TWI521257B - Tansfer module - Google Patents

Description

Transmission module

The present invention relates to a transmission module, and more particularly to a transmission module having a guiding substrate conveying direction.

For the rapid advancement of the multimedia society, most of them benefit from the dramatic advancement of semiconductor components or human-machine display devices. As for the display device, a flat display device having superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation has gradually become the mainstream of the market. Among various flat display devices, the liquid crystal display is a relatively mature flat display device. The liquid crystal display is mainly composed of a liquid crystal display panel and a backlight module.

In general, in the manufacturing process of liquid crystal displays, the productivity of the products and the manufacturing yield are closely related to the accuracy of the production machinery. Among them, the transmission module for producing mechanical equipment is an important factor affecting product capacity and yield. For example, the higher the accuracy of the drive module, the more efficient the production capacity. Moreover, the transmission module can maintain the yield of the product when there is no dust. Therefore, the advantages and disadvantages of the transmission module are related to the manufacturing cost of the product, which in turn affects the competitiveness of the industry.

Specifically, the liquid crystal display panel is mainly composed of an upper substrate, a lower substrate, and a liquid crystal layer between the upper substrate and the lower substrate, and the upper substrate and the lower substrate usually need to pass through several processes in the process of manufacturing the liquid crystal display panel. Process steps to form a color filter substrate and an active device array substrate, respectively, such as: thin film deposition, lithography, and etching After the process, the color filter substrate and the active device array substrate are assembled. The upper substrate or the lower substrate is usually transported by a transmission module in a mechanical device in the above process to achieve mass production. However, the above-mentioned substrate is liable to be displaced in position during transport, causing the substrate to collide and causing fragmentation.

FIG. 1A is a schematic diagram of a conventional transmission module. Referring to FIG. 1A , the transmission device 120 of the transmission module 100 includes a driving roller 140 and guiding rollers 130 on both sides of the transmission path of the substrate 110. The guiding roller 130 is used to guide the conveying direction of the substrate 110 to prevent the substrate 110 from being During the transfer process, the transfer direction is skewed, causing the substrate to collide and causing fragmentation. FIG. 1B is a schematic side view of the guide roller 130 of FIG. 1A. Referring to FIG. 1B, the guide roller 130 is pivotally mounted on an upper mount 134a by a through member 132, and the upper mount 134a is screwed to the lower mount 134b. As shown in FIG. 1B, the center position of the piercing member 132 does not coincide with the center position of the lower mount 134b, and the center of rotation of the guide roller 130 does not coincide with the center line of the guide roller 130. Referring to FIG. 1A and FIG. 1B simultaneously, the user can arbitrarily adjust the distance between the substrate 110 and the guiding roller 130 by adjusting the relative position between the upper fixing seat 134a and the lower fixing seat 134b.

Since the guide roller 130 is a consumable material, it needs to be replaced periodically, and the guide roller 130 needs to individually adjust the distance between the guide roller 130 and the substrate 110 to be positioned after replacement, in other words, the guidance in the conventional transmission module 100. Since the rollers 130 are different in replacement period, the guide rollers 130 located at different positions in the transmission module 100 are adjusted at different times, even if The guide rollers 130 at different positions are adjusted at the same time, and the adjusters are different, so that the guide rollers 130 located on both sides of the transmission path of the substrate 110 are different in standard. In addition, in practice, during the general maintenance schedule of the machine or when troubleshooting, the stagnation time allowed by the machine is not long, and it is impossible to make a large-scale overall adjustment of all the guide rollers in the machine. Therefore, after the long-term operation of the guide roller 130 in the conventional transmission module 100, the problem of skewing as shown in FIG. 1A is inevitably generated.

In this way, not only will the accuracy of the transmission be affected, but also the substrate will be fragmented, or the particles generated by the abrasion between the substrate and the guide roller will be retained in the produced product, especially for the product. In a semiconductor process such as a bulk circuit or a liquid crystal display, which requires a high level of dust-free requirements, the transmission module composed of the individual adjustment guide rollers is a major killer for product capacity and yield. Therefore, how to avoid positional displacement, friction, or fragmentation of the substrate in the mass production mechanism has become an important issue in the industrial development.

The invention provides a transmission module which has a guiding roller for guiding the conveying direction of the substrate, and the guiding roller has easy maintenance.

The invention provides a transmission module adapted to transmit a substrate, the substrate moves along a movement axis and has an upper surface, a lower surface opposite to the upper surface, and opposite sides connecting the upper surface and the lower surface, and the transmission module includes a transmission device , fixed seat and multiple fittings. The transmission device includes a plurality of first support rollers, a plurality of first drive rollers and a plurality of guide rollers, wherein each of the first support rollers is disposed along a support axis and is adapted to contact the lower surface, each first The drive roller is disposed along the drive axis and is adapted to contact the upper surface, and the movement axis and the support axis are parallel to each other. Each of the guide rollers is disposed along the guide axis and adjacent to one of the sides, the guide axis is perpendicular to each of the support axes and the respective drive axes, and the axis of movement is perpendicular to the support axis, the drive axis and the guide axis. The piercing member is integrally formed with the fixing seat, and each of the penetrating members is provided with one of the guiding rollers.

In an embodiment of the present invention, the transmission device further includes a plurality of second support rollers and a plurality of second drive rollers, and each of the second support rollers and each of the second drive rollers are respectively disposed on the support axis and the drive axis, respectively. The first supporting roller and each of the second supporting rollers respectively contact two opposite sides of the lower surface, and each of the first driving rollers and each of the second driving rollers respectively contact two opposite sides of the upper surface.

In an embodiment of the invention, the size of the second support roller is larger than the size of the first support roller.

In an embodiment of the invention, the transmission module further includes a plurality of positioning collars, and each guiding roller is limited between each positioning collar and the wearing member.

In an embodiment of the present invention, the transmission module further includes a plurality of bearings, each bearing has a shaft hole and an outer peripheral surface, and each of the through members is disposed in the shaft hole along the guiding axis, and the guiding roller ring is arranged On the outer circumference.

In an embodiment of the invention, the side surface of the substrate includes a first side surface and a second side surface, the distance between the first side surface and the second side surface is the width of the substrate, and the guiding roller on the first side surface is located at the second side. There is a shortest distance between the guide rollers on the side, which is slightly larger than the width of the substrate. In one embodiment, the difference between the shortest distance and the width of the substrate is substantially between 0 cm and 0.5 cm. In an embodiment, the transmission module further includes a first position adjustment base and a second position adjustment base, and the fixing base includes The fixing members adjacent to the first side are erected on the first position adjusting base, and the fixing members adjacent to the second side are erected on the second position adjusting base.

In an embodiment of the invention, the material of the fixing base comprises stainless steel.

In an embodiment of the invention, the guide roller has a hardness of less than 55D.

In an embodiment of the invention, the material of the guiding roller comprises Teflon.

In an embodiment of the invention, the transmission module further includes a plurality of nozzles disposed above the transmission roller, and the nozzle is adapted to spray a fluid onto the substrate. In one embodiment, the fluid described above is, for example, an etchant or water.

The present invention further provides a transmission module including a plurality of first support rollers and a plurality of second support rollers, a plurality of first drive rollers, and a plurality of second drive rollers, a fixed seat, a plurality of wear members, and a plurality of The guide roller, wherein the first support roller and the second support roller are disposed along a support axis, and the first drive roller and the second drive roller are located above the first support roller and the second support roller, and are disposed along the transmission axis. The piercing members are distributed at both ends of the support axis and are integrally formed with the fixing seat. Each guiding roller is respectively located on the wearing member and is pierced by the wearing member.

In an embodiment of the invention, the transmission module further includes a plurality of positioning collars, and each guiding roller is limited between each positioning collar and the fixing seat.

In an embodiment of the present invention, the transmission module further includes a plurality of bearings, each bearing has a shaft hole and an outer peripheral surface, and each of the driving members is disposed through the shaft hole, and the guiding roller ring is disposed on the outer circumferential surface.

In one embodiment of the invention, the shortest distance of the piercing members at both ends of the support axis is between about 0 cm and about 0.5 cm.

In an embodiment of the present invention, the transmission module further includes a first position adjustment base and a second position adjustment base, the fixing base includes a plurality of fixing members, and the fixing members adjacent to the first side are commonly erected in the first position The fixing member adjacent to the second side is erected on the second position adjusting base.

In an embodiment of the invention, the material of the fixing base comprises stainless steel.

In an embodiment of the invention, the material of the guiding roller comprises Teflon.

Based on the above, the transmission device of the present invention guides the driving direction of the substrate by guiding the roller, and the guiding roller is mainly constructed on the integrally formed fixing seat and the wearing member, and the rotating center and the guiding roller of the guiding roller are The centerlines coincide. Therefore, the transmission device of the present invention can effectively reduce the number of adjustments of the guide roller and improve the accuracy of substrate transfer.

The above and other objects, features and advantages of the present invention will become more <RTIgt;

2 is a partial top plan view of a transmission module of the present invention. Referring to FIG. 2, the transmission module 200 is adapted to transport a substrate 210 such that the substrate 210 moves along a movement axis A1, wherein the substrate 210 may be a glass substrate, a wafer or other object to be processed. The substrate 210 has an upper surface 212, a lower surface 214 opposite to the upper surface 212, and a connection upper surface 212 and a lower surface Two opposite sides 216 of face 214 (shown in Figure 3). As shown in FIG. 2, the transmission module 200 is mainly composed of a transmission device 220, a fixing base 230 and a plurality of through-pieces 240. The material of the fixing base 230 is, for example, stainless steel. The transmission module 200 includes a transmission 220, a fixing base 230 and a plurality of through members 240. The transmission 220 includes a plurality of first support rollers 250 contacting the lower surface 214 of the substrate 210, a plurality of first drive rollers 260 contacting the upper surface 212 of the substrate 210, and a plurality of guide rollers 270 adjacent to one of the sides 216 of the substrate 210. The guiding roller 270 is used to guide the conveying direction of the substrate 210. The piercing member 240 is integrally formed with the fixing base 230, and each of the penetrating members 240 is disposed through one of the guiding rollers 270.

As shown in FIG. 2, the first support roller 250 under the substrate 210 is used to support the substrate 210, and the first drive roller 260 is rotated by, for example, a motor for transporting the substrate 210. In this embodiment, in order to further The efficiency of the first driving roller 260 for transferring the substrate 210 is enhanced, and the position of the portion of the first supporting roller 250 is further extended to directly below the first driving roller 260, and the first surface of the substrate upper surface 212 and the lower surface 214 are contacted. The drive roller 260 controls the conveying direction of the substrate 210 by different rotation directions. Of course, the first driving roller 260 can only contact the upper surface 212 of the substrate 210 to achieve the effect of the substrate 210. The invention is not limited thereto. In addition, the first support roller 250 is rotated by the driving of the substrate 210. In other words, the first support roller 250 belongs to a driven (passive) roller with respect to the first transmission roller 260.

In more detail, please refer to FIG. 2 and FIG. 3, wherein FIG. 3 is a side view of the transmission module of the present invention. As shown in FIG. 3, the transmission 220 The first support roller 250 and the first transmission roller 260 are respectively disposed along the support axis A2 and the transmission axis A3, wherein the support axis A2 and the transmission axis A3 are parallel to each other, and the movement axis A1 is parallel to the support axis A2 and the transmission axis. A3. In other words, when the first support roller 250 and the first drive roller 260 are respectively rotated along the support axis A2 and the transmission axis A3, the substrate 210 sandwiched therebetween can be transported in the direction of the movement axis A1. Further, as shown in FIG. 3, each of the guide rollers 270 is disposed along the guide axis A4, wherein the guide axis A4 is perpendicular to each of the support axes A2 and the respective transmission axes A3, and the movement axis A1 is perpendicular to the support axis A2, and is transmitted. Axis A3 and guiding axis A4. More specifically, the tangential direction of each of the guide rollers 270 adjacent to the substrate 210 side is parallel to the movement axis A1, and the tangential directions of the plurality of guide rollers 270 on the same side adjacent to the substrate 210 side are connected together. The conveying direction of the substrate 210.

In practice, the designer can design the position, distribution and quantity of the support roller and the drive roller according to the type of the substrate 210, the size, the weight, the surface roughness, the horsepower of the drive motor, etc., based on the consideration of the mechanical balance, so that the substrate 210 is The weight can be evenly distributed on the support roller and the drive roller can drive the drive roller with the optimum driving force. For example, as shown in FIG. 3, in the embodiment, the transmission module 200 further includes a plurality of second support rollers 252 and a plurality of second drive rollers 262, each of the second support rollers 252 and each of the second drive rollers. The first support roller 250 and each of the second support rollers 252 respectively contact the opposite sides of the lower surface 214, and the first drive roller 260 and each of the second drive rollers 262 are respectively disposed on the support axis A2 and the drive axis A3. The two opposite sides of the upper surface 212 are respectively contacted. In this way, the efficiency of substrate transfer can be further improved.

It is to be noted that, as shown in FIG. 3, the wearing member 240 of the present invention is integrally formed with the fixing base 230, and the guiding roller 270 is pivotally disposed on the fixing base 230 by the wearing member 240, and In this embodiment, each of the piercing members 240 is integrally formed on the center of the fixing base 230, and the center of rotation of the guiding roller 270 coincides with the center line of the piercing member 240 and the center line of the fixing base 230. In this embodiment, the wearing member 240 protrudes from the surface of the guiding roller after the guiding roller 270 is worn. Of course, the wearing member 240 can also be cut from the surface of the guiding roller 270 after the guiding roller 270 is worn. The invention is not limited thereto. In addition, in the present embodiment, the fixing base 230 includes a plurality of fixing members 232, and each of the guiding rollers 270 has a fixing member 232 corresponding thereto. Of course, the fixing brackets 230 corresponding to the guiding rollers 270 can be the same fixing bracket 230, which will be described in detail in FIG. 4A, and the present invention does not limit the design of the fixing bracket 230.

Further, specifically, the material of the guide roller 270 is, for example, Teflon, and the Rockwell hardness of the material of the guide roller 270 is substantially less than 55D. In the above, the guide roller 270 is a consumable material with respect to the substrate 210. After the long-term operation of the transmission module 220, the replacement of the guide roller 270 needs to be performed periodically, or in a slight case of troubleshooting, the guide roller 270 also needs to be performed. replace.

It is worth mentioning that the guiding roller 270 is different from the conventional design due to the matching design of the wearing member 240 and the fixing base 230, and does not need to be repositioned when the new product is replaced. In detail, after the initial adjustment of the guide roller 270 of the present invention, since the reference of the fixing base 230 is fixed, and the center of rotation of the guiding roller 270 and the center line of the guiding roller 270 coincide with the guiding axis A4, Therefore, the replaced guide roller 270 is to the substrate 210 The distance between them is substantially a fixed value. In practice, in the daily maintenance schedule or troubleshooting of the machine, only the guide roller 270 needs to be replaced, and the distance between each guide roller 270 and the substrate 210 need not be adjusted one by one, so that the capacity utilization of the machine can be utilized. The rate has increased significantly. An example of the initial adjustment setting of the guide roller 270 of the transmission module 200 will be described below.

Referring to FIG. 3, the side surface 216 of the substrate 210 includes a first side 216A and a second side 216B, and the distance between the first side 216A and the second side 216B is defined as the width W of the substrate 210 on the first side. The guiding roller 270 of the 216A has the shortest distance D between the guiding roller 270 located on the second side 216B. In order to make the guiding roller 270 fully function as the guiding direction of the guiding substrate 210, the guiding roller 270 on both sides of the substrate 210 The closer the shortest distance D is, the closer the width W of the substrate 210 is. On the other hand, in order to avoid the substrate 210 from colliding with the guide rollers 270 on both sides during the transport process, the scribing or abrasion of the substrate 210 is caused on the guide roller 270, and the shortest between the guide rollers 270 on both sides of the substrate 210. The distance D is not too close to the width W of the substrate 210. Therefore, it is practical to adjust the difference between the guide roller 270 and the substrate 210 to control the difference between the shortest distance D and the width W of the substrate 210 to substantially 0 cm to 0.5. Between cm.

In the initial position setting, the reference of the fixing base 230 on both sides of the substrate 210 can be adjusted, so that the guiding rollers 270 on both sides of the substrate 210 can be pivoted on the fixing base 230 by the wearing member 240. Position adjustment target. 4A and FIG. 4B are schematic diagrams showing a fixed manner in which the guide roller is pivotally mounted on the fixed seat in the transmission module of the present invention. As shown in FIG. 4A, the guide rollers 270 on the same side of the substrate 210 can be fixed in the same In a fixed seat 230, in this design, only the distance between the two fixed seats 230 on both sides of the substrate 210 needs to be adjusted to complete the initial setting of the shortest distance D between the guide rollers 270. As shown in FIG. 4B, in the embodiment, since each of the guide rollers 270 has its own fixing member 232, the fixing of the adjacent first side 216A can be further improved based on the consideration of shortening the adjustment time of the initial position setting. The members 232 are erected on the first position adjusting base 272A, and the fixing members 232 adjacent to the second side surface 216B are erected on the second position adjusting base 272B. When the position initial setting is performed, the fixing member 232 adjacent to the first side surface 216A and the fixing member 232 adjacent to the second side surface 216B are respectively adjusted to be in line by the first position adjusting base 272A and the second position adjusting base 272B. Therefore, the shortest distance D between the guide rollers 270 located on both sides of the substrate meets the initial position setting value of the position, so that after the machine is used for a long time, only the guide rollers 270 on each fixing member 232 need to be replaced, without The relative position between the guide roller 270 and the fixing member 232 can be adjusted one by one, which can effectively prevent the skew of the guide roller 270 from being faced by the prior art.

FIG. 5 is a cross-sectional view showing the guide roller of the transmission module of the present invention disposed on the wearing member and the fixing base. Referring to FIG. 5, the guide roller 270 can be pivotally mounted on the fixing base 230 by a bearing 280. Specifically, the bearing 280 has a shaft hole 282 and an outer peripheral surface 284, wherein the outer peripheral surface 284 is rotated relative to the shaft hole 282. . As shown in FIG. 5, the through member 240 is disposed in the shaft hole 282 along the guiding axis A4, so that the bearing 280 is fixed to the wearing member 240, for example, in a tightly fitted manner, and the guiding roller 270 is guided. The outer circumferential surface 284 of the bearing 280 is annularly disposed such that the guide roller 270 is tightly fitted to the outer circumferential surface 284 of the bearing 280. Therefore, when the substrate 210 is issued in the process When the transfer direction is slightly shifted, the guide roller 270 can guide the transfer direction of the substrate 210 by contacting the side surface 216 of the substrate 210, and the guide roller 270 is adapted to rotate relative to the fixed seat 230 by the bearing 280. Therefore, the wear of the guide roller 270 can be effectively reduced while guiding the conveying direction of the substrate 210.

In addition, in order to further prevent displacement between the guiding roller 270 and the fixing base 230 along the guiding axis A4, as shown in FIG. 5, a positioning sleeve can be selectively disposed between the guiding roller 270 and the wearing member 240. Ring 290 is used to constrain guide roller 270 between positioning collar 290 and fitting 240.

At the practical application level, as shown in FIG. 2 above, when the transmission module 200 is applied to the processing machine, a plurality of nozzles 292 can be selectively disposed above the driving roller, and an appropriate fluid 294 is selected according to the manufacturing process. For example, when applied to an etching process, the fluid 294 is, for example, an etchant. When applied to a lithography process, the fluid 294 is, for example, a developer. Of course, the fluid 294 can also be applied to a cleaning machine. Water or photoresist removal solution used in the photoresist process, the invention is not limited thereto. In addition, the position of the nozzle 292 can also be set according to the internal space of the machine. For example, the nozzle 292 can also be located above the guide roller 270 or other suitable position.

Further, in the present embodiment, the size of the second support roller 252 is substantially equal to the size of the first support roller 250, in other words, the transport direction of the substrate 210 is parallel to the horizontal plane. Of course, in other embodiments, the size of the second support roller 252 in the transport module 200 may be substantially larger than the size of the first support roller 250, such that the substrate 210 may form an angle with the horizontal plane, based on special considerations in the process. Transfer, for example, in some processes When the fluidity of the fluid 294 sprayed on the substrate 210 is added, the above means can be used to achieve the purpose of increasing fluid fluidity.

In summary, the transmission module of the present invention utilizes an integrally formed piercing member and a fixed seat to fix the guide roller on the fixed seat, and the center of rotation of the guide roller coincides with the center line thereof, so the present invention Compared with the conventional transmission device, it has at least the following advantages: 1. During the daily maintenance time of the machine or the troubleshooting, it is not necessary to correct the distance between the guiding rollers and the substrate one by one, but only as the guiding roller. Replacement can greatly increase the capacity utilization of the machine.

2. The fixing seat and the wearing part fixed by the guiding roller are fixed in position, so that the relative position of the guiding roller is not inclined due to the adjustment position, and the guiding roller which protrudes from the substrate impact position can be effectively prevented from being broken, which can be reduced. The rejection rate of the substrate improves the yield.

3. The transmission module of the present invention can be used in a variety of process machines according to the type of process, for example, a thin film deposition process machine, a lithography process photoresist coating/developing process machine, an etching process machine or a cleaning machine. Taiwan and other machines.

Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100,200‧‧‧ drive module

110, 210‧‧‧ substrate

120, 220‧‧‧ transmission

130‧‧‧Guide Roller

132, 240‧‧‧ wearing parts

134a‧‧‧上座

134b‧‧‧ lower seat

140‧‧‧Drive roller

212‧‧‧ upper surface

214‧‧‧ lower surface

216‧‧‧ side

216A‧‧‧ first side

216B‧‧‧ second side

230‧‧‧ Fixed seat

232‧‧‧Fixed parts

250‧‧‧First support roller

252‧‧‧Second support roller

260‧‧‧First drive roller

262‧‧‧Second drive roller

270‧‧‧guide wheel

272A‧‧‧First Position Adjustment Base

272B‧‧‧Second position adjustment base

280‧‧‧ bearing

282‧‧‧Axis hole

284‧‧‧ outer perimeter

290‧‧‧ positioning collar

292‧‧‧ nozzle

294‧‧‧ fluid

A1‧‧‧Mobile axis

A2‧‧‧ support axis

A3‧‧‧Drive shaft

A4‧‧‧ guiding axis

D‧‧‧Short distance

W‧‧‧ substrate width

FIG. 1A is a schematic diagram of a conventional transmission module.

FIG. 1B is a schematic side view of the guide roller of FIG. 1A.

2 is a partial top plan view of a transmission module of the present invention.

3 is a side elevational view of the transmission module of the present invention.

4A and FIG. 4B are schematic diagrams showing a fixed manner in which the guide roller is pivotally mounted on the fixed seat in the transmission module of the present invention.

FIG. 5 is a cross-sectional view showing the guide roller of the transmission module of the present invention disposed on the wearing member and the fixing base.

200‧‧‧ drive module

210‧‧‧Substrate

220‧‧‧Transmission

240‧‧‧ wearing parts

230‧‧‧ Fixed seat

232‧‧‧Fixed parts

250‧‧‧First support roller

252‧‧‧Second support roller

260‧‧‧First drive roller

262‧‧‧Second drive roller

270‧‧‧guide wheel

292‧‧‧ nozzle

294‧‧‧ fluid

A1‧‧‧Mobile axis

A2‧‧‧ support axis

A3‧‧‧Drive shaft

A4‧‧‧ guiding axis

Claims (19)

A transmission module adapted to transmit a substrate, the substrate moving along a movement axis and having an upper surface, a lower surface opposite to the upper surface, and opposite first sides connecting the upper surface and the lower surface And the second side, the transmission module includes: a transmission device, comprising: a plurality of first support rollers, wherein each of the first support rollers is disposed along a support axis and is adapted to contact the lower surface; the plurality of first transmissions a roller, wherein each of the first driving rollers is disposed along a driving axis and is adapted to contact the upper surface, and the moving axes and the supporting axes are parallel to each other; and a plurality of guiding rollers, each of the guiding rollers The guiding axis is disposed adjacent to one of the sides, the guiding axis is perpendicular to the supporting axis and the driving axis, and the moving axis is perpendicular to the supporting axis, the driving axis and the guiding axis; a fixing seat includes a plurality of fixing members; a plurality of wearing members, wherein the wearing members are integrally formed with the fixing seat, and each of the wearing members penetrates one of the guiding rollers, wherein each of the guiding rollers rotates a center line of each of the wearing members and a center line of the fixing seat; a first position adjusting base; and a second position adjusting base, wherein the fixing members adjacent to the first side are erected together The first position adjustment base is disposed on the second position adjustment base, and the first position adjustment base and the second position adjustment base are oppositely disposed. . The transmission module of claim 1, wherein the transmission device further comprises a plurality of second supporting rollers and a plurality of second driving rollers, and each of the second supporting rollers and each of the second driving rollers are respectively arranged Each of the first support roller and each of the second support rollers respectively contact the opposite sides of the lower surface, and the first drive roller and each of the second drive rollers respectively contact the upper support roller and the drive shaft The opposite sides of the surface. The transmission module of claim 2, wherein the second support rollers are larger in size than the first support rollers. The transmission module of claim 1, further comprising a plurality of positioning collars, each of the guiding rollers being limited between each of the positioning collars and the wearing member. The transmission module of claim 1, further comprising a plurality of bearings, each of the bearings having a shaft hole and an outer peripheral surface, wherein each of the through-pieces is disposed along the guiding axis. The guide roller ring is disposed on the outer peripheral surface. The transmission module of claim 1, wherein a distance between the first side and the second side is a width of the substrate, and the guiding rollers on the first side are located at the first There is a shortest distance between the guide rollers on the two sides, the shortest distance being slightly larger than the width of the substrate. The transmission module of claim 6, wherein the difference between the shortest distance and the width of the substrate is substantially between 0 cm and 0.5 cm. The transmission module of claim 1, wherein the fixing base is made of stainless steel. The transmission module of claim 1, wherein the guide rollers have a hardness of less than 55D. The transmission module of claim 1, wherein the guide rollers are made of Teflon. The transmission module of claim 1, further comprising a plurality of nozzles disposed above the transmission rollers, the nozzles being adapted to spray a fluid onto the substrate. The transmission module of claim 11, wherein the fluid comprises an etchant. The transmission module of claim 11, wherein the fluid comprises water. A transmission module includes: a plurality of first support rollers and a plurality of second support rollers disposed along a support axis; a plurality of first drive rollers and a plurality of second drive rollers located at the first support rollers and the Above the second support rollers, disposed along a drive axis; a fixed seat comprising a plurality of fixing members; a plurality of through members distributed at two ends of the support axis, integrally formed with the fixing seat; and a plurality of guiding Rollers are respectively disposed on the through-pieces and are pierced by the through-pieces, wherein a center of rotation of each of the guide rollers coincides with a center line of each of the through-pieces and a center line of the fixed seat; a position adjustment base; and a second position adjustment base, wherein the plurality of fixing members are erected together The first position adjustment base is disposed on the second position adjustment base, and the first position adjustment base and the second position adjustment base are oppositely disposed. The transmission module of claim 14, further comprising a plurality of positioning collars, each of the guiding rollers being limited between each of the positioning collars and the fixing seat. The transmission module of claim 14, further comprising a plurality of bearings, each of the bearings having a shaft hole and an outer peripheral surface, wherein each of the through holes is disposed in the shaft hole, and the guide roller ring is disposed on the shaft The outer peripheral surface. The transmission module of claim 14, wherein the shortest distance between the piercing members at both ends of the support axis is between about 0 cm and 0.5 cm. The transmission module of claim 14, wherein the fixing base is made of stainless steel. The transmission module of claim 14, wherein the guide rollers are made of Teflon.