經濟部中央標準局貝工消費合作社印繁 A7 B7 五、發明説明（） 發明領域： 本發明係與一種射頻電路有關，特別是有關於一種射 頻電路測試方法及一種裝置於一射頻界面電路與一射頻產 生器之射頻電路測試裝置。 發明背景： 隨著工業技術及生產方法的快速發展，有許多利用高 頻產生線路的設備，逐漸的由其原來的電子及通訊應用領 域，進一步的開發應用於各項生產設備之中。例如屬於較 高頻帶的射頻（radio frequency; RF)電路，目前已經常的被 應用於許多的生產設備，利用其高頻或振盪的特性，使用 於如半導體 '電子元件、各項零件、及特殊加工的應用之 中 。 在不限制本發明的精神及應用範圍下，以下以一半導 體製程中所應用的射頻電路設備為例，介紹本發明之背 景。在半導體元件製造的設備中，有許多的製程的設備須 經常使用一射頻產生器，以產生一高頻及高能量的振盪訊 號或電場，以應用於如蝕刻或濺鍍等不同的機台上。一般 而言，射頻產生器是藉由一射頻界面電路來控制其啟動、 關閉、及各種工作狀態等，射頻產生器藉由與射頻界面電 路的連接及其所輸入的訊號，產生一具有指定功率的振盪 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） --------ΓΙ^------ΪΤ-----Ik (請先閱讀背面之注意事項再填寫本頁) 五、發明説明（ A7 B7 射 測 檢 號 訊 之 應 回 器 生 頻 射 由 可 並。 路況 電狀 面作 界工 頻之 射器 ，生 號產 訊頻 及生 雜般 複一 的在 當此 相因 造， 構接 的連 路及 電合 面配 界的 頻路 Lv .yL 寿 W 及關 器相 生多 產許 頻與 时 」弓 於並 由 ’ 密 精 ^2? Λ、< 或面好 常界良 異頻無 作射並 工及， 有器時 會生生 常產發 經頻況 ，射狀 下於常 用由異 使而的 及。般 作生一 操發在 的形， 間情性 時的雜 長常複 中異的 況率造 L·^ Λν 壯Iy楨 產出路 停，且 並況， 程狀費 過常浪 產異的 生有力 止是人 停仍與 須若間 必，時 往作致 往工導 此的而 因路因 ，電， 置面器 裝界生 及頻產 法射頻 方換射 查更.換 檢行更 及進需 錯，必 偵機則 的 間 時 Mid 生 成 造 而 件 元 換 更 或 查 檢 機 停。 的加 間增 時的 長本 為成 因及 會失 更損 述 概 及 的 目 明 發 裝 其 及 法 方 的 試 測 路 •per 頻 射 種 1 供 提 為 的 目 的 明 發 本 (請先閱讀背面之注意事項再填寫本頁) 丨裝The Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives, India and A7 B7 V. Description of the invention () Field of the invention: The present invention relates to a radio frequency circuit, in particular to a radio frequency circuit test method and a device in a radio frequency interface circuit and a RF circuit testing device for RF generator. Background of the Invention: With the rapid development of industrial technology and production methods, there are many devices that use high frequency to generate circuits, and have gradually been further developed and applied to various production equipment from their original electronic and communication applications. For example, a radio frequency (RF) circuit belonging to a higher frequency band has been often used in many production equipment at present, using its high frequency or oscillation characteristics, such as semiconductor 'electronic components, various parts, and special Processing applications. Without limiting the spirit and scope of the present invention, the background of the present invention will be described by taking the radio frequency circuit equipment used in the half-conductor process as an example. Among semiconductor device manufacturing equipment, there are many process equipments that often need to use a radio frequency generator to generate a high-frequency and high-energy oscillating signal or electric field for application on different machines such as etching or sputtering . Generally speaking, a radio frequency generator controls its startup, shutdown, and various operating states by a radio frequency interface circuit. The radio frequency generator generates a specified power by connecting to the radio frequency interface circuit and its input signal. The paper size of this paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -------- ΓΙ ^ ------ ΪΤ ----- Ik (Please read the precautions on the back first (Fill in this page again.) V. Description of the invention (A7, B7, radio frequency, radio frequency, radio frequency, radio frequency, radio frequency, etc., can be combined. One is created by the current phase, the connected circuit and the frequency circuit Lv of the junction surface are bounded. The proliferative and prolific frequency and time of the interlocking device are bowed and formed by 'dense fine ^ 2? Λ , ≪ Or face good and good frequency of the normal world without shooting and work, and when there is a device will often produce frequent hair and hair, often under the shooting of the common cause by the stranger. Shape, interpersonal heterozygosity in the complex situation often makes L · ^ Λν Zhuang Iy 桢 produces a road stop, and At the same time, the process costs too much time to produce different products, but it is necessary to stop the car and wait for it. It ’s always a matter of time to work, but it ’s because of roads, electricity, surface mounters, and frequent production. The radio frequency party changes the radio and checks and changes. The change of the inspection line is more timely and the mistakes are required. The mid-time of the required detection machine is generated and the unit is changed or the inspection machine is stopped. The long time of the extra time is the cause and the loss. It is even more difficult to describe the general purpose of the installation and the test road of the French side. Per frequency shot 1 for the purpose of providing the release (please read the precautions on the back before filling this page) 丨 installation
、1T 置 經濟部中央標準局員工消費合作社印製 及常 法異 方作 的工 試、 測中 路器 電生 頻產 射頻 種射 一及 供路 提電 為面。 的界因 目頻原 1 射的 出常 找異 可率 ’功 置出 裝輪 其或 另 的 明 發 本 另 的 明 發 本 及 法 方 的 試 測 路 頻 射 »ί~ 種 1 供 提 為 的 本紙張尺度適用中國國家標準（CNS ) Α4規格（21〇><297公釐） 經濟部中央標準局員工消費合作社印衆 A7 _B7_ 五、發明説明（） 其裝置，可減少射頻界面電路及射頻產生器工作異常時所 需的偵錯時間、以減少生產時間的浪費，增進生產效率。 本發明中的射頻電路測試裝置設置於一射頻界面電路 與一射頻產生器之間，射頻電路測試裝置可包含：一信號檢 測裝置，與射頻界面電路及射頻產生器相連，用以檢測複 數個輸出/輸入信號；一切換選擇裝置，設置於射頻界面電路 及射頻產生器之間，用以切換射頻產生器之至少一個輸入 控制訊號於一界面控制狀態及一手動狀態之間；及一功率 檢測裝置，與射頻界面電路及射頻產生器相連，用以檢測 射頻界面電路之一設定功率、及射頻產生器之一功率。射 頻電路測試裝置並進一步加入一中斷迴路切換裝置，設置 於射頻界面電路及射頻產生器之間，用以切換射頻界面電 路之一中斷迴路於一自動狀態及一通路狀態之間。 射頻電路測試方法用以測試一射頻界面電路與一射頻 產生器之功能及工作狀態，射頻電路測試方法可包含以下 步驟。首先開啟射頻產生器，並檢測射頻界面電路之啟動 訊號；接著檢測射頻界面電路之功率設定訊號及射頻產生 器之電源供應；再檢查射頻產生器之開啟狀態；之後對射頻 產生器輸入啟動訊號，並檢測開啟狀態；再變化功率設定訊 號，並量測射頻產生器之順向功率。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） T裝 訂k (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印？^ A7 B7 五、發明説明（） 圖式簡箪說明： 第一圖為本發明中射頻電路測試裝置的連接示意圖。 第二圖顯示本發明中射頻電路測試裝置的功能及結構示 意圖。 發明詳細說明： 本發明中提供一種射頻電路測試的方法及其裝置，利 用一信號檢測裝置與射頻界面電路及射頻產生器的連接， 可檢測射頻界面電路及射頻產生器中的各項輸出/輸入信 號；並藉由一切換選擇裝置的設置，可將對輸入控制訊號 進行界面控制狀態及手動狀態兩者之間的選擇。並藉由一 系統性的射頻電路測試方法，循序檢測射頻界面電路的輸 出訊號及射頻產生器的工作狀況，加快解決工作異常或功 率異常問題的速度。 在不限制本發明的精神及應用範圍下，以下以一半導 體製程中所應用的射頻電路設備為例，介紹本發明之應 用，而本發明中之射頻電路測試的方法及其裝置，當不受 本實施例之限制而可應用於各項使用射頻電路之設備中。 參見第一圖所示，為本發明中之射頻電路測試裝置的連接 示意圖，射頻電路測試裝置10設置於一射頻界面電路100 與一射頻產生器200之間，並與射頻界面電路100之數個 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -Ji-裝------訂------k (請先閱讀背面之注意事項再填寫本頁) 五、發明説明（ A7 B7 輸出/輸入端相連接’同時與射頻產生器2〇〇之數 輸入端相連接。 個輪出 參見第二圖所示，為本發明中之射頻電路測試裝置 功能及結構示意圖，射頻電路測試裝置1() 一 的 JL A —射頻 面電路100與一射頻產生器200之間，射頻電路測試 10包含一信號檢測裝置12,其内可包含數個訊號檢剛置 訊號檢測器可使用一般的電位計或是如圓中所示的由發， 二極體（LED)及電阻組成的電路等，訊號檢測器與射頻界先 電路1〇〇及射頻產生器200相連，用以檢測複數個輪出/面 入信號。射頻電路測試裝置1 〇尚包含一切換選擇裝置^輪 設置於射頻界面電路100及射頻產生器200之間，用以 換射頻產生器200之一個或多數個輪入控制訊號、例如2 動訊號或功率設定訊號等’於一界面控制狀態及一手動狀 態之間，以利於測試的進行；射頻電路測試裝置1〇並包含 一功率檢測裝置16,與射頻界面電路100及射頻產生器2〇〇 相連，用以檢測射頻界面電路1〇〇之設定功率 '及檢測射 頻產生器200之功率。 (請先聞讀背面之注意事項再填寫本頁〕 .裴 -訂_ 經濟部中央標隼局貝工消费合作社印策 上述之射頻電路測試裝置10更可進一步加入一中斷迴 路切換裝置18,設置於射頻界面電路1〇〇及射頻產生器2〇〇 之間’用以切換射頻界面電路1〇〇之中斷迴路於一自動狀 態1 8a及一通路狀態1 8b之間，以於測試過程中測試異常 是否為中斷迴路之影樂。 本紙張尺度適用中國國家標隼（CNS ) A4規格（2丨〇Χ297公釐） A7 B7 經濟部中央標準局員工消費合作社印黎 五、發明説明（） 以一般性的應用而言’本實施例中的信號檢測裝置12 可包含：一電源檢測器20,與射頻產生器200之電源相連， 用以檢測射頻產生器200之電源供應；一開啟檢測器22、 與射頻產生器200之一開啟狀態訊號相連接，用以檢測射 頻產生器200之開啟狀態；及一啟動檢測器24、與射頻界 面電路100之啟動訊號相連，用以檢測射頻界面電路1〇〇 之啟動訊號。信號檢測裝置12並可進一步選擇性的加入— 功率過載檢測器26 ’用以檢測射頻產生器200之功率負栽 狀態；及一溫度檢測器28，用以檢測射頻產生器200之溫 度狀態。 於本實施例中，射頻電路測試裝置10中的切換選擇裝 置14可包含一啟動切換器30，連接於射頻界面電路1〇〇 及射頻產生器200兩者間的傳送啟動訊號之路徑，用以切 換此啟動訊號於一由射頻界面電路100控制的界面啟動狀 態30a、一關閉狀態30b、及一啟動狀態30c之間。切換選 擇裝置14並可包含一功率切換器32,用以切換射頻產生器 200之一功率設定訊號於一由射頻界面電路1〇〇控制的界 面控制狀態32a、一功率關閉狀態32b、及一功率設定狀態 3 2c之間。而當射頻產生器200之功率設定訊號連接於功率 設定狀態3 2c時，可利用一功率設定器34產生一功率設定 訊號、通常為一電壓值，以控制射頻產生器200之功率值。 功率設定器34可使用一可變電阻及一電阻組成的電壓調整 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） — 裝 訂 l ,,·^ (請先閱讀背面之注意事項再填寫本頁} 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（） 電路來實施。 功率檢測裝置16在本實施例的應用中，包含一功率訊 號檢測器36 ’用以檢測射頻界面電路1〇〇輸出之功率設定 訊號。功率檢測裝置1 6可再加入一輸出功率檢測器3 8，用 以檢測射頻產生器200之一輸出功率訊號，同時並可藉由 一功率檢測切換器40來切換功率檢測裝置、切換於檢測一 順向功率訊號（即端子40a)及一逆向功率訊號（即端子40b) 之間。而其中的功率訊號檢測器3 6及功率檢測器3 8，可使 用一般的電位計或電壓感應線路。 運用本發明中的射頻電路測試裝置10，本發明中的射 頻電路測試方法可包含以下的步驟。首先對射頻界面電路 1〇〇的部分進行檢查’將中斷迴路切換裝置18設置於自動 狀態18a，將啟動切換器30設於界面啟動狀態30a、並將 功率切換器32設定於界面控制狀態32a。接著開啟射頻界 面電路100，檢測射頻界面電路100輸出之啟動訊號’此檢 測動作可藉由啟動檢測器24來達成，之後以功率檢測裝置 36檢測射頻界面電路100輪出之功率設定訊號，以了解其 功率設定訊號之输出是否正常。亦可再加入一遘擇性的步 驊，由開啟檢測器22檢測射頻產生器2〇〇之開啟狀態，若 未正常開啟，則可將中斷迴路切換裝置18設置於通路狀態 1 8b，使中斷迴路為通路，並再由開啟檢測器22檢測射頻 產生器之開啟狀態，若正常開啟，則可得知為中斷迴路部 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公竣） -------11(1¾------1T------W (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印聚 A7 _____B7 五、發明説明（） 分之問題；若仍未正常開啟，則可推得異常是來自射頻產 生器200。由以上之程序，可測得射頻界面電路10〇的工作 有無異常’以進行除錯或更換的步驟。 接著再對射頻產生器200的部分進行檢查，將中斷迴 路切換裝置18設置於通路狀態18b，將啟動切換器30設於 關閉狀態30b、並將功率切換器32設定於功率關閉狀態 3 2b。首先由電源檢測器20檢測射頻產生器200之一電源 供應’以確定其電源供應有無異常《接著將啟動切換器30 設於啟動狀態3 0 c，再由開啟檢測器22可測知射頻產生器 200之開啟狀態，若無異常後可藉由功率切換器32之切換 至功率設定狀態32c、功率設定器34之操作、及功率訊號 檢測器3 6之量測，以變化功率設定訊號，並由輸出功率檢 測器3 8量測射頻產生器2 0 0之順向功率，以域認其功率輸 出狀況。由以上之程序，可進一步了解射頻產生器200的 部分有無異常，以進行除錯或更換的步驟β 於上述之功率檢測過程中，可持續變化對射頻產生器 2 00輸入的功率設定訊號，並量測射頻產生器之順向功率， 以偵測其順向功率變化相對於功率設定訊號是否呈一正常 之線性變化。並可將功率檢測切換器40切至端子40b ’以 量測射頻產生器之逆向功率，確認逆向功率的大小是否於 正常範圍内。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -------LJi-装------訂------V (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（） 上述之測試方法可更進一步加入一檢測射頻產生器 200之功率負載狀態之步驟，由功率過載檢測器26，檢測 其功率是否過載而導致異常。亦可加入一檢測射頻產生器 之溫度狀態的步驟，由溫度檢測器2 8檢測射頻產生器2 0 0 是否因溫度過高而產生異常。 藉由本發明中的射頻電路測試方法及其裝置，可逐步 的檢查射頻電路中射頻界面電路100及射頻產生器200各 項常見的異常工作狀況，並由之判斷必須由何處加以除 錯、解決或更換元件，同時利用上述的方法及裝置，可在 短時間内即將異常情形找出，以快速的解決問題，減少時 間及設備元件更換時人力及成本的浪費，而增加可用以生 產的時間，有效的提昇了生產效率並降低生產成本。 本發明以一較佳實施例說明如上，僅用於藉以幫助了 解本發明之實施，非用以限定本發明之精神，而熟悉此領 域技藝者於領悟本發明之精神後，在不脫離本發明之精神 範圍内，當可作些許更動潤飾及等同之變化替換，其專利 保護範圍當視後附之申請專利範圍及其等同領域而定。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） * · (請先閱讀背面之注意事項再填寫本頁), 1T is printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, and has been tested in different ways by common law. The testers are generators, radio frequency products, radio frequency seeders, and power supply circuits. Because of the frequency of the original frequency of the original 1 shot, you can often find a different rate. You can set the wheel or another Mingfa version, another Mingfa version, and the French test road frequency shot. »~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ This paper size applies to Chinese National Standard (CNS) A4 specification (21〇 > < 297 mm) Employees' Cooperatives of the Central Standards Bureau, Ministry of Economic Affairs, Consumer Cooperatives, India A7 _B7_ 5. Description of the invention () The device can reduce the RF interface circuit And the error detection time required when the RF generator works abnormally to reduce the waste of production time and improve production efficiency. The radio frequency circuit test device of the present invention is disposed between a radio frequency interface circuit and a radio frequency generator. The radio frequency circuit test device may include a signal detection device connected to the radio frequency interface circuit and the radio frequency generator to detect a plurality of outputs. / Input signal; a switching selection device, disposed between the RF interface circuit and the RF generator, for switching at least one input control signal of the RF generator between an interface control state and a manual state; and a power detection device It is connected to the radio frequency interface circuit and the radio frequency generator, and is used to detect the set power of one of the radio frequency interface circuits and the power of one of the radio frequency generators. The radio frequency circuit test device is further added with an interruption circuit switching device, which is arranged between the radio frequency interface circuit and the radio frequency generator to switch an interruption circuit of an radio frequency interface circuit between an automatic state and a path state. The RF circuit test method is used to test the function and working status of an RF interface circuit and a RF generator. The RF circuit test method may include the following steps. First turn on the RF generator and detect the startup signal of the RF interface circuit; then check the power setting signal of the RF interface circuit and the power supply of the RF generator; then check the ON state of the RF generator; then input the startup signal to the RF generator. And detect the open state; then change the power setting signal and measure the forward power of the RF generator. This paper size applies to China National Standard (CNS) A4 (210X297 mm) T binding k (please read the precautions on the back before filling this page) Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs? ^ A7 B7 V. Description of the invention () Brief description of the drawings: The first diagram is a schematic diagram of the connection of the RF circuit test device in the present invention. The second figure shows the function and structure of the RF circuit test device in the present invention. Detailed description of the invention: A method and a device for testing a radio frequency circuit are provided in the present invention. By using a signal detection device connected to a radio frequency interface circuit and a radio frequency generator, various outputs / inputs in the radio frequency interface circuit and the radio frequency generator can be detected. Signal; and by switching the setting of the selection device, the input control signal can be selected between interface control state and manual state. With a systematic RF circuit test method, the output signals of the RF interface circuit and the working condition of the RF generator are sequentially detected, and the speed of solving abnormal work or abnormal power problems is accelerated. Without limiting the spirit and scope of the present invention, the following uses radio frequency circuit equipment used in a semiconductor manufacturing process as an example to introduce the application of the present invention. The method and device for testing the radio frequency circuit in the present invention are not affected by The limitations of this embodiment can be applied to various devices using radio frequency circuits. Referring to the first figure, a schematic connection diagram of a radio frequency circuit test device in the present invention is shown. The radio frequency circuit test device 10 is disposed between a radio frequency interface circuit 100 and a radio frequency generator 200, and several radio frequency interface circuits 100. This paper size applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm) -Ji-Pack -------- Order ------ k (Please read the precautions on the back before filling this page) V. Description of the invention (A7 B7 output / input terminals are connected at the same time connected to the digital input terminal of the RF generator 2000. Refer to the second figure for a round-out, which is the function of the RF circuit test device in the present invention and Schematic diagram, RF circuit test device 1 () JL A — between RF surface circuit 100 and RF generator 200, RF circuit test 10 includes a signal detection device 12, which can include several signal detection signals The detector can use a common potentiometer or a circuit consisting of a hairpin, a diode (LED), and a resistor, as shown in the circle. The signal detector is connected to the RF circuit 100 and the RF generator 200. Used to detect multiple rotations / The RF circuit test device 10 also includes a switching selection device. The wheel is arranged between the RF interface circuit 100 and the RF generator 200 to exchange one or more of the RF control signals of the RF generator 200, such as 2 The dynamic signal or power setting signal is between an interface control state and a manual state to facilitate the test; the RF circuit test device 10 includes a power detection device 16 and the RF interface circuit 100 and the RF generator 2 〇〇 connected, used to detect the set power of the RF interface circuit 100 'and to detect the power of the RF generator 200. (Please read the precautions on the back before filling this page]. The above-mentioned RF circuit test device 10 can be further added with an interruption circuit switching device 18, which is arranged between the RF interface circuit 100 and the RF generator 200 to switch the RF interface circuit 1 〇〇The interruption circuit is between an automatic state 18a and an access state 18b, in order to test whether the abnormality is the shadow music of the interrupted circuit during the test. Zhang scale is applicable to China National Standard (CNS) A4 specification (2 丨 〇 × 297 mm) A7 B7 Employee Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs of the People's Republic of China Li Li 5. Description of the invention () In terms of general application 'in this embodiment The signal detection device 12 may include: a power detector 20 connected to the power of the radio frequency generator 200 to detect the power supply of the radio frequency generator 200; an on-state detector 22 and an on-state signal of one of the radio frequency generator 200 Are connected to detect the on state of the RF generator 200; and a start detector 24 is connected to the start signal of the RF interface circuit 100 to detect the start signal of the RF interface circuit 100. The signal detection device 12 can be further selectively added-a power overload detector 26 'for detecting the power load state of the radio frequency generator 200; and a temperature detector 28 for detecting the temperature state of the radio frequency generator 200. In this embodiment, the switching selection device 14 in the radio frequency circuit testing device 10 may include a start switch 30 connected to a path for transmitting a start signal between the radio frequency interface circuit 100 and the radio frequency generator 200 for The activation signal is switched between an interface activation state 30a, a shutdown state 30b, and an activation state 30c controlled by the radio frequency interface circuit 100. The switching selection device 14 may include a power switcher 32 for switching a power setting signal of the RF generator 200 to an interface control state 32a, a power off state 32b, and a power controlled by the RF interface circuit 100. Set state 3 between 2c. When the power setting signal of the RF generator 200 is connected to the power setting state 3 2c, a power setting signal 34, usually a voltage value, can be used to control the power value of the RF generator 200. The power setter 34 can use a variable resistor and a voltage composed of a resistor to adjust the size of this paper. Applicable to China National Standard (CNS) A4 (210X297 mm) — binding l ,,, ^ (Please read the precautions on the back before Fill out this page} Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of the invention () Circuit to implement. Power detection device 16 In the application of this embodiment, a power signal detector 36 'is used to detect radio frequency The output power setting signal of the interface circuit 100. The power detection device 16 may further add an output power detector 38 to detect an output power signal of one of the RF generators 200, and at the same time, a power detection switch may be used. 40 to switch the power detection device, switch between detecting a forward power signal (ie, terminal 40a) and a reverse power signal (ie, terminal 40b). Among them, the power signal detector 36 and the power detector 38 can be Use a common potentiometer or voltage sensing line. Using the RF circuit test device 10 in the present invention, the RF circuit test method in the present invention may include the following First, check the part of the RF interface circuit 100. 'Set the interruption circuit switching device 18 to the automatic state 18a, set the start switch 30 to the interface start state 30a, and set the power switch 32 to the interface control state. 32a. Then turn on the RF interface circuit 100 and detect the start signal output by the RF interface circuit 100. This detection action can be achieved by starting the detector 24, and then the power detection device 36 detects the power setting signal output by the RF interface circuit 100. In order to know whether the output of the power setting signal is normal. An optional step can also be added, and the open state of the RF generator 200 is detected by the open detector 22. If the open state is not normally turned on, the interruption circuit can be switched The device 18 is set in the path state 18b, so that the interruption loop is a path, and the open state of the RF generator is detected by the open detector 22. If it is normally opened, it can be known that the paper size of the interruption circuit is applicable to Chinese national standards ( CNS) A4 specification (210X297 public completion) ------- 11 (1¾ ------ 1T ------ W (Please read the precautions on the back before filling in this Page) Printed A7 by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives _____B7 V. The problem of the () description; if it is not turned on normally, it can be concluded that the abnormality is from the RF generator 200. From the above procedures, it can be measured To find out whether the RF interface circuit 100 is abnormal or not, perform the steps of debugging or replacement. Then check the part of the RF generator 200, set the interruption circuit switching device 18 to the path state 18b, and set the start switch 30 In the off state 30b, and the power switch 32 is set to the power off state 3 2b. First, the power detector 20 detects one of the power supplies of the RF generator 200 'to determine whether its power supply is abnormal. Then, the start switch 30 is set to In the starting state 3 0 c, the opening state of the RF generator 200 can be detected by the opening detector 22. If there is no abnormality, it can be switched to the power setting state 32c by the power switch 32, the operation of the power setter 34, And the power signal detector 36 to measure the power setting signal, and the output power detector 38 to measure the forward power of the RF generator 2 0 to Recognize its power output conditions. From the above procedure, you can further understand whether there is any abnormality in the part of the RF generator 200, and perform the steps of debugging or replacement. During the above power detection process, the power setting signal for the RF generator 2000 input can be continuously changed, and Measure the forward power of the RF generator to detect whether its forward power change is a normal linear change with respect to the power setting signal. The power detection switcher 40 can be cut to the terminal 40b ′ to measure the reverse power of the RF generator and confirm whether the magnitude of the reverse power is within a normal range. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) ------- LJi-pack -------- order ------ V (Please read the precautions on the back before (Fill in this page) A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economy Detect if its power is overloaded and cause abnormality. It is also possible to add a step of detecting the temperature state of the radio frequency generator, and the temperature detector 28 detects whether the radio frequency generator 2 0 0 is abnormal due to excessive temperature. With the method and device for testing a radio frequency circuit in the present invention, it is possible to gradually check various abnormal working conditions of the radio frequency interface circuit 100 and the radio frequency generator 200 in the radio frequency circuit, and judge where to debug and resolve the abnormal working conditions. Or replace components, and at the same time use the above methods and devices to find abnormal situations in a short period of time, to quickly solve problems, reduce waste of time and labor when replacing equipment components, and increase the time available for production, Effectively improve production efficiency and reduce production costs. The present invention is described above with a preferred embodiment, and is only used to help understand the implementation of the present invention, and is not intended to limit the spirit of the present invention. Those skilled in the art will not depart from the present invention after understanding the spirit of the present invention. Within the scope of the spirit, when it can be modified and replaced with equivalent changes, the scope of patent protection shall depend on the scope of the attached patent application and its equivalent fields. This paper size applies to China National Standard (CNS) A4 (210X297 mm) * · (Please read the precautions on the back before filling this page)