TWI452422B - Dust-proof film assembly - Google Patents

Description

Dust-proof film assembly

The present invention relates to a pellicle frame for use in a pellicle for use as a dustproof device in the manufacture of a semiconductor device, a printed substrate, a liquid crystal display, or the like, a method of manufacturing the same, and a pellicle.

In the manufacture of semiconductors such as LSI (Large Scale Integration) and super LSI, and the manufacture of liquid crystal displays, etc., the semiconductor wafer or the liquid crystal original plate is irradiated with light to form a pattern. The photomask and the reticle (hereinafter referred to as the light mask) are attached with dust, and the dust absorbs light or bends the light, thereby having the following problem: deforming the transferred pattern, or The edges are blurred, and the substrate becomes black or the like, which deteriorates the size, quality, appearance, and the like.

Thus, such work is usually performed in a clean room, but even then, it is difficult to keep the light mask always clean, and therefore, a dustproof pellicle is attached to the surface of the light mask, and then Exposure. In such a case, the foreign matter does not adhere directly to the surface of the light mask, but adheres to the pellicle. Therefore, in lithography, as long as the focus is on the pattern on the light mask, dustproof The foreign matter on the membrane module is independent of the transfer.

The pellicle film assembly generally attaches a transparent pell film formed of nitrocellulose, cellulose acetate, or fluororesin which is light-transmissive or adheres to a pellicle frame formed of aluminum, stainless steel, polyethylene, or the like. Formed on the upper end surface. Further, in order to attach a light mask to the lower end surface of the pellicle frame, an adhesive layer formed of a polybutene resin, a polyvinyl acetate resin, an acrylic resin, an anthrone resin, or the like is usually provided, and the adhesive layer is protected. The separation layer (separater).

In order to allow the pellicle film as a thin resin to be supported in the pellicle frame without slack, it is necessary to have a proper size of tension on the pellicle frame. However, in the rectangular pellicle assembly made of the conventional material, the pellicle frame after the pellicle is attached is bent inward due to the tension of the pellicle, and the pellicle is easily loosened. Such a phenomenon is caused by, for example, a side of a dust-proof film module frame such as a large-sized pellicle film assembly used for manufacturing a printed circuit board or a liquid crystal display, or a small pellicle frame for semiconductor manufacturing, due to material and size limitations. This is especially true in pellicle modules that use a low-rigid frame.

On the other hand, in the light mask, in order to reduce the cost, it is necessary to make the exposure field as wide as possible. Therefore, in order to miniaturize the bending of the pellicle frame inward as much as possible, there is a problem in that the field of exposure that can be utilized is reduced. Further, it is desirable to suppress the amount of bending as much as possible while the pellicle assembly having a smaller width The frame makes the exposed area inside it wider, thereby reducing costs.

As a device for solving the bending of the pellicle frame, for example, Patent Document 1 discloses a pellicle frame which is a circular arc-shaped portion which is convex at the center portion on at least one pair of sides of the frame body. The both sides have a circular arc-shaped portion that is concave on the outer side, and further has a linear portion on the outer side. According to such a method, an appropriate design can be performed to control the amount of bending below a certain value.

However, regardless of the frame width, it is possible to maintain the linear shape of the frame as long as the tension is balanced. However, if it is desired to narrow the frame width as much as possible, even if a linear shape is obtained, the rigidity becomes low and the It is difficult to handle, or with a small external force, the pellicle film can be wrinkled, slackened, etc., which is not suitable for practical use, and the dust-proof film that is attached easily cannot exert sufficient effects.

The height of the frame is determined by the optical design of the exposure machine. Therefore, a method of narrowing the frame width and increasing the rigidity of the pellicle frame is to use a material having a high modulus of elasticity. In such a method, for example, Patent Document 2 discloses that a dust-proof membrane module frame containing iron and titanium of stainless steel having a larger modulus of elasticity than that of the frame is embedded in the frame of the aluminum alloy. However, iron alloys such as steel and stainless steel are extremely heavy, and the workability (cuttability) of the titanium alloy is extremely poor, so that it is difficult to use in practice. As an alternative to these, in the case of a carbon fiber composite material which is used as a highly rigid material and which is used as a highly rigid material, it is greatly improved in rigidity and weight as compared with the above various metal materials. There is no problem with the processability, so it is expected. However, with carbon fiber, carbon fiber will occur Worries such as dust.

Further, when a carbon fiber composite material is used, the raw material cost and the processing cost are significantly higher than those of an aluminum alloy generally used. Due to such problems, carbon fiber composite materials have not been adopted as a pellicle frame.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] JP-A-2006-56544

[Patent Document 2] Japanese Laid-Open Patent Publication No. 2006-284927

The present invention is to solve the above problems, and a composite material obtained by impregnating a resin with carbon fibers is used to obtain a high rigidity and a high raw material cost which is lightweight, bends due to the tension of the pellicle film, and has a small bending during processing. And a pellicle frame having a reduced production cost, and a method of manufacturing the same. Further, by attaching a dust-proof film to the pellicle frame, a pellicle having a large exposure area, reduced material cost, and reduced production cost can be obtained.

The object of the present invention can be achieved by the following technical solutions:

A pellicle frame which is a polygonal frame which is tightly covered by a pellicle film, characterized in that a carbon fiber is impregnated with a resin-impregnated composite material which forms a longitudinal direction of each side of the frame, along a polygon. The laminate is wound to cure the resin to be integrated.

2. The pellicle frame according to the above 1, wherein the composite material is formed by winding a continuous single material or by laminating a plurality of materials which are wound at least for one week.

3. The pellicle frame according to the above 1 or 2, wherein the composite material is a sheet in which a plurality of the carbon fibers to be aligned are impregnated with the resin.

4. The pellicle frame according to any one of the above 1 to 3, wherein the surface of the frame is polished and/or cut to be smoothed.

5. The pellicle frame according to any one of the above 1 to 4, wherein the surface of the frame is covered with a resin cover film.

A method of manufacturing a pellicle frame, comprising: a substrate forming step of: having a polygonal core frame body having a smaller than a desired inner dimension, having a desired ratio than the frame a sheet having a larger width and at least one circumference of the frame, and a sheet-like composite material of the resin-impregnated carbon fibers aligned in the longitudinal direction is entangled to be larger than the frame The desired outer dimension is further laminated, the resin is heat-cured and used as a substrate, and a frame forming step is performed by cutting the substrate to have a desired inner and outer dimensions. And a high degree of frame.

7. The method of manufacturing a pellicle frame according to the above 6, comprising the substrate forming step: Having a core material that is smaller than a desired inner dimension of the frame body will have a width that is at least 2 times greater than a desired height of the frame body and at least a length of one week of the frame body a sheet-like composite material of resin-impregnated carbon fibers aligned in the longitudinal direction is wound, and the obtained laminate having a larger outer dimension than the frame body is heated to cure the resin, and then the cutting process is performed. The sides of the frame are divided in the direction parallel to each other to obtain a plurality of the substrates.

8. The method of manufacturing a pellicle frame according to any one of the items 5 to 7, further comprising the frame forming step of forming a resin coating film on a surface of the frame.

A pellicle according to any one of the above 1 to 5, wherein the pellicle is stretched and attached.

The pellicle frame of the present invention is formed of a composite material obtained by impregnating a resin with carbon fibers, thereby having high rigidity while having a light weight. In such a pellicle frame, since the carbon fiber of the composite material having the structure is aligned along the longitudinal direction of each side, the mechanical strength of the fiber can be maximized, bending due to the tension of the pell film, and occurrence during processing. The bending shows extremely high rigidity. In addition, on the advantage of the alignment of the carbon fibers, since there is no seam of the fibers or few seams, it is possible to prevent the strength generated by the seam from becoming low, and to prevent the fracture while obtaining high rigidity. Occurs, has characteristics that are difficult to propagate, and high reliability. Thus, the materials used in the past The width of each side can be narrowed compared to the dust-proof film assembly frame of the material, so that a large inner exposed area can be obtained.

Further, the pellicle frame of the present invention can be smoothed by grinding, cutting, or the like on the surface thereof, and the dimensional accuracy is improved. Further, since the surface is covered with the resin, the processing of the pellicle frame does not expose the carbon fibers on the cutting surface, thereby preventing aging caused by ultraviolet rays while preventing the carbon fibers from falling off and dust.

According to the method for manufacturing a pellicle frame of the present invention, a pellicle frame having a desired size can be obtained by mechanical cutting from a large-sized substrate, whereby the surface defects can be removed. A high-precision, dust-proof film assembly frame that rivals common metal products.

According to the method for manufacturing a pellicle frame of the present invention, a substrate on which a plurality of pellicle frame can be formed can be produced at a time, which can form a pellicle assembly frame with a minimum necessary amount, and can process the substrate. The amount is greatly reduced, which greatly reduces raw material costs and production costs compared to one-to-one processing.

The pellicle according to the present invention can secure a large exposure area obtained by a highly rigid pellicle frame, thereby reducing the manufacturing cost of a semiconductor, a liquid crystal display device, and the like. In addition, there is a danger of dust that does not occur during use, and it has extremely high reliability.

1‧‧‧Plastic membrane assembly frame

2‧‧‧vents

3‧‧‧ recessed hole

4‧‧ ‧ step

5‧‧‧Prepreg

5a~5d‧‧‧Prepreg

6‧‧‧Starting the winding point

6a~6d‧‧‧Starting the winding point

7‧‧‧ winding end point

7a~7d‧‧‧ winding end point

8a~8d‧‧‧Relay joint

9‧‧‧ resin cover film

10‧‧‧Substrate

10a~10c‧‧‧Substrate

12‧‧‧ core material

13‧‧ ‧ step

15‧‧‧carbon fiber

16‧‧‧ Grinder

20‧‧‧Pneumatic film assembly

21‧‧‧ affixed

22‧‧‧Dust film

23‧‧‧ Mask adhesive layer

24‧‧‧ release layer

25‧‧‧Filter

P‧‧‧ alignment direction of carbon fiber

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view showing a frame of a pellicle according to the present invention.

2(a) and 2(b) are a cross-sectional view taken along line A-A, a cross-sectional view taken along line B-B, and a partially enlarged cross-sectional view of the pellicle frame according to the present invention.

3(a) and 3(b) are schematic plan views of a pellicle frame to which the present invention is applied.

4(a) and 4(b) are plan views showing another pellicle frame to which the present invention is applied.

Fig. 5 is a schematic view showing the cutting of a substrate to which the pellicle frame of the present invention is applied, to obtain a desired pellicle frame.

6(a) to 6(d) are schematic views showing a method of manufacturing a pellicle frame according to the present invention.

7(a) to 7(d) are schematic views showing another manufacturing method of the pellicle frame to which the present invention is applied.

Figure 8 is a perspective view of a pellicle assembly to which the present invention is applied.

Hereinafter, embodiments of the present invention will be described in detail, but the scope of the present invention is not limited thereto.

The pellicle frame of the present invention will be described in detail with reference to Fig. 1 .

The pellicle frame 1 is a rectangular frame formed of a long side and a short side, and has four arcuate inner wall sides and outer wall sides in an arc shape. In the predetermined places on the wall surfaces of the long sides and the short sides, the pellicle frame 1 is separately provided. The vent hole 2 that ventilates the inside and the outside and the recessed hole 3 that is used for the treatment. Further, on the lower end surface provided with the mask adhesive layer, there is a step 4 for the mask adhesive layer for forming the mask adhesive layer. However, such a mask adhesive layer with a step difference 4 does not have to be a step. Further, it is also possible to carry out the rib cutting plane as necessary or to provide other steps, pits or grooves.

Such a pellicle frame 1 is composed of a resin-impregnated carbon fiber sheet composite (hereinafter referred to as a prepreg), and such a prepreg 5 is wound and laminated along a quadrangular core material, and then the prepreg is applied. The resin in 5 is solidified to form an integral body. Such a sheet-like prepreg 5, FIG. 2(a) of the pellicle frame 1 of the pellicle frame 1 shown in FIG. 1 through the vent hole 2, and a cross-sectional view taken along line BB of FIG. In the partially enlarged cross-sectional view of the prepreg 5 in the middle circle, as shown in Fig. 2(b), each side is a gap-free laminate of layered prepregs 5a, 5b, 5c, .... The entire surface of the pellicle frame 1 formed by laminating such prepregs 5 is covered with the resin cover film 9.

The prepreg 5 is composed of a plurality of long-fiber carbon fibers 15. The fiber direction is aligned in only one direction, which is a sheet-like composite material in which the resin is immersed. The carbon fibers 15 are parallel to each other in the longitudinal direction of each side of the frame, and are formed in the same direction on the inner walls and the outer walls of the four sides. Examples of the resin immersed in such a prepreg 5 include an epoxy resin and the like. Among them, it is preferable that the resin coating film 9 on the surface of the pellicle frame 1 can be heated, have a reduced amount of gas generated, and have high heat resistance. In addition, the prepreg 5 is at least continuous The degree is one week of the pellicle frame 1 . It is preferable that the sheet-shaped long prepreg 5 is wound from the start to the end of winding, and is wound as a continuous single material to form the pellicle frame 1 .

As shown in Figs. 3(a) and 3(b), the pellicle frame 1 is preferably continuously wound around a side of the pellicle frame 1 with a continuous sheet-like prepreg 5. The construction of the layer. 3(a) and 3(b), a plan view of the pellicle frame 1 formed by the preferred winding method of the prepreg 5 is shown in Fig. 3(a), and the winding method is shown in Fig. 3(b). ) to indicate. In Fig. 3(a), the starting winding point 6 and the winding end point 7 have a step difference, but substantially the prepreg 5 is an extremely thin sheet shape, and this step is not necessary to be noted.

With a sheet-like prepreg 5, there is no seam from the winding start point 6 to the winding end point 7, whereby the strength due to the seam of the prepreg 5 can be prevented, so that it is extremely high. Reliability, at the same time, because of continuous operation, efficiency can be improved and cost can be reduced. However, the length of the prepreg 5 is not infinite, and whether or not the seamless pellicle frame 1 is to be formed depends on the size of the pellicle frame 1 to be produced and the thickness of the laminate, so that there are several seams on the way. can. For example, a prepreg 5 having a length that can be wound in multiple turns is wound and laminated, and at the winding end point 7, the winding point 6 is started with another long prepreg 5 which can be wound in a plurality of turns, thereby making it possible to carry out Winding without gaps, laminating them to form the pellicle frame 1. Alternatively, the prepreg 5 having a length of one turn may be wound, and a plurality of materials may be laminated to form the pellicle frame 1.

When the prepreg 5 having a length of one winding is used for the production, for example, as shown in Figs. 4(a) and 4(b), the prepreg having the length of one week of the pellicle frame 1 is used. 5a, 5b, 5c, ..., the starting winding points of each week are 6a, 6b, 6c, ..., the winding end points are 7a, 7b, 7c, ... and the relay joints are 8a, 8b, 8c, ..., The pellicle frame 1 is formed by laminating without gaps, respectively. 4(a) and 4(b), a plan view of the pellicle frame 1 formed by laminating a prepreg 5 which is wound one turn is shown in Fig. 4(a), and the winding method is shown in Fig. 4(b). To represent.

The joint portions 8a, 8b, 8c, ... of the seam of the prepreg 5 preferably do not appear at the corners of the pellicle frame 1. Further, it is preferable that the joint portions 8a, 8b, 8c, ... of the respective layers do not overlap. Thereby, the influence of the joint portions 8a, 8b, 8c, ... is almost negligible, so that the strength due to the joint portions 8a, 8b, 8c, ... can be prevented from becoming low.

The surface of the pellicle frame 1 of the upper end surface and the lower end surface of the pellicle frame 1 which is formed by winding the prepreg 5 in this manner, and the hole of the pellicle assembly frame 1 for cutting the necessary holes, etc., in order to prevent breakage The resin such as the exposed carbon fiber and the epoxy resin impregnated with the carbon fiber sheet is aged by ultraviolet rays during exposure, and is preferably covered with the resin cover film 9. The surface of the pellicle frame 1 is completely covered by the resin cover film 9, and the occurrence of dust due to carbon fibers can be prevented.

The resin cover film 9 is preferably made of a material which is difficult to age in the ultraviolet light for exposure. Things. Since the color tone of the resin cover film 9 is black, the base material prepreg 5 is black, and it is possible to use a dark color other than black (for example, dark blue or the like) and transparency. However, black can further reduce scattered light, which is particularly preferable. The color of the resin coating film itself is also good, and a pigment, carbon black or the like may be mixed into the resin coating film. As such a resin coating film 9, an acrylic resin is preferable, an anthrone resin is more preferable, and a fluororesin is further more preferable. Such a resin tends to form a cover film having high resistance to ultraviolet rays and high peel strength. In the case of a fluororesin, it is particularly excellent in resistance to ultraviolet rays. However, since the ultraviolet ray transmittance is also high, it is preferably used in combination with a low ultraviolet ray permeability such as a pigment to be mixed. Further, since it is easy to charge due to high insulation, it is preferable to use a material having high conductivity.

The pellicle frame 1 is a polygonal frame, and its shape is not particularly limited. Specific examples include a quadrangular shape in which the corners are circular, and the four corners are all rectangular at right angles, and the like. Shapes, for example, rectangles, squares, octagons, etc. may also be used.

The pellicle frame 1 of the present invention is used as a large pellicle having a length of more than 500 mm on one side for liquid crystal production, and has a large effect. However, the size of the object pellicle assembly as the pellicle frame 1 is not limited. The pellicle frame 1 of the present invention is suitable for all pellicle assemblies in which the rigidity of the pellicle frame is not sufficiently ensured in terms of the size (the length of the side) and the tension of the pellicle film.

As a dustproof film set that is practical for various sizes and high in dimensional accuracy The frame 1 is preferably laminated with a prepreg 5 and a base material of the heat-cured pellicle frame 1 which has a smaller inner size and a larger outer size than the desired pellicle frame 1. The high pellicle frame is then machined to obtain the desired size. In Fig. 5, a schematic view of a pellicle frame 1 obtained by laminating a prepreg 5 by a substrate 10 which is one turn larger than a desired pellicle frame 1 is formed. In the substrate 10, a desired pellicle frame 1 is represented by a dotted line composed of two dots and a line segment.

The inner size and the outer size of the substrate 10 are determined in consideration of the cutting allowance. However, it is preferable that the produced pellicle frame 1 is large on the one side by about 0.2 mm to 3 mm, and more preferably from 0.5 mm to 1 mm. The thickness of the prepreg 5 is 0.2 mm or so even if it is thick. Therefore, setting a cutting allowance of 1 mm requires winding for nearly 5 weeks. The smaller the cutting allowance, the more advantageous the cost is. However, deformation may occur during heat curing, and the longer the side length, the more the machining error occurs, and the degree of cutting allowance is necessary.

The desired pellicle frame 1 is machined from the substrate 10, and the lamination error and deformation during heat curing may be corrected by cutting, so that the dimensional accuracy after processing can be compared with a general metal pellicle. The degree of the framework is equal. Further, since the amount of the prepreg 5 to be used is only a little larger than the shape of the pellicle frame 1 and is laminated, the waste is extremely small, and the amount of the prepreg 5 can be greatly reduced as compared with the method of cutting out from one plate. Production costs are reduced. In addition, the edges are made of a rod-shaped material, and then they are joined together to form a dust-proof film. The amount of use of the prepreg 5 can be reduced as compared with the case of the shape of the component frame, but the cost of joining the rod-shaped materials together is necessary, and the strength of the joint portion which further joins the rod-shaped materials together How to be worried too. Thus, the method of the present invention is advantageous in terms of both production cost and strength.

Further, in the mechanical cutting process, when the substrate 10 is cut out, the direction of the carbon fibers 15 contained in the prepreg 5 is strictly in accordance with the direction of the side formed by the substrate 10, so that the laminated prepreg is provided. The carbon fiber 15 of 5 is not strictly parallel to the side of the pellicle frame 1. Further, the carbon fibers 15 which are continuous at the stage of the substrate 10 may be cut by mechanical cutting in the vicinity of the surface. However, in either case, the actual influence is small, the original purpose and the intended effect can be satisfied, and these are also included in the scope of the technical idea of the present invention.

One embodiment of the manufacturing method of the pellicle frame 1 described above is as shown in Figs. 6(a) to 6(d), and will be described in detail below.

As shown in FIG. 6(a), the long side and the short side are smaller than the inner size of the desired pellicle frame 1 of the frame of the quadrangular shape, and the desired pellicle frame 1 is prepared. The core material 12 is designed to have a high height and a consideration of the cutting allowance. Then, the elongated prepreg 5 cut at a predetermined length is wound without slack, and the alignment of the carbon fibers 5 coincides with the longitudinal direction of the side of the frame to be formed. The length of such prepreg 5 is at least the length of one circumference of the frame to be formed, and has a width larger than the height of the frame to be formed. At this time, it is preferable that the carbon fibers 15 of the prepreg 5 are parallel to the formed sides. Figure 6 In (a), an arrow P indicates an alignment direction of the carbon fibers 15. Further, in order to make the winding start point 6 of the prepreg 5 beautifully formed on the core material 12, it is preferable to set a step 13 having a height which is the thickness of the prepreg 5, but since the bending radius is smaller, the lamination time is The breakage (fracture) of the carbon fiber occurs more, so the radius is at least 3 mm or more. Further, it is preferable that the corner portion of the core material 12 has a radius close to the shape of the corner portion of the formed pellicle frame 1 .

The prepreg 5 is wound until the outer size of the pellicle frame 1 is added to the extent of the cutting allowance, and the substrate 10 of the pellicle frame shown in Fig. 6(b) is obtained. In this case, when the seam of the prepreg 5 is formed in the middle of lamination, it is preferable to adjust so that the joint is not joined to the next prepreg 5 without a gap. Further, after the prepreg 5 is laminated and heat-cured, the core member 12 is preferably biased outward by a mechanism such as a spring (not shown).

The base material 10 and the core material 12 are housed in a polyethylene bag (not shown), and the internal air is evacuated by vacuum decompression, and then heated while being pressurized (autoclave) to prepreg. The resin immersed in 5 is cured. After cooling, the core material 12 is taken out from the autoclave, and the substrate 10 which is larger than the desired pellicle frame 1 as shown in Fig. 6(c) is obtained. The substrate 10 is subjected to mechanical cutting, polishing, and cutting by a machine tool to be smoothed, and each surface is changed to a predetermined size, and a jig hole as the vent hole 2 and the recessed hole 3 is further processed to obtain a jig hole. (d) The pellicle frame 1 that is practical and has high dimensional accuracy.

In the pellicle frame 1 of the present invention, when the vent hole 2 and the recessed hole 3 are processed, the laminated surface of the prepreg 5 is vertically processed, and the prepreg 5 is peeled and broken during the hole processing. The advantage of small possibilities.

After further cutting, the obtained pellicle frame 1 is washed, and the surface of the resin cover film 9 is covered as necessary, so that the carbon fibers which are broken by the cutting process are not exposed on the surface. The surface of the pellicle frame 1 is covered with a resin cover film 9, which prevents the exposed carbon fibers from being exposed and the surface which is not completely cleaned by washing, so that the carbon fiber and the resin are not used when the pellicle is used. It is further preferable because it is detached to generate dust. Further, it is possible to prevent deterioration of the resin which constitutes the epoxy resin or the like in the prepreg 5 due to the exposed ultraviolet rays, and the strength generated thereby.

The resin cover film 9 for covering the surface of the pellicle frame 1 is not particularly limited, and the prepared pellicle frame 1 is sufficiently washed and dried, and the resin of the resin cover film 9 is formed at an appropriate concentration. The solvent is dissolved in the solvent, and the pigment or carbon black to be added as needed is dispersed in a solvent, and may be applied by a known coating method such as spraying, dipping, or electrodeposition (electrodeposition). These can be optimally selected depending on the type of resin to be used. After the cover film is formed, the entire pellicle frame is heated, and the solvent is completely volatilized and removed, and the low molecular component contained in the cover film can be It is reduced, which is preferred. Heating temperature, preferably as high as possible, but considering pre-dip The heat-resistant temperature of the material 5, the heat-resistant temperature of the cover film resin 9, and the boiling point of the solvent used for coating the film resin 9 are determined.

Further, as another manufacturing method, a method of processing using a tubular base material 10 as shown in Figs. 7(a) to 7(d) can be cited. As shown in Fig. 7(a), the frame having the quadrangular shape has a longer side and a shorter side than the inner size of the desired pellicle frame 1, and is at least higher than the height of the desired pellicle frame 1. The core material 12 is 2 times higher. The long prepreg 5 cut at a predetermined length is wound without slack, and the carbon fiber direction is made to coincide with the longitudinal direction of the side of the frame to be formed. The length of such a prepreg 5 is at least one length of the frame to be formed, and is at least twice or more higher than the height of the frame to be formed, and more preferably five times or more higher. At this time, it is preferred that the carbon fibers of the prepreg 5 are parallel to the side to be formed. In Fig. 6(a), the arrow P is the direction in which the carbon fibers are aligned. Further, in such a case, it is preferable to provide a step 13 having a thickness which is the thickness of the prepreg 5 on the core material 12, and further preferably a mechanism (not shown) having a tension applied to the outside.

The prepreg 5 is wound until it reaches the outer dimension of the pellicle frame 1 plus the cutting allowance, and as described above, heat curing is performed to obtain a tubular base as shown in Fig. 7 (b). Material 10.

With such a tubular base material 10, as shown in Fig. 7(c), in the parallel direction of the side of the pellicle frame 1 to be formed, the grindstone 16 is used for the wheel cutting to obtain the desired dustproof The height of the membrane module frame 1 or A substrate 10a having a height similar thereto. Similarly, the tubular substrate 10 is subjected to wheel cutting, and as shown in Fig. 7 (d), a plurality of substrates 10a, 10b, 10c, ... can be obtained at one time. Although the grinder 16 is exemplified as the grinding method, the present invention is not limited thereto. For example, water jet, diamond cutter, laser cutting, or the like can be used, and the quality of cutting and the adverse effect on the substrate 10 are small. The point of view, water spray is especially preferred. In the same manner as in the above-described FIGS. 6(a) to 6(d), the base materials 10a, 10b, 10c, and the like can be separately subjected to mechanical cutting to form the pellicle frame 1 respectively. This makes it possible to produce a plurality of pellicle frame 1 at a time, which can greatly improve the production efficiency.

A schematic perspective view of the pellicle assembly constructed using the pellicle frame 1 thus produced is shown in FIG. The surface 21 of the prepreg 5 having the resin cover film 9 formed on the end surface of the pellicle frame 1 is interposed on the pellicle film, and the pellicle film 22 is stretched thereon to form the pellicle assembly 20 . The material of the pellicle film 22 is cellulose, a derivative thereof, a fluororesin or the like. A mask adhesive layer 23 is provided on the other end face. Examples of the masking adhesive that forms the masking adhesive layer 23 include an acrylic adhesive, a rubber-based adhesive, a hot-melt adhesive, and an anthrone adhesive. On the surface of such a mask adhesive layer 23, in order to protect the mask adhesive layer 23, the release layer 24 of the release agent layer may be provided on a thin resin film such as PET as necessary. Further, if necessary, the vent hole 2 is provided in the side surface of the pellicle frame 1, whereby the expansion and depression of the pellicle film 22 due to the difference in air pressure between the inside and the outside of the pellicle can be released, and at the same time, It is preferable to provide the filter 25 in order to infiltrate the dust from the outside of the pellicle assembly with ventilation. In order to facilitate handling, a recess 3, a groove, or the like (not shown) may be provided in a necessary place.

With the above configuration, the pellicle assembly 20 does not occur in use while the bending due to the tension of the pellicle film 22 and the bending caused by the treatment are small, and the pellicle assembly 20 having a large exposure area and a low cost is obtained. Danger of dust and high reliability.

[Examples]

The embodiments of the present invention are described in detail below, but the scope of the present invention is not limited by the embodiments.

(Example)

A pellicle frame 1 made of a composite material having the shape shown in Fig. 1 was machined. Such a pellicle frame 1 has a shape in which the outer dimensions of the corner portions are 904.5 mm × 750 mm, the inner dimensions are 896.5 mm × 742 mm, and the thickness is 5.8 mm, and the shape of each corner portion is the inner side R2 and the outer side. R6. Further, a processing recess (2.5 mm in diameter and 2 mm in depth) 3 was formed at intervals of 860 mm on the long side, and the same processing recess 3 was formed in the short side at intervals of 730 mm. Further, vent holes 2 having a diameter of 1.5 mm (four on each side) were provided in the vicinity of the central portions of the two long sides.

The manufacturing steps of the specific formation of such a pellicle frame 1 are as follows. The composite material used herein is a sheet-shaped prepreg 5 of an epoxy resin immersed in a directional carbon fiber (trade name; E8025C-25N Japan Graphite Fiber Co., Ltd.) system). Such a prepreg 5 is cut by a length of 200 mm, and as shown in Fig. 7 (a) to Fig. 7 (c), the core material 12 is wound and laminated in a fiber direction parallel to each side, and heat-cured to obtain A tubular substrate 10 having an outer dimension of about 906.5 mm by 752 mm, an inner dimension of 894.5 mm by 740 mm, and a height of about 200 mm. From the substrate 10 as described above, the substrates 10a, 10b, 10c, ... having a height of 6.5 mm were produced by water jet processing. Then, the substrate 10a, 10b, 10c, ... are processed into a pellicle frame 1 having the above size by a processor.

Then, the pellicle frame 1 is washed with a surfactant and pure water, heated and dried at 80 ° C for 3 hours, and then coated with a resin to form a resin cover film 9. The fluororesin (trade name; CYTOP CT X 109A Asahi Glass Co., Ltd.) was dissolved in a fluorine-based solvent (trade name; NOVEC 7300, manufactured by Sumitomo 3M Co., Ltd.), and carbon black (trade name; HCF 2650, manufactured by Mitsubishi Chemical Corporation) was dispersed. The solution was sprayed four times with a spray method. Thereafter, the oven was heated at 130 ° C to completely remove the solvent. The film thickness of the resin coating film 9 of the fluororesin is about 30 μm.

Finally, the size is checked, and the outer and inner dimensions are in the range of +0/-0.3 mm for the specified size. In addition, the right angle is based on the long side, and the virtual line drawn at 90 degrees has a misalignment of 0.5 mm.

The pellicle frame 1 was placed in a clean room, washed with a surfactant and pure water, dried, and then irradiated with a 400,000-liter halogen lamp in a dark room to perform an appearance inspection. As a result, there is no exposed area of the composite material. In addition, also There are no flashes of the surface, defects such as coating spots, and peeling of the resin cover film 9 due to washing.

Next, the pellicle film assembly 20 shown in Fig. 8 is produced by using the pellicle frame 1 as described above. The affixing surface 21 of one end surface of the pellicle frame 1 is adhered to the crepe ketone as a pellicle adhesive layer by an air pressure type dispenser, and the fluorene ketone as the mask adhesive layer 23 is adhered to the other end surface. The agent (trade name: KR3700, manufactured by Shin-Etsu Chemical Co., Ltd.) was applied and heated and cured. Then, the PET film having a thickness of 125 μm which is applied to the surface of the release agent is attached to the mask adhesive layer protective release film 24 which is cut in substantially the same shape as the pellicle frame 1 and further attached. A PTFE filter 25 having a vent hole 2 of 3.6 mm × 9.5 mm and a thickness of 0.35 mm.

In addition to the pellicle frame 1, a fluorine-based polymer (trade name: CYTOP, manufactured by Asahi Glass Co., Ltd.) was formed by a slit coating method on a rectangular quartz substrate of 1200 mm × 850 mm × thickness 10 mm, and the solvent was dried. Thereafter, the aluminum alloy temporary frame having the same shape as the outer shape of the substrate was subjected to adhesion and peeling to obtain a pellicle film 22 having a thickness of about 3 μm. Such a pellicle film 22 is placed on the attachment surface 21 of one end surface of the pellicle frame 1 as described above after the pellicle is adhered to the subsequent layer, and unnecessary dust is prevented from the periphery of the pellicle frame 1. The film 22 is cut off with a knife to obtain a pellicle film assembly 20.

Then, such a pellicle film assembly 20 is placed on the measuring disk, and the amount of bending of each side of the pellicle frame 1 is measured. As a result, the center of the long side The inward bending amount of the portion is 1.0 mm on one side, and the inward bending amount in the central portion of the short side is 0.6 mm on one side.

(Comparative example)

A pellicle frame of the same size and shape as that of the first embodiment was machined by machining. In this case, a prepreg (trade name: DIALEAD HMFJ3113/948A1, manufactured by Mitsubishi Plastics Co., Ltd.) impregnated with a sheet of a carbon fiber woven fabric is impregnated with a resin, and heat-cured to obtain 910 mm × 760. Mm x plate with a thickness of about 6 mm. From such a sheet material, it was machined by a processing machine to obtain a pellicle frame having the above dimensions, and surface resin coating was carried out by the same procedure as in Example 1.

Next, using such a pellicle frame, the pellicle assembly shown in Fig. 8 was produced in exactly the same manner as in Example 1, and the finished pellicle was placed on the measuring disc, and the amount of bending on each side of the pellicle frame was performed. Take measurements. As a result, the amount of bending inward of the central portion of the long side was 2.3 mm on one side, and the amount of bending inward of the central portion of the short side was 1.9 mm on one side. In addition, the cost is about 9 times that of the embodiment.

(Comparative Example 2)

A pellicle frame having the same size and shape as that of the above-described embodiment was machined by an aluminum alloy A5052, and the surface was treated with a black alumina film. Then, the pellicle assembly is fabricated using such a pellicle frame, and only the pellicle assembly is vertically erected, and the long side and the short side are 20 mm before. The back bend, even the shape of the rectangle is difficult to guarantee. Therefore, this object is completely unusable as a pellicle frame.

[Industrial availability]

According to the pellicle frame of the present invention, the rigidity is greatly improved, and a large-area exposure field can be secured. Therefore, it is suitably used as a pellicle film in a manufacturing process of a semiconductor, an IC package, a printed circuit board, a liquid crystal, and an organic EL display device.

1‧‧‧Plastic membrane assembly frame

2‧‧‧vents

3‧‧‧ recessed hole

4‧‧ ‧ step

5‧‧‧Prepreg

Claims (9)

A dustproof film assembly frame which is a polygonal frame which is tightly covered by a dustproof film, characterized in that a carbon fiber is impregnated with a resin-impregnated composite material in a longitudinal direction of each side of the frame, along the polygon The winding is laminated to cure the resin to be integrated. The pellicle frame according to claim 1, wherein the composite material is a continuous single material wound laminate or a plurality of materials laminated at least for one week. The pellicle frame according to claim 1 or 2, wherein the composite material is a sheet in which a plurality of the carbon fibers to be aligned are impregnated with the resin. The pellicle frame according to claim 1, wherein the surface of the frame is smoothed by grinding and/or cutting. The pellicle frame according to claim 1, wherein the surface of the frame is covered with a resin cover film. A method of manufacturing a pellicle frame according to the present invention, comprising: a substrate forming step of: having a height of a frame having a polygonal shape smaller than a desired inner dimension, having a height higher than a desired height of the frame a large width and at least a length of one circumference of the frame, and a sheet-like composite material of resin-impregnated carbon fibers aligned in the longitudinal direction is entangled to perform desired ratio of the frame The outer dimensions are further laminated, and the resin is heat-cured and used as a substrate; The frame forming step: cutting the substrate to form a frame having a desired inner dimension, outer dimension, and height. The method for manufacturing a pellicle frame according to claim 6, which has the substrate forming step of having a ratio of a core material having a smaller inner dimension than the frame. a sheet-like composite material of resin-impregnated carbon fibers aligned in the longitudinal direction at least twice the width of the desired height of the frame and at least one of the lengths of the frame, The obtained laminate having a larger outer dimension than the frame is heated to cure the resin, and then the cutting process is performed in a direction parallel to the side of the frame to obtain a plurality of the substrates. The method for producing a pellicle frame according to claim 6 or 7, further comprising the frame forming step of forming a resin coating film on a surface of the frame. A pellicle is attached to the pellicle frame of any one of the first to fifth aspects of the invention, wherein the pellicle is stretched and attached.