TW202342554A - Colored photosensitive resin composition, color filter manufactured from thereof and solid state pickup device or display device comprising the same - Google Patents
Colored photosensitive resin composition, color filter manufactured from thereof and solid state pickup device or display device comprising the same Download PDFInfo
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- TW202342554A TW202342554A TW111150649A TW111150649A TW202342554A TW 202342554 A TW202342554 A TW 202342554A TW 111150649 A TW111150649 A TW 111150649A TW 111150649 A TW111150649 A TW 111150649A TW 202342554 A TW202342554 A TW 202342554A
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- Prior art keywords
- pigment
- photosensitive resin
- resin composition
- colored photosensitive
- weight
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 57
- 239000007787 solid Substances 0.000 title abstract description 9
- 239000000049 pigment Substances 0.000 claims abstract description 140
- 239000006185 dispersion Substances 0.000 claims abstract description 86
- 150000001875 compounds Chemical class 0.000 claims abstract description 50
- 239000002245 particle Substances 0.000 claims abstract description 48
- 229920005989 resin Polymers 0.000 claims abstract description 41
- 239000011347 resin Substances 0.000 claims abstract description 41
- 239000002904 solvent Substances 0.000 claims abstract description 30
- 239000003999 initiator Substances 0.000 claims abstract description 21
- 238000003384 imaging method Methods 0.000 claims abstract description 19
- 239000007788 liquid Substances 0.000 claims description 21
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 claims description 19
- 239000001055 blue pigment Substances 0.000 claims description 8
- 239000001057 purple pigment Substances 0.000 claims description 7
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 4
- 235000019239 indanthrene blue RS Nutrition 0.000 claims description 3
- 125000000466 oxiranyl group Chemical group 0.000 claims description 3
- 229940125904 compound 1 Drugs 0.000 claims 1
- 150000002923 oximes Chemical class 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 abstract description 19
- 239000003513 alkali Substances 0.000 abstract description 6
- -1 amine salts Chemical class 0.000 description 51
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 46
- 239000002270 dispersing agent Substances 0.000 description 33
- 229920001577 copolymer Polymers 0.000 description 24
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 23
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 22
- 239000002253 acid Substances 0.000 description 21
- 239000000203 mixture Substances 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 17
- 239000000975 dye Substances 0.000 description 15
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 15
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 14
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 13
- 239000000178 monomer Substances 0.000 description 12
- 150000002148 esters Chemical class 0.000 description 11
- 239000010408 film Substances 0.000 description 11
- 239000003822 epoxy resin Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 229920000647 polyepoxide Polymers 0.000 description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 239000011324 bead Substances 0.000 description 9
- 238000007865 diluting Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 8
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 8
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 8
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 7
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 7
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 6
- SJEYSFABYSGQBG-UHFFFAOYSA-M Patent blue Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C(=CC(=CC=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 SJEYSFABYSGQBG-UHFFFAOYSA-M 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 241000307523 Xenostegia media Species 0.000 description 6
- 150000007513 acids Chemical class 0.000 description 6
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 239000000980 acid dye Substances 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 230000000977 initiatory effect Effects 0.000 description 5
- 150000002576 ketones Chemical class 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 239000004793 Polystyrene Substances 0.000 description 4
- 239000012752 auxiliary agent Substances 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 4
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229920002223 polystyrene Polymers 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 3
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 3
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 3
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- BVTJGGGYKAMDBN-UHFFFAOYSA-N Dioxetane Chemical compound C1COO1 BVTJGGGYKAMDBN-UHFFFAOYSA-N 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 238000004220 aggregation Methods 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 238000004040 coloring Methods 0.000 description 3
- 150000001991 dicarboxylic acids Chemical class 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
- 238000005227 gel permeation chromatography Methods 0.000 description 3
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- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
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- HHQAGBQXOWLTLL-UHFFFAOYSA-N (2-hydroxy-3-phenoxypropyl) prop-2-enoate Chemical compound C=CC(=O)OCC(O)COC1=CC=CC=C1 HHQAGBQXOWLTLL-UHFFFAOYSA-N 0.000 description 2
- IBABXJRXGSAJLQ-UHFFFAOYSA-N 1,4-bis(2,6-diethyl-4-methylanilino)anthracene-9,10-dione Chemical compound CCC1=CC(C)=CC(CC)=C1NC(C=1C(=O)C2=CC=CC=C2C(=O)C=11)=CC=C1NC1=C(CC)C=C(C)C=C1CC IBABXJRXGSAJLQ-UHFFFAOYSA-N 0.000 description 2
- KTEFLEFPDDQMCB-UHFFFAOYSA-N 1,4-bis(4-butylanilino)-5,8-dihydroxyanthracene-9,10-dione Chemical compound C1=CC(CCCC)=CC=C1NC(C=1C(=O)C2=C(O)C=CC(O)=C2C(=O)C=11)=CC=C1NC1=CC=C(CCCC)C=C1 KTEFLEFPDDQMCB-UHFFFAOYSA-N 0.000 description 2
- OCQDPIXQTSYZJL-UHFFFAOYSA-N 1,4-bis(butylamino)anthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C(NCCCC)=CC=C2NCCCC OCQDPIXQTSYZJL-UHFFFAOYSA-N 0.000 description 2
- BOGFHOWTVGAYFK-UHFFFAOYSA-N 1-[2-(2-propoxyethoxy)ethoxy]propane Chemical compound CCCOCCOCCOCCC BOGFHOWTVGAYFK-UHFFFAOYSA-N 0.000 description 2
- ZNQIAQXHADXXQI-UHFFFAOYSA-N 1-anilino-4-hydroxyanthracene-9,10-dione Chemical compound C1=2C(=O)C3=CC=CC=C3C(=O)C=2C(O)=CC=C1NC1=CC=CC=C1 ZNQIAQXHADXXQI-UHFFFAOYSA-N 0.000 description 2
- KTZVZZJJVJQZHV-UHFFFAOYSA-N 1-chloro-4-ethenylbenzene Chemical compound ClC1=CC=C(C=C)C=C1 KTZVZZJJVJQZHV-UHFFFAOYSA-N 0.000 description 2
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 2
- VTRZMLZNHGCYLK-UHFFFAOYSA-N 1-ethenyl-2-(methoxymethyl)benzene Chemical compound COCC1=CC=CC=C1C=C VTRZMLZNHGCYLK-UHFFFAOYSA-N 0.000 description 2
- HDEWQSUXJCDXIX-UHFFFAOYSA-N 1-ethenyl-3-(methoxymethyl)benzene Chemical compound COCC1=CC=CC(C=C)=C1 HDEWQSUXJCDXIX-UHFFFAOYSA-N 0.000 description 2
- PECUPOXPPBBFLU-UHFFFAOYSA-N 1-ethenyl-3-methoxybenzene Chemical compound COC1=CC=CC(C=C)=C1 PECUPOXPPBBFLU-UHFFFAOYSA-N 0.000 description 2
- XVXKXOPCFWAOLN-UHFFFAOYSA-N 1-ethenyl-4-(methoxymethyl)benzene Chemical compound COCC1=CC=C(C=C)C=C1 XVXKXOPCFWAOLN-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
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- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 2
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- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 125000002723 alicyclic group Chemical group 0.000 description 2
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- 239000003146 anticoagulant agent Substances 0.000 description 2
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- 239000012965 benzophenone Substances 0.000 description 2
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 2
- 230000001588 bifunctional effect Effects 0.000 description 2
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- 230000008859 change Effects 0.000 description 2
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- UWMZZSRDUVJJDP-UHFFFAOYSA-N sodium 4-[[9-(2-carboxyphenyl)-6-(2-methylanilino)xanthen-10-ium-3-yl]amino]-3-methylbenzenesulfonate Chemical compound [Na+].Cc1ccccc1Nc1ccc2c(-c3ccccc3C(O)=O)c3ccc(Nc4ccc(cc4C)S([O-])(=O)=O)cc3[o+]c2c1 UWMZZSRDUVJJDP-UHFFFAOYSA-N 0.000 description 1
- NNMHYFLPFNGQFZ-UHFFFAOYSA-M sodium polyacrylate Chemical compound [Na+].[O-]C(=O)C=C NNMHYFLPFNGQFZ-UHFFFAOYSA-M 0.000 description 1
- AXMCIYLNKNGNOT-UHFFFAOYSA-M sodium;3-[[4-[(4-dimethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)-[4-[ethyl-[(3-sulfonatophenyl)methyl]amino]phenyl]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S([O-])(=O)=O)=C1 AXMCIYLNKNGNOT-UHFFFAOYSA-M 0.000 description 1
- FJBHGWADYLMEJG-UHFFFAOYSA-M sodium;3-[[4-[[4-(diethylamino)phenyl]-[4-[ethyl-[(3-sulfonatophenyl)methyl]azaniumylidene]cyclohexa-2,5-dien-1-ylidene]methyl]-n-ethylanilino]methyl]benzenesulfonate Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC=1C=C(C=CC=1)S([O-])(=O)=O)=C(C=C1)C=CC1=[N+](CC)CC1=CC=CC(S([O-])(=O)=O)=C1 FJBHGWADYLMEJG-UHFFFAOYSA-M 0.000 description 1
- STZCRXQWRGQSJD-UHFFFAOYSA-N sodium;4-[[4-(dimethylamino)phenyl]diazenyl]benzenesulfonic acid Chemical compound [Na+].C1=CC(N(C)C)=CC=C1N=NC1=CC=C(S(O)(=O)=O)C=C1 STZCRXQWRGQSJD-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000992 solvent dye Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-L succinate(2-) Chemical compound [O-]C(=O)CCC([O-])=O KDYFGRWQOYBRFD-UHFFFAOYSA-L 0.000 description 1
- 229940124530 sulfonamide Drugs 0.000 description 1
- 150000003456 sulfonamides Chemical class 0.000 description 1
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- WNQPPENQFWLADQ-UHFFFAOYSA-J tetrasodium;4-hydroxy-5-[[4-[[4-[(8-hydroxy-3,6-disulfonatonaphthalen-1-yl)diazenyl]-2-methoxy-5-methylphenyl]carbamoylamino]-5-methoxy-2-methylphenyl]diazenyl]naphthalene-2,7-disulfonate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]S(=O)(=O)C1=CC(O)=C2C(N=NC3=C(C)C=C(C(=C3)OC)NC(=O)NC3=CC(C)=C(N=NC=4C5=C(O)C=C(C=C5C=C(C=4)S([O-])(=O)=O)S([O-])(=O)=O)C=C3OC)=CC(S([O-])(=O)=O)=CC2=C1 WNQPPENQFWLADQ-UHFFFAOYSA-J 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 150000003628 tricarboxylic acids Chemical class 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- WTPOYMNMKZIOGO-UHFFFAOYSA-K trisodium;2,5-dichloro-4-[4-[[5-[[4-chloro-6-(4-sulfonatoanilino)-1,3,5-triazin-2-yl]amino]-2-sulfonatophenyl]diazenyl]-3-methyl-5-oxo-4h-pyrazol-1-yl]benzenesulfonate Chemical compound [Na+].[Na+].[Na+].CC1=NN(C=2C(=CC(=C(Cl)C=2)S([O-])(=O)=O)Cl)C(=O)C1N=NC(C(=CC=1)S([O-])(=O)=O)=CC=1NC(N=1)=NC(Cl)=NC=1NC1=CC=C(S([O-])(=O)=O)C=C1 WTPOYMNMKZIOGO-UHFFFAOYSA-K 0.000 description 1
- UJMBCXLDXJUMFB-UHFFFAOYSA-K trisodium;5-oxo-1-(4-sulfonatophenyl)-4-[(4-sulfonatophenyl)diazenyl]-4h-pyrazole-3-carboxylate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)C1=NN(C=2C=CC(=CC=2)S([O-])(=O)=O)C(=O)C1N=NC1=CC=C(S([O-])(=O)=O)C=C1 UJMBCXLDXJUMFB-UHFFFAOYSA-K 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
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- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
Abstract
一種著色感光性樹脂組合物、利用其製造的彩色濾光片和包含上述彩色濾光片的固體攝像元件或顯示裝置,上述著色感光性樹脂組合物包含(A)顏料分散液、(B)鹼溶性樹脂、(C)光聚合性化合物、(D)光聚合引發劑和(E)溶劑,上述(A)顏料分散液包含體積平均粒徑為15nm ~ 60nm的顏料。本發明的著色感光性樹脂組合物具有能夠改善圖案的直進性和表面粗糙度,同時也確保經時黏度穩定性的優點。A colored photosensitive resin composition, a color filter produced using the same, and a solid imaging element or display device containing the color filter, wherein the colored photosensitive resin composition contains (A) a pigment dispersion, (B) an alkali Soluble resin, (C) photopolymerizable compound, (D) photopolymerization initiator and (E) solvent, the above-mentioned (A) pigment dispersion contains a pigment with a volume average particle diameter of 15 nm to 60 nm. The colored photosensitive resin composition of the present invention has the advantage of being able to improve the straightness and surface roughness of a pattern while ensuring viscosity stability over time.
Description
本發明涉及著色感光性樹脂組合物、利用其製造的彩色濾光片以及包含其的固體攝像元件或顯示裝置。The present invention relates to a colored photosensitive resin composition, a color filter produced using the same, and a solid-state imaging element or display device containing the same.
彩色濾光片廣泛用於固體攝像元件、液晶顯示元件等中,其應用範圍正在迅速擴大。Color filters are widely used in solid-state imaging components, liquid crystal display components, etc., and their application range is rapidly expanding.
特別是在固體攝像元件的情況下,作為由積體電路技術製作的裝置,可以使光學圖像轉換為電信號。近年來,固體攝像元件作為代替攝像管來使用的IC之一,具有小型化和輕量化、且耗電低以及壽命長的優點,與攝像管相比即使在暗處也能夠攝像,因此得到使用。Particularly in the case of solid-state imaging elements, as devices made with integrated circuit technology, optical images can be converted into electrical signals. In recent years, solid-state imaging devices have been used as one of the ICs used instead of imaging tubes. They have the advantages of miniaturization and weight reduction, low power consumption, and long life. Compared with imaging tubes, they can capture images even in dark places, so they are used. .
如今,用於CCD、CMOS等固體攝像元件的彩色濾光片成為高圖元化,因而固體攝像裝置的圖元也變得微小化。因此,要求在維持分光特性的同時,使膜厚度薄膜化。為了滿足這樣的條件,在利用著色感光性樹脂組合物形成彩色濾光片時,需要增加顏料的濃度。但是,在著色感光性樹脂組合物的情況下,存在藍色和紫色顏料分散組合物的平均粒徑會大到60nm以上且顏料的含量高而圖案的直進性降低的缺點,並且存在圖案的表面也變得粗糙,藉由透鏡透過的光從彩色濾光片入射到光電二極體時,會使透光率減小的問題。如果使顏料的體積平均粒徑降至15nm以下,則能夠改善圖案的直進性降低問題和圖案的表面粗糙度,但顏料分散液的分散穩定性會降低而黏度穩定性下降,因而存在隨時間流逝黏度發生急劇變化的問題。因此,本發明中,想要使用藍色和紫色顏料製造體積平均粒徑為15 ~ 60nm範圍的顏料分散液,並且利用其製造著色感光性樹脂組合物,由此發明出提高圖案的直進性,改善表面粗糙度,同時也能夠確保黏度穩定性的組合物。Nowadays, color filters used in solid-state imaging devices such as CCD and CMOS have become higher in pixels, so the pixels of solid-state imaging devices have also become smaller. Therefore, it is required to reduce the film thickness while maintaining the spectral characteristics. In order to satisfy such conditions, when forming a color filter using a colored photosensitive resin composition, it is necessary to increase the concentration of the pigment. However, in the case of a colored photosensitive resin composition, there are disadvantages that the average particle diameter of the blue and purple pigment dispersion composition is large to 60 nm or more and the pigment content is high, thereby reducing the straightness of the pattern, and there is a problem with the surface of the pattern. It also becomes rough and the light transmittance decreases when the light transmitted through the lens enters the photodiode from the color filter. If the volume average particle size of the pigment is reduced to less than 15 nm, the problem of decreasing linearity of the pattern and the surface roughness of the pattern can be improved, but the dispersion stability of the pigment dispersion will decrease and the viscosity stability will decrease, so there is a problem with the passage of time. Problems with sudden changes in viscosity. Therefore, in the present invention, it is intended to create a pigment dispersion with a volume average particle diameter in the range of 15 to 60 nm using blue and purple pigments, and use this to produce a colored photosensitive resin composition, thereby inventing an invention to improve the straightness of the pattern, A composition that improves surface roughness while ensuring viscosity stability.
另外,韓國公開專利10-2021-0063526號中記載了顏料分散液和包含其的著色感光性樹脂組合物,並且記載了包含有機黑色顏料和有機紅色顏料的共分散液,且上述共分散液中的顏料粒子的平均粒徑小於100nm的顏料分散液。但是,上述文獻中僅記載了顏料粒子的平均粒徑大於70nm的例子,實際上,在將其應用于形成彩色濾光片的感光性組合物的情況下,由於體積平均粒徑大,因此在形成圖案時,圖案的直進性降低,圖案表面粗糙度不良,當在固體攝像元件中光經過彩色濾光片時,發生了導致透光率降低的問題。為了解決這樣的問題,如果使顏料的體積平均粒徑大幅降低至小於15nm,則有黏度穩定性下降的問題。為此,本發明是為了解決如上所述的問題而提出的。In addition, Korean Patent Publication No. 10-2021-0063526 describes a pigment dispersion liquid and a colored photosensitive resin composition containing the same, and also describes a co-dispersion liquid containing an organic black pigment and an organic red pigment, and the above co-dispersion liquid Pigment dispersions with an average particle size of pigment particles less than 100 nm. However, the above-mentioned documents only describe examples in which the average particle diameter of pigment particles exceeds 70 nm. In fact, when this is applied to a photosensitive composition for forming a color filter, the volume average particle diameter is large. When forming a pattern, the straightness of the pattern is reduced, the surface roughness of the pattern is poor, and when light passes through the color filter in the solid-state imaging element, there is a problem that the light transmittance is reduced. In order to solve such a problem, if the volume average particle diameter of the pigment is significantly reduced to less than 15 nm, there is a problem that the viscosity stability decreases. Therefore, the present invention has been proposed to solve the above-mentioned problems.
[現有技術文獻][Existing technical documents]
<專利文獻> 專利文獻1:韓國公開專利10-2021-0063526號 <Patent documents> Patent Document 1: Korean Patent Publication No. 10-2021-0063526
[所要解決的[To be solved 課題]Topic]
為此,本發明的目的在於,提供一種著色感光性樹脂組合物,其能夠解決由以往的著色感光性樹脂組合物製造的圖案的直進性問題和表面粗糙度不良問題,且經時黏度穩定性優異。Therefore, an object of the present invention is to provide a colored photosensitive resin composition that can solve the problems of straightness and poor surface roughness of patterns produced with conventional colored photosensitive resin compositions and that has viscosity stability over time. Excellent.
另外,本發明的目的在於,提供利用上述著色感光性樹脂組合物製造的彩色濾光片和包含上述彩色濾光片的固體攝像元件或顯示裝置。Another object of the present invention is to provide a color filter produced using the above-mentioned colored photosensitive resin composition and a solid-state imaging element or a display device including the above-mentioned color filter.
[解決[solve 課題的方法]method of the subject]
本發明提供著色感光性樹脂組合物,其包含(A)顏料分散液、(B)鹼溶性樹脂、(C)光聚合性化合物、(D)光聚合引發劑和(E)溶劑,上述(A)顏料分散液包含體積平均粒徑為15nm ~ 60nm的顏料。The present invention provides a colored photosensitive resin composition containing (A) a pigment dispersion, (B) an alkali-soluble resin, (C) a photopolymerizable compound, (D) a photopolymerization initiator, and (E) a solvent, wherein the above (A) ) The pigment dispersion contains pigments with a volume average particle size of 15nm ~ 60nm.
另外,本發明提供利用上述著色感光性樹脂組合物製造的彩色濾光片。Moreover, this invention provides the color filter produced using the said colored photosensitive resin composition.
另外,本發明提供包含上述彩色濾光片的固體攝像元件或顯示裝置。In addition, the present invention provides a solid-state imaging device or a display device including the above-mentioned color filter.
[發[send 明bright 效果]Effect]
本發明提供一種著色感光性樹脂組合物,其透過包含具有體積平均粒徑為15nm ~ 60nm的顏料的顏料分散液,從而在組合物交聯後的空隙之間滲入微小的顏料而使圖案的表面粗糙度得到改善。The present invention provides a colored photosensitive resin composition that penetrates a pigment dispersion containing a pigment with a volume average particle diameter of 15 nm to 60 nm, thereby infiltrating tiny pigments into the gaps after crosslinking of the composition to change the surface of the pattern. Roughness is improved.
另外,在由本發明的著色感光性樹脂組合物形成圖案時,提供能夠形成直進性優異的圖案的效果。In addition, when forming a pattern from the colored photosensitive resin composition of the present invention, it provides the effect of being able to form a pattern with excellent straightness.
另外,透過包含由本發明的著色感光性樹脂組合物製造的彩色濾光片,從而提供能夠應用于高靈敏度化的顯示裝置的效果。In addition, by including a color filter produced from the colored photosensitive resin composition of the present invention, an effect that can be applied to a highly sensitive display device is provided.
為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下:In order to have a better understanding of the above and other aspects of the present invention, examples are given below and are described in detail with reference to the accompanying drawings:
本發明涉及著色感光性樹脂組合物、利用其製造的彩色濾光片以及包含上述彩色濾光片的固體攝像元件和顯示裝置。The present invention relates to a colored photosensitive resin composition, a color filter produced using the same, a solid-state imaging element and a display device including the color filter.
本發明中,作為著色感光性樹脂組合物的組成的顏料分散液包含體積平均粒徑為15nm ~ 60nm的顏料,因而能夠解決圖案的直進性問題和表面粗糙度不良問題,且具有經時黏度穩定性優異的效果而能夠應用于高靈敏度化的裝置。In the present invention, the pigment dispersion liquid that is a component of the colored photosensitive resin composition contains pigments with a volume average particle diameter of 15 nm to 60 nm. Therefore, it can solve the problem of straightness of the pattern and the problem of poor surface roughness, and has stable viscosity over time. It has excellent performance and can be applied to highly sensitive devices.
以下,對本發明進行詳細說明。Hereinafter, the present invention will be described in detail.
<< 著色感光性樹脂組合物Colored photosensitive resin composition >>
(A)(A) 顏料分散液Pigment dispersion
上述(A)顏料分散液包含體積平均粒徑為15nm ~ 60nm的顏料。在包含上述體積平均粒徑範圍內的顏料的情況下,在光聚合性化合物和鹼溶性樹脂交聯時,顏料會具有能夠夾在它們當中的較佳的大小。因此,透過曝光過程來使光聚合性化合物和著色感光性樹脂組合物固化時,微小的顏料滲入到組合物交聯後的空隙之間,在形成圖案時能夠獲得圖案的表面粗糙度得到改善的效果。如果顏料的體積平均粒徑大於60nm,則可能發生以下問題:顏料向固化後的光聚合性化合物和著色感光性樹脂組合物之間滲入變難,與效果範圍的粒徑相比,表面粗糙度改善效果降低,圖案的直進性也會變得不良。如果顏料的體積平均粒徑小於15nm,則顏料粒子的表面積變大而發生顏料粒子之間集結的聚集(aggregation)現象,從而使黏度穩定性出現問題。The above-mentioned (A) pigment dispersion liquid contains a pigment with a volume average particle diameter of 15 nm to 60 nm. When a pigment within the above volume average particle diameter range is included, the pigment will have a preferable size that can be sandwiched between the photopolymerizable compound and the alkali-soluble resin when they are cross-linked. Therefore, when the photopolymerizable compound and the colored photosensitive resin composition are cured through the exposure process, minute pigments penetrate into the gaps after crosslinking of the composition, and when the pattern is formed, the surface roughness of the pattern is improved. Effect. If the volume average particle diameter of the pigment is larger than 60 nm, the following problems may occur: it becomes difficult for the pigment to penetrate between the cured photopolymerizable compound and the colored photosensitive resin composition, and the surface roughness is lower than the particle diameter within the effective range. The improvement effect is reduced and the straightness of the pattern becomes poor. If the volume average particle diameter of the pigment is less than 15 nm, the surface area of the pigment particles becomes large, causing an aggregation phenomenon in which the pigment particles aggregate, causing problems with viscosity stability.
上述顏料分散液可以包含藍色顏料或紫色顏料。The above-mentioned pigment dispersion liquid may contain a blue pigment or a purple pigment.
本發明中可使用的藍色顏料可以為選自由C.I.顏料藍15、C.I.顏料藍15:3、C.I.顏料藍15:4、C.I.顏料藍15:6和C.I.顏料藍60等藍色顏料組成的組中的一種以上,其中,較佳地為C.I.顏料藍15:6。The blue pigment that can be used in the present invention may be selected from the group consisting of blue pigments such as C.I. Pigment Blue 15, C.I. Pigment Blue 15:3, C.I. Pigment Blue 15:4, C.I. Pigment Blue 15:6, and C.I. Pigment Blue 60. One or more of them, preferably C.I. Pigment Blue 15:6.
本發明的紫色顏料可以為選自由C.I.顏料紫1、C.I.顏料紫19、C.I.顏料紫23、C.I.顏料紫29、C.I.顏料紫32、C.I.顏料紫36和C.I.顏料紫38等紫色顏料組成的組中的一種以上,其中,較佳地為C.I.顏料紫23。The purple pigment of the present invention may be selected from the group consisting of C.I. Pigment Violet 1, C.I. Pigment Violet 19, C.I. Pigment Violet 23, C.I. Pigment Violet 29, C.I. Pigment Violet 32, C.I. Pigment Violet 36, and C.I. Pigment Violet 38. One or more of them, among which, C.I. Pigment Violet 23 is preferred.
本發明除了上述顏料以外可以視需要進一步追加包含通常使用的顏料。In addition to the above-mentioned pigments, the present invention may additionally contain commonly used pigments if necessary.
相對於著色感光性樹脂組合物總重量,上述顏料的含量可以為1 ~ 30重量%,較佳地可以為1 ~ 10重量%的範圍。The content of the above-mentioned pigment may be in the range of 1 to 30% by weight, preferably in the range of 1 to 10% by weight relative to the total weight of the colored photosensitive resin composition.
上述顏料較佳地使用其粒徑均勻分散的顏料分散液。作為使顏料的粒徑均勻分散的方法的一例,可以舉出添加顏料分散劑(a2)來進行分散處理的方法等,根據該方法,能夠獲得顏料在溶液中均勻分散的狀態的顏料分散液。As the above-mentioned pigment, it is preferable to use a pigment dispersion in which the particle diameter is uniformly dispersed. An example of a method for uniformly dispersing the particle size of the pigment includes a method of adding a pigment dispersant (a2) and performing a dispersion treatment. According to this method, a pigment dispersion liquid in which the pigment is uniformly dispersed in the solution can be obtained.
顏料分散劑Pigment dispersant (a2)(a2)
上述顏料分散劑(a2)是為了維持顏料的解凝和穩定性而添加的,可以無限制地使用本技術領域中一般使用的顏料分散劑。較佳地含有包含甲基丙烯酸丁酯(BMA)或甲基丙烯酸N,N-二甲基氨基乙酯(DMAEMA)的丙烯酸酯系分散劑(以下,稱為丙烯酸系分散劑)。此時,上述丙烯酸系分散劑較佳地應用透過如韓國公開專利2004-0014311號中所公開的那樣的活性控制方法而製造的分散劑,作為透過上述活性控制方法而製造的丙烯酸酯系分散劑的市售品,可以舉出DISPER BYK-2000、DISPER BYK-2001、DISPER BYK-2070、DISPER BYK-2150等。The above-mentioned pigment dispersant (a2) is added in order to maintain the deaggregation and stability of the pigment, and any pigment dispersant generally used in this technical field can be used without limitation. It is preferable to contain an acrylic dispersant (hereinafter referred to as an acrylic dispersant) containing butyl methacrylate (BMA) or N,N-dimethylaminoethyl methacrylate (DMAEMA). In this case, as the acrylic dispersant, a dispersant produced by an activity control method as disclosed in Korean Patent Publication No. 2004-0014311 is preferably used. As the acrylic dispersant produced by the activity control method, Examples of commercially available products include DISPER BYK-2000, DISPER BYK-2001, DISPER BYK-2070, DISPER BYK-2150, etc.
上述例示的丙烯酸系分散劑可以各自單獨使用或將兩種以上組合使用。上述顏料分散劑(a2)也可以使用上述丙烯酸系分散劑以外的其他樹脂型的顏料分散劑。作為上述其他樹脂型的顏料分散劑,可以舉出公知的樹脂型顏料分散劑,特別是聚氨酯、以聚丙烯酸酯為代表的聚羧酸酯、不飽和聚醯胺、聚羧酸、聚羧酸的(部分)胺鹽、聚羧酸的銨鹽、聚羧酸的烷基胺鹽、聚矽氧烷、長鏈聚氨基醯胺磷酸鹽、含羥基聚羧酸的酯和它們的改性生成物、或具有自由(free)羧基的聚酯與聚(低級亞烷基亞胺)的反應而形成的醯胺或它們的鹽那樣的油質分散劑;(甲基)丙烯酸-苯乙烯共聚物、(甲基)丙烯酸-(甲基)丙烯酸酯共聚物、苯乙烯-馬來酸共聚物、聚乙烯醇或聚乙烯吡咯烷酮那樣的水溶性樹脂或水溶性聚合物化合物;聚酯;改性聚丙烯酸酯;環氧乙烷/環氧丙烷的加成生成物;以及磷酸酯等。The acrylic dispersants exemplified above can be used individually or in combination of two or more. As the pigment dispersant (a2), other resin-type pigment dispersants other than the above-mentioned acrylic dispersant may be used. Examples of the other resin-type pigment dispersants include known resin-type pigment dispersants, particularly polyurethane, polycarboxylate represented by polyacrylate, unsaturated polyamide, polycarboxylic acid, and polycarboxylic acid. (Partial) amine salts, ammonium salts of polycarboxylic acids, alkylamine salts of polycarboxylic acids, polysiloxanes, long-chain polyaminoamide phosphates, esters of hydroxyl-containing polycarboxylic acids and their modifications Oily dispersants such as amides or their salts formed by the reaction of polyesters with free carboxyl groups and poly(lower alkylene imines); (meth)acrylic acid-styrene copolymers , (meth)acrylic acid-(meth)acrylate copolymer, styrene-maleic acid copolymer, water-soluble resin or water-soluble polymer compound such as polyvinyl alcohol or polyvinylpyrrolidone; polyester; modified poly Acrylates; addition products of ethylene oxide/propylene oxide; and phosphate esters, etc.
作為上述樹脂型分散劑的市售品,對於陽離子系樹脂分散劑而言,例如,可以舉出畢克(BYK)化學公司的商品名:DISPER BYK-160、DISPER BYK-161、DISPER BYK-162、DISPER BYK-163、DISPER BYK-164、DISPER BYK-166、DISPER BYK-171、DISPER BYK-182、DISPER BYK-184;巴斯夫(BASF)公司的商品名:EFKA-44、EFKA-46、EFKA-47、EFKA-48、EFKA-4010、EFKA-4050、EFKA-4055、EFKA-4020、EFKA-4015、EFKA-4060、EFKA-4300、EFKA-4330、EFKA-4400、EFKA-4406、EFKA-4510、EFKA-4800;路博潤(Lubirzol)公司的商品名:SOLSPERS-24000、SOLSPERS-32550、NBZ-4204/10;川研精化公司的商品名:HINOACT T-6000、HINOACT T-7000、HINOACT T-8000;味之素公司的商品名:AJISPUR PB-821、AJISPUR PB-822、AJISPUR PB-823;共荣社化学公司的商品名:FLORENE DOPA-17HF、FLORENE DOPA-15BHF、FLORENE DOPA-33、FLORENE DOPA-44等。上述丙烯酸系分散劑以外的其他樹脂型的顏料分散劑可以各自單獨使用或將兩種以上混合使用,也可以與丙烯酸系分散劑並用。As commercial products of the above-mentioned resin-type dispersants, cationic resin dispersants include, for example, trade names of BYK Chemical Co., Ltd.: DISPER BYK-160, DISPER BYK-161, and DISPER BYK-162. , DISPER BYK-163, DISPER BYK-164, DISPER BYK-166, DISPER BYK-171, DISPER BYK-182, DISPER BYK-184; BASF’s trade names: EFKA-44, EFKA-46, EFKA- 47. EFKA-48, EFKA-4010, EFKA-4050, EFKA-4055, EFKA-4020, EFKA-4015, EFKA-4060, EFKA-4300, EFKA-4330, EFKA-4400, EFKA-4406, EFKA-4510, EFKA-4800; Lubirzol’s trade names: SOLSPERS-24000, SOLSPERS-32550, NBZ-4204/10; Chuanyan Refining Chemical Company’s trade names: HINOACT T-6000, HINOACT T-7000, HINOACT T -8000; Ajinomoto Co.’s trade names: AJISPUR PB-821, AJISPUR PB-822, AJISPUR PB-823; Kyoeisha Chemical Co., Ltd.’s trade names: FLORENE DOPA-17HF, FLORENE DOPA-15BHF, FLORENE DOPA-33, FLORENE DOPA-44 etc. Resin-type pigment dispersants other than the above-mentioned acrylic dispersants may be used alone or in combination of two or more types, or may be used in combination with an acrylic dispersant.
相對於所使用的顏料(a1)的固體成分100重量份,上述顏料分散劑(a2)的使用量為5 ~ 60重量份,進一步較佳地為15 ~ 50重量份範圍。在顏料分散劑(a2)的含量滿足上述範圍的情況下,在黏度、顏料的微粒化方面有利,能夠降低分散後發生凝膠化等問題的可能性。The usage amount of the above-mentioned pigment dispersant (a2) is 5 to 60 parts by weight relative to 100 parts by weight of the solid content of the pigment (a1) used, and more preferably is in the range of 15 to 50 parts by weight. When the content of the pigment dispersant (a2) satisfies the above range, it is advantageous in terms of viscosity and micronization of the pigment, and the possibility of problems such as gelation after dispersion can be reduced.
分散助劑Dispersion aid (a3)(a3)
所謂分散助劑(a3),是指可使顏料分散成微細的粒子且防止再凝集的製劑。上述分散助劑在構成對比度高且透過度優異的著色層方面是有效的。The dispersion aid (a3) refers to a preparation that can disperse the pigment into fine particles and prevent re-aggregation. The above-mentioned dispersion aid is effective in forming a colored layer with high contrast and excellent transmittance.
作為本發明中可使用的分散助劑,例如,有1,8-二氨基-4,5-二羥基蒽醌、1,5-雙{[2-(二乙基氨基)乙基]氨基}蒽-9,10-醌、1,8-雙(苯甲醯氨基)蒽醌、1,4-雙{[2-(4-羥基苯基)乙基]氨基}蒽-9,10-醌、1,4-雙{[2-(二甲基氨基)乙基]氨基}-5,8-二羥基蒽-9,10-醌、1,8-二羥基-4-[4-(2-羥基乙基)苯胺基]-5-硝基蒽-9,10-醌、1,4-二羥基蒽醌、1,4-雙(4-丁基苯胺基)-5,8-二羥基蒽醌、4'-(4-羥基-1-蒽醌基氨基)-乙醯苯胺、1,4-雙[(2,6-二乙基-4-甲基苯基)氨基]蒽醌、1,4-雙(丁基氨基)-9,10-蒽二酮、1,4-雙(4-丁基苯胺基)-5,8-二羥基蒽醌、1,5-雙[(3-甲基苯基)氨基]-9,10-蒽二酮、1,5-二環己基氨基蒽醌、1,4-雙(異丙基氨基)蒽醌、1,4-雙(甲基氨基)蒽醌、1,4-雙(2,6-二乙基-4-甲基苯胺基)蒽醌、2,2'-(9,10-二氧代蒽-1,4-二基二亞氨基)雙(5-甲基磺酸酯)、1-苯胺基-4-羥基蒽醌、1-羥基-4-[(4-甲基苯基)氨基]-9,10-蒽二酮、1,4-雙(對甲苯基氨基)蒽醌、1-氨基-4-苯基氨基蒽醌、N-[4-[(4-羥基-蒽醌-1-基)氨基]苯基]乙醯胺、1-(甲基氨基)-4-(4-甲基苯胺基)蒽-9,10-二酮以及1,4,5,8-四羥基蒽醌等。Examples of dispersion aids that can be used in the present invention include 1,8-diamino-4,5-dihydroxyanthraquinone and 1,5-bis{[2-(diethylamino)ethyl]amino} Anthracene-9,10-quinone, 1,8-bis(benzylamido)anthraquinone, 1,4-bis{[2-(4-hydroxyphenyl)ethyl]amino}anthracene-9,10-quinone , 1,4-bis{[2-(dimethylamino)ethyl]amino}-5,8-dihydroxyanthracene-9,10-quinone, 1,8-dihydroxy-4-[4-(2 -Hydroxyethyl)anilino]-5-nitroanthracene-9,10-quinone, 1,4-dihydroxyanthraquinone, 1,4-bis(4-butylanilino)-5,8-dihydroxy Anthraquinone, 4'-(4-hydroxy-1-anthraquinoneylamino)-acetylaniline, 1,4-bis[(2,6-diethyl-4-methylphenyl)amino]anthraquinone, 1,4-bis(butylamino)-9,10-anthracenedione, 1,4-bis(4-butylanilino)-5,8-dihydroxyanthraquinone, 1,5-bis[(3 -Methylphenyl)amino]-9,10-anthracenedione, 1,5-dicyclohexylaminoanthraquinone, 1,4-bis(isopropylamino)anthraquinone, 1,4-bis(methyl Amino)anthraquinone, 1,4-bis(2,6-diethyl-4-methylanilino)anthraquinone, 2,2'-(9,10-dioxanthracene-1,4-diyl Diimino)bis(5-methylsulfonate), 1-anilino-4-hydroxyanthraquinone, 1-hydroxy-4-[(4-methylphenyl)amino]-9,10-anthracenedi Ketone, 1,4-bis(p-tolylamino)anthraquinone, 1-amino-4-phenylaminoanthraquinone, N-[4-[(4-hydroxy-anthraquinone-1-yl)amino]phenyl ] Acetamide, 1-(methylamino)-4-(4-methylanilino)anthracene-9,10-dione and 1,4,5,8-tetrahydroxyanthraquinone, etc.
除了上述分散助劑以外,可以視需要進一步包含市售的分散助劑。具體可以舉出路博潤公司的SOLSPERSE-5000、SOLSPERSE-12000、SOLSPERSE-22000、畢克公司的BYK-SYNERGIST 2100、BYK-SINERGIST 2105、巴斯夫公司的EFKA-6745或EFKA-6750等。In addition to the above-mentioned dispersion aids, commercially available dispersion aids may be further included as necessary. Specific examples include Lubrizol's SOLSPERSE-5000, SOLSPERSE-12000, SOLSPERSE-22000, BYK's BYK-SYNERGIST 2100, BYK-SINERGIST 2105, BASF's EFKA-6745 or EFKA-6750, etc.
相對於著色劑中顏料100重量份,上述分散助劑的含量為1 ~ 30重量份。在分散助劑的含量滿足上述範圍的情況下,能夠降低顏料分散液固有的顏色的改變或在著色層製造流程時由硬烘導致的變色的可能性。The content of the above-mentioned dispersing aid is 1 to 30 parts by weight relative to 100 parts by weight of the pigment in the colorant. When the content of the dispersion aid satisfies the above range, it is possible to reduce the possibility of a change in the inherent color of the pigment dispersion or discoloration caused by hard baking during the colored layer manufacturing process.
分散溶劑Dispersion solvent (a4)(a4)
上述分散溶劑(a4)沒有特別限制,可以使用本領中使用的各種有機溶劑。The dispersion solvent (a4) is not particularly limited, and various organic solvents used in the art can be used.
具體可以例舉:乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丙基醚、乙二醇單丁基醚等乙二醇單烷基醚類,二乙二醇二甲基醚、二乙二醇二乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚等二乙二醇二烷基醚類,甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯等乙二醇烷基醚乙酸酯類,丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、丙二醇單丙基醚乙酸酯、甲氧基丁基乙酸酯、甲氧基戊基乙酸酯等亞烷基二醇烷基醚乙酸酯類,苯、甲苯、二甲苯、均三甲苯等芳香族烴類,甲基乙基酮、丙酮、甲基戊基酮、甲基異丁基酮、環己酮等酮類,乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、甘油等醇類,3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯等酯類,γ-丁內酯等環狀酯類等。較佳地可以使用亞烷基二醇烷基醚乙酸酯類、酮類、3-乙氧基丙酸乙酯或3-甲氧基丙酸甲酯等酯類,進一步較佳地可以使用丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、環己酮、3-乙氧基丙酸乙酯或3-甲氧基丙酸甲酯等。Specific examples include: ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether, diethylene glycol Dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether and other diethylene glycol dialkyl ethers, methyl cellosolve acetate , ethyl cellosolve acetate and other ethylene glycol alkyl ether acetates, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxy Alkylene glycol alkyl ether acetates such as butyl acetate and methoxypentyl acetate, aromatic hydrocarbons such as benzene, toluene, xylene and mesitylene, methyl ethyl ketone and acetone , methyl amyl ketone, methyl isobutyl ketone, cyclohexanone and other ketones, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, glycerol and other alcohols, 3-ethoxy Esters such as ethyl propionate and 3-methoxymethylpropionate, cyclic esters such as γ-butyrolactone, etc. Preferably, esters such as alkylene glycol alkyl ether acetates, ketones, ethyl 3-ethoxypropionate or methyl 3-methoxypropionate can be used, and more preferably, propylene glycol can be used. Monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, ethyl 3-ethoxypropionate or methyl 3-methoxypropionate, etc.
上述分散溶劑可以各自單獨使用或將兩種以上混合使用。The above-mentioned dispersion solvents can be used individually or in mixture of two or more types.
相對於顏料分散液總重量,上述分散溶劑的含量可以為60 ~ 90重量%,較佳地可以為70 ~ 85重量%。在分散溶劑的含量滿足上述範圍的情況下,能夠降低發生顏料分散液的保存穩定性變得不良的問題的可能性。Relative to the total weight of the pigment dispersion, the content of the above-mentioned dispersion solvent may be 60 to 90% by weight, preferably 70 to 85% by weight. When the content of the dispersion solvent satisfies the above range, the possibility that the storage stability of the pigment dispersion liquid becomes poor can be reduced.
分散樹脂dispersion resin (a5)(a5)
上述分散樹脂(a5)能使(A)顏料分散液分散介質,可以選擇性添加,與單獨使用分散劑(a2)相比,如果混合使用分散樹脂(a5),則能夠製造更加優異的顏料分散液。作為分散樹脂,只要能夠分散介質就能夠無限制地使用,但考慮由顏料分散液製造的著色感光性樹脂組合物的顯影性,較佳地具有酸值以具有對於鹼顯影液的溶解性。The above-mentioned dispersion resin (a5) can be used as a dispersion medium for the pigment dispersion liquid (A) and can be optionally added. Compared with the use of the dispersant (a2) alone, when the dispersion resin (a5) is mixed with the dispersion resin (a5), a more excellent pigment dispersion can be produced. liquid. As the dispersion resin, any dispersion resin can be used without limitation as long as it can be dispersed in the medium. However, considering the developability of the colored photosensitive resin composition produced from the pigment dispersion liquid, it is preferable to have an acid value so as to have solubility in an alkali developer.
這裡,所謂酸值,是作為中和1g丙烯酸系聚合物時所需的氫氧化鉀的量(mg)而測定的值,通常可以使用氫氧化鉀水溶液進行滴定來求出。在具有酸值的分散樹脂的情況下,可以透過將具有羧基和不飽和鍵的化合物(b1)、具有能夠與上述化合物(b1)共聚的不飽和鍵的化合物(b2)共聚來製造。Here, the acid value is a value measured as the amount of potassium hydroxide (mg) required to neutralize 1 g of acrylic polymer, and can usually be determined by titration using a potassium hydroxide aqueous solution. In the case of a dispersion resin having an acid value, it can be produced by copolymerizing a compound (b1) having a carboxyl group and an unsaturated bond, and a compound (b2) having an unsaturated bond copolymerizable with the compound (b1).
作為具有羧酸基和不飽和鍵的化合物(b1)的具體例,可以舉出丙烯酸、甲基丙烯酸、巴豆酸等單羧酸類;富馬酸、中康酸、衣康酸等二羧酸類;以及上述二羧酸的酸酐;ω-羧基聚己內酯單(甲基)丙烯酸酯等兩末端具有羧基和羥基的聚合物的單(甲基)丙烯酸酯類等,較佳地為丙烯酸、甲基丙烯酸。本發明中,所謂(甲基)丙烯酸酯,是指丙烯酸酯、甲基丙烯酸酯或這兩者。Specific examples of the compound (b1) having a carboxylic acid group and an unsaturated bond include monocarboxylic acids such as acrylic acid, methacrylic acid, and crotonic acid; dicarboxylic acids such as fumaric acid, mesaconic acid, and itaconic acid; As well as anhydrides of the above-mentioned dicarboxylic acids; mono(meth)acrylates of polymers having carboxyl and hydroxyl groups at both ends such as ω-carboxy polycaprolactone mono(meth)acrylate, etc., preferably acrylic acid, methane Acrylic. In the present invention, (meth)acrylate refers to acrylate, methacrylate, or both.
作為上述化合物(b1)例示的化合物可以各自單獨使用或將兩種以上組合使用。具有能夠與上述化合物(b1)共聚的不飽和鍵的化合物(b2)例如可以舉出:苯乙烯、乙烯基甲苯、α-甲基苯乙烯、對氯苯乙烯、鄰甲氧基苯乙烯、間甲氧基苯乙烯、對甲氧基苯乙烯、鄰乙烯基苄基甲基醚、間乙烯基苄基甲基醚、對乙烯基苄基甲基醚、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚或對乙烯基苄基縮水甘油醚等芳香族乙烯基化合物;(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸仲丁酯或(甲基)丙烯酸叔丁酯等(甲基)丙烯酸烷基酯類;(甲基)丙烯酸環戊酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-甲基環己酯、三環[5.2.1.0 2,6 ]癸烷-8-基(甲基)丙烯酸酯、(甲基)丙烯酸2-二環戊氧基乙酯或(甲基)丙烯酸異冰片酯等脂環族(甲基)丙烯酸酯類;(甲基)丙烯酸苯酯或(甲基)丙烯酸苄酯等(甲基)丙烯酸芳基酯類;(甲基)丙烯酸2-羥基乙酯或(甲基)丙烯酸2-羥基丙酯等(甲基)丙烯酸羥基烷基酯類;N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、N-苯基馬來醯亞胺、N-鄰羥基苯基馬來醯亞胺、N-間羥基苯基馬來醯亞胺、N-對羥基苯基馬來醯亞胺、N-鄰甲基苯基馬來醯亞胺、N-間甲基苯基馬來醯亞胺、N-對甲基苯基馬來醯亞胺、N-鄰甲氧基苯基馬來醯亞胺、N-間甲氧基苯基馬來醯亞胺、N-對甲氧基苯基馬來醯亞胺等N-取代馬來醯亞胺系化合物;(甲基)丙烯醯胺、N,N-二甲基(甲基)丙烯醯胺等不飽和醯胺化合物;3-(甲基丙烯醯氧甲基)氧雜環丁烷、3-(甲基丙烯醯氧甲基)-3-乙基氧雜環丁烷、3-(甲基丙烯醯氧甲基)-2-三氟甲基氧雜環丁烷、3-(甲基丙烯醯氧甲基)-2-苯基氧雜環丁烷、2-(甲基丙烯醯氧甲基)氧雜環丁烷或2-(甲基丙烯醯氧甲基)-4-三氟甲基氧雜環丁烷等不飽和氧雜環丁烷化合物等,但不限定於此。The compounds exemplified as the above compound (b1) can be used individually or in combination of two or more types. Examples of the compound (b2) having an unsaturated bond copolymerizable with the compound (b1) include styrene, vinyltoluene, α-methylstyrene, p-chlorostyrene, o-methoxystyrene, m- Methoxystyrene, p-methoxystyrene, o-vinyl benzyl methyl ether, m-vinyl benzyl methyl ether, p-vinyl benzyl methyl ether, o-vinyl benzyl glycidyl ether, m- Aromatic vinyl compounds such as vinyl benzyl glycidyl ether or p-vinyl benzyl glycidyl ether; methyl (meth)acrylate, ethyl (meth)acrylate, n-propyl (meth)acrylate, (meth)acrylate (meth)acrylic acid alkyl groups such as isopropyl acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, sec-butyl (meth)acrylate or tert-butyl (meth)acrylate Esters; cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-methylcyclohexyl (meth)acrylate, tricyclo[5.2.1.0 2,6]decan-8-yl Alicyclic (meth)acrylates such as (meth)acrylate, 2-dicyclopentoxyethyl (meth)acrylate or isobornyl (meth)acrylate; phenyl (meth)acrylate or (Meth)acrylic acid aryl esters such as benzyl (meth)acrylate; (meth)acrylic acid hydroxyalkyl esters such as 2-hydroxyethyl (meth)acrylate or 2-hydroxypropyl (meth)acrylate ;N-cyclohexylmaleimide, N-benzylmaleimide, N-phenylmaleimide, N-o-hydroxyphenylmaleimide, N-m-hydroxyphenylmaline Leimide, N-p-hydroxyphenylmaleimide, N-o-methylphenylmaleimide, N-m-methylphenylmaleimide, N-p-methylphenyl N- Substituted maleimide compounds; unsaturated amide compounds such as (meth)acrylamide, N,N-dimethyl(meth)acrylamide; 3-(methacryloxymethyl)oxy Hetetane, 3-(methacryloyloxymethyl)-3-ethyloxetane, 3-(methacryloyloxymethyl)-2-trifluoromethyloxetane , 3-(methacryloxymethyl)-2-phenyloxetane, 2-(methacryloxymethyl)oxetane or 2-(methacryloxymethyl) )-4-Trifluoromethyloxetane and other unsaturated oxetane compounds, but are not limited thereto.
作為上述化合物(b2)例示的化合物可以各自單獨使用或將兩種以上組合使用。The compounds exemplified as the above compound (b2) can be used individually or in combination of two or more types.
相對於著色劑中顏料固體成分100重量份,上述分散樹脂的含量為5 ~ 70重量份,較佳地為10 ~ 60重量份。在分散樹脂的含量滿足上述範圍的情況下,能夠降低黏度因分散樹脂而變高或形成微粒化了的顏料分散液的可能性。The content of the dispersion resin is 5 to 70 parts by weight, preferably 10 to 60 parts by weight, relative to 100 parts by weight of the pigment solid content in the colorant. When the content of the dispersion resin satisfies the above range, it is possible to reduce the possibility that the viscosity of the dispersion resin will increase or that a finely divided pigment dispersion liquid will be formed.
染料dye (a6)(a6)
(A)顏料分散液中可以選擇性包含染料,上述染料只要具有對於有機溶劑的溶解性就可以無限制地使用。較佳地使用具有對於有機溶劑的溶解性,並且能夠確保對於鹼顯影液的溶解性、耐熱性和耐溶劑性等可靠性的染料。作為上述染料,可以使用選自磺酸或羧酸等具有酸性基的酸性染料、酸性染料與含氮化合物的鹽、酸性染料的磺醯胺體等以及它們的衍生物中的染料,除此以外,也可以選擇偶氮系、呫噸系、酞菁系的酸性染料以及它們的衍生物。(A) The pigment dispersion may optionally contain a dye, and the dye may be used without any restriction as long as it has solubility in an organic solvent. It is preferable to use a dye that has solubility in an organic solvent and can ensure reliability such as solubility in an alkali developer, heat resistance, and solvent resistance. As the above-mentioned dyes, dyes selected from the group consisting of acid dyes having an acidic group such as sulfonic acid or carboxylic acid, salts of acid dyes and nitrogen-containing compounds, sulfonamides of acid dyes, and their derivatives can be used. , you can also choose azo, xanthene, phthalocyanine acid dyes and their derivatives.
較佳地,上述染料可以舉出色彩索引(染色家協會志(The Society of Dyers and Colourists)出版)中被分類為染料的化合物、或者記載於染色手冊(色染社)中的公知的染料。Preferably, the dyes include compounds classified as dyes in the Color Index (published by The Society of Dyers and Colourists) or well-known dyes described in dyeing manuals (Dyeing Handbook).
作為上述染料的具體例,As specific examples of the above dyes,
對於C.I.溶劑染料而言,可以舉出:For C.I. solvent dyes, examples include:
C.I.溶劑黃4、14、15、21、23、24、38、62、63、68、82、94、98、99、177、162、163、167和189;C.I. Solvent Yellow 4, 14, 15, 21, 23, 24, 38, 62, 63, 68, 82, 94, 98, 99, 177, 162, 163, 167 and 189;
C.I.溶劑紅8、45、49、111、122、125、130、143、145、146、150、151、155、168、169、172、175、181、207、222、227、230、245和247;C.I. Solvent Red 8, 45, 49, 111, 122, 125, 130, 143, 145, 146, 150, 151, 155, 168, 169, 172, 175, 181, 207, 222, 227, 230, 245 and 247 ;
C.I.溶劑橙2、7、11、15、26、56、77和86;C.I. Solvent Orange 2, 7, 11, 15, 26, 56, 77 and 86;
C.I.溶劑紫11、13、14、26、31、36、37、38、45、47、48、51、59和60;C.I. Solvent Violet 11, 13, 14, 26, 31, 36, 37, 38, 45, 47, 48, 51, 59 and 60;
C.I.溶劑藍35、37、59和67;C.I. Solvent Blue 35, 37, 59 and 67;
C.I.溶劑綠1、3、4、5、7、28、29、32、33、34和35等染料。C.I. Solvent Green 1, 3, 4, 5, 7, 28, 29, 32, 33, 34 and 35 dyes.
此外,對於C.I.酸性染料而言,可以舉出:In addition, C.I. acid dyes include:
C.I.酸性黃1、3、7、9、11、17、23、25、29、34、36、38、40、42、54、65、72、73、76、79、98、99、111、112、113、114、116、119、123、128、134、135、138、139、140、144、150、155、157、160、161、163、168、169、172、177、178、179、184、190、193、196、197、199、202、203、204、205、207、212、214、220、221、228、230、232、235、238、240、242、243和251;C.I. Acid Yellow 1, 3, 7, 9, 11, 17, 23, 25, 29, 34, 36, 38, 40, 42, 54, 65, 72, 73, 76, 79, 98, 99, 111, 112 ,113,114,116,119,123,128,134,135,138,139,140,144,150,155,157,160,161,163,168,169,172,177,178,179,184 , 190, 193, 196, 197, 199, 202, 203, 204, 205, 207, 212, 214, 220, 221, 228, 230, 232, 235, 238, 240, 242, 243 and 251;
C.I.酸性紅1、4、8、14、17、18、26、27、29、31、33、34、35、37、40、42、44、50、51、52、57、66、73、76、80、87、88、91、92、94、97、103、106、111、114、129、133、134、138、143、145、150、151、158、160、172、176、182、183、195、198、206、211、215、216、217、227、228、249、252、257、258、260、261、266、268、270、274、277、280、281、195、308、312、315、316、339、341、345、346、349、382、383、394、401、412、417、418、422和426;C.I. Acid red 1, 4, 8, 14, 17, 18, 26, 27, 29, 31, 33, 34, 35, 37, 40, 42, 44, 50, 51, 52, 57, 66, 73, 76 ,80,87,88,91,92,94,97,103,106,111,114,129,133,134,138,143,145,150,151,158,160,172,176,182,183 ,195,198,206,211,215,216,217,227,228,249,252,257,258,260,261,266,268,270,274,277,280,281,195,308,312 , 315, 316, 339, 341, 345, 346, 349, 382, 383, 394, 401, 412, 417, 418, 422 and 426;
C.I.酸性橙6、7、8、10、12、26、50、51、52、56、62、63、64、74、75、94、95、107、108、169和173;C.I. Sour Orange 6, 7, 8, 10, 12, 26, 50, 51, 52, 56, 62, 63, 64, 74, 75, 94, 95, 107, 108, 169 and 173;
C.I.酸性藍1、7、9、15、18、23、25、27、29、40、42、45、51、62、70、74、80、83、86、87、90、92、96、103、112、113、120、129、138、147、150、158、171、182、192、210、242、243、256、259、267、278、280、285、290、296、315、324:1、335和340;C.I. Acid Blue 1, 7, 9, 15, 18, 23, 25, 27, 29, 40, 42, 45, 51, 62, 70, 74, 80, 83, 86, 87, 90, 92, 96, 103 ,112,113,120,129,138,147,150,158,171,182,192,210,242,243,256,259,267,278,280,285,290,296,315,324:1 , 335 and 340;
C.I.酸性紫6B、7、9、17、19和34;C.I. Acid Violet 6B, 7, 9, 17, 19 and 34;
C.I.酸性綠1、3、5、9、16、25、27、50、58、63、65、80、104、105、106和109等染料。C.I. dyes such as acid green 1, 3, 5, 9, 16, 25, 27, 50, 58, 63, 65, 80, 104, 105, 106 and 109.
此外,對於C.I.直接染料而言,可以舉出:In addition, C.I. direct dyes include:
C.I.直接黃2、33、34、35、38、39、43、47、50、54、58、68、69、70、71、86、93、94、95、98、102、108、109、129、136、138和141;C.I. Direct Yellow 2, 33, 34, 35, 38, 39, 43, 47, 50, 54, 58, 68, 69, 70, 71, 86, 93, 94, 95, 98, 102, 108, 109, 129 , 136, 138 and 141;
C.I.直接紅79、82、83、84、91、92、96、97、98、99、105、106、107、172、173、176、177、179、181、182、184、204、207、211、213、218、220、221、222、232、233、234、241、243、246和250;C.I. Direct Red 79, 82, 83, 84, 91, 92, 96, 97, 98, 99, 105, 106, 107, 172, 173, 176, 177, 179, 181, 182, 184, 204, 207, 211 , 213, 218, 220, 221, 222, 232, 233, 234, 241, 243, 246 and 250;
C.I.直接橙26、34、39、41、46、50、52、56、57、61、64、65、68、70、96、97、106和107;C.I. Direct Orange 26, 34, 39, 41, 46, 50, 52, 56, 57, 61, 64, 65, 68, 70, 96, 97, 106 and 107;
C.I.直接藍38、44、57、70、77、80、81、84、85、86、90、93、94、95、97、98、99、100、101、106、107、108、109、113、114、115、117、119、137、149、150、153、155、156、158、159、160、161、162、163、164、166、167、170、171、172、173、188、189、190、192、193、194、196、198、199、200、207、209、210、212、213、214、222、228、229、237、238、242、243、244、245、247、248、250、251、252、256、257、259、260、268、274、275和293;C.I. Direct Blue 38, 44, 57, 70, 77, 80, 81, 84, 85, 86, 90, 93, 94, 95, 97, 98, 99, 100, 101, 106, 107, 108, 109, 113 ,114,115,117,119,137,149,150,153,155,156,158,159,160,161,162,163,164,166,167,170,171,172,173,188,189 ,190,192,193,194,196,198,199,200,207,209,210,212,213,214,222,228,229,237,238,242,243,244,245,247,248 , 250, 251, 252, 256, 257, 259, 260, 268, 274, 275 and 293;
C.I.直接紫47、52、54、59、60、65、66、79、80、81、82、84、89、90、93、95、96、103和104;C.I. Direct Purple 47, 52, 54, 59, 60, 65, 66, 79, 80, 81, 82, 84, 89, 90, 93, 95, 96, 103 and 104;
C.I.直接綠25、27、31、32、34、37、63、65、66、67、68、69、72、77、79和82等染料。C.I. Direct Green 25, 27, 31, 32, 34, 37, 63, 65, 66, 67, 68, 69, 72, 77, 79 and 82 dyes.
此外,對於C.I.媒介染料而言,可以舉出:In addition, C.I. mordant dyes include:
C.I.媒介黃5、8、10、16、20、26、30、31、33、42、43、45、56、61、62和65;C.I. Medium Yellow 5, 8, 10, 16, 20, 26, 30, 31, 33, 42, 43, 45, 56, 61, 62 and 65;
C.I.媒介紅1、2、3、4、9、11、12、14、17、18、19、22、23、24、25、26、30、32、33、36、37、38、39、41、43、45、46、48、53、56、63、71、74、85、86、88、90、94和95;C.I. Medium Red 1, 2, 3, 4, 9, 11, 12, 14, 17, 18, 19, 22, 23, 24, 25, 26, 30, 32, 33, 36, 37, 38, 39, 41 , 43, 45, 46, 48, 53, 56, 63, 71, 74, 85, 86, 88, 90, 94 and 95;
C.I.媒介橙3、4、5、8、12、13、14、20、21、23、24、28、29、32、34、35、36、37、42、43、47和48;C.I. Medium Orange 3, 4, 5, 8, 12, 13, 14, 20, 21, 23, 24, 28, 29, 32, 34, 35, 36, 37, 42, 43, 47 and 48;
C.I.媒介藍1、2、3、7、8、9、12、13、15、16、19、20、21、22、23、24、26、30、31、32、39、40、41、43、44、48、49、53、61、74、77、83和84;C.I. Medium Blue 1, 2, 3, 7, 8, 9, 12, 13, 15, 16, 19, 20, 21, 22, 23, 24, 26, 30, 31, 32, 39, 40, 41, 43 , 44, 48, 49, 53, 61, 74, 77, 83 and 84;
C.I.媒介紫1、2、4、5、7、14、22、24、30、31、32、37、40、41、44、45、47、48、53和58;C.I. Medium Violet 1, 2, 4, 5, 7, 14, 22, 24, 30, 31, 32, 37, 40, 41, 44, 45, 47, 48, 53 and 58;
C.I.媒介綠1、3、4、5、10、15、19、26、29、33、34、35、41、43和53等染料。C.I. Medium Green 1, 3, 4, 5, 10, 15, 19, 26, 29, 33, 34, 35, 41, 43 and 53 dyes.
還可以舉出:You can also cite:
C.I.分散黃51、54、76;C.I. Disperse Yellow 51, 54, 76;
C.I.分散紫26、27等分散染料,C.I. Disperse violet 26, 27 and other disperse dyes,
C.I.活性黃2、76、116;C.I. reactive yellow 2, 76, 116;
C.I.活性橙16等C.I.活性染料等。C.I. reactive orange 16, etc. C.I. reactive dyes, etc.
(B)(B) 鹼溶性樹脂alkali soluble resin
上述(B)鹼溶性樹脂溶解于本發明的溶劑且需要對於光或熱的作用具有反應性。另外,如果是對於上述著色劑可黏結樹脂且能夠溶解於鹼性顯影液的丙烯酸系共聚物,則可以不特別限制其種類地使用。The above-mentioned (B) alkali-soluble resin needs to be soluble in the solvent of the present invention and reactive to the action of light or heat. In addition, as long as it is an acrylic copolymer that can bind the resin to the colorant and is soluble in an alkaline developer, its type can be used without particular limitation.
上述鹼溶性樹脂可以是含羧基單體以及與能夠與上述單體共聚的其他單體的共聚物。上述含羧基單體可以例舉不飽和單羧酸、不飽和二羧酸或不飽和三羧酸等分子中具有1個以上的羧基的不飽和多元羧酸等不飽和羧酸等。上述不飽和單羧酸可以例舉丙烯酸、甲基丙烯酸、巴豆酸、α-氯丙烯酸和肉矽酸等。上述不飽和二羧酸可以例舉馬來酸、富馬酸、衣康酸、檸康酸和中康酸等。上述不飽和多元羧酸也可以為酸酐,具體可以舉出馬來酸酐、衣康酸酐和檸康酸酐等。此外,上述不飽和多元羧酸可以為其單(2-甲基丙烯醯氧基烷基)酯,例如,可以為琥珀酸單(2-丙烯醯氧基乙基)酯、琥珀酸單(2-甲基丙烯醯氧基乙基)酯、鄰苯二甲酸單(2-丙烯醯氧基乙基)酯和鄰苯二甲酸單(2-甲基丙烯醯氧基乙基)酯等。此外,上述不飽和多元羧酸也可以為其兩末端二羧基聚合物的單(甲基)丙烯酸酯,例如,可以為ω-羧基聚己內酯單丙烯酸酯和ω-羧基聚己內酯單甲基丙烯酸酯等。上述含羧基單體可以各自單獨使用或將兩種以上混合使用。作為能夠與上述含羧基單體共聚的其他單體的具體例,可以舉出苯乙烯、α-甲基苯乙烯、鄰乙烯基甲苯、間乙烯基甲苯、對乙烯基甲苯、對氯苯乙烯、鄰甲氧基苯乙烯、間甲氧基苯乙烯、對甲氧基苯乙烯、鄰乙烯基苄基甲基醚、間乙烯基苄基甲基醚、對乙烯基苄基甲基醚、鄰乙烯基苄基縮水甘油基醚、間乙烯基苄基縮水甘油基醚、對乙烯基苄基縮水甘油基醚以及茚等芳香族乙烯基化合物;丙烯酸甲酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲基丙烯酸乙酯、丙烯酸正丙酯、甲基丙烯酸正丙酯、丙烯酸異丙酯、甲基丙烯酸異丙酯、丙烯酸正丁酯、甲基丙烯酸正丁酯、丙烯酸異丁酯、甲基丙烯酸異丁酯、丙烯酸仲丁酯、甲基丙烯酸仲丁酯、丙烯酸叔丁酯、甲基丙烯酸叔丁酯、丙烯酸-2-羥基乙酯、甲基丙烯酸-2-羥基乙酯、丙烯酸-2-羥基丙酯、甲基丙烯酸-2-羥基丙酯、丙烯酸-3-羥基丙酯、甲基丙烯酸-3-羥基丙酯、丙烯酸-2-羥基丁酯、甲基丙烯酸-2-羥基丁酯、丙烯酸-3-羥基丁酯、甲基丙烯酸-3-羥基丁酯、丙烯酸-4-羥基丁酯、甲基丙烯酸-4-羥基丁酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、丙烯酸苄酯、甲基丙烯酸苄酯、丙烯酸環己酯、甲基丙烯酸環己酯、丙烯酸苯酯、甲基丙烯酸苯酯、丙烯酸-2-甲氧基乙酯、甲基丙烯酸-2-甲氧基乙酯、丙烯酸-2-苯氧基乙酯、甲基丙烯酸-2-苯氧基乙酯、甲氧基二乙二醇丙烯酸酯、甲氧基二乙二醇甲基丙烯酸酯、甲氧基三乙二醇丙烯酸酯、甲氧基三乙二醇甲基丙烯酸酯、甲氧基丙二醇丙烯酸酯、甲氧基丙二醇甲基丙烯酸酯、甲氧基二丙二醇丙烯酸酯、甲氧基二丙二醇甲基丙烯酸酯、丙烯酸異冰片酯、甲基丙烯酸異冰片酯、丙烯酸二環戊二烯酯、甲基丙烯酸二環戊二烯酯、丙烯酸-2-羥基-3-苯氧基丙酯、甲基丙烯酸-2-羥基-3-苯氧基丙酯、甘油單丙烯酸酯和甘油單甲基丙烯酸酯等不飽和羧酸酯類;丙烯酸-2-氨基乙酯、甲基丙烯酸-2-氨基乙酯、丙烯酸-2-二甲基氨基乙酯、甲基丙烯酸-2-二甲基氨基乙酯、丙烯酸-2-氨基丙酯、甲基丙烯酸-2-氨基丙酯、丙烯酸-2-二甲基氨基丙酯、甲基丙烯酸-2-二甲基氨基丙酯、丙烯酸-3-氨基丙酯、甲基丙烯酸-3-氨基丙酯、丙烯酸-3-二甲基氨基丙酯和甲基丙烯酸-3-二甲基氨基丙酯等不飽和羧酸氨基烷基酯類;丙烯酸縮水甘油酯和甲基丙烯酸縮水甘油酯等不飽和羧酸縮水甘油酯類;乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯和苯甲酸乙烯酯等羧酸乙烯基酯類;乙烯基甲基醚、乙烯基乙基醚和烯丙基縮水甘油基醚等不飽和醚類;丙烯腈、甲基丙烯腈、α-氯丙烯腈和亞乙烯基二氰等乙烯基氰化合物;丙烯醯胺、甲基丙烯醯胺、α-氯丙烯醯胺、N-2-羥乙基丙烯醯胺和N-2-羥乙基甲基丙烯醯胺等不飽和醯胺類;馬來醯亞胺、N-苯基馬來醯亞胺和N-環己基馬來醯亞胺等不飽和醯亞胺類;1,3-丁二烯、異戊二烯和氯丁二烯等脂肪族共軛二烯類;聚苯乙烯、聚丙烯酸甲酯、聚甲基丙烯酸甲酯、聚丙烯酸正丁酯、聚甲基丙烯酸正丁酯、聚矽氧烷的聚合物分子鏈的末端具有單丙烯醯基或單甲基丙烯醯基的大單體類等。上述單體可以各自使用一種或將兩種以上混合使用。The above-mentioned alkali-soluble resin may be a copolymer of a carboxyl group-containing monomer and other monomers copolymerizable with the above-mentioned monomer. Examples of the carboxyl group-containing monomer include unsaturated carboxylic acids such as unsaturated polycarboxylic acids having one or more carboxyl groups in the molecule, such as unsaturated monocarboxylic acids, unsaturated dicarboxylic acids, unsaturated tricarboxylic acids, and the like. Examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, and silicic acid. Examples of the unsaturated dicarboxylic acid include maleic acid, fumaric acid, itaconic acid, citraconic acid, mesaconic acid, and the like. The unsaturated polycarboxylic acid may be an acid anhydride, and specific examples thereof include maleic anhydride, itaconic anhydride, citraconic anhydride, and the like. In addition, the above-mentioned unsaturated polycarboxylic acid may be its mono(2-methacryloxyalkyl) ester, for example, it may be succinic acid mono(2-acryloxyethyl) ester, succinic acid mono(2-methacryloxyalkyl) ester. - Methacryloxyethyl) ester, mono(2-acryloxyethyl) phthalate and mono(2-methacryloxyethyl) phthalate, etc. In addition, the above-mentioned unsaturated polycarboxylic acid may also be a mono(meth)acrylate of a polymer of dicarboxyl groups at both terminals. For example, it may be ω-carboxy polycaprolactone monoacrylate and ω-carboxy polycaprolactone monoacrylate. Methacrylate, etc. The above-mentioned carboxyl group-containing monomers can be used individually or in mixture of two or more types. Specific examples of other monomers copolymerizable with the carboxyl group-containing monomer include styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, and p-chlorostyrene. o-methoxystyrene, m-methoxystyrene, p-methoxystyrene, o-vinyl benzyl methyl ether, m-vinyl benzyl methyl ether, p-vinyl benzyl methyl ether, o-ethylene benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, p-vinyl benzyl glycidyl ether and indene and other aromatic vinyl compounds; methyl acrylate, methyl methacrylate, ethyl acrylate, Ethyl methacrylate, n-propyl acrylate, n-propyl methacrylate, isopropyl acrylate, isopropyl methacrylate, n-butyl acrylate, n-butyl methacrylate, isobutyl acrylate, methacrylic acid Isobutyl ester, sec-butyl acrylate, sec-butyl methacrylate, tert-butyl acrylate, tert-butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxyethyl acrylate Hydroxypropyl ester, 2-hydroxypropyl methacrylate, 3-hydroxypropyl acrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl acrylate, 2-hydroxybutyl methacrylate, 3-hydroxybutyl acrylate, 3-hydroxybutyl methacrylate, 4-hydroxybutyl acrylate, 4-hydroxybutyl methacrylate, allyl acrylate, allyl methacrylate, benzyl acrylate Ester, benzyl methacrylate, cyclohexyl acrylate, cyclohexyl methacrylate, phenyl acrylate, phenyl methacrylate, 2-methoxyethyl acrylate, 2-methoxyethyl methacrylate Ester, 2-phenoxyethyl acrylate, 2-phenoxyethyl methacrylate, methoxydiethylene glycol acrylate, methoxydiethylene glycol methacrylate, methoxytris Ethylene glycol acrylate, methoxytriethylene glycol methacrylate, methoxypropylene glycol acrylate, methoxypropylene glycol methacrylate, methoxydipropylene glycol acrylate, methoxydipropylene glycol methacrylate Ester, isobornyl acrylate, isobornyl methacrylate, dicyclopentadienyl acrylate, dicyclopentadienyl methacrylate, 2-hydroxy-3-phenoxypropyl acrylate, methacrylic acid- Unsaturated carboxylic acid esters such as 2-hydroxy-3-phenoxypropyl ester, glycerol monoacrylate and glyceryl monomethacrylate; 2-aminoethyl acrylate, 2-aminoethyl methacrylate, acrylic acid -2-Dimethylaminoethyl ester, 2-dimethylaminoethyl methacrylate, 2-aminopropyl acrylate, 2-aminopropyl methacrylate, 2-dimethylaminopropyl acrylate Ester, 2-dimethylaminopropyl methacrylate, 3-aminopropyl acrylate, 3-aminopropyl methacrylate, 3-dimethylaminopropyl acrylate and 3-aminopropyl methacrylate Unsaturated carboxylic acid aminoalkyl esters such as dimethylaminopropyl ester; unsaturated carboxylic acid glycidyl esters such as glycidyl acrylate and glycidyl methacrylate; vinyl acetate, vinyl propionate, vinyl butyrate Carboxylic acid vinyl esters such as esters and vinyl benzoate; unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether and allyl glycidyl ether; acrylonitrile, methacrylonitrile, α-chlorine Vinyl cyanide compounds such as acrylonitrile and vinylidene cyanide; acrylamide, methacrylamide, α-chloroacrylamide, N-2-hydroxyethylacrylamide and N-2-hydroxyethylmethyl Unsaturated amide imines such as acrylamide; unsaturated amide imines such as maleimide, N-phenyl maleimide and N-cyclohexyl maleimide; 1,3-butanediamine Aliphatic conjugated dienes such as olefin, isoprene and chloroprene; polystyrene, polymethyl acrylate, polymethyl methacrylate, poly-n-butyl acrylate, poly-n-butyl methacrylate, Polysiloxane is a macromonomer having a monoacrylyl group or a monomethacrylyl group at the end of the polymer molecular chain. The above-mentioned monomers can be used individually by 1 type or in mixture of 2 or more types.
因此,上述鹼溶性樹脂可以為例如(甲基)丙烯酸/(甲基)丙烯酸甲酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸-2-羥基乙酯/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚苯乙烯大單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/聚(甲基)丙烯酸甲酯大單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯/聚苯乙烯大單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯/聚(甲基)丙烯酸甲酯大單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸-2-羥基乙酯/(甲基)丙烯酸苄酯/聚苯乙烯大單體共聚物、(甲基)丙烯酸/(甲基)丙烯酸-2-羥基乙酯/(甲基)丙烯酸苄酯/聚(甲基)丙烯酸甲酯大單體共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸苄酯/N-苯基馬來醯亞胺共聚物、(甲基)丙烯酸/琥珀酸單(2-丙烯醯氧基)酯/苯乙烯/(甲基)丙烯酸苄酯/N-苯基馬來醯亞胺共聚物、(甲基)丙烯酸/琥珀酸單(2-丙烯醯氧基乙基)酯/苯乙烯/(甲基)丙烯酸烯丙酯/N-苯基馬來醯亞胺共聚物以及(甲基)丙烯酸/(甲基)丙烯酸苄酯/N-苯基馬來醯亞胺/苯乙烯/甘油單(甲基)丙烯酸酯共聚物等。上述(甲基)丙烯酸酯的含義是丙烯酸酯或甲基丙烯酸酯。Therefore, the above-mentioned alkali-soluble resin may be, for example, (meth)acrylic acid/(meth)methyl acrylate copolymer, (meth)acrylic acid/(meth)benzyl acrylate copolymer, (meth)acrylic acid/(meth)acrylic acid )-2-Hydroxyethyl acrylate/(meth)acrylic acid benzyl ester copolymer, (meth)acrylic acid/(meth)methyl acrylate/polystyrene macromonomer copolymer, (meth)acrylic acid/(meth)acrylic acid (Basic) methyl acrylate/poly(meth)acrylic acid macromonomer copolymer, (meth)acrylic acid/(meth)acrylic acid benzyl ester/polystyrene macromonomer copolymer, (meth)acrylic acid/( Benzyl methacrylate/polymethyl(meth)acrylate macromonomer copolymer, (meth)acrylic acid/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate/polystyrene Macromonomer copolymer, (meth)acrylic acid/2-hydroxyethyl (meth)acrylate/benzyl (meth)acrylate/poly(meth)acrylate macromonomer copolymer, (meth) Acrylic acid/styrene/(meth)benzyl acrylate/N-phenylmaleimide copolymer, (meth)acrylic acid/succinic acid mono(2-acryloxy)ester/styrene/(meth) )Benzyl acrylate/N-phenylmaleimide copolymer, (meth)acrylic acid/mono(2-propenyloxyethyl)succinate/styrene/allyl (meth)acrylate/ N-phenylmaleimide copolymer and (meth)acrylic acid/benzyl (meth)acrylate/N-phenylmaleimide/styrene/glycerol mono(meth)acrylate copolymer, etc. . The above-mentioned (meth)acrylate means acrylate or methacrylate.
上述鹼溶性樹脂中,較佳地使用(甲基)丙烯酸/(甲基)丙烯酸苄酯共聚物、(甲基)丙烯酸/(甲基)丙烯酸苄酯/苯乙烯共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯共聚物以及(甲基)丙烯酸/(甲基)丙烯酸甲酯/苯乙烯共聚物。Among the above-mentioned alkali-soluble resins, (meth)acrylic acid/benzyl (meth)acrylate copolymer, (meth)acrylic acid/benzyl (meth)acrylate/styrene copolymer, (meth)acrylic acid /methyl(meth)acrylate copolymer and (meth)acrylic acid/methyl(meth)acrylate/styrene copolymer.
另外,上述鹼溶性樹脂的利用以四氫呋喃作為洗脫溶劑的凝膠滲透色譜(GPC)測定的聚苯乙烯換算重均分子量應當為5,000 ~ 50,000,較佳地為8,000 ~ 40,000,進一步較佳地為10,000 ~ 30,000。如果上述鹼溶性樹脂的重均分子量屬於5,000 ~ 50,000的範圍,則能夠提高塗膜硬度,表現出優異的留膜率,且獲得非曝光部在顯影液中的良好的溶解性和提高了的解析度。另外,酸值為50 ~ 150(mgKOH/g),較佳地為60 ~ 140,進一步較佳地為80 ~ 130。在上述酸值範圍內,鹼溶性樹脂在顯影液中的溶解性能夠得到提高而非曝光部容易溶解,並且能夠實現高靈敏度化,在顯影時曝光部的圖案殘留而提高留膜率。In addition, the polystyrene-converted weight average molecular weight of the alkali-soluble resin measured by gel permeation chromatography (GPC) using tetrahydrofuran as an elution solvent should be 5,000 to 50,000, preferably 8,000 to 40,000, and more preferably 10,000 ~ 30,000. If the weight average molecular weight of the above-mentioned alkali-soluble resin falls within the range of 5,000 to 50,000, the hardness of the coating film can be improved, excellent film retention can be exhibited, and good solubility of the non-exposed portion in the developer and improved resolution can be obtained Spend. In addition, the acid value is 50 to 150 (mgKOH/g), preferably 60 to 140, and further preferably 80 to 130. Within the acid value range mentioned above, the solubility of the alkali-soluble resin in the developer can be improved and the non-exposed portion can be easily dissolved, and high sensitivity can be achieved. During development, the pattern of the exposed portion remains and the film retention rate can be improved.
相對於著色感光性樹脂組合物中總重量,上述鹼溶性樹脂的含量可以為0.05 ~ 30重量%,較佳地可以為1 ~ 10重量%。在滿足上述範圍的情況下,發生留膜率下降和可靠性下降問題的可能性降低,能夠容易形成圖案。The content of the alkali-soluble resin may be 0.05 to 30% by weight, preferably 1 to 10% by weight, relative to the total weight of the colored photosensitive resin composition. When the above range is satisfied, the possibility of problems such as a decrease in film retention rate and a decrease in reliability is reduced, and the pattern can be easily formed.
(C)(C) 光聚合性化合物photopolymerizable compound
上述(C)光聚合性化合物是能夠透過因光的照射而由光聚合引發劑產生的活性自由基、酸等聚合的化合物,根據官能團的個數,可以為單官能或二官能以上的聚合性化合物。The above-mentioned (C) photopolymerizable compound is a compound that can be polymerized by transmitting active radicals, acids, etc. generated by the photopolymerization initiator due to irradiation of light, and may be monofunctional or bifunctional or more polymerizable depending on the number of functional groups. compound.
作為上述單官能單體的具體例,有丙烯酸壬基苯基卡必醇酯、丙烯酸2-羥基-3-苯氧基丙酯、丙烯酸2-乙基己基卡必醇酯、丙烯酸2-羥基乙酯以及N-乙烯基吡咯烷酮等,但不限定於此。Specific examples of the monofunctional monomer include nonylphenyl carbitol acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexyl carbitol acrylate, and 2-hydroxyethyl acrylate. esters, N-vinylpyrrolidone, etc., but are not limited thereto.
作為上述二官能以上的單體的具體例,有1,6-己二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、雙酚A的雙(丙烯醯氧基乙基)醚、3-甲基戊二醇二(甲基)丙烯酸酯、丁二醇二甲基丙烯酸酯、己二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、二丙二醇二丙烯酸酯、三丙二醇二丙烯酸酯、乙氧基化新戊二醇二丙烯酸酯或丙氧基化新戊二醇二丙烯酸酯等,作為三官能以上的單體,有三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、甘油丙氧基化三丙烯酸酯或異氰脲酸酯三丙烯酸酯等,但不限定於此。Specific examples of the above-mentioned bifunctional or higher monomer include 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, and neopentyl glycol di(meth)acrylate. , triethylene glycol di(meth)acrylate, bis(acryloyloxyethyl) ether of bisphenol A, 3-methylpentanediol di(meth)acrylate, butylene glycol dimethacrylate Ester, hexylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, poly Ethylene glycol di(meth)acrylate, dipropylene glycol diacrylate, tripropylene glycol diacrylate, ethoxylated neopentyl glycol diacrylate or propoxylated neopentyl glycol diacrylate, etc., as three Monomers with higher functionalities include trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, ethoxylated trimethylolpropane tri(meth)acrylate, and propoxylated tri(meth)acrylate. Methylpropane tri(meth)acrylate, glycerin propoxylated triacrylate, isocyanurate triacrylate, etc., but are not limited thereto.
特別是,本發明的光聚合性化合物較佳地包含1 ~ 3個環氧乙烷基。這是因為,如果包含4個以上的環氧乙烷基,則顯影性變大而膜被削減程度增大,從而可能使表面粗糙度表現得不良。如果不包含環氧乙烷基,則存在顯影性急劇下降而在形成圖案時產生殘渣的問題。與此相對,在包含1 ~ 3個環氧乙烷基環氧乙烷基的情況下,能夠使親水性基的表面積形成得最為合適,因此不發生殘渣問題,由顯影液導致的膜削減程度與包含4個以上的環氧乙烷基的情況相比大大降低而能夠改善表面粗糙度。In particular, the photopolymerizable compound of the present invention preferably contains 1 to 3 ethylene oxide groups. This is because if four or more ethylene oxide groups are included, the developability becomes greater and the degree of film abrasion increases, which may result in poor expression of surface roughness. If the ethylene oxide group is not included, the developability is drastically reduced and residues are generated during pattern formation. On the other hand, when 1 to 3 oxirane groups are included, the surface area of the hydrophilic group can be optimally formed, so residue problems and film reduction due to the developer do not occur. Compared with the case where four or more ethylene oxide groups are included, the surface roughness can be greatly reduced and the surface roughness can be improved.
具體而言,較佳地可以使用如以下化學式1所示的結構的化合物,特別是,在以下化學式1的母核結構中包含1 ~ 3個環氧乙烷基的結構最為優選。Specifically, it is preferable to use a compound having a structure represented by the following Chemical Formula 1. In particular, a structure containing 1 to 3 oxirane groups in the core structure of the following Chemical Formula 1 is most preferred.
[化學式 1][Chemical formula 1]
另外,相對於著色感光性樹脂組合物總重量,上述光聚合性化合物的含量為1 ~ 30重量%,進一步較佳地為1 ~ 10重量%。在上述光聚合性化合物的含量處於如上所述的範圍內的情況下,能夠使圖元部的強度或平滑性變佳。In addition, the content of the above-mentioned photopolymerizable compound is 1 to 30% by weight, and more preferably 1 to 10% by weight relative to the total weight of the colored photosensitive resin composition. When the content of the photopolymerizable compound is within the above range, the strength or smoothness of the graphic element portion can be improved.
(D)(D) 光聚合引發劑Photopolymerization initiator
本發明中的(D)光聚合引發劑是透過可見光線、紫外線、遠紫外線、電子射線、X射線等放射線的曝光而產生能夠引發上述光聚合性化合物的多官能性單體的聚合的自由基的化合物。這樣的光聚合引發劑代表性地有苯乙酮系化合物、二苯甲酮系化合物、聯咪唑系化合物、三嗪系化合物、肟酯系化合物和噻噸酮系化合物等。本發明中,光聚合引發劑可以單獨使用或將兩種以上混合使用,較佳地使用一種以上的肟酯系或三嗪系化合物。尤其在固體攝像用光致抗蝕劑的情況下,需要實現錐角接近90度的形狀的圖案,因此下部與上部的固化度應當相似,為了獲得這樣的效果,較佳地可以包含選自表面固化能力優異的三嗪系或肟酯系中的一種以上的光聚合引發劑。The (D) photopolymerization initiator in the present invention generates free radicals capable of initiating the polymerization of the polyfunctional monomer of the above-mentioned photopolymerizable compound through exposure to radiation such as visible rays, ultraviolet rays, far ultraviolet rays, electron rays, and X-rays. compound of. Typical examples of such photopolymerization initiators include acetophenone compounds, benzophenone compounds, biimidazole compounds, triazine compounds, oxime ester compounds, thioxanthone compounds, and the like. In the present invention, the photopolymerization initiator can be used alone or in mixture of two or more types. It is preferred to use one or more oxime ester-based or triazine-based compounds. Especially in the case of a photoresist for solid-state imaging, it is necessary to realize a pattern with a taper angle close to 90 degrees. Therefore, the curing degree of the lower part and the upper part should be similar. In order to obtain such an effect, it is preferable to include a surface selected from One or more photopolymerization initiators of the triazine type or the oxime ester type with excellent curing ability.
作為上述苯乙酮系化合物的具體例,可舉出二乙氧基苯乙酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、苯偶醯二甲基縮酮、2-羥基-1-[4-(2-羥基乙氧基)苯基]-2-甲基丙烷-1-酮、1-羥基環己基苯基酮、2-甲基-1-(4-甲基苯硫基)-2-嗎啉代丙烷-1-酮、2-苄基-2-二甲基氨基-1-(4-嗎啉代苯基)丁烷-1-酮、2-羥基-2-甲基-1-[4-(1-甲基乙烯基)苯基]丙烷-1-酮、2-(4-甲基苄基)-2-(二甲基氨基)-1-(4-嗎啉代苯基)丁烷-1-酮等。Specific examples of the acetophenone compound include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzildimethyl ketal, 2-Hydroxy-1-[4-(2-hydroxyethoxy)phenyl]-2-methylpropan-1-one, 1-hydroxycyclohexylphenyl ketone, 2-methyl-1-(4- Methylphenylthio)-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butan-1-one, 2- Hydroxy-2-methyl-1-[4-(1-methylvinyl)phenyl]propan-1-one, 2-(4-methylbenzyl)-2-(dimethylamino)-1 -(4-morpholinophenyl)butan-1-one, etc.
作為上述二苯甲酮系化合物,例如有二苯甲酮、鄰苯甲醯苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯-4’-甲基二苯硫醚、3,3’,4,4’-四(叔丁基過氧化羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等。Examples of the benzophenone compound include benzophenone, methyl o-benzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 3,3',4,4'-tetrakis(tert-butylperoxycarbonyl)benzophenone, 2,4,6-trimethylbenzophenone, etc.
作為上述聯咪唑化合物的具體例,可以舉出2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(三烷氧基苯基)聯咪唑、2,2-雙(2,6-二氯苯基)-4,4’5,5’-四苯基-1,2’-聯咪唑或4,4’,5,5’位置的苯基被烷氧羰基取代的聯咪唑化合物等。其中,較佳地使用2,2’-雙(2-氯苯基)-4,4’, 5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2-雙(2,6-二氯苯基)-4,4’5,5’-四苯基-1,2’-聯咪唑。Specific examples of the biimidazole compound include 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2 ,3-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis (Alkoxyphenyl)biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(trialkoxyphenyl)biimidazole, 2,2- Bis(2,6-dichlorophenyl)-4,4'5,5'-tetraphenyl-1,2'-biimidazole or the phenyl group at the 4,4',5,5' position is replaced by an alkoxycarbonyl group Substituted biimidazole compounds, etc. Among them, 2,2'-bis(2-chlorophenyl)-4,4', 5,5'-tetraphenylbiimidazole and 2,2'-bis(2,3-dichlorobenzene) are preferably used base)-4,4',5,5'-tetraphenylbiimidazole, 2,2-bis(2,6-dichlorophenyl)-4,4'5,5'-tetraphenyl-1, 2'-biimidazole.
作為上述三嗪系化合物的具體例,可以舉出2,4-雙(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧基萘基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧基苯乙烯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)亞乙基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)亞乙基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(4-二乙基氨基-2-甲基苯基)亞乙基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)亞乙基]-1,3,5-三嗪等。Specific examples of the triazine-based compound include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, Bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperonyl-1,3, 5-Triazine, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-triazine, 2,4-bis(trichloromethyl) -6-[2-(5-methylfuran-2-yl)ethylidene]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan -2-yl)ethylene]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl) )ethylene]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)ethylene]-1 ,3,5-triazine, etc.
作為上述肟酯系化合物,有1-[4-(苯硫基)苯基]-1,2-(辛二酮 2-(O-苯甲醯肟)( 1-[4-(phenylthio) phenyl]-1,2-(octanedione 2-(O-benzoyloxime))、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-哢唑-3-基]乙酮1-(O-乙醯肟)(1-[9-Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethanone 1-(O-acetylo xime))等。As the above-mentioned oxime ester compound, there is 1-[4-(phenylthio)phenyl]-1,2-(octanedione 2-(O-benzoyl oxime)( 1-[4-(phenylthio) phenyl ]-1,2-(octanedione 2-(O-benzoyloxime)), 1-[9-ethyl-6-(2-methylbenzoyl)-9H-triazol-3-yl]ethanone 1 -(O-acetylo xime)(1-[9-Ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]ethanone 1-(O-acetylo xime)) etc.
作為上述噻噸酮系化合物,例如有2-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基噻噸酮等。Examples of the thioxanthone compound include 2-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, and 1-chloro-4-propoxythioxanthone. Tonone, etc.
另外,為了提高本發明的著色感光性樹脂組合物的靈敏度,上述光聚合引發劑(D)可以進一步包含光聚合引發助劑(d1)。本發明的著色感光性樹脂組合物透過含有光聚合引發助劑(d1),從而靈敏度變得更高而能夠提高生產率。Moreover, in order to improve the sensitivity of the colored photosensitive resin composition of this invention, the said photopolymerization initiator (D) may further contain a photopolymerization initiator auxiliary agent (d1). When the colored photosensitive resin composition of the present invention contains a photopolymerization initiator auxiliary agent (d1), the sensitivity becomes higher and productivity can be improved.
上述光聚合引發助劑(d1)例如較佳地可以使用選自由胺化合物、羧酸化合物、具有硫醇基的有機硫化合物組成的組中的一種以上的化合物。As the photopolymerization initiation assistant (d1), for example, it is preferable to use one or more compounds selected from the group consisting of an amine compound, a carboxylic acid compound, and an organic sulfur compound having a thiol group.
作為上述胺化合物,較佳地使用芳香族胺化合物,具體可以使用:三乙醇胺、甲基二乙醇胺、三異丙醇胺等脂肪族胺化合物;4-二甲基氨基苯甲酸甲酯、4-二甲基氨基苯甲酸乙酯、4-二甲基氨基苯甲酸異戊酯、4-二甲基氨基苯甲酸2-乙基己酯、苯甲酸2-二甲基氨基乙酯、N,N-二甲基對甲苯胺、4,4'-雙(二甲基氨基)二苯甲酮(通稱:米蚩酮)、4,4'-雙(二乙基氨基)二苯甲酮等。As the above-mentioned amine compound, aromatic amine compounds are preferably used. Specifically, aliphatic amine compounds such as triethanolamine, methyldiethanolamine, and triisopropanolamine can be used; 4-dimethylaminobenzoic acid methyl ester, 4- Ethyl dimethylaminobenzoate, isopentyl 4-dimethylaminobenzoate, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N -Dimethyl p-toluidine, 4,4'-bis(dimethylamino)benzophenone (commonly known as Michler's ketone), 4,4'-bis(diethylamino)benzophenone, etc.
上述羧酸化合物較佳地為芳香族雜乙酸類,具體可以舉出苯基硫代乙酸、甲基苯基硫代乙酸、乙基苯基硫代乙酸、甲基乙基苯基硫代乙酸、二甲基苯基硫代乙酸、甲氧基苯基硫代乙酸、二甲氧基苯基硫代乙酸、氯苯基硫代乙酸、二氯苯基硫代乙酸、N-苯基甘氨酸、苯氧基乙酸、萘基硫代乙酸、N-萘基甘氨酸、萘氧基乙酸等。The above carboxylic acid compound is preferably an aromatic heteroacetic acid, and specific examples include phenylthioacetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, Dimethylphenylthioacetic acid, methoxyphenylthioacetic acid, dimethoxyphenylthioacetic acid, chlorophenylthioacetic acid, dichlorophenylthioacetic acid, N-phenylglycine, benzene Oxyacetic acid, naphthylthioacetic acid, N-naphthylglycine, naphthyloxyacetic acid, etc.
作為上述具有硫醇基的有機硫化合物的具體例,可以舉出2-巰基苯並三唑、1,4-雙(3-巰基丁醯氧基)丁烷、1,3,5-三(3-巰基丁氧基乙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮、三羥甲基丙烷三(3-巰基丙酸酯)、季戊四醇四(3-巰基丁酸酯)、季戊四醇四(3-巰基丙酸酯)、二季戊四醇六(3-巰基丙酸酯)、四乙二醇雙(3-巰基丙酸酯)等。Specific examples of the organic sulfur compound having a thiol group include 2-mercaptobenzotriazole, 1,4-bis(3-mercaptobutyloxy)butane, and 1,3,5-tris( 3-Mercaptobutoxyethyl)-1,3,5-triazine-2,4,6(1H,3H,5H)-trione, trimethylolpropane tris(3-mercaptopropionate), Pentaerythritol tetrakis (3-mercaptobutyrate), pentaerythritol tetrakis (3-mercaptopropionate), dipentaerythritol hexa(3-mercaptopropionate), tetraethylene glycol bis (3-mercaptopropionate), etc.
以本發明的著色感光性樹脂組合物的總重量為基準,上述(D)光聚合引發劑的含量可以為0.1 ~ 20重量%,較佳地可以為1 ~ 10重量%。如果上述光聚合引發劑的含量處於上述範圍內,則著色感光性樹脂組合物高靈敏度化而曝光時間縮短,因此生產率得到提高,能夠維持高解析度,因而較佳。另外,使用上述條件的組合物形成的圖元部的強度和上述圖元部的表面的平滑性可以變佳。Based on the total weight of the colored photosensitive resin composition of the present invention, the content of the above-mentioned (D) photopolymerization initiator may be 0.1 to 20% by weight, preferably 1 to 10% by weight. If the content of the photopolymerization initiator is within the above range, the colored photosensitive resin composition becomes highly sensitive and the exposure time is shortened, so productivity is improved and high resolution can be maintained, which is preferable. In addition, the strength of the graphic element portion formed using the composition under the above conditions and the smoothness of the surface of the graphic element portion can be improved.
另外,在上述光聚合引發助劑(d1)的情況下,其含量在整體光聚合引發劑中可以為10 ~ 100重量%,較佳地可以為20~ 100重量%。在整體光聚合引發劑中光聚合引發助劑(d1)的含量滿足上述範圍的情況下,能夠降低對於染料的靈敏度降低、顯影製程中發生圖案短路的可能性。In addition, in the case of the above-mentioned photopolymerization initiator auxiliary agent (d1), its content may be 10 to 100% by weight in the entire photopolymerization initiator, and preferably may be 20 to 100% by weight. When the content of the photopolymerization initiator auxiliary agent (d1) in the overall photopolymerization initiator satisfies the above range, the sensitivity to the dye is reduced and the possibility of pattern short circuit occurring during the development process can be reduced.
另外,在進一步使用上述光聚合引發助劑(d1)的情況下,以本發明的著色感光性樹脂組合物的固體成分總重量為基準,相對於鹼溶性樹脂(B)和光聚合性化合物(C)的含量,上述光聚合引發助劑(d1)的含量可以為0.1 ~ 40重量%,較佳地可以為1 ~ 30重量%。如果上述光聚合引發助劑(d1)的使用量處於上述0.1 ~ 40重量%的範圍內,則提供進一步提高著色感光性樹脂組合物的靈敏度,且提高使用上述組合物形成的彩色濾光片的生產率的效果。In addition, when the above-mentioned photopolymerization initiation assistant (d1) is further used, based on the total solid weight of the colored photosensitive resin composition of the present invention, relative to the alkali-soluble resin (B) and the photopolymerizable compound (C ) content, the content of the above-mentioned photopolymerization initiating assistant (d1) can be 0.1 ~ 40% by weight, preferably 1 ~ 30% by weight. If the usage amount of the above-mentioned photopolymerization initiating assistant (d1) is in the above-mentioned range of 0.1 to 40% by weight, it is possible to further improve the sensitivity of the colored photosensitive resin composition and improve the sensitivity of the color filter formed using the above composition. productivity effects.
(E)(E) 溶劑Solvent
上述溶劑只要使上述著色感光性樹脂組合物溶解就沒有特別限制,特別較佳地為醚類、芳香族烴類、酮類、醇類、酯類或醯胺類等。具體可以舉出:乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丙基醚、乙二醇單丁基醚、二乙二醇二甲基醚、二乙二醇二乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單丙基醚、丙二醇單丁基醚、二丙二醇二甲基醚、二丙二醇二乙基醚、二丙二醇二丙基醚和二丙二醇二丁基醚等醚類;苯、甲苯、二甲苯和均三甲苯等芳香族烴類;甲基乙基酮、丙酮、甲基戊基酮、甲基異丁基酮和環己酮等酮類;乙醇、丙醇、丁醇、己醇、環己醇、乙二醇和甘油等醇類;3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯、甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、乙酸乙酯、乙酸丁酯、乙酸戊酯、乳酸甲酯、乳酸乙酯、乳酸丁酯、3-甲氧基丁基乙酸酯、3-甲基-3-甲氧基-1-丁基乙酸酯、甲氧基戊基乙酸酯、乙二醇單乙酸酯、乙二醇二乙酸酯、乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二乙二醇單乙酸酯、二乙二醇二乙酸酯、二乙二醇單丁基醚乙酸酯、丙二醇單乙酸酯、丙二醇二乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、碳酸亞乙酯、碳酸亞丙酯和γ-丁內酯等酯類等。上述溶劑可以使用選自由例示的溶劑組成的組中的一種或將兩種以上混合使用。另外,從塗布性和乾燥性方面考慮,沸點應當為100~ 200℃,較佳地為丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、環己酮、乳酸乙酯、乳酸丁酯、3-乙氧基丙酸乙酯和3-甲氧基丙酸甲酯。The solvent is not particularly limited as long as it dissolves the colored photosensitive resin composition, and is particularly preferably ethers, aromatic hydrocarbons, ketones, alcohols, esters or amides. Specific examples include: ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol dimethyl ether, and diethylene glycol. Diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, dipropylene glycol di Ethers such as methyl ether, dipropylene glycol diethyl ether, dipropylene glycol dipropyl ether and dipropylene glycol dibutyl ether; aromatic hydrocarbons such as benzene, toluene, xylene and mesitylene; methyl ethyl ketone, Ketones such as acetone, methyl amyl ketone, methyl isobutyl ketone and cyclohexanone; alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol and glycerol; 3-ethoxy Ethyl propionate, methyl 3-methoxypropionate, methyl cellosolve acetate, ethyl cellosolve acetate, ethyl acetate, butyl acetate, amyl acetate, methyl lactate, lactic acid Ethyl ester, butyl lactate, 3-methoxybutyl acetate, 3-methyl-3-methoxy-1-butyl acetate, methoxypentyl acetate, ethylene glycol mono Acetate, ethylene glycol diacetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monoacetate, diethylene glycol diacetate Ester, diethylene glycol monobutyl ether acetate, propylene glycol monoacetate, propylene glycol diacetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, ethylene carbonate, carbonic acid Esters such as propylene ester and γ-butyrolactone, etc. As the above-mentioned solvent, one type selected from the group consisting of the exemplified solvents may be used, or two or more types thereof may be mixed and used. In addition, from the perspective of coating properties and drying properties, the boiling point should be 100~200°C, preferably propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, ethyl lactate, lactic acid Butyl ester, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate.
相對於著色感光性樹脂組合物的總重量,上述溶劑的含量可以為10 ~ 60重量%,較佳地可以為20 ~ 40重量%。在上述範圍內利用輥塗機、旋塗機、狹縫式旋轉塗布機、狹縫塗布機(或模塗機)以及噴塗機等塗布裝置進行塗布時,能夠獲得良好的塗布性。The content of the above solvent may be 10 to 60% by weight, preferably 20 to 40% by weight, relative to the total weight of the colored photosensitive resin composition. When coating is performed within the above range using a coating device such as a roll coater, a spin coater, a slot spin coater, a slot coater (or a die coater), and a spray coater, good coating properties can be obtained.
添加劑additives (F)(F)
本發明的著色感光性樹脂組合物中,除了上述成分以外,在不損害本發明的目的的範圍內,還可以視需要並用填充劑、其他高分子化合物、固化劑、密合促進劑、紫外線吸收劑、防凝劑等添加劑(F)。In the colored photosensitive resin composition of the present invention, in addition to the above-mentioned components, fillers, other polymer compounds, curing agents, adhesion accelerators, and ultraviolet absorbers may be used in combination as necessary within the scope that does not impair the object of the present invention. Additives such as agents and anti-coagulants (F).
上述填充劑具體可以使用玻璃、二氧化矽、氧化鋁等,但不限定於此。Specific examples of the filler include glass, silica, alumina, etc., but are not limited thereto.
上述其他高分子化合物具體可以使用環氧樹脂、馬來醯亞胺樹脂等固化性樹脂、聚乙烯醇、聚丙烯酸、聚乙二醇單烷基醚、聚氟烷基丙烯酸酯、聚酯、聚氨酯等熱塑性樹脂等,但不限定於此。As the other polymer compounds mentioned above, curable resins such as epoxy resin and maleimide resin, polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, polyfluoroalkyl acrylate, polyester, and polyurethane can be used. thermoplastic resin, etc., but is not limited thereto.
上述固化劑是為了實現深部固化和提高機械強度而使用的,具體可以使用環氧化合物、多官能異氰酸酯化合物、三聚氰胺化合物、氧雜環丁烷化合物等,但不限定於此。上述環氧化合物具體可以使用雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚F型環氧樹脂、酚醛清漆型環氧樹脂、其他芳香族系環氧樹脂、脂環族系環氧樹脂、縮水甘油酯系樹脂、縮水甘油胺系樹脂、或這些環氧樹脂的溴化衍生物、環氧樹脂及其溴化衍生物以外的脂肪族、脂環族或芳香族環氧化合物、丁二烯(共)聚合物環氧化物、異戊二烯(共)聚合物環氧化物、(甲基)丙烯酸縮水甘油酯(共)聚合物、異氰脲酸三縮水甘油酯等,但不限定於此。上述氧雜環丁烷化合物具體可以使用碳酸酯雙氧雜環丁烷、二甲苯雙氧雜環丁烷、己二酸酯雙氧雜環丁烷、對苯二甲酸酯雙氧雜環丁烷、環己烷二羧酸雙氧雜環丁烷等,但不限定於此。The above-mentioned curing agent is used to achieve deep curing and improve mechanical strength. Specifically, epoxy compounds, multifunctional isocyanate compounds, melamine compounds, oxetane compounds, etc. can be used, but are not limited thereto. Specifically, the above epoxy compounds can use bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, hydrogenated bisphenol F type epoxy resin, novolak type epoxy resin, and other aromatic resins. Aliphatic epoxy resins, cycloaliphatic epoxy resins, glycidyl ester resins, glycidyl amine resins, brominated derivatives of these epoxy resins, epoxy resins and their brominated derivatives , Alicyclic or aromatic epoxy compounds, butadiene (co)polymer epoxide, isoprene (co)polymer epoxide, glycidyl (meth)acrylate (co)polymer, Triglycidyl isocyanurate, etc., but are not limited thereto. Specific examples of the above oxetane compound include carbonate dioxetane, xylene dioxetane, adipate ester dioxetane, and terephthalate ester dioxetane. alkane, cyclohexanedicarboxylic acid dioxetane, etc., but are not limited thereto.
上述固化劑可以與助固化化合物並用,該助固化化合物能夠與固化劑一起使環氧化合物的環氧基、氧雜環丁烷化合物的氧雜環丁烷骨架開環聚合。上述助固化化合物具體可以使用多元羧酸類、多元羧酸酐類、產酸劑等。上述羧酸酐類可利用市售的環氧樹脂固化劑。作為市售的上述環氧樹脂固化劑,例如,可以舉出ADEKA HARDENER EH-700(商品名,ADEKA工業(株)製造)、RIKACID HH(商品名,新日本理化(株)製造)、MH-700(商品名,新日本理化(株)製造)等。The above-mentioned curing agent may be used in combination with a curing-assisting compound capable of ring-opening polymerization of the epoxy group of the epoxy compound and the oxetane skeleton of the oxetane compound together with the curing agent. Specifically, polycarboxylic acids, polycarboxylic acid anhydrides, acid generators, etc. can be used as the above-mentioned curing aid compound. Commercially available epoxy resin curing agents can be used for the above-mentioned carboxylic acid anhydrides. Examples of commercially available epoxy resin curing agents include ADEKA HARDENER EH-700 (trade name, manufactured by ADEKA Industrial Co., Ltd.), RIKACID HH (trade name, manufactured by Shinnippon Rika Co., Ltd.), MH- 700 (trade name, manufactured by Shinnippon Rika Co., Ltd.), etc.
上述例示的固化劑和助固化化合物可以各自單獨使用或將兩種以上混合使用。The curing agents and curing aid compounds exemplified above can be used individually or in mixture of two or more types.
上述密合促進劑具體可以使用選自由乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧基乙氧基)矽烷、N-(2-氨基乙基)-3-氨基丙基甲基二甲氧基矽烷、N-(2-氨基乙基)-3-氨基丙基三甲氧基矽烷、3-氨基丙基三乙氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-氯丙基甲基二甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-巰基丙基三甲氧基矽烷、3-異氰酸酯基丙基三甲氧基矽烷和3-異氰酸酯基丙基三乙氧基矽烷組成的組中的一種或它們的混合物。The above-mentioned close contact accelerator can be specifically selected from the group consisting of vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, and N-(2-aminoethyl)- 3-Aminopropylmethyldimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-epoxypropoxy Propyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-chloropropylmethyl dimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-isocyanatopropyltrimethoxysilane One of the group consisting of silane and 3-isocyanatopropyltriethoxysilane or a mixture thereof.
相對於組合物的固體成分,上述密合促進劑的含量可以為0.01~10重量份,較佳地可以為0.05~2重量份。Relative to the solid content of the composition, the content of the above-mentioned close contact accelerator can be 0.01 to 10 parts by weight, preferably 0.05 to 2 parts by weight.
上述紫外線吸收劑具體可以使用2-(3-叔丁基-2-羥基-5-甲基苯基)-5-氯苯並三唑、烷氧基二苯甲酮等,但不限定於此。Specific examples of the above ultraviolet absorber include 2-(3-tert-butyl-2-hydroxy-5-methylphenyl)-5-chlorobenzotriazole, alkoxybenzophenone, etc., but are not limited thereto. .
上述防凝劑具體可以使用聚丙烯酸鈉等,但不限定於此。Specifically, sodium polyacrylate, etc. can be used as the above-mentioned anticoagulant, but it is not limited thereto.
<< 彩色濾光片、固體攝像用元件和顯示裝置Color filters, solid-state imaging components and display devices >>
本發明提供由上述著色感光性樹脂組合物製造的彩色濾光片以及包含其的固體攝像用元件和顯示裝置。可以將上述著色感光性樹脂組合物塗布在基材上,且進行光固化和顯影來形成圖案。The present invention provides a color filter produced from the above-mentioned colored photosensitive resin composition, a solid-state imaging element and a display device containing the same. The above-mentioned colored photosensitive resin composition can be applied on a base material and photocured and developed to form a pattern.
首先,將上述著色感光性樹脂組合物塗布於基板或由感光性樹脂組合物的固體成分形成的層上,然後加熱乾燥而將溶劑等揮發成分去除,從而獲得平滑的塗膜。First, the above-mentioned colored photosensitive resin composition is applied on a substrate or a layer formed of solid content of the photosensitive resin composition, and then heated and dried to remove volatile components such as solvents, thereby obtaining a smooth coating film.
作為塗布方法,可以透過旋塗、軟性塗布法、輥塗法、狹縫式旋塗或狹縫式塗布法等來實施。塗布後,在加熱乾燥(前烘)、或減壓乾燥後,透過加熱而使溶劑等揮發成分揮發。加熱溫度為70 ~ 200℃,較佳地為80 ~ 130℃。加熱乾燥後的塗膜厚度為0.5 ~ 8㎛左右。對於上述塗膜,透過用於形成靶心圖表案的遮罩照射紫外線。此時,應當對於曝光部整體均勻地照射平行光線,且較佳地使用遮罩對準器或步進器等裝置以便使遮罩與基板精確的位置對準。當照射紫外線時,被紫外線照射的部位發生固化。作為上述紫外線,可以使用g線(波長:436㎚)、h線、KrF(248nm)以及i線(波長:365㎚)等。紫外線照射量可以根據需要適宜地選擇,本發明中對其沒有限定。如果使固化完成的塗膜與顯影液接觸而使非曝光部溶解進行顯影,則可以獲得具有靶心圖表案形狀的固化物。As a coating method, spin coating, soft coating, roll coating, slit spin coating, slit coating, etc. can be implemented. After coating, it is heated and dried (pre-baking) or dried under reduced pressure, and then volatile components such as solvents are volatilized by heating. The heating temperature is 70~200℃, preferably 80~130℃. The thickness of the coating film after heating and drying is about 0.5 ~ 8㎛. The above-mentioned coating film is irradiated with ultraviolet rays through a mask for forming a bull's-eye pattern. At this time, parallel light should be uniformly irradiated to the entire exposure portion, and it is preferable to use a mask aligner or a stepper to accurately align the mask with the substrate. When ultraviolet rays are irradiated, the parts irradiated by the ultraviolet rays are cured. As the ultraviolet rays, g-line (wavelength: 436㎚), h-line, KrF (248nm), i-line (wavelength: 365㎚), etc. can be used. The amount of ultraviolet irradiation can be appropriately selected according to needs, and is not limited in the present invention. If the cured coating film is brought into contact with a developer to dissolve the non-exposed portion and develop, a cured product having a bullseye pattern shape can be obtained.
另外,本發明提供包含上述彩色濾光片的固體攝像元件或顯示裝置。In addition, the present invention provides a solid-state imaging device or a display device including the above-mentioned color filter.
以下,為了幫助本發明的理解,提示較佳地的實施例、比較例和實驗例,但這樣的實施例、比較例和實驗例僅是例示本發明,並非限制隨附的發明申請專利範圍,對於本領域具有通常知識者而言顯而易見的是,在本發明的範疇以及技術思想範圍內,能夠對實施例、比較例和實驗例進行各種各樣的變更和修改,當然這樣的變更和修改也屬於隨附的發明申請專利範圍。In the following, in order to help the understanding of the present invention, preferred embodiments, comparative examples and experimental examples are suggested. However, such embodiments, comparative examples and experimental examples are only to illustrate the present invention and do not limit the patent scope of the accompanying invention. It is obvious to those with ordinary knowledge in the art that various changes and modifications can be made to the Examples, Comparative Examples and Experimental Examples within the scope of the present invention and technical ideas. Of course, such changes and modifications can also be made. It falls within the patent scope of the accompanying invention application.
製造例Manufacturing example
製造例Manufacturing example 1.1. 顏料分散液Pigment dispersion 1-11-1
將作為顏料的C.I.顏料藍15:6(Ⅰ級) 10重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-1。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。10 parts by weight of C.I. Pigment Blue 15:6 (Grade I) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized The mixture was mixed and dispersed with a bead mill for 12 hours, thereby producing a pigment dispersion liquid 1-1. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 2.2. 顏料分散液Pigment dispersion 1-21-2
將作為顏料的C.I.顏料藍15:6(Ⅱ級) 10.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-2。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。10.0 parts by weight of C.I. Pigment Blue 15:6 (Grade II) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized The beads were mixed and dispersed for 12 hours to produce a pigment dispersion 1-2. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 3.3. 顏料分散液Pigment dispersion 1-31-3
將作為顏料的C.I.顏料藍15:6(Ⅲ級) 10.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-3。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。10.0 parts by weight of C.I. Pigment Blue 15:6 (Grade III) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were performed for 12 hours, thereby producing pigment dispersion liquid 1-3. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例4. 顏料分散液1-4Production Example 4. Pigment Dispersion 1-4
將作為顏料的C.I.顏料藍15:6(Ⅳ級) 10.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-4。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。10.0 parts by weight of C.I. Pigment Blue 15:6 (Grade IV) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were performed for 12 hours, thereby producing pigment dispersion liquid 1-4. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 5.5. 顏料分散液Pigment dispersion 1-51-5
將作為顏料的C.I.顏料藍15:6(Ⅴ級) 10.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-5。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。10.0 parts by weight of C.I. Pigment Blue 15:6 (Grade V) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were performed for 12 hours, thereby producing pigment dispersion 1-5. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 6.6. 顏料分散液Pigment dispersion 1-61-6
將作為顏料的C.I.顏料藍15:6(Ⅵ級) 12.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-6。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。12.0 parts by weight of C.I. Pigment Blue 15:6 (Grade VI) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were performed for 12 hours, thereby producing pigment dispersion 1-6. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 7.7. 顏料分散液Pigment dispersion 1-71-7
將作為顏料的C.I.顏料藍15:6(Ⅶ級) 12.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-7。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。12.0 parts by weight of C.I. Pigment Blue 15:6 (Grade VII) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were performed for 12 hours, thereby producing pigment dispersion liquid 1-7. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 8.8. 顏料分散液Pigment dispersion 1-81-8
將作為顏料的C.I.顏料藍15:6(Ⅷ級) 12.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-8。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。12.0 parts by weight of C.I. Pigment Blue 15:6 (Grade VIII) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were carried out for 12 hours, thereby producing pigment dispersion liquid 1-8. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
製造例Manufacturing example 9.9. 顏料分散液Pigment dispersion 1-91-9
將作為顏料的C.I.顏料藍15:6(Ⅸ級) 12.0重量份、作為顏料分散劑的DISPERBYK-2001(畢克公司製造) 5.0重量份和作為溶劑的丙二醇甲基醚乙酸酯 85.0重量份利用珠磨機混合並分散12小時,從而製造顏料分散液1-9。另外,關於色材的粒徑,以使顏料濃度成為1~6重量%的範圍的方式稀釋於丙二醇單甲基醚乙酸酯後,使用大阪電子(株)公司產品ELS-Z2進行測定。透過由此獲得的體積粒徑分佈測定體積平均細微性值,並記載於下表中。12.0 parts by weight of C.I. Pigment Blue 15:6 (Class IX) as a pigment, 5.0 parts by weight of DISPERBYK-2001 (manufactured by BYK Corporation) as a pigment dispersant, and 85.0 parts by weight of propylene glycol methyl ether acetate as a solvent were utilized Bead mill mixing and dispersion were carried out for 12 hours, thereby producing pigment dispersion liquid 1-9. In addition, the particle size of the color material was measured using ELS-Z2, a product of Osaka Electronics Co., Ltd., after diluting it with propylene glycol monomethyl ether acetate so that the pigment concentration was in the range of 1 to 6% by weight. The volume average fineness value was measured from the volume particle size distribution thus obtained and recorded in the table below.
[表1]
合成例Synthesis example
合成例Synthesis example 1.1. 鹼溶性樹脂alkali soluble resin 2-12-1
在具備攪拌機、溫度計、回流冷凝管、滴液漏斗和氮氣導入管的燒瓶中,投入丙二醇單甲基醚乙酸酯 120重量份、丙二醇單甲基醚 80重量份、AIBN 2重量份、丙烯酸 13.0重量份、甲基丙烯酸苄酯 10重量份、4-甲基苯乙烯 57.0重量份、甲基丙烯酸甲酯 20重量份和正十二烷硫醇 3重量份,並進行氮氣置換。然後,邊攪拌邊使反應液的溫度升至110℃且進行6小時反應。這樣合成的鹼溶性樹脂的固體成分酸值為95.8㎎KOH/g,由GPC測定的重均分子量(Mw)為約14,200。In a flask equipped with a stirrer, a thermometer, a reflux condenser, a dropping funnel, and a nitrogen introduction tube, 120 parts by weight of propylene glycol monomethyl ether acetate, 80 parts by weight of propylene glycol monomethyl ether, 2 parts by weight of AIBN, and 13.0 parts by weight of acrylic acid 10 parts by weight of benzyl methacrylate, 57.0 parts by weight of 4-methylstyrene, 20 parts by weight of methyl methacrylate and 3 parts by weight of n-dodecyl mercaptan, and were replaced with nitrogen. Then, the temperature of the reaction liquid was raised to 110°C while stirring, and the reaction was performed for 6 hours. The solid content acid value of the alkali-soluble resin synthesized in this way was 95.8㎎KOH/g, and the weight average molecular weight (Mw) measured by GPC was approximately 14,200.
實施例Example 1~51~5 和比較例and comparative example 1~61~6
固體攝像元件用著色感光性樹脂組合物的製造Production of colored photosensitive resin composition for solid imaging elements
按照以下表2中記載的組成和含量(單位:重量份)來製造著色感光性樹脂組合物。A colored photosensitive resin composition was produced according to the composition and content (unit: parts by weight) described in Table 2 below.
[表2]
- 1-1~1-9:製造例1-1 ~ 1-9的顏料分散液- 1-1~1-9: Pigment dispersion liquid of Production Examples 1-1~1-9
- 2-1:合成例1的鹼溶性樹脂- 2-1: Alkali-soluble resin of Synthesis Example 1
- 3-1:A-TMPT (新中村公司製造)- 3-1: A-TMPT (manufactured by Shin Nakamura Co., Ltd.)
- 3-2:A-TMPT-3EO (新中村公司製造)- 3-2: A-TMPT-3EO (manufactured by Shin Nakamura Co., Ltd.)
- 3-3:A-TMPT-9EO (新中村公司製造)- 3-3: A-TMPT-9EO (manufactured by Shin Nakamura Co., Ltd.)
- 4-1:OXE-01 (巴斯夫公司製造)- 4-1: OXE-01 (manufactured by BASF Corporation)
- 5-1:SH-8400 (韓國道康寧(株))- 5-1: SH-8400 (Dow Corning Korea Co., Ltd.)
- 6-1:丙二醇單甲基醚乙酸酯 (KH NEOCHEM CO.LTD.)- 6-1: Propylene glycol monomethyl ether acetate (KH NEOCHEM CO.LTD.)
實驗例Experimental example 1.1. 圖案直進性和殘渣評價Pattern straightness and residue evaluation
在23℃的無塵室中,在玻璃基板(製造公司:康寧公司,商品名:No.1737,厚度:0.7㎜)的表面上透過旋塗法塗布實施例、比較例和參考例的著色感光性樹脂組合物。然後,置於加熱板上,在100℃的溫度下維持3分鐘而形成薄膜。將所形成的著色感光性樹脂層冷卻至23℃後,利用光罩選擇性地利用i線(波長:365㎚)進行曝光。此時,作為i線的光源,使用超高壓水銀燈,照射光量設為150mJ/㎠。作為光罩,使用以具有線寬1㎛、2㎛、3㎛、4㎛、5㎛、6㎛、7㎛、8㎛、9㎛、10㎛、20㎛、30㎛、40㎛、50㎛和100㎛的線條和圓點(dot)的形態形成顏色圖元的光罩。接著,將上述選擇性曝光後的著色感光性樹脂層在23℃下浸漬於作為顯影液的包含四甲基氫氧化銨0.04重量%的水溶液中進行顯影。然後,用純水洗滌後,在220℃下進行90秒後烘烤,形成著色圖案。所獲得的著色圖案的厚度為0.8㎛,最小線寬(解析度)為1㎛。分別觀察所獲得的著色圖案的直線性和殘渣,按照以下基準進行評價。In a clean room at 23°C, the colored sensitizers of the examples, comparative examples and reference examples were coated on the surface of a glass substrate (manufacturing company: Corning Incorporated, trade name: No. 1737, thickness: 0.7 mm) by spin coating. Resin composition. Then, it was placed on a hot plate and maintained at a temperature of 100° C. for 3 minutes to form a thin film. After the formed colored photosensitive resin layer was cooled to 23°C, it was selectively exposed to i-line (wavelength: 365㎚) using a photomask. At this time, an ultrahigh-pressure mercury lamp was used as the i-line light source, and the irradiation light amount was set to 150 mJ/㎠. As a photomask, those with line widths of 1㎛, 2㎛, 3㎛, 4㎛, 5㎛, 6㎛, 7㎛, 8㎛, 9㎛, 10㎛, 20㎛, 30㎛, 40㎛, 50㎛ are used. A mask that forms color primitives in the shape of 100㎛ lines and dots. Next, the colored photosensitive resin layer after the above-mentioned selective exposure was immersed in an aqueous solution containing 0.04% by weight of tetramethylammonium hydroxide as a developer at 23° C. and developed. Then, after washing with pure water, it was post-baked at 220° C. for 90 seconds to form a colored pattern. The thickness of the obtained coloring pattern is 0.8㎛, and the minimum line width (resolution) is 1㎛. The linearity and residue of the obtained coloring pattern were observed and evaluated based on the following criteria.
<< 圖案直進性和殘渣評價基準Pattern straightness and residue evaluation standards >>
1:嚴重不良1: Seriously defective
2:不良2: Bad
3:普通3: Normal
4:良好4: Good
5:非常良好5: Very good
實驗例Experimental example 2.2. 表面粗糙度評價Surface roughness evaluation
在23℃的無塵室中,在玻璃基板(製造公司:康寧公司,商品名:No.1737,厚度:0.7㎜)的表面上透過旋塗法塗布實施例、比較例和參考例的著色感光性樹脂組合物。然後,置於加熱板上,在100℃的溫度下維持3分鐘而形成薄膜。將所形成的著色感光性樹脂層冷卻至23℃後,利用光罩選擇性地利用i線(波長:365㎚)進行整面曝光。此時,作為i線的光源,使用超高壓水銀燈,照射光量設為150mJ/㎠。接著,將上述選擇性曝光後的著色感光性樹脂層在23℃下浸漬於作為顯影液的包含四甲基氫氧化銨0.04重量%的水溶液中進行顯影。然後,將其利用原子力電子顯微鏡(製造公司:Park system,型號名:NX10)、非接觸模式求出平均粗糙度(Ra - Average Roughness)值。利用由此得到的平均粗糙度值,按照以下基準進行評價。In a clean room at 23°C, the colored sensitizers of the examples, comparative examples and reference examples were coated on the surface of a glass substrate (manufacturing company: Corning Incorporated, trade name: No. 1737, thickness: 0.7 mm) by spin coating. Resin composition. Then, it was placed on a hot plate and maintained at a temperature of 100° C. for 3 minutes to form a thin film. After the formed colored photosensitive resin layer was cooled to 23° C., the entire surface was selectively exposed using an i-line (wavelength: 365㎚) using a photomask. At this time, an ultrahigh-pressure mercury lamp was used as the i-line light source, and the irradiation light amount was set to 150 mJ/㎠. Next, the colored photosensitive resin layer after the above-mentioned selective exposure was immersed in an aqueous solution containing 0.04% by weight of tetramethylammonium hydroxide as a developer at 23° C. and developed. Then, the average roughness (Ra - Average Roughness) value was determined using an atomic force electron microscope (manufacturing company: Park system, model name: NX10) and non-contact mode. Using the average roughness value thus obtained, evaluation was performed based on the following criteria.
<< 表面粗糙度評價基準Surface roughness evaluation standards - Ra-Ra 值value >>
小於40pm:OLess than 40pm:O
40pm以上且小於50pm:△Above 40pm and less than 50pm: △
50pm以上:XAbove 50pm:X
實驗例Experimental example 3.3. 經時黏度評價Time-lapse viscosity evaluation
對於實施例、比較例和參考例的著色感光性樹脂組合物的剛剛製造後的25℃下的黏度和在10℃的恒溫條件下保管5個月後的黏度,利用E型黏度計(博勒飛(Brookfield)公司,型號名:LVDV3T)以轉速50rpm進行測定。對於著色組合物的製造當天的黏度、即初始黏度(V1:cP)和在10℃的恒溫條件下保管5個月後的黏度(V2:cP),按照以下基本評價分散穩定性。The viscosity of the colored photosensitive resin compositions of the Examples, Comparative Examples, and Reference Examples at 25°C immediately after production and after storage for 5 months under constant temperature conditions of 10°C were measured using an E-type viscometer (Bohler Fly (Brookfield Company, model name: LVDV3T) was measured at a rotation speed of 50 rpm. The dispersion stability of the coloring composition was evaluated based on the following basic principles: the viscosity on the day of production, that is, the initial viscosity (V1: cP) and the viscosity (V2: cP) after storage for 5 months under constant temperature conditions of 10°C.
<< 經時黏度評價基準Time-lapse viscosity evaluation criteria -- 黏度的穩定性Viscosity stability >>
(V2-V1) x 100% < V1 x 0.1 x 100%:O(V2-V1) x 100% < V1 x 0.1 x 100%: O
V1 x 0.1 x 100%< (V2-V1) x 100% < V1 x 0.13 x 100%:△V1 x 0.1 x 100%< (V2-V1) x 100%< V1 x 0.13 x 100%:△
(V2-V1) x 100% > V1 x 0.13 x 100%:X(V2-V1) x 100% > V1 x 0.13 x 100%: X
[表3]
本發明中,使用藍色和紫色顏料製造體積平均粒徑為15 ~ 60nm範圍的顏料分散液,且利用其製造著色感光性樹脂組合物。透過本實驗例,確認了包含體積平均粒徑為15 ~ 60nm範圍的顏料分散液而製造的著色感光性樹脂組合物的表面粗糙度改善效果、圖案的直進性改性程度以及經時黏度穩定性。In the present invention, a pigment dispersion liquid having a volume average particle diameter in the range of 15 to 60 nm is produced using blue and purple pigments, and a colored photosensitive resin composition is produced using this. Through this experimental example, the surface roughness improvement effect, the degree of linear modification of the pattern, and the viscosity stability over time of the colored photosensitive resin composition produced by containing a pigment dispersion with a volume average particle diameter in the range of 15 to 60 nm were confirmed .
如實施例1 ~ 5所示,在使用體積平均粒徑為15 ~ 60nm範圍的顏料分散液來製造著色感光性樹脂組合物的情況下,可以確認到表面粗糙度和圖案的直進性改性效果均優異,經時黏度穩定性也得到適當維持。另一方面,如比較例1所示,在體積平均粒徑小於較佳範圍的情況下,可以確認到由於顏料粒子之間集結的聚集(aggregation)現象,經時黏度穩定性變差。另外,如比較例2 ~ 4所示,在體積平均粒徑大於較佳範圍的情況下,可以確認到雖然經時黏度穩定性維持得尚佳,但由於顏料粒子不能滲透到組合物之間,表面粗糙度改善效果明顯下降。As shown in Examples 1 to 5, when a pigment dispersion having a volume average particle diameter in the range of 15 to 60 nm is used to produce a colored photosensitive resin composition, the effect of linearly improving surface roughness and pattern can be confirmed. are excellent, and the viscosity stability over time is also appropriately maintained. On the other hand, as shown in Comparative Example 1, when the volume average particle diameter is smaller than the preferred range, it was confirmed that the viscosity stability over time deteriorates due to an aggregation phenomenon in which pigment particles aggregate. In addition, as shown in Comparative Examples 2 to 4, when the volume average particle diameter is larger than the preferred range, it can be confirmed that although the viscosity stability over time is maintained reasonably well, the pigment particles cannot penetrate between the compositions. The surface roughness improvement effect decreased significantly.
另外,本發明在使用加成有1 ~ 3個環氧乙烷基的光聚合性化合物時,不發生殘渣問題而能夠使表面粗糙度改善效果最大化,但如參考例1和2所示,在使用包含超出本申請範圍的環氧乙烷基的光聚合性化合物來製造著色感光性樹脂組合物的情況下,可以確認到表面粗糙度問題和殘渣問題改善效果降低。In addition, when the present invention uses a photopolymerizable compound to which 1 to 3 ethylene oxide groups are added, the surface roughness improvement effect can be maximized without causing residue problems. However, as shown in Reference Examples 1 and 2, When a colored photosensitive resin composition is produced using a photopolymerizable compound containing an ethylene oxide group that exceeds the scope of the present application, it is confirmed that the effect of improving the surface roughness problem and the residue problem is reduced.
綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In summary, although the present invention has been disclosed above through embodiments, they are not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention belongs can make various modifications and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the appended patent application scope.
無without
無without
無。without.
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KR1020220024484A KR20230126978A (en) | 2022-02-24 | 2022-02-24 | A colored photosensitive resin composition, a color filter manufactured from thereof and a solid state pickup device or a display device comprising the same |
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