TW202032240A - Manufacturing method of a display panel - Google Patents
Manufacturing method of a display panel Download PDFInfo
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- TW202032240A TW202032240A TW108105486A TW108105486A TW202032240A TW 202032240 A TW202032240 A TW 202032240A TW 108105486 A TW108105486 A TW 108105486A TW 108105486 A TW108105486 A TW 108105486A TW 202032240 A TW202032240 A TW 202032240A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
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Abstract
Description
本發明是有關於一種顯示面板的製作方法,且特別是有關於一種在畫素定義層上形成有遮光層的顯示面板。The present invention relates to a manufacturing method of a display panel, and particularly relates to a display panel with a light-shielding layer formed on a pixel definition layer.
近年來,相較於目前主流的液晶顯示面板,有機發光二極體(Organic light-emitting diode,OLED)顯示面板因具有高色彩飽和度、應答速度快及高對比的性能表現,逐漸吸引各科技大廠的投資目光。In recent years, compared with the current mainstream liquid crystal display panels, organic light-emitting diode (OLED) display panels have gradually attracted various technologies due to their high color saturation, fast response speed and high contrast performance. Dachang's investment vision.
一般而言,為了避免顯示面板中的導線反射來自外界的光,會透過將遮光層(Black Matrix,BM)設置在相對陣列基板的彩光基板上,以遮蔽導線,降低反射率。然而,於斜方向上大視角的條件下,有機發光二極體的光容易受到遮光層遮蔽而導致亮度大幅下降。因此,使用者於斜看時所觀察到的影像會較正看時所觀察到的影像來得暗,使得影像品質下降,降低使用者的視覺體驗。Generally speaking, in order to prevent the wires in the display panel from reflecting light from the outside, a light shielding layer (Black Matrix, BM) is arranged on the color light substrate opposite to the array substrate to shield the wires and reduce the reflectivity. However, under the condition of a large viewing angle in an oblique direction, the light of the organic light emitting diode is easily shielded by the light shielding layer, resulting in a significant decrease in brightness. Therefore, the image observed by the user when obliquely looking will be darker than the image observed when looking at it directly, which reduces the image quality and reduces the user's visual experience.
本發明的顯示面板的製作方法包括以下步驟。提供陣列基板。形成主動元件層於陣列基板上。形成畫素定義層於主動元件層上,且畫素定義層具有開口。形成第一電極於主動元件層上並重疊開口。形成發光層於第一電極上並位於開口內。形成第二電極於畫素定義層上並重疊發光層。形成覆蓋層於第二電極上,且覆蓋層具有重疊畫素定義層的第一部以及重疊開口的第二部。對覆蓋層的第一部進行曝光程序,以將第一部改質為遮光層。以及,設置彩光基板於陣列基板的對向。遮光層重疊畫素定義層。The manufacturing method of the display panel of the present invention includes the following steps. Provide array substrate. An active device layer is formed on the array substrate. A pixel definition layer is formed on the active device layer, and the pixel definition layer has openings. A first electrode is formed on the active device layer and overlaps the opening. A light emitting layer is formed on the first electrode and located in the opening. A second electrode is formed on the pixel definition layer and overlaps the light-emitting layer. A covering layer is formed on the second electrode, and the covering layer has a first part overlapping the pixel definition layer and a second part overlapping the opening. An exposure process is performed on the first part of the cover layer to modify the first part into a light-shielding layer. And, setting the color light substrate opposite to the array substrate. The shading layer overlaps the pixel definition layer.
本發明的顯示面板的製作方法包括以下步驟。提供陣列基板。形成主動元件層於陣列基板上。形成畫素定義層於主動元件層上,且畫素定義層具有開口。形成發光層於第一電極上並位於開口內。形成第二電極於畫素定義層上並重疊發光層。形成覆蓋層於第二電極上,且覆蓋層具有重疊畫素定義層的第一部以及重疊開口的第二部。形成遮光層於覆蓋層的第一部上。以及,設置彩光基板於陣列基板的對向。遮光層重疊畫素定義層。The manufacturing method of the display panel of the present invention includes the following steps. Provide array substrate. An active device layer is formed on the array substrate. A pixel definition layer is formed on the active device layer, and the pixel definition layer has openings. A light emitting layer is formed on the first electrode and located in the opening. A second electrode is formed on the pixel definition layer and overlaps the light-emitting layer. A covering layer is formed on the second electrode, and the covering layer has a first part overlapping the pixel definition layer and a second part overlapping the opening. A light shielding layer is formed on the first part of the covering layer. And, setting the color light substrate opposite to the array substrate. The shading layer overlaps the pixel definition layer.
基於上述,在本發明一實施例的顯示面板的製作方法中,由於顯示面板的遮光層可對應重疊於陣列基板上的畫素定義層上,因此可以減少發光層於斜方向上大角度所發出的光被吸收的機率。藉此,顯示面板於大視角下的亮度可被提升。此外,由於發光層於大角度的出光可被提升,因此發光層的出光角度可以增加,以提升顯示面板的開口率。另外,由於彩光基板的一側不需設置遮光層,因此可更進一步地提升顯示面板的開口率。再者,遮光層完全重疊畫素定義層並直接地覆蓋第二電極,因此遮光層可以顯著的降低顯示面板的反射率。另外,遮光層還可以將發光層於側向上的漏光吸收,減少混光及混色的機率。如此,顯示面板的製作方法可以提升顯示面板的顯示品質。此外,設置於發光層上的覆蓋層及/或透光層還可提供對發光層的保護。Based on the foregoing, in the manufacturing method of the display panel of an embodiment of the present invention, since the light shielding layer of the display panel can be overlapped on the pixel definition layer on the array substrate correspondingly, it is possible to reduce the large angle of the light emitting layer emitted from the oblique direction The probability of light being absorbed. In this way, the brightness of the display panel under a large viewing angle can be improved. In addition, since the light emitting layer at a large angle can be increased, the light emitting angle of the light emitting layer can be increased to increase the aperture ratio of the display panel. In addition, since there is no need to provide a light shielding layer on one side of the color light substrate, the aperture ratio of the display panel can be further improved. Furthermore, the light shielding layer completely overlaps the pixel definition layer and directly covers the second electrode, so the light shielding layer can significantly reduce the reflectivity of the display panel. In addition, the light-shielding layer can also absorb light leakage from the light-emitting layer in the lateral direction, reducing the probability of light mixing and color mixing. In this way, the manufacturing method of the display panel can improve the display quality of the display panel. In addition, the cover layer and/or the light-transmitting layer provided on the light-emitting layer can also provide protection for the light-emitting layer.
本發明之目的之一係為減少顯示面板中受到遮光層遮蔽的光。One of the objectives of the present invention is to reduce the light shielded by the light shielding layer in the display panel.
本發明之目的之一係為提升顯示面板於大視角下的亮度。One of the objectives of the present invention is to improve the brightness of the display panel at a large viewing angle.
本發明之目的之一係為提升顯示面板的開口率。One of the objectives of the present invention is to increase the aperture ratio of the display panel.
本發明之目的之一係為降低顯示面板的反射率。One of the objectives of the present invention is to reduce the reflectivity of the display panel.
本發明之目的之一係為提升顯示面板的顯示品質。One of the objectives of the present invention is to improve the display quality of the display panel.
本發明之目的之一係為簡化顯示面板的製作方法。One of the objectives of the present invention is to simplify the manufacturing method of the display panel.
本發明之目的之一係為降低顯示面板的製作成本。One of the objectives of the present invention is to reduce the manufacturing cost of the display panel.
本發明之目的之一係為提供對發光層的保護。One of the objectives of the present invention is to provide protection for the light-emitting layer.
本發明之目的之一係為於製程中減少對發光層的損傷。One of the objectives of the present invention is to reduce damage to the light-emitting layer during the manufacturing process.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。如本領域技術人員將認識到的,可以以各種不同的方式修改所描述的實施例,而不脫離本發明的精神或範圍。In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings. As those skilled in the art would realize, the described embodiments may be modified in various different ways without departing from the spirit or scope of the present invention.
在附圖中,為了清楚起見,放大了各元件等的厚度。在整個說明書中,相同的附圖標記表示相同的元件。應當理解,當諸如層、膜、區域或基板的元件被稱為在“另一元件上”、或“連接到另一元件”、“重疊於另一元件”時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或 “直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電連接。In the drawings, the thickness of each element and the like are exaggerated for clarity. Throughout the specification, the same reference numerals denote the same elements. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being “on”, or “connected to,” or “overlapped with, another element,” it may be directly on another element. On or connected to another element, or intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements. As used herein, "connected" can refer to physical and/or electrical connections.
應當理解,儘管術語“第一”、“第二”、“第三”等在本文中可以用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層或部分與另一個元件、部件、區域、層或部分區分開。因此,下面討論的“第一元件”、“部件”、“區域”、“層”、或“部分”可以被稱為第二元件、部件、區域、層或部分而不脫離本文的教導。It should be understood that although the terms "first", "second", "third", etc. may be used herein to describe various elements, components, regions, layers and/or parts, these elements, components, regions, and/or Or part should not be restricted by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Therefore, the “first element,” “component,” “region,” “layer,” or “portion” discussed below may be referred to as a second element, component, region, layer or portion without departing from the teachings herein.
這裡使用的術語僅僅是為了描述特定實施例的目的,而不是限制性的。如本文所使用的,除非內容清楚地指示,否則單數形式“一”、“一個”和“該”旨在包括複數形式,包括“至少一個”。“或”表示“及/或”。如本文所使用的,術語“及/或”包括一個或多個相關所列項目的任何和所有組合。還應當理解,當在本說明書中使用時,術語“包括”及/或“包括”指定所述特徵、區域、整體、步驟、操作、元件的存在及/或部件,但不排除一個或多個其他特徵、區域整體、步驟、操作、元件、部件及/或其組合的存在或添加。The terminology used here is only for the purpose of describing specific embodiments and is not limiting. As used herein, unless the content clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms, including "at least one." "Or" means "and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the related listed items. It should also be understood that when used in this specification, the terms "including" and/or "including" designate the presence of the features, regions, wholes, steps, operations, elements, and/or components, but do not exclude one or more The existence or addition of other features, regions as a whole, steps, operations, elements, components, and/or combinations thereof.
此外,諸如“下”或“底部”和“上”或“頂部”的相對術語可在本文中用於描述一個元件與另一元件的關係,如圖所示。應當理解,相對術語旨在包括除了圖中所示的方位之外的裝置的不同方位。例如,如果一個附圖中的裝置翻轉,則被描述為在其他元件的“下”側的元件將被定向在其他元件的“上”側。因此,示例性術語“下”可以包括“下”和“上”的取向,取決於附圖的特定取向。類似地,如果一個附圖中的裝置翻轉,則被描述為在其他元件“下方”或“下方”的元件將被定向為在其他元件 “上方”。因此,示例性術語“下面”或“下面”可以包括上方和下方的取向。In addition, relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship between one element and another element, as shown in the figure. It should be understood that relative terms are intended to include different orientations of the device other than those shown in the figures. For example, if the device in one figure is turned over, elements described as being on the "lower" side of other elements will be oriented on the "upper" side of the other elements. Therefore, the exemplary term "lower" may include an orientation of "lower" and "upper", depending on the specific orientation of the drawing. Similarly, if the device in one figure is turned over, elements described as "below" or "beneath" other elements will be oriented "above" the other elements. Thus, the exemplary terms "below" or "below" can include an orientation of above and below.
本文使用的“約”、“實質上”、“基本上”、或“近似”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。As used herein, "about", "substantially", "substantially", or "approximately" includes the stated value and the average value within the acceptable deviation range of the specific value determined by a person of ordinary skill in the art, taking into account all The measurement in question and the specific number of errors associated with the measurement (ie, the limitations of the measurement system). For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%.
除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of related technologies and the present invention, and will not be interpreted as idealized or excessive The formal meaning, unless explicitly defined as such in this article.
本文參考作為理想化實施例的示意圖的截面圖來描述示例性實施例。因此,可以預期到作為例如製造技術及/或公差的結果的圖示的形狀變化。因此,本文所述的實施例不應被解釋為限於如本文所示的區域的特定形狀,而是包括例如由製造導致的形狀偏差。例如,示出或描述為平坦的區域通常可以具有粗糙及/或非線性特徵。此外,所示的銳角可以是圓的。因此,圖中所示的區域本質上是示意性的,並且它們的形狀不是旨在示出區域的精確形狀,並且不是旨在限制權利要求的範圍。The exemplary embodiments are described herein with reference to cross-sectional views that are schematic diagrams of idealized embodiments. Therefore, a change in the shape of the diagram as a result of, for example, manufacturing technology and/or tolerance can be expected. Therefore, the embodiments described herein should not be interpreted as being limited to the specific shape of the area as shown herein, but include, for example, shape deviations caused by manufacturing. For example, areas shown or described as flat may generally have rough and/or non-linear characteristics. In addition, the acute angles shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to show the precise shape of the regions, and are not intended to limit the scope of the claims.
圖1為本發明一實施例的顯示面板的剖面示意圖。請參考圖1,在本實施例中,顯示面板10包括陣列基板100、主動元件層110設置於該陣列基板100上、畫素定義層120設置於該主動元件層110上,且畫素定義層120具有開口122、第一電極130設置於該主動元件層110上並於垂直陣列基板100的方向上重疊開口122、發光層140設置於第一電極130上並位於開口122內、第二電極150設置於該畫素定義層120上並重疊發光層140、遮光層162設置於該第二電極150上並重疊畫素定義層120以及彩光基板200設置於陣列基板100的對向。顯示面板10更包括封裝層170設置於遮光層162上以及絕緣層180設置於封裝層170上,且封裝層170位於遮光層162與彩光基板200之間。在本實施例中,顯示面板10例如為應用於可撓式或非可撓式的顯示面板,以下以可撓式顯示面板為例,簡單說明顯示面板10的製作方法。FIG. 1 is a schematic cross-sectional view of a display panel according to an embodiment of the invention. Please refer to FIG. 1, in this embodiment, the
圖2A至圖2E為本發明的一實施例的顯示面板的製造流程的剖面示意圖。請參考圖2A,首先,提供陣列基板100。陣列基板100例如為可撓性基板,其材質可選用有機聚合物,例如:聚醯亞胺(polyimide, PI)、聚萘二甲酸乙醇酯(polyethylene naphthalate, PEN)、聚對苯二甲酸乙二酯(polyethylene terephthalate, PET)、聚碳酸酯(polycarbonates, PC)、聚醚碸(polyether sulfone, PES)或聚芳基酸酯(polyarylate),或其它合適的材料、或前述至少二種材料之組合。然而,本發明不以此為限。在一些實施例中,當顯示面板不需具有可撓性的功能時,陣列基板100之材質可包括玻璃、石英、塑膠、不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷、或其他可適用的材料)或是其他可適用的材料。2A to 2E are schematic cross-sectional views of a manufacturing process of a display panel according to an embodiment of the invention. Please refer to FIG. 2A. First, an
接著,形成主動元件層110於陣列基板100上。舉例而言,主動元件層110可為畫素陣列設置於陣列基板100上,以使陣列基板100做為顯示面板10的畫素陣列基板。主動元件層110可為單層或多層結構,包括多個薄膜電晶體(未繪示)、多層絕緣層(未繪示)以及多條訊號線(未繪示)。為了圖示清楚以及方便說明,圖2A僅以一個膜層示意性地表示。薄膜電晶體例如為低溫多晶矽薄膜電晶體(low temperature poly-Si,LTPS)或非晶矽薄膜電晶體(amorphous Si,a-Si),但本發明不以此為限。薄膜電晶體包括閘極、半導體通道層以及與半導體通道層電性連接的源極與汲極(未繪示)。在本實施例中,半導體通道層包含非晶矽、多晶矽、微晶矽、單晶矽、有機半導體材料、氧化物半導體材料(例如:銦鋅氧化物、銦鍺鋅氧化物、或是其它合適的材料、或上述之組合)、或其它合適的材料、或含有摻雜物(dopant)於上述材料中、或上述之組合,但本發明不以此為限。閘極可使用金屬材料製作,但本發明不限於此,根據其他實施例,閘極、源極與汲極也可以使用其他適當的導電材料。例如:合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或是金屬材料與其它導電材料的堆疊層。薄膜電晶體可為頂閘極型(top gate)或底閘極型(bottom gate),但本發明不以此為限。訊號線例如為掃描線、資料線、共用電極線、電源線或其它合適的線路,本發明不以此為限。一般而言,基於導電性考量,訊號線使用金屬材料製作,但也可以使用其他適當的導電材料。例如:合金、金屬材料的氮化物、金屬材料的氧化物、金屬材料的氮氧化物、或是金屬材料與其它導電材料的堆疊層。Next, an
接著,形成畫素定義層120於主動元件層110上。畫素定義層120具有開口122,且開口122穿透過畫素定義層120以暴露出主動元件層110。在本實施例中,開口122可作為後續容置有機發光層的空間,將於稍後進行說明。畫素定義層120的材料可包括感光性聚亞醯胺材料、丙烯基材料、矽氧烷材料、酚醛樹脂材料、氧化物、氮化物或氮氧化物,但本發明不以此為限。在此需注意的是,圖2A雖僅繪示一個開口122,然而本技術領域中具有通常知識者應當能知曉,開口122的數量是由使用者的需求而定。因此,開口122的數量可以為一個、兩個、三個或更多個,而不被圖示所限制。此外,畫素定義層120的多個開口122還可以彼此對齊排列而構成一矩陣(matrix),但本發明不以此為限。Next, a
然後,形成第一電極130於主動元件層110上。其中,於垂直陣列基板100的方向上,第一電極130重疊開口122。換句話說,第一電極130位於開口122的置放空間中。在本實施例中,第一電極130電性連接至主動元件110。第一電極130的材料為導體材料,例如鋁(Al)、銀(Ag)、鉻(Cr)、銅(Cu)、鎳(Ni)、鈦(Ti)、鉬(Mo)、鎂(Mg)、鉑(Pt)、金(Au)或其組合。第一電極130可以是單層、雙層或多層結構。舉例而言,在一些實施例中,第一電極130可以是由ITO/Ag/ITO所構成的三層結構,但本發明不以此為限。在其他實施例中,第一電極130也可以是Ti/Al/Ti或是由Mo/Al/Mo所構成的三層結構。第一電極130的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第一電極130可作為發光層140的陽極(anode),但本發明不以此為限。Then, the
接著,形成發光層140於第一電極130上。發光層140設置於開口122內的置放空間。發光層140的材料例如為有機發光材料。換句話說,發光層140例如為有機發光二極體(Organic light-emitting diode,OLED)的發光層。圖2A為了方便說明及清楚表示,發光層140僅示意性地以一層結構繪示。然而,在一些實施例中,發光層140可為多層結構,包括電洞注入層(hole injection layer,HIL)、電洞傳輸層(hole transfer layer,HTL)、發光層(emission layer,EL)和電子傳輸層(electron transfer layer,ETL)。Next, a light-emitting
在一些實施例中,電洞注入層的材料例如是苯二甲藍銅、星狀芳胺類、聚苯胺、聚乙烯二氧噻吩或其他適合的材料。電洞傳輸層的材料例如是三芳香胺類、交叉結構二胺聯苯、二胺聯苯衍生物或其他適合的材料。發光層140可以是紅色有機發光層、綠色有機發光層、藍色有機發光層或是混合各頻譜的光產生的不同顏色(例如白、橘、黃等)發光層。電子傳輸層的材料可以是噁唑衍生物及其樹狀物、金屬螯合物(例如Alq3)、唑類化合物、二氮蒽衍生物、含矽雜環化合物或其他適合的材料。In some embodiments, the material of the hole injection layer is, for example, xylylene blue copper, star aromatic amines, polyaniline, polyethylene dioxythiophene, or other suitable materials. The material of the hole transport layer is, for example, triaromatic amines, cross-structured diamine diphenyl, diamine diphenyl derivatives or other suitable materials. The light-emitting
然後,形成第二電極150於畫素定義層120上。在本實施例中,第二電極150為整面地覆蓋畫素定義層120並重疊開口122以及發光層140。然而,本發明並不限於此。在其他實施例中,顯示面板也可以具有經圖案化製程形成的多個第二電極。第二電極150直接接觸發光層140。第二電極150的材料可為透明的導體材料,例如銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物或銦鍺鋅氧化物等金屬氧化物。在一些實施例中,第二電極150的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第二電極150可作為發光層140的陰極(cathode)。Then, a
接著,形成覆蓋層160於第二電極150上。覆蓋層160為整面地覆蓋並重疊於第二電極150以及畫素定義層120。在本實施例中,覆蓋層160還可重疊開口122以及發光層140。覆蓋層160具有重疊畫素定義層120的第一部160A以及重疊開口122的第二部160B。覆蓋層160的材質例如為光敏性變色材料,包括螺吡喃(spiropyrans)、螺惡嗪(spirooxazines)、二芳基乙烯(diarylethenes)或偶氮苯(azibenzenes)或其他合適的材質,本發明不以此為限。Next, a
請參考圖2B及圖2C,接著,對覆蓋層160的第一部160A進行曝光程序。舉例而言,進行曝光程序的步驟包括,先設置圖案化的罩幕PM於覆蓋層160的上方。接著,再使光束L通過圖案化的罩幕PM以曝光覆蓋層160的第一部160A。圖案化的罩幕PM於對應覆蓋層160的第二部160B之處不會使光束L通過,因此第二部160B不會被光束L曝光。在本實施例中,光束L包括遠紫外光、近紫外光、可見光波段的光束、紅外光以及電子束或其它合適的光束,本發明不以此為限。Please refer to FIG. 2B and FIG. 2C. Then, an exposure process is performed on the
值得注意的是,覆蓋層160於進行曝光程序前可呈透明無色。然而,受到光束L曝光的覆蓋層160的第一部160A會被改質而形成為遮光層162。這是由於光敏性變色材料在受到例如紫外光的曝射時,其結構中可形成共軛體系(conjugated system),以吸收可見光。因此,被改質的覆蓋層160所形成的遮光層162會產生顏色,而使遮光層162的透光率降低。此外,未受到光束L曝光的覆蓋層160的第二部160B不會被改質而保持原有的透光特性。換句話說,覆蓋層160的第二部160B可形成透光層164。相較於遮光層162,透光層164的透光率(transmittance)大於遮光層162的透光率。It is worth noting that the
在本實施例中,遮光層162重疊畫素定義層120。遮光層162可應用為黑色矩陣(black matrix,BM),除了可遮蔽第二電極150,降低顯示面板10的反射率,還可以減少發光層140於側向上的漏光,進一步減少混光及混色的機率,增加顯示面板10的顯示品質。此外,透光層164重疊開口122中的發光層140。如此,高透光率的透光層164不會影響發光層140的發光。此外,透光層164還可提供對發光層140的保護。In this embodiment, the
請參考圖2D,本實施例的顯示面板10的製作方法更包括,形成封裝層170於遮光層162以及透光層164上,用以隔離溼氣、雜質等。在一些實施例中,封裝層170可為單層或多層的結構,本發明不以此為限。封裝層170的材質可包括無機材質或有機材質。無機材質包括氮化矽或氧化鋁,但本發明不以此為限。有機材質包括丙烯酸樹脂、環氧樹脂或碳氧化矽,但本發明不以此為限。2D, the manufacturing method of the
接著,形成絕緣層180於封裝層170上。絕緣層180的材質包括填充材料(filler),例如透明膠材。舉例而言,填充材料可選用多烷基壓克力樹脂(acrylic resin)或是多烷基環氧樹脂(epoxy resin)膠材,但本發明不以此為限。在本實施例中,絕緣層180可以大面積地覆蓋陣列基板100,降低發光層140的損壞風險,且維持較佳地表面均勻度。Next, an insulating
請參考圖2E,接著,設置彩光基板200於陣列基板100的對向。在本實施例中,彩光基板200例如為蓋板,其材質可選用有機聚合物,例如:聚醯亞胺(polyimide, PI)、聚萘二甲酸乙醇酯(polyethylene naphthalate, PEN)、聚對苯二甲酸乙二酯(polyethylene terephthalate, PET)、聚碳酸酯(polycarbonates, PC)、聚醚碸(polyether sulfone, PES)或聚芳基酸酯(polyarylate),或其它合適的材料、或前述至少二種材料之組合。然而,本發明不以此為限。在一些實施例中,當顯示面板不需具有可撓性的功能時,彩光基板200之材質可包括玻璃、石英、塑膠、不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷、或其他可適用的材料)或是其他可適用的材料。Please refer to FIG. 2E. Next, the
在本實施例中,彩光基板200上還可選擇性地設置彩色濾光層220。如此,彩光基板200可做為顯示面板10的彩色濾光基板。在本實施例中,彩色濾光層220包括第一彩光圖案222、第二彩光圖案224以及第三彩光圖案226。第一彩光圖案222、第二彩光圖案224以及第三彩光圖案226可以是本技術領域中具有通常知識者所周知的用於OLED顯示面板中的任一種彩光圖案。第一彩光圖案222、第二彩光圖案224以及第三彩光圖案226的顏色可以分別是紅色、綠色、或藍色,但不以此為限。此外,第一彩光圖案222、第二彩光圖案224以及第三彩光圖案226的顏色也可以為相同、部分相同或完全不同。換句話說,第一彩光圖案222的顏色可以為紅色,第二彩光圖案224的顏色也可以為紅色,而第三彩光圖案226的顏色可以為藍色。或者,第一彩光圖案222的顏色可以為紅色,第二彩光圖案224的顏色可以為綠色,而第三彩光圖案226的顏色可以為紅色,或任何其他可能的組合,本發明不以此為限。In this embodiment, a
在本實施例中,於垂直陣列基板100的方向上,第二彩光圖案224對應重疊發光層140。如此一來,發光層140所發出的光會通過第二彩光圖案224。舉例而言,當發光層140包括白色有機發光材料時,第二彩光圖案224的顏色可以是綠色。也就是說,發光層140所發出的白光在通過第二彩光圖案224後會轉換為綠光。舉另一例而言,當發光層140包括綠色有機發光材料時,第二彩光圖案224的顏色可以是綠色,也就是說,第二彩光圖案224的顏色與發光層140的顏色相同,因此發光層140所發出的綠光在通過第二彩光圖案224後仍為綠光。In this embodiment, in the direction perpendicular to the
如圖2E所示,當彩光基板200對組至陣列基板100時,彩色濾光層220位於陣列基板100與彩光基板200之間。此外,遮光層162位於畫素定義層120與封裝層170之間。封裝層170位於遮光層162與彩光基板200上的彩色濾光層220之間。絕緣層180位於封裝層170與彩色濾光層220之間。As shown in FIG. 2E, when the
值得注意的是,在習知的設計中,畫素陣列基板上的有機發光二極體於斜方向上大角度所發出的光會被設置在彩光基板一側的遮光層遮蔽並吸收。在本實施例中,由於遮光層162可以設置於顯示面板10中,位於陣列基板100的一側上。因此可以減少發光層140於斜方向上大角度所發出的光被吸收的機率。如此一來,顯示面板10中受到遮光層162遮蔽的光可以減少,且顯示面板10於大視角下的亮度可被提升。因此,顯示面板10的顯示品質可被提升。It is worth noting that in the conventional design, the light emitted by the organic light emitting diode on the pixel array substrate at a large angle in the oblique direction will be shielded and absorbed by the light shielding layer provided on the side of the color light substrate. In this embodiment, since the
在一些實施例中,顯示面板10還可包括觸控層(未繪示)設置於絕緣層180與彩色濾光層220之間,以提供顯示面板10觸控的功能,但本發明不以此為限。In some embodiments, the
簡言之,由於本實施例的顯示面板10的遮光層162對應重疊於陣列基板100上的畫素定義層120上,而不位於彩光基板200上,因此可以減少發光層140於斜方向上大角度所發出的光被吸收的機率。藉此,顯示面板10於大視角下的亮度可被提升。此外,由於發光層140於大角度的出光可被提升,因此發光層140的出光角度可以增加,以提升顯示面板10的開口率。且於彩光基板200的一側不需設置遮光層162,可更進一步地提升顯示面板10的開口率。另外,遮光層162完全重疊畫素定義層120並直接地覆蓋第二電極150,因此遮光層162可以顯著的降低顯示面板10的反射率。另外,遮光層162還可以將發光層140於側向上的漏光吸收,減少混光及混色的機率。如此,本實施例的製作方法可以提升顯示面板10的顯示品質。此外,設置於發光層140上的覆蓋層160及/或透光層164還可提供對發光層140的保護。In short, since the light-
下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,關於省略了相同技術內容的部分說明可參考前述實施例,下述實施例中不再重複贅述。The following embodiments follow the component numbers and part of the content of the previous embodiments, where the same numbers are used to represent the same or similar components. For the omission of the same technical content, please refer to the aforementioned embodiments. The following embodiments will not Repeat it.
圖3A至圖3D為本發明的另一實施例的顯示面板的製造流程的剖面示意圖。請參考圖2B及圖3A,於本實施例的顯示面板10A(繪示於圖3D)的製作方法中,自提供陣列基板100的步驟至完成形成覆蓋層160的步驟,均與上述顯示面板10的製作方法相同,故不再贅述。在本實施例中,覆蓋層160可為光敏性變色材料或透明膠材或其他合適材料,本發明不以此為限。3A to 3D are schematic cross-sectional views of a manufacturing process of a display panel according to another embodiment of the invention. 2B and 3A, in the manufacturing method of the
請參考圖3A及圖3B,接著,形成遮光層162A於覆蓋層160的第一部160A上。在本實施例中,形成遮光層162A的步驟包括先進行一噴墨印刷(inkjet printing,IJP)程序。舉例而言,上述噴墨印刷程序的方法包括,透過印刷噴頭PH,以簡單地將遮光層材料162’噴塗於覆蓋層160的第一部160A上。遮光層材料162’的材質包括選自壓克力系、橡膠系、矽膠系的樹脂或上述樹脂的任意組合,本發明不以此為限。接著,進行一固化程序(未繪示),以將遮光層材料162’固化成遮光層162。上述固化的方法包括熱固化或光固化,本發明不以此為限。在上述的設置下,於垂直陣列基板100的方向上,遮光層162A重疊畫素定義層120。此外,覆蓋層160位於遮光層162A與第二電極150之間。如此,遮光層162A可以簡單地透過噴墨印刷,設置於陣列基板100的一側,而簡化顯示面板10A的製作方法並降低顯示面板10A的製作成本。此外,顯示面板10A的遮光層162A還可獲致與上述顯示面板10的遮光層162類似的技術功效。Please refer to FIGS. 3A and 3B. Then, a
請參考圖3C,接著,形成封裝層170於遮光層162A上以及形成絕緣層180於封裝層170上。本實施例的封裝層170與絕緣層180的材料與形成方法與上述顯示面板10的封裝層170與絕緣層180的材料與形成方法類似,故不再贅述。本實施例的封裝層170除了覆蓋遮光層162A外,還可以接觸覆蓋層160重疊開口122之處。換句話說,遮光層162A可被包封於覆蓋層160與封裝層170之間。Please refer to FIG. 3C. Next, an
請參考圖3D,然後,設置彩光基板200於陣列基板100的對向。本實施例的顯示面板10A的彩光基板200與上述顯示面板10的彩光基板200類似,故不再贅述。彩光基板200上形成有彩色濾光層220。彩色濾光層220包括第一彩光圖案222、第二彩光圖案224以及第三彩光圖案226。封裝層170位於覆蓋層160與彩光基板200上的彩色濾光層220之間。如此,顯示面板10A可獲致與上述實施例類似的技術功效。Please refer to FIG. 3D, and then, set the
圖4A至圖4B為本發明的再一實施例的遮光層的形成流程的剖面示意圖。請參考圖3A至圖3B及圖4A至圖4B,本實施例的遮光層162B與圖3B的遮光層162A相似,主要的差異在於:形成遮光層162B的步驟包括,先設置圖案化的精細金屬罩幕FM(fine metal mask,FMM)於覆蓋層160上。接著,透過蒸鍍程序VD,使遮光層材料(未繪示)通過圖案化的精細金屬罩幕FM,以將遮光層材料鍍覆於覆蓋層160的第一部160A上。然後,固化上述的遮光層材料以形成遮光層162B。在本實施例中,遮光層材料包括具有可見光波段吸收性的小分子材料,其組成包括選自含碳、氫、氧、氮及硫等元素或上述元素的任意組合的組成物,但本發明不以此為限。如此,遮光層162B可簡單地設置於覆蓋層160上,且可獲致與上述實施例類似的技術功效。4A to 4B are schematic cross-sectional views of the formation process of the light shielding layer according to still another embodiment of the present invention. Please refer to FIGS. 3A to 3B and FIGS. 4A to 4B. The light-
圖5A至圖5E為本發明的又一實施例的遮光層的形成流程的剖面示意圖。請參考圖3A至圖3B及圖5A至圖5E,本實施例的遮光層162C與圖3B的遮光層162A相似,主要的差異在於:形成遮光層162C的步驟包括應用正交光顯影技術(orthogonal photolithography)的圖案化方法。上述正交光顯影技術包括,先形成保護層310於覆蓋層160上。再形成光阻層320於保護層310上。光阻層320上可定義出重疊覆蓋層160的第一部160A的第一區320A。光阻層320還可定義出重疊覆蓋層160的第二部160B的第二區320B。在本實施例中保護層310例如為氟化光阻材料(fluorinated photoresist)。值得一提的是,氟化光阻材料不會與有機材料相互作用,因此上述正交光顯影技術除了不會影響發光層140的有機發光材料,還可提供對發光層140的保護,或於製程中減少對發光層140的損傷。光阻層320包括正型光阻以及負型光阻,其材質包括酚醛樹脂、環氧樹脂、聚異戊二烯橡膠或其他合適的材質,本發明不以此為限。以下實施例是以光阻層320為正型光阻進行說明,但不以此為限。5A to 5E are schematic cross-sectional views of the formation process of the light shielding layer according to another embodiment of the present invention. Please refer to FIGS. 3A to 3B and FIGS. 5A to 5E. The light-
接著,設置圖案化的罩幕PM於光阻層320上。然後,進行曝光程序,使光束L通過圖案化的罩幕PM曝光第一區320A中的光阻層320。光束L包括遠紫外光、近紫外光、可見光波段的光束、紅外光以及電子束或其它合適的光束,本發明不以此為限。本實施例是以紫外光為例進行說明,但不以此為限。Next, a patterned mask PM is disposed on the
請參考圖5A及圖5B,然後,進行顯影程序(未繪示)。顯影程序包括使用溶劑以移除第一區320A中被曝光的光阻層320以形成經圖案化光阻層320’。Please refer to FIG. 5A and FIG. 5B, and then proceed to the development process (not shown). The development process includes using a solvent to remove the exposed
請參考圖5B及圖5C,接著,進行蝕刻程序。上述蝕刻程序包括,以經圖案化光阻層320’為罩幕,圖案化保護層310以形成具有重疊第一區320A的容置空間312的經圖案化保護層310’。上述圖案化保護層310的方法包括使用包含氟原子的氟化溶劑(fluoro solvent)對保護層310進行蝕刻。上述氟化溶劑具有不與極性或非極性材料相互作用的特性,且具有環境友善及低毒性等優勢。在本實施例中,於垂直陣列基板100的方向上,容置空間312暴露出覆蓋層160並重疊覆蓋層160的第一部160A以及畫素定義層120。Please refer to FIG. 5B and FIG. 5C, and then proceed to the etching process. The above-mentioned etching process includes, using the patterned photoresist layer 320' as a mask, and patterning the
請參考圖5D,接著,形成遮光層材料162C’於經圖案化光阻層320’上。遮光層材料162C’例如是以物理氣相沉積(PVD)、化學氣相沉積(CVD)、濺鍍或印刷塗佈等方式形成於經圖案化光阻層320’上。此外,由於容置空間312暴露出覆蓋層160,因此部分的遮光層材料162C’還可以形成於容置空間312中並設置於覆蓋層160上。形成於容置空間312中的遮光層材料162C’重疊畫素定義層120。從另一方面來說,形成於容置空間312中的遮光層材料162C’不重疊開口122以及發光層140。Referring to FIG. 5D, next, a light
請參考圖5D及圖5E,然後,進行剝離程序。上述剝離程序包括於氮氣(N2
)環境下,以氟化溶劑沖洗經圖案化保護層310’以及覆蓋層160。因此,經圖案化保護層310’可溶於氟化溶劑中而被移除。如此,可同時移除形成於經圖案化保護層310’上的經圖案化光阻層320’以及遮光層材料162C’。Please refer to Figure 5D and Figure 5E, and then proceed to the peeling procedure. The above stripping procedure includes washing the patterned
最後,固化遮光層材料162C’以形成遮光層162C。在本實施例中,於垂直陣列基板100的方向上,遮光層162C重疊畫素定義層120以遮蔽第二電極150。如此,遮光層162C可以降低反射率,還可獲致與上述顯示面板10的遮光層162類似的技術功效。此外,本實施例的遮光層162C的製作方法還可以透過覆蓋層160保護發光層140的有機發光材料。另外,上述製作方法所使用的正交光顯影技術更使用氟化光阻材料以及氟化溶劑。因此,可於製程中提供對發光層140的保護並減少對發光層140的損傷,還具有環境友善、低毒性等綠能上的優勢。Finally, the light-
綜上所述,本發明一實施例的顯示面板的製作方法,由於可將顯示面板的遮光層製作於陣列基板的一側,且遮光層對應重疊於陣列基板上的畫素定義層上。因此,可以減少發光層於斜方向上大角度所發出的光被吸收的機率。藉此,顯示面板於大視角下的亮度可被提升。此外,由於發光層於大角度的出光可被提升,因此發光層的出光角度可以增加,以提升顯示面板的開口率。另外,由於彩光基板的一側不需設置遮光層,因此可更進一步地提升顯示面板的開口率。再者,遮光層完全重疊畫素定義層並直接地覆蓋第二電極,因此遮光層可以顯著的降低顯示面板的反射率。另外,遮光層還可以將發光層於側向上的漏光吸收,減少混光及混色的機率。如此,顯示面板的製作方法可以提升顯示面板的顯示品質。此外,設置於發光層上的覆蓋層及/或透光層還可提供對發光層的保護。In summary, in the manufacturing method of the display panel according to an embodiment of the present invention, the light-shielding layer of the display panel can be manufactured on one side of the array substrate, and the light-shielding layer correspondingly overlaps the pixel definition layer on the array substrate. Therefore, it is possible to reduce the probability that the light emitted by the light-emitting layer at a large angle in the oblique direction is absorbed. In this way, the brightness of the display panel under a large viewing angle can be improved. In addition, since the light emitting layer at a large angle can be increased, the light emitting angle of the light emitting layer can be increased to increase the aperture ratio of the display panel. In addition, since there is no need to provide a light shielding layer on one side of the color light substrate, the aperture ratio of the display panel can be further improved. Furthermore, the light shielding layer completely overlaps the pixel definition layer and directly covers the second electrode, so the light shielding layer can significantly reduce the reflectivity of the display panel. In addition, the light-shielding layer can also absorb light leakage from the light-emitting layer in the lateral direction, reducing the probability of light mixing and color mixing. In this way, the manufacturing method of the display panel can improve the display quality of the display panel. In addition, the cover layer and/or the light-transmitting layer provided on the light-emitting layer can also provide protection for the light-emitting layer.
另外,本發明的製作方法還提供曝光改質、噴墨印刷或蒸鍍的方式形成遮光層。如此,可簡單地形成遮光層,以簡化顯示面板的製作方法並降低顯示面板的製作成本。此外,本發明的製作方法更提供使用正交光顯影技術,以於製程中提供對發光層的保護並減少對發光層的損傷,還具有環境友善、低毒性等綠能上的優勢。In addition, the production method of the present invention also provides a light-shielding layer formed by exposure modification, inkjet printing or vapor deposition. In this way, the light shielding layer can be simply formed to simplify the manufacturing method of the display panel and reduce the manufacturing cost of the display panel. In addition, the manufacturing method of the present invention further provides the use of orthogonal light development technology to provide protection to the light-emitting layer and reduce damage to the light-emitting layer during the manufacturing process. It also has the advantages of environmental friendliness, low toxicity and other green energy.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be determined by the scope of the attached patent application.
10、10A:顯示面板
100:陣列基板
110:主動元件層
120:畫素定義層
122:開口
130:第一電極
140:發光層
150:第二電極
160:覆蓋層
160A:第一部
160B:第二部
162、162A、162B、162C:遮光層
162’、162C’:遮光層材料
164:透光層
170:封裝層
180:絕緣層
200:彩光基板
220:彩色濾光層
222:第一彩光圖案
224:第二彩光圖案
226:第三彩光圖案
310:保護層
310’:經圖案化保護層
312:容置空間
320:光阻層
320’:經圖案化光阻層
320A:第一區
320B:第二區
FM:精細金屬罩幕
L:光束
PH:印刷噴頭
PM:罩幕
VD:蒸鍍程序10.10A: Display panel
100: Array substrate
110: Active component layer
120: Pixel definition layer
122: open
130: first electrode
140: luminescent layer
150: second electrode
160:
圖1為本發明一實施例的顯示面板的剖面示意圖。 圖2A至圖2E為本發明的一實施例的顯示面板的製造流程的剖面示意圖。 圖3A至圖3D為本發明的另一實施例的顯示面板的製造流程的剖面示意圖。 圖4A至圖4B為本發明的再一實施例的遮光層的形成流程的剖面示意圖。 圖5A至圖5E為本發明的又一實施例的遮光層的形成流程的剖面示意圖。FIG. 1 is a schematic cross-sectional view of a display panel according to an embodiment of the invention. 2A to 2E are schematic cross-sectional views of a manufacturing process of a display panel according to an embodiment of the invention. 3A to 3D are schematic cross-sectional views of a manufacturing process of a display panel according to another embodiment of the invention. 4A to 4B are schematic cross-sectional views of the formation process of the light shielding layer according to still another embodiment of the present invention. 5A to 5E are schematic cross-sectional views of the formation process of the light shielding layer according to another embodiment of the present invention.
10:顯示面板 10: Display panel
100:陣列基板 100: Array substrate
110:主動元件層 110: Active component layer
120:畫素定義層 120: Pixel definition layer
122:開口 122: open
130:第一電極 130: first electrode
140:發光層 140: luminescent layer
150:第二電極 150: second electrode
162:遮光層 162: shading layer
164:透光層 164: light transmitting layer
170:封裝層 170: encapsulation layer
180:絕緣層 180: insulating layer
200:彩光基板 200: IPL substrate
220:彩色濾光層 220: Color filter layer
222:第一彩光圖案 222: The first IPL pattern
224:第二彩光圖案 224: The second color light pattern
226:第三彩光圖案 226: The third color light pattern
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CN109301082B (en) * | 2017-07-25 | 2021-08-20 | 上海和辉光电股份有限公司 | Display panel and display device |
TWI628639B (en) * | 2017-12-28 | 2018-07-01 | 友達光電股份有限公司 | Display panel |
CN109065754A (en) * | 2018-08-03 | 2018-12-21 | 武汉华星光电半导体显示技术有限公司 | A kind of OLED display panel and preparation method thereof |
CN109148724A (en) * | 2018-08-30 | 2019-01-04 | 上海天马微电子有限公司 | Display device and organic light emitting display panel |
CN109343735B (en) * | 2018-09-18 | 2022-08-09 | 京东方科技集团股份有限公司 | Touch display substrate, preparation method thereof and touch display device |
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2019
- 2019-02-19 TW TW108105486A patent/TWI686654B/en active
- 2019-10-11 CN CN201910964481.0A patent/CN110600529B/en active Active
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TWI686654B (en) | 2020-03-01 |
CN110600529A (en) | 2019-12-20 |
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