TWI362660B - - Google Patents
Download PDFInfo
- Publication number
- TWI362660B TWI362660B TW093140067A TW93140067A TWI362660B TW I362660 B TWI362660 B TW I362660B TW 093140067 A TW093140067 A TW 093140067A TW 93140067 A TW93140067 A TW 93140067A TW I362660 B TWI362660 B TW I362660B
- Authority
- TW
- Taiwan
- Prior art keywords
- axis
- light energy
- image
- energy distribution
- distribution
- Prior art date
Links
- 238000009826 distribution Methods 0.000 claims description 152
- 238000001514 detection method Methods 0.000 claims description 81
- 230000003287 optical effect Effects 0.000 claims description 66
- 201000009310 astigmatism Diseases 0.000 claims description 14
- 238000011895 specific detection Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 59
- 238000010586 diagram Methods 0.000 description 15
- 238000003384 imaging method Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
- G11B7/0912—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only by push-pull method
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1378—Separate aberration correction lenses; Cylindrical lenses to generate astigmatism; Beam expanders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/4446—Type of detector
- G01J2001/448—Array [CCD]
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Automatic Focus Adjustment (AREA)
- Focusing (AREA)
- Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
- Optical Recording Or Reproduction (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003428986A JP4530658B2 (ja) | 2003-12-25 | 2003-12-25 | フォーカス検出およびこれを用いた傾き調整の方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200534272A TW200534272A (en) | 2005-10-16 |
| TWI362660B true TWI362660B (ja) | 2012-04-21 |
Family
ID=34787780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093140067A TW200534272A (en) | 2003-12-25 | 2004-12-22 | Focus detection and tilt regulating method and apparatus using the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4530658B2 (ja) |
| KR (1) | KR100966906B1 (ja) |
| CN (1) | CN100419871C (ja) |
| TW (1) | TW200534272A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4974059B2 (ja) * | 2008-02-15 | 2012-07-11 | 横河電機株式会社 | 自動焦点制御システム |
| US8687180B2 (en) * | 2012-06-07 | 2014-04-01 | Molecular Devices, Llc | System, method, and device for determining a focal position of an objective in a microscopy imaging system |
| KR101858165B1 (ko) | 2016-05-16 | 2018-05-15 | 주식회사 케이랩 | 포커싱 상태 측정 장치 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2761280B2 (ja) * | 1990-04-16 | 1998-06-04 | オリンパス光学工業株式会社 | 自動焦点カメラのレンズ駆動装置 |
| JP3412322B2 (ja) * | 1995-03-30 | 2003-06-03 | 横河電機株式会社 | 共焦点顕微鏡 |
| JP2950759B2 (ja) * | 1995-08-31 | 1999-09-20 | キヤノン株式会社 | 視線検出装置を有する光学機器 |
| JPH1074331A (ja) * | 1996-06-26 | 1998-03-17 | Omron Corp | 反射型光電センサ及び光ディスク判別装置 |
| JP3463483B2 (ja) * | 1996-10-17 | 2003-11-05 | ミノルタ株式会社 | 画像検出システム |
| JP2001028144A (ja) * | 1999-07-13 | 2001-01-30 | Ricoh Co Ltd | 光情報記録再生装置 |
| JP2002123953A (ja) * | 2000-10-12 | 2002-04-26 | Hitachi Ltd | 高密度光記録装置 |
| US6958967B2 (en) * | 2000-11-17 | 2005-10-25 | Matsushita Electric Industrial Co., Ltd. | Holographic optical information recording/reproducing device |
| JP3819756B2 (ja) * | 2001-10-23 | 2006-09-13 | 富士通株式会社 | 光情報処理装置 |
-
2003
- 2003-12-25 JP JP2003428986A patent/JP4530658B2/ja not_active Expired - Fee Related
-
2004
- 2004-04-23 CN CNB2004100346970A patent/CN100419871C/zh not_active Expired - Fee Related
- 2004-04-23 KR KR1020040028198A patent/KR100966906B1/ko not_active IP Right Cessation
- 2004-12-22 TW TW093140067A patent/TW200534272A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN100419871C (zh) | 2008-09-17 |
| TW200534272A (en) | 2005-10-16 |
| JP4530658B2 (ja) | 2010-08-25 |
| JP2005189394A (ja) | 2005-07-14 |
| KR20050065249A (ko) | 2005-06-29 |
| KR100966906B1 (ko) | 2010-06-30 |
| CN1637880A (zh) | 2005-07-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10491799B2 (en) | Focus detection apparatus, focus control apparatus, image capturing apparatus, focus detection method, and storage medium | |
| JP4984491B2 (ja) | 焦点検出装置および光学システム | |
| KR20190067136A (ko) | 촬영 광학계 | |
| JP5839786B2 (ja) | 撮像装置およびトラッキングデータの調整方法 | |
| JP5448621B2 (ja) | 撮像装置、及び撮像装置の制御方法 | |
| US9674420B2 (en) | Lens apparatus and image capturing apparatus | |
| JP2008241733A (ja) | 撮像装置 | |
| JP2010101959A (ja) | 顕微鏡装置 | |
| JP6116151B2 (ja) | 距離検出装置 | |
| JP2014081462A (ja) | 焦点検出装置及びそれを有するレンズ装置及び撮像装置 | |
| JPH0311443B2 (ja) | ||
| US20130250149A1 (en) | Image capturing apparatus and control method thereof | |
| TWI362660B (ja) | ||
| JP2018148383A (ja) | 撮像装置および撮像ユニット | |
| JPS6232410A (ja) | 焦点検出装置 | |
| JP4838652B2 (ja) | 撮像装置 | |
| US20190320122A1 (en) | Control apparatus, image capturing apparatus, control method, and non-transitory computer-readable storage medium | |
| JP2017223879A (ja) | 焦点検出装置、フォーカス制御装置、撮像装置、焦点検出方法および焦点検出プログラム | |
| JP7057200B2 (ja) | 撮像装置 | |
| JP2012118154A (ja) | 撮像装置 | |
| JP2016024338A (ja) | 撮像装置 | |
| JP2001166202A (ja) | 焦点検出方法及び焦点検出装置 | |
| JP6344920B2 (ja) | 撮像装置 | |
| JP6341668B2 (ja) | 撮像装置 | |
| JP2012117871A (ja) | 検出装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |