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TWI580973B - A global detection method of fingerprint sensor and its testing equipment - Google Patents

A global detection method of fingerprint sensor and its testing equipment Download PDF

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Publication number
TWI580973B
TWI580973B TW104136997A TW104136997A TWI580973B TW I580973 B TWI580973 B TW I580973B TW 104136997 A TW104136997 A TW 104136997A TW 104136997 A TW104136997 A TW 104136997A TW I580973 B TWI580973 B TW I580973B
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fingerprint sensor
controller
sensing
conductive
test
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TW104136997A
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Chinese (zh)
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TW201716789A (en
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Jian-Ming Chen
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Chroma Ate Inc
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Description

指紋感測器之全域檢測方法及其檢測設備 Fingerprint sensor global detection method and detection device thereof

本發明係關於一種指紋感測器之檢測方法及其檢測設備,尤指一種適用於全自動化檢測指紋感測器之方法及設備。 The invention relates to a detection method of a fingerprint sensor and a detection device thereof, in particular to a method and a device suitable for fully automatic detection of a fingerprint sensor.

指紋辨識是目前生物特徵辨識方法中最普遍的一種,其主要利用指紋感測器來感測使用者指紋並對其進行比對的方式,來辨別使用者的身份。 Fingerprint identification is the most common type of biometric identification method. It mainly uses a fingerprint sensor to sense the user's fingerprint and compare it to identify the user's identity.

再者,指紋感測器在被製造完成後,目前較常見的品管檢測仍主要以人工的方式來進行。進一步說明,現有常見指紋感測器的檢測以下述方式進行:首先,檢測人員將待測試之指紋感測器妥適地放置於一檢測座內,當然自動化程度較高的工廠,此一步驟可能會以機器手臂來取代人工;接著,檢測人員將自己的指頭按壓於指紋感測器上進行檢測。 Moreover, after the fingerprint sensor is manufactured, the more common quality control tests are still mainly performed manually. Further, the detection of the existing common fingerprint sensor is performed in the following manner: First, the tester properly places the fingerprint sensor to be tested in a detection seat, of course, a factory with a higher degree of automation, this step may be The robot is replaced by a robotic arm; then, the inspector presses his or her finger against the fingerprint sensor for detection.

然而,此一習知的人工檢測方式,不僅因人工成本高昂所導致檢測成本難以降低;而且,檢測過程中人工操作所產生變數相當多,例如人工按壓指紋的力道不均所造成指紋的感測面積大小不一或指紋清晰度不一,如此將影響檢測的精準度。 However, this conventional manual detection method is not only difficult to reduce the detection cost due to the high labor cost; moreover, the number of variables generated by the manual operation during the detection process is quite large, for example, the fingerprint sensing is caused by the uneven force of the manual fingerprint pressing. The size of the area is different or the fingerprints are not the same, which will affect the accuracy of the detection.

再者,因人工指紋有其外形上的限制,故難以完全覆蓋指紋感測器上的全部的感測區域,亦即無法完整測試指紋感測器上全部的感應電極。另外,習知的人工檢測方式難免會使指紋感測器遭受污染,或者甚至因人為操作錯誤或施力不當造成感測器毀損。 Moreover, since the artificial fingerprint has its shape limitation, it is difficult to completely cover all the sensing areas on the fingerprint sensor, that is, the entire sensing electrodes on the fingerprint sensor cannot be completely tested. In addition, the conventional manual detection method inevitably causes the fingerprint sensor to be contaminated, or even the sensor is damaged due to human error or improper application.

本發明之主要目的係在提供一種指紋感測器之全域檢測方法及其檢測設備,俾能以機器自動化檢測取代傳統人工檢測的方式,且能完整檢測指紋感測器上全部的感測區域,除了可以提升檢測效率以及檢測精準度外,更可有效降低成本。 The main object of the present invention is to provide a global detection method for a fingerprint sensor and a detection device thereof, which can replace the traditional manual detection mode by machine automatic detection, and can completely detect all the sensing areas on the fingerprint sensor. In addition to improving detection efficiency and detection accuracy, it can effectively reduce costs.

為達成上述目的,本發明一種指紋感測器之全域檢測設備,主要包括:一測試座、一取放裝置、一測試臂以及一控制器。其中,測試座係用於靜置至少一指紋感測器,其包括複數感應電極,而測試臂包括一導電元件,控制器則電性連接取放裝置及測試臂;另外,控制器控制取放裝置將指紋感測器置入測試座,並控制測試臂移動以趨近測試座,並由導電元件接觸測試座上的指紋感測器,使測試座電性連接至指紋感測器,並對指紋感測器進行檢測,且控制器控制取放裝置自測試座取出經檢測完畢之指紋感測器。據此,本發明利用控制器來控制整個檢測的進行,並藉由取放裝置和測試臂來取代人工手動搬運和手動檢測的習知檢測方式。另外,測試臂同時肩負確保測試座電性連接至指紋感測器、以及作為感應檢測之標的物。 To achieve the above objective, a global detecting device for a fingerprint sensor includes: a test stand, a pick and place device, a test arm, and a controller. Wherein, the test socket is used for standing at least one fingerprint sensor, which comprises a plurality of sensing electrodes, and the test arm comprises a conductive component, and the controller is electrically connected to the pick-and-place device and the test arm; in addition, the controller controls the pick and place The device places the fingerprint sensor into the test socket, and controls the test arm to move to approach the test seat, and the conductive element contacts the fingerprint sensor on the test socket to electrically connect the test socket to the fingerprint sensor, and The fingerprint sensor performs detection, and the controller controls the pick and place device to take out the detected fingerprint sensor from the test socket. Accordingly, the present invention utilizes a controller to control the progress of the entire test, and replaces the conventional detection method of manual manual handling and manual detection by the pick and place device and the test arm. In addition, the test arm is simultaneously shouldered to ensure that the test socket is electrically connected to the fingerprint sensor and as a target for inductive detection.

其中,當導電元件接觸測試座上的指紋感測器時,複數感應電極將分別輸出一第一量測值訊號至控制器,控制器根據該等第一量測值訊號判斷該至少一指紋感測器合格與否。據此,因為導電元件已涵蓋指紋感測器上的複數感應電極,正常情況下,每一感應電極所輸出之第一量測值訊號理應差距不大,應位於一預定範圍值內。一旦所量測到的第一量測值訊號有超出預定範圍值時,便可輕易判斷該感應電極存有缺陷,例如短路或形狀不全等,進而可將所檢測之指紋感測器判斷不良品。 Wherein, when the conductive component contacts the fingerprint sensor on the test socket, the plurality of sensing electrodes respectively output a first measured value signal to the controller, and the controller determines the at least one fingerprint sense according to the first measured value signals The tester is qualified or not. Accordingly, since the conductive element already covers the plurality of sensing electrodes on the fingerprint sensor, under normal circumstances, the first measured value signal output by each sensing electrode should have a small gap and should be within a predetermined range of values. Once the measured first measured value signal exceeds the predetermined range value, it can be easily determined that the sensing electrode has a defect, such as a short circuit or a shape defect, and the detected fingerprint sensor can be judged as a defective product. .

另外,當導電元件接觸測試座上的至少一指紋感測器時,複數感應電極分別輸出一第一量測值訊號至控制器,而第一量測值訊號可包括一電壓值及一電流值中至少一者,且控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成導電元件之感測圖案。據此,控制器係利用電壓、電流與電容之間的已知關係,來以運算取得在該等感應電極與導電元件之間所形成的電容值,並且處理該等電容值以形成導電元件的影像圖案。 In addition, when the conductive component contacts at least one fingerprint sensor on the test socket, the plurality of sensing electrodes respectively output a first measured value signal to the controller, and the first measured value signal may include a voltage value and a current value. At least one of the controllers, and the controller calculates at least one of each measured voltage value and each current value as a capacitance value, and processes all of the capacitance values to form a sensing pattern of the conductive element. Accordingly, the controller utilizes a known relationship between voltage, current, and capacitance to obtain a capacitance value formed between the sensing electrodes and the conductive element, and process the capacitance values to form a conductive element. Image pattern.

較佳的是,本發明之控制器可包括一記憶單元,其儲存有一導電元件感測樣本;該控制器將導電元件之感測圖案與導電元件感測樣本進行比對,以判斷該至少一指紋感測器合格與否。據此,本發明可以透過將所感測到之導電元件的感測圖案與樣本圖案進行比對,藉此可精確判斷出指紋感測器合格與否。其中,導電元 件感測樣本可取自預先經由無瑕疵之指紋感測器感測導電元件所產生之圖案。 Preferably, the controller of the present invention may include a memory unit that stores a conductive component sensing sample; the controller compares the sensing pattern of the conductive component with the conductive component sensing sample to determine the at least one Whether the fingerprint sensor is qualified or not. Accordingly, the present invention can accurately determine whether the fingerprint sensor is qualified or not by comparing the sensed pattern of the sensed conductive element with the sample pattern. Among them, the conductive element The sensing sample can be taken from a pattern previously generated by sensing the conductive element via the flawless fingerprint sensor.

又,本發明指紋感測器之全域檢測設備的取放裝置可包括一非導電吸嘴或一導電吸嘴;其中,當取放裝置包括導電吸嘴時,控制器控制取放裝置將指紋感測器靜置於測試座,並使測試座電性連接至指紋感測器,且導電吸嘴持續接觸指紋感測器,而指紋感測器之複數感應電極分別輸出一第二量測值訊號至控制器。其中,第二量測值訊號可包括一電壓值及一電流值中至少一者,而控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成導電吸嘴之感測圖案。據此,同樣地,控制器係利用電壓、電流與電容之間的已知關係,來運算並取得在該等感應電極與導電吸嘴之間所形成的電容值,並且處理該等電容值以形成導電吸嘴的影像圖案。 Moreover, the pick-and-place device of the global detecting device of the fingerprint sensor of the present invention may include a non-conductive nozzle or a conductive nozzle; wherein when the pick-and-place device includes a conductive nozzle, the controller controls the pick-and-place device to sense the fingerprint The detector is statically placed in the test socket, and the test socket is electrically connected to the fingerprint sensor, and the conductive nozzle continuously contacts the fingerprint sensor, and the plurality of sensing electrodes of the fingerprint sensor respectively output a second measured value signal To the controller. The second measured value signal may include at least one of a voltage value and a current value, and the controller calculates at least one of each measured voltage value and each current value as a capacitance value. All of the capacitance values are processed to form a sensing pattern of the conductive nozzle. Accordingly, the controller uses the known relationship between voltage, current, and capacitance to calculate and obtain the capacitance values formed between the sensing electrodes and the conductive nozzles, and process the capacitance values to Forming an image pattern of the conductive nozzle.

再者,本發明指紋感測器之全域檢測設備的控制器可包括一記憶單元,其可儲存有一吸嘴感測樣本。其中,控制器可將導電吸嘴之感測圖案與吸嘴感測樣本進行比對,以判斷該至少一指紋感測器合格與否。據此,本發明亦可透過導電吸嘴來進行檢測、比對,藉此可更提高檢測之準確度。然而,吸嘴感測樣本可預先取自經由無瑕疵之指紋感測器感測導電吸嘴所產生之圖案。 Furthermore, the controller of the global detection device of the fingerprint sensor of the present invention can include a memory unit that can store a nozzle sensing sample. The controller may compare the sensing pattern of the conductive nozzle with the nozzle sensing sample to determine whether the at least one fingerprint sensor is qualified or not. Accordingly, the present invention can also perform detection and comparison through the conductive nozzle, thereby improving the accuracy of the detection. However, the nozzle sensing sample can be pre-fetched from the pattern produced by sensing the conductive nozzle via the flawless fingerprint sensor.

另外,本發明指紋感測器之全域檢測設備的控制器可包括一記憶單元,其儲存有一合成樣本,而合成樣本可由一吸嘴感測樣本及一導電元件感測樣本合成 而得。其中,控制器可將導電吸嘴之感測圖案及導電元件之感測圖案合成後與合成樣本進行比對,以判斷該至少一指紋感測器合格與否。據此,本發明可將指紋感測器所分別感測到導電吸嘴之感測圖案及導電元件之感測圖案合成後再與合成樣本進行比對,藉此又可更加提高檢測之準確度。 In addition, the controller of the global detecting device of the fingerprint sensor of the present invention may include a memory unit that stores a synthesized sample, and the synthesized sample may be synthesized by a nozzle sensing sample and a conductive component sensing sample. And got it. The controller can compare the sensing pattern of the conductive nozzle and the sensing pattern of the conductive component with the synthesized sample to determine whether the at least one fingerprint sensor is qualified or not. Accordingly, the fingerprint sensor can sense the sensing pattern of the conductive nozzle and the sensing pattern of the conductive component respectively, and then compare with the synthesized sample, thereby further improving the accuracy of the detection. .

為達成前述目的,本發明一種指紋感測器之全域檢測方法,其包括以下步驟:首先,驅動一取放裝置將至少一指紋感測器靜置於一測試座上,至少一指紋感測器包括複數感應電極;接著,驅動一測試臂移動趨近測試座,而測試臂包括一導電元件,由導電元件接觸測試座上的至少一指紋感測器,使至少一指紋感測器電性連接至測試座,且至少一指紋感測器上之複數感應電極分別輸出一第一測量值訊號至一控制器;再者,控制器判斷該至少一指紋感測器合格與否;最後,驅動取放裝置自測試座取出指紋感測器。 To achieve the foregoing objective, the present invention provides a global detection method for a fingerprint sensor, which includes the following steps: first, driving a pick and place device to statically place at least one fingerprint sensor on a test socket, at least one fingerprint sensor Including a plurality of sensing electrodes; then, driving a test arm to move toward the test socket, and the test arm includes a conductive component, and the conductive component contacts at least one fingerprint sensor on the test socket to electrically connect at least one fingerprint sensor To the test socket, and the plurality of sensing electrodes on the at least one fingerprint sensor respectively output a first measured value signal to a controller; and further, the controller determines whether the at least one fingerprint sensor is qualified or not; The device removes the fingerprint sensor from the test stand.

其中,本發明指紋感測器之全域檢測方法中該控制器可根據該等第一量測值訊號直接判斷至少一指紋感測器合格與否。另者,第一量測值訊號可包括一電壓值及一電流值中至少一者,而控制器可將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成該導電元件之感測圖案。 In the global detecting method of the fingerprint sensor of the present invention, the controller can directly determine whether at least one fingerprint sensor is qualified according to the first measured value signals. In addition, the first measured value signal may include at least one of a voltage value and a current value, and the controller may calculate at least one of each measured voltage value and each current value as a capacitor. Values, and all capacitance values are processed to form a sensing pattern for the conductive element.

再且,本發明指紋感測器之全域檢測方法中,控制器進行判斷時,控制器可將所取得的導電元件之感測圖案與一導電元件感測樣本進行比對,以判斷該至 少一指紋感測器合格與否。 Furthermore, in the global detection method of the fingerprint sensor of the present invention, when the controller performs the determination, the controller may compare the sensed pattern of the obtained conductive component with a conductive component sensing sample to determine the One less fingerprint sensor is qualified or not.

又,本發明之取放裝置包括一非導電吸嘴或一導電吸嘴;當取放裝置包括導電吸嘴時,當取放裝置將至少一指紋感測器靜置於測試座時,使測試座電性連接至至少一指紋感測器,且導電吸嘴持續接觸至少一指紋感測器,而指紋感測器之複數感應電極分別輸出一第二量測值訊號至控制器。其中,第二量測值訊號可包括一電壓值及一電流值中至少一者,而控制器可將所量測到的每一電壓值或每一電流值運算為一電容值,並處理全部的電容值以形成導電吸嘴之感測圖案。 Moreover, the pick-and-place device of the present invention comprises a non-conductive nozzle or a conductive nozzle; when the pick-and-place device comprises a conductive nozzle, when the pick-and-place device places at least one fingerprint sensor in the test seat, the test is performed The seat is electrically connected to the at least one fingerprint sensor, and the conductive nozzle continuously contacts the at least one fingerprint sensor, and the plurality of sensing electrodes of the fingerprint sensor respectively output a second measured value signal to the controller. The second measured value signal may include at least one of a voltage value and a current value, and the controller may calculate each measured voltage value or each current value as a capacitance value, and process all The capacitance value is used to form a sensing pattern of the conductive nozzle.

此外,在本發明指紋感測器之全域檢測方法中,當導電元件接觸測試座上的指紋感測器後,控制器可將指紋感測器於前一步驟中所取得之導電吸嘴之感測圖案與一吸嘴感測樣本進行比對,以判斷該至少一指紋感測器合格與否。 In addition, in the global detecting method of the fingerprint sensor of the present invention, after the conductive component contacts the fingerprint sensor on the test socket, the controller can sense the conductive nozzle obtained by the fingerprint sensor in the previous step. The measurement pattern is compared with a nozzle sensing sample to determine whether the at least one fingerprint sensor is qualified or not.

而且,在本發明指紋感測器之全域檢測方法中,當導電元件接觸測試座上的指紋感測器後,控制器可將指紋感測器於前一步驟所取得之導電吸嘴之感測圖案及導電元件之感測圖案合成後,並與一合成樣本進行比對;其中,合成樣本係由一吸嘴感測樣本及一導電元件感測樣本合成而得。 Moreover, in the global detection method of the fingerprint sensor of the present invention, after the conductive component contacts the fingerprint sensor on the test socket, the controller can sense the conductive nozzle obtained by the fingerprint sensor in the previous step. The sensing pattern of the pattern and the conductive element is synthesized and compared with a composite sample; wherein the synthesized sample is synthesized by a nozzle sensing sample and a conductive element sensing sample.

2‧‧‧測試座 2‧‧‧ test seat

20‧‧‧晶片收容槽 20‧‧‧chip storage slot

21‧‧‧探針 21‧‧‧ probe

3‧‧‧取放裝置 3‧‧‧ pick and place device

31‧‧‧導電吸嘴 31‧‧‧Electrical nozzle

4‧‧‧測試臂 4‧‧‧ test arm

41‧‧‧導電元件 41‧‧‧Conducting components

5‧‧‧控制器 5‧‧‧ Controller

51‧‧‧記憶單元 51‧‧‧ memory unit

510‧‧‧指紋樣本 510‧‧‧ Fingerprint sample

511‧‧‧吸嘴感測樣本 511‧‧‧ nozzle sensing sample

512‧‧‧導電元件感測樣本 512‧‧‧Resistance sensing samples

513‧‧‧合成樣本 513‧‧‧Synthetic sample

6‧‧‧移載梭車 6‧‧‧Transporting shuttle

C‧‧‧指紋感測器 C‧‧‧Finger sensor

Ca‧‧‧感測區域 Ca‧‧‧Sensing area

Ce‧‧‧感應電極 Ce‧‧‧Induction electrode

Mv1‧‧‧第一測量值訊號 M v1 ‧‧‧first measured value signal

Mv2‧‧‧第二測量值訊號 M v2 ‧‧‧second measured value signal

圖1係本發明一較佳實施例之示意圖。 1 is a schematic view of a preferred embodiment of the present invention.

圖2係本發明第一實施例之系統架構圖。 2 is a system architecture diagram of a first embodiment of the present invention.

圖3A係本發明第一實施例中取放裝置將指紋感測器靜置於測試座上之示意圖。 3A is a schematic view showing the first embodiment of the present invention in which the pick-and-place device places the fingerprint sensor on the test stand.

圖3B係本發明第一實施例中導電元件接觸指紋感測器並進行感測之示意圖。 3B is a schematic view showing the conductive element contacting the fingerprint sensor and sensing in the first embodiment of the present invention.

圖4係本發明第二實施例之系統架構圖。 4 is a system architecture diagram of a second embodiment of the present invention.

圖5A係本發明第三實施例中吸嘴感測樣本之示意圖。 Fig. 5A is a schematic view showing a nozzle sensing sample in a third embodiment of the present invention.

圖5B係本發明第三實施例中導電元件感測樣本之示意圖。 Fig. 5B is a schematic view showing a sensing element of a conductive member in a third embodiment of the present invention.

圖5C係本發明第三實施例中合成樣本之示意圖。 Figure 5C is a schematic illustration of a synthetic sample in a third embodiment of the present invention.

圖6係本發明第三實施例之系統架構圖。 Figure 6 is a system architecture diagram of a third embodiment of the present invention.

本發明指紋感測器之全域檢測方法及其檢測設備在本實施例中被詳細描述之前,要特別注意的是,以下的說明中,類似的元件將以相同的元件符號來表示。再者,本發明之圖式僅作為示意說明,其未必按比例繪製,且所有細節也未必全部呈現於圖式中。 Before the present invention is described in detail in the present embodiment, it is to be noted that in the following description, similar elements will be denoted by the same reference numerals. In addition, the drawings of the present invention are merely illustrative, and are not necessarily drawn to scale, and all details are not necessarily shown in the drawings.

請同時參閱圖1、圖2、圖3A及圖3B,圖1係本發明一較佳實施例之示意圖,圖2係本發明第一實施例之系統架構圖,圖3A係本發明第一實施例中取放裝置將指紋感測器靜置於測試座上之示意圖,圖3B係本發明第一實施例中導電元件接觸指紋感測器並進行感測之示意圖。如該等圖中所示,本實施例主要包括一測試座2、一取放裝置3、一測試臂4、一控制器5以及一移載梭車6。其中,測試座2包括一晶片收容槽20,其用於容置並固定待測試之指紋感測器C,而晶片收容槽20的底端面佈設有 複數探針21,其用於電性接觸指紋感測器C。 Please refer to FIG. 1 , FIG. 2 , FIG. 3A and FIG. 3B , FIG. 1 is a schematic diagram of a preferred embodiment of the present invention, FIG. 2 is a system architecture diagram of a first embodiment of the present invention, and FIG. 3A is a first embodiment of the present invention. In the example, the pick-and-place device places a fingerprint sensor on the test stand. FIG. 3B is a schematic diagram of the conductive element contacting the fingerprint sensor and sensing in the first embodiment of the present invention. As shown in the figures, the embodiment mainly includes a test seat 2, a pick-and-place device 3, a test arm 4, a controller 5, and a transfer shuttle 6. The test socket 2 includes a wafer receiving slot 20 for receiving and fixing the fingerprint sensor C to be tested, and the bottom end surface of the wafer receiving slot 20 is disposed. A plurality of probes 21 for electrically contacting the fingerprint sensor C.

再者,本實施例之移載梭車6係用於移載待測試及完測之指紋感測器C,而移載梭車6電性連接至控制器5,並受控制器5所控制。另一方面,控制器5亦控制取放裝置3搬運指紋感測器C於移載梭車6和測試座2之間。亦即,本實施例由移載梭車6來移載待測試和完測的指紋感測器C,再由取放裝置3於移載梭車6和測試座2之間搬運指紋感測器C,而且移載梭車6又可移動於一進料區、及一出料區(圖中未示)之間。 Furthermore, the transfer shuttle 6 of the embodiment is used for transferring the fingerprint sensor C to be tested and completed, and the transfer shuttle 6 is electrically connected to the controller 5 and controlled by the controller 5. . On the other hand, the controller 5 also controls the pick-and-place device 3 to carry the fingerprint sensor C between the transfer shuttle 6 and the test stand 2. That is, in this embodiment, the fingerprint sensor C to be tested and completed is transferred by the transfer shuttle 6, and then the fingerprint sensor is carried by the pick-and-place device 3 between the transfer shuttle 6 and the test seat 2. C, and the transfer shuttle 6 can be moved between a feeding zone and a discharge zone (not shown).

另外,測試臂4的下端面設置有一導電元件41,其由導電材質構成,較佳為具備彈性之特性,藉以吸收物件接觸時的衝擊力,而可達成緩衝功效。本實施例之導電元件41係採用導電橡膠或導電泡棉。而且,導電元件41中用於接觸指紋感測器C之表面上形成有一類指紋紋路411,其類似人類手指頭紋路。再且,本實施例之指紋感測器C包括一感測區域Ca,而感測區域Ca內包括有複數感應電極Ce,且類指紋紋路411之大小恰可全面覆蓋感測區域Ca,以構成全域測試,亦即一次檢測指紋感測器C上全部的感應電極Ce。 In addition, the lower end surface of the test arm 4 is provided with a conductive member 41, which is made of a conductive material, preferably has an elastic property, so as to absorb the impact force when the object contacts, and the buffering effect can be achieved. The conductive member 41 of this embodiment is made of conductive rubber or conductive foam. Moreover, a type of fingerprint pattern 411 is formed on the surface of the conductive member 41 for contacting the fingerprint sensor C, which is similar to the human finger pattern. Moreover, the fingerprint sensor C of the embodiment includes a sensing area Ca, and the sensing area Ca includes a plurality of sensing electrodes Ce, and the size of the fingerprint-like pattern 411 can completely cover the sensing area Ca to form The global test, that is, all the sensing electrodes Ce on the fingerprint sensor C are detected at one time.

再且,控制器5電性連接取放裝置3、移載梭車6、測試臂4及測試座2之複數探針21;且當取放裝置3或測試臂4下壓指紋感測器C時,控制器5可藉該複數探針21電性導通至指紋感測器C。而且,控制器5包括一記憶單元51,其可以是任意型式的固定式或可移動式隨機存取記憶體(Random Access Memory,RAM)、唯讀記憶體 (Read-Only Memory,ROM)、快閃記憶體(Flash memory)、硬碟或其他類似裝置或這些裝置的組合。本實施例之記憶單元51儲存有一與類指紋紋路411相符之指紋樣本510,其可預先取自經由無瑕疵之指紋感測器C感測類指紋紋路411所產生之樣本圖案。 Moreover, the controller 5 is electrically connected to the pick-and-place device 3, the transfer shuttle 6, the test arm 4, and the plurality of probes 21 of the test socket 2; and when the pick-and-place device 3 or the test arm 4 presses the fingerprint sensor C The controller 5 can be electrically connected to the fingerprint sensor C by the plurality of probes 21 . Moreover, the controller 5 includes a memory unit 51, which can be any type of fixed or removable random access memory (RAM), read-only memory. (Read-Only Memory, ROM), Flash memory, hard disk or other similar device or a combination of these devices. The memory unit 51 of the present embodiment stores a fingerprint sample 510 corresponding to the fingerprint-like texture 411, which can be pre-fetched from the sample pattern generated by sensing the fingerprint-like texture 411 via the flawless fingerprint sensor C.

其中,本實施例之檢測流程如下:首先,控制器5控制移載梭車6自一進料區(圖中未示)移載待測試之指紋感測器C至一特定位置,而該特定位置可為鄰近測試座2之位置。再者,控制器5控制取放裝置3將指紋感測器C自移載梭車6上取出,並置入測試座2之晶片收容槽20內。 The detection process of the embodiment is as follows: First, the controller 5 controls the transfer shuttle 6 to transfer the fingerprint sensor C to be tested to a specific position from a feeding area (not shown), and the specific The position can be a position adjacent to the test stand 2. Furthermore, the controller 5 controls the pick-and-place device 3 to take out the fingerprint sensor C from the transfer shuttle 6 and place it in the wafer receiving slot 20 of the test socket 2.

接著,控制器5控制測試臂4移動以趨近測試座2,且由導電元件41下壓接觸測試座2上的指紋感測器C,並持續下壓使指紋感測器C與測試座2之複數探針21電性連接,而控制器5開始檢測之進行,即指紋感測器C感測導電元件41上之類指紋紋路411。 Next, the controller 5 controls the test arm 4 to move to approach the test socket 2, and the conductive sensor 41 presses down the fingerprint sensor C on the test socket 2, and continues to press down to make the fingerprint sensor C and the test seat 2 The plurality of probes 21 are electrically connected, and the controller 5 starts the detection, that is, the fingerprint sensor C senses the fingerprint lines 411 on the conductive member 41.

關於檢測過程進一步說明如下,當導電元件41接觸測試座2上的指紋感測器C時,導電元件41接觸全部的感應電極Ce,且每一感應電極Ce輸出一第一量測值訊號Mv1至控制器5。在本實施例中,第一量測值訊號Mv1為一電壓值,控制器5便將所量測到的每一電壓值透過下面的關係式來運算出電容值,並將所有的電容值按複數感應電極Ce之幾何位置關係建構出導電元件41的感測圖案。 The detection process is further described as follows. When the conductive element 41 contacts the fingerprint sensor C on the test socket 2, the conductive element 41 contacts all the sensing electrodes Ce, and each sensing electrode Ce outputs a first measured value signal M v1 . To controller 5. In this embodiment, the first measured value signal M v1 is a voltage value, and the controller 5 calculates the capacitance value by passing the measured voltage value through the following relationship, and calculates all the capacitance values. The sensing pattern of the conductive element 41 is constructed according to the geometric positional relationship of the complex sensing electrodes Ce.

其中,在上述關係式中,I是流過感應電極Ce與導電元件41間所構成之電容的電流,單位為安培;dv/dt是電壓對時間的微分,單位是伏特/秒;C是感應電極Ce與導電元件41間所構成之電容的電容值,單位是法拉。 Wherein, in the above relation, I is a current flowing through a capacitance formed between the sensing electrode Ce and the conductive element 41, and the unit is ampere; dv/dt is a voltage-to-time differential, the unit is volt/second; C is an induction The capacitance value of the capacitance formed between the electrode Ce and the conductive element 41 is in the Farad.

此外,當取得導電元件41的影像圖案後,控制器5比對該圖案與指紋樣本510,藉以判斷受測的指紋感測器C是否合格。另外,控制器5控制取放裝置3將完測之指紋感測器C自測試座2之晶片收容槽20內取出,並置入移載梭車6中。最後,控制器5控制移載梭車6將完測之指紋感測器C移載至一出料區(圖中未示)。 In addition, after obtaining the image pattern of the conductive element 41, the controller 5 compares the pattern with the fingerprint sample 510 to determine whether the fingerprint sensor C under test is qualified. In addition, the controller 5 controls the pick-and-place device 3 to take out the completed fingerprint sensor C from the wafer receiving slot 20 of the test stand 2 and place it in the transfer shuttle 6. Finally, the controller 5 controls the transfer shuttle 6 to transfer the completed fingerprint sensor C to a discharge zone (not shown).

然而,在本發明的其他實施態樣中,亦非以取得導電元件41的影像圖案並將之與指紋樣本510比對為必要。進一步說明之,本發明提供以下更為簡便的檢測方法,其中導電元件41之下表面為平整表面,無設置類指紋紋路411。然而,當複數感應電極Ce分別輸出一第一量測值訊號Mv1(例如電壓值或電流值)至控制器5時,控制器5即可根據該第一量測值訊號Mv1來判斷指紋感測器C之良窳。 However, in other embodiments of the invention, it is not necessary to obtain an image pattern of the conductive element 41 and compare it to the fingerprint sample 510. Further, the present invention provides a simpler detection method in which the lower surface of the conductive member 41 is a flat surface, and no fingerprint-like pattern 411 is provided. However, when the plurality of sensing electrodes Ce respectively output a first measured value signal M v1 (eg, a voltage value or a current value) to the controller 5, the controller 5 can determine the fingerprint according to the first measured value signal M v1 . The good sensor C.

申言之,因為導電元件41已全面涵蓋所有的感應電極Ce,且導電元件41上受感應之表面為平整表面,故在指紋感測器C無瑕疵的情況下,所有感應電極Ce所輸出之第一量測值訊號Mv1理應差距甚微。一旦有較明顯差異出現時,即表示感應電極有缺陷,而可輕易判斷出所檢測之指紋感測器C為不良品。據此,本發明亦可針對複數感應電極Ce所分別輸出一第一量測值訊號Mv1直 接作判斷,如此控制器5處理的程序更為簡單,可以加快整個檢測流程。 In other words, since the conductive element 41 has fully covered all the sensing electrodes Ce, and the surface on the conductive element 41 is a flat surface, all the sensing electrodes Ce are outputted in the absence of the fingerprint sensor C. The first measurement signal M v1 should have a small gap. Once there is a significant difference, it means that the sensing electrode is defective, and it can be easily judged that the detected fingerprint sensor C is a defective product. Accordingly, the present invention can also directly determine a first measurement value signal M v1 for the plurality of sensing electrodes Ce, so that the program processed by the controller 5 is simpler and can speed up the entire detection process.

請參閱圖4,圖4係本發明第二實施例之系統架構圖。本實施例與前述第一實施例主要差異在於,本實施例之取放裝置3包括一由導電材質所構成之導電吸嘴31,如導電橡膠或導電泡棉,而且本實施例之導電元件41中用於接觸指紋感測器C之表面上並無形成類指紋紋路411;當然在其他的實施例中該表面亦可同第一實施例而具備一類指紋紋路411。 Please refer to FIG. 4. FIG. 4 is a system architecture diagram of a second embodiment of the present invention. The main difference between the present embodiment and the foregoing first embodiment is that the pick-and-place device 3 of the present embodiment includes a conductive nozzle 31 made of a conductive material, such as conductive rubber or conductive foam, and the conductive member 41 of the embodiment. The fingerprint-like pattern 411 is not formed on the surface of the contact fingerprint sensor C; of course, in other embodiments, the surface may have a type of fingerprint pattern 411 as in the first embodiment.

此外,本實施例主要特色在於進行了二次檢測、比對,故相較於第一實施例之一次檢測,本實施例可更提高檢測之準確度。進一步說明之,本實施例之記憶單元51,其儲存有一吸嘴感測樣本511及一導電元件感測樣本512;其中,吸嘴感測樣本511係預先取自由無瑕疵之指紋感測器C感測導電吸嘴31所產生之圖案,而導電元件感測樣本512係預先取自由無瑕疵之指紋感測器C感測導電元件41所產生之圖案。 In addition, the main feature of the embodiment is that the second detection and the comparison are performed, so that the embodiment can improve the accuracy of the detection compared with the one detection of the first embodiment. Further, the memory unit 51 of the embodiment stores a nozzle sensing sample 511 and a conductive component sensing sample 512; wherein the nozzle sensing sample 511 is pre-fetched without a fingerprint sensor C. The pattern generated by the conductive nozzle 31 is sensed, and the conductive element sensing sample 512 is pre-taken by the flawless fingerprint sensor C to sense the pattern produced by the conductive element 41.

本實施例之檢測流程與第一實施例差異之處僅在於導電元件41下壓接觸測試座2上的指紋感測器C前,先以待測試之指紋感測器C取得感測導電吸嘴31之圖案。進一步說明之,當控制器5控制取放裝置3將指紋感測器C置入測試座2時,控制器5控制指紋感測器C進行感測導電吸嘴31,亦即指紋感測器C感測導電吸嘴31之感測圖案。 The detection process of this embodiment differs from the first embodiment only in that the conductive element 41 is pressed against the fingerprint sensor C on the test socket 2, and the sensing sensor C is used to obtain the sensing conductive nozzle. The pattern of 31. Further, when the controller 5 controls the pick-and-place device 3 to place the fingerprint sensor C into the test socket 2, the controller 5 controls the fingerprint sensor C to sense the conductive nozzle 31, that is, the fingerprint sensor C. The sensing pattern of the conductive nozzle 31 is sensed.

其中,本實施例中取得導電吸嘴31之圖案的 方式與第一實施例中取得導電元件41的圖案的方式相同。亦即,導電吸嘴31持續接觸指紋感測器C時,複數感應電極Ce分別輸出一第二量測值訊號Mv2至控制器5。在本實施例中,第二量測值訊號Mv2同樣為一電壓值,控制器5便將所量測到的每一電壓值透過前述的關係式來運算出電容值,並將所有的電容值按複數感應電極Ce之幾何位置關係建構為導電吸嘴31的影像圖案。 Here, the manner in which the pattern of the conductive nozzle 31 is obtained in the present embodiment is the same as the manner in which the pattern of the conductive member 41 is obtained in the first embodiment. That is, when the conductive nozzle 31 continuously contacts the fingerprint sensor C, the plurality of sensing electrodes Ce respectively output a second measured value signal M v2 to the controller 5. In this embodiment, the second measured value signal M v2 is also a voltage value, and the controller 5 calculates the capacitance value by using the measured voltage value through the foregoing relationship, and all the capacitors The value is constructed as an image pattern of the conductive nozzle 31 according to the geometric positional relationship of the complex sensing electrodes Ce.

另一方面,控制器5又以同樣方式取得導電元件41的圖案後,控制器5將指紋感測器C所感測到導電吸嘴31的圖案及導電元件41的圖案分別與吸嘴感測樣本511和導電元件感測樣本512進行比對,藉以判斷受測的指紋感測器C是否合格。據此,本實施例利用指紋感測器C分別感測導電吸嘴31及導電元件41,並將之分別比對吸嘴感測樣本511和導電元件感測樣本512,藉以構成二次檢測、比對,可更提高檢測之準確度。 On the other hand, after the controller 5 obtains the pattern of the conductive element 41 in the same manner, the controller 5 senses the pattern of the conductive nozzle 31 and the pattern of the conductive element 41 and the nozzle sensing sample respectively by the fingerprint sensor C. The 511 and the conductive component sensing sample 512 are compared to determine whether the fingerprint sensor C under test is qualified. Accordingly, the present embodiment senses the conductive nozzle 31 and the conductive element 41 by using the fingerprint sensor C, respectively, and compares the nozzle sensing sample 511 and the conductive element sensing sample 512 to form a secondary detection. The comparison can improve the accuracy of the detection.

當然,在其他的實施態樣中,為了節省檢測工序及提高檢測效率,可僅進行第二實施例之前段測試,亦即控制器5僅執行指紋感測器C感測導電吸嘴31之圖案,並將之與記憶單元51中所儲存之吸嘴感測樣本511進行比對,藉以判斷受測之指紋感測器C的良窳。其中,導電吸嘴31中與指紋感測器C之端面可經過特別設計,例如加大該端面面積及添加類指紋紋路等。據此,此實施態樣整合了取放裝置3與測試臂4,故可顯著減少檢測工序及檢測所耗的時間,並可因省略測試臂4而減少設備的複雜度和硬體成本,惟此實施態樣之檢測區域可能受限 於導電吸嘴31之圖案,例如吸嘴口必須簍空,而無法檢測全部的感應電極。 Of course, in other implementations, in order to save the detection process and improve the detection efficiency, only the previous stage test of the second embodiment may be performed, that is, the controller 5 only performs the fingerprint sensor C to sense the pattern of the conductive nozzle 31. And comparing it with the nozzle sensing sample 511 stored in the memory unit 51, thereby determining the goodness of the fingerprint sensor C under test. The end surface of the conductive nozzle 31 and the fingerprint sensor C can be specially designed, for example, the surface area of the end face and the addition of fingerprint-like lines. Accordingly, this embodiment integrates the pick-and-place device 3 and the test arm 4, so that the time required for the detection process and the detection can be significantly reduced, and the complexity and hardware cost of the device can be reduced by omitting the test arm 4. The detection area of this embodiment may be limited The pattern of the conductive nozzle 31, for example, the mouth of the nozzle must be hollowed out, and it is impossible to detect all of the sensing electrodes.

請一併參閱圖5A、圖5B、圖5C及圖6,圖5A係本發明第三實施例中吸嘴感測樣本之示意圖,圖5B係本發明第三實施例中導電元件感測樣本之示意圖,圖5C係本發明第三實施例中合成樣本之示意圖,圖6係本發明第三實施例之系統架構圖。本實施例與前述第二實施例主要差異在於,本實施例之記憶單元51所儲存者為一合成樣本513,其係由如圖5A所示之吸嘴感測樣本511及如圖5B所示之導電元件感測樣本512合成而得,而構成如圖5C所示之合成樣本513。 5A, FIG. 5B, FIG. 5C and FIG. 6, FIG. 5A is a schematic diagram of a nozzle sensing sample according to a third embodiment of the present invention, and FIG. 5B is a sensing element for sensing a conductive element according to a third embodiment of the present invention. FIG. 5C is a schematic diagram of a synthetic sample in a third embodiment of the present invention, and FIG. 6 is a system architecture diagram of a third embodiment of the present invention. The main difference between the present embodiment and the foregoing second embodiment is that the memory unit 51 of the present embodiment stores a composite sample 513, which is a nozzle sensing sample 511 as shown in FIG. 5A and as shown in FIG. 5B. The conductive element sensing sample 512 is synthesized to form a composite sample 513 as shown in FIG. 5C.

其中,合成樣本513係由導電元件感測樣本512之圖形中移除吸嘴感測樣本511之圖形而形成者。此外,本實施例與前述第二實施例於檢測方法上之主要差異在於,本實施例係將指紋感測器C所感測到導電吸嘴31的圖案及導電元件41的圖案合成後與合成樣本513進行比對。 The synthetic sample 513 is formed by removing the pattern of the nozzle sensing sample 511 from the pattern of the conductive element sensing sample 512. In addition, the main difference between the present embodiment and the foregoing second embodiment in the detection method is that the fingerprint sensor C senses the pattern of the conductive nozzle 31 and the pattern of the conductive element 41 and the synthesized sample. 513 for comparison.

本實施例之檢測流程與第二實施例差異之處僅比對步驟,其他步驟請參考第一、二實施例。在本實施例中,當控制器5取得導電吸嘴31的感測圖案和導電元件41的感測圖案後,控制器5將二者合成,其合成方法如前段所述,係將導電元件41的感測圖案中移除吸導電吸嘴31的感測圖案而形成者。 The difference between the detection process of this embodiment and the second embodiment is only the comparison step. For other steps, please refer to the first and second embodiments. In this embodiment, after the controller 5 obtains the sensing pattern of the conductive nozzle 31 and the sensing pattern of the conductive element 41, the controller 5 synthesizes the two, and the synthesis method thereof is as described in the foregoing paragraph, and the conductive element 41 is used. The sensing pattern of the absorbing conductive nozzle 31 is removed from the sensing pattern to form a person.

接著,控制器並將上述合成後的圖形與記憶單元51內所儲存之合成樣本513進行比對,藉以判斷受測 的指紋感測器C是否合格。據此,本實施例利用指紋感測器C分別感測導電吸嘴31及導電元件41,並將感測到的圖像合成處理後與合成樣本513進行比對,故又可大幅提高檢測之準確度。 Next, the controller compares the synthesized pattern with the synthesized sample 513 stored in the memory unit 51, thereby determining the measured Whether the fingerprint sensor C is qualified. Accordingly, in the embodiment, the conductive sensor 31 and the conductive element 41 are respectively sensed by the fingerprint sensor C, and the sensed image is synthesized and compared with the synthesized sample 513, so that the detection can be greatly improved. Accuracy.

上述實施例僅係為了方便說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。 The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

2‧‧‧測試座 2‧‧‧ test seat

3‧‧‧取放裝置 3‧‧‧ pick and place device

31‧‧‧導電吸嘴 31‧‧‧Electrical nozzle

4‧‧‧測試臂 4‧‧‧ test arm

41‧‧‧導電元件 41‧‧‧Conducting components

6‧‧‧移載梭車 6‧‧‧Transporting shuttle

Claims (14)

一種指紋感測器之全域檢測設備,包括:一測試座,其係用於靜置至少一指紋感測器,該至少一指紋感測器包括複數感應電極;一取放裝置,其包括一導電吸嘴;一測試臂,其包括一導電元件;以及一控制器,其電性連接該取放裝置及該測試臂;該控制器控制該取放裝置將該至少一指紋感測器置入該測試座,並控制該測試臂移動以趨近該測試座,由該導電元件接觸該測試座上的該至少一指紋感測器,使該測試座電性連接至該至少一指紋感測器並對該至少一指紋感測器進行檢測,該控制器控制該取放裝置自該測試座取出經檢測完畢之該至少一指紋感測器;其中,當該控制器控制該取放裝置將該至少一指紋感測器靜置於該測試座,而該測試座電性連接至該至少一指紋感測器時,該導電吸嘴持續接觸該至少一指紋感測器,該至少一指紋感測器之該複數感應電極分別輸出一量測值訊號至該控制器。 A global detecting device for a fingerprint sensor, comprising: a test socket for locating at least one fingerprint sensor, the at least one fingerprint sensor comprising a plurality of sensing electrodes; and a pick and place device comprising a conductive a test arm comprising a conductive element; and a controller electrically connected to the pick and place device and the test arm; the controller controlling the pick and place device to place the at least one fingerprint sensor into the Testing the test stand and controlling the test arm to move toward the test stand, the conductive element contacting the at least one fingerprint sensor on the test stand, electrically connecting the test stand to the at least one fingerprint sensor and Detecting the at least one fingerprint sensor, the controller controlling the pick and place device to take out the detected at least one fingerprint sensor from the test stand; wherein, when the controller controls the pick and place device, the at least When a test sensor is statically placed on the test stand, and the test stand is electrically connected to the at least one fingerprint sensor, the conductive nozzle continuously contacts the at least one fingerprint sensor, the at least one fingerprint sensor The sense of plural Electrode outputs a measured value signal to the controller. 如請求項1之指紋感測器之全域檢測設備,其中,當該導電元件接觸該測試座上的該至少一指紋感測器時,該複數感應電極分別輸出另一量測值訊號至該控制器,該控制器根據該等另一量測值訊號判斷該至少一指紋感測器合格與否。 The global detecting device of the fingerprint sensor of claim 1, wherein when the conductive element contacts the at least one fingerprint sensor on the test socket, the plurality of sensing electrodes respectively output another measured value signal to the control The controller determines, according to the other measured value signals, whether the at least one fingerprint sensor is qualified or not. 如請求項1之指紋感測器之全域檢測設備,其中,當該導電元件接觸該測試座上的該至少一指紋感測器時, 該複數感應電極分別輸出另一量測值訊號至該控制器,該另一量測值訊號包括一電壓值及一電流值中至少一者,該控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成該導電元件之一感測圖案。 The global detecting device of the fingerprint sensor of claim 1, wherein when the conductive element contacts the at least one fingerprint sensor on the test socket, The plurality of sensing electrodes respectively output another measured value signal to the controller, and the other measured value signal includes at least one of a voltage value and a current value, and the controller measures each voltage value measured And at least one of each current value is calculated as a capacitance value, and all of the capacitance values are processed to form a sensing pattern of the conductive element. 如請求項3之指紋感測器之全域檢測設備,其中,該控制器包括一記憶單元,其儲存有一導電元件感測樣本;該控制器將該導電元件之該感測圖案與該導電元件感測樣本進行比對,以判斷該至少一指紋感測器合格與否。 The global detecting device of the fingerprint sensor of claim 3, wherein the controller comprises a memory unit that stores a conductive component sensing sample; the controller senses the sensing pattern of the conductive component and the conductive component The test samples are compared to determine whether the at least one fingerprint sensor is qualified or not. 如請求項3之指紋感測器之全域檢測設備,其中,該量測值訊號包括一電壓值及一電流值中至少一者,該控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成該導電吸嘴之一感測圖案。 The global detecting device of the fingerprint sensor of claim 3, wherein the measured value signal comprises at least one of a voltage value and a current value, and the controller measures each voltage value and each measured At least one of the current values is computed as a capacitance value and all of the capacitance values are processed to form a sensing pattern of the conductive nozzle. 如請求項5之指紋感測器之全域檢測設備,其中,該控制器包括一記憶單元,其儲存有一吸嘴感測樣本;該控制器將該導電吸嘴之該感測圖案與該吸嘴感測樣本進行比對,以判斷該至少一指紋感測器合格與否。 The global detecting device of the fingerprint sensor of claim 5, wherein the controller comprises a memory unit that stores a nozzle sensing sample; the controller applies the sensing pattern of the conductive nozzle to the nozzle The sensing samples are compared to determine whether the at least one fingerprint sensor is qualified or not. 如請求項5之指紋感測器之全域檢測設備,其中,該控制器包括一記憶單元,其儲存有一合成樣本,該合成樣本係由一吸嘴感測樣本及一導電元件感測樣本合成而得;該控制器將該導電吸嘴之該感測圖案及該導電元件之該感測圖案合成後與該合成樣本進行比對,以判斷該至少一指紋感測器合格與否。 The global detecting device of the fingerprint sensor of claim 5, wherein the controller comprises a memory unit storing a synthesized sample, the synthesized sample being sensed by a nozzle sensing sample and a conductive component sensing sample The controller combines the sensing pattern of the conductive nozzle and the sensing pattern of the conductive element with the synthesized sample to determine whether the at least one fingerprint sensor is qualified or not. 一種指紋感測器之全域檢測方法,其包括以下步驟:(A).驅動一取放裝置將至少一指紋感測器靜置於一測試座上,該至少一指紋感測器包括複數感應電極;(B).驅動一測試臂移動趨近該測試座,該測試臂包括一導電元件,由該導電元件接觸該測試座上的該至少一指紋感測器,使該至少一指紋感測器電性連接至該測試座,該至少一指紋感測器上之複數感應電極分別輸出一第一測量值訊號至一控制器;(C).該控制器判斷該至少一指紋感測器合格與否;以及(D).驅動該取放裝置自該測試座取出該至少一指紋感測器;其中,該取放裝置包括一導電吸嘴;於該步驟(A)中,當該取放裝置將該至少一指紋感測器靜置於該測試座時,使該測試座電性連接至該至少一指紋感測器,且該導電吸嘴持續接觸該至少一指紋感測器,該至少一指紋感測器之該複數感應電極分別輸出一第二量測值訊號至該控制器。 A global detection method for a fingerprint sensor includes the following steps: (A) driving a pick and place device to statically place at least one fingerprint sensor on a test socket, the at least one fingerprint sensor comprising a plurality of sensing electrodes (B) driving a test arm to move toward the test socket, the test arm includes a conductive component, the conductive component contacting the at least one fingerprint sensor on the test socket, the at least one fingerprint sensor Electrically connected to the test socket, the plurality of sensing electrodes on the at least one fingerprint sensor respectively output a first measured value signal to a controller; (C). the controller determines that the at least one fingerprint sensor is qualified And (D) driving the pick and place device to take out the at least one fingerprint sensor from the test stand; wherein the pick and place device comprises a conductive nozzle; in the step (A), when the pick and place device When the at least one fingerprint sensor is statically placed in the test socket, the test socket is electrically connected to the at least one fingerprint sensor, and the conductive nozzle continuously contacts the at least one fingerprint sensor, the at least one The plurality of sensing electrodes of the fingerprint sensor respectively output one The second measured signal is sent to the controller. 如請求項8之指紋感測器之全域檢測方法,其中,於該步驟(C)中,該控制器根據該等第一量測值訊號判斷該至少一指紋感測器合格與否。 The global detecting method of the fingerprint sensor of claim 8, wherein in the step (C), the controller determines whether the at least one fingerprint sensor is qualified according to the first measured value signals. 如請求項8之指紋感測器之全域檢測方法,其中,於該步驟(C)中,該第一量測值訊號包括一電壓值及一電流值中至少一者,該控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全 部的電容值以形成該導電元件之一感測圖案。 The global detecting method of the fingerprint sensor of claim 8, wherein in the step (C), the first measured value signal comprises at least one of a voltage value and a current value, and the controller will measure Calculating at least one of each voltage value and each current value is calculated as a capacitance value, and processing all The capacitance value of the portion forms a sensing pattern of the conductive element. 如請求項10之指紋感測器之全域檢測方法,其中,於該步驟(C)中,該控制器將所取得的該導電元件之該感測圖案與一導電元件感測樣本進行比對,以判斷該至少一指紋感測器合格與否。 The global detection method of the fingerprint sensor of claim 10, wherein in the step (C), the controller compares the obtained sensing pattern of the conductive element with a conductive element sensing sample, To determine whether the at least one fingerprint sensor is qualified or not. 如請求項10之指紋感測器之全域檢測方法,其中,於該步驟(A)中,該第二量測值訊號包括一電壓值及一電流值中至少一者,該控制器將所量測到的每一電壓值及每一電流值中至少一者運算為一電容值,並處理全部的電容值以形成該導電吸嘴之一感測圖案。 The global detection method of the fingerprint sensor of claim 10, wherein in the step (A), the second measurement signal includes at least one of a voltage value and a current value, and the controller will measure At least one of each of the measured voltage values and each current value is calculated as a capacitance value, and all of the capacitance values are processed to form a sensing pattern of the conductive nozzle. 如請求項12之指紋感測器之全域檢測方法,其中,於該步驟(C)中,該控制器將於該步驟(A)所取得的該導電吸嘴之該感測圖案與一吸嘴感測樣本進行比對,以判斷該至少一指紋感測器合格與否。 The global detection method of the fingerprint sensor of claim 12, wherein in the step (C), the controller will take the sensing pattern of the conductive nozzle and a nozzle obtained in the step (A) The sensing samples are compared to determine whether the at least one fingerprint sensor is qualified or not. 如請求項12之指紋感測器之全域檢測方法,其中,於該步驟(C)中,該控制器將於該步驟(A)所取得的該導電吸嘴之該感測圖案及於該步驟(B)所取得的該導電元件之該感測圖案合成後,並與一合成樣本進行比對,以判斷該至少一指紋感測器合格與否;其中,該合成樣本係由一吸嘴感測樣本及一導電元件感測樣本合成而得。 The global detection method of the fingerprint sensor of claim 12, wherein in the step (C), the controller will take the sensing pattern of the conductive nozzle obtained in the step (A) and the step (B) synthesizing the sensed pattern of the obtained conductive element and comparing it with a synthetic sample to determine whether the at least one fingerprint sensor is qualified or not; wherein the synthetic sample is sensed by a nozzle The test sample and a conductive component sense sample are synthesized.
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