^00822 A7 經濟部智慧財產局員工消費合作社印製 五、發明說明（ 發明背景_ 發明領域 本發明係關於一種正排量型送液裝置（positivedisplacement tvn。 ι· · ype iiqU1(j-delivery apparatus)，該裝 置可用於以一個极金从& θ _ 疋的/肌篁運送一個小量的液體到各式不 同的處理裝置，你丨‘ · ^ 例如· 一個化學的蒸氣澱積裝置。 相關技藝說 近來，半導體製造業對於積體電路的整合已有顯著改 善並且對動態隨取記憶體（DRAM )之研究與發展活動正在 大力地推打’希望以十億位元等級動態隨取記憶體替代現 有之百萬位το等級動態隨取記憶體。要產生這種動態隨取 記憶體需要大容量之電容器元件。用於作為製造每單位區 域有一個大電容量電介質薄膜材料，金屬氧化物薄膜材 =，=如具有介電常數大約為20之五氧化二钽（Ta2〇5)，或 ”電吊數大約為300之鈦酸鋇（BaTi〇3)或鈦酸勰（SrTi〇3) 或者鋇鈦駿鳃，是被看好的薄膜材料。 為了以汽相澱積此種金屬氧化物薄膜材料在一個電路 板上，將一種經由混合單一種或者> 種有機金屬化合物氣 體饋入材料所造成之混合氣體，以及一種含氧氣體噴射到 個加熱至某一特定溫度之電路板上。根據待產製薄膜的 物性’選定有機金屬氣體饋入材料。例如，要製造由鋇鈦 酸鏍所構成炙金屬氧化物薄膜時，首先須經由轉換鋇 (Ba)、锶（sr)、鈦（Ti)三種元素或該三種元素的化合物， 成為鋇、總、鈦的二-三甲基乙醢基甲检— (dipivaloylmethane DPM)化合物，然後溶解這些化合物於 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ' --- 312053 * — — — — — — — — — — I* . I I (請先閱讀背面之注意事項HI寫本頁) 訂： .線· 500822 五、發明說明（2 ) (請先閱讀背面之注意事項再填寫本頁) 以產生各自的饋入液材料。以所需要的比率均勻混合這些 饋入液體材料而產生主饋入液體之後，將該主饋入液體輸 送到一個汽化器，以產生饋入氣體，以便使用於該化學蒸 氣澱積裝置。 ” ,即使在一個密封箱内，這種主饋入液體仍是非常容易 劣化降級，因此不宜將此種主饋入液體停滯在輸送管内。 若使該主饋入液體加熱或暴露於空氣中，該主饋入液體將 非吊谷易產生沉殿微粒，該產生沉殿微粒容易產生劣質薄 膜。因此，一旦將該組成份液體混合成饋入主液體，該主 2入液體必須維持於安定狀態。同時也期望該主饋入液體 能儘快完全用罄。此外，該薄膜沉積裝置能夠從一個微小 抓量到個較大的流量，之大流量範圍執行該主要液體流 量的微量控制。因此，該送液裝置應能對於輸入液體的流 篁提供嚴謹的控制。 當正排量型送液裝置使用於這些用途時，已知此種裝 置内配備有··一個質量流量控制器（MFC)，該控制器設置於 經濟部智慧財產局員工消費合作社印制衣 連接一個饋入液體槽與一個處理裝置如汽化器之管線内， 該饋入液體槽以氣體或類似之方法加壓以便輸送液體，·以 及調整在質量流量控制器（MFC)上之一個控制閥來控制液 體的流量。同時也使用正排量容積幫浦，連同活塞、膈膜 及相類物件。' 大致而言，傳統式裝置使用質量流量控制器者，對於 接近可容許控制範圍下限的流量控制之再現性不佳。此 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 2 312053 經濟部智慧則產局員工消費合作社印製 500822 A7 ----—......... .B7___ —______ 五、發明說明（3 ) 卜田於該處理裝置中之壓力增加時，必須施加超過該處 f裝置内壓力之壓力於饋人液體槽。因此，用於加壓之大 〇氣體洛解於饋入液體槽内之該液體，而該溶解氣體在流 篁控制器的控制閥下游釋放，或於該饋入液體流内形成衝 流或者脈動。 雖然正排量幫浦能克服這些缺點，然而活塞式幫浦因 幫浦的滑動零件所產生微粒將污染所輸送液體而不能使 用。採用風箱狀容器或者膈膜之正排量幫浦不會污染該液 體，但卻呈現以下的問題。 可考慮到以一個膈膜分割一個容器成為二個腔室，亦 即一個送液腔室和一個工作流體腔室來建造此種正棑量容 積幫浦，而使用不可壓縮的液體用作工作流體。以此種構 造，該膈膜根據供給到工作流體腔室之工作流體的量而移 動而從該谷器送出液體。因此，控制流量之精確性多多 〆、V、依罪外在驅動系統的精媒性。結果，需要一個外部設 備來栗送工作流體，因此對於工作流體必須面對麻煩的處 理作業’並且該全部裝置的體積也變大。 如果建造一個機械式驅動裝置來驅動該膈膜，則無這 些問題並使全部的裝置簡化。然而，如果該容器之二次側 (下游側）之處理條件（壓力）產生變化，則不容易控制該膈 膜的動作而不易使該輸送液體保持恆定的流量。安裝一個 流量計於該容器的二次側以施行反饋控制，並不可能獲得 比質量流量控制器更好的性能，因為該流量計的精癌性和 再生性與該質量流量控制器屬同等級。 國家標準(c艱4規格⑵。，7公爱)~~; ------I---a------ (請先閱讀背面之注意事項ΐϋ寫本頁) 訂·' -線· 500822 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明（4 ) 當該液體之輸送停止時，由於設置於處理裝置（接受液 體供應之部分）的一次側（上游側）之止逆閥之一個小渗 漏’使該正排量幫浦之二次側的壓力慢慢地減少。當回復 該液體輸送時，將導致壓力下降，而需要時間穩定:體^ 流量，而將可能引起其他潛在問題。例如，如果於該處理 裝置内之壓力低於大氣壓力，因為該壓力於止逆閥的一次 側降至饋入液體的蒸汽壓力之下，該饋入液體可能會汽 化。 更進一步，於該正排量幫浦内，當該泵送操作開始時， 於該幫浦的二次側之管線内將發生壓力變化，並因此得等 到該液體輸送安定後才能控制該液體的流量。例如，如果 複數種饋入液體需要以同樣比率輸送時，在液體輸送安定 之前這些饋入液體不能使用。 發明之概述 由於刖述内谷’本發明之目的在於提供一種正排量型 送液裝置，該裝置採用一種正排量幫浦，用一個有彈性的 膈膜，以高精密度與高再生性保持一個恆定的流量來供給 液體’以縮短從果送操作開始至安定該液體輸送所需時 間，並緊接著泵送操作開始之後立即控制液體的流量。 根據本發明的一個形態，本發明提供一種正排量送液 裝置’包含·一個正排量幫浦和一個膈膜驅動單位，該幫 浦包含一個殼體（housing)，該殼體内有一間以一個有彈性 的膈膜分隔之送液腔室，而膈膜驅動單位係連接於該膈膜 以便從該送液腔室送出流體；以及一個差壓式控制單位， 用來控制於該栗送過程中在腸膜兩側之差壓於一個怪定 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 312053 --------------^-------It---------線 (請先閱讀背面之注意事項再填寫本頁) 500822 A7 五、發明說明（ 值。 因此，由於該膈膜係直接由該膈膜驅動單位所驅動， 致使該裝置的構造簡單。更進—步，經由保持賜膜兩側之 差麼在—餘定值，可保持該㈣變形量-定’而消除由 於該膈膜變形產生之誤差。因此，該膈膜驅動單位能控制 該膈膜之變形量而執行精密的流量控制。 於本發明的一個較有利的形態中，該差壓式控制單位 包含·一個差壓式感測器，用於偵測於膈膜兩側之壓力差，· 以及一個控制閥，該控制閥根據從該差壓式感測器之訊號 控制從該送液腔室送出液體的流量。換句話該，該膈膜兩 側之壓力差被控制住致使壓力差恆定，而導致液體的流量 間接地受到控制。 因此，可間接地經由調整該控制閥而調整該送液腔室 之壓力。如果從送液腔室在該膈膜對側之空間内之塵力變 化很低，例如：大氣壓力變化，只限於面對送液腔室之側 面空間需要使用該壓力感測器。 於此情況下’在該膈膜的二次側，並未將預定量之液 體依膈膜之移動距離正轉地輸送。嚴格地說，當膈膜的兩 側之壓力差變化時，依該壓力差變化產生膈膜變形量變 化，並因此使該液體之輸送量偏離預設的數量。因此，有 必要控制該膈膜之壓力差在一個恆定值。例如，如果找到 在一個預設壓力差條件下該膈膜的位置與輪送液體的量之 關係，並且控制該膈膜之壓力差，以致等於它真正使用時 之預設壓力差，則在該壓力差條件下，被輸送液體的量將 請先閱讀背面之注意事項vm 寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 5 312053 經濟部智慧財產局員工消費合作社印製 A7 ---— B7 \、發明說明（6 ) 符合在該壓力差下之膈膜的變形量。由於液體之輸送量可 從該膈膜的位置和該壓力差之關係估計，可準確獲得一個 預設量的輸送液體。 於本發明的一個較有利的形態，流量感測器係設置在 排出通道上，，當泵送過程中，送液腔室内之壓力超過一 個設定值或壓力變化率的絕對值超過一個設定值時，根據 從該流量感應器發出之訊號執行控制。 以此種構造，即使於系統條件有嚴重變動時，也能執 行精密的控制。 於本發明的一個較有利的形態，安棑該間送液腔室以 便於一次衝程中完成排出需要之流量體積。 以此種構造，對於每一個流程，該風箱狀容器之運作 總是穩定而均衡的，因此而避免壓力和流量變動，例如發 生於轉換閥交替操作時之情況。只使用一次衝程的一部份 來執行一個泵送操作時，能更進一步增加該風箱狀容器的 使用期限。 於此情況下，所需送出之流體之量，可於一次衝程中 在一個電路板（半導體晶圓）上形成一張預定的薄膜的體積 量，或多於該體積量。 於本發明的一個較有利的形態，使用氣體以加壓與送 液腔室之該膈膜的相對之一方之空間。 一般而言，該膈膜本身於該風箱狀容器兩側有可容許 壓差。當該壓力差很小，或在該幫浦的二次側之處理裝置 所需壓力大於該可容許壓差時，如果與膈膜輸送液體之一 --------裝--------訂·--------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（2】〇 χ 297公釐） 6 312053 經濟部智慧財產局員工消費合作社印製 A7 —- ............... ...................... B7 --------- 五、發明說明（7 ) 方相反之一方壓力是大氣壓，則不能執行液體輪送◊然而， 經由以氣體加壓於與送液腔室相反的一方，可保持該壓力 差於小值，以便為泵送操作維持該壓力差在可容許範圍 内〇 當將該氣體充入時，該壓力在該膈膜的一次侧產生波 動。然而，於此狀況下、宜經由該控制閥將該膈臈之壓力 差保持固定。 如上所述，由於該膈膜的壓力差必須維持在一個恆定 值，以便一疋流f下供給流體，而該氣體壓力ρ必須也維持 恒定。於上述例子中，於泵送操作期間，該膈膜之與送液 腔室的一方相反之一方之體積v產生變化。因此，膈膜之與 送液腔室相反之一方，應依該液體輸送數量△v，供給相當 量之氣體，亦即，△ Vx P。 控制該膈膜兩邊之壓力差之方法可使用該氣體和該液 體的壓力’而控制該氣體之一方壓力。然而，要喷射和送 ώ氣體需要一段時間，以致當壓力突然變動時，產生控制 遲延。因此，壓力差變動情況可更加頻繁，使得液體不易 維持於一個設定量。然而，該方法仍可適用於沒有嚴重壓 力變動之作業。 與送液腔室相反之空間可設置洩漏感測器，以偵測出 由於該膈膜破損引起之流體洩漏。以此種安排，能偵測出 該膈膜之破損。如果與送液腔室相反之一方也充滿有液體 用來驅動該膈膜，將非常難以偵測該膈膜之破損。膈膜若 破損’則用來驅動該膈膜之液體將與該待泵送之液體混 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 7 312053 f請先閱讀背面之注意事項Η 裝--- ^寫本頁) 有： •線· 500822 經 濟 部 智 慧 財 •產 局 員 工 消 費 合 作 社 印 製 A7 五、發明說明（8 ) 合，並且該混合物也一起被泵送。由於從該裝置排出液體 的置不變動，以致在一個流量監視器上不能偵測到該破 損。 然而’於本發明中，該膈膜之破損能經由設置一個減 壓排洩口而被偵測到，例如，設置該排洩口在膈膜之氣體 側，以及設置一個解除感應器於該解除排洩口或在二次 側。更進一步，靠著始終保持該氣體側之壓力比該幫浦側 壓力低，可防止氣體混入幫浦側。因此，當該膈膜破損時， 本發明能避免泵送液體與驅動液體混合的問題。傳統式流 體驅動膈膜裝置常見此類問題。 於本發明的一個較有利的形態中，複數個排量容積幫 浦安排成並聯形式，而輸送不同種類的流體到一個單一處 理單位。 於本發明的一個較有利的形態，二個正排量容積幫浦 以連續方式’交替輸送同樣種類的流體到一個單一處理單 位。 於本發明的一個較有利的形態，殼體内有一間以一個 有彈性的膈膜分隔之送液腔室，而膈膜驅動單位連接於該 膈膜，以便從該送液腔室送出流體；以及該膈膜驅動單位， 根據膈膜兩側之壓力差變化及以一個恆定速率，驅動該腸 膜以維持從送液腔室所送出液體的流量。 於本發明的一個較有利的形態中，安排該送液腔室， 以便於一次衝程中完成所需的送出流體的量。 ----^----------------線 <請先閱讀背面之注意事項再填寫本頁) 於本發明的一個較有利的形態中，使用氣體來加壓與^ 00822 A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (BACKGROUND OF THE INVENTION _ FIELD OF THE INVENTION The present invention relates to a positive displacement liquid delivery device (positivedisplacement tvn.) · Ype iiqU1 (j-delivery apparatus) This device can be used to transport a small amount of liquid from & θ _ 疋 / muscle to a variety of different processing devices in a very gold, you'll, for example, a chemical vapor deposition device. Related technologies In recent years, the semiconductor manufacturing industry has significantly improved the integration of integrated circuits and research and development activities on dynamic follow-up memory (DRAM) are vigorously pushing 'hope to replace with a billion-bit dynamic follow-up memory. Existing million-bit το grade dynamic random access memory. To generate this type of dynamic random access memory, a large-capacity capacitor element is needed. It is used as a dielectric film material with large capacitance per unit area and metal oxide film material. =, = If it has tantalum pentoxide (Ta205) with a dielectric constant of about 20, or "barium titanate (BaTi〇3) with an electrical hanging number of about 300 or Europium titanate (SrTi〇3) or barium-titanium gill is a promising thin film material. In order to vapor-deposit this metal oxide thin film material on a circuit board, one kind is mixed with a single type or > The mixed gas caused by the organometallic compound gas feed material and an oxygen-containing gas are sprayed onto a circuit board heated to a specific temperature. The organometallic gas feed material is selected according to the physical properties of the film to be produced. For example, to When manufacturing a metal oxide thin film composed of barium titanate, it is necessary to first convert three elements of barium (Ba), strontium (sr), and titanium (Ti) into compounds of barium, total, and titanium. -Trimethylacetamidyl-DPM (dipivaloylmethane DPM) compounds, and then dissolve these compounds in this paper standard China National Standard (CNS) A4 specifications (210 X 297 mm) '--- 312053 * — — — — — — — — — — I *. II (please read the notes on the back HI to write this page) Order:. Line 500822 V. Description of the invention (2) (please read the notes on the back before filling this page) to Generate respective feed liquid materials. After mixing these feed liquid materials uniformly at the required ratio to produce the main feed liquid, the main feed liquid is transferred to a vaporizer to generate the feed gas for use in the chemistry Vapor deposition device. "Even in a sealed box, this main feed liquid is still very easy to deteriorate and degrade, so it is not suitable to stagnate this main feed liquid in the conveying pipe. If the main feed liquid is heated or When exposed to the air, the main feed liquid will cause non-suspended valleys to easily generate Shendian particles, which will easily generate inferior films. Therefore, once the component liquid is mixed to feed the main liquid, the main liquid must be maintained in a stable state. It is also expected that the main feed liquid will be completely used up as soon as possible. In addition, the thin film deposition device can perform a small amount of control of the main liquid flow rate from a small grasp to a large flow rate, in a large flow range. Therefore, the liquid delivery device should be able to provide rigorous control over the flow of input liquid. When positive-displacement liquid-feeding devices are used for these purposes, it is known that such devices are equipped with a mass flow controller (MFC), which is installed in the printed clothing connection of the staff consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. A feed liquid tank and a processing device such as a vaporizer line, the feed liquid tank is pressurized by gas or the like to convey liquid, and a control valve on a mass flow controller (MFC) is adjusted to control The flow of the liquid. Positive displacement volume pumps are also used, along with pistons, diaphragms and similar objects. '' In general, those who use mass flow controllers for conventional devices have poor reproducibility for flow control near the lower limit of the allowable control range. This paper size is in accordance with China National Standard (CNS) A4 (210 x 297 mm) 2 312053 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, 500822 A7 ------......... B7___ —______ V. Description of the invention (3) When the pressure in the processing device increases, Pu Tian must apply a pressure exceeding the pressure in the f device to the liquid tank. Therefore, the large gas used for pressurization breaks down the liquid fed into the liquid tank, and the dissolved gas is released downstream of the control valve of the flow controller, or an impulse or pulsation is formed in the fed liquid flow. . Although positive displacement pumps can overcome these shortcomings, piston pumps cannot be used because the particles generated by the sliding parts of the pump will contaminate the transported liquid. Positive displacement pumps using bellows-like containers or diaphragms do not contaminate the liquid, but present the following problems. It can be considered that a container is divided into two chambers by a diaphragm, that is, a liquid-feeding chamber and a working fluid chamber to construct such a positive volume pump, and an incompressible liquid is used as the working fluid. . With this configuration, the diaphragm is moved according to the amount of the working fluid supplied to the working fluid chamber, and the liquid is discharged from the trough. Therefore, the accuracy of the control flow is very high, V, the precision of the external drive system according to the crime. As a result, an external device is required to pump the working fluid, so a troublesome processing operation must be faced for the working fluid 'and the volume of the entire device becomes large. If a mechanical drive is built to drive the diaphragm, these problems are eliminated and the overall device is simplified. However, if the processing conditions (pressure) on the secondary side (downstream side) of the container are changed, it is not easy to control the operation of the diaphragm and it is not easy to maintain a constant flow rate of the transported liquid. Installing a flow meter on the secondary side of the container for feedback control, it is not possible to obtain better performance than a mass flow controller, because the flow rate of cancerous and regenerative properties of the flow meter is the same as that of the mass flow controller. . National standards (c hard 4 specifications ⑵., 7 public love) ~~; ------ I --- a ------ (Please read the precautions on the back first and write this page) Order · ' -Line · 500822 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 V. Description of the invention (4) When the transportation of the liquid is stopped, it is because it is installed on the primary side (upstream side) of the processing device (the part that receives the liquid supply). A small leak in the check valve slowly reduces the pressure on the secondary side of the positive displacement pump. When the liquid delivery is resumed, it will cause the pressure to drop, and it will take time to stabilize: the body flow, which may cause other potential problems. For example, if the pressure in the processing unit is lower than atmospheric pressure, because the pressure drops below the vapor pressure of the feed liquid on the primary side of the check valve, the feed liquid may vaporize. Furthermore, in the positive displacement pump, when the pumping operation starts, a pressure change will occur in the pipeline on the secondary side of the pump, and therefore the liquid cannot be controlled until the liquid is transported stably. flow. For example, if multiple feed liquids need to be transported at the same ratio, these feed liquids cannot be used until the liquid transport is stable. SUMMARY OF THE INVENTION Because of the description of the inner valley, the purpose of the present invention is to provide a positive-displacement type liquid feeding device, which adopts a positive-displacement pump and a flexible diaphragm, with high precision and high reproducibility. Maintaining a constant flow rate to supply the liquid 'shortens the time required from the start of the fruiting operation to the stabilization of the liquid delivery, and immediately controls the liquid flow rate immediately after the start of the pumping operation. According to one aspect of the present invention, the present invention provides a positive-displacement liquid-feeding device 'including a positive-displacement pump and a diaphragm driving unit, the pump including a housing, and a housing in the housing A flexible diaphragm-separated liquid-feeding chamber, and the diaphragm-driving unit is connected to the diaphragm to send fluid from the liquid-sending chamber; and a differential pressure control unit for controlling the pumping process The pressure difference between the two sides of the intestinal membrane is a strange paper. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 312053 -------------- ^ --- ---- It --------- line (please read the precautions on the back before filling this page) 500822 A7 V. Description of the invention (value. Therefore, since the diaphragm is directly driven by the diaphragm Driven by the unit, the structure of the device is simpler. Further, by keeping the difference between the two sides of the film-imparting-to-set value, the amount of deformation of the diaphragm can be maintained-and the error caused by the deformation of the diaphragm is eliminated. Therefore, the diaphragm driving unit can control the amount of deformation of the diaphragm and perform precise flow control. In a more advantageous form of the present invention, the differential pressure control unit includes a differential pressure sensor for detecting a pressure difference on both sides of the diaphragm, and a control valve, which is based on The signal from the differential pressure sensor controls the flow of liquid sent from the liquid-feeding chamber. In other words, the pressure difference between the two sides of the diaphragm is controlled so that the pressure difference is constant, resulting in the liquid flow indirectly. It is controlled. Therefore, the pressure of the liquid-feeding chamber can be adjusted indirectly by adjusting the control valve. If the dust force change from the liquid-feeding chamber to the space on the opposite side of the diaphragm is very low, for example: atmospheric pressure change The pressure sensor is limited to the side space facing the liquid-feeding chamber. In this case, 'on the secondary side of the diaphragm, a predetermined amount of liquid has not been turned forward according to the movement distance of the diaphragm. Conveying. Strictly speaking, when the pressure difference between the two sides of the diaphragm changes, the deformation of the diaphragm changes according to the pressure difference, and therefore the conveying quantity of the liquid deviates from the preset amount. Therefore, it is necessary to control the Pressure difference of diaphragm A constant value. For example, if you find the relationship between the position of the diaphragm and the amount of liquid being transported under a preset pressure difference, and control the pressure difference of the diaphragm, it is equal to the preset pressure difference when it is actually used. Under the pressure difference condition, the amount of liquid to be transported will be read on the back of the note. Vm Write this page) Printed on the paper by the Intellectual Property Bureau of the Ministry of Economic Affairs, Employees' Cooperatives, this paper applies Chinese National Standard (CNS) A4 specifications (210 X 297 mm) 5 312053 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----- B7 \ Invention Description (6) Meets the deformation of the diaphragm under this pressure difference. Since the amount of liquid transported can be estimated from the relationship between the position of the diaphragm and the pressure difference, a preset amount of transported liquid can be accurately obtained. In a more advantageous form of the present invention, the flow sensor is arranged on the discharge channel. When the pressure in the liquid delivery chamber exceeds a set value or the absolute value of the pressure change rate exceeds a set value during the pumping process , Executes control based on the signal from the flow sensor. With this structure, precise control can be performed even when there are severe changes in system conditions. In a more advantageous form of the present invention, the liquid-feeding chamber is installed to facilitate the flow volume required to complete discharge in one stroke. With this configuration, the operation of the bellows-shaped container is always stable and balanced for each process, thus avoiding pressure and flow fluctuations, such as occurs when the switching valve is operated alternately. When only one part of a stroke is used to perform a pumping operation, the life of the bellows container can be further increased. In this case, the amount of fluid to be sent can form a predetermined volume of film on a circuit board (semiconductor wafer) in one stroke, or more than this volume. In a more advantageous aspect of the present invention, a gas is used to pressurize the space opposite to the diaphragm of the liquid-feeding chamber. Generally speaking, the diaphragm itself has an allowable pressure difference on both sides of the bellows-like container. When the pressure difference is small, or the pressure required by the processing device on the secondary side of the pump is greater than the allowable pressure difference, if one of the liquids is transported with the diaphragm -------- install --- ----- Order · -------- Line (Please read the precautions on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (2) 〇χ 297 mm 6 312053 Printed A7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs --- ..................... .. B7 --------- V. Description of the invention (7) The pressure of the other side is atmospheric pressure, so liquid wheel feeding cannot be performed. However, the gas is pressurized on the side opposite to the liquid feeding chamber. The pressure difference can be kept to a small value in order to maintain the pressure difference within an allowable range for the pumping operation. When the gas is charged, the pressure fluctuates on the primary side of the diaphragm. However, under this condition, it is advisable to keep the pressure difference of the pump fixed through the control valve. As described above, since the pressure difference of the diaphragm must be maintained at a constant value so that a fluid is supplied under a stream of f, the gas pressure ρ must also be kept constant. In the above example, during the pumping operation, the volume v of the diaphragm which is opposite to the one of the liquid-feeding chamber is changed. Therefore, the opposite side of the diaphragm to the liquid-feeding chamber should supply a considerable amount of gas, that is, ΔVxP, according to the amount of liquid delivered Δv. The method of controlling the pressure difference between the two sides of the diaphragm can use the pressure of the gas and the liquid 'to control the pressure of one side of the gas. However, it takes some time for the gas to be injected and sent, so that when the pressure suddenly changes, a control delay occurs. Therefore, the pressure difference can be changed more frequently, making it difficult to maintain the liquid at a set amount. However, this method can still be applied to operations without severe pressure changes. A leak sensor can be set in the space opposite to the liquid-feeding chamber to detect the fluid leakage caused by the broken diaphragm. With this arrangement, damage to the diaphragm can be detected. If the opposite side of the liquid delivery chamber is also filled with liquid to drive the diaphragm, it will be very difficult to detect the damage of the diaphragm. If the diaphragm is damaged, the liquid used to drive the diaphragm will be mixed with the liquid to be pumped. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) 7 312053 f Please read the Attentions --- ^ write this page) are: • Line 500822 Printed by the Ministry of Economic Affairs Intellectual Property • Production Bureau Employee Consumption Cooperative A7 V. Invention Description (8) The mixture is also pumped together. Since the position of the liquid discharged from the device was not changed, the damage could not be detected on a flow monitor. However, in the present invention, the breakage of the diaphragm can be detected by setting a decompression discharge port, for example, setting the discharge port on the gas side of the diaphragm, and setting a release sensor on the release port. Or on the secondary side. Furthermore, by keeping the pressure on the gas side lower than the pressure on the pump side at all times, it is possible to prevent gas from mixing into the pump side. Therefore, when the diaphragm is broken, the present invention can avoid the problem of mixing the pumped liquid with the driving liquid. Such problems are common with traditional fluid-driven diaphragm devices. In a more advantageous form of the present invention, a plurality of displacement volume pumps are arranged in parallel to deliver different types of fluids to a single processing unit. In a more advantageous form of the invention, two positive displacement volume pumps deliver the same kind of fluid to a single processing unit in a continuous manner 'alternately. In a more advantageous form of the present invention, there is a liquid-feeding chamber separated by a flexible diaphragm in the housing, and the diaphragm-driving unit is connected to the diaphragm to send fluid from the liquid-feeding chamber; And the diaphragm driving unit, according to the pressure difference between the two sides of the diaphragm, and driving the intestinal membrane at a constant rate to maintain the flow rate of the liquid sent from the liquid feeding chamber. In a more advantageous form of the present invention, the liquid-feeding chamber is arranged so as to complete the required amount of liquid-feeding out in one stroke. ---- ^ ---------------- line < Please read the notes on the back before filling this page) In a more advantageous form of the present invention, use gas to Pressurize with
500822 A7 經濟部智慧財產局員工消費合作社印製 --—^____ 五、發明說明（9 ) 送液腔室相反之膈膜的空間。 於本發明的-個較有利的形態中，將複數個的正排量 幫浦安排成並聯形式’並輪送*同種類的流體到—個單— 處理單位。 於本發明的一個較有利的形態中，二個正排量容積幫 浦以連續方式，交替輸送同樣種類的流體到一個單一 單位。 根據本發明的一個形態，所設正排量送液裝置包含·· 一個正棑量容積幫浦和一個膈膜驅動單位，該幫浦包含一 個殼體，該殼體内有一間以有彈性的膈膜分隔之送液腔 室，而膈膜驅動單位連接於該膈膜，以從該送液腔室排出 流體；以及一個從該送液腔室延伸之排通道；一個止逆閥 設置在該送出通道；以及一個壓力控制單位，用來控制該 止逆閥一次側的壓力，以致不會於泵送過程停止期間降至 從該間送液腔室所送出流體之蒸汽壓力以下。 以此種構造，可防止由於止逆閥洩漏導致該止逆閥的 一-人側產生壓力下降，以及可防止由於蒸發形成空泡。 於本發明的一個較有利的形態中，該壓力控制器包含 設置於該止逆閥上游之控制閥，並於幫浦停止期間，以栗 送操作所需要壓力調節送液腔室内之壓力。 以此種構造，如果連接該止逆閥和控制閥之管子長度 夠短，而且該管子由高剛性材料構成，同時當起始泵送處 理時管内壓力上升時而此段管子幾乎沒有發生體積膨脹， 可設定該止逆闕的二次側的壓力於正常壓力，以便於幫浦 ;紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐）-------- 9 312053 f請先閱讀背面之注音？事項= 袭--- 、寫本頁} 訂： -丨線·500822 A7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs --- ^ ____ V. Description of the Invention (9) The space of the diaphragm in the opposite side of the liquid-feeding chamber. In one of the more advantageous forms of the present invention, a plurality of positive displacement pumps are arranged in parallel form 'and the fluids of the same kind are sent to one single processing unit by rotation. In a more advantageous form of the invention, the two positive displacement volumetric pumps alternately deliver the same kind of fluid to a single unit in a continuous manner. According to one aspect of the present invention, the positive-displacement liquid-feeding device provided includes a positive-volume-volume pump and a diaphragm-driving unit. The pump includes a housing, and a flexible diaphragm is provided in the housing. A membrane-separated liquid-feeding chamber, and a diaphragm-driving unit is connected to the diaphragm to discharge fluid from the liquid-sending chamber; and a drainage channel extending from the liquid-sending chamber; a check valve is provided at the outlet Channel; and a pressure control unit for controlling the pressure on the primary side of the check valve so that it does not fall below the vapor pressure of the fluid sent from the liquid-feeding chamber during the stopping of the pumping process. With this configuration, it is possible to prevent a pressure drop from occurring on one side of the check valve due to a leakage of the check valve, and to prevent the formation of cavitation due to evaporation. In a more advantageous form of the present invention, the pressure controller includes a control valve disposed upstream of the check valve, and during the stoppage of the pump, the pressure in the liquid-feeding chamber is adjusted with the pressure required for the pumping operation. With this structure, if the length of the pipe connecting the check valve and the control valve is short enough, and the pipe is made of a highly rigid material, at the same time, when the pressure in the pipe rises during the initial pumping process, there is almost no volume expansion in the pipe The pressure on the secondary side of the non-return valve can be set to normal pressure to facilitate pumping; the paper size applies the Chinese National Standard (CNS) A4 specification (21 × 297 mm) -------- 9 312053 f Please read the Zhuyin on the back first? Matters = Strike ---, write this page} Order:-丨 line ·
五、發明說明（10 ) 開始運轉後隨即以設定之流量泵送 延0 而不產生任何時間邊V. Description of the invention (10) After the start of operation, the pump will be pumped at the set flow rate and extended to 0 without any time margin.
^ — (請先閱讀背面之注意事項再填寫本頁) · i線- 於本發明的一個較有利的形態，該壓力控制單位包 3 .设置於該止逆間上游之—個控制冑，並於幫浦停止其 間調節該間送液腔室内之壓力為比泵送操作所需要之壓乂 更高出相當於因該管線於該止逆閥和控制閥間之體_ 所估計的量。 以此種構故’如果該段管子是一條具低剛性之挽性 管’並且當泵送剛開始處理時該壓力上昇而該管子產生體 積膨脹時’可設定該止逆閥的二次側的壓力於正常壓力， :便於幫浦開始運轉後隨即以一個設定之流量泵送，而不 產生任何時間遲延情形下。 於本發明的一個較右南丨4 _ 有利的形態中，安排該送液腔室以 便於一次衝程中完成所需送出流體之量。 腔室ttd:個較有利的形態中’使用氣體加壓與液 脛至之該知膜的相反之_方之空間。 於本發明的一個齡古 穑幫、者4 較有利的形態中’將複數個正排量容 積幫浦女排成並聯形式， 一處理單位。 冑送不同種類的流體到一個單 以此種構造，從該泵送 一 控制從每個正排量幫浦所送出流體=二，能個別地 是能泵送同樣比率的流胃 i 5机里，並因此總 L膝到該早一處理裝置。 於本發明的一個輕右 亦娃从k 較有利的形態中，將二個正排畺簦雀 乂替地輸送同樣種類的产 卜量幫浦 ___ ，並以連續方式輸送該流體到 312053 10 B7 五、發明說明（η ) 一個單一處理單位。 :此種構造’可交替操作兩個幫浦，以使該 浦在操作開始後泵送較大的流量，而該第 幫 .—S — (請先閱讀背面之注音？事項寫本頁) 遞減的量，以使整！* & a θ 浦則泵 使整體的…呆持不變。因此’同樣的液體 可以&率不變地不斷供給到該單一處理裝置。 根據本發明的一個形態’設置有一個澱積襄置，包含· —個汽化器’詩汽化從該排量送液裝置輸人之量之产 體；以及一個殺積腔室，於其内部利用從該汽化器所供匕給 之輪入氣體澱積形成薄膜。 本發明之上述目的和其他目的、特點和， :明較有利實施例的例子說明，及以下的描述及所= 式，而更形明顯。 圖 邏-式之簡單說明 第1圖是本發明的第一實施例之概要圖，表示一個正排 量型送液裝置。 •線· 第2圖是表示第4圖的該正排量型送液裝置的部分之放 大圖。 經濟部智慧財產局員工消費合作社印製 第3圖是本發明的第二實施例之概要圖，表示一個正排 量送液裝置。 第4圖是本發明之第二實施例之特性圖，表示送液腔室 内壓力和風箱狀容器變形之關係。 第5圖是根據本發明的第三實施例之概要圖，表示一個 正排量型送液裝置。 第6圖是表示第5圖的正排量型送液裝置之部份放大橫 斷面圖。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 11 312053 五 10a排量容積幫浦 14液體 18進入管 22殼體 26扣板 3 0工作空間 34細長棒 38壓力計 42差壓式控制單位 46流量控制單位 52底板 56進入口 60漏出感測器 64密封機構 X 297公釐） .線. 12 B7 發明說明（12 ) 第7圖是本發明的第四實施例之概要圖，表示一個正排 量型送液裝置。 第8圖為表示在第7圖的裝置在最初處理時之泵送流送 '、率與時間之間的關係之特性圖。 第9圖是本發明的第五實施例之概要圖 量型送液裝置。 正排 第_是表示第9圖的裝置在最初處 速率和時間之間的關係之特性I ^机送 第11圖疋本發明的第六實施例之概要圖， — 排量型送液裝置。 個正 圖是一張時間圖表’表示經由第11圖之排量型 送液裝置執行之一個控制程序。 徘置型 圖號說明 10正排量容積幫浦 i 2輸入液體槽 16處理裝置 20排出管 24風箱狀容器 28送液腔室 32驅動單位 36膈膜驅動裝置 40控制閥 44流量計 50駆動裝置控制單位 54通孔 58排氣口 62流體釋漏管件 尺度適"《中國國家標準 312053^ — (Please read the notes on the back before filling out this page) · i-line-a more advantageous form of the present invention, the pressure control unit pack 3. It is located upstream of the non-return zone-a control unit, and While the pump was stopped, the pressure in the liquid feeding chamber was adjusted to be higher than the pressure required for the pumping operation, which is equivalent to the amount estimated by the body of the pipeline between the check valve and the control valve. For this reason, 'if the section of the pipe is a low-rigidity pull pipe' and when the pressure rises and the pipe expands when the pumping process is started, the secondary side of the check valve can be set. Pressure is normal pressure: It is convenient for the pump to be pumped at a set flow rate immediately after the pump starts running without any time delay. In a more advantageous form of the present invention, the liquid-feeding chamber is arranged to facilitate the completion of the required amount of fluid to be delivered in one stroke. Chamber ttd: In a more advantageous form, the space using the gas pressure to the opposite side of the known membrane to the liquid membrane is used. In an advantageous form of the aging gangster and the 4th person of the present invention, a plurality of positive displacement volume pump women's volleyballs are connected in parallel, a processing unit.胄 Different kinds of fluids are delivered to a single unit with this structure, from which one pump controls the fluid sent from each positive displacement pump = two, which can individually be pumped at the same rate as the i5 machine. , And therefore always L knee to that early treatment device. In the present invention, in a lightly advantageous form of k, two positively rowed paspalums are used to transport the same kind of output pump ___, and the fluid is continuously delivered to 312053 10 B7 V. Description of the Invention (η) A single processing unit. : This structure 'can operate two pumps alternately, so that the pump pumps a larger flow after the operation starts, and the first pump. —S — (Please read the note on the back? Write this page first) Decreasing The amount to make whole! * & a θ Puze pump keeps the overall ... Therefore, 'the same liquid can be continuously supplied to the single processing device at an & rate. According to a form of the present invention, 'a deposition device is provided, including a vaporizer', which vaporizes the amount of product input from the displacement liquid feeding device; and a killing chamber, which uses the The wheel supplied by the vaporizer is gas-deposited to form a thin film. The above and other objects, features, and advantages of the present invention are illustrated by examples of more advantageous embodiments, as well as the following description and expressions. Fig. Brief description of the logic-type Fig. 1 is a schematic diagram of a first embodiment of the present invention, showing a positive-displacement type liquid-feeding device. • Line · Figure 2 is an enlarged view showing a part of the positive displacement type liquid feeding device shown in Figure 4. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 3 is a schematic diagram of a second embodiment of the present invention, showing a positive displacement liquid delivery device. Fig. 4 is a characteristic diagram of the second embodiment of the present invention, showing the relationship between the pressure in the liquid-feeding chamber and the deformation of the bellows-like container. Fig. 5 is a schematic view showing a third embodiment of the present invention, showing a positive displacement type liquid feeding device. Fig. 6 is an enlarged cross-sectional view showing a part of the positive-displacement type liquid feeding device of Fig. 5; This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 11 312053 Five 10a Displacement volume pump 14 liquid 18 into tube 22 housing 26 gusset 3 0 working space 34 slender rod 38 pressure gauge 42 Differential pressure control unit 46 Flow control unit 52 Base plate 56 Inlet 60 Leakage sensor 64 Sealing mechanism X 297 mm). Line. 12 B7 Description of the invention (12) Figure 7 is a summary of the fourth embodiment of the present invention The figure shows a positive displacement liquid delivery device. Fig. 8 is a characteristic diagram showing the relationship between the pumping flow rate, rate and time during the initial processing of the device of Fig. 7. Fig. 9 is a schematic view of a fifth embodiment of the present invention. The front row _ is a characteristic showing the relationship between speed and time at the initial position of the device of Fig. 9. Fig. 11 is a schematic diagram of a sixth embodiment of the present invention, a displacement type liquid feeding device. Each front view is a time chart 'showing a control program executed by the displacement type liquid delivery device of FIG. 11. Floating type figure number description 10 positive displacement volume pump i 2 input liquid tank 16 processing device 20 discharge tube 24 bellows container 28 liquid feeding chamber 32 driving unit 36 diaphragm driving device 40 control valve 44 flow meter 50 moving device Control unit 54 through hole 58 exhaust port 62 fluid leakage pipe fittings "China National Standard 312053
I I · 1 , (請先閱讀背面之注音？事項再填寫本頁) )υυ822 Α7 Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（13 ) 66入口管 70壓力控制閥 80反應腔室 84基座 88排氣幫浦 1 00止逆閥 104送液腔室壓力感測器 108壓力控制單位 112a輸入管路 112c輸入管路 114管子 輕隹實施例之詳細說明 第1圖及第2圖’展示本發明的第一實施例之正排量送 液裝置。於該排量送液裝置中，液體給水櫃12容納之液體 14,例如：一種饋入液體。正排量容積幫浦1〇從該饋入液 體槽12，以一設定量供給該液體14到一個處理裝置16。於 此例中，該處理裝置16是一個汽化器，該汽化器經由一條 氣體供給管線86供給澱積用之氣體到CVD反應腔室80。於該 反應腔室80内有一個注氣頭82用以將所供給之澱積用氣體 朝向裝置在基座84上之半導體晶圓喷射。在第1圖所示之 該正排量送液裝置同時也包含一個排氣幫浦88和一條通氣 管路90，以釋放該殿積用氣體。 該正排量容積幫浦10包含一殼體22，該殼體外形上大 約是圓柱狀。殼體22的一端連接到一條從該饋入液體槽J2 延伸之進入管18’而殼體22的另一端連接到該處理裝置16 之一條排出管20。該殼體22的底板中央形成一個開口。有 68壓力感測器 72第二壓差控制單位 82注氣頭 86氣體供給管線 90通氣管路 102運送液體壓力感測器 10 6控制閥 110管子 112b輸入管路 112d輸入管路 (請先閱讀背面之注意事項ί寫本頁) 裝 41* - •線. 500822 A7 - ——-—_—B7 五、發明說明（U ) -- (請先閱讀背面之注意事項再填寫本頁) 一個風箱狀容器24(膈膜）接附到到該開口的内緣，並與該 鈸體22以同心狀向中心延伸。風箱狀容器24的另一端以扣 板26緊密關閉。殼體22和風箱狀容器24的該構造形成送液 腔室28,能夠密封的截留液體並改變它本身的容量。該風 箱狀容器24的内部也形成與外界空氣相通之工作空間3〇。 有一個腸膜驅動裝置36設置於該工作空間⑽内。該腸 膜驅動裝置36包含：一個驅動單位32,該驅動單位具有一 個驅動源器，例如一個馬達（未顯示）；以及一支細長棒34， 該棒經由驅動單位32的推動而上下移動。該扣板26連接到 議細長棒34的頂端。該驅動單位32備有一個轉換機構（未顯 示），經由該驅動源器，以一個旋進輸送機構或具類似功能 之機構，將迴轉運動轉換成為直線運動。當該驅動單位32 運轉時’該風相狀容器24向軸向延伸和縮回，並因而改變 送液腔室28的容量，以供給一個預定量之液體14到該處理 裝置16。 經濟部智慧躬產局員工消費合作社印製 有一個壓力計38設在殼體22之上，用於量測送液腔室 28内之壓力。有一個控制閥4〇設置在排出管2〇内，能夠控 制該排&管打開的程度。來自該壓力計38之訊號輸入至控 制閥40。根據來自該壓力計38之訊號調整控制閥4〇的打開 程度’以維持送液腔室28内之壓力P在一個怪定值，並使該 壓力稍高於在該工作空間30之壓力PO(於此例為大氣壓）。 該控制閥40和該壓力計38構成一個差壓式控制單位42。 有一個流量計44設在控制閥40的上游側之該排出管20 内’用以量測於該排出管20内流動液體的流量。來自該流 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 14 312053 經濟部智慧財產局員工消費合作社印製 500822 A7 B7 五、發明說明（15 ) 量計44之訊號同時也輸入該控制閥4〇。由此，該流量計44 和該控制閥40構成一個流量控制單位46，用以控制經由排 出管20供給到處理裝置16之液體的流量。 以此種構造，該排量送液裝置能作選擇性的轉換，由 差壓式控制單位42或由該流量控制單位46來控制。一般而 言’經由差壓式控制單位42控制者正在操作中，該控制閥 40依來自該壓力計38之訊號進行控制而如上所述維持該壓 力差在一個恒疋值。於此種控制之下，可正確而穩定地維 持該排流體之流量。 此一處理過程之描述可參考第2圖。如果該風箱狀容器 24以一個恒定的速率變形，則該排出流量只依膈膜驅動裝 置36之一次衝程之函數表示。如果需要液體的某一個特定 流量，然後改變衝程即能得到控制而符合該流量。 然而，因為該風箱狀容器24是本質上有彈性，除了由 於拉力產生之扣板26之變形以外，由於送液腔室28之壓力p 和於該工作空間30之壓力po之壓力差ΛΡ (△!>#_!>〇)，使 該風相狀容器24局部變形。於第2圖描繪該風箱狀容器24 之實線代表該風箱狀容器24於平衡狀況。如果於送液腔室 28之壓力P增加’因而該壓差△ p增加，則該風箱狀容器 可變形，如該連鎖的雙短線於第2圖所顯示者。因此，即使 該扣板26的位置不改變，該壓差之變化將引起送液腔室 28容量改變。 當操作該風箱狀容器24而保持壓力差ΛΡ在一個恆定 值時，由於風箱狀容器24的隨機變形所導致在該流體内之 ---------------裝--- (請先閱讀背面之注意事項ΐϋ寫本頁) · 本紙張尺度適用中國國家標準^ ^7 15 312053 500822 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（16 ) 壓力變化或者脈動被抑制而可獲得穩定的流量控制。因 此’該扣板26的位置將以一對一之形態符合送液腔室28的 容量。因此，可只依據該膈膜驅動裝置36的衝程正確地控 制該排出流量。 於某一些情形，不可能只以壓力計監視壓力差而依據 該壓力差控制衝程調整液體的流量。以值測内部的膈膜或 類似物件之變形量偵測壓力之壓力計者，當偵測到壓力變 化時，該風箱狀容器已經變形並且流量已經發生變化。因 此，於本實施例中，當在送液腔室28内之壓力超過一個預 設值，或壓力的變化率的絕對值超過一個預定值時，則認 定該系統是處於一個波動狀況。在這個時候，將控制方式 從以該壓力計38監視該壓力差轉換到以流量錶44監視該流 量。此種特別的安排能夠使該裝置甚至在不安定條件之下 仍維持液體精密的流量。 第3圖表示本發明的第二實施例之正排量送液裝置。該 第二實施例的正棑量送液裝置的結構不同於該第一實施例 者，於第一實施例之差壓式控制單位42以一個驅動裝置控 制單位50所替代，該控制單位從該壓力計38接收一個訊號 來控制該膈膜驅動裝置36的動作。 於此實施例中，於送液腔室28之壓力和風箱狀容器24 的變形量之關係已預先知道。該驅動裝置控制單位50推動 該膈膜驅動裝置36，以抵消於該風箱狀容器24由於在送液 腔室28内壓力變遷產生之變形，因此而保持液體的流量在 一個恒定值。 · I I-----^ --------- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 16 312053 500822 A7 B7_ 五、發明說明（17 ) 從送液腔室28所棑出的實際排出流量Q，可經由以下的 方程式界定，其中Q是設定流量，而V是風箱狀容器24由於 送液腔室28之壓力P產生之變形量。 Q=q+(dV/dt) 此處， dV/dt:(dV/dP) · (dP/dt) 因此， Q=q + (dV/dP) · (dP/dt)----------------(1) 如果（dV/dP)之關係預先知道，該驅動裝置控制單位50即控 制膈膜驅動裝置36，以便當該初始流量是qG時獲得設定流 量q 0 q- q〇-(d¥/dP) * (dP/dt) 結果，可維持Q在一個恒定值。 q = q〇 - ( d¥ / dP ) · ( dP / dt ) 例如，當風箱狀容器24之體積變形量V和送液腔室28之壓力 P有以下的關係時， V=aPb+d 則， dV/dP = abPb~1 Q=q+abPb](dP/dt) ^q + abP^'CAP/A t)----------------(2) 此處，如果該關係dV/dPzabP1^1可預先知道，則可從該方 程式（2)經由計算每單位時間内之壓力變化，而得到一個恆 定流量。 (請先閱讀背面之注意事項寫本頁) !裝 4T· 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 17 312057 500822II · 1, (Please read the note on the back? Matters before filling out this page) υυ822 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (13) 66 Inlet pipe 70 Pressure control valve 80 Reaction chamber 84 base 88 exhaust pump 1 00 non-return valve 104 liquid delivery chamber pressure sensor 108 pressure control unit 112a input line 112c input line 114 tube taps detailed description of the embodiment 1 and 2 'Show the positive displacement liquid feeding device of the first embodiment of the present invention. In the displacement liquid-feeding device, the liquid 14 contained in the liquid feed tank 12 is, for example, a kind of feed liquid. A positive displacement volume pump 10 supplies the liquid 14 to the processing device 16 by a set amount from the feed liquid tank 12. In this example, the processing device 16 is a vaporizer that supplies a deposition gas to a CVD reaction chamber 80 via a gas supply line 86. A gas injection head 82 is provided in the reaction chamber 80 for ejecting the supplied deposition gas toward the semiconductor wafer mounted on the base 84. The positive-displacement liquid-feeding device shown in Fig. 1 also includes an exhaust pump 88 and a ventilation line 90 to release the gas for the temple. The positive displacement volume pump 10 includes a housing 22 which is approximately cylindrical in shape. One end of the housing 22 is connected to an inlet pipe 18 'extending from the feed liquid tank J2, and the other end of the housing 22 is connected to one of the discharge pipes 20 of the processing device 16. An opening is formed in the center of the bottom plate of the casing 22. There are 68 pressure sensors 72 second differential pressure control units 82 gas injection heads 86 gas supply lines 90 ventilation lines 102 conveying liquid pressure sensors 10 6 control valves 110 pipes 112b input lines 112d input lines (please read first Note on the back write this page) Install 41 *-• line. 500822 A7-——-—_— B7 V. Description of the invention (U)-(Please read the notes on the back before filling this page) A box-shaped container 24 (diaphragm film) is attached to the inner edge of the opening and extends concentrically with the carcass body 22 toward the center. The other end of the bellows-like container 24 is tightly closed with a gusset 26. This configuration of the housing 22 and the bellows-like container 24 forms a liquid-feeding chamber 28, which is capable of sealingly trapping liquid and changing its own capacity. Inside the bellows-shaped container 24, a working space 30 communicating with the outside air is also formed. An intestinal membrane driving device 36 is disposed in the working space ⑽. The intestinal membrane driving device 36 includes: a driving unit 32 having a driving source such as a motor (not shown); and an elongated rod 34 which is moved up and down by the driving unit 32's pushing. The gusset plate 26 is connected to the top of the elongated rod 34. The driving unit 32 is provided with a conversion mechanism (not shown), and the rotary motion is converted into a linear motion by a precession conveying mechanism or a mechanism having a similar function via the driving source. When the driving unit 32 is in operation ', the air-like container 24 extends and retracts in the axial direction, and thus changes the capacity of the liquid-feeding chamber 28 to supply a predetermined amount of liquid 14 to the processing device 16. Printed by the Consumer Cooperative of the Wisdom Industry Bureau of the Ministry of Economic Affairs A pressure gauge 38 is provided on the housing 22 for measuring the pressure in the liquid delivery chamber 28. A control valve 40 is provided in the discharge pipe 20 and can control the degree to which the discharge pipe is opened. A signal from the pressure gauge 38 is input to the control valve 40. Adjust the opening degree of the control valve 40 according to the signal from the pressure gauge 38 to maintain the pressure P in the liquid-feeding chamber 28 at a strange value, and make the pressure slightly higher than the pressure PO in the working space 30 ( In this case, atmospheric pressure). The control valve 40 and the pressure gauge 38 constitute a differential pressure control unit 42. A flow meter 44 is provided in the discharge pipe 20 'on the upstream side of the control valve 40 to measure the flow rate of the liquid flowing in the discharge pipe 20. The paper size from this stream applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 14 312053 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy 500822 A7 B7 V. Description of the invention (15) The signal of the meter 44 This control valve 40 is also input. Thus, the flow meter 44 and the control valve 40 constitute a flow control unit 46 for controlling the flow rate of the liquid supplied to the processing device 16 through the discharge pipe 20. With this configuration, the displacement liquid feeding device can be selectively switched and controlled by the differential pressure control unit 42 or the flow control unit 46. Generally speaking, the controller is operating via the differential pressure control unit 42, and the control valve 40 is controlled according to a signal from the pressure gauge 38 to maintain the pressure difference at a constant threshold as described above. Under this kind of control, the flow rate of the discharge fluid can be maintained correctly and stably. The description of this process can be referred to FIG. 2. If the bellows-shaped container 24 is deformed at a constant rate, the discharge flow rate is expressed only as a function of one stroke of the diaphragm driving device 36. If a specific flow of liquid is required, then changing the stroke can be controlled to match that flow. However, because the bellows-shaped container 24 is elastic in nature, in addition to the deformation of the buckle plate 26 due to the tensile force, the pressure difference ΛP ( Δ! ≫#_! ≫ 〇), the wind-like container 24 is partially deformed. The solid line of the bellows-shaped container 24 is depicted in FIG. 2 to represent the bellows-shaped container 24 in equilibrium. If the pressure P in the liquid-feeding chamber 28 increases' and the pressure difference Δp increases, the bellows-shaped container can be deformed, as shown in Figure 2 by the double-short chain lines. Therefore, even if the position of the buckle plate 26 is not changed, the change in the pressure difference will cause the capacity of the liquid-feeding chamber 28 to change. When the bellows-shaped container 24 is operated while maintaining the pressure difference ΛP at a constant value, the random deformation of the bellows-shaped container 24 causes it to be in the fluid. Packing --- (Please read the notes on the reverse side and write this page first) · This paper size applies to Chinese national standards ^ ^ 7 15 312053 500822 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (16) Pressure change or pulsation can be suppressed to obtain stable flow control. Therefore, the position of the buckle plate 26 will match the capacity of the liquid-feeding chamber 28 in a one-to-one manner. Therefore, the discharge flow rate can be controlled accurately based only on the stroke of the diaphragm driving device 36. In some cases, it is not possible to monitor the pressure difference with a pressure gauge alone and adjust the flow rate of the liquid based on the pressure difference control stroke. For pressure gauges that measure the deformation of the internal diaphragm or similar objects to detect pressure, when a pressure change is detected, the bellows-like container has deformed and the flow rate has changed. Therefore, in this embodiment, when the pressure in the liquid-feeding chamber 28 exceeds a preset value, or the absolute value of the pressure change rate exceeds a predetermined value, it is determined that the system is in a fluctuating condition. At this time, the control mode is switched from monitoring the pressure difference with the pressure gauge 38 to monitoring the flow with the flow meter 44. This special arrangement enables the device to maintain a precise flow of liquid even under unstable conditions. Fig. 3 shows a positive displacement liquid feeding device according to a second embodiment of the present invention. The structure of the positive volume delivery device of the second embodiment is different from that of the first embodiment. The differential pressure control unit 42 in the first embodiment is replaced by a drive device control unit 50. The control unit is The pressure gauge 38 receives a signal to control the operation of the diaphragm driving device 36. In this embodiment, the relationship between the pressure in the liquid-feeding chamber 28 and the deformation amount of the bellows-shaped container 24 has been known in advance. The driving device control unit 50 pushes the diaphragm driving device 36 to offset the deformation of the bellows-like container 24 due to the pressure change in the liquid-feeding chamber 28, so as to keep the liquid flow rate at a constant value. · I I ----- ^ --------- (Please read the notes on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 16 312053 500822 A7 B7_ V. Description of the invention (17) The actual discharge flow rate Q from the liquid supply chamber 28 can be defined by the following equation, where Q is the set flow rate and V is the bellows-like container 24 due to the delivery The amount of deformation caused by the pressure P of the liquid chamber 28. Q = q + (dV / dt) Here, dV / dt: (dV / dP) · (dP / dt) Therefore, Q = q + (dV / dP) · (dP / dt) ------- --------- (1) If the relationship of (dV / dP) is known in advance, the driving device control unit 50 controls the diaphragm driving device 36 so as to obtain the set flow q 0 when the initial flow is qG q- q〇- (d ¥ / dP) * (dP / dt) As a result, Q can be maintained at a constant value. q = q〇- (d ¥ / dP) · (dP / dt) For example, when the volumetric deformation V of the bellows-shaped container 24 and the pressure P of the liquid supply chamber 28 have the following relationship, V = aPb + d Then, dV / dP = abPb ~ 1 Q = q + abPb] (dP / dt) ^ q + abP ^ 'CAP / A t) ---------------- (2) Here, if the relationship dV / dPzabP1 ^ 1 can be known in advance, a constant flow rate can be obtained from the equation (2) by calculating the pressure change per unit time. (Please read the precautions on the back first to write this page)! 4T · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 17 312057 500822
經濟部智慧財產局員工消費合作社印製 如第4圖所示，可見該dV/dP關係是一個正比例關係。 因此，該方程式（2)可簡化為： Q = q + C(AP/dt) 相當容易根據該方程式予以控制。 第5圖及第6圖表示本發明的第三實施例之正排量送液 裝置。於此實施例中，正排量容積幫浦1 0&具有一個密閉系 統，該密閉系統中該工作空間30不開放連通到大氣。亦即， 該殼體22的底部由底板52封閉。該底板52有一個通孔54， 細長棒34即插入該通孔，另有一個入口56，將氮氣或另外 一種調節壓力氣體經由該入口 56引進，以及一個排氣口 58 ’用來以極小量方式排放該類氣體。該底板52同時也備 有一個流體釋漏管件62，用來排出那些已經洩漏入該工作 空間30之液體，以及引流那些所排出的液體進入一個漏出 感應器60。有一個密封機構64設於該通孔54，以密閉封住 該細長棒3 4。 該入口 56經由一條入口管66連接到一個壓力調節氣體 來源（未顯示）。用於偵測於入口管66内壓力之壓力感應器 68 (該壓力相當於該工作空間之壓力），以及根據從該壓力 感應斋68輸出之訊號’控制入口管gg内壓力之一個壓力控 制閥70’係設置於該入口管66之内。以串列方式設置一個 調整閥74連接到該排氣口 58，用來調整少量之排氣消耗。 經由設定調整閥74打開到一個特定程度，以及基於該壓力 感應器68之輸出訊號，操作該壓力控制閥7〇，可抵消由於 該風箱狀容器24之動作和於工作空間3〇維持該壓力p在一 I 訂--------，線 (請先閱讀背面之注音？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 18 312053 500822 A7 B7 經 濟 部 智 慧 財 •產 局 員 工 消 費 合 社 印 製 五、發明說明（I9 ) 個恆定值所生之壓力變化。該壓力感應器68和該壓力控制 閥70構成一個第二壓差控制單位72。 於是，由該壓力控制閥70產生之流量界定為q，於該風 箱狀容器24停止時，從該壓力控制閥70產生之氣體供給量 界定為1，而從該調整閥74所釋出的氣體量界定為q2。更 進一步，表示由於驅動該風箱狀容器所生之容量變化， 而V表示隨著該容量改變av而生之供給氣體量之 變化，則 Q=Q2 + Z\Q(當該風箱狀容器伸張） Q=Qr (當該風箱狀容器縮回） 如果未成立Q>0，將難以控制，而成立以下的條件。 Q2>AQ 〇2 = Ql 因此，被設定，而成立下列的關係。 Qi>AQ 經由採用上述之控制方法，即使當該液體之運送壓力增 加，由於例如在該處理裝置16之下游側發生阻塞導致壓力 增加，仍可維持液體流量在一個預定值。以此種構造只使 用壓力調節氣體，也可執行一個簡單的控制程序。然而， 如於該第一實施例中的例子，該方法將無法應付突然的壓 力變化。 當上述實施例之該風箱狀容器24被損壞時，而形成一 個孔洞或類似之情況，滲漏液體經過該風箱狀容器2 4，流 過流體釋漏管件62並達到漏出感測器60，而在該處被偵測 本紙張尺度適用中_家標準（CNS)A4規格⑵G x 29 ------ 19 312053 (請先閱讀背面之注意事項寫本頁) —裝 訂· -丨線· 經濟部智慧財產局員工消費合作社印製 五、發明說明（2〇 到。於疋’根據漏出感測器60之輸出訊號，將執行例如警 告性的警報聲響或自動的幫浦關掉程序等適當的行動，以 防止意外發生。 第7圖表示本發明的第四實施例之正排量型送液裝 置。此種裝置包含：一個正排量容積幫浦1〇，該幫浦與第 一實施例者有同樣構造；一個止逆閥1〇〇，設置於從排量容 積幫浦10延伸之排出管2〇内；以及一個輸送液體壓力感測 器102，用來偵測於止逆閥1〇〇的一次側之壓力。該裝置更 進一步包含：一個送液腔室壓力感測器〗〇4，用來偵測於該 間送液腔室28之壓力；一個控制閥丨〇6，該控制閥設置於止 逆閥100之上游側；以及一個壓力控制單位1〇8，該控制單 位接收來自輸送液體壓力感測器1〇2和送液腔室壓力感測 器104之訊號，並根據這些訊號操縱控制閥1〇6和驅動單位 3 2 °因此’本實施例之正排量型送液裝置個別地操控於止 逆閥100的一次側之壓力’以及於送液腔室2 8之壓力。 本實施例之正排量型送液裝置於停止輸送液體的期 間，於止逆閥1 〇 〇的一次側之壓力，亦即，包含在連接止逆 閥100與控制閥106之一條管子H0内部之液體壓力被控制 在小於止逆閥1〇〇之打通壓力，同時也控制在高於該液體之 蒸汽壓力。同時’於送液腔室28之壓力也被控制在正常泵 送操作所需壓力（在本文件内參照如運轉壓力）。 在這個時候，於止逆閥1〇〇的一次側之壓力大約是 1· 5kg/cm2(与147kpa)，例如，當該斷裂壓力是2kg/c瓜2 (= 196kpa)時，則在其内部液體之蒸汽壓力是〇5k /cm2 (与 n ϋ ϋ n n n n n n n n I · n n n n n n n 一.δν · n i n n n n 1— I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 20 312053 500822 A7 B7 五、發明說明（η ) 49kpa)。此外’例如，於送液腔室28之壓力大約是2· 5kg/cnl2 (与245kpa)，與該運轉壓力相同。 即使於止逆閥100的一次側之壓力由於止逆閥1〇〇滲漏 而·/¾降，該洩降後之壓力將受控制，以防止洩降至該液體 之蒸汽壓力之下。此種方法包含驅動該驅動單位32的步 驟，以降低送液腔室28之壓力到止逆閥1〇〇的一次側之該初 壓力（於一個例子該壓力是1· 5kg/cin2与147kpa)(步驟 1 )’以及打開該控制閥106的步驟（步驟2)。其次，驅動該 驅動早位32而設定止逆閥1〇〇的一次側之壓力相當於它的 初壓力（步驟3 )，然後關上該控制閥1〇6 (步驟4)。接著， 驅動該驅動單位32以提升送液腔室28内之壓力到它的初壓 力 2.5kg/cm2 (% 245kPa)(步驟 5)。 如果於此操作期間接收到一個幫浦的驅動訊號，該全 部系統即處於待機狀態，直到該操作完成。該操作完成後， 可驅動該幫浦以控制該全部系統。由於該程序只花費1〇一i 5 秒即完成，將不會造成該流程延遲。 降低止逆閥100的一次側之麼力，將大量的減少止逆閥 100之滲漏。此外，藉著防止壓力下降至該液體之蒸汽壓力 以下，亦可避免於管子110内形成空泡。同時也可防止無法 送出預設流量之流體，直到這些空泡消失，以及該壓力至 少超過止逆閥100之打通壓力之情形。 送液腔室28與止逆閥100的一次側之壓力宜設定為相 同，以免止逆閥100滲漏。然而，在啟動該幫浦後，提升送 液腔室28之壓力至高到足夠符合所需的流量，需要相當可 請 先 閱 讀 背 之 注 意 事 項 f 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 21 312053 經濟部智慧財產局員工消費合作社印製 A7 —--—--- B7 五、發明說明（22 ) 觀的時間。因此，經由設定於送液腔室28之壓力至相當於 該運轉壓力，可緊接著在該泵送操作開始後毫不延遲地送 出所需要之流量的流體。 具體言之，經由在該泵送操作開始後，以全部時間保 知贫個定壓之下輸送液體，如第8圖所示，當該流量正增 加時，該液體的流量可與耗時增長量成比例增大，因而成 立由流量之設定耗時量％來得到一個設定流量Qs，而於該 設定耗時量ts内，可嚴謹地控制該流量。 於此例中，連接止逆閥1〇〇和控制閥1〇6之管子U〇非常 短’並且由一種高剛性材料建造，以致管子π 0即使在管中 壓力上昇到與送液腔室28之壓力相同時仍幾乎沒有體積膨 騰。因此，止逆閥1〇〇的二次側之壓力能維持在運轉壓力， 以便緊接著該泵送操作開始即達到所需的流量。然而，如 果一條軟管或類似之物件被用作管子丨丨〇，則當管中之壓力 上昇到與送液腔室28相同壓力時，管子no可發生體積膨 服。此時，設定送液腔室28之壓力為（ρ+α)，稍高於在泵 送操作期間之壓力Ρ，即可將止逆閥1 〇〇的二次側之壓力緊 接著泵送開時即設定至該運轉壓力。此時之該壓力α則是 相當於由於管子Π0體積膨脹所產生之該估計值。 第9圖表示本發明的第五實施例之正排量送液裝置。此 裝置包含複數個正排量容積幫浦10，該幫浦與第一實施例 之幫浦構造類似。這些正排量容積幫浦1〇安排成並聯形 式’並且每一個幫浦1〇可同時輸送不同類型的液體到處理 裝置16。於此例中，該正排量送液裝置包含複數個饋入管 — I — I — — — III — I I -II — — — I I ---- I--I I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格（210 X 297公爱了 22 312053 500822 A7 B7 五、發明說明（23 ) 路Π 2a至112d，其中之每個饋入管路都連接到一個正排量 容積幫浦10，用來輸送饋入液體A、B、C和D。這些饋入管 路112a至112d連結一齊連接到止逆閥1〇〇的二次側，然後連 接到處理裝置16。 於本實施例中，該正排量送液裝置操控該饋入管路 112a至11 2d在止逆閥100的一次側之壓力，以免洩降至分別 流經饋入管路U2a至11 2d之各個液體之蒸汽壓力以下。該 裝置同時也操控每一個正排量容積幫浦之送液腔室28之 麗力在運轉壓力，或稍高於該運轉壓力之壓力，所高出之 壓力值α為這些管子體積膨脹估計之一定壓力值。因此， 如第10圖所示，經由為每一劑輸入液體A、b、c和D設定一 個不變的設定時間ts，以得到設定流量Qas、Qbs、Qcs和Qds， 在該設定耗時量％内之任何耗時量tG，該輸入液體a至D之 流量QAG、QBG、QCG和QDG的比率是栢當於設定流量qas至Is 之比率（Qa〇 : QB0 : Qco : QD0=QAS : QBS : Qcs : qds)。因此，可 緊接著該泵送過程開始即控制全部的混合比率，以致輸送 到處理裝置1 6之流體總是有同樣比率的饋入液體^此種方 法消除有關該饋入液體直到該泵送操作穩定前不能使用之 問題。 第11圖表示本發明的第六實施例之正排量送液裝置。 此種裝置包含二個正排量容積幫浦10，該幫浦與第一實施 例之幫浦構造類似。該二個正排量容積幫浦i 0被安排成並 聯形式，並且被驅動來交替地泵送同樣類型的液體到處理 裝置16。換句話該，分別的從正排量容積幫浦i 〇延伸出那 (請先閱讀背面之注意事項寫本頁) mi 經濟部智慧叼產局員Η消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 23 312053 A7 —~ -----B7____ 五、發明說明（24 ) (請先閱讀背面之注意事項再填寫本頁) 些排放管20，並且各具控制閥1〇6在止逆閥1〇〇的一次侧連 接連結一處，而止逆閥1〇〇之二次側被連接到處理裝置16。 該第六實施例的裝置所執行控制的例子，以下參照第 圖說月為便於說明，於第Π圖右側位置之送液腔室28 和控制閥106,將分別參照如送液腔室A和控制閥A，然而圖 中左側位置之送液腔室28和控制閥1〇6，將分別參照如送液 腔室B和控制閥B。 當控制閥A和β均關閉時，各個正排量容積幫浦1〇之驅 動單位32被驅動，並於腔室A與β内產生壓力達到該運轉壓 力（時間％至t!)。根據一個泵送啟動訊號，該控制閥a被打 開，並從送液腔室A送出液體（時間t2)。在一個預設的一段 時間消逝之後，從送液腔室A送出之流量漸漸地減小，而於 同一時間内，控制閥B被打開並允許液體從送液腔室b釋 出。當液體從送液腔室B所釋出的流量達到一個設定流量， 經濟部智慧財產局員工消費合作社印製 該控制閥A被關上（時間t3-t4)。於此期間，來自該開始泵 送操作之幫浦之該流量漸漸增加，然而從正中止泵送操作 之幫浦之流量以同樣速率漸漸減少，以致該整體的流量未 改變。經由該二幫浦間進行交替的操作，同樣量的饋入流 體能於流量不變情況下連續地輸送到處理裝置16。 送液腔室A被排清之後（時間t5-t6)，送液腔室A被加 壓，以致壓力回升到該運轉壓力（時間t7-t8)。在一個預設 的一段時間過後，從送液腔室B所釋出液體之流量漸減少， 而該控制閥A同時被打開而開始從送液腔室A送出液體。當 液體的該放出流量達到設定流量時，該控制閥B被關上（時 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 24 312053 經濟部智慧財產局員工消費合作社印製 A7 ------------— B7 ____ 五、發明說明（25 ) 間*t9-t1G)’並且將該程序重複執行。 如上所述，來自該開始泵送操作之正排量容積幫浦Μ 之流量被漸漸增加，然而從正中止泵送操作之幫浦之流量 以同樣速率漸漸減少，以致該整體的流量未改變。經由於 該二幫浦間進行交替的操作，同樣量的饋入流體能於流量 不變情況下連績地輸送到處理裝置〗6。 於此例中’連接止逆閥1QQ和控制閥1Q 6之管子I"非常 短5並且由一種尚剛性材料構成，以致當該管中壓力上昇 到與送液腔室28壓力相同時管子n 4幾乎沒有體積膨脹，因 此’止逆閥100的二次侧之廢力得以維持在該運轉壓力，以 便緊接著泵送操作開始即獲得所需的流量。然而，如果一 條軟管或類似物件被用作該管子114，當在管中之壓力上昇 到與送液腔室28相同壓力時，在該管子114内可發生體積膨 服此時’緊接者該栗送操作開始，設定送液腔室28之壓 力為（Ρ+α )’稍咼於在泵送操作期間之壓力p，即可將止逆 閥100的二次側之壓力緊接著泵送開始時即上升至該運轉 壓力。此時之該壓力α則是相當於由於管子η 4體積膨脹所 產生之該估計值。 如上所述’根據本發明，於一個正排量液體運送系統 内’採用經由外部驅動機構驅動之有彈性的膈膜，當該膈 膜移值時，將該膈膜的内側與外侧之壓力差控制在一個恆 定值’因此而可提供一個小而精緻的裝置來更精確地輸送 液體。此類型的裝置對於半導體元件的製造流程是报有用 的0 {請先閱讀背面之注意事項寫本頁) 裝 訂* · -丨绦 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公楚） 25 312053 A7 A7 _ 五、發明說明（26 ) 更進一步，控制該止逆間的一次側之屢力，以免當該 栗送操作停止時壓力落在該液體之蒸汽愿力以下。此外， 送液腔至之Μ力維持在該運轉廢力或維持在較運轉愿力更 高之麼力。因&，安定杲送操作所需的時間能縮短，並可 緊接著泵送操作開始即控制液體的流量。 雖然已經對於本發明某些特定較有利的實施例作詳細 例示及描述，應知不離開本專利申請的範圍可作各式的變 化和修正。 -----------—裝--- <請先閱讀背面之注音？事項再填寫本頁) •線· 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 26 312053Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs As shown in Figure 4, it can be seen that the dV / dP relationship is a proportional relationship. Therefore, the equation (2) can be simplified as: Q = q + C (AP / dt) is quite easy to control based on this equation. 5 and 6 show a positive-displacement liquid feeding device according to a third embodiment of the present invention. In this embodiment, the positive displacement volume pump 1 0 & has a closed system in which the working space 30 is not open to the atmosphere. That is, the bottom of the casing 22 is closed by the bottom plate 52. The bottom plate 52 has a through hole 54 into which the elongated rod 34 is inserted, and an inlet 56 for introducing nitrogen or another pressure-regulating gas through the inlet 56 and an exhaust port 58 'for a very small amount This type of gas is emitted. The bottom plate 52 is also provided with a fluid leakage pipe 62 for discharging the liquid that has leaked into the work space 30, and draining the discharged liquid into a leak sensor 60. A sealing mechanism 64 is provided in the through hole 54 to hermetically seal the elongated rod 34. The inlet 56 is connected to a pressure-regulated gas source (not shown) via an inlet pipe 66. A pressure sensor 68 for detecting the pressure in the inlet pipe 66 (the pressure is equivalent to the pressure in the working space), and a pressure control valve for controlling the pressure in the inlet pipe gg according to the signal output from the pressure sensor 68 70 'is disposed in the inlet pipe 66. An adjusting valve 74 is connected in series to the exhaust port 58 for adjusting a small amount of exhaust gas consumption. By setting the adjustment valve 74 to a certain degree and operating the pressure control valve 70 based on the output signal of the pressure sensor 68, the pressure due to the action of the bellows-shaped container 24 and maintaining the pressure in the working space 30 can be offset. p order I in --------, line (please read the note on the back? Matters before filling out this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) 18 312053 500822 A7 B7 Printed by the Intellectual Property of the Ministry of Economic Affairs • Production Bureau Employees' Cooperatives 5. The pressure change caused by the constant value of the invention description (I9). The pressure sensor 68 and the pressure control valve 70 constitute a second differential pressure control unit 72. Therefore, the flow rate generated by the pressure control valve 70 is defined as q, and when the bellows-shaped container 24 is stopped, the gas supply amount generated from the pressure control valve 70 is defined as 1, and the amount of gas released from the adjustment valve 74 is The amount of gas is defined as q2. Furthermore, it means that the capacity generated by driving the bellows-shaped container changes, and V represents the change in the amount of gas supplied as the capacity changes av, then Q = Q2 + Z \ Q (when the bellows-shaped container Stretching) Q = Qr (when the bellows-shaped container is retracted) If Q > 0 is not established, it will be difficult to control and the following conditions will be satisfied. Q2> AQ 〇2 = Ql Therefore, the following relationship is established. Qi > AQ By adopting the above-mentioned control method, even when the transport pressure of the liquid increases, the pressure of the liquid can be maintained at a predetermined value due to an increase in pressure due to, for example, a blockage occurring on the downstream side of the processing device 16. With this configuration, only a pressure-regulating gas is used, and a simple control program can be performed. However, as in the example of this first embodiment, this method will not be able to cope with sudden pressure changes. When the bellows-like container 24 of the above embodiment is damaged, and a hole or the like is formed, the leakage liquid passes through the bellows-like container 24, flows through the fluid leakage pipe 62 and reaches the leak sensor 60 And it was detected there that this paper size is applicable _ Home Standard (CNS) A4 size ⑵G x 29 ------ 19 312053 (Please read the precautions on the back first to write this page) —Binding ·-丨 Line Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (20 to. According to the output signal of the leaking sensor 60, Yu Ji will perform, for example, a warning alarm sound or an automatic pump shutdown procedure. Proper actions to prevent accidents. Figure 7 shows a positive displacement liquid delivery device according to a fourth embodiment of the present invention. Such a device includes: a positive displacement volume pump 10, the pump and the first The embodiment has the same structure; a check valve 100 is provided in the discharge pipe 20 extending from the displacement volume pump 10; and a liquid pressure sensor 102 for detecting the check valve Primary pressure of 100. The device goes further Including: a liquid-feeding chamber pressure sensor [04], which is used to detect the pressure in the liquid-feeding chamber 28; a control valve, which is arranged upstream of the check valve 100; And a pressure control unit 108, which receives signals from the liquid pressure sensor 102 and the liquid supply chamber pressure sensor 104, and operates the control valve 106 and the driving unit 3 based on these signals 2 ° Therefore, 'the positive displacement type liquid feeding device of this embodiment individually controls the pressure on the primary side of the check valve 100' and the pressure in the liquid supply chamber 28. The positive displacement type liquid feeding of this embodiment The pressure of the device on the primary side of the non-return valve 100 during the period of stopping the delivery of liquid, that is, the pressure of the liquid contained in a pipe H0 connecting the non-return valve 100 and the control valve 106 is controlled to be less than the non-return valve The break-through pressure of 100 is also controlled above the vapor pressure of the liquid. At the same time, the pressure in the liquid delivery chamber 28 is also controlled to the pressure required for normal pumping operations (refer to, for example, the operating pressure in this document) At this time, the check valve 100 The secondary pressure is approximately 1.5 kg / cm2 (and 147 kpa). For example, when the breaking pressure is 2 kg / c gua 2 (= 196 kpa), the vapor pressure of the liquid in the internal side is 0.05 k / cm2 (and n ϋ ϋ nnnnnnnn I · nnnnnnn I. δν · ninnnn 1— I (Please read the notes on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 20 312053 500822 A7 B7 V. Description of the invention (η) 49 kpa). In addition, for example, the pressure in the liquid-feeding chamber 28 is about 2.5 kg / cnl 2 (and 245 kpa), which is the same as the operating pressure. Even if the pressure on the primary side of the check valve 100 drops due to the leakage of the check valve 100, the pressure after the pressure drop is controlled to prevent the pressure from falling below the vapor pressure of the liquid. This method includes the step of driving the driving unit 32 to reduce the pressure of the liquid feeding chamber 28 to the initial pressure of the primary side of the check valve 100 (in one example, the pressure is 1.5 kg / cin2 and 147kpa) (Step 1) 'and a step of opening the control valve 106 (Step 2). Next, the driving early position 32 is driven to set the pressure on the primary side of the check valve 100 to its initial pressure (step 3), and then the control valve 10 is closed (step 4). Next, the driving unit 32 is driven to raise the pressure in the liquid-feeding chamber 28 to its initial pressure of 2.5 kg / cm2 (% 245 kPa) (step 5). If a drive signal is received from the pump during this operation, the entire system is in standby until the operation is complete. After the operation is completed, the pump can be driven to control the entire system. Since the procedure only takes 10 to 5 seconds to complete, there will be no delay in the process. Reducing the primary force of the check valve 100 will reduce the leakage of the check valve 100 by a large amount. In addition, by preventing the pressure from falling below the vapor pressure of the liquid, the formation of cavities in the tube 110 can be avoided. At the same time, it is also possible to prevent fluids that cannot be delivered with a preset flow rate until these cavities disappear and the pressure at least exceeds the breakdown pressure of the check valve 100. The pressure of the liquid feeding chamber 28 and the primary side of the check valve 100 should be set to be the same to prevent the check valve 100 from leaking. However, after starting the pump, raise the pressure of the liquid-feeding chamber 28 to a high enough level to meet the required flow rate. If necessary, please read the precautions below. F Order this paper printed by the staff consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The scale is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 21 312053 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 -------- B7 V. Explanation of the invention (22) The time for observation. Therefore, by setting the pressure in the liquid-feeding chamber 28 to a value corresponding to the operating pressure, the required flow rate of the fluid can be delivered without delay immediately after the start of the pumping operation. Specifically, after the pumping operation is started, the liquid is transported at a constant pressure for a full time to ensure that, as shown in Fig. 8, when the flow rate is increasing, the flow rate of the liquid can increase with time consumption. The amount increases proportionally, so it is established that a set flow rate Qs is obtained from the set time consumption amount%, and within the set time consumption amount ts, the flow rate can be strictly controlled. In this example, the tube U0 connecting the check valve 100 and the control valve 106 is very short 'and is constructed of a highly rigid material so that the pressure of the tube π 0 rises to the level of the liquid delivery chamber 28 even in the tube. When the pressure is the same, there is almost no volume swelling. Therefore, the pressure on the secondary side of the check valve 100 can be maintained at the operating pressure so that the required flow rate can be achieved immediately after the start of the pumping operation. However, if a hose or the like is used as the tube, when the pressure in the tube rises to the same pressure as the liquid-feeding chamber 28, the tube no may be inflated. At this time, the pressure of the liquid-feeding chamber 28 is set to (ρ + α), which is slightly higher than the pressure P during the pumping operation, so that the pressure on the secondary side of the check valve 100 can be immediately pumped open. It is then set to this operating pressure. The pressure α at this time is equivalent to the estimated value due to the volume expansion of the pipe Π0. Fig. 9 shows a positive displacement liquid feeding device according to a fifth embodiment of the present invention. This device includes a plurality of positive displacement volume pumps 10, which are similar to the pump structure of the first embodiment. These positive displacement volume pumps 10 are arranged in parallel form 'and each pump 10 can simultaneously deliver a different type of liquid to the processing device 16. In this example, the positive-displacement liquid-feeding device includes a plurality of feeding tubes — I — I — — — III — II —II — — — II ---- I--II (Please read the precautions on the back before (Fill in this page) This paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 public love 22 312053 500822 A7 B7 V. Description of the invention (23) Roads Π 2a to 112d, each of which is connected to the feed pipe A positive displacement volume pump 10 is used to feed the feed liquids A, B, C and D. These feed lines 112a to 112d are connected together to the secondary side of the check valve 100 and then to the process Device 16. In this embodiment, the positive-displacement liquid-feeding device controls the pressure of the feed lines 112a to 11 2d on the primary side of the check valve 100, so as to prevent leakage to flow through the feed lines U2a to 11 2d, respectively. The vapor pressure of each liquid is below. The device also controls the LiLi of each positive displacement volume pump pumping chamber 28 at the operating pressure, or a pressure slightly higher than the operating pressure, the higher the pressure value α is a certain pressure value for the volume expansion of these pipes. Therefore, as shown in Figure 10 It is shown that by setting a constant set time ts for each of the input liquids A, b, c, and D to obtain the set flow Qas, Qbs, Qcs, and Qds, any time consumption within the set time consumption% tG, the ratio of the flows QAG, QBG, QCG, and QDG of the input liquids a to D is the ratio of the set flow qas to Is (Qa0: QB0: Qco: QD0 = QAS: QBS: Qcs: qds). Therefore It is possible to control all mixing ratios immediately after the pumping process is started, so that the fluid delivered to the processing device 16 always has the same ratio of feed liquid ^ This method eliminates the feed liquid until the pumping operation is stable The problem that cannot be used before. Figure 11 shows the positive displacement liquid feeding device of the sixth embodiment of the present invention. This device includes two positive displacement volume pumps 10, which are the same as those of the first embodiment. The structure is similar. The two positive displacement volume pumps i 0 are arranged in parallel and are driven to alternately pump the same type of liquid to the processing device 16. In other words, the positive displacement volume pumps Pu i 〇 extended that (please read the notes on the back first to write Page) mi Printed by the Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economic Affairs, and Consumer Cooperatives. The paper size is applicable to China National Standard (CNS) A4 (210 x 297 mm) 23 312053 A7 — ~ ----- B7____ 5. Description of the invention (24 ) (Please read the precautions on the back before filling out this page) These discharge pipes 20, and each control valve 106 is connected to the primary side of the check valve 100, and the check valve 100 The secondary side is connected to the processing device 16. An example of the control performed by the device of the sixth embodiment is described below with reference to the figure. For ease of explanation, the liquid delivery chamber 28 and the control valve 106 at the right position in FIG. Π will refer to the liquid delivery chamber A and the control, respectively. Valve A, however, the liquid delivery chamber 28 and control valve 106 at the left position in the figure will refer to, for example, the liquid delivery chamber B and the control valve B, respectively. When the control valves A and β are closed, the driving unit 32 of each positive displacement volume pump 10 is driven, and the pressure in the chambers A and β reaches the operating pressure (time% to t!). According to a pumping start signal, the control valve a is opened, and the liquid is sent from the liquid supply chamber A (time t2). After a preset period of time has elapsed, the flow rate from the liquid sending chamber A gradually decreases, and at the same time, the control valve B is opened and the liquid is allowed to be discharged from the liquid sending chamber b. When the flow rate of the liquid released from the liquid-feeding chamber B reaches a set flow rate, the control valve A printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is closed (time t3-t4). During this period, the flow rate from the pump that started the pumping operation gradually increased, but the flow rate from the pump that was stopping the pumping operation gradually decreased at the same rate, so that the overall flow rate did not change. Through the alternate operation between the two pumps, the same amount of feed fluid can be continuously delivered to the processing device 16 without changing the flow rate. After the liquid-feeding chamber A is drained (time t5-t6), the liquid-feeding chamber A is pressurized so that the pressure rises back to the operating pressure (time t7-t8). After a preset period of time, the flow rate of the liquid released from the liquid-feeding chamber B gradually decreases, and the control valve A is opened at the same time to start sending liquid from the liquid-feeding chamber A. When the discharged flow rate of the liquid reaches the set flow rate, the control valve B is closed (at this time, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 24 312053 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ------------— B7 ____ 5. Description of the invention (25) * t9-t1G) 'and repeat the program. As described above, the flow rate of the positive displacement volume pump M from the start of the pumping operation is gradually increased, but the flow rate of the pump from the positive stop of the pumping operation gradually decreases at the same rate, so that the overall flow rate does not change. Due to the alternating operation between the two pumps, the same amount of feed fluid can be continuously delivered to the processing device without changing the flow rate. 6 In this example, the tube I " connecting the check valve 1QQ and the control valve 1Q 6 is very short 5 and is made of a rigid material so that when the pressure in the tube rises to the same pressure as the pressure of the liquid supply chamber 28, the tube n 4 There is almost no volume expansion, so the waste force on the secondary side of the non-return valve 100 is maintained at this operating pressure so that the required flow rate is obtained immediately after the start of the pumping operation. However, if a hose or the like is used as the tube 114, when the pressure in the tube rises to the same pressure as the liquid-feeding chamber 28, a volume expansion may occur in the tube 114 at this time. This pumping operation is started, and the pressure of the liquid feeding chamber 28 is set to (P + α) ', which is slightly lower than the pressure p during the pumping operation, and the pressure on the secondary side of the check valve 100 can be pumped immediately. This starts to rise to this operating pressure. The pressure α at this time is equivalent to the estimated value due to the volume expansion of the tube η 4. As described above, according to the present invention, in a positive displacement liquid transport system, an elastic diaphragm is driven by an external driving mechanism. When the diaphragm shifts, the pressure difference between the inside and outside of the diaphragm Controlling at a constant value 'therefore provides a small and delicate device to deliver liquids more precisely. This type of device is useful for the manufacturing process of semiconductor components. 0 (Please read the precautions on the back to write this page) Binding * ·-丨 绦 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Chu) 25 312053 A7 A7 _ V. Description of the invention (26) Further, control the repeated force on the primary side of the check to prevent the pressure from falling below the vapor pressure of the liquid when the pumping operation is stopped. In addition, the M force to the liquid supply chamber is maintained at the operation waste force or at a force higher than the operation willingness. With &, the time required for stable pumping operation can be shortened, and the liquid flow can be controlled immediately after the pumping operation is started. Although certain specific and advantageous embodiments of the present invention have been illustrated and described in detail, it should be understood that various changes and modifications can be made without departing from the scope of this patent application. ------------- install --- < Please read the Zhuyin on the back first? Please fill in this page again for details) • Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm) 26 312053