TWI374265B - Gas sensor - Google Patents

Description

1374265

TW4853FA IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a gas sensor that utilizes a gas absorbing material to change a plane. ...Resonance of Sensing Valley Resonator [Prior Art] In order to achieve time-sharing sales of agricultural products, #4, set up a satellite factory or processing package for fruits and vegetables, fresh: "Control" set up a major trend in the installation of the factory. Taiwan's agriculture is a small area of cultivated straw ν only praying type, agricultural self-employed households can not bear the cost of 2 selection and grading equipment, so if it is necessary to achieve the classification of agricultural products, the satellite jade factory will disperse the cost. = Mainly for fruit sweetness, size, maturity and water content: conditions for sorting and grading 'mainly techniques such as image color detection\, GC vapor deposition, MRI NMR and IR infrared spectroscopy, etc. The equipment used in these technologies is not only bulky but also very expensive. 1 The cheaper technology is carried out by manually using handheld devices such as sweetness meters, but this technology is destructive and requires more labor costs. After sorting, it will be processed in box storage or transportation, and the management structure for the time-sharing sales of agricultural products will be particularly important for the preservation of agricultural products. At present, the more advanced technology mainly monitors the environment of the cold storage, and the temperature, humidity and carbon dioxide concentration of the storage environment are monitored. The part of the timeline is mainly based on the manpower record. Currently ~ for the early box or Single batch of fruits and vegetables storage for time-sharing sales control technology 13/4265

TW4853PA or electronic technology. In terms of age, the _ practice disadvantages are as follows · / detection equipment _ huge. First, the equipment is expensive. Third, more manpower costs are needed. Fourth, Μ 料 践 践 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( (

SUMMARY OF THE INVENTION The invention relates to a gas sensor point, and has at least the following advantages: 1. Small volume; 2. Low price; 3. Simple manufacturing;

Fourth, significantly reduce labor costs; and 5. Effectively control single-box or single-load sales control. Planar Inductor-Capacitor Resonator and Gas Absorbing Material Benefits: The sensor includes a vibrator including an inductor electrode and a capacitor electrode, and the electric: inductor and capacitor common electrode. At least the gas absorption material and the capacitor electrode: In addition, the gas sensor may further comprise a dielectric material, a basin: a connection. The gas absorbing material and the capacitor electrode are connected. Gas suction two == 1374265

TW4853PA Body Concentration Change 'Changes the resonant frequency of the planar f-capacitance capacitor (4). In order to make the above-mentioned contents of the present invention more comprehensible, the following description will be given in detail to the preferred embodiment of the present invention, and the following detailed description is given as follows: [Embodiment] In order to overcome the shortcomings of the conventional practice, the present invention provides - Gas sensing benefits. The gas sensor includes a planar current inductor-capacitor resonator and a gas suction =. + Face type inductor-capacitor resonator package (4) 且 and the capacitor electrode is connected to the inductor electrode. At least some of the gas suctions are connected. The gas absorption pole ^ ^ -V' ^ ^ ^ ^ is based on the change of the gas concentration to be measured, and the resonance frequency of the thousand-sided inductor-capacitor resonator is changed. The gas absorbing material can be regarded as the type of gas to be measured. The material such as ethylene gas absorbing material - gas + (10) steroid and carbon gas absorbing material. For example, U ^ _ absorber or cyclopropene, 1-MCP can be used as a carbon nanotube (CNT), which can be used as a material for the recovery of carbon. Carbon and other gas absorption materials, activated carbon is often 7 Wei carbon or dioxane gas absorption material, high potassium acid is β and received (4) and (4) as acid clock, can be used as a gas absorption for detecting ethylene ~ Turn it into a person with normal knowledge in the violent field. See the actual needs of the 'gas-absorbing material'. The above is only an example. The gas adjustment uses a non-planar inductor-capacitor resonator to make the invention to a small material with a simple one, small volume; to - has the following advantages: Second, the price is cheap; 1374265

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TW4853PA Third, the manufacturing is simple; Fourth, the labor cost is greatly reduced; and '5. It can effectively carry out time-sharing sales and control of single-box or single-batch fruits and vegetables. In order to make the present invention clearer and easier to understand, several embodiments will be further described below. First Embodiment Referring to Figure 1, there is shown a partial cross-sectional view of a gas sensor in accordance with a first embodiment of the present invention. The gas sensor 10 includes an inductor electrode 110, a capacitor electrode 120, and a gas absorbing material 130. In the present embodiment, the gas absorbing material 130 is disposed below the inductor electrode 110 and the capacitor electrode 120, and is connected to the capacitor electrode 120 portion. The inductor electrode 110 and the capacitor electrode 120 disposed on the gas absorbing material 130 form an inductor and a capacitor, respectively, as a resonant element in a planar inductor-capacitor resonator. When the concentration of the gas to be measured changes, the amount of the gas to be tested, which is adsorbed by the gas absorbing material 130, changes, and the dielectric constant of the gas absorbing material 130 itself changes, thereby changing the magnitude of the capacitance. As a result, the resonant frequency of the planar inductor-capacitor resonator changes. By detecting the change in the resonance frequency, we can know the change in the concentration of the gas to be measured, and the device for detecting the resonance frequency is, for example, a Vector Network Analyzer (νΝΛ). Generally, when the agricultural product matures, it will release gases such as ethylene or carbon dioxide. When the gas sensor 10 is used to detect the maturity of the agricultural product, 1374265

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TW4853PA We can choose the appropriate gas absorption material 130 to use. The gas absorbing material can be classified into a gas adsorbing material and a gas reaction material. Among them, the gas adsorbing material is the material of the material: the material itself can be adsorbed on the gas adsorbing material by chemical or physical adsorption depending on the characteristics of the surface functional machine. However, the basic structure of the material does not physically or chemically react with the gas. However, due to the material structure and characteristics of the gas reactant, the chemical reaction with the gas may cause changes in its structure or chemical properties, such as oxidation or reduction of the material by gas. Commonly used gas adsorbing materials are, for example, polyacrylamides selected from the group consisting of diterpene-based propylene, activated carbon, zirconium chloride (ZrCl2), chitosan, potassium permanganate, and silver metal with palladium metal (Polyacrylic). Amide) Among the groups of high molecular polymers and bamboo quenching liquids. The gas reaction material is, for example, selected from the group consisting of metal oxide catalysis, platinum-titanium oxide composite (Pt-Ti02), platinum compound (Pt TMOSFET), platinum-tin oxide composite (Pt-Sn02), carbon nanotubes, and silver. Among the groups of materials of ions (Ag+). Of course, those having ordinary knowledge in the technical field can adjust the use of different gas-absorbing materials according to actual needs, and the above is merely illustrative. Second Embodiment Referring to Figure 2, there is shown a partial cross-sectional view of a gas sensor in accordance with a second embodiment of the present invention. The gas sensor 20 shown in the second embodiment is different from the gas sensor 10 shown in FIG. 1 in that the gas sensor 20 further includes a substrate 240, and the substrate 240 is located below the gas absorbing material 130. It is used to set the gas absorbing material 130. In the first embodiment, the gas absorbing material 130 is directly used as a substrate. And the gas sensor 20 9 374265

The TW4853PA function principle and the optional gas absorbing material 130 are the same as those of the gas sensor 10 described above, and will not be described herein. 4. Third Embodiment Referring to Figure 3, a partial cross-sectional view of a gas sensor in accordance with a third embodiment of the present invention is shown. The gas sensor 30 shown in the third embodiment is different from the gas sensor 10 shown in FIG. 1 in that, except that the gas absorbing material 130 is disposed below the inductor electrode 11 〇 and the capacitor electrode 120 The gas sensor 30 further includes another gas absorbing material 350' and the gas absorbing material 350 covers the capacitor electrode 120, increasing the area connected to the capacitor electrode 120. Since the structural design of this embodiment has gas absorbing members 350 and 130 around and below the capacitor electrode 120, the gas concentration of the upper and lower environments of the planar inductor-capacitor resonator can be simultaneously detected. When the amount of the gas molecules to be tested adsorbed by the gas absorbing materials 350 and 130 or one of them is changed, the magnitude of the capacitance value can be changed, and the resonance frequency of the planar inductor-capacitor resonator is changed to know the gas to be tested. The concentration of the edge is 'can therefore increase the sensitivity of the gas sensor 3 〇. Of course, in the present embodiment, the upper and lower portions of the capacitor electrode 120 are respectively connected to the gas absorbing materials 350 and 130. Alternatively, the gas absorbing material 130 may be replaced by the substrate 2/0. The material 35〇 covers the capacitor electrode 12〇 and is connected to the capacitor electrode 12〇, so that the gas concentration of the upper environment of the planar inductor-capacitor resonator can be detected. The gas absorption material 35〇 can be used for printing, physical coating, chemical money _, electric mine or 1374265

TW4853PA transfer and other methods are produced. The gas absorbing materials 350, 130 may be the same or different materials, such as the aforementioned gas adsorbing material or gas reaction material, and will not be described herein.

Referring to Figure 4, there is shown a partial cross-sectional view of an oxygen sensor in accordance with a fourth embodiment of the present invention. The gas sensor 40 illustrated in the fourth embodiment is different from the gas sensor 30 illustrated in FIG. 3 in that the gas sensing benefit 40 further includes a substrate 240 ′ and the substrate 24 Ό is located below the gas absorbing material 130 . Used to set the gas absorption material π〇. The third embodiment is to use the gas absorbing material 130 directly as a substrate. Μλλμμ. Please refer to Fig. 5, which is a partial cross-sectional view showing a gas sensor in accordance with a fifth embodiment of the present invention. The gas sensor 50 shown in the fifth embodiment is different from the gas sensor 30 shown in FIG. 3 in that the gas absorbing material 350 is not directly covered on the capacitor electrode 120 but covered by the dielectric material 560. On the capacitor electrode 12A, the gas absorbing material 350 is further disposed above the dielectric material 560. The structure of the present embodiment is such that there are gas absorbing seals 35 〇 and 130 on the upper and lower sides of the dielectric material 560, and one or both of the gas absorbing materials 350 and 130 and the amount of gas molecules to be tested. The change "the dielectric constant of itself changes" further causes a significant change in the dielectric constant of the dielectric material 560 connected thereto, since the dielectric material 560 is overlaid on the capacitor electrode 120 and is connected to the capacitor electrode 12A. , therefore 1374265

When the dielectric constant of TW4853PA & watt 560 changes, the capacitance value will change, and the resonant frequency of the planar inductor-capacitor resonator will change to know the concentration change of the gas to be tested. In the present embodiment, since the change in the dielectric constant of the gas absorption material 350 or 130 causes a significant change in the dielectric constant of the dielectric material 560 connected thereto, the dielectric material 560 can be disposed. Increase the sensing capability of the gas sensor 5〇. The dielectric material 560 is selected from the group consisting of vinyl alcohol, polyvinylamine, cerium oxide (si〇2), dioxin (Τι〇2), zinc oxide (zn〇), and tin dioxide (Sn〇2). In the ethnic group, the technical field of the art makes it possible for the person with ordinary knowledge to use the actual dielectric material, and the appropriate adjustment uses different dielectric materials. Of course, in the present embodiment, the upper and lower portions of the dielectric material 560 are respectively connected to the gas absorbing materials 350 and 130. Alternatively, the gas absorbing material 130 may be replaced by the substrate 240. At this time, only the gas absorbing material is used. The 350 is disposed above the dielectric material 560 and connected to the dielectric material, thereby detecting the gas concentration of the upper environment of the planar inductor-capacitor resonator. Referring to Figure 12, there is shown a partial cross-sectional view of yet another gas sensor in accordance with a fifth embodiment of the present invention. The gas sensor 200 shown in Fig. 12 is different from the gas sensor 50 shown in Fig. 5 in that the gas absorbing material 130 of Fig. 5 is replaced with a substrate 240 in Fig. 12. At this time, only the gas absorbing material 350 is disposed above the dielectric material 560 and is connected to the dielectric material 560, so that the gas concentration of the upper environment of the planar inductor-capacitor resonator can be detected. Please refer to Figure 13, which shows the frequency variation of different dielectric materials. Taking the gas sensor 200 as shown in Fig. 12 as an example, the curve 131 〇 1374265

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TW4853PA is the frequency variation curve of the uncoated dielectric material 560; the curve 1320 is the frequency variation curve of the vinyl alcohol-based dielectric material 560; the curve 1330 is the frequency variation of the coated polyvinylamine dielectric material 560. curve. From the 13th figure, we can see that the frequency change after coating the vinyl alcohol-based dielectric material is fairly stable and does not cause frequent drift. Therefore, the accuracy of measuring the gas concentration concentration will be further improved. Sixth Embodiment Referring to Figure 6, there is shown a partial cross-sectional view of a gas sensor in accordance with a sixth embodiment of the present invention. The gas sensor 60 shown in the sixth embodiment is different from the gas sensor 50 shown in FIG. 5 in that the gas absorbing material 130 is disposed on the substrate 240, and no gas is disposed above the dielectric material 560. Absorbent material 350. The dielectric constant of the dielectric material 560 connected to the gas absorbing material 130 is changed by the change of the dielectric constant of the gas absorbing material 130 located above the substrate 240, since the dielectric material 560 is covered by the capacitor electrode 120. It is connected to it, so when the dielectric constant of the dielectric material 560 ® changes, the capacitance value changes accordingly, and the resonance frequency of the planar inductor-capacitor resonator changes to know the concentration change of the gas to be measured. Seventh Embodiment Referring to Figure 7, a partial cross-sectional view of a gas sensor in accordance with a seventh embodiment of the present invention is shown. The gas sensor 70 shown in the seventh embodiment is different from the gas sensor 50 shown in Fig. 5 in that: gas 13 1374265 • »

The TW4853PA body sensor 70 further includes a substrate 240, and the substrate 240 is located below the gas absorbing material '1' to set the gas absorbing material 13A. On the other hand, the fifth embodiment uses the gas absorbing material 130 as a substrate directly. ♦ The inductor electrode 110 and the capacitor electrode 12 are formed, for example, by printing, physical plating, electroless plating, plating, or transfer. The shape of the inductive electrode 110 and the capacitor electrode 120 may vary depending on design requirements. For example, the inductor electrode 1 is, for example, a planar spiral, and the capacitor electrode 120 is, for example, a plane symmetrical fork, a plane symmetrical rectangle, or a single planar electrode. Further description will be made below with reference to Figs. 8 to 10, respectively. "Month Referring to Figure 8, a schematic diagram of the first planar inductor-capacitor resonator is shown. In the planar inductor-capacitor resonator 80 shown in FIG. 8, the inductor electrode 110 is shown as an inductor electrode uofi) in FIG. 8, and the capacitor electrode 120 is represented by a capacitor electrode 120 (1). The inductor electrode lio(i) is a plane spiral, and the capacitor electrode 12〇(1) is a plane symmetrical lug fork. Since the capacitor electrode 120(1) is a plane symmetrical fork, it is considered to be a parallel connection of a plurality of single capacitors. As a result, the equivalent capacitance value of the capacitor electrode 12 〇 (1) can be greatly improved. Referring to Figure 9, a schematic diagram of a second planar inductor-capacitor resonator is shown. In the planar inductor-capacitor resonator 9 shown in FIG. 9, the inductor electrode 110 is represented by the inductor electrode noci) in the ninth diagram, and the capacitor electrode 120 is represented by the capacitor electrode 12〇(2). The planar inductor capacitor resonator 90 is different from the planar inductor-capacitor resonator 80 shown in Fig. 8 in that the capacitor electrode 12〇(2) is a plane symmetrical rectangle. 1374265

TW4853PA. . Please refer to Figure 10, which shows the third planar inductor-capacitor resonance, =: intent. In the planar inductor-capacitor resonator 100 shown in Fig. 10, the inductor electrode 110 is represented by the inductor electrode 110 (1) in FIG. 10 and the capacitor electrode 120 (3) is represented by the capacitor electrode 120 (3). The planar inductor-capacitor resonator 100 is different from the planar inductor-valve resonator 80 shown in Fig. 8 in that the capacitor electrode 120(3) is a single planar electrode. φ M Of course, the planar inductor-capacitor resonators s shown in FIGS. 8 to 10 are used in all the embodiments described above, and those skilled in the art may have practical needs, and appropriate The adjustment uses different planar inductor-capacitor resonators, with different combinations of embodiments, the above is only an example. The δ month refers to Fig. 11, which is a schematic diagram showing the change of the resonance frequency with time. For convenience of explanation, the figure u is tested with green papaya as an example. Using the planar inductor-capacitor resonator as shown in Fig. 8, the gas sensor 30 in the third embodiment is used, in which the gas used is used. The absorbing material is a polypropylene phthalamide polymer having a silver metal of a metal for measuring ethylene gas, and the change of the resonance frequency can be explained from Fig. 11. Since green papaya will mature over time, ethylene gas will be released. The gas absorbing material absorbs the molecules of the ethylene gas, so that the capacitance value of the planar induction galvanic resonator changes, and the resonance frequency of the planar inductor-capacitor resonator gradually decreases with time. In the gas sensor disclosed in the above embodiment of the present invention, the gas absorbing material can select different gas adsorbing materials or gases according to the type of gas to be tested. 15 1374265

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TW4853PA should be material. In addition, the design of the capacitor electrode can be selected from a plane symmetrical interdigitated shape, a plane symmetrical rectangular shape or a single planar electrode, etc. depending on the design requirements. The gas sensor disclosed in the above embodiment is not only small in size but also inexpensive. In addition, the manufacture of the gas sensor disclosed in the above embodiments is relatively simple, and if it is applied to the detection classification of agricultural products, the labor cost will be greatly reduced. Furthermore, by using the above gas detector to detect single box or single batch of fruits and vegetables, we can effectively judge the maturity of individual agricultural products, thereby achieving the purpose of time-sharing sales control of single-box or single-batch fruits and vegetables. In view of the above, the present invention has been disclosed above in a preferred embodiment, and is not intended to limit the invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial cross-sectional view showing a gas sensor in accordance with a first embodiment of the present invention. ® Fig. 2 is a partial cross-sectional view showing a gas sensor in accordance with a second embodiment of the present invention. Fig. 3 is a partial cross-sectional view showing a gas sensor in accordance with a third embodiment of the present invention. Fig. 4 is a partial cross-sectional view showing a gas sensor in accordance with a fourth embodiment of the present invention. Fig. 5 is a partial cross-sectional view showing a gas sensor in accordance with a fifth embodiment of the present invention. 16 X only 1374265

TW4853PA A Gas Sensing of the Sixth Embodiment A Gas Sensing of the Seventh Embodiment FIG. 6 is a partial cross-sectional view showing the first embodiment of the present invention. Figure 7 is a partial cross-sectional view showing the descent of the present invention. Schematic diagram of the first type of planar inductor-capacitor resonator Figure 4 Schematic diagram of the second type of planar inductor-capacitor resonator Figure 10 shows the schematic diagram of the third type of planar inductor-capacitor resonator

Figure 11 is a schematic diagram showing the change of the resonant frequency with time. Fig. 12 is a partial cross-sectional view showing still another gas sensor in accordance with a fifth embodiment of the present invention. Figure 13! The display shows the frequency of different dielectric materials. [Description of main component symbols] 10, 20, 30, 40, 50, 60, 70, 200: gas sensors 11〇, 110 (1 wide inductance electrode 120, 120 (1), 12〇 (2), 12〇 (3): Capacitance electrodes 130, 350: gas absorbing material 240 = substrate 560: dielectric materials 80, 90, 1G0: planar inductor-capacitor resonator: i

Claims (1)

1374265 丨 '月丨3日修正本丨^55 2011/12/13_151 Shen Fu & Amendment 10, the scope of application for patent: 1. A gas sensor, comprising: a planar inductor-capacitor resonator, including: An inductor electrode; and a capacitor electrode connected to the inductor electrode; and a gas absorbing material connected to at least a portion of the capacitor electrode; A dielectric material is connected to the gas absorbing material and the capacitor electrode; wherein the gas absorbing material changes a resonance frequency of the planar inductor-capacitor resonator according to a change in a concentration of the gas to be measured. 2. The gas sensor according to claim 1, wherein the capacitor electrode is disposed on the gas absorbing material and is connected to the gas absorbing material. 3. The gas sensor of claim 1, wherein the gas absorbing material is attached to the capacitor electrode and connected to the capacitor electrode. 4. The gas sensor of claim 1, further comprising: a substrate for providing the gas absorbing material. 5. The gas sensor of claim 2, further comprising: another gas absorbing material covering the capacitor electrode and connected to the capacitor electrode. The gas sensor of claim i, wherein the dielectric material is selected from the group consisting of vinyl alcohol, polyvinylamine, and dioxide dioxide. Among the groups consisting of bismuth (Si〇2), titanium dioxide (Ti〇2), zinc oxide (Zn0), and tin dioxide (Sn〇2). The gas sensor of claim 1, further comprising: a substrate for arranging the capacitor electrode, wherein the dielectric material covers the capacitor electrode, and the gas absorbing material is disposed on the On the dielectric material. 8. The gas sensor of claim i, further comprising: a plate for arranging the gas absorbing material, wherein the capacitor electrode is disposed on the gas absorbing material, the dielectric material Covered on the capacitor electrode. 9. The gas sensor of claim 8, further comprising: another gas absorbing material disposed on the dielectric material. 10. The gas sensor of claim 1, wherein the gas absorbing material is a gas reactive material. U. The gas sensor according to claim 10, wherein the gas reaction material is selected from the group consisting of metal oxide catalysis, platinum-titanium oxide composite (Pt-Tl〇2), and gold-plated compound (PtTMOSFET). A group consisting of a platinum-tin oxide composite (Pt_Sn〇2), a carbon nanotube (CNT), and a material having silver ions (Ag). 12. The gas sensor of claim 1, wherein the gas absorbing material is a gas absorbing material. A gas sensor according to claim 12, wherein the gas adsorbing material is selected from the group consisting of 1-methylcyclopropene (1). , 1-MCP), activated carbon, chlorinated (ZrCl2), chitosan vinegar's high acid clock, polyacryl amide polymer with silver metal of the metal and bamboo quenching Among the groups of liquids. 14. The gas sensor of claim 1, wherein the capacitor electrode is a single planar electrode. 15. The gas sensor of claim 1, wherein the capacitor electrode is a planar symmetrical fork. 16. The gas sensor of claim 1, wherein the capacitor electrode is a plane symmetrical rectangle. 17. The gas sensor of claim 1, wherein the inductive electrode is a planar spiral. 18. The gas sensor of claim 1, wherein the gas absorbing material is an ethylene gas absorbing material. 19. The gas sensor of claim 1, wherein the gas absorbing material is a carbon monoxide gas absorbing material. 20. The gas sensor of claim 1, wherein the gas absorbing material is a carbon dioxide gas absorbing material. 20