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TW201946719A - 可攜式同調光表面處理裝置 - Google Patents

可攜式同調光表面處理裝置 Download PDF

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Publication number
TW201946719A
TW201946719A TW107114922A TW107114922A TW201946719A TW 201946719 A TW201946719 A TW 201946719A TW 107114922 A TW107114922 A TW 107114922A TW 107114922 A TW107114922 A TW 107114922A TW 201946719 A TW201946719 A TW 201946719A
Authority
TW
Taiwan
Prior art keywords
light source
cover
device based
coherent light
finishing device
Prior art date
Application number
TW107114922A
Other languages
English (en)
Inventor
蔣安忠
林宇捷
林彥穎
林元堯
Original Assignee
國立清華大學
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 國立清華大學 filed Critical 國立清華大學
Priority to TW107114922A priority Critical patent/TW201946719A/zh
Priority to US16/116,945 priority patent/US10788662B2/en
Publication of TW201946719A publication Critical patent/TW201946719A/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/08Mirrors
    • G02B5/09Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0096Portable laser equipment, e.g. hand-held laser apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/121Mechanical drive devices for polygonal mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P7/00Arrangements for regulating or controlling the speed or torque of electric DC motors
    • H02P7/06Arrangements for regulating or controlling the speed or torque of electric DC motors for regulating or controlling an individual DC dynamo-electric motor by varying field or armature current
    • H02P7/18Arrangements for regulating or controlling the speed or torque of electric DC motors for regulating or controlling an individual DC dynamo-electric motor by varying field or armature current by master control with auxiliary power
    • H02P7/20Arrangements for regulating or controlling the speed or torque of electric DC motors for regulating or controlling an individual DC dynamo-electric motor by varying field or armature current by master control with auxiliary power using multi-position switch, e.g. drum, controlling motor circuit by means of relays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • G02B13/0005Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

一種可攜式同調光表面處理裝置,包含一外殼、一雷射光源、一光路校準模組以及一雷射掃描模組。外殼包含一光束輸出口。雷射光源設置於外殼中,並用以提供一雷射光束。光路校準模組設置於外殼中,並用以供雷射光束通過。雷射掃描模組設置於外殼中,並用以供自光路校準模組通過之雷射光束通過,且使雷射光束以線形輸出於一待處理表面。藉此,有利於可攜式同調光表面處理裝置的小型化及提升其應用廣度。
TW107114922A 2018-05-02 2018-05-02 可攜式同調光表面處理裝置 TW201946719A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW107114922A TW201946719A (zh) 2018-05-02 2018-05-02 可攜式同調光表面處理裝置
US16/116,945 US10788662B2 (en) 2018-05-02 2018-08-30 Portable surface finishing device based on coherent light source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW107114922A TW201946719A (zh) 2018-05-02 2018-05-02 可攜式同調光表面處理裝置

Publications (1)

Publication Number Publication Date
TW201946719A true TW201946719A (zh) 2019-12-16

Family

ID=68383858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107114922A TW201946719A (zh) 2018-05-02 2018-05-02 可攜式同調光表面處理裝置

Country Status (2)

Country Link
US (1) US10788662B2 (zh)
TW (1) TW201946719A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110976439B (zh) * 2019-12-24 2020-10-20 中国科学院半导体研究所 提高激光清洗表面均匀程度的激光清洗方式和设备
WO2024161449A1 (ja) * 2023-01-30 2024-08-08 日本電信電話株式会社 レーザシステム

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US3944323A (en) * 1974-12-23 1976-03-16 Xerox Corporation Variable spot size scanning system
GB8803560D0 (en) 1988-02-16 1988-03-16 Wiggins Teape Group Ltd Laser apparatus for repetitively marking moving sheet
JPH02115814A (ja) * 1988-10-25 1990-04-27 Dainippon Screen Mfg Co Ltd 光ビーム走査装置
JPH0792543B2 (ja) * 1990-03-01 1995-10-09 キヤノン株式会社 レーザ走査装置及びそれを用いた画像形成装置
US6008925A (en) * 1991-06-07 1999-12-28 Advanced Laser Technologies, Inc. Light beam scanning apparatus and method
JPH06138407A (ja) * 1992-10-30 1994-05-20 Minolta Camera Co Ltd 光ビーム走査装置
US5570183A (en) * 1995-04-24 1996-10-29 Ati Systems, Inc. Apparatus for measuring optical characteristics of a surface in two dimensions using a moving light source
US5867298A (en) 1996-12-16 1999-02-02 Eastman Kodak Company Dual format pre-objective scanner
US6023059A (en) * 1998-01-14 2000-02-08 Eastman Kodak Company Dual format pre-objective scanner
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WO2007096460A2 (en) * 2006-02-23 2007-08-30 Picodeon Ltd Oy Surface treatment technique and surface treatment apparatus associated with ablation technology
US20070245956A1 (en) * 2006-02-23 2007-10-25 Picodeon Ltd Oy Surface treatment technique and surface treatment apparatus associated with ablation technology
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GB0816308D0 (en) * 2008-09-05 2008-10-15 Mtt Technologies Ltd Optical module
TWI594828B (zh) 2009-05-28 2017-08-11 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
DE102012107040A1 (de) 2012-08-01 2014-05-28 Jenoptik Optical Systems Gmbh Achromatische Scaneinrichtung mit monochromatischem f-Theta-Objektiv
WO2015014889A1 (en) * 2013-07-30 2015-02-05 Koninklijke Philips N.V. A treatment device for area and line fractional laser treatment
CZ2013762A3 (cs) * 2013-09-30 2015-06-03 Vysoká Škola Báňská - Technická Univerzita Ostrava Způsob bezkontaktního měření vnějších rozměrů průřezů tyčového hutního materiálu a modulární rám k provádění tohoto způsobu
TWI595955B (zh) 2015-02-26 2017-08-21 兆陽真空動力股份有限公司 一種雷射加工方法
PL228001B1 (pl) * 2015-05-19 2018-02-28 Tomasz Bloch Układ odchylania wiazki promieniowania optycznego oraz urzadzenie zawierajace ten układ
JP6955664B2 (ja) 2016-10-21 2021-10-27 株式会社Ihi 表面処理装置
CN106735887A (zh) 2017-02-16 2017-05-31 上海嘉强自动化技术有限公司 一种单振镜全反射式位移调焦3d扫描光学系统

Also Published As

Publication number Publication date
US20190339512A1 (en) 2019-11-07
US10788662B2 (en) 2020-09-29

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