TWI409471B - Linear reciprocating three-dimensional dynamic testing equipment - Google Patents
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本發明係關於一種直線往復式三維動態測試設備,尤指一種適用於測試動態感應器之直線往復式三維動態測試設備。The invention relates to a linear reciprocating three-dimensional dynamic testing device, in particular to a linear reciprocating three-dimensional dynamic testing device suitable for testing a dynamic inductor.
近幾年來,隨著微機電系統的日新月異,各種小型化、高性能且成本低廉之感應器紛紛問世,使得感應器由關鍵元件進一步提升成為產生創新價值的主要元件,例如:蘋果公司的iPhone、新世代iPod、任天堂的Wii所使用的三軸加速度感應器,大部分採用微機電系統技術運用在感測器上,加速度感應器之運作原理為感應出加速度方向的XYZ三軸成分,從而得出物體在三度空間中的運動向量。In recent years, with the rapid development of MEMS, various miniaturized, high-performance and low-cost sensors have emerged, which has further enhanced the sensor from key components into the main components of innovative value, such as Apple's iPhone. Most of the three-axis acceleration sensors used in the new generation iPod and Nintendo's Wii are applied to the sensor using MEMS technology. The principle of the acceleration sensor is to induce the XYZ triaxial component of the acceleration direction. The motion vector of the object in the three-dimensional space.
有鑑於此,有必要設計一種可大規模測試動態感應器之三軸運動訊號的設備,以提高測試之產能及降低測試成本。In view of this, it is necessary to design a device capable of testing the three-axis motion signal of the dynamic sensor on a large scale to improve the test capacity and reduce the test cost.
本發明為一種直線往復式三維動態測試設備,包括一直線往復裝置、一三維翻轉裝置、複數測試座、及一主控制器。其中,直線往復裝置可包括一往復滑台;三維翻轉裝置可包括一固定座、一翻轉架、及一承載台;承載台可包括分設於相對二面之一第一表面、及一第二表面;固定座可組設於往復滑台上。翻轉架可樞設於固定座上並沿一第一軸旋轉,承載台可樞設於翻轉架上並沿一第二軸旋轉。第一軸及第二軸為彼此垂直正交。而複數測試座可分別佈設於承載台之第一表面、及第二表面,複數測試座可容設複數待測感測器。至於,主控制器可分別電性耦接複數測試座。因此,本發明能提供動態感測器三個軸向之動態測試,並藉由分設於承載台相對二面之複數測試座,可大幅擴大測試規模,以節省成本。The invention relates to a linear reciprocating three-dimensional dynamic testing device, which comprises a linear reciprocating device, a three-dimensional reversing device, a plurality of test seats, and a main controller. The linear reciprocating device may include a reciprocating slide; the three-dimensional reversing device may include a fixing base, a flip frame, and a carrying platform; the carrying platform may include a first surface disposed on one of the opposite sides, and a second Surface; the fixed seat can be assembled on the reciprocating slide. The flip frame is pivoted on the fixed seat and rotates along a first axis, and the carrying platform is pivoted on the flip frame and rotates along a second axis. The first axis and the second axis are perpendicular to each other. The plurality of test sockets can be respectively disposed on the first surface and the second surface of the carrying platform, and the plurality of test sockets can accommodate a plurality of sensors to be tested. As a matter of course, the main controller can be electrically coupled to the plurality of test sockets respectively. Therefore, the present invention can provide dynamic testing of three axial directions of the dynamic sensor, and can greatly expand the test scale by dividing the plurality of test sockets disposed on opposite sides of the carrying platform to save costs.
較佳的是,本發明之直線往復式三維動態測試設備可包括有一第一無線傳輸模組,其設置於三維翻轉裝置並電性耦接至複數測試座。第一無線傳輸模組主要用以發射複數測試座之測試資訊。此外,主控制器可包括一第二無線傳輸模組,其主要用以接收第一無線傳輸模組所發射之測試資訊。再者,本發明之第一無線傳輸模組、及第二無線傳輸模組可為藍芽傳輸模組、射頻傳輸模組、或其他等效之無線傳輸模組皆可。據此,本發明俾能達到無線傳輸,更有利於動態測試之進行。Preferably, the linear reciprocating three-dimensional dynamic testing device of the present invention may include a first wireless transmission module disposed on the three-dimensional inverting device and electrically coupled to the plurality of test sockets. The first wireless transmission module is mainly used to transmit test information of a plurality of test sockets. In addition, the main controller may include a second wireless transmission module, which is mainly configured to receive test information transmitted by the first wireless transmission module. Furthermore, the first wireless transmission module and the second wireless transmission module of the present invention may be a Bluetooth transmission module, a radio frequency transmission module, or other equivalent wireless transmission module. Accordingly, the present invention can achieve wireless transmission and is more advantageous for dynamic testing.
再者,本發明之三維翻轉裝置可另包括有一控制器、及一電源模組。控制器分別電性連接複數測試座、第一無線傳輸模組、及電源模組。其中,電源模組用以供給複數測試座、及第一無線傳輸模組電源。控制器則主要負責控制複數測試座、及第一無線傳輸模組,控制器控制的內容包括資訊傳輸控制、及測試流程控制、甚至負責資料的編碼轉碼等。Furthermore, the three-dimensional turning device of the present invention may further comprise a controller and a power module. The controller is electrically connected to the plurality of test sockets, the first wireless transmission module, and the power module. The power module is configured to supply a plurality of test sockets and a power supply of the first wireless transmission module. The controller is mainly responsible for controlling the plurality of test sockets and the first wireless transmission module. The controller controls the information transmission control, the test flow control, and even the code transcoding of the data.
其中,本發明之直線往復裝置可包括一偏心輪、及一連桿,連桿之二端可分別樞接往復滑台、及偏心輪。據此,藉由偏心輪快速的旋轉,再透過連桿帶動往復滑台,可構成快速的往復運動,進而提供高G力(G-force)之測試規格。當然,直線往復裝置亦可為氣壓缸裝置、油壓缸裝置、導螺桿裝置、或其他等效裝置。Wherein, the linear reciprocating device of the present invention may comprise an eccentric wheel and a connecting rod, wherein the two ends of the connecting rod are respectively pivotally connected to the reciprocating sliding table and the eccentric wheel. Accordingly, by the rapid rotation of the eccentric wheel and the reciprocating slide through the connecting rod, a rapid reciprocating motion can be formed, thereby providing a high G-force test specification. Of course, the linear reciprocating device can also be a pneumatic cylinder device, a hydraulic cylinder device, a lead screw device, or other equivalent device.
此外,本發明之主控制器可控制翻轉架相對於固定座沿第一軸旋轉,又可控制承載台相對於翻轉架沿第二軸旋轉。亦即,翻轉架、及承載台之轉向測試亦可藉由主控制器控制進行翻轉,達到完全自動化。其中,三維翻轉裝置更包括有一旋轉馬達組設於固定座上,旋轉馬達可用以驅動翻轉架沿第一軸旋轉。同樣地,三維翻轉裝置可更包括有另一旋轉馬達,其可組設於翻轉架上,而另一旋轉馬達可用以驅動承載台沿第二軸旋轉。據此,本發明可利用旋轉馬達對翻轉架、及承載台進行全自動化的翻轉,以利進行三個維度的測試。In addition, the main controller of the present invention can control the rotation of the flip frame relative to the fixed seat along the first axis, and control the rotation of the load table relative to the flip frame along the second axis. That is, the steering test of the flip frame and the carrying platform can also be reversed by the control of the main controller to achieve complete automation. Wherein, the three-dimensional turning device further comprises a rotating motor set on the fixing seat, and the rotating motor can be used to drive the rotating frame to rotate along the first axis. Likewise, the three-dimensional turning device may further include another rotating motor that may be assembled on the flip frame, and another rotating motor may be used to drive the carrier to rotate along the second axis. Accordingly, the present invention can utilize a rotary motor to fully auto-rotate the flip frame and the carrier to facilitate three dimensions of testing.
再且,本發明每一測試座可包括有一座體、一旋轉扣件、及一扭簧,其扭簧連結於座體、與旋轉扣件之間。亦即,利用扭簧之恢復彈力,提供一扣緊預力予旋轉扣件,緊扣待測感測器於座體內,以避免承載台於翻轉過程或直線往復裝置於動作過程中,造成待測感測器掉落。另外,本發明之承載台可更包括至少一側面,至少一側面分別鄰接於第一表面、及第二表面,至少一側面佈設複數測試座。亦即,本發明除於承載台相對應二面進行測試外,其他面亦同樣可佈設複數測試座,以擴大測試規模。Moreover, each test stand of the present invention may include a body, a rotating fastener, and a torsion spring, the torsion spring being coupled between the base body and the rotating fastener. That is, using the recovery spring force of the torsion spring, providing a fastening pre-force to the rotating fastener, and fastening the sensor to be tested in the seat body to avoid the loading stage in the turning process or the linear reciprocating device in the action process, causing the waiting The sensor is dropped. In addition, the carrying platform of the present invention may further include at least one side surface, at least one side surface adjacent to the first surface and the second surface respectively, and at least one side is disposed with a plurality of test seats. That is to say, in addition to the test on the opposite side of the carrying platform, the other surface can also be provided with a plurality of test seats to expand the test scale.
再者,本發明之直線往復式三維動態測試設備可更包括有一進料裝置,其包括有一旋轉輪、及至少一升降吸取頭。至少一升降吸取頭可組設於旋轉輪上並選擇式地移動至測試座上方,升降吸取頭係用以取放待測感測器於測試座內,旋轉輪會旋轉帶動升降吸取頭移動,以利檢測之進行。Furthermore, the linear reciprocating three-dimensional dynamic testing apparatus of the present invention may further include a feeding device including a rotating wheel and at least one lifting and lowering head. At least one lifting and lowering head can be assembled on the rotating wheel and selectively moved to the upper side of the test seat. The lifting and sucking head is used for picking up the sensor to be tested in the test seat, and the rotating wheel will rotate to drive the lifting and sucking head to move. Eli detection is carried out.
抑或,進料裝置亦可再包括一進料平台、及一機器手臂,至少一升降吸取頭可選擇式地移動至進料平台上方而機器手臂可選擇式地移動於進料平台與複數測試座之間。其中,升降吸取頭係用以取放待測感測器於進料平台上,而機器手臂再將待測感測器從進料平台取出並置於複數測試座內。其中,進料平台可為旋轉平台、輸送帶、或其他等效裝置。Alternatively, the feeding device can further include a feeding platform and a robot arm, at least one lifting and lowering head can be selectively moved over the feeding platform and the robot arm can be selectively moved to the feeding platform and the plurality of test seats. between. Wherein, the lifting and sucking head is used for picking up the sensor to be tested on the feeding platform, and the robot arm takes out the sensor to be tested from the feeding platform and places it in the plurality of test sockets. Wherein, the feeding platform can be a rotating platform, a conveyor belt, or other equivalent device.
又或者,本發明之直線往復式三維動態測試設備可更包括有一分料裝置。其分料裝置包括有至少一晶片承載盤(tray)、及至少一取放裝置。其中,至少一取放裝置可選擇式地移動於至少一晶片承載盤與複數測試座之間。亦即,至少一取放裝置主要係將待測感測器從晶片承載盤中取出置於複數測試座內。另外,於檢測完畢後至少一取放裝置又將待測感測器從複數測試座中取出並置於晶片承載盤內。據此,本發明之直線往復式三維動態測試設備可依據實際需求使用不同之進料裝置或分料裝置,以達到最佳之測試產能。Still alternatively, the linear reciprocating three-dimensional dynamic testing apparatus of the present invention may further include a dispensing device. The dispensing device includes at least one wafer carrier tray and at least one pick and place device. The at least one pick-and-place device is selectively movable between the at least one wafer carrier and the plurality of test pads. That is, at least one pick-and-place device mainly takes the sensor to be tested out of the wafer carrier tray and places it in a plurality of test sockets. In addition, after the detection is completed, at least one pick-and-place device takes out the sensor to be tested from the plurality of test sockets and places them in the wafer carrier tray. Accordingly, the linear reciprocating three-dimensional dynamic testing device of the present invention can use different feeding devices or dispensing devices according to actual needs to achieve the best test capacity.
請同時參閱圖1、圖2,圖1係本發明第一實施例之整體設備的立體圖,圖2係本發明第一實施例之三維翻轉裝置設置於直線往復裝置的示意圖。圖1中顯示有一種直線往復式三維動態測試設備,其包括一直線往復裝置2、一個三維翻轉裝置3、複數測試座4、一主控制器5、一測試頭6、以及一分料裝置7。1 and FIG. 2, FIG. 1 is a perspective view of a whole apparatus according to a first embodiment of the present invention, and FIG. 2 is a schematic view showing a three-dimensional reversing apparatus according to a first embodiment of the present invention disposed on a linear reciprocating apparatus. A linear reciprocating three-dimensional dynamic testing apparatus is shown in FIG. 1, which includes a linear reciprocating device 2, a three-dimensional turning device 3, a plurality of test sockets 4, a main controller 5, a test head 6, and a dispensing device 7.
其中,直線往復裝置2組設於測試頭6上,測試頭6包括一驅動馬達61。直線往復裝置2還包括有一往復滑台21、一偏心輪22、及一連桿23,其偏心輪22又包括有一配重塊24。連桿23之二端係分別樞接往復滑台21、及偏心輪22上相對於配重塊24之一側。而配重塊24主要用以平衡二端受力,以維持整個運轉的穩定性。另外,三維翻轉裝置3則組設於往復滑台21上。因此,藉由測試頭6之驅動馬達61帶動偏心輪22的旋轉,進而透過連桿23連動往復滑台21產生直線的往復運動。此外,圖中顯示之分料裝置7設置於三維翻轉裝置3上方,分料裝置7主要用以進料、及測試完畢後篩選分類。其中,當進料或測試完畢後之分料時,三維翻轉裝置3會上升以供分料裝置7取放。而欲進行測試時,三維翻轉裝置3則下降以免動態測試的過程中,造成撞擊或影響分料裝置7或其他設備。The linear reciprocating device 2 is disposed on the test head 6, and the test head 6 includes a driving motor 61. The linear reciprocating device 2 further includes a reciprocating slide 21, an eccentric 22, and a link 23, the eccentric 22 further including a weight 24. The two ends of the connecting rod 23 are respectively pivotally connected to the reciprocating slide 21 and one side of the eccentric 22 with respect to the weight 24 . The weight 24 is mainly used to balance the force at both ends to maintain the stability of the entire operation. Further, the three-dimensional turning device 3 is assembled on the reciprocating slide table 21. Therefore, the rotation of the eccentric wheel 22 is driven by the drive motor 61 of the test head 6, and the reciprocating slide 21 is interlocked by the link 23 to generate a linear reciprocating motion. In addition, the dispensing device 7 shown in the figure is disposed above the three-dimensional inverting device 3, and the dispensing device 7 is mainly used for feeding and screening and sorting after testing. Wherein, when the material is fed after the feed or the test is completed, the three-dimensional turning device 3 is raised to be taken up by the dispensing device 7. When the test is to be performed, the three-dimensional turning device 3 is lowered to avoid impact or affect the dispensing device 7 or other equipment during the dynamic test.
再者,圖中顯示三維翻轉裝置3包括一固定座31、一翻轉架32、及一承載台33。承載台33包括分設於相對二面之一第一表面331、及一第二表面332。其中,第一表面331、及第二表面332均佈設有複數測試座4。據此,本實施例可進行雙面測試,以增加測試規模,降低測試成本。當然不以雙面測試為限,承載台33亦可為其他幾何多邊形,以擴大測試規模。此外,本發明之承載台33之側面亦可佈設複數測試座4。亦即,本發明除於承載台33相對應二面進行測試外,其他面亦同樣可佈設複數測試座4,以擴大測試規模。Furthermore, the three-dimensional turning device 3 is shown in the figure to include a fixing base 31, a flip frame 32, and a carrying platform 33. The carrying platform 33 includes a first surface 331 and a second surface 332 which are respectively disposed on opposite sides. The first surface 331 and the second surface 332 are each provided with a plurality of test seats 4 . Accordingly, the present embodiment can perform double-sided testing to increase the test scale and reduce the test cost. Of course, not limited to double-sided testing, the carrier 33 can also be other geometric polygons to expand the test scale. In addition, a plurality of test sockets 4 may be disposed on the side of the carrying platform 33 of the present invention. That is to say, in addition to the test on the opposite side of the carrying platform 33, the other surface can also be provided with a plurality of test sockets 4 to expand the test scale.
另外,如圖中所示固定座31組設於往復滑台21上。翻轉架32樞設於固定座31上並可沿一第一軸X旋轉,承載台33樞設於翻轉架32上並沿一第二軸Y旋轉。並且,第一軸X、及第二軸Y係彼此垂直正交,亦即藉由二個正交垂直軸旋轉,構成三個維度間之翻轉。其中,本實施例之固定座31為一U形固定座310,而翻轉架32為一框形翻轉架320。而且,U形固定座310、及框形翻轉架320上分別設置有一旋轉馬達34、35,其分別動力連接翻轉架32、及承載台33。其中,旋轉馬達34、35可以是伺服馬達,其主要用以協助框形翻轉架320、及承載台33進行翻轉。Further, the fixing base 31 is assembled on the reciprocating slide 21 as shown in the drawing. The flip frame 32 is pivoted on the fixing base 31 and rotatable along a first axis X. The loading platform 33 is pivoted on the flip frame 32 and rotates along a second axis Y. Moreover, the first axis X and the second axis Y are perpendicular to each other, that is, rotated by two orthogonal vertical axes to form a flip between the three dimensions. The fixing base 31 of the embodiment is a U-shaped fixing base 310, and the rotating frame 32 is a frame-shaped turning frame 320. Moreover, the U-shaped fixing base 310 and the frame-shaped inverting frame 320 are respectively provided with a rotation motor 34, 35 for respectively connecting the flip frame 32 and the carrying platform 33. The rotary motors 34 and 35 may be servo motors, which are mainly used to assist the frame flip frame 320 and the loading platform 33 to be turned over.
再請一併參閱圖3,圖3係本發明第一實施例之系統架構圖。本實施例之三維翻轉裝置3還包括一控制器8及一電源模組9,控制器8及電源模組9設置於三維翻轉裝置3之固定座31。而控制器8係電性連接測試座4、第一無線傳輸模組41、旋轉馬達34,35、及電源模組9。其中,電源模組9用以供給控制器8、複數測試座4、旋轉馬達34,35、及第一無線傳輸模組41電源。而控制器8除了用以控制複數測試座4、及第一無線傳輸模組41之資訊傳輸控制、及測試流程控制、或資料的編碼轉碼等外。控制器8還控制旋轉馬達34,35旋轉。亦即主控制器透過控制旋轉馬達34帶動翻轉架32相對於固定座31沿第一軸X旋轉,同樣地主控制器5透過控制旋轉馬達35帶動承載台33相對於翻轉架32沿第二軸Y旋轉。Referring to FIG. 3 again, FIG. 3 is a system architecture diagram of the first embodiment of the present invention. The three-dimensional inverting device 3 of the embodiment further includes a controller 8 and a power module 9, and the controller 8 and the power module 9 are disposed on the fixing base 31 of the three-dimensional inverting device 3. The controller 8 is electrically connected to the test socket 4, the first wireless transmission module 41, the rotary motors 34, 35, and the power module 9. The power module 9 is configured to supply the controller 8, the plurality of test sockets 4, the rotary motors 34, 35, and the first wireless transmission module 41. The controller 8 is used to control the information transmission control of the plurality of test sockets 4 and the first wireless transmission module 41, and the test flow control, or the code transcoding of the data. The controller 8 also controls the rotation of the rotary motors 34, 35. That is, the main controller drives the inverting frame 32 to rotate along the first axis X with respect to the fixed seat 31 by controlling the rotating motor 34. Similarly, the main controller 5 drives the carrying table 33 along the second axis Y with respect to the flip frame 32 through the control rotating motor 35. Rotate.
再者,圖中又顯示之第一無線傳輸模組41,其係設置於三維翻轉裝置3上,並電性耦接至複數測試座4。其中第一無線傳輸模組41係用以傳輸複數測試座4之測試資訊Ti。此外,主控制器5包括有一第二無線傳輸模組51,其同樣是用以傳輸測試資訊Ti。也就是說,本實施例透過控制器8控制三維翻轉裝置3上所有檢測之進行,包括翻轉、及測試資訊Ti之傳輸等。而電源模組9則負責三維翻轉裝置3上所有電源之供給。Furthermore, the first wireless transmission module 41 is further disposed on the three-dimensional inversion device 3 and electrically coupled to the plurality of test sockets 4. The first wireless transmission module 41 is configured to transmit the test information Ti of the plurality of test sockets 4. In addition, the main controller 5 includes a second wireless transmission module 51, which is also used to transmit test information Ti. That is to say, the present embodiment controls the progress of all the detections on the three-dimensional inverting device 3 through the controller 8, including the inversion, the transmission of the test information Ti, and the like. The power module 9 is responsible for the supply of all power sources on the three-dimensional turning device 3.
此外,再透過第一無線傳輸模組41、及第二無線傳輸模組51傳送測試資訊Ti,本實施例可達到完全地無線化,如此更有利於檢測之進行。然而,本實施例之第一無線傳輸模組41、及第二無線傳輸模組51分別為一藍芽傳輸模組,當然其亦可為射頻傳輸模組、或其他等效之無線傳輸模組。In addition, the test information Ti is transmitted through the first wireless transmission module 41 and the second wireless transmission module 51. This embodiment can achieve complete wirelessization, which is more advantageous for detection. However, the first wireless transmission module 41 and the second wireless transmission module 51 of the embodiment are respectively a Bluetooth transmission module, and of course, it may also be a radio frequency transmission module or other equivalent wireless transmission module. .
請參閱圖4,圖4係本發明第一實施例之測試座設置於承載台的分解圖。圖中顯示有複數測試座4佈設於承載台33上,每一測試座4容設有一待測感測器42。其中,每一測試座4包括有一座體40、一旋轉扣件43、及一扭簧44。扭簧44連結於座體40、與旋轉扣件43之間。進一步說明,旋轉扣件43用以抵壓固定待測感測器42於座體40內,而扭簧44則提供彈力使旋轉扣件43具旋轉回復力,抵壓固定待測感測器42,以避免承載台33於翻轉過程或直線往復裝置2於動作過程中,造成待測感測器42掉落。Please refer to FIG. 4. FIG. 4 is an exploded view of the test stand according to the first embodiment of the present invention. The figure shows that a plurality of test sockets 4 are disposed on the carrying platform 33, and each of the test sockets 4 houses a sensor 42 to be tested. Each test stand 4 includes a body 40, a rotating fastener 43, and a torsion spring 44. The torsion spring 44 is coupled between the base 40 and the rotating fastener 43. Further, the rotating fastener 43 is used to press and fix the sensor 42 to be tested in the base 40, and the torsion spring 44 provides an elastic force to rotate the rotating member 43 with a rotational restoring force to pressurize the sensor 42 to be tested. In order to avoid the loading stage 33 during the turning process or the linear reciprocating device 2 during the action, the sensor 42 to be tested is dropped.
再請一併參閱圖5、及圖6,圖5係本發明第一實施例之翻轉架沿第一軸旋轉的立體圖。圖6係本發明第一實施例之承載台沿第二軸旋轉的立體圖。圖5中顯示翻轉架32在相對於固定座31沿一第一軸X旋轉90度,以產生第二個維度之測試。另外,圖6則顯示第一軸X旋轉90度後承載台33在相對於翻轉架32沿一第二軸Y旋轉90度。藉此,即可達到三個維度的測試規格。Referring to FIG. 5 and FIG. 6, FIG. 5 is a perspective view of the flip frame according to the first embodiment of the present invention rotating along the first axis. Figure 6 is a perspective view of the stage of the first embodiment of the present invention rotated along a second axis. A test in which the flip frame 32 is rotated 90 degrees relative to the mount 31 along a first axis X to produce a second dimension is shown in FIG. In addition, FIG. 6 shows that the stage 33 is rotated by 90 degrees along a second axis Y with respect to the flip frame 32 after the first axis X is rotated by 90 degrees. This allows you to achieve test specifications in three dimensions.
請一併參閱圖7a、及圖7b,圖7a係本發明之直線往復裝置另一較佳實施例之示意圖,圖7b係本發明之直線往復裝置又一較佳實施例之示意圖。圖7a所示之實施例與第一實施例之主要差別在於,本實施例之直線往復裝置2為一氣壓缸25,亦即以氣壓缸25活塞往復運動之特性,直接採用為動力來源。此外,圖7b所示之實施例之直線往復裝置2為一導螺桿27搭配另一驅動馬達26,亦即透過驅動馬達26驅動導螺桿27,進而帶動滑設於導螺桿27之往復滑台21,構成直線往復運動。據此,圖7a及圖7b所示之實施例藉由不同之驅動方式皆可達到直線往復運動。7a and 7b, FIG. 7a is a schematic view of another preferred embodiment of the linear reciprocating device of the present invention, and FIG. 7b is a schematic view of still another preferred embodiment of the linear reciprocating device of the present invention. The main difference between the embodiment shown in Fig. 7a and the first embodiment is that the linear reciprocating device 2 of the present embodiment is a pneumatic cylinder 25, that is, the reciprocating motion of the piston of the pneumatic cylinder 25, and is directly used as a power source. In addition, the linear reciprocating device 2 of the embodiment shown in FIG. 7b is a lead screw 27 coupled with another driving motor 26, that is, the driving screw 26 is driven by the driving motor 26, thereby driving the reciprocating slide 21 which is slidably disposed on the lead screw 27. , constitutes a linear reciprocating motion. Accordingly, the embodiment shown in Figures 7a and 7b can achieve linear reciprocating motion by different driving methods.
再請參閱圖8,圖8係本發明以有線傳輸之示意圖。本實施例主要用以說明,本發明除上述以無線方式進行資訊傳輸、及控制外,亦可採用有線方式,其配置如圖中所示之排線36,惟需注意應留有適當長度之裕度,以供往復運動之行程所需。Referring again to FIG. 8, FIG. 8 is a schematic diagram of the present invention in wired transmission. This embodiment is mainly used to illustrate that the present invention can be used in addition to the above-mentioned information transmission and control in a wireless manner, and can also be wired. It is configured with a cable 36 as shown in the figure, but it should be noted that an appropriate length should be left. Margin for the reciprocating movement required.
請參閱圖9,圖9係本發明第二實施例之進料裝置的示意圖。於本實施例中,直線往復式三維動態測試設備更包括有一進料裝置1,其具有一旋轉輪10、固定輪12、複數氣壓缸13、及多組升降吸取頭11。升降吸取頭11組設於旋轉輪10上,並藉由旋轉輪10的帶動可選擇式地移動至三維翻轉裝置3上之測試座4上方或其他位置。其中,升降吸取頭11在本實施例中為一真空吸取頭,其可取放待測感測器42於三維翻轉裝置3上之測試座4內或其他位置。另外,圖中顯示之固定輪12上又組設有複數氣壓缸13,當升降吸取頭11移動到預定位置時,氣壓缸13會驅動升降吸取頭11進行升降取放動作。Please refer to FIG. 9. FIG. 9 is a schematic view of a feeding device according to a second embodiment of the present invention. In the present embodiment, the linear reciprocating three-dimensional dynamic testing device further includes a feeding device 1 having a rotating wheel 10, a fixed wheel 12, a plurality of pneumatic cylinders 13, and a plurality of sets of lifting and lowering heads 11. The lifting and lowering suction head 11 is disposed on the rotating wheel 10, and is selectively moved to the upper side of the test seat 4 on the three-dimensional inverting device 3 or other position by the driving of the rotating wheel 10. The lift suction head 11 is a vacuum suction head in the embodiment, which can take the sensor 42 to be tested in the test seat 4 on the three-dimensional inverting device 3 or other positions. In addition, a plurality of pneumatic cylinders 13 are further disposed on the fixed wheel 12 shown in the figure. When the lifting and lowering suction head 11 is moved to a predetermined position, the pneumatic cylinder 13 drives the lifting and lowering suction head 11 to perform lifting and lowering operations.
再請參閱圖10,圖10係本發明第二實施例之進料裝置的週邊設備示意圖,亦即圖9所示之進料裝置1之整體設備。圖10中顯示進料裝置又包括有一震動盤16、一攝影模組17、一定位模組18、及一轉向模組19。震動盤16包括有一螺旋導軌160、進料區161、光電感測元件162、吹氣管163、及進料槽164。震動盤16另連接有一震動機構(圖中未示),使待測感測器42從進料區161震動落到震動盤16中。震動盤16為一個中央突出之盤狀結構,故待測感測器42掉落後,隨即落到震動盤16之環週。Referring to FIG. 10, FIG. 10 is a schematic diagram of the peripheral device of the feeding device according to the second embodiment of the present invention, that is, the overall device of the feeding device 1 shown in FIG. The feeding device shown in FIG. 10 further includes a vibrating plate 16, a photographic module 17, a positioning module 18, and a steering module 19. The vibrating plate 16 includes a spiral guide 160, a feed zone 161, a photo-sensing element 162, a blow pipe 163, and a feed chute 164. The vibrating plate 16 is further connected with a vibrating mechanism (not shown) to cause the sensor 42 to be tested to vibrate from the feeding zone 161 into the vibrating plate 16. The vibrating plate 16 is a disc-shaped structure with a central protrusion, so that the sensor 42 to be tested falls behind, and then falls to the circumference of the vibrating plate 16.
同時,震動盤16藉由震動機構之震動,使待測感測器42隨著環週側壁之螺旋導軌160順勢上爬。其中,會經過光電感測元件162,光電感測元件162藉由待測感測器42正反面光之反射度不同,進行感應判斷待測感測器42之正反面。若正反面錯誤則吹氣管163會將其吹入震動盤16內,再次循環重複上述步驟繼續進料。若為正確之正反面時,待測感測器42繼續往前送入進料槽164中。At the same time, the vibrating plate 16 causes the sensor 42 to be tested to climb up with the spiral guide 160 of the circumferential side wall by the vibration of the vibrating mechanism. The photo-sensing element 162 is passed through the photo-sensing element 162. The photo-inductance sensor 162 senses the front and back of the sensor 42 to be tested by the difference in reflectivity between the front and back sides of the sensor 42 to be tested. If the front and back sides are wrong, the blow pipe 163 will blow it into the vibrating plate 16, and repeat the above steps to continue the feeding. If it is the correct front and back, the sensor 42 to be tested continues to feed into the feed slot 164.
接著,進料槽164內之待測感測器42順勢被推送,而升降吸取頭11在進料槽164尾端吸取待測感測器42後,藉由旋轉輪12之帶動,而移至外觀檢驗區之平台上。於此區域主要係利用攝影模組17來檢驗待測感測器42之印刷文字是否正確或有無瑕疵。若有錯誤或瑕疵,升降吸取頭11可將待測感測器42送至回收管20中。而回收管20可設置於各模組之間,以收集有問題之待測感測器42。Then, the sensor 42 to be tested in the feeding trough 164 is pushed forward, and the lifting and lowering head 11 is sucked by the rotating wheel 12 after the suction sensor 12 is sucked at the end of the feeding trough 164, and then moved to On the platform of the visual inspection area. In this area, the photographic module 17 is mainly used to check whether the printed characters of the sensor 42 to be tested are correct or flawless. If there is an error or flaw, the lifting and lowering head 11 can send the sensor 42 to be tested to the recovery pipe 20. The recovery tube 20 can be disposed between the modules to collect the problematic sensor 42 to be tested.
再請一併參閱圖11,圖11係本發明第二實施例之進料裝置的定位模組示意圖,亦即圖10中定位模組18的放大圖。當待測感測器42之外觀印刷檢測完畢後,便進入定位模組18,其主要用以校對待測感測器42之方位、及位置。如圖11中顯示,定位模組18包括有四個楔形塊181。當升降吸取頭11吸取待測感測器42並置於四個楔形塊181所包圍之中央區域,藉由四個楔形塊181以將先前傳送過程造成之X-Y平面角度、或位置之偏移歸零,使待測感測器42精準定位後再送入下一個模組。Referring to FIG. 11 again, FIG. 11 is a schematic diagram of a positioning module of a feeding device according to a second embodiment of the present invention, that is, an enlarged view of the positioning module 18 of FIG. After the appearance of the sensor 42 to be tested is printed, the positioning module 18 is entered, which is mainly used to measure the orientation and position of the sensor 42. As shown in FIG. 11, the positioning module 18 includes four wedge blocks 181. When the lifting and lowering head 11 sucks the sensor 42 to be tested and placed in the central area surrounded by the four wedge blocks 181, the four wedge blocks 181 are used to zero the XY plane angle or the position offset caused by the previous transmission process. The sensor 42 to be tested is accurately positioned and then sent to the next module.
再請一併參閱圖12,圖12係本發明第二實施例之進料裝置的轉向模組示意圖,亦即圖10中轉向模組19的放大圖。當待測感測器42經定位模組18定位完畢後,便進入轉向模組19,其主要用以轉向待測感測器42之角度。如圖12中顯示轉向模組19包括有一旋轉平台191、吹氣管192、收集管193。當前述攝影模組17之檢驗裝置檢測出待測感測器42之X-Y平面角度有誤時,升降吸取頭11可吸取待測感測器42置於旋轉平台191上,視實際狀況作順時針或逆時針90度、或180度之旋轉,以利後續待測感測器42進行直線往復式三維動態測試。Referring to FIG. 12 again, FIG. 12 is a schematic diagram of a steering module of the feeding device according to the second embodiment of the present invention, that is, an enlarged view of the steering module 19 of FIG. When the sensor 42 to be tested is positioned by the positioning module 18, it enters the steering module 19, which is mainly used to turn the angle of the sensor 42 to be tested. As shown in FIG. 12, the steering module 19 includes a rotating platform 191, a blowing pipe 192, and a collecting pipe 193. When the inspection device of the camera module 17 detects that the XY plane angle of the sensor 42 to be tested is incorrect, the lifting and lowering head 11 can suck the sensor 42 to be tested on the rotating platform 191, and clockwise according to the actual situation. Or 90 degrees counterclockwise, or 180 degrees of rotation, in order to facilitate the subsequent sensor 42 to perform a linear reciprocating three-dimensional dynamic test.
此外,本實施例之轉向模組19亦可將有問題之待測感測器42,以吹氣管192吹氣之方式送至收集管193中進行回收。據此,本發明之直線往復式三維動態測試設備可依使用者之實際需要,彈性增減上述模組、改變其順序、或另外新增其他檢測模組,以符合各種測試規模,達到最佳化之動態測試程序。In addition, the steering module 19 of the present embodiment can also send the problematic sensor 42 to be sent to the collection tube 193 for blowing in the manner of blowing the air tube 192. Accordingly, the linear reciprocating three-dimensional dynamic testing device of the present invention can flexibly increase or decrease the above-mentioned modules, change the order thereof, or add other detecting modules according to the actual needs of the user, so as to meet various test scales and achieve the best. Dynamic test program.
請參閱圖13,圖13係本發明第三實施例之進料裝置的示意圖。直線往復式三維動態測試設備,其進料裝置1與第前述實施例大致相同,其主要差異在於進料裝置1另包括有一進料平台14、及一機器手臂15。其中,進料平台14可為旋轉平台或輸送帶,其主要用以將升降吸取頭11傳送過來之待測感測器42提供給機器手臂15。進一步說明,升降吸取頭11將待測晶片42置於一側,而進料平台14則以旋轉或輸送帶手段移到另一側。另外,機器手臂15可選擇式地移動於進料平台14與三維翻轉裝置3上之測試座4之間,將待測感測器42從進料平台14上一一吸取至三維翻轉裝置3上之測試座4內。而當待測感測器42全部置放完成後,便可開始進行直線往復式三維動態測試。Please refer to FIG. 13, which is a schematic view of a feeding device according to a third embodiment of the present invention. The linear reciprocating three-dimensional dynamic testing device has the same feeding device 1 as the first embodiment, and the main difference is that the feeding device 1 further includes a feeding platform 14 and a robot arm 15. The feeding platform 14 can be a rotating platform or a conveyor belt, and is mainly used for supplying the sensor 42 to be tested transmitted from the lifting and lowering head 11 to the robot arm 15. Further, the lift suction head 11 places the wafer 42 to be tested on one side, and the feed platform 14 moves to the other side by means of a rotating or conveyor belt. In addition, the robot arm 15 is selectively moved between the feeding platform 14 and the test socket 4 on the three-dimensional inverting device 3, and the sensors 42 to be tested are sucked from the feeding platform 14 one by one onto the three-dimensional inverting device 3. Inside the test seat 4. When the sensors 42 to be tested are all placed, the linear reciprocating three-dimensional dynamic test can be started.
請一併參閱圖14及圖15,圖14係本發明第第四實施例之分料裝置的示意圖,圖15係本發明第四實施例之分料裝置的內部俯視圖。於本實施例中,直線往復裝置2係直接整合於分料裝置7(Handler)中,以節省空間及其他多餘之搬運手段。其中,如圖中所示分料裝置7包括有四個晶片承載盤71(tray)、及二個取放裝置72。取放裝置72可選擇式地移動於晶片承載盤71與測試座4之間。其中,四個晶片承載盤71分包括二進料承載盤711、及二出料承載盤712。進料承載盤711係承載未經測試之待測感測器42,而出料承載盤712則承載經測試過後之待測感測器42。14 and FIG. 15, FIG. 14 is a schematic view of a dispensing device according to a fourth embodiment of the present invention, and FIG. 15 is a plan view of the interior of the dispensing device according to the fourth embodiment of the present invention. In the present embodiment, the linear reciprocating device 2 is directly integrated into the dispensing device 7 (Handler) to save space and other unnecessary handling means. Among them, the dispensing device 7 shown in the figure includes four wafer carrying trays 71 (tray) and two pick-and-place devices 72. The pick and place device 72 is selectively movable between the wafer carrier tray 71 and the test socket 4. The four wafer carrier trays 71 include two feeding trays 711 and two discharging trays 712. The feed carrier 711 carries the untested sensor 42 to be tested, and the discharge carrier 712 carries the tested sensor 42 after testing.
在本實施例中,出料承載盤712可分別包括合格、及不合格之出料承載盤712,用以分辨經測試後之合格感測器、及不合格感測器。同樣地,本實施例包括有二套取放裝置72,其分別為進料取放裝置721、出料取放裝置722。其中,進料取放裝置721負責將進料承載盤711上的待測感測器42搬運至三維翻轉裝置3上的複數測試座4。而待測試完畢後,出料取放裝置722再將複數測試座4上的感測器裝載至出料承載盤712內。據此,本發明之直線往復式三維動態測試設備可依據實際需求使用不同之進料裝置或分料裝置,以達到最佳之測試產能。In this embodiment, the discharge carrier tray 712 can include a qualified and unqualified discharge carrier tray 712 for distinguishing the tested qualified sensor and the failed sensor. Similarly, the present embodiment includes two sets of pick-and-place devices 72, which are respectively a feed pick-and-place device 721 and a discharge pick-and-place device 722. The feeding and picking device 721 is responsible for carrying the sensor 42 to be tested on the feeding carrier 711 to the plurality of test sockets 4 on the three-dimensional inverting device 3. After the test is completed, the discharge pick-and-place device 722 loads the sensors on the plurality of test sockets 4 into the discharge carrier tray 712. Accordingly, the linear reciprocating three-dimensional dynamic testing device of the present invention can use different feeding devices or dispensing devices according to actual needs to achieve the best test capacity.
上述實施例僅係為了方便說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.
1‧‧‧進料裝置1‧‧‧Feeding device
10‧‧‧旋轉輪10‧‧‧Rotating wheel
11‧‧‧升降吸取頭11‧‧‧ Lifting suction head
12‧‧‧固定輪12‧‧‧Fixed wheel
13‧‧‧氣壓缸13‧‧‧ pneumatic cylinder
14‧‧‧進料平台14‧‧‧ Feeding platform
15‧‧‧機器手臂15‧‧‧Machine arm
16‧‧‧震動盤16‧‧‧Vibration plate
17‧‧‧攝影模組17‧‧‧Photography module
18‧‧‧定位模組18‧‧‧ Positioning Module
19‧‧‧轉向模組19‧‧‧ steering module
20,193‧‧‧回收管20,193‧‧‧Recycling tube
160‧‧‧螺旋導軌160‧‧‧Spiral guide
161‧‧‧進料區161‧‧‧feeding area
162‧‧‧光電感測元件162‧‧‧Photoelectric sensing components
163,192‧‧‧吹氣管163,192‧‧‧Blowing tube
164‧‧‧進料槽164‧‧‧feed trough
181‧‧‧楔形塊181‧‧‧ wedge block
191‧‧‧旋轉平台191‧‧‧Rotating platform
2‧‧‧直線往復裝置2‧‧‧Linear reciprocating device
21‧‧‧往復滑台21‧‧‧Reciprocating slide
22‧‧‧偏心輪22‧‧‧Eccentric wheel
23‧‧‧連桿23‧‧‧ Connecting rod
24‧‧‧配重塊24‧‧‧weights
25‧‧‧氣壓缸25‧‧‧ pneumatic cylinder
26‧‧‧驅動馬達26‧‧‧Drive motor
27‧‧‧導螺桿27‧‧‧ lead screw
3‧‧‧三維翻轉裝置3‧‧‧3D turning device
31‧‧‧固定座31‧‧‧ fixed seat
32‧‧‧翻轉架32‧‧‧ flip frame
33‧‧‧承載台33‧‧‧Loading station
331‧‧‧第一表面331‧‧‧ first surface
332‧‧‧第二表面332‧‧‧ second surface
310‧‧‧U形固定座310‧‧‧U-shaped mount
320‧‧‧框形翻轉架320‧‧‧Frame flip frame
34,35‧‧‧馬達34,35‧‧ ‧motor
4‧‧‧測試座4‧‧‧ test seat
41‧‧‧無線傳輸模組41‧‧‧Wireless Transmission Module
51‧‧‧第二無線傳輸模組51‧‧‧Second wireless transmission module
42‧‧‧待測感測器42‧‧‧Sensor to be tested
43‧‧‧旋轉扣件43‧‧‧Rotating fasteners
44‧‧‧扭簧44‧‧‧torsion spring
40‧‧‧座體40‧‧‧ body
5‧‧‧主控制器5‧‧‧Master controller
6‧‧‧測試頭6‧‧‧Test head
61‧‧‧驅動馬達61‧‧‧Drive motor
7‧‧‧分料裝置7‧‧‧Distribution device
71‧‧‧晶片承載盤71‧‧‧ wafer carrier
711‧‧‧進料承載盤711‧‧‧feeding tray
712‧‧‧出料承載盤712‧‧‧discharge tray
72‧‧‧取放裝置72‧‧‧ pick and place device
721‧‧‧進料取放裝置721‧‧‧Feed pick and place device
722‧‧‧出料取放裝置722‧‧‧Feed pick and place device
8‧‧‧控制器8‧‧‧ Controller
9‧‧‧電源模組9‧‧‧Power Module
圖1係本發明第一實施例之整體設備的立體圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of an entire apparatus of a first embodiment of the present invention.
圖2係本發明第一實施例之三維翻轉裝置設置於直線往復裝置的示意圖。2 is a schematic view showing a three-dimensional reversing device according to a first embodiment of the present invention disposed on a linear reciprocating device.
圖3係本發明第一實施例之系統架構圖。3 is a system architecture diagram of a first embodiment of the present invention.
圖4係本發明第一實施例之測試座設置於承載台的分解圖。Figure 4 is an exploded view of the test stand of the first embodiment of the present invention disposed on a carrier.
圖5係本發明第一實施例之翻轉架沿第一軸旋轉的立體圖。Figure 5 is a perspective view of the flip frame of the first embodiment of the present invention rotated along a first axis.
圖6係本發明第一實施例之承載台沿第二軸旋轉的立體圖。Figure 6 is a perspective view of the stage of the first embodiment of the present invention rotated along a second axis.
圖7a係本發明之直線往復裝置另一較佳實施例之示意圖。Figure 7a is a schematic illustration of another preferred embodiment of the linear reciprocating device of the present invention.
圖7b係本發明之直線往復裝置又一較佳實施例之示意圖。Figure 7b is a schematic view of still another preferred embodiment of the linear reciprocating device of the present invention.
圖8係本發明以有線傳輸之示意圖。Figure 8 is a schematic illustration of the present invention in wired transmission.
圖9係本發明第二實施例之進料裝置的示意圖。Figure 9 is a schematic illustration of a feeding device in accordance with a second embodiment of the present invention.
圖10係本發明第二實施例之進料裝置的週邊設備示意圖。Figure 10 is a schematic view of the peripheral device of the feeding device of the second embodiment of the present invention.
圖11係本發明第二實施例之進料裝置的定位模組示意圖。Figure 11 is a schematic view of a positioning module of a feeding device according to a second embodiment of the present invention.
圖12係本發明第二實施例之進料裝置的轉向模組示意圖。Figure 12 is a schematic view of a steering module of a feeding device according to a second embodiment of the present invention.
圖13係本發明第三實施例之進料裝置的示意圖。Figure 13 is a schematic view of a feeding device of a third embodiment of the present invention.
圖14係本發明第四實施例之分料裝置的示意圖。Figure 14 is a schematic illustration of a dispensing device in accordance with a fourth embodiment of the present invention.
圖15係本發明第四實施例之分料裝置的內部俯視圖。Figure 15 is a plan view showing the interior of a dispensing device according to a fourth embodiment of the present invention.
2...直線往復裝置2. . . Linear reciprocating device
21...往復滑台twenty one. . . Reciprocating slide
3...三維翻轉裝置3. . . Three-dimensional turning device
5...主控制器5. . . main controller
6...測試頭6. . . Test head
61...驅動馬達61. . . Drive motor
7...分料裝置7. . . Dispensing device
Claims (12)
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TW99104723A TWI409471B (en) | 2010-02-12 | 2010-02-12 | Linear reciprocating three-dimensional dynamic testing equipment |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200846667A (en) * | 2006-12-29 | 2008-12-01 | Intest Corp | Test head positioning system and method |
TWM349148U (en) * | 2008-08-29 | 2009-01-11 | Ardi Technology Corp | A wireless anti-pocket-picking tracking device suitable for slave and master mobile device |
TW200934564A (en) * | 2007-12-05 | 2009-08-16 | Bandai Co | Game apparatus |
TW200949103A (en) * | 2008-04-17 | 2009-12-01 | Erke Erke Arastirmalari Ve Muhendislik Anonim Sirketi | Gear device, preferably motor device |
-
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200846667A (en) * | 2006-12-29 | 2008-12-01 | Intest Corp | Test head positioning system and method |
TW200934564A (en) * | 2007-12-05 | 2009-08-16 | Bandai Co | Game apparatus |
TW200949103A (en) * | 2008-04-17 | 2009-12-01 | Erke Erke Arastirmalari Ve Muhendislik Anonim Sirketi | Gear device, preferably motor device |
TWM349148U (en) * | 2008-08-29 | 2009-01-11 | Ardi Technology Corp | A wireless anti-pocket-picking tracking device suitable for slave and master mobile device |
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