TW418297B - Fluid storage and dispensing system - Google Patents

Abstract

A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g., including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.

Description

V. Description of the invention (1) Field of the invention The invention relates to a fluid storage and gas distribution system that can use it to store high-pressure liquids or other fluids for distributing gas from the system, and is used in applications such as manufacturing semiconductor devices and materials Use the assigned gas. Description of related techniques In various industrial processes and applications, a reliable source of processing fluid is required. These processing and application fields include semiconductor manufacturing, ion implantation, manufacturing of flat panel displays' medical intervention and treatment, water treatment, emergency breathing equipment, welding operations, space-based liquid and gas transportation, and so on. U.S. Patent No. 4,744,221, issued to Karl O. Knollmueller on May 17, 1988, discloses a method for contacting rhenium with zeolites having a pore size in the range of about 5 to 15 angstroms at a temperature of about + 30 ° c. To adsorb radon on zeolite for storage and subsequent transport of radon. Rhenium is then heated by heating the zeolite to an elevated temperature of up to about 175. (: Allow sufficient time to dispense tritium from the zeolite material.

The method disclosed in the tKn0HmUeller patent has disadvantages because it requires a f f ί addition device for the zeolite material to heat the zeolite to a sufficient temperature so that the adsorbent can desorb from the zeolite in a desired amount. This is problematic because the container is generally an m: sleeve or other device, and the operation introduces a significant lag time. In addition, ..., the amount of grains, and therefore the decomposition of the 'cause the formation of hydrogen, which will explode: the heating of $ 逡 胂 causes the decomposition of this heat to promote decomposition, and it is in danger to enter the processing system. In addition, the system completes the actual gas pressure

4 1829 7 V. Description of the Invention (2) Increasing the term of use of the system and the efficiency of operation may be extremely disadvantageous and have safety concerns. The zeolite bed itself is provided with heating coils or other heating elements, which are problematic because it is difficult for these devices to uniformly heat the zeolite bed to achieve the desired uniformity of tritium gas release. The use of heated carrier gas flow through the zeolite bed in its closed container overcomes the above-mentioned shortcomings, but the temperature necessary to reach the lung's heated carrier gas to desorb may be undesirably high or otherwise unsuitable for the final use of tritium gas 'Thus cooling or other processing is then required to regulate the distributed gas for end use. Nominal and assigned patents in 1996, for organic gold and containers with pressure such as *

U.S. Patent No. 5,51 8,528, issued by Glenn M. Tom and James V. McManus, on May 21, 2015, describes a gas storage and distribution system for storing gas, which overcomes £ 1101 ^ disclosed The disadvantages of the gas supply processing discussed above ^ τ and other gas storage and distribution systems include an adsorption-desorption device to store and distribute gas, such as hydride gas, genus group V compounds, etc. -Patented gas storage gas and components

Species! Reverse adsorption onto a carrier sorbent, which is used to reduce the stored sorbent gas f. More specifically, 'this storage and distribution system is constructed and set to deliver bismuth ^ # And g make the gas selectively flow in and out, or the agent medium is negative, and the internal gas pressure is arranged in the physical and the storage and distribution containers;

41829T V. Description of the invention (3) '---- Gas' is physically adsorbed on the solid-phase physical sorbent medium; a distribution assembly, Lian'1 is in communication with the storage and distribution container for gas flow, and the structure and setting In order to provide a pressure lower than the internal pressure outside the storage and distribution container to complete the desorption of the sorbent gas from the solid phase physical sorbent medium, and the gas that removes the adsorbed gas flows through the distribution assembly; the solid phase The physical sorbent medium is free of trace components such as water, metals, and oxidative transition metals (eg, oxides, sulfites and / or nitrates), which would otherwise decompose the sorbent gas in storage and distribution containers. These solid components are eliminated from the solid-phase physical sorbent medium, and the decomposition of the sorbent gas is, for example, 'maintained at an extremely low level at 25 t and internal pressure conditions' after one year, so that the weight of the sorbent gas is decomposed. Calculated not to exceed 5%. Compared to the prior art, a high-pressure gas cylinder, such as the storage and distribution container patented by Tom et al., Is used to implement a practical progress in this technology. It is known that high-pressure gas cylinders are susceptible to self-damage or leaking regulator assembly leaks' and that if the internal decomposition of the gas causes a rapid increase in the internal gas pressure in the cylinders, it is susceptible to fractures or other undesired gas releases from the cylinders in large quantities . It is therefore necessary in this art to provide an improved fluid storage and delivery system that overcomes the various deficiencies described above for selective gas distribution. Relative to the state of the art, and the present invention as explained more fully below, the related art includes the following references: US Patent No. 3,590,860 to Stenner (a manual adjustable regulator for a liquid propane cartridge, including a regulator diaphragm and actuating spring assembly);

88120690.ptd Page 7 418297 V. Description of Invention (4) b b

Coffre et al. U.S. Patent 4, 836, 242 (a pressure reducer for supplying electronic grade gas, including a bellows and inlet valve, with a solid particles filter disposed between the bellows and a low pressure outlet); U.S. Patent 5 to Ollivier No. 230, 359 (a diaphragm-based pressure regulator for a high pressure gas cylinder, where ina valve is positioned in the regulator for adjustably throttling the flow of pressurized fluid); awarded 63 ^ 11〇1 ^ 1 ^, < 11 : 5 > US Patent No. 3,699,998 (8 cali bratable pressure regulator in whichleaf spring fasteners are ut1i zed to retain regulator components in position); US Patent No. 3,791,412 to Mays (a pressure reducing valve for high pressure gas container, including a pair of valve elements for dispensing low pressure throttled fluid); U.S. Patent No. 3,972,346 to Wormser (pressure regulator featuring a U-ring seal poppet pressure 5861111315〇; U.S. Patent No. 4,793,379 (13111〇6) ( button-operated valve for main shut-off and flow control of a pressurized gas cylinder, using magnetic actuation of valve components); US Patent No. 2,615,287 to Senesky (a gas pressure regulator including diaphragm and

mi h

88120690.ptd Page 8 »418297 V. Description of the invention (5) diaphragm-clamping member elements); US Patent No. 4, 1 73, 986 issued to Martin (pressurized gas flow control valve including pressure regulator and responsive poppet valve structure); U.S. Patent 3,388,962 lfe (pressurized gas fuel metering device including sintered metal pellet flow element) to Baumann et al .; U.S. Patent No. 1,679,826 to Jenkins (fluid pressure regulator for high pressure container, reducing diaphragm element) and gas filtering means comprising a felt strip); awarded to St. Clair U.S. Patent No. 2,354,283 (fluid pressure regulator for petroleum gas tanks, including pressure actuated diaphragm with flow restrictor structure to minimize vibration); U.S. Patent No. 5,566,713 (Lomar et al., Gas flow control dispensing assembly including pi ston) -type pressure regulator and block reducer / regulator means); US Patent No. 5,645, 192 to Amidzich (valve assembly for relieving excess gas pressure in a container, including sealing ring / spring assembly); US patent to Cannet et al. No. 5,678,602 (gas control and dispensing assembly for a pressurized gas tank, including reducer and regulator means with indexed flowmeter valve); U.S. Patent No. 2,793,504 to Webster (valve for

88120690.ptd Page 9 4 18zy 7 V. Description of Invention (6)

pressurized fluid container including pressure reducer and regulator and spring bias closure means); US Patent No. 1,659,263 (regulator for pressurized gas cylinder including a diaphragm and anti-friction washer between diaphragm and annular seat of regulator) to Harris; US patent to Thomas No. 2,047,339 (liquefied petroleum gas storage apparatus including flow control unit and leakage prevention valve); and U.S. Patent No. 3,994,674 to Baumann et al. (Detachable burner assembly for container of pressurized liquefied combustible gas, including a regulator valve assembly) . Therefore, one of the items of the present invention is to provide an improved fluid storage and distribution system for selectively distributing gas, which overcomes the above-mentioned shortcomings of the previous practice. Another object of the present invention is to provide an improved fluid storage and distribution system for selective gas distribution, which is characterized by significant advantages in terms of cost, ease of use, and performance. Many other objects and advantages of the present invention will be more fully understood from the subsequent disclosure and the appended patent application scope.

Summary of the Invention The present invention relates to a system for storing and distributing fluids for use in applications such as manufacturing semiconductor products. The fluid storage and gas distribution system of the present invention includes a storage and distribution container, which is constructed and arranged to hold a vapor composition for distribution.

88120690.ptd Page 10 418297

V. Description of the invention (7) The + -stage body is contained in a storage and distribution container, for example, when its fluid is in a liquid state. The storage and distribution container includes and is equipped with a distribution assembly connected to the outlet, which includes, for example, a large assembly, including a distribution valve and an outlet for selectively discharging the gas derived from the self-contained liquid. The output pressure is associated with the outlet and the body pressure regulator in the valve is associated with the outlet, and can be part of the pressure regulator / phase separator assembly associated with the outlet at the neck of the container, for example. Inside and when the fluid is in liquid form, prevents the dispenser 'from leaking to the dispensing valve and outlet. The pressure regulator and optional phase separator ^ are set to be located in the flow path of the fluid dispensed from the container through the outlet ^ The force regulator and the optional phase separator can be placed inside or outside the container. It is preferable that these elements are arranged inside to minimize the possibility of search and environmental exposure during operation and to minimize the leakage path of the contained fluid self-container. When pressure regulators and optional phase separators are configured internally, the container may be sealed with a single weld or seam at the outlet. ^ ^ The phaser may suitably include a porous membrane, which is permeable to the vapor 'α or gas' derived from the liquid but is impermeable to liquid, and the phase separator is preferably a protection mode arranged upstream of the pressure regulator. When the fluid contained in the container is a liquid, it prevents the liquid from entering and prevents the pressure regulator from keeping the liquid in the container p, and prevents the liquid from flowing out of the container. The regulator is a flow control device that can be set at a predetermined pressure level 'to distribute gas or steam from the cylinder at this pressure level. Depending on the distribution status ’and the mode of gas venting from the container, the pressure level set point can be

88120690.ptd Buy 11 418297 V. Description of the invention (8) Superatmospheric, sub-atmospheric or atmospheric pressure. The fluid storage and distribution container of the present invention can be formed in a manner known in high pressure gas cylinders, and has an elongated main body portion, and a neck portion with a reduced cross-sectional area relative to the main body cross-section of the container. The container in this form is suitable for conventional manufacturing, where the container is cleaned and then a valve head assembly is installed, including a valve (manual or automatic) in a manifold configuration, and associated pressure and flow control elements. Although in the use of the fluid storage and gas distribution system of the present invention, liquid is preferably used as the fluid medium f of Guna, but high dust gas can also be used as the fluid medium for storage and selective distribution. Use a conventional pressure regulator to set the fluid dust regulator at an appropriate level, so that the gas or steam is below the pressure regulator set point.-Lan Suo Born II can easily fill storage and distribution containers. The pressure regulator includes it: It can borrow a biasing element, such as-a spring biasing element: = a closed position 'and its response is higher than the set point pressure gate π, i ^ force closes, but its response A pressure below the set point pressure opens and allows fluid to flow through. Therefore, the internal pressure level of the pressure regulator is established in the container, so as to avoid 谇 齑 駚, so that everything moves into the container in a manner of 0 away from its seat, so that the reverse flow of the power distribution mode and the first situation Alas, the container is allowed to flow out of the container for distribution. Otherwise, the container can be ML;? A single mouth filled with fluid. In order to be configured with dual fluid flow ports, the basin can be adapted

418297 V. Description of the invention (9) J Separate filling and distribution pipeline. For example, the dispensing port may be located at the neck Z of the container and associated with the conventional valve head assembly, while the filling port may be provided at another location in the container structure. The container of the present invention can be used for storage and distribution of any suitable fluids, such as hydride fluids (such as swollen, phosphine, hydrogenated trihydrogen, sybarium, etc.) and acid 1 gas (such as hydrogenated gas, hydrogen chloride, gas , Trichloride butterfly, boron tetrafluoride, tooth fossil yaki and yishi yaki, etc.) for semiconductor manufacturing operations. In use, a distribution valve can be provided as part of the distribution assembly associated with the mouth of the container, and this valve can be manually or automatically opened to allow gas to flow through the porous membrane or phaser element (in the (If present) 'and through regulators for exhausting gas from the fluid storage and distribution system, and subsequently flowing to-downstream processing systems' such as ion implanters, chemical vapor deposition chambers, semiconductor equipment cleaning stations, etc. In another aspect, the invention relates to a method for storing and distributing fluid, comprising: in a restricted state of a fluid pressure regulator, containing the fluid in a fluid flow path closed downstream of the fluid flow of the fluid pressure regulator; and The fluid that opens the fluid flow path to the fluid pressure regulator flows, thereby selectively distributing the defined fluid, and discharging the fluid at a rate defined by the fluid pressure regulator. When it is distributed upstream of the phase division of the fluid pressure regulator, Optionally, the fluid contained therein is a liquid and fluid 'to allow gas to be exhausted only from the fluid contained in the confined impurities. In another aspect, the invention relates to a fluid storage and distribution system,

4 16 ^ 97 V. Description of the invention (ίο) Contains: a fluid storage and distribution container, enclosing an internal volume for containing a fluid, wherein the container includes a fluid flow port; a fluid distribution assembly connected to the port Fluid flow is communicated; a two-stage fluid pressure regulator is associated with the port and is set to maintain a predetermined pressure in the internal volume of the container; the fluid distribution assembly is selectively actuated to allow fluid from the internal volume of the container to be conducted The gas flows through the two-stage fluid calendar regulator and the fluid distribution assembly for the gas to be discharged from the container. In another aspect, the invention relates to a fluid storage and gas distribution system comprising: a storage and distribution container constructed and arranged to hold a liquid whose vapor constitutes a fluid to be distributed, wherein the fluid is The pressure of the liquid state is contained in the storage and distribution container; the storage and distribution container includes a fluid flow port;-the distribution assembly is connected to the outlet; and a two-stage fluid waste conditioner / particulate filter assembly, which is arranged inside the container ;as well as

The device 'is used to selectively actuate the distribution assembly to complete the flow of the gas derived from the liquid in the container' through the fluid regulator / particulate filter assembly and the distribution assembly 'for exhausting gas from the system. In another aspect, the method comprises: The present invention relates to a method for storing and distributing fluid in a restricted state of a fluid pressure regulator.

88120690.ptd Page 14 418297 The closed motion path downstream of the fluid flow to the fluid pressure dispenses the defined fluid, and the body. On the one hand, it relates to a closed state of a fluid flow path downstream of a force regulator to a fluid pressure to dispense a defined fluid and use the body; and in another aspect of the present invention, the use and discharge of a body product relates to a method comprising a The capacity to contain a physical adsorption material is about 50 psig (gauge pounds per square meter of a gas distribution assembly, and 5. Description of the invention (11) The pressure regulator opens the fluid flow to discharge the flow at a selective fraction rate. Containing: the opening of the fluid flow to the fluid pressure pressure regulator at a selective fractional rate, the exhaust flow is attached to the internal pressure in the manufacturing semiconductor, and the gas flow path for distributing gas from the container is operated; and the fluid flow of the restrictor The downstream fluid pressure regulator determines the method of manufacturing semiconductor products, and holds the fluid in the submerged fluid flow path; and downstream of the node's fluid flow, the fluid pressure regulator reads the fluid. / J | I * Bulk storage and distribution system Yao 'device, there is a kind of gas in the container inch) to 5000psig, the suction container is connected, and optionally < In one aspect, the present invention relates to a semiconductor manufacturing system including a semiconductor manufacturing device utilizing a gas and the gas source, the source of which includes a container containing a physical adsorbent material, and a gas in the container and an interior thereof. The pressure is about 50 psig to 5000 pSig, adsorbed on it, and a gas distribution assembly, which is connected to the container 'and is selectively operable to distribute gas from the container. Another aspect of the invention relates to a method for storing and distributing fluids.

418297 V. Description of the invention (12) method, comprising: accommodating the fluid in at least a partially adsorbed state at a pressure in a range of about 50 to 5000 psig; and desorbing the fluid from the adsorbed state, and The closed container is released to selectively distribute the fluid. Another aspect of the present invention relates to a fluid storage and distribution system, including a fluid storage and distribution container, enclosing an internal volume of less than about 50 liters, and having an inlet opening greater than 1 inch NGT;-fluid distribution assembly , Configured to selectively distribute fluid from the container; and a fluid pressure regulator in the internal volume of the container, configured to maintain a predetermined pressure therein. The trough can have an internal volume of less than about 20 liters, and preferably less than about 10 liters', e.g. in the range of about 1 to 10 liters. This container can be shaped and sized and shaped as described below More fully explained. The container preferably has a "pressure capacity", which is an adaptable continuous service pressure level (the container breaks or fluid leaks from it) without adverse effects, up to at least about 1,000 pounds square inches, and more preferably at most About 5000 pounds per square inch. Container can be set

For selective distribution to a downstream gas-consuming facility, such as a semiconductor manufacturing facility. Another aspect of the present invention relates to a semiconductor manufacturing system including a semiconductor manufacturing apparatus using a gas and the gas source, wherein the source includes:

88120690.ptd Page 16 4 18297 V. Description of the invention (13) A fluid storage and distribution container encapsulating an internal volume of less than about 50 liters' and an inlet opening greater than 1 inch NGT; a fluid distribution assembly, set For selective distribution of fluid from the container; and a fluid pressure regulator provided in the internal volume of the container to maintain a predetermined pressure therein. In another aspect, the present invention relates to a fluid storage and distribution container comprising a 2.0-2,25 liter DOT 3AA 2015 cylinder, a 1.5-inch NGT opening, 1 1 / 2-11 1/2 NGT threads, 4, 187 To 4.25 inches outer diameter, rated wall thickness 0. 094 to 0. 125 inches, and length 12.75 to 13.75 inches. Another aspect of the present invention is 'a fluid storage and distribution assembly, including a container having an internal volume of less than 50 liters and a H-inch 阢 ^ neck opening', a distribution assembly connected to the neck opening, a regulator It is connected to the distribution assembly and is arranged in the internal volume of the container. From the subsequent disclosure and appended patent application scope, many other aspects, features and embodiments of the present invention will be more fully understood. The detailed description of Faming and its preferred embodiments The present invention is based in part on the discovery that a fluid pressure regulator is configured to a defined liquid volume and that includes a gas flow control element such as a gas flow potential, a mass flow controller ' Or similar gas distribution assemblies, so that a type of fluid storage and distribution system can be easily made to provide a fluid storage and distribution system that replaces Tora et al. US Patent No. 5,518,5 28. To assist in this discovery, to find that the fluid pressure regulator can be

88120690.ptd Page 17

/ Π 82 9 T V. Description of the invention (14) ------------ placed in fluid storage and decanting, 〇 & 冰 &; α ^, so that it can borrow containers, such as "Cylinder cover", "foundation, to prevent thumping, environmental exposure and damage. Natural fluid [The force regulator is preferably arranged internally in the fluid storage and distribution gp device ', but in the broad implementation of the present invention, can This element is arranged in the container. The present invention therefore broadly intends to provide internal and external fluid pressure regulator devices that are associated with the fluid flow port of the container. The fluid pressure regulator may be of any suitable type, such as Inte ^ a ^ SR4 series set pressure regulators sold by d Flow Systems, Inc. As discussed in the overview section of the invention, a fluid pressure regulator can be a poppet type including a poppet element that is biased to a structure To prevent flow at pressures higher than the setpoint value. The setpoint can be a "natural" or fixed setpoint device, or the device can contain two: setpoint (adjustable) devices. Preferably, a fluid pressure regulator In terms of pressure It is intended to be used as an example. The fluid pressure regulator can be set to an appropriate level, such as the flow control of a 700 distribution assembly, so as to distribute with the container. When the paired flow is turned on, set the point here 1 force level, the self-storage and distribution capacity of the fluid for distribution, and the fluid medium in the fluid storage and distribution container can be any suitable fluid medium in the fluid storage state, p is a kind of liquid in the fluid : Seed height "Γ as the source of the gas to be distributed. So point pressure, high pressure gas or a liquefied gas. The milk source can be an optional and suitable use of a phase separator, so that when the gas source is a high pressure liquid,

ΗΓ 88120690.pcd Page 18 418297 V. Description of the invention (15) Prevent liquid from leaking past the regulator valve seat. The phase separator may be of any suitable form, but preferably comprises a porous septum which is permeable to the gas or vapor of the contained liquid 'but is impermeable to the liquid phase. Suitable materials for the permeable membrane of this phase separator include various polymeric material films with appropriate porosity and permeability characteristics, as well as absorbing fabrics such as W.L. Gore & Associates,

Inc. (Elkton, MD) under the trademarks " Gore — Tex ", nActivent ", DryLoft, and " Gore Windstopper " are commercially available from manufacturers such as in a fluid storage and distribution container or in a The external assembly uses the pressure regulator and the phase separator in cooperation with each other. It is preferable that the fluid pressure regulator and the phase separator assembly be internally stored and distributed.

The fluid utilized in the fluid storage and distribution container of the present invention may comprise any suitable fluid, such as, for example, a hydride for use in semiconductor manufacturing operations. Examples of this type of hydride fluid include tritium, phosphine, antimony trihydrogen, Shixiyuan, chlorite yaki, and Ogo-yaki. Other fluids that can be used in semiconductor manufacturing operations, including acid gases used as etchants, cleaners, source reagents, etc. in semiconductor manufacturing operations, such as hydrogen fluoride, boron trioxide, boron tetrafluoride, hydrogen chloride, halogenation Silane (such as SiF4) and ethane (such as Si2F6). The fluid storage and distribution container 'of the present invention can be easily constructed using a conventional fluid pressure regulator device. Compared to the sorbent-based gas storage and distribution system described in U.S. Patent No. 5,51,528, the fluid storage and distribution container of the present invention provides a significantly larger fluid storage capacity when the fluid is in the liquid phase.

88120690.ptd Page 19 V. Description of the invention (16) Type ί 2 ί Real: Column 'for the storage and distribution of bottle 2A etch and 6 sorbent-based gas shown and explained in US Patent No. 5, 1 5 8, 528 The system 'uses a " JY "steel J = storage and distribution container' and contains a kind of physical sorbent material, which has an adsorption affinity for the gas, and transports about 0.5 kg of gas in the swollen gas 1. There is a corresponding container for the fluid storage and gas distribution system, which can store ::: Liquid plutonium and 18 kg of plutonium gas that can be dispensed from it. Beneficial storage f: and the distribution system allows high-purity fluid distribution, Presence: Potential pollutants or impurities that are unique to the sorbent materials used in the base storage and distribution system. For the ancient ^ a The fluid storage and distribution system of the present invention is annoying in the configuration of fluids because of storage And the distribution container can be made with an internal power regulator and optional split stomach, and the seam with the fluid flow of the container will constitute only leakage in otherwise seamless container construction ^ Furthermore, in conventional fluid steel cylinders, Situation, as compared to containers The cross section, the relatively small size of the steel bottleneck, provides-for gas inflow or ': out: minimum leakage path', which can be easily brazed, and connected with a highly fluid-tight sealant Leak-proof. 0 ==, as mentioned previously, fluid storage and distribution containers can be constructed with only one core body flow port. If the fluid pressure regulator is set to an appropriate pressure level, such as 700 torr, the container can be cooled to The fluid to be dispensed by gas vapor pressure) is below the set point of the regulator. In this case, the regulator's lifting element will separate from its seat and allow gas to flow into the storage container from an external source.

418297 V. Description of the invention (π) Please refer to the drawings. Circle 1 is a schematic cross-section and a front view of a liquid storage and gas distribution system 10 according to an embodiment of the present invention. The fluid storage and gas distribution system 10 includes a storage and distribution container 2 including a cylindrical side wall 14, a bottom plate 16 and an upper neck 18 defining a closed inner body containing a liquid 17 such as a supply container. Evidence of hydride including carcass 17 shall be sufficient pressure to include valve 20 and neck 18 above valve. Steam distribution 0 to 20 is not required for the intended final use, otherwise valve 20 may be placed. The valve 20 is joined as a kind of adopting a lift element in a closed state, and when the level is up, the lift element is set to the subatmosphere M, which is suitable for storage in the container and is selected to include a membrane element connection. Is transparent from the internal volume of 15. Liquid 17 may include any suitable liquid hydride for semiconductor manufacturing operations. Examples include 'phosphine, antimony trihydro' silane, diborane and the like. It is held hydraulically in the container 12 and the tritium is kept in the liquid phase. The valve head assembly communicating with the outlet 22 is arranged in the container 12 and the actuator 24 which is separated from the container in the direction indicated by the arrow A, which can be any suitable type (electric, pneumatic Etc.) 6 It is operated by hand, or other flow control devices are provided. It communicates with the pressure regulator 26 in gas flow. It is a known type of piece. It can be spring biased, for example, where the pressure difference across the lifting element exceeds Must undergo displacement. The pressure regulator 26 may be set to, for example, a barometric or super-atmospheric pressure value, such as 700 Torr. For liquids or other fluids to be accepted, specific pressure water is granted and dispensed. The phase separator 28 of the piece 30 is to be connected with the pressure regulator 26. The gas or vapor derived from the liquid 17 is liquid-tight.

88120690, ptd p. 21 b. 4 182 9 7 V. Description of the invention (18) itself. Vapor / breathable, liquid-impermeable diaphragm, formed of any suitable material that can transport gas or vapor only from liquid, but prevents liquid from flowing through. Diaphragms can actually be formed from a variety of potentially effective materials including, for example, polypropylene, polyvinylidene fluoride, polytetrafluoroethylene, polyfluoroacetate, silicon, and surface treated glass fabrics. A preferred effective material includes fabrics such as polyvinylidene chloride 11 breathable " sold under the trademark 'Gore-Tex " (Gore-tex Corporation). Other available materials for use as membrane moon phase separator materials, including Noryl films (General Electric Company,

Pittsfield, MA). When using the liquid storage and gas distribution system of Fig. 1, the liquid is stored at a predetermined pressure 'to ensure its liquidity. For this purpose, the pressure regulator 26 is set at a predetermined level, and an appropriate internal pressure is ensured in the internal volume 15 of the container. The liquid-impermeable, gas / vapor-permeable diaphragm 30 ensures that no liquid will flow into the gas regulator 26, even if The container is tilted from the vertical position shown in Figure 1 while remaining approximately upright. When it is desired to distribute the gas from the container 12, the valve actuator 24 is actuated to open the valve 20, thereby allowing the gas or vapor derived from the liquid to flow through the permeable diaphragm 30, the pressure regulator 26 and the valve 20 for passage. The outlet 22 flows from the valve head distribution assembly. The opening of the valve 20 completes the pressure reduction on the discharge side of the permeable membrane 30 and causes the vapor derived from the liquid to permeate through the membrane for discharge. At the same time, the fluid pressure regulator will keep the pressure of the gas being dispensed at the set point pressure level.

t, 4189 Q V. Description of the invention (19) The container 12 in the embodiment of FIG. 1 may be provided with a separate filling port 4 2 (as opposed to the fluid flow port on the neck of the container), and this separate filling The mouth can be connected to a liquid source for filling the container. Otherwise, the container may be provided with only one neck opening, and the pressure regulator is set at an appropriate temperature level for filling. During the filling operation, the container may be cooled, such as by placing the container in a uniform cooler or coolant pool to reduce the temperature of the container below a predetermined pressure point established by the pressure regulator. The fluid pressure regulator will then have a gas pressure in the internal volume 15 of the container below the set point of the regulator, thereby allowing the lifting element of the pressure regulator to separate from its seat, and allowing fluid to flow into the container for subsequent storage of the liquid in among them. FIG. 2 is a schematic illustration of a semiconductor manufacturing system utilizing a fluid storage and distribution system π 0 according to the present invention. The fluid storage and distribution system 110 includes a generally cylindrical container 112 constructed approximately along the pipeline of the container 12 in FIG. The container holds the liquid at a predetermined pressure. The valve head assembly includes a valve 120 'having an actuator 124 configured to selectively actuate the valve, and complete discharge of gas from the container at line 142. The valve actuator 124 is controlled by the central processing unit 2 10, which may include a computer or microprocessor control device, and the signal actuator 124 is connected with the valve actuator 124 to form a control relationship. The central processing unit 210 may be constructed and arranged to actuate a valve according to a cycle time program. Otherwise, the central processing unit 210 may transmit a signal indicating the predetermined processing condition to the central processing unit at the semiconductor manufacturing facility 200 via the processing status signal transmission line 216 to monitor the processing status, resulting in the unit responding to actuate the valve actuator 124 To the corresponding degree '

88120690.Ptd Page 23 418297 V. Description of the invention (20) The gas flow in the pipeline 142 is proportional to the needs of the semiconductor manufacturing facility. The central processing unit 210 can also receive a signal related to the container: temperature on the signal transmission line 214, which can be connected to a container 112 ", a sensor or an embedded thermocouple 'to be relative to the container. Temperature 〖2, compensating fluid flow in line 1 42. Semiconductor manufacturing facility 2000 may include any suitable semiconductor processing equipment for the production of semiconductor materials or devices, or products containing such materials or devices.

For example, semiconductor manufacturing facility 2000 may include an ion implantation system, lithotracks, chemical vapor deposition reactors, and associated reagent supply and vaporization equipment (including liquid delivery equipment, bubblers, etc.) 'Touch engraving unit' cleaning device, etc.

In a specific embodiment of the present invention, a liquid hydride fluid is held in a container 112 under pressure, and a gas derived therefrom is selectively distributed in a line 142 to a semiconductor manufacturing facility 200 including an ion implantation chamber. The distributed gas, together with a suitable carrier and / or diluent gas, is subjected to ionization, and the obtained ions are implanted on a substrate such as a semiconductor device precursor structure or subassembly. After using the distributed gas, the semiconductor manufacturing facility 200 discharges an outflow gas stream at line 202, which can flow to an exhaust gas processing system 204 for processing and discharge of the final purified effluent in line 206. Please recognize that the semiconductor manufacturing facilities can be variously modified and configured, such as, for example, using multiple processing gases, which can be constructed and operated in accordance with the present invention.

418297

V. Description of the invention (21) The corresponding fluid storage and distribution container is used for distribution. Please recognize that the fluid storage and distribution device of the present invention provides a highly efficient and easy-to-manufacture device for the high-capacity storage and transportation of fluids such as tritium, which can be liquefied under pressure without much effort or expense.

Moreover, the internal volume of the fluid storage and distribution container is equipped with a fluid pressure regulator inside, so that the container can be made with only a single seam on its neck as a potential leak path for fluids flowing in or out. Therefore, the container can be easily manufactured, and the "internally configured gas pressure milk nipple is protected" during use to prevent shocks and environmental exposure that may adversely affect the structural integrity or operation of the container, and constitute a storage and Another potential leak path for the dispensing container. Although the method used in conjunction with the system illustrated in Figure 1 is generally satisfactory, under long-term storage conditions of the fluid container ', liquid may condense on the downstream side of the diaphragm. For example, if the container is placed on its side and the volume of liquid extends at this position above the height of the permeable phase separator membrane > {, then there is a small potential gradient equal to the gravity associated with this liquid " head " Potential: In order to balance the potential of the two liquid heads, the liquid will condense on the valve side of the diaphragm until the respective liquid levels on the opposite sides of the diaphragm are equal.

In addition, for the type of high-pressure cylinders, such as the conventional use of gas storage and distribution containers for Θ boron fluoride (BF3), the gas storage capacity of the system is usually determined and limited by the pressure of the steel meal. The necessary pressure may be too high. . In addition to the above, conventional gas cylinder containers used for compressed gas service ’are determined by the National Gas Taper (NGT) standard and generally used.

88120690.ptd Page 25 V. Description of the invention (22) 1/4 inch NGT, 1/2 inch NGT, and smaller valve inlet. In order to effectively use the "regulator in a bottle" method, it needs to be larger than the steel cylinder imports currently known.

Compressed Gas Association (CGA) 's largest recommended compressed gas cylinder inlet is 1.5 inch NGT-11 l / 2tpi (thread / inch) opening, with a minimum diameter of 1. 7 9 inches. Openings larger than 1/4 inch N GT are generally designed for high flow applications' and require larger cylinders (> 50 liters internal volume). The inventors do not know that any steel ship with a volume less than 50 liters has an opening greater than 1 inch NGT, and it is very unlikely that any opening larger than 1 inch NGT will be used for cylinders with a volume less than 20 liters. In order to allow a commercial "in-bottle regulator" method, it is necessary to provide a steel bottle that meets the US Department of Transportation (USD0T) packaging standards, has an inlet opening larger than conventionally available, and can withstand about 1000 to about 5000 pounds per square Pressure in the range of inches (psi). No such container has been suggested or made by prior art and has not been marketed. The fluid storage and distribution system of the present invention includes a fluid storage and distribution container and is characterized by a fluid flow port. A fluid distribution assembly is connected in fluid communication with the mouth, and the regulator associated with the mouth according to the present invention may suitably include a two-stage regulator to solve the phase separation problem described above.

As mentioned, if the storage and distribution container is combined with a phase separator unit using a single-stage regulator, if the container is placed on its side ', it can hold enough liquid, so that the volume of the liquid extends above the height of the perforated phase separator diaphragm. In this condition, the liquid will condense on the valve side of the diaphragm until the respective liquid levels on the opposite sides of the diaphragm are equal.

88120690.ptd Page 26

41829T 5. Description of the invention (23) The use of a two-stage regulator avoids such disadvantages. If the liquid from Guyi's Daxia's internal volume moves between the first and second stages of the two-stage regulator, the pressure-sensitive element of the high-pressure stage of the two-stage regulator (high pressure, the stage is The fluid flow regulator stage 'and the low pressure stage are regulator stages which are subsequently communicated with the first fluid flow stage) and will be forced to the closed position. The pressure-sensitive element of each regulator stage is generally a poppet valve. When the high-pressure stage is forcibly closed and the pressure rises between the stages (between the high-pressure stage and the low-pressure stage), the increased inter-stage pressure is The final pressure of the fluid discharged from the second stage will have little effect.

The pressure set point of the high pressure stage of the secondary regulator can be set to any suitable dust level higher than the pressure of the final stage (low pressure stage) of the dual regulator. With this configuration, the liquid condensation problem of the single-stage regulator configuration is solved without affecting the overall operation of the fluid storage and distribution system, including this, the system's filling operation (fluid filling). Therefore, the storage and distribution system using the two-stage regulator can be configured as shown in Fig. 1 as described above, but the pressure regulator 26 is a two-stage regulator instead of a single-stage regulator. The two-stage fluid pressure regulator is thus associated with the mouth of the container to maintain a predetermined pressure in the internal volume of the container. And set it up

In another aspect, it is about a fluid storage and distribution system = a container for a variety of physical adsorption materials. For a gas, an example composition, a dentate gas, and an organometallic compound (it also has adsorption affinity). This type of—a kind of gaseous secondary materials with which it has an adsorption affinity) is given internally

88l20690.ptd Page 27 4 彳 8297 V. Description of the invention (24) The pressure of the device is about 50 to 5000 pounds per square inch (psig). It is preferred that 'about 5 to about 40% of this gas is present in a free (non-adsorbed) state' and about 60 to about 95% of this gas is present in the physical sorbent material in an adsorbed state. The container containing the adsorbent material can be constructed and arranged with a distribution assembly or other discharge device, such as US Patent 5 granted on behalf of Glenn M. Torn and James V. McManus on May 21, 996 , 528, 518, the disclosure of which is incorporated herein by reference in its entirety. 0 The container can be constructed instead as shown in Figure 1, but the liquid 17 is replaced by an adsorbent bed that holds a gas-type physical adsorbent material, which also exists in the void of the physical adsorption bed 'and in the container. Headroom of the internal volume. Although the prior art has disclosed that the sorbent-based gas storage and distribution system of the type described in US Patent No. 5,528,518 describes the use of a gas storage and distribution system that is at the same pressure as the atmosphere, for example, January 6, Mm US Patent No. 5,704,967 to Glenn M. Tom et al. And delivery systems, as a source of gas at significantly higher pressures, such as above about 50 psig, and more preferably above about: sig two reasons for this affection, for initial consideration it would seem to be Occlusion of the physical quality of the agent material will have disadvantages, resulting in a " lost product 1 " which will reduce the net amount of gas that can be stored in the container. ^ In this case, I was surprised and unexpectedly found that the grain accumulation inside the container is configured-a kind of sorbent-based gas storage using high pressure storage conditions 88120690.ptd page 28

V. Description of the invention (25) The system provides significant improvements in the storage capacity of the sorbent container. The cylinder is filled with a solid-phase physical adsorption material, preferably in a separated form. As described in the above-mentioned Tom et al. The cylinder, compared with the conventional high-pressure gas cylinder 'has a greatly enhanced gas storage capacity β The information in Table I below illustrates the unexpected increase in gas storage capacity, of which the storage capacity of BF3 is in the adsorption Filling gas cylinders is compared with conventional gas cylinders at room temperature (20, c). The adsorption capacity of bf 3 in Table I is a computer-molded 'storage with predictable reliability 20%' for a gas storage and distribution container with an internal volume of 2.2 liters (equivalent to a commercially available " JY & quot (Steel cylinder) determined that the adsorbate is a type of pellet activated carbon sorbent material of the type disclosed in Tom et al. US Patent No. 5,704,995, the disclosure of which is incorporated herein by reference in its entirety. P-force adsorbent fills the cylinder ^ High pressure cylinder Rpsig) No adsorption ~ No adsorption BF3 BF3 Total BF3 BF3 Total (g) (g) (g) 1 (g) (g) (g) ~ Pi 220 3 223 0 6 6 500 569 ------- 24 593 0 48 46 ^ 836 109 945 Ί 0 218 218 ~ hi- 889 ~ 173 ~ 1062 0 346 346 ~~ 1000 906 215 1121 0 430 430 ~ 1500 925 321 1246 1 0 642 642

88120690.ptd page 29 jl 4 ^ 8297 V. Description of the invention (26) ----- The absolute content of fluorine is shown in the steel cylinder filled with adsorbate. No adsorptive) Gas cylinders " Kings hold four iLr II Steel shovel filled with adsorptive four steels ::::: Erda is filled with adsorptive gas (without adsorptive gas) # The straightness of fluorine is 12.35 times β in 1,5001) 5 ". The total amount of boron tetrafluoride contained in .r 'cylinders is greater than the amount of tetrafluoride contained in gas cylinders.丨 .g 4 times. 0 eight t bursting date: on the other hand, a fluid storage and knife according to the present invention, ^ ^ 骅, including-a fluid storage and distribution container, a fluid flow port, a total body distribution It is in fluid communication with the mouth, and a fluid pressure regulator is associated with the mouth, and can be configured to have the following characteristics: (i) internal valleys of less than about 50 liters, more preferably less than about 20 liters , Most, less than about 10 liters, for example, in the range of about 1 to 10 liters; and (11) an inlet opening greater than 1 inch NGT. This trough is preferably a pressure Volume, which is an adaptable continuous service pressure level without adverse effects (fracture of the container or leakage of fluid from it) up to at least about 1,000 pounds per square inch, and more preferably up to about 5,000 pounds per square inch Square inch. In one embodiment, the container may have an internal volume of 2.0 liters with a 5-leaf NGT cylinder valve inlet 'such that the inlet opening is large enough to fit a regulator device such as an IFS setpoint regulator.

For the configuration of the regulator in the bottle, it is necessary to have an inlet opening of this nature (NGT). Because (1) the diameter of the regulator such as the IFS set-point regulator is generally greater than 1.5 inches and less than 1.6 inches, it needs an approx. 1.5 inch NGT opening, 俾 for regulator to fit in the cylinder, and (2) — NGT opening only accept USDOT wm

88120690.ptd Page 30 418297 V. Description of the invention (27) Approved steel cylinder imports

Application of AsH3, F2, PH3, SiH4, etc. Gases such as 肫 3, inlets, such as cylinder valves with external threaded connections or straight screw bites, or other types of cylinder valves connected to #threads, are not currently being used by USD0T as legally permitted connections for this #gas. In the manufacture of this type, there is a > 1-inch NGT inlet. The steps generally include: When the container is open at the inlet, processing (1) cold pressing a metal disc into a cylindrical cup, (2) hot metal screw Dust forms a steel bottleneck; and =) a manual or automated cutting process is used to make a cylinder opening in the neck of the container. A specific example of this type of container includes a 20-2.25 liter D0TU 3AA 2015 steel bottle with a 1.5-inch NGT opening with 1 / 2_u 1/2 material and 7 threads, and the container has a 4.187 to 4.25 inch Outer diameter, rated wall thickness of 〇94 to 0.125 inches, rated neck outer diameter of 2.5 inches, the inner diameter of the largest neck in the rotating state 1.5 pairs' and 12.75 to 13.75 inches of long skin. This kind of container is suitable for use with the gasification rotten as the gas to be stored and distributed from the container. Figure 3 is a schematic cross-sectional front view of a fluid storage and distribution system 300 according to an exemplary embodiment of the present invention. System D includes a generally cylindrical fluid storage and distribution container 302 'with a cylindrical side wall 304 therein. The lower end is closed by the floor member 306. At the upper end of the container is a neck 308, which includes a cylindrical collar 3110, which defines and circumscribes the top opening of the container. The container wall, floor member and neck thus close the internal volume 328 as shown. At the neck of the container, the threaded plug 3 1 2 of the valve head assembly 31 4 is screwed with the internally threaded opening of the collar 3 10. Valve head assembly 31 4 includes a central fluid

88120690.ptd Page 31 418297

The flow passage 320 is connected to communicate with a working fluid in the center of the valve head assembly. The central working volume cavity is complex 324, which may have external threads, otherwise it is constructed as ^^ 口 ^; pipes, ducts, etc. are attached to it.逅 Pressing and associating-The valve element 322 is disposed in the central working volume cavity, which in the example is coupled to a hand wheel 326, but may instead be coupled to an automatic actuator or other controller or actuator. The valve head assembly 314 is also featured in the valve seat-the vent hole flow channel 31 6 is combined with an overpressure relief valve 318 and communicates with the internal volume 328 of the container. The central fluid flow channel 3 2 0 in the assembly 314 is joined at its end to a connector flow tube 330, which is then joined to the regulator ^ M. The regulator is set to maintain a selected pressure of fluid discharged from the container. A tubular joint 336 is engaged at the lower end of the regulator, and the rafters are joined to a diffuser end at its lower end 丄 = government unit 334. The diffuser unit may be formed of stainless steel, and the diffuser wall is formed of a sintered stainless steel such as 316L stainless steel. The diffuser unit has a wall porosity that allows a gas flow rate of 30 standard liters per minute to remove all particles from the system that are larger than a predetermined diameter, such as greater than 0.03 microns. This filter diffuser unit consists of

Corporation (Bedford, MA) is marketed under the trademark WAFERGARD. When in use ’, a suitable fluid reactant is contained in the internal volume 328 of the container 302, such as a high-pressure gas or a liquefied gas, or a sorbable gas adsorbed and retained in a gas having an adsorption affinity

V. Description of the invention (29) A physical absorbing sword of sexual nature 'wherein the internal volume contains a bed of a suitable solid phase physical sorbent material. The fluid pressure regulator 33 2 is set to a selected set point to provide a flow of the dispensed fluid when the valve is opened at the valve head assembly 3 14, and the fluid flows through the diffuser unit 334, the joint 336, and the regulator 332, Connector flow tube 330 'in the central fluid flow channel 320 of the valve head assembly 314' central working volume cavity 'and outlet 324 »If the end-use application of the invention may be appropriate or needed, the valve head assembly may be joined to Other pipes, conduits, flow controllers, monitoring devices, etc. σ Figure 4 is a perspective view of the valve head assembly 3〗 4 of the fluid storage and distribution system of FIG. 3. In FIG. 4, the corresponding components are numbered corresponding to FIG. 3, and the plug 31 2 is shown as a plug 31 3 ′ provided with a thread complementary to the thread on the inner surface of the collar 3 1 0 and thus the plug of the valve head assembly and The containers can complement each other in a leak-proof manner. 5 is a front view of a diffuser unit 334 employed in the fluid storage and distribution system 300 of FIG. The diffuser unit 334 has a tubular joint part as shown in the figure, and it is screwed with a thread 337 to fit and fit with the adjuster 3 32 shown in the circle 3. "6 Figure 6 is the storage and distribution of ^ Figure ^ Part of the regulator 332 of the system 300, the regulator 3 3 2 is shown as an example with a fluid inlet 3 3 3, and the single-day tubular of the diffuser: the head is screwed to this inlet. The joint 332 is provided at its upper end with a single In-body port, as shown in FIG. 3 *, and is connected to the connector Liu 330. The regulator can be a single-stage regulator or a multi-stage regulator. As previously stated, t f: the regulator has the advantage of overcoming the problems of using the fluid condensing, diaphragm, and reversing or tilting of the container with the diaphragm phase separator, and as in this 0 0

88120690.ptd Page 33 418297 V. Description of the invention (30)-It is hoped that the invention can be used in a single-stage or multi-stage regulator without the diaphragm phase splitter unit. Or particulate-free filter diffuser unit. Fig. 7 is a sectional front view of the upper section of the fluid storage and distribution container 300 of the fluid storage and distribution system 300 of Fig. 3. The portion of the illustrated container 302 includes a cylindrical wall 304, a neck 308, and a collar 310. The inner surface of the collar is screwed by a thread 3 09, which is complementary to the thread 313 of the plug 3 丨 2 in the valve head assembly 3 丨 4 (see Figure 4). The container may be formed from a stainless steel or other ferrous metal alloy, or other metallic or non-metallic construction material, made as described above, and provided with a > 1 inch NGT neck opening and appropriate NGT threads. Various changes or combinations can be made individually or with each other, utilizing the various features and aspects exemplarily disclosed in this case, to provide a fluid storage and distribution system that constitutes an effective source fluid device for specific application needs. Therefore, although the present invention has been exemplarily described herein with reference to specific elements, features, and embodiments, please recognize that the present invention is not limited in structure or operation, but the present invention is broadly consistent with the disclosure herein It is construed to include variations, modifications, and embodiments as would be readily apparent to those skilled in the art. Industrial Application 〇 The fluid storage and distribution system of the present invention can be used industrially to manufacture semiconductor devices that require gas for various unit operations, such as etching, chemical vapor deposition, and implantation. Many of these gases are dangerous and / or expensive, and the gas supply container must be leak-proof when the source gas is accurately distributed, highly reliable, and due to tight space constraints in semiconductor manufacturing facilities

f 4182 97 V. Description of invention (31), and preferably high storage capacity. For these applications and compliance with these standards, the storage and distribution system of the present invention is highly efficient. Description of component numbers 10 Fluid storage and distribution system 12 Storage and distribution container 14 Cylindrical side wall 15 Closed internal volume 16 Base plate 17 Liquid 18 Upper neck 20 Valve 22 Valve outlet 24 Valve actuator 26 Pressure regulator 28 Phase separator 30 Diaphragm element 42 Filling port 110 Fluid storage and distribution system 112 Cylindrical container 120 Valve 124 Actuator 142 Line 200 Semiconductor manufacturing facility 202 Line

88120690.ptd Page 35 V. Description of Invention 204 Row 206 210 212 214 216 300 302 304 306 308 309 310 312 313 313 314 316 318 320 322 324 326 328 330 Super middle valve release hand seal (32) Outlet gas processing system line Central processor unit No. Transmission line No. Transmission line Working condition Signal transmission line Body storage and distribution system Body storage and distribution container Cylindrical sidewall plate member part pattern cylindrical sleeve Ring plug head assembly air hole flow channel pressure reducing valve central fluid flow channel element wheel closed internal volume connector flow tube

88120690.ptd Page 36 418297 V. Description of the invention (33) 331 Diffuser end cap 332 Regulator 3 33 Lower fluid inlet 334 Diffuser unit 3 3 5 Fluid outlet 3 36 Tubular joint 337 Thread

88120690.ptd 418297 Brief description of the drawings Figure 1 is a schematic sectional front view of a fluid storage and distribution system according to an embodiment of the present invention. FIG. 2 is a schematic illustration of a semiconductor manufacturing facility utilizing a fluid dispensed from a storage and distribution system of the type shown in FIG. 1, according to another embodiment of the present invention. FIG. 3 is a schematic sectional front view of a fluid storage and distribution system according to another embodiment of the present invention. FIG. 4 is a perspective view of a valve head assembly of the fluid storage and distribution system of FIG. 3. FIG. FIG. 5 is a front view of a diffuser unit used in the fluid storage and distribution system of FIG. 3. FIG. FIG. 6 is a partial cutaway view of a regulator of the fluid storage and distribution system of FIG. 3. Fig. 7 is a front view of the sword face of the upper section of the fluid storage and distribution container of the fluid storage and distribution system of Fig. 3;

88120690.ptd Page 38

Claims (1)

6. The scope of the patent application: storage, storage and distribution of fluids, where the container includes the assembly assembly, fluid 1 in the force regulator, an internal volumetric force that flows a fluid to store a fluid and divides a fluid pressure; Self-fluid pressure causes gas to pass through the fluid pressure 2. If fluid pressure regulation is applied 3. If fluid pressure regulation is applied to flow through the flow 4. If phase separator is included 5. If the distribution assembly package is included contains the regulator inside the container -The patented scope of the flow-through regulator is patented. The scope has an integrated pressure adjustment. The patentable scope includes a first-rate actuator and an automatic controller for control from the container. 6. Kind of fluid storage and The distribution system includes: a container encapsulating an internal volume for containing a fluid flow port; connected to communicate with the port in fluid flow; and associated with the port and arranged to maintain a self-contained container derived from the container The predetermined pressure of the exhaust gas is a flow control element, which is a gas flow channel that can be selectively used as a fluid in a partial volume. A fluid distribution assembly for gas to be discharged from the container; before passing through the flow control element, the fluid flows at the time of the discharge. The fluid storage and distribution system of item 1 is arranged inside the internal volume of the container. The fluid storage and distribution system of item 1, wherein the phase separator is associated with its operation type for preventing a liquid node. The fluid storage and distribution system of item 3, wherein the body is a liquid-impermeable membrane. The fluid storage and distribution system of item 1, wherein the control valve is actuated by a valve coupled to it for actuation as a potential valve actuator, which discharges the gas derived from the fluid regulated by the starting valve. Distribution system including: 88120690.ptd Page 39 4182 9 7 A storage and distribution container, which encloses a container including a fluid flow port assembly, is connected to the mouth force regulator, and is self-contained by the fluid associated with the mouth. The scope of the application for a patent is a fluid storage fluid, in which a fluid is divided into a fluid pressure and an internal volumetric force; the fluid is dispensed so that the self-fluid pressure accommodates an acidic gas. The internal volumetric force of a fluid pressure; the fluid is dispensed so that the self-fluid pressure and the liquid alkane and diborane assembly in which the container contains the internal regulator The distribution container includes a distribution assembly, a joint force regulator, and a fluid distribution assembly volume in a fluid control element volume in which the fluid flows, and is selected from the group of liquids. Equipped with a system, the fluid flow port of the container is a self-contained internal volume derived from the mouth and the mouth, which is used to accommodate a 70% fluid flow communication; and is arranged to maintain a predetermined pressure piece of gas discharged from the container It is a gas flow channel derived from a selective body for the gas to be discharged from the container; the liquefied hydride gas and the liquid η contain an internal volume for containing an internal volume of an assembly containing a flow control element container The medium flow regulator and the fluid distribution assembly are in fluid communication; and it is arranged to maintain a predetermined pressure member for the gas discharged from the container, which is a gas flow channel derived from the selective operation for the gas from the container Exhaust; the hydride contains a type II compound selected from the group consisting of rhenium, phosphine, antimony trihydrogen, Shi Xisuo. 88120690.ptd Page 40 4182 9 7 VI. 1 范 ® one-"__ 8.-a fluid storage and distribution system, including:-fluid: storage and distribution container, encapsulating fluid 'where the container includes a fluid flow port; ㉟W-a first-class f ί Ϊ Ϊ The assembly is connected in fluid communication with the mouth.-A fluid dust regulator is associated with the mouth, and is set to = from a = the volume of the fluid in the volume, the pre-exhaust gas from the container = fluid It is divided into a flow control element, which is selectively actuable to pass the fluid pressure regulator and the fluid distribution assembly M derived from the fluid in the internal volume of the container. The internal volume of the container is selected from the group consisting of thorium, boron trioxide and boron tetrafluoride. f 9. A fluid storage and gas distribution system comprising: a storage and distribution container constructed and arranged to contain a liquid whose vapor constitutes a fluid to be distributed, wherein the fluid is contained in the fluid under pressure in a liquid state; Storage and distribution container; storage and distribution container includes a fluid flow port; a distribution assembly connected to the outlet; and a fluid pressure regulator / phase separator assembly disposed inside the container to hold the liquid in the container, And prevent liquid from flowing into the distribution assembly during gas distribution; and a controller for selectively actuating the distribution assembly to complete the flow of gas derived from the liquid in the container through the fluid regulator / phase separator assembly and distribution 88120690.ptd Page 41 418P9? 6. Scope of patent application Assembly for the gas to be discharged from the system; before the gas flows through the flow control element, it flows through the flow control element during the discharge. 1 0.—A fluid storage and gas distribution system, including: — a fluid storage and distribution container, enclosing an internal volume for containing a fluid, wherein the container includes a fluid flow port; a fluid distribution assembly connected to the fluid The port is in fluid communication; a fluid pressure regulator is associated with the port and is set to maintain a predetermined pressure of the gas discharged from the container derived from the fluid in the internal volume of the container; the fluid distribution assembly includes a flow control A component, which is selectively actuable so that the gas derived from the fluid in the internal volume of the container flows through the fluid pressure regulator and the fluid distribution assembly for the gas to be discharged from the container; and there is a single connection at the fluid flow port Seam. 11. The fluid storage and gas distribution system according to item 9 of the scope of patent application, wherein the phase separator includes a porous membrane, which is a gas that is permeable to liquid, but is impermeable to liquid, and is arranged in the pressure regulator. Upstream, thus preventing liquid from entering and preventing the fluid pressure regulator from maintaining the function of the liquid in the container, and preventing liquid from flowing out of the container. 1 2. The fluid storage and gas distribution system according to item 9 of the patent application, wherein the container has a dual fluid flow port. 1 3. A fluid storage and gas distribution system comprising: a fluid storage and distribution container, enclosing an internal volume for containing one 88120690.ptd Page 42 418297 VI. Patent application fluid, where the container includes a fluid flow port; a fluid distribution assembly connected to communicate with the port in fluid flow; a fluid pressure regulator associated with the port, and It is set to maintain a predetermined pressure of the gas discharged from the container, which is derived from the fluid in the internal volume of the container; the fluid distribution assembly includes a flow control element, which is selectively actuable so that The gas derived from the fluid flows through the fluid pressure regulator and the fluid distribution assembly for the gas to be discharged from the container; and the container contains a fluid selected from the group consisting of a liquefied hydride gas and a liquefied acid gas. 14. A semiconductor manufacturing system, comprising a gas and a half of a fluid storage fluid of the gas source, wherein an internal volumetric force of a fluid is divided into a fluid pressure to distribute the fluid so that the pressure of the fluid and the conductor manufacturing device, The source includes: a storage and distribution container that encloses an internal volume for containing a container including a fluid flow port; an assembly assembly connected to communicate with the port for fluid flow; 0 a force regulator associated with the port, It is arranged to maintain a predetermined pressure assembly of the gas discharged from the container derived from the fluid in the container, and includes a flow control element for selectively adjusting the flow of gas derived from the fluid in the internal volume of the container. And a fluid distribution assembly for gas to be discharged from the container; a fluid in a fluid storage and distribution container internal volume, wherein the fluid is selected from the group consisting of high-pressure gas and liquefied gas. 88120690.ptd Page 43 418 ^ 97 6. Application for Patent Scope 15. For the semiconductor manufacturing system under item 14 of the scope of patent application, the semiconductor manufacturing device is selected from the group consisting of ion implantation chamber, chemical vapor deposition reactor, and lithographic printing executive. Units, bubblers, liquid delivery units, and cleaning equipment. 1 6. —A method for storing and distributing fluid, comprising: accommodating the fluid in a defined state for a fluid pressure regulator in a flow control element borrowing a fluid flow path downstream of the fluid pressure regulator, and A closed fluid flow path for fluid flow downstream of the fluid pressure regulator; and Turn on the flow control element in the fluid flow path to cause the fluid to flow downstream of the fluid pressure regulator and discharge the fluid, thereby selectively distributing the defined fluid, so that the fluid flows through before the fluid flows through the flow control element A fluid pressure regulator; wherein the fluid is maintained in the restricted state in a closed internal container of a fluid storage and distribution container having a fluid flow port, and the fluid pressure regulator is associated with the fluid flow port. 1 7. The method according to item 16 of the patent application park, wherein the contained fluid is a liquid, and the fluid is phase-separated upstream of the fluid pressure regulator during distribution to allow only the gas to be contained in a limited state. The fluid is drained. 1 8. —A method of manufacturing a semiconductor product 'includes: accommodating a fluid in a restricted state of a fluid pressure regulator in a fluid control element of the fluid flow path downstream of the fluid pressure regulator, and applying pressure to the fluid; Closed fluid flow path for fluid flow downstream of the regulator; 88120690.ptd Page 44 4 182 9 7 6. The scope of patent application opens the flow of the fluid flow path in the fluid flow path of Mercury Condyle-T, Secret Λ 1 to actuate the control element to cause the fluid to adjust in fluid pressure = Flow and discharge fluid, # to selectively distribute the defined fluid, so that the J fluid flows through the flow control element before it flows through the flow control element, and the L body pressure regulator; and uses the discharged body to manufacture semiconductors Product; wherein the fluid is pre-closed in a fluid storage and distribution container with a fluid flow port: the product is maintained in the restricted state, and the fluid pressure regulator is associated with the travel flow port. 1 9. The method of applying for the special tooth 丨 dry circumstance No. 18, wherein the discharged fluid includes ion implantation A 20. The method of applying for the patent scope No. 18, wherein the discharged fluid includes chemical vapor deposition. 2 1 _ —A fluid storage and distribution system, including: a fluid storage and / or knife distribution device, encapsulating ~ 'an internal volume for containing a fluid, wherein the capacity dance includes a fluid flow port; a fluid distribution total ^ , The connection is in fluid communication with the mouth; a fluid pressure regulator is associated with the mouth and is set to maintain a predetermined pressure derived from the fluid in the internal volume of the container and the gas discharged from the container; A) The fluid distribution assembly includes a flow control element that is selectively actuable to allow the gas derived from the fluid in the internal volume of the container to flow through the fluid pressure regulator and the fluid distribution assembly for gas to be discharged from the container; and Wherein the fluid pressure regulator is provided for the subatmospheric pressure from the container 88120690.ptd Page 45 6. Scope of Patent Application Exhaust gas. 2 2. The fluid storage and distribution system according to item 1 of the scope of the patent application, wherein the fluid pressure regulator is set to discharge gas from the container at a pressure lower than 700 Torr. 2 3. The fluid storage and gas distribution system according to item 9 of the scope of the patent application, wherein the fluid pressure regulator / phase separator assembly is set to discharge gas from the system at sub-atmospheric pressure. 2 4. The fluid storage and gas distribution system according to item 9 of the scope of patent application, wherein the fluid pressure regulator / phase separator assembly is set to discharge gas from the system at a pressure lower than 700 Torr. 2 5. A semiconductor manufacturing system comprising a semiconductor manufacturing device using a gas and the gas source, wherein the source includes: a fluid storage and distribution container encapsulating an internal volume for containing a fluid, wherein the container includes A fluid flow port; a fluid, wherein the container includes a fluid flow port; a fluid distribution assembly coupled to communicate with the port in fluid flow; a fluid pressure regulator associated with the port and configured to remain in the container The predetermined pressure of the gas discharged from the container derived from the fluid in the internal volume; the fluid distribution assembly includes a flow control element that is selectively actuable to cause the gas derived from the fluid in the internal volume of the container Flowing through a fluid pressure regulator and a fluid distribution assembly for gas to be discharged from the container; and Among them, the fluid pressure regulator is set to discharge the gas from the container at the sub-atmospheric pressure 8S120690.ptd Page 46 4182P VI. Body pressure adjustment ^ number / = The semiconductor manufacturing system of item 14 in which the flow is discharged from the system ^ The phase separator assembly is set to be used at a pressure lower than 700 Torr 2: Convection type two physical strength: for storage and Distribution, including: the restricted state of the pressure regulator, the fluid is contained in the fluid flow path closed downstream of the fluid if the fluid furnace is opened; and the selective fluid flow downstream of the fluid pressure regulator The second fluid is discharged at a fixed rate, and Jr * m determined by the fluid pressure regulator, and its fluid pressure Λ _ π „body-to-fluid flow 'is set to be discharged at the sub-atmospheric pressure 2: The method device is set to be provided at a pressure lower than 7 ;; f! Pressure ㈣ diameter lies in the discharge fluid to the fluid flow path 29. A method of manufacturing a semiconductor product, comprising: In a limited state, the closed fluid flow path downstream of the fluid flow of the fluid pressure regulator = the fluid that opens the fluid flow path to the fluid to the fluid pressure regulator; the private choice The fluid with limited distribution is discharged at a rate downstream of the body agitation, α is the determined use of the discharged fluid for the manufacture of semiconductor products; and the f fluid pressure regulator is set for the secondary body to fluid flow path. &Amp; Force discharge 88120690.ptd Page 47 * 418297 l 6. Scope of Patent Application _ Λ〇 ‘Two applications, the method of Item 18 of the Patent Park, in which the fluid force adjusts the r diameter. " For discharging fluid to fluid flow at a pressure lower than 700 Torr '31. A fluid storage and distribution system comprising:: flow = storage and distribution container' encloses an internal volume for containing fluid 'wherein the container includes a fluid flow A fluid distribution assembly connected in fluid communication with the mouth; a fluid pressure regulator 'is associated with the mouth and is set to maintain its own interior The force of the gas discharged from the container by the fluid in the volume causes the gas to be discharged from the container at a pressure lower than the superatmospheric pressure. Γ) The fluid distribution assembly includes a flow control element, which is selectively movable. In order to make the gas derived from the fluid in the internal volume of the container through the fluid pressure regulator and the fluid distribution assembly 'supply gas from the container = out of the way before the fluid flows through the flow control element, Flows through the fluid pressure regulator during discharge. W 32. If the fluid storage and distribution system of item 31 of the patent application park, the fluid in i contains a fluid selected from the group consisting of hydrides, halides' etching gases, and cleaning reagents for semiconductor manufacturing equipment . 33. If the fluid storage and distribution system of item 31 in the patent application park, the fluid contains a kind of tritium free tritium, phosphine, antimony trigas, silane, alkane, diborane 'and tetrafluoride shed The fluid class of the group. 34. —A fluid storage and distribution device ’includes: a fluid storage and distribution container, and a neck defining a mouth of the container. — 88120690.ptd 6. Scope of patent application: a gas regulator installed at the port and set to a predetermined pressure level for distributing the gas derived from the container at a predetermined pressure level; and a valve head connected to the neck of the container The valve head includes a valve that is selectively openable or closable, and is configured to cause fluid to flow through the fluid pressure regulator before the fluid passes through the valve to a predetermined pressure level set by the gas regulator. Control the distribution of gas. 35. If the fluid storage and distribution device in the scope of patent application No. 34, contains a fluid for semiconductor manufacturing. 3 6. If the fluid storage and distribution device of item 34 of the patent application park has a single seam at the mouth. 37. The fluid storage and distribution device of claim 34, wherein at least a portion of the regulator is within the neck of the container. 3 8. The fluid storage and distribution device according to item 34 of the patent application, wherein at least a part of the regulator is the internal volume of the container. 39. The fluid storage and distribution device of claim 34, wherein the valve at the valve head includes an automatic valve. 40. The fluid storage and distribution device of claim 34, wherein the valve at the valve head includes a manual valve. 41. The fluid storage and distribution device of claim 34, which contains a fluid containing a hydride gas. 4 2. The fluid storage and distribution device according to item 34 of the scope of patent application, which contains a fluid containing an acid gas. 43. If the fluid storage and distribution device of item 34 of the scope of patent application, 88120690.ptd Page 49 4 1 A797 6. Scope of patent application A fluid containing a fluid selected from the group consisting of rhenium, phosphine, antimony trihydrogen, silane, and diborane. 44. The fluid storage and distribution device according to item 34 of the patent application, further comprising a gas-permeable liquid barrier provided to prevent liquid from contacting the gas regulator. 45. The fluid storage and distribution device of claim 34, wherein the gas regulator includes a lifting element that is biased to a structure to prevent flow at a pressure higher than a predetermined pressure level. 46. The fluid storage and distribution device according to item 34 of the application, wherein the gas regulator is a fixed setpoint device. 47. The fluid storage and distribution device according to item 34 of the patent application, wherein the gas regulator is a variable setpoint device. 48. The fluid storage and distribution device of claim 34, wherein the valve head includes an electric valve. 49. The fluid storage and distribution device of claim 34, wherein the valve head includes a pneumatic valve. 50. The fluid storage and distribution device of claim 34, wherein the container includes a single port. 5 1. The fluid storage and distribution device according to item 34 of the patent application, further comprising a valve actuator for the valve. 52. For example, the fluid storage and distribution device according to item 51 of the patent application scope further includes a central processing unit, which is connected in a control relationship with the valve actuator to modulate the flow of the gas distributed in it. 5 3. If the fluid storage and distribution device of scope 52 of the patent application, 88120690.ptd Page 50 4 1829 7 VI. In the scope of the patent application, the central processing unit is combined into a monitoring relationship with a processing facility that consumes the allocated gas in order to monitor the processing status of the facility and act responsively. A valve actuator modulates the flow of gas to the facility corresponding to the gas demand of the facility. 54. The fluid storage and distribution device of claim 53, wherein the processing facility includes a semiconductor manufacturing facility. 55. For a fluid storage and distribution device according to item 52 of the patent application scope, in which the central processing unit is combined to form a thermal monitoring relationship to the container to adjust the gas flow accordingly and compensate the gas flow relative to the temperature of the container. 5 6. The fluid storage and distribution device according to item 34 of the scope of the patent application, which contains a fluid containing tritium. 5 7. The fluid storage and distribution device according to item 34 of the patent application, which contains a fluid containing phosphine. 58. The fluid storage and distribution device according to item 34 of the patent application, which contains a fluid containing antimony trihydrogen. 5 9. The fluid storage and distribution device according to item 34 of the patent application scope, which contains a fluid containing silane. 60. The fluid storage and distribution device according to item 34 of the scope of the patent application contains a fluid containing diborane. 61. A fluid storage and distribution device according to item 34 of the patent application, containing a fluid containing boron trichloride. 6 2. The fluid storage and distribution device according to item 34 of the patent application, which contains a fluid containing boron tetrafluoride. 6 3. If the fluid storage and distribution device of item 34 of the scope of patent application, 88120690.ptd Page 51 6. Scope of patent application A fluid containing a halide is accepted. 64. The fluid storage and distribution device according to item 34 of the patent application contains a fluid containing a cleaning reagent. 6 5. The fluid storage and distribution system according to item 1 of the patent application scope, wherein the container includes a neck that limits the fluid flow opening. '6 6. The fluid storage and distribution system according to item 65 of the patent application scope, wherein at least a part of the fluid pressure regulator is in the neck of the container. 67. If the fluid storage and distribution system according to item 65 of the patent application scope, at least a part of the fluid pressure regulator is the internal volume of the container. 6 8. The fluid storage and distribution system according to item 1 of the patent application, wherein the internal volume of the q container does not contain a heater. _ 6 9. If the fluid storage and distribution system of item 1 of the scope of patent application, the fluid pressure regulator is set to a predetermined pressure level of sub-atmospheric pressure. 70. The fluid storage and distribution system according to item 1 of the scope of patent application, wherein the fluid pressure regulator is set to a predetermined pressure level of atmospheric pressure. 7 1. The fluid storage and distribution system according to item 1 of the scope of patent application, wherein the fluid pressure regulator is set to a predetermined pressure level of superatmospheric pressure. 7 2. The fluid storage and distribution system according to item 1 of the patent application scope, wherein the fluid contains a gas. 73. The fluid storage and distribution system according to item 1 of the patent application, wherein the fluid contains a liquefied gas. 74. If the fluid storage and distribution system of item 1 of the scope of the patent application, the additional package _ contains a central processing unit connected to the control relationship with the flow control element to modulate the flow of the exhaust gas in it. : 88120690.ptd Page 52 4 18297 VI. Patent application scope 7 5. The fluid storage and distribution system according to item 1 of the patent application scope, wherein the fluid storage and distribution container comprises a vertically elongated, substantially cylindrical container. 7 6. A fluid storage and distribution system comprising: a fluid storage and distribution container enclosing an internal volume for containing a fluid, wherein the container includes a fluid flow port; a fluid distribution assembly coupled to the port A two-stage fluid pressure regulator is associated with the port and is set to maintain a predetermined pressure in the internal volume of the container; the fluid distribution always becomes selectively actuable so that the fluid in the internal volume of the container The resulting gas flows through the fluid pressure regulator and the fluid distribution assembly for the gas to be discharged from the container. 7 7. The system according to item 76 of the patent application, wherein the two-stage fluid pressure regulator is arranged inside the internal volume of the container. 7 8. The system of claim 76, wherein the distribution assembly includes a flow control valve, operatively coupled with a valve actuator therefor, and an automatic controller for actuating the valve actuator to The adjustment of the starting valve is for controlling the exhaust flow of the gas derived from the fluid in the container. 7 9. The fluid storage and gas distribution system according to item 76 of the patent application scope, further comprising a liquid contained in a container, selected from the group consisting of liquefied hydride gas and liquefied acid gas. 80. The fluid storage and gas distribution system according to item 76 of the patent application scope, further comprising a volume contained in the container, selected from the group consisting of thorium, phosphine, antimony trihydro, silane, diborane, hydrogen fluoride, and boron trioxide. , Boron tetrafluoride, hydrogen chloride, silane and ethilanes. S8120690.ptd Page 53 418297 6. Scope of patent application 81. The fluid storage and gas distribution system according to item 76 of the patent application scope further includes a liquid contained in the container's volume selected from the group consisting of swollen, boron, and boron tetrafluoride. —: 8 2, — A fluid storage and gas distribution system comprising: a storage and distribution container constructed and arranged to hold a liquid of a fluid whose distribution is constituted by steam, wherein the fluid is 4 Storage and distribution containers under pressure in the state of the body; ~ Liquid storage and distribution containers, including / fluid flow ports; a distribution assembly connected to the outlet; and a two-stage fluid pressure regulator / particulate filter assembly It is internally arranged in the container; and-the controller for selectively actuating the distribution assembly to complete the flow of the gas derived from the liquid in the container through the fluid regulator / phase separator assembly and the distribution assembly to supply fluorine The body is discharged from the system. 83. The fluid storage and gas distribution system according to item 82 of the application, wherein the container contains a fluid selected from the group consisting of a liquefied hydride gas and a liquefied acid gas. 84. A semiconductor manufacturing system comprising a semiconductor manufacturing device using a gas and the gas source, wherein the source includes: a fluid storage and distribution container encapsulating an internal volume for containing a fluid, wherein the container includes a A fluid flow port; a fluid distribution assembly coupled to communicate fluid communication with the port; a multi-stage fluid pressure regulator associated with the port and set to maintain a predetermined pressure in the internal volume of the container; 88120690.ptd Page 54 VI. Patent application fluid distribution assembly, which can be selectively actuated so that the gas derived from the fluid in the container's internal volume flows through the fluid pressure regulator and the fluid distribution assembly for The gas is discharged from the container. 8 5. The semiconductor manufacturing system as claimed in claim 84, wherein the semiconductor manufacturing device is selected from the group consisting of an ion implantation chamber, a chemical vapor deposition reactor, a lithographic track unit, a bubbler, a liquid conveying unit, and a cleaning device. Made up of groups like that. 8 6. —A method for storing and distributing fluid, comprising: in a restricted state of a fluid pressure regulator, containing the fluid in a convection. The fluid flow path closed downstream of the fluid flow of the body pressure regulator; opening the fluid flow path to Downstream of the fluid flow of the fluid pressure regulator, the defined fluid is selectively distributed and the fluid is discharged at a rate determined by the fluid pressure regulator. 8 7. The method of claim 86, wherein the fluid contained therein is a liquid. 8 8. A method for manufacturing a semiconductor product, comprising: in a restricted state of a fluid pressure regulator, containing a fluid in a fluid flow path closed downstream of the fluid flow of the fluid pressure regulator; opening the fluid flow path to the fluid pressure regulation The fluid flows downstream of the device, thereby selectively distributing the defined fluid and discharging the fluid at a rate determined by the fluid pressure regulator; and using the discharged fluid to manufacture semiconductor products. 8 9. The method of claim 88, wherein using the discharged fluid comprises ion implantation. 88120690, ptd Page 55 182 + ·· _: ι 182 + ·· _: ι Sixth, the scope of application for patents is 9 0 · Rushen Patent Patent Park 8 Chemical vapor phase sinking method. The method of using the discharged fluid to include chemical vapor deposition 9 1. Russian Patent Fanyuan No. The pressure regulator stores it and its gas e D is discharged from the container at sub-atmospheric pressure 92. As described in the patent application, the fluid pressure regulation is written to the storage 'its exhaust gas. "Set for pressure ... U-93.-A fluid storage and distribution physical adsorption material, there is a gas trough device to hold a substance 0 to SOOOpsig adsorbed on it, = j internal pressure is about 50psig junction, and Selective operation to self-capacity === Cheng, associated with the container 94. For example, in the scope of the patent application No. 93, the gas contains a type selected from the emergency / IL storage and distribution system, the metal compound gas is + hydride Gases, organic compounds, and organic cages. The gas groups of the mouth rolling group. The gas is in the free state and in the adsorbed state. 96. Fluid storage such as the 93th in the scope of the patent application In the distribution basin, about 5 to: the gas exists in the free state in the physical sorbent material, and about 60 to about 95% of the gas exists in the adsorbed state in the physical sorbent material. One main species of thief / ΛΓ The manufacturing system includes a gas and a 4 * conductor manufacturing device of the gas source, wherein the source includes a container containing a physical adsorption material, and a gas in the container with an internal pressure of about 50 psig to 20690.ptd ι · ϋ 4 ^ 829γ VI. Patent application scope: 500 Ops i g is adsorbed on it, and a gas distribution assembly is connected with the container, and can be selectively operated to distribute gas from the container. 98. The semiconductor manufacturing system of claim 97, wherein the semiconductor manufacturing device is selected from the group consisting of an ion implantation chamber, a chemical vapor deposition reactor, a lithographic track unit, a bubbler, a liquid transport unit, and a cleaning device. Group of equipment. 9 9. A method for storing and distributing a fluid, comprising: accommodating the fluid in at least a partially adsorbed state at a pressure in the range of about 50 to 5000 psig; and desorbing the fluid from the adsorbed state, and It is released from a closed container, thereby selectively distributing the fluid. 7 10 0. The method according to item 99 of the scope of patent application, further comprising semiconductor manufacturing and processing, using a fluid released from a closed container. 1 01. — A fluid storage and distribution system, including a fluid storage and distribution container, enclosing an internal volume of less than about 50 liters, and having an inlet opening greater than lc inch NGT; — fluid distribution assembly, set for The container selectively distributes fluid; and a fluid pressure regulator, in the internal volume of the container, arranged to maintain a predetermined pressure therein. 1 j 1 02. The fluid storage and distribution system according to the scope of patent application No. 101, wherein the internal volume of the container is less than about 20 liters. ^ 1 0 3. The fluid storage and distribution system according to item 101 of the patent application scope, wherein the internal volume of the container is less than about 10 liters. : S8120690 * ptd Page 57 4 丨 82 97 VI. Patent Application Range 104_If the fluid storage and distribution system of the patent application No. ιοί, the internal volume of the container is in the range from about 1 to about 10 liters. 10 5. The fluid storage and distribution system according to the scope of the patent application, wherein the pressure capacity of the container is at least 1,000 pounds per square leaf. 10 6. The fluid storage and distribution system of claim 101, wherein the pressure capacity of the container is at least 5,000 pounds per square pair. 107. For example, the fluid storage and distribution volume M of the scope of application for patent 101, the inlet opening is 1 1/2 inch NGT. 5 ′ 108. For example, the fluid storage and distribution capacity of item 101 of the patent application scope, wherein the inlet opening is 1 1/2 inch NGT-11 l / 2tpi. ° '109__ A semiconductor manufacturing system' includes a semiconductor manufacturing device utilizing a gas source, wherein the source includes: ^ a fluid storage and distribution container 'encapsulates an internal volume of less than about 508 liters' and There is an inlet opening greater than 1 inch NGT; A a fluid distribution assembly set to selectively distribute fluid from the container; and a fluid pressure regulator set in the internal volume of the container to maintain a predetermined pressure. T 110 · If the semiconductor manufacturing system of the 109th scope of the patent application, the semiconductor manufacturing device is selected from the ion implantation chamber, sulfonate, Yu / Feixie deposition reactor 'lithographic printing track unit' bubbler 'liquid delivery Unit, a group consisting of bio-informatics equipment. Month / ° and 111. A fluid storage and distribution container, including a 2.0 〇 25 25 DOT 3ΑΑ 2015 steel cylinder, a 1.5 inch NGT opening with j 1/2 · _η Α 418297 VI. Application patent scope ^ = T thread, 4.187 to 4.25 pairs of outer diameter, rated wall thickness 0, 125 inches, and length 12.75 to 13.75 inches. No υ.ϋΜ to 112 · —a kind of fluid storage and distribution assembly, & j _ volume is less than 50 liters, and a crotch ^ has an internal volume to the neck opening, a regulator connected to the interior of the distribution and distribution assembly Volume. Only equipped with the assembly, and is arranged in the 113 neck of the container: the fluid storage and distribution assembly of the 112th patent application, the opening of the member is a 1.5 pair of NGT neck opening. The other 114 are fluid storage and distribution assemblies each corresponding to item 112 of the scope of patent application, and a particulate filter connected to the regulator for preventing particles from entering the flow distribution assembly. The fluid storage and distribution assembly of the second application for item 112 of the patent application includes a multistage regulator in the middle 5 weeks. In 11 of basin 1, such as the fluid storage and distribution assembly of item 112 of the scope of the patent application, the Dijia Valley device contains a physical adsorbent material, and a gas that is straight and has an affinity for adsorption. ′ 11 7. If the fluid storage and distribution container of item u 6 of the scope of patent application, the pressure in the internal volume of the container is greater than 50 psigo