TW202414507A - Eximer lamp assembly with trigger for plasma formation - Google Patents

Abstract

The present invention relates to an Eximer lamp assembly with trigger for plasma formation, comprising: a bulb for an excimer lamp; And when the excimer lamp starts to start, a trigger connected with the bulb in order to form the initial plasma inside the bulb. It can delay the emission rate and increase the emission rate as the usage time decreases.

Description

Excimer lamp assembly with trigger for plasma formation

The present invention relates to an excimer lamp assembly having a plasma forming trigger, and more particularly, to an excimer lamp assembly having a trigger for forming plasma, which can delay the reduction of light emission speed and increase the light emission speed according to the use time.

Conventionally, excimer lamps are used as one of the vacuum ultraviolet radiation sources with high-efficiency radiation performance for photochemical reaction curing, dry cleaning, sterilization, surface modification, photo CVD and other treatments. As a representative of excimer lamps, there is known an excimer lamp that generates gas and a dielectric by inserting excimers such as a rare gas between electrodes that provide high-frequency power, thereby discharging electricity through the dielectric between the electrodes.

For example, as in Japanese registered patent No. 3189481, when a high voltage of several kV is applied between the internal electrode and the external electrode arranged inside and outside the discharge space, dielectric barrier discharge or capacitance coupling type high frequency discharge (hereinafter referred to as dielectric barrier discharge) is generated in the discharge space, and excimer light is radiated to the outside of the light-emitting tube. However, the disadvantage of this excimer lamp is that the light emission speed slows down when used for a long time or the cooling state becomes long or when used in a dark place.

[Prior art document] [Patent document] (Patent document 1) Japanese registered patent No. 3189481

[Problem to be solved] This invention is invented to improve the above-mentioned problem, and provides an excimer lamp component having a trigger for plasma formation, which can delay the decrease of the light emission speed according to the use time and increase the light emission speed.

[Solution to the Problem] To achieve the above-mentioned purpose, according to the present invention, there is provided an excimer lamp assembly having a trigger for plasma formation, comprising: an excimer lamp bulb; and a trigger connected to the excimer lamp bulb in order to form the initial plasma inside the excimer lamp bulb when the excimer lamp starts to start. Here, the trigger induces the initial plasma formation of the excimer lamp by applying a high voltage inside the bulb or applying a high voltage outside the bulb, or excites the sealed gas inside the bulb by irradiating UV of a specific wavelength, thereby increasing the plasma discharge rate. Furthermore, the trigger includes a DC transformer that applies a high voltage inside the bulb. Furthermore, the above-mentioned bulb is a bulb for a vacuum ultraviolet light source. Furthermore, the above-mentioned trigger includes a UV light source that irradiates UV of a specific wavelength, and the sealed gas sealed in the above-mentioned bulb is excited by the UV irradiated from the above-mentioned UV light source. Furthermore, the above-mentioned bulb is made of soda-lime glass or quartz.

[Effect of the invention] According to the present invention constructed as described above, by providing a trigger for applying high voltage or irradiating UV inside the bulb constituting the excimer lamp, the shortcomings of the excimer lamp pointed out that the luminescence speed slows down when used for a long time or in a cold state for a long time or when used in the dark can be compensated, and the initial operation speed can be quickly improved. In particular, the present invention applies a high voltage of several kV inside the bulb, and when the plasma source power is applied, a high voltage is applied from the outside of the bulb in a short time, thereby discharging the sealed gas inside the bulb. Most importantly, the present invention improves the plasma discharge speed by providing a UV light source that irradiates UV of a specific wavelength, and the UV wavelength irradiated from the UV light source to the inside of the bulb contributes to the excitation of the sealed gas inside the bulb.

The advantages and features of the present invention and methods of achieving these will be clarified by referring to the embodiments and drawings described below. However, the present invention is not limited to the embodiments disclosed below, but is implemented in different various forms. In this specification, the embodiments are intended to make the beginning of the present invention complete and provide a person with ordinary knowledge in the technical field to which the present invention belongs to fully inform the scope of the invention. And the present invention is defined only by the scope of the claims. Therefore, in several embodiments, in order to avoid the present invention from being interpreted vaguely, well-known components, well-known actions and well-known technologies are not specifically described. In addition, throughout the list, the same reference symbol refers to the same component, and the terms used (mentioned) in this list are for the purpose of explaining the embodiments, not to limit the present invention. In this specification, the singular also includes the plural, unless otherwise mentioned in the sentence, and the components and operations mentioned by "including (or having)" do not exclude the existence or addition of one or more other components and operations. If there is no other definition, all terms (including technical and scientific terms) used in this specification can be regarded as the meanings commonly understood by people with ordinary knowledge in the technical field to which the present invention belongs. In addition, the terms defined in the commonly used dictionary will not be ideally or over-interpreted as long as there is no definition.

Hereinafter, preferred embodiments of the present invention will be described with reference to the attached drawings. FIG. 1 is a conceptual diagram showing the overall structure of an excimer lamp assembly having a plasma formation trigger according to various embodiments of the present invention. FIG. 2 and FIG. 3 are conceptual diagrams showing the actual application state of an excimer lamp assembly having a plasma formation trigger according to various embodiments of the present invention.

As shown in FIG. 1(a), the present invention may include a bulb 10 of an excimer lamp and a trigger 20 connected to the bulb 10 in order to form an initial plasma inside the bulb 10 when the excimer lamp starts to work. Here, the trigger 20, as shown in FIG. 1(a), induces the initial plasma formation of the excimer lamp by applying a high voltage to the inside of the bulb 10, or as shown in FIG. 1(b), excites the sealed gas inside the bulb 10 by irradiating UV of a specific wavelength, thereby increasing the plasma discharge rate.

At this time, the trigger 20 may include a DC transformer that applies a high voltage to the inside of the bulb 10 as shown in FIG. 1(a) and FIG. 2. In addition, the bulb 10 may be a bulb for a vacuum ultraviolet light source as shown in FIG. 3.

That is, the high voltage trigger can apply high voltage in a manner that a high voltage wire contacts the outside of the bulb as shown in FIG2, and the PCB and the bulb can be arranged in a straight line, and the design is not limited and can be changed. In addition, the UV light source, i.e., the UV trigger, used for the vacuum UV light source, is not limited to a straight line, and the design is not limited and can be changed as shown in FIG3. On the other hand, the trigger 20 includes a UV light source 22 that irradiates UV of a specific wavelength as shown in FIG1(b), and the sealed gas sealed in the bulb 10 is excited by the UV irradiated by the UV light source 22, thereby increasing the plasma discharge rate.

Here, the sealing gas may be applied to a rare gas including Xe, or a mixed gas of a rare gas and a halogen gas. At this time, the above-mentioned specific wavelength is 375~400nm, and the above-mentioned bulb 10 can of course be appropriately selected and used to be made of soda-lime glass or quartz.

On the other hand, the present invention can also be applied to an embodiment, as shown in FIG. 4 and FIG. 5, so that the UV light source 22 is quickly and evenly irradiated into the bulb 10. First, the center of the bulb 10 can be made to penetrate the internal electrode 11 and electrically connected to the outside as shown in FIG. 4, or a structure in which the internal electrode 11 is omitted can be adopted as shown in FIG. 5. Here, along the outer peripheral surface of the bulb 10, a plurality of external electrodes 12 are radially arranged parallel to the internal electrode 11. At this time, a conical seat groove 13 can be formed on one end side of the bulb 10 at the tip of the internal electrode 11, toward the other end of the bulb 10.

In addition, a conical fixing block 30 fixed to the seat groove 13 is provided, and a mounting hole 31 through which the inner electrode 11 passes can be formed in the center of the fixing block 30. In addition, a plurality of UV light sources 22 are radially arranged along the inclined surface 32 of the fixing block 30 to irradiate UV of a specific wavelength toward the inner space of the bulb 10.

Hereinafter, the functions and effects of the excimer lamp assembly having a trigger for plasma formation will be briefly described according to a preferred embodiment of the present invention. First, the present invention can compensate for the shortcomings of the excimer lamp, which has been pointed out as the slow light emission speed when used for a long time or in a cold state or when used in a dark room, by providing a trigger 20 for applying a high voltage or irradiating UV inside the bulb 10 constituting the excimer lamp, and improve the rapid initial operation speed. In particular, the present invention applies a high voltage of several kV inside the bulb 10, and when the power of the plasma source is applied, a high voltage is simultaneously applied from the outside of the bulb 10 in a short time, thereby discharging the sealed gas inside the bulb 10. Most importantly, the present invention has a UV light source 22 that irradiates UV of a specific wavelength. The UV wavelength irradiated from the UV light source 22 to the inside of the bulb 10 helps to excite the sealed gas inside the bulb 10, thereby increasing the plasma discharge rate.

As described above, it can be seen that the basic technical idea of the present invention is to provide an excimer lamp assembly having a trigger for plasma formation, which can delay the reduction of the luminous speed and increase the luminous speed according to the use time. In addition, within the scope of the basic technical idea of the present invention, for people with general knowledge of the corresponding industry, of course, many other modifications and applications can be made.

10: Bulb 11: Internal electrode 12: External electrode 13: Seat 20: Trigger 21: DC transformer 22: UV light source 30: Fixed blocks 31: Mounting holes 32: Inclined surface

FIG. 1 is a conceptual diagram showing the overall structure of an excimer lamp assembly having a plasma-forming trigger according to various embodiments of the present invention. FIG. 2 and FIG. 3 are conceptual diagrams showing the actual application state of an excimer lamp assembly having a plasma-forming trigger according to various embodiments of the present invention. FIG. 4 and FIG. 5 are conceptual diagrams showing the overall structure of an excimer lamp assembly having a plasma-forming trigger according to various embodiments of the present invention.

10: Light bulb

11: Internal electrode

12: External electrode

13: Seat groove

20: Trigger

21: DC transformer

22: UV light source

30: Fixed blocks

31: Mounting hole

32: Inclined surface

Claims (6)

An excimer lamp assembly having a trigger for plasma formation includes: an excimer lamp bulb; and a trigger connected to the bulb in order to form an initial plasma inside the bulb when the excimer lamp starts to start. As claimed in claim 1, an excimer lamp assembly having a trigger for plasma formation, wherein: The trigger induces initial plasma formation of the excimer lamp by applying high pressure to the inside of the bulb or to the outside of the bulb, or irradiates UV of a specific wavelength to excite the sealed gas inside the bulb, thereby increasing the plasma discharge rate. An excimer lamp assembly having a trigger for plasma formation as claimed in claim 1, wherein: The trigger includes a DC transformer that applies a high voltage inside the bulb. An excimer lamp assembly having a trigger for plasma formation as claimed in claim 1, wherein: The bulb is a bulb for a vacuum ultraviolet light source. An excimer lamp assembly having a trigger for plasma formation as claimed in claim 1, wherein: The trigger includes a UV light source that irradiates UV of a specific wavelength, and the sealed gas sealed in the bulb is excited by the UV irradiated from the UV light source. An excimer lamp assembly having a plasma-forming trigger as in claim 2 or claim 5, wherein: The bulb is made of soda-lime glass or quartz.