TWI394951B - - Google Patents
Info
- Publication number
- TWI394951B TWI394951B TW97143975A TW97143975A TWI394951B TW I394951 B TWI394951 B TW I394951B TW 97143975 A TW97143975 A TW 97143975A TW 97143975 A TW97143975 A TW 97143975A TW I394951 B TWI394951 B TW I394951B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97143975A TW201018917A (en) | 2008-11-13 | 2008-11-13 | Method of manufacturing probe card and structure thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97143975A TW201018917A (en) | 2008-11-13 | 2008-11-13 | Method of manufacturing probe card and structure thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201018917A TW201018917A (en) | 2010-05-16 |
TWI394951B true TWI394951B (ko) | 2013-05-01 |
Family
ID=44831493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97143975A TW201018917A (en) | 2008-11-13 | 2008-11-13 | Method of manufacturing probe card and structure thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201018917A (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI721715B (zh) * | 2019-12-17 | 2021-03-11 | 英業達股份有限公司 | 基板管理控制器的壓力測試方法、系統、儲存媒體及裝置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011162363A1 (ja) * | 2010-06-25 | 2011-12-29 | 日本発條株式会社 | プローブホルダ、プローブホルダおよびプローブユニットの製造方法 |
WO2013006771A2 (en) | 2011-07-06 | 2013-01-10 | Celadon Systems, Inc. | Test systems with a probe apparatus and index mechanism |
CN103930982B (zh) * | 2011-07-06 | 2016-07-06 | 塞莱敦体系股份有限公司 | 具有探针卡的测试设备及连接器机构 |
JP6103821B2 (ja) | 2012-05-29 | 2017-03-29 | 株式会社日本マイクロニクス | 通電試験用プローブ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5808475A (en) * | 1996-06-07 | 1998-09-15 | Keithley Instruments, Inc. | Semiconductor probe card for low current measurements |
US20030057976A1 (en) * | 2001-09-27 | 2003-03-27 | Mitsubishi Denki Kabushiki Kaisha | Probe card |
US20050156613A1 (en) * | 2004-01-20 | 2005-07-21 | Hisatomi Hosaka | Probe card |
TWI271522B (en) * | 2001-04-05 | 2007-01-21 | Toray Eng Co Ltd | Probe substrate and method of manufacturing thereof |
US20070126443A1 (en) * | 2001-07-11 | 2007-06-07 | Formfactor, Inc. | Method of Manufacturing A Probe Card |
TWI292827B (en) * | 2005-03-21 | 2008-01-21 | Phicom Corp | Probe card and method of manufacturing the same |
-
2008
- 2008-11-13 TW TW97143975A patent/TW201018917A/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5808475A (en) * | 1996-06-07 | 1998-09-15 | Keithley Instruments, Inc. | Semiconductor probe card for low current measurements |
TWI271522B (en) * | 2001-04-05 | 2007-01-21 | Toray Eng Co Ltd | Probe substrate and method of manufacturing thereof |
US20070126443A1 (en) * | 2001-07-11 | 2007-06-07 | Formfactor, Inc. | Method of Manufacturing A Probe Card |
US20030057976A1 (en) * | 2001-09-27 | 2003-03-27 | Mitsubishi Denki Kabushiki Kaisha | Probe card |
US20050156613A1 (en) * | 2004-01-20 | 2005-07-21 | Hisatomi Hosaka | Probe card |
TWI292827B (en) * | 2005-03-21 | 2008-01-21 | Phicom Corp | Probe card and method of manufacturing the same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI721715B (zh) * | 2019-12-17 | 2021-03-11 | 英業達股份有限公司 | 基板管理控制器的壓力測試方法、系統、儲存媒體及裝置 |
Also Published As
Publication number | Publication date |
---|---|
TW201018917A (en) | 2010-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |