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TWI368255B - Vision inspection system for semiconductor devices - Google Patents

Vision inspection system for semiconductor devices

Info

Publication number
TWI368255B
TWI368255B TW097122379A TW97122379A TWI368255B TW I368255 B TWI368255 B TW I368255B TW 097122379 A TW097122379 A TW 097122379A TW 97122379 A TW97122379 A TW 97122379A TW I368255 B TWI368255 B TW I368255B
Authority
TW
Taiwan
Prior art keywords
semiconductor devices
inspection system
vision inspection
vision
semiconductor
Prior art date
Application number
TW097122379A
Other languages
Chinese (zh)
Other versions
TW200908078A (en
Inventor
Ssang-Gun Lim
Sang-Yun Lee
Dong-Kyu Son
Sung-Min Jang
Ju-Hun An
Original Assignee
Intekplus Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intekplus Co Ltd filed Critical Intekplus Co Ltd
Publication of TW200908078A publication Critical patent/TW200908078A/en
Application granted granted Critical
Publication of TWI368255B publication Critical patent/TWI368255B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/02—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a plurality of sample containers moved by a conveyor system past one or more treatment or analysis stations
    • G01N35/04—Details of the conveyor system

Landscapes

  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW097122379A 2007-06-29 2008-06-16 Vision inspection system for semiconductor devices TWI368255B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070065709A KR100867386B1 (en) 2007-06-29 2007-06-29 System for vision inspection of semiconductor device

Publications (2)

Publication Number Publication Date
TW200908078A TW200908078A (en) 2009-02-16
TWI368255B true TWI368255B (en) 2012-07-11

Family

ID=40226227

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097122379A TWI368255B (en) 2007-06-29 2008-06-16 Vision inspection system for semiconductor devices

Country Status (3)

Country Link
KR (1) KR100867386B1 (en)
TW (1) TWI368255B (en)
WO (1) WO2009005222A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101134985B1 (en) * 2009-03-05 2012-04-09 (주)제이티 Vision inspection apparatus
ES2559041T3 (en) * 2012-03-27 2016-02-10 Glp Systems Gmbh Sample Archive
JP6679375B2 (en) * 2015-04-07 2020-04-15 キヤノン株式会社 Parts supply device, robot system, and parts supply method
US10076815B2 (en) 2015-04-07 2018-09-18 Canon Kabushiki Kaisha Parts supply apparatus, parts supply method and robot system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2847176B2 (en) * 1993-12-27 1999-01-13 江崎グリコ株式会社 High-speed tray loading device
KR20010028963A (en) * 1999-09-28 2001-04-06 윤종용 Leadframe transferring device having sensor for sensing jammed leadframe
JP3973969B2 (en) 2001-06-07 2007-09-12 株式会社リコー Paper feeding device and image forming apparatus
KR100596505B1 (en) * 2004-09-08 2006-07-05 삼성전자주식회사 Sawing/Sorting Apparatus
KR100638311B1 (en) * 2005-01-31 2006-10-25 (주) 인텍플러스 Apparatus for inspecting semiconductor device and method for a classification semiconductor device using the same

Also Published As

Publication number Publication date
KR100867386B1 (en) 2008-11-06
TW200908078A (en) 2009-02-16
WO2009005222A1 (en) 2009-01-08

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