TWI337899B - Substrate coating apparatus and method of chemical detection - Google Patents

Description

1337899 IX. EMBODIMENT OF THE INVENTION The present invention relates to a substrate coating apparatus and a method for detecting a chemical solution of the substrate coating apparatus, wherein the substrate coating apparatus uses a glass for an organic EL (Electroluminescence) display device. The chemical solution is applied to various substrates such as a substrate for a substrate, a glass substrate for a liquid display device, a glass substrate for a PDP (piasma display panel), a semiconductor wafer, and a glass/ceramic substrate for a magnet/disc.

[Prior Art] In the manufacturing step of the substrate, a substrate coating device which applies various chemical liquids on the upper surface of the substrate is used. For example, in the production step of the display device, a substrate coating device in which an organic EL liquid is applied to the upper surface of a glass substrate for an organic EL display device is used. As disclosed in Patent Document 1, the conventional substrate coating apparatus includes a nozzle for discharging a chemical liquid onto the upper surface of the substrate, and a moving mechanism for relatively moving the nozzle and the substrate. The substrate coating apparatus ejects the chemical liquid from the fine pores formed in the nozzle, and simultaneously ejects the chemical liquid while moving the nozzle and the substrate, thereby applying the chemical liquid to the upper surface of the substrate. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-192435 [Draft of the Invention] [Problems to be Solved by the Invention] In the substrate coating apparatus described above, it is impossible to discharge the medicine normally due to clogging of the nozzle or the like. In the state of the liquid, the following problem occurs: & The color unevenness appears on the surface of the coated substrate, or the film thickness of 130517.d〇c on the surface of the substrate becomes uneven. Therefore, in the substrate coating apparatus, it is periodically monitored whether or not the liquid medicine is normally ejected from the nozzle for quality management. In the past, when the substrate coating apparatus monitors the shape of the liquid medicine ejected from the nozzle, the camera draws a condensed liquid column by a CCD (charge coupled device) or the like. The image is subjected to image processing, thereby monitoring the ejection state of the drug solution. In addition, there may be a colored light that is incident on the liquid column that has been ejected from the nozzle, and the liquid column is directly observed from the surface, and the liquid is sprayed to monitor the discharge state of the liquid. However, in the method of photographing a liquid column by a camera, it is very difficult to align the focus of the camera with the liquid column. Especially in the case of spraying a plurality of liquid columns from one mouth (4) 'It is extremely difficult to focus the camera on all the liquid columns, and each liquid column must be photographed separately. ° When the position of the nozzle is changed, the operator The burden will increase, such as having to focus on the camera again. On the other hand, in the method of directly observing the liquid branch sprayed out, it is difficult to use the naked eye to make it accurate, v, , ^ ~, and the skill of the operator is different, and the observation result may be different. The ..., +, ”, and [...] methods are monitored quantitatively on a fixed monitoring basis.

In addition, the above-mentioned 彳 彳 'X state of shooting or viewing is caused by the positive action of the nozzle, causing the device to stop the nozzle temporarily. Therefore, the operation rate is lowered, so that constant monitoring cannot be performed. In the case where the fascia is completed in the above-described situation, the object of the invention is to provide a method for detecting a chemical solution of a substrate-coated device, which can easily and quantitatively monitor whether or not the drug is ejected from the nozzle 130517.doc. liquid. [Means for Solving the Problems] In order to solve the above problems, the invention of claim 1 relates to a method of coating a liquid on a substrate, comprising: a stage on which a substrate is placed; and a liquid chemical nozzle having a liquid column shape Spraying the liquid medicine; moving the mechanism to move the supply nozzle between the supply position above the stage and the standby position of the stage side; and detecting means for detecting The liquid chemical column ejected by the liquid chemical nozzle moved by the moving mechanism passes through a specific detection position. The invention of claim 2, wherein the liquid chemical nozzle has a plurality of ejection holes having different positions in a moving direction, and the detecting means detects that the plurality of liquid columns formed by the chemical liquid respectively pass the detection At a position, the chemical liquid is ejected from the plurality of ejection holes of the chemical liquid nozzle. The invention of claim 3 is the substrate coating apparatus of claim 2, wherein a counting mechanism is further provided which calculates the number of liquid columns detected by the detecting means. The invention of claim 4 is the substrate coating apparatus of claim 3, wherein the warning means is further provided for comparing the count value of the counting means with a specific set value, and displaying a warning when the count value is less than the set value. The invention of claim 5 is the substrate coating apparatus of claim 4, wherein a discriminating means is further provided for determining whether each of the plurality of liquid columns is detected by the detecting means. The invention of claim 6 is the substrate coating apparatus of claim 5, wherein the I305I7.doc 1337899 inspection mechanism has a light projecting portion that emits light from one of the moving paths of the liquid column, and the light The portion receives the light and detects the amount of light on one side or the other side of the moving path of the liquid column; and the amount of double light of the light receiving portion changes to detect the passage of the liquid column. . The invention of claim 7 is the substrate coating apparatus of claim 6, wherein the light-emitting laser light emitted from the light projecting portion and received by the light-receiving unit is emitted. The invention of claim 7 is the substrate coating apparatus of claim 7, wherein the light-shielding mechanism is further provided to limit the light-receiving area of the light-receiving portion. The invention of claim 9 is the substrate coating apparatus according to claim 8, wherein the detecting means is disposed between the standby position and the supply position, and a moving speed of the chemical liquid nozzle of the detection position of the detecting means is smaller than the supply position The moving speed of the above-mentioned liquid medicine nozzle. The substrate coating apparatus according to any one of claims 1 to 9, wherein the liquid chemical nozzle ejects the organic EL liquid as a chemical liquid, and the organic EL liquid is mixed with the organic display device. Luminescent substance and specific solvent. The invention of the invention of claim 11 is a method for detecting a chemical solution, which is characterized in that a coating liquid is applied to a substrate coating device on a substrate placed on a stage to detect whether or not the liquid is sprayed from the substrate liquid. The liquid medicine nozzle for discharging the chemical liquid also discharges the liquid medicine normally' and includes a moving step of moving the chemical liquid nozzle; and moving between the supply device above the stage and the standby position of the side of the stage; And a detecting step of detecting a liquid liquid column from the liquid chemical nozzle moved by the moving step by a specific detection I305l7.doc 1337899 [Effects of the Invention] According to the invention of claims 1 to 10 The coating device includes a detecting mechanism that detects a liquid crystal column ejected from a chemical liquid nozzle moved by the moving mechanism and passes through a specific detection position. Therefore, it is possible to easily and quantitatively monitor whether or not the liquid medicine is normally ejected from the nozzle without stopping the nozzle movement. In particular, according to the invention of claim 2, the detecting means detects that the plurality of liquid columns formed by the chemical liquid respectively pass through the detecting position, and the chemical liquid is ejected from the plurality of ejection holes of the chemical liquid jet. Therefore, it is possible to appropriately monitor whether or not the liquid medicine is normally ejected from the plurality of discharge holes of the chemical liquid nozzle. In particular, according to the invention of claim 3, the substrate coating apparatus further includes a counting mechanism for calculating the number of liquid columns detected by the detecting means. Therefore, the state of the chemical liquid ejected from the nozzle can be quantified and confirmed. In particular, according to the invention of claim 4, the substrate coating apparatus further includes a warning mechanism for comparing the count value of the counting means with a specific set value, and displaying a warning when the count value is less than the set value. Therefore, a warning display can be performed when the chemical liquid cannot be normally ejected from each of the ejection holes, and the operator is notified. In particular, according to the invention of claim 5, the substrate coating apparatus further includes a discriminating means for judging (4) detecting each of the plurality of liquid columns by the inspection structure. Therefore, it is possible to determine the nozzle with an abnormality, and it can be handled more quickly. In particular, according to the invention of claim 6, the detecting means has: a light projecting portion which is emitted from the side of the (four) path of the liquid column; and a light receiving portion which is attached to the side of the moving path of the liquid column or another - The side receives the light and detects the amount of light. The light σ [5 senses the change in the amount of light to detect the passage of the liquid column. Therefore, in the non-contact state, the 1305l7.doc can monitor whether or not the light-based laser light received by the light portion is in particular according to the invention of claim 7. Therefore, the owner has already detected the position by detecting the position. The liquid medicine is normally ejected from the nozzle. In the invention, the substrate coating apparatus further includes a light-shielding mechanism for limiting the liquid-receiving portion of the light-receiving portion. It is possible to increase the proportion of the amount of light received in the light receiving portion when the liquid column of the chemical liquid has passed the detection position. Therefore, the liquid column of the chemical liquid can be detected with a more southerly accuracy through the detection position. In particular, according to the invention of claim 9, the moving speed of the liquid nozzle is smaller than the supply position, so that the chemical liquid can be measured with higher precision. The moving speed of the liquid medicine nozzle of the medicine at the detection position of the detecting mechanism. The liquid column has been inspected by the detection position. According to the invention of claim 1G, it is possible to easily and quantitatively monitor whether or not the liquid column of the organic EL liquid is normally ejected from the liquid chemical nozzle. Further, according to the invention of claim 11, the chemical liquid detecting method includes the detecting step 4, and the liquid liquid column ejected from the liquid chemical nozzle moved by the moving step passes through the specific detection position. Therefore, it does not cause (4) movement stop = it is easy and quantitative to monitor whether or not the liquid medicine is normally ejected from the nozzle. [Embodiment] y', one or eight less fear of bamboo, said the day. Further, in each of the drawings referred to in the following description, in order to clarify the positional relationship and the operation direction of each member, a common χγζ orthogonal coordinate system is attached. , '130517.doc 1337899 <Construction of Substrate Coating Apparatus> FIG. 1 is a view showing a configuration of a substrate coating apparatus according to an embodiment of the present invention.

Top view. Further, Fig. 2 is a longitudinal sectional view showing the substrate coating apparatus J cut off from the 11-11 line of Fig. 1. The substrate coating apparatus is used in the step of manufacturing an organic EL display device for coating an organic EL liquid mixed with a luminescent substance and a specific solvent on a rectangular ruthenium substrate (hereinafter simply referred to as a device on the upper surface of the substrate). As shown in FIGS. 1 and 2, the substrate coating apparatus 1 mainly includes a stage 10, a stage moving mechanism 2, a nozzle unit 3, a nozzle moving mechanism 4, a standby box 50, a recovery tray 60, and a liquid column. The detecting unit 70 and the control unit 80 have a flat shape and have a holding portion in which the substrate 9 is placed and held on the upper surface in a horizontal posture. The upper surface of the stage 1 is formed on the upper surface of the stage 1 A plurality of suction holes (not shown). Therefore, after the substrate 9 is placed on the stage 1 , the substrate 9 is fixedly held on the upper surface of the stage 10 by the suction pressure of the suction holes. The upper surface of the substrate 9 placed on the stage 1 is formed with a plurality of parallel grooves 9a formed in advance at a position where the organic el liquid is applied so that the grooves 9a face the main scanning direction (parent axis direction). The substrate 9 is placed on the stage 1〇. Above the stage 10, mask plates 11 and 12 covering the side portions of the substrate 9 on the 乂 side and the + 乂 side are disposed. The mask sheets η and 2 function to prevent ejection from the nozzle portion 30 described below. The organic EL liquid is applied to the side portions of the substrate 9 on the +乂 side and the -X side, and the application range of the organic EL liquid is restricted in the main scanning direction. The mask sheets η and η are fixed by a specific connecting member (not shown). The ground mechanism is mounted on the stage 0. 130517.doc 13 The moving mechanism 20 is used to move the stage 10 in the sub-scanning direction (γ direction). The stage moving mechanism 2, for example, borrows When the stage moving mechanism 20 is operated in a state in which the substrate 9 is placed on the stage 10 by the mechanism of the ball 蟫浐 cup or the mechanism using the linear motor, the stage is mounted. 10. The mask plates 11, 12 and the substrate 9 are integrally moved in the sub-scanning direction. The nozzles are adjacent to the ejection portion for ejecting the organic EL liquid onto the upper surface of the substrate 9 held on the stage 1 The nozzle portion 30 has three nozzles 31, 32, 33 for discharging red, green, and blue. Fig. 3 is a view showing a detailed configuration of the vicinity of the nozzle portion 3A. As shown in Fig. 3, a minute is formed at the lower end of each nozzle 3''32, 33 (for example, the diameter is not about 1 〇 to 70 μΐΏ). The discharge holes 31a, 32a, and 33a are connected to the end portions of the pipes 31b, 32b, and 33b on the flow side of the pipes 31, 32, and 33b, respectively. The liquid supply sources 31c, 32c, and 33c supply the organic EL liquid for red, green, and blue. Further, in the middle of the paths of the pipes 31b' 32b and 33b, valves 3ld and 32d are inserted, respectively. 33d. When the valves 31d, 32d, and 33d are opened, the organic red liquid is supplied from the organic EL liquid supply sources 31c, 32c, and 33c to the respective nozzles 31, 32, and 33 via the pipes 31b, 32b, and 3, and from the respective nozzles 31, 32, and 33. The discharge holes ^, 32a, and 33a discharge the organic EL liquid for red, green, and blue downward. The organic EL liquid ejected from each of the nozzles 31'32, 33 forms a thin (e.g., left and right diameter) liquid column La, Lb, Lc below each of the nozzles 3, 32, 33. 130517 doc • 14· 1337899 As shown in Fig. 1, the three nozzles 3 1 , 32 , 33 of the nozzle portion 30 are arranged at a specific interval (for example, a distance of several mm) in the main scanning direction, and on the other hand, in the sub-scanning The position in the direction is also slightly staggered and configured. The difference in the position of each of the nozzles 3 1, 32, 33 in the sub-scanning direction corresponds to the pitch width of the groove 9a formed on the upper surface of the substrate 9 to be processed. Therefore, the nozzle portion 30 simultaneously ejects the organic EL liquid from the three nozzles 31, 32, 33, whereby the organic EL liquid can be simultaneously applied to the adjacent three grooves on the substrate 9.

In this manner, the substrate coating apparatus 1 can coat the organic EL liquid on the substrate 9 in units of 3 using three nozzles 31, 32, 33'. Therefore, the organic EL liquid can be effectively coated on the upper surface of the substrate 9. Further, since the positions of the three nozzles 31, 32, and 33 in the main scanning direction and the sub-scanning direction are different, it is not necessary to make the respective nozzles 3, 32, and 33 themselves extremely small, and the organic layer can be applied at a narrow interval. ^Liquid.

The nozzle moving mechanism 40 is a mechanism for moving the nozzle portion 3 in the main scanning direction. As shown in Fig. 1, the nozzle moving mechanism 4A has a support portion 41 for supporting the nozzle portion 30, and a moving portion 42 for moving the support portion 41 in the main scanning direction. The material portion 42 is constituted, for example, by a mechanism in which a motor and a ball screw are combined or a mechanism using a linear motor. The nozzle moving mechanism can move the nozzle unit 30 in the main scanning direction between the position above the standby box 5 and any position between the upper side of the stage 1 and the upper side. The standby box 5G is a portion that is placed on the side of the side of the rack 1G to clean the mouth portion 30 while waiting. Three openings 51, 52, and 53 are formed in the standby box 5 to accommodate the respective nozzles η, Μ, and ” of the nozzle unit 3〇. Further, the opening portion 51' 52 of the standby box 5〇 The inside of the crucible is provided with I30517.doc. The mechanism for supplying the cleaning liquid at the front end of the nozzles 31 32 and 33, and the mechanism for adsorbing the foreign matter on the nozzles 31, 32, and 33. The spray & 30 is placed in the standby box. After the position above 50, the standby box 5() is raised, and the front ends of the nozzles 31, 32, and 33 are respectively fitted to the openings; 丨, && and the supply of the cleaning liquid is performed inside the standby phase 50. And the suction process, thereby removing the foreign matter from the nozzle hole mma of the nozzles 31, 32, and 33 and the periphery thereof. The recovery tray 60 is attached to the side of the +1 side and the _ side of the stage 1 for recycling. The capacity of the organic EL liquid ejected from the nozzle portion 3G. The recovery tray (10) is disposed in the X side of the load 0 0 0 (between the stage 丨〇 and the standby box 5 )) and the X side of the stage a position below the movement path of the nozzle portion 30. Further, the recovery tray 6 is partially overlapped with the mask plates η and 12 in the main scanning direction. Therefore, the organic EL liquid ejected from the nozzle portion 3 on the side of the stage is continuously recovered by the mask sheets η and 12 and the recovery tray 6〇. The liquid column detecting unit 70 The processing unit for detecting the liquid column of the organic EL liquid ejected from the nozzle unit 3 by the detection position p shown in Fig. 1. As shown in Fig. 2 and Fig. 2, the liquid column detecting unit 70 has: A transmissive laser sensor 7A composed of a light projector 71a and a light receiver 7 1 b, a laser sensor controller 72 for controlling the action of the laser sensor 7 and a detection for displaying the detection result The disk 73. The light projector 71a and the light receiver 71b of the laser sensor 7 are disposed between the stage 1 and the standby cassette 50, and the height position thereof is a height position between the nozzle unit 30 and the recovery tray 60. The light projector 71a and the light receiver 71b are arranged to detect that the +γ side and the -γ side of the position p of the I305I7.doc 1337899 are opposed to each other. The light projector 7 U has a laser beam that emits a specific wavelength (for example, 600 to 700 nm). The 'receiver 71b has the laser light received from the light projector 71a and The laser sensor controller 72 is electrically connected to the light projector 71a and the light receiver 71b. The laser sensor controller 72 emits laser light from the light projector 71a by giving a drive signal to the light projector 71a. And the received light amount of the light receiving device 71b is received as an electric signal. The liquid column of the organic EL liquid ejected from the nozzle unit 30 passes through the detection position ρ, and then blocks a part of the laser light emitted from the light projector 71a, thereby receiving the light receiving amount of the light receiving unit 7lb. The laser sensor controller 72 detects that the liquid column of the organic EL liquid has passed the detection position p according to the change in the amount of light received by the light receiver 71. Specifically, a threshold value is preset in the laser sensor controller 72, and is regarded as organic once the amount of light received in the light receiver 71b (or the ratio of the light in the normal light) is lower than the critical value. The liquid column of the EL liquid has passed the detection position ρ ' and sends a detection signal. Then, the disc 73 counts the detection signal generated in the laser sensor controller 72, and displays the count value on the display portion 73a. Therefore, when the organic liquid is normally ejected from the three nozzles 31, 32, and 33 of the nozzle unit 30, the three liquid columns pass through the detection position, and no value is displayed on the display portion 73a of the detecting disk 73. 3". In the state in which any one of the nozzle portions 3 is in the state of the nozzle portion 3, the value on the display portion 7 of the detecting disk 73 is "2". Further, the value of the liquid column corresponding to the organic EL liquid ejected from the nozzle portion 30 130517.doc from the normal time is set in advance on the test tray 73 (here, the factory 3): the disc also has the following functions, that is, It is checked whether the above-mentioned count value reaches the value set by ^^, and when it is not reached, the display portion 73a performs a specific invitation. In this manner, the liquid column detecting portion 70 is out of the nozzle portion by the laser sensor 7] The liquid column of the organic EL liquid has been detected by the detection position p. The display unit 73a displays the count value of the detection signal. Therefore, the operator can easily and quantitatively monitor by checking the value displayed on the display unit 73a. Whether or not the three nozzles 31, 32, 33 from the nozzle portion 30 are: machine EL liquid, $ again, by the laser sensor controller 72 and the detecting disk 73, the above, for example, can be caused by lightning The electrical processing of the electronic circuit formed by the internal sensor controller 72 and the detecting disk is realized. The laser sensor controller 72 and the detecting disk 73 can also be configured by a computer device, and the computer can be operated by a computer. Processing to implement the laser sensor controller 72 and the detection disk 73 The control unit 80 is a processing unit for controlling the operation of each unit in the substrate coating apparatus 。. Fig. 4 is a block diagram showing the connection between the control unit 8 and the respective portions in the substrate coating apparatus 。. The control unit 8 is electrically connected to the stage (4) mechanism 20, the valves 3ld, 32d, and 33d, the nozzle moving mechanism, the standby phase 5, the laser sensor controller 72, and the detecting disk 73, and is controlled. The operation of the above-mentioned parts is controlled by the control unit 8 by, for example, a computer having a CPU and a memory, and the computer operates by inputting a program installed in the computer and an operation input by the user. [Operation of Substrate Coating Device] 130517.doc 1337899 Next, an operation when the organic EL liquid is applied to the upper surface of the substrate 9 by using the substrate coating apparatus 1 will be described with reference to the flowchart of FIG. 5. When the coating process of the substrate 9 is performed in the apparatus 1, first, the operator mounts the substrate 9 on the upper surface of the stage 1. The substrate 9 is oriented toward the main scanning side by a plurality of grooves 9a formed on the upper surface thereof. In the control unit 8 of the substrate coating apparatus i, the operator starts the operation of each part of the apparatus by the control unit 8 when the operator performs a specific start operation.

In the state in which the openings 5 1 , 52 , and 53 of the standby box 50 are respectively stored in the private parts of the nozzles 3 , 32 , and 33 in advance, the mouth portion of the substrate coating apparatus 1 enters standby. After the above-described start operation, the substrate applying apparatus 丨 first performs the cleaning liquid supply and suction processing in the standby casing 50, thereby cleaning the front ends of the respective nozzles 31, 32, and 33 (step si).

After the cleaning of the nozzles 3 1 , 3 2, and 3 3 is completed, the substrate coating apparatus i starts to eject the organic EL liquid from the respective nozzles 31, 32, and 33 (step S2). Specifically, the valves 31d, 32d, and 33d are opened in a state where the front ends of the nozzles 31, 32, and 33 are respectively accommodated in the openings 51, 52, and 53 of the standby box 5''. Thereby, the organic EL liquid is supplied to the respective nozzles 31, 32, and 33 from the organic EL liquid supply sources 31c'32c and 3b via the pipes 32b and 33b, and the discharge holes..., 32a from the respective nozzles 31, 32, and 33 are provided. 33a ejects an organic EL liquid for red, green, and blue. Then, the substrate application device 〇 lowers the standby box 5, and the standby box 5 turns away from the nozzles 31, 32, and 33, and the nozzle moving mechanism 4 〇 operates to move the nozzle unit 30 toward the +X side. The nozzle unit 3 is ejected from the respective nozzles 31, 32, and η with 130517.doc • 19· 1337899 machine EL liquid 'moving toward the +X side at the same time. The organic team liquid ejected in the middle of the movement falls to the upper surface of the recovery tray 60 and the mask plate to be recovered. The nozzle unit 30 moves from the upper position of the standby box 50 to the upper position of the stage (7), and the liquid column detecting unit 7 detects the organic liquid column [the liquid column has passed the detection position p, and the number thereof is performed. Count (step s3). In other words, the liquid column detecting unit 70 continuously emits the laser light from the light projector 71a toward the light receiver 71b, and the light sensor 71b is detected by the laser sensor controller 72 when the liquid column of the organic EL liquid has passed the detection position p. The amount of light received decreases. Further, the detecting disk 73 counts the detection signal of the laser sensor controller 72, and displays the count value on the display unit 73 3 a. The detecting disk 73 checks whether the count value in the above step S3 reaches the preset value "3" (step S4)' if the count value is lower than the set value (in step S4,

No), a signal indicating "abnormality" is transmitted to the control unit 80, and a warning display is performed on the display unit 73a (step S5). In this case, the substrate coating apparatus 1 stops the movement of the nozzle unit 30 and waits for the operator to perform the processing. On the other hand, in the above step S4, if the count value has reached the set value (Yes in step S4), the detecting disk 73 transmits a signal indicating "normal" to the control unit 8A and continues the substrate coating after step S6. The action of the device 1. At this time, the substrate application device 1 continues to eject the organic EL liquid from the nozzles 31, 32, and 33, and at the same time, the nozzle portion 30 is further moved toward the +χ side. Thereby, among the plurality of grooves % formed on the upper surface of the substrate 9, the organic EL liquid is applied to the three grooves % closest to the +γ side. After the substrate coating apparatus 1 moves the nozzle unit 30 to the top surface of the mask plate 12 on the +χ side, 1305 丨 7.. doc -20- :, the stage 10 and the substrate 9 are moved to the +¥ side to correspond to three nozzles. The distance between the coating widths of 32 and 33 (that is, the distance between the three rows of grooves) continues to be organic from the nozzles 31, 32, and 33. Thus, pure 9 is followed by 〇 _ In this manner, the substrate coating device L shifts the substrate 9 in the sub-scanning direction by the distance corresponding to the coating width of the nozzle portion 30, and simultaneously applies the organic EL liquid to the main scanning direction for a specific number of times. The organic EL liquid is applied to all the grooves % of the substrate 9 (step S6). The organic EL liquid is applied to all the grooves % on the substrate 9 and the substrate coating device 1 further moves the nozzle moving mechanism 4 to the nozzle portion 3 Moving to the position above the standby box 50. Next, the liquid column detecting unit 70 detects the liquid column of the organic EL liquid while moving toward the upper position of the nozzle unit _stage 1〇 toward the upper position of the standby box 5G. The position p is detected and counted (step S7). The detecting unit 70 continuously emits the laser light from the light projector 71a toward the light receiver 71b, and detects the decrease in the amount of light received by the light receiver 71b when the liquid column of the organic liquid is detected by the laser sensor controller 72. Further, the detecting dial 73 counts the detection signal of the laser sensor controller 72, and displays the count value on the display portion 73a. Further, the detecting disc checks whether the count value in the above step S7 has reached the previously set value. When the count value is lower than the set value (N〇 in step S8), the display unit 73a displays a warning (step S5). The nozzle unit 30 moves to the upper position of the standby box 50. Then, the substrate 1 is coated with 130517.doc 2! The device 1 raises the standby box 50, and the front ends of the nozzles 31, 32, and 33 are housed inside the openings 5 1 , 52 , and 53 of the standby box 50 . The substrate 9 after the coating process is taken out, and the process of applying the organic EL liquid to the one substrate 9 is completed. As described above, the substrate coating device 1 of the present embodiment includes the light projecting unit 71a and the light receiver 7b. Laser sensor 71, and according to The change in the pupil of the photoreceptor 7 is 'k' for the liquid electrolyte of the organic EL liquid. Therefore, it is not necessary to stop the movement of the nozzle portion 3, so that it is easy and quantitative. The nozzles 3, 32, and 33 normally eject the organic EL liquid. Further, the substrate coating apparatus 1 counts the number of times of detection of the liquid column, and numerically changes the state of the organic e liquid ejected from the nozzle unit 30. Further, the moving speed of the nozzle portion 3 at each position of the substrate coating device i is substantially as shown in Fig. 6. The horizontal axis of Fig. 6 indicates the position of the main scanning/fe direction in the substrate coating apparatus 1, and Fig. 6 The vertical axis represents the moving speed of the nozzle portion 3〇. The moving speed of the nozzle portion 3A of the detecting position p is smaller than the moving speed of the nozzle portion 3 when the coating process is performed above the stage 10. In this manner, the substrate coating apparatus 1 detects the passage of the liquid column at the detection position p at which the moving speed of the nozzle portion 30 is relatively low. Therefore, the passage of the liquid column can be detected with higher precision. <3. Modifications> The main embodiments of the present invention have been described above, but the present invention is not limited to the above examples. For example, as shown in Fig. 7, the light-shielding plate 7id of the slit 71C can be provided on the light-receiving surface of the light receiver 71b to restrict the light beam incident on the light receiver 71b. In this way, the ratio of the amount of light received in the photoreceptor m after the liquid column of the organic £1^ liquid passes through the detection position 130517.doc -22- 1337899 p can be increased. Therefore, the liquid column of the organic EL liquid can be detected by the detection position p with higher precision. The shape of the slit is not limited to the example of Fig. 7, and the slit 71c having a small width in the moving direction (X-axis direction) of the liquid helium may be used as shown in Fig. 7, so that the change in the amount of received light can be further increased. The rate is therefore ideal. Further, the substrate coating apparatus 1 can automatically determine the presence or absence of detection based on the timing at which the k-number is detected in the laser sensor controller 72 and the position of the nozzle α卩3 决定 determined by the nozzle moving mechanism 由此. The liquid column of each of the nozzles η, 32, and 33 is shown, and the result is displayed on the display portion of the detecting disk as shown in FIG. In this way, the operator can determine the nozzle that has an abnormal condition so that the response can be taken more quickly. Further, the substrate coating apparatus 丨 uses the transmissive laser sensor 71, but a reflective laser sensor may be used instead of the transmissive laser sensor 71. Fig. 9 is a view showing an example of a reflective laser sensor. The reflective laser sensor 74 shown in Fig. 9 has a light projector 74a and a light receiver 74b which are arranged side by side on one side of the movement paths of the liquid columns La, Lb, and Lc. The light projector 74a has a function of emitting laser light of a specific wavelength. Further, the light receiver has a function of receiving the laser light reflected from the liquid helium La, Lb, and Lc and detecting the amount of light. The laser light emitted from the light projector 74a is reflected by the liquid columnes La, Lb, and u after the organic liquid columnes La, Lb, and Lc from the nozzle portion 30 pass through the detection position, and the amount of light received by the light receiver 74b increases. The laser sensor controller 72 detects that the liquid column of the organic liquid has passed the detection position based on the change in the amount of received light in the light receiver 74b. In addition, the phase of the light of the reflective laser sensor 130517.doc -23* can be detected from the light receiver. Therefore, based on the detected photodetector 74b, it is automatically determined whether or not the nozzles 31 are detected, and the distance from the liquid column by the receiving of 74b to the liquid column by the photoreceiver 74b is as shown in FIG. The display portion 73a shown on the detecting disk 73 shows the result. Further, in the above example, the substrate coating apparatus performs the detection processing by the liquid column detecting unit μ at the time of applying the organic EL& to the substrate 9, and the detection processing may be performed at other timings. For example, the detection process may be performed by the liquid column detecting unit 7A only when the organic EL liquid is applied to the substrate 9. Alternatively, the organic EL may be applied to the substrate 9, and the nozzle may be made once every round trip.卩30 moves to a position closer to the detection position ρ, and the detection process is performed by the liquid column detecting unit 7〇 in the unit of the nozzle portion π. Further, in the above example, three nozzles 3, 3, and 3 3 are mounted on one nozzle portion 3, but the number of nozzles mounted on the nozzle portion 3 can be either two or two 'can be used. More than one. Further, in the above example, the non-contact laser sensors 7A, 74 are used, and the liquid column of the organic EL liquid has been detected by the detection position p, but other detection means can be used for detection. For example, the pressure of the liquid column is detected by a contact sensor fixed at the detection position, thereby detecting that the liquid column has passed the detection position. Further, the substrate coating apparatus 1 is a device for applying an organic EL material forming a light-emitting layer of an organic EL display device to the upper surface of the substrate 9. However, the substrate coating device of the present invention may apply another chemical solution to the substrate. The device on the upper surface. For example, it is also possible to apply a hole transporting material for forming a hole 130517.doc • 24· 1337899 of the organic display device to the upper surface of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a substrate coating apparatus according to an embodiment of the present invention. Fig. 2 is a longitudinal sectional view showing the substrate coating apparatus cut by the IMI line of Fig. 1. Fig. 3 is a view showing a detailed configuration of the vicinity of the nozzle portion. Fig. 4 is a block diagram showing a configuration of a connection between a control unit and each unit.

Fig. 5 is a flow chart showing the flow of the operation of the substrate coating apparatus. Fig. 6 is a graph showing the moving speed of the nozzle portion at each position. Fig. 7 is a perspective view showing a state in which a light shielding plate is attached to a light receiver. Fig. 8 is a view showing a state in which the liquid crystal column of each nozzle is detected on the display portion of the detecting disk. Fig. 9 is a view showing an example of a reflective laser sensor. [Main component symbol description] I substrate coating device

9 Substrate 9a Slot 10 Stage II ' 12 Mask board 20 Stage moving mechanism 30 Nozzle part 3 1, 32, 33 Nozzle

3 1 a > 32a ' 33a 孑L 40 Nozzle moving mechanism 1305l7.doc •25· 1337899 50 Standby box 60 Recycling tray 70 Liquid column detecting unit 71, 74 Laser sensor 71a ' 74a Emitter 71b, 74b Receiver 71c slit 71d visor 72 laser sensor controller 73 detecting disk 73a display portion 80 control portion La, Lb, Lc liquid column P detecting position 130517.doc -26-

Claims (1)

X. Patent application scope: A substrate coating device for coating a liquid medicine on a substrate, comprising: a carrier platform for mounting a substrate; and a chemical liquid nozzle for discharging the chemical liquid into a liquid column a moving mechanism that moves the chemical liquid nozzle between a supply position above the stage and a standby position of the stage side; and (4) a mechanism that detects movement by the moving mechanism The liquid liquid column ejected by the liquid chemical nozzle passes through a specific detection position. 2. The substrate coating apparatus according to claim 1, wherein the chemical liquid nozzle has a plurality of ejection holes having different positions in a moving direction; and the detecting means detects the chemical liquid discharged from the plurality of ejection holes of the chemical liquid nozzle The plurality of liquid columns formed pass through the above detection positions, respectively. 3. The substrate coating apparatus of claim 2, further comprising a counting mechanism for calculating the number of liquid columns detected by said detecting means. 4. The substrate coating apparatus according to claim 3, further comprising a warning mechanism for comparing the count value of the counting means with a specific set value, and displaying a warning when the count value is less than the set value. 5. The substrate coating apparatus of claim 4, further comprising a discriminating mechanism for discriminating whether each of the plurality of liquid columns is I30517.doc 1337899 is detected by the detecting means. 6. The substrate coating apparatus according to claim 5, wherein the detecting means has a light projecting portion that emits light from a side of the movement (10) of the liquid column; and a light receiving portion that is attached to the liquid column. The % path Η·丨 or another call connects the light to the light and detects the amount of light; '· ' detects the passage of the liquid column based on the change in the amount of light received by the light receiving unit. The substrate coating apparatus according to claim 6, wherein the light is emitted from the light projecting portion and the light is received by the light receiving unit. 8. The substrate coating apparatus according to claim 7, further comprising a light blocking mechanism for restricting a light receiving region of the light receiving portion. 9. The substrate coating apparatus according to claim 8, wherein the detecting means is disposed between the standby position and the supply position; ° the movement speed of the chemical liquid nozzle at the detection position of the detecting means is smaller than The moving speed of the above-mentioned liquid medicine nozzle at the above supply position. 10. The substrate coating apparatus according to any one of claims 1 to 9, wherein the organic (4) (4) mouth is an organic liquid which is a mixture of the organic light and the specific solvent. . A method for detecting a chemical solution by applying a chemical solution to a substrate coating device of a substrate placed on a stage, and detecting whether the chemical solution is ejected from the substrate liquid in a columnar manner The liquid nozzle is normally ejected, and is characterized in that: I30517.doc includes: a moving step between the medicine supply device and the standby side of the load side of the load side and the side of the σ side above the stage The movement; and the second step is to detect that the liquid liquid column ejected from the liquid nozzle which is moved by the moving step passes through a specific detection position. I30517.doc