TWI452164B - Crucible and vacuum evaporating system - Google Patents

Description

坩埚 and vacuum evaporation system

The present invention relates to a crucible and a vacuum evaporation system using the crucible.

Vacuum evaporation is a method in which a raw material of a film to be formed in a crucible is heated in a vacuum chamber, and atoms or molecules are vaporized from the surface to form a vapor stream, which is incident on the surface of the substrate to be coated and condensed to form a solid film.

In the process of electron gun evaporation and Ion Assistance Deposition (IAD), the film is ejected by an electron gun to evaporate onto the substrate to be coated. The film material placed in the crucible can be divided into a block shape and a granular shape, and the block film material is expensive relative to the granular film material, and is limited by the shape of the crucible, and the shape of the block film material must be redesigned, thereby Increased production costs. In order to save cost, the granular film material is often used in the production process, but due to the gap between the particles of the film material and the pores between the crystals of the particles, a certain amount of water gas remains in the film material, and the water gas will cause subsequent The ejected area of the coating is uneven, which affects the surface quality of the film.

In view of the above, it is necessary to provide a crucible for drying a granular film material and a vacuum evaporation system using the crucible.

a crucible for placing a granular film material; the crucible comprises a bottom plate, a side wall and a plurality of ventilation ducts; the bottom plate is provided with a loading zone for carrying the granular film material; the side wall is vertically fixed Forming an accommodating space with the bottom plate, the side wall is provided with a plurality of vents; each of the ventilation ducts includes an air inlet end and an air outlet end; and the plurality of ventilation ducts are accommodated in the receiving In the space, the inlet end is fixed on the side wall and communicates with the vent on the side wall, and the outlet end is distributed toward the bottom plate and distributed around the loading area.

A vacuum evaporation system, comprising: an evaporation chamber, a base, a stack and a hot air source; the base is disposed in the evaporation chamber; the crucible is disposed on the base for placing the granular film material; The hot air source is located under the base, and the hot air source is in communication with the crucible; the crucible comprises a bottom plate, a side wall and a plurality of ventilation ducts; the bottom plate is provided with a loading area for carrying the granular film material; Vertically fixed on the edge of the bottom plate and forming an accommodating space with the bottom plate, the side wall is provided with a plurality of vents; each of the ventilation ducts includes an air inlet end and an air outlet end; and the plurality of ventilation ducts are accommodated The accommodating space is fixed on the side wall and communicates with the vent on the side wall, and the air outlet end is distributed toward the bottom plate and distributed around the loading area.

Compared with the prior art, the crucible and the vacuum evaporation system provided by the invention heat the granular film material placed in the loading zone through the ventilation duct to remove the moisture contained in the film material, thereby effectively ensuring the coating quality. .

The backlight module fixing jig of the present technical solution will be further described in detail below with reference to the accompanying drawings and embodiments.

As shown in FIG. 1 , a crucible 10 provided for an embodiment of the present invention is used for placing a granular film material; and it is made of a high temperature heat resistant metal material such as tungsten, molybdenum or niobium. The crucible 10 is integrally formed.

The crucible 10 includes a bottom plate 11, a side wall 12, and a plurality of ventilation ducts 13. The bottom plate 11 has a circular structure, and a loading area 111 is disposed on the bottom plate 11 at a position close to the center for carrying the granular film material. The side wall 12 is vertically extended from the edge of the bottom plate 11 and forms a half-closed accommodating space 14 with the bottom plate 11. The side walls 12 are evenly spaced apart to provide a plurality of circular vents 121. Each of the ventilation ducts 13 includes an air inlet end 131 and an air outlet end 132. The plurality of air ducts 13 are received in the accommodating space 14, and the air inlet end 131 of each air duct 13 is fixed to the side wall 12. It is connected to the vent 121 on the side wall 12. The outlet end 132 of the plurality of ventilation ducts 13 faces the bottom plate 11 and is distributed around the loading zone 111. The ventilation duct 13 and the bottom plate 11 form an acute angle toward the side wall 12.

In this embodiment, the crucible 10 includes five ventilation ducts 13 , and the side walls 12 are provided with five ventilation openings 121 corresponding to the ventilation ducts 13 . The outlet ends 132 of the five ventilation ducts 13 are adjacent to each other to surround the loading zone 111.

As shown in FIG. 2, the present invention also provides a vacuum evaporation system 100 using the crucible 10, the vacuum evaporation system 100 further includes an evaporation chamber 20, a base 30, and a hot air source 40; 30 is disposed in the vapor deposition chamber 20; the crucible 10 is disposed on the base 30; the hot air source 40 is located below the base 30, and the hot air source 40 is in communication with the ventilation duct 13 of the crucible 10.

Before the start of the coating, the user places the granular film material into the loading zone 111 and then opens the hot air source 40. The hot air generated by the hot air source 40 is introduced into the loading zone 111 of the crucible 10 through the ventilation duct 13, and the hot air is baked in the gap between the particles and the crystal of the particles by baking the granular film material. The water vapor in the pores evaporates away.

In the coating process, under the action of the bombardment of the electron gun, the portion of the granular film material in the loading zone 111 becomes a molten state, and the granular film material is maintained due to a certain inclination angle between the ventilation duct 13 and the bottom plate 11. And the molten film material does not enter the ventilation duct 13, and the effect of the residual film on the next coating is prevented.

The crucible and vacuum evaporation system provided by the embodiment of the invention heats the granular film material placed in the loading zone through the ventilation duct to remove the moisture contained in the film material, thereby effectively ensuring the coating quality.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

10‧‧‧坩埚
11‧‧‧floor
12‧‧‧ side wall
13‧‧‧ ventilation duct
14‧‧‧ accommodating space
111‧‧‧Loading area
131‧‧‧ intake end
132‧‧‧Exhaust end
121‧‧‧ vents
20‧‧‧vapor plating chamber
30‧‧‧Base
40‧‧‧hot air source

FIG. 1 is a schematic perspective view of a crucible provided by an embodiment of the present invention.

Figure 2 is a cross-sectional view of a vacuum evaporation system using the crucible provided in Figure 1.

10‧‧‧坩埚

11‧‧‧floor

12‧‧‧ side wall

13‧‧‧ ventilation duct

14‧‧‧ accommodating space

111‧‧‧Loading area

131‧‧‧ intake end

132‧‧‧Exhaust end

121‧‧‧ vents

Claims (8)

a crucible for placing a granular film material; the improvement is that the crucible comprises a bottom plate, a side wall and a plurality of ventilation ducts; the bottom plate is provided with a loading zone for carrying the granular film material; Vertically fixed on the edge of the bottom plate and forming an accommodating space with the bottom plate, the side wall is provided with a plurality of vents; each of the ventilation ducts includes an air inlet end and an air outlet end; and the plurality of ventilation ducts are accommodated The accommodating space is fixed on the side wall and communicates with the vent on the side wall, and the air outlet end is distributed toward the bottom plate and distributed around the loading area. The invention as claimed in claim 1, wherein: the outlet ends of the plurality of ventilation ducts are adjacent to each other to surround the loading zone. The invention as claimed in claim 1, wherein the bottom plate has a circular structure. The invention as claimed in claim 1, wherein the plurality of vents are evenly spaced apart from the side wall. As described in claim 1, wherein the crucible is integrally formed. As described in claim 1, wherein the crucible is made of a high temperature heat resistant metal material. The invention as claimed in claim 6, wherein the high temperature heat resistant metal material is one of tungsten, molybdenum or tantalum. A vacuum evaporation system, comprising: an evaporation chamber, a base, a stack and a hot air source; the base is disposed in the evaporation chamber; the crucible is disposed on the base for placing the granular film material; The hot air source is located under the base, and the hot air source is connected to the crucible; the improvement is that the crucible comprises a bottom plate, a side wall and a plurality of ventilation ducts; and the bottom plate is provided with a loading area for carrying the granular film material The side wall is vertically fixed to the edge of the bottom plate, and forms an accommodating space with the bottom plate. The side wall is provided with a plurality of vents; each of the ventilation ducts includes an air inlet end and an air outlet end; The duct is received in the accommodating space, and the air inlet end is fixed on the side wall and communicates with the vent on the side wall, and the air outlet end is distributed toward the bottom plate and distributed around the loading area.