TWI539032B - Electrolytic copper foil, cleaning fluid composition and cleaning copper foil method - Google Patents
Electrolytic copper foil, cleaning fluid composition and cleaning copper foil method Download PDFInfo
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- TWI539032B TWI539032B TW102127581A TW102127581A TWI539032B TW I539032 B TWI539032 B TW I539032B TW 102127581 A TW102127581 A TW 102127581A TW 102127581 A TW102127581 A TW 102127581A TW I539032 B TWI539032 B TW I539032B
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- copper foil
- electrolytic copper
- cleaning
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 85
- 239000011889 copper foil Substances 0.000 title claims description 75
- 238000004140 cleaning Methods 0.000 title claims description 53
- 239000000203 mixture Substances 0.000 title claims description 33
- 238000000034 method Methods 0.000 title claims description 30
- 239000012530 fluid Substances 0.000 title 1
- 239000007788 liquid Substances 0.000 claims description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 150000003839 salts Chemical class 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 14
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 10
- 229910021641 deionized water Inorganic materials 0.000 claims description 10
- 150000002500 ions Chemical group 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- 239000011575 calcium Substances 0.000 claims description 6
- 239000011777 magnesium Substances 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 6
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 4
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 238000011010 flushing procedure Methods 0.000 claims description 3
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 claims description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 claims description 2
- JLVVSXFLKOJNIY-UHFFFAOYSA-N Magnesium ion Chemical compound [Mg+2] JLVVSXFLKOJNIY-UHFFFAOYSA-N 0.000 claims description 2
- 239000001110 calcium chloride Substances 0.000 claims description 2
- 229910001628 calcium chloride Inorganic materials 0.000 claims description 2
- 229910001424 calcium ion Inorganic materials 0.000 claims description 2
- 229910001629 magnesium chloride Inorganic materials 0.000 claims description 2
- 229910001425 magnesium ion Inorganic materials 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 238000007654 immersion Methods 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 8
- 238000002845 discoloration Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001416 lithium ion Inorganic materials 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 229910019142 PO4 Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000003064 anti-oxidating effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- -1 Benzotriazole Chemical class 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005254 chromizing Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011255 nonaqueous electrolyte Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000008234 soft water Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
- C25C7/00—Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells
- C25C7/02—Electrodes; Connections thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C9/00—Alloys based on copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/38—Chromatising
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/16—Metals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12729—Group IIA metal-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Wood Science & Technology (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrolytic Production Of Metals (AREA)
Description
本發明係關於一種電解銅箔的表面處理方法,更詳而言,係關於一種經防銹處理後,藉由清洗銅箔而調整該電解銅箔表面的金屬組成之方法。
電解銅箔不僅為印刷電路板中不可或缺的材料,尤其雙面平滑之銅箔可經塗覆電極材料後作為鋰離子二次電池之負極板用,而隨著消費性電子產品需求增加,對於電解銅箔的需求也是與日俱增。
又,由於目前商業上小型電子產品朝向更小型及輕量化發展,作為其驅動電源的電池不僅需具備高工作電壓、高能量密度及循環壽命長等優點,亦需隨之小型化。非水電解質二次電池,如鋰離子二次電池,由於其具有高能量密度、具有高容量及循環壽命長等特點,因此,可廣泛作為上述攜帶型電子儀器之驅動電源。
通常,使電解銅箔之保存性不佳的原因有氧化及酸銹蝕。因此,通常於製得電解銅箔後,對其進行電鍍防銹處理,如鉻化處理或藉由有機化合物,如苯并三唑(Benzotriazole)與銅形成螯合物,俾增加電解銅箔之耐候性。然而,經電鍍防銹處理後之電解銅箔長時間保存下,
仍會產生氧化及酸銹蝕,即銅箔表面出現氧化點、變色等保存性不佳之缺點。其可能原因為,目前用於印刷電路板或鋰離子二次電池負極之電解銅箔,係以硫酸將銅溶解後作為製造電解銅箔之電解液,但銅箔於製箔段形成後,殘存在銅箔表面之硫酸根離子會持續侵蝕銅箔。
為了改善電解銅箔容易銹化而導致保存性不佳之問題,業界通常於防銹處理製程後進行水洗工序,以兩段式去離子水漂洗鍍有防銹層之電解銅箔,以去除殘留於電解銅箔上之硫酸根離子或其他雜質。又,於水洗工序中,水洗的水壓力、水量分布、沖洗距離及角度都有一定的要求。此外,於期刊中表示水洗工序中對水質之要求很高,通常都使用電導度小於10μS/cm的去離子水(印製電路訊息,2004年第10卷),意即,使用非常軟之軟水做為清洗液。然而,該方法雖於短時間內,可防止銅箔變色,但在長時間保存銅箔下,並未見顯著之效果。
因此業界仍亟需開發一種能有效增加電解銅箔的抗氧化及抗鏽蝕能力的表面處理方法,特別適用於防銹處理後之水洗工序之清洗方法、該清洗方法所使用之清洗液組成物及具抗氧化及抗鏽蝕能力的電解銅箔。
本發明提供一種用於清洗電解銅箔之清洗液組成物,包括:液態介質;以及IIA族金屬鹽,其中,該IIA族金屬鹽於該液態介質中所產生的金屬離子之含量為10mg/L以上。
於一具體實施例中,於該液態介質中所產生的金屬離子之含量為32mg/L以上。於另一具體實施例中,於該液態介質中所產生的金屬離子之含量為63mg/L以上。亦即,該液態介質中所產生的金屬離子之含量至少可為32至63mg/L。
該液態介質可為去離子水或純水。
該IIA族金屬離子係鎂離子或鈣離子。於本發明之較佳實施態樣中,該IIA族金屬鹽係選自氯化鎂及氯化鈣所組成群組的至少一者。
本發明復提供一種利用前述清洗液組成物清洗電解銅箔之方法。本發明之方法可用於清洗各種經處理或未經處理之電解銅箔。於一實施例中,該電解銅箔係經防銹處理之電解銅箔。
於清洗電解銅箔之方法的一實施例中,係以沖洗方式清洗該電解銅箔。於較佳實施中,該清洗方法係使用前述清洗液組成物以扇狀水柱噴灑該電解銅箔。
於另一具體實施例中,該方法係將該電解銅箔浸沒於前述之清洗液組成物中,並滯留0.1至20秒。
本發明復提供一種電解銅箔,係包括:附著在該電解銅箔之表面上之IIA族金屬,其中,以二次離子質譜儀分析,以銅元素的訊號強度為100%計,該IIA族金屬的訊號強度為0.1%以上。於一具體實施例中,該IIA族金屬的訊號強度係介於0.1至0.8%。
由於本發明之清洗液組成物中含有IIA族金屬鹽,能
有效抓取銅箔上所殘留之酸根(如,硫酸根、磷酸根或醋酸根),因此,經本發明之方法清洗後該電解銅箔之表面,除銅元素外,復包括IIA族金屬附著於該電解銅箔之表面,以保護銅箔於製程以及運送過程中不再受到酸根侵蝕,進而具有良好的抗氧化及抗鏽蝕能力,以達到改善習知銅箔保存性不佳之缺點。
1‧‧‧電解槽
2‧‧‧鉻酸槽
3‧‧‧清洗槽
4‧‧‧電解銅箔
5‧‧‧收捲裝置
20、20’‧‧‧管柱
200、200’‧‧‧孔洞
第1圖係本發明之清洗電解銅箔之方法示意圖;以及第2圖係利用管柱清洗電解銅箔之立體示意圖。
以下係藉由特定的具體實施例說明本發明之實施方式,熟習此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之優點及功效。本發明亦可藉由其他不同之實施方式加以施行或應用,本說明書中的各項細節亦可基於不同觀點與應用,在不悖離本發明所揭示之精神下賦予不同之修飾與變更。
請參閱第1圖係本發明之清洗電解銅箔之方法示意圖。於實施例中,係於電解槽1製得一電解銅箔4後,將電解銅箔4送入鉻酸槽2進行鍍鉻防銹工序,並於鍍鉻後送入清洗槽3,清洗槽中盛裝有本發明之清洗液,並使鍍有鉻之電解銅箔浸沒於其中進行清洗工序,並滯留0.1至20秒,以空氣吹乾電解銅箔4後,再以收捲裝置5收取所製得之電解銅箔4。
於本實施例中,該電解銅箔4送入清洗槽3前,復包
括以本發明之清洗液組成物以沖洗方式,利用管柱20,20’產生扇狀水柱先行清洗。使用本發明之清洗液組成物清洗電解銅箔,對於沖洗距離、水壓力、水量分布及角度並無特別限制。於較佳實施例中係以扇狀水柱噴灑電解銅箔4。
請參閱第2圖,係利用管柱清洗電解銅箔之立體示意圖。如圖所示,該管柱20,20’分別設置於電解銅箔4之相對兩側,該管柱20,20’上具有複數可產生扇狀水柱之孔洞200,200’。
於一具體實施例中,該電解槽1中之電解液組成係包括:濃度為270g/L之硫酸銅(CuSO4.5H2O)及濃度為100g/L的硫酸(H2SO4)之硫酸銅電解液,並以此電解液,於液溫42℃,電流密度為50A/dm2條件下,製備厚度為8μm之電解銅箔。
於前述實施例中,該鉻酸槽2中之電鍍液組成係包括:濃度為1g/L之鉻酸(H2CrO4),並以此電鍍液,於液溫35℃,電流密度為3A/dm2之條件下,將鉻電鍍至電解銅箔上,俾形成防銹層。
係使用去離子水做為清洗液。
於附攪拌器之40升反應釜中,注入3270mL的去離子
水,並依據表1,將所述之組成物成分加入去離子水中,俾得到清洗液組成物。
於附攪拌器之40升反應釜中,注入3270mL的去離子水,並依據表1,將所述之組成物成分加入去離子水中,俾得到清洗液組成物。
於附攪拌器之40升反應釜中,注入3270mL的去離子水,並依據表1,將所述之組成物成分加入去離子水中,俾得到本發明之清洗液組成物。
分別將經前述比較例1至7及實施例1至6之清洗液組成物清洗之電解銅箔進行表面元素分析,測定該電解銅箔表面的銅、鈉、鉀、鎂及鈣含量後,換算IA族、IIA族各元素含量占銅含量的比例,並將結果記錄於表2。
分別將經前述比較例1至7及實施例1至6之清洗液
組成物清洗之電解銅箔裁切成A4大小之測試樣片,並進行耐候性測試,並目視外觀有無光澤,將結果記錄於表3。
測試例所使用之檢測方法詳述如下:
以Ion TOF公司出產之TOF SIMS IV二次離子質譜儀(SIMS,Secondary Ion Mass Spectrometer)進行分析,其分析條件係以Cs+(25keV)作為離子源,濺射面積為100μm×100μm,可接收的二次離子包括:銅(Cu)63、銅(Cu)65、鈉(Na)23、鉀(K)39、鎂(Mg)24、鈣(Ca)40,量測各元素之強度並計算(Na)23、鉀(K)39、鎂(Mg)24、鈣(Ca)40占(銅(Cu)63+銅(Cu)65)之強度百分比,測得結果記錄於表2。
將測試樣片置於相對濕度為80%,溫度為70℃之恆溫恆溼條件下,並維持14小時,目測觀察其外觀之變化,依外觀分為5評等,並紀錄於表3。
請參閱表3,經本發明實施例1至6清洗之電解銅箔之耐候性,其中實施例1至6皆較比較例1至7有更佳之耐候性,且相較於添加IA族金屬鹽之比較例2至5,經本發明實施例1至6清洗之電解銅箔具有更佳之耐候性。此外,相較於比較例6至7,本發明實施例1至6清洗之電解銅箔具有更佳之耐候性,可知在IIA族金屬鹽之添加量不足的情況下,難以得到如本發明之清洗液組成物之效果。
由前述實施例可知,有鑒於習知技術,本發明之清洗液組成物之酸根去除效率更佳(如,硫酸根、磷酸根或醋酸根),因此特別適用於清洗電解銅箔之應用。
上述實施例僅例示說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修飾與改變。因此,本發明之權利保護範圍,應如後述之申請專利範圍所列。
1‧‧‧電解槽
2‧‧‧鉻酸槽
3‧‧‧清洗槽
4‧‧‧電解銅箔
5‧‧‧收捲裝置
20、20’‧‧‧管柱
Claims (12)
- 一種電解銅箔,係包括:附著在該電解銅箔之表面上之IIA族金屬,其中,以二次離子質譜儀分析,以銅元素的訊號強度為100%計,該IIA族金屬的訊號強度為0.1至0.8%,其中,該IIA族金屬係選自鎂及鈣所組成群組的至少一者。
- 一種用於清洗電解銅箔之清洗液組成物,包括:液態介質;以及IIA族金屬鹽,其中,該IIA族金屬鹽於該液態介質中所產生的金屬離子之含量為10至65.2mg/L,且該IIA族金屬鹽係選自氯化鎂及氯化鈣所組成群組的至少一者。
- 如申請專利範圍第2項所述之清洗液組成物,其中,該IIA族金屬鹽於該液態介質中所產生的金屬離子之含量為32至65.2mg/L。
- 如申請專利範圍第3項所述之清洗液組成物,其中,該IIA族金屬鹽於該液態介質中所產生的金屬離子之含量為63至65.2mg/L。
- 如申請專利範圍第2項所述之清洗液組成物,其中,該液態介質為去離子水或純水。
- 如申請專利範圍第2項所述之清洗液組成物,其中,該金屬離子係鎂離子或鈣離子。
- 一種清洗電解銅箔之方法,係利用如申請專利範圍第2項之清洗液組成物清洗電解銅箔。
- 如申請專利範圍第7項所述之方法,其中,該電解銅箔係經防銹處理之電解銅箔。
- 如申請專利範圍第7項所述之方法,係以沖洗方式清洗該電解銅箔。
- 如申請專利範圍第9項所述之方法,其中,該沖洗方式係以扇狀水柱噴灑該電解銅箔。
- 如申請專利範圍第7項所述之方法,係以浸泡方式清洗該電解銅箔。
- 如申請專利範圍第11項所述之方法,其中,該清洗方法係將該電解銅箔浸沒於如申請專利範圍第2項所述之清洗液組成物中,並滯留0.1至20秒。
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CN201310412228.7A CN104342746B (zh) | 2013-08-01 | 2013-09-11 | 电解铜箔、清洗液组合物及清洗铜箔的方法 |
US14/046,077 US9388371B2 (en) | 2013-08-01 | 2013-10-04 | Electrolytic copper foil, cleaning fluid composition and method for cleaning copper foil |
MYPI2013003756A MY162487A (en) | 2013-08-01 | 2013-10-14 | Electrolytic copper foil, cleaning fluid composition and method for cleaning copper foil |
KR1020130129804A KR101612334B1 (ko) | 2013-08-01 | 2013-10-30 | 전해질성 구리 호일, 세정 유체 조성물, 및 구리 호일을 세정하는 방법 |
JP2014151631A JP5878958B2 (ja) | 2013-08-01 | 2014-07-25 | 洗浄液組成物及び電解銅箔の洗浄方法 |
JP2014215221A JP6277106B2 (ja) | 2013-08-01 | 2014-10-22 | 電解銅箔 |
US14/695,395 US20150225678A1 (en) | 2013-08-01 | 2015-04-24 | Electrolytic copper foil, cleaning fluid composition and method for cleaning copper foil |
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