a symmetry plane respectively Symmetric or symmetry.

It should be noted that in the present embodiment, the mirror faces of the respective lenses of the odd (2j-1) lens group and the even (2j) lens group are opposite by a symmetry plane, so the curvature of the respective symmetrical lens is relatively The light on the optical axis of the lens group is reversed.

According to the architecture of the asymmetric lens group shown in the foregoing embodiment, the distance between each supporting element of each lens and the adjacent supporting element in the odd (2n-1) lens group and its corresponding even number (2n) lens group is 120° angle. At the same time, in the odd (2j-1) lens group and its corresponding even (2j) lens group, the first supporting elements 81, 81' of the second lens 80, 80' of the two lens groups and the respective lens group The first support elements 71, 71' of the first lens 70, 70' of the set are at an angle 84, 84' of 40°, the second support elements 82, 82' of the second lens 80, 80' and the respective lens group The first support elements 71, 71' of the first lens 70, 70' are at an angle 85, 85' of 160°, and the third support elements 83, 83' of the second lens 80, 80' are associated with the respective lens group The first support elements 71, 71' of the first lens 70, 70' of the set are at an angle of 280° 85, 85'. Furthermore, the first support elements 91, 91' of the third lens 90, 90' are the first of the respective lens groups The first support members 71, 71' of the lenses 70, 70' are at an angle 94, 94' of 80°, the second support members 92, 92' of the third lens 90, 90' and the first lens of the respective lens group The first support members 71, 71' of 70, 70' are at an angle 95, 95' of 200°, and the third support members 93, 93' of the third lens 90, 90' and the first lens of the respective lens group The first support elements 71, 71' of 70, 70' are at an angle 96, 96' of 320°.

On the other hand, when the lens mirror curvature center line of each lens group is viewed in the direction of the optical axis 700, it can be seen that in the odd (2j-1) lens group and its corresponding even number (2j) lens group, their respective groups The positions of all the supporting elements of the first lens, the second lens and the third lens are not staggered with each other because of the mutual displacement, so that when the light passes through the respective supporting element positions of the respective lenses, the deformation image is caused by the respective supporting elements. Poor, on the surface of the final projection target (such as a wafer, not shown), does not accumulate and causes greater distortion. Further, in the odd (2j-1) lens group, the first lens 70, the second lens 80 and the third lens 90, the support members 71, 72, 73, 81, 82, 83, 91, 92 and 93, respectively Supporting elements 71', 72', 73', 81', 82', 83' of the corresponding first (70%) lens group corresponding to the first lens 70', the second lens 80' and the third lens 90', The positions of 91', 92' and 93' are the same, and since the curvature of each of the symmetric lenses in the aforementioned symmetrical lens group is opposite to the light passing through the optical axis of the lens group, the aberrations thereof are mutually offset to a minimum.

According to another embodiment of the present invention, referring to FIG. 10, the present embodiment is an upright exposure head lens group 500 applied to an i-line wavelength (360 nm), the function of which is to project a pattern of the mask 51. To the wafer 53, the mirror set 500 has a symmetrical structure with the diaphragm position as the plane of symmetry 52. An odd lens group 541 and an even lens group 542 with respect to the symmetry plane 52 are included in the mirror set 500, wherein the odd lens group 541 includes a lens 5411 and a lens 5412, and the even lens group 542 includes a lens 5411 and a lens 5412, respectively. Corresponding lens 5422 and lens 5421, lenses 5411, 5422 have a diameter of 290 mm, and lenses 5412, 5421 have a diameter of 280 mm. The lenses 5411, 5412, 5421, 5422 are each held in the respective barrels by three point support members on a mirror holder (not shown) in the secondary barrel (not shown) in which they are located. The three-point support members of the lenses 5411 and 5412 are pivoted 60° clockwise with respect to the lenses 5422 and 5421 with respect to the lens mirror center line as a line to compensate for the aberration caused by the support member clamping.

The lens 5411 includes a mirror surface 54111 that faces away from the plane of symmetry 52 and a mirror surface 54112 that faces the plane of symmetry 52, while the lens 5412 includes a mirror surface 54121 that faces away from the plane of symmetry 52 and a mirror surface 54122 that faces the plane of symmetry 52. On the other hand, the lens 5421 in the even lens group 542 includes a mirror surface 54212 that faces away from the plane of symmetry 52 and a mirror surface 54211 that faces the plane of symmetry 52, while the lens 5422 includes a mirror surface 54222 that faces away from the plane of symmetry 52 and faces the plane of symmetry 52. Mirror 54221. The mirror surface 54111 is symmetric with respect to the mirror surface 54222, the mirror surface 54112 is symmetric with the mirror surface 54221, the mirror surface 54121 is symmetric with the mirror surface 54212, and the mirror surface 54122 is symmetric with the mirror surface 54211. The lenses 5411, 5412, 5421, and 5422 in this embodiment are respectively held in the respective lens barrels by the three-point support members on the mirror holders in the secondary lens barrel in which they are located.

Please refer to FIGS. 11A and 11B, which are diagrams showing the contour maps of the mirror surface 54111 and the mirror surface 54112, respectively, due to the amount of deformation caused by the holding means of the three-point support member. The solid curve is where the support member is located at the lens such that the mirrored region forms a convex deformation region 501 and the dashed curve is the position of the lens between the support members such that the mirror region forms a concave deformation region 502. The region where the curve is denser represents the larger the amount of deformation caused by the deformation of the mirror region, and the wider the distribution of the dense region of the curve represents the larger the mirror region affected by the aberration. As can be seen from Figures 11A and 11B, the curve-dense regions of the convex deformation are distributed in the region of the three-point support member, and the regions between the three-point support members are the opposite concave deformations, both of which cause wavefront errors. .

Please refer to FIG. 12A, which shows the total wavefront error distribution accumulated by all the lenses of the vertical exposure head lens group 500 when the compensation method of the present invention is not implemented, and it can be seen that In the case where the positions of the three-point support members of the respective lenses are the same, the optical quality is degraded due to the deformation of the aforementioned mirror support members, and the estimated wavefront error is increased to 0.26λ, and the curve-dense regions are distributed at three points. The position of the support element. However, after implementing the compensation method of the present invention, the wavefront error value is reduced to 0.0743λ, as shown in FIG. 12B, and the intensity of the curve is lower than that shown in FIG. 12A, and the dense area is also reduced. Therefore, the influence of the mirror deformation caused by the position of the supporting member on the optical quality can be effectively reduced.

Example

A method for adjusting a lens of a lens group, wherein the lens group comprises a plurality of lenses having a number of at least 3, the adjusting method comprising: arranging the plurality of lenses on an optical axis, a first light along the optical axis The direction advances, and the direction opposite to the first direction is a second direction; distinguishing at least a part of the plurality of lenses is 2n groups, n is a positive integer, wherein the 2n groups are divided into one 1 group to a 2n group, each of the odd group and the even group includes m lenses, m is a positive integer of at least 2, and the first group to a 2n-1 The lenses of the group are sequentially in the first direction as the first ₍₁₎ lens, ... the i-1 ₍₁₎ lens, the i ₍₁₎ lens, ... to the m ₍₁₎ lens to the first _{(2n- 1)} lens, ... i-1 _(2n-1) lens, i-th _(2n-1) lens, ... to m _(2n-1) lens, the lens group of the second group to the second n group The second direction is sequentially the first ₍₂₎ lens, the i-1th ₍₂₎ lens, the i-th ₍₂₎ lens, ... to the mth ₍₂₎ th lens to the first _(2n) lens, ... i -1 _(2n) lens, the i _(2n) lenses, ... through m _(2N) of the lens, i is less than or equal to m, n The lenses of the first group to the second n-1 group sequentially correspond to the lenses of the second group to the second n group, and the first group to the second n-1 group The mirror surface of the lens is opposite to the corresponding lens of the second group to the second group; the plurality of holding devices are disposed on the plurality of lenses, and each of the holding devices holds the lenses through the k supporting elements, a positive integer greater than or equal to 2, the k support elements are located on average at the edge of each lens, and the k support elements on the ith _(2n-1) lens of the odd group have the corresponding even number the i-th group _(2n) the same as the k th support element on the lens holding position; based on the first _{i-1 (2n-1)} holding the position of the k th support element on the lens and deflected in a deflection angle α The holding position of the k supporting members on the i-th _(2n-1) lens: Wherein h is an integer from 1 to k; and deflecting the k support elements on the i-th _(2n) lens at the deflection angle α based on the holding position of the k support elements on the i-1 _(2n) lens retaining position to enabling when viewed from the direction of the optical axis, the first _{i-1 (2n-1)} of the k th position of the holding support to the different elements of the i _(2n-1) of the k th lens on the lens holding position of the support member, and the first i-1 _(2n) of the position of the lens holding member supporting the k dissimilar to that of i _(2n) of the k th position of holding the support element on the lens.

2. The adjustment method of embodiment 1, wherein the plurality of lenses have a diameter greater than 150 cm.

3. The adjustment method of embodiment 1 or 2, wherein the other of the plurality of lenses are arranged between the odd group and the adjacent odd group, the even group and the adjacent even group Between the groups or on the optical axis between the odd group and the adjacent even group, at the starting point of the first direction or at the starting point of the second direction.

4. The adjustment method of one of embodiments 1 to 3, wherein the optical axis of the mirror is perpendicular to a horizontal plane.

5. A lens assembly comprising: a plurality of lenses having a number of at least three, wherein: the plurality of lenses are arranged on an optical axis, the light is advanced along a first direction of the optical axis, and opposite to the first The direction of one direction is a second direction, and at least a part of the plurality of lenses is divided into a 2n group including an odd group and an even group, n being a positive integer, the odd group being The optical axis is configured to be symmetric with respect to the even group with a virtual interface, the odd group including a first group to a second n-1 group, and the even group includes a second group to a second 2n group a group, the odd group and each of the even groups include m lenses of at least 2, and the lenses of the first group to the second n-1 group are sequentially along the first direction 1st ₍₁₎ lens, ... i-1 ₍₁₎ lens, i ₍₁₎ lens, ... to m ₍₁₎ lens to 1 _(2n-1) lens, ... I-1 _(2n-1) lens, i-th _(2n-1) lens, ... to m _(2n-1) lens, the lens of the second group to the second n group is along the second direction In order, the first ₍₂₎ lens, ... i-1 ₍₂₎ lens, i ₍₂₎ lens, .. From the m ₍₂₎ lens to the 1st _(2n) lens, ... the i-1 _(2n) lens, the i _(2n) lens, ... to the m _(2n) lens, i is less than or a positive integer equal to m, the lenses of the first group to the second n-1 group sequentially correspond to the lenses of the second group to the second n group; a plurality of holding devices, each of the holding devices transmits a plurality of Supporting elements holding the edges of the odd group and the even group of lenses, and the i-th _(2n-1) lens has k support elements, and the plurality of support elements on the i-th _(2n-1) lens have a holding position identical to the plurality of support members on the corresponding i-th _(2n) lens; and a deflection unit coupled to the plurality of holding devices configured to be based on the i-th _(2n-1) lens Holding the holding position of the k supporting members, wherein the hth supporting member of the k supporting members deflects the holding of the hth supporting member on the i-th _(2n-1) lens by a deflection angle α(h) position: Where h is an integer from 1 to k, and the h on the i-th _(2n) lens is deflected by the deflection angle α(h) based on the holding position of the h support elements on the i-th _(2n-1) lens a holding position of the supporting member, wherein the holding position of the h-th supporting member on the i-th _(2n-1) lens is the same as that on the i-th _(2n) lens when viewed from the direction of the optical axis retaining position h-th support member, and the first i-1 _(2n) on the lens holding position of the h a support element dissimilar to the first i _(2n) of the first h on the lens and the first h-1 a supporting element The holding position.

6. The lens assembly of embodiment 5, wherein the plurality of lenses are caliber A round lens of 100 cm or more.

7. The lens assembly of embodiment 5 or 6, wherein the mirror aperture of the corresponding two of the plurality of lenses differs by less than ±20%.

8. The lens assembly according to any one of embodiments 5-6, wherein a material characteristic of the corresponding lens of the corresponding two lenses of the plurality of lenses, that is, a ratio of Young's coefficient to specific gravity, is ±20% within.

9. The lens assembly of any of embodiments 5-8, wherein a difference in mirror curvature of the corresponding two of the plurality of lenses is less than ±30%.

10. The lens assembly of any of embodiments 5-9, wherein a difference in diameter to thickness ratio of each of the plurality of lenses and a diameter to thickness ratio of each of the corresponding lenses is less than 20%.

11. The lens assembly of any one of embodiments 5 to 10, wherein each of the holding devices is an annular structure and is disposed in the primary lens barrel to carry each of the plurality of lenses, and each of the supporting elements is configured. On the ring structure.

12. The lens assembly of any one of embodiments 5-11, wherein the odd group and the even group of lenses are respectively disposed in the corresponding lens barrel.

13. The lens assembly of any of embodiments 5 to 12, wherein each of the plurality of lenses is disposed within the plurality of lenses.

A lens assembly device comprising: a plurality of lenses, the plurality of lenses being sequentially arranged along an optical axis; and a plurality of holding devices for holding the plurality of lenses respectively, wherein: each of the holding devices comprises a plurality of supports An element for holding an edge of each of the lenses in a minimum stress manner; the plurality of support members on the first lens of the plurality of lenses have a first holding position combination; one of the plurality of lenses The plurality of support members on the two lenses have a second holding position combination; and the first holding position combination and the second holding position combination are stored There is a deflection angle α.

15. The lens assembly of embodiment 14, wherein the deflection angle a is calculated by the following formula: Where k is the number of the plurality of support members and m is the number of the plurality of lenses.

A lens assembly device comprising: a plurality of lenses arranged in sequence along an optical axis, and comprising an incident end lens, at least one intermediate lens and an exit end lens, wherein the incident end lens is symmetric with the exit end lens Or a plurality of holding means for holding the plurality of lenses respectively, wherein: each of the holding means comprises a plurality of supporting members for holding an edge of each of the lenses in a minimum stress; the incident end The plurality of support members of the lens have a first holding position combination; the plurality of support members of the exit lens have a second holding position combination; and the first holding position combination and the second holding position combination do not exist Deflection angle to eliminate the aberration caused by the plurality of support elements of the incident end lens and the exit end lens due to gravity.

17. A lens assembly apparatus comprising: a plurality of lens combinations arranged sequentially along an optical axis and comprising an incident end lens assembly, at least one intermediate lens and an exit lens combination, wherein the incident end lens combination and the exit The end lens combination is a symmetrical or symmetrical lens combination; and a plurality of holding devices for holding the plurality of lens assemblies and the intermediate lens respectively, wherein: each of the holding devices comprises a plurality of supporting members for the lowest stress Holding an edge of each of the associated lenses; the plurality of support members of the incident end lens combination have a first plurality of combinations of holding positions; the plurality of supporting members of the exit lens combination have a second plurality of holding positions Combining the set; and the first plurality of holding position combination sets and the second plurality of holding position combination sets are mirror images.

Claims (13)

A method for adjusting a lens of a lens group, wherein the lens group comprises a plurality of lenses having a number of at least three, the adjusting method comprising: arranging the plurality of lenses on an optical axis, and the light is advanced along a first direction of the optical axis And the direction opposite to the first direction is a second direction; distinguishing at least a part of the plurality of lenses is 2n groups, n is a positive integer, wherein the 2n groups are divided into a first group Group to a 2n group, each of the odd group and the even group includes m lenses, m is a positive integer of at least 2, and the first group to a 2n-1 group The lens in the first direction is sequentially the first ₍₁₎ lens, ... the i-1 ₍₁₎ lens, the i ₍₁₎ lens, ... to the m ₍₁₎ lens to the first _(2n-1). Lens, ... i-1 _(2n-1) lens, i-th _(2n-1) lens, ... to m _(2n-1) lens, the second group to the second n group of lenses along the first The second direction is the first ₍₂₎ lens, ... the i-1 ₍₂₎ lens, the i-th ₍₂₎ lens, ... to the m ₍₂₎ lens to the first _(2n) lens, ... i-1 _(2n) lens, the I _(2n) of the lens, through m ... _(2n) of the lens, i is less than or equal to a positive integer m, The lenses of the first group to the second n-1 group sequentially correspond to the lenses of the second group to the second n group, and the lenses of the first group to the second n-1 group Corresponding to the corresponding groups of the second group to the second group of lenses, wherein a plurality of holding devices are disposed on the plurality of lenses, each of the holding devices holding each of the lenses through k supporting elements, wherein k is greater than Or a positive integer equal to 2, the k support elements are located at an edge of each of the lenses, and the k support elements on the ith _(2n-1) lens of the odd group have the corresponding even group The k holding members on the i-th _(2n) lens have the same holding position; and the deflection position is deflected by a deflection angle α based on the holding position of the k supporting members on the i-1 _(2n-1) lens The holding position of the k support elements on the i _(2n-1) lens: Wherein h is an integer from 1 to k; and deflecting the k support elements on the i-th _(2n) lens at the deflection angle α based on the holding position of the k support elements on the i-1 _(2n) lens retaining position to enabling when viewed from the direction of the optical axis, the first _{i-1 (2n-1)} of the k th position of the holding support to the different elements of the i _(2n-1) of the k th lens on the lens holding position of the support member, and the first i-1 _(2n) of the position of the lens holding member supporting the k dissimilar to that of i _(2n) of the k th position of holding the support element on the lens. The adjustment method of claim 1, wherein the plurality of lenses have a diameter of 100 cm or more. The adjustment method of claim 1, wherein the other of the plurality of lenses is arranged between the odd group and the adjacent odd group, the even group and the adjacent even group Between the optical axis between the odd group and the adjacent even group, the starting point of the first direction, or the starting point of the second direction. The adjustment method of claim 1, wherein the optical axis of the mirror is perpendicular to a horizontal plane. A lens assembly device comprising: a plurality of lenses having a number of at least three, wherein: the plurality of lenses are arranged on an optical axis, the light advances along a first direction of the optical axis, and is opposite to the first direction The direction is a second direction, and at least a portion of the plurality of lenses is divided into a 2n group including an odd group and an even group, n being a positive integer, the odd group being on the optical axis The virtual group is configured to be symmetric to the even group, the odd group includes a first group to a second n-1 group, and the even group includes a second group to a second n group. Each of the odd group and the even group includes m lenses of at least 2, and the lenses of the first group to the second n-1 group are first in the first direction. ₍₁₎ Lens, ... i-1 ₍₁₎ lens, i-th ₍₁₎ lens, ... to m ₍₁₎ lens to 1 _(2n-1) lens, ... i-1 _(2n-1) a lens, an i-th _(2n-1) lens, ... to an m _(2n-1) lens, wherein the lenses of the second group to the second n group are sequentially the first ₍₂₎ lens in the second direction, ... first i-1 ₍₂₎ of the lens, the i ₍₂₎ lenses, ... The m-th lens, I positive integer ₍₂₎ lens through 1 _(2n) lens, ... first i-1 _(2n) lens, the i _(2n) lenses, ... to m-th _(2N) less than or equal to m, and The lenses of the first group to the second n-1 group sequentially correspond to the lenses of the second group to the second n group; a plurality of holding devices, each of the holding devices holding the odd number through a plurality of supporting elements a group and an edge of the lens of the even group, and the i-th _(2n-1) lens has k support elements, and the plurality of support elements on the i-th _(2n-1) lens have the corresponding i-th _{(2n) the} same holding position of the plurality of support members on the lens; and a deflection unit coupled to the plurality of holding devices configured to be based on the k support members on the i-1 _(2n-1) lens a holding position, wherein the hth support member of the k support members deflects the holding position of the hth support member on the i-th _(2n-1) lens at a deflection angle α(h): Where h is an integer from 1 to k, and the h on the i-th _(2n) lens is deflected by the deflection angle α(h) based on the holding position of the h support elements on the i-th _(2n-1) lens holding position of the support member to enabling when viewed from the direction of the optical axis, the first _{i-1 (2n-1)} of the h-th holding position of the support element is the same as the lens the second i _(2n) to the first on the lens solid h a support element holding position, and the first i-1 _(2n) on the lens fixing the h a supporting member holding a position different to that of i _(2n) on the lens of the first h and second h-1 a supporting element Hold position. The lens assembly of claim 5, wherein the plurality of lenses are circular lenses having a diameter of 100 cm or more. The lens assembly device of claim 5, wherein the material characteristics of the corresponding lenses of the corresponding two lenses, that is, the ratio of the Yang coefficient to the specific gravity, are within ±20%. The lens assembly device of claim 5, wherein a difference in mirror surface diameter of the corresponding two of the plurality of lenses is less than 20%. The lens assembly of claim 5, wherein a difference in mirror curvature of the corresponding two of the plurality of lenses is less than 30%. The lens assembly of claim 5, wherein the ratio of the diameter to the thickness of each of the plurality of lenses and the diameter to thickness ratio of the lens corresponding thereto are less than 20%. The lens assembly device of claim 5, wherein each of the holding devices is a ring structure and is disposed in a single lens barrel to carry each of the plurality of lenses, and each of the supporting members is disposed on the ring structure. . The lens assembly device of claim 11, wherein the odd group and the even group of lenses are respectively disposed in the corresponding lens barrel. The lens assembly of claim 5, wherein each of the plurality of lenses is disposed in the plurality of lenses.