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TW366540B - Multi-films structure etching method - Google Patents

Multi-films structure etching method

Info

Publication number
TW366540B
TW366540B TW087104761A TW87104761A TW366540B TW 366540 B TW366540 B TW 366540B TW 087104761 A TW087104761 A TW 087104761A TW 87104761 A TW87104761 A TW 87104761A TW 366540 B TW366540 B TW 366540B
Authority
TW
Taiwan
Prior art keywords
arc
etching method
film structure
structure etching
coating
Prior art date
Application number
TW087104761A
Other languages
Chinese (zh)
Inventor
Yung-Kuan Hsiao
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW087104761A priority Critical patent/TW366540B/en
Application granted granted Critical
Publication of TW366540B publication Critical patent/TW366540B/en

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  • Drying Of Semiconductors (AREA)

Abstract

A multi-film structure etching method, including the following steps: provision of a substrate having the top with a plurality of semiconductor layers deposited for forming multi-film structure. Then comes the coating on the top semiconductor layer surface an anti-reflection coating, ARC as blocking mask. Then a photoresist coating for definition of the etched pattern, forming the opening showing part of the surface of ARC and for multi-film structure etching to the ARC through the opening.
TW087104761A 1998-03-30 1998-03-30 Multi-films structure etching method TW366540B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087104761A TW366540B (en) 1998-03-30 1998-03-30 Multi-films structure etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087104761A TW366540B (en) 1998-03-30 1998-03-30 Multi-films structure etching method

Publications (1)

Publication Number Publication Date
TW366540B true TW366540B (en) 1999-08-11

Family

ID=57941138

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087104761A TW366540B (en) 1998-03-30 1998-03-30 Multi-films structure etching method

Country Status (1)

Country Link
TW (1) TW366540B (en)

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Legal Events

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