TWI563586B - Substrate-separating apparatus and substrate-separating method - Google Patents
Substrate-separating apparatus and substrate-separating methodInfo
- Publication number
- TWI563586B TWI563586B TW104122741A TW104122741A TWI563586B TW I563586 B TWI563586 B TW I563586B TW 104122741 A TW104122741 A TW 104122741A TW 104122741 A TW104122741 A TW 104122741A TW I563586 B TWI563586 B TW I563586B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- separating
- separating apparatus
- separating method
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104122741A TWI563586B (en) | 2015-07-14 | 2015-07-14 | Substrate-separating apparatus and substrate-separating method |
CN201510485571.3A CN106356422B (en) | 2015-07-14 | 2015-08-10 | Substrate separation device and substrate separation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104122741A TWI563586B (en) | 2015-07-14 | 2015-07-14 | Substrate-separating apparatus and substrate-separating method |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI563586B true TWI563586B (en) | 2016-12-21 |
TW201703168A TW201703168A (en) | 2017-01-16 |
Family
ID=57843171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104122741A TWI563586B (en) | 2015-07-14 | 2015-07-14 | Substrate-separating apparatus and substrate-separating method |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN106356422B (en) |
TW (1) | TWI563586B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113937045B (en) * | 2021-12-08 | 2022-05-06 | 晶科能源(海宁)有限公司 | Feeding device and battery piece feeding method |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2934442B2 (en) * | 1988-09-19 | 1999-08-16 | 株式会社日立製作所 | Paper sheet separating and feeding device and sheet separating and feeding method |
JPH09194062A (en) * | 1996-01-19 | 1997-07-29 | Nissan Motor Co Ltd | Separation feeding device for sheet material |
JPH10321714A (en) * | 1997-05-20 | 1998-12-04 | Sony Corp | Airtight container and airtight container atmosphere replacer and atmosphere replacing method |
JP3911405B2 (en) * | 2001-11-15 | 2007-05-09 | トヨタ自動車株式会社 | Sheet take-out apparatus and sheet take-out method |
JP5949119B2 (en) * | 2012-05-10 | 2016-07-06 | 株式会社リコー | Sheet conveying apparatus and image forming apparatus |
JP6187044B2 (en) * | 2012-08-30 | 2017-08-30 | 株式会社リコー | Sheet conveying apparatus and image forming apparatus |
KR101387519B1 (en) * | 2012-11-01 | 2014-04-24 | 주식회사 유진테크 | Purge chamber and substrate processing apparatus including the same |
CN203218305U (en) * | 2013-03-29 | 2013-09-25 | 衡水英利新能源有限公司 | Radiated multilayer blowing pipe |
-
2015
- 2015-07-14 TW TW104122741A patent/TWI563586B/en not_active IP Right Cessation
- 2015-08-10 CN CN201510485571.3A patent/CN106356422B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN106356422B (en) | 2018-02-09 |
CN106356422A (en) | 2017-01-25 |
TW201703168A (en) | 2017-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |