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TW548810B - Multi-chip package - Google Patents

Multi-chip package Download PDF

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Publication number
TW548810B
TW548810B TW091111767A TW91111767A TW548810B TW 548810 B TW548810 B TW 548810B TW 091111767 A TW091111767 A TW 091111767A TW 91111767 A TW91111767 A TW 91111767A TW 548810 B TW548810 B TW 548810B
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Taiwan
Prior art keywords
chip
chip package
transparent substrate
substrate
conductive
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TW091111767A
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English (en)
Inventor
Yuan-Jen Chao
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Gigno Technology Co Ltd
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Priority to TW091111767A priority Critical patent/TW548810B/zh
Priority to US10/442,281 priority patent/US6759753B2/en
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Publication of TW548810B publication Critical patent/TW548810B/zh

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15Ceramic or glass substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/05599Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Wire Bonding (AREA)

Description

548810
五、發明說明(1) 【發明領域】 基板種多晶片封裝’特別關於—種具透明 【習知技術】 當電子系統的功能日益強大,而其體積又不斷追求輕 薄短小時,習知的積體電路封裝(IC package )及印刷^ 路板(printed circuit board )組裝技術已經不能滿足 縮小體積的需求,因此,將更多複雜之功能整合 (integrate)在單一積體電路晶片(IC chip)中的趨勢 至為明顯。 然而,現在的積體電路製造技術針對不同功能之晶片 會有大不相同的製程,例如,邏輯積體電路(logic 1C) 與記憶體積體電路(memory 1C)的製程差異性極大,因 此不容易將邏輯積體電路與記憶體積體電路整合在同一曰 ^ 曰曰 片中,而又能同時使二積體電路發揮最佳功能,故將不同 晶片封裝在同一封裝體内的技術便因而產生,即所謂的多 晶片封裝(MCP, multi-chip package )。 承上所述,當多晶片封裝的技術發展到一定程度之 後,位於同一封裝體内之各晶片間的聯合功能已經可以視 為一系統’而此即稱為Sip (SyStem in package)。 目前’多晶片封裝有許多類型,且其製造方法也不盡 相同,以下列舉兩種多晶片封裝類型說明習知多晶片封裝 的結構及其缺點。
第5頁 548810 五、發明說明(2) 首先說明一種利用導線架(lead frame )來承載複數 個晶片的多晶片封裝,請參照圖i所示,習知的多晶片封 裝1包括一導線架u、至少二晶片13、複數個導電=15以 及一封膠體(m〇lding compound) 17。其中,各晶片η係 。又置於導線架1 1上,導電線1 5係分別接合(boding )各、 晶片1 3與導線架1 1之金屬線,而封膠體1 7係包覆導線架 u、各晶片13以及各導電線15。在多晶片封裝j中,各晶 片1 3之間係利用導線架丨丨中的金屬線來互相連接 曰曰 (interC0nnect ),亦即是,各晶片13係先透過導電線^ 接合至導線架11 ,然後經由導線架11之金屬線讓各晶片13 互相連接。然而,熟悉該項技術者都瞭解,製造習知多晶 片封裝1的製程與製造傳統之單晶片封裝的製程幾乎相 同,其中,導線架11受限於傳統的製造技術而無法具有極 細的圖案(fine pattern),故其無法應用於連接具高腳 數(high pin - count)之晶片。另外,由於導線架η為單 層結構,所以其金屬線無法形成交叉的形式而限制了金屬 線所能提供之電路佈局(layout)的複雜度,因此,為解 決金屬線無法交叉的問題,只好再利用導電線跳接所欲短 路之金屬線,然而,如此一來便使得製程更加複雜,而且 還會增加所製得之多晶片封裝1的體積。 曰曰 其次說明一種利用BGA (球栅陣列式,bai 1 gr id Kray )基板來承載複數個晶片的多晶片封裝,請參照圖2 所示,另一習知多晶片封裝2包括一BGA基板21、至少一曰 片23、複數個導電線25以及一封膠體27。其中,BGA基板曰
548810 五、發明說明(3) 2 1的材質通常為樹脂性材料,而β G a基板21之上平面係形 成有複數個手指(finger)與内接腳(inner lead), BGA基板21之下平面係形成有複數個錫球(s〇lder baU ) 211,各μ片23係设置於BGA基板21之上平面上,導電線25 係分別接合各晶片23與BGA基板21之各手指,而封膠體27 係包覆BGA基板21、各晶片23以及各導電線25。在多晶片 封裝2中,各晶片23之間係利用BGA基板21之手指與内接腳 來互相連接,亦即是,各晶片23係先透過導電線25接合至 BGA基板21之手指,然後經由與各手指相連接之内接腳讓 各晶片23互相連接,而各晶片23係經由手指、内接腳及錫 球與外部電性連接。凡熟悉該項技術者都瞭解,BGA基板 21係具有複數個導電層來形成内接腳,所以能夠於各晶片 23之,提供較複雜的電路以及極細的圖案,而且各晶片23 可以是以覆晶(fl ip-chip )方式設置於BGA基板上,所以 ,,減少、甚至於不需使用導電線25,進而可以簡化製造 多晶片封裝2的製程,並有效控制其體積。然而,B(jA基板 的成本較高,而且由於樹脂性材料之BGA基板21的埶膨脹 係數通常較以矽為材料之晶片23的熱膨脹係數為大,所以 當晶片23以覆晶方式設置於BGA基板21上時,所製得的 晶片封裝2的可靠度(reliabiHty )便會降低。 此外,由於BGA基板21的絕緣性有限,所以BGA基板21 之手指與内接腳於傳輸高頻信號時,便會因為所產生的寄 生電f及寄生漏電電阻導致高頻信號的衰減。 综上所述,由於習知的多晶片封裝通常是利用導線架 548810
=疋基板來承載複數個晶片及提供連接各晶片之電 ^乂 ί知的多晶片封裝不是無法提供極細的圖宰^ 7導:架時卜就是需要較高的成本(使用 案(使 ;Ϊ=?/因寄生電容及寄生漏電電阻而衰1以 問顯。田、μ,土板之熱膨脹係數不同引起的可靠度降低等 如何提供一種能夠解決上述使用導線架或是
ΓΛ 多晶片封裝的問題,實乃當前多晶片封裝技V 的重要課題之一。 彳衣孜術 【發明 針 細圖案 本 因寄生 本 膨脹係 為 板、至 中,透 (elec 晶片係 統,且 接,以 概要】 對上述 的多晶 發明之 電容及 發明之 數不同 達上述 少二晶 明基板 t r ica 1 設置於 該等連 便電路 問題’本發明之目的 片封裝。 另一目的為提供一種 寄生漏電電阻而衰減 又一目的為提供一種 所導致之可靠度降低 目的,依本發明之多 片、複數個連接端以 上至少佈設有一作為 inter-connection 〕 透明基板上並與導電 接端係經由複數個導 系統能夠透過該等導 為提供一種能夠提供極 能夠有效降低高頻信號 之現象的多晶片封裝。 月&夠避免因内部材料熱 的多晶片封褒。 晶片封裝包括一透明基 及一封膠體。在本發明 電性相互連接 用之導電層,而該等 層共同構成一電路系 電線與電路系統電性連 電線及該等連接端與外
第8頁 548810 一、發明說明(5) "一^ " ---- 部電性連接,而封膠體係至少包覆該等 由於依本發明之多晶片封裝係利用1美 片,而透明基板可以是玻璃基板, ^ 承栽該 於透……=基所以能夠應用目前 等晶片 的製造技術於透明基板上形成極二圖案應用目. 透明基板,尤其是玻璃基板,可以接 _ ’另外’ 低的介電常數,以降低高頻信號因寄;電d:=與極 陴而衰減之現象’而且玻璃基板材料與半導體晶片材:: 熱膨脹係數接近,故能夠避免因多晶片封敍= 脹係數不同所導致之可靠度降低。 4材抖熱膨 【較 晶片 明。 至少 技術 線接 包括 導電 一破 311 佳實施例之詳細說明】 ::將ΪΪ相關圖式’說明依本發明較佳實施例之多 ,、,,、相同的兀件將以相同的參照符號加以說 透明基板、 依本發明較佳實施例之多晶片封裝包括 二晶片、複數個連接端以及一封膠體。 在本發明中,各晶片可以利用導電線接合技術、覆晶 或其他封裝技術設置於透明基板上,以下分別以導^ 合技術及覆晶技術為例說明。 請參照圖3所示,依本發明較佳實施例之多晶片封裝3 一透明基板31、二晶片33、複數個連接端35、複數個 線3 7以及一封膠體39。在本實施例中,透明基板“為 璃基板,而且透明基板31之上平面形成一導電層 其係佈設有所需之電路佈局之電路圖案。由於9透明
548810 五、發明說明(6) 基板3 1的材質為玻璃,所以能夠應用目前的技術來形成極 細的圖案,亦即是導電層3 11可以具有極細之電路圖案。 凡熟悉該項技術者應該瞭解,於習知的導線架式封裝中, 導線架所能夠提供的最小線寬通常在1 〇 〇 # m以上;於習知 的BGA基板式封裝中,bga基板所能夠提供的最小線寬通常 在3 0 /z m以上;而於本實施例之多晶片封裝3中,玻璃基板 上所提供的最小線寬能夠利用目前的製造技術達到3 μ m, 甚至於1 # m。在本實施例中,導電層311的材料可以是金 屬或是合金等具導電性的物質。 另外’利用目前的製造技術能夠於玻璃基板上形成複 數層導電層(multi - layer metal pattern)(圖中未顯 示)’其係於各導電層之間分別形成一絕緣層,例如氮化 矽(Silicon Nitride)、氧化矽(Silicon Oxide)等, 並且於各絕緣層形成複數個開孔,因此,各導電層能夠透 過該等開孔互相連接,於是便能夠得到更複雜的電路佈 局,以便製造出功能強大之S IP的多晶片封裝。 承上所述’在透明基板3 1的下側可以更形成有一塾部 (pad ),用以承載透明基板31 (圖中未顯示)。 該等晶片3 3係利用黏膠黏置於透明基板3 ^上,而各晶 片3 3係分別透過導電線3 7電性連接至透明基板3 1之導電層 311,因此,各晶片33便能夠藉由導電層311的電路佈局互 相連接並傳輪訊號’以便由晶片3 3與導電層3 11共同構成 所需之電路系統,進而發揮出所需之電路系統的強大功 能。其中’各晶片3 3分別可以是邏輯積體電路元件、記憶
第10頁 548810 五、發明說明(7) 體積體電路元件、或是光電積體電路元件,如光二極體 (photo diode ) 〇 該等連接端35可以是位於透明基板31周圍,且透過複 數個導電線37與透明基板31之導電層3U電性連接,因 此’各晶片33便能夠透過導電層3U的電路及該等連接端 35與外部電性連接以傳輪訊號。另外,如圖3所示,各晶 片33亦可依連接之需求,直接透過該等導電線37與該等連 接端35作電性連接,因此,各晶片33便能夠透過導電線37 及該等連接端35與外部電性連接。在本實施例中,連接 35可以疋習知的手指(f inger )或是接腳(丨等。 如上所述,依本發明較佳實施例之多晶片封裝3為一 ^立^力月b強大的系統,其功能係取決於所使用之各晶片 ΠΓ過該等連接端’多晶片封裝3能夠接收“ :二卜=?行邏輯運算或儲存資料,J能夠輸出訊號 以供外界其他系統或設備使用。 導電用封膠製程所形成,以便至少包覆該等 ==連貫 多曰=參^圖4所示’依本發明另一較佳實施例之 夕日日片封裝4包括一透明基板 日 1 !7 端45、複數個導電線47以及板一1 一^片43、複數個連接 透明基板41之上平面形二::體9。在本實施例中’ 電性相互連接之電路係 a ,八係佈设有所需 之說明係如前述之透明A板,圖案。有關於透明基板41 土板31 (如圖3所示),故此不再 548810 五、發明說明(8) -—> 闡述。 該等晶片43係利用目前常見之覆晶方式以異方性導電 膜(ACF’ Anisotropic Conducting Film)黏置於透明基 板41上’即各晶片43之銲墊分別直接與透明基板41之導^ 層4 11電性連接,目此,各晶片43便能夠透過導電層4 11的 電路佈局互相電性連接並傳輸訊號,以便由晶片43與導電 層4 11 /、同a構成所需之電路系統,進而發揮出所需之系統 的強f力肖b其中,各晶片43分別可以是邏輯積體電路元 件、a己憶體積體電路元件、或是光電積體電路元件,如 二極體。 疋 該等連接端45可以是位於透明基板41周圍,且藉由複 數個導電線47與透明基板41之導電層411電性連接,因 此,各晶片43便能夠透過導電層411的電路及該等連接端 45與外部電性連接並交換訊號。在本實施例中,連接端α 可以是習知的手指(finger )或是接腳(lead )等。 封膠體49係利用封膠製程所形成,以便至少包覆該等 導電線47。在本實施例中,封膠體49係包覆透明基板、 晶片43、部分之連接端45及導電線47。 如上所述,依本發明之多晶片封裝係於透明基板,如 玻璃基板,上形成導電層(甚至是複數個導電層),而從 在玻璃基板上形成導電層的技術已經應用於產業的成功範 例看來,依目前的,術已經能夠在玻璃基板上形成極細圖 案,且其線寬能夠遠小於BGA基板所提供的30 // m並達到3 # m的程度,故依本發明之多晶片封裝係足以應付高腳數
第12頁 548810 五、發明說明(9) 連接(high pin count interconnection )的需求;而 且,隨著產業的發展,於玻璃基板上形成導電層的技術已 經是低成本且高成熟度的技術,因此利用此技術來製造所 需之玻璃基板將會比習知的BGA基板更便宜且高可靠度。 承上所述,由於玻璃基板為高絕緣性及低介電常數的 材料,尤其在極高頻率之下仍然能夠保持此特性,所以當 玻璃基板上的導電層在傳輸高頻信號時,較不會因為寄生 電容、寄生漏電電阻等造成信號的衰減,因而能夠提高電 路的性能。特別是在多晶片封裝中包括有射頻晶片(r F chip )時,上述之特點更為顯著。 此外’由於玻璃基板材料與半導體晶片材料之熱膨脹 係數接近’因此在將晶片以覆晶方式黏置於玻璃基板上時 依然能夠維持產品的可靠度。 另外’依本發明之多晶片封裝係使用透明基板,所以 在進行黏晶(d i e attaching )製程時,如覆晶製程,可 以較容易地進行晶片對準透明基板的動作,而%且利用^學 檢查來測試製程結果亦至為簡單。除此之外,使用透明2 板還可以增加多晶片封裝的應用範圍,例如,當多晶片^ 裝之晶片為光感應元件(optical sensor)或光發射元件 (light㈣itter)時,晶片能夠與外界利用光訊^作訊 號傳輸,此時,由於透明基板的可透光性,所以光訊號 以直接穿透透明基板直接在晶片與外界之間傳遞,而多曰 片封裝便可以是作為一光訊號溝通介面(〇ptical 曰曰 communication interface )。舉例而言,如圖4所示之多 548810 五、發明說明(i〇) 晶片封裝4可以讓封膠體4 9僅覆蓋於透明基板4〗上側,所 以晶片4 3與外界之間能夠僅隔有透明基板4丨,因此光訊號 能夠透過透明基板41直接在晶片43與外部之間傳輸。另 外,如前所述,透明基板41下側可以設置一用以承载透明 基板4 1的墊部(圖中未顯示),其材料可以為透明材質, 以便光信號能夠順利傳輸。 綜上所述’由於依本發明之多晶片封裝係利用透明基 板來承載該等晶片,而透明基板可以是玻璃基板,所以= 夠應用目别的製造技術於透明基板上形成極細圖案之導電 f;另外,使用透明基板,尤其是玻璃基板,可=提供極 高的絕緣性與極低的介電常數,以降低高頻信號因寄^ 容及寄生漏電電阻而衰減之現象,而且玻璃基板材料與 導體晶片材料之熱膨脹係數接近,故能夠避免因多晶片'千 裝内部材料熱膨脹係數不同所導致之可靠度降低=曰曰片封 以上所述僅為舉例性,而非為限制性者。 本發明之精神與範疇,而對其進行之等效修改 應包含於後附之申請專利範圍中。 任何未脫離 或變更,均
548810 圖式簡單說明 【圖式簡單說明】 圖1為一示意圖’顯示習知多晶片封裝的示意圖,其 係利用導線架承載晶片。 圖2為一示意圖,顯示另一習知多晶片封裝的示意 圖,其係利用BGA基板承載晶片。 圖為一示意圖,顯示依本發明較佳實施例之多晶片 封裝的不意圖,其中晶片係透過導電線與透明基板之導電 層電性連接。 圖4為一示意圖 晶片封裝的示意圖, 基板之導電層上。 ,顯示依本發明另一 其中晶片係利用霜曰Λ貫施例之多 覆日日方式黏置於透明 【圖式符號說明】 1 多晶片封 11 導線架 13 晶片 15 導電線 17 封膠體 2 多晶片封 21 B G Α基板 211 錫球 23 晶片 25 導電線 27 封膠體
548810
第16頁

Claims (1)

  1. 548810 _案號 911 11767_年月日_Hi_ 六、申請專利範圍 體更至少部分覆蓋該等連接端。 7、 如申請專利範圍第1項所述之多晶片封裝,其中至少一 晶片係以覆晶(f 1 i p-ch i p )方式設置於該透明基板上。 8、 如申請專利範圍第7項所述之多晶片封裝,其中以覆晶 方式設置之該晶片係透過該透明基板與外部進行光學訊號 傳輸。 9、 如申請專利範圍第1項所述之多晶片封裝,其中至少一 晶片係以打線接合(w i r e b ο n d i n g )方式設置於該透明基 板上。 1 〇、如申請專利範圍第1項所述之多晶片封裝,其中至少 一連接端係經由該導電線與該電路系統之導電層電性連 接,以電性連接該電路系統與外部。 1 1、如申請專利範圍第1項所述之多晶片封裝,其中至少 一連接端係經由該導電線與該電路系統之至少一晶片電性 連接,以電性連接該電路系統與外部。
    第18頁
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