TWI443482B - System and method for correcting for pressure variations using a motor, computer readable medium - Google Patents

Description

System and method for correcting pressure changes using a motor, and computer readable media

The present invention generally relates to fluid pumps. More specifically, embodiments of the invention relate to multi-stage pumps. Even more specifically, embodiments of the present invention relate to corrections to pressure changes caused by actuation of components in a pump for semiconductor manufacturing.

There are many applications where precise control of the amount and/or rate of fluid dispensed to the pump device is necessary. For example, in semiconductor processing, it is important to control the amount and rate at which a photochemical such as a photoresist chemical is applied to a semiconductor wafer. Coatings applied to semiconductor wafers during processing typically require flatness on the entire surface of the wafer measured in angstroms. The rate at which the treatment chemicals are applied to the wafer must be controlled to ensure uniform application of the treatment liquid.

Today, many of the photochemicals used in the semiconductor industry are very expensive and typically cost as much as $1000 per liter. Therefore, it is preferred to ensure the use of a minimum but sufficient amount of chemicals and to ensure that the chemicals are not damaged by the pumping device. Current multistage pumps can cause sharp pressure spikes in the liquid. For example, negative pressure spikes can promote outgassing and bubble formation in chemicals, which can lead to defects in wafer coating. Similarly, positive pressure spikes can lead to premature polymer cross-linking, which can also lead to coating defects.

It can be seen that such pressure spikes and subsequent pressure drops can damage the fluid (i.e., can adversely alter the physical properties of the fluid). Additionally, pressure spikes can cause accumulated fluid pressure, which can result in the dispensing pump dispensing more fluid than desired or dispensing the fluid in a manner that is unfavorable.

More specifically, when a valve is closed to create a trap space in the pump unit, the closing of the valve can cause an increase in pressure in the enclosed space. This pressure increase may be particularly detrimental when this pressure increase occurs in the dispensing chamber containing the fluid to be dispensed. Therefore, there is a need for a way to compensate for the increase in pressure due to movement of the valve within the pump device.

The present invention relates to systems and methods for compensating for pressure build-up (or reduction) that can occur in various enclosed spaces of a pumping device. Embodiments of the present invention may compensate for an increase (or decrease) in the chamber of the pump device by adjusting the volume of the chamber by moving the pump member of the pump device to compensate for an increase (or decrease) in pressure in the chamber. More specifically, in one embodiment, to address an undesired increase in pressure to the fluid in the dispensing chamber, the dispensing motor can be reversed to retract the piston to compensate for any pressure increase in the dispensing chamber.

Embodiments of the present invention provide systems and methods for correcting pressure fluctuations that substantially eliminate or reduce the disadvantages of previously developed pump systems and methods. More specifically, embodiments of the present invention provide a system for correcting pressure fluctuations caused by actuation of various mechanisms or components within a dispensing chamber that are internal to a multi-stage pump or a multi-stage pump. And methods.

Prior to the beginning of the dispensing section, an embodiment of the present invention can correct for pressure changes in the dispensing chamber caused by the closure of a purge valve. This correction is achieved by reversing a dispensing motor such that the volume of the dispensing chamber substantially increases the retention volume of the purge valve.

Prior to the dispensing section, another embodiment of the present invention ensures that the final motion of the dispensing motor is forward by reversing the dispensing motor by an additional distance and moving the dispensing motor forward by an amount equal to the additional distance. up.

Embodiments of the present invention may provide the technical advantage of allowing the desired baseline pressure for dispensing to be achieved in the dispensing chamber prior to the dispensing section.

Other embodiments of the present invention can provide the ability to compensate for differences in equipment used in conjunction with multi-stage pumps, such as differential pressures of delivery between systems.

Certain embodiments of the present invention provide an advantage by addressing any backlash that can occur in a drive assembly of a mating motor such that the backlash has a negligible effect on the dispense.

These and other aspects of the present invention will be better understood and understood from the <RTIgt; The following description is presented by way of illustration and not limitation Many alternatives, modifications, additions or re-configurations are possible within the scope of the invention, and the invention includes all such substitutions, modifications, additions or re-configurations.

The preferred embodiments of the present invention are illustrated in the drawings, and like numerals are used to refer to the

Embodiments of the present invention relate to a pump system that uses a pump to accurately dispense fluid, which may be a single stage pump or a multi-stage pump. More specifically, embodiments of the present invention compensate for the increase (or decrease) in pressure that can occur in various enclosed spaces of the pump device. Embodiments of the present invention can compensate for pressure changes in the chamber of the pump device by moving the pump member of the pump device to adjust the volume of the chamber to compensate for pressure changes. More specifically, in one embodiment, to address an undesired increase in pressure to the fluid in the dispensing chamber, the dispensing motor can be reversed to retract the piston to compensate for any pressure increase in the dispensing chamber. An example of such a pump system is disclosed in the inventors by James Cedrone, George Gonnella, and Iraj Gashgaee on December 5, 2005, entitled "System And Method For Multi-Stage Pump". U.S. Provisional Patent Application Serial No. 60/742,435, the disclosure of which is incorporated herein by reference.

FIG. 1 is an illustration of one such embodiment of a pump system 10. The pump system 10 can include a fluid source 15, a pump controller 20, and a multi-stage pump 100 that cooperate to dispense fluid onto a wafer 25. The operation of the multi-stage pump 100 can be controlled by a pump controller 20 that can be self-contained on the multi-stage pump 100 or via one or more communication links for communicating control signals, data or other information. Connected to the multistage pump 100. Additionally, the functionality of the pump controller 20 can be distributed between an on-board controller and another controller. The pump controller 20 can include a computer readable medium 27 (eg, RAM, ROM, flash memory, compact disc, disk drive, or other computer) containing a set of control commands 30 for controlling the operation of the multi-stage pump 100. Read the media). A processor 35 (eg, a CPU, ASIC, RISC, DSP, or other processor) can execute the instructions. An example of a processor is the Texas Instruments TMS320F2812PGFA 16-bit DSP (Texas Instruments is a manufacturing facility in Dallas, TX). In the embodiment of FIG. 1, controller 20 is in communication with multi-stage pump 100 via communication links 40 and 45. Communication links 40 and 45 can be networks (e.g., Ethernet, wireless networks, global area networks, DeviceNet networks, or other networks known or developed in the art), bus bars (e.g., SCSI sink Row) or other communication link. Controller 20 can be constructed as a self-contained PCB board, remote controller, or otherwise constructed. Pump controller 20 may include an appropriate interface (eg, a network interface, an I/O interface, an analog to digital converter, and other components) established for the controller to communicate with multi-stage pump 100. Additionally, pump controller 20 may include various computer components known in the art, including processors, memory, interfaces, display devices, peripheral devices, or other computer components not shown for the sake of brevity. The pump controller 20 can control various valves and motors in the multi-stage pump to enable the multi-stage pump to accurately dispense fluids, including low viscosity fluids (i.e., less than 100 centipoise) or other fluids. U.S. Patent Application Serial No. entitled "I/O Interface System and Method for a Pump", filed on Dec. 2, 2005 by Cedrone et al., which is incorporated herein by reference. I of U.S. Patent Application Serial No. 11/602,449 [ENTG1810-1], entitled "I/O Systems, Methods and Devices for Interfacing a Pump Controller", filed on Nov. 20, 2006. The /O interface connector connects the pump controller 20 to various interfaces and manufacturing tools.

2 is an illustration of a multi-stage pump 100. The multi-stage pump 100 includes a feed stage portion 105 and an independent dispense stage portion 110. From the viewpoint of fluid flow, between the feed stage portion 105 and the dispense stage portion 110 is a filter 120 for filtering impurities from the treatment fluid. A number of valves control the flow of fluid through the multi-stage pump 100, including, for example, the inlet valve 125, the isolation valve 130, the barrier valve 135, the purge valve 140, the discharge valve 145, and the outlet valve 147. The dispensing stage portion 110 can further include a pressure sensor 112 that determines the pressure of the fluid at the dispensing stage 110. As described below, the pressure determined by the pressure sensor 112 can be Used to control the speed of various pumps. Example pressure sensors include ceramic and polymer piezoresistive and capacitive pressure sensors, including pressure sensors manufactured by Metallux AG of Korb, Germany. According to an embodiment, the surface of the pressure sensor 112 that contacts the treatment fluid is a perfluoropolymer. Pump 100 may include an additional pressure sensor, such as a pressure sensor to read the pressure fed into chamber 155.

Feed stage 105 and dispensing stage 110 can include a rolling diaphragm pump to pump fluid in multi-stage pump 110. The feed stage pump 150 ("feed pump 150") includes, for example, a feed chamber 155 for collecting fluid, a feed stage diaphragm 160 for moving within the feed chamber 155 and displacing fluid. One for moving the piston 165 fed into the stage diaphragm 160, a lead screw 170 and a stepping motor 175. The lead screw 170 is coupled to the stepper motor 175 via a nut, gear or other mechanism for imparting energy from the motor to the lead screw 170. According to an embodiment, the feed motor 175 rotates a nut which in turn rotates the lead screw 170 to actuate the piston 165. The dispensing stage pump 180 ("dispensing pump 180") can similarly include a dispensing chamber 185, a dispensing stage diaphragm 190, a piston 192, a lead screw 195, and a dispensing motor 200. The dosing motor 200 can drive the lead screw 195 via a threaded nut (eg, a Torlon or other material nut).

According to other embodiments, the feed stage 105 and the dispense stage 110 can be various other pumps including pneumatic or hydraulically actuated pumps, hydraulic pumps, or other pumps. An example of a multi-stage pump that uses a pneumatically actuated pump for a feed stage and a stepper motor to drive a hydraulic pump is described in U.S. Patent Application Serial No. 11/051,576. However, the use of a motor at two stages provides the advantage of eliminating hydraulic lines, control systems, and fluids, thereby reducing space and potential leakage.

Feed motor 175 and dispense motor 200 can be any suitable motor. According to an embodiment, the dispensing motor 200 is a permanent magnet synchronous motor ("PMSM"). The PMSM can be self-contained in the multi-stage pump 100 by using field oriented control ("FOC") at the motor 200 or other type of position/speed controlled digital signal processor ("DSP") known in the art. The upper controller or independent pump controller (eg, as shown in Figure 1) is controlled. The PMSM 200 can further include an encoder (e.g., a fine line rotational position encoder) for dispensing the instantaneous feedback of the position of the motor 200. The use of a position sensor gives accurate and repeatable control of the position of the piston 192, which results in accurate and repeatable control of fluid movement in the dispensing chamber 185. For example, by using a 2000 line encoder that provides 8000 pulses to the DSP in accordance with an embodiment, it is possible to accurately measure the 0.045 degree rotation and control at 0.045 degrees of rotation. In addition, the PMSM can operate at low speed with little or no vibration. The feed motor 175 can also be a PMSM or a stepper motor. It should also be noted that the feed pump can include a local sensor to indicate when the feed pump is in its home position.

FIG. 3A is an illustration of one embodiment of a pump assembly for a multi-stage pump 100. The multi-stage pump 100 can include a dispensing block 205 that defines various fluid flow paths through the multi-stage pump 100 and at least partially defines the feed chamber 155 and the dispensing chamber 185. According to an embodiment, the dispense pump block 205 can be an integral block of PTFE, modified PTFE, or other material. Because these materials do not react with many treatment fluids or react minimally with many treatment fluids, the use of such materials allows the flow path and pump chamber to be directly processed into the dispensing zone with a minimum amount of additional hardware. In block 205. The dispensing block 205 thus reduces the need for piping by providing an integrated fluid manifold.

The dispensing block 205 can include various external inlets and outlets, including, for example, an inlet 210 for containing fluid, a discharge outlet 215 for discharging fluid during the discharge section, and for dispensing fluid during the dispensing section. The outlet 220 is dispensed. In the example of FIG. 3A, since the purge fluid is directed back to the feed chamber (as shown in Figures 4A and 4B), the dispense block 205 does not include an external purge outlet. However, in other embodiments of the invention, the fluid can be purified externally. U.S. Provisional Patent Application Serial No. 60/741,667, entitled "O-Ring-Less Low Profile Fitting and Assembly Thereof", filed on December 2, 2005 by Iraj Gashgaee, incorporated herein by reference. Embodiments that can be used to connect the outer inlet and outlet of the dispensing block 205 to the fluid line.

The dispensing block 205 directs fluid to the feed pump, the dispense pump, and the filter 120. A pump cover 225 protects the feed motor 175 and the dispense motor 200 from damage, while the piston housing 227 provides protection for the piston 165 and the piston 192, and the piston housing 227 may be polyethylene or other in accordance with an embodiment of the present invention. The polymer is formed. Valve plate 230 is provided for a valve system (eg, inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140, and discharge valve 145 of FIG. 2) that can be configured to direct fluid flow to various components of multi-stage pump 100. A valve housing. According to an embodiment, each of the inlet valve 125, the isolation valve 130, the barrier valve 135, the purge valve 140, and the discharge valve 145 is at least partially integrated into the valve plate 230 and is applied to the pressure or vacuum at a point A diaphragm valve that opens or closes with the corresponding diaphragm. In other embodiments, some of the valves may be external to the dispensing block 205 or disposed in an additional valve plate. According to an embodiment, the PTFE sheet is sandwiched between the valve plate 230 and the dispensing block 205 to form a diaphragm for the various valves. Valve plate 230 includes a valve control inlet for each valve to apply pressure or vacuum to the respective diaphragm. For example, the inlet 235 corresponds to the barrier valve 135, the inlet 240 corresponds to the purge valve 140, the inlet 245 corresponds to the isolation valve 130, the inlet 250 corresponds to the discharge valve 145, and the inlet 255 corresponds to the inlet valve 125 (in this case The outlet valve 147 is external). The respective valves are opened and closed by selectively applying pressure or vacuum to the inlets.

The valve control gas and vacuum are provided to the valve plate 230 via the valve control supply line 260, which controls the manifold from a valve (via the top cover 263 or the housing cover 225) via the dispensing block 205 In the region) extends to the valve plate 230. The valve control gas supply inlet 265 provides a pressurized gas to the valve control manifold and the vacuum inlet 270 provides a vacuum (or low pressure) to the valve control manifold. The valve control manifold acts as a three-way valve to direct pressurized gas or vacuum to the appropriate inlet of valve plate 230 via supply line 260 to actuate the respective valve. In an embodiment, U.S. Patent Application Serial No. 11 entitled "Fixed Volume Valve System", filed on November 20, 2006, by Gashgaee et al. The valve plate of the valve plate of /602,457 [ENTG1770-1] reduces the retention volume of the valve, eliminates volume fluctuations due to vacuum fluctuations, reduces vacuum requirements, and reduces stress on the valve diaphragm.

FIG. 3B is an illustration of another embodiment of a multi-stage pump 100. Many of the features shown in Figure 3B are similar to those described above in connection with Figure 3A. However, the embodiment of FIG. 3B includes several features to prevent fluid dripping into the area of the multi-stage pump 100 that houses the electronics. For example, dripping can occur when an operator connects or disconnects a conduit from inlet 210, outlet 215, or vent 220. The "anti-drip" feature is designed to prevent drops of potentially harmful chemicals from entering the pump (especially the electronics chamber) and it does not necessarily require the pump to be "water resistant" (eg, immersible in the fluid without leakage). According to other embodiments, the pump can be completely sealed.

According to an embodiment, the dispensing block 205 can include a vertically projecting flange or lip 272 that projects outwardly from the edge of the dispensing block 205 that engages the top cover 263. According to an embodiment, the top of the top cover 263 is flush with the top surface of the lip 272 on the top edge. This causes the drip near the top interface of the dispensing block 205 and the top cover 263 to tend to flow over the dispensing block 205 rather than through the interface. However, on the side, the top cover 263 is flush with the base of the lip 272 or otherwise offset inwardly from the outer surface of the lip 272. This causes the drip to flow down the corner established by the top cover 263 and the lip 272 rather than between the top cover 263 and the dispensing block 205. In addition, a rubber seal is placed between the top edge of the top cover 263 and the backing plate 271 to prevent the dripping from leaking between the top cover 263 and the backing plate 271.

The dispensing block 205 can also include a sloped feature 273 that includes an angled surface defined within the dispensing block 205 that slopes downwardly and away from the area of the pump 100 that houses the electronics. Thus, the drip near the top of the dispensing block 205 is directed away from the electronics. Additionally, the pump cover 225 may also be slightly offset inwardly from the outer edge of the dispensing block 205 such that dripping from the side of the pump 100 will tend to flow through the interface between the pump cover 225 and other portions of the pump 100.

In accordance with an embodiment of the present invention, where a metal cover establishes an interface with the dispensing block 205, the vertical surface of the metal cover may be slightly offset inward from the corresponding vertical surface of the dispensing block 205 (eg, 1/64) Miles or 0.396875 mm). Additionally, the multi-stage pump 100 can include seals, tilting features, and other features to prevent dripping into the portion of the multi-stage pump 100 that houses the electronics. Additionally, as shown in FIG. 4A discussed below, the backing plate 271 can include features to further "drip-proof" the multi-stage pump 100.

4A is an illustration of one embodiment of a multi-stage pump 100 in which the dispensing block 205 is made transparent to show the fluid flow path defined therein. The dispensing block 205 defines various chambers and fluid flow paths of the multi-stage pump 100. According to an embodiment, the feed chamber 155 and the dispensing chamber 185 can be processed directly into the dispensing block 205. Additionally, various flow paths can be machined into the dispensing block 205. Fluid flow passage 275 (shown in Figure 5C) extends from inlet 210 to the inlet valve. Fluid flow passage 280 extends from the inlet valve to feed chamber 155 to complete the path from inlet 210 to feed pump 150. An inlet valve 125 in the valve housing 230 regulates the flow between the inlet 210 and the feed pump 150. Flow passage 285 directs fluid from feed pump 150 to isolation valve 130 in valve plate 230. The output of the isolation valve 130 is directed to the filter 120 by another flow path (not shown). Fluid flows from the filter 120 through a flow path connecting the filter 120 to the discharge valve 145 and the barrier valve 135. The output of the discharge valve 145 is directed to the discharge outlet 215, and the output of the barrier valve 135 is directed to the dispense pump 180 via the flow passage 290. During the dispensing section, the dispensing pump can output fluid to the outlet 220 via the flow passage 295, or in the purge section, the dispensing pump can output fluid to the purge valve via the flow passage 300. Fluid may be returned to feed pump 150 via flow passage 305 during the purge section. Because the fluid flow path can be formed directly into the PTFE (or other material) block, the dispense block 205 can act as a conduit for the process fluid between the various components of the multi-stage pump 100, thereby avoiding or reducing additional conduit Need. In other cases, tubing can be inserted into the dispensing block 205 to define the fluid flow channels. In accordance with an embodiment, FIG. 4B provides an illustration of a dispensing block 205 in which the dispensing block 205 is made transparent to show several of the flow paths therein.

Returning to FIG. 4A, FIG. 4A also shows a multi-stage pump 100 in which the pump cover 225 and the top cover 263 are removed to show the feed pump 150 (including the feed stage motor 190), the dispense pump 180 (including the dispense motor 200). And valve control manifold 302. According to an embodiment of the present invention, the feed pump 150, the dispensing pump 180, and the valve plate 230 can be fed by using a bar (e.g., a metal bar) inserted into a corresponding cavity in the dispensing block 205. Portions are coupled to the dispensing block 205. Each of the rods may include one or more threaded holes to receive a screw. As an example, the dispensing motor 200 can be dispensed via one or more screws (eg, screw 275 and screw 280) that are screwed into corresponding holes in the bar 285 by screw holes in the dispensing block 205. The piston housing 227 is mounted to the dispensing block 205. It should be noted that this mechanism for coupling the assembly to the dispensing block 205 is provided as an example, and any suitable attachment mechanism can be used.

In accordance with an embodiment of the present invention, the backing plate 271 can include a top cover 263 and an inwardly extending projection (e.g., bracket 274) to which the pump cover 225 is mounted. Since the top cover 263 and the pump cover 225 overlap with the bracket 274 (for example, at the bottom edge and the back edge of the top cover 263 and the top edge and the back edge of the pump cover 225), the drip is prevented from flowing to the bottom of the top cover 263. Any space between the edge and the top edge of the pump cover 225 or in the electronics area at the back edge of the top cover 263 and the pump cover 225.

According to an embodiment of the invention, manifold 302 may include a set of solenoid valves to selectively direct pressure/vacuum to valve plate 230. The solenoid will generate heat when a particular solenoid is turned on to thereby direct vacuum or pressure to the valve. According to an embodiment, the manifold 302 is mounted below a PCB board (which is mounted to the backing plate 27l and better shown in Figure 4C), away from the dispensing block 205 and particularly away from the dispensing chamber 185. The manifold 302 can be mounted to a bracket that is in turn mounted to the backing plate 271 or otherwise coupled to the backing plate 271. This helps prevent heat from the solenoids in the manifold 302 from affecting the fluid in the dispensing block 205. The backing plate 271 can be made of stainless steel, machined aluminum, or other materials that dissipate heat from the manifold 302 and the PCB. In other words, the backing plate 271 can function as a heat dissipation bracket for the manifold 302 and the PCB. The pump 100 can be further mounted to a surface or other structure to which heat can be conducted by the backing plate 271. Thus, the backing plate 271 and the structure to which it is attached serve as a heat sink for the manifold 302 and the electronics of the pump 100.

4C is a diagram showing a multi-stage pump 100 for providing pressure or vacuum to a supply line 260 of a valve plate 230. As discussed in connection with FIG. 3, the valves in valve plate 230 can be configured to allow fluid to flow to various components of multi-stage pump 100. Actuation of the valve is controlled by directing pressure or vacuum to the valve control manifold 302 of each supply line 260. Each supply line 260 can include a joint having an aperture (an example joint is indicated at 318). The aperture may have a diameter that is less than the diameter of the corresponding supply line 260 to which the joint 318 is attached. In one embodiment, the diameter of the aperture can be approximately 0.010 inches. Thus, the aperture of the joint 318 can be used to create a limit on the supply line 260. The holes in each supply line 260 help to mitigate the effects of a sharp pressure differential between pressure and vacuum to the application of the supply line, and thus smooth the transition between pressure and vacuum to valve application. In other words, the hole helps to reduce the effect of pressure changes on the diaphragm of the downstream valve. This allows for a smoother and slower opening and closing of the valve, which can result in a smoother pressure transition within the system (which can be caused by the opening and closing of the valve) and can actually increase the life of the valve itself.

FIG. 4C also illustrates PCB 397 that can be coupled to manifold 302. In accordance with an embodiment of the present invention, manifold 302 can receive signals from PCB board 397 to cause solenoids to open/close to direct vacuum/pressure to various supply lines 260 to control the valves of multi-stage pump 100. Additionally, as shown in FIG. 4C, the manifold 302 can be located distal of the PCB 397 remote from the dispensing block 205 to reduce the effect of heat on the fluid in the dispensing block 205. Additionally, to the extent that PCB design and space constraints are feasible, the thermally generated component can be placed on the side of the PCB remote from the dispensing block 205, again reducing the effects of heat. Heat from manifold 302 and PCB 397 can be dissipated by backing plate 271. 4D is an illustration of one embodiment of pump 100 in which manifold 302 is mounted directly to dispensing block 205.

It may now be useful to describe the operation of the multi-stage pump 100. During operation of the multi-stage pump 100, the valves of the multi-stage pump 100 are opened or closed to allow or restrict fluid flow to various portions of the multi-stage pump 100. According to an embodiment, the valves may be pneumatically actuated (i.e., gas actuated) diaphragm valves that open or close depending on whether the pressure or vacuum is determined. However, in other embodiments of the invention, any suitable valve can be used.

An overview of the various stages of operation of the multi-stage pump 100 is provided below. However, the multi-stage pump 100 can be controlled in accordance with various control mechanisms to sequence the valves and control the pressure, including but not limited to those described by Michael Clarke, each of which is incorporated herein by reference in its entirety. The control mechanism of U.S. Patent Application Serial No. 11/502,729, filed on Aug. According to an embodiment, the multi-stage pump 100 can include a ready section, a dispensing section, a filling section, a pre-filtration section, a filtration section, a discharge section, a purification section, and a static purification section. During the feed section, the inlet valve 125 is opened and the feed stage pump 150 moves (eg, pulls) the feed stage diaphragm 160 to draw fluid into the feed chamber 155. Once a sufficient amount of fluid has filled the feed chamber 155, the inlet valve 125 is closed. Feed stage pump 150 moves into feed stage diaphragm 160 to displace fluid from feed chamber 155 during the filter section. The isolation valve 130 and the barrier valve 135 are opened to allow fluid to pass through the filter 120 to the dispensing chamber 185. According to an embodiment, the isolation valve 130 may be first opened (eg, in a "pre-filtration section") to allow pressure to be built into the filter 120, and then the barrier valve 135 is opened to allow fluid flow to the dispensing chamber 185 in. According to other embodiments, the isolation valve 130 and the barrier valve 135 can be opened and the feed pump can be moved to build pressure on the dispensing side of the filter. The dispensing pump 180 can be placed in its home position during the filtration section. U.S. Provisional Patent Application Serial No. 60/630,384, entitled "System and Method for a Variable Home Position Dispense System", filed on November 23, 2004, by Laverdiere et al., which is incorporated herein by reference. And the in-situ application of the pump can be described in PCT Application No. PCT/US2005/042127, filed on Nov. 21, 2005, to the name of PCT Application No. PCT/US2005/042127. To give the maximum available volume at the dispensing pump during the dispensing cycle but less than the maximum available volume that the dispensing pump can provide. The home position is selected based on various parameters of the dispense cycle to reduce the unused hold volume of the multi-stage pump 100. The feed pump 150 can similarly be placed in an in situ position that provides a volume that is less than its maximum available volume.

At the beginning of the discharge section, the isolation valve 130 is opened, the barrier valve 135 is closed and the discharge valve 145 is opened. In another embodiment, the barrier valve 135 can remain open during the discharge section and closed at the end of the discharge section. During this time, if the barrier valve 135 is open, the controller can know the pressure because the pressure in the dispensing chamber that can be measured by the pressure sensor 112 will be affected by the pressure in the filter 120. The feed stage pump 150 applies pressure to the fluid to remove air bubbles from the filter 120 via the open discharge valve 145. Feed stage pump 150 can be controlled to cause emissions to occur at a predetermined rate, which allows for longer discharge times and lower discharge rates, thereby allowing for accurate control of the amount of waste discharged. If the feed pump is a pneumatic pump, fluid flow restriction can be generated on the discharge flow path, and the pneumatic pressure applied to the feed pump can be increased or decreased to maintain a "discharge" set point pressure, thereby giving an additional A certain control of the method of control.

At the beginning of the purge section, the isolation valve 130 is closed, the barrier valve 135 is closed (if it is open in the discharge section), the discharge valve 145 is closed, and the purge valve 140 is opened and the inlet valve 125 is opened. The dispensing pump 180 applies pressure to the fluid in the dispensing chamber 185 to vent air bubbles via the purge valve 140. During the static purge section, pumping of pump 180 is stopped, but purge valve 140 remains open to continue to vent air. Any excess fluid removed during the purge or static purge section may be directed out of the multi-stage pump 100 (eg, back to the fluid source or discarded) or recycled to the feed stage pump 150. During the ready phase, the inlet valve 125, the isolation valve 130, and the barrier valve 135 can be opened and the purge valve 140 closed so that the feed stage pump 150 can reach the ambient pressure of the source (eg, the source bottle). According to other embodiments, all valves can be closed at the ready stage.

During the dispensing section, the outlet valve 147 opens and the dispensing pump 180 applies pressure to the fluid in the dispensing chamber 185. Because the outlet valve 147 can react to the control more slowly than the dispensing pump 180, the outlet valve 147 can be first opened and the dispensing motor 200 can be started after a predetermined period of time. This prevents the dispensing pump 180 from pushing fluid through a portion of the open outlet valve 147. In addition, this prevents the fluid from moving up along the dispensing nozzle by the valve opening, followed by the forward fluid motion caused by the motor action. In other embodiments, the outlet valve 147 can be opened and the pump 180 dispensed while dispensing begins.

An additional suckback section can be implemented in which excess fluid in the dispensing nozzle can be removed. During the suckback section, the outlet valve 147 can be closed and an auxiliary motor or vacuum can be used to draw excess fluid from the outlet nozzle. Alternatively, the outlet valve 147 can remain open and the dispensing motor 200 can be reversed to draw back fluid into the dispensing chamber. The reverse suction section helps prevent excess fluid from dripping onto the wafer.

Referring briefly to Figure 5, there is shown a graphical representation of the timing of the various stages of the operation of the multi-stage pump 100 of Figure 2 and the timing of the dispensed motor. While several valves are shown to be closed at the same time during the segment change, the closing of the valve can be timed off (eg, 100 milliseconds) to reduce pressure spikes. For example, between the discharge and purge sections, the isolation valve 130 can be closed shortly before the discharge valve 145 is closed. However, it should be noted that other valve timings may be used in various embodiments of the invention. Additionally, several of the segments can be performed together (eg, the fill/distribution stages can be performed simultaneously, in which case both the inlet and outlet valves can be opened in the dispense/fill section). It should be further noted that it is not necessary to repeat a particular segment for each cycle. For example, purification and static purification sections may not be performed in each cycle. Similarly, the discharge section may not be executed in each cycle.

The opening and closing of various valves can result in pressure spikes in the fluid within the multi-stage pump 100. Because the outlet valve 147 is closed during the static purge section, the closing of the purge valve 140 at the end of the static purge section, for example, can result in an increase in pressure in the dispense chamber 185. This can happen because each valve can displace a small amount of fluid when it is closed. More specifically, in many instances prior to dispensing fluid from chamber 185, a purge cycle and/or a static purge cycle is used to purge air from dispense chamber 185 to prevent application from multistage pump 100. Sputtering or other disturbances occur when dispensing a fluid. However, at the end of the static purge cycle, purge valve 140 is closed to seal dispensing chamber 185 to prepare for the start of dispensing. When the purge valve 140 is closed, it forces a large amount of additional fluid (approximately equal to the retentate volume of the purge valve 140) into the dispense chamber 185, which in turn causes the pressure of the fluid in the dispense chamber 185 to increase above that of the fluid. Match the desired baseline pressure. This excess pressure (above the baseline) can cause problems with subsequent fluid dispensing. These problems are exacerbated in low pressure applications because the increase in pressure caused by the closing of purge valve 140 can be a large percentage of the baseline pressure required to dispense.

More specifically, since the pressure occurring due to the closing of the purge valve 140 is increased, if the pressure is not reduced, a "splash" of the fluid onto the wafer may occur during the subsequent dispensing period, Dispensing or other undesirable fluid dynamics. Additionally, because this increase in pressure may not be constant during operation of the multi-stage pump 100, such pressure increases may result in changes in the amount of fluid dispensed or other characteristics of the dispensed during the continuous dispensing stage. These changes in the allocation can in turn lead to an increase in wafer debris and wafer rework. Embodiments of the present invention address the increase in pressure due to various valve closures within the system to achieve the desired starting pressure for the beginning of the dispensing section, which allows for almost complete in the dispensing chamber 185 prior to dispensing. Any baseline pressure to address different delivery pressures and other differences in the equipment of various systems.

In one embodiment, to address an undesired increase in pressure to the fluid in the dispensing chamber 185, during the static purge segment, the dispense motor 200 can be reversed to retract the piston 192 a predetermined distance to compensate for the resistance. Barrier valve 135, purge valve 140, and/or any pressure increase that may result from closure of other sources of pressure increase in dispensing chamber 185. U.S. Patent Application Serial No. 11/292,559, entitled "System and Method for Control of Fluid Pressure," by George Gonnella and James Cedrone, filed on December 2, 2005, by George Gonnella and James. Cedrone, as described in U.S. Patent Application Serial No. 11/364,286, filed on Jan. The pressure in the chamber 185 is applied.

Accordingly, embodiments of the present invention provide a multi-stage pump having gentle fluid handling characteristics. Potentially damaging the pressure spikes can be avoided or mitigated by compensating for pressure fluctuations in the dispensing chamber prior to the dispensing section. Embodiments of the invention may also use other pump control mechanisms and valve timing to help reduce the deleterious effects of pressure and pressure changes on the treatment fluid.

To this end, attention is directed to systems and methods for compensating for pressure increases or decreases that may occur in various enclosed spaces of a pump device. Embodiments of the present invention may compensate for an increase or decrease in pressure in a chamber of a pump device by moving a pump member of the pump device to adjust the volume of the chamber to compensate for an increase or decrease in pressure in the chamber. More specifically, in one embodiment, to address an undesired increase in pressure to the fluid in the dispensing chamber, the dispensing motor can be reversed to retract the piston to compensate for any pressure increase in the dispensing chamber.

The reduction in such changes in pressure can be better understood with reference to Figure 6, which illustrates an example pressure profile at a dispensing chamber 185 for operating a multi-stage pump in accordance with an embodiment of the present invention. At point 440, a dispensing is initiated and the pump 180 is dispensed to push the fluid out of the outlet. At point 445, the dispensing ends. The pressure at the dispensing chamber 185 remains fairly constant during the filling stage because the dispensing pump 180 is typically not involved in this stage. At point 450, the filtration stage begins and the feed stage motor 175 travels forward at a predetermined rate to propel the fluid from the feed chamber 155. As can be seen in Figure 6, the pressure in the dispensing chamber 185 begins to rise to reach a predetermined set point at point 455. When the pressure in the dispensing chamber 185 reaches the set point, the dispensing motor 200 is reversed at a constant rate to increase the available volume in the dispensing chamber 185. In the relatively flat portion of the pressure profile between point 455 and point 460, as soon as the pressure drops below the set point, the speed of the feed motor 175 increases; and when the set point is reached, the speed of the feed motor 175 decreases. This maintains the pressure in the dispensing chamber 185 at an approximately constant pressure. At point 460, the dispensing motor 200 reaches its home position and the filter stage ends. The sharp pressure spike at point 460 is caused by the closing of the barrier valve 135 at the end of the filtration.

After the discharge and purge section and before the end of the static purge section, purge valve 140 is closed, which results in a spike in pressure that begins at point 1500 in the pressure profile. It can be seen between points 1500 and 1502 of the pressure profile that the pressure in the dispensing chamber 185 can undergo a significant increase due to this shutdown. The increase in pressure due to the closing of purge valve 140 is generally inconsistent and depends on the temperature of the system and the viscosity of the fluid used with multi-stage pump 100.

To account for the pressure increase occurring between points 1500 and 1502, the dispense motor 200 can be reversed to retract the piston 192 a predetermined distance to compensate for the closure by the barrier valve 135, the purge valve 140, and/or any other source. Any pressure caused by the increase. In some cases, since the purge valve 140 may take a significant amount of time to shut down, it may be desirable to delay a certain amount of time before reversing the dispensed motor 200. Thus, the time between points 1500 and 1504 on the pressure profile reflects the delay between the signal to close purge valve 140 and the reversal of dispense motor 200. This time delay may be sufficient to allow the purge valve 140 to fully close and allow the pressure within the dispense chamber 185 to be substantially stable, which may be approximately 50 milliseconds.

Since the stagnant volume of the purge valve 140 can be a known amount (eg, within manufacturing tolerances), the dispense motor 200 can be reversed to retract the piston 192a for a compensation distance to increase the volume of the dispense chamber 185. It is approximately equal to the retention volume of the purge valve 140. Since the size of the dispensing chamber 185 and the piston 192 can also be a known amount, the dispensing motor 200 can be reversed by a specific number of motor increments by inverting the number of motor increments by the dispensing motor 200. The volume increase of the dispensing chamber 185 is approximately the retention volume of the purge valve 140.

The effect of retracting the piston 192 via the reversal of the dispense motor 200 causes the pressure in the dispense chamber 185 to decrease from point 1504 to approximately the desired baseline pressure at point 1506. In many cases, this pressure correction may be sufficient to achieve a satisfactory application in the subsequent dispensing stage. However, depending on the type of motor used to dispense the motor 200 or the type of valve used to purge the valve 140, reversing the dispensing of the motor 200 to increase the volume of the dispensing chamber 185 can be produced in the drive mechanism of the dispensing motor 200. A space or "backlash". This "backlash" may mean that when the dispensing motor 200 is activated in the forward direction to push fluid out of the dispensing pump 180 during the dispensing section, components of the motor 200 (such as a motor nut assembly) may be dispensed. There is some amount of clearance or space between which it may have to be engaged before the drive assembly of the dispensing motor 200 is physically engaged to cause the piston 192 to move. Since the amount of this backlash may be variable, it may be difficult to resolve this backlash when determining how far forward the piston 192 is to obtain the desired dispense pressure. Thus, the backlash in the drive assembly of the motor 200 can result in variability in the amount of fluid dispensed during each dispensing stage.

Accordingly, it may be desirable to ensure that the final motion of the dispensing motor 200 is in the forward direction prior to the dispensing section to reduce the amount of backlash in the drive assembly of the mating motor 200 to substantially negligible or non-existent. degree. Accordingly, in some embodiments, to address the unwanted backlash in the drive motor assembly of the dispense motor 200, the dispense motor 200 can be reversed to retract the piston 192 a predetermined distance to compensate for the relief valve 135. The purge valve 140 and/or any pressure increase that may result from the closure of any other source that causes an increase in pressure in the dispensing chamber 185, and in addition, the dispense motor may be reversed to retract the piston 192 by an additional excess. The distance is added to the dispensing chamber 185 by an excess volume. The mating motor 200 can then be engaged in a forward direction to move the piston 192 in the forward direction to be substantially equal to the overrunning distance. This results in an approximate desired baseline pressure in the dispensing chamber 185 while also ensuring that the final motion of the dispensed motor 200 prior to dispensing is in the forward direction, thereby substantially removing any drive assembly from the mating motor 200. Backlash.

Still referring to FIG. 6, as described above, the pressure spike that begins at point 1500 in the pressure profile can be caused by the closing of purge valve 140. To account for the pressure increase that occurs between points 1500 and 1502, after a delay, the dispense motor 200 can be reversed to retract the piston 192 to compensate for the closing of the purge valve 140 (and/or any other source). The predetermined distance resulting from any increase in pressure plus an additional excess distance. As described above, the compensation distance can increase the volume of the dispensing chamber 185 approximately equal to the retention volume of the purge valve 140. Depending on the particular configuration, the overrunning distance may also increase the volume of the dispensing chamber 185 by approximately equal to the retained volume of the purge valve 140, or a smaller or larger volume.

The effect of retracting the piston 192 by the reversal of the dispense motor 200 to compensate for the distance plus the excess distance causes the pressure in the dispensing chamber 185 to decrease from point 1504 to point 1508. The mating motor 200 can then be engaged in the forward direction to move the piston 192 in the forward direction substantially equal to the overrunning distance. In some cases, it may be desirable to allow the motor 200 to be substantially completely stopped prior to engaging the dispensing motor 200 in the forward direction; this delay may be approximately 50 milliseconds. The piston 192 is moved forward by the forward engagement of the mating motor 200 The effect causes the pressure in the dispensing chamber 185 to increase from point 1510 to approximately the desired baseline pressure at point 1512, while ensuring that the final movement of the mating motor 200 prior to the dispensing section is in the forward direction, thereby generally The drive assembly of the upper self-dispensing motor 200 removes all backlash. The reversal and forward movement of the dispense motor 200 at the end of the static purge section is depicted in the timing diagram of FIG.

Embodiments of the present invention will be more clearly described with reference to Figure 7, which illustrates an example pressure profile at the dispensing chamber 185 during operation of certain stages of a multi-stage pump in accordance with an embodiment of the present invention. Line 1520 represents the baseline pressure required to dispense the fluid, which, although any desired pressure, is typically about 0 p.s.i (e.g., gauge) or atmospheric pressure. At point 1522, the pressure in the dispensing chamber 185 may be just above the baseline pressure 1520 during the purge section. The dispense motor 200 can be stopped at the end of the purge section, causing the pressure in the dispense chamber 185 to begin to decrease to an approximate baseline pressure 1520 at point 1526 at point 1524. However, prior to the end of the static purge section, a valve such as purge valve 140 in pump 100 may be closed, resulting in a pressure spike between points 1528 and 1530 of the pressure profile.

The dispensing motor 200 can then be reversed to move the piston 192 a compensation distance and an overrun distance (as described above), causing the pressure in the dispensing chamber 185 to drop below the pressure profile points 1532 and 1534. The baseline pressure between the 1520. To return the pressure in the dispensing chamber 185 to the approximate baseline pressure 1520 and to remove the backlash from the drive assembly of the dispensing motor 200, the dispensing motor 200 can be engaged in the forward direction to be substantially equal to the overrunning distance. This movement causes the pressure in the dispensing chamber 185 to return to the point 1536 of the pressure profile and The baseline pressure between 1538 is 1520. Accordingly, the pressure in the dispensing chamber 185 is substantially returned to the desired baseline pressure for dispensing, the backlash is removed from the drive assembly of the dispensing motor 200, and a desired application can be achieved during a subsequent dispensing session. Match.

While the above-described embodiments of the present invention have been primarily described in connection with modifying the pressure increase caused by the closing of the purge valve during the static purge section, it will be apparent that during any stage of operation of the multistage pump 100, These same techniques are used to correct for an increase or decrease in pressure caused by almost any source, whether internal or external to the multi-stage pump 100, and which is particularly useful for correcting the flow path from or to the dispensing chamber 185. The change in pressure in the dispensing chamber 185 caused by the opening or closing of the valve.

Additionally, it will be apparent that such same techniques can be used to achieve a desired baseline pressure in the dispensing chamber 185 by compensating for changes in other equipment used in conjunction with the multi-stage pump 100. In order to better compensate for such differences in equipment or other variations in processing, the environment or equipment used within or external to the multi-stage pump 100, certain aspects or variables of the invention (such as in the dispensing chamber 185) The desired baseline pressure, compensation distance, overrun distance, delay time, etc. can be configured by the user of the pump 100.

Moreover, embodiments of the present invention may utilize pressure sensor 112 to similarly achieve a desired baseline pressure in dispensing chamber 185. For example, to compensate for any pressure increase caused by the closing of the purge valve 140 (and/or any other source), the piston 192 can be retracted (or moved forward) until the desired baseline is achieved in the dispensing chamber 185. The pressure (as measured by the pressure sensor 112). Similarly, to reduce the amount of backlash in the drive assembly of the dispense motor 200 to a substantially negligible or non-existent extent prior to dispensing, the piston 193 can be retracted until the pressure in the dispense chamber 185 Below the baseline pressure; and then engaged in the forward direction until the pressure in the dispensing chamber 185 reaches the desired baseline pressure for dispensing.

As noted above, not only can the pressure change of the fluid be addressed, but in addition, pressure spikes or other pressure fluctuations in the process fluid can also be reduced by avoiding closing the valve to create trapped space and avoiding opening the valve between the trapped spaces. . During a complete dispensing cycle of the multi-stage pump 100 (e.g., from the dispensing section to the dispensing section), the valve within the multi-stage pump 100 can change state multiple times. Unwanted pressure spikes and drops can occur during such numerous changes. Not only can such pressure fluctuations cause damage to the sensitive processing chemicals, but in addition, the opening and closing of such valves can result in interruptions or changes in the dispensing of the fluid. For example, a sudden increase in pressure in the stagnant volume caused by opening of one or more internal valves coupled to the dispensing chamber 185 can result in a corresponding drop in the pressure of the fluid within the dispensing chamber 185, and can This results in the formation of bubbles in the fluid which in turn can affect subsequent dispensing.

In order to improve the pressure changes caused by the opening and closing of various valves within the multi-stage pump 100, the opening and closing of various valves and/or the engagement and disengagement of the motors can be timed to reduce such pressure spikes. In general, in order to reduce pressure variations in accordance with embodiments of the present invention, a valve will never be closed to create a closed or trapped space in the flow path (if it can be avoided), and the main part of this will be Open the valve between the two trap spaces (if it can be avoided). Conversely, any valves should be avoided unless there is an open flow path to an area outside the multi-stage pump 100 or an open flow path to an atmosphere or condition external to the multi-stage pump 100 (eg, outlet valve 147) The discharge valve 145 or the inlet valve 125 is open).

Another way to express the general criteria for opening and closing valves in a multi-stage pump 100 in accordance with embodiments of the present invention is that during operation of the multi-stage pump 100, only such as inlet valve 125, drain valve 145 or outlet When the external valve of the valve 147 is opened to discharge any pressure change caused by the volume change that can be caused by the opening of the valve (approximately equal to the retained volume of the internal valve to be opened), the multi-stage pump 100 will be turned on or off. Barrier valve 135 or internal valve of purge valve 140. These criteria may be considered in another manner. When opening the valve in the multi-stage pump 100, the valve should be opened from the outside inward (i.e., the external valve should be opened before opening the internal valve), and when the multi-stage pump 100 is closed When the valve is inside, the valve should be closed from the inside out (ie, the internal valve should be closed before closing the external valve).

Additionally, in some embodiments, a sufficient amount of time will be utilized between certain changes to ensure that before another change (eg, valve opening or closing, motor starting or stopping) occurs (eg, starting), completely Opening or closing a particular valve, fully starting or stopping a motor, or the pressure within a portion of the system or system is substantially zero psi (eg, gauge) or other non-zero level. In many cases, the delay between 100 and 300 milliseconds should be sufficient to allow one of the valves within the multi-stage pump 100 to be substantially fully open or closed, however, the actual delay to be used in a particular application or construction of one of these techniques may be The viscosity of the fluid to be used with the multi-stage pump 100, as well as various other factors, depends, at least in part.

The above criteria can be better understood with reference to Figures 8A and 8B, which provide illustrations of one embodiment of valve and motor timing for various stages of operation of multi-stage pump 100 for improved at multiple stages. Pressure changes during operation of pump 100. It should be noted that Figures 8A and 8B are not drawn to scale, and that each number segment may have a different or unique length of time (including zero time), as described in the figures, and in the numbered segments The length of each can be based on various factors, such as the user recipe being constructed, the type of valve used in the multi-stage pump 100 (eg, how long it takes to open or close such valves), and the like.

Referring to FIG. 8A, at time 2010, a ready segment signal may indicate that the multi-stage pump 100 is ready to perform a dispense, and at some time thereafter, at time 2010, one or more signals may be sent at time 2020 to open the portal. The valve 125 operates to dispense the motor 200 in a forward direction to dispense fluid, and to reverse the filling motor 175 to draw fluid into the filling chamber 155. After time 2020 but before time 2022 (eg, during segment 2), a signal can be sent to open outlet valve 147 such that fluid can be dispensed from outlet valve 147.

As will be apparent upon reading this disclosure, the timing of the valve signal and motor signal may vary based on the time required to activate the various valves or motors of the pump, the formulation constructed in conjunction with the multi-stage pump 100, or other factors. For example, in FIG. 8A, the signal can be sent to open the outlet valve 147 after transmitting a signal to operate the dispensing motor 200 in the forward direction, because in this example, the outlet valve 147 can operate better than the dispensing motor 200. Faster, and therefore, the opening of the timing outlet valve 147 and the activation of the dispensing motor 200 are required such that they are substantially uniform for better dispensing. However, other valves and motors may have different starting speeds and the like, and thus, different timings may be utilized with such different valves and motors. For example, a signal to open the outlet valve 147 may be transmitted earlier or substantially simultaneously with the signal used to activate the dispensing motor 200, and similarly, may be earlier or later than the signal used to deactivate the dispensing motor 200. Or simultaneously send a signal to close the outlet valve 147, and so on.

Thus, fluid may be dispensed from the multi-stage pump 200 between periods 2020 and 2030. Depending on the formulation constructed by the multi-stage pump 200, the operating rate of the dispense motor 200 may be variable between periods 2020 and 2030 (eg, in each of the segments 2-6) such that Different amounts of fluid are dispensed at different points between periods 2020-2030. For example, the dispensing motor can operate according to a polynomial function such that the dispensing motor 200 operates faster during segment 2 than during segment 6, and correspondingly, in segment 2 from multi-stage in segment 6 Pump 200 dispenses more fluid. After the dispensing segment has occurred, a signal is sent to close the outlet valve 147 prior to time 2030, and thereafter at time 2030, a signal is sent to stop dispensing the motor 200.

Similarly, between time 2020 and 2050 (eg, segments 2-7), the feed chamber 155 can be filled with fluid via the reversal of the fill motor 175. Next at time 2050, a signal is then sent to stop filling motor 175, after which the fill segment is ended. To allow the pressure within the fill chamber 155 to generally return to zero psi (eg, a gauge), the inlet valve can be made between time 2050 and time 2060 (eg, segment 9, delay 0) before any other action is taken. Keep it open. In an embodiment, this delay can be approximately 10 milliseconds. In another embodiment, the time period between time 2050 and time 2060 may be variable and may depend on the pressure reading in the filling chamber 155. For example, a pressure sensor can be utilized to measure the pressure in the filling chamber 155. Segment 10 may begin at time 2060 when the pressure sensor indicates that the pressure in fill chamber 155 has reached zero p.s.i.

Next, at time 2060, a signal is sent to open the isolation valve 130, and after a suitable delay (e.g., about 250 milliseconds) long enough to allow the isolation valve 130 to fully open, a signal is sent to open the resistance at time 2070. Barrier valve 135. Again, after a suitable delay (e.g., about 250 milliseconds) long enough to allow the barrier valve 135 to fully open, a signal is sent at time 2080 to close the inlet valve 125. After a suitable delay (e.g., about 350 milliseconds) to allow the inlet valve 125 to fully close, a signal can be sent at time 2090 to activate the fill motor 175, and a signal can be sent at time 2100 to activate the dispense motor 200, such that the fill motor 175 is active during the pre-filtration and filtration stages (eg, segments 13 and 14), and the dispense motor 200 is active during the filter section (eg, section 14). The period between time 2090 and time 2100 may be a pre-filter section, may be a set period of time that allows the pressure of the filtered fluid to reach a predetermined set point, or a set distance of motor movement, or may be used as described above Pressure sensor to determine.

Alternatively, a pressure sensor can be utilized to measure the pressure of the fluid, and when the pressure sensor indicates that the pressure of the fluid has reached a set point, the filter section 14 can begin at time 2100. The examples of such treatments are described in more detail in the United States, filed on Dec. 2, 2005 by George Gonnella and James Cedrone, entitled "System and Method for Control of Fluid Pressure", incorporated herein by reference. U.S. Patent Application Serial No. 11/364,286, the entire disclosure of which is incorporated herein by reference.

After the filter segment, one or more signals are sent at time 2110 to disable the fill motor 175 and the dispense motor 200. The length between time 2100 and time 2110 (eg, filter section 14) may vary depending on the desired filtration rate, the speed of filling motor 175 and dispensing motor 200, the viscosity of the fluid, and the like. In an embodiment, the filter section may end when the dispensing motor 200 reaches the home position 2110.

After a suitable delay that allows the fill motor 175 and the dispense motor 200 to completely stop (which may not require any time at all (eg, no delay)), a signal is sent at time 2120 to open the drain valve 145. Moving to Figure 8B, after a suitable delay (e.g., about 225 milliseconds) that allows the discharge valve 145 to fully open, a signal can be sent to the fill motor 175 at time 2130 to initiate the step for the discharge section (e.g., segment 17). Into the motor 175. While the barrier valve 135 can be left open during the discharge section to allow monitoring of the pressure of the fluid within the multi-stage pump 100 by the pressure sensor 112 during the discharge section, the resistance can also be closed prior to the start of the discharge section at time 2130. Barrier valve 135.

To end the discharge section, a signal is sent at time 2140 to deactivate the fill motor 175. If desired, between time 2140 and time 2142, a delay (e.g., about 100 milliseconds) may be spent to allow the pressure of the fluid to be suitably dissipated, for example, if the pressure of the fluid is high during the discharge section. In an embodiment, the time period between time 2142 and 2150 can be used to tune the pressure sensor 112 to zero and can be about 10 milliseconds.

Next, at time 2150, a signal is sent to close the barrier valve 135. After time 2150, a suitable delay is allowed such that the barrier valve 135 can be fully closed (eg, approximately 250 milliseconds). A signal is then sent at time 2160 to close the isolation valve 130, and after a suitable delay (about 250 milliseconds) to allow the isolation valve 130 to fully close, a signal is sent at time 2170 to close the discharge valve 145. Allowing a suitable delay such that the bleed valve 145 can be fully closed (e.g., about 250 milliseconds), after which a signal is sent at time 2180 to open the inlet valve 125 and at a suitable delay that allows the inlet valve 125 to fully open (e.g. After approximately 250 milliseconds, a signal is sent at time 2190 to open purge valve 140.

After a suitable delay (eg, about 250 milliseconds) that allows the discharge valve 145 to fully open, a signal can be sent to the dispense motor 200 at time 2200 to start the dispense motor 200 for the purge section (eg, section 25), And after a period of time that can be recipe dependent for the purge section, a signal can be sent at time 2210 to stop dispensing the motor 200 and end the purge section. Between times 2210 and 2212, a sufficient period of time is allowed (e.g., using pressure sensor 1112 to predetermined or determine) such that the pressure in dispensing chamber 185 can be substantially stable to zero p.s.i (e.g., about 10 milliseconds). Subsequently, at time 2220, a signal can be sent to close purge valve 140, and after allowing a delay sufficient to cause purge valve 140 to fully close (e.g., about 250 milliseconds), a signal can be sent at time 2230 to close the inlet. Valve 125. After the dispensing of the motor 200 is initiated to correct any pressure changes (as described above) caused by the closing of the valves within the multi-stage pump 100, the multi-stage pump 100 can again be ready to perform the dispensing at time 2010.

It should be noted that there may be some delay between the ready segment and the dispense segment. Since the barrier valve 135 and the isolation valve 130 can be closed when the multi-stage pump 100 enters the ready section, it is possible to introduce fluid into the filling chamber 155 without affecting the subsequent application of the multi-stage pump. Whether the dispensing is initiated during this filling or after this filling.

9A and 9B, it will be more clearly described that the filling chamber 155 is filled while the multi-stage pump 100 is in a ready state, and FIGS. 9A and 9B provide another implementation of the various stages of valve and motor timing for operation of the multi-stage pump 100. As illustrated by the examples, the timings are used to improve pressure changes during operation of the multi-stage pump 100.

Referring to Figure 9A, at time 3010, a ready segment signal may indicate that the multi-stage pump 100 is ready to perform the dispense, at some time thereafter, at time 3012, a signal may be sent to open the outlet valve 147. After a suitable delay to allow the outlet valve 147 to open, one or more signals may be sent at time 3020 to operate the dispensing motor 200 in the forward direction to dispense fluid from the outlet valve 147, and to cause the filling motor 175 Inversion to draw fluid into the filling chamber 155 (as described more fully below, the inlet valve 125 may remain open since a previous filling section). A signal may be sent at time 3030 to stop dispensing the motor 200 and a signal is sent at time 3040 to close the outlet valve 147.

As will be apparent upon reading this disclosure, the timing of the valve signals and motor signals may vary based on the time required to activate the various valves or motors of the pump, the formulation constructed in conjunction with the multi-stage pump 100, or other factors. For example (as depicted in Figure 8A), the signal can be sent to open the outlet valve 147 after transmitting a signal to operate the dispensing motor 200 in the forward direction, as in this example, the outlet valve 147 can be compared to the dispensing motor The 200 operates faster and, therefore, requires the opening of the timing outlet valve 147 and the activation of the dispensing motor 200 such that they are substantially identical for better dispensing. However, other valves and motors may have different starting speeds and the like, and thus, different timings may be utilized with such different valves and motors. For example, a signal to activate the outlet valve 147 may be transmitted earlier or concurrently with the signal used to activate the dispensing motor 200, and similarly, may be used earlier or later than the signal used to deactivate the dispensing motor 200. Simultaneously send a signal to close the outlet valve 147, and so on.

Thus, fluid may be dispensed from the multi-stage pump 200 between periods 3020 and 3030. Depending on the formulation constructed by the multi-stage pump 200, the operating rate of the dispense motor 200 may be variable between periods 3020 and 3030 (eg, in each of the segments 2-6) such that Different amounts of fluid are dispensed at different points between periods 3020-3030. For example, the dispensing motor can operate according to a polynomial function such that the dispensing motor 200 operates faster during segment 2 than during segment 6, and correspondingly, in segment 2 from multi-stage in segment 6 Pump 200 dispenses more fluid. After the dispensing section has occurred, a signal is sent to close the outlet valve 147 before time 3030, and thereafter at time 3030, a signal is sent to stop the dispensing of the motor 200.

Similarly, between times 3020 and 3050 (eg, segments 2-7), the feed chamber 155 can be filled with fluid via the reversal of the fill motor 175. Next at time 3050, a signal is then sent to stop filling motor 175, after which the fill segment is ended. To allow the pressure within the fill chamber 155 to generally return to zero psi (eg, a gauge), the inlet valve can be made between time 3050 and time 3060 (eg, segment 9, delay 0) before any other action is taken. Keep it open. In an embodiment, this delay can be approximately 10 milliseconds. In another embodiment, the time period between time 3050 and time 3060 may be variable and may depend on the pressure reading in the filling chamber 155. For example, a pressure sensor can be utilized to measure the pressure in the filling chamber 155. Segment 10 may begin at time 3060 when the pressure sensor indicates that the pressure in fill chamber 155 has reached zero p.s.i.

Next, at time 3060, a signal is sent to open the isolation valve 130, and at time 3070 a signal is sent to open the barrier valve 135. A signal is then sent at time 3080 to close the inlet valve 125, after which a signal is sent at time 3090 to activate the fill motor 175, and a signal can be sent at time 3100 to activate the dispense motor 200 such that the fill motor 175 Active during the pre-filtration and filtration section and the dispensing motor 200 is active during the filtration section.

After the filter segment, one or more signals are sent at time 3110 to disable the fill motor 175 and the dispense motor 200. A signal is sent at time 3120 to open the drain valve 145. Moving to Figure 9B, a signal can be sent to the fill motor 175 at time 3130 to activate the stepper motor 175 for the discharge section. To end the discharge section, a signal is sent at time 3140 to deactivate the fill motor 175. Next, at time 3150, a signal is sent to close the barrier valve 125, while at time 3160 a signal is sent to close the isolation valve 130 and a signal is sent at time 3170 to close the discharge valve 145.

A signal is sent at time 3180 to open the inlet valve 125, and thereafter, at time 3190 a signal is sent to open the purge valve 140. A signal can then be sent to the dispense motor 200 at time 3200 to start the dispense motor 200 for the purge section, and after the purge section, a signal can be sent at time 3210 to stop the dispense motor 200.

Subsequently, at time 3220, a signal can be sent to turn off purge valve 140, and then a signal is sent at time 3230 to close inlet valve 125. After the dispensing of the motor 200 is initiated to correct any pressure changes (as described above) caused by the closing of the valves within the multi-stage pump 100, the multi-stage pump 100 can again be ready to perform the dispensing at time 3010.

Once the multi-stage pump 100 enters the ready section at time 3010, a signal can be sent to open the inlet valve 125 and another signal can be sent to reverse the fill motor 175 so that while the multi-stage pump 100 is in the ready state The liquid is drawn into the filling chamber 155. Although the filling chamber 155 is filled with liquid during the ready section, this filling does not affect the ability of the multi-stage pump 100 to dispense fluid at any point after entering the ready section because the barrier valve 135 and the isolation valve 130 are closed, thereby The filling chamber 155 is generally separated from the dispensing chamber 185. Moreover, if a dispensing is initiated prior to completion of filling, the filling may generally continue concurrently with the dispensing of fluid from the multi-stage pump 100.

When the multi-stage pump 100 initially enters the ready section, the pressure in the dispensing chamber 185 can be at a pressure that is approximately the desired portion of the dispensing section. However, since there may be some delay between the entry of the ready section and the beginning of the dispensing section, during the ready section, the pressure within the dispensing chamber 185 may vary based on various factors, such as in the dispensing chamber 185. The nature of the graded membrane 190, the change in temperature, or other factors that match. Thus, when the dispensing section is initiated, the pressure in the dispensing chamber 185 can be relatively significant from the baseline pressure required for dispensing.

This float can be more clearly shown with reference to Figures 10A and 10B. FIG. 10A depicts an example pressure profile at the dispensing chamber 185 illustrating the application during the ready phase The float of the pressure in the chamber. As described above with reference to Figures 9A and 9B, approximately at point 4010, corrections can be made to any pressure changes caused by valve movement or another cause. This pressure correction can correct the pressure in the dispensing chamber 185 to approximately the desired baseline pressure (indicated by line 4030) at the point 4020, at which point the multi-stage pump 100 can enter the ready section. . It can be seen that after entering the ready section, approximately at point 4020, the pressure in the dispensing chamber 185 can withstand a steady rise due to various factors such as those described above. This pressure fluctuation from baseline pressure 4030 can then result in an unsatisfactory dispense when subsequent dispensing sessions occur.

Additionally, since the time delay between entering the ready segment and the subsequent dispensing segment may be variable, and the pressure fluctuation in the dispensing chamber 185 may be related to the time of the delay, due to the fact that it may occur during different delays The different amounts of float, the dispensing that occurs in each of the successive dispensing segments, may be different. Thus, this pressure fluctuation can also affect the ability of the multi-stage pump 100 to accurately repeat a dispensing operation, which in turn can hinder the use of the multi-stage pump 100 in process recipe replication. Accordingly, it may be desirable to maintain a substantially baseline pressure during the ready phase of the multi-stage pump 100 to improve the dispensing during the subsequent dispensing stage and the repeatability of the dispensing across the dispensing section while achieving acceptable fluids. dynamics.

In an embodiment, to substantially maintain baseline pressure during the ready phase, the dispensing motor 200 can be controlled to compensate or account for upward (or downward) pressure fluctuations that can occur in the dispensing chamber 185. More specifically, the dispensing motor 200 can be controlled to substantially maintain the baseline pressure in the dispensing chamber 185 using "dead band" closed loop pressure control. Returning briefly to FIG. 2, the pressure sensor 112 can report pressure readings to the pump controller 20 at regular time intervals. If the reported pressure deviates from the desired baseline pressure by a certain amount or tolerance, the pump controller 20 may send a signal to the dispensing motor 200 to reverse (or move forward) possibly moving the dispensing motor 200 at The minimum distance (motor increment) detectable at the pump controller 20 thus retracts (or moves forward) the piston 192 and the dispensing stage diaphragm 190, thereby correspondingly reducing the pressure within the dispensing chamber 185 ( Or increase).

Since the pressure sensor 112 can sample and report the frequency of the pressure in the dispensing chamber 185 may be slightly faster than the operating speed of the dispensing motor 200, approximately one time when a signal is sent to the dispensing motor 200 During the window, the pump controller 20 may not process the pressure measurements reported by the pressure sensor 112, or the pressure sensor 112 may be deactivated such that the motor is dispensed before the pump controller 20 receives or processes another pressure measurement. 200 can complete its movement. Alternatively, prior to processing the pressure measurements reported by pressure sensor 112, pump controller 20 may wait until it has detected that dispensing motor 200 has completed its movement. In many embodiments, the pressure sensor 112 samples the pressure in the dispensing chamber 185 and reports a sampling interval for this pressure measurement of about 30 kHz, about 10 kHz, or another time interval.

However, the above embodiments are not without their problems. In some cases, as described above, one or more of these embodiments may exhibit a significant change in the dispense when the time delay between entering the ready segment and the subsequent dispensing segment is variable. To some extent, by using a fixed time interval between entering the ready segment and subsequent dispensing, these problems can be reduced and reproducibility enhanced, however, this is not always feasible when constructing a particular process. .

In order to substantially maintain baseline pressure during the ready phase of multi-stage pump 100 while enhancing the repeatability of the dispense, in some embodiments, controllable dispensing motor 200 to compensate or resolve using closed loop pressure control may occur The pressure in the dispensing chamber 185 floats. The pressure sensor 112 can report pressure readings to the pump controller 20 at regular time intervals (as described above, in some embodiments, this time interval can be about 30 kHz, about 10 kHz, or another time interval). If the reported pressure is above (or below) the desired baseline pressure, pump controller 20 may send a signal to dispense motor 200 to reverse (or move forward) the dispense motor 200 to a motor increment. Thus, the piston 192 is retracted (or moved forward) and the stage diaphragm 190 is dispensed and the pressure within the dispensing chamber 185 is reduced (or increased). This pressure monitoring and correction can occur substantially continuously until the beginning of the dispensing section. In this manner, an approximately desired baseline pressure can be maintained in the dispensing chamber 185.

As discussed above, the frequency at which the pressure sensor 112 can sample and report the pressure in the dispensing chamber 185 may be slightly more frequent than the operating speed of the dispense motor 200. To address this difference, the pump controller 20 may not process the pressure measurements reported by the pressure sensor 112 during a certain time window when a signal is sent to the dispensing motor 200, or the pressure sensor 112 may be deactivated. The dispensing motor 200 can complete its movement before the pump controller 20 receives or processes another pressure measurement. Alternatively, prior to processing the pressure measurements reported by the pressure sensor 112, the pump controller 20 may wait until it has detected that the dispensing motor 200 has completed its movement or received a notification that the dispensing motor 200 has completed its movement. until.

The beneficial effect of using one of the closed loop control systems to substantially maintain baseline pressure as discussed, can be readily seen with reference to Figure 10B, which depicts an example pressure profile at the dispensing chamber 185, where This embodiment of the closed loop control system is just used during the segment. As described above with reference to Figures 6 and 7, approximately at point 4050, corrections can be made to any pressure changes caused by valve movement or another cause. This pressure correction can correct the pressure in the dispensing chamber 185 to approximately the desired baseline pressure (indicated by line 4040) at approximately point 4060, at which point the multi-stage pump 100 can enter the ready section. . After entering the ready section, approximately at point 4060, one embodiment of the closed loop control system can resolve any pressure fluctuations during the ready section to substantially maintain the desired baseline temperature. For example, at point 4070, the closed loop control system can detect a pressure rise and resolve the pressure rise to substantially maintain the baseline pressure 4040. Similarly, at points 4080, 4090, 4100, 4110, the closed loop control system can resolve or correct the pressure fluctuations in the dispensing chamber 185 to substantially maintain the desired baseline pressure 4040 regardless of the length of the ready section (note, Points 4080, 4090, 4100, and 4110 are merely representative, and other pressure corrections performed by the closed loop control system are depicted in Figure 10B, without reference numerals being given thereto and thus not discussed as such). Thus, since the desired baseline pressure 4040 is substantially maintained in the dispensing chamber 185 by the closed loop control system during the ready section, a more satisfactory dispensing can be achieved in the subsequent dispensing section.

However, during this subsequent dispensing phase, in order to achieve this more satisfactory dispensing, it may be desirable to address any corrections made to substantially maintain the baseline when the dispensing motor 200 is actuated to dispense fluid from the dispensing chamber 185. pressure. More specifically, at point 4060, the dispensing stage diaphragm 190 can be in the starting position just after the pressure correction occurs and the multi-stage pump 100 initially enters the ready section. In order to achieve the desired application from this initial position, the dispensing stage diaphragm 190 should be moved to a dispensing position. However, after changing the pressure float as described above, the dispensing stage diaphragm 190 can be in a second position that is different from the initial position. In some embodiments, this difference should be resolved during the dispensing segment by moving the dispensing stage diaphragm 190 to the dispensing position to achieve the desired dispense. In other words, in order to achieve the desired dispensing, when the multi-stage pump 100 initially enters the ready section, the dispensing stage diaphragm 190 can be moved from its second position to the dispensing stage after any corrections to the pressure fluctuations during the ready section have occurred. The initial position of the diaphragm 190, after which the dispensing stage diaphragm 190 can then be moved from the initial position to the dispensing position.

In an embodiment, when the multi-stage pump 100 initially enters the ready section, the pump controller 20 may calculate an initial distance (distribution distance) for moving the dispensing motor 200 to achieve the desired dispense. While the multi-stage pump 100 is in the ready section, the pump controller 20 can track the distance (correction distance) that the dispense motor 200 has moved to correct any pressure fluctuations that occurred during the ready section. During the dispensing stage, in order to achieve the desired dispense, the pump controller 20 may signal the dispense motor 200 to move the correction distance plus (or minus) the dispense distance.

However, in other cases, it may not be necessary to address such pressure corrections when the dispensing motor 200 is actuated to dispense fluid from the dispensing chamber 185. More specifically, at point 4060, the dispensing stage diaphragm 190 can be in the starting position just after the pressure correction occurs and the multi-stage pump 100 initially enters the ready section. In order to achieve the desired dispense from this initial position, the dispensing stage diaphragm 190 should be moved a dispense distance. After the pressure fluctuation as described above, the dispensing stage diaphragm 190 can be in a second position different from the initial position. In some embodiments, the desired dispensing can be achieved simply by moving the dispensing stage diaphragm 190 a dispensing distance (starting from the second position).

In an embodiment, when the multi-stage pump 100 initially enters the ready section, the pump controller 20 may calculate to move the dispensing motor 200 to achieve an initial distance to be dispensed. Next, during the dispensing stage, in order to achieve the desired dispense, the pump controller 20 can signal the dispensing motor 200 to move the initial distance regardless of the pressure float during which the dispensing motor 200 has moved to correct the ready segment. distance.

It will be apparent that the selection of one of the above-described embodiments for use in any given environment will depend on a number of factors, such as the system, equipment, or experience conditions to be used in connection with the selected embodiments. It will also be apparent that while the above-described embodiments of the control system for substantially maintaining baseline pressure have been described with respect to addressing the upward pressure fluctuation during the ready segment, embodiments of such identical systems and methods are equally applicable to The upward or downward pressure in the ready section of the stage pump 100 or any other section floats. Moreover, while embodiments of the present invention have been described in relation to multi-stage pump 100, it should be understood that embodiments of such invention (e.g., control methods, etc.) are equally well utilized and effectively used in a single stage. Pump device or virtually any other type of pump device.

What may be useful herein is an example of a single stage pump device that can be utilized in conjunction with various embodiments of the present invention. 11 is an illustration of one embodiment of a pump assembly for pump 4000. The pump 4000 can be similar to one of the stages of the multi-stage pump 100 described above (eg, a dispensing stage) and can include a rolling diaphragm pump driven by a stepper motor, a brushless DC motor, or other motor. Pump 4000 can include a dispensing block 4005 that defines various fluid flow paths through pump 4000 and at least partially defines a pump chamber. According to an embodiment, the dispense pump block 4005 can be an integral block of PTFE, modified PTFE, or other material. Because these materials do not react with many treatment fluids or react minimally with many treatment fluids, the use of such materials allows the flow path and pump chamber to be directly processed into the dispensing zone with a minimum amount of additional hardware. In block 4005. The dispensing block 4005 thus reduces the need for piping by providing an integrated fluid manifold.

The dispensing block 4005 can include various external inlets and outlets, including, for example, an inlet 4010 for containing fluid, a purge/discharge outlet 4015 for purifying/discharging fluid, and for dispensing fluid during the dispensing section. The outlet 4020 is dispensed. In the example of FIG. 11, since the pump has only one chamber, the dispensing block 4005 includes an external purge outlet 4010. U.S. Provisional Patent Application Serial No. 60/741,667, entitled "O-Ring-Less Low Profile Fitting and Assembly Thereof", filed on December 2, 2005 by Iraj Gashgaee, incorporated herein by reference. U.S. Patent Application Serial No. 11/602,513, entitled "O-Ring-Less Low Profile Fittings and Fitting Assemblies", which is hereby incorporated by reference in its entirety in An embodiment in which the outer inlet and outlet of the distribution block 4005 are connected to the joint of the fluid line.

The dispensing block 4005 directs fluid from the inlet to the inlet valve (eg, at least partially defined by the valve plate 4030), from the inlet valve to the pump chamber, from the pump chamber to the drain/purge valve, and from The pump chamber is directed to the outlet 4020. A pump cover 4225 protects the pump motor from damage, while a piston housing 4027 can provide protection to the piston, and in accordance with an embodiment of the present invention, the piston housing 4027 can be formed from polyethylene or other polymers. Valve plate 4030 is a valve housing that is configured to direct fluid flow to various components of pump 4000 (eg, inlet valves and purge/discharge valves). The valve plate 4030 and corresponding valves can be formed in a manner similar to that described above in connection with the valve plate 230. According to an embodiment, each of the inlet valve and the purge/discharge valve is at least partially integrated into the valve plate 4030 and is a diaphragm valve that is opened or closed for a viewing pressure or vacuum applied to the respective diaphragm. In other embodiments, some of the valves may be external to the dispensing block 4005 or disposed in an additional valve plate. According to one embodiment, a PTFE sheet is sandwiched between the valve plate 4030 and the dispensing block 4005 to form a diaphragm for the various valves. Valve plate 4030 includes a valve control inlet (not shown) for each valve to apply pressure or vacuum to the respective diaphragm.

As with multi-stage pump 100, pump 4000 can include several features to prevent fluid dripping into the area of the multi-stage pump 100 that houses the electronics. "Drip-proof" features may include protruding lips, sloped features, seals between components, offsets at the metal/polymer interface, and other features described above to isolate the electronics from the drops. The electronics and manifold can be configured in a manner similar to that described above to reduce the effect of heat on the fluid in the pump chamber. Thus, similar features used in multi-stage pumps to reduce form factor and thermal effects and prevent fluid from entering the electronics housing can be used in single stage pumps.

In addition, many of the control methods described above can also be combined with pump 4000 to achieve a substantially satisfactory dispensing. For example, embodiments of the present invention can be used to control a valve of pump 4000 to ensure a valve that is configured to substantially minimize the time of fluid flow through the pump device (eg, to an area external to the pump device) The sequence operates the valve system of the pump unit. Moreover, in certain embodiments, when pump 4000 is operating, a sufficient amount of time will be utilized between valve state changes to ensure that a particular valve is fully opened or closed prior to initiating another change. For example, the movement of the motor of pump 4000 can be delayed for a sufficient amount of time to ensure that the inlet valve of pump 4000 is fully opened prior to the filling section.

Similarly, embodiments of systems and methods for compensating or resolving pressure fluctuations that may occur in a chamber of a pump device may be applied to pump 4000 with substantially equal efficiency. The dispensing motor can be controlled based on the pressure induced in the dispensing chamber to substantially maintain the baseline pressure in the dispensing chamber prior to dispensing, and a control loop can be utilized to repeatedly determine the dispensing chamber Whether the pressure is different from the desired pressure (eg, above or below), and if so, adjusts the movement of the pump member to substantially maintain the desired pressure in the dispensing chamber.

While the adjustment of the pressure in the chamber of pump 4000 can actually occur at any time, it can be particularly useful prior to the initial dispensing section. More specifically, when the pump 4000 initially enters the ready section, the pressure in the dispensing chamber 185 can be at a baseline pressure that is approximately the desired pressure for the subsequent dispensing section (eg, based on calibration or prior dispensing). And determine the pressure of the application) or a part of it. This desired dispensing pressure can be used to achieve a dispensing with a desired set of characteristics, such as desired flow rate, amount, and the like. By bringing the fluid in the dispensing chamber 185 to the desired baseline pressure at any time prior to the opening of the outlet valve, the compliance and variation of the components of the pump 4000 can be resolved prior to the dispensing section and satisfactory dispensing can be achieved.

However, since there may be some delay between the entry of the ready section and the beginning of the dispensing section, the pressure within the chamber of the pump 4000 may vary based on various factors during the ready section. To counter this pressure fluctuation, embodiments of the present invention may be utilized such that the desired baseline pressure is substantially maintained in the chamber of pump 4000 and a satisfactory dispensing is achieved in the subsequent dispensing section.

In addition to controlling pressure fluctuations in a single stage pump, embodiments of the present invention may also be used to compensate for the dispensing chamber caused by actuation of various mechanisms or components within the pump 4000 or equipment used in conjunction with the pump 4000. Pressure fluctuations in the room.

One embodiment of the present invention may correct for changes in pressure in the chamber of the pump caused by the closing of the purge or discharge valve prior to the start of the dispensing section (or any other section). This compensation can be achieved similarly to the description of multistage pump 100 above by reversing the motor of pump 4000 such that the volume of the chamber of pump 4000 substantially increases the retention volume of the valve when the purge or inlet valve is closed. .

Accordingly, embodiments of the present invention provide a pump device having a gentle fluid handling characteristic. Potentially damaging the pressure spikes can be avoided or mitigated by sequencing the opening and closing of the valves within the pumping device and/or the activation of the motor. Embodiments of the invention may also use other pump control mechanisms and valve timing to help reduce the deleterious effects of pressure on the treatment fluid.

In the foregoing specification, the invention has been described with reference to the specific embodiments. However, it will be apparent to those skilled in the art that various modifications and changes can be made without departing from the scope of the invention as set forth in the appended claims. The specification and drawings are to be considered in a

Benefits, other advantages, and problem solving methods have been described above with regard to specific embodiments. However, these benefits, advantages, solutions to problems, and any components that may cause or become more apparent to any benefit, advantage, or solution should not be construed as critical or required for any or all of the scope of the patent application. Or essential features or components.

10. . . Pump system

15. . . Fluid source

20. . . Pump controller

25. . . Wafer

27. . . Computer readable medium

30. . . Control instruction

35. . . processor

40. . . Communication link

45. . . Communication link

100. . . Multistage pump

105. . . Feeding level

110. . . Independent allocation level

112. . . Pressure sensor

120. . . filter

125. . . Inlet valve

130. . . Isolation valve

135. . . Barrier valve

140. . . Purification valve

145. . . Drain valve

147. . . Outlet valve

150. . . Feed pump

155. . . Feed into the chamber

160. . . Feed-in diaphragm

165. . . piston

170. . . Lead screw

175. . . Stepper motor

180. . . Dispensing pump

185. . . Dispensing chamber

190. . . Application level diaphragm

192. . . piston

195. . . Lead screw

200. . . Distribution motor

205. . . Distribution block

210. . . Entrance

215. . . Emission outlet

220. . . Distribution exit

225. . . Pump cover

227. . . Piston housing

230. . . Valve plate

235. . . Entrance

240. . . Entrance

245. . . Entrance

250. . . Entrance

255. . . Entrance

260. . . Valve control supply line

263. . . Top cover

265. . . Valve control gas supply inlet

270. . . Vacuum inlet

271. . . Backplane

272. . . Flange/lip

273. . . Tilting feature

274. . . bracket

280. . . Runner

285. . . Runner

290. . . Runner

295. . . Runner

300. . . Runner

302. . . Manifold

305. . . Runner

397. . . PCB board

440. . . point

445. . . point

450. . . point

455. . . point

460. . . point

1500. . . point

1502. . . point

1504. . . point

1506. . . point

1508. . . point

1510. . . point

1512. . . point

1520. . . point

1522. . . point

1524. . . point

1526. . . point

1528. . . point

1530. . . point

1532. . . point

1534. . . point

1536. . . point

1538. . . point

2010. . . time

2020. . . time

2022. . . time

2030. . . time

2040. . . time

2050. . . time

2060. . . time

2070. . . time

2080. . . time

2090. . . time

2100. . . time

2110. . . time

2120. . . time

2130. . . time

2140. . . time

2142. . . time

2150. . . time

2160. . . time

2170. . . time

2180. . . time

2190. . . time

2200. . . time

2210. . . time

2212. . . time

2220. . . time

2230. . . time

3010. . . time

4000. . . Pump

4005. . . Dispensing pump block

4010. . . Point/entry

4015. . . Purification/discharge exit

4020. . . Point/distribution exit

4027. . . Piston housing

4030. . . Valve plate

4040. . . Baseline pressure

4050. . . point

4060. . . point

4070. . . point

4080. . . point

4090. . . point

4100. . . point

4110. . . point

1 is a diagram of one embodiment of a pump system; FIG. 2 is an illustration of a multi-stage pump in accordance with an embodiment of the present invention; FIGS. 3A, 3B, 4A, 4C, and 4D are various embodiments of a multi-stage pump Figure 4B is an illustration of one embodiment of a dispensing block; Figure 5 is an illustration of a valve and motor timing for an embodiment of the present invention; and Figure 6 is an embodiment of an actuation sequence for use with a pump Example pressure profile; Figure 7 is an example pressure profile of a portion of an embodiment of an actuation sequence for use with a pump; Figures 8A and 8B are illustrations of one embodiment of valve and motor timing for various stages of operation of the pump; 9A and 9B are diagrams showing one embodiment of valve and motor timing for various stages of operation of the pump; FIGS. 10A and 10B are example pressure profiles of a portion of an embodiment of an actuation sequence for use with a pump; and FIG. Is an illustration of one embodiment of a pump system.

2010. . . time

2020. . . time

2022. . . time

2030. . . time

2050. . . time

2060. . . time

2070. . . time

2080. . . time

2090. . . time

2100. . . time

2110. . . time

2120. . . time

Claims (18)

A method for correcting a pressure change using a motor, comprising: introducing a fluid into a dispensing chamber of a pump device; and moving a diaphragm of one of the pump members to adjust a volume of the chamber To compensate for a change in pressure in the dispensing chamber, wherein a motor is used to directly move the diaphragm. The method of claim 1, wherein the pressure change is a pressure reduction due to opening of a valve or closing of a valve. The method of claim 2, wherein the increase in pressure is approximately proportional to an indwelling volume of the valve, and moving the diaphragm to increase the volume of the dispensing chamber by an amount substantially equal to the indwelling volume of the valve. The method of claim 3, wherein the diaphragm is moved to increase the volume of the dispensing chamber by approximately an excess volume, and then the diaphragm is moved to reduce the volume of the dispensing chamber to the excess volume. The method of claim 3, wherein the diaphragm is moved to increase the volume of the dispensing chamber until a desired pressure is achieved in the chamber. The method of claim 3, wherein the diaphragm is moved to increase the volume of the dispensing chamber until a pressure of less than a desired pressure is reached in the dispensing chamber, and then the diaphragm is moved to reduce the dispensing chamber This volume is until an approximate pressure is reached. A computer readable medium comprising instructions translatable for introducing a fluid into a dispensing chamber of a pumping device; and moving a diaphragm of one of the pumping members of the pumping device to adjust the dispensing chamber The volume compensates for a change in pressure in the chamber, wherein a motor is used to directly move the diaphragm. The computer readable medium of claim 7, wherein the pressure change is a pressure reduction due to opening of a valve or closing of a valve. The computer readable medium of claim 8, wherein the pressure increase is approximately proportional to an indwelling volume of the valve and the diaphragm is moved to increase the volume of the dispensing chamber by a quantity substantially equal to the indwelling volume of the valve . The computer readable medium of claim 9, wherein the diaphragm is moved to increase the volume of the dispensing chamber by an excess volume, and then moving the diaphragm to reduce the volume of the dispensing chamber to the excess volume . The computer readable medium of claim 9, wherein the diaphragm is moved to increase the volume of the dispensing chamber until a desired pressure is achieved in the dispensing chamber. The computer readable medium of claim 9, wherein the diaphragm is moved to increase the volume of the chamber until a pressure of less than a desired pressure is reached in the dispensing chamber, and then the diaphragm is moved to reduce the dispensing This volume of the chamber is until an approximate pressure is reached. A system for correcting a pressure change using a motor, comprising: a pump device including a feed chamber, a dispensing chamber operable to receive a fluid for dispensing, and a dispensing chamber An indoor pump member, the pump member including a diaphragm coupled to a motor operable to directly move the diaphragm; and a controller configured to adjust movement of the pump member of the pump device to Adjusting the volume of the dispensing chamber to compensate for one of the dispensing chambers Pressure changes. The system of claim 13 wherein the pressure change is a decrease in pressure due to opening of a valve or closing of a valve. The system of claim 14, wherein the increase in pressure is approximately proportional to an indwelling volume of the valve and adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber by substantially equal to the valve The amount of the indwelling volume. The system of claim 15 wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber by approximately an excess volume, and then moving the diaphragm to volume the dispensing chamber Reduce the approximate excess volume. The system of claim 15 wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber until a desired pressure is achieved in the dispensing chamber. The system of claim 15 wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber until a pressure of less than a desired pressure is reached in the dispensing chamber, and then The diaphragm is moved to reduce the volume of the dispensing chamber until an approximate desired pressure is reached.