TWI405827B - Tungsten oxide film for smart window - Google Patents
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本發明是有關於一種氧化物薄膜,且特別是有關於一種金屬氧化物薄膜。This invention relates to an oxide film, and more particularly to a metal oxide film.
氧化物薄膜已廣泛應用於傳統產業、半導體製程、光電產業等。目前氧化物薄膜的製備方法可概分為氣相法與溶液法。然而,氣相法例如蒸鍍或濺鍍製備方法需要使用昂貴的設備,真空系統抽真空的速度限制製程速度,且反應腔體的尺寸也使得製程難以大面積化。Oxide films have been widely used in traditional industries, semiconductor processes, and optoelectronics industries. At present, the preparation method of the oxide film can be roughly classified into a gas phase method and a solution method. However, gas phase processes such as evaporation or sputtering preparation methods require the use of expensive equipment, the speed of vacuum evacuation of the vacuum system limits the process speed, and the size of the reaction chamber also makes the process difficult to enlarge.
溶液法例如凝膠或其他水溶液製備方法則有製程繁瑣費時與氧化物薄膜之特性不容易控制的問題。舉例來說,一種水溶液製備氧化鎢薄膜的方法係先將鎢粉與雙氧水攪拌6小時以均勻混合並移除過多的雙氧水,然後將醋酸加入溶液後迴流12小時,接著對溶液抽真空以移除溶劑,接著加入介面活性劑至溶液後攪拌約1小時,然後離心分離溶液中的雜質而留下澄清液體,接著將得到的澄清液體塗佈在基材上並進行加熱步驟以得到氧化鎢薄膜。此外,一般溶液法的製程步驟需要精確地控制才能具有再現性,否則,製程參數稍有誤差,例如溶液攪拌的時間不同或溶液置放的時間不同就無法得到相同性質的氧化物薄膜。Solution methods such as gels or other aqueous solution preparation methods have problems in that the process is cumbersome and time-consuming and the characteristics of the oxide film are not easily controlled. For example, an aqueous solution for preparing a tungsten oxide film is firstly stirred with tungsten water and hydrogen peroxide for 6 hours to uniformly mix and remove excess hydrogen peroxide, then acetic acid is added to the solution and refluxed for 12 hours, and then the solution is evacuated to remove The solvent, followed by the addition of the surfactant to the solution, was stirred for about 1 hour, and then the impurities in the solution were centrifuged to leave a clear liquid, and then the resulting clear liquid was coated on a substrate and subjected to a heating step to obtain a tungsten oxide film. In addition, the process steps of the general solution method need to be precisely controlled to be reproducible. Otherwise, the process parameters are slightly inaccurate, for example, the time of stirring of the solution is different or the time of solution placement is different, and an oxide film of the same nature cannot be obtained.
本發明之實施例提供一種應用於智慧型窗戶之氧化鎢薄膜。氧化鎢薄膜的形成方法包括以下步驟。製備塗料。塗料包括第一前驅物、燃料與溶劑。第一前驅物包括鎢粉末、硝酸鎢、硫酸鎢、醋酸鎢或上述之組合。燃料包括硫脲、尿素、氨基乙酸、檸檬酸或上述之組合。溶劑包括水、雙氧水、酒精、或上述之組合。將塗料施加至基材上以形成塗層。進行退火步驟,以使塗層變成氧化鎢薄膜。Embodiments of the present invention provide a tungsten oxide film for use in a smart window. The method of forming the tungsten oxide film includes the following steps. Prepare the coating. The coating includes a first precursor, a fuel, and a solvent. The first precursor comprises tungsten powder, tungsten nitrate, tungsten sulfate, tungsten acetate or a combination thereof. The fuel includes thiourea, urea, glycine, citric acid or a combination of the above. The solvent includes water, hydrogen peroxide, alcohol, or a combination thereof. A coating is applied to the substrate to form a coating. An annealing step is performed to make the coating into a tungsten oxide film.
本發明之實施例提供一種氧化物薄膜及其形成方法。於實施例中,氧化物薄膜可包括金屬氧化物,其金屬可例如包括鎢、鎳、鈦、鋅、銅、銀或上述之組合。Embodiments of the present invention provide an oxide film and a method of forming the same. In an embodiment, the oxide film may include a metal oxide, and the metal may include, for example, tungsten, nickel, titanium, zinc, copper, silver, or a combination thereof.
氧化物薄膜的形成方法包括以下步驟。製備塗料,塗料包括第一前驅物、燃料與溶劑。將塗料施加至基材上以形成塗層。進行退火步驟,以使塗層變成氧化物薄膜。本發明實施例之氧化物薄膜的形成方法簡單、快速且具再現性。氧化物薄膜的形成方法不需使用昂貴或複雜的設備,因此成本低。另外,可適用於大面積的基材。氧化物薄膜的形貌與性質可藉由調變製程之參數來控制。The method of forming an oxide film includes the following steps. A coating is prepared that includes a first precursor, a fuel, and a solvent. A coating is applied to the substrate to form a coating. An annealing step is performed to cause the coating to become an oxide film. The method for forming an oxide film according to an embodiment of the present invention is simple, rapid, and reproducible. The method of forming the oxide film does not require the use of expensive or complicated equipment, and thus the cost is low. In addition, it can be applied to a large-area substrate. The morphology and properties of the oxide film can be controlled by the parameters of the modulation process.
燃料包括硫脲、尿素、氨基乙酸、檸檬酸或上述之組合。在製備塗料的過程中或在退火步驟中,燃料會釋放熱能或氣體,因此本發明之實施例的方法能以較低的退火溫度形成氧化物薄膜,或使氧化物薄膜具有孔洞。The fuel includes thiourea, urea, glycine, citric acid or a combination of the above. The fuel releases thermal energy or gas during the preparation of the coating or during the annealing step, and thus the method of the embodiment of the present invention can form an oxide film at a lower annealing temperature or have a hole in the oxide film.
溶劑包括水、雙氧水、酒精、或上述之組合。The solvent includes water, hydrogen peroxide, alcohol, or a combination thereof.
第一前驅物包括第一金屬粉末、第一金屬硝酸鹽、第一金屬硫酸鹽、第一金屬醋酸鹽或上述之組合,其中第一金屬可例如包括鎢、鎳、鈦、鋅、銅、銀或上述之組合。舉例來說,於一些實施例中,係形成氧化鎳薄膜,其中使用的第一前驅物可包括鎳粉末、硝酸鎳、硫酸鎳、醋酸鎳或上述之組合。於一些實施例中,係形成氧化鎢薄膜,其中使用第一前驅物可包括例如鎢粉末、硝酸鎢、硫酸鎢、醋酸鎢或上述之組合。The first precursor includes a first metal powder, a first metal nitrate, a first metal sulfate, a first metal acetate, or a combination thereof, wherein the first metal may include, for example, tungsten, nickel, titanium, zinc, copper, silver Or a combination of the above. For example, in some embodiments, a nickel oxide film is formed, wherein the first precursor used can include nickel powder, nickel nitrate, nickel sulfate, nickel acetate, or a combination thereof. In some embodiments, a tungsten oxide film is formed, wherein the use of the first precursor can include, for example, tungsten powder, tungsten nitrate, tungsten sulfate, tungsten acetate, or a combination thereof.
基材可包括玻璃或透明導電氧化物,例如氧化銦錫(ITO)、氧化錫氟(FTO)等等。The substrate may comprise glass or a transparent conductive oxide such as indium tin oxide (ITO), tin oxide fluoride (FTO), or the like.
第一前驅物的重量:燃料的重量可為1:0.02~22。舉例來說,於一些實施例中係形成氧化鎳薄膜,其中使用的第一前驅物的重量:燃料的重量可為1:0.1~1.64。於一些實施例中係形成氧化鎢薄膜,其中使用的第一前驅物的重量:燃料的重量可為1:0.3~2.24。The weight of the first precursor: the weight of the fuel can be 1:0.02-22. For example, in some embodiments a nickel oxide film is formed wherein the weight of the first precursor used: the weight of the fuel can be from 1:0.1 to 1.64. In some embodiments, a tungsten oxide film is formed wherein the weight of the first precursor used: the weight of the fuel can be from 1:0.3 to 2.24.
燃料的重量:溶劑的重量可為1:0.01~100。舉例來說,於一些形成氧化鎳薄膜的實施例中,燃料的重量:溶劑的重量係1:9~60。於一些形成氧化鎢薄膜的實施例中,燃料的重量:溶劑的重量可為1:0.03~40。Fuel weight: The weight of the solvent can be 1:0.01~100. For example, in some embodiments in which a nickel oxide film is formed, the weight of the fuel: the weight of the solvent is 1:9 to 60. In some embodiments in which a tungsten oxide film is formed, the weight of the fuel: the weight of the solvent may be 1:0.03-40.
於實施例中,塗料可更包括第二摻雜前驅物。第二摻雜前驅物可例如包括第二金屬粉末、第二金屬硝酸鹽、第二金屬硫酸鹽、第二金屬醋酸鹽或上述之組合。其中第二金屬包括鎢、鎳、鈦、鋅、銅、銀或上述之組合。第二金屬與第一金屬不同。第一前驅物的重量:第二摻雜前驅物的重量係1: 0.001~0.1。使用包括第二摻雜前驅物的塗料可形成摻雜的(doped)金屬氧化物薄膜,例如摻雜的氧化鎳薄膜或摻雜的氧化鎢薄膜等等。In an embodiment, the coating may further comprise a second doped precursor. The second doped precursor can, for example, comprise a second metal powder, a second metal nitrate, a second metal sulfate, a second metal acetate, or a combination thereof. The second metal includes tungsten, nickel, titanium, zinc, copper, silver or a combination thereof. The second metal is different from the first metal. The weight of the first precursor: the weight of the second doped precursor is 1: 0.001 to 0.1. A doped metal oxide film such as a doped nickel oxide film or a doped tungsten oxide film or the like can be formed using a coating comprising a second doped precursor.
於實施例中,製備塗料的方法係將材料例如第一前驅物、燃料與溶劑(及第二前驅物)放置在一容器中,並攪拌以均勻混合之。從材料放置在一起開始算起至攪拌均勻混合好所需花費的時間可少於一小時,於一些具體實施例中係最快約5分鐘即可製得塗料,因此氧化物薄膜的形成方法係快速的。此外,塗料具有極佳的穩定性,製備好的塗料即使靜置一段長時間,例如超過24小時以上的時間之後,用來形成氧化物仍能展現再現性。In an embodiment, the method of preparing the coating is to place a material such as a first precursor, a fuel and a solvent (and a second precursor) in a container and stir to uniformly mix. The time taken from the time the materials are placed together to the time of mixing and mixing well can be less than one hour. In some embodiments, the coating can be obtained in as little as about 5 minutes. Therefore, the method of forming the oxide film is fast. In addition, the coating has excellent stability, and the prepared coating can exhibit reproducibility even after standing for a long period of time, for example, over a period of more than 24 hours.
於實施例中,退火步驟的溫度可為300℃至550℃。舉例來說,於一些形成氧化鎳薄膜的實施例中,退火步驟的溫度可例如為350℃至450℃。於一些形成氧化鎢薄膜的實施例中,退火步驟的溫度可例如為300℃至550℃。In an embodiment, the annealing step may have a temperature of from 300 ° C to 550 ° C. For example, in some embodiments in which a nickel oxide film is formed, the temperature of the annealing step may be, for example, 350 ° C to 450 ° C. In some embodiments in which a tungsten oxide film is formed, the temperature of the annealing step may be, for example, 300 ° C to 550 ° C.
於實施例中,退火步驟的時間可為10分鐘至6小時,較佳為10分鐘至60分鐘。In an embodiment, the annealing step may take from 10 minutes to 6 hours, preferably from 10 minutes to 60 minutes.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係硫脲,第一前驅物的重量:燃料的重量係1:0.4~2,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係425℃至550℃,且退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一具有裂縫的氧化鎢薄膜。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is thiourea, the weight of the first precursor: the weight of the fuel is 1:0.4-2, the weight of the fuel: the weight of the solvent is 1 : 15~25, the annealing step temperature is 425 ° C to 550 ° C, and the annealing step is 10 minutes to 60 minutes, the tungsten oxide film is a cracked tungsten oxide film.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係硫脲,第一前驅物的重量:燃料的重量係1:0.2~0.4,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係425℃至550℃,且退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一具有孔洞的氧化鎢薄膜,或者氧化鎢薄膜具有結晶相。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is thiourea, the weight of the first precursor: the weight of the fuel is 1:0.2 to 0.4, and the weight of the fuel: the weight of the solvent is 1 : 15 to 25, the annealing step is performed at a temperature of 425 ° C to 550 ° C, and the annealing step is performed for 10 minutes to 60 minutes, the tungsten oxide film is a tungsten oxide film having pores, or the tungsten oxide film has a crystal phase.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係硫脲,第一前驅物的重量:燃料的重量係1:0.2~0.4,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係300℃至425℃,退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一平整的氧化鎢薄膜,或者氧化鎢薄膜具有非結晶相。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is thiourea, the weight of the first precursor: the weight of the fuel is 1:0.2 to 0.4, and the weight of the fuel: the weight of the solvent is 1 : 15~25, the annealing step temperature is 300 ° C to 425 ° C, and the annealing step is 10 minutes to 60 minutes, the tungsten oxide film is a flat tungsten oxide film, or the tungsten oxide film has an amorphous phase.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係尿素,第一前驅物的重量:燃料的重量1:0.2~0.4,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係425℃至550℃,退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一平整的氧化鎢薄膜。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is urea, the weight of the first precursor: the weight of the fuel is 1:0.2 to 0.4, and the weight of the fuel: the weight of the solvent is 1:15. ~25, the annealing step temperature is 425 ° C to 550 ° C, and the annealing step is 10 minutes to 60 minutes, the tungsten oxide film is a flat tungsten oxide film.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係氨基乙酸,第一前驅物的重量:燃料的重量係1:0.2~0.4,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係425℃至550℃,退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一具有孔洞的氧化鎢薄膜。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is glycine, the weight of the first precursor: the weight of the fuel is 1:0.2 to 0.4, and the weight of the fuel: the weight of the solvent is 1 : 15 to 25, the annealing step is performed at a temperature of 425 ° C to 550 ° C, and the annealing step is performed for 10 minutes to 60 minutes, and the tungsten oxide film is a tungsten oxide film having pores.
於一些實施例中,當第一前驅物係鎢粉末,溶劑係雙氧水,燃料係檸檬酸,第一前驅物的重量:燃料的重量係1:0.2~0.4,燃料的重量:溶劑的重量係1:15~25,退火步驟的溫度係425℃至550℃,退火步驟的時間係10分鐘至60分鐘時,氧化鎢薄膜為一具有孔洞的氧化鎢薄膜。In some embodiments, when the first precursor is tungsten powder, the solvent is hydrogen peroxide, the fuel is citric acid, the weight of the first precursor: the weight of the fuel is 1:0.2 to 0.4, and the weight of the fuel: the weight of the solvent is 1 : 15 to 25, the annealing step is performed at a temperature of 425 ° C to 550 ° C, and the annealing step is performed for 10 minutes to 60 minutes, and the tungsten oxide film is a tungsten oxide film having pores.
本發明之實施例的氧化鎢薄膜具有優異的電致色變性質,適用於各種電致色變元件如智慧型窗戶、電致色變玻璃、變色太陽眼鏡、變色汽車後視鏡、顯示看板、電子紙顯示器等等,此外,也能應用在太陽能電池、半導體等產業。以下例舉一些形成氧化鎢薄膜的具體實施例,並說明氧化鎢薄膜的分析結果。The tungsten oxide film of the embodiment of the invention has excellent electrochromic properties and is suitable for various electrochromic components such as smart windows, electrochromic glass, color changing sunglasses, color changing automobile rearview mirrors, display billboards, Electronic paper displays and the like can also be applied to industries such as solar cells and semiconductors. Specific examples of forming a tungsten oxide film are exemplified below, and the analysis results of the tungsten oxide film are explained.
氧化鎢薄膜的形成方法包括以下步驟。首先,將1.5g鎢粉(Merk)溶解於9ml、30%雙氧水(Sigma-Aldrich)與1ml去離子水(雙氧水的體積:水的體積係9:1)中,然後將0.45g硫脲(Sigma)加入上述溶液中(鎢粉的重量:水加雙氧水的重量:硫脲的重量係1:6:0.3),接著攪拌溶液直到溶劑揮發至溶液的重量係4.5g,藉此得到塗料。將塗料旋轉塗佈在ITO或FTO基材(ITO coated glass或FTO coated glass(Solarnix;片電阻:8Ω/sq))上而形成一塗層。然後對基材進行退火步驟以使塗層變成氧化鎢薄膜,其中加熱的參數係設定第一升溫速率為從室溫升溫至350℃/10分鐘;第二升溫速率為從350℃升溫至450℃/5分鐘;恆溫加熱條件為450℃維持30分鐘;以及降溫至室溫。The method of forming the tungsten oxide film includes the following steps. First, 1.5 g of tungsten powder (Merk) was dissolved in 9 ml, 30% hydrogen peroxide (Sigma-Aldrich) and 1 ml of deionized water (volume of hydrogen peroxide: volume of water: 9:1), and then 0.45 g of thiourea (Sigma). The above solution was added (weight of tungsten powder: weight of water plus hydrogen peroxide: weight of thiourea 1:6:0.3), and then the solution was stirred until the solvent was volatilized to a weight of 4.5 g of the solution, thereby obtaining a coating. The coating was spin-coated on an ITO or FTO substrate (ITO coated glass or FTO coated glass (Solarnix: sheet resistance: 8 Ω/sq)) to form a coating. Then, the substrate is subjected to an annealing step to change the coating into a tungsten oxide film, wherein the heating parameter sets the first heating rate to rise from room temperature to 350 ° C / 10 minutes; the second heating rate is from 350 ° C to 450 ° C /5 minutes; constant temperature heating conditions were maintained at 450 ° C for 30 minutes; and cooled to room temperature.
從掃描式電子顯微鏡(SEM)(JEOL JSM-6700或JSM-7000)的結果(附件1)可知,實施例1之氧化鎢薄膜(形成在FTO基材上)為具有孔洞的薄膜。From the results of a scanning electron microscope (SEM) (JEOL JSM-6700 or JSM-7000) (Attachment 1), the tungsten oxide film of Example 1 (formed on the FTO substrate) was a film having pores.
氧化鎢薄膜的形成方法與實施例1相似,其中係以尿素取代硫脲。SEM的分析結果(附件2)顯示實施例2之氧化鎢薄膜為平整的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which thiourea was replaced by urea. The analysis result of SEM (Attachment 2) showed that the tungsten oxide film of Example 2 was a flat film.
氧化鎢薄膜的形成方法與實施例1相似,其中係以氨基乙酸取代硫脲。SEM的分析結果(附件3)顯示實施例3之氧化鎢薄膜為具有孔洞的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which thiourea was replaced by glycine. The analysis result of SEM (Attachment 3) shows that the tungsten oxide film of Example 3 is a film having pores.
氧化鎢薄膜的形成方法與實施例1相似,其中係以檸檬酸取代硫脲。SEM的分析結果(附件4)顯示實施例4之氧化鎢薄膜為具有孔洞的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which thiourea was replaced by citric acid. The analysis result of SEM (Attachment 4) shows that the tungsten oxide film of Example 4 is a film having pores.
氧化鎢薄膜的形成方法與實施例1相似,其中鎢粉的重量:水加雙氧水的重量:硫脲的重量係改成1:6:0.81。SEM的分析結果(附件5)顯示實施例5之氧化鎢薄膜為具有裂縫的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which the weight of the tungsten powder: the weight of water plus hydrogen peroxide: the weight of the thiourea was changed to 1:6:0.81. The analysis result of SEM (Attachment 5) shows that the tungsten oxide film of Example 5 is a film having cracks.
氧化鎢薄膜的形成方法與實施例1相似,其中鎢粉的重量:水加雙氧水的重量:硫脲的重量係改成1:6:0.4。SEM的分析結果(附件6)顯示實施例6之氧化鎢薄膜為為具有孔洞的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which the weight of the tungsten powder: the weight of water plus hydrogen peroxide: the weight of the thiourea was changed to 1:6:0.4. The analysis result of SEM (Attachment 6) shows that the tungsten oxide film of Example 6 is a film having pores.
氧化鎢薄膜的形成方法與實施例1相似,其中退火步驟的溫度係改成400℃,亦即,參數係設定第一升溫速率為從室溫升溫至350℃/10分鐘;第二升溫速率為從350℃升溫至400℃/5分鐘;恆溫加熱條件為400℃維持30分鐘;以及降溫至室溫。SEM的分析結果(附件7)顯示實施例7之氧化鎢薄膜為為平整的薄膜。The method for forming the tungsten oxide film is similar to that of the first embodiment, wherein the temperature of the annealing step is changed to 400 ° C, that is, the parameter is set to a first heating rate from room temperature to 350 ° C / 10 minutes; the second heating rate is The temperature was raised from 350 ° C to 400 ° C / 5 minutes; the constant temperature heating condition was maintained at 400 ° C for 30 minutes; and the temperature was lowered to room temperature. The analysis result of SEM (Attachment 7) showed that the tungsten oxide film of Example 7 was a flat film.
氧化鎢薄膜的形成方法與實施例1相似,其中退火步驟的溫度係改成500℃。SEM的分析結果(附件8)顯示實施例8之氧化鎢薄膜為具有孔洞的薄膜。The method of forming the tungsten oxide film was similar to that of Example 1, in which the temperature of the annealing step was changed to 500 °C. The analysis result of SEM (Attachment 8) shows that the tungsten oxide film of Example 8 is a film having pores.
氧化鎢薄膜的形成方法與實施例1相似,其中塗料中並未添加硫脲。SEM的分析結果(附件9)顯示比較例之氧化鎢薄膜為平整的薄膜。The tungsten oxide film was formed in a similar manner to Example 1, in which thiourea was not added to the coating. The SEM analysis results (Annex 9) show that the tungsten oxide film of the comparative example is a flat film.
第1圖顯示單斜晶系氧化鎢(WO3 )的繞射資料(ICDD-PDF No. 01-072-0677),與ITO基材、實施例1、實施例7與比較例之試片(氧化鎢薄膜形成在ITO基材上)的X-光繞射(XRD)(Rigaku DMAX-2000/PC)圖譜。第2圖顯示實施例1、實施例7與比較例之試片的拉曼(JEOL JEM-2100F)圖譜。Fig. 1 shows diffraction data of monoclinic tungsten oxide (WO 3 ) (ICDD-PDF No. 01-072-0677), and test pieces of ITO substrate, Example 1, Example 7 and Comparative Example ( An X-ray diffraction (XRD) (Rigaku DMAX-2000/PC) pattern of a tungsten oxide film formed on an ITO substrate. Fig. 2 shows a Raman (JEOL JEM-2100F) pattern of the test pieces of Example 1, Example 7 and Comparative Example.
從第1圖可知,實施例1與比較例的氧化鎢薄膜具有多晶結構,並含有單斜晶相的氧化鎢薄膜。實施例7的試片僅出現ITO基材的波峰。從第2圖可知,拉曼圖譜在805 cm-1 、714 cm-1 、327 cm-1 與272 cm-1 位置出現的散射波峰驗證了實施例1與比較例的氧化鎢薄膜含有單斜晶相。相較於實施例1與比較例的拉曼光譜,實施例7試片的拉曼光譜在805 cm-1 、714 cm-1 、位置出現的波峰較弱且更寬。As is apparent from Fig. 1, the tungsten oxide thin films of Example 1 and Comparative Example have a polycrystalline structure and contain a monoclinic phase tungsten oxide thin film. The test piece of Example 7 showed only the peak of the ITO substrate. It can be seen from Fig. 2 that the scattering peaks of the Raman spectra at 805 cm -1 , 714 cm -1 , 327 cm -1 and 272 cm -1 verify that the tungsten oxide films of Example 1 and Comparative Examples contain monoclinic crystals. phase. Compared with the Raman spectra of Example 1 and Comparative Example, the Raman spectrum of the sample of Example 7 was weaker and wider at positions of 805 cm -1 and 714 cm -1 .
實施例7之試片也以TEM分析(附件10)。選區電子繞射(selected area electron diffraction;SAED)圖案的結果顯示,實施例7之試片並不具有整齊排列的結晶結構(well-ordered crystalline structure),這與XRD圖譜及拉曼圖譜的結果相符。明視野影像(bright-field image;BFI)、暗視野影像(dark-field image;DFI)與高解析度穿透式電子顯微鏡(HRTEM)影像皆顯示實施例7的氧化物薄膜含有奈米晶體氧化鎢(nanocrystalline tungsten oxide),其平均直徑約為5nm,且係埋在非結晶氧化鎢基體(amorphous tungsten oxide matrix)中。此外,從SAED圖案與HRTEM影像皆得到晶格面距(d-spacing)約0.37~0.38nm。The test piece of Example 7 was also analyzed by TEM (Attachment 10). The results of the selected area electron diffraction (SAED) pattern showed that the test piece of Example 7 did not have a well-ordered crystalline structure, which was consistent with the results of the XRD pattern and the Raman spectrum. . Bright-field image (BFI), dark-field image (DFI) and high-resolution transmission electron microscope (HRTEM) images show that the oxide film of Example 7 contains nanocrystal oxidation. A nanocrystalline tungsten oxide having an average diameter of about 5 nm and buried in an amorphous tungsten oxide matrix. In addition, the d-spacing is about 0.37~0.38nm from both the SAED pattern and the HRTEM image.
試片的光學性質可使用三極式系統(three-electrode system)、電致變色(electrochromic;EC)裝置(二電極系統)與紫外光可見光近紅外光光譜儀(US-VIS-NIR spectrophotometer)(JASCO V-670)進行分析。The optical properties of the test piece can be performed using a three-electrode system, an electrochromic (EC) device (two-electrode system), and an ultraviolet-visible near-infrared light spectrometer (US-VIS-NIR spectrophotometer) (JASCO). V-670) for analysis.
三極式系統使用恆壓器(potentiostat)(Autolab,PGSTAT302N),電解液為1M過氯酸鋰(lithium perchlorate;LiClO4 )(Sigma-Aldrich)溶液,其中溶劑係丙烯碳酸鹽(propylene carbonate;PC)(Alfa Aesar)。試片(FTO基材上形成有氧化鎢薄膜)、Pt線與Ag/AgCl係分別作為工作(working)電極、輔助(counter)電極與參考(reference)電極。The three-pole system uses a potentiostat (Autolab, PGSTAT302N), and the electrolyte is a 1M lithium perchlorate (LiClO 4 ) (Sigma-Aldrich) solution in which the solvent is propylene carbonate (PC). ) (Alfa Aesar). A test piece (a tungsten oxide film was formed on the FTO substrate), a Pt line, and an Ag/AgCl system were used as a working electrode, a counter electrode, and a reference electrode, respectively.
電致變色裝置係將ITO相對電極(counter electrode)與試片(FTO基材上形成有氧化鎢薄膜,氧化鎢薄膜朝向ITO相對電極)之間設置60μm厚的融熔性(hot-melt)樹脂間隔物(Surlyn spacer)(Solaronix,SA)而彼此隔開,並藉由毛細作用將上述LiClO4 /PC電解液導入試片與ITO相對電極之間的空隙中。The electrochromic device is provided with a 60 μm thick hot-melt resin between an ITO counter electrode and a test piece (a tungsten oxide film is formed on the FTO substrate, and the tungsten oxide film is oriented toward the ITO opposite electrode). Separate spacers (Solaronix, SA) were separated from each other, and the LiClO 4 /PC electrolyte was introduced into the space between the test piece and the opposite electrode of the ITO by capillary action.
在三極式系統或電致變色裝置中,當對試片施加負的偏壓時,電解液中的Li離子會嵌入透明的氧化鎢(WO3 )薄膜(附件11)中而變成彩色的氧化鎢(Lix WO3 )薄膜(附件12),如以下化學方程式所示:In a three-pole system or electrochromic device, when a negative bias is applied to the test piece, Li ions in the electrolyte are embedded in a transparent tungsten oxide (WO 3 ) film (Attachment 11) to become colored oxide. A tungsten (Li x WO 3 ) film (Attachment 12), as shown in the following chemical equation:
當對試片施加正的偏壓時,Li離子會從氧化鎢薄膜脫出,使得彩色的氧化鎢薄膜褪色。When a positive bias is applied to the test piece, Li ions are removed from the tungsten oxide film, causing the colored tungsten oxide film to fade.
第3圖、第4圖與第5圖分別顯示實施例1、實施例7與比較例之試片的光穿透率與穿透率變化(modulation)。圖中的“初始製備”表示初始製備之試片的光穿透率曲線。“彩色態”表示初始製備之試片的氧化鎢薄膜在藉由三極式系統變色之後的光穿透率曲線。“褪色態”表示彩色的氧化鎢薄膜在藉由三極式系統褪色之後的光穿透率曲線。“穿透率變化”表示“褪色態”曲線扣掉“彩色態”曲線之後的結果。Fig. 3, Fig. 4, and Fig. 5 show the light transmittance and transmittance of the test pieces of Example 1, Example 7, and Comparative Example, respectively. The "initial preparation" in the figure indicates the light transmittance curve of the initially prepared test piece. The "color state" indicates the light transmittance curve of the tungsten oxide film of the initially prepared test piece after discoloration by a three-pole system. The "faded state" represents the light transmittance curve of a colored tungsten oxide film after fading by a three-pole system. "Transmittance change" means the result of the "faded state" curve after the "color state" curve is deducted.
請參考第3圖至第5圖,實施例1、實施例7與比較例之初始製備的試片對可見光的穿透率皆約80%左右。Referring to FIGS. 3 to 5, the transmittance of visible light of the test pieces initially prepared in Example 1, Example 7 and Comparative Example was about 80%.
請參考第3圖至第5圖,在初始製備之試片的氧化鎢薄膜與20 mC cm-2 的Li離子嵌合而變色之後,光穿透率下降。舉例來說,比較例之試片對波長632nm之光線的穿透率下降至25%,實施例1之試片下降至20%,實施例7之試片甚至下降至10%以下。Referring to FIGS. 3 to 5, after the tungsten oxide film of the initially prepared test piece is fitted with Li ions of 20 mC cm -2 and discolored, the light transmittance is lowered. For example, the transmittance of the test piece of the comparative example to the light having a wavelength of 632 nm was lowered to 25%, the test piece of Example 1 was lowered to 20%, and the test piece of Example 7 was even lowered to 10% or less.
請參考第3圖至第5圖,實施例7之試片在彩色的氧化鎢薄膜褪色之後的光穿透率與初始製備時的結果相似。實施例1之試片在彩色的氧化鎢薄膜褪色之後的光穿透率稍微低於初始製備時的結果。而比較例之試片光穿透率下降的程度又比實施例1更大。因此,舉例來說,在波長632nm位置之穿透率變化的結果中,實施例7之氧化鎢薄膜具有最大的量,約70%。Referring to Figures 3 to 5, the light transmittance of the test piece of Example 7 after fading of the colored tungsten oxide film is similar to that at the time of initial preparation. The light transmittance of the test piece of Example 1 after fading of the colored tungsten oxide film was slightly lower than that at the time of initial preparation. On the other hand, the degree of light transmittance of the test piece of the comparative example was decreased to be larger than that of the first embodiment. Thus, for example, in the result of the change in the transmittance at the position of the wavelength of 632 nm, the tungsten oxide film of Example 7 has the largest amount, about 70%.
第6圖顯示實施例1、實施例7與比較例之試片藉由電致變色裝置在10 μAcm-2 的固定電流密度下與Li離子反應過程中的電荷密度(charge density)與光學密度(optical density;OD)的關係曲線。從曲線的斜率可求得實施例1、實施例7與比較例之試片的變色效率(coloration efficiency;CE)分別為6 cm2 C-1 、37 cm2 C-1 與7 cm2 C-1 。實施例7之試片的變色效率明顯高於比較例的試片。Fig. 6 is a view showing the charge density and optical density of the test pieces of Example 1, Example 7 and Comparative Example by reacting with Li ions at a fixed current density of 10 μAcm -2 by an electrochromic device ( Optical density; OD) relationship curve. From the slope of the curve, the coloration efficiency (CE) of the test pieces of Example 1, Example 7 and the comparative example was determined to be 6 cm 2 C -1 , 37 cm 2 C -1 and 7 cm 2 C - respectively. 1 . The color change efficiency of the test piece of Example 7 was significantly higher than that of the test piece of the comparative example.
使用電致變色裝置對實施例1、實施例7與比較例之試片反覆施加正、負電壓持續200秒以褪色並彩色試片。於實施例中,當施加的電壓為-3 V時,試片係彩色的。當施加的電壓為3 V時,試片係褪色的。第7圖顯示試片在第一個測試循環中(50秒時施加電壓3 V褪色持續200秒,然後在250秒時施加電壓-3 V彩色)對波長為632 nm之光線的穿透率。請參照第7圖,結果顯示,實施例7之試片具有最大的穿透率變化,約60%,這樣的趨勢與第3圖至第5圖的結果相符。實施例7的彩色時間與褪色時間(以穿透率改變40%的時間做定義)分別為8秒與11秒。比較例之試片的穿透率變化小於40%。The test pieces of Example 1, Example 7 and Comparative Example were repeatedly applied with positive and negative voltages for 200 seconds using an electrochromic device to discolor and color test pieces. In the embodiment, the test piece is colored when the applied voltage is -3 V. When the applied voltage is 3 V, the test piece is faded. Figure 7 shows the penetration of the test piece in the first test cycle (applied with a voltage of 3 V for 50 seconds at 50 seconds and then applied with a voltage of -3 V at 250 seconds) to light with a wavelength of 632 nm. Referring to Fig. 7, the results show that the test piece of Example 7 has the largest change in transmittance, about 60%, which is consistent with the results of Figs. 3 to 5. The color time and fading time of Example 7 (defined by the time when the transmittance was changed by 40%) were 8 seconds and 11 seconds, respectively. The transmittance of the test piece of the comparative example was less than 40%.
電致變色材料除了變色效率與反應時間,耐久性(durability)也是需要考量的重要因素。第8圖顯示試片在50個測試循環期間對波長為632 nm之光線的穿透率。實施例7之試片在30次彩色/褪色的循環之後,其穿透率變化仍有40%。實施例1與比較例之試片在少數彩色/褪色的循環之後,其穿透率變化僅剩約10%。這樣的結果顯示實施例7之試片的耐久性比比較例好。In addition to the color change efficiency and reaction time, the durability of the electrochromic material is also an important factor to be considered. Figure 8 shows the penetration of the test piece with light at a wavelength of 632 nm during 50 test cycles. The test piece of Example 7 had a 40% change in transmittance after 30 cycles of color/fading. The test pieces of Example 1 and Comparative Example showed only about 10% change in transmittance after a few color/fading cycles. As a result, the durability of the test piece of Example 7 was better than that of the comparative example.
第9圖、第10圖與第11圖分別顯示實施例1、實施例7與比較例之試片藉由三極式系統在(第2次、第10次、第100次、第500次與第1000次)彩色/褪色循環中被施加之電壓(voltage)與在此電壓下量測得的電流密度(current density)的關係(CV曲線)。請參照第9圖,實施例1之試片的CV曲線的改變程度不大。請參照第10圖,實施例7之試片的CV曲線雖有改變,然其圍住的面積沒有太大的變化,這表示實施例7之試片具有良好的可靠性(reliability)。請參照第11圖,在彩色/褪色循環之後,比較例之試片的CV曲線圍住的面積有逐漸辯小的趨勢,這表示比較例之試片的可靠性不佳。Fig. 9, Fig. 10, and Fig. 11 show the test pieces of the first embodiment, the seventh embodiment, and the comparative example, respectively, by the three-pole system (the second, the tenth, the tenth, the fifth, and the 1000th) The relationship between the applied voltage in the color/fade cycle and the current density measured at this voltage (CV curve). Referring to Fig. 9, the CV curve of the test piece of Example 1 was not changed to a large extent. Referring to Fig. 10, the CV curve of the test piece of Example 7 was changed, but the area enclosed therein did not change much, which indicates that the test piece of Example 7 had good reliability. Referring to Fig. 11, after the color/fade cycle, the area surrounded by the CV curve of the test piece of the comparative example has a tendency to gradually decrease, which indicates that the test piece of the comparative example is not reliable.
第12圖繪示應用氧化鎢薄膜之智慧型窗戶的示意圖。第13圖顯示應用氧化鎢薄膜之智慧型窗戶亮態的J-V曲線。第14圖顯示應用氧化鎢薄膜之智慧型窗戶在短路狀態下,被交替地照光(light on)與不照光(light off)時的穿透率變化。請參照第12圖,智慧型窗戶包括相對的ITO基板2與FTO基板4。氧化鎢薄膜6與Pt薄膜8設置在FTO基板4上。Pt薄膜8環繞住氧化鎢薄膜6。由TiO2 奈米顆粒10構成的薄膜設置在ITO基板2上。TiO2 奈米顆粒10吸附有染料12(N719 dye)。電解液14(含有0.5 M LiI與5 mM I2 的丙烯碳酸鹽溶液)設置在ITO基板2與FTO基板4之間。智慧型窗戶係應用染料敏化型太陽能電池。從第13圖的結果可知,智慧型窗戶的開路電壓(Voc)係0.22 V。短路電流密度(Jsc)係2.13 mA。填充因子(F.F)係0.27。轉換效率(efficiency)係0.12(%)。從第14圖的結果可知,智慧型窗戶在照光的情況下具有低的光穿透率。在沒有照光的情況下具有高的光穿透率。Figure 12 is a schematic view showing a smart window using a tungsten oxide film. Figure 13 shows the JV curve of a smart window bright state using a tungsten oxide film. Figure 14 shows the change in transmittance of a smart window using a tungsten oxide film in a short-circuit state when it is alternately lighted and light off. Referring to FIG. 12, the smart window includes an opposite ITO substrate 2 and an FTO substrate 4. The tungsten oxide film 6 and the Pt film 8 are provided on the FTO substrate 4. The Pt film 8 surrounds the tungsten oxide film 6. A film composed of TiO 2 nanoparticles 10 is provided on the ITO substrate 2. The TiO 2 nanoparticle 10 is adsorbed with a dye 12 (N719 dye). An electrolytic solution 14 (a propylene carbonate solution containing 0.5 M LiI and 5 mM I 2 ) was provided between the ITO substrate 2 and the FTO substrate 4 . Smart windows use dye-sensitized solar cells. As can be seen from the results of Fig. 13, the open circuit voltage (Voc) of the smart window is 0.22 V. The short circuit current density (Jsc) is 2.13 mA. The fill factor (FF) is 0.27. The conversion efficiency is 0.12 (%). As can be seen from the results of Fig. 14, the smart window has a low light transmittance in the case of illumination. It has a high light transmittance without illumination.
此例係形成氧化鎳薄膜。氧化鎳薄膜的形成方法與實施例1相似,其中塗料中的第一前驅物係醋酸鎳,燃料係尿素。醋酸鎳的重量:水加雙氧水的重量:尿素的重量係1:0.1:5.66。SEM的分析結果(附件13、14)顯示實施例9之氧化鎳薄膜為平整的薄膜。In this case, a nickel oxide film is formed. The nickel oxide film is formed in a similar manner to that in Example 1, in which the first precursor in the coating is nickel acetate and the fuel is urea. Weight of nickel acetate: weight of water plus hydrogen peroxide: the weight of urea is 1:0.1:5.66. The analysis results of SEM (Annex 13, 14) showed that the nickel oxide film of Example 9 was a flat film.
氧化鎳薄膜的形成方法與實施例1相似,其中塗料中的第一前驅物係硝酸鎳。硝酸鎳的重量:水加雙氧水的重量:硫脲的重量係1:0.1:3.44。The nickel oxide film was formed in a similar manner to Example 1, in which the first precursor in the coating was nickel nitrate. Weight of nickel nitrate: weight of water plus hydrogen peroxide: The weight of thiourea is 1:0.1:3.44.
第15圖顯示使用電致變色裝置對實施例10之試片反覆施加正、負電壓持續600秒以褪色並彩色試片。第16圖顯示實施例10之試片藉由電致變色裝置在50 μAcm-2 的固定電流密度下與OH離子反應過程中的電荷密度與光學密度的關係曲線。從曲線的斜率可求得實施例10之試片的變色效率為28 cm2 C-1 。Fig. 15 shows that the test piece of Example 10 was repeatedly applied with positive and negative voltages for 600 seconds using an electrochromic device to discolor and color test pieces. Fig. 16 is a graph showing the relationship between the charge density and the optical density in the reaction of the test piece of Example 10 with an OH ion at a fixed current density of 50 μAcm -2 by an electrochromic device. From the slope of the curve, the color change efficiency of the test piece of Example 10 was found to be 28 cm 2 C -1 .
雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,任何熟悉此項技藝者,在不脫離本發明之精神和範圍內,當可做些許更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
2...ITO基板2. . . ITO substrate
4...FTO基板4. . . FTO substrate
6...氧化鎢薄膜6. . . Tungsten oxide film
8...Pt薄膜8. . . Pt film
10...TiO2 奈米顆粒10. . . TiO 2 nanoparticle
12...染料12. . . dye
14...電解液14. . . Electrolyte
第1圖顯示單斜晶系氧化鎢的繞射資料,與ITO基材、實施例1、實施例7與比較例之試片的X-光繞射圖譜。Fig. 1 shows the diffraction data of monoclinic tungsten oxide, and the X-ray diffraction pattern of the ITO substrate, the test pieces of Example 1, Example 7, and the comparative example.
第2圖顯示實施例1、實施例7與比較例之試片的拉曼圖譜。Fig. 2 shows Raman spectra of the test pieces of Example 1, Example 7 and Comparative Example.
第3圖顯示實施例1之試片的光穿透率與穿透率變化。Fig. 3 is a graph showing changes in light transmittance and transmittance of the test piece of Example 1.
第4圖顯示實施例7之試片的光穿透率與穿透率變化。Fig. 4 is a graph showing changes in light transmittance and transmittance of the test piece of Example 7.
第5圖顯示比較例之試片的光穿透率與穿透率變化。Fig. 5 shows changes in light transmittance and transmittance of the test piece of the comparative example.
第6圖顯示實施例1、實施例7與比較例之試片的電荷密度與光學密度的關係曲線。Fig. 6 is a graph showing the relationship between the charge density and the optical density of the test pieces of Example 1, Example 7 and Comparative Example.
第7圖顯示實施例1、實施例7與比較例之試片在第一個測試循環中對波長為632 nm之光線的穿透率。Fig. 7 shows the transmittance of the test pieces of Example 1, Example 7 and Comparative Example in the first test cycle for light having a wavelength of 632 nm.
第8圖顯示實施例1、實施例7與比較例之試片在50個測試循環期間對波長為632 nm之光線的穿透率。Figure 8 shows the transmittance of the test pieces of Example 1, Example 7 and Comparative Example for light having a wavelength of 632 nm during 50 test cycles.
第9圖顯示實施例1之試片在彩色/褪色循環中電壓與電流密度的關係。Fig. 9 is a graph showing the relationship between voltage and current density in the color/fading cycle of the test piece of Example 1.
第10圖顯示實施例7之試片在彩色/褪色循環中電壓與電流密度的關係。Fig. 10 is a graph showing the relationship between voltage and current density in the color/fading cycle of the test piece of Example 7.
第11圖顯示比較例之試片在彩色/褪色循環中電壓與電流密度的關係。Figure 11 shows the relationship between voltage and current density in the color/fade cycle of the test piece of the comparative example.
第12圖繪示應用氧化鎢薄膜之智慧型窗戶的示意圖。Figure 12 is a schematic view showing a smart window using a tungsten oxide film.
第13圖顯示應用氧化鎢薄膜之智慧型窗戶於亮態的J-V曲線。Figure 13 shows the J-V curve of a smart window using a tungsten oxide film in a bright state.
第14圖顯示應用氧化鎢薄膜之智慧型窗戶在短路狀態下,被交替地照光與不照光時的穿透率變化。Figure 14 shows the change in transmittance of a smart window using a tungsten oxide film when it is alternately illuminated and not illuminated in a short circuit condition.
第15圖顯示實施例10在測試循環中對光線的穿透率。Figure 15 shows the penetration of light in Example 10 during the test cycle.
第16圖顯示實施例10之試片的電荷密度與光學密度的關係曲線。Fig. 16 is a graph showing the relationship between the charge density and the optical density of the test piece of Example 10.
2...ITO基板2. . . ITO substrate
4...FTO基板4. . . FTO substrate
6...氧化鎢薄膜6. . . Tungsten oxide film
8...Pt薄膜8. . . Pt film
10...TiO2 奈米顆粒10. . . TiO 2 nanoparticle
12...染料12. . . dye
14...電解液14. . . Electrolyte
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