TWI371064B - Substrate cleaning apparatus - Google Patents
Substrate cleaning apparatusInfo
- Publication number
- TWI371064B TWI371064B TW097108336A TW97108336A TWI371064B TW I371064 B TWI371064 B TW I371064B TW 097108336 A TW097108336 A TW 097108336A TW 97108336 A TW97108336 A TW 97108336A TW I371064 B TWI371064 B TW I371064B
- Authority
- TW
- Taiwan
- Prior art keywords
- cleaning apparatus
- substrate cleaning
- substrate
- cleaning
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020070024438A KR100879015B1 (en) | 2007-03-13 | 2007-03-13 | Cullet remover for glass |
KR1020070024437A KR100871135B1 (en) | 2007-03-13 | 2007-03-13 | Cullet remover for glass |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200842966A TW200842966A (en) | 2008-11-01 |
TWI371064B true TWI371064B (en) | 2012-08-21 |
Family
ID=44822168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097108336A TWI371064B (en) | 2007-03-13 | 2008-03-10 | Substrate cleaning apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI371064B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105739243A (en) * | 2016-04-22 | 2016-07-06 | 长葛市汇达感光材料有限公司 | Fabrication method of light sensitive material plate |
-
2008
- 2008-03-10 TW TW097108336A patent/TWI371064B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200842966A (en) | 2008-11-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |