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TWI371064B - Substrate cleaning apparatus - Google Patents

Substrate cleaning apparatus

Info

Publication number
TWI371064B
TWI371064B TW097108336A TW97108336A TWI371064B TW I371064 B TWI371064 B TW I371064B TW 097108336 A TW097108336 A TW 097108336A TW 97108336 A TW97108336 A TW 97108336A TW I371064 B TWI371064 B TW I371064B
Authority
TW
Taiwan
Prior art keywords
cleaning apparatus
substrate cleaning
substrate
cleaning
Prior art date
Application number
TW097108336A
Other languages
Chinese (zh)
Other versions
TW200842966A (en
Inventor
Young-Soon Yoon
Young-Min Yu
Original Assignee
Sfa Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020070024438A external-priority patent/KR100879015B1/en
Priority claimed from KR1020070024437A external-priority patent/KR100871135B1/en
Application filed by Sfa Engineering Corp filed Critical Sfa Engineering Corp
Publication of TW200842966A publication Critical patent/TW200842966A/en
Application granted granted Critical
Publication of TWI371064B publication Critical patent/TWI371064B/en

Links

TW097108336A 2007-03-13 2008-03-10 Substrate cleaning apparatus TWI371064B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020070024438A KR100879015B1 (en) 2007-03-13 2007-03-13 Cullet remover for glass
KR1020070024437A KR100871135B1 (en) 2007-03-13 2007-03-13 Cullet remover for glass

Publications (2)

Publication Number Publication Date
TW200842966A TW200842966A (en) 2008-11-01
TWI371064B true TWI371064B (en) 2012-08-21

Family

ID=44822168

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097108336A TWI371064B (en) 2007-03-13 2008-03-10 Substrate cleaning apparatus

Country Status (1)

Country Link
TW (1) TWI371064B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105739243A (en) * 2016-04-22 2016-07-06 长葛市汇达感光材料有限公司 Fabrication method of light sensitive material plate

Also Published As

Publication number Publication date
TW200842966A (en) 2008-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees