TWI339133B - Liquid material applying apparatus - Google Patents

Description

1339133 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD This invention relates to a coating apparatus for coating a substrate with a fluid material. [Prior Art] It is known to develop an organic EL display device using an organic EL (Electr〇Umineseenee) material, for example, an organic EL display device using an active matrix driving method using a polymer organic germanium material. In the manufacturing process, the following steps are performed on the glass substrate (hereinafter, simply referred to as "substrate"): forming a TFT (ThinFilm Transistor) circuit; ^ forming an iT0 (Indium Tin 0xide) electrode as an anode; forming a partition wall Applying a fluid material including a hole transporting material (hereinafter referred to as "hole transport liquid"); forming a hole transport layer by heat treatment; and applying a fluid material containing an organic EL material (hereinafter referred to as "Organic El liquid"); forming an organic EL layer by heat treatment; forming a cathode; and forming an insulating film for sealing. In the manufacture of an organic EL display device, one of the coating devices for applying a hole transporting liquid or an organic EL liquid to a substrate is disclosed in Japanese Patent Laid-Open Publication No. 2002-75640 (Document No.) and Japanese Patent. In JP-A-2003-1 0755 (Document 2), a plurality of nozzles for continuously discharging a fluid material are relatively moved with respect to a substrate, whereby a fluid material is applied onto the substrate. In the apparatus of the above documents 1 and 2, when a plurality of nozzles are moved in the main sweeping direction and the mother moves in the main scanning direction, the substrate is moved in the sub-sweeping direction, thereby The flowable material is applied in a stripe pattern of 97106432 1339133 between the plurality of partition walls formed in the coated area on the substrate. In the coating apparatus of the above documents 1 and 2, the holding means holds three nozzle bodies, and the support shaft perpendicular to the substrate is centered to rotate the holding member to reduce three nozzles. The distance between the sub-scanning directions can narrow the coating pitch of the fluid material. On the other hand, a coating apparatus which moves one nozzle in the main scanning direction and whenever the nozzle is in the main scanning direction is disclosed in Japanese Patent Laid-Open Publication No. Hei. No. Hei. During the movement, the substrate is fed in the sub-scanning direction, whereby the fluid material is applied in a stripe shape in a groove between the plurality of partition walls formed in the coating region on the substrate. In the coating apparatus of the above document 3, the organic EL liquid is applied onto the mask = aS1 设置 disposed between the nozzle and the substrate and coated according to the organic EL liquid on the mask: the trace and the substrate The image of the groove is used to correct the inclination of the substrate so that the main scanning direction of the nozzle coincides with the direction in which the groove extends. , 'It is usually in the above device, the adjustment of the nozzle spacing is performed by the chapter, and the confirmation of the adjustment result is also performed by the operation: 22=, so it is difficult to perform the high-precision distance between the two:: When the confirmation result is confirmed, etc., the rotation of the substrate is performed on the non-coated area of the substrate, and when the number of nozzles is the same as that of the non-coated area, the nozzle spacing adjustment cannot be performed. . — — SUMMARY OF THE INVENTION The present invention is applied to a coating material for a substrate coated with a fluid material, 97106432 7 丄^9133 ', with the purpose of 'without applying a fluid material to the substrate, Adjust the distance between the nozzles of the coating device. The coating device of the present invention includes: a substrate holding portion for holding the substrate; a plurality of nozzles 'continuously discharging the fluid material toward the main surface of the substrate, and a nozzle scanning mechanism for causing the plurality of nozzles to be in contact with the substrate The main scanning direction in which the main surfaces are parallel is relatively moved with respect to the substrate. When the preparation moves in the main scanning direction, the nozzle is parallel to the main surface and the main scanning is performed in the complex IU; Relatively moving in the direction of the drawing; testing the coating part, having the test coating surface tested when the substrate is not coated. " the flow material of the above nozzles; testing the coating part advance and retreat, 'make The test coating unit advances and retreats the plurality of nozzles in the main scanning nozzle:is moving path so that the plurality of nozzles at the time of test coating: the distance between the nozzle faces and the plurality of sheets at the time of coating The distance between the main surfaces is equal, and the imaging unit is offset by the pattern of the fluid material of the test coating surface in the direction of the main scanning finger by the plurality of nozzles. The measuring unit detects the pitch of the plurality of H sub-scanning directions based on the image of the imaging unit; the pitch adjusting mechanism adjusts the pitch of the nozzles in the sub-scanning direction; and the second==replacement mechanism s coats the test According to the present invention, the above-mentioned test coated surface of the cloth portion can adjust the distance between the plurality of nozzles without accurately applying the flow of the substrate. In the embodiment, the coating device further includes: a substrate rotating mechanism 97106432 1339133 rotating mechanism, wherein the substrate holding portion is rotated about a rotation axis perpendicular to the main surface of the substrate; and another imaging unit is obtained in the main body An image of a pattern of a fluid material coated with a 3 - wave J-coated coated surface coated with a scanning, direction, and the above-described test coating layer; and a substrate position adjusting portion according to the image capturing portion The image of the pattern of the flowing metal material obtained by the other imaging unit and the Lu image of the positioning symbol on the main surface of the substrate obtained by the imaging unit and the other image unit to control the image The nozzle scanner rotates the substrate rotating mechanism to adjust the relative position of the substrate relative to the plurality of nozzles. By this, the position adjustment of the substrate can be performed with precision. In another preferred embodiment of the present invention, the test coating portion holds a tape holding portion of a portion of the resin tape, and the test coating (4) the main surface of the portion of the resin tape is replaced by the test coated surface. Mechanism: The tape for feeding the resin tape to the above-mentioned t-coating package is supplied to the invention according to the invention. In the embodiment, the test coating surface is opposite to the foundation of the fluid material and the substrate. The same test surface as the main surface, the test coating portion maintains the test piece of the test piece, the above object and other objects, features, aspects and advantages, and can be referred to the accompanying drawings. The detailed explanation is clear. [Embodiment] Fig. 1 is a view showing a coating apparatus according to an i-th embodiment of the present invention, and Fig. 2 is a coating apparatus! Previous view. The coating apparatus 1 is a device for applying a fluid material including a pixel forming material for a flat display device to a glass substrate 9 (hereinafter simply referred to as "substrate 9") for a flat display device 97106432 9^39133. In the present embodiment, the coating apparatus 1 is an active matrix driving method, organic EUEiecti. Luminescence) A substrate 9 for a display device is coated with a fluid material (the following liquid) containing an organic EL material. As shown in FIGS. 1 and 2, the coating device i includes a substrate holding portion ー, and holds the substrate 9 and the substrate moving mechanism 12 in a predetermined direction in which the main faces of the substrate plates 9 are parallel (that is, in FIG. In the γ direction 1 , referred to as “sub-scanning direction, N) u τ Μ ^ ′), the substrate is rotated horizontally; and the substrate rotating machine 2 is rotated perpendicularly to the main surface of the substrate 9 and (4) the β substrate holding portion In ii, a heating mechanism (not shown) that uses heating benefits is provided. 2 Y includes: a CCD camera 13' is a car disposed on the substrate 9; the individual movement is performed in the h direction; the coating head i 4, the nozzles 17 are directed toward the substrate holding portion 11 ± "upper surface") 91 The main surface flat γ of _9 is continuously discharged and the pan head moving mechanism 15 is applied so that the coating 5 pages 14 are perpendicular to the scanning direction of the substrate (i.e., the long direction in Fig. 1, below) , the helmet "+ is Μ τ liquid receiving portion 16 in the direction of the Tuyou 5"); 2 is set in the moving direction of the 4 (ie, the X direction), and is placed on the substrate The holding portion ^ organic EL liquid; and / both sides and receiving the spacing adjustment mechanism 3 from the coating head, and adjusting the distance between the plurality of nozzles 17 on the upper side 97106432. As shown in Fig. 1, the test coating unit 1 for testing and coating the organic EL liquid from the coating head 14 is provided. The coating device 1 includes a control unit 10 for controlling the above configuration. : Normal computer is the same 'The structure of the control unit 10 is from the following parts or goes: cpu into/from various arithmetic processing; the program executed by memory: (10)...the work area of the different processing # _: the basic program of memory, Recalling the various information of the solid disk; showing various assets = display to the operator; and the input department such as keyboard and mouse. Fig. 3 is a block diagram showing the functions realized by the CPU or the like which is controlled by the program according to the program, and the distance detecting unit iqi and the adjusting unit 2 in Fig. 3; The crucible 102 and the substrate position adjusting unit j 〇3 correspond to functions realized by the equations. Furthermore, the material function can also be implemented by a plurality of computers. The coating head shown in Figure 1 is "upper" 16 nozzles 17 in the figure! A χ χ = are arranged in a direction (i.e., 'main scanning direction) to be slightly shifted from the Y direction (i.e., the 'sub-scanning direction') in the middle of Fig. 1 . The distance between the two nozzles 17 adjacent to the present embodiment in the sub-scanning direction is specific to the pitch between the partition walls extending in the main scanning direction formed on the coated filament region of the substrate 9 (hereinafter referred to as " The distance between the partition walls is ") ^ 3 times. Coating device! The substrate 9 is not coated with the organic red liquid. (4) The test coating unit 2 performs the test coating of the organic liquid, and the pitch adjustment mechanism 3 is controlled as a result of the root coating, thereby adjusting the plurality of solid nozzles 17 The distance between the secondary sweeping cats. The method of adjusting the pitch of the nozzles p is described below. 4 and 5 are front views showing a portion of the coating head 14 and a plan view of 97106432 1339133, respectively. As shown in FIGS. 4 and 5, the coating head 14 is provided with an upper surface 91 facing the substrate 9 (see FIG. " 16 squirts for continuously discharging organic sputum, and a nozzle mounting portion 14 to which the 16 nozzles are attached The mouthpiece portion 141 includes a back plate portion 14" substantially perpendicular to the γ direction, and a lower end portion (i.e., an end portion on the (-2) side) fixed to the lower plate portion 14" and substantially perpendicular to the Z direction. The portion 1412. The 16 nozzles 17 are movably mounted on the guide sample 142 extending from the edge of the horizontal portion 1412 toward the (+Y) direction (that is, the sub-scanning direction) on the respective nozzles 17 (]). The nozzle locking portion 173 is provided on the side, and the position of the second nozzle 17 with respect to the nozzle mounting portion 141 is fixed. In the coating device shown in Fig. 1, the 16 nozzles 17 are fixed = the women's portion 141 (refer to Fig. 4). In the state of FIG. 5), the coating head 14 is moved by the coating head 14 while the organic EL liquid is continuously ejected from the plurality of nozzles 17 while moving in the main scanning direction. Then, the substrate 9 is moved by the substrate. = Stepwise movement in the sub-scanning direction ((9) direction). Then, complex: direction 1 is repeatedly moved in the main scanning direction and the sub-scanning direction with respect to the substrate 9, whereby the organic liquid is applied in a stripe shape to the base 2: the t-plane 91. The coating head moving mechanism 15 of the coating device 1 And " 12 is the nozzle scanning mechanism, so that 16 nozzles j 7

Relatively moving with respect to the substrate 9 in the main scanning direction and the J drawing direction. old

Further, the application of the dream cake 1 I (the coffee and the coating:= pitch adjustment mechanism 3 is separately provided in the substrate holding portion 11 of the soil head 14 and the 16 nozzles 17 and the nozzles 97106432 12 1339133 are attached to the mounting portion 141 (see FIG. 4 and FIG. 5) Moving independently of the pitch adjusting mechanism 3 by the coating head moving mechanism 15 of the nozzle scanning mechanism. The pitch adjusting mechanism 3 and the coating head 14 are opposed to the substrate by the nozzle scanning mechanism. The relative movement of 9 is independently configured.

The pitch adjustment mechanism 3 includes a plurality of (16 in the present embodiment) adjustment heads corresponding to the plurality of nozzles 17, respectively. Item 6 and FIG. 7 show a top view and a left side view, respectively, of the plurality of adjustment heads of the pitch adjustment mechanism 3 (the one of the adjustment heads 3G and the portion of the coating head 14). The illustration of the nozzle fixing portion 173 of Fig. 4 and Fig. 5 is omitted for easy understanding. Further, in Fig. 7, for easy understanding, the nozzle mounting nozzle 17<; part of the central axis including the nozzle 17 is shown. In the cross-section adjusting mechanism 3, the configuration of the plurality of adjusting heads 30 is completely the same. As shown in Fig. 6 and Fig. 7, the adjusting head 3'' is provided with: 3b from the (9) side and the (9) side, the first fixing portion 311 and the second = 314 abuts on the horizontal portion of the nozzle mounting portion 141 to fix the nozzle female portion 141; the nozzle abutting portion 32 abuts against the nozzle 17 from the (9) side (that is, the side of the sub-drawing direction); The pressing mechanism 施 applies pressure to the nozzle abutting portion 32 from the opposite side of the nozzle abutting portion 32 (ie, the other side of the nozzle 丨' = the readable direction): the moving mechanism 34' applies a pressing mechanism to the nozzle 33 is pressed _, the nozzle abutting portion 32 is placed at the position in the sub-scanning direction, and the pitch grading mechanism 3 is placed at the nozzle mounting 胄141 In the state in which the first fixing portion 311 of the 31 and the first and second members of the first and second mechanisms are clamped and fixed, 97106432 173 (see the drawing), the nozzle locking portion 332 is released from the cylinder of the control unit 1: 33. In this case, the nozzle control unit 1〇2 (see FIG. 3) is driven from the (-Ό side and the nozzle 331 of the nozzle pressure applying mechanism 33, the tapping unit moving mechanism 34=^=7, the nozzle The abutting portion 32 moves in the direction of the nozzle nozzle in the Y: direction, and the nozzle 17 moves in the direction. Then, the contact is moved in the direction of the nozzle (9). After the distance required for the movement, the nozzle locking portion 173 is operated again to lock the fWni " When the distance between the nozzles is reversed, the lock is released from (-X) :==7, :, and the other nozzles other than the county quasi-nozzle are moved upward, and each nozzle 17 is adjusted to set 15 nozzles 17 to the sub-scanning side. The distance between the drawing direction and the reference nozzle is set to the position of the nozzle 丨7 of the structure 3, and the distance from the immersion machine (4) is performed by the following method: root separation = trial coating The image of the EL liquid is detected by the early detection of the spear cloth of FIG. 3, and the distance between the nozzles is detected from the detecting unit 101, and the basis is determined (that is, the detection result according to the spacing detecting unit 101) The control unit 102 controls the pitch adjustment and adjustment mechanism 34 (see FIGS. 6 and 7). 1 Abutment portion movement mechanism 97106432 1339133 As shown in FIG. 1, the test coating unit 2 is provided with two test coatings. The platform portion 2 is disposed on the (9) side of the substrate holding portion u, and is disposed so as to be opened in the X direction and substantially at the same position in the Y direction and the central liquid receiving portion 22, in the two test coating platform portions 21 The direction extends in the direction of the yaw and the both ends are fixed to the test (four) platform portion 21. Each of the dragon coating platform portions is movably attached to the rail 121 of the substrate moving mechanism 12 via the slider 211 (see FIGS. 8 and 9), and is fixed to the substrate holding portion 11 via the connecting portion Hi. ±. Coating device! The substrate holding portion U is in. The substrate moving mechanism 12 moves in the γ direction, and the test coating unit 2 also moves in the γ direction with the substrate holding portion i. 8 and 9 are respectively a left side view and a rear view i 8 of the test coating platform portion on the (+χ) side, and a part of the substrate moving mechanism 12 in the same manner as in FIG. 9, which is also shown in FIG. The central fluid receiving portion is depicted. The P-knife is also shown for convenience. The cross-section of the outer casing 212 of the test coating platform portion 21 is depicted in Figs. 8 and 9 (the same applies to Figs. 13 and 15). In Fig. 9, the scraping surface of the resin tape 213 is also depicted. In the coating device ι, the test coating stage portion 21 on the (-X) side shown in Fig. 1 also has substantially the same structure as the test coating platform portion 21 on the (+ χ) side shown in Figs. 8 and 9 . . As shown in FIGS. 8 and 9 , the test coating platform unit 21 includes a slider 21 , which is movably attached to the rail 121 of the substrate moving mechanism 12 , a case 212 fixed to the slider 2 , and a resin tape 213 . This is a test coating member that performs test coating of an organic EL liquid; the tape holding portion 214 holds a portion where the resin tape 213 is subjected to test coating on the upper portion of the outer crucible 212; the tape supply portion 215 remains unused ( That is, the roll-shaped resin tape 213 having the test coating of 97106432 丄339133 ^ shed liquid is not carried out, and the tree 2 213 is fed out and supplied to the tape holding portion 214; and the tape is recovered, 纟The two organic EL liquid test coated resin tape 213 was used for partial winding recovery. In the present embodiment, a resin tape of the type of eSulilde is used as a resin (four). The second embodiment of the test coating unit portion 21 is provided with a winning tape. The second 15 and the tape collecting portion 216 are rotated by the horse $2171 and the worm wheel 2, and are disposed in the (+χ) side test coating platform portion 21 of the tape holding portion 214, and are disposed in the winning tape holding portion 214 (_χ) = = The outer liquid receiving portion 218, the outer liquid receiving portion 218, and the central liquid receiving portion disposed on the side of the tape holding portion (on the side of the test coating platform portion 21 on the side of the tape holding portion 214) 22 together, it is disposed slightly below the resin tape 213 held by the tape holding portion 214 (that is, the '(-Ζ) side). In the platform portion 21, the tape supply portion 215 and the tape recovery portion 216 are respectively rotated by the counter rotation of the motor 2171 by the rotation of the motor 2171. Thus, in the tape holding portion 214, the resin tape reaches a predetermined length. The unused portion of the resin tape 213 is located in the tape holding portion 214. As shown in FIG. 8, the test coating is provided with a sensor 2 (5)' which detects the resin knee band 213 which is sent out from the tape supply portion 215 between the tape supply portion 215 and the tape holder, and the rubber π collection portion 216 The resin tape 213 having a sensor 2 ΐ 6 ι in the vicinity is recovered by winding of the tape collecting portion 216. In the test coating platform portion 21 of the belt 97106432 16 belt 213, the main surface of the portion (8) side held by the resin rubber m portion 214, EL = a plurality of nozzles 17 (refer to the organic liquid L discharged from the drawing) Test of the coated surface 2131 'The above-mentioned one of the resin tape 213 = the tape holding portion 214 becomes / = g σ having the test coated surface (10), and the tape supply portion and the (four) recovery portion 216 for supplying and recovering the resin tape 213 become The test coating surface of the test coating section is replaced with a new (four) test coating surface test coating surface replacement mechanism. For the Lu, the test coating unit 2 is provided with two test coatings separately disposed in the main scanning direction. The cloth surface 2131 and the two test coated surface replacement mechanisms for individually replacing the test coating surfaces of the two test coated surfaces 2131. FIG. 10 shows the tape holding portion shown in FIGS. 8 and 9. As shown in FIG. 8 to FIG. 10, the tape holding portion 214 includes a tape suction portion 214 disposed on the (_ζ) side of the resin tape 213 (that is, on the opposite side of the fish test coated surface 2131), and Adsorbing resin tape 213; tape according to the wish section 2142, 酉 has been placed in the resin glue The (10) side of the belt 213 (that is, disposed opposite to the test coated surface 2131), and pressing the vicinity of the test coated surface (10) of the resin tape 213 toward the tape suction portion 2ΐ4ι; (4) the elevating mechanism 2143 The tape pressing portion 2142 is moved up and down in the ζ direction, and the pressing portion moving mechanism 2144 moves the tape pressing portion 2142 and the pressing portion lifting mechanism 2143 in the Υ direction. The winning tape suction portion 2! 41 is provided with the holding resin tape 213 and held by the substrate. The upper surface 9U of the substrate 9 on the portion 11 is referred to as a parallel holding plane 2145'. As shown in FIG. 10, the tape pressing portion 2142 is provided with a test coated surface 2131 of a resin adhesive 97106432 17 1339133 tape 213 (+ γ). Two claw portions 2146 extending in the χ direction on the side and the (_γ) side. In the tape holding portion 214 shown in Figs. 8 to 10, the tape pressing portion 2142 is lowered by the pressing portion elevating mechanism 2143, and is slightly curved toward the (+2) side on the tape suction portion 2141. The resin tape 213 is pressed by the two claw portions 2146 toward the accompanying plane 2丨45 of the tape suction portion 2141. Then, the resin tape 213 is vacuum-adsorbed by the tape suction portion 2141, whereby the test coated surface 2131 of the resin tape 213 is fixed in a smooth state to the holding plane 2145 of the tape adsorption portion 2141, and above the substrate 9 The surface 91 (see FIG. υ has the same height. In the test coating 2, the tape adsorption portion 2141 and the tape pressing portion 2142, the tape coating portion 2131 of the adhesive tape 213 is fixed to the tape fixing portion: in the tape adsorption portion 2141 After the resin tape 213 is adsorbed, the tape pressing portion 2142 II is lifted by the pressing portion lifting mechanism 2143, separated from the resin tape 213, and moved by the pressing portion moving mechanism 2144 in the (+ 1 〇 direction) from the test coated surface 2131. Next, the preparation operation of the coating device 1 before the application of the organic EL liquid on the substrate 9 will be described. The preparation operation of the coating device j is the plural of the coating head 4 shown in Fig. 1. The nozzles 17 are adjusted in the sub-scanning direction. The pitch (hereinafter referred to as "nozzle pitch") is adjusted, and the relative position of the substrate 9 with respect to the nozzle π is adjusted, and the EL liquid is applied to the substrate 9. Fig. 11B and Fig. 11B are flow charts of the preparation operation of the coating device (the adjustment of the nozzle pitch and the position adjustment of the substrate 9). In the coating device 1, the substrate holding portion i is firstly operated as shown in Fig. 18 is moved in the (-Y) direction, and as shown in Fig. 12, the test coating unit portion 21 V, the test coating unit 2 17 is in the main sweep γ square & p 〇 α; the plurality of coating heads 14 The nozzle is in the direction of the movement of the nozzle (also, the path of the pair of movements). The test coating position is below the two aD cameras 13 in the phase coating (step called mechanism, w/ 'substrate moving mechanism 12) The test coating unit advancing and retracting mechanism ‘the test coating unit advancing and retracting mechanism: the retracting coating unit, that is, the winning belt holding unit 214 (refer to FIG. 8 to the cloth moving sound in the main scanning direction). = cloth: element 2 does not necessarily move with the substrate holding portion 由 by = = mechanism 12 is independently driven to drive other test coating = J = for example, is set on the pole of the rodless cylinder or substrate moving machine (four) The mouth moves the part)', so that the test coating unit 2 is in the plural, 觜7 in the main scanning direction Advancing and retreating on the moving path. When the test coating unit 2 is at the test coating position, the organic sputum is ejected from the plurality of nozzles 17 of the coating head 14 toward the liquid receiving portion 16 on the (+χ) side and the coating head is driven. The moving mechanism 15 causes the coating head 14 to start moving. Then, the same organic liquid is continuously discharged from a plurality of nozzles 17, and as shown by the two-point chain line of Fig. 12, the coating head 14 is at (+χ). The side of the liquid receiver 16 is moved in the main scanning direction on the liquid-receiving portion 16 on the (-Χ) side, thereby being held by the tape holding portion 214 on each of the test coating platform portions 21 of the test coating unit 2. The test coating surface 2131 (refer to FIG. 8 to FIG. 1) of the resin tape 213 is coated with an organic mash in a stripe shape (step si2). At this time, as described above, the test coated surface 2131 of the resin tape 213 is 97106432 19 1339133 : = "The upper surface 9 of the upper substrate 9 has the same height, so = the distance between the plurality of nozzles 17 and the test coated surface of the resin tape 213, and the organic EL liquid on the substrate 9: The complex: the distance between the solid nozzle η and the upper surface 91 of the substrate 9 is equal: machine EL; r ::] test coating flat Between the portions 21, 17 discharged from the nozzle of the liquid-liquid organic el receiving portion 22 receiving the towels central, 2131 and between the fluid receiving portion ι6, a liquid Jing reference to FIG. 9) in the receiving test depends on the coated surface of the coating. The organic EL liquid is photographed from the outside and then the CCD camera 13 is used to photograph each of the test coating platform portions 2 = the coated surface 213 to obtain an image of the organic striped pattern applied on the test coated surface 2ΐ3ι, and transmitted to the control. The portion W between the portions W is referred to FIG. 3) (step S13). The detecting unit 101 detects the respective distances between the center lines in the sub-scanning direction based on the center line of each line of the CCD camera 13 on the (9) side, such as the 'finding_EL liquid (that is, two nozzles adjacent to each other in the sub-scanning). 17 distances are used as the nozzle pitch (bovine: Si?. Furthermore, the distance detection (4) 1〇1 detects the nozzle pitch and can be performed on the image obtained by the CCD camera 13 on the '= (-X) side, and It is performed by both the images acquired by the two CCD cameras 13 (for example, the nozzle pitch of the distance between the nozzles 17 obtained from the two images). Then, the reference nozzle is obtained from the (_χ) side. The 8th nozzle = the distance between the 15 mouths and the mouths of each of them 15 and according to the pitch of the mouth (as mentioned above, this embodiment refers to a distance equal to 3 times the heart = 97106432, hereinafter referred to as "Do you want to adjust the position of each nozzle 17? (Step: "To confirm: "4" The relative position of the quasi-nozzle is the η operation of the nozzle at the predetermined position. ^The position (4)' and the end of the nozzle spacing is reversed. It is judged that it is necessary to perform the nozzle pitch obtained by the nozzle, according to Above ^ ^ 15 ^ ^ ^ 101 ^ ^ The amount of movement in the direction of the drawing (hereinafter, only ""tm) in the sub-scan =:::. All moving nozzles need to be nozzles...: Two find two sprays and two 7 wide After the second momentum, the action of stopping the coating head 14 to discharge the organic mechanism 15 is indicated by the dotted chain, and the coating head movement adjusting mechanism 3 moves toward the (+Χ) side of the head 14 and is positioned at the distance. Each of the adjustment heads 30 is at a position. Then, the pitch adjustment mechanism 3 is used by the first fixed portion 311 and the second fixed == fixed machine (using the first and second strong additions 31 of FIGS. 6 and 7). + Ό 来 夹持 喷嘴 141 141 141 141 141 141 141 141 141 141 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 The moving nozzle is controlled by the sub-sweep 102 (refer to the adjustment mechanism control unit of the control unit 10 as the switch 1 to control the contact between the drive unit 30 of the adjustment head 30 Β 5 and the entire mechanism 3 corresponding to each of the moving nozzles. The stepping motor 343 of the moving mechanism 34 97106432 21, and the nozzle abutting portion 32 is pressed downward, and the nozzle (4) mechanism 33 The calculated movement amount 2 is based on the movement of the nozzle moved by the pitch detecting unit 101 in the sub-scanning direction, = step; S15i). When each position is locked by the locking portion operating mechanism again. = Temple = moving nozzle position The nozzle does not need to enter the rod 仞 1 * 再 再 再 再 再 再 杜 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再The mounting portion fixing portion 314 is separated from the water fitting portion 141 of the nozzle mounting portion 141 and the nozzle mounting portion 141 of the second fixing head 14 so that the coating head 14 faces the liquid receiving portion 16 on the (+X) side. On ^ divided. The applicator nozzle 17 shown in Fig. 12 discharges the organic EL liquid. The movement is started and started from a plurality of spray coating devices 1 based on the movement determined by the pitch detecting unit 101! 'Adjusting by the addition of one reference nozzle: that is, all moving nozzles, s丨丨 — 士 士 士 士 士 士 士 士 士 薄 薄 薄 薄 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别 个别

Bird spacing. In the present embodiment, the nozzle pitch is adjusted at 12〇7〇〇 J. Further, in the case of coating 1 in the clothes, the 16 nozzles can be individually moved in the direction of the sub-trace to adjust the nozzle pitch. . . When the movement of the movable nozzle in the sub-scanning direction is completed, the adsorption of the resin tape 213 by the glue = attachment portion 2 (4) shown in Figs. 8 to H) is released on each of the test coating platform portions 21 of the test coating. 2, v, under the action of the pressing portion moving mechanism 2144, the tape moves in the (-Y) direction by the dust portion J42 and is positioned above the tape suction portion 2 (4) by the horse far $ shown in FIG. 】 71 η. Driven by the drive 2171, the resin tape 213 in the tape holding portion 214 shown in the circle 8 to FIG. 1A is conveyed toward the (+ 〇 direction) by a predetermined length, and the new test coated surface 2131 is placed on the tape suction portion 2141. Next, under the action of the pressing portion elevating mechanism 2143, the tape pressing portion 2142 is lowered and the resin tape 213 is pressed toward the tape suction portion 2141, and the resin tape 213 is adsorbed by the tape suction portion 2141, thereby applying the test coating. The cloth surface is replaced with a new test coated surface 2131 and fixed on the holding flat surface 2145 (step S152). When the resin tape 213 is adsorbed, the tape pressing portion 2142 is withdrawn from the test coated surface 2131. 1 Test coated surface After the replacement of 2131, the process returns to the step, and the coating head 14 is moved toward the (_χ) direction while discharging the organic sputum from the plurality of nozzles n, and the organic EL is applied to the two test coated surfaces 2131 of the test coating unit 2. Liquid (step S12). Next, the CCD camera 13 obtains a pattern image of the «EL liquid on the test coated surface 2131, and detects the nozzle pitch by the pitch detecting unit 101 to confirm whether the nozzle is required. Then, the adjustment is performed (steps S13 to S15). Then, the following operations are repeated until it is determined that the nozzle position is not required to be adjusted, that is, the movement of the squeegee 17 in the sub-scanning direction by the pitch adjustment mechanism 3, and the test coating Replacement of the cloth surface 1 (steps S151, S152), and (4) of the organic EL liquid on the test coated surface 2131, detection of the nozzle pitch, and confirmation of whether or not the nozzle position needs to be adjusted (steps S2 to Si5). (4) At the end, the two images of the organic liquid pattern on the "measured surface 2" of the two (10) cameras 13 are judged to be images without adjusting the nozzle pitch, hereinafter referred to as The position of the organic sputum in the image is determined by the substrate position adjustment 97106432 23 丄 339133 portion 1 〇 3 (see FIG. 3) of the control unit i 0. Then, the position in the drawing direction of the organic sputum in the image is obtained. The offset of the pattern position in the final image captured by the CCD camera 13 on the (_χ) side in the sub-scanning direction is obtained from the CCD camera on the (+χ) side and the final image of the 13-inch camera. Hereinafter, it is called "position offset") (step S I6) Next, the imaging unit moving mechanism 丨3a on the (-X) side is controlled by the substrate positioning unit 103, and the (10) camera 13 moves in the sub-scanning direction by a distance equal to the positional shift amount. And adjust 2 (5) (10) = phase setting (step S17). Thereby, the line of the camera area of the two cameras 13 is parallel. Specifically, when the (_χ) side (10) camera 13 is the most 炊 L ^ two organic The pattern of the EL liquid and the final image on the (9) side are shifted from the ((X) side of the CCD camera 13 toward (1)), and when shifted toward the (9) side, the (10) side (10) camera 13 (9), moving. Further, in the state where the position adjustment of the CCD camera 13 in the coating apparatus is fixed, the CCD camera 13 on the (-X) side is moved, and the movement is performed by moving (the side CCD camera 13; #丄). 'Also can be hunted by both CCD cameras 13 : CCD camera 13 position adjustment is completed, under the substrate moving mechanism a, the substrate 9 and the substrate holding portion u and test = 7: move ' and as shown in Figure 1 As shown by the line, the substrate 9 is located below the CCD camera 13 (step _. At this time, on the substrate 9, it is not near the two corners of the (;+Υ) side and the outside of the coating area ^ V Two positioning marks 93 (see Fig. 12), 97106432 24 (1) 9133 are not placed in the imaging area of the two CCD cameras 13. On the substrate g, the centers of the two positioning marks 93 are connected. The straight line is parallel to the plurality of grooves of the coating area. Then, the two CCD cameras 13 image the two positioning marks 93 on the substrate 9 under the control of the substrate position adjusting unit 3 (step S19). The distance between the centers of the positioning a-numbers 93 in the sub-scanning direction is obtained from the images of the two positioning marks 93, and the distance between the centers of the positioning marks 93 in the main scanning direction is based on the previous recall. The offset amount (that is, the inclination) of the substrate 9 in the rotational direction is obtained. Then, the substrate position The adjustment unit 103 rotates the substrate 9 by controlling the substrate rotation mechanism 12a in accordance with the offset of the substrate 9 in the rotational direction, whereby the relative positions of the two positioning marks 93 with respect to the CCD camera 13 in the sub-scanning direction are equal. (Step S20) As described above, in the coating device i, the two CCD cameras 13 are opposed to the plurality of nozzles 17 (the lines of the organic EL liquid discharged from the plurality of nozzles 17 and applied to the substrate 9) The relative positions in the scanning direction are equal to each other. Therefore, the relative positions of the two positioning marks 93 with respect to the CCD camera 13 in the direction of the sub-sweeping are equal to each other, whereby the two positioning marks (10) are opposed to the plurality of nozzles 17 (from plural The relative positions of the nozzles 17 and the organic EL liquid applied to the substrate 9 are equal to each other in the sub-scanning direction. That is, the grooves between the partition walls of the coated region on the substrate 9 are opposed to the main scanning direction. The movement trajectories of the plurality of nozzles 17 are parallel. Thus, in the coating device i, based on the image of the organic EL liquid pattern obtained by the two CCD cameras 13, and the 97106432 25 1339133 obtained by the two (10) cameras i 3 Image, base Cloth rotation movement mechanism 12a ^ of the substrate 10 by the control of the position cf ς β 103 / Control Referring to FIG 3) of 'whereby to adjust the relative position 17 with respect to the plurality of nozzles 9 complex substrates. When the position of the 7th soil plate 9 is completed at the end of the 5th week, the coating head moving mechanism = the coating head 14 - continuously ejects 1 EL liquid from the plurality of nozzles 17 and moves in the main scanning direction. And every month, in the direction of the movement, the substrate 9 is moved by the substrate moving mechanism 12 toward the sub-study direction (( + γ) direction 1 喑 喑 peak h. Then, a plurality of Π are repeatedly performed with respect to the substrate 9 for main scanning The direction and the sub-scanning side are coated with two H or until the substrate 9 is positioned at the m-line shown by the two-dot chain line in Fig. 1, whereby the organic EL liquid is applied to the plate 9. The soil 呷 丞 is as described above. The cloth device i is used to test the finishing unit 2, the cloth surface 2 is coated with the organic (3) liquid, and the spray is detected according to the image of the (four) liquid pattern on the test coated surface 2131 taken by the camera 10 (10). Further, based on the detection result, the pitch adjustment mechanism 3 is used to adjust the pitch of the plurality of nozzles 17 in the sub-scanning direction. Thereby, the pitch of the plurality of nozzles 17 of the coating device 1 in the sub-scanning direction (that is, the nozzle pitch) can be adjusted with high precision without applying the organic EL liquid to the substrate 9 〇, 敕 = 'Test coating with non-coated areas on the substrate to adjust: different nozzle spacing' can be used regardless of the relationship between the number of nozzles and the size of the non-coated area (ie, testing the area required for coating) In the case of the relationship between the size and the size of the testable coating area on the substrate 97106432 26 1339133, the nozzle pitch is adjusted with high precision. Therefore, the structure of the coating device is particularly suitable for a coating device having a plurality of nozzles (for example, eight or more). Further, since the coating device and the towel are not subjected to test coating on the substrate, it is possible to prevent the particles which are generated from the organic EL material after the test coating is dried, and the coating quality of the substrate 9 can be improved. In the earthenware apparatus 1 'the distance between the nozzle 17 at the time of test coating and the test coating surface 2+131 in the z direction and the application of the organic sputum to the substrate 9 and the upper surface of the substrate 9 Since the distance between the 91 and the z direction is opposite, the discharge distance of the organic sputum when the organic EL liquid is applied onto the substrate 9 is equal to the discharge distance at the time of test coating. Assuming that the difference in the discharge distance between the coating on the substrate and the test coating is large, the distance between the lines of the plurality of coated organic EL liquids may vary, but in the coating device 1 of the present embodiment. The influence of the difference in the discharge distance on the substrate 9 and the test coating can be prevented, so that the nozzle door distance can be adjusted with higher precision. Furthermore, the coating device! In the range in which the influence of the difference in the distance between the discharge distance and the line distance of the organic EL liquid can be prevented, the distance between the nozzle 17 and the test coated surface 2131 in the z direction during the test coating, and The distance between the nozzle 17 when the organic EL liquid is applied to the substrate 9 and the surface 91 of the substrate g is slightly different in the z direction, and the visible distance is substantially equal. In the coating platform portion 21, the test coated surface 2131 is used as the main surface of the resin glue, and the resin tape 213 is sent out to the tape holding portion 214 by the tape supply portion 215, whereby it can be easily used (also That is, the test coated surface 2i3i after the test coating of the 97106432 27 1339133 organic EL liquid was replaced with a new unused test. Coated surface. In the tape holding portion 2, the test coated surface 2131 of the resin tape 213 is fixed and flattened by the tape suction portion 2141 and the tape pressing portion 2142, and the test coated surface 2131 is interposed between the test coated surface 2131 and the plurality of squirts 17. The distance is kept fixed', whereby the spray can be detected with higher precision. In the 4 k cloth unit 2, the test coated surface 1 of the test coating platform portion 2 is tested and coated by the k-bundle 14 Only a part of the relative movement paths of the nozzles ^7 in the main scanning direction overlap. In other words, the test coating surface 131 is disposed on the moving path of the plurality of nozzles 17 under the action of the k-boom moving mechanism 丨5, so that the organic EL liquid can be applied. The area of the coated surface was measured to change the amount of the nozzle 4 applied to 2131. The result is a reduction in the cost of the jet spacing. In the coating apparatus 1, the pitch of the pitch nozzle is controlled by the adjustment mechanism control unit 102 based on the distance between the control unit 10 and the distance detecting unit 101. The fruit of h: the second moving mechanism 34' thus automatically adjusts the working time and labor required for the adjustment of the nozzle spacing. Further, the door::: the entire nozzle 17) can be adjusted to the latitude by the whole of the nozzles (or the plurality of nozzles 17 are individually moved upwards). The distances in the uranium direction of a, Tian Performing individual and high-precision attack 1 'based on the two test coatings 97106432 28 on the cloth surface 2131 which are separated in the main sweeping direction, the top plate 9 coated with the main scanning direction is '« and in the base image. Adjusting the substrate 9 relative to the two=2 two positioning marks 93, the organic coating applied by the plurality of nozzles 17: the position 'by the plurality of grooves on the domain accuracy: good: the coating of the liquid two and the substrate 9 The substrate and the crucible can be accurately placed in the area. Further, since the adjustment of the nozzle pitch can be adjusted by the configuration of the nozzle pitch adjustment, the structure of the coating device can be simplified. The two test coating platforms 21 of the structure are configured to hold two tapes that are fixed to the two test coated surfaces 2131. P 214 and two tape supply units 215 that replace the two test coated surfaces 2131, respectively. And two tape collecting portions 216, whereby the structure of the coating device 1 can be further improved Next, a coating apparatus according to a second embodiment of the present invention will be described. The coating apparatus of the second embodiment includes two test coatings different from the structure of the test coating stage unit 21 shown in Figs. 8 and 9 . The platform portion 21a is the same as the coating device 1 shown in Figs. 1 to 7, and the same reference numerals are used in the following description. Fig. 13 shows the test coating platform portion 21a on the (+χ) side. The left side view. Also shown in Fig. 13 is a portion of the substrate moving mechanism 12. In the coating apparatus of the second embodiment, the test coating platform portion 21 & on the (_χ) side is also shown in Fig. 13 (+ The test coating platform portion 2ia on the side has the same structure. As shown in Fig. 13, the test coating platform portion 21a is provided with a slider 211 movably mounted on the road 121 of the substrate moving mechanism 12; 97106432 29 1339133 212 'fixed on the slider 211; the test piece 213a is a test coating member for performing test coating of the organic El liquid; the test piece holding portion 214a, and the test piece 213 at the upper portion of the peripheral device 212 a is held; the test piece housing portion .215a' is attached to the test piece 213a On the (-Z) side, a plurality of test pieces 213b (hereinafter referred to as "waiting test pieces 213b") which are not used (that is, which have not been subjected to test coating of the organic EL liquid) are stacked and held (magazine) The extruding mechanism 216a is a cylinder that presses the test piece 213a held by the test piece holding portion 214a toward the (+Y) direction; and the test piece collecting portion 217a' is received by the pressing mechanism 216a from the test piece holding portion 21 The test piece 213a is formed by the same material as the substrate 9 in which the test piece 213a is formed of the same material as the substrate 9 with the same wettability as the organic EL liquid. X, on the main surface of the (10) side of the test piece 213a = a film formed on the substrate 9 before the application of the organic EL liquid (for example, / returning to the hole transporting material) #pq + $ , the side of the main...: ί Film 'and test piece 213wz) face: The upper surface 91 of the substrate 9 has a phase = (ie, 'substantially equal'). Furthermore, it is also possible to select the main surface of the (+Ζ) side of the slab 213a by the appropriate selection = 忒 213a.

The test coating surface 2131 for the main surface liquid of the mouth side is applied, and the organic EL holding portion 214a which is discharged from the field image D is provided with: a test piece for holding the test piece 213 & The test coating portion of the coated surface 2131. 97106432 1339133 Fig. 14 is a plan view showing the vicinity of the test piece holding portion ma. As shown in Fig. 13A|..14, the test piece holding portion 2i4a has a substantially rectangular frame shape. _接# 2147, which abuts on the test coated surface 213 of the test piece 213a and determines the z direction (that is, with the test). The position of the test coated surface 2131 on the coated surface (10) in the vertical direction). The test piece 231a of the test piece holding portion 2143 is coated toward the test piece by a plurality of waiting test pieces 2l3b by the test piece accommodating portion 215a opposite to the test coated surface 2131 of the test piece (10), that is, the '(one) side). The surface abutting portion is called to press to press the test coated surface abutting portion 2 to 47. The coating plate portion 21a is tested, and the pressing mechanism is driven to be pressed out of the test piece 213_(9) of the test coating surface abutting portion 2147 and taken out from the test piece holding portion 214a. Then, in the plurality of waiting test pieces (10) accommodated in the test piece accommodating portion 215a, the uppermost waiting test test 4 legs are pressed toward the application surface contact portion 2147 of the slide holding portion core to be held in the test. The new test piece core in the sheet holding portion 2Ua's main surface of the (+Z) side of the test piece (10) becomes a new test coated surface 213, that is, in the test coating stage portion 21a, the pressing mechanism 216a becomes The test piece 21, such as the test piece take-out portion, is taken out from the test piece holding portion 2Ua, and the test piece accommodating portion 215a and the ejector mechanism 21 are replaced with the test coated surface 2131 of the test piece holding portion 214a as a new test coated surface. Test the coated surface replacement mechanism. In the flow of the preparation operation (the adjustment of the nozzle pitch and the position adjustment of the substrate 9) in the second embodiment, the replacement of the test coated surface 2131 in step S152 shown in Fig. iu is performed. The change from the use of the tree 97106432 1339133 = the sender of the belt 213 to the replacement of the test piece 213a is the same as that of the first embodiment. , = 2 shell % of the coating device, and the first! In the same embodiment, the organic coating t is applied to the coating coating surface 2131 of the coating unit 2 (refer to (4) and the image of the organic EL liquid on the coated surface 2131 is tested according to the "double sneezing pitch" and then according to the detection. As a result, the pitch of the plurality of nozzles m in the sub-sweep direction is adjusted with reference to FIG. 1). Thereby, it is possible to adjust the coating with high precision without applying the organic EL liquid to the substrate 9 (see FIG. 1). The pitch of the plurality of nozzles 17 of the cloth device in the sub-scanning direction (that is, the nozzle pitch). In the coating device of the second embodiment, the test coated surface 2ΐ3ι is particularly used as the wettability with respect to the organic EL liquid and the substrate. 9 is the main surface of the test piece 213a which is the same as the upper surface 91, whereby measurement errors or the like due to the difference in wettability between the test coated surface 2131 and the upper surface 91 of the substrate 9 can be prevented, and the nozzle pitch can be detected with high precision. • On the test coating platform portion 21a, a test piece accommodating portion 215a having a plurality of % to-be-tested pieces 213b on the (_z) side of the test piece 213a is provided, and the ejector mechanism is used to measure s The test piece 213a' is pressed out in the sheet holding portion 214a and will be new The test piece 213a is pressed toward the test coated surface abutting portion 2丨47 of the test piece holding portion 2i4a to configure a new test coated surface 2131. Thus, the test coated surface 2131 can be easily replaced, and The distance between the test coating surface 2131 and the plurality of nozzles 17 is kept constant, and the nozzle pitch can be detected with higher precision. The embodiment of the present invention has been described above, but the present invention is not limited to the above-described embodiment. For example, the test coating platform portion 21 of the coating device 1 of the first embodiment is used to adsorb the resin tape 213 by the suction force of the tape adsorption portion 2141 in the tape holding portion 214. When the test coated surface 2131 is fixed in a smooth state, the tape pressing portion 2142, the pressing portion lifting mechanism 2143, and the pressing portion moving mechanism 2144 may be omitted, and only the tape suction = 2141 is used as the test coating for fixing the resin tape 213. The tape fixing portion of the cloth surface 2131. Further, it is also possible to fix the resin tape 213 by pressing the tape pressing portion 2142 without performing the adsorption of the tape suction portion 2141. The cloth surface 2131. In this case, only the tape pressing portion 2142 is a tape fixing portion. In the preparation operation of the coating device 1, the nozzle 17 is moved by the pitch adjusting mechanism 3 in step S151 and the test coating in step 叩2 is performed. The replacement of the surface (10) may be performed in parallel, or the step S152 may be performed before the step siH (the same applies in the second embodiment). Further, the (four) mark captured in the S18 is not necessarily the position set on the uncoated region. For the special mark, in the second example, a part of the partition formed in the coating area or the uncoated wiring may be used as the positioning mark. — Pitch adjustment machine broadcast ^ φ _ Dance 3 Shen can use one adjustment head 30 to sequentially create & = nozzle position adjustment in the sub-scan direction, two: : Set a number of adjustment heads 3. . Condition: The coating head moving mechanism 15 is sprayed by the coating: 2: The position corresponding to 30 is sequentially followed by I, and the one nozzle 17 of the adjustment is moved. Further, when 'the number of nozzles' is a ground nozzle, the adjustment head 30 does not adjust the position of the reference 97106432 33 丄 nozzle. Movable: fixed to the nozzle; "" can also be 17 in the sub-scanning direction (or 'except 1;: f7:: set: ' does not necessarily need to move all nozzles individually, solid:: Yes The nozzle H) is operated by the spraying mechanism of the plurality of nozzles 17 in the sub-scanning nozzle mounting portion, and the center of the second:: different spacing adjustment mechanism of the mechanism 3 only rotates the minute corner sound - the vertical turning axis is the spacing In addition, the coating device changes the detection result of the nozzle distance in the sub-scanning direction, and the adjustment can be performed according to the mouth. The four-position system (4) is manually operated to construct the position adjustment system of the it9. When the coating is adjusted by the nozzle pitch = 3 =: _, it can be adjusted with high precision in the case of the test and the above-mentioned second case. =: The substrate 9 is coated with organic _ Figure 15 shows The test coating unit 2a of the resin tape 213 is used for the rear view of the example. For the test coating unit 2 shown in Fig. 15, the difference is '8' and only the direction of the substrate is set (i.e., the main scan) ^向) The wider width of the coating coating platform # 21b. In the tape holding portion 214 of the upper portion of the coating platform portion 21b, the resin tape 213 extends in the X direction, and its extension length is substantially equal to the width of the substrate in the X direction. The tape holding portion 214 of the test coating unit 2a is spread over the resin tape. In the state in which the two test coating surfaces (10) in the vicinity of the both ends of the resin tape 213 in the X direction are fixed by the tape suction portion 2141, the CCD camera is used. Shooting: In this way, the nozzle pitch is detected in the same manner as in the above embodiment, and the information necessary for the board position adjustment is adjusted. In the alumina test coating platform portion 21b, the resin tape 213 is made into a ring shape and coated in one test. At the end of the cloth, it is conveyed counterclockwise in the ® 15 . Thereby, the used test coated surface 2131 is replaced with a new test coated surface. Also, the used test coated surface 2131 is 'utilized with a sprayer (10) Spraying the cleaning liquid and removing (4) the (IV) EL material using an air knife 2192 so as to be used as a new test coated surface. Further, the test coating platform portion 21b t configuration may also be A tape supply unit and a tape collecting unit are provided on the (8) side and the (9) side, respectively, and the used test coated surface is wound and recovered. The coating device t of the embodiment may be used instead of the substrate moving machine. The substrate 9 and the substrate holding portion 1 are moved [moved, but the relative movement of the substrate 9 in the sub-scanning direction with respect to the coating head 14 is performed by the movement of the coating head 14 in the sub-scanning direction. Instead of using the coating head moving mechanism 15 to move the coating head 14, the coating head 14 in the main scanning direction may be opposed by the movement of the substrate 9 and the substrate holding portion 11 in the main scanning direction. Relative movement of the substrate 9. In the coating apparatus of the above embodiment, the number of the nozzles provided on the coating head 14 is not limited to sixteen, and three or more may be used. In the coating apparatus, for example, three types of organic ELs including red (R), green (G), and blue Γ organic EL materials may be included in the three nozzles 17 provided on the coating head 14 in portions 97106432 35 1339133 = / can not go out. In this case, the distance between the two adjacent sprayed substrates 9 is adjusted to be equal to the distance between the partition walls. 'In the direction of the device 2, a hole material including a pixel forming material (hereinafter referred to as "hole transport liquid") may be applied: a material of the hole transport layer "so-called "hole transport" =, π Λ machine EL_ formed in the organic EL layer, the narrow hole transport layer of the hole, which also includes a hole injection layer for hole injection.

The coating apparatus is not necessarily used for L: or liquid coating for an organic EL display device. For example, a liquid crystal display device may be used for coating a substrate for a flat display device, and may be used for coating a material and A case where a liquid material such as a fluorescent material forms a material of a material.

In the above, the application of the organic EL ', the hole transport liquid to the substrate for the organic EL display device, and the application of the fluid material including the pixel formation material to the substrate for another flat display device are performed. The greening of the flowable material is required to have a high positional accuracy. As described above, since the coating device can adjust the distance between the plurality of nozzles 17 with high precision, it is particularly suitable for coating the organic EL liquid and the hole transporting liquid on the substrate for the organic EL display 7F. The substrate for the flat display device is coated with a fluid material including a pixel forming material. 97106432 36 1339133 The coating apparatus is used for coating various fluid materials on various substrates such as a glass substrate for a magnetic disk or a magneto-optical disk, a ceramic substrate, and a recording plate. The present invention has been described and illustrated in detail above and is not intended to be limiting. It is therefore to be understood that the description of the "," is merely an exemplification, and various modifications and various aspects are possible without departing from the scope of the invention. [Simple description of the map]

Fig. 1 is a plan view of a coating apparatus according to a first embodiment. Figure 2 is a front view of the coating apparatus. Fig. 3 is a block diagram showing the function of the control unit. Figure 4 is a front elevational view showing a portion of the coating head. Fig. 5 is a plan view showing a part of a coating head. Fig. 6 is a plan view showing a part of the adjustment head and the coating head. Fig. 7 is a left side view showing a part of the adjustment head and the coating head. Figure 8 is a left side view of the test coating platform section. Figure 9 is a rear view of the test coating platform section. Fig. 1 shows a plan view of the vicinity of the belt holding portion. 11A and 11B are flowcharts showing the preparation work of the coating device. Figure 12 is a plan view of the coating apparatus. Figure 13 is a left side view of the test coating platform portion of the second embodiment. Fig. 14 is a plan view showing the vicinity of the test piece holding portion. Figure 15 is a rear view of another test coating platform section. [Explanation of main component symbols] Coating device 97106432 37 1339133

2 test coating unit 2a test coating unit 3 pitch adjustment mechanism 9 substrate 10 control unit 101 pitch detecting unit 102 adjustment mechanism control unit 103 substrate position adjusting portion 11 substrate holding portion 111 connecting portion 12 substrate moving mechanism 121 track 12a substrate rotating mechanism 13 CCD camera 13a imaging unit moving mechanism 14 coating head 141 nozzle mounting portion 142 guiding groove 1411 back plate portion 1412 horizontal portion 15 coating head moving mechanism 16 liquid receiving portion 17 nozzle 173 nozzle locking portion 97106432 38 1339133

21 Test coating platform portion 21a Test coating platform portion 21b Test coating platform portion 211 Slider 212 Housing 213 Resin tape 213a Test piece 213b Waiting for test piece 2131 Test coated surface 214 Tape holding portion 214a Test piece holding portion 2141 Tape adsorption 2142 tape pressing portion 2143 pressing portion lifting mechanism 2144 pressing portion moving mechanism 2145 holding surface 2146 claw portion 2147 test coating surface abutting portion 215 tape supply portion 215a test piece housing portion 2151 sensor 216 tape collecting portion 216a pressing mechanism 217a Test piece recycling department 97106432 39 1339133

2161 Sensor 2171 Motor 2172 Worm gear 218 External liquid receiving portion 2191 Sprayer 2192 Air knife 22 Central liquid receiving portion 30 Adjustment head 31 Mounting portion fixing mechanism 311 First fixing portion 314 Second fixing portion 32 Nozzle abutting portion 33 Nozzle Pressing mechanism 331 Rod 332 Cylinder 333 Adjuster 34 Abutment moving mechanism 343 Stepping motor 91 Upper surface 93 Positioning mark 97106432 40

Claims (1)

1JJ9133 X. Patent Application Scope The coating device applies a fluid material to a substrate, and includes: a substrate holding portion for holding the substrate; and a plurality of nozzles 'continuous toward the main surface of the substrate Disposing a fluid material; the nozzle scanning mechanism causes the plurality of nozzles to move relative to the substrate in a main scanning direction parallel to the main and parallel of the substrate, and when the mother moves in the main scanning direction, the substrate is made Relatively moving the plurality of nozzles in a sub-scanning direction parallel to the main surface and perpendicular to the main scanning direction; wherein, the coating has a test coated surface, and the test coated surface is not on the substrate Testing and coating the fluid material from the plurality of nozzles during coating; and measuring the σ卩 advancement and retreat mechanism, so that the test coating portion advances and retreats in a relative movement path of the plurality of nozzles in the main scanning direction, The distance between the plurality of nozzles when the test is coated with the φ cloth and the test coated surface, and the upper surface during coating The distance between the plurality of nozzles and the main surface of the substrate is equal; the imaging unit' knows the relative movement of the plurality of nozzles in the main scanning direction to determine the fluid material applied to the test coated surface. - the distance Up' detects the pitch of the plurality of jets in the sub-scanning direction based on the image obtained by the image capturing unit; the pitch adjusting mechanism 'speaks to the gap of 97106432 1339133 in the sub-scanning direction of the plurality of nozzles Make adjustments; and • Test the coated surface replacement mechanism and replace the above test coatings on the test coating section with a new test coating surface. 2. The coating device according to claim 1 of the patent application, wherein the test coating surface overlaps only one of the relative movement paths of the plurality of nozzles in the main scanning direction . 3. The coating device according to the ninth aspect of the invention, wherein the substrate rotation mechanism is configured to rotate the substrate holding portion around a rotation axis perpendicular to the main surface of the substrate; a camera image, an image of a pattern of a fluid material applied on another test coated surface provided separately from the test coated surface in the main scanning direction; and a substrate position adjusting portion according to the image capturing And the image of the pattern of the fluid material obtained by the other image f and the image of the first surface of the substrate obtained by the image capturing unit and the image of the fourth surface of the substrate (4) The nozzle scanning mechanism and the substrate=mechanism' thereby adjust the alignment of the substrate with respect to the plurality of nozzles. (Applicant of claim 3, wherein the coating device further comprises: y other test coated surface replacing mechanism, wherein the other test coating is widely applied, and the test coated surface is individually replaced with a new one. The coating device of the first aspect of the invention, wherein the distance detecting portion detects the distance between two nozzles adjacent to each other in the sub-scanning direction, 97106432 42 1339133 by The pitch adjustment mechanism moves all of the plurality of nozzles individually in the sub-scanning direction to adjust the respective distances. The coating device of item G, wherein, in the first to fifth aspects of the patent application, The drive unit is configured to drive the pitch adjustment mechanism, and the control adjustment mechanism control unit is configured to produce the drive unit based on the detection result of the pitch detection unit. 7. The coating device according to any one of the claims The test coating portion holds a portion of the resin tape which is a part of the resin tape, and the test coating surface is a main surface of the part of the resin tape. The test coated surface replacement mechanism includes a tape supply unit that feeds the resin tape toward the test application unit. The coating device according to claim 7, wherein the test coating portion is provided with a tape. a fixing portion that fixes the test coated surface of the resin tape on a holding plane parallel to a main surface of the substrate. 9. The coating device according to claim 7 of the invention, wherein The drive unit 'driving the pitch adjustment mechanism; and the adjustment mechanism control unit' to manufacture the drive unit based on the detection result of the pitch detection unit. 10. The coating according to any one of claims 1 to 5. In the apparatus, 97106432 43 1339133 is a main surface of the test piece which is the same as the above-mentioned main surface of the test coated surface substrate with respect to the fluidity of the fluid material, and the sheet holding portion of the test piece. The coating device of claim 10, wherein the coating portion is provided with a test coated surface abutting portion, and the test coated surface abutting material is connected to the above t&lt;j^ the above test coated surface to determine the position of the test coated surface in the direction perpendicular to the test coated surface of the disk, the test coated surface replacing mechanism provided with: a test piece receiving portion, a plurality of special test pieces are held on the opposite side of the test coated surface of the test piece, and the test piece is pressed toward the test coating surface abutting portion via the plurality of waiting δ slices; and The sheet take-out portion 'takes the test piece from the test coating portion. The coating device according to claim </RTI> of the invention, further comprising: a drive portion' driving the pitch adjustment mechanism; and an adjustment mechanism control portion The drive unit is controlled based on the detection result of the pitch detecting unit. 97106432