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TW289131B - A method of improving the properties of liquid phased deposited silica layer - Google Patents

A method of improving the properties of liquid phased deposited silica layer

Info

Publication number
TW289131B
TW289131B TW84113633A TW84113633A TW289131B TW 289131 B TW289131 B TW 289131B TW 84113633 A TW84113633 A TW 84113633A TW 84113633 A TW84113633 A TW 84113633A TW 289131 B TW289131 B TW 289131B
Authority
TW
Taiwan
Prior art keywords
improving
properties
silica layer
liquid phased
deposited silica
Prior art date
Application number
TW84113633A
Other languages
Chinese (zh)
Inventor
Ching-Fa Yeh
Shyue-Shyh Lin
Original Assignee
Nat Science Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Science Council filed Critical Nat Science Council
Priority to TW84113633A priority Critical patent/TW289131B/en
Application granted granted Critical
Publication of TW289131B publication Critical patent/TW289131B/en

Links

Landscapes

  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A method of improving the properties of liquid phased deposited silicalayer which is using the liquid phased deposited way to form the silicalayer on the base and then deal it with the plasma process.
TW84113633A 1995-12-20 1995-12-20 A method of improving the properties of liquid phased deposited silica layer TW289131B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84113633A TW289131B (en) 1995-12-20 1995-12-20 A method of improving the properties of liquid phased deposited silica layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84113633A TW289131B (en) 1995-12-20 1995-12-20 A method of improving the properties of liquid phased deposited silica layer

Publications (1)

Publication Number Publication Date
TW289131B true TW289131B (en) 1996-10-21

Family

ID=51398162

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84113633A TW289131B (en) 1995-12-20 1995-12-20 A method of improving the properties of liquid phased deposited silica layer

Country Status (1)

Country Link
TW (1) TW289131B (en)

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